A spot shaping homogenizing mirror and laser processing equipment

Abstract

The present application relates to a spot shaping homogenizer and laser processing equipment, which relates to the field of laser processing. The spot shaping homogenizer includes a mirror body and a reflective mirror surface arranged at one end of the mirror body, the reflective mirror surface is inclined toward the Z direction perpendicular to the center line of the mirror body, the intersection line of the reflective mirror surface with the plane perpendicular to the Z direction forms a first intersection line, and the intersection line with the plane parallel to the Z direction forms a second intersection line, the reflective mirror surface includes a two-dimensional mirror array composed of a plurality of sub-mirrors arranged along the first intersection line and the second intersection line, the plurality of sub-mirrors are arranged into a concave arc on the first intersection line, and arranged into a concave parabola on the second intersection line, and can shape the laser beam from two mutually perpendicular dimensions to ensure that the spot formed by the reflected light has a good shaping and homogenizing effect in both dimensions. The laser processing equipment of the present application uses the spot shaping homogenizer of the present application.

Description

Technical Field

[0001] The present application relates to the field of laser processing, and in particular to a spot shaping homogenizing mirror. In addition, the present application also relates to a laser processing device. Background Art

[0002] Laser processing is a non-contact processing method that uses a laser beam to irradiate the material to be processed according to the characteristics of the material to be processed, forming a high-power density laser spot, and then performs processing operations such as cutting, surface treatment, welding, marking and drilling on the material to be processed. Laser processing has the advantages of not requiring additional tools, fast processing speed, small surface deformation, and a wide variety of processable materials, and has been widely used in the field of material processing.

[0003] The energy in the laser beam is usually Gaussian, that is, the energy density in the middle of the laser beam is higher, and the energy density at the edge is lower, which easily leads to the energy at the edge of the spot formed by the laser beam irradiating the material failing to reach the processing threshold of the material, affecting the processing effect of the laser beam. Therefore, it is usually necessary to homogenize and shape the laser beam. According to different homogenization principles, the current laser spot homogenization solutions usually include several different types, such as microlens arrays, spatial light modulators, aspherical lens groups, diffractive optical elements, and reflective array integrators.

[0004] Existing reflective array integrators are mostly made of copper substrates, and a water cooling channel is set on the back of the reflective surface for cooling, which can be used in high-power laser systems. Traditional reflective integrators can only achieve uniform energy distribution in one direction, and the energy in the other direction is still Gaussian distributed. The uniformity in the direction of Gaussian energy distribution is greatly affected by the light source and collimation conditions, and the effective utilization rate of the laser is low. The American II-VI company has launched a reflective array integrator that can solve the homogenization problem in two directions, but the reflective surface of the reflective array integrator is a free-form surface, which has high requirements for processing equipment, slow processing speed, low processing efficiency, and high processing cost. Summary of the invention

[0005] In order to ensure the homogenization effect of the light spot in two dimensions and facilitate the processing of the reflective mirror, the present application provides a light spot shaping homogenizing mirror and laser processing equipment.

[0006] The spot shaping homogenizer provided in this application adopts the following technical solution:

[0007] A spot shaping homogenizer includes a mirror body and a reflecting mirror surface arranged at one end of the mirror body, the reflecting mirror surface is inclined toward the Z direction perpendicular to the center line of the mirror body, the intersection line of the reflecting mirror surface with a plane perpendicular to the Z direction forms a first intersection line, and the intersection line with a plane parallel to the Z direction forms a second intersection line, the reflecting mirror surface includes a two-dimensional mirror array composed of a plurality of sub-mirrors arranged along the first intersection line and the second intersection line, and the plurality of sub-mirrors are arranged into a concave arc on the first intersection line and into a concave parabola on the second intersection line.

[0008] By adopting the above technical solution, a reflecting mirror surface composed of multiple sub-mirrors can be formed by utilizing multiple sub-mirrors arrays arranged in a direction perpendicular to the Z direction and in a direction parallel to the Z direction. The light at different positions of the laser beam can be reflected and gathered to the same position by sub-mirrors located at different positions on the reflecting mirror surface, and superimposed and integrated at the same position. Since the laser irradiated onto the reflective mirror surface is relatively uniform in each smaller local area, and the laser spot is formed by the integration of multiple lasers at different locations in two mutually perpendicular dimensions, the laser spot is homogenized in two dimensions, and the energy distribution in the laser spot is more uniform; by arranging multiple sub-mirrors into a concave arc on the first intersection line and into a concave parabola on the second intersection line, the laser spot can be converged in two mutually perpendicular directions, forming the shaping and homogenization of the laser spot in two mutually perpendicular directions; by utilizing multiple sub-mirrors arranged on the reflective mirror surface, the processing and control of a larger area reflective mirror surface is converted into the processing and control of multiple smaller area sub-mirrors. Compared with processing the reflective mirror surface into a free-form surface, the processing of regular sub-mirrors is simpler, and it is convenient to control the shape of the formed laser spot through the sub-mirrors.

[0009] In a specific possible implementation manner, the portion of the sub-mirror on the first intersection line forms a straight line segment, and the portion of the sub-mirror on the second intersection line forms a convex parabola segment.

[0010] By adopting the above technical solution, the sub-mirror surface which is a straight line on the first intersection line and a convex parabola on the second intersection line can shape and homogenize the laser beam in two mutually perpendicular dimensions, while making the processing of the sub-mirror surface more convenient, which is beneficial to improving the convenience of the entire reflective mirror processing.

[0011] In a specific possible implementation manner, both endpoints of the straight line segment are on the concave arc.

[0012] By adopting the above technical solution, the two end points of the straight line segment are arranged on the concave arc surface, which is conducive to controlling the tilt position of the sub-mirror on the first intersection line, thereby controlling the convergence position of the laser spot.

[0013] In a specific possible implementation manner, on the reflective mirror surface, the length of the straight line segment formed by the sub-mirrors gradually increases from the middle of the first intersection line to the edges on both sides.

[0014] By adopting the above technical solution and utilizing the setting that the straight line segments formed by the middle of the first intersection line to the sub-mirrors on both side edges are gradually lengthened, the projection lengths of the straight line segments formed by all the sub-mirrors on the first intersection line on the plane perpendicular to the center line of the mirror body can be made the same, thereby making the widths of the laser spots formed by the laser light reflected by each sub-mirror the same, which is conducive to forming a laser spot with a steep drop in energy at both side edges.

[0015] In a specific possible implementation manner, both endpoints of the convex parabola segment are on the concave parabola.

[0016] By adopting the above technical solution, by setting the two end points of the convex parabola segment on the concave parabola, the edge controls the orientation of the sub-mirror on the second intersection line, which is beneficial to controlling the position in the direction of the center line of the mirror body.

[0017] In a specific implementation manner, on the same second intersection line, the focal lengths of different convex parabola segments extending along the Z direction tend to decrease gradually, and the focal lengths of corresponding convex parabola segments on different second intersection lines are equal.

[0018] By adopting the above technical solution, by utilizing the setting that the focal length of the convex parabola segments formed by multiple sub-mirrors on the same second intersection line gradually decreases in the Z direction and the focal lengths of the convex parabola segments formed by sub-mirrors at corresponding positions on different second intersection lines are equal, the lengths of the light spots formed by parallel light rays projected along the center line of the mirror body reflected by different sub-mirrors on the second intersection line can be made the same, which is conducive to forming a laser light spot with sharply decreasing energy at the corresponding two side edges.

[0019] In a specific possible implementation manner, on the second intersection line, the lengths of different convex parabola segments extending along the Z direction gradually decrease, and the lengths of the corresponding convex parabola segments on different second intersection lines are equal.

[0020] By adopting the above technical solution, by utilizing the setting that the lengths of different convex parabolic segments on the second intersection line gradually decrease in the Z direction and the lengths of corresponding convex parabolic segments on different second intersection lines are equal, the projections of different sub-mirrors on the plane perpendicular to the center line of the mirror body can have the same length in the direction of the second intersection line, so that the laser irradiation reflected by different sub-mirrors is the same.

[0021] In a specific possible implementation manner, the symmetry axes of the convex parabola segments are all parallel to the chords of the convex parabola segments.

[0022] By adopting the above technical solution and utilizing the setting in which the axis of symmetry of the convex parabola segment is parallel to the chord of the convex parabola segment, the laser irradiated on the sub-mirror can be reflected by the convex parabola segment and converge toward the focal direction of the concave parabola while diffusing evenly to both sides of the focal point, thereby shaping the reflected light of the laser beam in the direction of the center line of the mirror body, which is beneficial to improving the uniformity of the laser spot.

[0023] In a specific possible implementation manner, the radius of the concave arc is equal to the focal length of the concave parabola.

[0024] By adopting the above technical solution and setting the radius of the concave arc equal to the focal length of the concave parabola, the laser beam reflected by the reflecting mirror can be converged to the same degree in two directions perpendicular to each other, which is beneficial for maintaining the shape of the laser spot unchanged while adjusting the size of the laser spot.

[0025] The laser processing equipment provided in the present application adopts any one of the spot shaping and homogenizing mirrors provided in the present application, and can shape and homogenize the laser spot formed by laser beam irradiation in two mutually perpendicular dimensions, thereby improving the uniformity of energy distribution in the spot, reducing the requirements for the shape of the sub-mirror surface, simplifying the processing of the reflective mirror surface, and greatly reducing the processing cost while ensuring the spot shaping and homogenizing effect.

[0026] In summary, the present application includes at least one of the following beneficial technical effects:

[0027] 1. A reflective mirror is formed by combining multiple array-arranged sub-mirrors, and relatively simple multiple sub-mirrors are used to shape and integrate different parts of the laser beam in two dimensions, so that a reflector can be used to shape the light spot in two dimensions, which can be used to shape and homogenize the light spot of higher power lasers, and the energy distribution of the light spot is uniform, and the shaping and homogenization effect is good;

[0028] 2. By using the arrangement that the sub-mirror is in a straight line shape on the first intersection line and in a convex parabola shape on the second intersection line, the difficulty of processing the sub-mirror is greatly reduced while ensuring the laser spot shaping and homogenizing effect, thereby reducing the manufacturing cost of the spot shaping and homogenizing mirror of the present application;

[0029] 3. By optimizing the size and shape of different sub-mirrors, the laser illumination reflected by each sub-mirror, the shape and energy distribution of the laser spot formed by each sub-mirror can be better controlled, thereby improving the shaping and homogenization effect of the laser spot. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 This is a schematic structural diagram of an embodiment of a light spot shaping homogenizer of the present application.

[0031] Figure 2 It is a front view of an embodiment of the light spot shaping homogenizer of the present application.

[0032] Figure 3 This is a right side view of an embodiment of a light spot shaping homogenizer of the present application.

[0033] Figure 4 This is a bottom view of an embodiment of a light spot shaping homogenizer of the present application.

[0034] Figure 5 for Figure 3 Sectional view in the middle AA direction.

[0035] Figure 6 for Figure 5 A partial enlarged view of part C in the middle.

[0036] Figure 7 for Figure 4 Cross-sectional view along the middle BB.

[0037] Figure 8 This is a working principle diagram of an embodiment of the light spot shaping homogenizer of the present application.

[0038] Fig. 9 This is a light spot simulation diagram of an embodiment of the light spot shaping homogenizer of the present application.

[0039] Explanation of the accompanying drawings: 1, mirror body; 2, reflecting mirror surface; 201, sub-mirror surface; 21, first intersection line; 211, concave circular arc; 212, straight line segment; 22, second intersection line; 221, concave parabola; 222, convex parabola segment. DETAILED DESCRIPTION

[0040] The specific implementation of the present application is described in detail below in conjunction with the accompanying drawings. It should be understood that the specific implementation described here is only used to illustrate and explain the present application, and is not used to limit the present application.

[0041] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "disposed" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0042] In this specification, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or suggesting relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the said features.

[0043] An embodiment of the spot shaping homogenizer of the present application is as follows: Figures 1 to 7 As shown, it includes a mirror body 1 and a reflecting mirror surface 2.

[0044] The mirror body 1 is made of a cylindrical base material, and the material is oxygen-free copper. Of course, other metal materials with good reflective properties and thermal conductivity can also be used. The centerline direction of the cylindrical mirror body 1 is set to the X direction. A water cooling cavity can also be provided inside the mirror body 1. Circulating water is injected into the water cooling cavity through a cooling water path to cool the mirror body 1 by water, which can prevent the temperature of the mirror body 1 from increasing under laser irradiation, so that the mirror body 1 can be used in high-power laser processing products, thereby improving the applicability of the spot shaping homogenizer of the present application.

[0045] The end face of one end of the mirror body 1 is set to be inclined toward one side of the center line of the mirror body 1, and the inclined end face is polished to form a smooth, highly reflective reflective mirror surface 2. The reflective mirror surface 2 is set to be inclined with respect to the center line of the mirror body 1, and can reflect the laser that is translated and shot toward the reflective mirror surface 2 in the direction of the center line of the mirror body 1 to the side of the mirror body 1, and irradiate it onto the material to be processed for material processing. The side perpendicular to the center line of the mirror body 1 to which the reflective mirror surface 2 is inclined is set as direction Z, and the direction perpendicular to both direction X and direction Z is set as direction Y. The plane determined by direction X and direction Y intersects with the reflective mirror surface 2 to form a first intersection line 21; the plane determined by direction X and direction Z intersects with the reflective mirror surface 2 to form a second intersection line 22.

[0046] A plurality of sub-mirrors 201 are formed on the reflective mirror surface 2, and each sub-mirror surface 201 is an independent smooth curved surface, which can individually reflect and shape the light irradiated on each sub-mirror surface 201. The plurality of sub-mirrors 201 are arranged in an array shape in the dimension of the first intersection line 21 and the dimension of the second intersection line 22, so as to superimpose the light irradiated on different areas of the reflective mirror surface 2, and integrate the energy of the light to homogenize the light spot.

[0047] Among them, in the direction of the first intersection line 21, the envelope formed by the arrangement of multiple sub-mirrors 201 is an inward concave arc 211 that is concave toward the inside of the mirror body 1. The light parallel to the X direction is irradiated onto the reflective mirror surface 2. After being reflected by different sub-mirrors 201 in the direction of the first intersection line 21, the reflected light is offset and overlapped in the Y direction. The light irradiated onto different parts of the reflective mirror surface 2 is integrated near the center of the inward concave arc 211 after being reflected by multiple sub-mirrors 201, so that the energy distribution of the light spot formed by the light irradiation in the Y dimension is more uniform, thereby improving the shaping and homogenization effect of the light spot in the Y dimension. In the direction of the second intersection line 22, the envelope formed by the arrangement of multiple sub-mirrors 201 is a concave parabola 221 that is concave toward the inside of the mirror body 1. The light parallel to the X direction is irradiated onto the reflective mirror surface 2. After being reflected by different sub-mirrors 201 in the direction of the second intersection line 22, the reflected light is offset and overlapped in the X direction. The light irradiated onto different parts of the reflective mirror surface 2 is integrated at a position near the focus of the concave parabola 221 after being reflected by multiple sub-mirrors 201, so that the energy distribution of the light spot formed by the light irradiation in the X dimension is more uniform, thereby improving the shaping and homogenizing effect of the light spot in the X dimension.

[0048] In this way, the light can be converged and the light spot can be homogenized in two mutually perpendicular dimensions, so that the light spot can form a better shaping and homogenization effect in both the X dimension and the Y dimension, forming a homogenized laser light spot with a set shape and size.

[0049] The spot shaping and homogenizing mirror of the present application only requires a golden reflector to complete the shaping and homogenizing of the spot in two mutually perpendicular dimensions. The homogenizing mirror does not contain non-metallic light-transmitting structures and moving parts, and is more able to withstand high-power laser irradiation, so that the spot shaping and homogenizing mirror of the present application can be used in higher-power laser processing equipment and has a wider range of applications.

[0050] In some embodiments of the spot shaping homogenizer of the present application, such as Figures 5 to 7 As shown, the intersection line formed by the plane determined by the direction X and the direction Y and the sub-mirror surface 201 is a straight line segment, and the first intersection line 21 is formed by connecting the straight line segments 212 formed by the intersection of multiple sub-mirrors 201 and the plane determined by the direction X and the direction Y. Figure 8 As shown, after the light irradiated on the reflecting mirror surface 2 is reflected by the sub-mirror surface 201, the light reflected by the same sub-mirror surface 201 does not gather or scatter in the Y dimension, but only changes the irradiation direction; the light reflected by different sub-mirrors 201 gathers toward the center of the inward concave arc 211 in the Y dimension, the reflected light spots are superimposed on each other, and the energy of the light is integrated with each other to form a homogenized light spot with a set size and shape in the Y dimension.

[0051] At the same time, the intersection line formed by the plane determined by the directions X and Z and the sub-mirror surface 201 is an outward convex parabola segment 222, and the second intersection line 22 is formed by the outward convex parabola segments 222 formed by the intersection of multiple sub-mirrors 201 and the plane determined by the directions X and Z. Figure 8 As shown, after the light irradiated on the reflective mirror surface 2 is reflected by the sub-mirror surface 201, the light reflected by the same sub-mirror surface 201 is diffused to a certain extent in the X dimension, and the light reflected by different sub-mirrors 201 is gathered in the X dimension toward the focal direction of the inward concave parabola 221, the reflected light spots are superimposed on each other, and the energy of the light is integrated with each other to form a homogenized light spot with a set size and shape in the X dimension.

[0052] Combining the two, such as Fig. 9 As shown, after the light irradiated on the reflective mirror surface 2 is reflected by the plurality of sub-mirrors 201 arranged in an array, a square or rectangular light spot is formed which is shaped and homogenized in two mutually perpendicular dimensions, the X dimension and the Y dimension.

[0053] Since the multiple sub-mirrors 201 are straight lines on the first intersection line 21 and are convex parabolas on the second intersection line 22, the sub-mirrors 201 can be formed by a processing tool with a straight line envelope moving along a parabolic trajectory, or by a processing tool with a parabolic envelope moving along a straight line direction. The processing is more convenient and overcomes the defect of difficult processing of free-form surface reflective surfaces.

[0054] In a preferred embodiment of the spot shaping homogenizer of the present application, Figure 5 and Figure 6 As shown, in the direction of the first intersection line 21, the two side edges of the sub-mirror 201 are arranged on the concave circular envelope surface, so that the two endpoints of the straight line segment 212 formed by the intersection of the sub-mirror 201 and the plane determined by the direction X and the direction Y are both located on the concave arc 211, and the specific position of the straight line segment 212 is determined by the two endpoints of the straight line segment 212, so that the position of the sub-mirror 201 is determined more accurately.

[0055] As a specific implementation of the spot shaping homogenizer of the present application, Figure 5 As shown, on all first intersection lines 21 formed by the intersection of the reflective mirror surface 2 and the plane determined by the direction X and the direction Y, the length l2 of the straight line segment 212 biased toward the edge of the first intersection line 21 is greater than the length l1 of the straight line segment 212 biased toward the middle of the first intersection line 21. That is to say, among all the sub-mirrors 201 arranged in the Y direction, the width of the sub-mirror surface 201 gradually increases from the middle to the edge of the reflective mirror surface 2. But at the same time, the projection lengths of all the straight line segments 212 on the straight line parallel to the Y direction are equal, so that it can be ensured that the light transmitted to the reflective mirror surface 2 in parallel to the X direction has the same illumination projected on each sub-mirror surface 201 in the Y dimension.

[0056] In some embodiments of the spot shaping homogenizer of the present application, such as Figure 7 As shown, in the direction of the second intersection line 22 formed by the intersection of the plane determined by the direction X and the direction Z and the reflective mirror surface 2, the two side edges of the sub-mirror surface 201 are arranged on the envelope surface of the concave parabola 221, so that the two endpoints of the convex parabola segment 222 formed by the intersection of the sub-mirror surface 201 and the plane determined by the direction X and the direction Z are both located on the concave arc 211, so that the sub-mirror surface 201 can be arranged in the concave parabola shape in the direction of the second intersection line 22, and the position of the sub-mirror surface 201 in the direction of the second intersection line 22 can be conveniently controlled to ensure that the light irradiated on the reflective mirror surface 2 is better gathered and overlapped in the X direction after being reflected by the reflective mirror surface 2.

[0057] In a preferred embodiment of the spot shaping homogenizer of the present application, Figure 7 As shown, on the second intersection line 22 formed by the intersection of the same plane determined by the direction X and the direction Z and the reflective mirror surface 2, the focal lengths of the convex parabolic segments 222 formed by different sub-mirrors 201 are different, and at different positions of the second intersection line 22 extending along the Z direction, the focal lengths of the convex parabolic segments 222 show a gradually decreasing trend, that is, the closer to the other end of the mirror body 1 on the reflective mirror surface 2, the longer the focal length of the convex parabolic segment 222, so that the light rays irradiated onto the reflective mirror surface 2 along the parallel X direction, when reaching the convergence position after being reflected by different sub-mirrors 201, the lengths of the light spots formed in the X direction tend to be consistent.

[0058] On a plurality of different second intersection lines 22 formed by the intersection of different planes determined by the direction X and the direction Z with the reflective mirror surface 2, the focal lengths of the convex parabolic segments 222 formed by the sub-mirrors 201 at corresponding positions are equal, which is also beneficial to ensuring the consistency of the lengths of the light spots formed by the light rays parallel to the X direction reflected by different sub-mirrors 201 on the reflective mirror surface 2 in the X direction.

[0059] As a specific implementation of the spot shaping homogenizer of the present application, Figure 7 As shown, on the second intersection line 22 formed by the intersection of the same plane determined by the direction X and the direction Z and the reflective mirror surface 2, as the position of the convex parabola segment 222 on the second intersection line 22 changes along the Z direction, the arc length of the convex parabola segment 222 shows a trend of gradually decreasing. That is, the closer to the end of the reflective mirror surface 2 that is farther away from the other end of the mirror body 1, the longer the arc length of the convex parabola segment 222 is, and the closer to the end of the reflective mirror surface 2 that is farther away from the other end of the mirror body 1, the shorter the arc length of the convex parabola segment 222 is.

[0060] On a plurality of different second intersection lines 22 formed by the intersection of different planes determined by the direction X and the direction Z with the reflective mirror surface 2, arc lengths of the convex parabolic segments 222 formed by the sub-mirrors 201 at corresponding positions are equal.

[0061] In this way, the projections of all sub-mirrors 201 located at different positions on the reflective mirror surface 2 along the X direction have equal lengths in the Z direction. When light is irradiated onto the reflective mirror surface 2 along the X direction parallel to the X direction, the luminous flux irradiated onto different sub-mirrors 201 is equal, which is beneficial to ensure the consistency of the light spot energy formed by reflection from different sub-mirrors 201.

[0062] In some embodiments of the light spot shaping homogenizer of the present application, the convex parabola segment 222 formed by the intersection of all sub-mirrors 201 on the reflective mirror surface 2 and the plane determined by the direction X and the direction Z has a symmetry axis that is parallel to the straight line formed by connecting the two end points of the convex parabola segment 222, that is, parallel to the chord of the convex parabola segment 222. Moreover, the focus of each convex parabola segment 222 is located on the perpendicular bisector of the chord of the convex parabola segment 222. In this way, it can be ensured that after the light parallel to the X direction is irradiated on the sub-mirror surface 201, the reflected light converges in the direction of the focus of the concave parabola 221, and the reflected light is uniformly diffused to both sides of the focus with the focus of the concave parabola 221 as the center, so as to ensure the uniformity of the light spot formed by the reflected light in the X direction, and ensure the shaping and homogenization effect of the light spot in the X dimension.

[0063] In some embodiments of the light spot shaping homogenizer of the present application, the radius length of the concave arc 211 formed by arranging the multiple sub-mirrors 201 on the reflector surface 2 on the first intersection line 21 is equal to the focal length of the concave parabola 221 formed by arranging the multiple sub-mirrors 201 on the second intersection line 22. In this way, the light parallel to the X direction can be irradiated onto the reflector surface 2, and after being reflected by the multiple sub-mirrors 201 on the reflector surface 2, the convergence degree in the X direction is the same as the convergence degree in the Y direction, which is conducive to ensuring the consistency of the shape of the light spot formed.

[0064] The laser processing equipment of the present application uses the spot shaping homogenizer of any embodiment of the present application, and also has the advantages of the spot shaping homogenizer of the corresponding embodiment.

[0065] In the description of the present invention, the description with reference to the terms "one embodiment", "specific embodiment", "preferred embodiment" and the like means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In the present invention, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0066] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A spot shaping homogenizer, comprising a mirror body (1) and a reflective mirror surface (2) arranged at one end of the mirror body (1), wherein the reflective mirror surface (2) is inclined in a Z direction perpendicular to the center line of the mirror body (1), and the intersection line of the reflective mirror surface (2) with a plane perpendicular to the Z direction forms a first intersection line (21), and the intersection line of the reflective mirror surface (2) with a plane parallel to the Z direction forms a second intersection line (22), characterized in that: The reflective mirror surface (2) comprises a two-dimensional mirror surface array composed of a plurality of sub-mirror surfaces (201) arranged along the first intersection line (21) and the second intersection line (22); the plurality of sub-mirror surfaces (201) are arranged to form an inwardly concave arc (211) on the first intersection line (21) and to form an inwardly concave parabola (221) on the second intersection line (22); portions of the sub-mirror surfaces (201) on the first intersection line (21) form straight line segments (212); and on the reflective mirror surface (2), the length of the straight line segments (212) formed by the sub-mirror surfaces (201) gradually increases from the middle of the first intersection line (21) to the edges on both sides.

2. The light spot shaping homogenizer according to claim 1, characterized in that: The portion of the sub-mirror surface (201) on the second intersection line (22) forms an outwardly convex parabola segment (222).

3. The light spot shaping homogenizer according to claim 1, characterized in that: Both endpoints of the straight line segment (212) are on the concave circular arc (211).

4. The light spot shaping homogenizer according to claim 2, characterized in that: Both endpoints of the convex parabola segment (222) are on the concave parabola (221).

5. The light spot shaping homogenizer according to claim 4, characterized in that: On the same second intersection line (22), the focal lengths of different convex parabola segments (222) have a tendency to gradually decrease as they extend along the Z direction, and the focal lengths of corresponding convex parabola segments (222) on different second intersection lines (22) are equal.

6. The light spot shaping homogenizer according to claim 5, characterized in that: On the second intersection line (22), the lengths of different convex parabola segments (222) extending along the Z direction gradually decrease, and the lengths of the corresponding convex parabola segments (222) on different second intersection lines (22) are equal.

7. The light spot shaping homogenizer according to claim 4, characterized in that: The symmetry axes of the outwardly convex parabola segments (222) are all parallel to the chord of the outwardly convex parabola segments (222).

8. The light spot shaping homogenizer according to any one of claims 1 to 7, characterized in that: The radius of the concave circular arc (211) is equal to the focal length of the concave parabola (221).

9. A laser processing device, characterized in that: It comprises a spot shaping homogenizing mirror according to any one of claims 1 to 8.

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