Dust removal device

Abstract

The present application provides a kind of dust removal device that can realize miniaturization and energy saving, and can reliably carry out the dust removal of workpiece.It is the dust removal device (1) for removing dust adhered to the surface of workpiece (W), with: housing (10);Dust removal roller (20), is rotatably supported in housing (10) around rotation axis;Driving source, rotates and drives dust removal roller (20), roller groove (22) is formed on the surface of dust removal roller (20) along rotation axis, housing (10) has receiving part (11) receiving dust removal roller (20) and opening part (12) making receiving part (11) open to the surface of workpiece (W), by the concomitant airflow of the rotation of dust removal roller (20) is blown to the surface of workpiece (W) via opening part (12), dust is separated from the surface of workpiece (W).

Description

Technical Field

[0001] This invention relates to a dust removal device. Background Technology

[0002] To improve the yield of workpieces such as electronic substrates or optical films, dust removal devices are widely used to remove dust adhering to the surface of the workpieces. Dust removal devices are of two types: contact and non-contact. When the dust removal object is electronic substrates or optical films, non-contact dust removal devices are generally used to suppress the reduction in product yield caused by minor defects.

[0003] As a conventional non-contact dust removal device, it is known to use a blower to blow air from a nozzle onto the surface of the workpiece, causing dust to float up, and then suck it in using a suction nozzle. For the purpose of removing dust particles approximately 0.1 mm in size that are visible to the naked eye, such a dust removal device is practically sufficient.

[0004] However, for workpieces such as electronic substrates or optical thin films, the pursuit of higher performance and finer surfaces in recent years has led to a demand for the removal of even finer dust particles. Since the finer the dust particles, the smaller their surface area, it is necessary to increase the dynamic pressure used for moving and suctioning the dust. However, the current situation is that for extremely small dust particles (e.g., below 0.005 mm), even using large blowers to increase dynamic pressure cannot achieve sufficient dust removal efficiency, thus failing to completely improve the reduced product yield.

[0005] One possible reason for this is that fine dust particles exist in a boundary layer formed on the surface of the workpiece. That is, through the conveying of the workpiece or the blowing of air onto the workpiece, a boundary layer with a thickness of about 0.01 to 0.1 mm is formed on the surface of the workpiece due to the viscous resistance of the air, covering the fine dust particles. Therefore, the air blown onto the workpiece flows along the surface of the boundary layer, which may not help remove the fine dust particles.

[0006] Therefore, a dust removal device 50 is disclosed in Patent Document 1, such as Figure 10 As shown, the configuration involves using an ultrasonic generator 51 with a curved structure to eject ultrasonic air from the ejector nozzle 52 onto the sheet 53, thereby breaking the boundary layer formed on the surface of the sheet 53, peeling dust off the sheet 53, and drawing it into the negative pressure chamber 55 from the dust inlet 54.

[0007] Existing technical documents

[0008] Patent documents

[0009] Patent Document 1: Japanese Patent Application Publication No. 10-309553 Summary of the Invention

[0010] Technical problem to be solved by the invention

[0011] However, the dust removing device 50 disclosed in Patent Document 1 requires a high-pressure and large-air-volume air blower in order to compensate for the pressure loss when the supply air passes through the labyrinth structure of the ultrasonic wave generator 51 and to reliably break the boundary layer, and thus there is a problem in that the noise of the air blower becomes large and the installation space easily becomes excessively large, and there is even a problem in that the manufacturing cost and the operation cost become high.

[0012] Further, in the case where the manufacturing or inspection of a workpiece such as an electronic substrate or an optical film, which is a dust removal target, is performed in a clean room, in order to appropriately maintain the air flow in the clean room, it is necessary to adjust the suction and exhaust balance of the dust removing device 50, but since a large air volume is blown out from the blowout nozzle 52, there is a problem in that such balance adjustment easily becomes difficult.

[0013] Furthermore, in the case where the width of the workpiece that is a dust removal target is large, the blowing of the ultrasonic air easily becomes non-uniform in the width direction, and thus it is difficult to reliably perform dust removal on the entire surface of the workpiece.

[0014] Therefore, an object of the present application is to provide a dust removing device that can achieve downsizing and energy saving and can reliably perform dust removal of a workpiece.

[0015] Solution for solving the above technical problem

[0016] The object of the present application is achieved by a dust removing device that removes dust adhering to the surface of a workpiece, comprising: a housing; a dust removing roller rotatably supported in the housing around a rotation axis; a drive source that rotationally drives the dust removing roller, a plurality of roller grooves composed of fine grooves having a cross-sectional area of 0.03 to 0.3 mm 2 2 are formed on the surface of the dust removing roller along the rotation axis, the housing has a housing portion that houses the dust removing roller and an opening portion that opens the housing portion toward the surface of the workpiece, and a contraction portion is formed in the housing portion on the upstream side of the rotation direction of the dust removing roller than the opening portion, the contraction portion gradually reduces the gap between the surface of the dust removing roller and the wall surface of the housing portion toward the opening portion, the contraction portion compresses the accompanying airflow accompanying the rotation of the dust removing roller, the pressure of the accompanying airflow is reduced at the timing when the roller grooves are exposed from the contraction portion to the opening portion, and thus the airflow blown to the surface of the workpiece through the opening portion is made to pulsate, and the dust is detached from the surface of the workpiece.

[0017] In this dust removal device, it is preferable that a plurality of opposing grooves, consisting of fine grooves opposite to the roller groove, are formed on the wall surface of the contraction section along the rotation axis. Preferably, the plurality of opposing grooves are formed in a stepped shape with adjacent sidewalls orthogonal to each other, or preferably, the sidewall of the opposing groove on the downstream side in the rotation direction of the dust removal roller extends toward the axis of the dust removal roller.

[0018] Preferably, the housing further comprises: a suction section capable of suctioning dust detached from the workpiece surface on the downstream side of the dust removal roller in the rotation direction relative to the opening; and a communicating section connecting the interior of the receiving section to the exterior of the housing on the upstream side of the dust removal roller in the rotation direction relative to the opening. In this configuration, preferably, the minimum gap from the edge of the opening on the downstream side of the dust removal roller to the surface of the dust removal roller is larger than the minimum gap from the edge of the opening on the upstream side of the dust removal roller in the rotation direction to the surface of the dust removal roller. Furthermore, preferably, the communicating section opens relative to the contraction section at a position adjacent to the upstream side of the dust removal roller in the rotation direction.

[0019] Preferably, the minimum gap between the surface of the dust removal roller, which is opposed to the workpiece through the opening, and the workpiece surface is 0.01 to 0.5 mm.

[0020] Invention Effects

[0021] The dust removal device according to the present invention can be miniaturized and energy-saving, and can reliably remove dust from workpieces. Attached Figure Description

[0022] Figure 1 This is a top view of a dust removal device according to an embodiment of the present invention.

[0023] Figure 2 yes Figure 1 AA sectional view.

[0024] Figure 3 yes Figure 1 A top view of the main parts of the dust removal device shown.

[0025] Figure 4 yes Figure 2 Enlarged view of the main parts.

[0026] Figure 5 yes Figure 4 Enlarged view of the main parts.

[0027] Figure 6 It is shown Figure 3 A top view of a modified example of the main part shown.

[0028] Figure 7 It is shown Figure 4 A cross-sectional view of a modified example of the main part shown.

[0029] Figure 8 is an enlarged sectional view showing another modification of the main part shown in Figure 4

[0030] Figure 9 is a sectional view showing still another modification of the main part shown in Figure 4

[0031] Figure 10 is a sectional view of a conventional dust removing device. DETAILED DESCRIPTION

[0032] Hereinafter, an embodiment of the present application will be described with reference to the drawings. Figure 1 is a plan view of a dust removing device of an embodiment of the present application, Figure 2 is an A-A sectional view of Figure 1 As shown in Figure 1 and Figure 2 The dust removing device 1 is provided with a housing 10, a dust removing roller 20 housed in the housing 10, and a drive source 30 that rotates and drives the dust removing roller 20, and is capable of efficiently removing dust (particularly, fine dust having a size of 0.005 mm or less) adhering to the surface of a workpiece W that is a dust removing target. The drive source 30 is provided with, for example, a motor using electricity or compressed air as a power source and a reduction gear mechanism.

[0033] The dust removing roller 20 is rotatably supported within the housing 10 around a horizontal rotation axis 21. As shown in the plan view of Figure 3 On the surface of the dust removing roller 20, a plurality of (for example, 100 to 1000) roller grooves 22 composed of fine grooves of a minute cross section extending in parallel with the axis of the rotation axis 21 are formed at equal intervals in the circumferential direction. The cross sectional shape of the roller grooves 22 is triangular in this embodiment, but can be rectangular or semicircular or other shapes. As shown in Figure 1 The length of the lengthwise direction (rotation axis direction) of each roller groove 22 is preferably at least greater than the width of the workpiece W, and in this embodiment, is formed in the entire lengthwise direction of the dust removing roller 20 that is longer than the width of the workpiece W.

[0034] ​​The housing 10 is composed of a cuboid housing, and the lower portion of the main body 10a is covered with flat plate-shaped bottom covers 10b, 10c to constitute. The housing 10 is provided with: a housing portion 11 composed of a cylindrical space that houses the dust removal roller 20 with a gap; an opening portion 12 formed on the lower surface of the housing 10 and opening the surface of the housing portion 11 toward the surface of the workpiece W; a contraction portion 13 formed between the surface of the dust removal roller 20 and the wall surface of the housing portion 11; a suction portion 15 capable of sucking dust that has separated from the surface of the workpiece W; and a communication portion 16 that communicates the housing portion 11 with the outside of the housing 10. The opening portion 12 is formed between the two bottom covers 10b, 10c of the housing 10.

[0035] The suction portion 15 and the communication portion 16 are composed of flow paths formed in the housing 10. The suction portion 15 is connected to a suction port of a vacuum pump (not shown) and sucks the downstream side of the dust removal roller 20 in the direction of rotation C in the vicinity of the opening portion 12. The communication portion 16 is formed on the upstream side of the dust removal roller 20 in the direction of rotation C more than the opening portion 12 so as to be able to maintain the suction by the suction portion 15. The suction portion 15 is formed with a plurality of (three in this embodiment) at equal intervals in the length direction of the dust removal roller 20. The number of the suction portion 15 can be appropriately set according to the length of the dust removal roller 20, and can also be singular. The communication portion 16 is formed in the center in the length direction of the dust removal roller 20, but can also be formed at a position deviated from the center in the length direction.

[0036] Figure 4 is a main part of Figure 2 enlarged view. As Figure 4 indicated, the contraction portion 13 is formed on the upstream side of the dust removal roller 20 in the direction of rotation C more than the opening portion 12. The wall surface of the housing portion 11 in which the contraction portion 13 is formed is formed in a cross-sectional circular arc shape, and a counter groove 14 composed of a fine groove extending in parallel with the axis of the rotation axis of the dust removal roller 20 and opposing the roll groove 22 is formed with a plurality of gaps in the direction of rotation C of the dust removal roller 20. The cross-sectional shape of the counter groove 14 is triangular in this embodiment, but can also be rectangular or semicircular or other shapes. The length of the counter groove 14 is preferably greater than the width of the workpiece W.

[0037] The curvature of the cross-sectional circular arc shape of the contraction portion 13 is different from the curvature of the surface of the dust removal roller 20, whereby, in the case where the counter groove 14 and the roll groove 22 are not assumed to be present, the contraction portion 13 is formed so as to gradually decrease the gap between the surface of the dust removal roller 20 and the wall surface of the housing portion 11 toward the opening portion 12.

[0038] Next, the operation of the dust removal device 1 having the above-described configuration will be described. As Figure 1 and Figure 2As shown, the dust removing device 1 of the present embodiment is disposed in the vicinity of the sheet-shaped workpiece W that is continuously conveyed in the arrow B direction along the upper surface of the flat plate-shaped support plate P in a manner that the opening portion 12 opposes the surface (upper surface) of the workpiece W, and removes dust and the like adhering to the surface of the workpiece W. The workpiece W can exemplify an electronic substrate or an optical film, but can also be other products and the like for which adhesion of fine dust becomes a problem.

[0039] If the dust removing roller 20 is rotationally driven in the arrow C direction, a following airflow that accompanies the rotation of the dust removing roller 20 is generated in the housing portion 11. This following airflow is blown to the surface of the workpiece W via the opening portion 12 after passing through the contraction portion 13. The surface peripheral speed of the dust removing roller 20 is not necessarily limited, but in order to generate a high-speed following airflow, it is preferable to be 25 m / sec or more.

[0040] The following airflow generated by the rotation of the dust removing roller 20 is compressed when passing through the contraction portion 13, but since the roller groove 22 is formed on the surface of the dust removing roller 20, the pressure of the following airflow decreases at the timing when the roller groove 22 is exposed from the contraction portion 13 to the opening portion 12 by the rotation of the dust removing roller 20. Thus, it is possible to make the airflow blown to the surface of the workpiece W pulsate, and therefore even in a case where fine dust adhering to the workpiece W exists inside a boundary layer formed by the surface of the workpiece W, it is possible to easily perform the breaking or peeling of the boundary layer caused by the blowing of the airflow, and to reliably make the fine dust float from the surface of the workpiece W and detach. By performing suction using the suction portion 15, it is possible to reliably remove the dust detached from the surface of the workpiece W from the surface of the workpiece W.

[0041] If Figure 4 If the cross-sectional area of the roller groove 22 shown is too large, most of the pressure of the following air compressed by the contraction portion 13 is released by the roller groove 22, and on the other hand, if it is too small, the meaning of forming the roller groove 22 is weak, and thus it is difficult to generate an effective pulsating airflow in either case. Therefore, the cross-sectional area of the roller groove 22 is preferably 0.03 to 0.3 mm 2 , and more preferably 0.05 to 0.1 mm 2 .

[0042] The dust removing device 1 of the present embodiment is formed with a plurality of opposing grooves 14 in the wall surface of the housing portion 11 that forms the contraction portion 13, and thus by the synergistic effect with the roller groove 22 of the dust removing roller 20, it is possible to more reliably generate a pulsating airflow. The cross-sectional area of the opposing groove 14 is preferably 0.03 to 0.3 mm 2 , and more preferably 0.05 to 0.1 mm 2The cross-sectional areas of the opposing grooves 14 can be the same, but preferably they are smaller as they are further downstream in the rotation direction of the dust removal roller 20. In addition, the opposing grooves 14 of the receiving part 11 are not necessary in this invention, and the wall surface of this part can also be a smooth curved surface without any bumps or depressions.

[0043] like Figure 4 As shown, if the minimum gap H1 formed between the surface of the dust removal roller 20 opposite the opening 12 and the surface of the workpiece W is too large, the pressure near the surface of the workpiece W will decrease, increasing the likelihood that the fine dust adhering to the workpiece W cannot be effectively removed and sucked up. Therefore, the minimum gap H1 is preferably reduced to a level that does not hinder the smooth transport of the workpiece W. Specifically, the minimum gap H1 is preferably 0.01 to 0.5 mm, more preferably 0.05 to 0.1 mm. The support plate P supporting the back (lower surface) side of the workpiece W can prevent the vibration of the workpiece W caused by the blowing of pulsating airflow and can reliably maintain the aforementioned minimum gap H1 at a constant level. However, if the workpiece W is made of a hard material that is difficult to deform, it is not necessarily necessary to provide a support plate P.

[0044] The gap formed between the lower surface of the housing 10 and the surface of the workpiece W is preferably small enough not to hinder the conveying of the workpiece W in order to maintain the pressure near the surface of the workpiece W. Specifically, the minimum gap H2 upstream of the opening 12 in the rotation direction of the dust removal roller 20 and the minimum gap H3 downstream of the opening 12 in the rotation direction of the dust removal roller 20 are both preferably 0.01 to 0.5 mm, more preferably 0.05 to 0.1 mm.

[0045] In order to effectively deliver pulsating airflow to the workpiece W, the size of the gap between the surface of the dust removal roller 20 in the contraction section 13 and the wall of the receiving section 11 is also important. For example... Figure 5 As shown, near the edge of the opening 12, the cross-sectional area S1 of the space formed in the contraction section 13 along the rotational direction between adjacent roller grooves 22, 22 is preferably approximately the same as the cross-sectional area S2 of the roller groove 22. Specifically, the cross-sectional area S1 is preferably 0.03 to 0.3 mm. 2 More preferably, it is 0.05–0.1 mm. 2 The minimum gap between the edge of the opening 12 and the surface of the dust removal roller 20 is preferably 0.01 to 0.5 mm, more preferably 0.05 to 0.1 mm.

[0046] The dust removal device 1 of this embodiment, driven by the rotation of the dust removal roller 20 with the roller groove 22, can generate a uniform pulsating airflow along the entire length of the dust removal roller 20. Therefore, even when the workpiece W is wide, the entire surface of the workpiece W can be reliably dusted. Furthermore, since a large blower is not required as in the past, dust removal of the workpiece W can be performed by driving the rotation of the dust removal roller 20, which has a smaller power load than a blower. This eliminates noise problems and enables the device to be miniaturized and energy-efficient. When used in a cleanroom, it can also appropriately maintain and manage the airflow within the cleanroom.

[0047] The above has described one embodiment of the present invention in detail, but the specific solution of the present invention is not limited to the above embodiment. For example, in this embodiment, the roller groove 22 formed on the surface of the dust removal roller 20 is parallel to the rotation axis 21, but it is sufficient to form it along the rotation axis 21, and it does not necessarily need to be parallel to the rotation axis 21. For example, as Figure 6 As shown, by forming the roller groove 22 of the dust removal roller 20 into a double spiral shape with a V-shape when viewed from above, the dust removal roller 20 is driven to rotate in the direction of the arrow, and the dust floating from the surface of the workpiece can be guided from both sides of the length direction of the dust removal roller 20 to the center and sucked up, so that the dust removal of the workpiece can be performed more reliably.

[0048] Furthermore, the conveying method of workpiece W is not limited to linear conveying as in this embodiment; for example, such as Figure 7 As shown, curved conveying can also be achieved via support rollers R. Figure 7 In the middle, to and Figure 4 The same constituent parts are given the same reference numerals. Figure 7 The preferred dimensions of the gaps H1 to H3 shown, and the cross-sectional area of ​​the roller groove 22, etc., are related to... Figure 4 The dimensions of the gaps H1 to H3 shown, and the cross-sectional area of ​​the roller groove 22, etc., are preferably the same. Figure 7 The support roller R shown is capable of conveying the workpiece W while simultaneously interacting with... Figure 4 The support plate P shown also reliably holds the workpiece W. Alternatively, it can be replaced with... Figure 4 and Figure 7 The workpiece W is conveyed as shown, and the dust removal device 1 is moved relative to the fixed workpiece W, thereby removing dust from the surface of the workpiece W.

[0049] Figure 4The plurality of opposing grooves 14 shown are formed in a stepped shape with adjacent sidewalls orthogonal to each other. That is, the inner surfaces of the two sidewalls connected at the bottom of each opposing groove 14 are respectively composed of a horizontal plane and a vertical plane, and the sidewalls of adjacent opposing grooves 14 are connected to each other at their respective opening edges. According to this configuration, a portion of the accompanying airflow accompanying the rotation of the dust removal roller 20 easily generates vortices in each opposing groove 14 of the contraction section 13, thereby reducing the frictional resistance between the accompanying airflow flowing on the surface side of the vortex (dust removal roller 20 side) and the wall surface of the contraction section 13, and increasing the flow velocity of the accompanying airflow. As a result, fine dust adhering to the surface of the workpiece can be removed efficiently.

[0050] like Figure 8 As shown, each opposing groove 14 can also be formed such that the sidewall 14a downstream of the rotation direction C of the dust removal roller 20 faces the axis of the dust removal roller 20 in the axial sectional view. Figure 2 The reference numeral 28) extends. According to this configuration, as... Figure 8 As indicated by the dashed arrow, a portion of the accompanying airflow accompanying the rotation of the dust removal roller 20 collides with the sidewalls 14a of each opposing groove 14, generating flow resistance in the opposite direction to the rotation direction C. This increases the pressure of the accompanying airflow flowing on this surface side (dust removal roller 20 side). Consequently, the breaking or peeling of the boundary layer caused by the airflow blown toward the workpiece surface can be performed more reliably, making it suitable for, for example, the removal of extremely fine dust particles smaller than 1 μm.

[0051] like Figure 8 As shown, for each groove 22 of the dust removal roller 20, it can also be formed such that the sidewall 22a on the downstream side in the rotation direction C faces the axis of the dust removal roller 20 in the axial sectional view. Figure 2 The reference numeral 28) extends, thereby enabling a further increase in the pressure of the airflow blown onto the workpiece surface. The shape of the roller groove 22 can also be adapted to... Figure 2 Other embodiments are shown. When the purpose is to remove extremely fine dust, the direction (direction A) in which the sidewalls 14a and 22a of the opposing groove 14 and the roller groove 22 extend is preferably consistent with the direction (direction B) toward the axis of the dust removal roller 20. However, the above-mentioned direction A and direction B do not necessarily need to be completely consistent, and the angle between direction A and direction B can be in the range of -30 degrees to 30 degrees.

[0052] like Figure 9 As shown, the connecting portion 16 can also be formed as an opening adjacent to the contraction portion 13 on the upstream side of the rotation direction C of the dust removal roller 20. According to this configuration, by rotating the dust removal roller 20, external gas can be reliably introduced between the dust removal roller 20 and the contraction portion 13, promoting the airflow to blow the workpiece.

[0053] Figure 9The opening portion 12 is formed so that a minimum gap (gap A) from the edge portion 12b on the downstream side of the rotation direction C of the dust removal roller 20 to the surface of the dust removal roller 20 is larger than a minimum gap (gap B) from the edge portion 12a on the upstream side of the rotation direction C of the dust removal roller 20 to the surface of the dust removal roller 20. The air flow compressed by the contraction portion 13 in conjunction with the rotation of the dust removal roller 20 is expanded by being ejected from the opening portion 12, and thus, by making the gap A larger than the gap B, the suction from the suction portion 15 can be made easy, and the suction of fine dust can be performed more reliably.

[0054] As an embodiment of the present application, a dust removal device 1 of the above-described embodiment having a dust removal roller 20 with a length of 600 mm was trial-produced, and a dust removal test was performed on a workpiece W composed of a film with a width of 500 mm. A toner for a copying machine with a particle diameter of 0.002 to 0.005 mm was sprayed to the surface of the film as simulated fine dust, and the dust removal was performed by the dust removal device 1, and the dust removal rate was measured by a microscope "VHX-6000" (Keyence Corporation) after the film was conveyed by each of the conveyance methods. Figure 4 and Figure 7 After the conveyance and the dust removal by the conveyance methods, the residual toner was measured by a microscope "VHX-6000" (Keyence Corporation), and as a result, a removal rate of 99.9% or more was obtained in either conveyance method.

[0055] Further, the power of the DC brushless motor that is the driving source 30 that rotates and drives the dust removal roller 20 was 280 W, and the power of the dust collector that is connected to the suction portion 15 was 450 W, and thus, even if they are added together, compared with the conventional dust removal device that uses a blower, the same or higher dust collection performance can be obtained with about half the power.

[0056] BRIEF DESCRIPTION OF DRAWINGS

[0057] 1 dust removal device

[0058] 10 housing

[0059] 11 accommodation portion

[0060] 12 opening portion

[0061] 13 contraction portion

[0062] 14 opposed groove

[0063] 15 suction portion

[0064] 16 communication portion

[0065] 20 dust removal roller

[0066] 22 roller groove

[0067] 30 driving source

[0068] W workpiece

Claims

1. A dust removal device for removing dust adhering to the surface of a workpiece, comprising: a housing; a dust removal roller rotatably supported within the housing about a rotation axis; and a drive source for rotatably driving the dust removal roller, characterized in that... On the surface of the dust removal roller, along the axis of rotation, are formed a plurality of sections with a cross-sectional area of ​​0.03–0.3 mm². 2 Roller grooves composed of fine grooves The housing has a receiving portion for receiving the dust removal roller and an opening portion for opening the receiving portion toward the workpiece surface. The receiving portion has a constricted portion formed on the upstream side of the dust removal roller in the direction of rotation, which is closer to the opening. This constricted portion causes the gap between the surface of the dust removal roller and the wall of the receiving portion to gradually decrease towards the opening. The airflow accompanying the rotation of the dust removal roller is compressed by the contraction section, and the pressure of the accompanying airflow is reduced when the roller groove is exposed from the contraction section to the opening. This causes the airflow blown to the workpiece surface through the opening to pulsate, thereby removing dust from the workpiece surface.

2. The dust removal device as described in claim 1, characterized in that, The wall surface of the contraction section is formed along the rotation axis with a plurality of opposing grooves consisting of fine grooves opposite to the roller groove.

3. The dust removal device as described in claim 2, characterized in that, The plurality of opposing slots are formed in a stepped shape with adjacent sidewalls that are orthogonal to each other.

4. The dust removal device as described in claim 2, characterized in that, The opposing groove extends downstream of the dust removal roller in the direction of rotation toward the axis of the dust removal roller.

5. The dust removal device as described in claim 1, characterized in that, The housing further comprises: a suction section capable of suctioning dust detached from the workpiece surface on the downstream side of the dust removal roller in the rotation direction relative to the opening; and a communication section connecting the interior of the receiving section to the exterior of the housing on the upstream side of the dust removal roller in the rotation direction relative to the opening.

6. The dust removal device as described in claim 5, characterized in that, The minimum gap from the downstream edge of the dust removal roller in the direction of rotation to the surface of the dust removal roller is larger than the minimum gap from the upstream edge of the dust removal roller in the direction of rotation to the surface of the dust removal roller.

7. The dust removal device as described in claim 5, characterized in that, The connecting portion opens relative to the contracting portion at a position adjacent to the upstream side in the rotation direction of the dust removal roller.

8. The dust removal device as described in claim 1, characterized in that, The minimum gap between the surface of the dust removal roller, which is opposed to the workpiece through the opening, and the workpiece surface is 0.01 to 0.5 mm.

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