Cooperative double-root vertical square opening device and cooperative working method thereof

Abstract

The present invention provides a collaborative working double-root vertical squaring device and a collaborative working method thereof. Based on the needs of the material to be processed and in combination with the parameter range of the process equipment, a plurality of processing parameter schemes for the material to be processed are determined. Based on the equipment usage parameters of the process equipment, a first evaluation is performed on each processing parameter scheme. A second evaluation is performed based on the loop double-root collaborative characteristics of each processing parameter scheme. Based on the comprehensive evaluation result, a target processing parameter scheme is determined to achieve loop processing of the processed material and ensure the optimality of the double-root collaborative work. Then, the material to be processed is processed and monitored according to the target processing parameter scheme to obtain monitoring data, and the collaborative cutting effect is evaluated on the monitoring data. According to the effect evaluation result, the loop double-root collaborative parameters are adjusted in real time to achieve real-time adjustment of the loop double-root collaborative parameters during the processing to ensure processing efficiency and workpiece quality.

Description

Technical Field

[0001] The invention relates to the technical field of silicon rod processing equipment, and in particular to a coordinated double-rod vertical squaring device and a coordinated working method thereof. Background Art

[0002] The existing silicon wafer production process generally involves squaring a silicon rod (such as a silicon rod or a polycrystalline silicon rod) through a double vertical squaring device so that the silicon rod is rectangular as a whole; after squaring, the silicon rod is ground, rounded and polished; finally, a multi-wire slicer is used to slice the squared silicon rod.

[0003] The double-root vertical squaring device uses a continuous and fast moving silk thread, on which a large amount of prepared mortar is sprayed, to cut the silicon rod. Usually, the processing technology of the double-root vertical squaring device is unidirectional processing, resulting in low processing efficiency and low processing quality. Summary of the invention

[0004] The present invention provides a cooperatively working double-root vertical square opening device and a cooperatively working method thereof, so as to solve the problems raised in the background technology.

[0005] A double-root vertical square opening device working in coordination, comprising:

[0006] A parameter determination module is used to determine various processing parameter solutions for the materials to be processed based on the requirements of the materials to be processed and in combination with the parameter range of the process equipment;

[0007] A collaborative evaluation module is used to perform a first evaluation on each processing parameter scheme based on the equipment usage parameters of the process equipment, perform a second evaluation based on the loop double-root collaborative characteristics of each processing parameter scheme, and determine a target processing parameter scheme based on the comprehensive evaluation results;

[0008] A real-time monitoring module is used to process and monitor the material to be processed according to the target processing parameter plan to obtain monitoring data;

[0009] The real-time adjustment module is used to evaluate the collaborative cutting effect of the monitoring data and to adjust the double-root collaborative parameters of the loop line in real time according to the evaluation result.

[0010] Preferably, the parameter determination module includes:

[0011] A matching unit is used to divide the demand for materials to be processed based on the processing structure of the process equipment to obtain multiple sub-demands, and match the sub-demands with the processing structure of the process equipment to obtain a matching relationship;

[0012] A solution determination unit is used to generate a plurality of processing parameters corresponding to the sub-demands based on the matching relationship, in combination with the process equipment parameter range and the processing structure characteristics, and to form an initial processing parameter solution based on the plurality of processing parameters;

[0013] The solution analysis unit is used to judge and adjust the initial processing parameter solution based on the association between the processing structure features to obtain the final processing parameter solution.

[0014] Preferably, the solution analysis unit includes:

[0015] A judgment unit, used to generate constraint features between parameters based on the association between processing structure features, and judge whether the initial processing parameter scheme meets the constraint features;

[0016] If so, retain the initial processing parameter plan;

[0017] Otherwise, the initial processing parameter plan is eliminated;

[0018] The adjustment unit is used to adjust the retained initial processing parameter plan based on the processing difficulty to obtain a final processing parameter plan.

[0019] Preferably, the collaborative assessment module includes:

[0020] a state determination unit, for determining a current device state of the process device based on a difference between device usage parameters and initial parameters of the process device and in combination with an initial device state;

[0021] A relationship determination unit, used to extract parameter values ​​of the processing parameter scheme, match the parameter values ​​with the current equipment status based on the parameter type, and obtain a value-status correspondence relationship;

[0022] A first evaluation unit is used to determine a first influence value of the value on the state based on the value-state correspondence, determine a second influence value of the state on the value based on the first influence value, and determine a first evaluation value of the processing parameter scheme based on the first influence value and the second influence value;

[0023] A feature determination unit is used to obtain the double-root process parameters in each processing process parameter scheme, obtain the first tungsten wire parameter characteristics and the second tungsten wire parameter characteristics based on the double-root process parameters, and perform feature parallel analysis based on the first tungsten wire parameter characteristics and the second tungsten wire parameter characteristics to obtain the double-root synergistic characteristics of the loop wire;

[0024] The second evaluation unit is used to evaluate the difficulty of collaborative work of the double-root collaborative feature of the loop line to obtain a second evaluation value;

[0025] The scheme determination unit is used to obtain a comprehensive evaluation value based on the first evaluation value and the second evaluation value, and select the processing parameter scheme with the largest comprehensive evaluation value as the target processing parameter scheme.

[0026] Preferably, the feature determination unit comprises:

[0027] a feature determination unit, used for acquiring a first tungsten wire path feature, a first tungsten wire speed feature, a first tungsten wire spacing feature and a first tungsten wire angle feature from the first tungsten wire parameter feature, and acquiring a second tungsten wire path feature, a second tungsten wire speed feature, a second tungsten wire spacing feature and a second tungsten wire angle feature from the first tungsten wire parameter feature;

[0028] a feature analysis unit, configured to analyze the first tungsten wire path feature and the second tungsten wire path feature in parallel to determine a path coordination feature, and to mark the path coordination feature based on the first tungsten wire speed feature and the second tungsten wire speed feature to obtain a path vector coordination feature;

[0029] The feature correction unit is used to perform distance verification correction on the path vector collaborative feature based on the first tungsten wire spacing feature and the second tungsten wire spacing feature, and to perform cutting direction verification correction based on the first tungsten wire angle feature and the second tungsten wire angle feature, and obtain the double-root collaborative feature of the loop line according to the distance correction and cutting direction correction results.

[0030] Preferably, the second evaluation unit comprises:

[0031] A feature acquisition unit, used to determine the trigger feature to be established from the double-root cooperative feature of the loop line, determine the driving feature of the trigger feature, and establish a communication feature based on the driving feature;

[0032] A difficulty determination unit, used to determine the difficulty of the coordinated work among the trigger feature, the drive feature and the communication feature, and to determine the individual execution difficulty of the trigger feature, the drive feature and the communication feature;

[0033] The comprehensive evaluation unit is used to determine a second evaluation value of the double-root collaborative feature of the loop line based on the collaborative working difficulty and the individual execution difficulty.

[0034] Preferably, the real-time monitoring module includes:

[0035] A data acquisition unit, used to process the material to be processed according to the target processing parameter plan and collect monitoring data during the processing;

[0036] The data storage unit is used to store the monitoring data.

[0037] Preferably, the real-time adjustment module includes:

[0038] A data acquisition unit, used to acquire process material data of the material to be processed and process equipment operation data of the process equipment from the monitoring data;

[0039] A data evaluation unit, used to evaluate process material data based on standard material data to determine the processing quality of the material to be processed, and to evaluate process equipment operation data based on standard operation data to determine the operation status of the process equipment during the processing;

[0040] A coefficient determination unit, used for determining a quality coefficient based on a processing quality and a state coefficient based on an operating state;

[0041] A model evaluation unit, used to determine the processing effect value of the processing equipment based on the overall equipment evaluation model pre-trained according to historical monitoring data, combined with the quality coefficient and the state coefficient;

[0042] An effect determination unit, used for obtaining result material data of the material to be processed from the monitoring data, comparing it with the standard result data, and determining the collaborative cutting effect of the material to be processed according to the comparison result;

[0043] A parameter adjustment unit, used to determine whether the collaborative cutting effect meets the preset cutting effect;

[0044] If so, the double-root coordination parameters of the loop line will not be adjusted;

[0045] Otherwise, the processing effect value of the processing equipment is used as a reference, combined with the difference between the collaborative cutting effect and the preset cutting effect, to determine the real-time adjustment parameters of the double-root collaborative parameters of the loop line.

[0046] Preferably, including:

[0047] S1: Based on the requirements of the materials to be processed and the parameter range of the process equipment, determine various processing parameter solutions for the materials to be processed;

[0048] S2: Based on the equipment usage parameters of the process equipment, a first evaluation is performed on each processing parameter scheme, and based on the loop line double-root synergy characteristics of each processing parameter scheme, a second evaluation is performed, and the target processing parameter scheme is determined according to the comprehensive evaluation results;

[0049] S3: Processing and monitoring the material to be processed according to the target processing parameter plan to obtain monitoring data;

[0050] S4: Evaluate the collaborative cutting effect on the monitoring data, and adjust the double-root collaborative parameters of the loop line in real time according to the evaluation result.

[0051] Preferably, in S4, the monitoring data is evaluated for collaborative cutting effects, and the double-root collaborative parameters of the loop line are adjusted in real time according to the evaluation results, including:

[0052] Acquire process material data of the material to be processed and process equipment operation data of the process equipment from the monitoring data;

[0053] Evaluate process material data based on standard material data to determine the processing quality of the material to be processed, and evaluate process equipment operation data based on standard operation data to determine the operating status of the process equipment during the processing;

[0054] Based on the processing quality, the quality coefficient is determined, and based on the operating status, the status coefficient is determined;

[0055] Based on the equipment overall evaluation model pre-trained according to historical monitoring data, combined with the quality coefficient and state coefficient, the processing effect value of the processing equipment is determined;

[0056] Obtaining result material data of the material to be processed from the monitoring data, comparing it with the standard result data, and determining the coordinated cutting effect of the material to be processed according to the comparison result;

[0057] Determining whether the collaborative cutting effect meets the preset cutting effect;

[0058] If so, the double-root coordination parameters of the loop line will not be adjusted;

[0059] Otherwise, the processing effect value of the processing equipment is used as a reference, combined with the difference between the collaborative cutting effect and the preset cutting effect, to determine the real-time adjustment parameters of the double-root collaborative parameters of the loop line.

[0060] Compared with the prior art, the present invention has achieved the following beneficial effects:

[0061] Based on the needs of the material to be processed and the parameter range of the process equipment, a variety of processing parameter schemes for the material to be processed are determined; based on the equipment usage parameters of the process equipment, a first evaluation is performed on each processing parameter scheme; based on the loop wire double-root collaborative characteristics of each processing parameter scheme, a second evaluation is performed; and based on the comprehensive evaluation results, a target processing parameter scheme is determined to achieve loop wire processing of the processed material and ensure the optimality of the double-root collaborative work; then, the material to be processed is processed and monitored according to the target processing parameter scheme to obtain monitoring data, and the collaborative cutting effect is evaluated on the monitoring data; based on the effect evaluation results, the loop wire double-root collaborative parameters are adjusted in real time to achieve real-time adjustment of the loop wire double-root collaborative parameters during the processing to ensure processing efficiency and workpiece quality.

[0062] Other features and advantages of the present invention will be described in the following description, and partly become apparent from the description, or understood by practicing the present invention. The purpose and other advantages of the present invention can be realized and obtained by the structures specifically pointed out in this application document.

[0063] The technical solution of the present invention is further described in detail below through the accompanying drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0064] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0065] Figure 1 It is a structural diagram of a double-root vertical square opening device working in coordination in an embodiment of the present invention;

[0066] Figure 2 is a structural diagram of the real-time adjustment module described in an embodiment of the present invention;

[0067] Figure 3 The present invention is a flowchart of a method for collaborative operation of a double-root vertical square opening device in an embodiment of the present invention. DETAILED DESCRIPTION

[0068] The preferred embodiments of the present invention are described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0069] Embodiment 1:

[0070] The embodiment of the present invention provides a double-root vertical square opening device that works in coordination, such as Figure 1 As shown, including:

[0071] A parameter determination module is used to determine various processing parameter solutions for the materials to be processed based on the requirements of the materials to be processed and in combination with the parameter range of the process equipment;

[0072] A collaborative evaluation module is used to perform a first evaluation on each processing parameter scheme based on the equipment usage parameters of the process equipment, perform a second evaluation based on the double-root collaborative characteristics of the loop line of each processing parameter scheme, and determine a target processing parameter scheme based on the comprehensive evaluation results;

[0073] A real-time monitoring module is used to process and monitor the material to be processed according to the target processing parameter plan to obtain monitoring data;

[0074] The real-time adjustment module is used to evaluate the collaborative cutting effect of the monitoring data and to adjust the double-root collaborative parameters of the loop line in real time according to the evaluation result.

[0075] In this embodiment, the material to be processed is, for example, a silicon rod or a polycrystalline silicon rod.

[0076] In this embodiment, the parameter range of the process equipment is the value range of each driving structure and operating structure in the equipment when they work normally.

[0077] In this embodiment, the equipment usage parameters of the process equipment are parameter values ​​during operation.

[0078] In this embodiment, the comprehensive evaluation result is jointly determined by the evaluation results of a first evaluation of each processing parameter scheme and a second evaluation of the loop wire double-root cooperative characteristics of each processing parameter scheme.

[0079] In this embodiment, the target processing parameter solution is the optimal choice among all processing parameter solutions.

[0080] In this embodiment, the double-root synergistic feature of the loop wire is determined by the working parameters of the double-root tungsten wires.

[0081] The beneficial effects of the above design scheme are: by determining a variety of processing parameter schemes for the materials to be processed based on the needs of the materials to be processed and in combination with the parameter range of the process equipment, performing a first evaluation on each processing parameter scheme based on the equipment usage parameters of the process equipment, performing a second evaluation on the double-root collaborative characteristics of the loop wire based on each processing parameter scheme, and determining the target processing parameter scheme based on the comprehensive evaluation results to achieve loop processing of the processing materials and ensure the optimality of the double-root collaborative work, and then, processing and monitoring the materials to be processed according to the target processing parameter scheme to obtain monitoring data, and evaluating the collaborative cutting effect of the monitoring data, and adjusting the double-root collaborative parameters of the loop wire in real time according to the effect evaluation results, so as to achieve real-time adjustment of the double-root collaborative parameters of the loop wire during the processing process to ensure processing efficiency and workpiece quality.

[0082] Embodiment 2:

[0083] Based on Example 1, the embodiment of the present invention provides a collaborative double-root vertical square root device, wherein the parameter determination module includes:

[0084] A matching unit is used to divide the demand for materials to be processed based on the processing structure of the process equipment to obtain multiple sub-demands, and match the sub-demands with the processing structure of the process equipment to obtain a matching relationship;

[0085] A solution determination unit is used to generate a plurality of processing parameters corresponding to the sub-demands based on the matching relationship, in combination with the process equipment parameter range and the processing structure characteristics, and to form an initial processing parameter solution based on the plurality of processing parameters;

[0086] The solution analysis unit is used to judge and adjust the initial processing parameter solution based on the association between the processing structure features to obtain the final processing parameter solution.

[0087] In this embodiment, the matching relationship realizes the corresponding matching between requirements and structures.

[0088] The beneficial effects of the above design scheme are: by dividing the requirements for materials to be processed based on the processing structure of process equipment, multiple sub-requirements are obtained, and the sub-requirements are matched with the processing structure of process equipment to obtain a matching relationship, and the association between the structural characteristics is used to judge and adjust the initial processing parameter scheme to obtain the final processing parameter scheme, thereby ensuring the comprehensiveness and accuracy of the final processing parameter scheme and providing a basis for collaborative work.

[0089] Embodiment 3:

[0090] Based on Example 2, the embodiment of the present invention provides a collaborative double-root vertical square root device, wherein the solution analysis unit includes:

[0091] A judgment unit, used to generate constraint features between parameters based on the association between processing structure features, and judge whether the initial processing parameter scheme meets the constraint features;

[0092] If so, retain the initial processing parameter plan;

[0093] Otherwise, the initial processing parameter plan is eliminated;

[0094] The adjustment unit is used to adjust the retained initial processing parameter plan based on the processing difficulty to obtain a final processing parameter plan.

[0095] In this embodiment, the constraint feature between the parameters is, for example, that when the parameters of the first processing structure are within a first range, the parameters of the second processing structure must be within a second range, otherwise it will cause damage to the equipment.

[0096] The beneficial effect of the above design scheme is: ensuring the comprehensiveness and accuracy of the final processing technology parameter scheme obtained, and providing a basis for collaborative work.

[0097] Embodiment 4:

[0098] Based on Example 1, the embodiment of the present invention provides a collaborative double-root vertical square root device, wherein the collaborative evaluation module includes:

[0099] a state determination unit, for determining a current device state of the process device based on a difference between device usage parameters and initial parameters of the process device and in combination with an initial device state;

[0100] A relationship determination unit, used to extract parameter values ​​of the processing parameter scheme, match the parameter values ​​with the current equipment status based on the parameter type, and obtain a value-status correspondence relationship;

[0101] A first evaluation unit is used to determine a first influence value of the value on the state based on the value-state correspondence, determine a second influence value of the state on the value based on the first influence value, and determine a first evaluation value of the processing parameter scheme based on the first influence value and the second influence value;

[0102] A feature determination unit is used to obtain the double-root process parameters in each processing process parameter scheme, obtain the first tungsten wire parameter characteristics and the second tungsten wire parameter characteristics based on the double-root process parameters, and perform feature parallel analysis based on the first tungsten wire parameter characteristics and the second tungsten wire parameter characteristics to obtain the double-root synergistic characteristics of the loop wire;

[0103] The second evaluation unit is used to evaluate the difficulty of collaborative work of the double-root collaborative feature of the loop line to obtain a second evaluation value;

[0104] The scheme determination unit is used to obtain a comprehensive evaluation value based on the first evaluation value and the second evaluation value, and select the processing parameter scheme with the largest comprehensive evaluation value as the target processing parameter scheme.

[0105] In this embodiment, the status of the device and the operating value interact with each other.

[0106] In this embodiment, each processing parameter scheme is based on the double-loop working principle.

[0107] The beneficial effect of the above design scheme is: by evaluating each processing parameter scheme from two aspects: equipment characteristics and double-root collaborative characteristics of the loop line, the target processing parameter scheme is finally obtained to realize loop processing of the processing material and ensure the optimality of the double-root collaborative work.

[0108] Embodiment 5:

[0109] Based on Example 4, the embodiment of the present invention provides a collaborative double-root vertical square root device, wherein the feature determination unit includes:

[0110] a feature determination unit, used for acquiring a first tungsten wire path feature, a first tungsten wire speed feature, a first tungsten wire spacing feature and a first tungsten wire angle feature from the first tungsten wire parameter feature, and acquiring a second tungsten wire path feature, a second tungsten wire speed feature, a second tungsten wire spacing feature and a second tungsten wire angle feature from the first tungsten wire parameter feature;

[0111] a feature analysis unit, configured to analyze the first tungsten wire path feature and the second tungsten wire path feature in parallel to determine a path coordination feature, and to mark the path coordination feature based on the first tungsten wire speed feature and the second tungsten wire speed feature to obtain a path vector coordination feature;

[0112] The feature correction unit is used to perform distance verification correction on the path vector collaborative feature based on the first tungsten wire spacing feature and the second tungsten wire spacing feature, and to perform cutting direction verification correction based on the first tungsten wire angle feature and the second tungsten wire angle feature, and obtain the double-root collaborative feature of the loop line according to the distance correction and cutting direction correction results.

[0113] The beneficial effect of the above design scheme is: by analyzing the double-root coordination of the loop wire from four aspects: tungsten wire path characteristics, tungsten wire speed characteristics, tungsten wire spacing characteristics and tungsten wire angle characteristics, the double-root coordination characteristics of the loop wire are obtained, thereby ensuring the comprehensiveness and accuracy of the obtained double-root coordination characteristics of the loop wire.

[0114] Embodiment 6:

[0115] Based on Example 4, the embodiment of the present invention provides a collaborative double-root vertical square opening device, wherein the second evaluation unit includes:

[0116] A feature acquisition unit, used to determine the trigger feature to be established from the double-root cooperative feature of the loop line, determine the driving feature of the trigger feature, and establish a communication feature based on the driving feature;

[0117] A difficulty determination unit, used to determine the difficulty of the coordinated work among the trigger feature, the drive feature and the communication feature, and to determine the individual execution difficulty of the trigger feature, the drive feature and the communication feature;

[0118] The comprehensive evaluation unit is used to determine a second evaluation value of the double-root collaborative feature of the loop line based on the collaborative working difficulty and the individual execution difficulty.

[0119] The beneficial effect of the above design scheme is: by conducting a difficulty assessment on the execution process of the double-root collaborative feature of the loop line, a second assessment value is obtained, which provides a basis for selecting the target processing parameter scheme.

[0120] Embodiment 7:

[0121] Based on Example 1, the embodiment of the present invention provides a collaborative double-root vertical square opening device, wherein the real-time monitoring module includes:

[0122] A data acquisition unit, used to process the material to be processed according to the target processing parameter plan and collect monitoring data during the processing;

[0123] The data storage unit is used to store the monitoring data.

[0124] The beneficial effect of the above design scheme is: the material to be processed is processed according to the target processing parameter scheme, and the monitoring data during the processing is collected and stored, thereby realizing the collection and storage of the monitoring data.

[0125] Embodiment 8:

[0126] Based on Example 1, the present invention provides a double-root vertical square opening device that works in coordination, such as Figure 2 As shown, the real-time adjustment module includes:

[0127] A data acquisition unit, used to acquire process material data of the material to be processed and process equipment operation data of the process equipment from the monitoring data;

[0128] A data evaluation unit, used to evaluate process material data based on standard material data to determine the processing quality of the material to be processed, and to evaluate process equipment operation data based on standard operation data to determine the operation status of the process equipment during the processing;

[0129] A coefficient determination unit, used for determining a quality coefficient based on a processing quality and a state coefficient based on an operating state;

[0130] A model evaluation unit, used to determine the processing effect value of the processing equipment based on the overall equipment evaluation model pre-trained according to historical monitoring data, combined with the quality coefficient and the state coefficient;

[0131] An effect determination unit, used for obtaining result material data of the material to be processed from the monitoring data, comparing it with the standard result data, and determining the collaborative cutting effect of the material to be processed according to the comparison result;

[0132] A parameter adjustment unit, used to determine whether the collaborative cutting effect meets the preset cutting effect;

[0133] If so, the double-root coordination parameters of the loop line will not be adjusted;

[0134] Otherwise, the processing effect value of the processing equipment is used as a reference, combined with the difference between the collaborative cutting effect and the preset cutting effect, to determine the real-time adjustment parameters of the double-root collaborative parameters of the loop line.

[0135] In this embodiment, the process material data is the monitored value of the material to be processed during the processing, and the result material data is the monitored value of the material to be processed after the processing is completed.

[0136] In this embodiment, the higher the processing effect value of the processing equipment is, the smaller the adjustment range of the double-root coordination parameters of the loop wire is.

[0137] The beneficial effect of the above design scheme is: by judging and adjusting the double-root coordinated parameters of the loop wire from the two aspects of processing effect and cutting effect, the double-root coordinated parameters of the loop wire can be adjusted in real time from the two aspects of process and result to ensure processing efficiency and workpiece quality.

[0138] Embodiment 9:

[0139] Based on Example 1, the present invention provides a method for cooperating with two vertical square opening devices, such as Figure 3 As shown, including:

[0140] S1: Based on the requirements of the materials to be processed and the parameter range of the process equipment, determine various processing parameter solutions for the materials to be processed;

[0141] S2: Based on the equipment usage parameters of the process equipment, a first evaluation is performed on each processing parameter scheme, and based on the loop line double-root synergy characteristics of each processing parameter scheme, a second evaluation is performed, and the target processing parameter scheme is determined according to the comprehensive evaluation results;

[0142] S3: Processing and monitoring the material to be processed according to the target processing parameter plan to obtain monitoring data;

[0143] S4: Evaluate the collaborative cutting effect on the monitoring data, and adjust the double-root collaborative parameters of the loop line in real time according to the evaluation result.

[0144] In this embodiment, the material to be processed is, for example, a silicon rod or a polycrystalline silicon rod.

[0145] In this embodiment, the parameter range of the process equipment is the value range of each driving structure and operating structure in the equipment when they work normally.

[0146] In this embodiment, the equipment usage parameters of the process equipment are parameter values ​​during operation.

[0147] In this embodiment, the comprehensive evaluation result is jointly determined by the evaluation results of a first evaluation of each processing parameter scheme and a second evaluation of the loop wire double-root cooperative characteristics of each processing parameter scheme.

[0148] In this embodiment, the target processing parameter solution is the optimal choice among all processing parameter solutions.

[0149] In this embodiment, the double-root synergistic feature of the loop wire is determined by the working parameters of the double-root tungsten wires.

[0150] The beneficial effects of the above design scheme are: by determining a variety of processing parameter schemes for the materials to be processed based on the needs of the materials to be processed and in combination with the parameter range of the process equipment, performing a first evaluation on each processing parameter scheme based on the equipment usage parameters of the process equipment, performing a second evaluation on the double-root collaborative characteristics of the loop wire based on each processing parameter scheme, and determining the target processing parameter scheme based on the comprehensive evaluation results to achieve loop processing of the processing materials and ensure the optimality of the double-root collaborative work, and then, processing and monitoring the materials to be processed according to the target processing parameter scheme to obtain monitoring data, and evaluating the collaborative cutting effect of the monitoring data, and adjusting the double-root collaborative parameters of the loop wire in real time according to the effect evaluation results, so as to achieve real-time adjustment of the double-root collaborative parameters of the loop wire during the processing process to ensure processing efficiency and workpiece quality.

[0151] Embodiment 10:

[0152] Based on Example 9, the embodiment of the present invention provides a method for collaborative work of a double-root vertical square cutting device. In S4, the monitoring data is evaluated for collaborative cutting effect, and the double-root collaborative parameters of the loop line are adjusted in real time according to the effect evaluation result, including:

[0153] Acquire process material data of the material to be processed and process equipment operation data of the process equipment from the monitoring data;

[0154] Evaluate process material data based on standard material data to determine the processing quality of the material to be processed, and evaluate process equipment operation data based on standard operation data to determine the operating status of the process equipment during the processing;

[0155] Based on the processing quality, the quality coefficient is determined, and based on the operating status, the status coefficient is determined;

[0156] Based on the equipment overall evaluation model pre-trained according to historical monitoring data, combined with the quality coefficient and state coefficient, the processing effect value of the processing equipment is determined;

[0157] Obtaining result material data of the material to be processed from the monitoring data, comparing it with the standard result data, and determining the coordinated cutting effect of the material to be processed according to the comparison result;

[0158] Determining whether the collaborative cutting effect meets the preset cutting effect;

[0159] If so, the double-root coordination parameters of the loop line will not be adjusted;

[0160] Otherwise, the processing effect value of the processing equipment is used as a reference, combined with the difference between the collaborative cutting effect and the preset cutting effect, to determine the real-time adjustment parameters of the double-root collaborative parameters of the loop line.

[0161] In this embodiment, the process material data is the monitored value of the material to be processed during the processing, and the result material data is the monitored value of the material to be processed after the processing is completed.

[0162] In this embodiment, the higher the processing effect value of the processing equipment is, the smaller the adjustment range of the double-root coordination parameters of the loop wire is.

[0163] The beneficial effect of the above design scheme is: by judging and adjusting the double-root coordinated parameters of the loop wire from the two aspects of processing effect and cutting effect, the double-root coordinated parameters of the loop wire can be adjusted in real time from the two aspects of process and result to ensure processing efficiency and workpiece quality.

[0164] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention belong to the scope of this application document and its equivalent technology, the present invention is also intended to include these changes and variations.

Claims

1. A double-root vertical square opening device working in coordination, characterized in that: include: A parameter determination module is used to determine various processing parameter solutions for the materials to be processed based on the requirements of the materials to be processed and in combination with the parameter range of the process equipment; A collaborative evaluation module is used to perform a first evaluation on each processing parameter scheme based on the equipment usage parameters of the process equipment, perform a second evaluation based on the loop double-root collaborative characteristics of each processing parameter scheme, and determine a target processing parameter scheme based on the comprehensive evaluation results; A real-time monitoring module is used to process and monitor the material to be processed according to the target processing parameter plan to obtain monitoring data; A real-time adjustment module is used to evaluate the collaborative cutting effect of the monitoring data and adjust the double-root collaborative parameters of the loop line in real time according to the evaluation result; The parameter determination module comprises: A matching unit is used to divide the demand for materials to be processed based on the processing structure of the process equipment to obtain multiple sub-demands, and match the sub-demands with the processing structure of the process equipment to obtain a matching relationship; A solution determination unit is used to generate a plurality of processing parameters corresponding to the sub-demands based on the matching relationship, in combination with the process equipment parameter range and the processing structure characteristics, and to form an initial processing parameter solution based on the plurality of processing parameters; A solution analysis unit is used to judge and adjust the initial processing parameter solution based on the association between the processing structure features to obtain the final processing parameter solution; The scheme analysis unit comprises: A judgment unit, used to generate constraint features between parameters based on the association between processing structure features, and judge whether the initial processing parameter scheme meets the constraint features; If so, retain the initial processing parameter plan; Otherwise, the initial processing parameter plan is eliminated; An adjustment unit, used for adjusting the retained initial processing parameter plan based on the processing difficulty to obtain a final processing parameter plan; The collaborative assessment module comprises: a state determination unit, for determining a current device state of the process device based on a difference between device usage parameters and initial parameters of the process device and in combination with an initial device state; A relationship determination unit, used to extract parameter values ​​of the processing parameter scheme, match the parameter values ​​with the current equipment status based on the parameter type, and obtain a value-status correspondence relationship; A first evaluation unit is used to determine a first influence value of the value on the state based on the value-state correspondence, determine a second influence value of the state on the value based on the first influence value, and determine a first evaluation value of the processing parameter scheme based on the first influence value and the second influence value; A feature determination unit is used to obtain the double-root process parameters in each processing process parameter scheme, obtain the first tungsten wire parameter characteristics and the second tungsten wire parameter characteristics based on the double-root process parameters, and perform feature parallel analysis based on the first tungsten wire parameter characteristics and the second tungsten wire parameter characteristics to obtain the double-root synergistic characteristics of the loop wire; The second evaluation unit is used to evaluate the difficulty of collaborative work of the double-root collaborative feature of the loop line to obtain a second evaluation value; A scheme determination unit, configured to obtain a comprehensive evaluation value based on the first evaluation value and the second evaluation value, and select a processing parameter scheme with a maximum comprehensive evaluation value as a target processing parameter scheme; The feature determination unit comprises: a feature determination unit, used for acquiring a first tungsten wire path feature, a first tungsten wire speed feature, a first tungsten wire spacing feature and a first tungsten wire angle feature from the first tungsten wire parameter feature, and acquiring a second tungsten wire path feature, a second tungsten wire speed feature, a second tungsten wire spacing feature and a second tungsten wire angle feature from the first tungsten wire parameter feature; a feature analysis unit, configured to analyze the first tungsten wire path feature and the second tungsten wire path feature in parallel to determine a path coordination feature, and to mark the path coordination feature based on the first tungsten wire speed feature and the second tungsten wire speed feature to obtain a path vector coordination feature; The feature correction unit is used to perform distance verification correction on the path vector collaborative feature based on the first tungsten wire spacing feature and the second tungsten wire spacing feature, and to perform cutting direction verification correction based on the first tungsten wire angle feature and the second tungsten wire angle feature, and obtain the double-root collaborative feature of the loop line according to the distance correction and cutting direction correction results.

2. A cooperative double-root vertical square opening device according to claim 1, characterized in that: The second evaluation unit comprises: A feature acquisition unit, used to determine the trigger feature to be established from the double-root cooperative feature of the loop line, determine the driving feature of the trigger feature, and establish a communication feature based on the driving feature; A difficulty determination unit, used to determine the difficulty of the coordinated work among the trigger feature, the drive feature and the communication feature, and to determine the individual execution difficulty of the trigger feature, the drive feature and the communication feature; The comprehensive evaluation unit is used to determine a second evaluation value of the double-root collaborative feature of the loop line based on the collaborative working difficulty and the individual execution difficulty.

3. A cooperative double-root vertical square opening device according to claim 1, characterized in that: The real-time monitoring module comprises: A data acquisition unit, used to process the material to be processed according to the target processing parameter plan and collect monitoring data during the processing; The data storage unit is used to store the monitoring data.

4. A cooperative double-root vertical square opening device according to claim 1, characterized in that: The real-time adjustment module comprises: A data acquisition unit, used to acquire process material data of the material to be processed and process equipment operation data of the process equipment from the monitoring data; A data evaluation unit, used to evaluate process material data based on standard material data to determine the processing quality of the material to be processed, and to evaluate process equipment operation data based on standard operation data to determine the operation status of the process equipment during the processing; A coefficient determination unit, used for determining a quality coefficient based on a processing quality and a state coefficient based on an operating state; A model evaluation unit, used to determine the processing effect value of the processing equipment based on the overall equipment evaluation model pre-trained according to historical monitoring data, combined with the quality coefficient and the state coefficient; An effect determination unit, used for obtaining result material data of the material to be processed from the monitoring data, comparing it with the standard result data, and determining the collaborative cutting effect of the material to be processed according to the comparison result; A parameter adjustment unit, used to determine whether the collaborative cutting effect meets the preset cutting effect; If so, the double-root coordination parameters of the loop line will not be adjusted; Otherwise, the processing effect value of the processing equipment is used as a reference, combined with the difference between the collaborative cutting effect and the preset cutting effect, to determine the real-time adjustment parameters of the double-root collaborative parameters of the loop line.

5. The method for cooperating with a double vertical square opening device according to claim 1, characterized in that: include: S1: Based on the requirements of the materials to be processed and the parameter range of the process equipment, determine various processing parameter solutions for the materials to be processed; S2: Based on the equipment usage parameters of the process equipment, a first evaluation is performed on each processing parameter scheme, and based on the loop line double-root synergy characteristics of each processing parameter scheme, a second evaluation is performed, and the target processing parameter scheme is determined according to the comprehensive evaluation results; S3: Processing and monitoring the material to be processed according to the target processing parameter plan to obtain monitoring data; S4: Evaluate the collaborative cutting effect on the monitoring data, and adjust the double-root collaborative parameters of the loop line in real time according to the evaluation result.

6. The method for cooperating with a double vertical square opening device according to claim 5, characterized in that: In S4, the monitoring data is evaluated for the collaborative cutting effect, and the double-root collaborative parameters of the loop line are adjusted in real time according to the evaluation result, including: Acquire process material data of the material to be processed and process equipment operation data of the process equipment from the monitoring data; Evaluate process material data based on standard material data to determine the processing quality of the material to be processed, and evaluate process equipment operation data based on standard operation data to determine the operating status of the process equipment during the processing; Based on the processing quality, the quality coefficient is determined, and based on the operating status, the status coefficient is determined; Based on the equipment overall evaluation model pre-trained according to historical monitoring data, combined with the quality coefficient and state coefficient, the processing effect value of the processing equipment is determined; Obtaining result material data of the material to be processed from the monitoring data, comparing it with the standard result data, and determining the coordinated cutting effect of the material to be processed according to the comparison result; Determining whether the collaborative cutting effect meets the preset cutting effect; If so, the double-root coordination parameters of the loop line will not be adjusted; Otherwise, the processing effect value of the processing equipment is used as a reference, combined with the difference between the collaborative cutting effect and the preset cutting effect, to determine the real-time adjustment parameters of the double-root collaborative parameters of the loop line.

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