A special-shaped curved surface substrate workpiece rack for vacuum sputtering coating

Abstract

The application discloses a special-shaped curved surface substrate workpiece frame for vacuum sputtering coating, belongs to the field of vacuum coating, and is characterized in that the inner workpiece frame is fixed in the outer workpiece frame, the substrate is installed on the anti-diffraction shielding plate frame and is installed on the inner workpiece frame through the anti-diffraction shielding plate frame, the upper baffle is arranged on the top of the outer frame, the upper guide strip is installed on the upper baffle through a plurality of upper insulating shielding components, the bottom plate welding piece is installed on the bottom of the outer frame through the lower insulating shielding component, the lower baffle is arranged on the lower part of the outer frame, and the lower baffle is located above the lower insulating shielding component. The substrate is fixed on the anti-diffraction shielding plate frame and then installed on the inner workpiece frame, so that the substrate is prevented from shaking, is convenient to disassemble and assemble, the anti-diffraction support is arranged, unnecessary diffraction or scattering of vapor molecules or atoms released by the evaporation source is prevented before the vapor molecules or atoms reach the surface of the substrate, and the back surface of the substrate is prevented from being polluted. The insulating shielding components are arranged on the upper and lower parts of the outer workpiece frame, so that the workpiece frame and the substrate will not be discharged, and damage to the substrate is avoided.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of vacuum coating, and particularly relates to a special-shaped curved substrate workpiece frame for vacuum sputtering coating. BACKGROUND

[0002] Sputtering coating is a kind of vacuum coating technology, which is a process of making target atoms or molecules ejected from the surface of a solid target by bombarding the surface with particles of a certain energy (usually positively charged argon ions) and depositing on the substrate surface. In the sputtering coating process, the substrate is installed in the vacuum chamber through the workpiece frame, and the processed substrate completes different process sputtering coating procedures in the coating equipment as the workpiece frame moves. In the sputtering coating process, it is necessary to ensure that the workpiece frame has sufficient stability and supporting force to firmly fix the substrate and prevent it from shaking during the coating process. The shaking of the substrate will lead to uneven distribution of sputtered atoms or molecules on the substrate surface, thereby affecting the uniformity and quality of the film layer.

[0003] The current workpiece frame is for substrates with conventional shapes, and clamps are arranged on the opposite sides of the workpiece frame to directly clamp, support and fix the substrate. Such a workpiece frame can only be used to install substrates with conventional shapes and similar sizes, and has the problems of unstable clamping and even unable to clamp and install for processing special-shaped curved substrates. Moreover, the clamps and the substrate are prone to discharge, which may cause damage to the substrate. The vapor molecules or atoms released by the evaporation source are also prone to diffraction or scattering before reaching the substrate surface, which may also lead to uneven film layer, inaccurate thickness control and decreased film layer quality. SUMMARY

[0004] The purpose of the present application is to provide a special-shaped curved substrate workpiece frame for vacuum sputtering coating to solve the problems raised in the background.

[0005] The present application provides a special-shaped curved substrate workpiece frame for vacuum sputtering coating, which comprises an outer workpiece frame, an inner workpiece frame and a diffraction prevention shielding plate frame. The inner workpiece frame is fixed inside the outer workpiece frame, and the substrate is installed in the diffraction prevention shielding plate frame and the inner workpiece frame through the diffraction prevention shielding plate frame.

[0006] The outer workpiece frame comprises an outer frame, an upper baffle plate arranged at the top of the outer frame, an upper guide strip installed on the upper baffle plate through a plurality of upper insulating shielding components, a bottom plate welding piece installed on the bottom of the outer frame through a lower insulating shielding component, and a lower baffle plate arranged at the lower part of the outer frame.

[0007] The upper baffle plate and the lower baffle plate are arranged on the side facing the installation of the substrate.

[0008] As a further scheme of the present application, the outer frame comprises two side beams, a top beam connected to the top of the two side beams, and a bottom beam connected to the bottom of the two side beams, wherein the bottom beam is provided with a lower baffle, the two side beams are provided with a lock catch, and the lower part of the outer frame is further provided with a cross beam.

[0009] As a further scheme of the present application, the upper insulation shielding assembly comprises a support seat, an upper shielding cover plate, and an upper shielding back plate, wherein the bottom of the support seat is provided with an upper insulation plate and is fixed to the top of the upper baffle, and the side of the support seat is connected to an upper guide strip which stands on the upper baffle.

[0010] The upper shielding cover plate and the upper shielding back plate cooperatively form a shielding box body with an opening at the bottom, which covers the bottom of the support seat and the upper insulation plate.

[0011] A plurality of grooves parallel to the upper and lower planes of the upper insulation plate are formed around the upper insulation plate.

[0012] As a further scheme of the present application, the lower insulation shielding assembly comprises a positioning plate, a lower shielding back plate, and a lower shielding cover plate, wherein the bottom of the positioning plate is provided with a lower insulation plate and is fixed to the bottom plate welding piece.

[0013] The lower shielding back plate and the lower shielding cover plate cooperatively form a shielding box body with an opening at the bottom, which covers the positioning plate and the lower insulation plate.

[0014] A plurality of grooves parallel to the upper and lower planes of the lower insulation plate are formed around the lower insulation plate.

[0015] As a further scheme of the present application, the inner workpiece rack comprises an inner frame, wherein a first upper support, a second upper support, a third upper support, a fourth upper support, a first right support, a second right support, a third right support, a first lower support, a second lower support, a third lower support, a fourth lower support, a first left support, a second left support, and a third left support are sequentially arranged around the inside of the inner frame.

[0016] As a further scheme of the present application, the first upper support is provided with a first upper shielding plate for mounting a shielding plate frame.

[0017] The second upper support is provided with a second upper shielding plate at the lower part for mounting a shielding plate frame, and a second upper anti-diffraction support is mounted on the side of the second upper support, which is movable around the second upper support connecting point.

[0018] The third upper support is provided with a third upper shielding plate at the bottom for mounting a shielding plate frame.

[0019] The fourth upper support is provided with a fourth upper shielding plate at the bottom for mounting a shielding plate frame.

[0020] The first right support is provided with a first right shielding plate for mounting the anti-diffraction shielding plate frame;

[0021] The second right support is provided with a second right shielding plate for mounting the anti-diffraction shielding plate frame;

[0022] The third right support is provided with a third right shielding plate for mounting the anti-diffraction shielding plate frame;

[0023] The first lower support is provided with a first lower shielding plate for mounting the anti-diffraction shielding plate frame, which is embedded in a first lower anti-diffraction support installed on the side of the first lower support and is provided with a groove for supporting the anti-diffraction shielding plate frame, and a first lower insulating block is arranged beside the groove;

[0024] The top of the second lower support is provided with a second lower shielding plate for mounting the anti-diffraction shielding plate frame;

[0025] The top of the third lower support is provided with a third lower shielding plate for mounting the anti-diffraction shielding plate frame;

[0026] The top of the fourth lower support is provided with a fourth lower shielding plate for mounting the anti-diffraction shielding plate frame, which is embedded in a fourth lower anti-diffraction support installed on the side of the fourth lower support and is provided with a groove for supporting the anti-diffraction shielding plate frame, and a fourth lower insulating block is arranged beside the groove;

[0027] The end of the first left support is provided with a first left shielding plate for mounting the anti-diffraction shielding plate frame, and the upper side of the first left support is provided with a first left anti-diffraction support and a groove for supporting the anti-diffraction shielding plate frame, and a first left insulating block is arranged beside the groove, and the first left anti-diffraction support is located above the first left shielding plate;

[0028] The end of the second left support is provided with a second left shielding plate for mounting the anti-diffraction shielding plate frame;

[0029] The end of the third left support is provided with a third left shielding plate for mounting the anti-diffraction shielding plate frame, and the lower side of the third left support is provided with a third left anti-diffraction support and a groove for supporting the anti-diffraction shielding plate frame, and a third left insulating block is arranged beside the groove, and the third left anti-diffraction support is located below the third left shielding plate.

[0030] As a further scheme of the present application, the inner frame is further provided with a bottom anti-diffraction support.

[0031] As a further scheme of the present application, the inner frame is further provided with a lock bolt on both sides.

[0032] As a further solution of the present invention: supporting feet are further provided on the outer side of the bottom of the inner frame.

[0033] As a further solution of the present invention: a movable bracket is provided on the anti-diffraction shielding plate frame.

[0034] Compared with the prior art, the present invention has the following beneficial effects:

[0035] When the substrate processing is completed and the substrate is replaced, there is no need to loosen the connection between the anti-diffraction shielding plate frame and the inner workpiece frame. It is only necessary to detach the substrate from the anti-diffraction shielding plate frame, replace it with a new substrate, and fix the new substrate to the anti-diffraction shielding plate frame. It is convenient and simple and improves production efficiency.

[0036] Insulation shielding components are installed above and below the external workpiece holder to prevent electrical discharge between the workpiece holder and the substrate, thus avoiding damage to the substrate. Several grooves are cut around the insulating plate, parallel to the upper and lower surfaces of the insulating plate. These grooves effectively disconnect the coating layer, preventing the conductive film from connecting to other metal parts and causing discharge marks on the substrate coating surface.

[0037] According to the size and shape characteristics of the substrate, the anti-diffraction shielding plate frame is installed on the inner workpiece frame through the supports around the inner frame, so that the anti-diffraction shielding plate frame is fixed in a structural state that fits the size and curved surface shape of the substrate. The substrate is fixed to the anti-diffraction shielding plate frame, and an anti-diffraction bracket is appropriately set at the position where the inner workpiece frame and the anti-diffraction shielding plate frame are connected to prevent the steam molecules or atoms released by the evaporation source from unnecessary diffraction or scattering before reaching the surface of the substrate, thereby ensuring that the back of the substrate is not contaminated. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] To facilitate understanding by those skilled in the art, the present invention is further described below with reference to the accompanying drawings.

[0039] Figure 1 This is a structural diagram of an embodiment of the present invention (1);

[0040] Figure 2 This is a structural diagram of an embodiment of the present invention (II);

[0041] Figure 3 A schematic structural diagram of an external workpiece holder according to an embodiment of the present invention;

[0042] Figure 4 for Figure 3 The schematic diagram of the scattered structure of the outer workpiece rack shown;

[0043] Figure 5 for Figure 4 Enlarged view of middle part I;

[0044] Figure 6 for Figure 4 Enlarged view of middle part II;

[0045] Figure 7 The assembly structure diagram of the inner workpiece frame and the substrate of the embodiment of the present application;

[0046] Figure 8 The structure diagram of the inner workpiece frame of the embodiment of the present application;

[0047] Figure 9 The position and structure diagram of the second upper shielding plate, the second upper anti-diffraction support of the embodiment of the present application;

[0048] Figure 10 The assembly structure diagram of the first lower anti-diffraction support, the first lower shielding plate, the first lower insulation block of the embodiment of the present application;

[0049] Figure 11 The assembly structure diagram of the fourth lower shielding plate, the fourth lower anti-diffraction support, the fourth lower insulation block of the embodiment of the present application;

[0050] Figure 12 The position and structure diagram of the first left shielding plate, the first left anti-diffraction support, the first left insulation block of the embodiment of the present application;

[0051] Figure 13 The position and structure diagram of the third left shielding plate, the third left anti-diffraction support, the third left insulation block of the embodiment of the present application;

[0052] Figure 14 The structure diagram of the bottom anti-diffraction support of the embodiment of the present application;

[0053] Figure 15 The structure diagram of the anti-diffraction shielding plate frame of the embodiment of the present application.

[0054] In the figure: 1-outer workpiece holder, 11-outer frame; 111-top beam; 112-side beam; 113-cross beam; 114-bottom beam; 115-lock catch; 12-upper baffle; 121-ear plate; 122-stiffener; 13-upper guide strip; 131-fitting hole; 14-upper insulating shielding assembly; 141-support seat; 142-upper insulating plate; 143-upper shielding cover plate; 144-upper shielding back plate; 145-upper insulating sleeve; 146-stay; 15-lower baffle; 16-lower insulating shielding assembly; 161-positioning plate; 162-lower insulating plate; 163-lower insulating sleeve; 164-lower shielding back plate; 165-lower shielding cover plate; 17-bottom plate welding piece; 171-lower guide strip; 2-inner workpiece holder; 21-inner frame; 22-first upper support; 221-first upper shielding plate; 23-second upper support; 231-second upper shielding plate; 232-second upper anti-diffraction support; 24-third upper support; 241-third upper shielding plate; 25-fourth upper support; 251-fourth upper shielding plate; 26-first right support; 261-first right shielding plate; 27-second right support; 271-second right shielding plate; 28-third right support; 281-third right shielding plate; 29-first lower support; 291-first lower anti-diffraction support; 292-first lower shielding plate; 293-first lower insulating block; 210-second lower support; 2101-second lower shielding plate; 211-third lower support; 2111-third lower shielding plate; 212-fourth lower support; 2121-fourth lower shielding plate; 2122-fourth lower anti-diffraction support; 2123-fourth lower insulating block; 213-first left support; 2131-first left shielding plate; 2132-first left anti-diffraction support; 2133-first left insulating block; 214-second left support; 2141-second left shielding plate; 215-third left support; 2151-third left shielding plate; 2152-third left anti-diffraction support; 2153-third left insulating block; 216-lock bolt; 217-bottom anti-diffraction support; 2171-bottom insulating block; 218-movable support; 219-leg; 3-substrate; 4-anti-diffraction shielding plate frame. DETAILED DESCRIPTION

[0055] In order to make the objectives, technical solutions and advantages of the present application clearer, the present application will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application, i.e., the described embodiments are only a part of the embodiments of the present application, but not all the embodiments. The components of the embodiments of the present application generally described and shown in the accompanying drawings can be arranged and designed in various different configurations.

[0056] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention as claimed, but is merely intended to represent selected embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative work are within the scope of protection of the present invention.

[0057] See also Figure 1 、 Figure 2 As shown, this embodiment provides a workpiece holder for a special-shaped curved substrate for vacuum sputtering coating, comprising an outer workpiece holder 1, an inner workpiece holder 2, and an anti-diffraction shielding plate frame 4. The inner workpiece holder 2 is fixed inside the outer workpiece holder 1, and the substrate 3 is fitted and mounted on the anti-diffraction shielding plate frame 4, and is mounted on the inner workpiece holder 2 through the anti-diffraction shielding plate frame 4. Specifically, a movable bracket 218 is provided on the anti-diffraction shielding plate frame 4. By rotating the movable bracket 218 so that the movable bracket 218 contacts the substrate 3, the substrate 3 can be mounted on the anti-diffraction shielding plate frame 4. By rotating the movable bracket 218 so that the movable bracket 218 is not in contact with the substrate 3, the substrate 3 can be removed from the anti-diffraction shielding plate frame 4.

[0058] Fix the substrate 3 to the anti-diffraction shielding plate frame 4, and then install the anti-diffraction shielding plate frame 4 on the inner workpiece frame 2. Replacing the substrate 3 is convenient and simple. There is no need to remove the anti-diffraction shielding plate frame 4. The substrate 3 can be directly taken off, which reduces the number of locations that need to be loosened and improves production efficiency.

[0059] See also Figure 3 As shown, the outer workpiece holder 1 includes an outer frame 11, an upper baffle 12 fixedly mounted on the top of the outer frame 11, an upper guide bar 13 having a mounting hole 131, and is mounted on the upper baffle 12 via a plurality of upper insulating shielding assemblies 14. The bottom of the outer frame 11 is mounted on the bottom plate welding member 17 via a lower insulating shielding assembly 16. A lower baffle 15 is provided at the lower portion of the outer frame 11, so that discharge does not occur between the workpiece holder and the substrate 3, thereby avoiding damage to the substrate 3. The lower baffle 15 is located above the lower insulating shielding assembly 16. The upper baffle 12 and the lower baffle 15 face the side where the substrate 3 is mounted, thereby preventing splashing onto the upper insulating shielding assembly 14 and the lower insulating shielding assembly 16. An ear plate 121 is provided on one side of the upper baffle 12 for mounting the upper insulating shielding assembly 14, and a reinforcing rib 122 is provided at the top of the upper baffle 12.

[0060] In some embodiments, see Figure 4 As shown, the outer frame 11 is a rectangular frame, including a top beam 111 and a bottom beam 114 arranged horizontally and parallel to each other. A lower baffle 15 is installed on the bottom beam 114. The ends of the top beam 111 and the bottom beam 114 are respectively connected to the side beams 112, and the side beams 112 are provided with lock buckles 115. A cross beam 113 is also provided at the lower part of the outer frame 11. The bottom of the side beams 112 extends out of the bottom beam 114, and a connecting plate is provided at the bottom of the side beams 112.

[0061] See also Figure 4 、 Figure 5 As shown, the upper insulating shielding assembly 14 includes a support base 141, an upper shielding cover 143, and an upper shielding back plate 144. The support base 141 is configured in a "Z" shape, and an upper insulating plate 142 is installed at the bottom of the support base 141. The bottom of the support base 141, the upper insulating plate 142, and the upper baffle 12 are mounted on the top beam 111 by bolts. The bolts are fitted with an upper insulating sleeve 145, which is assembled into the bolt mounting hole at the bottom of the support base 141. A mounting hole is provided at the top of the upper shielding cover 143, and the upper shielding back plate 144 is configured in an L shape and has a through hole corresponding to the mounting hole at the top of the upper shielding cover 143. The upper shielding back plate 144 and the upper shielding cover 143 cooperate to form a shielding box body with an opening at the bottom, and a slot is formed in the shielding box body for the support base 141 to pass through. The shielding box body is covered on the bottom of the support base 141 and the upper insulating plate 142. The upper portion of the support base 141 passes through the slot in the shielding box body and is located outside the shielding box body. It is connected to the upper guide bar 13 by bolts. The upper guide bar 13 stands on the upper baffle 12. One end of the support 146 is connected to the support base 141, and the other end passes through the through-holes at the top of the upper shielding cover plate 143 and the upper shielding back plate 144. The upper shielding cover plate 143 and the upper shielding back plate 144 can be connected to each other to form the shielding box body, or the shielding box body can be positioned and installed on the support base 141.

[0062] The upper insulating plate 142 is provided with a plurality of grooves parallel to the upper and lower planes of the upper insulating plate 142. The grooves can effectively disconnect the coating layer, preventing the conductive film from connecting to other metal parts and causing discharge lines on the substrate coating surface.

[0063] In some embodiments, see Figure 4 、 Figure 6 As shown, the lower insulating shielding assembly 16 includes a positioning plate 161, a lower shielding back plate 164, and a lower shielding cover plate 165. The bottom connecting plates of the two side beams 112 are respectively mounted on the two positioning plates 161. The lower shielding back plate 164 and the lower shielding cover plate 165 cooperate to form a shielding box body with an opening at the bottom, which covers the positioning plate 161 and the lower insulating plate 162. The lower insulating plate 162 is padded at the bottom of the positioning plate 161. Bolts pass through the positioning plate 161, the lower insulating plate 162, and the pads on the bottom plate welding part 17 in sequence to fix the lower insulating shielding assembly 16 to the bottom plate welding part 17. The bolts are fitted with a lower insulating sleeve 163, which is assembled into the bolt mounting hole of the positioning plate 161. A lower guide bar 171 is provided at the bottom of the bottom plate welding part 17, which cooperates with the guide groove in the vacuum coating chamber to realize the movement of the entire workpiece rack.

[0064] The lower insulating plate 162 is provided with a plurality of grooves parallel to the upper and lower planes of the lower insulating plate 162. The grooves can effectively disconnect the coating layer, preventing the conductive film from connecting to other metal parts and causing discharge lines on the substrate coating surface.

[0065] In some embodiments, see Figure 7 、 Figure 8 As shown, the inner workpiece rack 2 comprises an inner frame 21, which is a rectangular frame. The inner frame 21 is provided with a first upper support 22, a second upper support 23, a third upper support 24, a fourth upper support 25, a first right support 26, a second right support 27, a third right support 28, a first lower support 29, a second lower support 210, a third lower support 211, a fourth lower support 212, a first left support 213, a second left support 214, and a third left support 215. Lock bolts 216 are provided on both sides of the inner frame 21 to cooperate with the lock catch 115 to install the inner workpiece rack 2 on the outer workpiece rack 1 and lock it. The outer side of the bottom of the inner frame 21 is also provided with a support leg 219, and the inner workpiece rack 2 is specifically installed on the crossbeam 113 through the support leg 219.

[0066] The first upper shielding plate 221 is fixed to the first upper support 22 by insulating screws. The first upper shielding plate 221 is further provided with screw holes for being fixedly connected to the anti-diffraction shielding plate frame 4 .

[0067] The second upper shielding plate 231 is fixed to the lower portion of the second upper support 23 by insulating screws. Figure 9 As shown, the second upper shielding plate 231 is further provided with screw holes for fixedly connecting to the anti-diffraction shielding plate frame 4. The second upper anti-diffraction bracket 232 is fixed to the side of the second upper support 23 by insulating screws. The second upper anti-diffraction bracket 232 can rotate around the connection point of the second upper support 23 to achieve installation and removal of the substrate 3 and the anti-diffraction shielding plate frame 4.

[0068] The third upper shielding plate 241 is fixed to the bottom of the third upper support 24 by insulating screws. The third upper shielding plate 241 is also provided with screw holes for fixed connection with the anti-diffraction shielding plate frame 4 .

[0069] The fourth upper shielding plate 251 is fixed to the bottom of the fourth upper support 25 by insulating screws. The fourth upper shielding plate 251 is also provided with screw holes for fixedly connecting with the anti-diffraction shielding plate frame 4 .

[0070] The first right shielding plate 261 is fixed to the first right support 26 by insulating screws. The first right shielding plate 261 is further provided with screw holes for being fixedly connected to the anti-diffraction shielding plate frame 4 .

[0071] The second right shielding plate 271 is fixed to the second right support 27 by insulating screws, and screw holes are further formed in the second right shielding plate 271 for fixed connection with the anti-diffraction shielding plate frame 4.

[0072] The third right shielding plate 281 is fixed to the third right support 28 by insulating screws, and screw holes are further formed in the third right shielding plate 281 for fixed connection with the anti-diffraction shielding plate frame 4.

[0073] The first lower shielding plate 292 is fixed to the first lower support 29 by insulating screws, and screw holes are further formed in the first lower shielding plate 292 for fixed connection with the anti-diffraction shielding plate frame 4. Figure 10 The first lower shielding plate 292 is embedded in the first lower anti-diffraction support 291, the first lower anti-diffraction support 291 is installed on the side surface of the first lower support 29, and a recess for supporting the anti-diffraction shielding plate frame 4 is formed in the first lower anti-diffraction support 291. The anti-diffraction shielding plate frame 4 is provided with a through groove corresponding to the first lower anti-diffraction support 291, the first lower anti-diffraction support 291 passes through the through groove, and the wall of the through groove is clamped in the recess. A first lower insulating block 293 is arranged beside the recess to prevent the anti-diffraction shielding plate frame 4 from coming out of the recess.

[0074] The second lower shielding plate 2101 is fixed to the top of the second lower support 210 by insulating screws, and screw holes are further formed in the second lower shielding plate 2101 for fixed connection with the anti-diffraction shielding plate frame 4.

[0075] The third lower shielding plate 2111 is fixed to the top of the third lower support 211 by insulating screws, and screw holes are further formed in the third lower shielding plate 2111 for fixed connection with the anti-diffraction shielding plate frame 4.

[0076] The fourth lower shielding plate 2121 is fixed to the top of the fourth lower support 212 by insulating screws, and screw holes are further formed in the fourth lower shielding plate 2121 for fixed connection with the anti-diffraction shielding plate frame 4. Figure 11 The fourth lower shielding plate 2121 is embedded in the fourth lower anti-diffraction support 2122, the fourth lower anti-diffraction support 2122 is installed on the side surface of the fourth lower support 212 by insulating screws, and a recess for supporting the anti-diffraction shielding plate frame is formed in the fourth lower anti-diffraction support 2122. The anti-diffraction shielding plate frame 4 is provided with a through groove corresponding to the fourth lower anti-diffraction support 2122, the fourth lower anti-diffraction support 2122 passes through the through groove, and the wall of the through groove is clamped in the recess. A fourth lower insulating block 2123 is arranged beside the recess to prevent the anti-diffraction shielding plate frame 4 from coming out of the recess.

[0077] The first left shielding plate 2131 is fixed to the end of the first left support 213 by insulating screws, and screw holes are further formed in the first left shielding plate 2131 for fixed connection with the anti-diffraction shielding plate frame 4. Figure 12As shown, the first left shielding plate 2131 is also provided with a screw hole for fixed connection with the anti-diffraction shielding plate frame 4. The first left shielding plate 2131 is provided with a first left anti-diffraction support 2132 on the upper side, which is located above the first left shielding plate 2131 and is provided with a groove for supporting the anti-diffraction shielding plate frame 4. The anti-diffraction shielding plate frame 4 is provided with a through slot corresponding to the first left anti-diffraction support 2132. The first left anti-diffraction support 2132 passes through the through slot, so that the wall of the through slot is clamped in the groove. A first left insulating block 2133 is arranged beside the groove to prevent the anti-diffraction shielding plate frame 4 from coming out of the groove.

[0078] The second left shielding plate 2141 is fixed to the end of the second left support 214 by an insulating screw. The second left shielding plate 2141 is also provided with a screw hole for fixed connection with the anti-diffraction shielding plate frame 4.

[0079] The third left shielding plate 2152 is fixed to the end of the third left support 215 by an insulating screw. Please refer to Figure 13 As shown, the third left shielding plate 2152 is also provided with a screw hole for fixed connection with the anti-diffraction shielding plate frame 4. The third left shielding plate 2152 is provided with a third left anti-diffraction support 2151 on the lower side, which is located below the third left shielding plate 2152 and is provided with a groove for supporting the anti-diffraction shielding plate frame 4. The anti-diffraction shielding plate frame 4 is provided with a through slot corresponding to the third left anti-diffraction support 2151. The third left anti-diffraction support 2151 passes through the through slot, so that the wall of the through slot is clamped in the groove. A third left insulating block 2153 is arranged beside the groove to prevent the anti-diffraction shielding plate frame 4 from coming out of the groove.

[0080] The inner frame is also provided with a bottom anti-diffraction support 217. Please refer to Figure 14 As shown, the bottom anti-diffraction support 217 is provided with a groove for supporting the anti-diffraction shielding plate frame 4. The anti-diffraction shielding plate frame 4 is provided with a through slot corresponding to the bottom anti-diffraction support 217. The bottom anti-diffraction support 217 passes through the through slot, so that the wall of the through slot is clamped in the groove. A bottom insulating block 2171 is arranged beside the groove to prevent the anti-diffraction shielding plate frame 4 from coming out of the groove.

[0081] It should be noted that the first upper support 22, the second upper support 23, the third upper support 24, the fourth upper support 25, the first right support 26, the second right support 27, the third right support 28, the first lower support 29, the second lower support 210, the third lower support 211, the fourth lower support 212, the first left support 213, the second left support 214, and the third left support 215 can be designed with different lengths and shapes according to the shape of the substrate 3, including a "one" shape, a "7" shape, a "Z" shape, a "U" shape, etc. Under the cooperation of the supports, the shielding plates, and the anti-diffraction supports, the anti-diffraction shielding plate frame 4 is fixed in a structure state that conforms to the size and curved surface shape of the substrate 3. All the supports are not directly connected with the anti-diffraction shielding plate frame 4, but are connected through the corresponding shielding plates, so that the workpiece frame and the substrate will not be discharged, avoiding damage to the substrate. The anti-diffraction supports are appropriately arranged to be connected with the anti-diffraction shielding plate frame 4, preventing unnecessary diffraction or scattering of vapor molecules or atoms released by the evaporation source before reaching the surface of the substrate, and ensuring that the back of the substrate 3 is not contaminated.

[0082] Specifically, a total of 14 supports are arranged around the inner frame 21, and a bottom anti-diffraction support 217 is arranged at the middle position of the top to provide support and fixing effect for the anti-diffraction shielding plate frame 4, so that the anti-diffraction shielding plate frame 4 will not shake due to the inertia effect of the movement of the workpiece frame. In this way, it can not only adapt to the fixing of special-shaped curved substrates, but also maintain the special-shaped curved shape of the anti-diffraction shielding plate frame 4, which can well conform to the substrate 3. The substrate 3 is installed on the anti-diffraction shielding plate frame 4 through the movable support 218 and the second upper anti-diffraction support 232. Only by rotating the movable support 218 and the second upper anti-diffraction support 232 to separate the substrate from the anti-diffraction shielding plate frame 4, replacing a new substrate 3, and rotating the movable support 218 and the second upper anti-diffraction support 232 to fix the new substrate 3 on the anti-diffraction shielding plate frame 4, the disassembly and replacement are convenient and simple, and the production efficiency is improved.

[0083] The outer workpiece frame 1 is provided with an insulating shielding assembly on the upper and lower parts, and a plurality of grooves parallel to the upper and lower planes of the insulating plate are formed around the insulating plate. The grooves can effectively disconnect the plating layer and prevent the conductive film from being connected to other metal parts to cause discharge lines on the plating surface of the substrate, thereby ensuring the plating quality.

[0084] The above content is only an example and description of the structure of the present application. Those skilled in the art can make various modifications or supplements to the described specific embodiments or use similar ways to replace them, as long as they do not deviate from the structure of the invention or exceed the scope defined by the present claims, which shall belong to the protection scope of the present application.

Claims

1. A workpiece holder for special-shaped curved substrates used for vacuum sputtering coating, characterized in that: It includes an outer workpiece frame, an inner workpiece frame and an anti-diffraction shielding plate frame, wherein the inner workpiece frame is fixed inside the outer workpiece frame, the substrate is mounted on the anti-diffraction shielding plate frame, and is mounted on the inner workpiece frame through the anti-diffraction shielding plate frame; The outer workpiece frame includes an outer frame, an upper baffle is provided on the top of the outer frame, the upper guide bar is installed on the upper baffle through a plurality of upper insulating shielding components, the bottom of the outer frame is installed on the bottom plate welding part through a lower insulating shielding component, and a lower baffle is provided at the lower part of the outer frame, and the lower baffle is located above the lower insulating shielding component; The upper baffle and the lower baffle are facing the side of the mounting substrate; The outer frame includes two side beams, a top beam connected to the top of the two side beams, a bottom beam connected to the bottom of the two side beams, a lower baffle installed on the bottom beam, lock buckles are provided on the two side beams, and a cross beam is also provided at the lower part of the outer frame; The upper insulating shielding assembly includes a support base, an upper shielding cover plate and an upper shielding back plate. The bottom of the support base is padded with an upper insulating plate and fixed to the top of the upper baffle. The side of the support base is connected to the upper guide bar, and the upper guide bar stands on the upper baffle. The upper shielding cover plate and the upper shielding back plate cooperate to form a shielding box body with an opening at the bottom, and the shielding box body covers the bottom of the support base and the upper insulating plate; The upper insulating plate is provided with a plurality of grooves parallel to the upper and lower planes of the upper insulating plate. The lower insulating shielding assembly includes a positioning plate, a lower shielding back plate and a lower shielding cover plate. The lower insulating plate is padded on the bottom of the positioning plate and fixed to the bottom plate welding piece. The lower shielding rear plate and the lower shielding cover plate cooperate to form a shielding box body with an opening at the bottom, and the shielding box body is covered on the positioning plate and the lower insulating plate; The lower insulating plate is provided with a plurality of grooves parallel to the upper and lower planes of the lower insulating plate. The inner workpiece rack comprises an inner frame, and supports are arranged around the inner periphery of the inner frame.

2. The workpiece holder for special-shaped curved substrates for vacuum sputtering coating according to claim 1, characterized in that: The supports include a first upper support, a second upper support, a third upper support, a fourth upper support, a first right support, a second right support, a third right support, a first lower support, a second lower support, a third lower support, a fourth lower support, a first left support, a second left support, and a third left support, which are sequentially arranged around the interior of the inner frame.

3. The workpiece holder for special-shaped curved substrates for vacuum sputtering coating according to claim 2, characterized in that: The first upper support is provided with a first upper shielding plate for mounting an anti-diffraction shielding plate frame; A second upper shielding plate for mounting an anti-diffraction shielding plate frame is provided at the lower portion of the second upper support, and a second upper anti-diffraction bracket is mounted on the side of the second upper support, and the second upper anti-diffraction bracket can move around the connection point of the second upper support; A third upper shielding plate for mounting an anti-diffraction shielding plate frame is provided at the bottom of the third upper support; A fourth upper shielding plate for mounting an anti-diffraction shielding plate frame is provided at the bottom of the fourth upper support; The first right support is provided with a first right shielding plate for mounting an anti-diffraction shielding plate frame; The second right support is provided with a second right shielding plate for mounting an anti-diffraction shielding plate frame; The third right support is provided with a third right shielding plate for mounting an anti-diffraction shielding plate frame; The first lower support is provided with a first lower shielding plate for mounting an anti-diffraction shielding plate frame, the first lower shielding plate is embedded in a first lower anti-diffraction bracket, the first lower anti-diffraction bracket is mounted on a side surface of the first lower support, and a groove for supporting the anti-diffraction shielding plate frame is opened in the first lower anti-diffraction bracket, and a first lower insulating block is provided next to the groove; A second lower shielding plate for mounting an anti-diffraction shielding plate frame is provided on the top of the second lower support; A third lower shielding plate for mounting an anti-diffraction shielding plate frame is provided on the top of the third lower support; A fourth lower shielding plate for mounting an anti-diffraction shielding plate frame is provided on the top of the fourth lower support, the fourth lower shielding plate is embedded in a fourth lower anti-diffraction bracket, the fourth lower anti-diffraction bracket is installed on the side of the fourth lower support, and a groove for supporting the anti-diffraction shielding plate frame is opened on the fourth lower anti-diffraction bracket, and a fourth lower insulating block is provided next to the groove; A first left shielding plate for mounting an anti-diffraction shielding plate frame is provided at the end of the first left support, a first left anti-diffraction bracket is provided on the upper side of the first left support, and a groove for supporting the anti-diffraction shielding plate frame is opened on the first left anti-diffraction bracket, a first left insulating block is provided next to the groove, and the first left anti-diffraction bracket is located above the first left shielding plate; A second left shielding plate for mounting an anti-diffraction shielding plate frame is provided at the end of the second left support; A third left shielding plate for installing an anti-diffraction shielding plate frame is provided at the end of the third left support, a third left anti-diffraction bracket is provided on the lower side of the third left support, and a groove for supporting the anti-diffraction shielding plate frame is opened on the third left anti-diffraction bracket, a third left insulating block is provided next to the groove, and the third left anti-diffraction bracket is located below the third left shielding plate.

4. A workpiece holder for substrates with special-shaped curved surfaces for vacuum sputtering coating according to claim 1, 2 or 3, characterized in that: The inner frame is also provided with a bottom anti-diffraction bracket.

5. The workpiece holder for special-shaped curved substrates for vacuum sputtering coating according to claim 1 or 2, characterized in that: Lock bolts are also provided on both sides of the inner frame.

6. The workpiece holder for substrates with special-shaped curved surfaces for vacuum sputtering coating according to claim 1 or 2, characterized in that: Support legs are also provided on the outer side of the bottom of the inner frame.

7. The workpiece holder for special-shaped curved substrates for vacuum sputtering coating according to claim 1, characterized in that: A movable bracket is provided on the anti-diffraction shielding plate frame.

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