Adaptive lubrication, corrosion-resistant multifunctional GLC-CrCN composite film and preparation method thereof

Abstract

This invention belongs to the field of materials surface engineering and physical vapor deposition for thin film preparation technology. It relates to an adaptive lubrication and corrosion-resistant multifunctional GLC-CrCN composite thin film and its preparation method. Using 304 stainless steel as a substrate, a GLC-CrCN composite coating is prepared using magnetron sputtering combined with multi-arc ion plating technology. The GLC-CrCN composite coating includes: a Cr underlayer deposited on the substrate and alternating GLC / CrCN layers. The Cr layer is preferentially deposited on the substrate surface as an underlayer, which relaxes the internal stress between the substrate and the CrCN film layer and improves the adhesion between the film layer and the substrate, thereby improving the wear resistance of the thin film. This invention provides a new approach for the preparation of novel multifunctional lubricating thin film materials with low friction coefficient, excellent wear resistance and corrosion resistance, and environmental adaptability, which is of great significance to the development and application of lubricating thin film technology.

Description

Technical Field

[0001] This invention belongs to the field of materials surface engineering and physical vapor deposition for thin film preparation technology, and relates to an adaptive lubrication and corrosion-resistant multifunctional GLC-CrCN composite thin film and its preparation method. Background Technology

[0002] The development and utilization of marine resources are inseparable from various marine engineering equipment and facilities, while the protection of marine resources and the safeguarding of national interests are inseparable from marine military equipment. Due to the highly corrosive marine environment and the complex combined effects of environmental chemistry and mechanics, marine engineering equipment, facilities, and military equipment often suffer from material failures that affect their normal operation. In particular, the metallic materials that form the basis of marine equipment face even harsher service conditions than those on land, being affected by corrosion, wear, impact, and other factors. Extensive data indicates that damage and failure caused by coating-substrate peeling, and corrosion, wear, or abrasion failure of moving parts, have become one of the major technical bottlenecks restricting the development of major marine engineering technologies and equipment. Besides developing new special materials for the marine environment, the simplest and most direct way to solve this problem is to construct a layer of material with significant friction-reducing, wear-resistant, and corrosion-resistant properties on the surface of existing friction pairs in the marine atmospheric environment. Therefore, research into developing new adaptive lubrication, corrosion-resistant, and multifunctional thin-film protective materials is imperative. Graphite-like carbon (GLC) coatings, as amorphous carbon thin films, consist of a small amount of sp... 3 Cross-linking of bonds forms obvious sp 2 Due to its unique microstructure, the bonded structure makes it a self-lubricating coating material with excellent impact toughness and wear resistance, as well as good corrosion resistance. In recent years, the preparation of hard particle-reinforced graphite-like amorphous carbon-based composite coatings using magnetron sputtering and vacuum physical sputtering deposition to improve the wear resistance and corrosion resistance of the substrate material has become a research hotspot.

[0003] However, GLC films suffer from high internal stress, making their surface prone to cracking, wrinkling, and even detachment, thus limiting their further applications. This drawback can be effectively mitigated by releasing internal stress and improving film stability through the fabrication of multilayer structures.

[0004] Therefore, a thin film material that reduces internal stress and improves film-substrate adhesion is needed to solve this technical problem. Summary of the Invention

[0005] To solve the above-mentioned technical problems, the present invention is implemented through the following technical solution.

[0006] An adaptive lubrication and corrosion-resistant multifunctional GLC-CrCN composite film is disclosed. The composite film consists of the following layers on the substrate surface from the inside out: a Cr base layer, a CrCN / GLC / CrCN functional layer, and a GLC wear-resistant surface layer. The CrCN / GLC / CrCN functional layer is composed of CrCN sublayer, GLC sublayer, and CrCN sublayer stacked sequentially. The total thickness of the composite film is 1.35–2.65 μm.

[0007] Preferably, the thickness of the Cr base layer is 150nm to 250nm, the thickness of the CrCN sublayer is 300nm to 600nm, and the thickness of the GLC sublayer and the GLC wear-resistant surface layer is 300nm to 600nm.

[0008] Preferably, the substrate is stainless steel.

[0009] This invention also discloses a method for preparing an adaptive lubrication and corrosion-resistant multifunctional GLC-CrCN composite film. The preparation method is used to prepare the above-mentioned GLC-CrCN composite film. The preparation method first deposits Cr on a substrate by ion etching to form a Cr underlayer; then, CrCN sublayers and GLC sublayers are continuously and alternately deposited on the Cr underlayer to form a CrCN / GLC / CrCN functional layer in which the outermost and innermost layers are both CrCN sublayers; finally, graphite is deposited on the CrCN / GLC / CrCN functional layer to form a GLC surface layer.

[0010] Preferably, the preparation method of the adaptive lubrication and corrosion-resistant multifunctional GLC-CrCN composite film includes the following steps:

[0011] Preparation of S1 and Cr underlayer: In an argon atmosphere, the substrate surface is ion-etched using a radio frequency ion source, and then Cr is deposited to form a metallic Cr underlayer on the substrate surface.

[0012] S2, CrCN sublayer preparation: In a nitrogen atmosphere, the surface of the metal Cr substrate formed in step S1 is simultaneously subjected to first DC magnetron sputtering and multi-arc ion plating deposition to obtain the CrCN sublayer;

[0013] S3, GLC sublayer preparation: In an argon atmosphere, graphite is deposited on the surface of the CrCN sublayer formed in the previous step by DC magnetron sputtering to obtain the GLC sublayer.

[0014] S4, CrCN sublayer preparation; In a nitrogen atmosphere, the first DC magnetron sputtering and multi-arc ion plating deposition are performed simultaneously on the surface of the GLC sublayer formed in the previous step to obtain the CrCN sublayer.

[0015] S5. Preparation of GLC surface layer: In an argon atmosphere, graphite is deposited by DC magnetron sputtering on the surface of the CrCN / GLC / CrCN functional layer formed in the previous step to obtain the GLC surface layer, forming an adaptive lubrication and corrosion-resistant multifunctional composite film.

[0016] Preferably, in step S1, the multi-arc ion plating deposition uses a Cr target as the target material, and the process parameters for Cr deposition include: a bias voltage of -100V, a pure Cr target arc current of 80-100A, and a deposition time of 10-15min; the flow rate of the working gas argon is 130-150sccm. In step S2, the working gas flow rate is 300sccm, the bias voltage is -100V, the deposition time for the deposition support layer is 10-15min, and the target current applied to the Cr target is 75-100A.

[0017] Preferably, in steps S2 and S4, the multi-arc ion plating deposition uses a Cr target as the target material, the first DC magnetron sputtering uses a graphite target as the target material, argon and nitrogen are used as working gases, the vacuum degree is 0.3-0.6 Pa, the bias voltage is -100 V, the Cr target arc current is 90-110 A, the first DC magnetron sputtering target current is 2-4 A, the time is 8-16 min, the flow rate of the working gas argon is 40-60 sccm, and the flow rate of nitrogen is 180-220 sccm.

[0018] Preferably, in step S3, the first DC magnetron sputtering uses a graphite target as the target material, argon as the working gas, a vacuum degree of 0.3 to 0.6 Pa, a bias voltage of -100 V, a first DC magnetron sputtering target current of 2 to 4 A, and a time of 100 to 200 min; the flow rate of the working gas argon is 120 to 160 sccm.

[0019] Preferably, in steps S2 to S5, the modulation ratio of GLC film thickness to CrCN film thickness is 0 to 2:1; considering changing the thickness of the two film layers while keeping the total thickness constant, the GLC film thickness:CrCN film thickness can be 1:2, 1:1, 2:1 and pure GLC.

[0020] The beneficial effects of this invention are:

[0021] 1. The GLC-CrCN multilayer composite film of the present invention combines the advantages of transition metal nitride and diamond-like carbon film, improves the shortcomings of single-layer composite film, relaxes the internal stress between GLC film layer and adjacent film layer, gives full play to the advantages of high hardness and low friction coefficient of GLC film layer, and uses CrCN as support layer to improve the hardness and mechanical properties of the entire film layer.

[0022] 2. The magnetron sputtering composite multi-arc ion plating equipment used in this invention is similar to the plating equipment used in industrial production. At the same time, it uses mature DC magnetron sputtering technology and radio frequency magnetron sputtering technology to prepare the target thin film. The operation is simple and is conducive to large-scale mass production in industry.

[0023] 3. The multilayer composite film prepared by this invention not only possesses self-lubricating and corrosion-resistant properties, but also meets the strength and wear-resistance requirements of components under dynamic loads. This multilayer composite film design not only improves the material's performance but also enhances the service life and performance stability of mechanical components in marine environments. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the structure of the GLC-CrCN composite film provided in Example 1 of the present invention, which describes an adaptive lubrication and corrosion-resistant multifunctional GLC-CrCN composite film and its preparation method.

[0025] Figure 2 The cross-sectional and surface SEM images of the GLC-CrCN composite film provided in Embodiment 1 of the present invention;

[0026] Figure 3 Comparison of mechanical properties between Embodiment 1 and Comparative Example 1 of the present invention;

[0027] Figure 4 This is a comparison chart of the friction coefficients of Embodiment 1 and Comparative Example 1 of the present invention;

[0028] Figure 5 The diagram shows the potentiodynamic polarization curves of Embodiment 1 and Comparative Example 1 of the present invention. Detailed Implementation

[0029] The related technologies of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0030] Unless otherwise specified, the experimental and detection methods described in the following embodiments are conventional methods; unless otherwise specified, the reagents and materials are commercially available.

[0031] The target materials used in the various embodiments of the present invention are Cr metal targets with a purity of 99.99% and magnetron graphite targets with a purity of 99.999%.

[0032] The final prepared thin film structure is as follows Figure 1As shown: 304 stainless steel is used as the substrate. Cr is deposited on the substrate surface as the underlayer, and CrCN and GLC are deposited alternately twice as functional layers. The surface layer is a GLC film as a wear-resistant layer.

[0033] The invention will be specifically described below through the following embodiments.

[0034] Example 1

[0035] A method for preparing an adaptive lubrication and corrosion-resistant multifunctional GLC-CrCN composite film includes the following steps:

[0036] S1. In an argon atmosphere, an ion etching process is performed on the substrate surface using a radio frequency ion source, followed by Cr deposition to form a metallic Cr underlayer on the substrate surface.

[0037] Multi-arc ion plating deposition uses a Cr target as the target material. During ion etching, the ion source voltage is set to 500V, the vacuum degree to 0.5Pa, and etching is performed for 10 min, 5 min, and 5 min at bias voltages of -600V, -500V, and -400V, respectively. The process parameters for Cr deposition include: bias voltage of -100V, pure Cr target arc current of 100A, and deposition time of 15 min. The flow rate of the working gas argon is 140 sccm.

[0038] S2. In a nitrogen atmosphere, a first DC magnetron sputtering and multi-arc ion plating deposition are simultaneously performed on the surface of the Cr metal substrate to obtain a CrCN functional layer.

[0039] Multi-arc ion plating deposition uses a Cr target as the target material, while the first DC magnetron sputtering uses a graphite target as the target material, with argon and nitrogen as the working gases. The vacuum level is 0.5 Pa, the bias voltage is -100 V, the Cr target arc current is 100 A, the first DC magnetron sputtering target current is 3 A, and the time is 8 min. The flow rate of the working gas argon is 50 sccm, and the flow rate of nitrogen is 200 sccm.

[0040] S3. In an argon atmosphere, graphite was deposited using a first DC magnetron sputtering method with a vacuum of 0.5 Pa, a bias voltage of -100 V, a first DC magnetron sputtering target current of 3 A, and a time of 200 min. The flow rate of the working gas argon was 140 sccm, resulting in a GLC functional layer.

[0041] S4. In a nitrogen atmosphere, the first DC magnetron sputtering and multi-arc ion plating deposition are performed simultaneously on the surface of the GLC functional layer to obtain the CrCN functional layer.

[0042] Multi-arc ion plating deposition uses a Cr target as the target material, while the first DC magnetron sputtering uses a graphite target as the target material, with argon and nitrogen as the working gases. The vacuum level is 0.5 Pa, the bias voltage is -100 V, the Cr target arc current is 100 A, the first DC magnetron sputtering target current is 3 A, and the time is 8 min. The flow rate of the working gas argon is 50 sccm, and the flow rate of nitrogen is 200 sccm.

[0043] S5. In an argon atmosphere, graphite was deposited using a first DC magnetron sputtering method with a vacuum of 0.5 Pa, a bias voltage of -100 V, a first DC magnetron sputtering target current of 3 A, and a time of 200 min. The working gas argon flow rate was 140 sccm, resulting in a GLC surface layer.

[0044] Example 2

[0045] A method for preparing an adaptive lubrication and corrosion-resistant multifunctional GLC-CrCN composite film includes the following steps:

[0046] S1. In an argon atmosphere, an ion etching process is performed on the substrate surface using a radio frequency ion source, followed by Cr deposition to form a metallic Cr underlayer on the substrate surface.

[0047] Multi-arc ion plating deposition uses a Cr target as the target material. During ion etching, the ion source voltage is set to 500V, the vacuum degree to 0.6Pa, and etching is performed for 10 min, 5 min, and 5 min at bias voltages of -600V, -500V, and -400V, respectively. The process parameters for Cr deposition include: bias voltage of -100V, pure Cr target arc current of 100A, and deposition time of 15 min. The flow rate of the working gas argon is 140 sccm.

[0048] S2. In a nitrogen atmosphere, a first DC magnetron sputtering and multi-arc ion plating deposition are simultaneously performed on the surface of the Cr metal substrate to obtain a CrCN functional layer.

[0049] Multi-arc ion plating deposition uses a Cr target as the target material, while the first DC magnetron sputtering uses a graphite target as the target material, with argon and nitrogen as the working gases. The vacuum level is 0.6 Pa, the bias voltage is -100 V, the Cr target arc current is 100 A, the first DC magnetron sputtering target current is 3 A, and the time is 16 min. The flow rate of the working gas argon is 50 sccm, and the flow rate of nitrogen is 200 sccm.

[0050] S3. In an argon atmosphere, graphite was deposited using a first DC magnetron sputtering method with a vacuum of 0.6 Pa, a bias voltage of -100 V, a first DC magnetron sputtering target current of 3 A, and a time of 100 min. The flow rate of the working gas argon was 140 sccm, resulting in a GLC functional layer.

[0051] S4. In a nitrogen atmosphere, the first DC magnetron sputtering and multi-arc ion plating deposition are performed simultaneously on the surface of the GLC functional layer to obtain the CrCN functional layer.

[0052] Multi-arc ion plating deposition uses a Cr target as the target material, while the first DC magnetron sputtering uses a graphite target as the target material, with argon and nitrogen as the working gases. The vacuum level is 0.6 Pa, the bias voltage is -100 V, the Cr target arc current is 100 A, the first DC magnetron sputtering target current is 3 A, and the time is 16 min. The flow rate of the working gas argon is 50 sccm, and the flow rate of nitrogen is 200 sccm.

[0053] S5. In an argon atmosphere, graphite was deposited using a first DC magnetron sputtering method with a vacuum of 0.6 Pa, a bias voltage of -100 V, a first DC magnetron sputtering target current of 3 A, and a time of 100 min. The flow rate of the working gas argon was 140 sccm, resulting in a GLC surface layer.

[0054] Example 3

[0055] A method for preparing an adaptive lubrication and corrosion-resistant multifunctional GLC-CrCN composite film includes the following steps:

[0056] S1. In an argon atmosphere, an ion etching process is performed on the substrate surface using a radio frequency ion source, followed by Cr deposition to form a metallic Cr underlayer on the substrate surface.

[0057] Multi-arc ion plating deposition uses a Cr target as the target material. During ion etching, the ion source voltage is set to 500V, the vacuum degree to 0.5Pa, and etching is performed for 10 min, 5 min, and 5 min at bias voltages of -600V, -500V, and -400V, respectively. The process parameters for Cr deposition include: bias voltage of -100V, pure Cr target arc current of 100A, and deposition time of 10 min. The flow rate of the working gas argon is 140 sccm.

[0058] S2. In a nitrogen atmosphere, a first DC magnetron sputtering and multi-arc ion plating deposition are simultaneously performed on the surface of the Cr metal substrate to obtain a CrCN functional layer.

[0059] Multi-arc ion plating deposition uses a Cr target as the target material, while the first DC magnetron sputtering uses a graphite target as the target material, with argon and nitrogen as the working gases. The vacuum level is 0.5 Pa, the bias voltage is -100 V, the Cr target arc current is 100 A, the first DC magnetron sputtering target current is 3 A, and the time is 12 min. The flow rate of the working gas argon is 50 sccm, and the flow rate of nitrogen is 200 sccm.

[0060] S3. In an argon atmosphere, graphite was deposited using a first DC magnetron sputtering method with a vacuum of 0.5 Pa, a bias voltage of -100 V, a first DC magnetron sputtering target current of 3 A, and a time of 150 min. The working gas argon flow rate was 140 sccm, resulting in a GLC functional layer.

[0061] S4. In a nitrogen atmosphere, the first DC magnetron sputtering and multi-arc ion plating deposition are performed simultaneously on the surface of the GLC functional layer to obtain the CrCN functional layer.

[0062] Multi-arc ion plating deposition uses a Cr target as the target material, while the first DC magnetron sputtering uses a graphite target as the target material, with argon and nitrogen as the working gases. The vacuum level is 0.5 Pa, the bias voltage is -100 V, the Cr target arc current is 100 A, the first DC magnetron sputtering target current is 3 A, and the time is 12 min. The flow rate of the working gas argon is 50 sccm, and the flow rate of nitrogen is 200 sccm.

[0063] S5. In an argon atmosphere, graphite was deposited using a first DC magnetron sputtering method with a vacuum of 0.5 Pa, a bias voltage of -100 V, a first DC magnetron sputtering target current of 3 A, and a time of 150 min. The flow rate of the working gas argon was 140 sccm, resulting in a GLC surface layer.

[0064] Comparative Example 1

[0065] Original stainless steel substrate.

[0066] GLC films were prepared only on the surface of a stainless steel substrate, and the parameters for preparing the GLC films were the same as in Example 1.

[0067] The properties of the material prepared in Example 1 are characterized below, and the specific characterization results are shown in the figure.

[0068] Figure 2 These are cross-sectional and surface SEM images of the GLC-CrCN composite film provided in Embodiment 1 of the present invention. As can be seen from the figures, the interfaces of the multilayer structure of the composite film are alternating and clear. The thickness of the alternating GLC / CrCN multilayer film is approximately 2 μm. The surface of the GLC film deposited by controlled sputtering technology is uniform and smooth, the film structure is uniform and dense, and there is no significant surface damage. The film surface exhibits a typical granular structure.

[0069] Figure 3 This is a comparison diagram of the mechanical properties of Embodiment 1 and Comparative Example 1 of the present invention. The hardness and elastic modulus of the film are as follows: Figure 3As shown, the hardness of the GLC / CrCN composite films is significantly higher than that of the substrate, and the hardness of the multilayer films increases with the increase of the modulation ratio. When the modulation ratio of GLC to CrCN film thickness is 2:1, the film hardness reaches 6.5 GPa. The CrCN film introduced as a soft layer has lower hardness, therefore the hardness of the GLC / CrCN modulated structure is lower than that of the single-layer GLC film. When the modulation ratio is 1:1, the GLC1CrCN1 film has the highest elastic modulus, but overall, the elastic modulus of different sample films fluctuates relatively little. As is well known, H 3 / E 2 The H / E ratio can reflect the film's resistance to plastic deformation and crack damage, and indirectly reflect the film's wear resistance. Clearly, the H / E ratio of GLC / CrCN multilayer films is... 3 / E 2 The variation is significant, and it increases with the increase of the modulation ratio. H / E also shows the same trend, which reflects that the wear resistance can be effectively improved by preparing multilayer films.

[0070] Figure 4 This is a comparison chart of the friction coefficients of Example 1 and Comparative Example 1 of the present invention. The friction coefficient of 304 stainless steel is much higher than that of the GLC / CrCN composite film, and its overall fluctuation is large, exceeding 0.4. The friction coefficients of GLC1CrCN2, GLC1CrCN1, and GLC2CrCN1 films are relatively stable throughout the wear process, decreasing slightly with increasing friction time. However, the GLC1CrCN1 film has a large friction coefficient in the initial friction stage, which then reaches a stable state. Overall, the friction coefficient curves of all multilayer films are stable between 0.065 and 0.25, much smaller than the friction coefficient curve of the substrate, indicating that the GLC / CrCN composite film has excellent friction reduction effect.

[0071] Figure 5 These are the potentiodynamic polarization curves of Example 1 and Comparative Example 1 of this invention. The polarization curves of different samples were fitted using the Tafel linear extrapolation method to obtain the corrosion potential (E). corr ) and corrosion current density (I corr See Table 1.

[0072]

[0073]

[0074] Table 1

[0075] As shown in Table 1, the corrosion potential of the 304 stainless steel matrix is ​​-0.5386V, and the corrosion current density is 4.282×10⁻⁶. -5 A·cm -2The substrate exhibits a low corrosion potential and a high corrosion current density across the entire scanning potential range. The positive shift in corrosion potential and the decrease in corrosion current density of the coated sample effectively reduce the intrusion of corrosive ions from the electrolyte solution into the substrate, indicating that multilayer films can significantly enhance the corrosion resistance of the substrate and extend its service life.

[0076] The GLC-CrCN composite coating prepared by this invention provides a new approach for the preparation of novel multifunctional lubricating thin film materials with low friction coefficient, excellent wear resistance and corrosion resistance, and environmental adaptability. It is of great significance to the development and application of lubricating thin film technology, has a very broad application prospect, and has great application value and potential for promotion.

[0077] It should be emphasized that the above are merely preferred embodiments of the present invention and are not intended to limit the present invention in any way. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present invention shall still fall within the scope of the technical solution of the present invention.

Claims

1. A self-adapting lubrication, corrosion-resistant multifunctional GLC-CrCN composite film, characterized in that, The composite film consists of, from the inside out, the following layers on the substrate surface: a Cr base layer, a CrCN / GLC / CrCN functional layer, and a GLC wear-resistant surface layer. The CrCN / GLC / CrCN functional layer is composed of CrCN sublayers, GLC sublayers, and CrCN sublayers stacked sequentially. The total thickness of the composite film is 1.35–2.65 μm. The thickness of the Cr base layer is 150nm to 250nm, the thickness of the CrCN sublayer is 300nm to 600nm, and the thickness of the GLC sublayer and the GLC wear-resistant surface layer is 300nm to 600nm. The substrate is stainless steel.

2. A method for preparing a self-adapting lubrication, corrosion-resistant multifunctional GLC-CrCN composite film, characterized in that, The preparation method described herein is used to prepare the GLC-CrCN composite film of claim 1. The preparation method firstly deposits Cr on a substrate by ion etching to form a Cr underlayer; then, CrCN sublayers and GLC sublayers are continuously and alternately deposited on the Cr underlayer to form a CrCN / GLC / CrCN functional layer in which the outermost and innermost layers are both CrCN sublayers; finally, graphite is deposited on the CrCN / GLC / CrCN functional layer to form a GLC surface layer. The preparation method includes the following steps: Preparation of S1 and Cr underlayer: In an argon atmosphere, the substrate surface is ion-etched using a radio frequency ion source, and then Cr is deposited to form a metallic Cr underlayer on the substrate surface. S2, CrCN sublayer preparation: In a nitrogen atmosphere, the surface of the metal Cr base layer formed in step S1 is simultaneously subjected to first DC magnetron sputtering and multi-arc ion plating deposition to obtain the CrCN sublayer; S3, GLC sublayer preparation: In an argon atmosphere, graphite is deposited on the surface of the CrCN sublayer formed in the previous step by DC magnetron sputtering to obtain the GLC sublayer. S4, CrCN sublayer preparation; In a nitrogen atmosphere, the first DC magnetron sputtering and multi-arc ion plating deposition are performed simultaneously on the surface of the GLC sublayer formed in the previous step to obtain the CrCN sublayer. S5. Preparation of GLC surface layer: In an argon atmosphere, graphite is deposited by DC magnetron sputtering on the surface of the CrCN / GLC / CrCN functional layer formed in the previous step to obtain the GLC surface layer, forming an adaptive lubrication and corrosion-resistant multifunctional composite film.

3. The method for preparing self-lubricating, corrosion-resistant multifunctional GLC-CrCN composite film according to claim 2, characterized in that, In step S1, Cr is deposited using multi-arc ion plating, which uses a Cr target as the target material. The process parameters for Cr deposition include: bias voltage of -100V, pure Cr target arc current of 80-100A, deposition time of 10-15min, and working gas argon flow rate of 130-150sccm. In step S2, the working gas flow rate is 300 sccm, the bias voltage is -100 V, the deposition time of the CrCN sublayer is 10-15 min, and the target current applied to the Cr target is 75-100 A.

4. The method for preparing self-lubricating, corrosion-resistant multifunctional GLC-CrCN composite film according to claim 2, characterized in that, In steps S2 and S4, the multi-arc ion plating deposition uses a Cr target as the target material, the first DC magnetron sputtering uses a graphite target as the target material, argon and nitrogen as the working gases, the vacuum degree is 0.3-0.6 Pa, the bias voltage is -100 V, the Cr target arc current is 90-110 A, the first DC magnetron sputtering target current is 2-4 A, the time is 8-16 min, the flow rate of the working gas argon is 40-60 sccm, and the flow rate of nitrogen is 180-220 sccm.

5. The method for preparing self-lubricating, corrosion-resistant multifunctional GLC-CrCN composite film according to claim 2, characterized in that, In step S3, the first DC magnetron sputtering uses a graphite target as the target material, argon as the working gas, a vacuum of 0.3 to 0.6 Pa, a bias voltage of -100 V, a target current of 2 to 4 A, and a time of 100 to 200 min; the flow rate of the working gas argon is 120 to 160 sccm.

6. The method for preparing self-lubricating, corrosion-resistant multifunctional GLC-CrCN composite film according to claim 2, characterized in that, In steps S2 to S5, the modulation ratio of CrCN film thickness to GLC film thickness is 0.5 to 2:1.

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