Five-degree-of-freedom mirror adjustment mechanism and adjustment method thereof

Abstract

The application provides a five-degree-of-freedom mirror adjusting mechanism and an adjusting method thereof, which can solve the problem that the existing adjusting mechanism cannot realize the adjustment of five degrees of freedom and the decoupling between degrees of freedom, leading to complicated adjustment and the problem that the ideal position of the mirror cannot be quickly adjusted. The mechanism comprises a tilt adjusting module, a connecting module, a translation adjusting module for adjusting the translation of the mirror along the X-axis or Y-axis direction, and an axial translation adjusting member for driving the mirror to translate along the Z-axis. The tilt adjusting module comprises an outer mirror tube and an inner mirror tube. The outer mirror tube comprises a first spherical section, a cylindrical section and a cylindrical section. The inner mirror tube comprises a circular ring section and a second spherical section provided with a first boss on the inner wall. The cylindrical section is fixedly connected with the circular ring section through a fixing assembly and abuts against the outer wall of the circular ring section through a first adjusting assembly. The first adjusting assembly drives the mirror to tilt around the X-axis or Y-axis by adjusting the position of the circular ring section. The connecting module is sleeved on the outer cylindrical section and is in sliding fit with the cylindrical section.

Description

TECHNICAL FIELD

[0001] The present application relates to a mirror adjustment mechanism and an adjustment method, in particular to a five-degree-of-freedom mirror adjustment mechanism and an adjustment method. BACKGROUND

[0002] In an optical system, the position accuracy of a mirror has a great influence on the imaging system. In practical applications, the mirror is assembled with optical elements at the front and rear ends through mechanical connecting pieces after being installed in a mirror frame. Due to the machining errors of the optical elements, the machining errors of the mechanical connecting pieces, and the assembly errors, it is difficult for the mirror to reach the ideal installation position, and therefore a mirror adjustment mechanism is needed to adjust the position of the mirror to compensate for the influence of the above errors on the optical system. The existing mirror adjustment mechanism includes a rotation adjustment assembly, a translation adjustment assembly, and a mounting assembly, etc. For a mirror with symmetrical surfaces, the position degrees of freedom that need to be adjusted generally have five, but the existing mirror adjustment mechanism cannot realize the adjustment of the five degrees of freedom, and the adjustment of one degree of freedom will affect the adjustment of other degrees of freedom, i.e. the decoupling between the degrees of freedom cannot be realized, so that the adjustment process is complicated and the rapid adjustment of the ideal position of the mirror cannot be realized. SUMMARY

[0003] The purpose of the present application is to solve the technical problem that the existing mirror adjustment mechanism cannot realize the adjustment of five degrees of freedom and the decoupling between the degrees of freedom, resulting in a complicated adjustment process and the inability to realize the rapid adjustment of the ideal position of the mirror, and to provide a five-degree-of-freedom mirror adjustment mechanism and an adjustment method.

[0004] In order to achieve the above-mentioned purpose, the present application adopts the following technical solutions:

[0005] A five-degree-of-freedom mirror adjustment mechanism with mutual decoupling, characterized in that:

[0006] It comprises a tilt adjustment module, a connecting module, a translation adjustment module, and an axial translation adjustment piece connected coaxially in sequence.

[0007] The axial direction of the tilt adjustment module is defined as the Z axis, and any radial direction of the tilt adjustment module is defined as the X axis, and the Y axis is determined according to the left-hand rule.

[0008] The tilt adjustment module comprises an outer mirror barrel and an inner mirror barrel located in the outer mirror barrel.

[0009] The outer lens barrel comprises a first spherical section, a cylindrical section and a cylindrical section connected coaxially in sequence; the inner lens barrel comprises a second spherical section and a circular ring section connected coaxially; the first spherical section and the second spherical section are in sliding fit; a first boss for mounting the reflecting mirror is arranged on the inner wall of the second spherical section along the circumferential direction thereof; the cylindrical section is fixedly connected with the circular ring section through four fixing assemblies and abuts against the outer wall of the circular ring section through four first adjusting assemblies; the four first adjusting assemblies drive the reflecting mirror to tilt around the X axis or the Y axis by adjusting the position of the circular ring section;

[0010] The connecting module is sleeved outside the cylindrical section and in sliding fit with the cylindrical section;

[0011] The translation adjusting module is used for adjusting the translation of the reflecting mirror along the X axis or the Y axis;

[0012] The axial translation adjusting member abuts against the end face of the cylindrical section away from the cylindrical section through the translation adjusting module, and drives the reflecting mirror to translate along the Z axis by rotating the axial translation adjusting member.

[0013] Further, the connecting module comprises a linear bearing sleeved outside the cylindrical section and in sliding fit with the cylindrical section and a sleeve sleeved outside the linear bearing and fixedly connected with the linear bearing;

[0014] The outer wall of the cylindrical section is provided with a second boss along the circumferential direction; the second boss is connected with one end of the sleeve through a plurality of first fixing members; the first fixing members are used for fastening the axial translation adjusting member to adjust the position of the reflecting mirror after the translation along the Z axis;

[0015] The translation adjusting module is connected with the other end of the sleeve.

[0016] Further, the two fixing assemblies are oppositely arranged along the X axis, and the other two fixing assemblies are oppositely arranged along the Y axis; each fixing assembly comprises a spherical gasket and a second fixing member, and the second fixing member is fixedly connected with the cylindrical section and the circular ring section in sequence through the spherical gasket;

[0017] The two first adjusting assemblies are oppositely arranged along the X axis, and the other two first adjusting assemblies are oppositely arranged along the Y axis; each first adjusting assembly comprises an inclined fine toothed nut and an inclined adjusting member, and the inclined adjusting member abuts against the outer wall of the cylindrical section and the circular ring section in sequence through the inclined fine toothed nut.

[0018] Further, the centers of the first spherical section and the second spherical section are coincident with the mirror center O of the reflecting mirror away from the first boss.

[0019] Further, the translation adjustment module comprises a coaxially arranged connecting piece, a Y-axis translation plate, an X-axis translation plate and a support plate; one end of the connecting piece is connected with the other end of the sleeve; the Y-axis translation plate and the X-axis translation plate are sleeved outside the other end of the connecting piece, and the Y-axis translation plate is fixedly connected with the connecting piece; the Y-axis translation plate and the X-axis translation plate are slidably connected through a Y-axis linear guide rail assembly, and meanwhile, the Y-axis translation plate and the X-axis translation plate are connected through two third fixing pieces and four fourth fixing pieces; the third fixing piece is used for determining the initial position of the reflection mirror in the Y-axis direction; the fourth fixing piece is matched with the first waist-shaped hole arranged on the Y-axis translation plate, and is used for locking the position of the reflection mirror after the reflection mirror is translated in the Y-axis direction; a second adjustment assembly is arranged on one side wall of the X-axis translation plate through a first fixing plate; the acting end of the second adjustment assembly abuts against the Y-axis translation plate, and is used for translating the Y-axis translation plate in the Y-axis direction, so that the reflection mirror is translated in the Y-axis direction; a third fixing plate opposite to the first fixing plate is arranged on the other side wall of the X-axis translation plate; the third fixing plate is connected with the side wall of the Y-axis translation plate through a first elastic piece;

[0020] The X-axis translation plate and the support plate are slidably connected through an X-axis linear guide rail assembly, and meanwhile, the X-axis translation plate and the support plate are connected through four fifth fixing pieces and four sixth fixing pieces; the fifth fixing piece is used for determining the initial position of the reflection mirror in the X-axis direction; the sixth fixing piece is matched with the second waist-shaped hole arranged on the X-axis translation plate, and is used for locking the position of the reflection mirror after the reflection mirror is translated in the X-axis direction; a third adjustment assembly is arranged on one side wall of the support plate through a second fixing plate; the acting end of the third adjustment assembly abuts against the X-axis translation plate, and is used for translating the X-axis translation plate in the X-axis direction, so that the reflection mirror is translated in the X-axis direction; two fourth fixing plates opposite to the second fixing plate are arranged on the other side wall of the support plate, and the two fourth fixing plates are connected with the X-axis translation plate through two second elastic pieces;

[0021] The axial translation adjustment piece abuts against the cylindrical segment through the support plate and the connecting piece in sequence; a Z-axis fine thread nut is arranged between the axial translation adjustment piece and the connecting piece; the Z-axis fine thread nut is fixedly connected with the connecting piece and is threadedly connected with the axial translation adjustment piece; the Z-axis fine thread nut is connected with the cylindrical segment through two third elastic pieces.

[0022] Meanwhile, the application further provides an adjustment method of the five-degree-of-freedom mirror adjustment mechanism which is decoupled with each other, and the speciality of the adjustment method lies in that the method comprises the following steps:

[0023] Step 1, the front optical element in the optical machine system is connected through the translation adjustment module, and the reflection mirror is installed on the first boss through the reflection mirror frame;

[0024] Step 2, observing interference fringes of the mirror after imaging with the pre-optics and post-optics in the optical-mechanical system, and obtaining wavefront aberration of a central field of view of the optical-mechanical system;

[0025] Step 3, judging whether the wavefront aberration obtained in Step 2 meets index requirements of the optical-mechanical system;

[0026] When the index requirements are met, directly entering subsequent work;

[0027] When the index requirements are not met, determining degrees of freedom of the mirror that need to be adjusted according to Z5-Z9 terms of Zernike polynomial coefficients generated by the wavefront aberration;

[0028] If the Z5 and Z6 term coefficients exceed an allowable error range of astigmatism, Step 4 is performed;

[0029] If the Z7 and Z8 term coefficients exceed an allowable error range of coma, Step 5 is performed;

[0030] If the Z9 term coefficient exceeds an allowable error range of spherical aberration, Step 6 is performed;

[0031] Step 4, loosening four fixing assemblies, adjusting the circular ring segment by using four first adjusting assemblies, and then driving the mirror to tilt around the X axis or the Y axis, returning to Step 2 after each adjustment until the newly generated Z5 and Z6 term coefficients are within the allowable error range of astigmatism, and then tightening the four fixing assemblies to complete position adjustment of the mirror tilting around the X axis or the Y axis;

[0032] Step 5, using the translation adjusting module to make the mirror translate along the X axis and the Y axis, returning to Step 2 after each translation until the newly generated Z7 and Z8 term coefficients are within the allowable error range of coma, and then completing position adjustment of the mirror translating along the X axis and the Y axis;

[0033] Step 6, driving the cylindrical segment to translate along the Z axis in the connecting module by the rotation axis translation adjusting member, and then driving the mirror to translate along the Z axis, returning to Step 2 after each translation until the newly generated Z9 term coefficient is within the allowable error range of spherical aberration, and then completing position adjustment of the mirror translating along the Z axis.

[0034] Further, Step 1 is specifically: circumscribing the pre-optics in the optical-mechanical system with the support plate, and installing the mirror on the first boss by the mirror frame;

[0035] Step 4 is specifically: loosening the four second fixing members, adjusting the circular ring segment by using the two tilt adjustment members oppositely arranged along the Y-axis direction, thereby driving the reflector to tilt around the X-axis, adjusting the circular ring segment by using the two tilt adjustment members oppositely arranged along the X-axis direction, thereby driving the reflector to tilt around the Y-axis, returning to step 2 after each adjustment until the newly generated Z5 and Z6 coefficients are within the allowable error range of astigmatism, tightening the four second fixing members, and completing the position adjustment of the reflector tilting around the X-axis or Y-axis.

[0036] Further, step 5 is specifically:

[0037] Loosen the four fifth fixing members and the two third fixing members, loosen the four sixth fixing members and the four fourth fixing members, push the X-axis translation plate to translate along the X-axis direction by rotating the third adjustment assembly, thereby driving the reflector to translate along the X-axis direction, push the Y-axis translation plate to translate along the Y-axis direction by rotating the second adjustment assembly, thereby driving the reflector to translate along the Y-axis direction, return to step 2 after each adjustment until the newly generated Z7 and Z8 coefficients are within the allowable error range of coma, tighten the four sixth fixing members and the four fourth fixing members, and complete the position adjustment of the reflector translating along the X-axis and Y-axis directions.

[0038] Further, step 6 is specifically:

[0039] Loosen the plurality of first fixing members, drive the cylindrical segment to translate along the Z-axis in the linear bearing by rotating the axial translation adjustment member, thereby driving the reflector to translate along the Z-axis, return to step 2 after each translation until the newly generated Z9 coefficient is within the allowable error range of spherical aberration, tighten the plurality of first fixing members, and complete the position adjustment of the reflector translating along the Z-axis.

[0040] Advantages of the present application:

[0041] 1. The present application provides a five-degree-of-freedom mirror adjustment mechanism and its adjustment method, which are decoupled from each other, compact in structure and convenient to use. The present application can realize the adjustment of five degrees of freedom, including three degrees of freedom of translation and two degrees of freedom of tilt, and the adjustment of one degree of freedom will not affect the adjustment of other degrees of freedom, i.e. the decoupling between the five degrees of freedom is realized, the adjustment process is simple, and the ideal position of the reflector can be quickly adjusted.

[0042] 2. The first fixing member in the present application can ensure the position stability of the reflector after translating along the Z-axis. The four first adjustment assemblies are oppositely arranged along the X-axis direction and the Y-axis direction, which can further improve the accuracy of the tilt position of the reflector around the X-axis and the Y-axis.

[0043] 3、In the application, the centers of the first spherical segment and the second spherical segment are coincident with the mirror center O of the mirror, so that the distance between the mirror center and the centers of the front and rear optical elements will not be affected when the mirror is adjusted in tilt. BRIEF DESCRIPTION OF DRAWINGS

[0044] Figure 1 is a sectional view of the five-degree-of-freedom mirror adjustment mechanism decoupled from each other in the embodiment of the application;

[0045] Figure 2 is a right view of Figure 1 ;

[0046] Figure 3 is a bottom view (rotated counterclockwise by 90°) of Figure 1 ;

[0047] Figure 4 is a schematic view of the mirror before and after the tilt adjustment around the Y axis in the embodiment of the application.

[0048] Explanation of reference signs:

[0049] 1-mirror, 2-mirror frame, 3-inner mirror barrel, 4-outer mirror barrel, 5-linear bearing, 6-sleeve, 7-connector, 8-Y axis translation plate, 9-X axis translation plate, 10-X axis fine tooth nut, 11-fourth fixed plate, 12-supporting plate, 13-Z axis fine tooth nut, 14-Y axis linear guide rail assembly, 15-axial translation adjustment piece, 16-second fixed plate, 17-tilt fine tooth nut, 18-spherical washer, 19-tilt adjustment piece, 20-second fixed piece, 21-X axis translation adjustment piece, 22-X axis linear guide rail assembly, 23-third fixed plate, 24-first fixed plate, 25-first fixed piece, 26-sixth fixed piece, 27-fifth fixed piece, 28-fourth fixed piece, 29-second elastic piece, 30-third fixed piece, 31-first elastic piece, 32-Y axis fine tooth nut, 33-Y axis translation adjustment piece, 34-tilt adjustment module, 35-connection module, 36-translation adjustment module, 37-fixed assembly, 38-first adjustment assembly, 39-first spherical segment, 40-cylindrical segment, 41-cylindrical segment, 42-second spherical segment, 43-circular ring segment, 44-first boss, 45-second boss, 46-second adjustment assembly, 47-third adjustment assembly, 48-first waist-shaped hole, 49-second waist-shaped hole, 50-third elastic piece, O-mirror center. DETAILED DESCRIPTION

[0050] As Figures 1-4As shown, a five-degree-of-freedom mirror adjustment mechanism decoupled from each other includes a tilt adjustment module 34, a connecting module 35, a translation adjustment module 36, and an axial translation adjustment member 15 connected coaxially in sequence, the axial direction of the tilt adjustment module 34 is defined as the Z axis, any radial direction of the tilt adjustment module 34 is defined as the X axis, and the Y axis is determined according to the left-hand rule. Specifically, the tilt adjustment module 34 includes an outer mirror barrel 4 and an inner mirror barrel 3 located in the outer mirror barrel 4, the outer mirror barrel 4 includes a first spherical segment 39, a cylindrical segment 40, and a cylindrical segment 41 connected coaxially in sequence, and the inner mirror barrel 3 includes a second spherical segment 42 and a circular ring segment 43 connected coaxially, the first spherical segment 39 is in sliding fit with the second spherical segment 42, the inner wall of the second spherical segment 42 is provided with a first boss 44 for mounting the mirror 1 along the circumferential direction thereof, the outer wall of the cylindrical segment 40 is provided with a second boss 45 along the circumferential direction, the cylindrical segment 40 is fixedly connected with the circular ring segment 43 through four fixing assemblies 37, and the outer wall of the circular ring segment 43 is in abutment with the cylindrical segment 40 through four first adjustment assemblies 38. Two of the fixing assemblies 37 are oppositely arranged along the X axis direction, and the other two fixing assemblies 37 are oppositely arranged along the Y axis direction, each fixing assembly 37 includes a spherical washer 18 and a second fixing member 20, and the second fixing member 20 is fixedly connected with the circular ring segment 43 through the spherical washer 18 and the cylindrical segment 40 in sequence. Two of the first adjustment assemblies 38 are oppositely arranged along the X axis direction, and the other two first adjustment assemblies 38 are oppositely arranged along the Y axis direction, each first adjustment assembly 38 includes a tilt fine tooth nut 17 and a tilt adjustment member 19, and the tilt adjustment member 19 is in abutment with the outer wall of the circular ring segment 43 through the tilt fine tooth nut 17 and the cylindrical segment 40 in sequence. The two tilt adjustment members 19 oppositely arranged along the X axis direction drive the mirror 1 to tilt around the Y axis by adjusting the position of the circular ring segment 43, and the two tilt adjustment members 19 oppositely arranged along the Y axis direction drive the mirror 1 to tilt around the X axis by adjusting the position of the circular ring segment 43. During the tilt adjustment process, the mirror 1 will not cause positional deviation in other directions, and the principle is as shown in Figure 4 As shown in Figure 1 In this embodiment, the centers of the first spherical segment 39 and the second spherical segment 42 are coincided with the mirror center O of the mirror 1 away from the first boss 44, R1 is the spherical radius of the first spherical segment 39, and R2 is the spherical radius of the second spherical segment 42.

[0051] The connecting module 35 includes a linear bearing 5 sleeved on the cylindrical segment 41 and in sliding fit with the cylindrical segment 41, and a sleeve 6 sleeved on the linear bearing 5 and fixedly connected with the linear bearing 5 through a screw. The linear bearing 5 can realize the limiting function of Z axis direction translation. The second boss 45 is connected with one end of the sleeve 6 through four first fixing members 25, and the first fixing members 25 are used to fasten the axial translation adjustment member 15 to adjust the position of the mirror 1 after the mirror 1 is translated along the Z axis.

[0052] The translation adjustment module 36 includes the coaxially arranged connecting piece 7, the Y-axis translation plate 8, the X-axis translation plate 9, and the support plate 12. Specifically, one end of the connecting piece 7 is connected to the other end of the sleeve 6 by a screw, the Y-axis translation plate 8 and the X-axis translation plate 9 are sleeved outside the other end of the connecting piece 7, and the Y-axis translation plate 8 is fixedly connected to the connecting piece 7 by a screw. The Y-axis translation plate 8 is provided with four first waist-shaped holes 48. The Y-axis translation plate 8 and the X-axis translation plate 9 are slidably connected through the Y-axis linear guide rail assembly 14. Meanwhile, the Y-axis translation plate 8 and the X-axis translation plate 9 are connected through two third fixing pieces 30 and also connected through four fourth fixing pieces 28. The two third fixing pieces 30 are used to determine the initial position of the reflection mirror 1 in the Y-axis direction. The four fourth fixing pieces 28 are matched with the four first waist-shaped holes 48 and are used to lock the position of the reflection mirror 1 after translation in the Y-axis direction. One side wall of the X-axis translation plate 9 is provided with a second adjustment assembly 46 through a first fixing plate 24. The other side wall is provided with a third fixing plate 23 opposite to the first fixing plate 24. The third fixing plate 23 is connected to the Y-axis translation plate 8 through a first elastic piece 31. The second adjustment assembly 46 includes a Y-axis fine toothed nut 32 and a Y-axis translation adjustment piece 33. The Y-axis translation adjustment piece 33 abuts against the Y-axis translation plate 8 in sequence through the Y-axis fine toothed nut 32, the first fixing plate 24, and the Y-axis translation plate 8. The Y-axis translation adjustment piece 33 is used to translate the Y-axis translation plate 8 in the Y-axis direction, so as to translate the reflection mirror 1 in the Y-axis direction. The first elastic piece 31 and the Y-axis linear guide rail assembly 14 can realize the limiting effect of translation in the Y-axis direction and will not affect the deviation of the reflection mirror 1 in other directions. The X-axis translation plate 9 is provided with four second waist-shaped holes 49. The X-axis translation plate 9 and the support plate 12 are slidably connected through the X-axis linear guide rail assembly 22. Meanwhile, the X-axis translation plate 9 and the support plate 12 are connected through four fifth fixing pieces 27 and also connected through four sixth fixing pieces 26. The four fifth fixing pieces 27 are used to determine the initial position of the reflection mirror 1 in the X-axis direction. The four sixth fixing pieces 26 are matched with the four second waist-shaped holes 49 and are used to lock the position of the reflection mirror 1 after translation in the X-axis direction. One side wall of the support plate 12 is provided with a third adjustment assembly 47 through a second fixing plate 16. The other side wall is provided with two fourth fixing plates 11 opposite to the second fixing plate 16. The two fourth fixing plates 11 are respectively connected to the X-axis translation plate 9 through two second elastic pieces 29. The third adjustment assembly 47 includes an X-axis fine toothed nut 10 and an X-axis translation adjustment piece 21. The X-axis translation adjustment piece 21 abuts against the X-axis translation plate 9 in sequence through the X-axis fine toothed nut 10, the second fixing plate 16, and the X-axis translation plate 9. The X-axis translation adjustment piece 21 is used to translate the X-axis translation plate 9 in the X-axis direction, so as to translate the reflection mirror 1 in the X-axis direction. The second elastic piece 29 and the X-axis linear guide rail assembly 22 can realize the limiting effect of translation in the X-axis direction and will not affect the deviation of the reflection mirror 1 in other directions.

[0053] The axial translation adjustment member 15 passes through the support plate 12 and the connecting member 7 and abuts against the end face of the cylindrical segment 41 away from the cylindrical segment 40, the axial translation adjustment member 15 is provided with a Z-axis fine thread nut 13, the Z-axis fine thread nut 13 is fixedly connected with the connecting member 7 and is in threaded connection with the axial translation adjustment member 15, and the Z-axis fine thread nut 13 is further connected with the cylindrical segment 41 through two third elastic members 50, and the mirror 1 is translated along the Z axis by rotating the axial translation adjustment member 15. In the embodiment, one end of each of the two third elastic members 50 is connected with the Z-axis fine thread nut 13 through two first cylindrical pins, and the other end is connected with the cylindrical segment 41 through a second cylindrical pin.

[0054] An adjustment method of a five-degree-of-freedom mirror adjustment mechanism decoupled from each other, which adopts the five-degree-of-freedom mirror adjustment mechanism decoupled from each other, comprises the following steps:

[0055] Step 1: The support plate 12 is externally connected with a front optical element in an optical machine system, and the mirror 1 is installed on the first boss 44 through the mirror frame 2.

[0056] Step 2: An external interferometer is used to build an optical machine system detection light path, interference fringes after imaging of the mirror 1, the front optical element and the rear optical element in the optical machine system are observed, and wave aberration of a central field of view of the optical machine system is obtained.

[0057] Step 3: Whether the wave aberration obtained in step 2 meets the index requirements of the optical machine system is judged.

[0058] When the index requirements are met, subsequent work is directly entered.

[0059] When the index requirements are not met, the degree of freedom of the mirror 1 that needs to be adjusted is determined according to Z5-Z9 terms of a Zernike polynomial coefficient of the wave aberration.

[0060] If the Z5 and Z6 term coefficients exceed the allowable error range of astigmatism, step 4 is performed.

[0061] If the Z7 and Z8 term coefficients exceed the allowable error range of coma, step 5 is performed.

[0062] If the Z9 term coefficient exceeds the allowable error range of spherical aberration, step 6 is performed.

[0063] Step 4: The four second fixing members 20 are loosened, the two tilt adjustment members 19 oppositely arranged along the Y axis are used to adjust the annular segment 43, thereby driving the mirror 1 to tilt around the X axis, the two tilt adjustment members 19 oppositely arranged along the X axis are used to adjust the annular segment 43, thereby driving the mirror 1 to tilt around the Y axis, and after each adjustment, step 2 is returned until the newly generated Z5 and Z6 term coefficients are within the allowable error range of astigmatism, the four second fixing members 20 are fastened, and the position adjustment of the mirror 1 tilting around the X axis or the Y axis is completed.

[0064] Step 5, disassemble four fifth fixing members 27 and two third fixing members 30, loosen four sixth fixing members 26 and four fourth fixing members 28, push the X-axis translation plate 9 to translate along the X-axis direction by rotating the X-axis translation adjuster 21, thereby driving the reflector 1 to translate along the X-axis direction, push the Y-axis translation plate 8 to translate along the Y-axis direction by rotating the Y-axis translation adjuster 33, thereby driving the reflector 1 to translate along the Y-axis direction, return to step 2 after each adjustment until the newly generated Z7 and Z8 coefficients are within the allowable error range of coma, tighten the four sixth fixing members 26 and the four fourth fixing members 28, and complete the position adjustment of the reflector 1 along the X-axis and Y-axis directions.

[0065] Step 6, loosen the four first fixing members 25, drive the cylindrical segment 41 to translate along the Z-axis in the linear bearing 5 by rotating the axial translation adjuster 15, thereby driving the reflector 1 to translate along the Z-axis, return to step 2 after each translation until the newly generated Z9 coefficient is within the allowable error range of spherical aberration, tighten the four first fixing members 25, and complete the position adjustment of the reflector 1 along the Z-axis. Among them, the linear bearing 5 can ensure the runout of the reflector 1 during the translation along the Z-axis, thereby improving the position accuracy of the reflector 1.

[0066] In the embodiment, the axial translation adjuster 15, the X-axis translation adjuster 21, and the Y-axis translation adjuster 33 are ball head screws, the inclination adjuster 19 is a fine tooth ball head screw, the first fixing member 25, the second fixing member 20, the third fixing member 30, the fourth fixing member 28, the fifth fixing member 27, and the sixth fixing member 26 are screws, and the first elastic member 31, the second elastic member 29, and the third elastic member 50 are tension springs.

[0067] The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto, any change or replacement within the technical scope disclosed by the present application should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A five-degree-of-freedom mirror adjustment mechanism with mutual decoupling, characterized in that: comprising a tilt adjustment module (34), a connecting module (35), a translation adjustment module (36) and an axial translation adjustment member (15) connected coaxially in sequence; the axial direction of the tilt adjustment module (34) is defined as the Z axis, any radial direction of the tilt adjustment module (34) is defined as the X axis, and the Y axis is determined according to the left-hand rule; the tilt adjustment module (34) comprises an outer mirror barrel (4) and an inner mirror barrel (3) located in the outer mirror barrel (4); the outer mirror barrel (4) comprises a first spherical segment (39), a cylindrical segment (40) and a cylindrical segment (41) connected coaxially in sequence; the inner mirror barrel (3) comprises a second spherical segment (42) and a circular ring segment (43) connected coaxially; the first spherical segment (39) and the second spherical segment (42) are in sliding fit; a first boss (44) for mounting a mirror (1) is arranged on the inner wall of the second spherical segment (42) in the circumferential direction; the cylindrical segment (40) is fixedly connected with the circular ring segment (43) through four fixed assemblies (37) and abuts against the outer wall of the circular ring segment (43) through four first adjustment assemblies (38); the four first adjustment assemblies (38) drive the mirror (1) to tilt around the X axis or the Y axis by adjusting the position of the circular ring segment (43); the connecting module (35) is sleeved on the outer cylindrical segment (41) and in sliding fit with the cylindrical segment (41); the translation adjustment module (36) is used for adjusting the translation of the mirror (1) along the X axis or the Y axis; the axial translation adjustment member (15) abuts against the end face of the cylindrical segment (41) away from the cylindrical segment (40) through the translation adjustment module (36) and drives the mirror (1) to translate along the Z axis by rotating the axial translation adjustment member (15). 2.The five-degree-of-freedom mirror adjustment mechanism with mutual decoupling according to claim 1, characterized in that: the connecting module (35) comprises a linear bearing (5) sleeved on the outer cylindrical segment (41) and in sliding fit with the cylindrical segment (41), and a sleeve (6) sleeved on the outer linear bearing (5) and fixedly connected with the linear bearing (5); the outer wall of the cylindrical segment (40) is provided with a second boss (45) in the circumferential direction; the second boss (45) is connected with one end of the sleeve (6) through a plurality of first fixing members (25); the first fixing members (25) are used for fastening the position of the axial translation adjustment member (15) after adjusting the translation of the mirror (1) along the Z axis; the translation adjustment module (36) is connected with the other end of the sleeve (6). 3.The five-degree-of-freedom mirror adjustment mechanism with mutual decoupling according to claim 2, characterized in that: two of the fixed assemblies (37) are oppositely arranged along the X axis, and the other two fixed assemblies (37) are oppositely arranged along the Y axis; each fixed assembly (37) comprises a spherical washer (18) and a second fixing member (20), and the second fixing member (20) is fixedly connected with the cylindrical segment (40) and the circular ring segment (43) in sequence through the spherical washer (18). ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ Two of the first adjustment assemblies (38) are arranged opposite to each other along the X-axis direction, and the other two first adjustment assemblies (38) are arranged opposite to each other along the Y-axis direction; each first adjustment assembly (38) comprises an inclined fine nut (17) and an inclined adjustment member (19), and the inclined adjustment member (19) abuts against the outer wall of the cylindrical segment (40) and the annular segment (43) in sequence through the inclined fine nut (17).

4. The five-degree-of-freedom mirror adjustment mechanism according to claim 3, wherein: The centers of the first spherical segment (39) and the second spherical segment (42) are both coincident with the mirror center O of the mirror (1) away from the first boss (44).

5. The five-degree-of-freedom mirror adjustment mechanism according to any one of claims 2, 3 or 4, wherein: The translation adjustment module (36) comprises a connecting member (7), a Y-axis translation plate (8), an X-axis translation plate (9) and a support plate (12) arranged coaxially; one end of the connecting member (7) is connected with the other end of the sleeve (6); the Y-axis translation plate (8) and the X-axis translation plate (9) are sleeved outside the other end of the connecting member (7), and the Y-axis translation plate (8) is fixedly connected with the connecting member (7); the Y-axis translation plate (8) and the X-axis translation plate (9) are slidably connected through a Y-axis linear guide rail assembly (14), and simultaneously, the Y-axis translation plate (8) and the X-axis translation plate (9) are connected through two third fixing members (30) and four fourth fixing members (28); the third fixing member (30) is used for determining the initial position of the translation of the mirror (1) along the Y-axis direction; the fourth fixing member (28) is matched with a first waist-shaped hole (48) arranged on the Y-axis translation plate (8) and is used for locking the position of the mirror (1) after the translation along the Y-axis direction; one side wall of the X-axis translation plate (9) is provided with a second adjustment assembly (46) through a first fixing plate (24); the acting end of the second adjustment assembly (46) abuts against the Y-axis translation plate (8) and is used for translating the Y-axis translation plate (8) along the Y-axis direction, so as to translate the mirror (1) along the Y-axis direction; the other side wall of the X-axis translation plate (9) is provided with a third fixing plate (23) opposite to the first fixing plate (24); the third fixing plate (23) is connected with the side wall of the Y-axis translation plate (8) through a first elastic member (31). The X-axis translation plate (9) and the support plate (12) are slidably connected through an X-axis linear guide assembly (22), and the X-axis translation plate (9) and the support plate (12) are connected through four fifth fixing members (27) and four sixth fixing members (26); the fifth fixing member (27) is used to determine the initial position of the mirror (1) in the X-axis direction; the sixth fixing member (26) is matched with the second waist-shaped hole (49) arranged on the X-axis translation plate (9) and is used to lock the position of the mirror (1) after translation in the X-axis direction; a third adjustment assembly (47) is arranged on one side wall of the support plate (12) through a second fixing plate (16); the acting end of the third adjustment assembly (47) abuts against the X-axis translation plate (9) and is used to translate the X-axis translation plate (9) in the X-axis direction, so that the mirror (1) is translated in the X-axis direction; two fourth fixing plates (11) opposite to the second fixing plate (16) are arranged on the other side wall of the support plate (12), and the two fourth fixing plates (11) are connected with the X-axis translation plate (9) through two second elastic members (29) respectively; The axial translation adjustment member (15) abuts against the cylindrical segment (41) through the support plate (12) and the connecting member (7) in sequence; a Z-axis fine thread nut (13) is arranged between the axial translation adjustment member (15) and the connecting member (7); the Z-axis fine thread nut (13) is fixedly connected with the connecting member (7) and is threadedly connected with the axial translation adjustment member (15); the Z-axis fine thread nut (13) is connected with the cylindrical segment (41) through two third elastic members (50).

6. A method of adjusting a five-degree-of-freedom mirror adjustment mechanism decoupled from each other, using the five-degree-of-freedom mirror adjustment mechanism decoupled from each other according to any one of claims 1 to 5, characterized by, The method comprises the following steps: Step 1: The translation adjustment module (36) is arranged outside the front optical element in the optical machine system, and the mirror (1) is installed on the first boss (44) through the mirror frame (2); Step 2: The interference fringes after the mirror (1) and the front optical element and the rear optical element in the optical machine system are imaged are observed, and the wave aberration of the central field of view of the optical machine system is obtained; Step 3: Whether the wave aberration obtained in step 2 meets the index requirement of the optical machine system is judged; When the index requirement is met, the subsequent work is directly entered; When the index requirement is not met, the Z5-Z9 terms of the Zernike polynomial coefficient generated by the wave aberration are used to determine the degree of freedom of the mirror (1) that needs to be adjusted; If the Z5 and Z6 term coefficients exceed the allowable error range of astigmatism, step 4 is performed; If the Z7 and Z8 term coefficients exceed the allowable error range of coma, step 5 is performed; If the Z9 term coefficient exceeds the allowable error range of spherical aberration, step 6 is performed; Step 4: The four fixing assemblies (37) are loosened, the four first adjustment assemblies (38) are used to adjust the annular segment (43), so as to drive the mirror (1) to tilt around the X-axis or the Y-axis, and after each adjustment, the step 2 is returned until the Z5 and Z6 term coefficients generated again are within the allowable error range of astigmatism, the four fixing assemblies (37) are fastened, and the position adjustment of the mirror (1) tilting around the X-axis or the Y-axis is completed. Step 5, the mirror (1) is translated along the X axis and the Y axis direction by using the translation adjustment module (36), and after each translation, the step 2 is returned until the Z7 and Z8 item coefficients generated again are within the allowable error range of coma, and the position adjustment of the mirror (1) along the X axis and the Y axis direction is completed. Step 6, the cylindrical section (41) is translated along the Z axis in the connecting module (35) by the rotation axial translation adjustment piece (15), and then the mirror (1) is translated along the Z axis, and after each translation, the step 2 is returned until the Z9 item coefficient generated again is within the allowable error range of spherical aberration, and the position adjustment of the mirror (1) along the Z axis is completed.

7. The adjustment method of the five-degree-of-freedom mirror adjustment mechanism according to claim 6, wherein: Step 1 is specifically that the front optical element in the optical system is circumscribed by the support plate (12), and the mirror (1) is installed on the first boss (44) through the mirror frame (2); Step 4 is specifically that the four second fixing pieces (20) are loosened, the circular ring section (43) is adjusted by using the two inclination adjustment pieces (19) oppositely arranged along the Y axis direction, and then the mirror (1) is inclined around the X axis, the circular ring section (43) is adjusted by using the two inclination adjustment pieces (19) oppositely arranged along the X axis direction, and then the mirror (1) is inclined around the Y axis, after each adjustment, the step 2 is returned until the Z5 and Z6 item coefficients generated again are within the allowable error range of astigmatism, the four second fixing pieces (20) are fastened, and the position adjustment of the mirror (1) inclined around the X axis or the Y axis is completed.

8. The method of claim 7, wherein the adjustment of the five degree of freedom mirror adjustment mechanism is performed by adjusting the first and second actuators to adjust the position of the mirror in the x and y directions, respectively, and adjusting the third and fourth actuators to adjust the position of the mirror in the pitch and yaw directions, respectively. Step 5 is specifically that the four fifth fixing pieces (27) and the two third fixing pieces (30) are disassembled, the four sixth fixing pieces (26) and the four fourth fixing pieces (28) are loosened, the X axis translation plate (9) is translated along the X axis direction by rotating the third adjustment assembly (47), and then the mirror (1) is translated along the X axis direction, the Y axis translation plate (8) is translated along the Y axis direction by rotating the second adjustment assembly (46), and then the mirror (1) is translated along the Y axis direction, after each adjustment, the step 2 is returned until the Z7 and Z8 item coefficients generated again are within the allowable error range of coma, the four sixth fixing pieces (26) and the four fourth fixing pieces (28) are fastened, and the position adjustment of the mirror (1) translated along the X axis and the Y axis direction is completed. Step 6 is specifically that the plurality of first fixing pieces (25) are loosened, the cylindrical section (41) is translated along the Z axis in the linear bearing (5) by rotating the axial translation adjustment piece (15), and then the mirror (1) is translated along the Z axis, after each translation, the step 2 is returned until the Z9 item coefficient generated again is within the allowable error range of spherical aberration, the plurality of first fixing pieces (25) are fastened, and the position adjustment of the mirror (1) translated along the Z axis is completed.

9. The method of claim 8, wherein the method further comprises: ​ ​

Images