A three-in-one sensor for measuring differential pressure, gauge pressure, and temperature.

Abstract

This invention discloses a three-in-one sensor for measuring differential pressure, gauge pressure, and temperature, comprising a housing, a core assembly, an end cap, and a temperature detection module. The core assembly includes a core, a base, a differential pressure chip, a gauge pressure chip, and a corrugated diaphragm. The corrugated diaphragm is sealed and installed at the bottom of the core, forming a sealed chamber with the bottom of the core. A sealing medium is provided within the sealed chamber. The differential pressure chip and the gauge pressure chip are mounted on the base, which is installed within the sealed chamber. The core is sealed and installed on the housing. The end cap is sealed and fitted around the periphery of the core and is sealed to the housing. A placement pipe is provided on the housing, and the temperature detection module is installed within the placement pipe. The core, end cap, and housing have sequentially connected spaces to form a differential pressure tapping pipeline. One end of the differential pressure tapping pipeline is connected to the negative pressure end of the differential pressure chip, and the other end is connected to the pressure chamber to be measured. This invention has the advantages of simple and compact structure and high integration.

Description

Technical Field

[0001] This invention relates to the field of pressure and temperature measurement technology, specifically to a three-in-one sensor for measuring differential pressure, gauge pressure, and temperature. Background Technology

[0002] To address the application requirements of engines in harsh environments, the internal chambers of engines experience high temperatures and pressures during operation. Real-time monitoring of the gauge pressure within these chambers is essential during engine operation. Furthermore, engines typically have multiple chambers, requiring the measurement of pressure differences between them to determine the pressure status. Since the temperature of the gases or liquids within the engine chambers is also a crucial physical property, significantly impacting accurate assessment of the engine's operating status, and both the engine and pressure sensors have specific operating temperature ranges, close monitoring of the internal engine chamber temperature measured by the pressure sensors is also necessary. Currently, simultaneously measuring differential pressure, gauge pressure, and temperature within the engine requires three different sensor models, resulting in redundant components. Moreover, temperature sensors are often located at a distance from pressure sensors, leading to discrepancies between the measured temperature and the temperature at the pressure measurement point.

[0003] Pressure and temperature sensors, as the most widely used sensors in the sensor field, have undergone nearly half a century of development. To adapt to various environmental needs, various types of pressure and temperature sensors have emerged, and they are rapidly evolving towards intelligence, miniaturization, and high reliability, supporting the needs of all aspects of daily life and industry. Currently, gauge pressure and differential pressure sensors are widely used in industrial automation, and can be used to test parameters such as fluid flow rate, level, and density. Because daily life and industrial sites frequently encounter various high and low temperature environments, temperature sensors are also among the most common sensors. Facing harsh environments such as corrosion, vibration, shock, and radiation, as well as the requirements for equipment integration, precision, and intelligence, high demands are placed on the reliability and miniaturization of sensors.

[0004] Temperature-pressure composite sensors are widely used in the automotive industry, industrial production, and healthcare, such as in engine management systems, airbag systems, tire pressure monitoring, blood pressure monitoring instruments, and ventilators. A temperature-pressure composite sensor is a sensor capable of simultaneously measuring both temperature and pressure. This sensor combines the functions of a temperature sensor and a pressure sensor, enabling accurate measurement of both temperature and pressure within a single device. Information from these two components can be collected using different sensor elements. Typically, temperature sensors can be thermistors, thermocouples, or infrared sensors, while pressure sensors can be piezoresistive, capacitive, or piezoelectric sensors. The output data from these sensors is processed by internal circuitry and then output as digital or analog signals. End users can obtain the temperature and pressure data through an interface or output port.

[0005] As mentioned above, equipment is evolving towards integration and miniaturization, requiring the use of multiple sensors to measure different physical properties. In the aerospace and automotive industries, various types of engines are needed, and parameters such as differential pressure, gauge pressure, and temperature are core engine parameters. Monitoring the relationship between pressure and temperature changes at the same location is also an important reference for determining the engine's condition. However, currently, using multiple sensor devices to monitor each parameter not only results in device redundancy and increased costs, reducing the integration and reliability of the equipment, but also often leads to each sensor measuring parameters at different locations, lacking correlation and easily causing incorrect judgments about the engine's condition.

[0006] Temperature and pressure sensors are typically miniaturized and integrated into a single device, ensuring a compact design. To protect the sensor components from external environmental influences, housings and protective layers made of special materials are usually used, such as rubber seals or special adhesives. Existing temperature and pressure composite sensors, such as… Figure 1 As shown, the temperature-pressure composite sensor mainly consists of a pressure sensor containing a pressure chip, a temperature sensor, and a protective housing. Both the pressure sensor and the temperature sensor are installed inside the protective housing. The shape of the protective housing can be varied according to specific requirements.

[0007] Figure 1 The composite sensor has a redundant structure and a large size; moreover, in order to center the temperature sensor, the pressure sensor is not centered, resulting in a gap between the pressure measurement point and the temperature measurement point, which may lead to inaccurate condition monitoring.

[0008] The main problem lies in the placement of the temperature sensor. While current technology allows for the placement of the temperature and pressure sensors within the same chip, this design imposes stringent requirements on the temperature sensor's position; otherwise, its accuracy will be compromised. Furthermore, the temperature sensor chip is subjected to constant pressure, affecting its lifespan. Additionally, since the internal temperature is generally high, and pressure sensors are typically not heat-resistant, they require long pressure-extraction channels to draw out the pressure. If the temperature and pressure sensors are located in the same area, the temperature measured by the temperature sensor will differ significantly from the internal temperature of the host component, hindering accurate monitoring of the host component's condition.

[0009] Secondly, the fixing of the temperature sensor and the lead-out of the leads are also issues that need attention. Often, the temperature sensor is simply placed into a hole without being fully secured. Therefore, the temperature sensor may be damaged due to movement of the mounting component. Furthermore, because the temperature sensor is not in close contact with the mounting component, the time it takes for the temperature sensor to reach thermal equilibrium is prolonged, increasing the hysteresis time for temperature reading. The thermometer leads are also generally not fully secured, making them susceptible to pulling and stress, which can lead to electrical connection failure. Summary of the Invention

[0010] To address the technical problems existing in the prior art, this invention provides a three-in-one sensor that simultaneously measures differential pressure, gauge pressure, and temperature, with a simple and compact structure and high integration.

[0011] To solve the above-mentioned technical problems, the technical solution proposed by this invention is as follows:

[0012] A three-in-one sensor for measuring differential pressure, gauge pressure, and temperature includes a housing, a core assembly, an end cap, and a temperature detection module. The core assembly includes a core, a base, a differential pressure chip, a gauge pressure chip, and a corrugated diaphragm. The corrugated diaphragm is sealed and installed at the bottom of the core, forming a sealed chamber with the bottom of the core. A sealing medium is provided in the sealed chamber. The differential pressure chip and the gauge pressure chip are mounted on the base, which is installed in the sealed chamber. The core is sealed and installed on the housing, and the housing has a through hole in its middle, directly opposite the corrugated diaphragm. The end cap is sealed and fitted around the periphery of the core and is sealed to the housing.

[0013] The casing is provided with a placement pipe, and the temperature detection module is installed inside the placement pipe;

[0014] The core, end cap, and shell are provided with sequentially connected spaces to form a differential pressure tapping pipeline. One end of the differential pressure tapping pipeline is connected to the negative pressure end of the differential pressure chip, and the other end of the differential pressure tapping pipeline is connected to the pressure chamber to be measured.

[0015] As a further improvement to the above technical solution:

[0016] The pressure gauge chip and the corrugated diaphragm are symmetrically mounted at the same horizontal position on the base.

[0017] The base is a ceramic base.

[0018] The core is provided with multiple first pins. One end of each first pin is connected to the power supply, ground, and output terminal of the differential pressure chip and the gauge pressure chip, respectively. The other end of each first pin is connected to the compensation circuit to realize zero-point, full-scale, or temperature drift compensation.

[0019] The first pin is fitted with a first glass fixing ring, which is fixed to the lead hole reserved in the core by high temperature melting.

[0020] One end of each of the first pins is electrically connected to the surface electrodes of the power supply, ground, and output terminals of the differential pressure chip and the gauge pressure chip, respectively, by means of gold wire bonding.

[0021] The core has pressure-guiding channels, the end cap has an arc-shaped groove, and the tube shell has oblique holes, straight holes, and side holes. The pressure-guiding channels, arc-shaped grooves, oblique holes, straight holes, and side holes are connected in sequence to form a differential pressure-guiding pipeline.

[0022] The tube shell is provided with a front groove and a rear groove, and an O-ring is installed on both the front groove and the rear groove; the side hole is located on the tube shell between the front groove and the rear groove.

[0023] The temperature detection module is connected to a first lead wire, which passes through a pre-drilled oblique hole on the casing.

[0024] The temperature detection module is connected to a second lead wire, which is connected to a second pin. The second pin is sealed and fixed inside the lead wire hole of the tube shell by a glass sintering process.

[0025] Compared with the prior art, the advantages of the present invention are as follows:

[0026] The sensor for measuring differential pressure, gauge pressure, and temperature of the present invention integrates the differential pressure chip and the gauge pressure chip into the same core, while integrating the temperature sensor into the housing, realizing the "three-in-one" measurement of differential pressure, gauge pressure, and temperature; the overall structure is simplified, highly integrated, and highly reliable, reducing costs, solving the problem of redundant measurement devices, and is suitable for a variety of application scenarios, providing more flexibility and convenience. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the structure of a temperature and pressure composite sensor in the prior art.

[0028] Figure 2This is one of the cross-sectional structural diagrams of the three-in-one sensor of the present invention in an embodiment.

[0029] Figure 3 This is a top view of the base and chip of the present invention in an embodiment.

[0030] Figure 4 This is a cross-sectional view of the core component of the present invention in an embodiment.

[0031] Figure 5 This is a second cross-sectional view of the three-in-one sensor of the present invention in an embodiment.

[0032] Legend: 1. Differential pressure chip; 2. Arc-shaped groove; 3. Differential pressure tapping pipeline; 4. Second pin; 5. Temperature sensor; 6. Tube shell; 7. Corrugated diaphragm; 8. Mounting hole; 9. End cap; 10. Core; 11. Gauge pressure chip; 12. First pin; 13. Third pin; 14. Angled hole; 15. Pressure tapping channel; 16. Front groove; 17. Second assembly position; 18. Third assembly position; 19. First lead; 20. First assembly position; 21. Rear groove; 22. Straight hole; 23. Side hole; 24. Installation pipe; 25. First glass fixing ring; 26. Soldering point; 27. Base; 28. Lead wire angled hole; 29. ​​Gold wire routing groove; 30. Pin hole; 31. Surface electrode; 32. Second glass fixing ring; 33. Second pin; 34. Second lead; 35. Pin through hole. Detailed Implementation

[0033] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0034] like Figure 2 As shown, the three-in-one sensor for measuring differential pressure, gauge pressure and temperature according to an embodiment of the present invention includes a housing 6, a core assembly, an end cap 9 and a temperature detection module (such as a temperature sensor 5); the core assembly includes a core 10, a base 27, a differential pressure chip 1, a gauge pressure chip 11 and a corrugated diaphragm 7.

[0035] The corrugated diaphragm 7 is sealed and installed at the bottom of the core 10, forming a sealed chamber with the bottom of the core 10. The sealed chamber contains a sealing medium. The differential pressure chip 1 and the gauge pressure chip 11 are installed on the base 27, which is installed in the sealed chamber. The core 10 is sealed and installed on the tube shell 6. The tube shell 6 has a through hole in the middle that is directly opposite the corrugated diaphragm 7. The end cap 9 is sealed and fitted around the periphery of the core 10 and is sealed and connected to the tube shell 6.

[0036] The housing 6 is provided with a placement pipe 24, and the temperature sensor 5 is installed inside the placement pipe 24;

[0037] The core 10, end cap 9, and shell 6 are provided with sequentially connected spaces to form a differential pressure tapping pipeline 3. One end of the differential pressure tapping pipeline 3 is connected to the negative pressure end of the differential pressure chip 1, and the other end of the differential pressure tapping pipeline 3 is connected to the pressure chamber to be measured. The core 10, end cap 9, and shell 6 are welded together by continuous laser welding.

[0038] The sensor for measuring differential pressure, gauge pressure, and temperature of the present invention integrates the differential pressure chip 1 and the gauge pressure chip 11 into the same core 10, and integrates the temperature sensor 5 into the housing 6, thereby realizing the "three-in-one" measurement of differential pressure, gauge pressure, and temperature. The overall structure is simplified, highly integrated, and highly reliable, reducing costs, solving the problem of redundant measuring devices, and is suitable for a variety of application scenarios, providing more flexibility and convenience.

[0039] Specifically, each chip (differential pressure chip 1 and gauge pressure chip 11) is a pressure-sensitive chip, mainly utilizing the pressure-sensitive characteristics of semiconductor silicon. When subjected to stress, its conductivity changes, leading to a change in resistance. Specifically, by connecting four pressure-sensitive resistors into a Wheatstone bridge, the resistance changes under stress, resulting in a pressure difference at the output. Measuring this pressure difference allows for the measurement of the corresponding force. In actual installation, each chip is electrostatically bonded to the silicon substrate and then glued to the base. To protect the sensitive resistors and gold wires, the cavity containing the gold wires is typically filled with silicone oil.

[0040] like Figure 3 As shown, each chip is glued to and positioned on the ceramic base 27. Specifically, the differential pressure chip 1 and the gauge pressure chip 11 are symmetrically packaged in the same horizontal position on the core 10. The positive pressure of both chips originates from the corrugated diaphragm 7, which is connected to the through-hole inside the housing 6. The negative pressure end of the gauge pressure core 10 is connected to the environment of the compensation circuit (corresponding circuit board), and thus to the atmosphere. The negative pressure end of the differential pressure core 10 is connected to the pressure chamber to be measured through the differential pressure tapping line 3.

[0041] The ceramic substrate 27 is provided with a pin via 35, a gold wire routing groove 29 and a chip surface electrode 31. The pin via 35 is used to solder the first pin 12, and the gold wire routing groove 29 is used for gold wire routing to realize the electrical connection between the chip surface electrode 31 and the first pin 12.

[0042] Each chip's positive pressure end is in direct contact with the sealing medium (such as silicone oil). The monocrystalline silicon, glass, and chip adhesive are in direct contact with the silicone oil, which exhibits excellent corrosion resistance to air, fuel, and lubricating oil. Similarly, the chip area inside the core 10 is filled with the sealing medium (silicone oil is injected through the pin holes 30 on the housing 6), and the silicone oil and the internal pressure-to-be-tested liquid / gas are isolated by a metal corrugated diaphragm 7. After filling with silicone oil, the core 10 (which is made of one piece of stainless steel) is resistance welded together with the first pin 13 to achieve sealing of the internal and external environments. The corrugated diaphragm 7 is fused to the core 10 by resistance welding, enabling it to withstand high pressure and maintain good sealing performance under long-term high and low temperatures.

[0043] like Figure 4 As shown, the core 10 is equipped with several first pins 12, which lead out the power, ground, and output terminals of each chip (semi-open loop) respectively. Zero-point, full-scale, and temperature drift performance compensation can be achieved through a rear-end compensation circuit board. The first pins 12 are sealed and fixed to the core 10 using a glass sintering process. Specifically, a hollow first glass fixing ring 25 is fitted onto the first pin 12, and then the first glass fixing ring 25 is fixed to the pre-reserved lead hole in the core 10 by high-temperature melting, ensuring sealing performance.

[0044] The surface electrodes 31 of the differential pressure chip 1 and the gauge pressure chip 11 are electrically connected to the first pin 12 (e.g., using Kovar alloy) at the solder point 26 by gold wire bonding. The measurement signal of each chip is led out through multiple first pins 12.

[0045] After the core 10 and the shell 6 are properly fitted together, a reliable sealed connection between the core 10 and the shell 6 is achieved at the first assembly position 20 of the core 10 and the shell 6 by laser or electron beam welding.

[0046] The annular end cap 9 and the oil-filled core 10 are reliably sealed at their second assembly position 17 by laser or electron beam welding. The annular end cap 9 and the tube shell 6 are reliably sealed at their third assembly position 18 by laser or electron beam welding.

[0047] like Figure 2 As shown, the core 10 has a pressure-applying channel 15, the annular end cap 9 has an arc-shaped groove 2, and the shell 6 has an oblique hole 14, a straight hole 22, and a side hole 23. The pressure-applying channel 15, the arc-shaped groove 2, the oblique hole 14, the straight hole 22, and the side hole 23 are connected in sequence to form a differential pressure-applying pipeline 3. The core 10 is fixed by the annular end cap 9, and the pressure is cleverly applied by opening an arc-shaped groove 2 in the annular end cap 9, which effectively reduces the volume of the composite sensor and simplifies the sensor structure.

[0048] Since the pressure-sensitive core 10 needs to operate under high internal pressure for extended periods, slow leakage between the inside and outside will cause a gradual change in product output, ultimately leading to product failure. Therefore, the straight hole 22 is sealed at one end of the tube shell 6 by a second pin 4. Specifically, the second pin 4 and the tube shell 6 (one-piece stainless steel material) are fused together by resistance welding, enabling it to withstand high pressure and maintain good sealing performance under long-term high and low temperatures.

[0049] The casing 6 has a front groove 16 and a rear groove 21, both equipped with O-rings. A side hole 23 is located between the front groove 16 and the rear groove 21. The O-rings on the front groove 16 and the rear groove 21 effectively seal and isolate the pressure chamber connected to the side hole 23 from other chambers, thus ensuring the reliability of differential pressure detection. Additionally, the casing 6 has mounting holes 8 on its outer side for easy installation and fixation.

[0050] like Figure 2 As shown, the size and length of the mounting pipe 24 for the temperature sensor 5 are consistent with those of the straight hole 22, ensuring that the pressure and temperature measurement points are symmetrical along the central axis and improving the one-to-one correspondence of the measurements. The diameter at the end of the mounting pipe 24 is wider to accommodate the countersunk head of the third pin 13 for sealing. Specifically, the temperature sensor 5 is either a resistance temperature sensor or a thermocouple temperature sensor. The resistance temperature sensor is suitable for low-temperature environments, while the thermocouple temperature sensor is suitable for high-temperature environments. Before the core 10 is welded to the shell 6, the temperature sensor 5 is placed in the mounting pipe 24. The temperature sensor 5 is connected to the first lead 19 by welding, and the first lead 19 is insulated from the shell 6 using heat shrink tubing. The first lead 19 passes through a pre-drilled oblique hole 28 on the shell 6 (e.g., using a hook to pull the lead out from the oblique hole 28). The first lead 19 is a four-in-one enameled copper wire. After the temperature sensor 5 is installed, the end of the mounting pipe 24 is sealed using the third pin 13. Specifically, the third pin 13 and the casing 6 are fused together by resistance welding, enabling them to withstand high pressure and maintain good sealing performance under long-term high and low temperatures. The method described above, where the temperature sensor 5 is installed via a pipe 24 inside the casing 6 and sealed by the third pin 13, results in a compact structure and ensures reliable sealing. The temperature sensor 5 is deeply embedded inside the pipe, allowing for more accurate monitoring of the internal condition of the component. The temperature sensor 5 is embedded in the pipe 24, and high-temperature resistant thermally conductive grease is injected simultaneously to enhance the contact between the temperature sensor 5 and the casing 6, quickly achieving thermal equilibrium. The thermally conductive grease also buffers the impact on the temperature sensor 5.

[0051] In other embodiments, the leads of the temperature sensor 5 can also be routed through a glass ring, specifically as follows: Figure 5As shown, temperature sensor 5 is also installed inside the placement pipe 24, and temperature sensor 5 is connected to the second lead 34 by welding. A lead hole communicating with the placement pipe 24 is provided on one side of the casing 6. The second lead 33 is sealed and fixed inside the lead hole of the casing 6 by a glass sintering process. Specifically, a hollow second glass fixing ring 32 is fitted onto the second lead 33, and then the second glass fixing ring 32 is fixed to the pre-reserved lead hole of the casing 6 by high-temperature melting, ensuring sealing performance while fixing the lead. The second lead 34 is connected to the second lead 33 by welding. Both the second lead 34 and the second lead 33 are insulated from the casing 6 by heat shrink tubing. The second lead 33 is made of Kovar alloy, and the second lead 34 is made of four-in-one enameled copper wire.

[0052] The temperature sensor 5 and the core assembly are independent of each other and are located in different parts of the housing 6. If one of the components (such as the temperature sensor 5) fails, it can be replaced while another type of component (such as the core assembly) can continue to be used, without all components being scrapped, thus improving maintenance flexibility.

[0053] Of course, in other embodiments, the temperature sensor 5 can be further simplified by encapsulating it within the core 10.

[0054] The present invention encapsulates a differential pressure chip 1 and a gauge pressure chip 11 on the same core 10, and cooperates with the core 10 through the corresponding base 27 and shell 6 to ensure the integration of the overall structure, effectively reduce the redundancy of the equipment and reduce costs; secondly, it can monitor three parameters, temperature, differential pressure and gauge pressure, at the same location at the same time, and can more accurately judge the operating status of the equipment.

[0055] In the description of this invention, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0056] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0057] In this invention, unless otherwise explicitly specified and limited, the terms "assembly," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0058] The above are merely preferred embodiments of the present invention. The scope of protection of the present invention is not limited to the above embodiments. All technical solutions falling within the scope of the present invention's concept are within the scope of protection of the present invention. It should be noted that for those skilled in the art, any improvements and modifications made without departing from the principles of the present invention should be considered within the scope of protection of the present invention.

Claims

1. A three-in-one sensor for measuring differential pressure, gauge pressure, and temperature, characterized in that, The system includes a housing (6), a core assembly, an end cap (9), and a temperature detection module. The core assembly includes a core (10), a base (27), a differential pressure chip (1), a gauge pressure chip (11), and a corrugated diaphragm (7). The corrugated diaphragm (7) is sealed and installed at the bottom of the core (10) and forms a sealed chamber with the bottom of the core (10). A sealing medium is provided in the sealed chamber. The differential pressure chip (1) and the gauge pressure chip (11) are installed on the base (27). The base (27) is installed in the sealed chamber. The core (10) is sealed and installed on the housing (6). The housing (6) has a through hole in the middle that is directly opposite the corrugated diaphragm (7). The end cap (9) is sealed and fitted around the periphery of the core (10) and is sealed and connected to the housing (6). The casing (6) is provided with a mounting pipe (24), and the temperature detection module is installed inside the mounting pipe (24); The core (10), end cap (9) and tube shell (6) are provided with sequentially connected spaces to form a differential pressure tapping pipeline (3). One end of the differential pressure tapping pipeline (3) is connected to the negative pressure end of the differential pressure chip (1), and the other end of the differential pressure tapping pipeline (3) is connected to the pressure chamber to be measured. The core (10) has a pressure channel (15), the end cap (9) has an arc-shaped groove (2), and the tube shell (6) has an oblique hole (14), a straight hole (22) and a side hole (23). The pressure channel (15), the arc-shaped groove (2), the oblique hole (14), the straight hole (22) and the side hole (23) are connected in sequence to form a differential pressure guiding pipeline (3). The size and length of the mounting pipe (24) for installing the temperature detection module are consistent with those of the straight hole (22) to ensure that the pressure and temperature measurement points are symmetrical along the central axis.

2. The three-in-one sensor for measuring differential pressure, gauge pressure, and temperature according to claim 1, characterized in that, The gauge pressure chip (11) and the differential pressure chip (1) are symmetrically installed at the same horizontal position on the core (10).

3. The three-in-one sensor for measuring differential pressure, gauge pressure, and temperature according to claim 2, characterized in that, The base (27) is a ceramic base.

4. The three-in-one sensor for measuring differential pressure, gauge pressure, and temperature according to claim 1, 2, or 3, characterized in that, The core (10) is provided with multiple first pins (12). One end of each first pin (12) is connected to the power supply, ground, and output terminals of the differential pressure chip (1) and the gauge pressure chip (11), respectively. The other end of each first pin (12) is connected to the compensation circuit to realize zero-point, full-scale, or temperature drift compensation.

5. The three-in-one sensor for measuring differential pressure, gauge pressure, and temperature according to claim 4, characterized in that, The first lead pin (12) is fitted with a first glass fixing ring (25), which is fixed to the lead hole reserved in the core (10) by high temperature melting.

6. The three-in-one sensor for measuring differential pressure, gauge pressure, and temperature according to claim 4, characterized in that, One end of each of the first pins (12) is electrically connected to the surface electrodes (31) of the power supply, ground, and output terminals of the differential pressure chip (1) and the gauge pressure chip (11) respectively by gold wire bonding.

7. The three-in-one sensor for measuring differential pressure, gauge pressure, and temperature according to claim 1, characterized in that, The tube shell (6) is provided with a front groove (16) and a rear groove (21), and O-rings are installed on both the front groove (16) and the rear groove (21); the side hole (23) is located on the tube shell (6) between the front groove (16) and the rear groove (21).

8. The three-in-one sensor for measuring differential pressure, gauge pressure, and temperature according to claim 1, 2, or 3, characterized in that, The temperature detection module is connected to a first lead (19), which passes through a pre-drilled oblique hole (28) on the casing (6).

9. The three-in-one sensor for measuring differential pressure, gauge pressure, and temperature according to claim 1, 2, or 3, characterized in that, The temperature detection module is connected to a second lead (34), and the second lead (34) is connected to a second pin (33). The second pin (33) is sealed and fixed in the lead hole of the tube shell (6) by glass sintering process.

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