A dynamic tuning device and radio frequency barrel assembly

Abstract

This invention discloses a dynamic tuning device and an RF barrel assembly, relating to the field of ion implantation technology. The dynamic tuning device includes: a support; a motor mounted on the support; a lifting column movably mounted on the support along its length; a drive assembly connected to the motor and the lifting column for driving the lifting column in linear motion; and a motion shaft detachably connected to the bottom end of the lifting column, which moves with the lifting column. This invention controls the lifting and lowering of the motion shaft through the lifting column, and the drive assembly drives the lifting column in linear motion, improving transmission efficiency and solving the problem of low reliability in threaded transmissions. Furthermore, the detachable connection between the motion shaft and the lifting column facilitates maintenance in case of malfunction.

Description

Technical Field

[0001] This invention relates to the field of ion implantation technology, and more specifically, to a dynamic tuning device and a radio frequency barrel assembly. Background Technology

[0002] The high-power RF barrel is a key component in high-energy ion implanters based on RF acceleration schemes, enabling ion acceleration. Currently, commercially available high-power RF barrels operate using an inductor-capacitor series resonant transformer, typically with a resonant frequency of 13.56MHz. Paired with a high-power RF power supply with an output frequency of 13.56MHz, it can output extremely high-amplitude RF voltages for ion acceleration. To ensure the stability of the RF barrel, the resonant frequency must remain consistently at 13.56MHz under the influence of factors such as temperature and ion beam current. According to the formula... As can be seen, the resonant frequency can be controlled by the inductance value. Therefore, this dynamic tuning device, under the control of the matching circuit board, allows the tuning cap to move up and down around the center of the inductor, thereby changing the inductance value and further achieving dynamic tuning of the resonant frequency. If this mechanical tuning device fails, the resonant frequency will change under the interference of factors such as temperature and ion beam current during normal operation of the RF barrel. At this time, the reflected power will increase sharply, which may damage the RF power supply and the RF barrel, causing the high-energy ion implanter to shut down. Replacing the RF barrel is both time-consuming and laborious.

[0003] In the existing technology, most mechanical tuning devices transmit power through a threaded structure to achieve tuning action. However, during use, the threaded structure will wear significantly, causing malfunctions such as jamming or power transmission failure. In addition, threaded transmission also has defects such as low efficiency and short life. Summary of the Invention

[0004] In view of the shortcomings of the prior art, the present invention innovatively provides a dynamic tuning device and radio frequency barrel assembly, which can solve the above-mentioned technical problems existing in the prior art.

[0005] To achieve the above-mentioned technical objectives, the first aspect of the present invention discloses a dynamic tuning device, comprising:

[0006] support;

[0007] The motor is mounted on the bracket;

[0008] A lifting column, which is movably mounted on the bracket along its length;

[0009] A drive assembly, which is connected to the motor and the lifting column, is used to drive the lifting column to move.

[0010] A motion shaft is located at the bottom end of the lifting column, and the motion shaft can move with the lifting column.

[0011] Furthermore, the lifting column is provided with a rack, and the driving assembly includes a driving gear, which meshes with the rack.

[0012] Furthermore, the drive assembly also includes a driving wheel and a driven wheel, the driven wheel being connected to the drive gear, and the drive gear rotating synchronously with the driven wheel.

[0013] The driving wheel is driven by the motor, and the driven wheel is driven by the driving wheel.

[0014] Furthermore, the drive assembly also includes a manual adjustment wheel, which is connected to the drive gear.

[0015] Furthermore, the support frame is provided with a lifting frame, the lifting column is slidably mounted on the lifting frame, and the drive gear is rotatably mounted on the lifting frame.

[0016] Furthermore, the lifting frame includes a sliding connection portion and a support portion, the support portion being connected to the bracket, and the sliding connection portion being connected to the support portion.

[0017] The sliding connection part is provided with a through hole, the lifting column passes through the through hole, and the sliding connection part is also provided with a mounting groove, which communicates with the through hole, and the drive gear is located in the mounting groove.

[0018] Furthermore, the dynamic tuning device also includes a tension spring, the first end of which is fixed to the top of the lifting column, and the second end of which is fixed to the sliding connection.

[0019] Furthermore, the lifting column is provided with a sliding groove that extends along the length of the lifting column.

[0020] The sliding connection part is provided with a slider, which is slidably embedded in the groove. The slider is connected to the sliding connection part by an adjusting bolt.

[0021] Furthermore, the dynamic tuning device also includes a linear potentiometer, one end of which is connected to the bracket and the other end of which is connected to the top of the lifting column.

[0022] A second aspect of the present invention discloses an radio frequency barrel assembly, including a barrel body and the aforementioned dynamic tuning device.

[0023] The bracket is mounted on the barrel body, and the motion shaft extends into the barrel body and is connected to the tuning cap inside the barrel body.

[0024] The beneficial effects of this invention are as follows:

[0025] This invention controls the lifting and lowering of the motion shaft via a lifting column, and the drive assembly drives the lifting column to perform linear motion, improving transmission efficiency and solving the problem of low reliability in threaded transmissions. Furthermore, the motion shaft and lifting column are detachably connected, facilitating maintenance in case of malfunction. Attached Figure Description

[0026] Figure 1 This diagram illustrates the structure of the dynamic tuning device according to an embodiment of the present invention.

[0027] Figure 2 This diagram shows a partial structural schematic of the bracket (with motor installed) according to an embodiment of the present invention.

[0028] Figure 3 A partial structural schematic diagram of the bracket (mounting motor and drive assembly) according to an embodiment of the present invention is shown.

[0029] Figure 4 This diagram illustrates the connection state of the lifting column and the sliding support in an embodiment of the present invention.

[0030] Figure 5 This diagram shows a cross-sectional view of the dynamic tuning device of the present invention assembled on the radio frequency barrel according to an embodiment of the present invention.

[0031] In the picture,

[0032] 11. First fixing block; 111. First mounting hole; 12. Second fixing block; 121. Second mounting hole; 13. Mounting plate; 131. Fixed connection hole; 132. Motor mounting hole; 14. Support part; 141. Adjustment fixing hole; 15. Sliding connection part; 151. Slider; 152. Adjusting bolt; 153. Spring fixing block; 2. Motor; 21. Mounting threaded hole; 22. Drive shaft; 3. Lifting column; 31. Rack; 32. Cantilever beam; 33. Slide groove; 34. Connecting hole; 35. Stud; 41. Driving wheel; 42. Driven wheel; 43. Synchronous belt; 44. Manual adjustment wheel; 45. Extended wheel; 46. Flange; 5. Motion shaft; 6. Tension spring; 7. Linear potentiometer; 8. Connecting strip; 101. Top cover flange; 102. Tuning cap; 103. Wedge block; 104. Bellows; 105. Bolt. Detailed Implementation

[0033] The dynamic tuning device and radio frequency barrel assembly provided by the present invention will be explained and described in detail below with reference to the accompanying drawings.

[0034] In one embodiment, such as Figures 1-5As shown, the present invention provides a dynamic tuning device, including a bracket, a motor 2, a lifting column 3, and a drive assembly mounted on the bracket. The lifting column 3 is movably mounted on the bracket along its length and is connected to the motor 2 via the drive assembly. The motor 2 controls the linear movement of the lifting column 3. A motion shaft 5 is provided at the bottom end of the lifting column 3. Optionally, a threaded hole is provided at the first end of the motion shaft 5, and a stud 35 is provided at the bottom end of the lifting column 3. The stud 35 is detachably connected to the motion shaft 5. The motion shaft 5 moves synchronously with the lifting column 3 and is connected to a tuning cap inside the RF barrel, driving the tuning cap to move, thereby achieving a tuning effect.

[0035] In this embodiment, as Figure 1 , Figure 2 , Figure 3 As shown, the bracket includes a first fixing block 11 and a second fixing block 12, which are spaced apart by a certain distance. Optionally, the first fixing block 11 and the second fixing block 12 are L-shaped blocks, and mounting holes are formed on the end faces of the short sides of the first fixing block 11 and the second fixing block 12. Optionally, the bracket also includes a mounting plate 13, which has multiple motor mounting holes 132. The motor 2 has mounting threaded holes 21, and bolts pass through the motor mounting holes 132 and connect with the mounting threaded holes 21 to fix the motor 2 to the mounting plate 13. The mounting plate 13 has fixed connection holes 131 that connect with the mounting holes on the first fixing block 11 and the second fixing block 12, and the drive shaft 22 of the motor 2 extends between the first fixing block 11 and the second fixing block 12. Optionally, the first fixing block 11 and the second fixing block 12 can be connected at their ends by connecting blocks to form an integral structure.

[0036] In one embodiment, such as Figure 1 , Figure 4 As shown, a rack 31 is provided on the lifting column 3. The rack 31 extends along the length of the lifting column 3. The drive assembly includes a drive gear, which meshes with the rack 31. The rotation of the drive gear can drive the lifting column 3 to rise or fall.

[0037] The drive assembly also includes a driving wheel 41 and a driven wheel 42. The driven wheel 42 is connected to a drive gear, and the drive gear rotates synchronously with the driven wheel 42. The driving wheel 41 is located between the first fixed block 11 and the second fixed block 12 and is driven by the drive shaft 22 of the motor 2. The driven wheel 42 is driven by the driving wheel 41. In this embodiment, the driving wheel 41 and the driven wheel 42 are synchronous pulleys, connected by a synchronous belt 43. In other embodiments, the driving wheel 41 and the driven wheel 42 can also be configured as gears or other forms of transmission structures, as long as power transmission can be achieved.

[0038] In this embodiment, as Figure 2As shown, the mounting hole on the first fixing block 11 is the first mounting hole 111, and the mounting hole on the second fixing block 12 is the second mounting hole 121. The first mounting hole 111 and the second mounting hole 121 are respectively connected to a fixed connection hole 131. The first mounting hole 111 is a circular hole, and the second mounting hole 121 is an arc-shaped hole. Optionally, the first mounting hole 111 is an arc-shaped hole with the center of the second mounting hole 121 as its center and the distance between two corresponding holes on the mounting plate 13 as its radius. The first mounting hole 111 is set as an arc-shaped hole so that the distance between the driving wheel 41 and the driven wheel 42 can be adjusted, thereby ensuring the effective transmission of the synchronous belt 43.

[0039] Furthermore, such as Figure 1 As shown, the drive assembly also includes a manual adjustment wheel 44, which is connected to the drive gear. The manual adjustment wheel 44 allows for manual adjustment of the drive gear rotation, thereby enabling small-amplitude adjustment of the lifting column 3.

[0040] In one embodiment, such as Figure 1 , Figure 3 As shown, a lifting frame is provided on the bracket, and the lifting column 3 is slidably mounted on the lifting frame. The drive gear is rotatably mounted on the lifting frame. The lifting frame includes a sliding connection part 15 and a support part 14. The support part 14 is connected to the bracket. Optionally, the support part 14 is connected to the first fixed block 11. The support part 14 is an L-shaped plate, with both ends perpendicular to the upper surface of the first fixed block 11, and is connected to the first fixed block 11 by bolts. The sliding connection part 15 is connected to the support part 14 by bolts. Optionally, the sliding connection part 15 is connected to the short side of the support part 14. An adjustment fixing hole 141 is provided on the short side of the support part 14. The adjustment fixing hole 141 is an elongated hole that can adjust the installation height of the sliding connection part 15. The arc structure of the first mounting hole 111 and the adjustment fixing hole 141 can jointly adjust the distance between the driving wheel 41 and the driven wheel 42, thereby adjusting the tension of the synchronous belt 43, which facilitates the installation and adjustment of the synchronous belt 43.

[0041] Optionally, the sliding connection 15 has a U-shaped structure with a through hole formed on its inner side. The lifting column 3 passes through the through hole. The sliding connection 15 also has a mounting groove that communicates with the through hole, and the drive gear is located in the mounting groove.

[0042] In this embodiment, as Figure 1 , Figure 4 As shown, the lifting column 3 is a square column, and correspondingly, the through hole is a square hole. The through hole limits the lifting column 3, allowing it to slide only along its length. The rack 31 is mounted on the first side wall of the lifting column 3, facing the side where the mounting groove is located. The drive gear is mounted in the mounting groove and connected to the sliding connection part 15 via a rotating shaft.

[0043] Both ends of the drive gear's shaft extend to the outside of the sliding connection portion 15, with one end connected to the driven wheel 42 and the other end connected to the manual adjustment wheel 44. Optionally, a flange 46 is provided at one end of the shaft, connecting it to the driven wheel 42. Alternatively, an extended wheel 45 is connected to one end of the shaft, with the flange 46 provided on the extended wheel 45.

[0044] In one embodiment, such as Figure 1 , Figure 4 As shown, the dynamic tuning device also includes a tension spring 6. The first end of the tension spring 6 is fixed to the top of the lifting column 3, and the second end of the tension spring 6 is fixed to the sliding connection portion 15. Optionally, a cantilever beam 32 extends from the top of the lifting column 3 towards the side containing the first sidewall. The first end of the tension spring 6 is connected to the cantilever beam 32, and a spring fixing block 153 is provided on the sliding connection portion 15. A fixing groove is formed on the spring fixing block 153, and the second end of the tension spring 6 is connected to the fixing groove. The tension spring 6 can provide tension to the top of the lifting column 3.

[0045] Optionally, the lifting column 3 is provided with a sliding groove 33, which is formed on the second side wall of the lifting column 3. The second side wall is parallel to the first side wall. The sliding groove 33 extends along the length of the lifting column 3. A slider 151 is provided in the sliding connection part 15. The slider 151 is slidably embedded in the sliding groove 33. The slider 151 is connected to the sliding connection part 15 by an adjusting bolt 152. Specifically, the adjusting bolt 152 is threadedly connected to the sliding adjustment part. The slider 151 is rotatably connected to the end of the adjusting bolt 152. By rotating the adjusting bolt 152, the position of the slider 151 can be adjusted, thereby adjusting the pressing force of the slider 151 on the sliding groove 33, so as to adjust the magnitude of the friction force, i.e., the magnitude of the damping, between the slider 151 and the sliding groove 33.

[0046] When the high-power RF barrel is in operation, it is filled with SF6 gas at a pressure of approximately 14 psi. This gas pressure acts on the tuning cap, creating a significant outward force. This force is transmitted to the lifting column 3 via the motion shaft 5, and then acts on the gear set inside the motor 2 through the drive assembly. This increases the probability of gear wear and shortens the lifespan of the motor 2. In this embodiment, the tension spring 6 and the slider 151 greatly improve this situation. They buffer and dampen the rise of the lifting column 3, effectively preventing it from rising sharply and rapidly, thus extending the lifespan of the motor 2.

[0047] In some embodiments, such as Figure 1As shown, the dynamic tuning device also includes a linear potentiometer 7. One end of the linear potentiometer 7 is connected to the bracket, and the other end is connected to the top of the lifting column 3. The linear potentiometer 7 can intuitively reflect the relative height data of the motion axis 5 at this moment, and the data can be transmitted to the control board to realize automatic tuning. Optionally, a connecting hole 34 is provided on the end face of the top of the lifting column 3. The inner wall of the connecting hole 34 is formed with internal threads. A connecting strip 8 is provided on the lifting column 3. The connecting strip 8 is connected to the connecting hole 34 by bolts. The connecting strip 8 is provided with an elongated hole. The connecting strip 8 is connected to the top of the lifting column 3 by bolts. A mounting base is provided on the second fixing block 12. The first end of the linear potentiometer 7 is connected to the mounting base, and the second end is connected to the elongated hole on the connecting strip 8.

[0048] In one embodiment, such as Figure 5 As shown, the present invention also provides an RF barrel assembly, including a barrel body and the aforementioned dynamic tuning device. A bracket is mounted on the barrel body, and a motion shaft 5 extends into the barrel body and is connected to a tuning cap 102 inside the barrel body. Optionally, the barrel body includes a top flange 101, the bracket is mounted on the top flange 101, and the dynamic tuning device is located on the outside of the barrel body. A bellows 104, a wedge block 103, and a tuning cap 102 are provided inside the barrel body. A threaded hole is provided at the end of the motion shaft 5. The bellows 104 is fitted onto the motion shaft 5, and sealing rings are provided on the inner wall and bottom of the bellows 104 to achieve a seal between the motion shaft 5 and the top flange 101. The wedge block 103 and the tuning cap 102 are connected to the end of the motion shaft 5 by bolts 105.

[0049] This invention employs a rack and pinion drive, avoiding the wear and tear on parts caused by friction between the external thread and nut in ordinary threaded drives. This eliminates the risk of copper shaft jamming at its source and improves transmission efficiency. The entire tuning mechanism is separable from the motion shaft, allowing for easy separation of the entire tuning system from the high-power RF barrel in case of malfunction, overcoming the maintenance difficulties of existing technologies. The tuning range is no longer limited by threads, keyways, relief grooves, and set screws; simply replacing the linear potentiometer and bellows with a larger range allows for easy adjustment of the tuning range. The design incorporates a slider and tension spring, which, when the force is adjusted, counteract the pressure difference between the inside and outside of the high-power RF barrel during rest or operation, reducing the stress on the synchronous belt and the internal gears of the motor, significantly increasing the service life of the tuning system.

[0050] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0051] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0052] In the description of this specification, the references to terms such as "this embodiment," "an embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any at least one embodiment or example. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0053] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0054] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, and simple improvements made on the substantive content of the present invention should be included within the protection scope of the present invention.

Claims

1. A dynamic tuning device, characterized in that, include: support; The motor is mounted on the bracket; A lifting column, which is movably mounted on the bracket along its length; A drive assembly, connected to the motor and the lifting column, is used to drive the lifting column to linear motion. The lifting column is provided with a rack, the drive assembly includes a drive gear that meshes with the rack, and the drive assembly also includes a manual adjustment wheel that is connected to the drive gear; A motion shaft is detachably connected to the bottom end of the lifting column. The motion shaft can move with the lifting column and is connected to the tuning cap inside the radio frequency barrel, thereby driving the tuning cap to move to achieve the tuning effect.

2. The dynamic tuning device according to claim 1, characterized in that, The drive assembly further includes a driving wheel and a driven wheel, the driven wheel being connected to the drive gear, and the drive gear rotating synchronously with the driven wheel. The driving wheel is driven by the motor, and the driven wheel is driven by the driving wheel.

3. The dynamic tuning device according to claim 1, characterized in that, The support frame is equipped with a lifting frame, the lifting column is slidably mounted on the lifting frame, and the drive gear is rotatably mounted on the lifting frame.

4. The dynamic tuning device according to claim 3, characterized in that, The lifting frame includes a sliding connecting part and a supporting part, the supporting part being connected to the bracket, and the sliding connecting part being connected to the supporting part. The sliding connection part is provided with a through hole, the lifting column passes through the through hole, and the sliding connection part is also provided with a mounting groove, which communicates with the through hole, and the drive gear is located in the mounting groove.

5. The dynamic tuning device according to claim 4, characterized in that, The dynamic tuning device also includes a tension spring, the first end of which is fixed to the top of the lifting column, and the second end of which is fixed to the sliding connection.

6. The dynamic tuning device according to claim 4, characterized in that, The lifting column is provided with a sliding groove that extends along the length of the lifting column. The sliding connection part is provided with a slider, which is slidably embedded in the groove. The slider is connected to the sliding connection part by an adjusting bolt.

7. The dynamic tuning device according to any one of claims 1-6, characterized in that, The dynamic tuning device also includes a linear potentiometer, one end of which is connected to the bracket and the other end of which is connected to the top of the lifting column.

8. A radio frequency barrel assembly, characterized in that, Includes the barrel body and the dynamic tuning device as described in any one of claims 1-7. The bracket is mounted on the barrel body, and the motion shaft extends into the barrel body and is connected to the tuning cap inside the barrel body.

Images