Pulse DC coating circuit and method

Abstract

The present application discloses a pulsed DC coating circuit and method, including a power module, a first switch module, a first inductance module and a capacitor. The positive electrode of the power module is used to connect the first end of the coating load, and the power module is used to output current. The first end of the first switch module is connected to the second end of the coating load, and the first switch module is periodically turned on, so that the power module provides a pulse current to the coating load. The first end of the first inductance module is connected to the second end of the first switch module, and the second end of the first inductance module is connected to the negative electrode of the power module. The first end of the capacitor is connected to the positive electrode of the power module, and the second end of the capacitor is connected to the first end of the first inductance module. When the first switch module is turned off, the first inductance module continues the current flowing through, and the power module charges the capacitor to a peak voltage, so that when the first switch module is turned on next time, the capacitor provides a peak voltage to the coating load, and the first inductance module outputs the continuous current to the coating load.

Description

Technical Field

[0001] The present application relates to the field of plasma coating technology, and in particular to a pulsed direct current coating circuit and method. Background Art

[0002] Pulsed DC power supply can provide higher energy when depositing thin films, increase the kinetic energy and bombardment energy of metal ions, and thus promote denser deposition of thin films.

[0003] At present, the ionization effect of plasma under the action of pulsed DC power supply is not good, resulting in low coating efficiency. In addition, the pulsed DC power supply works in a constant current or constant power state. In the pulsed DC output mode, the power switch tube is turned off, and the coating current drops to zero. Then, when the power switch tube is turned on, the coating current can only reach the preset current value from zero, resulting in a low repetition frequency of the output current, and inconsistent coating current within a cycle, which affects the uniformity of the coating and poor coating effect. Summary of the invention

[0004] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application proposes a pulsed DC coating circuit and method, which can solve the problems of low coating efficiency and poor effect of traditional plasma coating technology.

[0005] In a first aspect, an embodiment of the present application provides a pulsed DC coating circuit, comprising:

[0006] A power module, wherein the positive electrode of the power module is used to connect to the first end of the coating load, and the power module is used to output current;

[0007] A first switch module, wherein a first end of the first switch module is connected to a second end of the film-coated load, and the first switch module is periodically turned on so that the power supply module provides a pulse current to the film-coated load;

[0008] A first inductor module, wherein a first end of the first inductor module is connected to a second end of the first switch module, and a second end of the first inductor module is connected to a negative electrode of the power module;

[0009] A capacitor, wherein a first end of the capacitor is connected to the positive electrode of the power module, and a second end of the capacitor is connected to the first end of the first inductor module;

[0010] When the first switch module is turned off, the first inductor module continues the current flowing through it, and the power module charges the capacitor to a peak voltage, and the peak voltage is higher than the terminal voltage of the power module, so that when the first switch module is turned on next time, the capacitor provides the peak voltage to the coated load, and the first inductor module outputs the continuous current to the coated load, thereby making the coated load work.

[0011] According to some embodiments of the present application, the first inductor module includes a first inductor, a second switch module and a first diode, the first end of the first inductor is connected to the second end of the first switch module, the second end of the first inductor is connected to the negative electrode of the power module, the first end of the second switch module is connected to the second end of the first inductor, the second end of the second switch module is connected to the positive electrode of the first diode, and the negative electrode of the first diode is connected to the first end of the first inductor.

[0012] According to some embodiments of the present application, a third switch module is further included, wherein a first end of the third switch module is connected to a first end of the coated load, and a second end of the third switch module is connected to a second end of the coated load.

[0013] According to some embodiments of the present application, an overvoltage protection module is further included, wherein a first end of the overvoltage protection module is connected to a first end of the third switch module, and a second end of the overvoltage protection module is connected to a second end of the third switch module.

[0014] According to some embodiments of the present application, the overvoltage protection module includes a field effect transistor and a second diode, the source of the field effect transistor is connected to the first end of the third switch module, the drain of the field effect transistor is connected to the cathode of the second diode, and the anode of the second diode is connected to the second end of the third switch module.

[0015] According to some embodiments of the present application, a fourth switch module and a second inductor module are further included, wherein a first end of the fourth switch module is connected to a second end of the capacitor, a second end of the fourth switch module is connected to a first end of the second inductor module, and a second end of the second inductor module is connected to a first end of the first inductor module.

[0016] According to some embodiments of the present application, the second inductor module includes a second inductor and a third diode, the first end of the second inductor is connected to the second end of the capacitor, the second end of the second inductor is connected to the first end of the first inductor module, the anode of the third diode is connected to the first end of the second inductor, and the cathode of the third diode is connected to the second end of the second inductor.

[0017] In a second aspect, an embodiment of the present application provides a coating method, which is applied to the pulsed DC coating circuit as described above, and the method includes:

[0018] Control the output current of the power module;

[0019] Controlling the first switch module to be turned on periodically so that the power supply module provides a pulse current to the coating load, and

[0020] When the first switch module is turned off, the first inductor module continues the current flowing through it, and the power module charges the capacitor to a peak voltage, which is higher than the terminal voltage of the power module. Therefore, when the first switch module is turned on next time, the capacitor provides the peak voltage to the coated load, and the first inductor module outputs the continuous current to the coated load, so that the coated load works.

[0021] According to some embodiments of the present application, the method further includes:

[0022] When the first switch module is disconnected, the second switch module is controlled to be turned on to continue the current flowing through the first switch module.

[0023] According to some embodiments of the present application, the method further includes:

[0024] When the first switch module is turned on, the fourth switch module is controlled to be turned on for a preset peak time, so as to apply a peak voltage to both ends of the coating load for the preset peak time, wherein the peak voltage is the sum of the voltage of the capacitor and the induced voltage generated by the second inductor module.

[0025] In a third aspect, an embodiment of the present application provides a computer-readable storage medium, which stores a program executable by a processor, and the program executable by the processor is used to implement the coating method as described above when executed by the processor.

[0026] The embodiments of the present application have at least the following beneficial effects:

[0027] The first switch module is periodically turned on, so that the power module provides a pulse current to the coating load. When the first switch module is turned on, the power module charges the capacitor, and the voltage of the capacitor reaches the terminal voltage of the power module. When the first switch module is turned off, the first inductor module continues the current flowing through, and the power module charges the capacitor to a peak voltage, and the peak voltage is higher than the terminal voltage of the power module, so that when the first switch module is turned on next time, the capacitor provides a peak voltage to the coating load, and the first inductor module outputs the continuous current to the coating load, so that the coating load works. Since when the first switch module is turned on, the induced current output to the coating load is similar to the current when the first switch module was turned on last time, the current does not need to increase from zero, the repetition frequency is high, the current consistency is good, and the uniformity of the coating is guaranteed. The peak voltage provided by the capacitor can enhance the ionization effect of the coating load and improve the coating efficiency.

[0028] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The present application is further described below with reference to the accompanying drawings and embodiments, wherein:

[0030] Figure 1 Schematic diagram a of a pulsed DC coating circuit in one embodiment of the present application;

[0031] Figure 2 is a timing diagram a of a pulsed DC coating circuit in one embodiment of the present application;

[0032] Figure 3 Schematic diagram b of a pulsed DC coating circuit in an embodiment of the present application;

[0033] Figure 4 FIG. b is a timing diagram of a pulsed DC coating circuit in an embodiment of the present application;

[0034] Figure 5 FIG. c is a schematic diagram of a pulsed DC coating circuit in an embodiment of the present application;

[0035] Figure 6 Flow chart of a coating method in one embodiment of the present application. DETAILED DESCRIPTION

[0036] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0037] In the description of the present application, it should be understood that the descriptions involving orientation, such as the orientation or positional relationship indicated as up, down, etc., are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0038] In the description of this application, "a plurality" means more than two. If there is a description of "first" or "second", it is only for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0039] In the description of this application, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in this application based on the specific content of the technical solution.

[0040] Refer to the following Figures 1 to 6 A pulsed DC coating circuit and method according to an embodiment of the present application are described.

[0041] The present application embodiment provides a pulsed DC coating circuit, such as Figure 1 As shown, it includes: a power module IS, a first switch module, a first inductance module and a capacitor C1. The positive electrode of the power module IS is used to connect the first end of the coated load RL, and the power module IS works in a constant current or constant power state for outputting current. The first end of the first switch module is connected to the second end of the coated load RL, and the first switch module is periodically turned on, so that the power module IS provides a pulse current to the coated load RL. The first end of the first inductance module is connected to the second end of the first switch module, and the second end of the first inductance module is connected to the negative electrode of the power module IS; the first end of the capacitor C1 is connected to the positive electrode of the power module IS, and the second end of the capacitor C1 is connected to the first end of the first inductance module. When the first switch module is turned off, the first inductance module generates an induced current, and the power module IS charges the capacitor C1 to a peak voltage, which is higher than the terminal voltage of the power module IS, so that when the first switch module is turned on next time, the capacitor C1 provides a peak voltage to the coated load RL, and the first inductance module outputs a freewheeling current to the coated load RL, thereby making the coated load RL work.

[0042] In this embodiment, Figure 2As shown, Iout is the pulse current, and Uab is the voltage across the coating load RL. The first switch module is periodically turned on, so that the power module IS provides a pulse current to the coating load RL. When the first switch module is turned on, the power module IS charges the capacitor C1, and the voltage of the capacitor C1 reaches the terminal voltage of the power module IS. When the first switch module is turned off, the first inductor module continues the current flowing through, and the power module IS charges the capacitor C1 to a peak voltage, and the peak voltage is higher than the terminal voltage of the power module IS, so that when the first switch module is turned on next time, the capacitor C1 provides a peak voltage to the coating load RL, and the first inductor module outputs the continuous current to the coating load RL, so that the coating load RL works. Since when the first switch module is turned on, the induced current output to the coating load RL is similar to the current when the first switch module was turned on last time, the current does not need to increase from zero, the repetition frequency is high, the current consistency is good, and the uniformity of the coating is guaranteed. The peak voltage provided by the capacitor C1 can enhance the ionization effect of the coating load RL and improve the coating efficiency.

[0043] It can be understood that when the first switch module is periodically turned on, after the capacitor C1 provides a peak voltage to the coating load RL, the voltage across the coating load RL recovers to the terminal voltage of the power module.

[0044] It should be noted that the coating load RL includes plasma. The coating load RL is connected to the power module through a pulse power transmission line, and the power transmission line has a certain length and has small parasitic inductance Lt1 and parasitic inductance Lt2.

[0045] It should be noted that if Figure 1 As shown, a third diode D7 is also included, the anode of the third diode D7 is connected to the second end of the capacitor C1, and the cathode of the third diode D7 is connected to the first end of the first inductor module.

[0046] It is understandable that if Figure 1 As shown, the first switch module includes a first switch tube M1 and a fourth diode D1. The source of the first switch tube M1 is connected to the first end of the first inductor module, the drain of the first switch tube M1 is connected to the second end of the coating load RL, the anode of the fourth diode D1 is connected to the source of the first switch tube M1, and the cathode of the fourth diode D1 is connected to the drain of the first switch tube M1.

[0047] In one embodiment of the present application, Figure 1As shown, the first inductor module includes a first inductor L1, a second switch module and a first diode D4, the first end of the first inductor L1 is connected to the second end of the first switch module, the second end of the first inductor L1 is connected to the negative electrode of the power module IS, the first end of the second switch module is connected to the second end of the first inductor L1, the second end of the second switch module is connected to the positive electrode of the first diode D4, and the negative electrode of the first diode D4 is connected to the first end of the first inductor L1.

[0048] In this embodiment, Figure 2 As shown, when the first switch module is turned on, the second switch module is turned off. When the first switch module is turned off, the second switch module is turned on, and the first inductor L1 generates an induced current, which passes through the second switch module and the first diode D4 to continue the current flowing through, so that the next time the first switch module is turned on, the continued current is output to the coating load RL.

[0049] It is understandable that if Figure 1 As shown, the second switch module includes a second switch tube M2 and a fifth diode D2. The source of the second switch tube M2 is connected to the anode of the first diode D4, and the drain of the second switch tube M2 is connected to the second end of the first inductor L1. The anode of the fifth diode D2 is connected to the source of the second switch tube M2, and the cathode of the fifth diode D2 is connected to the drain of the second switch tube M2.

[0050] In one embodiment of the present application, Figure 1 As shown, a third switch module is also included, a first end of the third switch module is connected to the first end of the plated load RL, and a second end of the third switch module is connected to the second end of the plated load RL.

[0051] In this embodiment, Figure 2 As shown, when the first switch module is turned on, the third switch module is turned off. When the first switch module is turned off, the third switch module is turned on, so that the current on the coating load RL continues to pass through the third switch module until it is exhausted.

[0052] It should be noted that if Figure 1 As shown, the third switch module includes a third switch tube M3 and a sixth diode D3. The drain of the third switch tube M3 is connected to the first end of the coating load RL, and the source of the third switch tube M3 is connected to the second end of the coating load RL. The anode of the sixth diode D3 is connected to the source of the third switch tube M3, and the cathode of the sixth diode D3 is connected to the drain of the third switch tube M3.

[0053] An embodiment of the present application further includes an overvoltage protection module, wherein a first end of the overvoltage protection module is connected to a first end of the third switch module, and a second end of the overvoltage protection module is connected to a second end of the third switch module.

[0054] In this embodiment, the overvoltage protection module provides overvoltage protection for the first switch module and the third switch module.

[0055] In one embodiment of the present application, Figure 5 As shown, the overvoltage protection module includes a field effect transistor M5 and a second diode D8, the source of the field effect transistor M5 is connected to the first end of the third switch module, the drain of the field effect transistor M5 is connected to the cathode of the second diode D8, and the anode of the second diode D8 is connected to the second end of the third switch module.

[0056] In this embodiment, when the voltage across the field effect transistor M5 exceeds the avalanche breakdown voltage of the field effect transistor M5, the voltage across the field effect transistor M5 will be stabilized at the avalanche breakdown voltage, thereby protecting the first switch module and the third switch module in the circuit.

[0057] An embodiment of the present application further includes a fourth switch module and a second inductor module, wherein a first end of the fourth switch module is connected to a second end of the capacitor C1, a second end of the fourth switch module is connected to a first end of the second inductor module, and a second end of the second inductor module is connected to a first end of the first inductor module.

[0058] It should be noted that if Figure 3 As shown, the fourth switch module includes a fourth switch tube M4 and a seventh diode D6, the source of the fourth switch tube M4 is connected to the second end of the capacitor C1, and the drain of the fourth switch tube M4 is connected to the first end of the second inductor module. The anode of the seventh diode D6 is connected to the source of the fourth switch tube M4, and the cathode of the seventh diode D6 is connected to the drain of the fourth switch tube M4.

[0059] In this embodiment, Figure 4 As shown, when the first switch module is turned on, the fourth switch module is controlled to be turned on for a preset peak time, so that the capacitor C1 is charged to the peak voltage and provides the peak voltage to the coating load RL for a preset peak time. The peak voltage is: the sum of the voltage of the capacitor C1 and the induced voltage generated by the second inductor module. Figure 4 The time between t1 and t2 is the preset peak time, and the value of Uab corresponding to this interval is the peak voltage. In the interval between t2 and t3, the fourth switch tube M4 is turned off, and the voltage across the coating load RL is restored to the voltage across the capacitor.

[0060] The plasma arc ignition process is performed by applying a peak voltage to increase the gas ionization rate. The duration of the peak voltage can be controlled by controlling the conduction time of the fourth switch module.

[0061] In one embodiment of the present application, Figure 3As shown, the second inductor module includes a second inductor L2, a first end of the second inductor L2 is connected to the second end of the capacitor C1, a second end of the second inductor L2 is connected to the first end of the first inductor module, an anode of the third diode D7 is connected to the first end of the second inductor L2, and a cathode of the third diode D7 is connected to the second end of the second inductor L2.

[0062] In this embodiment, when the first switch module is turned on, the voltage across the coated load RL does not reach the arc starting voltage, and the equivalent resistance value is very large. At this time, the current output by the power module IS passes through the second inductor L2, and the second inductor L2 forms a self-inductance voltage that is superimposed on the voltage across the capacitor C1 to obtain a high peak voltage, which is applied to both ends of the coated load RL.

[0063] In addition, the present application embodiment provides a coating method, which is applied to the pulsed DC coating circuit as described above, such as Figure 6 As shown, the method includes but is not limited to step S100 and step S200.

[0064] Step S100: Control the power module IS to output current;

[0065] Step S200: Control the first switch module to be periodically turned on, so that the power module IS provides a pulse current to the coating load RL, and

[0066] When the first switch module is turned off, the first inductor module continues the current flowing through, and the power module IS charges the capacitor C1 to a peak voltage, which is higher than the terminal voltage of the power module IS. Therefore, when the first switch module is turned on next time, the capacitor C1 provides a peak voltage to the plated load RL, and the first inductor module outputs the continuous current to the plated load RL, so that the plated load RL works.

[0067] In this embodiment, the first switch module is periodically turned on, so that the power module IS provides a pulse current to the coating load RL. When the first switch module is turned on, the power module IS charges the capacitor C1, and the voltage of the capacitor C1 reaches the terminal voltage of the power module IS. When the first switch module is turned off, the first inductor module continues the current flowing through, and the power module IS charges the capacitor C1 to a peak voltage, and the peak voltage is higher than the terminal voltage of the power module IS, so that when the first switch module is turned on next time, the capacitor C1 provides a peak voltage to the coating load RL, and the first inductor module outputs the continuous current to the coating load RL, so that the coating load RL works. Since when the first switch module is turned on, the continuous current output to the coating load RL is similar to the current when the first switch module was turned on last time, the current does not need to increase from zero, the repetition frequency is high, the current consistency is good, and the uniformity of the coating is guaranteed. The peak voltage provided by the capacitor C1 can enhance the ionization effect of the coating load RL and improve the coating efficiency.

[0068] In one embodiment of the present application, the method further includes but is not limited to step S300.

[0069] Step S300: When the first switch module is disconnected, the second switch module is controlled to be turned on to continue the current flowing through the first switch module.

[0070] In this embodiment, when the first switch module is turned off, the second switch module is controlled to be turned on to continue the current flowing through. When the first switch module is turned on, the second switch module is controlled to be turned off.

[0071] In one embodiment of the present application, the method further includes but is not limited to step S400.

[0072] Step S400: When the first switch module is turned off, the third switch module is controlled to be turned on, so as to consume the current on the coating load RL.

[0073] In this embodiment, when the first switch module is turned off, the third switch module is controlled to be turned on, so as to consume the current on the coating load RL. When the first switch module is turned on, the third switch module is controlled to be turned off.

[0074] According to some embodiments of the present application, the method further includes but is not limited to step S500.

[0075] Step S500: When the first switch module is turned on, the fourth switch module is controlled to be turned on for a preset peak time, so as to apply a peak voltage to both ends of the coating load RL for a preset peak time. The peak voltage is the sum of the voltage of the capacitor C1 and the induced voltage generated by the second inductor module.

[0076] In this embodiment, when the first switch module is turned on, the fourth switch module is controlled to be turned on for a preset peak time, so as to continuously apply a peak voltage to both ends of the coating load RL for the preset peak time. The plasma arc ignition process is performed by applying the peak voltage to increase the gas ionization rate.

[0077] In addition, an embodiment of the present application provides a computer-readable storage medium, which stores a program executable by a processor. When the program executable by the processor is executed by the processor, it is used to implement the coating method as described above.

[0078] In this embodiment, the first switch module is periodically turned on, so that the power module IS provides a pulse current to the coating load RL. When the first switch module is turned on, the power module IS charges the capacitor C1, and the voltage of the capacitor C1 reaches the terminal voltage of the power module IS. When the first switch module is turned off, the first inductor module generates an induced current, and the power module IS charges the capacitor C1 to a peak voltage, which is higher than the terminal voltage of the power module IS, so that when the first switch module is turned on next time, the capacitor C1 provides a peak voltage to the coating load RL, and the first inductor module outputs a continuous current to the coating load RL, so that the coating load RL works. Since when the first switch module is turned on, the induced current output to the coating load RL is similar to the current when the first switch module was turned on last time, the current does not need to increase from zero, the repetition frequency is high, the current consistency is good, and the uniformity of the coating is guaranteed. The peak voltage provided by the capacitor C1 can enhance the ionization effect of the coating load RL and improve the coating efficiency.

[0079] It will be appreciated by those skilled in the art that all or some of the steps and systems in the disclosed method above may be implemented as software, firmware, hardware and appropriate combinations thereof. Some physical components or all physical components may be implemented as software executed by a processor, such as a central processing unit, a digital signal processor or a microprocessor, or may be implemented as hardware, or may be implemented as an integrated circuit, such as an application specific integrated circuit. Such software may be distributed on a computer-readable medium, which may include a computer storage medium (or a non-transitory medium) and a communication medium (or a temporary medium). As known to those skilled in the art, the term computer storage medium includes volatile and non-volatile, removable and non-removable media implemented in any method or technology for storing information (such as computer-readable instructions, data structures, program modules or other data). Computer storage media include, but are not limited to, RAM, ROM, EEPROM, flash memory or other memory technologies, CD-ROM, digital versatile disks (DVD) or other optical disk storage, magnetic cassettes, magnetic tapes, disk storage or other magnetic storage devices, or any other medium that may be used to store desired information and may be accessed by a computer. Furthermore, it is well known to those skilled in the art that communication media typically embodies computer readable instructions, data structures, program modules, or other data in a modulated data signal such as a carrier wave or other transport mechanism, and may include any information delivery media.

[0080] The embodiments of the present application are described in detail above in conjunction with the accompanying drawings, but the present application is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present application.

Claims

1. A pulsed DC coating circuit, characterized in that: include: A power module, wherein the positive electrode of the power module is used to connect to the first end of the coating load, and the power module is used to output current; A first switch module, wherein a first end of the first switch module is connected to a second end of the film-coated load, and the first switch module is periodically turned on so that the power supply module provides a pulse current to the film-coated load; A first inductor module, wherein a first end of the first inductor module is connected to a second end of the first switch module, and a second end of the first inductor module is connected to a negative electrode of the power module; A capacitor, wherein a first end of the capacitor is connected to the positive electrode of the power module, and a second end of the capacitor is connected to the first end of the first inductor module; A third switch module, wherein a first end of the third switch module is connected to a first end of the coating load, and a second end of the third switch module is connected to a second end of the coating load; When the first switch module is turned off, the first inductor module continues the current flowing through it, and the power module charges the capacitor to a peak voltage, and the peak voltage is higher than the terminal voltage of the power module, so that when the first switch module is turned on next time, the capacitor provides the peak voltage to the coated load, and the first inductor module outputs the continuous current to the coated load, thereby making the coated load work.

2. The pulsed DC coating circuit according to claim 1, characterized in that: The first inductor module includes a first inductor, a second switch module and a first diode, wherein the first end of the first inductor is connected to the second end of the first switch module, the second end of the first inductor is connected to the negative electrode of the power module, the first end of the second switch module is connected to the second end of the first inductor, the second end of the second switch module is connected to the positive electrode of the first diode, and the negative electrode of the first diode is connected to the first end of the first inductor.

3. The pulsed DC coating circuit according to claim 1, characterized in that: It also includes an overvoltage protection module, a first end of the overvoltage protection module is connected to the first end of the third switch module, and a second end of the overvoltage protection module is connected to the second end of the third switch module.

4. The pulsed DC coating circuit according to claim 3, characterized in that: The overvoltage protection module includes a field effect tube and a second diode, the source of the field effect tube is connected to the first end of the third switch module, the drain of the field effect tube is connected to the cathode of the second diode, and the anode of the second diode is connected to the second end of the third switch module.

5. A pulsed DC coating circuit, characterized in that: include: A power module, wherein the positive electrode of the power module is used to connect to the first end of the coating load, and the power module is used to output current; A first switch module, wherein a first end of the first switch module is connected to a second end of the film-coated load, and the first switch module is periodically turned on so that the power supply module provides a pulse current to the film-coated load; A first inductor module, wherein a first end of the first inductor module is connected to a second end of the first switch module, and a second end of the first inductor module is connected to a negative electrode of the power module; A capacitor, wherein a first end of the capacitor is connected to the positive electrode of the power module, and a second end of the capacitor is connected to the first end of the first inductor module; a fourth switch module and a second inductor module, wherein a first end of the fourth switch module is connected to a second end of the capacitor, a second end of the fourth switch module is connected to a first end of the second inductor module, and a second end of the second inductor module is connected to a first end of the first inductor module; When the first switch module is turned off, the first inductor module continues the current flowing through it, and the power module charges the capacitor to a peak voltage, and the peak voltage is higher than the terminal voltage of the power module, so that when the first switch module is turned on next time, the capacitor provides the peak voltage to the coated load, and the first inductor module outputs the continuous current to the coated load, thereby making the coated load work.

6. The pulsed DC coating circuit according to claim 5, characterized in that: The second inductor module includes a second inductor, a first end of the second inductor is connected to the second end of the capacitor, and a second end of the second inductor is connected to the first end of the first inductor module.

7. A coating method, characterized in that: Applied to the pulsed DC coating circuit according to any one of claims 1 to 6, the method comprises: Control the output current of the power module; Controlling the first switch module to be turned on periodically so that the power supply module provides a pulse current to the coating load, and When the first switch module is turned off, the first inductor module continues the current flowing through it, and the power module charges the capacitor to a peak voltage, which is higher than the terminal voltage of the power module. Therefore, when the first switch module is turned on next time, the capacitor provides the peak voltage to the coated load, and the first inductor module outputs the continuous current to the coated load, so that the coated load works.

8. The coating method according to claim 7, characterized in that: The method also includes: When the first switch module is disconnected, the second switch module is controlled to be turned on to continue the current flowing through.

9. The coating method according to claim 7, characterized in that: The method also includes: When the first switch module is turned on, the fourth switch module is controlled to be turned on for a preset peak time, so as to apply a peak voltage to both ends of the coating load for the preset peak time, wherein the peak voltage is the sum of the voltage of the capacitor and the induced voltage generated by the second inductor module.

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