A multi-axis adjustment micro-force leveling adjustment device and adjustment system

Abstract

The present invention discloses a multi-axis adjustment micro-force leveling adjustment device and an adjustment system, which belong to the technical field of micro-force leveling adjustment devices. When using the device, the adjustment platform can be used as a platform for placing objects. When the plane moves, there is no need to adjust the moving plate part, so the bottom of the moving plate part is a plane structure that adapts to the plane. When moving, the mechanical legs can be used as a moving part to move. The lifting part cooperates with the angle adjustment part to expand the support surface of the mechanical legs or adjust the mechanical legs to adapt to different heights, thereby playing a stable support function for replacing a larger adjustment platform. When moving in a lithography machine, the moving plate part is adjusted to adapt to the structure of the position in the lithography machine, and the moving plate part is also adjusted to adapt to the moving structure when moving.

Description

Technical Field

[0001] The invention relates to a micro-force leveling adjustment device, in particular to a multi-axis adjustment micro-force leveling adjustment device and an adjustment system, belonging to the technical field of micro-force leveling adjustment devices. Background Art

[0002] Although the multi-legged robot motion platform used in the prior art can use mechanical legs to achieve the function of movement and the function of balance, it is unable to expand the support surface to provide more stable support after the platform is replaced. In addition, the mechanical legs cannot be conveniently adjusted in height, and cannot perform stable climbing and has no anti-slip function during adjustment. Therefore, a multi-axis adjustment micro-force leveling adjustment device and adjustment system are designed to solve the above problems. Summary of the invention

[0003] The main purpose of the present invention is to provide a multi-axis adjustment micro-force leveling adjustment device and an adjustment system.

[0004] The purpose of the present invention can be achieved by adopting the following technical solutions:

[0005] A multi-axis adjustment micro-force leveling adjustment device comprises a base, and an adjustment platform is installed on the top of the base through a universal shaft using an electric telescopic rod;

[0006] The base is a conical structure with a decreasing diameter downwards, and a side limiting sliding groove is provided on the outer wall of the base along the axial direction of the base;

[0007] An angle adjustment part is installed at the bottom of the side limit slide groove, and a lifting part is installed on the angle adjustment part;

[0008] The output end of the lifting part drives a mechanical leg part, and one end of the mechanical leg part supporting the ground is hinged with a moving plate part.

[0009] Preferably, a through opening is opened through the middle of the base, a vertical rope is installed in the middle of the bottom of the adjustment platform and passes through the through opening, and a horizontal sensor is installed at one end of the vertical rope away from the adjustment platform.

[0010] Preferably, the angle adjustment part includes a hinge seat, a second angle adjustment motor, and an arc-shaped connecting member;

[0011] An articulated seat is installed at the bottom of the side limit slide groove, a second angle adjustment motor is installed on the outer side of the articulated seat, and an arc-shaped connecting piece is installed through the output end of the second angle adjustment motor.

[0012] Preferably, the lifting part includes a lifting screw, a lifting slider and a lifting motor;

[0013] A lifting motor is installed at the bottom middle of the arc-shaped connecting piece, and a lifting screw is installed at the output end of the lifting motor through the arc-shaped connecting piece, and a lifting sliding block is sleeved and meshed on the outer side of the lifting screw.

[0014] Preferably, the mechanical leg comprises a first mechanical arm, a second mechanical arm and a first angle adjustment motor;

[0015] A first mechanical arm is hinged on the outer side of the lifting slider, and a first angle adjustment motor for driving the first mechanical arm is installed on the outer side of the lifting slider. A second mechanical arm is hinged on one end of the first mechanical arm away from the first angle adjustment motor, and the second mechanical arm is also driven by the motor. A moving plate portion is hinged on the bottom of the second mechanical arm, and the moving plate portion is also driven by the motor.

[0016] Preferably, the movable plate portion includes a foot plate, a flip motor, and an anti-slip position piece in the photolithography machine;

[0017] The bottom of the second robot arm is hinged with a foot plate, and both ends of the side of the foot plate are equipped with a flip motor, and the output end of the flip motor passes through the foot plate and is equipped with an anti-slip photolithography machine internal positioning part.

[0018] Preferably, teeth are provided on the top of the positioning member in the anti-slip lithography machine.

[0019] Beneficial technical effects of the present invention:

[0020] The present invention provides a multi-axis adjustable micro-force leveling adjustment device and an adjustment system. When using the device, the adjustment platform can be used as a platform for placing objects. When the plane moves, there is no need to adjust the movable plate part, so the bottom of the movable plate part is a flat structure that adapts to the plane. When moving, the mechanical legs can be used as the moving part to move. The lifting part cooperates with the angle adjustment part to expand the support surface of the mechanical legs or adjust the mechanical legs to adapt to different heights, thereby playing a stable support function for replacing a larger adjustment platform. When climbing an inclined surface such as a hillside, the movable plate part is adjusted to adapt to the structure of the position in the lithography machine. When moving, the movable plate part is also adjusted to adapt to the moving structure. In addition, the lifting part is synchronously adjusted to adjust the heights of different mechanical legs, so as to maintain the balance of the adjustment platform during adjustment. Secondly, the electric telescopic rod is started to further finely adjust the balance of the adjustment platform so that the adjustment platform always remains horizontal. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a first-perspective stereoscopic structural diagram of the entire device of a preferred embodiment of a multi-axis adjustable micro-force leveling adjustment device and adjustment system according to the present invention.

[0022] Figure 2 This is a second-angle stereoscopic structural diagram of the entire device according to a preferred embodiment of a multi-axis adjustable micro-force leveling adjustment device and adjustment system of the present invention.

[0023] Figure 3 This is a third-angle stereoscopic structural diagram of the entire device according to a preferred embodiment of a multi-axis adjustable micro-force leveling adjustment device and adjustment system of the present invention.

[0024] Figure 4 It is a schematic diagram of the three-dimensional structure from the first perspective of a combination of a mechanical leg portion and a lifting adjustment portion of a preferred embodiment of a multi-axis adjustment micro-force leveling adjustment device and an adjustment system according to the present invention.

[0025] Figure 5 This is a schematic diagram of the third perspective structure of a combination of a mechanical leg and a lifting adjustment part according to a preferred embodiment of a multi-axis adjustment micro-force leveling adjustment device and an adjustment system of the present invention.

[0026] Figure 6 It is a schematic diagram of the combined three-dimensional structure of a base and an adjustment platform according to a preferred embodiment of a multi-axis adjustment micro-force leveling adjustment device and an adjustment system of the present invention.

[0027] Figure 7 The present invention is a schematic diagram of a three-dimensional structure of an adjustment platform and a gravity sensing rod combination according to a preferred embodiment of a multi-axis adjustment micro-force leveling adjustment device and an adjustment system.

[0028] In the figure:

[0029] 1. Adjustment platform; 101. Vertical rope; 102. Level sensor;

[0030] 2. Base; 201. Side limit slide groove; 202. Through opening;

[0031] 3. First robotic arm; 301. Second robotic arm;

[0032] 4. Footboard; 401. Flip motor; 402. Anti-slip position parts in photolithography machine;

[0033] 5. Electric telescopic rod;

[0034] 6. Lifting slider; 601. Lifting screw; 602. First angle adjustment motor; 603. Arc-shaped connecting piece; 604. Second angle adjustment motor; 605. Articulated seat. DETAILED DESCRIPTION

[0035] In order to make the technical solution of the present invention more clear and specific to those skilled in the art, the present invention is further described in detail below in conjunction with embodiments and drawings, but the implementation manner of the present invention is not limited thereto.

[0036] like Figure 1-Figure 7As shown, a multi-axis adjustable micro-force leveling adjustment device provided in this embodiment includes a base 2, and an adjustment platform 1 is installed on the top of the base 2 through a universal shaft using an electric telescopic rod 5;

[0037] The base 2 is a conical structure with a decreasing diameter downwards, and a side limiting sliding groove 201 is provided on the outer wall of the base 2 along the axial direction of the base 2;

[0038] An angle adjustment part is installed at the bottom of the side limit slide groove 201, and a lifting part is installed on the angle adjustment part;

[0039] The output end of the lifting part drives a mechanical leg part, and one end of the mechanical leg part supporting the ground is hinged with a moving plate part.

[0040] The overall working principle is as follows: when using the present device, the adjustment platform 1 can be used as a platform for placing objects. When the plane moves, there is no need to adjust the movable plate part, so the bottom of the movable plate part is a flat structure to adapt to the plane. When moving, the mechanical legs can be used as the moving part to move. The lifting part cooperates with the angle adjustment part to expand the support surface of the mechanical legs or adjust the mechanical legs to adapt to different heights, thereby playing a stable support function for replacing a larger adjustment platform 1. When moving on an inclined plane in the lithography machine, the movable plate part is adjusted to adapt to the structure of the position in the lithography machine. When moving, the movable plate part is also adjusted to adapt to the moving structure. In addition, the lifting part is synchronously adjusted to adjust the heights of different mechanical legs, so as to maintain the balance of the adjustment platform 1 during adjustment. Secondly, the electric telescopic rod 5 is started to further fine-tune the balance of the adjustment platform 1 so that the adjustment platform 1 always remains horizontal.

[0041] In this embodiment, a through hole 202 is opened in the middle of the base 2, and a vertical rope 101 is installed in the middle of the bottom of the adjustment platform 1 and passes through the through hole 202. A horizontal sensor 102 is installed at the end of the vertical rope 101 away from the adjustment platform 1.

[0042] Local working principle: By designing the vertical rope 101 and the horizontal sensor 102 to sense the gravity balance, the detection information is fed back to the central processing unit installed in the adjustment platform 1. After calculation, the central processing unit controls the electric telescopic rod 5 and the mechanical legs and lifting part to adjust to the balance of the adjustment platform 1.

[0043] In this embodiment, the angle adjustment part includes an articulated seat 605, a second angle adjustment motor 604, and an arc-shaped connecting member 603;

[0044] An articulated seat 605 is installed at the bottom of the side limiting slide groove 201 , and a second angle adjustment motor 604 is installed on the outer side of the articulated seat 605 . An arc-shaped connecting piece 603 is installed at the output end of the second angle adjustment motor 604 through the articulated seat 605 .

[0045] Partial working principle: Start the second angle adjustment motor 604 to adjust the arc-shaped connecting member 603 for angle adjustment.

[0046] In this embodiment, the lifting part includes a lifting screw 601, a lifting slider 6 and a lifting motor;

[0047] A lifting motor is installed at the bottom middle of the arc-shaped connecting member 603 , and a lifting screw 601 is installed at the output end of the lifting motor through the arc-shaped connecting member 603 , and a lifting slider 6 is sleeved and meshed on the outer side of the lifting screw 601 .

[0048] Partial working principle: By starting the lifting motor to drive the lifting screw 601 to adjust the lifting of the lifting slider 6, the lifting of the mechanical legs is adjusted.

[0049] In this embodiment, the mechanical leg includes a first mechanical arm 3, a second mechanical arm 301 and a first angle adjustment motor 602;

[0050] The outer side of the lifting slider 6 is hinged with the first mechanical arm 3, and the outer side of the lifting slider 6 is installed with a first angle adjustment motor 602 for driving the first mechanical arm 3. The end of the first mechanical arm 3 away from the first angle adjustment motor 602 is hinged with the second mechanical arm 301, and the second mechanical arm 301 is also driven by the motor. The bottom of the second mechanical arm 301 is hinged with a moving plate, which is also driven by the motor.

[0051] Local working principle: The angle of the first mechanical arm 3 is adjusted by starting the first angle adjustment motor 602, and the angle adjustment is achieved by driving the second mechanical arm 301 and the moving plate part through the motor.

[0052] In this embodiment, the moving plate portion includes a foot plate 4, a flip motor 401, and an anti-slip photolithography machine internal position member 402;

[0053] The bottom of the second robot arm 301 is hinged with a foot plate 4, and both ends of the side of the foot plate 4 are installed with a flip motor 401. The output end of the flip motor 401 passes through the foot plate 4 and is installed with an anti-slip lithography machine internal positioning part 402, and teeth are set on the top of the anti-slip lithography machine internal positioning part 402.

[0054] Partial working principle: when on a flat surface, the teeth of the anti-slip photolithography machine internal positioning part 402 do not contact the bottom of the photolithography machine. When adjusting, the teeth of the anti-slip photolithography machine internal positioning part 402 contact the ground to achieve the anti-slip function.

[0055] The above description is only a further embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical solutions and concepts of the present invention within the scope disclosed by the present invention, which belong to the protection scope of the present invention.

Claims

1. A multi-axis adjustable micro-force leveling adjustment device, comprising a base (2), and an adjustment platform (1) mounted on the top of the base (2) via a universal shaft using an electric telescopic rod (5); Features: The base (2) is a conical structure with a diameter decreasing downwards, and a side limiting sliding groove (201) is provided on the outer wall of the base (2) along the axial direction of the base (2); An angle adjustment portion is installed at the bottom of the side limit sliding groove (201), and a lifting portion is installed for adjustment on the angle adjustment portion; The output end of the lifting part drives a mechanical leg, and one end of the mechanical leg supporting the ground is hinged with a moving plate; The lifting part comprises a lifting screw (601), a lifting slider (6) and a lifting motor; The mechanical leg comprises a first mechanical arm (3), a second mechanical arm (301) and a first angle adjustment motor (602); A first mechanical arm (3) is hingedly connected to the outer side of the lifting slider (6), and a first angle adjustment motor (602) for driving the first mechanical arm (3) is installed on the outer side of the lifting slider (6); a second mechanical arm (301) is hingedly connected to one end of the first mechanical arm (3), and the second mechanical arm (301) is also driven by the motor; a movable plate portion is hingedly connected to the bottom of the second mechanical arm (301), and the movable plate portion is also driven by the motor.

2. The multi-axis adjustment micro-force leveling adjustment device according to claim 1, characterized in that: A through opening (202) is provided in the middle of the base (2), a vertical rope (101) is installed in the middle of the bottom of the adjustment platform (1) and passes through the through opening (202), and a horizontal sensor (102) is installed at one end of the vertical rope (101) away from the adjustment platform (1).

3. The multi-axis adjustment micro-force leveling adjustment device according to claim 2, characterized in that: The angle adjustment portion comprises a hinge seat (605), a second angle adjustment motor (604), and an arc-shaped connecting member (603); An articulated seat (605) is installed at the bottom of the side limit slide groove (201), a second angle adjustment motor (604) is installed on the outer side of the articulated seat (605), and an arc-shaped connecting piece (603) is installed at the output end of the second angle adjustment motor (604) passing through the articulated seat (605).

4. The multi-axis adjustment micro-force leveling adjustment device according to claim 3, characterized in that: A lifting motor is installed at the bottom middle of the arc-shaped connecting piece (603), and a lifting screw rod (601) is installed at the output end of the lifting motor through the arc-shaped connecting piece (603). A lifting slider (6) is sleeved and meshed on the outer side of the lifting screw rod (601).

5. The multi-axis adjustment micro-force leveling adjustment device according to claim 4, characterized in that: The movable plate portion comprises a foot plate (4), a flip motor (401), and an anti-slip photolithography machine internal positioning member (402); The bottom of the second mechanical arm (301) is hingedly connected to a foot plate (4), both ends of the side of the foot plate (4) are equipped with a flip motor (401), and the output end of the flip motor (401) passes through the foot plate (4) and is equipped with an anti-slip photolithography machine internal positioning part (402).

6. The multi-axis adjustment micro-force leveling adjustment device according to claim 5, characterized in that: The top of the anti-slip photolithography machine internal positioning member (402) is provided with teeth.

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