A line-scan surface measurement anti-vibration method and measurement system

Abstract

The application belongs to the technical field of precision measurement, and discloses a line scanning surface measurement anti-vibration method and a line spectrum confocal scanning surface anti-vibration measurement system. The measurement system comprises a light source, a first slit, a linear dispersion module, a second slit, a third slit and an imaging unit. Two orthogonal slits are arranged at the center of the first slit, which are used for converting the light of the light source into two mutually orthogonal light beams. The linear dispersion module is used for dispersing and focusing the two mutually orthogonal light beams on the surface of the sample to be measured to form two orthogonal measurement light beams. The directions of the second and third slits are the same as the directions of the two slits in the first slit. After passing through the second and third slits, the two orthogonal measurement light beams enter the respective imaging units, and then the surface profile of the sample to be measured is obtained. In the scanning surface measurement, the obtained surface profile data is processed to solve the vibration influence problem in the line scanning surface measurement, and the line scanning surface anti-vibration measurement is realized.

Description

Technical Field

[0001] This invention belongs to the field of precision measurement technology, and more specifically, relates to a vibration-resistant method and measurement system for line scanning surface measurement. Background Technology

[0002] Currently, precision surface measurement technology plays an increasingly important role in numerous fields, such as the semiconductor industry, electronics manufacturing, medical industry, and machinery manufacturing. Optical line scanning measurement technology, due to its non-contact, high-speed, and high-precision characteristics, is gradually becoming an important method for surface measurement in the field of precision measurement.

[0003] Common line-scan surface measurement techniques include laser line scanning and line-spectral confocal scanning. However, line-scan surface measurements may encounter vibration problems stemming from various factors, such as mechanical vibrations caused by the instrument itself or external environmental factors, and minute vibrations of the sample itself due to its inherent motion or experimental conditions. These vibrations can affect the stability and accuracy of surface measurements due to the time-division nature of profile sampling in line-scan measurements. Therefore, a vibration-resistant line-scan surface measurement method is needed to improve measurement accuracy. Summary of the Invention

[0004] In view of the above-mentioned defects or improvement needs of the existing technology, the present invention provides a vibration-resistant method and system for line scanning surface measurement, which solves the problem of the impact of vibration on measurement accuracy during the line scanning surface measurement process.

[0005] To achieve the above objectives, according to one aspect of the present invention, a method for measuring vibration resistance using a line scan surface is provided, the method comprising the following steps:

[0006] S1 uses two orthogonal measurement lines to measure the surface profile of the sample under vibration, and obtains the surface profile of the sample under vibration in two orthogonal directions, namely the first direction line profile and the second direction line profile.

[0007] S2 calculates the difference in contour data of each point in the overlapping area of ​​the second direction line contour at adjacent sampling times under the influence of vibration. The average value of the difference in contour data of all points in the overlapping area at time i+1 and time i is taken as the relative vibration amount at time i+1. The absolute vibration amount corresponding to each sampling time is calculated using the relative vibration amount at each sampling time.

[0008] S3 uses the absolute vibration amount at each sampling moment to compensate for the first direction line profile at each sampling moment under the influence of vibration, and obtains the first direction line profile at each sampling moment after removing the influence of vibration, thereby realizing the surface reconstruction of the sample under test, that is, realizing the vibration resistance measurement of the surface of the sample under test.

[0009] More preferably, in step S1, the contour data of the second direction line profile obtained at the i-th sampling time during the scanning measurement under vibration is X. i ′=[x 0,i +v i x 1,i +v i x 2,i +v i , …....x N-1,i +v i x N,i +v i The contour data of the first direction line profile is p′. i =[y i,0 +v i y i,1 +v i y i,2 +v i , …....y i,M-1 +v i y i,M +v i ], where x 0,i x 1,i , ..., x N,i Let y be the contour value of each sampling point on the measurement line in the second direction at time i, excluding vibration. i,0 y i,1 , ..., y i,M v represents the contour value of each sampling point on the measurement line in the first direction at time i, excluding vibration. i Let be the vibration quantity at time i.

[0010] More preferably, in step S2, the relative vibration amount is calculated according to the following formula:

[0011] Δv i+1 =Σ(Δv) i+1,k ) / J

[0012] Δv i+1,k =X' i+1,k -X' i,k

[0013] Δv i+1,k It is the relative vibration of the k-th point in the overlapping region of the second direction line profile obtained from sampling at two adjacent time points, Δv i+1 X' is the relative vibration at time i+1, J is the total number of sampling points in the overlapping region, and X' is the relative vibration at time i+1. i+1,k and X' i,k The contour data of the k-th point in the overlapping region of the second direction line contour obtained by sampling at time i+1 and time i respectively contain the vibration amount at time i+1 and time i respectively;

[0014] The absolute vibration quantity is calculated according to the following formula:

[0015] v i =Δv i +Δv i-1 +……+Δv2+v1

[0016] Among them, v i Let be the absolute vibration quantity at the i-th sampling time.

[0017] More preferably, the compensation for the first direction line profile at each sampling moment under vibration is calculated according to the following formula:

[0018] p i =p i ′-v i =p i ′-(Δv i +Δv i-1 +……+Δv2+v1)

[0019] p i It is the contour data after compensating for vibration effects on the first direction line contour, p i ′ is the first direction line profile data affected by vibration obtained by sampling at time i, v i v1 is the absolute vibration quantity at time i, v1 is the absolute vibration quantity at the first sampling time, and Δv i Δv i-1 ..., Δv2 represents the relative vibration at two adjacent moments, and the contours of the first direction lines obtained from all scanning measurements are p. i After compensating for vibration effects, the surface scanning measurement profile p, which removes the vibration effects, is obtained. i Vibration resistance measurement of the sample surface can be achieved through surface reconstruction.

[0020] According to another aspect of the present invention, a measurement system for surface vibration resistance using the above-described line-scan surface measurement vibration resistance method is provided. The measurement system includes a light source, a first slit, a linear dispersion module, a second slit, a third slit, and an imaging unit arranged sequentially, wherein:

[0021] The first slit has two orthogonal slits at its center, which are used to convert the light from the light source into two mutually orthogonal beams of light; the linear dispersion module is used to disperse the two mutually orthogonal beams of light from the first slit and vertically focus them onto the surface of the sample to be tested in order of wavelength from high to low or from low to high, thereby generating two orthogonal measurement beams.

[0022] The linear dispersion module and the second and third slits form a confocal structure. The directions of the second and third slits are the same as the directions of the two slits in the first slit. The imaging unit includes a first imaging unit and a second imaging unit, which are respectively disposed behind the second and third slits.

[0023] Two orthogonal measurement rays pass through the second slit and the third slit respectively and enter the first imaging unit and the second imaging unit to image the surface profile of the sample under test from two mutually orthogonal directions, thereby obtaining the surface profile of the sample under test in two mutually orthogonal directions.

[0024] More preferably, the measurement system moves relative to the sample to achieve scanning of the sample surface, and the scanning direction is the same as the direction of the second slit / third slit;

[0025] The surface profile obtained by the imaging unit where the slit is in the same direction as the scanning direction is the second direction line profile, which is used to calculate vibration. The calculated vibration is used to compensate for the surface profile obtained by the imaging unit where the slit is perpendicular to the scanning direction, i.e. the first direction line profile, so as to obtain the surface profile of the sample to be tested after eliminating vibration.

[0026] More preferably, the linear dispersion module includes a first collimating lens group, a linear lens group, a first beam splitter, a second beam splitter, a second collimating lens group, and a fourth collimating lens group. The first collimating lens group is disposed behind the first slit and is used to achromatic collimate the two mutually orthogonal light beams. The first beam splitter is used to split the achromatic collimated light beams. The split light beams illuminate the surface of the sample to be tested and are reflected on the surface of the sample to be tested. The reflected light beams return along the original path and enter the first beam splitter and the second beam splitter in sequence. The second beam splitter is used to split the reflected light beams. The two orthogonal measurement beams emitted from the second beam splitter enter the second collimating lens group and the fourth collimating lens group respectively and are collimated.

[0027] More preferably, the first imaging unit includes a third collimating lens group, a first dispersive grating, a first imaging lens group, and a first camera arranged sequentially. The third collimating lens group is used to collimate the light emitted from the second slit. The first dispersive grating is used to disperse the light from the third collimating lens group. The first imaging lens group is used to focus the light of different wavelengths dispersed by the first dispersive grating. The first camera is used to image the light focused by the first imaging lens group.

[0028] More preferably, the second imaging unit includes a fifth collimating lens group, a second dispersion grating, a second imaging lens group, and a second camera arranged sequentially. The fifth collimating lens group is used to collimate the light emitted from the third slit. The second dispersion grating is used to disperse the light from the fourth collimating lens group. The second imaging lens group is used to focus the light of different wavelengths dispersed by the second dispersion grating. The second camera is used to image the light focused by the second imaging lens group.

[0029] More preferably, the linear dispersion module is provided with one or more planar mirrors to change the propagation direction of the light path.

[0030] In summary, the technical solutions conceived by this invention have the following beneficial effects compared with the prior art:

[0031] 1. This invention provides a method for measuring surface vibration resistance by line scanning. While obtaining line contours in the first direction through line scanning measurement in the first direction, a series of line contours in the second direction are obtained simultaneously through line scanning measurement in the second direction. For the sample to be tested, the vibration direction is perpendicular to the surface of the sample, that is, the vibration direction is perpendicular to the first direction and the second direction. Therefore, vibration information can be obtained by analyzing the series of line contour measurement data in the second direction. Then, the vibration information obtained by the second direction measurement can be used to compensate for the line contours in the first direction, thereby realizing the line scanning surface vibration resistance measurement.

[0032] 2. This invention proposes a line spectrum confocal scanning surface vibration measurement system. The first slit of this measurement system is an orthogonal slit, forming an orthogonal line light source. Based on the orthogonal line light source and linear dispersive focusing, a first direction measurement line and a second direction measurement line in orthogonal directions are formed. By combining the two slits in the horizontal and vertical directions of the corresponding orthogonal measurement lines and two spectral imaging units, the confocal spectrum analysis of the orthogonal direction measurement lines is obtained simultaneously, and the synchronous measurement of the first and second direction line profiles is obtained.

[0033] 3. In this invention, two orthogonal contour measurement lines are used to scan and measure the surface. One line is the first direction measurement line, which obtains the contour of each first direction line on the surface through scanning. The other line is the second direction measurement line, which is orthogonal to the first direction line. During the scanning process, the second direction line contour is captured and the vibration information is analyzed and extracted. The first direction line contour obtained by each scan is compensated, and the vibration influence is removed before surface reconstruction is performed to realize the line scan surface vibration measurement.

[0034] 4. The first slit provided by the present invention is an orthogonal slit used to form an orthogonal linear light source. The second slit and the third slit are ordinary optical slits. The setting direction of the second slit is parallel or orthogonal to the scanning direction, and the setting direction of the third slit is orthogonal to the setting direction of the second slit. The second slit and the third slit pass through the first direction measurement line or the second direction measurement line of the orthogonal linear light source, respectively, and filter out defocused light. That is, assuming that the second slit passes through the first direction measurement line and blocks the second direction measurement line, the third slit blocks the first direction measurement line and passes through the second direction measurement line, and filters out defocused light.

[0035] 5. The line scanning vibration measurement method provided by this invention can be applied not only to line scanning measurements, but also to line spectral measurements, such as to coaxial line spectral confocal scanning surface vibration measurement. Attached Figure Description

[0036] Figure 1 This is a schematic diagram of the structure of a line spectrum confocal surface vibration resistance measurement system constructed according to a preferred embodiment of the present invention;

[0037] Figure 2 This is a schematic diagram of the surface measurement of the sample under test constructed according to a preferred embodiment of the present invention;

[0038] Figure 3 This is a schematic diagram of the anti-vibration algorithm for line scanning surface measurement constructed according to a preferred embodiment of the present invention;

[0039] Figure 4 This is a schematic diagram of the vibration resistance process for line scanning surface measurement constructed according to a preferred embodiment of the present invention.

[0040] In all the accompanying drawings, the same reference numerals are used to denote the same elements or structures, wherein:

[0041] 1-Light source, 2-First slit, 3-First collimating lens group, 4-First plane mirror, 5-Linear lens group, 6-Sample to be tested, 7-First beam splitter, 8-Second beam splitter, 9-Second collimating lens group, 10-Second slit, 11-Third collimating lens group, 12-First dispersion grating, 13-First imaging mirror group, 14-First camera, 15-Second plane mirror, 16-Fourth collimating lens group, 17-Third slit, 18-Fifth collimating lens group, 19-Second dispersion grating, 20-Second imaging mirror group, 21-Second camera. Detailed Implementation

[0042] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention. Furthermore, the technical features involved in the various embodiments of this invention described below can be combined with each other as long as they do not conflict with each other.

[0043] like Figure 1 As shown, a linear spectral confocal scanning surface vibration measurement system includes a light source 1, a first slit 2, a linear dispersion module, and an imaging unit, specifically comprising:

[0044] Light source 1 is a point light source, using a high-power LED and equipped with a heat sink, and is focused and collimated into collimated white light; the first slit 2 is an orthogonal slit, that is, there are two slits that are orthogonal in the center, which are used to convert the collimated white light into mutually orthogonal horizontal and vertical line light sources.

[0045] In one embodiment of the present invention, the two orthogonal directions, the first direction and the second direction, are the transverse and the longitudinal direction, respectively. The scanning direction can be the same as the second direction, i.e., the scanning direction is longitudinal, and the longitudinal line contour sampling result is used to compensate for the vibration influence of the transverse line contour sampling result; the scanning direction can also be the same as the first direction, i.e., the scanning direction is transverse, and the transverse line contour sampling result is used to compensate for the vibration influence of the longitudinal line contour sampling result. The specific technical solution of the present invention will be described below with the scanning direction being longitudinal as an example.

[0046] The linear dispersion module and the slits form a confocal structure. The linear dispersion module collimates the orthogonal line light source from the light source and disperses it through the linear dispersion lens group, focusing the light of each wavelength in order from high to low or from low to high onto the surface of the sample under test, generating orthogonal transverse and longitudinal measurement lines. At the same time, the linear dispersion module receives the light reflected from the surface of the sample under test and focuses the light onto two slits placed in mutually orthogonal directions to form a confocal structure. The two slits are set behind the linear dispersion module to filter out defocused light, obtaining the line spectrum information corresponding to the transverse and longitudinal profiles, respectively.

[0047] The linear dispersion module includes a first collimating lens group 3, a first plane mirror 4, a linear lens group 5, a first beam splitter 7, a second beam splitter 8, a second collimating lens group 9, a second plane mirror 15, and a fourth collimating lens group 16. The first collimating lens group 3 is an achromatic collimating lens used to achromatically collimate light; the first plane mirror 4 is used to change the propagation direction of the achromatically collimated light; the beam splitter 7 is used to change the propagation direction of the incident light and transmit the light reflected and focused from the sample under test; the linear dispersion lens group 5 is used for white light dispersion and linearly focuses the dispersed light; the second beam splitter 8 separates the light reflected from the sample under test, which propagates to the second collimating lens group 9 and the fourth collimating lens group 16 respectively; the second collimating lens group 9 is used to focus the light onto the second slit 10; the second plane mirror 15 is used to change the propagation direction of the light; and the fourth collimating lens group 16 is used to focus the light onto the third slit 17.

[0048] The imaging unit includes a first imaging unit and a second imaging unit, used to image the lateral profile measurement lines and longitudinal profile measurement lines from the linear dispersion module onto the camera and perform spectral analysis, obtaining the simultaneous measurement of the lateral and longitudinal profiles of the sample surface based on wavelength profile height encoding; the first imaging unit is used to receive light passing through the second slit 10 corresponding to the lateral profile of the sample and perform spectral imaging on the first camera 14, including a third collimating lens group 11, a first dispersion grating 12, a first imaging mirror group 13 and the first camera 14; the third collimating lens 11 is used to collimate the light, the first dispersion grating 12 is used to disperse the light; the first imaging mirror group 13 is used to focus the dispersed light and image it onto the camera surface.

[0049] The second imaging unit is used to receive light passing through the third slit 17 corresponding to the longitudinal contour of the sample to be tested, and to perform spectral imaging on the second camera 21. It includes a fifth collimating lens group 18, a second dispersive grating 19, a second imaging mirror group 20, and a second camera 21. The fifth collimating lens group 18 is used to collimate the light; the second dispersive grating 19 is used to disperse the light; and the second imaging mirror group 20 is used to focus the dispersed light and image it on the camera surface.

[0050] In one embodiment of the present invention, the spectral images obtained by the first imaging unit and the second imaging unit are analyzed by spectral profile height encoding to obtain the lateral profile and the longitudinal profile, thereby realizing the synchronous capture of the lateral and longitudinal orthogonal direction line profiles of the measured surface.

[0051] In the scanning measurement using a line-spectral confocal scanning surface measurement sensor that synchronously captures orthogonal directional line profiles, the measured longitudinal profile is used to analyze vibration information, compensate for the transverse profile measurement results, and then reconstruct the surface to achieve surface vibration resistance measurement. The device includes a deformable structure.

[0052] The second slit 10 and the third slit 17 are orthogonal to each other. The light passing through the second slit 10 and the third slit 17 corresponds to the light reflected from the sample surface by the transverse and longitudinal measurement lines, respectively. The light is imaged and spectrally analyzed by the first and second imaging units composed of collimating lenses 11 and 18, dispersive gratings 12 and 19, and imaging lenses 13 and 20. The transverse and longitudinal contours of the sample surface 6 under test are simultaneously measured based on wavelength profile height encoding.

[0053] In one embodiment of the present invention, while the worktable drives the sample to be tested to move and achieve transverse measurement line scanning to obtain a series of transverse contours, longitudinal contours are continuously obtained from longitudinal measurement lines. After analyzing the longitudinal contours obtained by adjacent sampling, vibration information at each sampling moment is obtained, and the transverse contours obtained at each sampling moment are compensated to obtain the actual contours. After further reconstruction, the surface vibration resistance measurement by line spectral scanning is realized.

[0054] In one embodiment of the present invention, the light source 1 is a white LED, which uses a high-power LED with a heat sink, and is focused and collimated to become collimated white light, which, combined with the first slit 2, forms orthogonal linear white light.

[0055] Orthogonal linear white light is achromatic-collimated by the first collimating lens group 3, then dispersed by the first plane mirror 4 and the first beam splitter prism 7 into the linear lens group 5, forming transverse and longitudinal profile measurement lines perpendicular to the sample surface. Each wavelength in each measurement line is linearly and uniformly arranged. For example... Figure 2 As shown, the transverse and longitudinal profile measurement lines of the sample surface 6 are displayed.

[0056] The linearly collimated light, whose wavelengths correspond to the contour heights at each point on the transverse and longitudinal contour measurement lines, collimated by the second slit 10, the third slit 17, the third collimating lens group 11, and the fifth collimating lens group 18, is dispersed by the first dispersive grating 12 and the second dispersive grating 19, respectively, and then focused onto the first imaging lens group 13 and the second imaging lens group 20. The wavelengths corresponding to different contour heights are diffracted and focused onto different positions on the cameras to obtain contour images. The position of each point on the contour corresponds linearly to the wavelength. The transverse contour measurement line acquires each cross-sectional contour, and the orthogonal longitudinal contour measurement line simultaneously captures and analyzes the vibration information. Each transversely captured cross-sectional contour is compensated for, and after removing the vibration influence, surface reconstruction is performed to achieve line-scan surface vibration resistance measurement. The third collimating lens group 11 and the fifth collimating lens group 18 have the same structure, as do the first imaging lens group 13 and the second imaging lens group 20.

[0057] By employing a first dispersion grating 12, a second dispersion grating 19, and a linear lens group for 5-line dispersion focusing and diffraction spectral imaging, the spectral dispersion uniformity and sensitivity are effectively improved, ghost lines are avoided, and accuracy and resolution are enhanced. The measurement range and resolution in the vertical direction of the sample can be easily adjusted by selecting relevant parameters of the first dispersion grating 12 and the second dispersion grating 19.

[0058] The collimation, focusing, and imaging functions achieved by the first collimating lens group 3, the second collimating lens group 9, the third collimating lens group 11, the fourth collimating lens group 16, the fifth collimating lens group 18, the linear lens group 5, the first imaging lens group 13, and the second imaging lens group 20 in this invention are implemented using a conventional spherical lens combination structure. Corresponding structures have been disclosed in the prior art, so the specific structures are not described in this invention.

[0059] like Figure 3 As shown, the flow of the line scan surface measurement vibration resistance method for synchronous capture of orthogonal direction line contours and vibration analysis and compensation proposed in this invention is as follows:

[0060] S1. During line scan measurement, a series of transverse contours are obtained by sampling, and simultaneously, a series of longitudinal contours on orthogonal scan direction lines are obtained.

[0061] At a certain line scan measurement sampling time i, the lateral contour data p corresponding to the lateral contour measurement line. i =[y i,0 y i,1 y i,2 , …....y i,N-1 y i,M The vibration quantity is v i At that time, the measured lateral contour data p′ i =[y i,0 +v i y i,1 +v i y i,2 +v i , …....y i,M-1 +v i y i,M +v i [; When there is no vibration, the longitudinal profile data X] i =[x 0,i x 1,i x 2,i , …....x N-1,i x N,i ], there is vibration v i At that time, the measured data was X. i ′=[x 0,i +v i x 1,i +vi x 2,i +v i , …....x N-1,i +v i x N,i +v i ];

[0062] At the next scan sampling time i+1, the vibration quantity is v i+1 The measured lateral contour data p′ i+1 =[y i+1,0 +v i+1 y i+1,1 +v i+1 y i+1,2 +v i+1 ,.......y i+1,M-1 +v i+1 y i+1,M +v i+1 ], Vertical contour data X′ i+1 =[x 0,i +v i+1 x 1,i +v i+1 x 2,i +v i+1 ,.......x N-1,i +v i+1 x N,i +v i+1 ].

[0063] S2. For adjacent sequence analysis of the series of longitudinal profiles, the relative vibration of each point at the two times can be obtained from the sampling data of the overlapping part of the longitudinal profile data at two adjacent sampling times. The average of the relative vibration of all points in the overlapping area at the two times can be used as the relative vibration Δv at those two times. i+1 ;

[0064] By analyzing the overlapping longitudinal contour data at adjacent sampling times i+1 and i, such as the sampling data at points k to k+J, the relative vibration Δv at each point between the two sampling times can be obtained. i+1,k =X' i+1,k -X' i,k The average relative vibration at each point in the overlapping region can be taken as the relative vibration Δv at those two moments. i+1 =Σ(Δv) i+1,k ) / J.

[0065] Let the absolute vibration magnitude at the first sampling time be v1, then the absolute vibration magnitude at each sampling time can be obtained v. i =Δv i +Δv i-1 +……+Δ v2 +v1.

[0066] S4. The surface vibration reconstruction is obtained from all actual transverse line contour sequences obtained by scanning measurement.

[0067] The vibration compensation of the corresponding transverse line contour data for the absolute vibration at each sampling time is used to obtain p. i =p i ′-v i =p i ′-Δv i +Δv i-1 +……+Δv2+v1.

[0068] The actual profile after removing the effects of vibration is obtained. In the compensation result, each data point contains the same unknown value v1, but this relative quantity does not affect the characterization of the surface measurement results.

[0069] like Figure 4 As shown, the line scan surface measurement vibration resistance method proposed in this invention obtains the first direction line profile through a first direction measurement line scan, and simultaneously obtains the second direction line profile through a second direction measurement line scan. For the sample to be tested, the vibration direction is perpendicular to the sample surface, that is, the vibration direction is perpendicular and the vibration amount is simultaneously applied in the first and second directions. Therefore, the vibration information can be obtained by analyzing the second direction line profile measurement data, and the first direction line profile can be compensated, thereby realizing the line scan surface vibration resistance measurement.

[0070] Those skilled in the art will readily understand that the above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A line-scan surface resistance measurement system, characterized by, The measurement system comprises a light source (1), a first slit (2), a linear dispersion module, a second slit (10), a third slit (17) and an imaging unit arranged in sequence, wherein: The first slit (2) is provided with two orthogonal slits at the center, which are used to convert the light of the light source (1) into two mutually orthogonal light beams; the linear dispersion module is used for the mutually orthogonal two light beams from the first slit (2) to disperse and focus vertically on the surface of the sample (6) to be measured in order from high to low or from low to high, and the surface of the sample (6) to be measured is reflected to generate two orthogonal measurement light beams; The linear dispersion module, the second slit (10) and the third slit (17) form a confocal structure, the directions of the second slit (10) and the third slit (17) are the same as those of the two slits in the first slit (2), and the imaging unit comprises a first imaging unit and a second imaging unit, which are arranged behind the second slit (10) and the third slit (17) respectively; The two orthogonal measurement light beams enter the first imaging unit and the second imaging unit after passing through the second slit (10) and the third slit (17) respectively, and the surface profile of the sample (6) to be measured is imaged from two orthogonal directions, and then the surface profile of the sample (6) to be measured in two orthogonal directions is obtained; The measurement system moves relative to the sample (6) to be measured to realize scanning of the surface of the sample (6) to be measured, and the scanning direction is the same as the direction of the second slit (10) and the third slit (17); The surface profile data obtained by the imaging unit with the same slit as the scanning direction is used to calculate the vibration, and the vibration obtained by the calculation is used to compensate the surface profile obtained by the imaging unit with the slit orthogonal to the scanning direction, so as to obtain the surface profile of the sample (6) to be measured after eliminating the vibration.

2. The measurement system of claim 1, wherein, The linear dispersion module comprises a first collimating lens group (3), a linear lens group (5), a first light splitting prism (7), a second light splitting prism (8), a second collimating lens group (9) and a fourth collimating lens group (16), the first collimating lens group (3) is arranged behind the first slit (2) and is used for achromatic collimation of the two mutually orthogonal light beams; the first light splitting prism (7) is used for splitting the achromatic collimated light, the split light irradiates on the surface of the sample (6) to be measured and reflects on the surface of the sample (6) to be measured, the reflected light returns along the original path and enters the first light splitting prism (7) and the second light splitting prism (8) in sequence, the second light splitting prism (8) splits the reflected light, and the two orthogonal measurement lights emitted from the second light splitting prism (8) enter the second collimating lens group (9) and the fourth collimating lens group (16) for collimation.

3. The measurement system of claim 2, wherein, The second imaging unit comprises a fifth collimating lens group (18), a second dispersion grating (19), a second imaging lens group (20) and a second camera (21) arranged in sequence, the fifth collimating lens group (18) is used for collimating the light rays emitted from the third slit (17), the second dispersion grating (19) is used for dispersing the light rays from the fourth collimating lens group (16), the second imaging lens group (20) is used for focusing the light rays of different wavelengths after the second dispersion grating (19) disperses, and the second camera (21) is used for imaging the light rays focused by the second imaging lens group (20).

4. The measurement system of claim 1, wherein, The first imaging unit comprises a third collimating lens group (11), a first dispersion grating (12), a first imaging lens group (13) and a first camera (14) arranged in sequence, the third collimating lens group (11) is used for collimating the light rays emitted from the second slit (10), the first dispersion grating (12) is used for dispersing the light rays from the third collimating lens group (11), the first imaging lens group (13) is used for focusing the light rays of different wavelengths after the first dispersion grating (12) disperses, and the first camera (14) is used for imaging the light rays focused by the first imaging lens group (13).

5. The measurement system of claim 1, wherein, The linear dispersion module is provided with one or more plane mirrors for changing the propagation direction of the light path.

6. A vibration-resistant method of line-scan surface measurement, using a measurement system according to any one of claims 1 to 5, characterized in that, The method comprises the following steps: S1, measuring the surface profile of the sample to be measured under the influence of vibration by using two orthogonal measuring lines, and obtaining the surface profile of the sample to be measured in two orthogonal directions under the influence of vibration, i.e., the first direction line profile and the second direction line profile; S2 calculates the difference of the profile data of each point in the overlapping area of the second direction line profile at adjacent sampling time under the influence of vibration, takes the average of the difference of the profile data of all points in the overlapping area at the first i and second i sampling time as the relative vibration amount at the first i sampling time; and calculates the absolute vibration amount corresponding to each sampling time using the relative vibration amount at each sampling time; S3, compensating the first direction line profile at each sampling time under the influence of vibration by using the absolute vibration amount at each sampling time, respectively, to obtain the first direction line profile at each sampling time after removing the influence of vibration, and realizing the anti-vibration measurement of the surface of the sample to be measured.

7. A vibration resistant method of line-scan surface measurement as claimed in claim 6, wherein, In step S1, under the influence of vibration, the scanning measurement is performed. i The contour data of the second direction line obtained at the sampling time is X i ′=[ x 0,i + v i , x 1,i + v i , x 2,i + v i , … x N-1,i + v i , x N,i + v i The contour data of the first direction line profile is: =[ y i,0 + v i , y i,1 + v i , y i,2 + v i , … y i,M-1 + v i , y i,M + v i ],in, x 0,i , x 1,i , ..., x N,i For the first i The contour values ​​of each sampling point on the measurement line in the second direction at time excluding vibration are... y i,0 , y i,1 , ..., y i,M For the first i The profile values ​​of each sampling point on the measurement line in the first direction at any given time do not include vibration. v i For the first i The amount of vibration at any given moment.

8. A line-scan surface measurement anti-vibration method as claimed in claim 6 or 7, characterized in that, In step S2, the relative vibration amount is calculated according to the following relationship: Δv i+1 =∑(Δ v i+1 ,k ) / J Δ v i+1 ,k = X ' i+1,k - X' i,k ​ wherein Δ v i+1 ,k is the relative vibration amount of the point in the second direction line profile overlapping area at the i+1th moment, k Δv i+1 is the relative vibration amount at the i+1th moment, J is the total number of sampling points in the overlapping area, X' i+1,k and X' i,k are the profile data containing the vibration amount of the point in the second direction line profile overlapping area at the i+1th moment and the ith moment, respectively. i i k i i ​​​​​​ The absolute vibration amount is calculated according to the following relationship: v i = Δ v i + Δ v i-1 +……+ Δ v 2+ v 1 wherein, v i is the absolute vibration quantity at the i-th sampling time point. i is the absolute vibration quantity at the i-th sampling time point.

9. A vibration resistant method of line-scan surface measurement as claimed in claim 6 or 7, characterised in that, The compensation of the first direction line profile at each sampling time under the influence of vibration is calculated according to the following relationship: p i = p i ′- v i = p i ′-(Δ v i +Δ v i-1 +……+ Δ v 2+ v 1) in, v i It is the first i absolute vibration at any moment v 1 represents the absolute vibration at the first sampling moment, Δ v i It is the first i The relative vibration at adjacent moments. p i ′ is the first under the influence of vibration i Contour data of the first direction line profile at each moment. p i It is the first step to remove the effects of vibration. i The contour data of the first direction line profile at each moment.

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