Film thickness measuring device and method

Abstract

The invention discloses a film thickness measuring device and method, and relates to the technical field of film thickness measurement. The technical scheme is as follows: comprising a supporting bottom plate, two U-shaped frames are fixedly arranged on the top of the supporting bottom plate, a top plate is fixedly arranged between the two U-shaped frames, a multifunctional measuring mechanism is arranged at the bottom of the top plate, and a bearing component is arranged at the top of the supporting bottom plate; the multifunctional measuring mechanism comprises a cover shell, the cover shell is arranged at the bottom of the top plate, a second electric push rod is fixedly arranged on the top of the cover shell, a connecting frame is fixedly connected to the output end of the second electric push rod, a first motor is fixedly arranged inside the connecting frame, a rotating rod is fixedly connected to the output end of the first motor, and a top mounting plate is fixedly arranged at the bottom of the rotating rod. The invention has the following beneficial effects: facilitating film sampling, maintaining the flatness of the film, facilitating measurement, adjusting the measurement position, multi-region measurement, increasing the measurement data sample, facilitating film thickness calculation, improving the reliability and accuracy of measurement, fast measuring speed, and improving work efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field of film thickness measurement, and in particular to a film thickness measurement device and method. Background Art

[0002] During the production process of thin films, it is necessary to measure the thickness of the film. Existing measurement methods, such as using a light source to emit a light beam to the film, the light beam is reflected by the upper and lower surfaces of the film and received by a receiver, and the thickness of the film is calculated by calculating the optical path difference between the two reflected light beams.

[0003] Existing film samples are cut and manually laid on the test table. There are scratches and creases on the film when it is laid flat, and there are bubbles between the film and the test table. The film cannot be guaranteed to be flat when placed on the laboratory table, causing the local reflected light beam to not be received normally by the receiver, resulting in measurement errors. In addition, the measurement area is single, and the measurement data is not unique, resulting in low accuracy of the measurement data. Summary of the invention

[0004] To this end, the present invention provides a film thickness measuring device and method to solve the problem that after the film sample is cut and manually laid on a test bench, scratches and creases appear on the film when it is laid flat, and bubbles exist between the film and the test bench. The film cannot be kept flat when placed on the laboratory bench, causing the local reflected light beam to fail to be normally received by the receiver, resulting in measurement errors. In addition, the measurement area is single, the measurement data is not single, and the measurement data accuracy is low.

[0005] In order to achieve the above-mentioned object, the present invention provides the following technical solutions: a thin film thickness measuring device, comprising a supporting bottom plate, two U-shaped frames are fixedly arranged on the top of the supporting bottom plate, a top plate is fixedly arranged between the two U-shaped frames, a multifunctional measuring mechanism is arranged at the bottom of the top plate, and a bearing assembly is arranged at the top of the supporting bottom plate;

[0006] The multifunctional measuring mechanism includes a cover shell, which is arranged at the bottom of the top plate, a second electric push rod is fixedly provided on the top of the cover shell, an output end of the second electric push rod is fixedly connected to a connecting frame, a first motor is fixedly provided inside the connecting frame, a rotating rod is fixedly connected to the output end of the first motor, a top mounting plate is fixedly provided at the bottom of the rotating rod, a slide rail is fixedly provided at the bottom of the top mounting plate, a slider is provided inside the slide rail, a connecting shell is fixedly provided on one side of the slider, a second motor is fixedly provided on one side of the connecting shell, the output end of the second motor is fixedly connected to a lead screw, a lead screw is connected to the inside of the connecting shell via a bearing, a sliding block is provided on the outside of the lead screw via a threaded sleeve, a light source module is installed at the bottom of the sliding block, and a laser and a photodetector are respectively installed at the bottom of the light source module.

[0007] Preferably, the multifunctional measuring mechanism further comprises a sample cutting assembly, wherein the sample cutting assembly comprises a connecting rod, wherein the connecting rod is connected to the slider via a bearing, a sliding column is fixedly provided at the bottom of the connecting rod, and a cutting knife is fixedly provided at the bottom of the sliding column.

[0008] Preferably, the multifunctional measuring mechanism also includes a pressing assembly, and the pressing assembly also includes an outer pressure plate and an inner pressure plate, the outer pressure plate and the inner pressure plate are arranged inside the cover shell, two first fixing rods are fixedly provided on both sides of the outer pressure plate, the first fixing rods are fixedly connected to the connecting frame, a first pressure strip is fixedly provided at the bottom of the outer pressure plate, a second pressure strip is fixedly provided at the bottom of the inner pressure plate, a connecting ring is connected to the top of the inner pressure plate through a bearing, a plurality of second fixing rods are fixedly provided on the top of the connecting ring, a plurality of second fixing rods are fixedly connected to one end of the plurality of second fixing rods with a sleeve, and the sleeve is fixedly sleeved on the outside of the rotating rod.

[0009] Preferably, a limit unit is provided on the top of the inner pressure plate, and the limit unit includes a third electric push rod, and the third electric push rod is fixedly provided on the top of the inner pressure plate, and the output end of the third electric push rod is fixedly connected with a telescopic rod, and a spring is fixedly provided on the outer side of the telescopic rod, and one end of the telescopic rod is fixedly connected with a limit column, and a limit groove is provided on the side of the connecting ring, and the limit column extends into the limit groove.

[0010] Preferably, the slider slides inside the slide rail, and the top and bottom of the slider are connected to two first slide shafts through bearings, and the first slide shafts are in contact with the slide rail. The two sides of the slider are connected to two second slide shafts through bearings, and the second slide shafts are in contact with the slide rail.

[0011] Preferably, the bearing assembly includes a bearing shell, which is fixedly arranged on the top of the supporting base plate, a connecting tube is fixedly arranged on the bottom of the bearing shell, the connecting tube passes through the supporting base plate, a vacuum pump is fixedly arranged on the bottom of the supporting base plate, the output end of the vacuum pump is connected with the connecting tube, a bearing frame plate is fixedly arranged on the top of the bearing shell, a first groove, a groove and a second groove are respectively provided on the top of the bearing frame plate, the first groove is in contact with the first pressure strip, the second groove is in contact with the second pressure strip, the cutting knife extends into the groove, a plurality of round rods are fixedly connected to the inside of the bearing frame plate, one end of the plurality of round rods is fixedly connected to the bearing plate, and a plurality of air relief grooves are provided on the outside of the bearing plate.

[0012] Preferably, two first electric push rods are fixedly provided on the top of the top plate, and the output ends of the two first electric push rods are fixedly connected with ear plates, and the ear plates are fixedly connected to the cover shell.

[0013] Preferably, the four corners of the bottom of the support base plate are fixedly connected with support columns.

[0014] Preferably, a placement rack is fixedly provided on one side of the two U-shaped frames, unwinding rollers are provided on the tops of the two placement racks, and a winding roller is installed on the other side of the two U-shaped frames.

[0015] A method for measuring film thickness, the specific steps are as follows:

[0016] S1. Film placement: Place the unwinding roller on the placement frame, then pull the film onto the winding roller and wind it up, so that the film is laid flat on the top of the bearing frame, and the film does not contact the bearing frame to avoid scratches on the film. Then start the first electric push rod, which controls the ear plate to move down, and the ear plate controls the cover to move down, so that the cover is close to the film and contacts the film. Start the second electric push rod, which controls the connecting frame to move down, and the connecting frame drives the rotating rod to move down, and the rotating rod drives the sleeve to move down, and the sleeve drives the second fixed rod to move down, and the second fixed rod The rod drives the connecting ring to move downward, the connecting ring drives the inner pressure plate to move downward, the connecting frame drives the first fixing rod to move downward, the first fixing rod drives the outer pressure plate to move downward, so that the first pressure strip at the bottom of the outer pressure plate presses the film into the first groove, and the second pressure strip at the bottom of the inner pressure plate presses the film into the second groove, so that the top of the bearing frame is sealed, and the vacuum pump is started. The vacuum pump draws vacuum into the inside of the bearing shell through the connecting tube, so that the film is adsorbed on the surface of the bearing plate, the film is in close contact with the bearing plate, and the air release groove facilitates the outflow of air, so that no bubbles are generated on the surface of the bearing plate;

[0017] S2. Film sampling: During the pressing process, the rotating rod drives the top mounting plate to move downward, the top mounting plate drives the slide rail to move downward, the slide rail drives the slider to move downward, the slider drives the connecting rod to move downward, the connecting rod drives the slide column to move downward, the slide column drives the cutting knife to move downward, so that the cutting knife pierces the film, and then the first motor is started, the first motor drives the rotating rod to rotate, the rotating rod drives the top mounting plate to rotate, the top mounting plate drives the slide rail to rotate, the slide rail drives the slider to rotate, because the slide column is between the outer pressure plate and the inner pressure plate, the slider and the connecting rod, slide column and cutting knife at the bottom of the slider will be controlled to move along the track between the slot and the inner pressure plate during the rotation of the slide rail, so that the cutting knife cuts the film to achieve the sampling purpose, and the downward movement of the slide rail will drive the connecting shell to move downward, the connecting shell drives the sliding block and the light source module to move downward, and the laser and photodetector at the bottom of the light source module are close to the film;

[0018] S3. Film thickness measurement: first, control the limit unit to release the restriction on the connecting ring, start the laser at the bottom of the light source module to emit a laser beam to the surface of the film sample, and after the laser beam is reflected on the film surface, part of the light is introduced into the photodetector, and the first motor is started. The first motor controls the rotation of the rotating rod, and the rotating rod drives the top mounting plate to rotate, and the top mounting plate drives the slide rail to rotate, and the slide rail drives the slider to rotate, and the slider drives the connecting shell to rotate, and the connecting shell drives the sliding block and the light source module to rotate, so as to control the light source module to run on a rotation trajectory, and then reach the top of the film on the rotation trajectory, and start the second motor, and the second motor drives the screw rod to rotate, and the screw rod drives the sliding block to move, and the sliding block drives the light source module to move, and the light source module drives the laser and the photodetector to move, so as to adjust the measurement position, and multi-area measurement increases the measurement data samples, which is convenient for film thickness calculation.

[0019] The embodiments of the present invention have the following advantages:

[0020] The film is pressed by the pressing component, so that the top of the bearing frame is sealed by the film. The vacuum pump draws vacuum inside the bearing shell through the connecting tube, so that the film is adsorbed on the surface of the bearing plate. The film is in close contact with the bearing plate. The air release groove facilitates the outflow of air, so that bubbles are not generated on the surface of the bearing plate, and the film sample is prevented from being scratched. The slider and the connecting rod, sliding column and cutting knife at the bottom of the slider are controlled by the sample cutting component to move along the track between the slot and the inner pressure plate, so that the cutting knife cuts the film to achieve the purpose of sampling, maintain the flatness of the film, and facilitate measurement;

[0021] The downward movement of the slide rail will drive the connecting shell to move downward, the connecting shell will drive the sliding block and the light source module to move downward, the laser and the photodetector at the bottom of the light source module will be close to the film, the lead screw will drive the sliding block to move, the sliding block will drive the light source module to move, the light source module will drive the laser and the photodetector to move, so as to adjust the measurement position, multi-area measurement, increase the measurement data samples, facilitate the calculation of film thickness, improve the reliability and accuracy of measurement, increase the measurement speed, and improve work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the implementation methods of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for the implementation methods or the description of the prior art. Obviously, the drawings in the following description are only exemplary, and for ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.

[0023] The structures, proportions, sizes, etc. illustrated in this specification are only used to match the contents disclosed in the specification so as to facilitate understanding and reading by persons familiar with the technology. They are not used to limit the conditions under which the present invention can be implemented, and therefore have no substantial technical significance. Any structural modification, change in proportion or adjustment of size shall still fall within the scope of the technical contents disclosed in the present invention without affecting the effects and purposes that can be achieved by the present invention.

[0024] Figure 1 A schematic diagram of the overall structure provided by the present invention;

[0025] Figure 2 A cross-sectional view of the overall structure provided by the present invention;

[0026] Figure 3 A three-dimensional diagram of the multifunctional measuring mechanism provided by the present invention;

[0027] Figure 4 A three-dimensional diagram of the bearing assembly provided by the present invention;

[0028] Figure 5 A stereoscopic diagram of a sample cutting assembly provided by the present invention;

[0029] Figure 6 A three-dimensional diagram of a pressing assembly provided by the present invention;

[0030] Figure 7 A three-dimensional diagram of the slide rail provided by the present invention;

[0031] Figure 8 A partial cross-sectional view of a slider provided by the present invention;

[0032] Fig. 9 The present invention provides Figure 2 A magnified view of the structure of the middle part A;

[0033] Fig.10 The present invention provides Figure 5 Enlarged view of the structure of part B in the middle.

[0034] In the figure: 1, supporting bottom plate; 2, supporting column; 3, U-shaped frame; 4, top plate; 5, first electric push rod; 6, ear plate; 7, cover shell; 8, bearing shell; 9, placement rack; 10, unwinding roller; 11, winding roller; 12, second electric push rod; 13, first fixed rod; 14, vacuum pump; 15, connecting cylinder; 16, connecting frame; 17, first motor; 18, rotating rod; 19, slide rail; 20, bearing frame plate; 21, outer pressure plate; 22, inner pressure plate; 23, connecting shell; 24, second fixed rod; 25, sleeve; 26, bearing plate ; 27. Connecting ring; 28. Air release groove; 29. ​​Round rod; 30. First groove; 31. Slot; 32. Second groove; 33. Sliding block; 34. Top mounting plate; 35. Light source module; 36. Laser; 37. Photoelectric detector; 38. Connecting rod; 39. Sliding column; 40. Cutting knife; 41. First pressure strip; 42. Second pressure strip; 43. Second motor; 44. Screw; 45. Sliding block; 46. First sliding shaft; 47. Second sliding shaft; 48. Third electric push rod; 49. Telescopic rod; 50. Spring; 51. Limiting column. DETAILED DESCRIPTION

[0035] The following is a description of the implementation of the present invention by specific embodiments. People familiar with the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0036] See attached Figure 1 -Attached Fig.10 The present invention provides a film thickness measuring device, comprising a supporting base plate 1, two U-shaped frames 3 are fixedly arranged on the top of the supporting base plate 1, a top plate 4 is fixedly arranged between the two U-shaped frames 3, a multifunctional measuring mechanism is arranged at the bottom of the top plate 4, and a bearing assembly is arranged at the top of the supporting base plate 1;

[0037] The multifunctional measuring mechanism comprises a cover shell 7, which is arranged at the bottom of the top plate 4, a second electric push rod 12 is fixedly arranged on the top of the cover shell 7, a connecting frame 16 is fixedly connected to the output end of the second electric push rod 12, a first motor 17 is fixedly arranged inside the connecting frame 16, a rotating rod 18 is fixedly connected to the output end of the first motor 17, a top mounting plate 34 is fixedly arranged at the bottom of the rotating rod 18, a slide rail 19 is fixedly arranged at the bottom of the top mounting plate 34, a slider 33 is arranged inside the slide rail 19, and a connecting shell 23 is fixedly arranged on one side of the slider 33. A second motor 43 is fixedly provided on one side of the connection housing 23, and an output end of the second motor 43 is fixedly connected to a screw rod 44. A screw rod 44 is connected to the inside of the connection housing 23 through a bearing, and a sliding block 45 is provided on the outside of the screw rod 44 through a threaded sleeve. A light source module 35 is installed at the bottom of the sliding block 45, and a laser 36 and a photodetector 37 are respectively installed at the bottom of the light source module 35. Two first electric push rods 5 are fixedly provided on the top of the top plate 4, and the output ends of the two first electric push rods 5 are fixedly connected to ear plates 6, and the ear plates 6 are fixedly connected to the cover 7;

[0038] In this embodiment, the first electric push rod 5 is started, the first electric push rod 5 controls the ear plate 6 to move downward, the ear plate 6 controls the cover shell 7 to move downward, so that the cover shell 7 is close to the film and in contact with the film, the second electric push rod 12 is started, the second electric push rod 12 controls the connection frame 16 to move downward, the connection frame 16 drives the rotating rod 18 to move downward, the rotating rod 18 drives the sleeve 25 to move downward, the sleeve 25 drives the second fixed rod 24 to move downward, by starting the second motor 43, the second motor 43 drives the screw rod 44 to rotate, the screw rod 44 drives the sliding block 45 to move, the sliding block 45 drives the light source module 35 to move, the light source module 35 drives the laser 36 and the photoelectric detector 37 to move, so as to adjust the measurement position, the laser 36 at the bottom of the light source module 35 is started to emit a laser beam to the surface of the film sample, after the laser beam is reflected on the film surface, part of the light is introduced into the photoelectric detector 37;

[0039] Among them, in order to achieve the purpose of sample cutting, the present device adopts the following technical solutions: the multifunctional measuring mechanism also includes a sample cutting assembly, and the sample cutting assembly includes a connecting rod 38, the connecting rod 38 is connected to the slider 33 through a bearing, a sliding column 39 is fixedly provided at the bottom of the connecting rod 38, and a cutting knife 40 is fixedly provided at the bottom of the sliding column 39, and the cutting knife 40 pierces the film, and then the first motor 17 is started, the first motor 17 drives the rotating rod 18 to rotate, the rotating rod 18 drives the top mounting plate 34 to rotate, the top mounting plate 34 drives the slide rail 19 to rotate, and the slide rail 19 drives the slider 33 to rotate. Since the slide column 39 is between the outer pressure plate 21 and the inner pressure plate 22, the slide rail 19 will control the slider 33 and the connecting rod 38, the sliding column 39 and the cutting knife 40 at the bottom of the slider 33 to move along the track between the slot 31 and the inner pressure plate 22 during the rotation of the slide rail 19, so that the cutting knife 40 cuts the film to achieve the sampling purpose;

[0040] Among them, in order to achieve the purpose of pressing, the present device is implemented by the following technical solutions: the multifunctional measuring mechanism also includes a pressing component, and the pressing component also includes an outer pressure plate 21 and an inner pressure plate 22, and the outer pressure plate 21 and the inner pressure plate 22 are arranged inside the cover 7, and two first fixing rods 13 are fixedly provided on both sides of the outer pressure plate 21, and the first fixing rods 13 are fixedly connected to the connecting frame 16, and a first pressure strip 41 is fixedly provided at the bottom of the outer pressure plate 21, and a second pressure strip 42 is fixedly provided at the bottom of the inner pressure plate 22, and a connecting ring 27 is connected to the top of the inner pressure plate 22 through a bearing, and the connecting ring A plurality of second fixing rods 24 are fixedly provided on the top of the plurality of second fixing rods 24, one end of each of the plurality of second fixing rods 24 is fixedly connected with a sleeve 25, and the sleeve 25 is fixedly sleeved on the outside of the rotating rod 18, the second fixing rods 24 drive the connecting ring 27 to move downward, the connecting ring 27 drives the inner pressure plate 22 to move downward, the connecting frame 16 drives the first fixing rod 13 to move downward, and the first fixing rod 13 drives the outer pressure plate 21 to move downward, so that the first pressure strip 41 at the bottom of the outer pressure plate 21 presses the film into the first groove 30, and the second pressure strip 42 at the bottom of the inner pressure plate 22 presses the film into the second groove 32, so that the top of the bearing frame plate 20 is sealed;

[0041] Among them, in order to achieve the purpose of limiting, the present device adopts the following technical solutions: a limiting unit is provided on the top of the inner pressure plate 22, and the limiting unit includes a third electric push rod 48, and the third electric push rod 48 is fixedly arranged on the top of the inner pressure plate 22. The output end of the third electric push rod 48 is fixedly connected with a telescopic rod 49, and a spring 50 is fixedly sleeved on the outside of the telescopic rod 49. One end of the telescopic rod 49 is fixedly connected with a limiting column 51, and a limiting groove is provided on the side of the connecting ring 27. The limiting column 51 extends into the limiting groove. When the third electric push rod 48 is started, the third electric push rod 48 controls The telescopic rod 49 is controlled to move, and the telescopic rod 49 controls the limiting column 51 to move out of the limiting hole, so that the limiting unit releases the restriction on the connecting ring 27, so that when the slide rail 19 rotates, the second fixing rod 24 and the connecting ring 27 rotate together to avoid the slide rail 19 being blocked. During docking, the third electric push rod 48 controls the telescopic rod 49 to move, and the telescopic rod 49 drives the limiting column 51 to move. The limiting column 51 contacts the connecting ring 27, so that the telescopic rod 49 and the spring 50 are compressed, and the connecting ring 27 rotates to drive the limiting hole to rotate, until the limiting column 51 is rebounded by the telescopic rod 49 and the spring 50 and pushed into the limiting hole again, and the docking is completed;

[0042] In order to facilitate sliding, the device is implemented by the following technical solution: the slider 33 slides inside the slide rail 19, the top and bottom of the slider 33 are connected to two first slide shafts 46 through bearings, the first slide shaft 46 is in contact with the slide rail 19, and the two sides of the slider 33 are connected to two second slide shafts 47 through bearings, the second slide shaft 47 is in contact with the slide rail 19, and the first slide shaft 46 and the second slide shaft 47 facilitate sliding of the slider 33;

[0043] Among them, in order to achieve the purpose of bearing, the present device is implemented by the following technical solutions: the bearing assembly includes a bearing shell 8, the bearing shell 8 is fixedly arranged on the top of the supporting base plate 1, a connecting tube 15 is fixedly arranged at the bottom of the bearing shell 8, the connecting tube 15 passes through the supporting base plate 1, a vacuum pump 14 is fixedly arranged at the bottom of the supporting base plate 1, and the output end of the vacuum pump 14 is connected to the connecting tube 15, a bearing frame plate 20 is fixedly arranged on the top of the bearing shell 8, and a first groove 30, a groove 31 and a second groove 32 are respectively opened on the top of the bearing frame plate 20, the first groove 30 is in contact with the first pressure strip 41, and the second groove 32 is in contact with the first pressure strip 41. The second pressure strip 42 contacts, the cutting knife 40 extends into the slot 31, a plurality of round rods 29 are fixedly connected inside the carrying frame plate 20, one end of the plurality of round rods 29 is fixedly connected to the carrying plate 26, a plurality of air release grooves 28 are opened on the outside of the carrying plate 26, the film is laid flat on the top of the carrying frame plate 20, the film does not contact the carrying frame plate 20, so as to avoid scratching the film, the vacuum pump 14 is started, and the vacuum pump 14 draws the inside of the carrying shell 8 into a vacuum through the connecting tube 15, so as to adsorb the film on the surface of the carrying plate 26, the film is in close contact with the carrying plate 26, and the air release grooves 28 facilitate the outflow of air, so that no bubbles are generated on the surface of the carrying plate 26;

[0044] In order to achieve the purpose of support, the device is implemented by the following technical solution: the four corners of the bottom of the support base plate 1 are fixedly connected with support columns 2, and the support columns 2 have the function of supporting the support base plate 1;

[0045] Among them, in order to achieve the purpose of unwinding, the present device adopts the following technical scheme: a placing rack 9 is fixedly provided on one side of the two U-shaped frames 3, and an unwinding roller 10 is provided on the top of the two placing racks 9, and a winding roller 11 is installed on the other side of the two U-shaped frames 3. The unwinding roller 10 is placed on the placing rack 9, and then the film is pulled onto the winding roller 11 and wound.

[0046] A method for measuring film thickness, the specific steps are as follows:

[0047] S1. Film placement: Place the unwinding roller 10 on the placing frame 9, then pull the film onto the winding roller 11 and wind it, so that the film is laid flat on the top of the carrying frame plate 20, and the film does not contact the carrying frame plate 20 to avoid scratching the film, then start the first electric push rod 5, the first electric push rod 5 controls the ear plate 6 to move down, the ear plate 6 controls the cover shell 7 to move down, so that the cover shell 7 is close to the film and contacts the film, start the second electric push rod 12, the second electric push rod 12 controls the connecting frame 16 to move down, the connecting frame 16 drives the rotating rod 18 to move down, the rotating rod 18 drives the sleeve 25 to move down, the sleeve 25 drives the second fixed rod 24 to move down, the second fixed rod 24 drives the connecting frame 16 to move down, and the second fixed rod 24 drives the connecting frame 16 to move down. The connecting ring 27 moves downward, the connecting ring 27 drives the inner pressure plate 22 to move downward, the connecting frame 16 drives the first fixing rod 13 to move downward, and the first fixing rod 13 drives the outer pressure plate 21 to move downward, so that the first pressure strip 41 at the bottom of the outer pressure plate 21 presses the film into the first groove 30, and the second pressure strip 42 at the bottom of the inner pressure plate 22 presses the film into the second groove 32, so that the top of the bearing frame plate 20 is sealed, and the vacuum pump 14 is started. The vacuum pump 14 draws the inside of the bearing shell 8 into a vacuum through the connecting tube 15, so that the film is adsorbed on the surface of the bearing plate 26, and the film is in close contact with the bearing plate 26. The air release groove 28 facilitates the outflow of air, so that no bubbles are generated on the surface of the bearing plate 26;

[0048] S2. Film sampling: During the pressing process, the rotating rod 18 drives the top mounting plate 34 to move downward, the top mounting plate 34 drives the slide rail 19 to move downward, the slide rail 19 drives the slider 33 to move downward, the slider 33 drives the connecting rod 38 to move downward, the connecting rod 38 drives the slide column 39 to move downward, the slide column 39 drives the cutting knife 40 to move downward, so that the cutting knife 40 pierces the film, and then the first motor 17 is started, the first motor 17 drives the rotating rod 18 to rotate, the rotating rod 18 drives the top mounting plate 34 to rotate, the top mounting plate 34 drives the slide rail 19 to rotate, the slide rail 19 drives the slide The block 33 rotates. Since the slide post 39 is between the outer pressure plate 21 and the inner pressure plate 22, the slide rail 19 will control the slider 33 and the connecting rod 38, the slide post 39 and the cutting knife 40 at the bottom of the slider 33 to move along the track between the slot 31 and the inner pressure plate 22 during the rotation process, so that the cutting knife 40 cuts the film to achieve the purpose of sampling. The downward movement of the slide rail 19 will drive the connecting shell 23 to move downward, and the connecting shell 23 will drive the sliding block 45 and the light source module 35 to move downward, and the laser 36 and the photodetector 37 at the bottom of the light source module 35 will approach the film.

[0049] S3. Film thickness measurement: First, the limit unit is controlled to release the restriction on the connecting ring 27, and the laser 36 at the bottom of the light source module 35 is started to emit a laser beam to the surface of the film sample. After the laser beam is reflected on the film surface, part of the light is introduced into the photodetector 37. By starting the first motor 17, the first motor 17 controls the rotating rod 18 to rotate, the rotating rod 18 drives the top mounting plate 34 to rotate, the top mounting plate 34 drives the slide rail 19 to rotate, the slide rail 19 drives the slider 33 to rotate, the slider 33 drives the connecting shell 23 to rotate, the connecting shell 23 drives the sliding block 45 and the light source module 35 to rotate, so as to control the light source module 35 to run on a rotation trajectory, and then reach the top of the film on the rotation trajectory. By starting the second motor 43, the second motor 43 drives the screw rod 44 to rotate, the screw rod 44 drives the sliding block 45 to move, the sliding block 45 drives the light source module 35 to move, and the light source module 35 drives the laser 36 and the photodetector 37 to move, so as to adjust the measurement position, measure in multiple areas, increase the measurement data samples, and facilitate the calculation of film thickness.

[0050] The use process of the present invention is as follows: when using the present invention, the unwinding roller 10 is placed on the placement frame 9, and then the film is pulled onto the winding roller 11 and wound, so that the film is laid flat on the top of the bearing frame plate 20, and the film does not contact the bearing frame plate 20 to avoid scratching the film, and then the first electric push rod 5 is started, the first electric push rod 5 controls the ear plate 6 to move downward, the ear plate 6 controls the cover shell 7 to move downward, so that the cover shell 7 is close to the film and contacts the film, and the second electric push rod 12 is started, the second electric push rod 12 controls the connecting frame 16 to move downward, the connecting frame 16 drives the rotating rod 18 to move downward, the rotating rod 18 drives the sleeve 25 to move downward, the sleeve 25 drives the second fixed rod 24 to move downward, the second fixed rod 24 drives the connecting ring 27 to move downward, the connecting ring 27 drives the inner pressure plate 22 to move downward, and the connecting frame 16 drives the rotating rod 18 to move downward, the rotating rod 18 drives the sleeve 25 to move downward, the sleeve 25 drives the second fixed rod 24 to move downward, the second fixed rod 24 drives the connecting ring 27 to move downward, the connecting ring 27 drives the inner pressure plate 22 to move downward, and the connecting rod 1 The frame 16 drives the first fixing rod 13 to move downward, and the first fixing rod 13 drives the outer pressure plate 21 to move downward, so that the first pressure strip 41 at the bottom of the outer pressure plate 21 presses the film into the first groove 30, and the second pressure strip 42 at the bottom of the inner pressure plate 22 presses the film into the second groove 32, so that the top of the bearing frame plate 20 is sealed, and the vacuum pump 14 is started. The vacuum pump 14 evacuates the inside of the bearing shell 8 through the connecting tube 15, so that the film is adsorbed on the surface of the bearing plate 26. The film is in close contact with the bearing plate 26, and the air release groove 28 facilitates the outflow of air, so that no bubbles are generated on the surface of the bearing plate 26. During the pressing process, the rotating rod 18 drives the top mounting plate 34 to move downward, and the top mounting plate 34 drives the slide rail 19 to move downward, and the slide rail 19 drives the slider 33 to move downward, and the slider 33 drives The connecting rod 38 moves downward, the connecting rod 38 drives the sliding column 39 to move downward, the sliding column 39 drives the cutting knife 40 to move downward, so that the cutting knife 40 pierces the film, and then the first motor 17 is started, the first motor 17 drives the rotating rod 18 to rotate, the rotating rod 18 drives the top mounting plate 34 to rotate, the top mounting plate 34 drives the slide rail 19 to rotate, and the slide rail 19 drives the slider 33 to rotate. Since the slide column 39 is between the outer pressure plate 21 and the inner pressure plate 22, the slide rail 19 will control the slider 33 and the connecting rod 38, the sliding column 39 and the cutting knife 40 at the bottom of the slider 33 to move along the track between the slot 31 and the inner pressure plate 22 during the rotation of the slide rail 19, so that the cutting knife 40 cuts the film to achieve the sampling purpose, and the downward movement of the slide rail 19 will drive the connecting shell 23 to move downward, and the connecting shell 23 The sliding block 45 and the light source module 35 are driven to move downward, and the laser 36 and the photodetector 37 at the bottom of the light source module 35 are close to the film. First, the third electric push rod 48 is started, and the third electric push rod 48 controls the telescopic rod 49 to move. The telescopic rod 49 controls the limit column 51 to move out of the limit hole, so that the limit unit releases the restriction on the connecting ring 27, which is convenient for the slide rail 19 to rotate. The second fixed rod 24 and the connecting ring 27 rotate together to avoid the slide rail 19 being blocked. The laser 36 at the bottom of the light source module 35 is started to emit a laser beam to the surface of the film sample. After the laser beam is reflected on the surface of the film, part of the light is introduced into the photodetector 37. By starting the first motor 17, the first motor 17 controls the rotation of the rotating rod 18, and the rotating rod 18 drives the top mounting plate 34 to rotate.The top mounting plate 34 drives the slide rail 19 to rotate, the slide rail 19 drives the slider 33 to rotate, the slider 33 drives the connection housing 23 to rotate, the connection housing 23 drives the sliding block 45 and the light source module 35 to rotate, thereby controlling the light source module 35 to run on a rotation track, and then reaching the top of the film on the rotation track. By starting the second motor 43, the second motor 43 drives the screw rod 44 to rotate, the screw rod 44 drives the sliding block 45 to move, the sliding block 45 drives the light source module 35 to move, and the light source module 35 drives the laser 36 and the photoelectric detector 37 to move, thereby adjusting the measurement position, multi-area measurement, increasing the measurement data sample, and facilitating the calculation of film thickness.

[0051] The above is only a preferred embodiment of the present invention. Any person skilled in the art may modify the present invention by using the above technical solution or modify it into an equivalent technical solution. Therefore, any simple modification or equivalent replacement made according to the technical solution of the present invention shall fall within the scope of protection claimed by the present invention.

Claims

1. A film thickness measuring device, comprising a supporting base plate (1), characterized in that: Two U-shaped frames (3) are fixedly provided on the top of the support base plate (1), a top plate (4) is fixedly provided between the two U-shaped frames (3), a multifunctional measuring mechanism is provided at the bottom of the top plate (4), and a bearing assembly is provided at the top of the support base plate (1); The multifunctional measuring mechanism comprises a cover (7), wherein the cover (7) is arranged at the bottom of the top plate (4), a second electric push rod (12) is fixedly provided on the top of the cover (7), an output end of the second electric push rod (12) is fixedly connected to a connecting frame (16), a first motor (17) is fixedly provided inside the connecting frame (16), an output end of the first motor (17) is fixedly connected to a rotating rod (18), a top mounting plate (34) is fixedly provided on the bottom of the rotating rod (18), a slide rail (19) is fixedly provided on the bottom of the top mounting plate (34), and the slide rail (19) ) is provided with a slider (33) inside, a connecting housing (23) is fixedly provided on one side of the slider (33), a second motor (43) is fixedly provided on one side of the connecting housing (23), an output end of the second motor (43) is fixedly connected to a screw rod (44), a screw rod (44) is connected to the inside of the connecting housing (23) via a bearing, a sliding block (45) is provided on the outside of the screw rod (44) via a threaded sleeve, a light source module (35) is installed at the bottom of the sliding block (45), and a laser (36) and a photodetector (37) are respectively installed at the bottom of the light source module (35); The multifunctional measuring mechanism further comprises a sample cutting assembly, the sample cutting assembly comprising a connecting rod (38), the connecting rod (38) being connected to the sliding block (33) via a bearing, a sliding column (39) being fixedly provided at the bottom of the connecting rod (38), and a cutting knife (40) being fixedly provided at the bottom of the sliding column (39); The multifunctional measuring mechanism also includes a pressing assembly, and the pressing assembly also includes an outer pressing plate (21) and an inner pressing plate (22). The outer pressing plate (21) and the inner pressing plate (22) are arranged inside the cover shell (7). Two first fixing rods (13) are fixedly provided on both sides of the outer pressing plate (21). The first fixing rods (13) are fixedly connected to the connecting frame (16). A first pressing strip (41) is fixedly provided on the bottom of the outer pressing plate (21). A second pressing strip (42) is fixedly provided on the bottom of the inner pressing plate (22). A connecting ring (27) is connected to the top of the inner pressing plate (22) via a bearing. A plurality of second fixing rods (24) are fixedly provided on the top of the connecting ring (27). One end of the plurality of second fixing rods (24) is fixedly connected to a sleeve (25). The sleeve (25) is fixedly sleeved on the outside of the rotating rod (18). The bearing assembly comprises a bearing shell (8), the bearing shell (8) being fixedly arranged on the top of the supporting base plate (1), a connecting tube (15) being fixedly arranged on the bottom of the bearing shell (8), the connecting tube (15) penetrating the supporting base plate (1), a vacuum pump (14) being fixedly arranged on the bottom of the supporting base plate (1), the output end of the vacuum pump (14) being connected to the connecting tube (15), a bearing frame plate (20) being fixedly arranged on the top of the bearing shell (8), a first groove (30), a groove (31) and a second groove (32) being respectively arranged on the top of the bearing frame plate (20), the first groove (30) being in contact with a first pressure strip (41), the second groove (32) being in contact with a second pressure strip (42), the cutting knife (40) extending into the groove (31), a plurality of round rods (29) being fixedly connected to the inside of the bearing frame plate (20), one end of the plurality of round rods (29) being fixedly connected to a bearing plate (26), and a plurality of air release grooves (28) being arranged on the outside of the bearing plate (26); Two first electric push rods (5) are fixedly provided on the top of the top plate (4), and the output ends of the two first electric push rods (5) are fixedly connected to ear plates (6), and the ear plates (6) are fixedly connected to the cover shell (7); A placement rack (9) is fixedly provided on one side of the two U-shaped racks (3), a reeling roller (10) is provided on the top of the two placement racks (9), and a reeling roller (11) is installed on the other side of the two U-shaped racks (3).

2. A film thickness measuring device according to claim 1, characterized in that: A limit unit is provided at the top of the inner pressure plate (22), and the limit unit includes a third electric push rod (48). The third electric push rod (48) is fixedly provided at the top of the inner pressure plate (22), and an output end of the third electric push rod (48) is fixedly connected to a telescopic rod (49), an external fixed sleeve of the telescopic rod (49) is provided with a spring (50), one end of the telescopic rod (49) is fixedly connected to a limit column (51), a limit groove is provided on the side of the connecting ring (27), and the limit column (51) extends into the limit groove.

3. A film thickness measuring device according to claim 1, characterized in that: The slider (33) slides inside the slide rail (19); the top and bottom of the slider (33) are connected to two first slide shafts (46) via bearings, and the first slide shafts (46) are in contact with the slide rail (19); the two sides of the slider (33) are connected to two second slide shafts (47) via bearings, and the second slide shafts (47) are in contact with the slide rail (19).

4. A film thickness measuring device according to claim 1, characterized in that: The four corners of the bottom of the support base plate (1) are fixedly connected with support columns (2).

5. A film thickness measurement method, based on a film thickness measurement device according to any one of claims 1 to 4, characterized in that: The specific steps are as follows: S1. Film placement: The unwinding roller (10) is mounted on the placement frame (9), and then the film is pulled onto the winding roller (11) and wound so that the film is laid flat on the top of the bearing frame (20) and the film does not contact the bearing frame (20) to avoid scratching the film. Then, the first electric push rod (5) is started, and the first electric push rod (5) controls the ear plate (6) to move downward, and the ear plate (6) controls the cover shell (7) to move downward, so that the cover shell (7) is close to the film and contacts the film. Then, the second electric push rod (12) is started, and the second electric push rod (12) controls the connecting frame (16) to move downward, and the connecting frame (16) drives the rotating rod (18) to move downward, and the rotating rod (18) drives the sleeve (25) to move downward, and the sleeve (25) drives the second fixed rod (24) to move downward, and the second fixed rod (24) drives the connecting frame (16) to move downward. The ring (27) moves downward, the connecting ring (27) drives the inner pressure plate (22) to move downward, the connecting frame (16) drives the first fixing rod (13) to move downward, and the first fixing rod (13) drives the outer pressure plate (21) to move downward, so that the first pressure strip (41) at the bottom of the outer pressure plate (21) presses the film into the first groove (30), and the second pressure strip (42) at the bottom of the inner pressure plate (22) presses the film into the second groove (32), so that the top of the bearing frame plate (20) is sealed, and the vacuum pump (14) is started. The vacuum pump (14) draws the inside of the bearing shell (8) into a vacuum through the connecting tube (15), so that the film is adsorbed on the surface of the bearing plate (26), and the film is in close contact with the bearing plate (26). The air release groove (28) facilitates the outflow of air, so that no bubbles are generated on the surface of the bearing plate (26); S2. Film sampling: During the pressing process, the rotating rod (18) drives the top mounting plate (34) to move downward, the top mounting plate (34) drives the slide rail (19) to move downward, the slide rail (19) drives the slider (33) to move downward, the slider (33) drives the connecting rod (38) to move downward, the connecting rod (38) drives the slide column (39) to move downward, the slide column (39) drives the cutting knife (40) to move downward, so that the cutting knife (40) pierces the film, and then the first motor (17) is started, the first motor (17) drives the rotating rod (18) to rotate, the rotating rod (18) drives the top mounting plate (34) to rotate, the top mounting plate (34) drives the slide rail (19) to rotate, the slide rail (19) drives the slide The block (33) rotates, and since the slide post (39) is between the outer pressure plate (21) and the inner pressure plate (22), the slide rail (19) controls the slider (33) and the connecting rod (38), the slide post (39) and the cutting knife (40) at the bottom of the slider (33) to move along the track between the slot (31) and the inner pressure plate (22), so that the cutting knife (40) cuts the film to achieve the purpose of sampling, and the downward movement of the slide rail (19) drives the connecting shell (23) to move downward, and the connecting shell (23) drives the sliding block (45) and the light source module (35) to move downward, so that the laser (36) and the photodetector (37) at the bottom of the light source module (35) are close to the film; S3, film thickness measurement: first, the limit unit is controlled to release the restriction on the connecting ring (27), and the laser (36) at the bottom of the light source module (35) is started to emit a laser beam to the surface of the film sample. After the laser beam is reflected on the surface of the film, part of the light is introduced into the photodetector (37), and the first motor (17) is started. The first motor (17) controls the rotating rod (18) to rotate, and the rotating rod (18) drives the top mounting plate (34) to rotate. The top mounting plate (34) drives the slide rail (19) to rotate, and the slide rail (19) drives the slider (33) to rotate, and the slider (33) drives the connecting shell (23) The connecting shell (23) drives the sliding block (45) and the light source module (35) to rotate, thereby controlling the light source module (35) to run on a rotation track and then reach the top of the film on the rotation track. By starting the second motor (43), the second motor (43) drives the screw rod (44) to rotate, the screw rod (44) drives the sliding block (45) to move, the sliding block (45) drives the light source module (35) to move, and the light source module (35) drives the laser (36) and the photoelectric detector (37) to move, thereby adjusting the measurement position, multi-region measurement, increasing the measurement data sample, and facilitating the calculation of the film thickness.

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