Super-resolution three-dimensional topography measurement device and method combining microsphere lens and equivalent microsphere

Abstract

The application provides a kind of super-resolution three-dimensional topography measuring device and method combined microsphere lens and equivalent microsphere, the device includes light beam generation unit, light splitting prism, first microscope objective, microsphere lens, second microscope objective, equivalent microsphere, plane standard mirror, CCD camera and data processing unit;Light splitting prism is divided into measurement light beam and reference light beam by white light generated by light beam generation unit, measurement light beam is focused to the surface of the sample to be measured by first microscope objective and microsphere lens, returns light splitting prism after being reflected by the sample to be measured, reference light beam is focused to plane standard mirror by second microscope objective and equivalent microsphere, returns light splitting prism after being reflected by plane standard mirror, interference occurs at light splitting prism, interference pattern is collected by CCD camera, and the super-resolution three-dimensional topography distribution of the sample to be measured is obtained by data processing unit to interference pattern. The application can realize super-resolution, high-precision three-dimensional topography measurement combined microsphere lens and equivalent microsphere.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of interferometry, in particular to a super-resolution three-dimensional topography measurement device and method combining micro-lens and equivalent micro-sphere. BACKGROUND

[0002] Three-dimensional topography measurement can obtain longitudinal height information, which is of great significance for the detection of micro-nano optoelectronic devices, biological molecules and subcellular structures. Coherent scanning interferometry (CSI) can accurately obtain the three-dimensional micro-topography of the sample surface due to its short coherence characteristics, and then through the longitudinal scanning of high-precision piezoelectric ceramic driving, CSI can achieve sub-nanometer resolution in the axial direction, but its lateral resolution is still limited by the diffraction limit.

[0003] By combining micro-lens with coherent scanning interferometry technology, the application of micro-spheres can be expanded from the traditional two-dimensional imaging field to the three-dimensional measurement field, realizing the super-resolution detection of the three-dimensional topography of the sample. For micro-sphere assisted coherent scanning interferometry, the following two types of coherent scanning interferometers are mainly used in the prior art:

[0004] 1. Based on Linnik type coherent scanning interference: this type of scheme combines micro-lens with Linnik type white light interference microscope, randomly scatters barium titanate micro-spheres on the surface of the sample, and immerses them in water, which can restore the surface structure of a blue light disc with a period of 200 nm and an interval of 100 nm. However, in this Linnik type coherent scanning interferometer, although micro-spheres can be introduced into the test light path to realize super-resolution imaging of the sample surface, and the displacement of the mirror in the reference light path is adjusted to match the focus point of the interference optical path, i.e. the air optical path in the reference light path compensates for the additional optical path introduced by the micro-spheres in the test light path, but since the refractive index of the optical element is related to the wavelength, the above compensation method can only match the optical path of monochromatic light, and it is impossible to completely match the optical path of any wavelength for a broadband light source, so there will still be serious chromatic aberration in the microscopic interference pattern.

[0005] 2. Based on Mirau type coherent scanning interferometer: this type of scheme uses Mirau type white light interference microscope and 11 μm aperture polymer micro-spheres to realize three-dimensional super-resolution topography measurement of a blue light disc. However, since the reference light path of this Mirau type coherent scanning interferometer is packaged inside the lens, the reference plate is not adjustable, and the optical path of the two arms cannot be matched, resulting in a decrease in the contrast of the interference fringes obtained finally, which makes the height restoration distorted seriously. Especially when using large-diameter micro-spheres, the thickness of several tens of microns of the micro-spheres will cause the focal plane of the objective lens to deviate significantly from the equal optical path position, at which point even the interference fringes cannot be formed on the focal plane, making the microscopic area unable to be measured effectively.

[0006] In summary, the prior art in microsphere assisted coherent scanning interferometry, there will be a problem of mismatch between the measurement and reference arm optical path, resulting in interference fringe quality problem and directly affecting the accuracy of interference phase recovery, so that the three-dimensional topography measurement exists more obvious height error, even the measurement area lacks interference fringes, height data cannot be calculated. Therefore, although the introduction of microspheres into coherent scanning interferometry makes the lateral resolution of optical microscopic measurement break through the diffraction limit, the longitudinal high resolution and accuracy of coherent scanning interferometry are sacrificed, and the true sense of three-dimensional topography super-resolution measurement cannot be realized. SUMMARY

[0007] The technical problem to be solved by the present application: in view of the above problems of the prior art, a super-resolution three-dimensional topography measurement device and method combining microsphere lens and equivalent microsphere are provided, which can effectively improve the ability and accuracy of coherent scanning measurement based on microsphere lens super-resolution.

[0008] In order to solve the above technical problems, the technical scheme adopted by the present application is:

[0009] A super-resolution three-dimensional topography measurement device combining microsphere lens and equivalent microsphere, comprising a light beam generating unit, a beam splitter prism, a first microscopic objective lens, a microsphere lens, a second microscopic objective lens, an equivalent microsphere, a plane standard mirror, a CCD camera and a data processing unit; the microsphere lens is arranged on the surface of the sample to be measured for assisting the super-resolution imaging of the sample to be measured, and the equivalent microsphere is arranged on the surface of the plane standard mirror to compensate for the additional optical path difference introduced by the microsphere lens in the measurement light path; the light beam generating unit is used to generate a white light beam, and the generated white light beam is divided into a measurement light beam and a reference light beam after reaching the beam splitter prism, wherein the measurement light beam is focused to the surface of the sample to be measured through the first microscopic objective lens and the microsphere lens, and returns to the beam splitter prism after being reflected by the sample to be measured, the reference light beam is focused to the plane standard mirror through the second microscopic objective lens and the equivalent microsphere, and returns to the beam splitter prism after being reflected by the plane standard mirror, the reflected reference light beam and the reflected measurement light beam interfere with each other at the beam splitter prism, the interference pattern formed by the CCD camera is collected, and the data processing unit obtains the super-resolution three-dimensional topography distribution of the sample to be measured by processing the interference pattern collected by the CCD camera.

[0010] Further, the sample to be measured is arranged on the first adjusting table, and the first adjusting table is used to realize the height adjustment in the vertical direction of the sample to be measured, realize the two-dimensional linear motion in the horizontal plane, and realize the pitching and yawing motion around two axes.

[0011] Further, the planar standard mirror is arranged on the second adjusting table, and the second adjusting table is used to adjust the three-dimensional linear motion, the pitch and yaw motion of the planar standard mirror relative to the second microscope objective.

[0012] Further, the second microscope objective, the equivalent microsphere, the planar standard mirror, the piezoelectric ceramic and the second adjusting table are arranged on the third adjusting table, and the third adjusting table is used to adjust the three-dimensional translation of the second microscope objective, the equivalent microsphere, the planar standard mirror, the piezoelectric ceramic and the second adjusting table as a whole, so as to adjust the center alignment of the second microscope objective, the equivalent microsphere, the planar standard mirror, the piezoelectric ceramic and the second adjusting table with the spectrometer prism and achieve the adjustment of the reference optical path.

[0013] Further, the planar standard mirror is fixed on the piezoelectric ceramic, and the coherent scanning measurement of the sample to be measured is realized by controlling the piezoelectric ceramic to drive the planar standard mirror to move along the optical axis direction.

[0014] Further, the light beam generating unit comprises a white light source and a light beam shaping assembly, and the light beam shaping assembly comprises an aperture diaphragm, a first condenser lens, a field diaphragm, a second condenser lens and an optical filter arranged in sequence.

[0015] Further, the optical filter is a band-pass filter, which is used to filter the broadband light beam emitted by the white light source.

[0016] A measurement method of an ultra-resolution three-dimensional topography measurement device combining a microsphere lens and an equivalent microsphere, comprising the following steps:

[0017] S1. The sample to be measured is arranged on the first adjusting table, the planar standard mirror is arranged on the second adjusting table, and the second microscope objective, the equivalent microsphere, the planar standard mirror, the piezoelectric ceramic and the second adjusting table are arranged on the third adjusting table; by adjusting the first adjusting table, the second adjusting table and the third adjusting table, clear interference fringes are obtained in the ultra-resolution imaging area of the sample to be measured;

[0018] S2. The piezoelectric ceramic is driven and controlled to drive the planar standard mirror to phase-shift scan along the optical axis direction, so that the ultra-resolution imaging area of the sample to be measured completely passes through the entire interference process, and the interference patterns recorded in the scanning process are saved to the host computer for subsequent offline data processing, so as to obtain the ultra-resolution three-dimensional topography distribution of the sample to be measured.

[0019] Further, the step S1 comprises:

[0020] S101. Turn on the white light source, and adjust the height of the first adjusting table, so that a clear image of the surface of the sample to be measured is obtained in the field of view of the CCD camera;

[0021] S102.Adjusting the second adjustment table to translate along the optical axis direction so that the second microscope objective focuses on the surface of the flat standard mirror, adjusting the third adjustment table to translate along the optical axis direction to change the reference beam optical path until the reference beam optical path matches the measurement beam optical path so that the interference fringes appear in the field of view of the CCD camera, and adjusting the pitch and yaw angles of the first and second adjustment tables again to adjust the interference fringes in the field of view of the CCD camera to a specified number of fringes;

[0022] S103.Adjusting the vertical height of the first adjustment table until the super-resolution image of the surface structure of the sample to be measured is obtained through the microsphere lens, and a specified shape of the imaging area is obtained on the image plane of the CCD camera;

[0023] S104.Adjusting the second adjustment table so that the flat standard mirror is two-dimensionally translated relative to the second microscope objective in a plane perpendicular to the optical axis, searching for an equivalent microsphere in the reference light path, and translating the equivalent microsphere to the same area on the image plane of the CCD camera;

[0024] S105.Adjusting the translation of the second adjustment table along the optical axis direction to adjust the distance between the equivalent microsphere and the flat standard mirror relative to the focal point of the second microscope objective until clear interference fringes are obtained in the super-resolution imaging area of the sample to be measured.

[0025] Compared with the prior art, the advantages of the present application are that the present application realizes super-resolution imaging of the sample surface by introducing a microsphere lens into the measurement light path, compensates for the optical path difference by introducing an equivalent microsphere into the reference light path, and realizes super-resolution three-dimensional topography measurement by combining the microsphere lens and the equivalent microsphere, which can solve the problem of low measurement accuracy or unmeasurability caused by mismatched optical path difference in traditional microsphere-assisted coherent scanning interference measurement, so that the microsphere lens super-resolution imaging can be truly applied to coherent scanning interference measurement, and wide-field three-dimensional super-resolution detection is realized. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 The figure is a schematic diagram of the super-resolution three-dimensional topography measurement device of the embodiment of the present application combined with the microsphere lens and the equivalent microsphere.

[0027] Figure 2 The figure is the microsphere lens on the measurement light path and the equivalent microsphere on the reference light path of the embodiment of the present application.

[0028] Figure 3 The figure is a grating super-resolution image obtained based on the microsphere lens on the measurement light path of the embodiment of the present application.

[0029] Figure 4 The figure is a schematic diagram of the equivalent microsphere on the reference light path to compensate for the optical path difference of the measurement light path of the embodiment of the present application.

[0030] Figure 5The interference fringes are obtained in the super-resolution imaging region of the grating after equivalent compensation of the optical path difference between the two optical paths in an embodiment of the present invention.

[0031] Legend

[0032] 1. White light source; 2. Beam shaping assembly; 3. Aperture stop; 4. First condenser lens; 5. Field stop; 6. Second condenser lens; 7. Optical filter; 8. Beam splitter; 9. First microscope objective; 10. Microsphere lens; 11. Sample to be tested; 12. First adjustment stage; 13. Second microscope objective; 14. Equivalent microsphere; 15. Plane standard mirror; 16. Piezoelectric ceramic; 17. Second adjustment stage; 18. Achromatic lens; 19. CCD camera; 20. Main control computer; 21. Third adjustment stage. Detailed Implementation

[0033] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0034] like Figure 1 As shown, this embodiment of the super-resolution three-dimensional topography measurement device combining a microsphere lens and an equivalent microsphere includes a beam generation unit, a beam splitter prism 8, a first microscope objective 9, a microsphere lens 10, a second microscope objective 13, an equivalent microsphere 14, a plane standard mirror 15, a CCD camera 19, and a data processing unit. The microsphere lens 10 is disposed on the surface of the sample 11 to assist in achieving super-resolution imaging of the sample. The equivalent microsphere 14 is disposed on the surface of the plane standard mirror 15 to provide equivalent compensation for the additional optical path difference introduced by the microsphere lens 10 in the measurement optical path. The beam generation unit generates a white light beam, which is split into a measurement beam and a reference beam after reaching the beam splitter prism 8. The measurement beam is focused onto the surface of the sample 11 by the first microscope objective 9 and the microsphere lens 10, and returns to the beam splitter 8 after being reflected by the sample 11. The reference beam is focused onto the plane standard mirror 15 by the second microscope objective 13 and the equivalent microsphere 14, and returns to the beam splitter 8 after being reflected by the plane standard mirror 15. The reflected reference beam and the reflected measurement beam interfere at the beam splitter 8, and the resulting interference pattern is focused onto the CCD camera 19 by the achromatic lens 18. The interference pattern is acquired by the CCD camera 19, and the data processing unit processes the interference pattern acquired by the CCD camera 19 to obtain the super-resolution three-dimensional morphology distribution of the sample.

[0035] The measurement device in the embodiment above realizes super-resolution imaging of the sample surface by introducing a microsphere lens in the measurement light path, introduces an equivalent microsphere in the reference light path to compensate for the optical path difference, and realizes super-resolution three-dimensional topography measurement by combining the microsphere lens and the equivalent microsphere, which can solve the problem of low measurement accuracy or unmeasurable caused by mismatched optical path difference in the traditional microsphere-assisted coherent scanning interference measurement, so that the microsphere lens super-resolution imaging can be truly applied to the coherent scanning interference measurement, and wide-field three-dimensional super-resolution detection is realized.

[0036] In a specific application embodiment, the microsphere material can be polymethyl methacrylate. The microspheres with high uniformity of particle size, regular arrangement, and small coefficient of variation (CV) can be screened by scanning electron microscopy and particle size analyzer. The average diameter of the microspheres used is specifically 50 μm, and the diameter variation coefficient is controlled within 3% (CV < 3%). The sample 11 to be measured is a linear groove grating structure formed on a single crystal silicon substrate by reactive ion etching. The microspheres are configured into a microsphere-ethanol solution using anhydrous ethanol, and the microsphere solution is transferred to the surface of the sample 11 to be measured and the surface of the flat standard mirror 15 using a micro pipette. After the ethanol in the microsphere-ethanol solution volatilizes, the surfaces of the sample 11 to be measured and the flat standard mirror 15 are randomly distributed with microsphere lenses 10 and equivalent microspheres 14, respectively, as shown in Figure 2 (a), Figure 2 (b). The first microscope objective 9 can realize super-resolution imaging of the sample 11 to be measured based on the near-field auxiliary effect of the microsphere lens 10. The equivalent microsphere 14 realizes equivalent compensation for the additional optical path difference introduced by the microsphere lens 10 in the measurement light path, so as to obtain a super-resolution interference pattern with improved quality.

[0037] It can be understood that the material, size, etc. of the microspheres and the specific structure of the sample to be measured can be selected according to actual needs.

[0038] In the embodiment, the spectrometer prism 8 is specifically selected to be a non-polarization spectrometer prism with a splitting ratio of 50:50 and a working wavelength of 400-700 nm. The specifications of the first microscope objective 9 and the second microscope objective 13 are the same, and a far-field correction bright-field objective can be specifically used. The measurement beam is focused to the surface of the sample 11 to be measured after passing through the first microscope objective 9 and the microsphere lens 10, and then returns to the spectrometer prism 8 after being reflected by the sample 11 to be measured. The reference beam is focused to the flat standard mirror 15 after passing through the second microscope objective 13 and the equivalent microsphere 14, and then returns to the spectrometer prism 8 after being reflected by the flat standard mirror 15 and interferes with the measurement beam at the spectrometer prism 8, forming an interference pattern which is focused and imaged to the CCD camera 19 by the achromatic lens 18.

[0039] It can be understood that the specific specifications and parameters of the spectrometer prism 8, the first microscope objective 9, and the second microscope objective 13 can be selected and adjusted according to actual needs.

[0040] In the embodiment, the light beam generating unit comprises a white light source 1 and a light beam shaping assembly 2, the light beam shaping assembly 2 comprises an aperture diaphragm 3, a first condenser lens 4, a field diaphragm 5, a second condenser lens 6 and an optical filter 7 arranged in sequence. As preferred, the white light source 1 is selected as a SCHOTT LED point light source with a working wavelength range of 400-750 nm; both the first condenser lens 4 and the second condenser lens 5 are selected as uncoated biconvex lenses. Preferably, the optical filter 7 uses a band-pass filter for filtering the broadband light beam emitted by the white light source 1.

[0041] In the embodiment, the sample under test 11 is arranged on the first adjusting table 12, the first adjusting table 12 is used to realize the height adjustment in the vertical direction of the sample under test 11, realize the two-dimensional linear motion in the horizontal plane and realize the pitching and yawing motion around two axes, so that the height adjustment in the vertical direction of the sample under test 11, the two-dimensional linear motion in the horizontal plane and the pitching and yawing motion around two axes can be realized by adjusting the first adjusting table 12.

[0042] In the embodiment, the plane standard mirror 15 is arranged on the second adjusting table 17, the second adjusting table 17 is used to adjust the three-dimensional linear motion, the pitching and yawing motion of the plane standard mirror 15 relative to the second microscope objective 13, and the three-dimensional linear motion, the pitching and yawing motion of the plane standard mirror 15 relative to the second microscope objective 13 can be adjusted by adjusting the second adjusting table 17.

[0043] In the embodiment, the second microscope objective 13, the equivalent microsphere 14, the plane standard mirror 15, the piezoelectric ceramic 16 and the second adjusting table 17 are arranged on the third adjusting table 21, the third adjusting table 21 is used to adjust the three-dimensional translation of the second microscope objective 13, the equivalent microsphere 14, the plane standard mirror 15, the piezoelectric ceramic 16 and the second adjusting table 17 as a whole, so as to adjust the center alignment of the second microscope objective 13, the equivalent microsphere 14, the plane standard mirror 15, the piezoelectric ceramic 16 and the second adjusting table 17 with the central part of the light splitting prism 8, and realize the adjustment of the reference light path. By adjusting the third adjusting table 21, the three-dimensional translation of the second microscope objective 13, the equivalent microsphere 14, the plane standard mirror 15, the piezoelectric ceramic 16 and the second adjusting table 17 as a whole can be adjusted, so as to adjust the center alignment of the second microscope objective 13, the equivalent microsphere 14, the plane standard mirror 15, the piezoelectric ceramic 16 and the second adjusting table 17 with the central part of the light splitting prism 8, and the reference light path can be adjusted.

[0044] In the embodiment, the plane standard mirror 15 is fixed on the piezoelectric ceramic 16, the piezoelectric ceramic 16 is controlled to drive the plane standard mirror 15 to move along the optical axis direction, so as to realize the coherent scanning measurement of the sample under test 11.

[0045] Specifically, the plane standard mirror 15 is fixed on the piezoelectric ceramic 16, and the piezoelectric ceramic 16 is driven by the main control computer 20 to drive the plane standard mirror 15 to move along the optical axis direction, so as to realize the coherent scanning measurement of the sample 11 to be measured. The data processing unit is arranged in the main control computer 20. Preferably, the plane standard mirror 15 can adopt an ultraviolet fused quartz medium film plane mirror.

[0046] The embodiment is used for the measurement method of the super-resolution three-dimensional topography measurement device combined with the micro-lens and the equivalent micro-sphere, and includes the following steps:

[0047] S1. The sample 11 to be measured is arranged on the first adjusting table 12, the plane standard mirror 15 is arranged on the second adjusting table 17, the second microscope objective 13, the equivalent micro-sphere 14, the plane standard mirror 15, the piezoelectric ceramic 16 and the second adjusting table 17 are arranged on the third adjusting table 21; the first adjusting table 12, the second adjusting table 17 and the third adjusting table 21 are adjusted, so that clear interference fringes are obtained in the super-resolution imaging area of the sample 11 to be measured.

[0048] S2. The piezoelectric ceramic 16 is driven to drive the plane standard mirror 15 to move in the phase shift scanning along the optical axis direction, so that the super-resolution imaging area of the sample 11 to be measured completely passes through the entire interference process, and the interference patterns recorded in the scanning process are saved to the main control computer 20 for subsequent offline data processing, so as to obtain the super-resolution three-dimensional topography distribution of the sample 11 to be measured.

[0049] In the embodiment, the step S1 includes:

[0050] S101. The white light source 1 is turned on, and the height of the first adjusting table 12 is adjusted, so that the clear image of the surface of the sample 11 to be measured is obtained in the field of view of the CCD camera 19.

[0051] S102. The second adjusting table 17 is adjusted to translate along the optical axis direction, so that the second microscope objective 13 is focused on the surface of the plane standard mirror 15, the third adjusting table 21 is adjusted to translate along the optical axis direction to change the optical path of the reference light beam, until the optical path of the reference light beam matches the optical path of the measurement light beam, so that the interference fringes appear in the field of view of the CCD camera 19, and the pitch and yaw angles of the first adjusting table 12 and the second adjusting table 17 are adjusted again, so that the interference fringes in the field of view of the CCD camera 19 are adjusted to a specified number of fringes, for example, to zero fringes or only a few fringes.

[0052] S103. The vertical height of the first adjusting table 12 is continuously adjusted, until the super-resolution image of the surface structure of the sample 11 to be measured is obtained through the micro-lens 10, and a specified imaging area is obtained on the image plane of the CCD camera 19. In a specific application embodiment, the imaging area ABCD obtained on the image plane of the CCD camera 19 is as shown in Figure 3 .

[0053] S104. Adjusting the second adjusting stage 17 so that the planar standard mirror 15 makes two-dimensional translation in the plane perpendicular to the optical axis relative to the second microscope objective 13, searching for the equivalent microsphere 14 in the reference light path, and translating the equivalent microsphere 14 to the same region on the image plane of the CCD camera 19. The resulting translation of the equivalent microsphere 14 to the same region ABCD on the image plane of the CCD camera 19 in the specific application embodiment is shown as follows. Figure 4

[0054] S105. Adjusting the translation of the second adjusting stage 17 along the direction of the optical axis, adjusting the distance of the equivalent microsphere 14 and the planar standard mirror 15 from the focal point of the second microscope objective 13, until clear interference fringes are obtained in the super-resolution imaging region of the sample 11 under test. The resulting clear interference fringes obtained in the super-resolution imaging region ABCD of the sample under test in the specific application embodiment are shown as follows. Figure 5

[0055] The present embodiment, by using the above method, realizes super-resolution imaging of the sample by introducing a microsphere lens into the measurement light path of the coherent scanning interferometry, and at the same time introduces an equivalent microsphere into the reference light path, which can realize equivalent compensation of the additional optical path difference introduced by the microsphere lens in the measurement light path, and effectively improve the ability and measurement accuracy of the microsphere lens applied to the coherent scanning measurement.

[0056] The above only describes the preferred embodiments of the present application, and the protection scope of the present application is not limited to the above-mentioned embodiments only, and any technical solutions falling within the concept of the present application shall fall within the protection scope of the present application. It should be noted that, for ordinary skilled persons in the art, some improvements and refinements without departing from the principles of the present application shall also be considered as the protection scope of the present application.​​

Claims

1. An apparatus for super-resolution three-dimensional topography measurement combining a microsphere lens and an equivalent microsphere, characterized in that, The application relates to a super-resolution three-dimensional topography distribution measurement device, which comprises a light beam generating unit, a light splitting prism (8), a first microscopic objective (9), a microsphere lens (10), a second microscopic objective (13), an equivalent microsphere (14), a plane standard mirror (15), a CCD camera (19) and a data processing unit; the microsphere lens (10) is arranged on the surface of a sample (11) to be measured for assisting in realizing super-resolution imaging of the sample to be measured; the equivalent microsphere (14) is arranged on the surface of the plane standard mirror (15) for equivalently compensating for the additional optical path difference introduced by the microsphere lens (10) in a measuring light path; the light beam generating unit is used for generating a white light beam; after the generated white light beam reaches the light splitting prism (8), the white light beam is divided into a measuring light beam and a reference light beam; the measuring light beam is focused to the surface of the sample (11) to be measured through the first microscopic objective (9) and the microsphere lens (10), and returns to the light splitting prism (8) after being reflected by the sample (11) to be measured; the reference light beam is focused to the plane standard mirror (15) through the second microscopic objective (13) and the equivalent microsphere (14), and returns to the light splitting prism (8) after being reflected by the plane standard mirror (15); the reflected reference light beam and the reflected measuring light beam interfere with each other at the light splitting prism (8); an interference pattern is formed and is collected by the CCD camera (19); and the data processing unit processes the interference pattern collected by the CCD camera (19) to obtain the super-resolution three-dimensional topography distribution of the sample to be measured.

2. The super-resolution three-dimensional topography measurement apparatus of claim 1, wherein The sample (11) to be measured is arranged on a first adjusting table (12), the first adjusting table (12) is used for realizing height adjustment in the vertical direction of the sample (11) to be measured, realizing two-dimensional linear motion in a horizontal plane and realizing pitching and yawing motions around two axes.

3. The super-resolution three-dimensional topography measurement apparatus of claim 1, wherein The plane standard mirror (15) is arranged on a second adjusting table (17), the second adjusting table (17) is used for adjusting three-dimensional linear motion, pitching and yawing motions of the plane standard mirror (15) relative to the second microscopic objective (13).

4. The super-resolution three-dimensional topography measurement apparatus of claim 3, wherein The second microscopic objective (13), the equivalent microsphere (14), the plane standard mirror (15), a piezoelectric ceramic (16) and the second adjusting table (17) are all arranged on a third adjusting table (21), the third adjusting table (21) is used for adjusting three-dimensional translation of the second microscopic objective (13), the equivalent microsphere (14), the plane standard mirror (15), the piezoelectric ceramic (16) and the second adjusting table (17) as a whole, so as to adjust the center alignment of the second microscopic objective (13), the equivalent microsphere (14), the plane standard mirror (15), the piezoelectric ceramic (16) and the second adjusting table (17) with the light splitting prism (8) and realize adjustment of a reference optical path.

5. The super-resolution three-dimensional topography measurement apparatus combining a microsphere lens and an equivalent microsphere according to claim 4, characterized by The plane standard mirror (15) is fixed on the piezoelectric ceramic (16), the piezoelectric ceramic (16) is controlled to drive the plane standard mirror (15) to move along the optical axis direction, and coherent scanning measurement of the sample (11) to be measured is realized.

6. The super-resolution three-dimensional topography measuring apparatus according to any one of claims 1 to 5, characterized by The light beam generating unit comprises a white light source (1) and a light beam shaping assembly (2), the light beam shaping assembly (2) comprising an aperture diaphragm (3), a first condenser lens (4), a field diaphragm (5), a second condenser lens (6) and an optical filter (7) arranged in sequence.

7. The super-resolution three-dimensional topography measurement apparatus of claim 6, wherein The optical filter (7) is a band-pass filter, used for filtering the broadband light beam emitted by the white light source (1).

8. A measurement method for the super-resolution three-dimensional topography measurement apparatus of claim 1 to 7, characterized by, The method comprises the following steps: S1. The sample to be measured (11) is arranged on the first adjusting table (12), the plane standard mirror (15) is arranged on the second adjusting table (17), the second microscope objective (13), the equivalent microsphere (14), the plane standard mirror (15), the piezoelectric ceramic (16) and the second adjusting table (17) are arranged on the third adjusting table (21); by adjusting the first adjusting table (12), the second adjusting table (17) and the third adjusting table (21), clear interference fringes are obtained in the super-resolution imaging area of the sample to be measured (11); S2. The piezoelectric ceramic (16) is driven to drive the plane standard mirror (15) to phase-shift scan along the optical axis direction, so that the super-resolution imaging area of the sample to be measured (11) completely passes through the entire interference process, and the interference patterns recorded during the scanning process are saved to the host computer (20) for subsequent offline data processing, and the super-resolution three-dimensional topography distribution of the sample to be measured (11) is obtained.

9. The measurement method according to claim 8, characterized in that, The step S1 comprises: S101. Turn on the white light source (1), adjust the height of the first adjusting table (12), so that the CCD camera (19) field of view gets the surface of the sample to be measured (11) clear image; S102. Adjust the second adjusting table (17) to translate along the optical axis direction, so that the second microscope objective (13) focuses on the surface of the plane standard mirror (15), adjust the third adjusting table (21) to translate along the optical axis direction to change the reference beam optical path, until the reference beam optical path matches the measurement beam optical path, so that the interference fringes appear in the field of view of the CCD camera (19), adjust the pitch and yaw angles of the first adjusting table (12) and the second adjusting table (17) again, so that the interference fringes in the field of view of the CCD camera (19) are adjusted to a specified number of fringes; S103. Adjust the vertical height of the first adjusting table (12), until the super-resolution image of the surface structure of the sample to be measured (11) is obtained through the microsphere lens (10), and a specified shape imaging area is obtained on the image plane of the CCD camera (19); S104. Adjust the second adjusting table (17), so that the plane standard mirror (15) makes two-dimensional translation relative to the second microscope objective (13) in a plane perpendicular to the optical axis, searches for the equivalent microsphere (14) in the reference light path, and translates the equivalent microsphere (14) to the same area on the image plane of the CCD camera (19); S105. Adjust the translation of the second adjusting table (17) along the optical axis direction, adjust the distance between the equivalent microsphere (14) and the plane standard mirror (15) and the focal point of the second microscope objective (13), until clear interference fringes are obtained in the super-resolution imaging area of the sample to be measured (11).

Images