Boat-supported transport device, reactor system, and boat-supported transport method

Abstract

The present disclosure relates to the fields of semiconductor and photovoltaic technology, and specifically to a boat-supported transport device, a reactor system, and a boat-supported transport method, which solves the problem that when a cantilever paddle structure is used to transport a boat support, the blades need to be made very long, which is easy to deform, sag, or break due to gravity. In the boat-supported transport device, a transport component is used to support both ends of the boat support, and a lifting component drives the transport component to lift and lower, so that the boat support can be transported to a track outside the furnace, and then slide from the track outside the furnace into a track inside the furnace. Since the transport component is arranged adjacent to the track outside the furnace, and the first track is arranged at an angle to the track outside the furnace, the transport distance of the boat support transported by the transport component is shorter, and the transport component transports the boat support by means of a secondary track, which avoids the track being too long, so that the transport component can transport the boat support smoothly and accurately, and the boat support moves on the track when not being transported by the transport component, avoiding the use of a cantilevered paddle structure and the problem of blade deformation or breakage.

Description

Technical Field

[0001] The present disclosure relates to the fields of semiconductor and photovoltaic technology, and in particular to a boat-supported transportation device, a reactor system, and a boat-supported transportation method. Background Art

[0002] When the sheet material is sent into the reactor for reaction, the sheet material is loaded into the boat, and the boat is supported by the boat support, which is placed in the blade support end of the cantilever paddle structure. The driving device drives the cantilever paddle structure to send the boat support into the reactor.

[0003] However, the blades of the cantilever propeller structure need to be made very long. Due to the influence of the blades' own gravity and the gravity of the sheet material, the boat and the boat support, the blades are prone to deformation, sagging and breaking. Summary of the Invention

[0004] In view of this, the embodiments of the present disclosure provide a boat-supported transportation device, a reactor system, and a boat-supported transportation method, which solve the problem that when the cantilever paddle structure is transported by a boat, the blades need to be made very long, and the blades are easily deformed, drooped, and broken due to the influence of gravity.

[0005] In a first aspect, an embodiment of the present disclosure provides a boat-supported transport device, which is applied to multiple reactors, wherein the reactor has a reaction chamber, and the reactor also includes at least one in-furnace rail, which is arranged at the bottom of the reaction chamber; wherein the boat-supported transport device includes: multiple groups of out-furnace rails, which can be docked with the in-furnace rails, and the out-furnace rails are configured to carry boat supports so that the boat supports can slide from the out-furnace rails into the in-furnace rails, wherein the multiple groups of out-furnace rails are spaced apart in the vertical direction, and the multiple groups of out-furnace rails are respectively arranged in one-to-one correspondence with the in-furnace rails of multiple reactors; at least two groups of relatively arranged transport components are arranged adjacent to the out-furnace rails, wherein at least two groups of transport components The transport components are respectively configured to carry the two ends of the boat support, and the transportation component is also configured to transport the boat support to the outside furnace track; the lifting component is connected to the transportation component, and is configured to drive the transportation component to lift and lower, so as to drive the boat support to lift and lower, so that the boat support can be transported by the transportation component to any one of the multiple groups of outside furnace tracks; wherein, the transportation component includes: a first track, which is set at an angle to the outside furnace track; a second track, which is slidably connected to the first track; a bearing member, which is slidably connected to the second track, and is configured to carry the boat support, wherein the sliding direction of the second track is the same as the sliding direction of the bearing member, so that the bearing member drives the boat support to move to the outside furnace track.

[0006] In some embodiments, the lifting assembly includes: a support plate, carrying a first track, the support plate having a hollow area, and the hollow area is configured to accommodate a boat support; a first driving assembly, connected to the support plate, and configured to drive the support plate to rise and fall; wherein, the second track has a bearing area and an avoidance area, and both ends of the boat support have a bearing part; wherein, when the transport assembly does not carry the boat support and the boat support is located below the support plate, the bearing member slides to the avoidance area, the first driving assembly drives the support plate down to below the bearing part, and the bearing member slides to the bearing area so that the bearing member is located directly below the bearing part, and the first driving assembly drives the support plate to rise, so that the support plate drives the transport assembly to rise, and the bearing member of the transport assembly drives the boat support to rise.

[0007] In some embodiments, the first drive component includes: multiple drive sources, configured to provide rotational force; multiple screw rods, all vertically arranged, respectively connected to the multiple drive sources, and rotate under the drive of the drive sources; multiple drive blocks, respectively screwed to the multiple screw rods and connected to the support plate, and the drive blocks rise and fall under the drive of the screw rods to drive the support plate to rise and fall.

[0008] In some embodiments, the boat support transport device also includes: a loading track, arranged below the support plate, configured to carry the boat support; a limiting structure, arranged on the loading track, configured to limit the boat support on the loading track.

[0009] In some embodiments, the bearing portion has a first limiting protrusion, the bearing member has a first limiting groove, and the first limiting protrusion can extend into the first limiting groove to limit the relative position of the boat support and the bearing member; or the bearing portion has a second limiting groove, the bearing member has a second limiting protrusion, and the second limiting protrusion can extend into the second limiting groove to limit the relative position of the boat support and the bearing member.

[0010] In some embodiments, the boat-supporting transport device further includes: at least one set of cache components, arranged adjacent to the transport component, and configured to carry the boat-supporting device; wherein the transport component is further configured to transport the boat-supporting device to the cache component, or to remove the boat-supporting device from the cache component.

[0011] In some embodiments, there are multiple groups of cache components, and the multiple groups of cache components are arranged at intervals in the vertical direction; wherein the lifting component is also configured to drive the transportation component to lift and lower, so as to drive the boat tray to lift and lower, so that the boat tray can be transported by the transportation component to any group of cache components among the multiple groups of cache components, or the boat tray can be taken out from any group of cache components among the multiple groups of cache components.

[0012] In the second aspect, an embodiment of the present disclosure provides a reactor system, comprising: at least one reactor, the reactor having a reaction chamber, the reactor further comprising at least one in-furnace rail, the in-furnace rail being arranged at the bottom of the reaction chamber; the boat-supported transport device mentioned in any one of the first aspects is configured to transport the boat-supported transport device to the reaction chamber by docking with the in-furnace rail.

[0013] In some embodiments, the reactor further has a furnace mouth, which is located on the side of the reaction chamber; wherein the reactor system further includes: a furnace door; a first furnace door driving device, connected to the furnace door, configured to drive the furnace door to move in a first direction, the first direction being perpendicular to the extension direction of the track in the furnace; a second furnace door driving device, connected to the first furnace door driving device, configured to drive the first furnace door driving device and the furnace door to move in a second direction, the second direction being parallel to the extension direction of the track in the furnace.

[0014] In a third aspect, an embodiment of the present disclosure provides a boat-supported transportation method, which is applied to the boat-supported transportation device mentioned in any one of the first aspects; wherein, when the supporting member of the boat-supported transportation device carries the boat support and the target external furnace track does not carry the boat support, the boat-supported transportation method includes: the lifting component of the boat-supported transportation device drives the transportation component of the boat-supported transportation device to lift to a first position, the vertical height of the first position is greater than the vertical height of the target external furnace track, wherein the target external furnace track is one of multiple groups of external furnace tracks; the second track of the boat-supported transportation device slides relative to the first track toward the target external furnace track; the supporting member of the boat-supported transportation device slides relative to the second track toward the target external furnace track; the lifting component drives the transportation component to descend, so that the boat support descends to the target external furnace track; The supporting member slides relative to the second rail in a direction away from the target outer-furnace rail; the second rail slides relative to the first rail in a direction away from the target outer-furnace rail; wherein, when the target outer-furnace rail carries a boat support and the supporting member of the boat support transport device does not carry the boat support, the boat support transport method includes: the lifting component drives the transport component to lift to a second position, and the vertical height of the second position is less than the vertical height of the target outer-furnace rail; the second rail slides relative to the first rail in a direction toward the target outer-furnace rail; the supporting member slides relative to the second rail in a direction toward the target outer-furnace rail; the lifting component drives the transport component to rise so that the supporting member carries the boat support; the supporting member slides relative to the second rail in a direction away from the target outer-furnace rail; the second rail slides relative to the first rail in a direction away from the target outer-furnace rail.

[0015] The embodiment of the present invention provides a boat support transport device, in which an outer furnace track is used to carry the boat support so that the boat support can slide from the outer furnace track into the inner furnace track, at least two groups of transport components are respectively used to carry the two ends of the boat support and transport the boat support to the outer furnace track, and the lifting component drives the transport component to lift and lower, so that the boat support can be transported to any one group of outer furnace track among multiple groups of outer furnace track, the first track of the transport component is set at an angle to the outer furnace track, the second track is slidably connected to the first track, the bearing member is slidably connected to the second track, carries the boat support and drives the boat support to move to the outer furnace track, because the transport component is adjacent to the outer furnace track, and the first track is set at an angle to the outer furnace track, the transport distance of the boat support transported by the transport component is shorter, and the transport component transports the boat support by means of the secondary track, avoiding the track being too long and preventing the track from breaking, so that the transport component can transport the boat support smoothly and accurately, and the boat support moves on the track when not being transported by the transport component, and the track provides stable and stable support, which is conducive to transporting more sheet materials at the same time, and avoids the use of a cantilever paddle structure, avoiding the problem of paddle deformation or breakage. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 Shown is a structural schematic diagram of an application scenario of a boat-supported transport device and a reactor system provided by an embodiment of the present disclosure.

[0017] Figure 2 Shown is a structural schematic diagram of an application scenario of a boat-supported transport device and a reactor system provided by another embodiment of the present disclosure.

[0018] Figure 3 Shown is a structural schematic diagram of an application scenario of a boat-supported transport device provided by an embodiment of the present disclosure.

[0019] Figure 4 Shown is a schematic structural diagram of the in-furnace track and the out-furnace track provided in one embodiment of the present disclosure.

[0020] Figure 5 An embodiment of the present disclosure provides Figure 4 A partial enlarged view of point A is shown.

[0021] Figure 6 Shown is a schematic structural diagram of an in-furnace track and an out-furnace track provided by another embodiment of the present disclosure.

[0022] Figure 7 Shown is a schematic structural diagram of the furnace outer track provided in one embodiment of the present disclosure.

[0023] Figure 8 Shown is a schematic structural diagram of a slide plate seat, a support block and an outer furnace rail provided in one embodiment of the present disclosure.

[0024] Figure 9Shown is a schematic structural diagram of a furnace track provided in one embodiment of the present disclosure.

[0025] Figure 10 Shown is a structural diagram of an application scenario applicable to a lifting component and a transport component provided by an embodiment of the present disclosure.

[0026] Figure 11 Shown is a structural diagram of an application scenario applicable to a transport component provided by an embodiment of the present disclosure.

[0027] Figure 12 The figure shows a boat-supported transportation method provided by an embodiment of the present disclosure.

[0028] Figure 13 Shown is a boat-lifting transportation method provided by another embodiment of the present disclosure.

[0029] Figure 14 The figure shows a boat transport method provided by another embodiment of the present disclosure.

[0030] Figure 15 Shown is a boat transport method provided by yet another embodiment of the present disclosure.

[0031] Figure 16 Shown is a partial schematic diagram of an application scenario applicable to a limiting structure provided by an embodiment of the present disclosure.

[0032] Figure 17 Shown is a schematic structural diagram of a furnace door, a first furnace door driving device, and a second furnace door driving device provided in one embodiment of the present disclosure.

[0033] Reference numerals:

[0034] 1. Reactor system; 10. Boat-supported transport device; 11. External rail; 110. First raised structure; 12. Transport assembly; 120. First rail; 121. Second rail; 122. Carrying member; 1220. First limiting groove; 13. Lifting assembly; 130. Support plate; 1300. Hollow area; 131. First drive assembly; 1310. Screw rod; 1311. Drive block; 14. First carrier plate; 15. First guide rail; 16. Slide seat; 17. Support block; 18. Second drive assembly; 19. Clamping assembly; 20. Reactor; 21. Response cavity; 22. Furnace track; 220. First recessed structure; 23. Second supporting plate; 24. Furnace mouth; 25. Furnace door; 26. First furnace door driving device; 27. Second furnace door driving device; 30. Boat support; 31. Supporting part; 310. First limiting protrusion; 32. Roller; 40. Boat structure; 50. Sheet material; 60. Third driving assembly; 61. Second guide rail; 62. Loading rail; 63. Limiting structure; 630. Limiting part; 631. Limiting member; 64. Cache assembly; 640. Cache rail; 641. Fourth supporting plate; 65. Third supporting plate. DETAILED DESCRIPTION

[0035] The following will clearly and completely describe the technical solutions in the embodiments of the present disclosure in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present disclosure without making any creative efforts shall fall within the scope of protection of the present disclosure.

[0036] When the sheet material is sent into the reactor for reaction, the sheet material is loaded into the boat, and the boat is supported by the boat support, which is placed in the blade support end of the cantilever paddle structure. The driving device drives the cantilever paddle structure to send the boat support into the reactor.

[0037] However, when the blades carry the boat support, the extension direction of the blades is the same as the extension direction of the boat support. Therefore, the blades of the cantilever paddle structure need to be made very long. Affected by the weight of the blades themselves and the weight of the sheet material, boat, and boat support, the blades are prone to deformation, sagging, and breaking. Moreover, when the blades carry the boat support in and out of the reactor, they will vibrate, which may cause the sheet material to collide with the boat, causing damage to the sheet material. In addition, due to the deformation of the blades, the weight of the sheet material carried by the blades is limited, resulting in low transportation efficiency and low production capacity.

[0038] To address the above issues, the present disclosure provides a boat-supported transport device, a reactor system, and a boat-supported transport method. The specific structures of the boat-supported transport device and the reactor system, as well as the specific steps of the boat-supported transport method, are described in detail below with reference to the accompanying drawings and specific embodiments.

[0039] Figure 1 Shown is a structural schematic diagram of an application scenario of a boat-supported transport device and a reactor system provided by an embodiment of the present disclosure. Figure 2 Shown is a structural schematic diagram of an application scenario of a boat-supported transport device and a reactor system provided by an embodiment of the present disclosure. Figure 3 Shown is a structural schematic diagram of an application scenario of a boat-supported transport device provided by an embodiment of the present disclosure. Figure 4 Shown is a schematic structural diagram of the in-furnace track and the out-furnace track provided in one embodiment of the present disclosure. Figure 5 An embodiment of the present disclosure provides Figure 4 A partial enlarged view of point A is shown.

[0040] Figure 6 Shown is a schematic structural diagram of an in-furnace track and an out-furnace track provided by another embodiment of the present disclosure.

[0041] Figure 7 Shown is a schematic structural diagram of the furnace outer track provided in one embodiment of the present disclosure. Figure 8 Shown is a schematic structural diagram of a slide plate seat, a support block and an outer furnace rail provided in one embodiment of the present disclosure. Figure 9 Shown is a schematic structural diagram of a furnace track provided in one embodiment of the present disclosure. Figure 10 Shown is a structural diagram of an application scenario applicable to a lifting component and a transport component provided by an embodiment of the present disclosure. Figure 11 Shown is a structural diagram of an application scenario applicable to a transport component provided by an embodiment of the present disclosure.

[0042] like Figures 1 to 11 As shown, the boat-supported transport device 10 is applied to a plurality of reaction furnaces 20. The reaction furnace 20 has a reaction chamber 21. The reaction furnace 20 also includes at least one furnace rail 22. The furnace rail 22 is provided at the bottom of the reaction chamber 21.

[0043] The boat-supported transport device 10 includes: a plurality of groups of external furnace rails 11 , at least two groups of relatively arranged transport components 12 and lifting components 13 .

[0044] Multiple sets of external rails 11 are capable of docking with internal rails 22. The external rails 11 are configured to carry boat supports 30, allowing the boat supports 30 to slide from the external rails 11 into the internal rails 22. The multiple sets of external rails 22 are spaced apart vertically. The multiple sets of external rails 22 correspond one-to-one with the internal rails 22 of the multiple reaction furnaces 20.

[0045] At least two sets of transport assemblies 12 are disposed opposite each other and are adjacent to the outer rail 11. The at least two sets of transport assemblies 12 are respectively configured to carry both ends of the boat support 30. The transport assemblies 12 are further configured to transport the boat support 30 to the outer rail 11.

[0046] The lifting assembly 13 is connected to the transport assembly 12 and is configured to drive the transport assembly 12 to lift and lower, thereby driving the boat support 30 to lift and lower, so that the boat support 30 can be transported by the transport assembly 12 to any one of the multiple groups of external furnace rails 11.

[0047] like Figure 10 and Figure 11 As shown, the transport assembly 12 includes a first rail 120, a second rail 121, and a support 122. The first rail 120 is arranged at an angle to the external rail 11. The second rail 121 is slidably connected to the first rail 120. The support 122 is slidably connected to the second rail 121 and is configured to support the boat support 30. The sliding direction of the second rail 121 is the same as that of the support 122, so that the support 122 drives the boat support 30 to move to the external rail 11.

[0048] Specifically, the boat support 30 can be configured to support one or more boat structures 40. The boat structures 40 can be configured to carry sheet materials 50. The sheet materials 50 can include silicon wafers, solar cells, or wafers. The sheet materials 50 can include raw materials or semi-finished products for forming photovoltaic modules. The reactor 20 can be any device for reacting or processing the sheet materials 50.

[0049] For example, Figure 11 As shown, the bottom of the boat support 30 has a plurality of rollers 32 to facilitate the movement of the boat support 30 on the external furnace rail 11 and the internal furnace rail 22.

[0050] For example, Figures 1 to 3 as well as Figure 7 As shown, the boat-supported transport device 10 includes a plurality of first supporting plates 14. The plurality of first supporting plates 14 are arranged at intervals in the vertical direction, and an outer furnace rail 11 is arranged above the first supporting plates 14.

[0051] For example, Figures 4 to 8 As shown, the boat support transport device 10 also includes a first guide rail 15, a slide seat 16, a support block 17 and a second drive assembly 18. The first guide rail 15 is arranged on the first bearing plate 14, and the extension direction of the first guide rail 15 is the same as the extension direction of the external furnace rail 11. The slide seat 16 is slidably connected to the first guide rail 15. A plurality of support blocks 17 are provided on the slide seat 16. The support blocks 17 are connected to the external furnace rail 11, and are used to support the external furnace rail 11 and prevent the slide seat 16 from interfering with the sliding of the boat support 30 when the external furnace rail 11 slides. The second drive assembly 18 is connected to the slide seat 16, and is configured to drive the slide seat 16 to slide back and forth on the first guide rail 15, so that the external furnace rail 11 can be docked or separated from the internal furnace rail 22.

[0052] For example, Figures 4 to 6As shown, the second drive assembly 18 can be configured to drive the slide seat 16 to slide back and forth to dock or separate the external furnace track 11 from the internal furnace track 22. For example, when the boat support 30 needs to slide from the external furnace track 11 to the internal furnace track 22 or when the boat support 30 needs to slide from the internal furnace track 22 to the external furnace track 11, the second drive assembly 18 drives the slide seat 16 to slide to dock the external furnace track 11 with the internal furnace track 22. When the external furnace track 11 and the internal furnace track 22 are docked, when the reaction chamber 21 of the reaction furnace 20 needs to be closed, the second drive assembly 18 drives the slide seat 16 to slide in the opposite direction to separate the external furnace track 11 from the internal furnace track 22. Figure 4 and Figure 5 In the embodiment, the outer rail 11 and the inner rail 22 of the furnace are in a docking state. Figure 6 In the embodiment, the outer rail 11 and the inner rail 22 are in a separated state.

[0053] For example, Figures 4 to 8 As shown, the end of the external furnace rail 11 for docking with the internal furnace rail 22 has a first protruding structure 110, and the end of the internal furnace rail 22 for docking with the external furnace rail 11 has a first concave structure 220. The first concave structure 220 is configured to accommodate the first protruding structure 110 and enable the first protruding structure 110 to be inserted into the first concave structure 220, so as to make the docking of the external furnace rail 11 and the internal furnace rail 22 more precise. By way of example, the end of the external furnace rail 11 for docking with the internal furnace rail 22 may have a second concave structure, and the end of the internal furnace rail 22 for docking with the external furnace rail 11 may have a second protruding structure. The second concave structure is configured to accommodate the second protruding structure and enable the second protruding structure to be inserted into the second concave structure. By way of example, the first protruding structure 110 or the second protruding structure may be conical, stepped, or the like.

[0054] Illustratively, the reaction chamber 21 includes a second carrier plate 23. Multiple support blocks 17 are disposed on the second carrier plate 23. The support blocks 17 on the second carrier plate 23 are connected to the furnace rail 22 to support the furnace rail 22 and prevent the second carrier plate 23 from interfering with the sliding of the boat support 30 when the boat support 30 slides on the furnace rail 22.

[0055] For example, the shape of the boat support 30 can be a long strip. Figures 1 to 3 as well as Figure 10 and Figure 11As shown, the extension direction of the first rail 120 and / or the sliding direction of the second rail 121 are parallel to the extension direction of the width of the boat support 30 carried by the transport assembly 12. For example, the extension direction of the external rail 11 can be parallel to the extension direction of the length of the boat support 30 carried by the external rail 11. The extension direction of the internal rail 22 can be parallel to the extension direction of the length of the boat support 30 carried by the internal rail 22. For example, at least two sets of oppositely disposed transport assemblies 12 are configured to carry opposite ends of the boat support 30 along the extension direction of the length of the boat support 30.

[0056] For example, the first track 120 is set at an angle to the outer track 11, and the angle range can be greater than 0° and less than 180°. In this embodiment, the first track 120 is set at 90° to the outer track 11.

[0057] For example, the ratio of the sliding stroke of the second rail 121 on the first rail 120 to the entire length of the first rail 120 may be in the range of 0.1 to 0.9.

[0058] For example, the boat-supported transport device 10 further includes a plurality of sensors ( Figures 1 to 11 (not shown in the figure). The sensor may include a photoelectric sensor, an infrared sensor, an electromagnetic sensor, a capacitive sensor, etc. The sensor may be arranged on the outer rail 11 of the furnace, the transport component 12, and the lifting component 13. The sensor may be configured to detect the position of the boat support 30. For example, the sensor may be used to detect whether the boat support 30 has been transported to its position, whether there is a boat support 30 at the detected position, etc. Exemplarily, the sensor may be configured to obtain position information of movable parts in the boat support transport device 10. For example, the sensor may be arranged on one side or both sides of the first rail 120 or the second rail 121 to detect whether the second rail 121 has slid to the end of its stroke on the first rail 120.

[0059] Figure 12 The figure shows a boat-supported transportation method provided by an embodiment of the present disclosure. Figure 13 Shown is a boat-lifting transportation method provided by another embodiment of the present disclosure.

[0060] like Figure 12 and Figure 13 As shown, an embodiment of the present disclosure provides a boat-supported transportation method, which is applied to the boat-supported transportation device 10 mentioned in any embodiment of the present disclosure.

[0061] like Figure 12 As shown, when the supporting member 122 of the boat support transportation device 10 carries the boat support 30 and the target furnace outer track 11 does not carry the boat support 30, the boat support transportation method includes the following steps.

[0062] In step S10 , the lifting component 13 of the boat-supported transport device 10 drives the transport component 12 of the boat-supported transport device 10 to rise and fall to a first position.

[0063] Specifically, the vertical height of the first position is greater than the vertical height of the target out-of-furnace rail 11. The target out-of-furnace rail 11 is one of the plurality of out-of-furnace rails 11.

[0064] In step S20 , the second track 121 of the boat-supported transport device 10 slides relative to the first track 120 toward the target outer-furnace track 11 .

[0065] In step S30 , the supporting member 122 of the boat-supported transport device 10 slides relative to the second rail 121 toward the target outer-furnace rail 11 .

[0066] In step S40 , the lifting assembly 13 drives the transport assembly 12 to descend, so that the boat support 30 descends to the target furnace outer track 11 .

[0067] In step S50 , the supporting member 122 slides relative to the second rail 121 in a direction away from the target external furnace rail 11 .

[0068] In step S60 , the second rail 121 slides relative to the first rail 120 in a direction away from the target external rail 11 .

[0069] like Figure 13 As shown, when the target furnace outer rail 11 carries the boat support 30 and the supporting member 122 of the boat support transportation device 10 does not carry the boat support 30, the boat support transportation method includes the following steps.

[0070] In step S100 , the lifting assembly 13 drives the transport assembly 12 to move up and down to the second position.

[0071] Specifically, the vertical height of the second position is smaller than the vertical height of the target outer-furnace rail 11 .

[0072] In step S200 , the second rail 121 slides relative to the first rail 120 toward the target outer-furnace rail 11 .

[0073] In step S300 , the carrier 122 slides relative to the second rail 121 toward the target external rail 11 .

[0074] In step S400 , the lifting assembly 13 drives the transport assembly 12 to rise, so that the supporting member 122 supports the boat support 30 .

[0075] Step S500: the carrier 122 slides relative to the second rail 121 in a direction away from the target outer furnace rail 11;

[0076] In step S600 , the second rail 121 slides relative to the first rail 120 in a direction away from the target external rail 11 .

[0077] The present embodiment provides a boat support transport device 10 and a boat support transport method, wherein the outer furnace track 11 is used to carry the boat support 30 so that the boat support 30 can slide from the outer furnace track 11 into the inner furnace track 22, and at least two groups of transport components 12 are respectively used to carry the two ends of the boat support 30 and transport the boat support 30 to the outer furnace track 11, and the lifting component 13 drives the transport component 12 to lift so that the boat support 30 can be transported to any group of outer furnace tracks 11 in the multiple groups of outer furnace tracks 11, and the first track 120 of the transport component 12 is set at an angle to the outer furnace track 11, and the second track 121 is slidably connected to the first track 120, and the bearing member 122 is slidably connected to the second track 121, carrying the boat support 30 and The boat support 30 is driven to move to the outer furnace track 11. Since the transport component 12 is arranged adjacent to the outer furnace track 11, and the first track 120 is arranged at an angle to the outer furnace track 11, the transport distance of the boat support 30 transported by the transport component 12 is shorter, and the transport component 12 transports the boat support 30 by means of a secondary track, which avoids the track being too long and prevents the track from breaking, so that the transport component 12 can transport the boat support 30 smoothly and accurately, and the boat support 30 moves on the track when not being transported by the transport component 12, and the track provides stable and smooth support, which is conducive to transporting more sheet materials at the same time, and avoids the use of a cantilever paddle structure, avoiding the problem of paddle blade deformation or breakage.

[0078] In some embodiments, as Figure 10 and Figure 11 As shown, the lifting assembly 13 includes a support plate 130 and a first driving assembly 131 .

[0079] The support plate 130 carries the first rail 120 and has a hollow area 1300 . The hollow area 1300 is configured to accommodate the boat holder 30 .

[0080] The first driving assembly 131 is connected to the support plate 130 and is configured to drive the support plate 130 to move up and down.

[0081] The second rail 121 has a bearing area and an escape area. Both ends of the boat support 30 have a bearing portion 31.

[0082] When the transport component 12 does not carry the boat support 30 and the boat support 30 is located below the support plate 130, the supporting member 122 slides to the avoidance area, the first driving component 131 drives the support plate 130 to descend to the bottom of the supporting portion 31, and the supporting member 122 slides to the supporting area so that the supporting member 31 is located directly below the supporting portion 31. The first driving component 131 then drives the support plate 130 to rise, so that the support plate 130 drives the transport component 12 to rise, and the supporting member 122 of the transport component 12 drives the boat support 30 to rise.

[0083] Specifically, as the support plate 130 descends from above the boat support 30 to below the carrying portion 31 of the boat support 30, the boat support 30 may interfere with the descent of the supporting member 122. Therefore, it is necessary to slide the supporting member 122 to the escape zone. Since the second rail 121 is slidably connected to the first rail 120, and the supporting member 122 is slidably connected to the second rail 121, the position of the supporting member 122 can be changed by sliding the second rail 121 and / or the supporting member 122, thereby allowing the supporting member 122 to avoid or support the boat support 30. Therefore, the carrying zone and the escape zone can each be any area on the second rail 121.

[0084] Exemplarily, the avoidance area is located at the end of the second rail 121, which helps reduce the sliding movement of the transport assembly 12. When the support member 122 slides to the end of the second rail 121, or when the support member 122 slides to the end of the second rail 121, the second rail 121 also needs to slide a preset distance on the first rail 120 so that the support member 122 avoids the boat support 20 to prevent the two from colliding. The position and preset distance of the avoidance area can be set according to one or more of the following items: the length of the support member 122 along the sliding direction, the length of the second slide rail 121, the length of the first slide rail 120, the size of the boat support 30, and the shape of the boat support 30.

[0085] For example, the bearing area is located in other areas or the middle area of ​​the second track 121 except the ends, which is conducive to uniform force on the second track 121 and improving the service life of the transport assembly 12. For example, the position of the bearing area on the second track 121 can be set according to the position of the bearing portion 31.

[0086] Figure 14 The figure shows a boat transport method provided by another embodiment of the present disclosure. Figure 12 Based on the embodiment shown, Figure 14 The embodiment shown is described below in detail. Figure 14 The embodiment shown and Figure 12 The differences and similarities between the illustrated embodiments are not described in detail.

[0087] Step S10, the lifting component 13 of the boat-supported transport device 10 drives the transport component 12 of the boat-supported transport device 10 to lift to the first position, including: step S11, the first driving component 131 of the lifting component 13 drives the support plate 130 of the lifting component 13 to lift, so that the support plate 130 drives the transport component 12 to lift to the first position.

[0088] Step S40, the lifting component 13 drives the transport component 12 to descend, so that the boat support 30 descends to the target outer furnace track 11, including: step S41, the first driving component 131 drives the support plate 130 to descend, so that the support plate 130 drives the transport component 12 to descend, so that the boat support 30 descends to the target outer furnace track 11.

[0089] When the supporting member 122 of the boat support transport device 10 does not carry the boat support 30, the target furnace outer track 11 does not carry the boat support 30, and the boat support 30 is located below the support plate 130 of the boat support transport device 10, in step S11, the first driving component 131 of the lifting component 13 drives the support plate 130 of the lifting component 13 to rise and fall, so that the support plate 130 drives the transport component 12 to rise and fall to the first position, and the boat support transport method also includes the following steps.

[0090] In step S70 , the supporting member 122 slides to the avoidance area.

[0091] In step S80 , the first driving assembly 131 drives the supporting plate 130 to descend below the supporting portion 31 .

[0092] In step S90 , the supporting member 122 slides to the supporting area again, so that the supporting member 31 is located directly below the supporting portion 31 .

[0093] In step S901 , the first driving assembly 131 drives the supporting plate 130 to rise, so that the supporting plate 130 drives the transport assembly 12 to rise, and the supporting member 122 of the transport assembly 12 drives the boat support 30 to rise.

[0094] Figure 15 The figure shows a boat transport method provided by another embodiment of the present disclosure. Figure 13 Based on the embodiment shown, Figure 15 The embodiment shown is described below in detail. Figure 15 The embodiment shown and Figure 13 The differences and similarities between the illustrated embodiments are not described in detail.

[0095] Step S100 , the lifting component 13 drives the transport component 12 to be lifted to the second position, may include: step S101 , the first driving component 131 drives the support plate 130 to be lifted, so that the support plate 130 drives the transport component 12 to be lifted to the second position.

[0096] Step S300, the supporting member 122 slides relative to the second rail 121 toward the target external furnace rail 11, which may include: step S301, the supporting member 122 slides relative to the second rail 121 toward the target external furnace rail 11 so that the supporting member 31 is located directly below the supporting portion 31.

[0097] Step S400, the lifting component 13 drives the transport component 12 to rise so that the carrier 122 carries the boat support 30, which may include: step S401, the first driving component 131 drives the support plate 130 to rise, so that the support plate 130 drives the transport component 12 to rise, so that the carrier 122 carries the boat support 30.

[0098] The boat support transport device 10 provided in this embodiment has a support plate 130 with a hollow area 1300 to accommodate the boat support 30, and the second track 121 has a load-bearing area and an avoidance area. When the transport component 12 does not carry the boat support 30 and the boat support 30 is located below the support plate 130, the supporting member 122 slides to the avoidance area, and the first driving component 131 drives the support plate 130 to descend to the bottom of the supporting portion 31, and the supporting member 122 slides to the load-bearing area so that the supporting member 31 is located directly below the supporting portion 31. The first driving component then drives the support plate 130 to rise, so that the support plate 130 drives the transport component 12 to rise, and the supporting member 122 of the transport component 12 drives the boat support 30 to rise, thereby realizing the transport component 12 avoiding the boat support 30 in the process of descending from above the boat support 30 to below the supporting portion 31, and realizing the transport component 12 to pick up and carry the boat support 30 in the vertical direction, with a simple structure and high efficiency.

[0099] In some embodiments, as Figure 10 and Figure 11 As shown, the first driving component 131 includes: a plurality of driving sources ( Figure 10 and Figure 11 ), multiple lead screws 1310 and multiple drive blocks 1311.

[0100] The plurality of drive sources are configured to provide a rotational force.

[0101] The plurality of screw rods 1310 are vertically arranged, respectively connected to a plurality of driving sources, and rotate under the driving of the driving sources.

[0102] The plurality of driving blocks 1311 are respectively screwed to the plurality of screw rods 1310 and connected to the support plate 130 . The driving blocks 1311 are driven to rise and fall by the screw rods 1310 , thereby driving the support plate 130 to rise and fall.

[0103] For example, Figure 10 and Figure 11As shown, the support plate 130 is connected to four driving blocks 1311. In other embodiments, the support plate 130 can also be driven to rise and fall by other driving structures, such as a linear motor, a cylinder driving structure, etc.

[0104] In step S10, the lifting component 13 of the boat-supported transport device 10 drives the transport component 12 of the boat-supported transport device 10 to lift to the first position, which can be executed as follows: the driving source drives the screw rod 1310 to rotate, so that the driving block 1311 is lifted and lowered under the drive of the screw rod 1310, so that the driving block 1311 drives the support plate 130 to lift and lower, and the support plate 130 drives the transport component 12 to lift and lower to the first position.

[0105] In step S40, the lifting component 13 drives the transport component 12 to descend, so that the boat support 30 descends to the target outer furnace track 11, which can be executed as follows: the driving source drives the screw rod 1310 to rotate, so that the driving block 1311 descends under the drive of the screw rod 1310, and the driving block 1311 drives the support plate 130 to descend, so that the boat support 30 descends to the target outer furnace track 11.

[0106] In step S100, the lifting component 13 drives the transport component 12 to lift to the second position, which can be executed as follows: the driving source drives the screw rod 1310 to rotate, so that the driving block 1311 is lifted and lowered under the drive of the screw rod 1310, so that the driving block 1311 drives the support plate 130 to lift and lower, and the support plate 130 drives the transport component 12 to lift and lower to the second position.

[0107] In step S400, the lifting component 13 drives the transport component 12 to rise so that the carrier 122 carries the boat support 30, which can be executed as follows: the driving source drives the screw rod 1310 to rotate, so that the driving block 1311 rises under the drive of the screw rod 1310, and the driving block 1311 drives the support plate 130 to rise, so that the carrier 122 carries the boat support 30.

[0108] The boat-supported transport device 10 provided in this embodiment drives the screw rod 1310 to rotate through a driving source, and the driving block 1311 is screwed to the screw rod 1310 and connected to the support plate 130. The driving block 1311 rises and falls under the drive of the screw rod 1310 to drive the support plate 130 to rise and fall. It has a simple structure and occupies little space, making the structure of the boat-supported transport device 10 more compact.

[0109] In some embodiments, as Figures 4 to 7 As shown, the boat support transport device 10 further includes: at least one clamping assembly 19, a third drive assembly 60, and at least one second guide rail 61. The second guide rail 61 extends parallel to the direction of extension of the external furnace track 11. The clamping assembly 19 is slidably connected to the second guide rail 61 and is configured to clamp or release the boat support 30. The third drive assembly 60 is connected to the clamping assembly 19 and is configured to drive the clamping assembly 19 to slide back and forth on the second guide rail 61.

[0110] Illustratively, the third drive assembly 61 may include one or more of the following: a screw drive structure, a cylinder drive structure, a motor drive structure, a sprocket drive structure, a gear drive structure, and a conveyor belt drive structure. Illustratively, at least one clamping assembly 19, the third drive assembly 60, and the at least one second guide rail 61 are disposed on the first carrier plate 14.

[0111] In some application scenarios, after the transport assembly 12 places the boat support 30 on the external furnace track 11, the third drive assembly 61 drives the clamping assembly 19 to clamp the boat support 30, and drives the clamping assembly 19 to drive the boat support 30 to slide from the external furnace track 11 into the internal furnace track 22. The clamping assembly 19 sends the boat support 30 into the reactor 20 and then releases the boat support 30. When the boat support needs to be taken out of the reactor 20, if the reactor 20 is not closed, the third drive assembly 61 drives the clamping assembly 19 to the location of the boat support 30 to clamp the boat support 30, and then the third drive assembly drives the clamping assembly 19 to clamp the boat support 30 and leave the reactor 20.

[0112] Figure 16 The figure shows a structural diagram of an application scenario of a position limiting structure provided by an embodiment of the present disclosure.

[0113] In some embodiments, as Figure 4 、 Figure 6 、 Figure 10 and Figure 16 As shown, the boat-supported transport device 10 further includes: a loading rail 62 and a limiting structure 63 .

[0114] The loading rail 62 is disposed below the support plate 130 and is configured to carry the boat support 30 .

[0115] The limiting structure 63 is provided on the loading track 62 and is configured to limit the boat support 30 on the loading track 62 .

[0116] Exemplarily, the limiting structure 63 includes at least one limiting member 631. The limiting member 631 has at least one limiting portion 630. The vertical height of the highest point of the limiting portion 630 is greater than the vertical height of the lowest point of the boat support 30 on the loading track 62. The limiting portion 630 is configured to abut against the boat support 30 to limit the position of the boat support 30. Exemplarily, when the boat support 20 has a roller 32, the limiting portion 630 can be configured to abut against the roller 32 to limit the position of the roller 211.

[0117] For example, the shape of the limiting member 631 can be annular. The annular limiting member 631 can be sleeved on the feeding track 62.

[0118] Exemplarily, the limiting member 631 can be a pin. The pin includes a limiting portion 630. The pin can be inserted into the feeding track 62.

[0119] For example, the limiting structure 63 can be used to limit one end or both ends of the boat support 30. For example, when the boat support 30 is pushed into the loading track 62 to load the boat support 30, as shown in FIG. Figure 10 As shown, the limiting structure 63 can be set at the end of the travel of the boat support 30 on the loading track 62. For example, when the boat support 30 is placed on the loading track 62 to load the boat support 30, as shown in FIG. Figure 4 As shown, the limiting structures 63 can be set at both ends of the track section where the boat support 30 is placed on the loading track 62.

[0120] For example, when the boat support 20 has rollers 32 , the limiting structure 63 can be configured to limit one side or both sides of a roller 32 .

[0121] Exemplarily, at least two limiting structures 63 are provided on the loading track 62. The two limiting structures 63 are configured to limit the two sides of the target roller 32 of the boat support 30, respectively. Exemplarily, after the boat support 30 is subjected to a thrust or a pull, the target roller 32 rolls between the two limiting structures 63, so that the boat support 30 is restricted to the target position on the loading track 62. The target roller 32 can be any one of the multiple rollers 32 of the boat support 30. The target position can include the track section of the loading track 62 located below the hollow area 1300 of the support plate 130.

[0122] Exemplarily, the limiting member 631 is provided at the top of the loading track 62 or on one or both sides of the loading track 62. The limiting member 631 has an arc-shaped groove, and the center portion of the roller 32 is located in the arc-shaped groove to limit the roller 32. The two ends of the arc-shaped groove form a limiting portion 630.

[0123] For example, Figure 10 As shown, the boat support transport device 10 further includes a third bearing plate 65. A loading track 62 is provided on the third bearing plate 65. For example, a limiting structure 63 can also be provided on the third bearing plate 65 to limit the boat support 30.

[0124] For example, the third carrier plate 65 is further provided with a clamping assembly 19 and a fourth driving assembly ( Figure 10(not shown). The boat support 30 can be loaded from one end of the loading track 62. The clamping assembly 19 is configured to clamp or release the boat support 30 on the loading track 62. The fourth drive assembly is connected to the clamping assembly 19 and is configured to drive the clamping assembly 19 to clamp the boat support 30 at one end of the loading track 62 and drive the clamping assembly 19 to drive the boat support 30 to slide on the loading track 62 to below the hollow area 1300 of the support plate 130, so that the transport assembly 12 can pick up the boat support 30.

[0125] Exemplarily, the loading track 62 is also used to carry the boat tray 30 loaded with the sheet material 50 after the reaction. The boat tray 30 loaded with the sheet material 50 after the reaction can be transported away from the boat tray transport device 10 on the loading track 62.

[0126] Step S80, the first driving assembly 131 drives the support plate 130 down to below the bearing portion 31, which can be executed as follows: the first driving assembly 131 drives the support plate 130 down to below the bearing portion 31 of the boat support 30 on the loading rail 62.

[0127] When the target outer furnace track 11 carries the boat support 30, the supporting member 122 of the boat support transport device 10 does not carry the boat support 30, and the loading track 62 does not carry the boat support 30, in step S600, after the second track 121 slides relative to the first track 120 in a direction away from the target outer furnace track 11, the boat support transport method also includes: the first driving component 131 drives the support plate 130 to descend, so that the boat support 30 descends to the loading track 62; the supporting member 122 slides to the avoidance area; the first driving component 131 drives the support plate 130 to rise above the boat support 30.

[0128] The boat support transport device 10 provided in this embodiment has a loading rail 62 arranged below the support plate 130 to facilitate loading of the boat support 30, and at least one limiting structure 63 is also arranged on the loading rail 62 to limit the boat support 30 on the loading rail 62, so as to facilitate the transport component 12 to move the boat support 30 from the loading rail 62.

[0129] like Figure 9 As shown, a limiting structure 63 can be provided on the furnace track 22. The limiting structure 63 can be provided at the end of the travel of the boat support 30 on the furnace track 22. This arrangement can better limit the boat support 30 to the central area of ​​the reactor 20, which is conducive to improving the reaction effect.

[0130] In some embodiments, as Figure 4 and Figure 11As shown, the carrying portion 31 has a first limiting protrusion 310. The carrying member 122 has a first limiting groove 1220. The first limiting protrusion 310 can extend into the first limiting groove 1220 to define the relative position of the boat support 30 and the carrying member 122. This arrangement can prevent the boat support 30 from falling off the transport assembly 12 during transportation.

[0131] In the case where the bearing portion 31 has a first limiting protrusion 310 and the bearing member 122 has a first limiting groove 1220, step S90, in which the bearing member 122 slides again to the bearing area so that the bearing member 31 is located directly below the bearing portion 31, can be performed as follows: the bearing member 122 slides again to the bearing area so that the first limiting groove 1220 of the bearing member 31 is located directly below the first limiting protrusion 310 of the bearing portion 31. Step S300, in which the bearing member 122 slides relative to the second rail 121 in a direction toward the target external furnace rail 11, can be performed as follows: the bearing member 122 slides relative to the second rail 121 in a direction toward the target external furnace rail 11 so that the first limiting groove 1220 of the bearing member 31 is located directly below the first limiting protrusion 310 of the bearing portion 31.

[0132] In some implementations, the bearing portion 31 has a second limiting groove ( Figure 6 and Figure 10 The supporting member 122 has a second limiting protrusion ( Figure 6 and Figure 10 (not shown). The second limiting protrusion can extend into the second limiting groove to limit the relative position of the boat support 30 and the carrier 122. This arrangement can prevent the boat support 30 from falling off the transport assembly 12 during transportation by the transport assembly 12.

[0133] In the case where the bearing portion 31 has a second limiting groove and the bearing member 122 has a second limiting protrusion, step S90, in which the bearing member 122 slides again to the bearing area so that the bearing member 31 is directly below the bearing portion 31, can be performed as follows: the bearing member 122 slides again to the bearing area so that the second limiting groove of the bearing member 31 is directly below the second limiting protrusion of the bearing portion 31. Step S300, in which the bearing member 122 slides relative to the second rail 121 toward the target external furnace rail 11, can be performed as follows: the bearing member 122 slides relative to the second rail 121 toward the target external furnace rail 11 so that the second limiting protrusion of the bearing member 31 is directly below the second limiting protrusion of the bearing portion 31.

[0134] In some embodiments, as Figures 1 to 3As shown, the boat-supporting transport device 10 further includes: at least one set of buffering components 64. The at least one set of buffering components 64 is disposed adjacent to the transport component 12 and is configured to carry the boat-supporting container 30. The transport component 12 is further configured to transport the boat-supporting container 30 to the buffering components 64, or to remove the boat-supporting container 30 from the buffering components 64.

[0135] For example, Figure 3 As shown, the external rail 11 is arranged on one side of the transport assembly 12 along the direction in which the first rail 120 extends, and the buffer assembly 64 is arranged on the other side of the transport assembly 12 along the direction in which the first rail 120 extends. This arrangement facilitates the transport assembly 12 to transport the boat support 30 on the buffer assembly 64 to the external rail 11.

[0136] When the supporting member 122 of the boat support transport device 10 carries the boat support 30 and the cache assembly 64 does not carry the boat support 30, the boat support transport method includes: the lifting assembly 13 drives the transport assembly 12 to rise and fall to a third position, wherein the vertical height of the third position is greater than the vertical height of the cache assembly 64; the second rail 121 slides relative to the first rail 120 toward the cache assembly 64; the supporting member 122 slides relative to the second rail 121 toward the cache assembly 64; the lifting assembly 13 drives the transport assembly 12 to descend, so that the boat support 30 descends to the cache assembly 64; the supporting member 122 slides relative to the second rail 121 in a direction away from the cache assembly 64; the second rail 121 slides relative to the first rail 120 in a direction away from the cache assembly 64.

[0137] When the boat support 30 is carried on the cache component 64 and the supporting member 122 of the boat support transport device 10 does not carry the boat support 30, the boat support transport method includes: the lifting component 13 drives the transport component 12 to rise and fall to a fourth position, wherein the vertical height of the fourth position is less than the vertical height of the boat support 30 on the cache component 64; the second rail 121 slides relative to the first rail 120 toward the cache component 64; the supporting member 122 slides relative to the second rail 121 toward the cache component 64; the lifting component 13 drives the transport component 12 to rise so that the supporting member 122 carries the boat support 30; the supporting member 122 slides relative to the second rail 121 in a direction away from the cache component 64; the second rail 121 slides relative to the first rail 120 in a direction away from the cache component 64.

[0138] The boat-support transport device 10 provided in this embodiment also includes at least one set of cache components 64. The transport component 12 is also configured to transport the boat support 30 to the cache component 64 or take the boat support 30 out of the cache component 64. During the process of the reactor 20 reacting the sheet material 50, the boat-support transport device 10 can cache the boat support 30 that is about to enter the reactor 20 to the cache component 64 through the transport component 12. When the reactor 20 needs to be loaded, the boat support 30 on the cache component 64 can be directly transported to the reaction chamber 21, which is beneficial to improving the loading efficiency of the reactor 20 by the boat-support transport device 10 and improving production capacity.

[0139] In some embodiments, as Figures 1 to 3 As shown, there are multiple groups of cache components 64, and the multiple groups of cache components 64 are arranged at intervals along the vertical direction.

[0140] The lifting component 13 is also configured to drive the transport component 12 to lift and lower, so as to drive the boat support 30 to lift and lower, so that the boat support 30 can be transported by the transport component 12 to any one of the multiple groups of cache components 64, or the boat support 30 can be taken out from any one of the multiple groups of cache components 64.

[0141] For example, the buffer components 64 may be provided in a one-to-one correspondence with the external rails 11. The number of the buffer components 64 may be greater than or equal to the number of the external rails 11.

[0142] For example, Figures 4 to 6 As shown, the buffer assembly 64 includes a buffer track 640 and at least one limiting structure 63. The boat holder 30 can be transported by the transport assembly 12 and placed on the buffer track 640. The limiting structure 63 is used to limit the boat holder 30 from sliding on the buffer track 640. When the boat holder 30 has rollers 32 at the bottom, this arrangement makes it easier to store the boat holder 30. The number of limiting structures 63 can be set according to the specific structure of the limiting structure 63.

[0143] For example, Figures 4 to 6 As shown, the cache assembly 64 further includes: a fourth carrier plate 641 and a plurality of support blocks 17 disposed on the fourth carrier plate 641. The plurality of support blocks 17 are connected to the cache rail 640 to support the cache rail 640.

[0144] When the support member 122 of the boat-supporting transport device 10 is carrying the boat support 30, the lifting assembly 13 drives the transport assembly 12 to a third position. This can be performed as follows: the lifting assembly 13 drives the transport assembly 12 to the third position, wherein the vertical height of the third position is greater than the vertical height of the target buffer assembly 64. The target buffer assembly 64 is a group of target buffer assemblies 64 that does not carry the boat support 30. The second rail 121 slides relative to the first rail 120 toward the buffer assembly 64. This can be performed as follows: the second rail 121 slides relative to the first rail 120 toward the target buffer assembly 64. The support member 122 slides relative to the second rail 121 toward the buffer assembly 64. This can be performed as follows: the support member 122 slides relative to the second rail 121 toward the buffer assembly 64. The lifting assembly 13 drives the transport assembly 12 to descend, so that the boat support 30 descends to the buffer assembly 64. This can be performed as follows: the lifting assembly 13 drives the transport assembly 12 to descend, so that the boat support 30 descends to the buffer assembly 64. The bearing member 122 slides relative to the second rail 121 in a direction away from the cache assembly 64, which can be executed as follows: the bearing member 122 slides relative to the second rail 121 in a direction away from the target cache assembly 64. The second rail 121 slides relative to the first rail 120 in a direction away from the cache assembly 64, which can be executed as follows: the second rail 121 slides relative to the first rail 120 in a direction away from the target cache assembly 64.

[0145] When the target cache assembly 64 carries the boat support 30 and the supporting member 122 of the boat support transport device 10 does not carry the boat support 30, the lifting assembly 13 drives the transport assembly 12 to the fourth position, which can be executed as follows: the lifting assembly 13 drives the transport assembly 12 to the fourth position, wherein the vertical height of the fourth position is less than the vertical height of the boat support 30 on the target cache assembly 64. The second rail 121 slides relative to the first rail 120 toward the cache assembly 64, which can be executed as follows: the second rail 121 slides relative to the first rail 120 toward the target cache assembly 64. The supporting member 122 slides relative to the second rail 121 toward the cache assembly 64, which can be executed as follows: the supporting member 122 slides relative to the second rail 121 toward the target cache assembly 64. The supporting member 122 slides relative to the second rail 121 away from the cache assembly 64, which can be executed as follows: the supporting member 122 slides relative to the second rail 121 away from the target cache assembly 64. The second track 121 slides relative to the first track 120 in a direction away from the cache component 64 , which can be performed as follows: the second track 121 slides relative to the first track 120 in a direction away from the target cache component 64 .

[0146] In the boat-support transport device 10 provided in this embodiment, since there are multiple groups of cache components 64, the boat-support transport device 10 can cache multiple boat supports 30, further improving the loading efficiency of the reactor 20, and the lifting component 13 is also configured to drive the transport component 12 to lift and lower, so as to drive the boat support 30 to lift and lower, so that the boat support 30 can be transported by the transport component 12 to any group of cache components 64 in the multiple groups of cache components 64, or the boat support 30 can be taken out from any group of cache components 64 in the multiple groups of cache components 64, thereby realizing the loading and unloading of the cache components 64.

[0147] The above describes in detail the embodiment of the boat-supported transport device 10 of the present disclosure, and also describes in detail the embodiment of the reactor system of the present disclosure. It should be understood that the description of the embodiment of the boat-supported transport device 10 corresponds to the description of the embodiment of the reactor system. Therefore, for portions not described in detail, reference can be made to the above embodiment of the boat-supported transport device 10.

[0148] like Figure 1 and Figure 2 As shown, the reactor system 1 includes: at least one reactor 20 and the boat-supported transport device 10 mentioned in any of the above embodiments.

[0149] The reaction furnace 20 has a reaction chamber 21 . The reaction furnace 20 further includes at least one furnace rail 22 . The furnace rail 22 is disposed at the bottom of the reaction chamber 21 .

[0150] The boat-support transport device 10 is configured to transport the boat-support to the reaction chamber 21 by docking with the rails 22 in the furnace.

[0151] For example, the reaction furnaces 20 are arranged at intervals along the vertical direction. The internal rails 22 of the plurality of reaction furnaces 20 are respectively arranged in a one-to-one correspondence with the plurality of groups of external rails 22 .

[0152] In the reactor system 1 provided in this embodiment, the outer rail 11 is used to carry the boat support 30, so that the boat support 30 can slide from the outer rail 11 into the inner rail 22 of the furnace, at least two groups of transport components 12 are respectively used to carry the two ends of the boat support 30 and transport the boat support 30 to the outer rail 11, the lifting component 13 drives the transport component 12 to lift, so that the boat support 30 can be transported to any group of the multiple groups of outer rails 11, the first rail 120 of the transport component 12 is set at an angle to the outer rail 11, the second rail 121 is slidably connected to the first rail 120, the bearing member 122 is slidably connected to the second rail 121, carrying the boat support 30 and driving the boat support 30 moves to the outer furnace track 11. Since the transport component 12 is arranged adjacent to the outer furnace track 11, and the first track 120 is arranged at an angle to the outer furnace track 11, the transport distance of the transport component 12 to transport the boat support 30 is shorter, and the transport component 12 transports the boat support 30 by means of a secondary track, which avoids the track from being too long and prevents the track from breaking, so that the transport component 12 can transport the boat support 30 smoothly and accurately, and the boat support 30 moves on the track when not being transported by the transport component 12, and the track provides stable and smooth support, which is conducive to transporting more sheet materials at the same time, and avoids the use of a cantilever paddle structure, avoiding the problem of blade deformation or breakage.

[0153] Figure 17 Shown is a schematic structural diagram of a furnace door, a first furnace door driving device, and a second furnace door driving device provided in one embodiment of the present disclosure.

[0154] In some embodiments, as Figure 1 、 Figure 2 、 Figure 4 and Figure 17 As shown, the reaction furnace 20 further has a furnace opening 24 . The furnace opening 24 is located on the side of the reaction chamber 21 .

[0155] The reaction furnace system 1 further includes a furnace door 25 , a first furnace door driving device 26 and a second furnace door driving device 27 .

[0156] The first furnace door driving device 26 is connected to the furnace door 25 and is configured to drive the furnace door 25 to move along a first direction. The first direction is perpendicular to the extension direction of the furnace rail 22.

[0157] The second door driving device 27 is connected to the first door driving device 26 and is configured to drive the first door driving device 26 and the door 25 to move in a second direction parallel to the extension direction of the in-furnace rail 22 .

[0158] For example, the first furnace door driving device 26 and the second furnace door driving device 27 can be a combination of one or more of the following structures: a screw driving structure, a cylinder driving structure, a motor driving structure, a sprocket driving structure, a gear driving structure and a conveyor belt driving structure. Figure 17 As shown, the first furnace door driving device 26 and the second furnace door driving device 27 are both screw drive structures.

[0159] Exemplarily, the first furnace door drive device 26 drives the furnace door 25 toward the reaction furnace 20 in a first direction, such that the furnace door 25 faces the furnace opening 24. The second furnace door drive device 27 drives the first furnace door drive device 26 and the furnace door 25 toward the reaction furnace 20 in a second direction, such that the furnace door 25 is closed. Exemplarily, the first furnace door drive device 26 drives the furnace door 25 away from the reaction furnace 20 in a first direction, such that the furnace door 25 is opened. The second furnace door drive device 27 drives the first furnace door drive device 26 and the furnace door 25 away from the reaction furnace 20 in a second direction, such that the furnace door 25 is away from the space directly facing the furnace opening 23. Exemplarily, when the furnace door 25 is away from the space directly facing the furnace opening 23, the outer furnace rail 11 docks with the inner furnace rail 22.

[0160] The reactor system 1 provided in this embodiment also includes a furnace door 25, a first furnace door drive device 26 and a second furnace door drive device 27. The furnace door 25 is opened and closed by the first furnace door drive device 26 and the second furnace door drive device 27, and the furnace door 25 can be moved away from the space directly opposite the furnace mouth 23 after being opened, so that the external furnace track 11 can be docked with the internal furnace track 22, and the structure is simple.

[0161] References in the specification to "one embodiment," "an embodiment," and the like indicate that the described embodiment may include a particular feature, structure, or characteristic, but not every embodiment necessarily includes that particular feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. Furthermore, when a particular feature, structure, or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure, or characteristic in conjunction with other embodiments, whether explicitly described or not.

[0162] It should be understood that “on,” “above,” and “over” in this disclosure should be interpreted in the broadest manner, so that “on” means not only “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” includes not only the meaning of “above” or “over,” but also includes the meaning of “above” or “over” with no intervening features or layers therebetween (i.e., directly on something).

[0163] Additionally, spatially relative terms, such as "below," "beneath," "beneath," "above," and the like, may be used herein for ease of description to describe the relationship of one component or feature relative to other components or features as depicted in the figures. Spatially relative terms are intended to encompass different orientations of a component in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein should be interpreted accordingly.

[0164] It should be noted that, in this document, the terms "comprises," "includes," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, method, article, or apparatus comprising a series of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of other identical elements in the process, method, article, or apparatus comprising the element.

[0165] The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present disclosure should be included in the scope of protection of the present disclosure.

Claims

1. A boat-supported transport device, characterized in that: Applicable to multiple reaction furnaces, each having a reaction chamber, and each also comprising at least one furnace rail, wherein the furnace rail is arranged at the bottom of the reaction chamber; Wherein, the boat-supported transport device includes: Multiple sets of external furnace rails are capable of docking with the internal furnace rails, and the external furnace rails are configured to carry boat supports so that the boat supports can slide from the external furnace rails into the internal furnace rails, wherein the multiple sets of external furnace rails are spaced apart in the vertical direction, and the multiple sets of external furnace rails are respectively arranged in a one-to-one correspondence with the internal furnace rails of the multiple reaction furnaces; At least two groups of transport assemblies are arranged opposite to each other and are adjacent to the outer furnace track, wherein the at least two groups of transport assemblies are respectively configured to carry the two ends of the boat support, and the transport assemblies are further configured to transport the boat support to the outer furnace track; a lifting assembly connected to the transport assembly and configured to drive the transport assembly to lift and lower the boat support, so that the boat support can be transported by the transport assembly to any one of the multiple groups of the furnace outer rails; Wherein, the transport component includes: a first track, arranged at an angle to the track outside the furnace; a second track slidably connected to the first track; a bearing member slidably connected to the second rail and configured to carry the boat support, wherein the sliding direction of the second rail is the same as the sliding direction of the bearing member, so that the bearing member drives the boat support to move to the outer rail of the furnace; Wherein, the lifting assembly includes: a support plate, carrying the first rail, the support plate having a hollow area, the hollow area being configured to accommodate the boat support; a first driving assembly connected to the support plate and configured to drive the support plate to move up and down; Wherein, the boat-supported transport device further comprises: a loading track, disposed below the support plate and configured to carry the boat support; A third supporting plate is provided with the loading track.

2. The boat-supported transport device according to claim 1, characterized in that: The second track has a bearing area and an avoidance area, and both ends of the boat support have a bearing portion; In which, when the transport component does not carry the boat support and the boat support is located below the support plate, the supporting member slides to the avoidance area, the first driving component drives the support plate to descend to below the supporting portion, and the supporting member slides to the supporting area again so that the supporting member is located directly below the supporting portion, and the first driving component drives the support plate to rise, so that the support plate drives the transport component to rise, and the supporting member of the transport component drives the boat support to rise.

3. The boat-supported transport device according to claim 2, characterized in that: The first drive assembly comprises: a plurality of drive sources configured to provide a rotational force; A plurality of screw rods are vertically arranged and respectively connected to the plurality of driving sources, and rotate under the drive of the driving sources; A plurality of driving blocks are respectively screwed to the plurality of screw rods and connected to the support plate. The driving blocks are driven by the screw rods to move up and down, thereby driving the support plate to move up and down.

4. The boat-supported transport device according to claim 2, characterized in that: Also includes: A limiting structure is provided on the feeding track and is configured to limit the boat support on the feeding track.

5. The boat-supported transport device according to claim 2, characterized in that: The bearing portion has a first limiting protrusion, the bearing member has a first limiting groove, and the first limiting protrusion can extend into the first limiting groove to limit the relative position of the boat support and the bearing member; or The bearing portion has a second limiting groove, and the bearing member has a second limiting protrusion, and the second limiting protrusion can extend into the second limiting groove to limit the relative position of the boat support and the bearing member.

6. The boat-supported transport device according to any one of claims 1 to 5, characterized in that: Also includes: at least one set of buffer components, disposed adjacent to the transport component and configured to carry the boat support; Wherein, the transport component is further configured to transport the boat tray to the cache component, or to remove the boat tray from the cache component.

7. The boat-supported transport device according to claim 6, characterized in that: There are multiple groups of cache components, and the multiple groups of cache components are spaced apart in the vertical direction; In which, the lifting component is also configured to drive the transport component to lift and lower, so as to drive the boat support to lift and lower, so that the boat support can be transported by the transport component to any one of the multiple groups of cache components, or the boat support can be taken out from any one of the multiple groups of cache components.

8. A reactor system, characterized in that: include: At least one reaction furnace, the reaction furnace having a reaction chamber, the reaction furnace further comprising at least one furnace rail, the furnace rail being disposed at the bottom of the reaction chamber; The boat-supported transport device according to any one of claims 1 to 7 is configured to transport the boat-supported transport device to the reaction chamber by docking with the rail in the furnace.

9. The reactor system according to claim 8, characterized in that: The reaction furnace also has a furnace opening, which is located on the side of the reaction chamber; Wherein, the reactor system further includes: furnace door; a first furnace door driving device connected to the furnace door and configured to drive the furnace door to move in a first direction, wherein the first direction is perpendicular to an extension direction of the furnace rail; The second furnace door driving device is connected to the first furnace door driving device and is configured to drive the first furnace door driving device and the furnace door to move along a second direction, and the second direction is parallel to the extension direction of the furnace track.

10. A boat transport method, characterized in that: The boat-supported transport device as claimed in any one of claims 1 to 7; Wherein, when the supporting member of the boat support transport device carries the boat support and the target furnace outer track does not carry the boat support, the boat support transport method includes: The lifting assembly of the boat-supported transport device drives the transport assembly of the boat-supported transport device to lift to a first position, wherein the vertical height of the first position is greater than the vertical height of the target external furnace rail, wherein the target external furnace rail is one of the multiple groups of external furnace rails; The second track of the boat-supported transport device slides relative to the first track toward the target furnace outer track; The supporting member of the boat-supported transport device slides relative to the second track toward the target furnace outer track; The lifting assembly drives the transport assembly to descend, so that the boat support descends to the target furnace outer track; The bearing member slides relative to the second track in a direction away from the target outer furnace track; The second track slides relative to the first track in a direction away from the target outer furnace track; Wherein, when the outer rail of the target furnace carries a boat support and the supporting member of the boat support transportation device does not carry a boat support, the boat support transportation method includes: The lifting assembly drives the transport assembly to lift to a second position, wherein the vertical height of the second position is less than the vertical height of the target furnace outer track; The second track slides relative to the first track toward the target outer furnace track; The carrier slides relative to the second track toward the target outer furnace track; The lifting assembly drives the transport assembly to rise, so that the carrying member carries the boat support; The bearing member slides relative to the second track in a direction away from the target outer furnace track; The second track slides relative to the first track in a direction away from the target outer furnace track; Wherein, the lifting assembly includes: a support plate, carrying the first rail, the support plate having a hollow area, the hollow area being configured to accommodate the boat support; a first driving assembly connected to the support plate and configured to drive the support plate to move up and down; Wherein, the boat-supported transport device further comprises: a loading track, disposed below the support plate and configured to carry the boat support; A third supporting plate is provided with the loading track.

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