Ceramic heater

Abstract

The present invention relates to a ceramic heater. The present invention relates to a two-zone heating element embedded in a ceramic heater, comprising: a first heating portion and a second heating portion, capable of being independently controlled by a power supply device; a first non-heating portion, provided between and electrically connecting a first sub-heating portion and a second sub-heating portion constituting the first heating portion; and a second non-heating portion, provided between and electrically connecting the second heating portion and a first electrode terminal.

Description

Technical Field

[0001] The present invention relates to a ceramic heater, and more specifically, to a ceramic heater with improved reliability. Background Technology

[0002] A ceramic heater is used to heat-treat various objects, such as semiconductor wafers, glass substrates, and flexible substrates, at a predetermined heating temperature. Typically, a ceramic heater includes a heater body made of a ceramic plate and a heater support portion mounted below the heater body. The heater body includes a heating element with a predetermined resistance. The temperature distribution on the heating surface of the ceramic heater can be adjusted by the arrangement and design of the heating elements embedded in the ceramic plate. The temperature distribution on the heating surface can be adjusted according to variations in the spacing, shape, material, and thickness of the heating elements.

[0003] The temperature distribution formed on the heating surface of a ceramic heater can be required in various ways depending on the properties of the object being heat-treated. If only a single heating element is used in the ceramic heater design, various temperature distributions can be achieved by changing the embedding spacing, shape, material, and thickness of the heating elements embedded in the ceramic heater. However, due to the high thermal conductivity of the ceramic plate in the heater, it is difficult to uniformly achieve the required temperature distribution in each region according to the properties of the object being heat-treated using heating elements controlled by the same power. Therefore, recently, ceramic heaters with two or more independently controllable heating elements embedded have been proposed.

[0004] Figure 1 This is a diagram illustrating the structure of a two-zone heating element embedded in an existing ceramic heater. (See diagram for example.) Figure 1 As shown, the existing two-zone heating element 10 includes a first heating part 11, a second heating part 12, and a non-heating part 13.

[0005] A first electrode terminal 20 and a second electrode terminal 30 are embedded in a ceramic plate corresponding to the central portion of the heating element 10. The first electrode terminal 20 contacts the lower surface of the heating element 10 and electrically connects the first heating part 11 and the first heating element rod (not shown) of the heating element 10. The second electrode terminal 30 contacts the lower surface of the heating element 10 and electrically connects the non-heating part 13 and the second heating element rod (not shown) of the heating element 10.

[0006] A first heating element 11 is formed at a position corresponding to the inner zone of the heating surface of the ceramic heater, and a second heating element 12 is formed at a position corresponding to the outer zone of the heating surface of the ceramic heater. The first heating element 11 and the second heating element 12 are positioned at a predetermined distance from each other. Furthermore, the first heating element 11 and the second heating element 12 are electrically separated and driven independently of each other.

[0007] A non-heating portion 13 is disposed between the second electrode terminal 30 and the second heating portion 12, and serves to electrically connect the second electrode terminal 30 and the second heating portion 12. The non-heating portion 13 is formed to extend from the center point of the heating surface of the ceramic heater towards the edge. Furthermore, the non-heating portion 13 is typically formed as a straight line with a length of 100 mm to 120 mm.

[0008] However, the existing two-zone heating element 10 has the following problem: due to the difference in thermal expansion rates between the aluminum nitride material constituting the ceramic plate and the metal material constituting the non-heated part 13 during sintering / heat treatment, cracks occur at various locations within the contact area between the ceramic plate and the non-heated part 13. To solve this problem, a solution for shortening the length of the non-heated part 13 is needed. Summary of the Invention

[0009] The problem the invention aims to solve

[0010] The purpose of this invention is to solve the above-mentioned problems and other issues. Another objective is to provide a ceramic heater with improved reliability.

[0011] Another objective is to provide a ceramic heater with improved temperature uniformity.

[0012] Another objective is to provide a ceramic heater incorporating a multi-zone heating element comprising two or more independently controllable heating sections and two or more non-heating sections connected to the heating sections.

[0013] Another objective is to provide a ceramic heater incorporating a multi-zone heating element comprising two or more non-heating sections with a shortened linear length compared to existing types.

[0014] means for solving problems

[0015] According to one aspect of the invention for achieving the stated or another purpose, a ceramic heater with a two-zone heating element embedded therein is provided, the two-zone heating element comprising: a first heating section and a second heating section, which can be independently controlled by a power supply device; a first non-heating section disposed between and electrically connected to the first and second sub-heating sections constituting the first heating section; and a second non-heating section disposed between and electrically connected to the second heating section and the first electrode terminal.

[0016] According to another aspect of the present invention, a ceramic heater with a four-zone heating element embedded therein is provided, the four-zone heating element comprising: a first heating section to a fourth heating section, which can be independently controlled by a power supply device; a first non-heating section and a second non-heating section, which are arranged facing each other with respect to a first axis of symmetry between the first heating section and the second heating section and are arranged at a predetermined distance from the center of the four-zone heating element; and a third non-heating section and a fourth non-heating section, which are arranged facing each other with respect to a second axis of symmetry between the third heating section and the fourth heating section and extend from a first electrode terminal and a second electrode terminal disposed at the center of the four-zone heating element toward the third heating section and the fourth heating section.

[0017] According to another aspect of the present invention, a ceramic heater incorporating a six-zone heating element is provided, the six-zone heating element comprising: a first heating section to a sixth heating section, which can be independently controlled by a power supply device; a first non-heating section to a third non-heating section, which are disposed at a predetermined distance from the center of the six-zone heating element and are disposed at a 120-degree angle with respect to the center of the six-zone heating element; and a fourth non-heating section to a sixth non-heating section, which extend from a first electrode terminal to a third electrode terminal disposed at the center of the six-zone heating element toward the fourth heating section to the sixth heating section and are disposed at a 120-degree angle with respect to the center of the six-zone heating element.

[0018] The effects of the invention

[0019] At least one of the embodiments of the present invention has the following advantages: by providing a two-region heating element including two non-heated sections with a shortened straight-line length compared to the conventional one, the thermal stress caused by the non-heated sections can be reduced, thereby effectively reducing the generation of cracks in the area where the non-heated sections contact the ceramic plate.

[0020] Furthermore, at least one of the embodiments according to the present invention has the advantage that by providing a four-region heating element including four non-heating sections with a shortened straight-line length compared to the conventional one, the thermal stress caused by the non-heating sections can be reduced, thereby effectively reducing the generation of cracks in the area where the non-heating sections contact the ceramic plate.

[0021] Furthermore, at least one of the embodiments according to the present invention has the following advantages: by providing a six-region heating element including six non-heated sections with a shortened straight-line length compared to the conventional one, the thermal stress caused by the non-heated sections can be reduced, thereby effectively reducing the generation of cracks in the area where the non-heated sections contact the ceramic plate.

[0022] However, the ceramic heaters according to embodiments of the present invention can achieve effects not limited to those mentioned above, and those skilled in the art can clearly understand other effects not mentioned from the following description. Attached Figure Description

[0023] Figure 1 This is a diagram illustrating the structure of a two-zone heating element embedded in an existing ceramic heater.

[0024] Figure 2 This is a perspective view showing the appearance of a ceramic heater according to an embodiment of the present invention.

[0025] Figure 3 This is a cross-sectional view showing the configuration of a ceramic heater according to an embodiment of the present invention.

[0026] Figure 4 This is a diagram illustrating the structure of a two-region heating element according to an embodiment of the present invention.

[0027] Figure 5 It shows the composition Figure 4 A diagram showing the detailed structure of the components of the two-zone heating element.

[0028] Figure 6 It is shown in magnification Figure 4 The diagram for part A.

[0029] Figure 7 This is a diagram illustrating the structure of a four-region heating element according to an embodiment of the present invention.

[0030] Figure 8 It shows the composition Figure 7 A diagram showing the detailed structure of the components of the four-zone heating element.

[0031] Figure 9 This is a diagram illustrating the structure of a six-region heating element according to an embodiment of the present invention.

[0032] Figure 10 It shows the composition Figure 9 A diagram showing the detailed structure of the components of the six-zone heating element. Detailed Implementation

[0033] Hereinafter, embodiments disclosed in this specification will be described in detail with reference to the accompanying drawings. However, regardless of the drawing numbers, the same or similar components will be given the same reference numerals, and repeated descriptions thereto will be omitted. In the following description of embodiments according to the present invention, when describing layers (films), regions, patterns, or structures formed on a substrate, layers (films), regions, pads, or patterns as "on" or "under", it includes cases where they are formed "directly" on and "under" or "indirectly" through another layer. Furthermore, the references for the above / above or below / under of each layer are explained with reference to the drawings. In the drawings, for convenience and clarity, the thickness or dimensions of each layer are exaggerated, omitted, or shown in a generalized manner. Additionally, the dimensions of each component do not perfectly reflect the actual dimensions.

[0034] Furthermore, when describing the embodiments disclosed in this specification, detailed descriptions of relevant well-known technologies will be omitted if they would obscure the main idea of ​​the embodiments disclosed in this specification. Additionally, the accompanying drawings are only for facilitating understanding of the embodiments disclosed in this specification. The technical concepts disclosed in this specification are not limited to the accompanying drawings and should be understood to include all modifications, equivalents, or substitutions included within the scope of the present invention.

[0035] This invention proposes a ceramic heater with improved reliability. Furthermore, this invention proposes a ceramic heater with improved temperature uniformity. Additionally, this invention proposes a ceramic heater with an embedded multi-region heating element comprising two or more independently controllable heating sections and two or more non-heating sections connected to the two or more heating sections. Furthermore, this invention provides a ceramic heater with an embedded multi-region heating element comprising two or more non-heating sections with a shortened linear length compared to conventional heaters.

[0036] Hereinafter, various embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0037] Figure 2 This is a perspective view showing the appearance of a ceramic heater according to an embodiment of the present invention. Figure 3 This is a cross-sectional view showing the configuration of a ceramic heater according to an embodiment of the present invention.

[0038] Reference Figure 2 and Figure 3According to an embodiment of the present invention, a ceramic heater 100 is a semiconductor device that supports heat-treated objects for various purposes, such as semiconductor wafers, glass substrates, and flexible substrates, and heats the heat-treated objects at a predetermined temperature.

[0039] The ceramic heater 100 may include: a heater body 110 that stably supports the object to be heat-treated (not shown) and transfers heat; and a heater support 120 that is mounted on the lower part of the heater body 110. On the other hand, although not shown in the drawings, an adhesive layer (not shown) may be formed between the heater body 110 and the heater support 120.

[0040] The heater body 110 can be formed as a plate-like structure with a predetermined shape. As an example, the heater body 110 can be formed as a circular plate-like structure, but it is not necessarily limited to this.

[0041] A bag-shaped region (or cavity region) 111 with a predetermined stepped recess can be formed in the upper part of the heater body 110 to stably mount heat-processed objects such as wafers. The upper surface of the heater body 110 corresponding to the bag-shaped region can be formed to have excellent flatness. This is to ensure that the heat-processed object placed in the cavity is set horizontally, rather than tilted in one direction.

[0042] The heater body 110 is composed of multiple ceramic plates (not shown), which are made of ceramic materials with excellent thermal conductivity. The heater body 110 is formed by a compression sintering process of the multiple ceramic plates. The ceramic materials may include Al2O3, Y2O3, Al2O3 / Y2O3, ZrO2, autoclaved lightweight concrete (AlC), TiN, AlN, TiC, MgO, CaO, CeO2, TiO2, and B. x C y At least one of BN, SiO2, SiC, YAG, mullite, and AlF3, more preferably aluminum nitride (AlN).

[0043] The heater body 110 may include a heating element 112 and a plurality of electrode terminals 113, 114 in contact with the lower surface of the heating element 112. On the other hand, although not shown in the figures, the heater body 110 may also include high-frequency electrodes for performing radio frequency (RF) grounding and / or electrostatic chuck functions.

[0044] In order to facilitate the deposition and etching processes in semiconductor manufacturing, the heating element 112 can perform the function of heating the heat-treated object located on the upper surface of the heater body 110 at a certain temperature.

[0045] The heating element 112 can be embedded in the heater body 110 corresponding to the position of the object to be heat-treated. The heating element 112 can not only control the heating temperature uniformly according to its position so as to heat the entire object to be heat-treated evenly, but also be embedded in the heater body 110 parallel to the object to be heat-treated so that the distance of heat transfer to the object to be heat-treated remains constant at almost all positions.

[0046] The heating element 112 can be formed into a shape corresponding to the shape of the object being heat-treated. In addition, the heating element 112 can be formed from heating wire (or resistance wire) into a plate coil shape or a flat plate shape.

[0047] The heating element 112 can be formed of tungsten (W), molybdenum (Mo), molybdenum carbide (Mo2C, MoC, Mo3C2), silver (Ag), gold (Au), platinum (Pt), niobium (Nb), titanium (Ti) or alloys thereof.

[0048] In particular, the heating element 112 according to this embodiment may be a multi-zone heating element comprising two or more independently controllable heating sections and two or more non-heating sections connected to the two or more heating sections. By providing two or more non-heating sections with a shorter linear length compared to conventional heating elements, the heating element 112 can effectively reduce the thermal stress caused by the non-heating sections.

[0049] Multiple electrode terminals 113 and 114 are in contact with the lower surface of the heating element 112 and can perform the function of electrically connecting the heating part of the heating element 112 and multiple heating rods 121 and 122.

[0050] Multiple electrode terminals 113, 114 can be embedded in the central portion of the heating element 112, that is, the ceramic plate corresponding to the portion that contacts the heater body 110 and the heater support 120.

[0051] The plurality of electrode terminals 113, 114 can be formed of a metallic material with excellent conductivity. As an example, the plurality of electrode terminals 113, 114 can be formed of tungsten (W), molybdenum (Mo), silver (Ag), gold (Au), niobium (Nb), titanium (Ti), aluminum nitride (AlN) or alloys thereof, and more preferably, can be formed of molybdenum (Mo).

[0052] The heater support 120 is installed at the lower part of the heater body 110 and can support the heater body 110. The heater support 120 can be combined with the heater body 110 to form an integrally T-shaped ceramic heater 100.

[0053] The heater support 120 can be formed in the form of a cylindrical tube with an internal empty space. This is for the purpose of providing a plurality of heating element rods 121, 122 that are connected to the heating element 112 of the heater body 110 via the heater support 120.

[0054] The heater support 120 can be formed of a ceramic material with the same main components as the heater body 110. For example, the heater support 120 can be made of Al2O3, Y2O3, Al2O3 / Y2O3, ZrO2, AlC, TiN, AlN, TiC, MgO, CaO, CeO2, TiO2, or B. x C y It can be formed from at least one of BN, SiO2, SiC, YAG, mullite, and AlF3, more preferably from aluminum nitride (AlN).

[0055] Multiple heating element rods 121 and 122 are disposed inside the heater support portion 120 and can perform the function of electrically connecting multiple electrode terminals 113 and 114 to an external power supply device (not shown). Therefore, the heating portion of the heating element 112 embedded in the heater body portion 110 can be electrically connected to an external power supply device through the multiple electrode terminals 113 and 114 and the heating element rods 121 and 122, and can be independently controlled by the external power supply device.

[0056] The plurality of heating element rods 121, 122 can be formed of a metallic material with excellent electrical conductivity. As an example, the plurality of heating element rods 121, 122 can be formed of copper (Cu), aluminum (Al), iron (Fe), tungsten (W), nickel (Ni), silver (Ag), gold (Au), niobium (Nb), titanium (Ti) or alloys thereof, and more preferably, can be formed of nickel (Ni).

[0057] On the other hand, the accompanying drawing shows two electrode terminals 113, 114 and two heating element rods 121, 122 disposed in the ceramic heater 100, but is not limited thereto. The number of electrode terminals and heating element rods disposed in the ceramic heater corresponds to the number of heating parts that can be independently controlled by an external power supply device.

[0058] As described above, the ceramic heater according to an embodiment of the present invention, by providing a multi-region heating element including two or more non-heating sections with a shortened linear length compared to the conventional type, can reduce the thermal stress caused by the non-heating sections, thereby effectively reducing the generation of cracks in the area where the non-heating sections contact the ceramic plate.

[0059] Figure 4 This is a diagram illustrating the structure of a two-region heating element according to an embodiment of the present invention. Figure 5 It shows the composition Figure 4 A detailed structural diagram of the components of the two-zone heating element. Figure 6 It indicates magnification. Figure 4 The diagram for part A.

[0060] Reference Figures 4 to 6 According to an embodiment of the present invention, a two-region heating element 200 may include a first heating part 210, a second heating part 220, a first non-heating part 230 and a second non-heating part 240.

[0061] The first heating section (center / edge heating section) 210 may include a first sub-heating section (center heating section) 211 and a second sub-heating section (edge ​​heating section) 213. Here, the first sub-heating section 211 and the second sub-heating section 213 can be electrically connected through the first non-heating section 230.

[0062] The first sub-heating section 211 can be formed at a position corresponding to the center zone of the heating surface of the ceramic heater. The first sub-heating section 211 can be formed in a circular shape.

[0063] The first sub-heating section 211 may include a plurality of concentric circles 211a and a plurality of connectors 211b connecting the plurality of concentric circles 211a. The first end located inside the first sub-heating section 211 may be connected to the second electrode terminal 114, and the second end located outside may be connected to the first non-heating section 230.

[0064] The second sub-heating section 213 can be formed at a position corresponding to the edge zone of the heating surface of the ceramic heater. The second sub-heating section 213 can be formed in a ring shape.

[0065] The second sub-heating section 213 may include a plurality of concentric circles 213a and a plurality of connectors 213b connecting the plurality of concentric circles 213a. The end located on the inner side of the second sub-heating section 213 may be connected to the first non-heating section 230.

[0066] The second heating section (intermediate heating section) 220 can be formed at a position corresponding to the middle zone of the heating surface of the ceramic heater. That is, the second heating section 220 can be formed as a space disposed between the first sub-heating section 211 and the second sub-heating section 213. The second heating section 220 can be formed in a ring shape.

[0067] The second heating section 220 may include a plurality of concentric circles 220a and a plurality of connectors 220b connecting the plurality of concentric circles 220a. The end located on the inner side of the second heating section 220 may be connected to the second non-heating section 240.

[0068] The first heating element 210 and the second heating element 220 can be disposed on the same plane of the ceramic plate. Alternatively, as another embodiment, the first heating element 210 and the second heating element 220 can be disposed on different planes from each other.

[0069] The first non-heating part 230 is disposed between the first sub-heating part 211 and the second sub-heating part 213, and can perform the function of electrically connecting the first sub-heating part 211 and the second sub-heating part 213. The first non-heating part 230 can be formed to extend in a straight line from a point in the first sub-heating part 211 to a point in the second sub-heating part 213.

[0070] On the other hand, although not shown in the accompanying drawings, as another embodiment, the first non-heating portion 230 may be formed to extend in a curved form from a point in the first sub-heating portion 211 to a point in the second sub-heating portion 213. As yet another embodiment, the first non-heating portion 230 may also be formed to extend in a combination of straight lines and curves from a point in the first sub-heating portion 211 to a point in the second sub-heating portion 213.

[0071] The first end of the first non-heating part 230 can be connected to the second end located outside the first sub-heating part 211, and the second end of the first non-heating part 230 can be connected to the end located inside the second sub-heating part 213. At this time, as... Figure 6 As shown in (a), the first non-heating part 230 can be connected to the second sub-heating part 213 via a first connecting member 250. The first connecting member 250 may include an opening, which is fixed by an interference fit forming lines of different diameters for the first non-heating part 230 and the second sub-heating part 213. On the other hand, as another embodiment, such as Figure 6 As shown in (b), the first non-heating part 230 can also be directly connected to the second sub-heating part 213 without the need for a separate connecting member.

[0072] The first non-heating portion 230 may include two metal wires arranged parallel to each other. The first non-heating portion 230 may be formed such that the axis of symmetry between the two metal wires passes through the center of the heating element 200.

[0073] The first non-heated portion 230 can be formed to have a straight length shorter than that of the non-heated portion included in a conventional two-zone heating element. As an example, when the straight length of the conventional non-heated portion is 100 mm to 120 mm, the first non-heated portion 230 can be formed to have a straight length (60 mm to 70 mm) that corresponds to about 60% of the conventional length.

[0074] The first non-heating part 230 can be formed with a first length having a straight line length between a point of the second sub-heating part 213 and the second electrode terminal 114 that is less than or equal to the length of the second electrode terminal 114.

[0075] The second non-heating portion 240 is disposed between the first electrode terminal 113 and the second heating portion 220, and can perform the function of electrically connecting the first electrode terminal 113 and the second heating portion 220. The second non-heating portion 240 can be formed to extend in a straight line from the first electrode terminal 113 to a point on the second heating portion 220.

[0076] On the other hand, although not shown in the accompanying drawings, as another embodiment, the second non-heated portion 240 may be formed in a curved form extending from the first electrode terminal 113 to a point on the second heating portion 220. As yet another embodiment, the second non-heated portion 240 may be formed in a combination of straight lines and curves extending from the first electrode terminal 113 to a point on the second heating portion 220.

[0077] The first end of the second non-heating part 240 can be connected to the first electrode terminal 113, and the second end of the second non-heating part 240 can be connected to the end located inside the second heating part 220. At this time, as... Figure 6 As shown in (a), the second non-heating part 240 can be connected to the second heating part 220 via a second connecting member 260. Similarly, the second connecting member 260 may include an opening fixed by an interference fit forming lines of different diameters of the second non-heating part 240 and the second heating part 220. On the other hand, as another embodiment, as... Figure 6 As shown in (b), the second non-heating part 240 can also be directly connected to the second heating part 220 without the need for a separate connecting member.

[0078] The second non-heating portion 240 may include two metal wires arranged parallel to each other. The second non-heating portion 240 may be formed such that the axis of symmetry between the two metal wires passes through the center of the heating element 200.

[0079] The second non-heating part 240 can be positioned relative to the center of the heating element 200, in a direction opposite to the first non-heating part 230. The first non-heating part 230 and the second non-heating part 240 can be positioned on a straight line passing through the center of the heating element 200, and more preferably, they can be positioned on a horizontal line passing through the center of the heating element 200.

[0080] The second non-heated portion 240 may be formed to have the same straight length as the first non-heated portion 230, or to have a different straight length. The second non-heated portion 240 may be formed to have a straight length shorter than the straight length of the non-heated portion included in a conventional two-zone heating element. For example, when the straight length of the conventional non-heated portion is 100 mm to 120 mm, the second non-heated portion 240 may be formed to have a straight length of approximately 60% (60 mm to 70 mm) corresponding to the conventional length.

[0081] The second non-heating part 240 can be formed with a second length having a straight line length less than or equal to that between a point of the second sub-heating part 213 and the first electrode terminal 113.

[0082] The first heating part 210, the second heating part 220, the first non-heating part 230, the second non-heating part 240, the first connecting member 250, and the second connecting member 260 may all be made of the same material, but are not limited thereto.

[0083] As described above, the dual-zone heating element according to an embodiment of the present invention is provided with two non-heated sections whose straight-line length is shortened compared to conventional elements, thereby reducing the thermal stress caused by the non-heated sections. This effectively reduces the generation of cracks in the area where the non-heated sections contact the ceramic plate. Furthermore, the dual-zone heating element achieves various temperature distributions by independently controlling the two regions of the ceramic heater's heating surface, thereby improving the temperature uniformity of the ceramic heater's heating surface.

[0084] Figure 7 This is a diagram illustrating the structure of a four-region heating element according to an embodiment of the present invention. Figure 8 It shows the composition Figure 7 A diagram showing the detailed structure of the components of the four-zone heating element.

[0085] Reference Figure 7 and Figure 8 According to an embodiment of the present invention, the four-region heating element 300 may include first to fourth heating portions 310 to 340 and first to fourth non-heating portions 350 to 380.

[0086] The first heating unit 310 may include a first sub-heating unit 311 and a second sub-heating unit 313. Here, the first sub-heating unit 311 and the second sub-heating unit 313 may be electrically connected through a first non-heating unit 350.

[0087] The second heating unit 320 may include a third sub-heating unit 321 and a fourth sub-heating unit 323. Here, the third sub-heating unit 321 and the fourth sub-heating unit 323 can be electrically connected through the second non-heating unit 360.

[0088] The first heating element 310 and the second heating element 320 can be formed in a shape that is symmetrical to each other with respect to a horizontal axis passing through the center of the heating element 300. Alternatively, the first heating element 310 and the second heating element 320 can be arranged to face each other with respect to a horizontal axis passing through the center of the heating element 300.

[0089] The first sub-heating section 311 and the third sub-heating section 321 can be formed at positions corresponding to the central region of the heating surface of the ceramic heater. The first sub-heating section 311 may include a plurality of concentric circles 311a and a plurality of connectors 311b connecting the plurality of concentric circles 311a, and the third sub-heating section 321 may include a plurality of concentric circles 321a and a plurality of connectors 321b connecting the plurality of concentric circles 321a.

[0090] The first sub-heating section 311 and the third sub-heating section 321 can be formed to have the same shape as each other. As an example, the first sub-heating section 311 and the third sub-heating section 321 can be formed to be semi-circular.

[0091] The first end of the first sub-heating part 311 can be connected to the third electrode terminal 115, and the second end can be connected to the first non-heating part 350. The first end of the third sub-heating part 321 can be connected to the fourth electrode terminal 116, and the second end can be connected to the second non-heating part 360.

[0092] The second sub-heating section 313 and the fourth sub-heating section 323 can be formed at positions corresponding to the edge region of the heating surface of the ceramic heater. The second sub-heating section 313 may include a plurality of concentric circles 313a and a plurality of connectors 313b connecting the plurality of concentric circles 313a, and the fourth sub-heating section 323 may include a plurality of concentric circles 323a and a plurality of connectors 323b connecting the plurality of concentric circles 323a.

[0093] The second sub-heating section 313 and the fourth sub-heating section 323 can be formed to have the same shape as each other. As an example, the second sub-heating section 313 and the fourth sub-heating section 323 can be formed into a semi-ring shape.

[0094] The end of the second sub-heating part 313 can be connected to the first non-heating part 350. The end of the fourth sub-heating part 323 can be connected to the second non-heating part 360.

[0095] The third heating section 330 and the fourth heating section 340 can be formed at positions corresponding to the middle region of the heating surface of the ceramic heater. More specifically, the third heating section 330 can be formed as a space between the first sub-heating section 311 and the third sub-heating section 321 and the second sub-heating section 313 and the fourth sub-heating section 323. The fourth heating section 340 can be formed as a space between the first sub-heating section 311 and the third sub-heating section 321 and the second sub-heating section 313 and the fourth sub-heating section 323. The fourth heating section 340 can be formed in a semi-annular shape.

[0096] The third heating element 330 and the fourth heating element 340 can be formed in a shape that is symmetrical to each other with respect to a vertical axis passing through the center of the heating element 300. Alternatively, the third heating element 330 and the fourth heating element 340 can be arranged to face each other with respect to a vertical axis passing through the center of the heating element 300.

[0097] The third heating section 330 and the fourth heating section 340 can be formed to have the same shape as each other. As an example, the third heating section 330 and the fourth heating section 340 can be formed to have a semi-annular shape.

[0098] The third heating part 330 may include a plurality of concentric circles 330a and a plurality of connectors 330b connecting the plurality of concentric circles 330a, and the fourth heating part 340 may include a plurality of concentric circles 340a and a plurality of connectors 340b connecting the plurality of concentric circles 340a.

[0099] The first to fourth heating elements 310 to 340 can be disposed on the same plane of the ceramic plate. On the other hand, as another embodiment, at least one of the first to fourth heating elements 310 to 340 can be disposed on different planes from each other.

[0100] The first non-heating part 350 is disposed between the first sub-heating part 311 and the second sub-heating part 313, and can perform the function of electrically connecting the first sub-heating part 311 and the second sub-heating part 313. The first non-heating part 350 can be formed to extend in a straight line from a point in the first sub-heating part 311 to a point in the second sub-heating part 313.

[0101] The first non-heating part 350 can be connected to the second sub-heating part 313 via a connecting member (not shown). Alternatively, as another embodiment, the first non-heating part 350 can also be directly connected to the second sub-heating part 313 without the need for a separate connecting member.

[0102] The second non-heating section 360 is disposed between the third sub-heating section 321 and the fourth sub-heating section 323, and can perform the function of electrically connecting the third sub-heating section 321 and the fourth sub-heating section 323. The second non-heating section 360 can be formed to extend in a straight line from a point in the third sub-heating section 321 to a point in the fourth sub-heating section 323.

[0103] The second non-heating part 360 can be connected to the fourth sub-heating part 323 via a connecting member (not shown). Alternatively, as another embodiment, the second non-heating part 360 can also be directly connected to the fourth sub-heating part 323 without the need for a separate connecting member.

[0104] The first non-heating portion 350 and the second non-heating portion 360 may include two metal wires arranged parallel to each other. The first non-heating portion 350 and the second non-heating portion 360 may be formed such that the axis of symmetry between the two metal wires passes through the center of the heating element 300.

[0105] The first non-heated portion 350 and the second non-heated portion 360 can be formed to have a straight length shorter than that of the non-heated portion included in a conventional four-zone heating element. As an example, when the straight length of the conventional non-heated portion is 100 mm to 120 mm, the first non-heated portion 350 and the second non-heated portion 360 can be formed to have a straight length (60 mm to 70 mm) that corresponds to about 60% of the conventional length.

[0106] The first non-heating part 350 can be formed with a first length having a straight line length less than or equal to that between a point of the second sub-heating part 313 and the third electrode terminal 115, and the second non-heating part 360 can be formed with a first length having a straight line length less than or equal to that between a point of the fourth sub-heating part 323 and the fourth electrode terminal 116.

[0107] The first non-heating portion 350 and the second non-heating portion 360 can be arranged facing each other with a horizontal axis passing through the center of the heating element 300 as a reference. That is, the first non-heating portion 350 and the second non-heating portion 360 can be arranged facing each other with a symmetry axis between the first heating portion 310 and the second heating portion 320 as a reference. The first non-heating portion 350 and the second non-heating portion 360 can be arranged at a predetermined distance from the center of the heating element 300.

[0108] The first non-heating part 350 and the second non-heating part 360 can be arranged on a straight line passing through the center of the heating element 300, or more preferably, on a vertical line passing through the center of the heating element 300.

[0109] The third non-heating part 370 is disposed between the first electrode terminal 113 and the third heating part 330, and can perform the function of electrically connecting the first electrode terminal 113 and the third heating part 330. The third non-heating part 370 can be formed as a point extending in a straight line from the first electrode terminal 113 to the third heating part 330.

[0110] The third non-heating part 370 can be connected to the third heating part 330 via a connecting member (not shown). Alternatively, as another embodiment, the third non-heating part 370 can also be directly connected to the third heating part 330 without the need for a separate connecting member.

[0111] A fourth non-heating portion 380 is disposed between the second electrode terminal 114 and the fourth heating portion 340, and can perform the function of electrically connecting the second electrode terminal 114 and the fourth heating portion 340. The fourth non-heating portion 380 can be formed to extend in a straight line from the second electrode terminal 114 to a point on the fourth heating portion 340.

[0112] The fourth non-heating part 380 can be connected to the fourth heating part 340 via a connecting member (not shown). Alternatively, as another embodiment, the fourth non-heating part 380 can also be directly connected to the fourth heating part 340 without the need for a separate connecting member.

[0113] The third non-heating section 370 and the fourth non-heating section 380 may include two metal wires arranged parallel to each other. The third non-heating section 370 and the fourth non-heating section 380 may be formed such that the axis of symmetry between the two metal wires passes through the center of the heating element 300.

[0114] The third non-heating section 370 and the fourth non-heating section 380 can be formed with a straight length shorter than that of the non-heating section included in a conventional four-zone heating element. As an example, when the straight length of the conventional non-heating section is 100 mm to 120 mm, the third non-heating section 370 and the fourth non-heating section 380 can be formed with a straight length of about 60% (60 mm to 70 mm) corresponding to the conventional length.

[0115] The third non-heated portion 370 may be formed with a second length having a straight line length less than or equal to the length between a point of either the second sub-heated portion 313 or the fourth sub-heated portion 323 and the first electrode terminal 113, and the fourth non-heated portion 380 may be formed with a second length having a straight line length less than or equal to the length between a point of either the second sub-heated portion 313 or the fourth sub-heated portion 323 and the second electrode terminal 114. The third non-heated portion 370 and the fourth non-heated portion 380 may be formed with the same straight line length as the first non-heated portion 350 and the second non-heated portion 360, or with different straight line lengths.

[0116] The third non-heating section 370 and the fourth non-heating section 380 can be arranged facing each other with reference to a vertical axis passing through the center of the heating element 300. That is, the third non-heating section 370 and the fourth non-heating section 380 can be arranged facing each other with reference to the axis of symmetry between the third heating section 330 and the fourth heating section 340. In addition, the third non-heating section 370 and the fourth non-heating section 380 can be arranged on a straight line passing through the center of the heating element 300, and more preferably, they can be arranged on a horizontal line passing through the center of the heating element 300.

[0117] On the other hand, in this embodiment, the first to fourth non-heated portions 350 to 380 are exemplified to extend in a straight line, but are not limited thereto. Those skilled in the art should understand that they can be formed to extend in a curved line instead of the straight line, or they can be formed to extend in a combination of straight lines and curves.

[0118] The first to fourth heating parts 310 to 340, the first to fourth non-heating parts 350 to 380, and the first to fourth connecting members (not shown) may all be made of the same material, but are not limited thereto.

[0119] As described above, the four-zone heating element according to an embodiment of the present invention is provided with four non-heated sections whose straight-line length is shortened compared to existing ones, thereby reducing the thermal stress caused by the non-heated sections. This effectively reduces the generation of cracks in the area where the non-heated sections contact the ceramic plate. Furthermore, the four-zone heating element achieves various temperature distributions by independently controlling the four zones of the ceramic heater's heating surface, thereby improving the temperature uniformity of the ceramic heater's heating surface.

[0120] Figure 9 This is a diagram illustrating the structure of a six-region heating element according to an embodiment of the present invention. Figure 10 It shows the composition Figure 9 A diagram showing the detailed structure of the components of the six-zone heating element.

[0121] Reference Figure 9 and Figure 10 According to an embodiment of the present invention, a six-region heating element 400 may include first to sixth heating portions 410 to 460 and first to sixth non-heating portions 510 to 560.

[0122] The first heating unit 410 may include a first sub-heating unit 411 and a second sub-heating unit 413. Here, the first sub-heating unit 411 and the second sub-heating unit 413 may be electrically connected through the first non-heating unit 510.

[0123] The second heating unit 420 may include a third sub-heating unit 421 and a fourth sub-heating unit 423. Here, the third sub-heating unit 421 and the fourth sub-heating unit 423 may be electrically connected through the second non-heating unit 520.

[0124] The third heating unit 430 may include a fifth sub-heating unit 431 and a sixth sub-heating unit 433. Here, the fifth sub-heating unit 431 and the sixth sub-heating unit 433 may be electrically connected through the third non-heating unit 530.

[0125] The first sub-heating section 411, the third sub-heating section 421, and the fifth sub-heating section 431 can be formed at positions corresponding to the central region of the heating surface of the ceramic heater. The first sub-heating section 411 may include a plurality of concentric circles 411a and a plurality of connectors 411b connecting the plurality of concentric circles 411a; the third sub-heating section 421 may include a plurality of concentric circles 421a and a plurality of connectors 421b connecting the plurality of concentric circles 421a; and the fifth sub-heating section 431 may include a plurality of concentric circles 431a and a plurality of connectors 431b connecting the plurality of concentric circles 431a.

[0126] The first sub-heating section 411, the third sub-heating section 421, and the fifth sub-heating section 431 can be formed to have the same shape as each other. As an example, the first sub-heating section 411, the third sub-heating section 421, and the fifth sub-heating section 431 can be formed in a fan shape.

[0127] The first end of the first sub-heating section 411 can be connected to the fourth electrode terminal 116, and the second end can be connected to the first non-heating section 510. The first end of the third sub-heating section 421 can be connected to the fifth electrode terminal 117, and the second end can be connected to the second non-heating section 520. The first end of the fifth sub-heating section 431 can be connected to the sixth electrode terminal 118, and the second end can be connected to the third non-heating section 530.

[0128] The second sub-heating section 413, the fourth sub-heating section 423, and the sixth sub-heating section 433 can be formed at positions corresponding to the edge region of the heating surface of the ceramic heater. The second sub-heating section 413 may include a plurality of concentric circles 413a and a plurality of connectors 413b connecting the plurality of concentric circles 413a; the fourth sub-heating section 423 may include a plurality of concentric circles 423a and a plurality of connectors 423b connecting the plurality of concentric circles 423a; and the sixth sub-heating section 433 may include a plurality of concentric circles 433a and a plurality of connectors 433b connecting the plurality of concentric circles 433a.

[0129] The second sub-heating section 413, the fourth sub-heating section 423, and the sixth sub-heating section 433 can be formed to have the same shape as each other. As an example, the second sub-heating section 413, the fourth sub-heating section 423, and the sixth sub-heating section 433 can be formed into a ring shape divided into three equal parts.

[0130] The end of the second sub-heating part 413 can be connected to the first non-heating part 510. The end of the fourth sub-heating part 423 can be connected to the second non-heating part 520. The end of the sixth sub-heating part 433 can be connected to the third non-heating part 530.

[0131] The fourth to sixth heating sections 440 to 460 can be formed at positions corresponding to the middle region of the heating surface of the ceramic heater. More specifically, the fourth heating section 440 can be formed in the space between the first sub-heating section 411 and the third sub-heating section 421, and between the second sub-heating section 413 and the fourth sub-heating section 423. The fifth heating section 450 can be formed in the space between the third sub-heating section 421 and the fifth sub-heating section 431, and between the fourth sub-heating section 423 and the sixth sub-heating section 433. The sixth heating section 460 can be formed in the space between the first sub-heating section 411 and the fifth sub-heating section 431, and between the second sub-heating section 413 and the sixth sub-heating section 433.

[0132] The fourth to sixth heating sections 440 to 460 can be formed to have the same shape as each other. As an example, the fourth to sixth heating sections 440 to 460 can be formed into a ring shape divided into three equal parts.

[0133] The fourth heating unit 440 may include a plurality of concentric circles 440a and a plurality of connectors 440b connecting the plurality of concentric circles 440a; the fifth heating unit 450 may include a plurality of concentric circles 450a and a plurality of connectors 450b connecting the plurality of concentric circles 450a; and the sixth heating unit 460 may include a plurality of concentric circles 460a and a plurality of connectors 460b connecting the plurality of concentric circles 460a.

[0134] The first to sixth heating elements 410 to 460 can be disposed on the same plane of the ceramic plate. On the other hand, as another embodiment, at least one of the first to sixth heating elements 410 to 460 can also be disposed on different planes from each other.

[0135] The first non-heating part 510 is disposed between the first sub-heating part 411 and the second sub-heating part 413, and can perform the function of electrically connecting the first sub-heating part 411 and the second sub-heating part 413. The first non-heating part 510 can be formed to extend in a straight line from a point in the first sub-heating part 411 to a point in the second sub-heating part 413.

[0136] The first non-heating part 510 can be connected to the second sub-heating part 413 via a connecting member (not shown). Alternatively, as another embodiment, the first non-heating part 510 can also be directly connected to the second sub-heating part 413 without the need for a separate connecting member.

[0137] The second non-heating section 520 is disposed between the third sub-heating section 421 and the fourth sub-heating section 423, and can perform the function of electrically connecting the third sub-heating section 421 and the fourth sub-heating section 423. The second non-heating section 520 can be formed to extend in a straight line from a point in the third sub-heating section 421 to a point in the fourth sub-heating section 423.

[0138] The second non-heating part 520 can be connected to the fourth sub-heating part 423 via a connecting member (not shown). Alternatively, as another embodiment, the second non-heating part 520 can also be directly connected to the fourth sub-heating part 423 without the need for a separate connecting member.

[0139] The third non-heating section 530 is disposed between the fifth sub-heating section 431 and the sixth sub-heating section 433, and can perform the function of electrically connecting the fifth sub-heating section 431 and the sixth sub-heating section 433. The third non-heating section 530 can be formed to extend in a straight line from a point in the fifth sub-heating section 431 to a point in the sixth sub-heating section 433.

[0140] The third non-heating part 530 can be connected to the sixth sub-heating part 433 via a connecting member (not shown). Alternatively, as another embodiment, the third non-heating part 530 can also be directly connected to the sixth sub-heating part 433 without the need for a separate connecting member.

[0141] The first to third non-heating portions 510 to 530 may include two metal wires arranged parallel to each other. The first to third non-heating portions 510 to 530 may be formed such that the axis of symmetry between the two metal wires passes through the center of the heating element 400.

[0142] The first to third non-heated portions 510 to 530 can be formed with a straight length shorter than that of the non-heated portions included in a conventional six-zone heating element. As an example, when the straight length of the conventional non-heated portion is 100 mm to 120 mm, the first to third non-heated portions 510 to 530 can be formed with a straight length (60 mm to 70 mm) that corresponds to about 60% of the conventional length.

[0143] The first non-heating portion 510 can be formed with a first length having a straight line length less than or equal to that between a point of the second sub-heating portion 413 and the fourth electrode terminal 116, the second non-heating portion 520 can be formed with a first length having a straight line length less than or equal to that between a point of the fourth sub-heating portion 423 and the fifth electrode terminal 117, and the third non-heating portion 530 can be formed with a first length having a straight line length less than or equal to that between a point of the sixth sub-heating portion 433 and the sixth electrode terminal 118.

[0144] The first to third non-heating portions 510 to 530 can be formed at an angle of 120 degrees to each other with respect to the center of the heating element 400. Furthermore, the first to third non-heating portions 510 to 530 can be positioned at a predetermined distance from the center of the heating element 400. Additionally, the first to third non-heating portions 510 to 530 can be formed to have the same straight-line length.

[0145] A fourth non-heating portion 540 is disposed between the first electrode terminal 113 and the fourth heating portion 440, and can perform the function of electrically connecting the first electrode terminal 113 and the fourth heating portion 440. The fourth non-heating portion 540 can be formed to extend in a straight line from the first electrode terminal 113 to a point on the fourth heating portion 440.

[0146] The fourth non-heating part 540 can be connected to the fourth heating part 440 via a connecting member (not shown). Alternatively, as another embodiment, the fourth non-heating part 540 can also be directly connected to the fourth heating part 440 without the need for a separate connecting member.

[0147] A fifth non-heating portion 550 is disposed between the second electrode terminal 114 and the fifth heating portion 450, and can perform the function of electrically connecting the second electrode terminal 114 and the fifth heating portion 450. The fifth non-heating portion 550 can be formed in a straight line extending from the second electrode terminal 114 to a point on the fifth heating portion 450.

[0148] The fifth non-heating part 550 can be connected to the fifth heating part 450 via a connecting member (not shown). Alternatively, as another embodiment, the fifth non-heating part 550 can also be directly connected to the fifth heating part 450 without the need for a separate connecting member.

[0149] A sixth non-heating section 560 is disposed between the third electrode terminal 115 and the sixth heating section 460, and can perform the function of electrically connecting the third electrode terminal 115 and the sixth heating section 460. The sixth non-heating section 560 can be formed as a point extending in a straight line from the third electrode terminal 115 to the sixth heating section 460.

[0150] The sixth non-heating part 560 can be connected to the sixth heating part 460 via a connecting member (not shown). Alternatively, as another embodiment, the sixth non-heating part 560 can also be directly connected to the sixth heating part 460 without the need for a separate connecting member.

[0151] The fourth to sixth non-heating sections 540 to 560 may include two metal wires arranged parallel to each other. The fourth to sixth non-heating sections 540 to 560 may be formed such that the axis of symmetry between the two metal wires passes through the center of the heating element 400.

[0152] The fourth to sixth non-heated sections 540 to 560 can be formed with a straight length shorter than that of the non-heated sections included in a conventional six-zone heating element. As an example, when the straight length of the conventional non-heated section is 100 mm to 120 mm, the fourth to sixth non-heated sections 540 to 560 can be formed with a straight length of approximately 60% (60 mm to 70 mm) corresponding to the conventional length.

[0153] The fourth non-heating section 540 can be formed with a second length having a straight line length less than or equal to the length between a point of any one of the second sub-heating sections 413, 423, and 433 and the first electrode terminal 113. The fifth non-heating section 550 can be formed with a second length having a straight line length less than or equal to the length between a point of any one of the second sub-heating sections 413, 423, and 433 and the second electrode terminal 114. The sixth non-heating section 560 can be formed with a second length having a straight line length less than or equal to the length between a point of any one of the second sub-heating sections 413, 423, and 433 and the third electrode terminal 115. The fourth to sixth non-heating sections 540 to 560 can be formed with the same straight line length as the first to third non-heating sections 510 to 530, or with different straight line lengths.

[0154] The fourth to sixth non-heated portions 540 to 560 can be formed at an angle of 120 degrees to each other with the center of the heating element 400 as the reference. In addition, the fourth to sixth non-heated portions 540 to 560 can be formed to have the same straight length as each other.

[0155] On the other hand, in this embodiment, the first to sixth non-heated portions 510 to 560 are exemplified to extend in a straight line, but are not limited thereto. Those skilled in the art should understand that they can be formed to extend in a curved line instead of the straight line, or they can be formed to extend in a combination of straight lines and curves.

[0156] The first to sixth heating parts 410 to 460, the first to sixth non-heating parts 510 to 560, and the first to sixth connecting members (not shown) may all be made of the same material, but are not limited to this.

[0157] As described above, the six-zone heating element according to an embodiment of the present invention is provided with six non-heated sections whose linear length is shortened compared to existing ones, thereby reducing the thermal stress caused by the non-heated sections. This effectively reduces the generation of cracks in the area where the non-heated sections contact the ceramic plate. Furthermore, the six-zone heating element achieves various temperature distributions by independently controlling the six zones of the ceramic heater's heating surface, thereby improving the temperature uniformity of the ceramic heater's heating surface.

[0158] On the other hand, although specific embodiments of the present invention have been described above, various modifications can be made without departing from the scope of the invention. However, the scope of the invention is not limited to the described embodiments and should be determined by the appended claims and their equivalents.

Claims

1. A ceramic heater characterized by comprising: a two-zone heating element; and a first electrode terminal and a second electrode terminal provided at a central portion of the two-zone heating element, the two-zone heating element comprising: a first heating portion and a second heating portion capable of being independently controlled by a power supply device; a first non-heating portion provided between and electrically connecting a first sub-heating portion and a second sub-heating portion constituting the first heating portion; and a second non-heating portion provided between and electrically connecting the second heating portion and the first electrode terminal, the first electrode terminal being in contact with one end of the second non-heating portion, and the second electrode terminal being in contact with the first heating portion.

2. The ceramic heater according to claim 1, characterized in that the first sub-heating portion is formed at a position corresponding to a central region of a heating surface of the ceramic heater, the second sub-heating portion is formed at a position corresponding to an edge region of the heating surface of the ceramic heater.

3. The ceramic heater according to claim 2, characterized in that the second heating portion is formed at a position corresponding to an intermediate region of the heating surface of the ceramic heater.

4. The ceramic heater according to claim 1, characterized in that the first non-heating portion is formed to extend in a straight line or a curved line from a point of the first sub-heating portion to a point of the second sub-heating portion, the second non-heating portion is formed to extend in a straight line or a curved line from the first electrode terminal to a point of the second heating portion.

5. The ceramic heater according to claim 1, characterized in that the first non-heating portion is connected to the second sub-heating portion by a first connecting member, the second non-heating portion is connected to the second heating portion by a second connecting member.

6. The ceramic heater according to claim 1, characterized in that the first non-heating portion and the second non-heating portion are provided on a straight line passing through a center of the two-zone heating element.

7. The ceramic heater according to claim 1, characterized in that the first non-heating portion and the second non-heating portion are provided to face each other with reference to the center of the two-zone heating element.

8. The ceramic heater according to claim 1, characterized in that the first non-heating portion and the second non-heating portion include two metal wires provided in parallel to each other, and a symmetry axis between the two metal wires is formed to pass through the center of the two-zone heating element.

9. A ceramic heater comprising a four-zone heating element, the ceramic heater characterized by comprising: the four-zone heating element comprising: a first heating portion to a fourth heating portion capable of being independently controlled by a power supply device; a first non-heating portion and a second non-heating portion provided to face each other with reference to a first symmetry axis between the first heating portion and the second heating portion and provided to be separated from a center of the four-zone heating element by a prescribed distance; and a third non-heating portion and a fourth non-heating portion provided to face each other with reference to a second symmetry axis between the third heating portion and the fourth heating portion and provided to be separated from the center of the four-zone heating element by a prescribed distance. a third non-heating portion and a fourth non-heating portion, which are arranged opposite to each other with a second symmetry axis between the third heating portion and the fourth heating portion as a reference and which extend from the first electrode terminal and the second electrode terminal provided at the center of the four-region heating element toward the third heating portion and the fourth heating portion, the first non-heating portion is provided between a first sub-heating portion and a second sub-heating portion that constitute the first heating portion, the second non-heating portion is provided between a third sub-heating portion and a fourth sub-heating portion that constitute the second heating portion.

10. The ceramic heater according to claim 9, wherein the second symmetry axis is perpendicular to the first symmetry axis.

11. The ceramic heater according to claim 9, wherein the first symmetry axis and the second symmetry axis pass through the center of the four-region heating element.

12. The ceramic heater according to claim 9, wherein the first non-heating portion electrically connects the first sub-heating portion and the second sub-heating portion, the second non-heating portion electrically connects the third sub-heating portion and the fourth sub-heating portion.

13. The ceramic heater according to claim 9, wherein the third non-heating portion is provided between the third heating portion and the first electrode terminal and electrically connects the third heating portion and the first electrode terminal, the fourth non-heating portion is provided between the fourth heating portion and the second electrode terminal and electrically connects the fourth heating portion and the second electrode terminal.

14. The ceramic heater according to claim 9, wherein the first non-heating portion to the fourth non-heating portion are formed to extend in a straight line or a curved line, respectively.

15. The ceramic heater according to claim 9, wherein the first non-heating portion to the fourth non-heating portion are connected to the first heating portion to the fourth heating portion, respectively, by a connection member.

16. A ceramic heater including a six-region heating element, the ceramic heater comprising: the first heating portion to the sixth heating portion are independently controllable by a power supply device; the first non-heating portion to the third non-heating portion are provided at a predetermined distance from the center of the six-region heating element and are arranged to form an angle of 120 degrees with the center of the six-region heating element as a reference; and the fourth non-heating portion to the sixth non-heating portion extend from the first electrode terminal to the third electrode terminal provided at the center of the six-region heating element toward the fourth heating portion to the sixth heating portion and are arranged to form an angle of 120 degrees with the center of the six-region heating element as a reference, the first non-heating portion is provided between a first sub-heating portion and a second sub-heating portion that constitute the first heating portion, the second non-heating portion is provided between a third sub-heating portion and a fourth sub-heating portion that constitute the second heating portion, the third non-heating portion is provided between a fifth sub-heating portion and a sixth sub-heating portion that constitute the third heating portion.

17. The ceramic heater according to claim 16, wherein the first non-heating portion electrically connects the first sub-heating portion and the second sub-heating portion, the second non-heating portion electrically connects the third sub-heating portion and the fourth sub-heating portion. The second non-heating portion electrically connects the third sub-heating portion and the fourth sub-heating portion. The third non-heating portion electrically connects the fifth sub-heating portion and the sixth sub-heating portion.

18. The ceramic heater according to claim 16, wherein The fourth non-heating portion is provided between the fourth heating portion and the first electrode terminal and electrically connects the fourth heating portion and the first electrode terminal. The fifth non-heating portion is provided between the fifth heating portion and the second electrode terminal and electrically connects the fifth heating portion and the second electrode terminal. The sixth non-heating portion is provided between the sixth heating portion and the third electrode terminal and electrically connects the sixth heating portion and the third electrode terminal.

19. The ceramic heater according to claim 16, wherein The first non-heating portion to the sixth non-heating portion are formed to extend in a straight line or a curved line, respectively.

20. The ceramic heater according to claim 16, wherein The first non-heating portion to the sixth non-heating portion are connected to the first heating portion to the sixth heating portion, respectively, by connection members.

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