Method for manufacturing ultra-thin blade

Abstract

The invention discloses a method for manufacturing an ultra-thin blade, which specifically comprises the following steps: S1, preparing a blade blank with an inner hole: subjecting raw materials with a good ratio to cold pressing preforming, hot pressing sintering, and rough machining in sequence to obtain a blade blank with an inner hole; S2, pre-fixing: fixing one side of the blade blank on an alumina ceramic circular plate by hot-melt wax, S3, single-sided precision grinding: placing the blade blank on a grinding disc of a plane grinder, S4, face-changing precision grinding: after completing precision grinding of one side of the blade blank, placing the alumina ceramic circular plate and the blade blank together in boiling water, separating the alumina ceramic plate and the blade blank, and then repeating the steps of S2 and S3 to complete precision grinding of the other side of the blade blank. The invention can conveniently place the blade blank on the plane grinder by fixing the blade blank and the alumina ceramic circular plate, thereby ensuring the stability of the placement of the blade blank, and further effectively solving the problems of fracture, deviation, warping, and deformation of the blade blank during processing.

Description

Technical Field

[0001] The present invention relates to the technical field of production of semiconductor cutting blades, and more specifically, to a method for manufacturing an ultra-thin blade. Background Art

[0002] Ultra-thin blades are high-precision, high-quality cutting tools that are widely used in fields that require high-precision cutting or processing. For example, in the semiconductor field, the application scenario of ultra-thin blades in the semiconductor industry is mainly precision cutting. In the semiconductor manufacturing process, silicon wafers need to be cut with high precision to ensure that the size and shape of the chip meet the design requirements.

[0003] In the production process of ultra-thin blades, the grinding and polishing of the blades is very important. At present, the grinding and polishing of the blades are generally carried out on a flat grinder. However, due to the relatively thin thickness of the blades, it is easy to cause the blades to be unstable, which in turn affects the stability of the blade grinding and polishing. Summary of the invention

[0004] In order to overcome the above-mentioned defects of the prior art, an embodiment of the present invention provides a method for manufacturing an ultra-thin blade.

[0005] To achieve the above object, the present invention provides a method for manufacturing an ultra-thin blade, which is characterized by comprising the following steps:

[0006] S1. Preparing a blade blank with an inner hole: cold pressing preforming, hot pressing sintering, and rough machining are performed on the raw materials with a good ratio to obtain a blade blank with an inner hole;

[0007] S2, pre-fixing: fixing one side of the knife blank on the alumina ceramic circular plate by hot-melt wax, the diameter of the alumina ceramic circular plate is larger than the knife blank, and the alumina ceramic circular plate and the knife blank are concentrically arranged;

[0008] S3, single-sided precision grinding: Place the blade blank on the grinding disc of the surface grinder, turn on the surface grinder, and first perform precision grinding on one side of the blade blank;

[0009] S4, re-surface precision grinding: After completing precision grinding of one side of the knife blank, put the alumina ceramic circular plate and the knife blank into boiling water together, separate the alumina ceramic plate and the knife blank, and then repeat steps S2 and S3 to complete precision grinding of the other side of the knife blank.

[0010] Furthermore, in step S2, an annular groove is provided on the circular surface of the grinding disc, and a plurality of protrusions are provided on the alumina ceramic circular plate. The plurality of protrusions are distributed in a circle with the center position of the alumina ceramic circular plate as the center of the circle. When the blade blank is placed on the grinding disc, the protrusions are stuck in the annular groove.

[0011] Furthermore, a through hole is provided at the center of the alumina ceramic circular plate, and when the alumina ceramic circular plate and the knife blank are fixed, the through hole and the inner hole are aligned.

[0012] Furthermore, the diameters of the inner hole and the through hole are consistent.

[0013] Furthermore, a plurality of fixing rods extending vertically downward are provided on the circular surface of the alumina ceramic circular plate, and the protrusions are spherical and fixed to the bottom of the fixing rods.

[0014] Furthermore, a downwardly protruding positioning column is provided at the center of the alumina ceramic circular plate, and when the alumina ceramic circular plate and the blade blank are fixed, the positioning column is completely immersed in the inner hole;

[0015] A rotatable shaft ring is arranged at the center of the positioning column, and a hole groove is hollowed out at the center of the shaft ring.

[0016] Furthermore, the above raw materials include: 30-60 parts of 5μm copper powder, 5-20 parts of 5μm tin powder, 10-50 parts of 5μm pre-alloyed powder, 0-5 parts of 5μm graphite powder, and 2-10 parts of diamond.

[0017] Furthermore, the above-mentioned cold pressing preforming process is as follows: the mixed raw materials are evenly distributed in the steel mold, and after sealing, they are placed on the lower platen of the press, and a pressure of 3*103-5×103MPa is applied to obtain a formed blank, and the formed blank is placed in a hot pressing mold made of graphite or steel.

[0018] Furthermore, the hot pressing sintering process is as follows: the hot pressing mold is moved as a whole into the sintering furnace, and the blank blade is sintered under the conditions of a molding stress of 20-40MPa, a heating rate of 40-90℃ / min, a sintering temperature of 550-750℃, a holding time of 5-10min, and a cooling rate of 20-100℃ / min.

[0019] Furthermore, the rough machining process is as follows: the inner hole of the blank blade is machined by wire cutting, the outer diameter is machined by a cylindrical grinder, and the thickness is deformed and corrected to form a blade blank.

[0020] Technical effects and advantages of the present invention: The present invention fixes the knife blank and the alumina ceramic circular plate, thereby being able to conveniently place the knife blank on a plane grinder, ensuring the stability of the placement of the knife blank, and further being able to effectively solve the problems of breakage, deviation, warping and deformation of the knife blank during processing. At the same time, the alumina ceramic circular plate and the knife blank are fixed by hot-melt wax, which not only ensures that the two are firmly fixed, but also only requires soaking in boiling water for subsequent separation, thus avoiding damage to the knife blank. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1This is a side structural diagram of the alumina ceramic circular plate, knife blank, and grinding disc being fixed according to the present invention.

[0022] Figure 2 It is a surface cross-sectional view of the knife blank of the present invention.

[0023] Figure 3 It is a cross-sectional view of the surface of the grinding disc of the present invention.

[0024] Figure 4 This is a side structural diagram of the fixation between the alumina ceramic circular plate and the knife blank in Example 1 of the present invention.

[0025] Figure 5 This is a surface cross-sectional view of the alumina ceramic circular plate of Example 2 of the present invention. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] like Figures 1 to 3 A specific embodiment of the present invention specifically comprises the following steps:

[0028] S1, preparing a blade blank 1 having an inner hole 13: cold pressing preforming, hot pressing sintering, and rough machining are sequentially performed on the raw materials with good proportions to obtain a blade blank 1 having an inner hole 13;

[0029] S2, pre-fixing: fix one side of the knife blank 1 on the alumina ceramic circular plate 11 by hot-melt wax, the diameter of the alumina ceramic circular plate 11 is larger than the knife blank 1, and the alumina ceramic circular plate 11 and the knife blank 1 are concentrically arranged;

[0030] S3, single-sided precision grinding: placing the blade blank 1 on the grinding disc 12 of the surface grinder, turning on the surface grinder, and firstly precision grinding one side of the blade blank 1;

[0031] S4, change surface precision grinding: after completing the precision grinding of one side of the knife blank 1, put the alumina ceramic circular plate 11 and the knife blank 1 into boiling water together, separate the alumina ceramic plate and the knife blank 1, and then repeat the steps of S2 and S3 to complete the precision grinding of the other side of the knife blank 1.

[0032] In the present invention, during the processing of the knife blank 1, by fixing the knife blank 1 and the alumina ceramic circular plate 11, the knife blank 1 can be conveniently placed on the plane grinder, ensuring the stability of the placement of the knife blank 1, and thus effectively solving the problems of breakage, deviation, warping and deformation of the knife blank 1 during processing. At the same time, the alumina ceramic circular plate 11 and the knife blank 1 are fixed by hot-melt wax, which not only ensures that the two are firmly fixed, but also the subsequent separation only requires soaking in boiling water, avoiding damage to the knife blank 1.

[0033] In the present invention, as a preferred embodiment, the raw materials include: 30-60 parts of 5 μm copper powder, 5-20 parts of 5 μm tin powder, 10-50 parts of 5 μm pre-alloyed powder, 0-5 parts of 5 μm graphite powder, and 2-10 parts of diamond.

[0034] In the present invention, as a preferred embodiment, the cold pressing preforming process is as follows: the mixed raw materials are evenly distributed in the steel mold, and the cap is placed on the lower platen of the press, and a pressure of 3*10 is applied. 3 -5×10 3 MPa, a shaped compact is obtained, and the shaped compact is placed in a hot pressing mold made of graphite or steel.

[0035] In the present invention, as a preferred embodiment, the hot pressing sintering process is as follows: the hot pressing mold is moved as a whole into a sintering furnace, and the blank blade is sintered under the conditions of a molding stress of 20-40MPa, a heating rate of 40-90°C / min, a sintering temperature of 550-750°C, a holding time of 5-10min, and a cooling rate of 20-100°C / min.

[0036] In the present invention, as a preferred solution, the rough machining process is as follows: the inner hole 13 of the blank blade is machined by wire cutting, the outer diameter is machined by a cylindrical grinder, and the thickness is deformed and corrected to form a blade blank 1.

[0037] In the present invention, as a preferred embodiment, in step S2, an annular groove 2 is provided on the circular surface of the grinding disc 12, and a plurality of protrusions 21 are provided on the alumina ceramic circular plate 11. The plurality of protrusions 21 are distributed in a circle with the center position of the alumina ceramic circular plate 11 as the center of the circle. When the knife blank 1 is placed on the grinding disc 12, the protrusion 21 is stuck in the inside of the annular groove 2.

[0038] In the present invention, as a preferred solution, a plurality of fixing rods 4 extending vertically downward are provided on the circular surface of the alumina ceramic circular plate 11 , and the protrusions 21 are spherical and fixed to the bottom of the fixing rods 4 .

[0039] In the present invention, when the grinding disc 12 polishes the blade blank 1, the blade blank 1 and the grinding disc 12 are in relative operation and friction, and at this time, the protrusion 21 moves synchronously inside the annular groove 2, and the annular groove 2 limits the position of the protrusion 21, thereby ensuring that the position of the alumina ceramic circular plate 11 remains stable during the operation process, thereby improving the grinding stability of the blade blank 1. Preferably, the protrusion 21 is spherical, which reduces the resistance of the protrusion 21 to the movement inside the annular groove 2.

[0040] In the present invention, there are two ways to fix the alumina ceramic circular plate 11 and the blade blank 1, and the present invention takes Example 1 and Example 2 as examples for specific description. Example

[0041] like Figure 4 As shown, in this embodiment, a through hole 3 is provided at the center of the alumina ceramic circular plate 11. When the alumina ceramic circular plate 11 and the blade blank 1 are fixed, the through hole 3 and the inner hole 13 are aligned.

[0042] In this embodiment, as a preferred solution, the diameters of the inner hole 13 and the through hole 3 are consistent.

[0043] In this embodiment, when fixing the blade blank 1 and the alumina ceramic circular plate 11 , it is only necessary to align the through hole 3 and the inner hole 13 . Example

[0044] like Figure 5 As shown, in this embodiment, a downwardly protruding positioning column 5 is provided at the center of the alumina ceramic circular plate 11. When the alumina ceramic circular plate 11 and the blade blank 1 are fixed, the positioning column 5 is completely immersed in the inner hole 13;

[0045] A rotatable shaft ring 51 is disposed at the center of the positioning column 5 , and a hole groove 52 is hollowed out at the center of the shaft ring 51 .

[0046] In this embodiment, the positioning column 5 can be embedded in the inner hole 13, thereby playing a role in positioning and installing the alumina ceramic circular plate 11 and the knife blank 1. At the same time, when the knife blank 1 is placed on the grinding disk 12, the hole groove 52 is convenient for clamping on the surface grinder. When the knife blank 1 and the grinding disk 12 perform relative running friction movement, the shaft ring 51 rotates with the grinding disk 12, thereby playing a role in straightening the rotation of the grinding disk 12, further improving the stability of the grinding and polishing of the knife blank 1.

[0047] Finally, a few points should be explained: First, in the description of this application, it should be noted that, unless otherwise specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, which may refer to mechanical connection or electrical connection, or internal communication between two components, or direct connection. "upper", "lower", "left", "right", etc. are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship may change;

[0048] Secondly: In the drawings of the embodiments disclosed in the present invention, only the structures related to the embodiments disclosed in the present invention are involved, and other structures can refer to the general design. In the absence of conflict, the same embodiment and different embodiments of the present invention can be combined with each other;

[0049] Finally: The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A method for manufacturing an ultra-thin blade, characterized in that: Specifically include the following steps: S1, preparing a blade blank (1) having an inner hole (13): cold pressing preforming, hot pressing sintering, and rough machining are sequentially performed on the raw materials with a good proportion to obtain a blade blank (1) having an inner hole (13); S2, pre-fixing: fixing one side of the knife blank (1) on an alumina ceramic circular plate (11) by hot-melting wax, wherein the diameter of the alumina ceramic circular plate (11) is larger than that of the knife blank (1), and the alumina ceramic circular plate (11) and the knife blank (1) are arranged concentrically; S3, single-sided precision grinding: placing the blade blank (1) on the grinding disc (12) of the surface grinder, turning on the surface grinder, and firstly precision grinding one side of the blade blank (1); S4, re-surface precision grinding: after completing precision grinding of one side of the blade blank (1), the alumina ceramic circular plate (11) and the blade blank (1) are placed together in boiling water, the alumina ceramic plate and the blade blank (1) are separated, and then steps S2 and S3 are repeated to complete precision grinding of the other side of the blade blank (1); In the step S2, the grinding disc (12) has an annular groove (2) on its circular surface, the alumina ceramic circular plate (11) is provided with a plurality of protrusions (21), and the plurality of protrusions (21) are distributed in a circular shape with the center position of the alumina ceramic circular plate (11) as the center of the circle, and when the blade blank (1) is placed on the grinding disc (12), the protrusions (21) are stuck inside the annular groove (2); A downwardly protruding positioning column (5) is provided at the center of the alumina ceramic circular plate (11); when the alumina ceramic circular plate (11) and the knife blank (1) are fixed, the positioning column (5) is completely immersed in the inner hole (13); A rotatable shaft ring (51) is provided at the center of the positioning column (5), and a hole groove (52) is hollowed out at the center of the shaft ring (51); The shaft ring (51) rotates synchronously with the grinding disc (12), thereby realizing the straightening of the rotation of the grinding disc (12).

2. The method for manufacturing an ultra-thin blade according to claim 1, characterized in that: A plurality of fixing rods (4) extending vertically downward are provided on the circular surface of the alumina ceramic circular plate (11); the protrusions (21) are spherical and fixed to the bottoms of the fixing rods (4).

3. The method for manufacturing an ultra-thin blade according to claim 1, characterized in that: The raw materials include: 30-60 parts of 5μm copper powder, 5-20 parts of 5μm tin powder, 10-50 parts of 5μm pre-alloy powder, 0-5 parts of 5μm graphite powder, and 2-10 parts of diamond.

4. The method for manufacturing an ultra-thin blade according to claim 1, characterized in that: The cold press preforming process is as follows: the mixed raw materials are evenly distributed in the steel mold, sealed and placed on the lower platen of the press, and a pressure of 3×10 3 -5×10 3 MPa, a shaped compact is obtained, and the shaped compact is placed in a hot pressing mold made of graphite or steel.

5. The method for manufacturing an ultra-thin blade according to claim 1, characterized in that: The hot pressing sintering process is as follows: the hot pressing mold is moved as a whole into a sintering furnace, and the blank blade is sintered under the conditions of a mold pressing stress of 20-40MPa, a heating rate of 40-90℃ / min, a sintering temperature of 550-750℃, a holding time of 5-10min, and a cooling rate of 20-100℃ / min.

6. The method for manufacturing an ultra-thin blade according to claim 1, characterized in that: The rough machining process is as follows: the inner hole (13) of the blank blade is machined by wire cutting, the outer diameter is machined by a cylindrical grinder, and the thickness is deformed and corrected to form a blade blank (1).

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