A chain-type local coating device and a coating method

Abstract

The present invention discloses a chain-type local coating device and a coating method, which include a reaction chamber and a transmission component. An inlet chamber, a buffer chamber, a process chamber and an outlet chamber are sequentially arranged in the reaction chamber along the direction of conveying the battery wafers by the transmission component. Gates are arranged in front of and behind each chamber. The device further includes: a first heating element, which is arranged in the process chamber; a gas supply pipeline, whose exhaust end is arranged in the process chamber; and an excitation unit, of which a plurality are provided and are distributed in the width direction in the process chamber. By arranging a plurality of excitation units, when the battery wafer enters the process chamber and passes below the excitation units, the excitation units are powered on to excite reaction gas between them and the battery wafer so as to achieve local coating. Since the plurality of excitation units have different operating frequencies, sizes and positions, local coating at different positions can be realized, and different film thicknesses and refractive indexes can be modulated in the corresponding regions, and thus different strip-shaped colors can be presented.

Description

Technical Field

[0001] The invention relates to the technical field of solar cell sheet manufacturing, and in particular to a chain-type local coating device and a coating method. Background Art

[0002] In the existing tubular PECVD coating equipment, the semi-finished cells are placed on the inside of the graphite carrier. The area of ​​the graphite carrier is more than 20% larger than that of the semi-finished cells, completely covering the semi-finished cells. The ionized plasma covers the surface of the semi-finished cells, so that a thin film is deposited on the entire surface of the semi-finished cells, and the film thickness and refractive index at each position are relatively uniform. The uniform film thickness and refractive index result in a relatively consistent reflection of the incident light at each position on the cell surface, and the color presented is also basically the same. At present, the entire back of the PERC bifacial solar cell is light blue, and the entire back of the TOPCon bifacial solar cell is blue.

[0003] Patent document CN212582004U disclosed a battery cell coating device on February 23, 2021, the technical solution of which includes: multiple vacuum chambers; multiple vacuum gate valves, two adjacent vacuum chambers are connected by a vacuum gate valve; a material transport device for inputting battery cells into the vacuum chamber or transporting battery cells out of the vacuum chamber; a carrier plate, which can be circulated in multiple vacuum chambers, and the carrier plate is used to carry battery cells; a first battery cell lifting mechanism, which is used to transfer battery cells between the material transport device and the carrier plate; a first transmission device, each vacuum chamber is provided with a first transmission device, wherein the first transmission device is used to transfer the carrier plate and / or the material transport device between multiple vacuum chambers. Its beneficial effect is: reducing the contact between the carrier plate and the atmosphere, which is conducive to maintaining the stability of the carrier plate temperature and reducing the accumulation of water vapor and impurities, thereby improving the stability and cleanliness of the battery cell temperature, and then improving the process treatment effect of the battery cell.

[0004] As in the prior art of the above-mentioned patent, a chain coating method is adopted to reduce the contact between the carrier and the atmosphere, thereby improving the process treatment effect of the battery cell. However, when performing the coating process on the battery cell, it can only coat the entire front or back of the solar cell, and cannot achieve coating of local areas, resulting in the entire back of the crystalline silicon solar cell having a single color, only blue colors, which limits the diversified application of solar cells in building integration. Therefore, a chain local coating equipment and coating method are urgently needed to solve the above problems. Summary of the invention

[0005] The object of the present invention is to provide a chain-type local coating device and a coating method to solve the above-mentioned deficiencies in the prior art.

[0006] In order to achieve the above object, the present invention provides the following technical solutions:

[0007] A chain-type local coating device and a coating method, comprising a reaction chamber and a transmission component. Along the direction of the transmission component for conveying the battery wafers in the reaction chamber, a feeding chamber, a buffer chamber, a process chamber and a discharging chamber are sequentially arranged. Gates are arranged in front of and behind each chamber. The device further includes: a first heating element, which is arranged in the process chamber; a gas supply pipeline, whose exhaust end is arranged in the process chamber and is used for conveying reaction gas into the process chamber; an excitation unit, which has a plurality of them and is distributed in the width direction in the process chamber; when the front end of the battery wafer conveyed by the transmission component passes below the excitation unit, the excitation unit is powered on to excite the reaction gas between it and the battery wafer to achieve coating.

[0008] Preferably, a second heating element is arranged on the inner top surface of the buffer chamber close to the process chamber side.

[0009] Preferably, the distance between the lower edge of the excitation unit and the battery wafer passing below it is set to 0.5 - 3 mm.

[0010] Preferably, the excitation unit includes 2 - 10 pairs of mutually crossed metal sheets and a radio frequency power supply. The metal sheets are respectively an anode metal sheet and a cathode metal sheet. The anode metal sheet is connected to the positive pole of the radio frequency power supply, and the cathode metal sheet is connected to the negative pole of the radio frequency power supply. The distance between adjacent anode metal sheets and cathode metal sheets is set to 5 - 15 mm.

[0011] Preferably, the transmission component includes a plurality of roller rods arranged at intervals, and two convex rings are symmetrically arranged on the roller rods for supporting the battery wafers.

[0012] Preferably, a partition is arranged between the feeding chamber and the buffer chamber. A driving component for driving the gate between the feeding chamber and the buffer chamber to lift is arranged in the partition. A limiting component is arranged on the partition. When there is a large pressure difference between the feeding chamber and the buffer chamber, the limiting component restricts the driving component from driving the gate to rise.

[0013] Preferably, the driving component includes a screw rod rotatably arranged in the partition. A displacement part is threadedly sleeved on the screw rod. The displacement part is movably connected to the upper end of the gate through a connecting rod. A motor is installed on the reaction chamber, and the output end of the motor is coaxially connected to the screw rod through a clutch component.

[0014] Preferably, the limiting component includes a control rod movably penetrating through the partition. Elastic discs are arranged at both ends of the control rod and respectively detect the internal pressures of the feeding chamber and the buffer chamber. A limiting fork is fixedly arranged on the control rod, and a convex block matching the limiting fork is arranged on the displacement part.

[0015] Preferably, the clutch assembly includes a clutch groove formed in the partition. A first sprocket and a second sprocket that mesh with each other are rotatably arranged in the clutch groove. The first sprocket is coaxially and fixedly connected to the output end of the motor, the second sprocket is synchronously rotatably connected to the screw rod, and a collar that fits against the inner wall of the clutch groove is connected to the side of the second sprocket away from the first sprocket through an elastic member.

[0016] A coating method based on the chain-type local coating equipment includes: the battery cells are driven by the transmission assembly to continuously pass through the feeding chamber, the buffer chamber, the process chamber, and the discharging chamber with the back facing up. The first heating element heats the inside of the process chamber and the battery cells passing through the process chamber to the reaction temperature. The gas supply pipeline sends the reaction gas into the process chamber. When the battery cells pass below the excitation unit, the excitation unit is powered on to excite the reaction gas between it and the battery cells to achieve coating.

[0017] In the above technical solution, the beneficial effects of the present invention are:

[0018] In the chain-type local coating equipment, by arranging a plurality of excitation units, after being heated to the reaction temperature in the process chamber by the first heating element and after the reaction gas is filled into the process chamber by the gas supply pipeline, the battery cells enter the process chamber. When passing below the excitation unit, the excitation unit is powered on to excite the reaction gas between it and the battery cells to achieve local coating. Since the plurality of excitation units are set with different operating frequencies, sizes, and positions, local coating at different positions can be achieved, and different film thicknesses and refractive indexes can be modulated in the corresponding regions, and thus different strip colors can be presented.

[0019] It should be understood that the foregoing general description and the following detailed description are merely exemplary and explanatory and are not intended to limit the present disclosure.

[0020] This application document provides an overview of various implementations or examples of the technology described in the present disclosure and does not represent the full scope of the disclosed technology or a comprehensive disclosure of all features. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required in the embodiments. Obviously, the drawings in the following description are only some embodiments recorded in the present invention, and those of ordinary skill in the art can also obtain other drawings based on these drawings.

[0022] Figure 1 It is a schematic diagram of the overall structure provided by an embodiment of the present invention;

[0023] Figure 2 It is a schematic diagram of the excitation unit structure provided by an embodiment of the present invention;

[0024] Figure 3Schematic front - view sectional structure provided by an embodiment of the present invention;

[0025] Figure 4 Schematic front - view sectional structure at the control rod provided by an embodiment of the present invention;

[0026] Figure 5 Provided by an embodiment of the present invention Figure 4 Enlarged structure schematic diagram of position A;

[0027] Figure 6 Schematic side - view sectional structure provided by an embodiment of the present invention;

[0028] Figure 7 Provided by an embodiment of the present invention Figure 6 Enlarged structure schematic diagram of position B;

[0029] Figure 8 Schematic top - view sectional structure provided by an embodiment of the present invention;

[0030] Figure 9 Provided by an embodiment of the present invention Figure 8 Enlarged structure schematic diagram of position C;

[0031] Figure 10 Schematic structure diagram of the driving component provided by an embodiment of the present invention;

[0032] Figure 11 Provided by an embodiment of the present invention Figure 10 Enlarged structure schematic diagram of position D;

[0033] Figure 12 Schematic structure diagram of the limiting component provided by an embodiment of the present invention.

[0034] Explanation of reference numerals:

[0035] 1, reaction chamber; 2, feed chamber; 3, buffer chamber; 4, process chamber; 5, discharge chamber; 6, gate; 7, first heating element; 8, gas supply pipeline; 9, second heating element; 10, roller rod; 11, convex ring; 12, partition; 13, screw; 14, displacement member; 15, connecting rod; 16, motor; 17, control rod; 18, elastic disc; 19, limiting fork; 20, convex block; 21, clutch groove; 22, first sprocket; 23, second sprocket; 24, elastic member; 25, sleeve ring; 26, functional cavity; 27, tension plate; 28, airbag; 29, shunt pipe; 30, one - way pipe; 31, linkage ring; 32, linkage member; 33, sliding groove; 34, sliding pin; 35, excitation unit. Detailed implementation manners

[0036] To make the objectives, technical solutions, and advantages of the embodiments of the present disclosure clearer, the technical solutions of the embodiments of the present disclosure will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present disclosure. Apparently, the described embodiments are only a part rather than all of the embodiments of the present disclosure. All other embodiments obtained by those of ordinary skill in the art based on the described embodiments of the present disclosure without creative efforts shall fall within the scope of protection of the present disclosure.

[0037] Please refer to Figure 1-12 , a chain-type local coating device and a coating method provided by an embodiment of the present invention, including a reaction chamber 1 and a transmission component. An inlet chamber 2, a buffer chamber 3, a process chamber 4, and an outlet chamber 5 are sequentially arranged in the reaction chamber 1 along the direction of conveying the battery wafers by the transmission component. Gates 6 are arranged in front of and behind each chamber. The device further includes: a first heating element 7, which is arranged in the process chamber 4; a gas supply pipeline 8, whose exhaust end is arranged in the process chamber 4 for conveying reaction gas into the process chamber 4; a plurality of excitation units 35, which are distributed in the width direction in the process chamber 4; when the front end of the battery wafer conveyed by the conveying component passes below the excitation unit 35, the excitation unit 35 is powered on to excite the reaction gas between it and the battery wafer to achieve coating.

[0038] Specifically, the reaction chamber 1 is of a closed structure, with openings only provided between the chambers. The gate 6 is used to control the on-off of the openings, and the gate 6 blocks the openings to make each chamber independently sealed; a position sensor for detecting the position of the battery wafer is integrated in each chamber, and the transmission component is adapted to the position sensor. When the battery wafer reaches a specified position in each chamber, the corresponding part of the transmission component inside each chamber stops conveying the battery wafer; a vacuum pump is arranged outside the reaction chamber 1, and the vacuum pump is connected to each chamber through an external pipeline for controlling the vacuum pumping operation of each chamber. A nitrogen pump is also arranged outside the reaction chamber 1, and the nitrogen pump is connected to each chamber through another external pipeline for controlling the nitrogen filling operation of each chamber; the first heating element 7 is preferably a heating resistance wire, which is distributed in an S shape on the inner top surface of the process chamber 4; the gas supply pipeline 8 is provided with another exhaust end connected to the inside of the buffer chamber 3; the excitation unit 35 is preferably 1 to 6; the distance between the lower edge of the excitation unit 35 and the battery wafer passing below it is set to 0.5 to 3 mm, meeting the requirements of the coating reaction.

[0039] The following specifically describes the internal pressure control process of each cavity: First, each gate 6 remains closed. The buffer cavity 3 is evacuated, filled with nitrogen gas, and the pressure is brought to between 100 and 400 Pa. The process cavity 4 is evacuated, filled with reaction gas, and the pressure is brought to between 100 and 400 Pa. Then, the conveyance of the battery wafers begins. Before the battery wafers enter the feeding cavity 2, the feeding cavity 2 is first filled with nitrogen gas to break the vacuum, and the pressure is brought to one atmospheric pressure. The gate 6 outside the feeding cavity 2 is opened. After the battery wafers are sent into the feeding cavity 2, the gate 6 outside the feeding cavity 2 is closed again. Next, the feeding cavity 2 is evacuated and filled with nitrogen gas. The nitrogen gas filled makes the pressure in the feeding cavity 2 reach between 100 and 400 Pa, which is the same as the pressure in the buffer cavity 3. Then, the gate 6 between the feeding cavity 2 and the buffer cavity 3 is opened, and the battery wafers are sent into the buffer cavity 3. The gate 6 between the feeding cavity 2 and the buffer cavity 3 is closed again. Then, the buffer cavity 3 is evacuated and filled with reaction gas. The reaction gas filled makes the pressure in the buffer cavity 3 reach between 100 and 400 Pa, which is the same as the pressure in the process cavity 4, and the flow rates of the reaction gases filled in the buffer cavity 3 and the process cavity 4 are the same. Then, the gate 6 between the buffer cavity 3 and the process cavity 4 is opened, and the battery wafers are sent into the process cavity 4. The gate 6 between the buffer cavity 3 and the process cavity 4 is closed. Reaction gas is introduced into the process cavity 4, and the pressure is maintained between 100 and 400 Pa. In addition, according to the different coatings, the reaction gas introduced can be silane + ammonia gas, or silane + nitrous oxide, or silane + ammonia gas + nitrous oxide. When the front end of the battery wafer is transmitted below the excitation unit 35, the excitation unit 35 is powered on to excite the reaction gas between it and the battery wafer to achieve local coating. Since multiple excitation units 35 are set with different operating frequencies, sizes, and positions, local coating at different positions can be achieved, and different film thicknesses and refractive indices can be modulated in the corresponding areas, and thus different strip colors can be presented. Then, after the battery wafers are coated in the process cavity 4, the discharging cavity 5 is first evacuated and reaction gas is introduced to make the pressure in the discharging cavity 5 the same as that in the process cavity 4. The gate 6 between the process cavity 4 and the discharging cavity 5 is opened. After the battery wafers are sent into the discharging cavity 5, the gate 6 between the process cavity 4 and the discharging cavity 5 is closed. The discharging cavity 5 is evacuated again and filled with nitrogen gas to make the pressure in the discharging cavity 5 reach one atmospheric pressure. Finally, the gate 6 outside the discharging cavity 5 is opened, and the battery wafers are sent out from the discharging cavity 5.

[0040] Compared with the prior art, a chain-type local coating device proposed in an embodiment of the present invention heats up to a reaction temperature in a process chamber 4 by setting a plurality of excitation units 35. After a reaction gas is filled into the process chamber 4 through a gas supply pipeline 8, a battery cell enters the process chamber 4. When passing below the excitation unit 35, the excitation unit 35 is powered on to excite the reaction gas between it and the battery cell to achieve local coating. Since the plurality of excitation units 35 are set with different operating frequencies, sizes and positions, local coating at different positions can be realized, and different film thicknesses and refractive indices can be modulated in corresponding regions, and then different strip colors can be presented.

[0041] As a preferred technical solution of this embodiment, a second heating element 9 is provided on the inner top surface of the buffer chamber 3 close to the process chamber 4. Specifically, the second heating element 9 is preferably an infrared lamp tube, and the infrared lamp tube preheats the battery cell in the buffer chamber 3 to make the temperature of the battery cell reach 180-400°C.

[0042] As a preferred technical solution of this embodiment, the excitation unit 35 includes 2-10 pairs of intersecting metal sheets and a radio frequency power supply. The metal sheets are respectively an anode metal sheet and a cathode metal sheet. The anode metal sheet is connected to the positive pole of the radio frequency power supply, and the cathode metal sheet is connected to the negative pole of the radio frequency power supply. The distance between adjacent anode metal sheets and cathode metal sheets is set to 5-15 mm. Specifically, the metal sheets are preferably 20-100 mm long, 10-30 mm wide and 0.5-2 mm thick; the number of metal sheets is between 3 and 30, and is adaptively adjusted according to the width of the local coating area; the operating frequency of the radio frequency power supply is preferably between 10KHZ and 400KHz. In actual use, when the front end of the battery cell is transported below the metal sheet, the radio frequency power supply is connected to supply power, and the reaction gas is excited between the anode metal sheet and the cathode metal sheet and in the nearby area to form a plasma, generating charged reaction gas functional groups. These charged reaction gas functional groups are adsorbed on the back surface of the battery cell, and a thin film is formed by reaction and deposited.

[0043] As a preferred technical solution of this embodiment, the transmission assembly includes a plurality of roller rods 10 arranged at intervals. Two convex rings 11 are symmetrically arranged on the roller rods 10 for supporting the battery cell. Specifically, the roller rods 10 and the convex rings 11 are preferably made of ceramic materials to support the edge of the battery cell and avoid scratching the surface of the battery cell.

[0044] In another embodiment proposed by the present invention, a partition 12 is provided between the feed chamber 2 and the buffer chamber 3. A driving assembly for driving the gate 6 between the feed chamber 2 and the buffer chamber 3 to lift and lower is provided inside the partition 12. A limiting assembly is provided on the partition 12. When there is a large pressure difference between the feed chamber 2 and the buffer chamber 3, the limiting assembly restricts the driving assembly from driving the gate 6 to rise. Specifically, the partition 12 is used to separate the feed chamber 2 and the buffer chamber 3. When the corresponding gate 6 is closed, it ensures that the feed chamber 2 and the buffer chamber 3 are independent and sealed cavities; preferably, structures similar to the partition 12 are provided outside the feed chamber 2, between the buffer chamber 3 and the process chamber 4, between the process chamber 4 and the discharge chamber 5, and outside the discharge chamber 5; the driving assembly is controlled by a servo system to drive the corresponding gate 6 to lift and lower; since the pressure in the buffer chamber 3 is always controlled between 100 and 400 Pa, and the pressure in the feed chamber 2 will switch between one atmospheric pressure and the pressure matching that in the buffer chamber 3, in order to prevent the gate 6 from opening when the pressure in the feed chamber 2 is not adjusted to match that in the buffer chamber 3, a limiting assembly is provided, which can detect the pressure difference between the feed chamber 2 and the buffer chamber 3. When there is a large pressure difference between the feed chamber 2 and the buffer chamber 3, the limiting function can be maintained to restrict the driving assembly from driving the gate 6 to rise, thereby playing a protective role and avoiding the adverse effects brought by the pressure difference to the battery sheet processing process.

[0045] As a preferred technical solution of this embodiment, the driving assembly includes a screw 13 rotatably provided inside the partition 12. A displacement member 14 is threadedly sleeved on the screw 13. The displacement member 14 is movably connected to the upper end of the gate 6 through a connecting rod 15. A motor 16 is installed on the reaction chamber 1. The output end of the motor 16 is coaxially connected to the screw 13 through a clutch assembly. Specifically, a receiving cavity matching the gate 6 is provided inside the partition 12. The screw 13 is rotatably provided in the receiving cavity and is horizontally arranged in the length direction corresponding to the gate 6; the displacement member 14 is preferably rectangular and only slides along the axial direction of the screw 13 in the receiving cavity; preferably, there are two displacement members 14, which are symmetrically arranged above the gate 6; connecting ears are provided at both the upper end of the gate 6 and the lower end of the displacement member 14. Both ends of the connecting rod 15 are hinged to the connecting ears on the gate 6 and the displacement member 14 respectively; when there are two displacement members 14, the external thread of the screw 13 can be set to a single helix and threadedly penetrate and connect the two displacement members 14. At this time, the two displacement members 14 move in the same direction to simultaneously apply force to drive the gate 6. Further, the external thread of the screw 13 can be set to have opposite helix directions at both ends and respectively threadedly penetrate and connect the two displacement members 14. At this time, the two displacement members 14 move in opposite directions to simultaneously apply force to drive the gate 6, and the force application is more balanced. The clutch assembly is used to prevent the motor 16 from directly driving the screw 13 when the driving assembly is restricted, protecting the motor 16.

[0046] As a preferred technical solution of this embodiment, the limiting component includes a control rod 17 movably penetrating through the partition 12. Elastic discs 18 are arranged at both ends of the control rod 17 to detect the internal pressures of the feeding chamber 2 and the buffer chamber 3 respectively. A limiting fork 19 is fixedly arranged on the control rod 17, and a convex block 20 matching the limiting fork 19 is arranged on the displacement member 14. Specifically, the control rod 17 horizontally penetrates through the partition 12, and the control rod 17 is connected to the center of the elastic disc 18. Grooves matching the elastic discs 18 are formed on two opposite side walls of the partition 12. When there is no pressure difference between the feeding chamber 2 and the buffer chamber 3, both elastic discs 18 are flush with the outer wall of the corresponding partition 12. At this time, the control rod 17 drives the limiting fork 19 out of the range where the displacement member 14 can drive the convex block 20 to move, and the driving component can freely drive the gate 6 to lift and lower. When the pressure in the feeding chamber 2 is not sufficiently reduced after vacuum pumping and nitrogen filling, the pressure in the feeding chamber 2 is greater than the pressure in the buffer chamber 3. Then, the centers of both elastic discs 18 bulge towards the buffer chamber 3, thereby driving the control rod 17 to move. When the gate 6 remains closed, the control rod 17 drives the limiting fork 19 to be able to be clamped on the upper convex block 20 of the displacement member 14 at this time, thereby restricting the movement of the displacement member 14 and preventing the gate 6 from being opened, playing a protective role.

[0047] As a preferred technical solution of this embodiment, the clutch component includes a clutch groove 21 formed in the partition 12. A first sprocket 22 and a second sprocket 23 that mesh with each other are rotatably arranged in the clutch groove 21. The first sprocket 22 is coaxially and fixedly connected to the output end of the motor 16, and the second sprocket 23 is synchronously rotationally connected to the screw rod 13. A collar 25 that fits against the inner wall of the clutch groove 21 is connected to the side of the second sprocket 23 away from the first sprocket 22 through an elastic member 24. Specifically, the clutch groove 21 is arranged near the connection between the screw rod 13 and the motor 16. One end of the screw rod 13 is coaxially and rotationally connected to the first sprocket 22. The first sprocket 22 and the second sprocket 23 are meshed through teeth, and the meshing surface of the teeth is a wedge-shaped mating surface. A keyway is arranged on the screw rod 13, and a matching key block is arranged on the inner side of the second sprocket 23, whereby the second sprocket 23 rotates synchronously with the screw rod 13, and the second sprocket 23 can move axially along the screw rod 13. The elastic member 24 is preferably a spring and is sleeved outside the screw rod 13. The elastic member 24 keeps pushing the second sprocket 23 to keep the first sprocket 22 and the second sprocket 23 in close meshing. The collar 25 is used to fit and move against the inner wall of the clutch groove 21. When the displacement member 14 is not restricted by the limiting component and moves, driven by the motor 16, the first sprocket 22 and the second sprocket 23 can stably transmit power to drive the screw rod 13 to rotate synchronously. When the displacement member 14 is restricted by the limiting component and the screw rod 13 cannot rotate, the motor 16 drives the first sprocket 22 and the second sprocket 23 to rotate relatively. Under the combined action of the wedge-shaped extrusion of the teeth and the elasticity of the elastic member 24, the second sprocket 23 makes a reciprocating movement axially relative to the first sprocket 22 along the screw rod 13, thereby not restricting the rotation of the motor 16 and protecting the motor 16.

[0048] As a preferred technical solution of this embodiment, a functional cavity 26 is provided inside the reaction chamber 1 entity corresponding to the side wall of the feed cavity 2. A tension plate 27 is rotatably arranged in the functional cavity 26. An airbag 28 is connected between the tension plate 27 and the inner wall of the functional cavity 26. One end of the airbag 28 is connected with a shunt pipe 29. Two one-way pipes 30 are arranged on the shunt pipe 29. The two shunt pipes 29 are respectively communicated with the outside of the reaction chamber 1 and the inside of the feed cavity 2. A linkage ring 31 is sleeved outside the second sprocket 23. A linkage member 32 is fixedly arranged on the linkage ring 31. A sliding groove 33 is arranged on the linkage member 32. One end of the tension plate 27 far from its rotating shaft is provided with a sliding pin 34 slidably connected with the sliding groove 33. Specifically, when the airbag 28 freely contracts, it is in a flat shape. The flat two side walls of the airbag 28 are respectively attached and connected to the inner wall of the functional cavity 26 and the tension plate 27. The rotation of the tension plate 27 can control the inflation and deflation of the airbag 28. Two one-way valves are integrated in the shunt pipe 29 and are respectively connected to the two one-way pipes 30. The ventilation direction of the one-way pipe 30 communicating with the outside of the reaction chamber 1 is from the inside of the airbag 28 to the outside of the reaction chamber 1, and the ventilation direction of the one-way pipe 30 communicating with the inside of the feed cavity 2 is from the inside of the feed cavity 2 to the inside of the airbag 28. The linkage ring 31 is coaxial with the second sprocket 23. The linkage ring 31 does not affect the rotation of the second sprocket 23 and can move synchronously along the axial direction of the screw rod 13 with the second sprocket 23. The arrangement of the sliding groove 33 and the sliding pin 34 enables the movement of the linkage ring 31 driving the linkage member 32 to drive the tension plate 27 to rotate and avoids interference. In the actual use of this technical solution, when the pressure in the feed cavity 2 is greater than the pressure in the buffer cavity 3 and the motor 16 is started and the gate 6 between the feed cavity 2 and the buffer cavity 3 needs to be opened, due to the action of the limit component, the displacement member 14 restricted by it cannot move, and the screw rod 13 cannot rotate. At this time, the motor 16 drives the first sprocket 22 to rotate, and then rotates relative to the second sprocket 23, promoting the second sprocket 23 to move reciprocally along the axial direction of the screw rod 13. Therefore, the second sprocket 23 drives the linkage member 32 to move through the linkage ring 31, and the linkage member 32 drives the tension plate 27 to rotate reciprocally through the sliding groove 33 and the sliding pin 34 to repeatedly tension and squeeze the airbag 28. Then, when the airbag 28 is tensioned, the airbag 28 extracts the gas in the feed cavity 2 through one of the one-way pipes 30, and when the airbag 28 is squeezed, the airbag 28 discharges the gas to the outside of the reaction chamber 1 through the other one-way pipe 30. Thus, the pressure in the feed cavity 2 is automatically adjusted and reduced. Finally, when the pressures in the feed cavity 2 and the buffer cavity 3 are close or the same, the limit component cancels the limit on the displacement member 14, and then the screw rod 13 resumes free rotation. At this time, the first sprocket 22 and the second sprocket 23 resume the engaged state, and the motor 16 can normally drive the screw rod 13 to rotate to realize the upward opening of the gate 6. The above realizes that before the specified gate 6 is opened, the pressure in the feed cavity 2 can be automatically adjusted, reducing manual intervention, improving automation, and ensuring the use safety.

[0049] In addition, the control of the gate 6 between the process chamber 4 and the discharge chamber 5 can also adopt the same structure as the above-mentioned driving component and limiting component to achieve the protection function. Other gates 6 can adopt the electric drive mode under the control of a conventional servo system.

[0050] A coating method, which is based on the above-mentioned chain-type local coating equipment, includes: the battery cells are driven by the transmission component and continuously pass through the feeding chamber 2, the buffer chamber 3, the process chamber 4 and the discharge chamber 5 with the back facing up. The first heating element 7 heats the inside of the process chamber 4 and the battery cells passing through the process chamber 4 to the reaction temperature. The gas supply pipeline 8 sends the reaction gas into the process chamber 4. When the battery cells pass under the excitation unit 35, the excitation unit 35 is powered on to excite the reaction gas between it and the battery cells to achieve coating.

[0051] Only some exemplary embodiments of the present invention have been described above by way of illustration. Undoubtedly, for those of ordinary skill in the art, the described embodiments can be modified in various different ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and description are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A chain-type localized coating device, comprising a reaction chamber (1) and a transmission component, wherein a feed chamber (2), a buffer chamber (3), a process chamber (4) and a discharge chamber (5) are sequentially arranged in the reaction chamber (1) along the direction in which the transmission component conveys the cell, and gates (6) are arranged at the front and rear of each chamber, characterized in that: Also includes: A first heating element (7) disposed in the process chamber (4); A gas supply pipeline (8), the exhaust end of which is arranged in the process chamber (4) and is used to transport reaction gas into the process chamber (4); A plurality of excitation units (35) are provided and distributed in the width direction in the process chamber (4); when the front end of the cell is transported by the transmission component and passes under the excitation unit (35), the excitation unit (35) is energized to excite the reaction gas between the excitation unit and the cell to achieve film coating; A baffle (12) is provided between the feed chamber (2) and the buffer chamber (3), a driving component for driving the gate (6) between the feed chamber (2) and the buffer chamber (3) to rise and fall is provided in the baffle (12), and a limiter component is provided on the baffle (12), and the limiter component limits the driving component from driving the gate (6) to rise when a large pressure difference exists between the feed chamber (2) and the buffer chamber (3); The driving assembly comprises a screw (13) rotatably arranged in the baffle (12), a displacement member (14) being threadedly sleeved on the screw (13), the displacement member (14) being movably connected to the upper end of the gate (6) via a connecting rod (15), a motor (16) being installed on the reaction chamber (1), and an output end of the motor (16) being coaxially connected to the screw (13) via a clutch assembly; The limit assembly comprises a control rod (17) movably arranged on the baffle (12), elastic disks (18) are arranged at both ends of the control rod (17) and respectively detect the internal pressure of the feed chamber (2) and the buffer chamber (3), a limit fork (19) is fixedly arranged on the control rod (17), and a protrusion (20) matching the limit fork (19) is arranged on the displacement member (14); when the pressure in the feed chamber (2) is greater than the pressure in the buffer chamber (3), the centers of the two elastic disks (18) both protrude in the direction of the buffer chamber (3), thereby driving the control rod (17) to move, and when the gate (6) remains closed, the control rod (17) drives the limit fork (19) to be embedded in the protrusion (20), thereby limiting the movement of the displacement member (14) and preventing the gate (6) from opening.

2. The chain-type local coating device according to claim 1, characterized in that: A second heating element (9) is provided on the top surface of the buffer chamber (3) close to the process chamber (4).

3. The chain-type local coating equipment according to claim 1, characterized in that: The distance between the lower edge of the excitation unit (35) and the battery sheet passing below it is set to 0.5-3 mm.

4. The chain-type local coating device according to claim 1, characterized in that: The excitation unit (35) comprises 2 to 10 pairs of mutually intersecting metal sheets and a radio frequency power supply, wherein the metal sheets are respectively an anode metal sheet and a cathode metal sheet, wherein the anode metal sheet is connected to the positive electrode of the radio frequency power supply, and the cathode metal sheet is connected to the negative electrode of the radio frequency power supply, and the distance between adjacent anode metal sheets and cathode metal sheets is set to 5 to 15 mm.

5. The chain-type local coating equipment according to claim 1, characterized in that: The transmission assembly comprises a plurality of rollers (10) arranged at intervals, and two convex rings (11) are symmetrically arranged on the rollers (10) for supporting the battery sheets.

6. The chain-type local coating equipment according to claim 1, characterized in that: The clutch assembly comprises a clutch groove (21) provided in a baffle (12), wherein a first toothed disc (22) and a second toothed disc (23) which mesh with each other are rotatably arranged in the clutch groove (21), wherein the first toothed disc (22) is coaxially fixedly connected to an output end of a motor (16), and the second toothed disc (23) is rotatably connected to a screw rod (13), and a collar (25) which is attached to an inner wall of the clutch groove (21) is connected to the side of the second toothed disc (23) away from the first toothed disc (22) via an elastic member (24).

7. A coating method, based on the chain-type local coating device according to any one of claims 1 to 6, characterized in that: include: Driven by the transmission component, the cell passes through the feed chamber (2), the buffer chamber (3), the process chamber (4) and the discharge chamber (5) in succession with the back side facing upward; the first heating element (7) heats the interior of the process chamber (4) and the cell passing through the process chamber (4) to a reaction temperature; the gas supply pipeline (8) delivers the reaction gas into the process chamber (4); when the cell passes under the excitation unit (35), the excitation unit (35) is energized to excite the reaction gas between it and the cell to achieve coating.

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