A production tool for a diaphragm under-pressing block sealing gasket

Abstract

The application relates to the field of valve body sealing tooling for semiconductor equipment, and discloses a diaphragm lower pressing block sealing gasket production tooling which comprises a lower pressing column, a lower pressing mechanism and a lower pressing linkage mechanism; the lower pressing column is located in a fixed ring fixed with a rack and is connected with a hydraulic machine, and the lower pressing column is provided with downward power by the hydraulic machine; the lower pressing linkage mechanism is arranged on the lower pressing column and cooperates with the lower pressing column to transmit the lower pressing power to the lower pressing mechanism; one end of the lower pressing mechanism is connected with the lower pressing linkage mechanism and the outer side of the lower end of the lower pressing column, and the other end can contact with the sealing gasket; wherein, the sealing gasket and the positioning shaft are sequentially pressed into the groove of the diaphragm lower pressing block and the blind hole at the top of the sealing gasket by the cooperation of the lower pressing linkage mechanism and the lower pressing column. The application can realize two sectional pressing processes in the sealing head assembling process at one time, the tooling does not need to be disassembled and replaced, and the assembling efficiency is effectively improved.

Description

Technical Field

[0001] This invention relates to the field of valve body sealing fixture technology for semiconductor devices, and in particular to a manufacturing fixture for a diaphragm pressure block sealing gasket of a gas cylinder valve. Background Technology

[0002] During operation, the cylinder valve opens and closes by pressing down the valve seat with the sealing gasket 202 of the diaphragm pressure block sealing head. Traditionally, the sealing gasket 202 is directly inserted into the groove of the diaphragm pressure block 201 with an interference fit. However, due to the thickness, width, and material requirements of the sealing gasket 202, it is difficult to fit it into the groove of the diaphragm pressure block 201. To facilitate the insertion of the sealing gasket 202 into the diaphragm pressure block 201, a blind hole can be made in the center of the sealing gasket 202 to allow for a retractable insertion. Then, the positioning shaft 203 is interference-fitted into the blind hole, achieving a full interference fit between the sealing gasket 202 and the diaphragm pressure block 201 and facilitating installation. To prevent the sealing gasket 202 from detaching from the positioning shaft 203, a wavy sealing texture can be provided between them.

[0003] Therefore, when producing the aforementioned diaphragm lower pressure block sealing head 200, the diaphragm lower pressure block 201, sealing gasket 202, and positioning shaft 203 must be assembled in a strict sequential order. When installing the diaphragm lower pressure block 201 and sealing gasket 202, a larger radius pressing tool is needed to press the sealing gasket 202 into the diaphragm lower pressure block 201, and then a smaller tool is used to press the positioning shaft 203 into the sealing gasket 202. Using these two toolings requires the hydraulic press to be used, disassembled, replaced, and aligned once each, significantly reducing production efficiency.

[0004] Therefore, how to achieve the segmented push-in of the above two steps in one go is a technical problem that urgently needs to be solved. Summary of the Invention

[0005] To address the aforementioned problems, the present invention aims to provide a diaphragm under-pressure block sealing gasket production tooling that can realize the two segmented pressing processes in the sealing head assembly process in one go, without the need to disassemble and replace the tooling, thus effectively improving assembly efficiency.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a diaphragm pressing block sealing gasket production fixture, comprising: a pressing column, a pressing mechanism, and a pressing linkage mechanism; the pressing column is located within a fixed ring fixed to the frame and connected to a hydraulic press, which provides downward power to the pressing column; the pressing linkage mechanism is disposed on the pressing column and cooperates with the pressing column to transmit the pressing power to the pressing mechanism; one end of the pressing mechanism is connected to the outer side of the lower end of the pressing linkage mechanism and the pressing column, and the other end can contact the sealing gasket; wherein, the pressing linkage mechanism and the pressing column cooperate to sequentially press the sealing gasket and the positioning shaft into the groove of the diaphragm pressing block and the blind hole at the top of the sealing gasket, respectively.

[0007] Furthermore, the downward linkage mechanism includes a guide sleeve, a guide pin, a guide rod, and a spring; Multiple guide rods are provided, spaced apart on the lower circumference of the pressure column; each guide rod has an L-shaped structure, with its first end fixed to the circumference of the pressure column and its second end connected to the pressure mechanism, so that the pressure column drives the pressure mechanism to move via the guide rod. Multiple springs are provided, corresponding to the number of guide rods and closely adjacent to the guide rods; one end of each spring rests against the circumference of the pressing column, or is fixed to the circumference of the pressing column, and the other end is connected to the pressing mechanism via a guide sleeve and a guide pin.

[0008] Furthermore, the downward linkage mechanism also includes a downward pressure ring and a connecting column; The pressure ring is circumferentially arranged around the pressure column. Multiple connecting columns are spaced apart at the bottom of the pressure ring. The ends of the connecting columns are connected to the guide pin bearings, or the ends of the connecting columns are provided with holes for configuring the guide pins. The guide sleeve and the pressure mechanism are connected by guide pins.

[0009] Furthermore, the second end of the guide rod is provided with an elongated hole; one end of the guide pin is connected to the connecting column bearing, and the other end passes through the elongated hole, the guide sleeve and the pressing mechanism in sequence.

[0010] Furthermore, the pressing mechanism includes a first rocker arm, a third rocker arm, and a pressure block; The first end of the first swing arm is hinged to the bottom end of the lower pressure column in the circumferential direction, and the second end of the first swing arm is provided with a pressure block to drive the pressure block to press the sealing gasket into the lower pressure block of the diaphragm; The first end of the third pendulum rod passes through the guide sleeve and the spring and is hinged to the lower pressure column. The second end of the third pendulum rod is hinged to the middle of the first pendulum rod.

[0011] Furthermore, the second end of the first pendulum is hinged to the end of the pressure block, and the end of the pressure block is located outside the hinge point between the lower pressure column and the first pendulum.

[0012] Furthermore, the first pendulum rod and the pressure block are fixedly connected, and there is an included angle between the pressure block and the second end of the first pendulum rod.

[0013] Furthermore, the third swing arm of the L-shaped structure is a one-piece molded structure, or the third swing arm of the L-shaped structure is formed by two straight rods hinged together.

[0014] Furthermore, the pressing mechanism also includes a second swing arm; The first end of the second pendulum and the second end of the third pendulum are hinged together in the middle of the first pendulum, and the second and third pendulums are staggered. The second end of the second pendulum is movably connected to the inner wall of the fixed ring.

[0015] Furthermore, it also includes a pressure pin; a screw hole is provided on the side wall of the lower pressure column, and the screw hole is located on the upper part of the guide rod; a connecting hole corresponding to the screw hole is opened on the side wall of the fixing ring; the pressure pin passes through the connecting hole and is threaded into the screw hole.

[0016] The present invention has the following advantages due to the adoption of the above technical solutions: This invention utilizes a pressing column, a pressing mechanism, and a pressing linkage mechanism. A hydraulic press drives the pressing column downward, and the downward pressure is transmitted to the pressing mechanism via the pressing linkage mechanism. The downward pressure and the spring force in the pressing mechanism sequentially press the sealing gasket and the positioning shaft into the groove of the diaphragm pressing block and the blind hole at the top of the sealing gasket, respectively. This allows for the simultaneous completion of two segmented pressing processes in the sealing head assembly, eliminating the need to disassemble or replace tooling and effectively improving assembly efficiency. Attached Figure Description

[0017] Figure 1 This is a three-dimensional sectional view of the diaphragm lower pressure block sealing gasket production tooling in an embodiment of the present invention; Figure 2 yes Figure 1 Top view; Figure 3 This is a first-state front sectional view of the diaphragm lower pressure block sealing gasket production tooling in an embodiment of the present invention; Figure 4 yes Figure 3 A magnified view of a portion of the image; Figure 5 This is a second-state front sectional view of the diaphragm lower pressure block sealing gasket production tooling in an embodiment of the present invention; Figure 6 yes Figure 5 A magnified view of a portion of the image; Figure label: 100-Fixed seat; 200-Diaphragm lower pressure block sealing head; 201-Diaphragm lower pressure block; 202-Sealing gasket; 203-Positioning shaft; 210-First rocker arm; 211-Pressure block; 220-Second rocker arm; 230-Third rocker arm; 240-Guide sleeve; 241-Guide pin; 250-Guide rod; 251-Elongated hole; 260-Lower pressure ring; 261-Connecting post; 270-Spring; 300-Fixed ring; 310-Pressure pin; 301-Connecting hole; 400-Lower pressure post; 401-Screw hole. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the described embodiments of the present invention are within the scope of protection of the present invention.

[0019] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0020] In one embodiment of the present invention, a tooling for producing a diaphragm underblock sealing gasket is provided. In this embodiment, as shown... Figures 1 to 5 As shown, the tooling includes: a pressing column 400, a pressing mechanism, and a pressing linkage mechanism; The downward pressure column 400 is located inside the fixing ring 300 fixed to the frame and is connected to the hydraulic press, which provides downward power to the downward pressure column 400. The downward linkage mechanism is set on the downward column 400 and cooperates with the downward column 400 to transmit the downward power to the downward mechanism; The pressing mechanism has one end connected to the lower outer side of the pressing linkage mechanism and the pressing column 400, and the other end can contact the sealing gasket 202. The pressing linkage mechanism, in conjunction with the pressing column 400, sequentially presses the sealing gasket 202 and the positioning shaft 203 into the groove of the diaphragm pressing block 201 and the blind hole at the top of the sealing gasket 202, respectively.

[0021] In the above embodiment, the pressing linkage mechanism includes a guide sleeve 240, a guide pin 241, a guide rod 250, a pressing ring 260, a connecting post 261, and a spring 270. Wherein: Multiple guide rods 250 are provided and spaced apart on the lower circumference of the pressing column 400. Each guide rod 250 has an L-shaped structure, with its first end fixed to the circumference of the pressing column 400 and its second end connected to the pressing mechanism, so that the pressing column 400 drives the pressing mechanism to move through the guide rods 250. Multiple springs 270 are provided, corresponding to the number of guide rods 250 and closely adjacent to the guide rods 250; one end of each spring 270 abuts against the circumference of the pressing column 400 or is fixed to the circumference of the pressing column 400, and the other end is connected to the pressing mechanism via the guide sleeve 240. The pressure ring 260 is circumferentially arranged around the pressure column 400. Multiple connecting columns 261 are circumferentially spaced at the bottom of the pressure ring 260. The end of the connecting column 261 is connected to the guide pin 241 by a bearing, or the end of the connecting column 261 is provided with a hole for arranging the guide pin 241. The connection between the connecting column 261 and the guide pin 241 is realized through the hole. The guide sleeve 240 and the pressure mechanism are connected by the guide pin 241 so that the pressure mechanism moves up and down along the guide rod 250 under the drive of the guide pin 241.

[0022] In this embodiment, the second end of the guide rod 250 is provided with an elongated hole 251. One end of the guide pin 241 is connected to the bearing of the connecting column 261, and the other end passes through the elongated hole 251, the guide sleeve 240 and the pressing mechanism in sequence.

[0023] In use, when the pressing column 400 drives the guide rod 250 to move downward, the guide pin 241 moves along the elongated hole 251, thereby transmitting the downward power to the guide sleeve 240 and the pressing mechanism.

[0024] In the above embodiment, the pressing mechanism includes a first rocker arm 210, a third rocker arm 230, and a pressure block 211. The number of first rocker arms 210 and third rocker arms 230 is the same, and the number of third rocker arms 230 corresponds to the number of springs 270 and guide rods 250.

[0025] The first end of the first swing rod 210 is hinged to the bottom circumferential end of the lower pressure column 400, and the second end of the first swing rod 210 is provided with a pressure block 211 so as to drive the pressure block 211 to press the sealing gasket 202 into the diaphragm lower pressure block 201. The first end of the third swing arm 230 passes through the guide sleeve 240 and the spring 270 and is hinged to the lower pressure column 400. The second end of the third swing arm 230 is hinged to the middle of the first swing arm 210.

[0026] Preferably, the second end of the third rocker arm 230 is positioned in the middle of the elongated hole 251, thereby evenly distributing the elastic force of the spring 270. Alternatively, the second end of the third rocker arm 230 is positioned slightly above the middle of the elongated hole 251, which can increase the elastic force of the spring 270.

[0027] In use, the third rocker arm 230 is used to receive the elastic force of the spring 270 and the downward force transmitted by the guide pin 241 to the guide sleeve 240; when the elastic force is greater than the downward force, the third rocker arm 230 drives the first rocker arm 210 to move upward, and when the elastic force is less than the downward force, the third rocker arm 230 drives the first rocker arm 210 to move downward.

[0028] In this embodiment, the first rocker arm 210 and the pressure block 211 can be fixedly connected. In this case, there is an angle between the pressure block 211 and the second end of the first rocker arm 210, so that the pressure block 211 can be accurately and firmly pressed onto the upper surface of the sealing gasket 202. Alternatively, the first rocker arm 210 and the pressure block 211 can be movably connected, such as hinged, to flexibly adjust the contact surface between the pressure block 211 and the sealing gasket 202, making it convenient to use.

[0029] In this embodiment, the third swing arm 230 adopts an approximately L-shaped structure; the L-shaped third swing arm 230 can be a one-piece molded structure or it can be formed by two straight rods hinged together.

[0030] In this embodiment, the pressing mechanism further includes a second swing arm 220. The first end of the second swing arm 220 and the second end of the third swing arm 230 are hinged together at the middle of the first swing arm 210, and the second end of the second swing arm 220 is movably connected to the inner wall of the fixed ring 300. By setting the second swing arm 220 and cooperating with the third swing arm 230, the rotational reliability of the first swing arm 210 and its stability during pressing are effectively ensured, avoiding problems such as the first swing arm 210 tilting due to uneven force.

[0031] Preferably, the second end of the second rocker arm 220 is hinged to the inner wall of the fixed ring 300.

[0032] In the above embodiments, the diaphragm lower pressure block sealing gasket production tooling of the present invention further includes a pressure pin 310. A screw hole 401 is provided on the side wall of the lower pressure column 400, located on the upper part of the guide rod 250; a connecting hole 301 corresponding to the screw hole 401 is provided on the side wall of the fixing ring 300. This connecting hole 301 is an elongated through hole to avoid obstructing the up-and-down movement of the lower pressure column 400. The pressure pin 310 can pass through the connecting hole 301 and is threaded into the screw hole 401 to lock the spring 270. This ensures that when the lower pressure column 400 moves downward, the downward force transmitted from the guide pin 241 to the third rocker arm 230 is greater than the elastic force of the spring 270, thereby driving the first rocker arm 210 and the pressure block 211 to press down, pressing the sealing gasket 202 into the diaphragm lower pressure block 201.

[0033] When the pressure pin 310 is pulled out of the connecting hole 301 and the screw hole 401, the elastic force is greater than the downward force. At this time, the elastic force drives the third rocker arm 230 upward, which in turn flips the first rocker arm 210 upward. The pressure block 211 moves away from the sealing gasket 202, and the lower pressure column 400 continues to move downward to press the positioning shaft 203 into the sealing gasket 202.

[0034] In summary, when using this invention, the diaphragm pressing block 201 is fixed on the fixing base 100, the fixing ring 300 is fixed to the frame, and the pressing column 400 is fixed to the hydraulic press. After installation, the following steps are performed to complete the process in one go. Includes the following steps: 1) Fix the diaphragm pressing block 201 on the fixed base 100, fix the fixing ring 300 to the frame, and fix the pressing column 400 to the hydraulic press; 2) The hydraulic press drives the lower pressure column 400 to move downward, and the pressure block 211 presses the sealing gasket 202 into the diaphragm lower pressure block 201 by the elastic force of the spring 270; In another embodiment, the pressure pin 310 is screwed into the screw hole 401, and the pressure pin 310 presses down the pressure ring 260. The pressure ring 260 drives the connecting post 261 and the guide pin 241 to move downward, so that the first rocker arm 210 cannot swing. At this time, there is a downward force greater than the elastic force of the spring 270 to press the sealing gasket 202 into the diaphragm pressure block 201.

[0035] After this step is completed, the pressure pin 310 can be pulled out from the screw hole 401, which will allow the first rocker arm 210 to swing upward.

[0036] 3) The hydraulic press continues to drive the lower pressure column 400 to move downward, the guide pin 241 moves along the elongated hole 251, and the guide sleeve 240 moves along the third swing rod 230; when the guide pin 241 moves to the upper side of the midpoint of the elongated hole 251, the spring 270 drives the third swing rod 230 to swing to the upper limit position, which in turn drives the first swing rod 210 to flip up. At this time, the lower pressure column 400 presses the positioning shaft 203 down into the sealing gasket 202.

[0037] This invention uses a hydraulic press to drive the downward pressing column 400, which transmits downward pressure through the pressing column 400 via the pressing ring 260, connecting column 261, guide pin 241, third rocker arm 230, and first rocker arm 210 to the pressing block 211. The downward pressure and the elastic force of the spring 270 sequentially press the sealing gasket 202 and the positioning shaft 203 into the groove of the diaphragm pressing block 201 and the blind hole at the top of the sealing gasket 202, respectively. Therefore, this invention achieves the two-stage pressing process in the sealing head assembly in one step, eliminating the need to disassemble and replace tooling, effectively improving assembly efficiency.

[0038] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A tooling for producing a diaphragm pressure block sealing gasket, characterized in that, include: The pressing column (400), the pressing mechanism, and the pressing linkage mechanism; The pressure column (400) is located inside the fixing ring (300) fixed to the frame and is connected to the hydraulic press, which provides downward power to the pressure column (400). The downward linkage mechanism is set on the downward column (400) and cooperates with the downward column (400) to transmit the downward power to the downward mechanism; The pressing mechanism has one end connected to the outer side of the lower end of the pressing linkage mechanism and the pressing column (400), and the other end can contact the sealing gasket (202); In this process, the pressing linkage mechanism and the pressing column (400) work together to press the sealing gasket (202) and the positioning shaft (203) into the groove of the diaphragm pressing block (201) and the blind hole at the top of the sealing gasket (202) respectively. The pressing linkage mechanism includes a guide sleeve (240), a guide pin (241), a guide rod (250), and a spring (270). Multiple guide rods (250) are provided and spaced apart on the lower circumference of the pressing column (400). Each guide rod (250) has an L-shaped structure, with its first end fixed to the circumference of the pressing column (400) and its second end connected to the pressing mechanism so that the pressing column (400) can drive the pressing mechanism to move via the guide rods (250). Multiple springs (270) are provided, corresponding to the number of guide rods (250) and adjacent to the guide rods (250). One end of each spring (270) abuts against the circumference of the pressing column (400) or is fixed to the circumference of the pressing column (400), and the other end is connected to the pressing mechanism via the guide sleeve (240) and the guide pin (241). The pressing linkage mechanism also includes a pressing ring (260) and connecting posts (261); the pressing ring (260) is circumferentially arranged around the pressing post (400), and multiple connecting posts (261) are spaced apart circumferentially at the bottom of the pressing ring (260). The ends of the connecting posts (261) are connected to the guide pins (241) by bearings, or the ends of the connecting posts (261) are provided with holes for configuring the guide pins (241); and the guide sleeve (240) and the pressing mechanism are connected by the guide pins (241). The second end of the guide rod (250) is provided with an elongated hole (251); one end of the guide pin (241) is connected to the bearing of the connecting column (261), and the other end passes through the elongated hole (251), the guide sleeve (240) and the pressing mechanism in sequence; The pressing mechanism includes a first rocker arm (210), a third rocker arm (230), and a pressure block (211); the first end of the first rocker arm (210) is hinged to the bottom circumferential end of the pressing column (400), and the second end of the first rocker arm (210) is provided with a pressure block (211) to drive the pressure block (211) to press the sealing gasket (202) into the diaphragm pressing block (201); the first end of the third rocker arm (230) passes through the guide sleeve (240) and the spring (270) and is hinged to the pressing column (400), and the second end of the third rocker arm (230) is hinged to the middle of the first rocker arm (210); It also includes a pressure pin (310); a screw hole (401) is provided on the side wall of the lower pressure column (400), the screw hole (401) is located on the upper part of the guide rod (250); a connecting hole (301) corresponding to the screw hole (401) is provided on the side wall of the fixing ring (300); the pressure pin (310) passes through the connecting hole (301) and is threaded into the screw hole (401).

2. The tooling for producing the diaphragm lower pressure block sealing gasket as described in claim 1, characterized in that, The second end of the first pendulum (210) is hinged to the end of the pressure block (211), and the end of the pressure block (211) is located outside the hinge point between the lower pressure column (400) and the first pendulum (210).

3. The tooling for producing the diaphragm lower pressure block sealing gasket as described in claim 1, characterized in that, The first pendulum (210) and the pressure block (211) are fixedly connected, and there is an angle between the pressure block (211) and the second end of the first pendulum (210).

4. The diaphragm lower pressure block sealing gasket production tooling as described in claim 3, characterized in that, The third swing arm (230) of the L-shaped structure is a one-piece molded structure, or the third swing arm (230) of the L-shaped structure is formed by two straight rods hinged together.

5. The tooling for producing the diaphragm lower pressure block sealing gasket as described in claim 1, characterized in that, The pressing mechanism also includes a second rocker arm (220); The first end of the second swing arm (220) and the second end of the third swing arm (230) are hinged together in the middle of the first swing arm (210), and the second swing arm (220) and the third swing arm (230) are staggered from each other; the second end of the second swing arm (220) is movably connected to the inner wall of the fixed ring (300).

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