Transfer device and semiconductor process equipment

Abstract

The present application discloses a transfer device and semiconductor process equipment. The disclosed transfer device is used to transfer a sensor to a process position. The transfer device includes a cylinder, a piston assembly, an isolator, a shell and a sealing portion; wherein: the piston of the piston assembly is slidably arranged in the cylinder, the cylinder includes a body and a plug, the body is a hollow structural member with an open end at one end and a closed end at the other end, and the plug is sealed at the open end; the isolator is arranged between the cylinder and the shell, and the shell has a flow chamber and an inflow hole connected to the flow chamber; wherein the inflow hole is used to communicate with the process position, and the flow chamber is used to communicate with the sensor; the piston rod of the piston assembly passes through the plug and the isolator in turn, and extends into the flow chamber to connect with the sealing portion, so as to drive the sealing portion to switch between the first position and the second position. The above scheme can solve the problem that the transfer device involved in the related art is easy to contaminate the wafer.

Description

Technical Field

[0001] The present application belongs to the field of semiconductor equipment design technology, and specifically relates to a switching device and semiconductor process equipment. Background Art

[0002] The adapter device can be used, for example, to connect a water resistance meter to semiconductor processing equipment, such as a cleaning device. In this case, the sensor and process station in the semiconductor processing equipment are the water resistance meter and the cleaning tank, respectively. Thus, when the cleaning device is cleaning wafers, the water resistance meter can be used to verify whether the wafers are clean. During operation, the inlet port on the adapter device, which is connected to the cleaning tank, is opened, allowing pure water in the cleaning tank to flow into the adapter device through the inlet port, enabling the water resistance meter to perform measurements.

[0003] To facilitate the operation of the adapter, the adapter involved in the related art drives the piston rod of the piston assembly to extend and retract by arranging the piston of the piston assembly to slide in the cylinder, and the piston rod is arranged to extend into the adapter and connect with the blocking portion in the adapter, so that the blocking portion can be driven to block or open the inflow hole by extending and retracting the piston rod. However, in order to ensure smooth sliding of the piston rod, grease is provided between the piston rod and the cylinder. This makes it easy for the grease to enter the adapter along with the piston rod when blocking or opening the inflow hole. As a result, when the inflow hole on the adapter is opened for operation, the grease in the adapter easily enters the process position through the inflow hole, thereby contaminating the wafer. Summary of the Invention

[0004] The invention discloses a transfer device and semiconductor process equipment, which are used to solve the problem that the transfer device involved in the related art is prone to contaminating wafers.

[0005] In order to solve the above technical problems, the present invention provides the following technical solutions:

[0006] In a first aspect, the present application discloses a transfer device for transferring a sensor to a process position, the transfer device comprising a cylinder, a piston assembly, a spacer, a housing, and a sealing portion; wherein:

[0007] The piston of the piston assembly is slidably disposed in the cylinder body, and the cylinder body includes a body portion and a plug, wherein the body portion is a hollow structural member with an open end at one end and a closed end at the other end, and the plug is sealed at the open end;

[0008] The isolating member is provided between the cylinder body and the housing, and the housing has a flow cavity and an inflow hole communicating with the flow cavity; wherein the inflow hole is used to communicate with the process position, and the flow cavity is used to communicate with the sensor;

[0009] The piston rod of the piston assembly passes through the plug and the isolation piece in sequence, and extends into the flow chamber to be connected with the blocking part, so as to drive the blocking part to switch between the first position and the second position; when the blocking part is in the first position, the piston rod extends to a position where the blocking part blocks the inflow hole, and a sliding fitting portion of the piston rod that slides with the plug is located outside the flow chamber; when the blocking part is in the second position, the piston rod retracts to a position where the inflow hole can be opened.

[0010] In a second aspect, the present application discloses a semiconductor process equipment, which includes a process position, a sensor, and the switching device described above, wherein the sensor is connected to the process position through the switching device.

[0011] The technical solution adopted by the present invention can achieve the following technical effects:

[0012] The adapter disclosed in the embodiment of the present application improves the structure of the adapter involved in the related art by providing an isolating member so that the rod portion of the piston rod sequentially passes through the plug and the isolating member and extends into the flow chamber to connect with the blocking member. This allows the rod portion to extend to a position where the blocking member blocks the inflow hole when the blocking member is in the first position. At the same time, the sliding fitting portion on the rod portion that slides with the plug can be isolated by the isolating member, so that the sliding fitting portion is located outside the flow chamber. When the blocking member is in the second position, the rod portion retracts to a position where the inflow hole can be opened, so that the sliding fitting portion is also located outside the flow chamber. This structure can isolate the sliding fitting portion from the flow chamber through the isolating member, that is, the sliding fitting portion is always located outside the flow chamber during the movement of the piston rod, thereby preventing the sliding fitting portion from carrying grease into the flow chamber, thereby preventing the grease from entering the process position through the inflow hole and contaminating the wafers in the process position. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a structural diagram of a switching device involved in the related art;

[0014] Figure 2 It is a structural diagram of the switching device disclosed in the embodiment of the present application;

[0015] Figure 3 is a cross-sectional view of the adapter disclosed in the embodiment of the present application;

[0016] Figure 4 is a cross-sectional view of a switching device disclosed in an embodiment of the present application, with the blocking portion in a first position;

[0017] Figure 5 is a cross-sectional view of a switching device disclosed in an embodiment of the present application, with the blocking portion in a second position;

[0018] Figure 6 is a cross-sectional view of another adapter device disclosed in an embodiment of the present application, with the blocking portion in a first position;

[0019] Figure 7 is a cross-sectional view of another adapter device disclosed in an embodiment of the present application, with the blocking portion in a second position;

[0020] Figure 8 Schematic diagram of the structure of the isolation member disclosed in the embodiment of the present application;

[0021] Figure 9 yes Figure 8 sectional view.

[0022] Description of reference numerals:

[0023] 11-cylinder body, 111-body, 1111-annular positioning surface, 112-plug, 113-first sub-cavity, 114-second sub-cavity, 12-piston assembly, 121-piston, 122-piston rod, 1221-sliding fitting part,

[0024] 20-isolator, 21-isolation cavity, 22-first avoidance hole, 23-second avoidance hole, 24-discharge hole, 25-second gap, 26-first gap, 27-first positioning groove,

[0025] 30-shell, 31-flow cavity, 32-inflow hole, 33-second positioning groove, 34-outflow hole, 341-orifice, 35-blocking protrusion,

[0026] 40-sealing part,

[0027] 50-Sensor,

[0028] 61-first sealing ring, 62-second sealing ring, 63-third sealing ring, 64-fourth sealing ring,

[0029] 70-Connector. DETAILED DESCRIPTION

[0030] To make the objectives, technical solutions, and advantages of the present invention more clear, the technical solutions of the present invention will be clearly and completely described below in conjunction with specific embodiments of the present invention and corresponding drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0031] The terms "first," "second," and the like in the specification and claims of this application are used to distinguish similar objects, and are not used to describe a specific order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate, so that the embodiments of this application can be implemented in an order other than that illustrated or described herein, and that the objects distinguished by "first," "second," and the like are generally of the same type, and do not limit the number of objects; for example, the first object can be one or more. In addition, the term "and / or" in the specification and claims refers to at least one of the connected objects, and the character " / " generally indicates that the objects connected are in an "or" relationship.

[0032] In the description of the present invention, it should be noted that, unless otherwise specified or limited, the terms "mounted," "connected," and "connected" should be understood broadly. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; and direct or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of these terms in the present invention based on specific circumstances.

[0033] Please refer to Figures 2 to 9 , an embodiment of the present application discloses a transfer device, and the disclosed transfer device includes a cylinder 11, a piston assembly 12, an isolator 20, a shell 30 and a sealing portion 40. The transfer device is used to transfer the sensor 50 described later to the process position described later to detect the fluid flowing out of the process position. In some optional embodiments, the process position may be a process chamber, and the sensor 50 is transferred to the process chamber through the transfer device to detect the gas in the process chamber; in some other optional embodiments, the process position may be a wet etching process tank, and the sensor 50 is used to detect the concentration, pH value, etc. of the liquid in the process tank; in other optional embodiments, the process position may be a cleaning process tank, and the sensor 50 is used to detect the resistance value of pure water in the process tank, etc.

[0034] The piston 121 of the piston assembly 12 is slidably disposed in the cylinder body 11, so that it can drive the piston rod 122 of the piston assembly 12 described later to move telescopically when driven by the fluid in the cylinder body 11. The cylinder body 11 includes a main body 111 and a plug 112. The main body 111 is a hollow structural member (such as a cylindrical structural member) with an open end and a closed end at the other end. The plug 112 is sealed at the open end, so that the piston 121 of the piston assembly 12 can slide in the cylinder body 11 formed by the main body 111 and the plug 112 to drive the piston rod 122 to move telescopically. Of course, in this process, the piston rod 122 passes through the plug 112 to move telescopically.

[0035] The isolator 20 is the core component that achieves isolation in the adapter. It is positioned between the cylinder body 11 and the housing 30, allowing the piston rod 122 to sequentially pass through the plug 112 and the isolator 20, extending into the flow chamber 31, described below, to connect with the sealing portion 40. In other words, the open end of the body 111 faces the isolator 20, allowing the piston rod 122 to sequentially pass through the plug 112 and the isolator 20, which block the open end, to extend into the flow chamber 31 and connect with the sealing portion 40.

[0036] The sliding engagement portion 1221 of the piston rod 122 that slides with the plug 112 can be isolated by the isolator 20, thereby positioning the sliding engagement portion 1221 outside the flow chamber 31. This prevents the sliding engagement portion 1221 from carrying grease into the flow chamber 31, thereby preventing the grease from entering the process station through the inflow hole 32 of the flow chamber 31 and contaminating the wafers. Furthermore, this prevents contamination of the flow chamber 31 and affecting the normal operation of the adapter. Of course, the sliding engagement between the piston rod 122 and the plug 112 is prone to wear and generation of particles. This structure also prevents the sliding engagement portion 1221 from carrying particles into the flow chamber 31, thereby preventing particles from contaminating the wafers in the process station and preventing particles from contaminating the flow chamber 31 and affecting the normal operation of the adapter.

[0037] The shell 30 is the basic component of the adapter device and is used to provide an installation location for other components of the adapter device. Among them, the blocking portion 40 and the sensor 50 are both arranged in the shell 30. In addition, the shell 30 is also used to form some functional spaces or structures, such as the flow chamber 31, the inflow hole 32 and the second positioning groove 33, the outflow hole 34 and the blocking protrusion 35 described later. Specifically, the shell 30 has a flow chamber 31 and an inflow hole 32 connected to the flow chamber 31. The inflow hole 32 is used to communicate with the process position so that the fluid in the process position can flow into the inflow hole 32. The flow chamber 31 is used to communicate with the sensor 50 so as to detect the fluid flowing through the flow chamber 31 through the sensor 50. The blocking portion 40 is movably provided in the flow chamber 31 to block the inflow hole 32.

[0038] Specifically, the fluid in the process position can be a liquid, such as water or a liquid medicine. In this case, the liquid in the process position can enter the inlet hole 32, enter the flow cavity 31 through the inlet hole 32, and then flow out through the outlet hole 34 described below. Of course, the fluid in the process position can also be a gas, such as a process gas. In this case, the gas in the process position can enter the inlet hole 32, enter the flow cavity 31 through the inlet hole 32, and then flow out through the outlet hole 34.

[0039] The piston rod 122 of the piston assembly 12 passes through the isolation member 20 and extends into the flow chamber 31 to be connected to the blocking portion 40, so as to drive the blocking portion 40 to switch between the first position and the second position, wherein the telescopic movement of the piston rod 122 can drive the telescopic movement of the blocking portion 40, thereby enabling the blocking portion 40 to switch between the first position and the second position.

[0040] In specific work projects, such as Figure 3 、 Figure 4 and Figure 6 As shown, when the blocking portion 40 is in the first position, the piston rod 122 moves toward the direction close to the inflow hole 32, so that the piston rod 122 extends to the position where the blocking portion 40 blocks the inflow hole 32, and the sliding fitting portion 1221 is located outside the flow chamber 31, wherein the sliding fitting portion 1221 approaches the flow chamber 31 as the piston rod 122 moves, so that when the blocking portion 40 is in the first position, the sliding fitting portion 1221 can be in the first extreme position, and the sliding fitting portion 1221 in the first extreme position is closest to the flow chamber 31 during the extension and retraction process of the piston rod 122. In this case, since the sliding fitting portion 1221 will not extend into the flow chamber 31, grease and particulate matter will not be brought into the flow chamber 31.

[0041] like Figure 5 and Figure 7 As shown, when the blocking portion 40 is in the second position, the piston rod 122 retracts to move in the direction away from the inflow hole 32, thereby driving the blocking portion 40 away from the inflow hole 32, so that the piston rod 122 retracts to a position where the inflow hole 32 can be opened to open the inflow hole 32, wherein the sliding fitting portion 1221 moves away from the flow chamber 31 as the piston rod 122 moves, so that when the blocking portion 40 is in the second position, the sliding fitting portion 1221 can be in the second extreme position. The sliding fitting portion 1221 in the second extreme position is farthest from the flow chamber 31 during the extension and retraction process of the piston rod 122. The sliding fitting portion 1221 is away from the flow chamber 31, which means that the sliding fitting portion 1221 will not bring grease and particulate matter into the flow chamber 31.

[0042] That is to say, in this structure, in the axial direction of the piston rod 122, the length of the isolation member 20 passed by the piston rod 122 can be greater than the stroke of the piston 121, so that in the process of the piston 121 driving the piston rod 122 to extend and retract, the isolation member 20 can isolate the sliding fitting part 1221 outside the flow chamber 31, so as to minimize the sliding fitting part 1221 from bringing grease and particulate matter into the flow chamber 31.

[0043] like Figure 1As shown, the adapter device involved in the related art includes a cylinder body 11, a piston assembly 12, a housing 30 and a blocking portion 40. Specifically, the piston 121 of the piston assembly 12 is slidably disposed in the cylinder body 11. The cylinder body 11 includes a body 111 and a plug 112. The body 111 is a hollow structural member with an open end at one end and a closed end at the other end. The plug 112 blocks the open end. The housing 30 has a flow chamber 31 and an inflow hole 32 connected to the flow chamber 31. The piston rod 122 of the piston assembly 12 extends through the plug 112 into the flow chamber 31 and is connected to the blocking portion 40, so as to drive the blocking portion 40 to switch between a first position and a second position. Specifically, the piston rod 122 drives the blocking portion 40 to switch between the first position and the second position by telescopic movement. When the piston rod 122 telescopically moves, the piston rod 122 and the plug 112 slide together.

[0044] In a specific working process, when the blocking portion 40 is in the first position, the piston rod 122 moves toward the direction close to the inflow hole 32, so that the piston rod 122 extends to a position where the blocking portion 40 blocks the inflow hole 32. Since the piston rod 122 of the piston assembly 12 passes through the plug 112 and directly extends into the flow chamber 31 to connect with the blocking portion 40, the sliding engagement portion 1221 of the piston rod 122 that slides with the plug 112 will enter the flow chamber 31 as the piston rod 122 slides. When the blocking portion 40 is in the second position, the piston rod 122 retracts to move toward the direction away from the inflow hole 32, thereby driving the blocking portion 40 away from the inflow hole 32, so that the piston rod 122 retracts to a position where it can open the inflow hole 32, thereby opening the inflow hole 32.

[0045] In this structure, the piston rod 122 and the plug 112 are easily worn and produce particles during the sliding fit. In order to ensure smooth sliding fit between the piston rod 122 and the plug 112, grease is provided between the piston rod 122 and the plug 112. However, the piston rod 122 of the piston assembly 12 passes through the plug 112 and directly extends into the flow chamber 31 and is connected to the sealing portion 40, so that the sliding fit portion 1221 will enter the flow chamber 31 as the piston rod 122 slides. This causes the sliding fit portion 1221 to bring particles and grease into the flow chamber 31, thereby easily contaminating the flow chamber 31 and affecting the normal operation of the adapter. In addition, the particles and grease can easily enter the process position through the flow chamber 31 and contaminate the wafers in the process position.

[0046] The adapter device disclosed in the embodiment of the present application improves the structure of the adapter device involved in the related art. By providing an isolation member 20, the piston rod 122 of the piston assembly 12 passes through the isolation member 20 and extends into the flow chamber 31 to be connected with the sealing portion 40. This allows the piston rod 122 to extend to a position where the sealing portion 40 blocks the inflow hole 32 when the sealing portion 40 is in the first position. At the same time, the sliding fitting portion 1221 can be isolated by the isolation member 20, so that the sliding fitting portion 1221 is located outside the flow chamber. When the sealing portion 40 is in the second position, the piston rod 122 retracts to a position where the inflow hole 32 can be opened, so that the sliding fitting portion 1221 is also located outside the flow chamber 31.

[0047] This structure can isolate the sliding fitting part 1221 from the flow chamber 31 through the isolation part 20, that is, the sliding fitting part 1221 is always located outside the flow chamber 31 during the movement of the piston assembly 12, thereby preventing the sliding fitting part 1221 from carrying grease into the flow chamber 31, thereby preventing the grease from entering the process position through the inflow hole 32 and contaminating the chip in the process position.

[0048] Of course, this structure can also prevent the sliding fitting part 1221 from bringing particles generated by wear during the sliding fitting of the piston rod 122 and the plug 112 into the flow chamber 31, thereby preventing particles from contaminating the chips in the process position and preventing particles from contaminating the flow chamber 31 and affecting the normal operation of the adapter.

[0049] In an embodiment of the present application, the piston 121 can separate the inner cavity of the cylinder body 11 into a first sub-cavity 113 and a second sub-cavity 114. The cylinder body can also include a first fluid through hole and a second fluid through hole. The first fluid through hole can be connected to the first sub-cavity 113, and the second fluid through hole can be connected to the second sub-cavity 114.

[0050] In a specific working process, when the first fluid passage hole is in the input fluid state and the second fluid passage hole is in the output fluid state, the fluid entering the first sub-chamber 113 can drive the piston 121 to slide in the cylinder body 11, so as to drive the blocking part 40 to switch to the first position through the piston rod 122. When the first fluid passage hole is in the output fluid state and the second fluid passage hole is in the input fluid state, the fluid entering the second sub-chamber can drive the piston 121 to slide in the cylinder body 11, so as to drive the blocking part 40 to switch to the second position through the piston rod 122. This structure is relatively simple and easy to implement. Specifically, the fluid input into or output from the inner cavity of the cylinder body 11 can be a gas, such as compressed dry air. Of course, the fluid input into or output from the inner cavity of the cylinder body 11 can also be a liquid, such as hydraulic oil. The embodiment of the present invention does not limit the specific type of the fluid input into or output from the inner cavity of the cylinder body 11.

[0051] Optionally, a third sealing ring 63 may be provided between the piston 121 and the cylinder body 11 to ensure reliability of sealing and isolation between the first sub-cavity 113 and the second sub-cavity 114 .

[0052] Please refer to Figures 3 to 7 as well as Figure 9 In a feasible technical solution, the isolation member 20 can be provided with a first avoidance hole 22 and a second avoidance hole 23 distributed at intervals, and the piston rod 122 can pass through the first avoidance hole 22 and the second avoidance hole 23 in sequence and extend into the flow chamber 31. That is to say, the first avoidance hole 22 is located on the side of the second avoidance hole 23 away from the flow chamber 31, which makes the first avoidance hole 22 farther away from the flow chamber 31 than the second avoidance hole 23.

[0053] When the sealing portion 40 is in the first position, the edge of the sliding fitting portion 1221 close to the sealing portion 40 can be located between the first avoidance hole 22 and the second avoidance hole 23. In this case, a portion of the sliding fitting portion 1221 can be located in the first avoidance hole 22, and the other portion can be located between the first avoidance hole 22 and the second avoidance hole 23, so as to prevent the sliding fitting portion 1221 from entering the second avoidance hole 23. This can isolate the sliding fitting portion 1221 farther, thereby better preventing the sliding fitting portion 1221 from approaching the flow chamber 31, so as to better reduce the risk of the sliding fitting portion 1221 bringing impurities such as grease and particulate matter into the flow chamber 31.

[0054] That is to say, in the axial direction of the piston rod 122, the sum of the length of the first avoidance hole 22 and the interval length between the first avoidance hole 22 and the second avoidance hole 23 can be greater than the stroke of the piston 121, so that in the process of the piston 121 driving the piston rod 122 to extend and retract, the sliding fitting part 1221 will not enter the second avoidance hole 23.

[0055] Of course, the length of the interval between the first avoidance hole 22 and the second avoidance hole 23 along the axial direction of the piston rod 122 may be greater than the stroke of the piston 121. When the first avoidance hole 22 and the second avoidance hole 23 are spaced apart by the isolation cavity 21 described below, the length of the isolation cavity 21 along the axial direction of the piston rod 122 is greater than the stroke of the piston 121.

[0056] Of course, when the sealing portion 40 is in the first position, the sliding fitting portion 1221 can be located in the first avoidance hole 22, so that the sliding fitting portion 1221 will not enter between the first avoidance hole 22 and the second avoidance hole 23, let alone enter the second avoidance hole 23, thereby allowing the sliding fitting portion 1221 to be further away from the flow chamber 31, so as to further reduce the risk of the sliding fitting portion 1221 bringing impurities such as grease and particulate matter into the flow chamber 31.

[0057] That is to say, in this structure, the axial length of the first avoidance hole 22 along the piston rod 122 can be greater than the stroke of the piston 121, so that in the process of the piston 121 driving the piston rod 122 to extend and retract, the sliding fitting part 1221 will not enter between the first avoidance hole 22 and the second avoidance hole 23, let alone enter the second avoidance hole 23.

[0058] Please continue to refer to Figures 3 to 7 as well as Figure 9 In order to more effectively prevent the sliding fitting part 1221 from bringing grease and particulate matter into the flow chamber 31, the isolation member 20 may further include an isolation chamber 21, and the first avoidance hole 22 may be connected to the second avoidance hole 23 through the isolation chamber 21, and the piston rod 122 may pass through the first avoidance hole 22, the isolation chamber 21, and the second avoidance hole 23 in sequence and extend to the flow chamber 31, that is, the isolation chamber 21 is located between the first avoidance hole 22 and the second avoidance hole 23, so that the first avoidance hole 22 and the second avoidance hole 23 can be isolated by the isolation chamber 21, so that the grease and particulate matter carried by the sliding fitting part 1221 can be collected through the isolation chamber 21, thereby minimizing the risk of the sliding fitting part 1221 bringing grease and particulate matter into the second avoidance hole 23, thereby reducing the risk of grease and particulate matter entering the flow chamber 31.

[0059] Furthermore, the isolation member 20 may be provided with a discharge hole 24, which may connect the isolation chamber 21 with the external environment of the adapter, so that the grease and particulate matter in the isolation chamber 21 may be discharged to the external environment of the adapter through the discharge hole 24, thereby avoiding the accumulation of grease and particulate matter in the isolation chamber 21 and easily entering the flow chamber 31 through the second avoidance hole 23.

[0060] In addition, wear and tear of the sliding fit between the piston rod 122 and the plug 112 can easily cause the fluid in the second sub-chamber 114 to leak from between the piston rod 122 and the plug 112, thereby causing the fluid leaked from the second sub-chamber 114 to enter the isolation chamber 21 through the first avoidance hole 22, and the discharge hole 24 connects the isolation chamber 21 with the external environment of the adapter, so that the fluid leaked from the second sub-chamber 114 can be discharged to the external environment of the adapter through the discharge hole 24, thereby preventing the fluid leaked from the second sub-chamber 114 from mixing with grease and particulate matter and entering the flow chamber 31.

[0061] like Figure 8 and Figure 9 As shown, in order to facilitate the discharge of impurities such as grease and particulate matter, a plurality of discharge holes 24 may be provided, and the penetration directions of the plurality of discharge holes 24 may all be perpendicular to the penetration direction of the first avoidance hole 22 .

[0062] In order to further reduce the risk of grease and particulate matter entering the flow chamber 31, a first gap 26 is provided between the hole wall of the first avoidance hole 22 and the piston rod 122, and / or a second gap 25 is provided between the hole wall of the second avoidance hole 23 and the piston rod 122. Based on this, in one embodiment, there may be a second gap 25 between the hole wall of the second avoidance hole 23 and the piston rod 122, and the second gap 25 may connect the flow chamber 31 and the isolation chamber 21. In this structure, the piston rod 122 does not contact the inner wall of the second avoidance hole 23, thereby avoiding the piston rod 122 and the inner wall of the second avoidance hole 23 from contacting and rubbing against each other, which may further generate particulate matter. At the same time, the fluid in the flow chamber 31 can flow to the isolation chamber 21 through the second gap 25, and then be discharged from the discharge hole 24 to the external environment of the adapter. In this case, the second gap 25 is filled with the fluid flowing out of the flow chamber 31, so that when the fluid in the flow chamber 31 is liquid (such as water), a liquid seal effect can be achieved, and when the fluid in the flow chamber 31 is gas (such as process gas), an air seal effect can be achieved, so that grease and particulate matter cannot enter the flow chamber 31 through the second gap 25.

[0063] In addition, when the sealing portion 40 is in the first position and a portion of the sliding fitting portion 1221 is located in the first avoidance hole 22 and the other portion is located between the first avoidance hole 22 and the second avoidance hole 23, the second gap 25 can prevent the inner wall of the second avoidance hole 23 from being contaminated by the sliding fitting portion 1221, thereby preventing the second avoidance hole 23 from contaminating the portion of the piston rod 122 that moves out of the flow chamber 31 when the sealing portion 40 is in the second position, thereby effectively preventing the flow chamber 31 from being contaminated.

[0064] In another embodiment, there may be a first gap 26 between the hole wall of the first avoidance hole 22 and the piston rod 122 to avoid contact and friction between the piston rod 122 and the inner wall of the first avoidance hole 22, which may further generate particulate matter. When the sealing portion 40 is in the first position, the first gap 26 can prevent the sliding fitting part 1221 from contaminating the inner wall of the first avoidance hole 22, thereby preventing the inner wall of the first avoidance hole 22 from contaminating the part of the piston rod 122 moved out of the flow chamber 31 when the sealing portion 40 is in the second position, thereby further reducing the risk of contamination of the flow chamber 31.

[0065] In other embodiments, there may be a first gap 26 between the hole wall of the first avoidance hole 22 and the piston rod 122, and there may be a first gap 26 between the hole wall of the second avoidance hole 23 and the piston rod 122, thereby preventing the piston rod 122 from contacting and rubbing with the inner wall of the second avoidance hole 23 and the inner wall of the first avoidance hole 22 respectively through the first gap 26 and the second gap 25, thereby easily further generating particulate matter. At the same time, the second gap 25 can be filled with the fluid flowing out of the flow chamber 31, so that when the fluid in the flow chamber 31 is liquid, a liquid seal effect can be achieved, and when the fluid in the flow chamber 31 is gas, an air seal effect can be achieved, so that grease and particulate matter cannot enter the flow chamber 31 through the second gap 25, thereby more effectively preventing grease and particulate matter from entering the flow chamber 31.

[0066] In a more preferred technical solution, the first gap 26 and the second gap 25 can be the first annular gap and the second annular gap, respectively, so that the inner wall of the second avoidance hole 23 and the inner wall of the first avoidance hole 22 can be evenly spaced from the piston rod 122 through the first annular gap and the second annular gap, thereby more reliably avoiding the piston rod 122 from contacting and rubbing with the inner wall of the second avoidance hole 23 and the inner wall of the first avoidance hole 22, respectively.

[0067] The width of the first annular gap and the width of the second annular gap can be set to 0.5 mm to 1 mm, so as to avoid the first annular gap and the second annular gap being too large, which may cause impurities in the external environment of the adapter to easily enter the first annular gap and the second annular gap. It should be noted that the width direction of the first annular gap can be perpendicular to the penetration direction of the second avoidance hole 23, the width direction of the second annular gap can be perpendicular to the penetration direction of the first avoidance hole 22, and the width direction of the first annular gap can be parallel to the width direction of the second annular gap.

[0068] As described above, in this case, the diameter of the second avoidance hole 23 can be larger than the diameter of the piston rod 122 to form a first annular gap, and the diameter of the first avoidance hole 22 can be larger than the diameter of the piston rod 122 to form a second annular gap. Furthermore, the difference between the radius of the second avoidance hole 23 and the radius of the piston rod 122, as well as the difference between the radius of the first avoidance hole 22 and the radius of the piston rod 122, can both be 0.5 mm to 1 mm, so that the width of the first annular gap and the width of the second annular gap can both be set to 0.5 mm to 1 mm.

[0069] In an embodiment of the present application, the main body 111 may have an annular positioning surface 1111 that is consistent with the direction of the opening end, and the piston rod 122 may pass through the plug 112 and slide and seal with the plug 112. Specifically, a first sealing ring 61 may be provided between the piston rod 122 and the plug 112 to achieve a sealed fit between the piston rod 122 and the plug 112, thereby minimizing the leakage of fluid in the inner cavity of the cylinder body 11 from between the piston rod 122 and the plug 112.

[0070] The main body 111 and the isolating member 20 can be fixedly connected, and the plug 112 can be clamped and fixed between the annular positioning surface 1111 and the isolating member 20, avoiding the need for additional connecting parts to fix the plug 112 on the annular positioning surface 1111, thereby helping to simplify the structure.

[0071] Optionally, a second sealing ring 62 may be provided between the main body 111 and the isolating member 20 to achieve a sealed connection between the main body 111 and the isolating member 20, thereby preventing liquid in the external environment of the adapter from entering the cylinder 11 and affecting the sliding of the piston 121 within the cylinder 11. A fourth sealing ring 64 may be provided between the isolating member 20 and the housing 30 to achieve a sealed connection between the isolating member 20 and the housing 30, thereby preventing liquid in the flow chamber 31 from leaking between the isolating member 20 and the housing 30.

[0072] To facilitate the installation of the main body 111 and the plug 112, the spacer 20 may be provided with a first positioning groove 27. The main body 111 may be positioned in the first positioning groove 27, and the plug 112 may be clamped and fixed between the annular positioning surface 1111 and the bottom wall of the first positioning groove 27. In this case, a second sealing ring 62 may be provided between the main body 111 and the bottom wall of the first positioning groove 27 to ensure that the main body 111 can be sealed and positioned in the first positioning groove 27.

[0073] Furthermore, the housing 30 may be provided with a second positioning groove 33, and the isolating member 20 may be positioned in the second positioning groove 33 and fixedly connected to the housing 30 to facilitate installation of the isolating member 20. In this case, a fourth sealing ring 64 may be provided between the isolating member 20 and the bottom wall of the second positioning groove 33 to ensure that the isolating member 20 is hermetically positioned in the second positioning groove 33.

[0074] In one embodiment, the adapter device may further include a connector 70, which may sequentially pass through the main body 111 and the isolating member 20 to be fixedly connected to the housing 30, wherein the isolating member 20 may be clamped and fixed between the main body 111 and the housing 30. Specifically, the connector 70 may be a screw or a bolt, and there may be multiple connectors 70, thereby making the fixed connection between the main body 111, the isolating member 20, and the housing 30 more reliable.

[0075] In an embodiment of the present application, the shell 30 may be provided with an outflow hole 34. When the sealing portion 40 is in the second position, the inflow hole 32 may be connected to the outflow hole 34 through the flow cavity 31, so that the fluid in the process position flows into the flow cavity 31 through the inflow hole 32 and then can flow out through the outflow hole 34.

[0076] The housing 30 may include a blocking protrusion 35, which may be higher than the orifice 341 of the outflow hole 34 exposed on the outer surface of the housing 30. When the adapter is installed outside the process station, the housing 30 is fixed outside the process station. Fluid in the process station (e.g., liquid medicine, water, or process gas) can easily overflow from the notch of the process station and flow to the outer surface of the housing 30. It can then easily enter the outflow hole 34 through the orifice 341 of the outflow hole 34 exposed on the outer surface of the housing 30, and enter the flow chamber 31, thereby easily contaminating the flow chamber 31. This structure can more effectively prevent fluid overflowing from the notch of the process station from flowing into the orifice 341 of the outflow hole 34 exposed on the outer surface of the housing 30 through the blocking protrusion 35, thereby preventing easy contamination of the flow chamber 31.

[0077] The outflow hole 34 can be used to allow the fluid in the flow chamber 31 to flow out of the housing 30. Specifically, after the fluid in the flow chamber 31 flows into the outflow hole 34, it can flow out of the housing 30 through the orifice 341 of the outflow hole 34. Preferably, the blocking protrusions 35 can be distributed around the orifice 341 to form a fluid guide groove connected to the orifice 341, thereby guiding the fluid flowing out of the orifice 341 and preventing the fluid from flowing out of the orifice 341 from flowing into other components in the semiconductor processing equipment, thereby reducing the possibility of damage to the semiconductor processing equipment.

[0078] Based on the adapter device disclosed in the embodiments of the present application, the present application further discloses a semiconductor process equipment, which includes a process station, a sensor 50, and the adapter device described in any one of the above embodiments. The sensor 50 is connected to the process station through the adapter device so that the fluid in the process station can enter the inflow hole 32. Specifically, the sensor 50 can be provided in the housing 30, wherein the housing 30 can be provided with an outflow hole 34, and the sensor 50 can be provided in the outflow hole 34. Specifically, the sensor 50 can be partially provided outside the outflow hole 34. In this case, the sensor 50 can be partially provided outside the housing 30, or it can be fully provided in the outflow hole 34. In this case, the sensor 50 can be fully provided in the housing 30.

[0079] During the specific working process, the fluid flowing from the flow chamber 31 to the outflow hole 34 can flow to the sensor 50, thereby being detected by the sensor 50. At the same time, the fluid in the outflow hole 34 can flow out of the housing 30 through the orifice 341 of the outflow hole 34. The fluid flowing out of the housing 30 through the orifice 341 can be guided by the fluid guide groove, thereby continuing to flow under the guidance of the fluid guide groove.

[0080] In one technical solution, the semiconductor process equipment may be a cleaning equipment, the process position may be a process tank, and the sensor 50 may be a water resistance meter. The water resistance meter is connected to the cleaning tank through a switching device, so that the fluid in the cleaning tank (such as liquid medicine or water) can enter the inflow hole 32, so that the resistance value of the water in the cleaning tank can be measured when the cleaning equipment cleans the wafer. The resistance value of water is related to the purity of water. The higher the purity of water, the higher its resistance value. By detecting the resistance value of water in the process tank with a water resistance meter, it is possible to check whether the wafer is cleaned.

[0081] In other embodiments, the process tank can be used as both a cleaning tank and a liquid medicine tank. In a specific working process, when the blocking portion 40 is in the first position, the inflow hole 32 is blocked by the blocking portion 40, and the liquid in the process tank will not flow into the flow cavity 31 through the inflow hole 32. In this case, the process tank can be used as a liquid medicine tank, and the liquid in the process tank can be a liquid medicine, so that the wafer in the process tank can be processed (for example, a wet etching process). When the blocking portion 40 is in the second position, the blocking portion 40 will not block the inflow hole, so that the liquid in the process tank can flow into the flow cavity 31 through the inflow hole 32. In this case, the process tank can be used as a cleaning tank, and the liquid in the process tank can be water, so that the resistance value of the water flowing out of the cleaning tank can be detected by the sensor 50 (for example, a water resistance meter) when the cleaning tank cleans the wafer.

[0082] In a further technical solution, the water resistance meter can be disposed in the outflow hole 34. Specifically, the water resistance meter can be partially disposed outside the outflow hole 34. In this case, the water resistance meter can be partially disposed outside the housing 30. The water resistance meter can also be entirely disposed in the outflow hole 34. In this case, the water resistance meter can be entirely disposed within the housing 30. The side wall of the cleaning tank can be provided with an overflow hole. The housing 30 can be fixed outside the cleaning tank, and the inflow hole 32 can be connected to the overflow hole, so that the fluid in the cleaning tank can flow into the inflow hole 32 through the overflow hole.

[0083] Of course, the sensor 50 can be a temperature sensor or a flow sensor, etc. In this case, the adapter can be used to transfer the temperature sensor or the flow sensor, etc. The embodiment of the present application does not limit the specific use of the adapter. That is to say, the semiconductor process equipment disclosed in the embodiment of the present application may include a sensor. The sensor 50 can be a water resistance meter, or it can be other types of sensors 50 such as a temperature sensor, a flow sensor, etc., so that the embodiment of the present application does not limit the specific use of the semiconductor process equipment.

[0084] The above embodiments of the present invention focus on the differences between the various embodiments. As long as the different optimization features of the various embodiments are not contradictory, they can be combined to form a better embodiment. Considering the simplicity of the text, they will not be repeated here.

[0085] The embodiments of the present invention are described above in conjunction with the accompanying drawings, but the present invention is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of the present invention, ordinary technicians in this field can also make many forms without departing from the scope of protection of the present invention and the claims, all of which are protected by the present invention.

Claims

1. A transfer device for transferring a sensor to a process position, characterized in that: It comprises a cylinder (11), a piston assembly (12), an isolating member (20), a housing (30) and a blocking portion (40); wherein: The piston (121) of the piston assembly (12) is slidably disposed in the cylinder (11). The cylinder (11) comprises a body (111) and a plug (112). The body (111) is a hollow structural member with an open end at one end and a closed end at the other end. The plug (112) is sealed at the open end. The isolating member (20) is provided between the cylinder body (11) and the housing (30), and the housing (30) has a flow cavity (31) and an inflow hole (32) communicating with the flow cavity (31); wherein the inflow hole (32) is used to communicate with the process position, and the flow cavity (31) is used to communicate with the sensor; The piston rod (122) of the piston assembly (12) passes through the plug (112) and the isolation member (20) in sequence, and extends into the flow chamber (31) to be connected with the blocking portion (40), so as to drive the blocking portion (40) to switch between the first position and the second position; when the blocking portion (40) is in the first position, the piston rod (122) extends to a position where the blocking portion (40) blocks the inflow hole (32), and a sliding fitting portion (1221) on the piston rod (122) that slides with the plug (112) is located outside the flow chamber (31); when the blocking portion (40) is in the second position, the piston rod (122) retracts to a position where the inflow hole (32) can be opened.

2. The switching device according to claim 1, characterized in that: The isolating member (20) is provided with a first avoidance hole (22) and a second avoidance hole (23) which are spaced apart from each other. The piston rod (122) passes through the first avoidance hole (22) and the second avoidance hole (23) in sequence and extends into the flow chamber (31). When the blocking portion (40) is in the first position, the sliding fitting portion (1221) is located in the first avoidance hole (22) or the sliding fitting portion (1221) is located between the first avoidance hole (22) and the second avoidance hole (23) near the edge of the blocking portion (40).

3. The switching device according to claim 2, characterized in that: The isolation member (20) further includes an isolation chamber (21), the first avoidance hole (22) is connected to the second avoidance hole (23) through the isolation chamber (21), and the piston rod (122) sequentially passes through the first avoidance hole (22), the isolation chamber (21) and the second avoidance hole (23) and extends to the flow chamber (31).

4. The switching device according to claim 3, characterized in that: The isolation member (20) is provided with a discharge hole (24), and the discharge hole (24) connects the isolation cavity (21) with the external environment of the adapter.

5. The switching device according to claim 2, characterized in that: A first gap (26) is provided between the hole wall of the first avoidance hole (22) and the piston rod (122); and / or A second gap (25) is provided between the hole wall of the second avoidance hole (23) and the piston rod (122).

6. The switching device according to claim 1, characterized in that: The main body (111) has an annular positioning surface (1111) that is aligned with the opening end, and the piston rod (122) passes through the plug (112) and is slidably sealed with the plug (112); the main body (111) is fixedly connected to the isolation member (20), and the plug (112) is clamped and fixed between the annular positioning surface (1111) and the isolation member (20).

7. The switching device according to claim 6, characterized in that: The isolating member (20) is provided with a first positioning groove (27), the main body (111) is positioned in the first positioning groove (27), and the plug (112) is clamped and fixed between the annular positioning surface (1111) and the bottom wall of the first positioning groove (27).

8. The switching device according to claim 1, characterized in that: The housing (30) is provided with a second positioning groove (33), and the isolation member (20) is positioned in the second positioning groove (33) and fixedly connected to the housing (30).

9. The switching device according to claim 1, characterized in that: The shell (30) is provided with an outflow hole (34). When the blocking portion (40) is in the second position, the inflow hole (32) is connected to the outflow hole (34) through the flow cavity (31). The shell (30) includes a blocking protrusion (35). The blocking protrusion (35) is higher than the orifice (341) of the outflow hole (34) exposed on the outer surface of the shell (30).

10. The switching device according to claim 9, characterized in that: The blocking protrusions (35) are distributed around the orifice (341) to form a fluid guide groove communicating with the orifice (341).

11. A semiconductor process equipment, characterized in that: The invention comprises a process position, a sensor (50) and a switching device according to any one of claims 1 to 10, wherein the sensor (50) is connected to the process position through the switching device.

12. The semiconductor process equipment according to claim 11, wherein: The semiconductor process equipment is a cleaning device, the process position is a process tank, and the sensor (50) is a water resistance meter.

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