Automatic optimization method for relative optimal initial state of grating ruling machine
The initial state of the grating ruling machine was optimized by heterodyne laser interferometry and dichotomy iteration method, which solved the speed and displacement instability problems of the ruling system, improved the ruling accuracy and efficiency, and reduced tool wear.
Patent Information
- Application Number
- CN202410901677.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-05
- Publication Date
- 2025-09-09
- Estimated Expiration
- 2044-07-05
AI Technical Summary
During the engraving process of existing grating engraving machines, the movement speed and displacement of the engraving system are unstable, resulting in large groove shape errors and high surface roughness. In addition, manual adjustment is inefficient, making it difficult to determine the optimal initial state, which leads to accelerated tool wear.
The heterodyne laser interferometry method is used to measure the relative displacement between the scoring axis and the tool in the indexing direction. The scoring speed is optimized by combining the bisection method and the iteration method. The initial state of the grating scoring machine is automatically adjusted to ensure the stability of the scoring process.
The stability and accuracy of the grating ruling machine's ruling process are improved, tool wear is reduced, work efficiency is improved, and measurement accuracy problems caused by manual valuation are avoided.
Smart Images

Figure CN118859392B_ABST
Abstract
Description
Technical Field
[0001] The invention belongs to the technical field of grating manufacturing, and in particular relates to a method for automatically optimizing a relative optimal initial state of a grating ruling machine. Background Art
[0002] Mechanical scribing is one of the important methods for manufacturing diffraction gratings. Its principle is to extrude and polish the metal film coated on the grating substrate through a tool, causing elastic-plastic deformation to form a certain groove shape, and finally forming the grating lines. As an implementation form of mechanical scribing, the grating scribing machine is mainly divided into a graduation system, a scribing system and a tool holder system. The scribing system is mainly responsible for driving the grating blank to perform reciprocating motion, the graduation system is mainly responsible for driving the tool holder system to perform linear motion, and the tool holder system is mainly responsible for lifting and lowering the tool. The lifting action is to lift the cutting tool and separate it from the grating substrate, and the dropping action is to drop the cutting tool and make contact with the grating substrate.
[0003] In actual work, if the speed of the scoring system is too fast, the scoring line will not be extruded, but instead be chip-removed, resulting in large groove errors and high surface roughness. At the same time, too fast speed will cause the tool to damage too quickly. If the speed is too slow, creeping will occur, affecting the grating groove shape and affecting work efficiency. In addition, because the scoring system will still vibrate in the indexing direction (i.e., perpendicular to the scoring direction) due to factors such as speed and vibration when moving along the scoring direction, a relative displacement will be generated between it and the scoring tool in the indexing direction, which will affect the quality of the grating line.
[0004] Therefore, before a grating ruling machine begins marking, it's necessary to adjust the system's initial parameters, such as the speed of the marking system and the speed at which the blade is raised and lowered, to ensure relative stability during the marking process. Currently, these methods rely on manual estimation or trial and error, which can lead to significant deviations from the optimal state. Operating at such a low point can accelerate tool wear, and manual testing is inefficient, labor-intensive, and results in inaccurate final values. Summary of the Invention
[0005] In view of this, the present invention aims to provide a method for automatically optimizing the relatively optimal initial state of a grating engraving machine, by measuring the relative displacement of the engraving axis and the tool in the indexing direction through heterodyne laser interferometry, and then combining the bisection method and the iterative method to determine the relatively optimal engraving speed of the instrument, thereby ensuring the relative stability of the instrument during the engraving process.
[0006] To achieve the above object, the technical solution created by the present invention is implemented as follows:
[0007] A method for automatically optimizing a grating ruling machine relative to an optimal initial state, comprising the following steps:
[0008] S1: Install the tool holder system on the indexing system, install the grating to be processed on the scoring system perpendicular to the movement direction of the indexing system, and install the deviation measurement system on the indexing system and the scoring system; the control system is connected to the indexing system, the scoring system and the deviation measurement system respectively;
[0009] S2: setting the minimum processing speed and the maximum processing speed for the grating to be processed in the control system, as well as the target relative error between the tool holder system and the indexing system in the movement direction of the indexing system;
[0010] S3: The control system controls the indexing system and the scribing system to process the grating to be processed according to the minimum processing speed, and obtains the actual relative error of the tool holder system and the indexing system in the movement direction of the indexing system corresponding to the minimum processing speed through the deviation measurement system;
[0011] S4: replacing the minimum processing speed with the maximum processing speed and repeating step S3 to obtain the actual relative error between the tool holder system and the indexing system in the movement direction of the indexing system corresponding to the maximum processing speed;
[0012] S5: The control system compares the two current actual relative errors with the target relative error: if the minimum of the two actual relative errors is less than or equal to the target relative error, the processing speed corresponding to the minimum value is the target processing speed, and processing of the grating to be processed is stopped; if the minimum of the two actual relative errors is greater than the target relative error, the average speed of the processing speeds corresponding to the two actual relative errors is calculated, and the processing speed corresponding to the maximum of the two current actual relative errors is replaced by the average speed, and step S3 is repeated to calculate the actual relative error corresponding to the average speed;
[0013] S6: Compare the actual relative error of the minimum value and the average speed with the target relative error, and repeat step S5 until the minimum value of the current two actual relative errors is less than or equal to the target relative error. The processing speed corresponding to the minimum value at this time is the target processing speed.
[0014] Furthermore, in step S1, the indexing system includes a indexing air-floating displacement table; wherein, the indexing fixed base of the indexing air-floating displacement table is installed on the working platform, and the tool holder system is installed on the indexing movable table of the indexing air-floating displacement table, so that the indexing movable table drives the tool holder system to move along the indexing fixed base; the indexing fixed base is connected to the control system, so that the indexing fixed base drives the indexing movable table according to the control signal of the control system.
[0015] Furthermore, in step S1, the tool holder system includes a tool lifting and lowering motor bracket, a tool lifting and lowering motor, a scoring tool holder and a scoring tool; wherein, the tool lifting and lowering motor bracket is installed on the indexing movable table, the tool lifting and lowering motor and the scoring tool holder are installed on the tool lifting and lowering motor bracket, and the scoring tool holder is connected to the free end of the tool lifting and lowering motor, so that the tool lifting and lowering motor controls the scoring tool holder to perform lifting and lowering movement; the scoring tool is installed on the scoring tool holder to complete the scoring of the grating to be processed.
[0016] Furthermore, in step S1, the scoring system includes a scoring air-floating displacement stage; wherein, the scoring fixed base of the scoring air-floating displacement stage is installed on the working platform, and the scoring fixed base is arranged perpendicular to the graduation fixed base; the grating to be processed is fixedly mounted on the scoring movable stage of the scoring air-floating displacement stage through the grating base; the scoring fixed base is connected to the control system so that the scoring fixed base drives the scoring movable stage according to the control signal of the control system.
[0017] Furthermore, in step S1, the deviation measurement system includes a laser, a measuring mirror, an interferometer, a detector and a measuring board; wherein, the laser and the interferometer are installed on the indexing movable platform, and the measuring mirror is installed on the engraving movable platform, so that the reference laser emitted by the laser is irradiated on the measuring mirror through the interferometer, and the measuring mirror reflects the generated reflected laser back to the interferometer; the reference laser and the reflected laser interfere with each other in the interferometer; the detector is connected to the interferometer, and the interference signal generated by the interferometer is transmitted to the detector, and the detector then transmits the detection result to the measuring board, and the measuring board performs calculations based on the received detection results to obtain the displacement deviation of the tool holder system and the indexing system in the movement direction of the indexing system under different processing speeds, and then transmits the displacement deviation to the control system.
[0018] Furthermore, in step S1, the control system includes an industrial computer and a controller; wherein, the industrial computer completes the setting of the minimum processing speed, the maximum processing speed and the target relative error, and the industrial computer is connected to the measuring board, so that the industrial computer calculates the actual relative error under different processing speeds based on the displacement deviation transmitted by the measuring board; the controller is respectively connected to the industrial computer, the dividing fixed base, the engraving fixed base and the tool lifting and lowering motor, and the industrial computer sends a control signal to the controller, thereby adjusting the movement distance and processing speed of the dividing moving platform and the engraving moving platform.
[0019] Furthermore, step S3 specifically includes the following steps:
[0020] S31: The industrial computer sends a marking instruction to the controller, and the controller controls the indexing fixed base, the marking fixed base, and the tool lifting and lowering motor to drive the indexing movable table, the marking movable table, and the marking tool to return to the initial position;
[0021] S32: The tool lift and drop motor drives the scoring tool to drop the tool, so that the scoring tool contacts the grating to be processed. At this time, the scoring moving stage drives the grating to be processed to move at the minimum processing speed, so that the scoring tool leaves a mark on the processing surface of the grating to be processed;
[0022] S33: Turn on the laser and generate an interference signal in the interferometer. The detector converts the interference signal into an electrical signal and transmits it to the measurement board. The measurement board obtains the displacement deviation based on the electrical signal using the following formula and transmits the obtained displacement deviation to the industrial computer:
[0023]
[0024] Where i = {1, 2, ..., n} represents the number of times the scoring tool scores the grating to be processed; x i represents the displacement deviation during the i-th scratching; λ R represents the wavelength of the laser emitted by the laser, and Δf represents the Doppler shift of the laser frequency caused by the displacement of the measuring mirror;
[0025] S34: Control the tool lift motor to drive the scoring tool to perform a tool lift movement: the scoring tool is separated from the grating to be processed; the scoring moving table is controlled to return to the initial position; the indexing moving table is controlled to drive the scoring tool to move to above the next processing position of the grating to be processed;
[0026] S35: Repeat steps S32 to S34 n times, and transmit the displacement deviations x1, x2, ..., x1 of the n times to the industrial computer. n ; The average displacement deviation of n times of scratching is obtained in the industrial computer through the following formula:
[0027]
[0028] in, represents the mean displacement deviation;
[0029] S36: The actual relative error at the minimum processing speed is obtained in the industrial computer using the following formula:
[0030]
[0031] Among them, δ l Indicates the actual relative error at the minimum processing speed;
[0032] The indexing moving table is controlled to drive the engraving tool to move above the next processing position of the grating to be processed.
[0033] Compared with the prior art, the present invention can achieve the following beneficial effects:
[0034] The method for automatically optimizing the relative optimal initial state of a grating ruling machine created by the present invention adopts a heterodyne laser interferometry method to measure the relative displacement between the ruling axis and the tool in the indexing direction, thereby avoiding the problem of manual estimation degrading the measurement accuracy; and then uses a dichotomy and an iterative method to determine the relative optimal ruling speed based on the measured relative displacement, thereby ensuring the relative stability of the instrument during the ruling process. BRIEF DESCRIPTION OF THE DRAWINGS
[0035] The accompanying drawings, which constitute part of the present invention, are intended to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are intended to explain the present invention and do not constitute an undue limitation of the present invention. In the accompanying drawings:
[0036] Figure 1 A flowchart of the method for automatically optimizing the relative optimal initial state of a grating ruling machine according to an embodiment of the present invention;
[0037] Figure 2 This is a schematic diagram of the overall structure of the grating ruling machine described in the embodiment of the present invention.
[0038] Description of reference numerals:
[0039] 1. Indexing fixed base; 2. Indexing movable table; 3. Tool lifting and lowering motor bracket; 4. Tool lifting and lowering motor; 5. Scribing tool holder; 6. Scribing tool; 7. Grating to be processed; 8. Scribing fixed base; 9. Grating base; 10. Scribing movable table; 11. Laser; 12. Measuring mirror; 13. Interferometer; 14. Detector; 15. Measuring board; 16. Industrial computer; 17. Controller. DETAILED DESCRIPTION
[0040] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and do not constitute a limitation of the present invention.
[0041] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.
[0042] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second" and the like are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, features defined as "first", "second" and the like may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.
[0043] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to internal connections between two components. Those skilled in the art can understand the specific meanings of the above terms in the present invention based on specific circumstances.
[0044] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.
[0045] like Figures 1 to 2 As shown, the method for automatically optimizing the relative optimal initial state of a grating ruling machine according to an embodiment of the present invention specifically includes the following steps:
[0046] S1: Install the tool holder system on the indexing system, install the grating to be processed on the scoring system perpendicular to the movement direction of the indexing system, and install the deviation measurement system on the indexing system and the scoring system; the control system is respectively connected to the indexing system, the scoring system and the deviation measurement system.
[0047] The indexing system includes an indexing air-bearing translation stage. Its fixed indexing base 1 is mounted on a work platform, and the tool holder system is mounted on its movable indexing stage 2. The movable indexing stage 2 drives the tool holder system along the fixed indexing base 1. The fixed indexing base 1 is communicatively connected to a control system, allowing the fixed indexing base 1 to drive the movable indexing stage 2 according to control signals from the control system.
[0048] The tool holder system includes a blade lift / drop motor bracket 3, a blade lift / drop motor 4, a scoring tool holder 5, and a scoring tool 6. The blade lift / drop motor bracket 3 is mounted on the indexing platform 2. The blade lift / drop motor 4 and scoring tool holder 5 are mounted on the blade lift / drop motor bracket 3. The scoring tool holder 5 is connected to the free end of the blade lift / drop motor 4, allowing the blade lift / drop motor 4 to control the scoring tool holder 5's lift / drop motion. The scoring tool 6 is mounted on the scoring tool holder 5 to perform the scoring of the grating 7 to be processed.
[0049] The scoring system includes an air-bearing stage. Its fixed base 8 is mounted on a work platform, perpendicular to the indexing fixed base 1. The grating 7 to be processed is fixedly mounted on the stage 10 via a grating mount 9. The fixed base 8 is communicatively connected to a control system, which drives the stage 10 based on control signals from the control system.
[0050] The deviation measurement system includes a laser 11, a measuring mirror 12, an interferometer 13, a detector 14, and a measuring board 15. The laser 11 and the interferometer 13 are mounted on the indexing movable stage 2, and the measuring mirror 12 is mounted on the scribing movable stage 10. The reference laser emitted by the laser 11 is irradiated onto the measuring mirror 12 via the interferometer 13, and the measuring mirror 12 reflects the generated reflected laser light back to the interferometer 13. The reference laser light and the reflected laser light interfere with each other in the interferometer 13. The detector 14 is in communication with the interferometer 13, and the interference signal generated by the interferometer 13 is transmitted to the detector 14. The detector 14 then transmits the detection result to the measuring board 15. The measuring board 15 performs calculations based on the received detection result to obtain the displacement deviation of the tool holder system and the indexing system in the direction of motion of the indexing system at different processing speeds, and then transmits the displacement deviation to the control system.
[0051] The control system includes an industrial computer 16 and a controller 17. The industrial computer 16 sets the minimum and maximum processing speeds, as well as the target relative error. It also communicates with the measurement board 15, allowing it to calculate the actual relative error at different processing speeds based on the displacement deviation transmitted by the measurement board 15. The controller 17 is connected to the industrial computer 16, the indexing fixed base 1, the tool lift and lowering motor 4, and the scoring fixed base 8. The industrial computer 16 sends control signals to the controller 17, which in turn adjusts the movement distance and processing speed of the indexing and scoring movable stages 2 and 10.
[0052] S2: Setting the minimum processing speed and the maximum processing speed for processing the grating 7 to be processed, as well as the target relative error between the tool holder system and the indexing system in the movement direction of the indexing system in the control system.
[0053] In step S2, the industrial computer 16 sets the minimum processing speed v l , maximum processing speed vh At the same time, the scratch length l and the scratch density d of each scratch are set in the industrial computer 16.
[0054] S3: The control system controls the indexing system and the engraving system to process the grating 7 to be processed according to the minimum processing speed, and obtains the actual relative error of the tool holder system and the indexing system in the movement direction of the indexing system corresponding to the minimum processing speed through the deviation measurement system.
[0055] Step S3 specifically includes the following steps:
[0056] S31: The industrial computer 16 sends a marking instruction to the controller 17, and the controller 17 controls the indexing fixed base 1, the knife lifting and lowering motor 4 and the marking fixed base 8 to drive the indexing movable platform 2, the marking tool 6 and the marking movable platform 10 to return to the initial position.
[0057] S32: The tool lift motor 4 drives the scoring tool 6 to perform a tool drop motion, so that the scoring tool 6 contacts the grating 7 to be processed. At this time, the scoring moving platform 10 moves at the minimum processing speed v l The grating 7 to be processed is driven to move, so that the scribing tool 6 leaves a scratch on the processing surface of the grating 7 to be processed.
[0058] S33: Turn on the laser 11 and generate an interference signal in the interferometer 13. The detector 14 converts the interference signal into an electrical signal and transmits it to the measurement board 15. The measurement board 15 obtains the displacement deviation according to the electrical signal using the following formula and transmits the obtained displacement deviation to the industrial computer 16:
[0059]
[0060] Wherein, i={1,2,…,n} represents the number of times the scribing tool 6 scribes the grating 7 to be processed; x i represents the displacement deviation during the i-th scratching; λ R represents the wavelength of the laser light emitted by the laser 11, and Δf represents the Doppler shift of the laser frequency caused by the displacement of the measuring mirror 12. In the embodiment of the present invention, n=5 is set, that is, the number of scratches in each round is 5.
[0061] S34: Controlling the tool lift motor 4 to drive the scoring tool 6 to perform a tool lift motion. The tool lift motion includes: separating the scoring tool 6 from the grating 7 to be processed; controlling the scoring platform 10 to return to its initial position, i.e., the scoring platform 10 drives the grating 7 to be processed in the opposite direction of the scoring by a length of l; and controlling the indexing platform 2 to drive the scoring tool 6 to move above the next processing position of the grating 7 to be processed, i.e., the indexing platform 2 drives the scoring tool 6 to move so that the distance between the two scorings is 1 / d.
[0062] S35: Repeat steps S32 to S34 n times, and transmit the displacement deviations x1, x2, ..., x1 of the n times to the industrial computer 16. n The average displacement deviation of n times of scratching is obtained in the industrial computer 16 by the following formula:
[0063]
[0064] in, represents the mean displacement deviation.
[0065] S36: The minimum processing speed v is obtained in the industrial computer 16 by the following formula l The actual relative error is:
[0066]
[0067] Among them, δ l Indicates the minimum processing speed v l At this time, the indexing moving table 2 is controlled to drive the engraving tool 6 to move to the top of the next processing position of the grating 7 to be processed;
[0068] S4: At maximum processing speed v h Replace the minimum processing speed v l , and repeat step S3 to obtain the maximum processing speed v h The actual relative error δ between the tool holder system and the indexing system in the direction of motion of the indexing system is h .
[0069] S5: The control system compares the two current actual relative errors with the target relative error:
[0070] If the minimum value of the two current actual relative errors is less than or equal to the target relative error δ, the processing speed corresponding to the minimum value is the target processing speed, and processing of the grating 7 to be processed is stopped;
[0071] If the minimum of the two current actual relative errors is greater than the target relative error δ, calculate the average speed of the processing speeds corresponding to the two actual relative errors, and replace the processing speed corresponding to the maximum of the two current actual relative errors with the average speed, and repeat step S3 to calculate the actual relative error corresponding to the average speed.
[0072] At minimum processing speed v l The corresponding actual relative error δ l Less than the maximum processing speed v h The corresponding actual relative error δ h For example. If the actual relative error δ l Less than the target relative error δ, minimum processing speed v lThat is the target processing speed; if the actual relative error δ l Greater than the target relative error δ, the minimum processing speed v is calculated by the following formula l and maximum processing speed v h Average speed
[0073]
[0074] And based on the average speed The grating 7 to be processed is processed at an average speed. Replace the maximum processing speed v h , then repeat step S3 to calculate the average speed The actual relative error δ1.
[0075] S6: Minimum and average speed The actual relative error δ1 is compared with the target relative error δ, and step S5 is repeated until the minimum value of the two current actual relative errors is less than or equal to the target relative error δ. The processing speed corresponding to the minimum value at this time is the target processing speed.
[0076] At the same minimum processing speed v l The corresponding actual relative error δ l Less than the maximum processing speed v h The corresponding actual relative error δ h For example:
[0077] If the minimum processing speed v l The corresponding actual relative error δ l Greater than average speed The corresponding actual relative error δ1, compare the actual relative error δ1 with the target relative error δ:
[0078] If the actual relative error δ1 is less than or equal to the target relative error δ, the average speed That is the target processing speed;
[0079] If the actual relative error δ1 is greater than the target relative error δ, the minimum processing speed v is calculated by the following formula l and average speed Average speed
[0080]
[0081] At average speed Replace the minimum processing speed v l , then repeat step S3 to calculate the average speed The actual relative error δ2.
[0082] If the minimum processing speed v l The corresponding actual relative error δ l Slower than average speed The corresponding actual relative error δ1, and at this time, under the premise that the actual relative error δ1 has been judged to be greater than the target relative error δ, the minimum processing speed v is also calculated by the above formula l and average speed Average speed Repeat step S3 to calculate the average speed The actual relative error δ2.
[0083] Getting the average speed and its corresponding actual relative error δ2, repeat the comparison of the actual relative error and the target relative error in step S5 until the minimum of the two actual relative errors is less than or equal to the target relative error. The processing speed corresponding to the minimum value at this time is the target processing speed.
[0084] If the minimum processing speed v l The corresponding actual relative error δ l Greater than the maximum processing speed v h The corresponding actual relative error δ h The calculation and comparison process of step S5 and step S6 is similar and will not be described in detail here.
[0085] It should be understood that the various forms of the processes shown above can be used to reorder, add, or delete steps. For example, the steps described in the present disclosure can be performed in parallel, sequentially, or in a different order, as long as the desired results of the technical solutions disclosed in the present disclosure can be achieved. This is not limited herein.
[0086] The above specific embodiments do not limit the scope of protection of the present invention. Those skilled in the art will appreciate that various modifications, combinations, sub-combinations, and substitutions may be made based on design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention are intended to be included within the scope of protection of the present invention.
Claims
1. A method for automatically optimizing a grating ruling machine relative to its optimal initial state, characterized by: The specific steps include: S1: Install the tool holder system on the indexing system, install the grating to be processed on the scoring system perpendicular to the movement direction of the indexing system, and install the deviation measurement system on the indexing system and the scoring system; and connect the control system to the indexing system, the scoring system, and the deviation measurement system respectively. In step S1, the indexing system includes an indexing air-bearing displacement stage; wherein the indexing fixed base of the indexing air-bearing displacement stage is mounted on a work platform, and the tool holder system is mounted on an indexing movable stage of the indexing air-bearing displacement stage, so that the indexing movable stage drives the tool holder system to move along the indexing fixed base; the indexing fixed base is connected to the control system, so that the indexing fixed base drives the indexing movable stage according to a control signal of the control system; In step S1, the scribing system includes a scribing air-floating displacement stage; wherein the scribing fixed base of the scribing air-floating displacement stage is mounted on a work platform, and the scribing fixed base is arranged perpendicular to the indexing fixed base; the grating to be processed is fixedly mounted on the scribing movable stage of the scribing air-floating displacement stage via a grating base; the scribing fixed base is connected to the control system, so that the scribing fixed base drives the scribing movable stage according to a control signal of the control system; In step S1, the deviation measurement system includes a laser, a measuring mirror, an interferometer, a detector, and a measuring board; wherein the laser and the interferometer are mounted on the indexing movable stage, and the measuring mirror is mounted on the scribing movable stage, so that a reference laser emitted by the laser is irradiated onto the measuring mirror via the interferometer, and the measuring mirror reflects the generated reflected laser back into the interferometer; the reference laser and the reflected laser interfere with each other in the interferometer; the detector is connected to the interferometer, and the interference signal generated by the interferometer is transmitted to the detector, and the detector then transmits the detection result to the measuring board, and the measuring board performs calculations based on the received detection result to obtain the displacement deviation of the tool holder system and the indexing system in the movement direction of the indexing system at different processing speeds, and then transmits the displacement deviation to the control system; S2: setting, in the control system, a minimum processing speed and a maximum processing speed for processing the grating to be processed, as well as a target relative error between the tool holder system and the indexing system in the movement direction of the indexing system; S3: The control system controls the indexing system and the scribing system to process the grating to be processed according to the minimum processing speed, and obtains, through the deviation measurement system, an actual relative error between the tool holder system and the indexing system in the motion direction of the indexing system corresponding to the minimum processing speed; S4: replacing the minimum processing speed with the maximum processing speed, and repeating step S3 to obtain an actual relative error between the tool holder system and the indexing system in the movement direction of the indexing system corresponding to the maximum processing speed; S5: The control system compares the two current actual relative errors with the target relative error: if the minimum of the two actual relative errors is less than or equal to the target relative error, the processing speed corresponding to the minimum value is the target processing speed, and processing of the grating to be processed is stopped; if the minimum of the two actual relative errors is greater than the target relative error, the average speed of the processing speeds corresponding to the two actual relative errors is calculated, and the processing speed corresponding to the maximum of the two current actual relative errors is replaced by the average speed, and step S3 is repeated to calculate the actual relative error corresponding to the average speed; S6: Compare the actual relative error between the minimum value and the average speed with the target relative error, and repeat step S5 until the minimum value of the two actual relative errors is less than or equal to the target relative error. The processing speed corresponding to the minimum value at this time is the target processing speed.
2. The method for automatically optimizing a grating ruling machine relative to an optimal initial state according to claim 1, characterized in that: In step S1, the tool holder system includes a tool lifting and lowering motor bracket, a tool lifting and lowering motor, a scoring tool holder and a scoring tool; wherein, the tool lifting and lowering motor bracket is installed on the indexing movable table, the tool lifting and lowering motor and the scoring tool holder are installed on the tool lifting and lowering motor bracket, and the scoring tool holder is connected to the free end of the tool lifting and lowering motor, so that the tool lifting and lowering motor controls the scoring tool holder to perform lifting and lowering movement; the scoring tool is installed on the scoring tool holder to complete the scoring of the grating to be processed.
3. The method for automatically optimizing a grating ruling machine relative to an optimal initial state according to claim 2, characterized in that: In step S1, the control system includes an industrial computer and a controller; wherein, the industrial computer completes the setting of the minimum processing speed, the maximum processing speed and the target relative error, and the industrial computer is connected to the measuring board, so that the industrial computer calculates the actual relative error under different processing speeds based on the displacement deviation transmitted by the measuring board; the controller is respectively connected to the industrial computer, the dividing fixed base, the engraving fixed base and the knife lifting and lowering motor, and the industrial computer sends a control signal to the controller, thereby adjusting the movement distance and processing speed of the dividing movable table and the engraving movable table.
4. The method for automatically optimizing a grating ruling machine relative to an optimal initial state according to claim 3, characterized in that: The step S3 specifically includes the following steps: S31: The industrial computer sends a scribing instruction to the controller, and the controller controls the indexing fixed base, the scribing fixed base, and the tool lifting and lowering motor to drive the indexing movable platform, the scribing movable platform, and the scribing tool to return to their initial positions. S32: The tool lifting and lowering motor drives the scoring tool to perform a tool lowering motion, so that the scoring tool contacts the grating to be processed. At this time, the scoring moving stage drives the grating to be processed to move at the minimum processing speed, so that the scoring tool leaves a mark on the processing surface of the grating to be processed; S33: Turn on the laser and generate the interference signal in the interferometer. The detector converts the interference signal into an electrical signal and transmits it to the measurement board. The measurement board obtains the displacement deviation according to the electrical signal using the following formula and transmits the obtained displacement deviation to the industrial computer: ; in, Indicates the number of times the scribing tool scribes the grating to be processed; represents the displacement deviation during the i-th scratching; represents the wavelength of the laser emitted by the laser, represents the Doppler shift of the laser frequency due to the displacement of the measuring mirror; S34: Controlling the tool lifting and lowering motor to drive the scoring tool to perform a tool lifting movement: separating the scoring tool from the grating to be processed; controlling the scoring movable table to return to the initial position; and controlling the indexing movable table to drive the scoring tool to move above the next processing position of the grating to be processed; S35: Repeat steps S32 to S34 n times, and transmit the displacement deviation of n times of engraving to the industrial computer The average displacement deviation of n times of scratching is obtained in the industrial computer by the following formula: ; in, represents the average displacement deviation; S36: In the industrial computer, the actual relative error at the minimum processing speed is obtained by the following formula: ; in, Indicates the actual relative error at the minimum processing speed; The indexing movable platform is controlled to drive the engraving tool to move above the next processing position of the grating to be processed.
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