A flexible vibration sensor for tunnel boring machine cutterheads and its fabrication method

Abstract

The present invention discloses a flexible vibration sensor for a shield cutter head and a preparation method thereof. The flexible vibration sensor comprises: a first base and a second base, which are arranged at intervals on the shield cutter head; a flexible cover, which is arranged on the first base and the second base; a vibration sensing sheet, which is located in the flexible cover, and the two ends of the vibration sensing sheet are respectively arranged above the first base and above the second base, so that the middle part of the vibration sensing sheet is suspended; the vibration sensing sheet comprises: a rigid layer and a first paper base layer stacked in sequence, a first conductive layer is arranged on the first paper base layer, and a plurality of micro grooves are arranged in the middle of the first paper base layer, and the thickness of the rigid layer is micrometer level. The present application forms a first paper base layer and a first conductive layer on the rigid layer, and on the basis of retaining the flexibility of the sensor, the mechanical strength and stability of the sensor are greatly improved to meet the requirements of measuring the vibration of the shield cutter head. The flexible vibration sensor of the embodiment of the present invention has high mechanical strength and stable structure.

Description

Technical Field

[0001] The invention relates to the technical field of shield cutter head vibration detection, and in particular to a flexible vibration sensor for a shield cutter head and a preparation method thereof. Background Art

[0002] When constructing subway tunnels, the shield method has become the mainstream choice due to its safety and efficiency. The excavation of the shield machine is mainly achieved by the cutterhead at the front, but due to the uneven distribution of the hardness of the rock and soil structure, the cutterhead will inevitably vibrate during the process of rotating and cutting the rock and soil. If the frequency of the vibration is close to or the same as the natural frequency of the cutterhead, it will cause the cutterhead to resonate, which may cause damage to the cutterhead at the least, or even cause an engineering accident at the worst. Therefore, it is very important to control the vibration of the shield cutterhead.

[0003] In the prior art, velocity sensors or acceleration sensors are usually used as vibration sensors to collect vibration signals of shield cutter heads. The quality of these vibration sensors will directly affect the monitoring effect of the entire monitoring system. Moreover, when used in engineering machinery such as shield cutter heads, the mechanical strength and structural stability of the vibration sensors themselves are low, which can easily lead to damage to the vibration sensors.

[0004] Therefore, the prior art still needs to be improved and developed. Summary of the invention

[0005] The technical problem to be solved by the present invention is that, in view of the above-mentioned defects of the prior art, a flexible vibration sensor for a shield cutter head and a preparation method thereof are provided, aiming to solve the problem in the prior art that the mechanical strength and structural stability of the vibration sensor itself are low and easily damaged.

[0006] The technical solution adopted by the present invention to solve the technical problem is as follows:

[0007] A flexible vibration sensor for a shield cutter head, comprising:

[0008] The first base and the second base are arranged at intervals on the shield cutter head;

[0009] A flexible cover, disposed on the first base and the second base;

[0010] A vibration sensing piece is located in the flexible cover, and two ends of the vibration sensing piece are respectively arranged above the first base and above the second base, so that the middle part of the vibration sensing piece is suspended in the air; the vibration sensing piece includes: a rigid layer and a first paper base layer stacked in sequence, a first conductive layer is arranged on the first paper base layer, and a plurality of micro grooves are arranged in the middle part of the first paper base layer; wherein the thickness of the rigid layer is in micrometer level.

[0011] In the flexible vibration sensor for a shield cutter head, the first conductive layer is selected from a conductive composite material layer or a polymer conductive material layer.

[0012] The flexible vibration sensor for the shield cutter head, wherein the first conductive layer is provided with a first electrode and a second electrode, the position of the first electrode corresponds to the position of the first base, and the position of the second electrode corresponds to the position of the second base.

[0013] The flexible vibration sensor for the shield cutter head is characterized in that a second paper base layer is arranged on the side of the rigid layer away from the first paper base layer, a second conductive layer is arranged on the second paper base layer, and the second conductive layer is selected from a conductive composite material layer or a polymer conductive material layer.

[0014] In the flexible vibration sensor for a shield cutter head, the conductive composite material layer is made of micro-nano conductive material and adhesive material, and the polymer conductive material layer is made of poly (3,4-ethylenedioxythiophene) / polystyrene sulfonate.

[0015] The flexible vibration sensor for a shield cutter head, wherein the flexible cover comprises:

[0016] A first rigid portion, disposed on the first base;

[0017] A second rigid portion, disposed on the second base;

[0018] a flexible portion, located between the first rigid portion and the second rigid portion, and connected to the first rigid portion and the second rigid portion;

[0019] Wherein, the position of the flexible portion corresponds to the position of the micro groove.

[0020] A method for preparing a flexible vibration sensor for a shield cutter head as described in any one of the above, comprising the steps of:

[0021] bonding a first paper base layer to the rigid layer and forming micro grooves on the first paper base layer to obtain a multilayer structure;

[0022] After soaking or spraying the multilayer structure with a solution of a conductive material, solidifying it to obtain a vibration sensing sheet;

[0023] The vibration sensing sheet is assembled on the first base and the second base, and the flexible cover is assembled on the first base and the second base to obtain a flexible vibration sensor.

[0024] The method for preparing the flexible vibration sensor for the shield cutter head comprises the following steps: after the first paper base layer is bonded to the rigid layer, the second paper base layer is bonded to the side of the rigid layer away from the first paper base layer.

[0025] In the method for preparing the flexible vibration sensor for the shield cutter head, the immersion and curing of the multilayer structure are repeated multiple times.

[0026] The method for preparing the flexible vibration sensor for the shield cutter head, wherein the solution of the conductive material comprises: micro-nano conductive material, adhesive material, curing agent and solvent; the micro-nano conductive material is selected from at least one of carbon nanotubes and carbon black.

[0027] Beneficial effect: The present application forms a first paper base layer and a first conductive layer on the rigid layer, which greatly improves the mechanical strength and stability of the sensor while retaining the flexibility of the sensor, so as to meet the requirements of measuring the vibration of the shield cutter head. The flexible vibration sensor of the embodiment of the present invention has the advantages of high mechanical strength, stable structure, simple preparation method, and low preparation cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a schematic structural diagram of the first base, the second base and the vibration sensing piece in an embodiment of the present invention.

[0029] Figure 2 is a cross-sectional view of a flexible vibration sensor in an embodiment of the present invention.

[0030] Figure 3 4 is a cross-sectional view of a vibration sensing sheet in an embodiment of the present invention.

[0031] Figure 4 3 is a curve of the resistance change rate △R / R0 of the flexible vibration sensor in the embodiment of the present invention under vibrations of several different amplitudes.

[0032] Description of reference numerals:

[0033] 11. First base; 12. Second base; 21. First rigid part; 22. Second rigid part; 23. Flexible part; 30. Vibration sensing piece; 31. Rigid layer; 32. First paper base layer; 321. Micro groove; 33. First electrode; 34. Second electrode; 35. Second paper base layer. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical solution and advantages of the present invention clearer and more specific, the present invention is further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0035] Please also see Figure 1-Figure 4 The present invention provides some embodiments of a flexible vibration sensor for a shield cutter head.

[0036] like Figure 2-Figure 3As shown, the flexible vibration sensor for the shield cutter head of the present invention comprises:

[0037] The first base 11 and the second base 12 are arranged at intervals on the shield cutter head;

[0038] A flexible cover, disposed on the first base 11 and the second base 12;

[0039] The vibration sensing piece 30 is located in the flexible cover, and the two ends of the vibration sensing piece 30 are respectively arranged above the first base 11 and above the second base 12, so that the middle part of the vibration sensing piece 30 is suspended in the air; the vibration sensing piece 30 includes: a rigid layer 31 and a first paper base layer 32 stacked in sequence, a first conductive layer is arranged on the first paper base layer 32, and a plurality of micro grooves 321 are arranged in the middle of the first paper base layer 32, wherein the thickness of the rigid layer 31 is in the micron level.

[0040] Specifically, the shield cutterhead is usually disc-shaped, and the shield cutterhead includes a main body and a cutter, and the flexible vibration sensor is arranged on the main body. For example, the first base 11 and the second base 12 are arranged on the main body, and there is a spacing between the first base 11 and the second base 12, and the first base 11 and the second base 12 have a certain thickness, and the vibration sensing piece 30 is located on the first base 11 and the second base 12, and the first base 11 and the second base 12 are supported to a certain height, then the space between the first base 11 and the second base 12 can avoid the vibration deformation of the vibration sensing piece 30, and the first base 11, the second base 12, the flexible cover and the main body of the shield cutterhead will not affect the vibration deformation of the vibration sensing piece 30. The flexible cover is arranged on the first base 11 and the second base 12, and the vibration sensing piece 30 is located in the flexible cover, which is conducive to protecting the vibration sensing piece 30. Since the flexible cover can be deformed, when the main body of the shield cutter disc vibrates, the relative position relationship between the first base 11 and the second base 12 is constantly changing, and the vibration sensing sheet 30 and the flexible cover are deformed accordingly. The vibration sensing sheet 30 can sense the vibration signal of the main body of the shield cutter disc. When the vibration frequency of the shield cutter disc is close to the natural frequency of the shield cutter disc, the shield cutter disc may resonate and be damaged. Therefore, it is necessary to detect whether the vibration frequency of the shield cutter disc is close to the natural frequency. When the shield cutter disc is damaged, the shield cutter disc will vibrate abnormally. By detecting the vibration signal of the shield cutter disc, if abnormal vibration occurs, the shield cutter disc needs to be repaired. When the shield cutter disc excavates different soils, the vibration of the shield cutter disc may also be different. By detecting the vibration signal of the shield cutter disc, different soils can be distinguished and identified.

[0041] The vibration sensing sheet 30 includes a rigid layer 31 and a first paper base layer 32. The rigid layer 31 has a certain rigidity and can be deformed within a certain range. The first paper base layer 32 is made of paper material, which usually forms a porous structure. The first conductive layer can be embedded in the porous structure of the first paper base layer 32, or formed on the surface of the first conductive layer. A plurality of micro grooves 321 are formed on the first paper base layer 32. The first conductive layer can be embedded in the groove wall of the micro groove 321, or formed on the groove wall surface of the micro groove 321. During the operation of the shield cutter head, the shield cutter head (or the main body) will vibrate, and the rigid layer 31 of the vibration sensing sheet 30 will also vibrate accordingly. The amplitude of the rigid layer 31 is related to the amplitude of the shield cutter head. The first paper base layer 32 is constantly convex and concave, and the micro grooves 321 are constantly opening and closing. Then, the resistance of the first conductive layer is constantly increasing and decreasing, presenting an obvious up and down fluctuation signal.

[0042] The present application forms a first paper base layer 32 and a first conductive layer on the rigid layer 31, which greatly improves the mechanical strength and stability of the sensor while retaining the flexibility of the sensor, so as to meet the requirements of measuring the vibration of the shield cutter head. The flexible vibration sensor of the embodiment of the present invention has the advantages of high mechanical strength, stable structure, simple preparation method, and low preparation cost.

[0043] The rigid layer 31 is made of a rigid material, and the rigid material is selected from one of a metal material, a metal compound material, a ceramic material, and a glass material. The metal material may be an alloy material. Since the flexible cover can be bent and deformed, the flexible vibration sensor can be installed on a curved and complex surface on the shield cutter head. The method for forming the micro groove 321 includes at least one of photolithography, laser etching, a structural template method, and a mechanical cutting method. The width of the micro groove 321 is micron-level, the depth of the micro groove 321 is micron-level, and the length of the micro groove 321 is determined as required.

[0044] In a preferred implementation manner of the embodiment of the present invention, the first conductive layer is selected from a conductive composite material layer or a polymer conductive material layer.

[0045] Specifically, the conductive composite material in the conductive composite material layer is selected from at least one of a composite material of micro-nano conductive material and adhesive material, conductive hydrogel, and ion gel. The micro-nano conductive material is selected from at least one of carbon nanotubes, graphene, carbon black, metal particles, metal nanowires, two-dimensional metal carbides, and nitrides. The polymer conductive material of the polymer conductive material layer is selected from poly (3,4-ethylenedioxythiophene) / polystyrene sulfonate (PEDOT:PSS).

[0046] In a preferred implementation of the embodiment of the present invention, Figure 1-Figure 2As shown, the first conductive layer is provided with a first electrode 33 and a second electrode 34 . The position of the first electrode 33 corresponds to the position of the first base 11 , and the position of the second electrode 34 corresponds to the position of the second base 12 .

[0047] Specifically, the first conductive layer may be provided with a first electrode 33 and a second electrode 34, and the first conductive layer may be powered and the resistance or voltage change of the first conductive layer may be collected through the first electrode 33 and the second electrode 34. The first electrode 33 and the second electrode 34 may be embedded in the first paper base layer 32, or may be formed on the surface of the first paper base layer 32. In order to facilitate the connection of the first electrode 33 and the second electrode 34 with wires or conductive tapes, at least a portion of the first electrode 33 is formed on the surface of the first paper base layer 32, and at least a portion of the second electrode 34 is formed on the surface of the first paper base layer 32.

[0048] In a preferred implementation of the embodiment of the present invention, Figure 3 As shown, a second paper base layer 35 is disposed on the side of the rigid layer 31 away from the first paper base layer 32 , and a second conductive layer is disposed on the second paper base layer 35 , and the second conductive layer is selected from a conductive composite material layer or a polymer conductive material layer.

[0049] Specifically, a first paper base layer 32 is disposed on the first side of the rigid layer 31, a second paper base layer 35 may be disposed on the second side of the rigid layer 31, the second paper base layer 35 may not be provided with micro grooves 321, a second conductive layer may be disposed on the second paper base layer 35, and the second conductive layer and the first conductive layer are made of the same material. The second conductive layer may be embedded in the second paper base layer 35, or may be formed on the surface of the second paper base layer 35.

[0050] In a preferred implementation of the embodiment of the present invention, the conductive composite material layer is made of micro-nano conductive material and adhesive material, and the polymer conductive material layer is made of PEDOT:PSS.

[0051] Specifically, when using micro-nano conductive materials, the micro-nano conductive materials can easily enter the porous structure of the paper material and can also easily be entangled and connected with the fibers in the paper material, so the micro-nano conductive materials are not easy to separate from the paper material, which is beneficial to improve the service life of the vibration sensor sheet 30. The polymer conductive material layer can be made of poly (3,4-ethylenedioxythiophene) / polystyrene sulfonate (PEDOT:PSS).

[0052] In a preferred implementation of the embodiment of the present invention, Figure 1-Figure 2 As shown, the flexible cover comprises:

[0053] A first rigid portion 21, disposed on the first base 11;

[0054] A second rigid portion 22, disposed on the second base 12;

[0055] The flexible portion 23 is located between the first rigid portion 21 and the second rigid portion 22 and is connected to the first rigid portion 21 and the second rigid portion 22;

[0056] The position of the flexible portion 23 corresponds to the position of the micro groove 321 .

[0057] Specifically, when the shield cutter head vibrates, the first base 11 and the second base 12 vibrate accordingly, the first rigid part 21 vibrates with the first base 11, and the second rigid part 22 vibrates with the second base 12. Since the vibration of the first base 11 and the vibration of the second base 12 are not synchronously tuned, and the relative positions of the two change, the relative positions of the first rigid part 21 and the second rigid part 22 also change, and the flexible part 23 can be deformed, so that the first rigid part 21 and the second rigid part 22 vibrate independently of each other. When the first base 11 and the second base 12 vibrate independently of each other, the vibration sensing sheet 30 will also vibrate and deform. The position of the flexible part 23 corresponds to the position of the micro groove 321. Due to the existence of the flexible part 23, the vibration of the vibration sensing sheet 30 will not be affected, and the correlation with the vibration of the shield cutter head is stronger.

[0058] The material of the flexible part 23 is selected from thermoplastic elastomer or thermoplastic vulcanized rubber, and the thermoplastic elastomer is selected from at least one of silicone rubber, epoxy resin, thermoplastic polyurethane, polydimethylsiloxane, and styrene. For example, the flexible part 23 is made of Ecoflex elastic silicone material and is formed by a mold method. The first rigid part 21 and the second rigid part 22 can be made of PTEF material and formed by 3D printing.

[0059] In a preferred implementation of the embodiment of the present invention, Figure 1 As shown in the figure, the flexible cover includes: a bottom cover and a top cover, and both the bottom cover and the top cover include: a first rigid part 21, a second rigid part 22 and a flexible part 23. The bottom cover is located below the vibration sensing piece 30, and the top cover is connected to the bottom cover and covers the vibration sensing piece 30. There is a gap between the vibration sensing piece 30 and the bottom cover, and the bottom cover does not affect the vibration of the vibration sensing piece 30.

[0060] Based on the flexible vibration sensor for a shield cutter head described in any of the above embodiments, the present invention also provides a preferred embodiment of a method for a flexible vibration sensor for a shield cutter head:

[0061] The method for preparing a flexible vibration sensor for a shield cutter head according to an embodiment of the present invention comprises the following steps:

[0062] Step S100, bonding a first paper base layer to a rigid layer, and forming micro grooves on the first paper base layer to obtain a multilayer structure;

[0063] Step S200, soaking or spraying the multilayer structure with a solution of a conductive material, and then curing the solution to obtain a vibration sensing sheet;

[0064] Step S300: assemble the vibration sensing sheet on the first base and the second base, and assemble the flexible cover on the first base and the second base to obtain a flexible vibration sensor.

[0065] Specifically, a multilayer structure is prepared first, and then the multilayer structure is immersed in a solution of a conductive material. Alternatively, the solution of a conductive material can be sprayed on the multilayer structure. The conductive material will be adsorbed or attached to the first paper base layer. After curing, a first conductive layer is formed on the first paper base layer, and a vibration sensing sheet is obtained.

[0066] Then the vibration sensing sheet is mounted on the first base and the second base, and the flexible cover is mounted on the first base and the second base to obtain a flexible vibration sensor. When the flexible vibration sensor is applied to a shield cutter head, the first base and the second base are mounted on the main body of the shield cutter head.

[0067] Specifically, the bottom cover may be connected to the first base and the second base first, and then the vibration sensing sheet may be installed, and finally the bottom cover may be connected to the top cover to obtain the flexible vibration sensor.

[0068] After the first paper base layer is bonded to the rigid layer, the second paper base layer is bonded to the side of the rigid layer away from the first paper base layer. After the first paper base layer is bonded to the first side of the rigid layer and micro grooves are formed on the first paper base layer, the second paper base layer is bonded to the second side of the rigid layer (the first paper base layer and the second paper base layer can also be bonded first, and then micro grooves are formed on the first paper base layer), and then the first conductive layer is formed on the first paper base layer and the second conductive layer is formed on the second paper base layer through soaking and curing, respectively, to obtain a vibration sensing sheet.

[0069] The immersion and curing of the multilayer structure are repeated for multiple times. During a single immersion, the adsorption amount (or adhesion amount) of the micro-nano conductive material and the adhesive material is small. After curing, a second immersion and a second curing are performed, or even multiple immersions and multiple curings are performed.

[0070] The conductive material solution includes: micro-nano conductive material, adhesive material, curing agent and solvent; the micro-nano conductive material is selected from at least one of carbon nanotubes and carbon black. The micro-nano conductive material plays a conductive role, the adhesive material plays a role in bonding the micro-nano conductive material to the paper material, and the curing agent plays a role in curing the adhesive material. The micro-nano conductive material can be a carbon-based micro-nano conductive material such as multi-walled carbon nanotubes, carbon black, and graphene.

[0071] After the first conductive layer is formed, the first electrode and the second electrode may be formed or bonded on the first conductive layer. For example, a conductive silver paste may be coated on the first conductive layer, and then the first electrode and the second electrode may be bonded. Specific embodiment 1

[0073] Step (1), preparing two layers of A4 paper as a paper base layer, and a 304 stainless steel sheet with a thickness of 50 μm as a rigid layer, and placing the stainless steel sheet between the two layers of A4 paper to form a multi-layer structure, and bonding the layers together with a polyethylene terephthalate (PET) double-sided tape.

[0074] Step (2): using a femtosecond laser device, processing a micro-groove structure on any surface of the multilayer structure obtained in step (1), wherein the groove width is 40 μm and the groove depth is 10 μm.

[0075] Step (3), in order to make multi-walled carbon nanotubes and carbon black more stably attached to A4 paper, multi-walled carbon nanotubes and carbon black are stirred and mixed with ethyl acetate and polydimethylsiloxane, and then the multilayer structure is immersed in the mixed solution, taken out and dried, and the vibration sensing sheet can be obtained by repeating the soaking and drying for many times. Specifically: take a PDMS base agent (6g) and a curing agent (0.6g) with a mass ratio of 10:1 and add them to an ethyl acetate solution (25g), magnetically stir for 10 minutes at room temperature, then add multi-walled carbon nanotubes (0.2g) and carbon black (0.8g) with a mass ratio of 1:4, magnetically stir for 30 minutes at room temperature, and then perform ultrasonic treatment for 30 minutes to obtain a mixed solution. The multilayer structure is soaked in the mixed solution for 10 seconds, then placed in a vacuum heating furnace, heated at 70°C for 60 minutes, taken out and naturally cooled, and then placed in the mixed solution for 10 seconds, and then heated at 70°C for 60 minutes. The soaking-heating and drying process is repeated 3 times to finally obtain a vibration sensing sheet.

[0076] During operation, when the vibration sensing sheet senses vibration, the suspended vibration sensing sheet will vibrate and deform, causing relative contact or separation between the multi-walled carbon nanotubes and carbon black particles on the first paper base layer. In addition, multi-walled carbon nanotubes and carbon black particles are also distributed on the processed micro-groove structure. Vibration will cause these micro-grooves to deform, and the multi-walled carbon nanotubes and carbon black particles at the bottom of the micro-grooves will also come into relative contact or separation, causing a greater change in the resistance value of the first conductive layer. By measuring the change in the resistance value of the first conductive layer, the vibration signal received by the vibration sensing sheet can be measured.

[0077] The flexible vibration sensor of the present invention has strong adaptability to the installation position and can be installed at any position of the non-excavation surface (back side) of the shield cutter head.

[0078] It should be understood that the application of the present invention is not limited to the above examples. For ordinary technicians in this field, improvements or changes can be made based on the above description. All these improvements and changes should fall within the scope of protection of the claims attached to the present invention.

Claims

1. A flexible vibration sensor for a shield cutter head, characterized in that: include: The first base and the second base are arranged at intervals on the shield cutter head; A flexible cover, disposed on the first base and the second base; A vibration sensing sheet is located in the flexible cover, and two ends of the vibration sensing sheet are respectively arranged above the first base and above the second base, so that the middle part of the vibration sensing sheet is suspended in the air; the vibration sensing sheet comprises: a rigid layer and a first paper base layer stacked in sequence, a first conductive layer is arranged on the first paper base layer, and a plurality of micro grooves are arranged in the middle part of the first paper base layer; wherein the thickness of the rigid layer is micrometer level; The flexible cover comprises: A first rigid portion, disposed on the first base; A second rigid portion, disposed on the second base; a flexible portion, located between the first rigid portion and the second rigid portion, and connected to the first rigid portion and the second rigid portion; Wherein, the position of the flexible portion corresponds to the position of the micro groove.

2. The flexible vibration sensor for a shield cutterhead according to claim 1 is characterized in that: The first conductive layer is selected from a conductive composite material layer or a polymer conductive material layer.

3. The flexible vibration sensor for a shield cutter head according to claim 2 is characterized in that: The first conductive layer is provided with a first electrode and a second electrode. The position of the first electrode corresponds to the position of the first base, and the position of the second electrode corresponds to the position of the second base.

4. The flexible vibration sensor for a shield cutterhead according to claim 1, characterized in that: A second paper base layer is arranged on the side of the rigid layer away from the first paper base layer, a second conductive layer is arranged on the second paper base layer, and the second conductive layer is selected from a conductive composite material layer or a polymer conductive material layer.

5. The flexible vibration sensor for a shield cutter head according to any one of claims 2 to 4, characterized in that: The conductive composite material layer is made of micro-nano conductive material and adhesive material, and the polymer conductive material layer is made of poly (3,4-ethylenedioxythiophene) / polystyrene sulfonate.

6. A method for preparing a flexible vibration sensor for a shield cutter head according to any one of claims 1 to 5, characterized in that: Includes steps: bonding a first paper base layer to the rigid layer and forming micro grooves on the first paper base layer to obtain a multilayer structure; After soaking or spraying the multilayer structure with a solution of a conductive material, solidifying it to obtain a vibration sensing sheet; The vibration sensing sheet is assembled on the first base and the second base, and the flexible cover is assembled on the first base and the second base to obtain a flexible vibration sensor.

7. The method for preparing a flexible vibration sensor for a shield cutter head according to claim 6, characterized in that: After the first paper base layer is bonded to the rigid layer, the second paper base layer is bonded to the side of the rigid layer facing away from the first paper base layer.

8. The method for preparing a flexible vibration sensor for a shield cutter head according to claim 6, characterized in that: The soaking and curing of the multilayer structure are respectively repeated multiple times.

9. The method for preparing a flexible vibration sensor for a shield cutter head according to claim 6, characterized in that: The conductive material solution comprises: micro-nano conductive material, adhesive material, curing agent and solvent; the micro-nano conductive material is selected from at least one of carbon nanotubes and carbon black.

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