A cleaning device for photoresist production

Abstract

The present invention relates to the technical field of cleaning devices, and discloses a cleaning device for photoresist production, comprising: a cleaning machine body and a cleaning mechanism, wherein the cleaning mechanism comprises a flushing component, a connecting component and a scraping component, wherein the flushing component is arranged in a stirring shaft and is used to spray a cleaning agent on the inner wall of a mixing kettle body. In the cleaning mechanism provided by the present invention, by correspondingly arranging the flushing component and the scraping component on the stirring shaft and the stirring blade, the cleaning machine body is respectively connected to the connecting component and the liquid discharge port of the mixing kettle body, and the flushing component and the scraping component are respectively driven to unfold during the connection process and the cleaning process, and in cooperation with the rotation of the stirring shaft, the uniform spraying of the cleaning agent and the rotational scraping action of the impurities can be respectively completed, thereby eliminating the disassembly and assembly operation of the mixing kettle top cover, simplifying the traditional cleaning steps, and facilitating shortening the cleaning time.

Description

Technical Field

[0001] The present invention relates to the technical field of cleaning devices, and more particularly to a cleaning device for photoresist production. Background Art

[0002] Photoresist, also known as photoresist, refers to a thin film material that changes its solubility when exposed to ultraviolet light, electron beam, ion beam, X-ray, etc. It is a light-sensitive mixed liquid composed of three main components: photosensitive resin, sensitizer and solvent. It is used as an anti-corrosion coating material during the photolithography process. When semiconductor materials are processed on the surface, if an appropriate selective photoresist is used, the desired image can be obtained on the surface.

[0003] At present, in the production process of photoresist, it is necessary to evenly mix the raw materials after being precisely prepared in proportion. In this process, a special preparing kettle is generally used. After use, the inside of the preparing kettle needs to be cleaned for the next use. The traditional cleaning method is to use a cleaning device for cleaning. The cleaning process is to first remove the top cover of the preparing kettle, then install the cleaning device on the top of the preparing kettle body, and then clean the inside of the preparing kettle. After cleaning, the cleaning device is removed and the top cover of the preparing kettle is installed again. During the entire cleaning process, the operation is cumbersome and the workload is large, resulting in a slow cleaning speed, which is not conducive to cleaning operations on multiple preparing kettles. Summary of the invention

[0004] The purpose of the present invention is to provide a cleaning device for photoresist production to solve the above-mentioned technical problems.

[0005] The present invention solves the above-mentioned technical problems through the following technical solutions:

[0006] The present invention provides a cleaning device for photoresist production, comprising: a cleaning machine body and a cleaning mechanism, wherein the cleaning mechanism comprises a flushing component, a connecting component and a scraping component, wherein the flushing component is arranged in a stirring shaft and is used to spray a cleaning agent on the inner wall of a mixing kettle body; the connecting component is used to drive and connect the rotating end of a stirring motor with the upper end of the stirring shaft, and the interior of the connecting component is movably connected with the upper end of the flushing component; the scraping component is arranged in a stirring blade and is used to scrape and clean the inner wall of the mixing kettle body; the scraping component is connected with the lower end of the flushing component, and after the cleaning agent enters the scraping component from the flushing component, the scraping component is driven to slide close to the inner wall of the mixing kettle body, and flipped upward to unfold and fit with the inner wall of the mixing kettle body;

[0007] The input end of the cleaning machine body is connected to the discharge port of the mixing kettle body through a pipeline, and the output end is connected to the connecting component through a conveying pipe; the cleaning machine body is used to convey the cleaning agent to the connecting component, and to recover the used cleaning agent from the mixing kettle body and recycle it;

[0008] When the connecting end of the conveying pipe is connected to the connecting component, the connecting end of the conveying pipe drives the flushing component to move outward from the inside of the stirring shaft; when the stirring shaft rotates, the connecting end of the conveying pipe drives the spraying end of the flushing component to swing up and down, thereby achieving the function of evenly spraying the cleaning agent on the inner wall of the mixing kettle body.

[0009] As a further optimization scheme of the present invention, the flushing component includes an upper liquid inlet pipe, a lower liquid delivery pipe, a swing driving member and a plurality of spray heads, a movable groove is provided in the stirring shaft, the upper liquid inlet pipe, the lower liquid delivery pipe and the swing driving member are all arranged in the movable groove, the upper end of the upper liquid inlet pipe passes through the upper end of the stirring shaft upward, and is slidably connected with the inside of the connecting component, and the upper end of the upper liquid inlet pipe is provided with a liquid inlet tank body;

[0010] The upper end of the lower liquid infusion pipeline is connected to the lower end of the upper liquid inlet pipeline through an elastic telescopic pipe, and its lower end is fixedly connected to the inner bottom wall of the movable groove; the swing driving component is installed on the outside of the upper liquid inlet pipeline, and is used to drive the spray head to swing up and down on the outside of the stirring shaft; a plurality of spray heads are rotatably installed on the outside of the stirring shaft according to a preset arrangement, and one side of the spray heads is correspondingly connected to the upper liquid inlet pipeline and the lower liquid infusion pipeline through a hose.

[0011] As a further optimization scheme of the present invention, the swing driving member includes a rack and a swing gear, the number of the rack and the swing gear is the same as the number of the spray heads, the upper end of the rack is fixedly connected to the lower end of the upper liquid inlet pipe, and the swing gear is fixedly installed at the rotating end of the spray head, and one side of the swing gear is meshed with the rack.

[0012] As a further optimization scheme of the present invention, the connecting component includes a support seat, a liquid inlet cylinder, a first limit column and a second limit column. The support seat is fixedly installed on the top of the preparation kettle body, the upper end of the liquid inlet cylinder is fixedly connected to the rotating end of the stirring motor, and a number of liquid inlet holes are evenly opened at its lower end; the outer side of the liquid inlet cylinder is rotatably sleeved with an external sleeve, and the outer side of the external sleeve is fixedly connected to the support seat, the first limit column is fixedly sleeved on the upper end of the upper liquid inlet pipe, and its outer side is slidably connected to the upper end of the movable groove; the second limit column is fixedly installed on the upper end of the upper liquid inlet pipe, and its upper end is slidably connected to the inside of the liquid inlet cylinder.

[0013] As a further optimization scheme of the present invention, the conveying pipe fitting includes a connecting head, a limiting piece, an extrusion piece and a conveying pipe. One end of the connecting head is fixedly connected to one end of the conveying pipe, and the other end is threadedly connected to one side of the external sleeve; the limiting piece is rotatably sleeved on the outside of the connecting head, and is used to slide and limit the two sides of the connecting head; the extrusion piece is used to extrude the first limiting column downward.

[0014] As a further optimization scheme of the present invention, the limiting member includes a limiting plate and a limiting slide groove, the limiting slide groove is opened at the upper end of the support seat, limiting protrusions are installed on both sides of the upper end of the limiting plate, and the upper end of the limiting plate is slidably connected to the inner side of the limiting slide groove through the limiting protrusion.

[0015] As a further optimization scheme of the present invention, the extrusion part includes a contact cam, an extrusion protrusion and a contact groove. The contact cam is fixedly installed on the outside of the first limiting column, the extrusion protrusion is fixedly installed at the lower end of the limiting plate, and the contact groove is arranged at the upper end of the first limiting column. The extrusion protrusion is used to squeeze the contact cam and the contact groove downward.

[0016] As a further optimization scheme of the present invention, the scraping component includes an extension drive member and a scraping contact member, and the extension drive member is connected to the scraping contact member, which is used to drive the scraping contact member to flip upward ninety degrees and slide horizontally by relying on the thrust of the cleaning fluid.

[0017] As a further optimization scheme of the present invention, the scraping contact piece includes a moving block and a scraping plate. The moving block is fitted on one end of the stirring blade, and a contraction groove is provided on the top of the stirring blade; the scraping plate is movably embedded in the contraction groove, and one end of the scraping plate is rotatably connected to the inside of the moving block; a torsion spring is fixedly installed between the rotating end of the scraping plate and the moving block.

[0018] As a further optimization scheme of the present invention, the extension drive component includes a piston rod, a first valve, a second valve, a guide groove, a liquid collecting tank body, a rotating gear and a driving gear plate; one end of the piston rod is slidably connected to the inner side of the liquid collecting tank body, and the other end slides through one end of the stirring blade and is fixedly connected to one side of the moving block; a return spring is sleeved on the outer side of the piston rod, the liquid collecting tank body is arranged in the stirring blade, and one end of the return spring is fixedly connected to the inner side wall of the liquid collecting tank body; the guide groove is arranged in the stirring shaft, and its upper end is connected to the lower end of the lower infusion pipeline, and the lower end is connected to one end of the liquid collecting tank body; the first valve and the second valve are respectively arranged in the guide groove and the liquid collecting tank body; the rotating gear is fixedly connected to the rotating end of the scraper plate, and the driving gear plate is fixedly installed at one end of the stirring blade, and its top is meshed with the bottom of the rotating gear.

[0019] The beneficial effects of the present invention are:

[0020] In the cleaning mechanism provided in the present invention, the flushing component and the scraping component are correspondingly arranged on the stirring shaft and the stirring blade of the mixing kettle to form an integrated structure for use. When cleaning is not required, the flushing component and the scraping component can be hidden in the stirring shaft and the stirring blade, and will not affect the normal stirring and mixing of the two. During cleaning, it is only necessary to connect the cleaning machine body to the connecting component and the liquid discharge port of the mixing kettle body respectively, and drive the flushing component and the scraping component to unfold during the connection process and the cleaning process respectively, and cooperate with the rotation of the stirring shaft to complete the uniform spraying of the cleaning agent and the rotational scraping of impurities respectively, eliminating the disassembly and assembly operation of the mixing kettle top cover, simplifying the traditional cleaning steps, and being conducive to shortening the cleaning time, accelerating the cleaning speed, and better adapting to the cleaning needs of multiple mixing kettles. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a structural schematic diagram of a cleaning device for photoresist production provided by the present invention;

[0022] Figure 2 It is a cross-sectional view of a local position of a stirring shaft in a cleaning device for photoresist production provided by the present invention;

[0023] Figure 3 The present invention Figure 2 A local enlarged schematic diagram of the middle A;

[0024] Figure 4 It is a structural schematic diagram of a washing component in a cleaning device for photoresist production provided by the present invention;

[0025] Figure 5 It is a structural schematic diagram of the connection components, the conveying pipe and the stirring motor in a cleaning device for photoresist production provided by the present invention;

[0026] Figure 6 It is a cross-sectional view of a connecting component in a cleaning device for photoresist production provided by the present invention;

[0027] Figure 7 It is a structural schematic diagram of an upper liquid inlet pipeline and a conveying pipe member in a cleaning device for photoresist production provided by the present invention;

[0028] Figure 8 It is a cross-sectional view between a stirring shaft and a stirring blade in a cleaning device for photoresist production provided by the present invention;

[0029] Fig. 9 The present invention provides a cross-sectional view of a stirring blade and a scraping component in a cleaning device for photoresist production.

[0030] In the figure: 1, mixing kettle body; 2, stirring shaft; 3, stirring blade; 4, cleaning machine body; 5, cleaning mechanism; 51, flushing component; 511, upper liquid inlet pipeline; 512, lower liquid delivery pipeline; 513, spray head; 514, liquid inlet tank; 515, rack; 516, swing gear; 517, hose; 518, elastic telescopic pipe; 52, connecting component; 521, support seat; 522, liquid inlet cylinder; 523, first limiting column; 524, second limiting column; 525, liquid inlet hole; 526, external sleeve; 53, scraping component; 531. Moving block; 532. Scraping plate; 533. Contraction groove; 534. Piston rod; 535. First valve; 536. Second valve; 537. Guide groove; 538. Liquid collecting tank body; 539. Rotating gear; 5310. Driving gear plate; 5311. Return spring; 5312. Torsion spring; 6. Conveying pipe fittings; 61. Connecting head; 62. Conveying pipe; 63. Limiting plate; 64. Limiting slide groove; 65. Limiting protrusion; 66. Contact cam shaft; 67. Extrusion protrusion; 68. Contact groove; 7. Movable groove; 8. Stirring motor. DETAILED DESCRIPTION

[0031] The subject matter described herein will now be discussed with reference to example embodiments. It should be understood that the discussion of these embodiments is only to enable those skilled in the art to better understand and implement the subject matter described herein, and the functions and arrangements of the elements discussed may be changed without departing from the scope of protection of the contents of this specification. Each example may omit, replace or add various processes or components as needed. In addition, the features described relative to some examples may also be combined in other examples.

[0032] Please refer to Figure 1 to Figure 2 A cleaning device for photoresist production includes: a cleaning machine body 4 and a cleaning mechanism 5, the cleaning mechanism 5 includes a flushing component 51, a connecting component 52 and a scraping component 53, the flushing component 51 is arranged in the stirring shaft 2, and is used to spray the cleaning agent on the inner wall of the mixing kettle body 1; the connecting component 52 is used to drive and connect the rotating end of the stirring motor 8 with the upper end of the stirring shaft 2, and its interior is movably connected with the upper end of the flushing component 51; the scraping component 53 is arranged in the stirring blade 3, and is used to scrape and clean the inner wall of the mixing kettle body 1; the scraping component 53 is connected with the lower end of the flushing component 51, and after the cleaning agent enters the scraping component 53 from the flushing component 51, the scraping component 53 is driven to slide close to the inner wall of the mixing kettle body 1, and flipped upward to unfold and fit with the inner wall of the mixing kettle body 1.

[0033] The input end of the cleaning machine body 4 is connected to the discharge port of the mixing kettle body 1 through a pipeline, and its output end is connected to the connecting component 52 through 6; the cleaning machine body 4 is used to transport the cleaning agent to the connecting component 52, and recover the used cleaning agent from the mixing kettle body 1 and recycle it.

[0034] It should be noted that the cleaning machine body 4 is also provided with related structures such as a circulation pump, a filter layer, a booster pump, and a fan. The circulation pump is used to realize the circulation of the cleaning agent between the mixing kettle body 1 and the cleaning machine body 4. The booster pump is used to pressurize the cleaning agent to give it a certain impact force. The filter layer is used to filter the recovered cleaning agent. Since it belongs to the prior art, the above structure will not be described in detail here.

[0035] In addition, the state described in the above cleaning device is that it is already connected to the mixing kettle. After the cleaning is completed, it is only necessary to separate 6 from the connecting part.

[0036] When the above-mentioned cleaning device is in use, it is necessary to first connect it to the mixing kettle. When connecting, the input end of the cleaning machine body 4 is connected to the discharge port of the mixing kettle body 1 through a pipeline, and the connecting end of 6 is connected to the connecting component 52. When the connecting end of 6 is connected to the connecting component 52, the connecting end of 6 drives the flushing component 51 to move outward from the stirring shaft 2. After that, the cleaning agent is pressurized by the booster pump. The pressurized cleaning agent enters the connecting component 52 through 6, and then flows into the flushing component 51 from the connecting component 52, and finally is evenly sprayed on the inner wall of the mixing kettle body 1 through the flushing component 51. At the same time, the stirring motor 8 rotates, which can drive the stirring shaft 2 and the stirring blade 3 to rotate. When the stirring shaft 2 rotates, the connection end of 6 drives the spraying end of the flushing component 51 to swing up and down, so as to realize the function of uniformly spraying the cleaning agent on the inner wall of the mixing kettle body 1, so that the cleaning agent can evenly cover the inner wall of the mixing kettle body 1. At the same time, the scraping component 53 repeatedly rotates and scrapes the inner wall of the mixing kettle to scrape off the impurities dissolved on the inner wall. After the cleaning agent is used to circulate and flush the inside of the mixing kettle for a preset time, all the cleaning agent is extracted from the mixing kettle, and then pure inclined water is transported into the mixing kettle to continue circulating and flushing. After the clean water flushing is completed, the mixing kettle is dried by dry air. After the drying process is completed, the entire cleaning process is completed, and the cleaning machine body 4 and the mixing kettle can be separated.

[0037] In the cleaning mechanism 5 provided in the present invention, by correspondingly arranging the flushing component 51 and the scraping component 53 on the stirring shaft 2 and the stirring blade 3, they form an integrated structure with the stirring shaft 2 and the stirring blade 3. When cleaning is not required, the flushing component 51 and the scraping component 53 can be hidden in the stirring shaft 2 and the stirring blade 3, and will not affect the normal stirring and mixing of the two. During cleaning, it is only necessary to connect the cleaning machine body 4 with the connecting component 52 and the discharge port of the mixing kettle body 1 respectively, and drive the flushing component 51 and the scraping component 53 to unfold during the connection process and the cleaning process respectively. In conjunction with the rotation of the stirring shaft 2, the uniform spraying of the cleaning agent and the rotational scraping of impurities can be respectively completed, eliminating the disassembly and assembly operation of the mixing kettle top cover, simplifying the traditional cleaning steps, and being conducive to shortening the cleaning time, accelerating the cleaning speed, and better adapting to the cleaning needs of multiple mixing kettles.

[0038] Please refer to Figures 2 to 4 As an embodiment of the present invention, the flushing component 51 includes an upper liquid inlet pipe 511, a lower liquid delivery pipe 512, a swinging driving component and two spray heads 513. A movable groove 7 is opened in the stirring shaft 2. The upper liquid inlet pipe 511, the lower liquid delivery pipe 512 and the swinging driving component are all arranged in the movable groove 7. After the upper end of the upper liquid inlet pipe 511 passes through the upper end of the stirring shaft 2 upward, it is slidably connected with the inside of the connecting component 52. The upper end of the upper liquid inlet pipe 511 is provided with a liquid inlet groove body 514. The liquid inlet groove body 514 needs to ensure that when the upper liquid inlet pipe 511 moves downward, it is connected with the inside of the connecting component 52 and the lower end cannot extend out of the connecting component 52.

[0039] The upper end of the lower liquid infusion pipeline 512 is connected to the lower end of the upper liquid inlet pipeline 511 through an elastic telescopic pipe fitting 518, and its lower end is fixedly connected to the inner bottom wall of the movable groove 7. The elastic telescopic pipe fitting 518 can be a stainless steel elastic bellows, which can not only serve as a pipeline for communication, but also serve as a spring for elastic support; the swing driving member is installed on the outer side of the upper liquid inlet pipeline 511, which is used to drive the spray head 513 to swing up and down on the outer side of the stirring shaft 2; the number of the spray heads 513 is two, and the two spray heads 513 are respectively located at the upper and lower ends of the stirring shaft 2, and the two spray heads 513 are located on both sides of the stirring shaft 2 that are symmetrical, and one side of the two spray heads 513 is correspondingly connected to the upper liquid inlet pipeline 511 and the lower liquid infusion pipeline 512 through a hose 517, and the spray head 513 is an existing dispersed nozzle, which can evenly spray a number of umbrella-shaped water bodies outward.

[0040] The swing driving member includes a rack 515 and a swing gear 516. The number of the rack 515 and the swing gear 516 is the same as the number of the spray heads 513. The upper end of the rack 515 is fixedly connected to the lower end of the upper liquid inlet pipe 511. The swing gear 516 is fixedly installed at the rotating end of the spray head 513, and one side of the rack 515 is meshed with the rack 515.

[0041] When the flushing component 51 is in use, during the process of connecting 6 with the connecting component 52, 6 simultaneously generates downward pressure on the upper liquid inlet pipe 511, so that the upper liquid inlet pipe 511 moves downward and compresses the elastic telescopic pipe 518, and the rack 515 moves downward synchronously with the upper liquid inlet pipe 511, and the rotating gear 539 is driven by the rack 515 to rotate, driving the spray head 513 to flip upward together. When 6 is installed, it no longer squeezes the upper liquid inlet pipe 511 to move downward, and the gear and the spray head 513 stop flipping. At this time, the port of the spray head 513 faces the inner wall of the mixing kettle. Subsequently, the cleaning agent enters the upper liquid inlet pipe 511 from the liquid inlet tank body 514, and then passes through the elastic telescopic pipe 518, the lower inlet pipe 518, and the lower inlet pipe 519 in sequence. The pipe 512 and the hose 517 are finally sprayed out by the spray head 513. The sprayed cleaning agent has a certain impact and can flush the inner wall of the mixing kettle body 1. At the same time, the cleaning agent rebounded by the inner wall of the mixing kettle body 1 can contact the stirring shaft 2 and the stirring blade 3. Then, the stirring motor 8 rotates. Under the transmission action of the connecting component 52, the stirring shaft 2, the stirring blade 3 and the entire cleaning mechanism 5 can be driven to rotate together. During the rotation of the stirring shaft 2, the upper liquid inlet pipe 511 is intermittently pressed through the connecting component 52, so that the rack 515 can reciprocate up and down synchronously, thereby driving the spray head 513 to swing up and down, so that the cleaning agent can be evenly covered on different positions of the inner wall of the mixing kettle.

[0042] By setting the flushing component 51, it is mainly used to spray the cleaning agent on the inner wall of the mixing kettle body 1, wherein, by rotating and setting the spray heads 513 on the opposite sides of the upper and lower ends of the stirring shaft 2, respectively, when spraying, the upper and lower ends of the inner wall of the mixing kettle body 1 can be effectively covered, and when the downward pressure is synchronously generated during the connection process between 6 and the connecting component 52, the two spray heads 513 are synchronously flipped and unfolded, and there is no need to separately set a driving source to drive the unfolding operation, so as to achieve the synchronous and adaptive unfolding action of the spray heads 513 and 6; and during the rotation of the stirring shaft 2, the squeezing force of 6 is continued to be used to drive the spray heads 513 to intermittently reciprocate up and down while rotating, which is beneficial to increase the coverage area of ​​the cleaning agent on the inner wall of the spray head 513 body, and further improve the flushing effect of the spray head 513; when not in use, the spray head 513 can be rotated and retracted to be flush with the surface of the stirring shaft 2, thereby reducing the impact on the rotation of the stirring shaft 2.

[0043] Please refer to Figure 8 and Fig. 9 As an embodiment of the present invention, the scraping component 53 includes an extension drive member and a scraping contact member, and the extension drive member is connected to the scraping contact member, which is used to drive the scraping contact member to flip upward ninety degrees and slide horizontally by relying on the thrust of the cleaning fluid.

[0044] The scraping contact member includes a moving block 531 and a scraping plate 532. The moving block 531 is fitted at one end of the stirring blade 3. A contraction groove 533 is provided at the top of the stirring blade 3. The scraping plate 532 is movably embedded in the contraction groove 533. One end of the scraping plate 532 is rotatably connected to the inside of the moving block 531. The top of the scraping plate 532 in the contracted state is flush with the top of the stirring blade 3. A torsion spring 5312 is fixedly installed between the rotating end of the scraping plate 532 and the moving block 531. The torsion spring 5312 is in a compressed state when the scraping plate 532 is in the contracted state.

[0045] The extension drive member includes a piston rod 534, a first valve 535, a second valve 536, a guide groove 537, a liquid collecting tank body 538, a rotating gear 539 and a driving gear plate 5310. One end of the piston rod 534 is slidably connected to the inner side of the liquid collecting tank body 538, and the other end slides through one end of the stirring blade 3 and is fixedly connected to one side of the moving block 531. A return spring 5311 is sleeved on the outer side of the piston rod 534. The liquid collecting tank body 538 is arranged in the stirring blade 3. One end of the return spring 5311 is fixedly connected to the inner side wall of the liquid collecting tank body 538. Then, the guide groove 537 is arranged in the stirring shaft 2, and its upper end is connected with the lower end of the lower infusion pipeline 512, and the lower end is connected with one end of the liquid collecting tank body 538; the first valve 535 and the second valve 536 are respectively arranged in the guide groove 537 and the liquid collecting tank body 538, and the first valve 535 and the second valve 536 can be solenoid valves, which are electrically connected to the external controller; the rotating gear 539 is fixedly connected to the rotating end of the scraper plate 532, driving the tooth plate 5310 to be fixedly installed at one end of the stirring blade 3, and its top is meshed with the bottom of the rotating gear 539.

[0046] When the scraper component 53 is in use, the first valve 535 is opened, so that the cleaning agent flows from the lower infusion pipe 512 into the guide groove 537 and then into the liquid collecting tank 538. Since the cleaning agent is pressurized, as it gradually accumulates in the liquid collecting tank, it can generate a horizontal thrust on the piston rod 534, which can push the piston rod 534 to slide outward and squeeze the return spring 5311 to contract. The moving block 531 follows the piston rod 534 to slide close to the inner wall of the kettle body 1. An air hole is provided at the lower right end of the guide groove 537. When the piston rod 534 slides outward, the gas on the right side of the piston rod 534 is discharged through the air hole. During the movement of the moving block 531, the rotating gear 539 can be rotated along the driving tooth plate 5310, and the scraper plate 532 starts to turn upward following the rotating gear 539, and the torsion spring is gradually released until the rotating gear 539 is separated from the driving tooth plate 5310, and the scraper plate 532 is rotated exactly ninety degrees to contact with the stirring blade 3, the top of the mixing kettle body 1 is kept vertical. When the return spring 5311 is compressed to the maximum compression amount, the piston rod 534 can no longer push the scraper plate 532 to slide, so that the scraper plate 532 is in contact with the inner wall of the mixing kettle body 1. At this time, the scraper component 53 completes the expansion action. Then, the stirring blade 3 rotates to drive the scraper plate 532 to rotate and scrape the inner wall of the mixing kettle body 1 to scrape off the cleaned impurities. Under the support of the torsion spring 5312, the scraper plate 532 can maintain a relatively stable vertical state, so that it will not turn down and reset when rotating; after the cleaning is completed, the second valve 536 is opened and the first valve 535 is closed, so that the cleaning agent in the guide groove 537 and the liquid collecting tank body 538 is discharged through the second valve 536, and the piston rod 534, under the elastic force of the return spring 5311, synchronously drives the moving block 531 to slide and reset, and the scraper plate 532 automatically turns down and resets during the sliding and resetting process of the moving block 531.

[0047] The present invention provides a reversible and retractable scraper component 53 on the stirring blade 3, which is mainly used to scrape and clean the inner wall of the mixing kettle body 1. When not in use, the scraper component 53 is retracted in the retraction groove 533 and can be kept flush with the top of the stirring blade 3, thereby reducing the impact on the rotation of the stirring blade 3. When in use, the pressurized cleaning agent is used as a drive to enable it to slide toward the inner wall of the mixing kettle body 1 and flip upward, and finally fit with the inner wall of the mixing kettle body 1, thereby realizing the function of synchronous adaptive switching of the extension of the scraper component 53 and the use state of the flushing component 51. There is no need to set up a separate driving source to drive its activity, thereby solving the problem that it is difficult to set up a driving source inside the stirring blade 3 and the stirring shaft 2. Therefore, the scraper component 53 not only simplifies its internal structure and use cost, but also can well match the actual use environment of the stirring blade 3.

[0048] Please refer to Figure 5 and Figure 6As an embodiment of the present invention, the connecting component 52 includes a support seat 521, a liquid inlet cylinder 522, a first limiting column 523 and a second limiting column 524. The support seat 521 is fixedly installed on the top of the mixing kettle body 1. The upper end of the liquid inlet cylinder 522 is fixedly connected to the rotating end of the stirring motor 8, and its lower end is evenly provided with eight liquid inlet holes 525 evenly distributed around the circumference; the outer side of the liquid inlet cylinder 522 is rotatably sleeved with an external sleeve 526, and the outer side of the external sleeve 526 is fixedly connected to the support seat 521. The first limiting column 523 is fixedly sleeved on the upper end of the upper liquid inlet pipe 511, and its outer side is slidably connected to the upper end of the movable groove 7. The second limiting column 524 is fixedly installed on the upper end of the upper liquid inlet pipe 511, and its upper end is slidably connected to the inside of the liquid inlet cylinder 522; the first limiting column 523 and the second limiting column 524 can be set as a regular hexagonal prism or a regular octagonal prism.

[0049] When the connecting component 52 is in use, the cleaning agent enters the outer sleeve 526 through 6, then enters the liquid inlet cylinder 522 through the liquid inlet hole 525, and then flows into the upper liquid inlet pipe 511 from the liquid inlet cylinder 522; when the stirring motor 8 drives the stirring shaft 2 to rotate, the stirring motor 8 drives the liquid inlet cylinder 522 to rotate, and under the joint action of the first limiting column 523 and the second limiting column 524, the upper liquid inlet pipe 511 drives the stirring shaft 2 to rotate along with the liquid inlet cylinder 522, and finally the stirring blade 3 rotates;

[0050] The present invention provides the connecting component 52, which can serve as a transmission structure between the stirring motor 8 and the stirring shaft 2 to achieve stable transmission between the two. On the other hand, it can be used as a cleaning agent guide structure to achieve natural circulation of the cleaning agent between the cleaning machine body 4 and the cleaning mechanism 5. When used in conjunction with the cleaning mechanism 5, it can achieve the cleaning function of the interior of the mixing kettle body 1. At the same time, it also overcomes the difficulty of the traditional stirring shaft 2 in conveying the cleaning agent.

[0051] Please refer to Figure 1 , Figure 6 and Figure 7 The conveying pipe fitting 6 includes a connecting head 61, a limiting piece, an extruding piece and a conveying pipe 62. One end of the connecting head 61 is fixedly connected to one end of the conveying pipe 62, and the other end is threadedly connected to one side of the external sleeve 526. The limiting piece is rotatably mounted on the outside of the connecting head 61, and is used to slide and limit the two sides of the connecting head 61. The extruding piece is used to squeeze the first limiting column 523 downward.

[0052] The limiting member includes a limiting plate 63 and a limiting slot 64 . The limiting slot 64 is provided at the upper end of the support seat 521 . Limiting protrusions 65 are installed on both sides of the upper end of the limiting plate 63 . The upper end of the limiting plate 63 is slidably connected to the inner side of the limiting slot 64 through the limiting protrusions 65 .

[0053] The extrusion part includes a contact cam 66, an extrusion protrusion 67 and a contact groove 68. The contact cam 66 is fixedly installed on the outer side of the first limiting column 523, the extrusion protrusion 67 is fixedly installed on the lower end of the limiting plate 63, and the contact groove 68 is arranged on the upper end of the first limiting column 523. The extrusion protrusion 67 is used to squeeze the contact cam 66 and the contact groove 68 downward.

[0054] When the above-mentioned conveying pipe 6 is in use, during the process of connecting the conveying pipe 6 with the external sleeve 526, the top of the limiting plate 63 is aligned with the limiting slide groove 64, the connecting head 61 is aligned with the mounting hole of the external sleeve 526, and then the top of the limiting plate 63 is slid into the limiting slide groove 64. The limiting slide groove 64 limits the limiting plate 63 in the front and back and up and down directions, so that it can be accurately aligned with the mounting hole on the support seat 521 for installation. In this process, the bottom of the squeezed protrusion 67 contacts the groove 68 and generates downward pressure on it, so that the first limiting column 523 drives the upper liquid inlet pipe 511 to move downward together, so that the spray head 513 is flipped upward and unfolded, and then the connecting head 61 contacts the mounting hole on the external sleeve 526, and by rotating the rotating end of the mounting head, it can be gradually fixed with the mounting hole thread, until the two are completely connected in place, so that the extrusion protrusion 67 no longer squeezes the first limiting column 523 to move downward; and during the rotation of the stirring shaft 2, the contact protrusion 66 follows the stirring shaft 2 to intermittently contact the extrusion protrusion 67, and then squeezes the contact protrusion 66 to move downward, so that the upper liquid inlet pipe 511 moves downward synchronously, and finally drives the spray head 513 to intermittently swing up and down, so that it can spray the cleaning agent evenly on the inner wall of the mixing kettle body 1.

[0055] The conveying pipe 6 provided in the present invention is used, on the one hand, to achieve communication between the cleaning machine body 4 and the connecting component 52, so that the cleaning agent can enter the stirring shaft 2. On the other hand, through the coordinated use of the contact convex shaft 66, the contact convex block and the contact groove 68, the flushing component 51 can be synchronously squeezed and flipped and unfolded during the installation process of the conveying pipe 6 and the connecting component 52, without actively driving the flushing component 51 to unfold, thereby realizing the synchronous adaptive switching function of the use status of the flushing component 51 and the conveying pipe 6. At the same time, when the stirring shaft 2 rotates, the spray head 513 can be driven to swing up and down intermittently, which is beneficial for the spray head 513 to evenly spray the cleaning agent.

[0056] The above describes an embodiment of the present embodiment, but the present embodiment is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of the present embodiment, ordinary technicians in this field can also make many forms, all of which are within the protection of the present embodiment.

Claims

1. A cleaning device for photoresist production, comprising: A cleaning machine body (4) and a cleaning mechanism (5), characterized in that the cleaning mechanism (5) comprises a flushing component (51), a connecting component (52) and a scraping component (53), wherein the flushing component (51) is arranged in the stirring shaft (2) and is used to spray a cleaning agent on the inner wall of the mixing kettle body (1); the connecting component (52) is used to drive and connect the rotating end of the stirring motor (8) with the upper end of the stirring shaft (2), and its interior is movably connected to the upper end of the flushing component (51); the scraping component (53) is arranged in the stirring blade (3) and is used to scrape and clean the inner wall of the mixing kettle body (1); the scraping component (53) is connected to the lower end of the flushing component (51), and after the cleaning agent enters the scraping component (53) from the flushing component (51), the scraping component (53) is driven to slide close to the inner wall of the mixing kettle body (1), and then flip and unfold upward to fit the inner wall of the mixing kettle body (1); The input end of the cleaning machine body (4) is connected to the liquid discharge port of the mixing kettle body (1) through a pipeline, and the output end is connected to the connecting component (52) through a conveying pipe (6); the cleaning machine body (4) is used to convey the cleaning agent to the connecting component (52), and to recover the used cleaning agent from the mixing kettle body (1) for recycling; When the connection end of the delivery pipe (6) is connected to the connection component (52), the connection end of the delivery pipe drives the flushing component (51) to move outward from the inside of the stirring shaft (2); when the stirring shaft (2) rotates, the connection end of the delivery pipe (6) drives the spraying end of the flushing component (51) to swing up and down, thereby achieving the function of evenly spraying the cleaning agent on the inner wall of the mixing kettle body (1); The flushing component (51) comprises an upper liquid inlet pipe (511), a lower liquid delivery pipe (512), a swing driving member and a plurality of spray heads (513); a movable groove (7) is provided in the stirring shaft (2); the upper liquid inlet pipe (511), the lower liquid delivery pipe (512) and the swing driving member are all arranged in the movable groove (7); the upper end of the upper liquid inlet pipe (511) passes through the upper end of the stirring shaft (2) upwards and is slidably connected to the inside of the connecting component (52); the upper end of the upper liquid inlet pipe (511) is provided with a liquid inlet groove body (514); The upper end of the lower liquid delivery pipe (512) is connected to the lower end of the upper liquid inlet pipe (511) via an elastic telescopic pipe (518), and the lower end is fixedly connected to the inner bottom wall of the movable groove (7); the swing driving member is installed on the outer side of the upper liquid inlet pipe (511), and is used to drive the spray head (513) to swing up and down on the outer side of the stirring shaft (2); a plurality of spray heads (513) are rotatably installed on the outer side of the stirring shaft (2) according to a preset arrangement, and one side of the spray heads is correspondingly connected to the upper liquid inlet pipe (511) and the lower liquid delivery pipe (512) via a hose (517); The swing driving member comprises a rack (515) and a swing gear (516); the number of the rack (515) and the swing gear (516) is the same as the number of the spray heads (513); the upper end of the rack (515) is fixedly connected to the lower end of the upper liquid inlet pipe (511); the swing gear (516) is fixedly mounted on the rotating end of the spray head (513), and one side of the swing gear is meshed with the rack (515); The scraping component (53) comprises an extension drive member and a scraping contact member, the extension drive member being connected to the scraping contact member and being used to drive the scraping contact member to perform an upward flip of ninety degrees and a horizontal sliding motion respectively by means of the thrust of the cleaning liquid; the scraping contact member comprises a moving block (531) and a scraping plate (532), the moving block (531) being arranged in close contact with one end of the stirring blade (3), and a contraction groove (533) being provided at the top of the stirring blade (3); the scraping plate (532) being movably embedded in the contraction groove (533), and one end of the scraping plate (532) being rotatably connected to the inside of the moving block (531); a torsion spring (5312) being fixedly mounted between the rotating end of the scraping plate (532) and the moving block (531); The extension drive member comprises a piston rod (534), a first valve (535), a second valve (536), a guide groove (537), a liquid collecting tank body (538), a rotating gear (539) and a driving tooth plate (5310); one end of the piston rod (534) is slidably connected to the inner side of the liquid collecting tank body (538), and the other end slides through one end of the stirring blade (3) and is fixedly connected to one side of the moving block (531); a return spring (5311) is sleeved on the outer side of the piston rod (534); the liquid collecting tank body (538) is arranged in the stirring blade (3), and the return spring (5311) is arranged on the outer side of the piston rod (534); ) is fixedly connected to the inner wall of the liquid collecting tank body (538); the guide groove (537) is arranged in the stirring shaft (2), the upper end of which is connected to the lower end of the lower liquid delivery pipe (512), and the lower end is connected to one end of the liquid collecting tank body (538); the first valve (535) and the second valve (536) are respectively arranged in the guide groove (537) and the liquid collecting tank body (538); the rotating gear (539) is fixedly connected to the rotating end of the scraper plate (532), and the driving gear plate (5310) is fixedly installed at one end of the stirring blade (3), and the top of the driving gear plate (5310) is meshed with the bottom of the rotating gear (539).

2. The cleaning device for photoresist production according to claim 1, characterized in that: The connecting component (52) comprises a support seat (521), a liquid inlet cylinder (522), a first limiting column (523) and a second limiting column (524); the support seat (521) is fixedly mounted on the top of the mixing kettle body (1); the upper end of the liquid inlet cylinder (522) is fixedly connected to the rotating end of the stirring motor (8); and a plurality of liquid inlet holes (525) are evenly arranged at the lower end; an outer sleeve (526) is rotatably sleeved on the outer side of the liquid inlet cylinder (522); the outer side of the outer sleeve (526) is fixedly connected to the support seat (521); the first limiting column (523) is fixedly sleeved on the upper end of the upper liquid inlet pipe (511); and the outer side of the first limiting column (523) is slidably connected to the upper end of the movable groove (7); and the second limiting column (524) is fixedly mounted on the upper end of the upper liquid inlet pipe (511); and the upper end of the second limiting column (524) is slidably connected to the inside of the liquid inlet cylinder (522).

3. The cleaning device for photoresist production according to claim 2, characterized in that: The delivery pipe member (6) comprises a connector (61), a stopper, an extrusion member and a delivery pipe (62); one end of the connector (61) is fixedly connected to one end of the delivery pipe (62), and the other end is threadedly connected to one side of an external sleeve (526); the stopper is rotatably sleeved on the outside of the connector (61) and is used to perform sliding stop on both sides of the connector (61); and the extrusion member is used to squeeze the first stopper column (523) downward.

4. The cleaning device for photoresist production according to claim 3, characterized in that: The limiting member comprises a limiting plate (63) and a limiting slide groove (64); the limiting slide groove (64) is provided at the upper end of the support seat (521); limiting protrusions (65) are installed on both sides of the upper end of the limiting plate (63); the upper end of the limiting plate (63) is slidably connected to the inner side of the limiting slide groove (64) via the limiting protrusion (65).

5. The cleaning device for photoresist production according to claim 4, characterized in that: The extrusion member comprises a contact convex shaft (66), an extrusion convex block (67) and a contact groove (68); the contact convex shaft (66) is fixedly mounted on the outside of the first limiting column (523); the extrusion convex block (67) is fixedly mounted on the lower end of the limiting plate (63); the contact groove (68) is arranged on the upper end of the first limiting column (523); and the extrusion convex block (67) is used to press the contact convex shaft (66) and the contact groove (68) to move downward.

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