A multi-chamber continuous optical coating machine

Abstract

The application discloses a kind of multi-chamber continuous optical coating machine, belong to optical coating technical field, solve the problem that the positive and negative screw rod and clamping plate cannot control substrate to complete rotating action in existing tool fixture, while work fixture cannot be clamped and fixed to special-shaped substrate, so that the film thickness and uniformity cannot be guaranteed, including: coating machine body, substrate support mechanism, continuous feeding assembly, optical coating assembly, coating machine body includes shell, coating machine base, observation window, substrate purification cavity and optical coating cavity are sequentially arranged in shell;In the embodiment of the application, substrate support mechanism is provided, and the substrate support mechanism is composed of an angle adjusting motor, a substrate support tray, a substrate limiting portion and a linkage adjusting portion assembly.The setting of linkage adjusting portion can drive linkage adjusting portion to move when substrate support tray moves, realizing driving substrate to rotate while optical coating assembly synchronous coating operation, ensuring the thickness and uniformity of coating.

Description

Technical Field

[0001] This invention belongs to the field of optical coating technology, specifically relating to a multi-chamber continuous optical coating machine. Background Technology

[0002] Optical coating refers to the process of depositing a thin metal film onto the surface of optical components. The purpose of coating optical components is to reduce or increase light reflection, beam splitting, color separation, filtering, polarization, and other requirements. An optical coating machine is a process testing instrument used in information science and systems science, physics, and other fields, primarily for the precise fabrication of multilayer optical thin films. Optical coating machines play a vital role in modern technological development. They not only provide crucial support in the manufacturing process of optical components but also play an irreplaceable role in various high-tech fields such as laser technology, optical communication, and space technology.

[0003] Chinese patent CN117802472A discloses a tooling fixture for optical coating processing, including a clamping plate, a motor, and positive and negative lead screws. The positive and negative lead screws are fixedly installed on one side of the motor, and a power mechanism is provided on the outer wall of the positive and negative lead screws. A lifting mechanism is provided on one side of the positive and negative lead screws. The two sides of the positive and negative lead screws rotate within the clamping plate, and a groove is opened at one end of the clamping plate. However, in existing tooling fixtures, the positive and negative lead screws and clamping plate cannot control the substrate to complete the rotation action. At the same time, the working fixture cannot clamp and fix irregularly shaped substrates, so the thickness and uniformity of the film cannot be guaranteed. To address the above problems, we propose a multi-chamber continuous optical coating machine. Summary of the Invention

[0004] The purpose of this invention is to address the shortcomings of existing technologies by providing a multi-chamber continuous optical coating machine. This machine solves the problems in existing tooling fixtures where the positive and negative lead screws and clamping plates cannot control the substrate to complete the rotation, and the working fixtures cannot clamp and fix irregularly shaped substrates, thus making it impossible to guarantee the thickness and uniformity of the film.

[0005] Existing tooling fixtures cannot control the substrate rotation using lead screws and clamping plates, and the fixtures cannot hold and fix irregularly shaped substrates, resulting in inconsistent film thickness and uniformity. To address these issues, we propose a multi-chamber continuous optical coating machine. In short, the multi-chamber continuous optical coating machine includes a coating machine body, a substrate support mechanism, a continuous feeding assembly, and an optical coating assembly. The coating machine body includes an outer shell, a coating base, and an observation window. The outer shell is fixedly mounted on the coating base. Inside the outer shell, a substrate purification chamber and an optical coating chamber are sequentially arranged. The substrate support mechanism includes an angle adjustment motor, a substrate support tray, a substrate limiting part, and a linkage adjustment part. During operation, the substrate to be coated is placed on the substrate limiting part, and then the continuous feeding assembly is activated. The continuous feeding assembly feeds the substrate limiting part, the substrate support tray, and the substrate into the optical coating cavity. Then, the angle adjustment motor and the optical coating assembly are activated. The angle adjustment motor drives the substrate support tray to rotate, and the rotation of the substrate support tray drives the linkage adjustment part to move, so that the linkage adjustment part drives the optical coating assembly to move synchronously. This achieves simultaneous coating operation of the optical coating assembly while the substrate rotates. In this embodiment of the invention, a substrate support mechanism is provided, which consists of an angle adjustment motor, a substrate support tray, a substrate limiting part, and a linkage adjustment part assembly. The substrate limiting part is designed to clamp and fix substrates of different specifications, and the clamping range is flexible and adjustable, ensuring smooth substrate coating. The linkage adjustment part is designed to move when the substrate support tray moves, so that the linkage adjustment part drives the optical coating assembly to move synchronously. This achieves simultaneous coating operation of the optical coating assembly while the substrate rotates, ensuring the thickness and uniformity of the coating.

[0006] This invention is implemented as follows: a multi-chamber continuous optical coating machine, the multi-chamber continuous optical coating machine comprising:

[0007] The coating machine body includes an outer shell, a coating machine base, and an observation window. The outer shell is fixedly installed on the coating machine base. An observation window is installed on the side wall of the outer shell. A feed inlet is provided on one side of the outer shell. A substrate purification chamber and an optical coating chamber are sequentially arranged inside the outer shell.

[0008] A substrate support mechanism is used to support and fix optical coating substrates of different specifications.

[0009] A continuous feeding assembly is disposed within the housing and extends through the substrate purification chamber and the optical coating chamber, and is connected to the substrate support mechanism.

[0010] An optical coating assembly is disposed within the optical coating cavity and is used to perform optical coating on a substrate.

[0011] The substrate support mechanism includes:

[0012] An angle-adjusting motor, which is connected to the continuous feeding assembly;

[0013] The substrate support tray is fixedly connected to the angle adjustment motor;

[0014] A substrate limiting part is disposed inside the substrate support tray and is used to limit and lock the substrate.

[0015] The linkage adjustment unit is disposed inside the optical coating cavity and is connected to the substrate support tray and the optical coating assembly respectively. The linkage adjustment unit is used to adjust the coating position of the optical coating assembly.

[0016] Preferably, the continuous feeding assembly includes:

[0017] A feeding motor is fixedly mounted on the coating base;

[0018] A feeding screw is fixedly connected to the output end of a feeding motor. The end of the feeding screw away from the feeding motor extends into the substrate purification chamber and the optical coating chamber, and is rotatably connected to the side wall of the outer casing.

[0019] A sliding feeder seat is threaded onto the outer wall of the feeding screw and is fixedly connected to an angle adjustment motor.

[0020] At least one set of feeding guide grooves is provided, which are opened at the bottom of the outer casing and are slidably connected to the sliding feeding seat.

[0021] Preferably, the coating machine body further includes:

[0022] A raw material storage tank is fixedly installed on the upper surface of the outer casing, and the raw material storage tank is used to supply coating materials to the optical coating assembly;

[0023] A coating controller is detachably mounted on the upper surface of the housing, and the coating controller is electrically connected to the feeding motor and the angle adjustment motor respectively.

[0024] Preferably, the substrate limiting portion includes:

[0025] A limit motor is fixedly installed inside the substrate support tray;

[0026] A limiting gear plate is fixedly connected to the output end of a limiting motor, and the limiting gear plate is rotatably disposed within the substrate support tray;

[0027] At least one set of first gears, the first gears being rotatably mounted on the substrate support tray, and meshing with the limiting gear disc for transmission.

[0028] Preferably, the substrate limiting portion further includes:

[0029] A limiting screw, wherein the limiting screw is fixedly connected to one end of the first gear;

[0030] A support threaded seat is threaded onto the outer wall of the limiting screw, and a support positioning seat is provided at the bottom of the support threaded seat. The support positioning seat is fixedly installed on the base material support tray, and the support positioning seat and the support threaded seat are slidably connected.

[0031] The substrate limiting plate is detachably installed on the supporting threaded seat and is used to clamp and lock substrates of different specifications.

[0032] Preferably, the linkage adjustment unit includes:

[0033] A linkage gear ring, which is fixedly sleeved on the outer wall of the substrate support tray;

[0034] The second gear is disposed on one side of the linkage gear ring, and the second gear meshes with the linkage gear ring for transmission.

[0035] A gear connecting rod is fixedly mounted on the upper surface of the second gear and is rotatably connected to the side wall of the housing.

[0036] Preferably, the linkage adjustment unit further includes:

[0037] The third gear is fixedly connected to the end of the gear connecting rod;

[0038] A linkage gear seat is sleeved on the outside of the third gear, and the linkage gear seat meshes with the third gear for transmission. The linkage gear seat is detachably connected to the optical coating assembly.

[0039] A gear seat guide plate is fixedly installed on the side wall of the outer casing, and the gear seat guide plate is slidably connected to the linkage gear seat.

[0040] Preferably, the optical coating assembly includes:

[0041] A coating feed tube is provided inside the optical coating cavity, and one end of the coating feed tube is connected to the raw material storage tank.

[0042] A vapor deposition film forming stand is connected to a film feeding pipe and is used to heat the film forming material to the evaporation temperature. The vapor deposition film forming stand has a built-in heating resistance wire and an electron gun evaporator. The vapor deposition film forming stand is also detachably connected to a linkage gear stand.

[0043] At least one set of magnetron sputtering tubes, which are detachably mounted on the bottom of the vapor deposition set.

[0044] Preferably, it further includes:

[0045] A substrate purging assembly is disposed inside a substrate purification chamber and is used to purify and purge the surface of the substrate.

[0046] The substrate purging assembly includes:

[0047] A purge support is fixedly installed inside the substrate purification chamber;

[0048] A purge motor is fixedly mounted on the upper surface of the purge support.

[0049] A purging linkage unit is disposed within the purging support;

[0050] A substrate blowing unit connected to a blowing linkage unit, the substrate blowing unit includes a blowing fan and at least one set of blowing negative pressure pipes, the blowing negative pressure pipes are fixedly installed on the lower surface of the blowing fan, and the blowing negative pressure pipes are in communication with the blowing fan.

[0051] Preferably, the purging linkage unit includes:

[0052] An internal gear ring, which is fixedly installed inside the purge support;

[0053] A linkage swing arm is installed inside the purge support, and one end of the linkage swing arm is fixedly connected to the output end of the purge motor.

[0054] The fourth gear is rotatably mounted on the end of the linkage swing arm. The fourth gear meshes with the internal gear ring and is detachably connected to the blower.

[0055] Compared with the prior art, the embodiments of this application have the following main advantages:

[0056] In this embodiment of the invention, a substrate support mechanism is provided, which consists of an angle adjustment motor, a substrate support tray, a substrate limiting part, and a linkage adjustment part assembly. The substrate limiting part enables the clamping and fixing of substrates of different specifications, and the clamping range is flexibly adjustable, ensuring the smooth progress of substrate coating. The linkage adjustment part can drive the linkage adjustment part to move when the substrate support tray moves, so that the linkage adjustment part drives the optical coating assembly to move synchronously. This achieves simultaneous coating operation of the optical coating assembly while the substrate rotates, ensuring the thickness and uniformity of the coating.

[0057] In this embodiment of the invention, a linkage adjustment unit is provided, which consists of a linkage gear ring, a second gear, a third gear, and a linkage gear seat. The linkage gear ring, the second gear, the third gear, and the linkage gear seat work together to drive the linkage gear seat to reciprocate within the optical coating cavity, thereby driving the optical coating assembly to reciprocate, improving the coating efficiency and the uniformity of the film.

[0058] In this embodiment of the invention, a substrate blowing assembly is provided. The substrate blowing assembly facilitates the cleaning of dust and impurities on the substrate surface, thereby preventing dust and impurities from affecting the coating operation on the substrate surface. The blowing range of the substrate blowing assembly can also be flexibly adjusted, thus adapting to the blowing work of substrates of different specifications. Attached Figure Description

[0059] Figure 1 This is a schematic diagram of the structure of the multi-chamber continuous optical coating machine provided by the present invention.

[0060] Figure 2 This is a front view of the multi-chamber continuous optical coating machine provided by the present invention.

[0061] Figure 3 This is a top view of the multi-chamber continuous optical coating machine provided by the present invention.

[0062] Figure 4 yes Figure 3 A sectional view along line AA.

[0063] Figure 5 This is a schematic diagram of the internal structure of the multi-chamber continuous optical coating machine provided by the present invention.

[0064] Figure 6 This is a schematic diagram of the internal three-dimensional structure of the multi-chamber continuous optical coating machine provided by the present invention.

[0065] Figure 7 This is a schematic diagram of the substrate support mechanism provided by the present invention.

[0066] Figure 8 This is a front view of the substrate support mechanism provided by the present invention.

[0067] Figure 9 This is a top view of the substrate support mechanism provided by the present invention.

[0068] Figure 10 This is a schematic diagram of the structure of the substrate limiting part provided by the present invention.

[0069] Figure 11 This is an isometric view of the substrate limiting part provided by the present invention.

[0070] Figure 12 This is a schematic diagram of the substrate purging assembly provided by the present invention.

[0071] In the diagram: 1-Coating machine body, 11-Outer shell, 111-Feed inlet, 112-Substrate purification chamber, 113-Optical coating chamber, 12-Coating machine base, 13-Raw material storage tank, 14-Observation window, 15-Coating controller, 2-Optical coating assembly, 21-Coating feed tube, 22-Evaporation film forming base, 23-Magnetron sputtering tube, 3-Substrate support mechanism, 31-Angle adjustment motor, 32-Substrate support tray, 33-Substrate limiting part, 331-Support positioning seat, 332-Limiting gear, 333-First gear, 334-Limiting screw, 335-Supporting threaded seat, 336- Substrate limiting plate, 34-linkage adjustment unit, 341-linkage gear ring, 342-second gear, 343-gear connecting rod, 344-third gear, 345-linkage gear seat, 346-gear seat guide plate, 4-continuous feeding assembly, 41-feeding motor, 42-feeding screw, 43-sliding feeding seat, 44-feeding guide groove, 5-substrate blowing assembly, 51-blowing motor, 52-blowing support seat, 53-blowing linkage unit, 531-linkage swing arm, 532-fourth gear, 533-internal gear ring, 54-substrate blowing unit, 541-blowing fan, 542-blowing negative pressure pipe. Detailed Implementation

[0072] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used herein in the specification of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application; the terms "comprising" and "having," and any variations thereof, in the specification, claims, and foregoing drawings of this application are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the specification, claims, or foregoing drawings of this application are used to distinguish different objects, not to describe a particular order.

[0073] Existing tooling fixtures cannot control the substrate to complete its rotation using lead screws and clamping plates, and the working fixtures cannot clamp and fix irregularly shaped substrates, thus compromising the thickness and uniformity of the film. To address these issues, we propose a multi-chamber continuous optical coating machine. In short, the multi-chamber continuous optical coating machine includes a coating machine body 1, a substrate support mechanism 3, a continuous feeding assembly 4, and an optical coating assembly 2. The coating machine body 1 includes an outer shell 11, a coating machine base 12, and an observation window 14. The outer shell 11 is fixedly mounted on the coating machine base 12. Inside the outer shell 11, a substrate purification chamber 112 and an optical coating chamber 113 are sequentially arranged. The substrate support mechanism 3 includes an angle adjustment motor 31, a substrate support tray 32, a substrate limiting part 33, and a linkage adjustment part 34. During operation, the substrate to be coated is placed on the substrate limiting part 33, and then the continuous feeding component 4 is turned on. The continuous feeding component 4 starts to feed the substrate limiting part 33, the substrate support tray 32 and the substrate into the optical coating cavity 113. Then the angle adjustment motor 31 and the optical coating component 2 are turned on. The angle adjustment motor 31 can drive the substrate support tray 32 to rotate. At the same time, the rotation of the substrate support tray 32 can drive the linkage adjustment part 34 to move, so that the linkage adjustment part 34 drives the optical coating component 2 to move synchronously, realizing the simultaneous coating operation of the optical coating component 2 while driving the substrate to rotate. In this embodiment of the invention, a substrate support mechanism 3 is provided. The substrate support mechanism 3 consists of an angle adjustment motor 31, a substrate support tray 32, a substrate limiting part 33, and a linkage adjustment part 34. The substrate limiting part 33 is provided to clamp and fix substrates of different specifications, and the clamping range is flexible and adjustable, ensuring the smooth progress of substrate coating. The linkage adjustment part 34 is provided to drive the linkage adjustment part 34 to move when the substrate support tray 32 moves, so that the linkage adjustment part 34 drives the optical coating component 2 to move synchronously. This realizes that the optical coating component 2 can perform synchronous coating operation while driving the substrate to rotate, ensuring the thickness and uniformity of the coating.

[0074] It should be noted that, in this embodiment, the optical coating substrate can be a lens, a mirror, an alloy material, a plastic, or a crystal, and the shape of the substrate can be rectangular, circular, or irregular.

[0075] This invention provides a multi-chamber continuous optical coating machine, such as... Figures 1-4 As shown, the multi-chamber continuous optical coating machine includes:

[0076] The coating machine body 1 includes an outer shell 11, a coating machine base 12, and an observation window 14. The outer shell 11 is fixedly installed on the coating machine base 12. An observation window 14 is installed on the side wall of the outer shell 11. A feed inlet 111 is provided on one side of the outer shell 11. A substrate purification chamber 112 and an optical coating chamber 113 are arranged sequentially inside the outer shell 11.

[0077] In this embodiment, the outer shell 11 is made of high-temperature resistant alloy material. The outer shell 11 can be a hollow rectangular or round seat. An opening and closing valve is provided between the substrate purification chamber 112 and the optical coating chamber 113. The bottom of the outer shell 11 is fixedly installed on the coating base by welding or riveting. The observation window 14 can be a circular or rectangular structure.

[0078] Substrate support mechanism 3, which is used to support and fix optical coating substrates of different specifications;

[0079] Continuous feeding component 4, such as Figures 5-6 As shown, the continuous feeding assembly 4 is disposed inside the outer shell 11, and the continuous feeding assembly 4 passes through the substrate purification chamber 112 and the optical coating chamber 113, and is connected to the substrate support mechanism 3.

[0080] An optical coating assembly 2 is disposed within the optical coating cavity 113 and is used to perform optical coating on a substrate.

[0081] Among them, such as Figures 7-9 As shown, the substrate support mechanism 3 includes:

[0082] An angle adjustment motor 31 is connected to the continuous feeding assembly 4. The angle adjustment motor 31 can be a servo motor.

[0083] The substrate support tray 32 is fixedly connected to the angle adjustment motor 31. The substrate support tray 32 can be a hollow rectangular or circular disk structure.

[0084] The substrate limiting part 33 is disposed inside the substrate support tray 32 and is used to limit and lock the substrate.

[0085] The linkage adjustment unit 34 is disposed in the optical coating cavity 113 and is connected to the substrate support tray 32 and the optical coating assembly 2 respectively. The linkage adjustment unit 34 is used to adjust the coating position of the optical coating assembly 2.

[0086] In this embodiment, during operation, the substrate to be coated is placed on the substrate limiting part 33, and then the continuous feeding component 4 is turned on. The continuous feeding component 4 starts to feed the substrate limiting part 33, the substrate support tray 32 and the substrate into the optical coating cavity 113. Then, the angle adjustment motor 31 and the optical coating component 2 are turned on. The angle adjustment motor 31 can drive the substrate support tray 32 to rotate. At the same time, the rotation of the substrate support tray 32 can drive the linkage adjustment part 34 to move, so that the linkage adjustment part 34 drives the optical coating component 2 to move synchronously, realizing the simultaneous coating operation of the optical coating component 2 while driving the substrate to rotate.

[0087] In this embodiment of the invention, a substrate support mechanism 3 is provided. The substrate support mechanism 3 consists of an angle adjustment motor 31, a substrate support tray 32, a substrate limiting part 33, and a linkage adjustment part 34. The substrate limiting part 33 is provided to clamp and fix substrates of different specifications, and the clamping range is flexible and adjustable, ensuring the smooth progress of substrate coating. The linkage adjustment part 34 is provided to drive the linkage adjustment part 34 to move when the substrate support tray 32 moves, so that the linkage adjustment part 34 drives the optical coating component 2 to move synchronously. This realizes that the optical coating component 2 can perform synchronous coating operation while driving the substrate to rotate, ensuring the thickness and uniformity of the coating.

[0088] In a further preferred embodiment of the present invention, such as Figures 5-6 As shown, the continuous feeding assembly 4 includes:

[0089] A feeding motor 41 is fixedly mounted on the coating base;

[0090] A feeding screw 42 is fixedly connected to the output end of the feeding motor 41. One end of the feeding screw 42 away from the feeding motor 41 extends into the substrate purification chamber 112 and the optical coating chamber 113, and is rotatably connected to the side wall of the outer shell 11.

[0091] A sliding feed seat 43 is threaded onto the outer wall of the feeding screw 42, and the sliding feed seat 43 is fixedly connected to the angle adjustment motor 31.

[0092] At least one set of feeding guide grooves 44 are provided at the bottom of the outer shell 11 and are slidably connected to the sliding feeding seat 43.

[0093] In this embodiment, the feeding motor 41 can be a stepper motor, and the feeding motor 41 is electrically connected to the coating controller 15. The feeding motor 41 is fixedly installed on the coating base by clamps or fastening bolts. The output end of the feeding motor 41 is fixedly connected to the feeding screw 42 by plug-in or interference fit. One end of the feeding screw 42 is rotatably connected to the side wall of the housing 11 through a bearing. The sliding feeding seat 43 can be a threaded seat, and the feeding guide groove 44 is symmetrically arranged at the bottom of the housing 11. The feeding guide groove 44 can be a rectangular groove.

[0094] When in operation, the feeding motor 41 is turned on, which drives the feeding screw 42 to rotate. This causes the feeding screw 42 to drive the sliding feeding seat 43 to slide along the feeding guide groove 44, thereby adjusting the position of the substrate support mechanism 3.

[0095] In a further preferred embodiment of the present invention, such as Figures 1-2 As shown, the coating machine body 1 further includes:

[0096] Raw material storage tank 13 is fixedly installed on the upper surface of the outer shell 11. The raw material storage tank 13 is used to supply coating material to the optical coating assembly 2.

[0097] The coating controller 15 is detachably mounted on the upper surface of the housing 11, and is electrically connected to the feeding motor 41 and the angle adjustment motor 31 respectively.

[0098] In this embodiment, the raw material storage tank 13 can be a hollow rectangular or circular structure. The bottom of the raw material storage tank 13 is fixedly installed on the upper surface of the outer shell 11 by a buckle or fastening bolt. The raw material storage tank 13 contains alloy materials, oxide materials, and fluoride materials. The coating controller 15 can be a PLC controller.

[0099] In a further preferred embodiment of the present invention, such as Figures 10-11 As shown, the substrate limiting portion 33 includes:

[0100] A limit motor is fixedly installed in the substrate support tray 32. The limit motor is electrically connected to the coating controller 15, and the limit motor is installed in the substrate support tray 32 by clamps or buckles.

[0101] A limiting gear 332 is fixedly connected to the output end of the limiting motor. The limiting gear 332 is rotatably disposed in the substrate support tray 32. The bottom of the limiting gear 332 is fixedly connected to the output end of the limiting motor by means of plugging or riveting.

[0102] At least one set of first gears 333 are rotatably mounted on the substrate support tray 32, and the first gears 333 mesh with the limiting gear plate 332 for transmission.

[0103] In this embodiment, the number of the first gears 333 can be 3-6 sets, and the first gears 333 are rotatably connected to the substrate support tray 32 through bearings.

[0104] A limiting screw 334 is fixedly connected to one end of the first gear 333;

[0105] A support threaded seat 335 is threaded onto the outer wall of the limiting screw 334. A support positioning seat 331 is provided at the bottom of the support threaded seat 335. The support positioning seat 331 is fixedly installed on the base material support tray 32. The support positioning seat 331 and the support threaded seat 335 are slidably connected.

[0106] The substrate limiting plate 336 is detachably installed on the supporting threaded seat 335 and is used to clamp and lock substrates of different specifications.

[0107] In this embodiment, one end of the limiting screw 334 is fixedly connected to the first gear 333 by plugging or riveting, and the other end of the limiting screw 334 is threaded with a supporting threaded seat 335. The base material limiting plate 336 is fixedly installed on the supporting threaded seat 335 by snap-fit ​​or bolt.

[0108] During operation, the limit motor is turned on, which drives the limit gear 332 to rotate. This causes the limit gear 332 to drive the first gear 333 to rotate. The rotation of the first gear 333 drives the limit screw 334 to rotate, which in turn causes the limit screw 334 to drive the support threaded seat 335 and the substrate limit plate 336 to move. This allows the substrate limit plate 336 to support and clamp substrates of different specifications.

[0109] In a further preferred embodiment of the present invention, such as Figures 7-9 As shown, the linkage adjustment unit 34 includes:

[0110] Linkage gear ring 341 is fixedly sleeved on the outer wall of the substrate support tray 32. The linkage gear ring 341 is fixedly installed on the outer wall of the substrate support tray 32 by insertion or riveting.

[0111] The second gear 342 is disposed on one side of the linkage gear ring 341, and the second gear 342 meshes with the linkage gear ring 341 for transmission.

[0112] The gear connecting rod 343 is fixedly installed on the upper surface of the second gear 342, and the gear connecting rod 343 is rotatably connected to the side wall of the housing 11.

[0113] The third gear 344 is fixedly connected to the end of the gear connecting rod 343.

[0114] The upper surface of the second gear 342 is fixedly connected to the gear connecting rod 343 by plugging or riveting. The side wall of the gear connecting rod 343 is rotatably connected to the side wall of the housing 11 through a bearing. The top of the gear connecting rod 343 is fixedly connected to the third gear 344 by plugging or welding. The third gear 344 can be a half or one-third incomplete gear.

[0115] Linkage gear seat 345, which is sleeved on the outside of the third gear 344 and meshes with the third gear 344 for transmission; the linkage gear seat 345 is detachably connected to the optical coating assembly 2.

[0116] The gear seat guide plate 346 is fixedly installed on the side wall of the outer shell 11, and the gear seat guide plate 346 is slidably connected to the linkage gear seat 345.

[0117] In this embodiment, two sets of racks are symmetrically arranged inside the linkage gear seat 345, and the gear seat guide plate 346 is fixedly installed on the side wall of the outer shell 11 by a snap fastener or fastening bolt. The gear seat guide plate 346 can be a rectangular seat or a "T" shaped seat structure.

[0118] In this embodiment of the invention, a linkage adjustment unit 34 is provided. The linkage adjustment unit 34 is composed of a linkage gear ring 341, a second gear 342, a third gear 344, and a linkage gear seat 345. The linkage gear ring 341, the second gear 342, the third gear 344, and the linkage gear seat 345 work together to drive the linkage gear seat 345 to reciprocate within the optical coating cavity 113, thereby driving the optical coating assembly 2 to reciprocate, improving the coating efficiency and the uniformity of the film.

[0119] During operation, when the feeding screw 42 drives the sliding feeding seat 43 to slide along the feeding guide groove 44, the substrate support tray 32 moves to the designated position in the optical coating cavity 113. Then, the linkage gear ring 341 contacts and meshes with the second gear 342. The angle adjustment motor 31 is then turned on. The start of the angle adjustment motor 31 can drive the substrate support tray 32 to rotate. The rotation of the substrate support tray 32 can drive the linkage gear ring 341 to rotate. The rotation of the linkage gear ring 341 can drive the second gear 342, the gear connecting rod 343, and the third gear 344 to rotate. This causes the third gear 344 to drive the linkage gear seat 345 to reciprocate within the optical coating cavity 113, thereby realizing the reciprocating motion of the optical coating component 2 and improving the coating efficiency and the uniformity of the film.

[0120] In a further preferred embodiment of the present invention, such as Figure 7 As shown, the optical coating assembly 2 includes:

[0121] A coating feed tube 21 is disposed inside the optical coating cavity 113, and one end of the coating feed tube 21 is connected to the raw material storage tank 13.

[0122] The vapor deposition film forming stand 22 is connected to the film feeding pipe 21 and is used to heat the film forming material to the evaporation temperature. The vapor deposition film forming stand 22 has a built-in heating resistance wire and an electron gun evaporator. The vapor deposition film forming stand 22 is also detachably connected to the linkage tooth stand 345.

[0123] At least one set of magnetron sputtering tubes 23, which are detachably mounted on the bottom of the vapor deposition substrate 22.

[0124] In this embodiment, the coating feed tube 21 can be a spiral tube or a telescopic tube structure, and the side wall of the vapor deposition film base 22 is fixedly connected to the side wall of the linkage gear seat 345 by a snap fastener or fastening bolt. The magnetron sputtering tube 23 is installed on the vapor deposition film base 22 by a thread or snap fastener. The number of magnetron sputtering tubes 23 can be 2-8 sets.

[0125] In a further preferred embodiment of the present invention, such as Figure 12 As shown, embodiments of the present invention also include:

[0126] Substrate blowing assembly 5 is disposed in substrate purification chamber 112 and is used to purify and blow the surface of substrate.

[0127] In this embodiment of the invention, a substrate blowing assembly 5 is provided. The substrate blowing assembly 5 facilitates the cleaning of dust and impurities on the substrate surface, thereby preventing dust and impurities from affecting the coating operation on the substrate surface. The blowing range of the substrate blowing assembly 5 can also be flexibly adjusted, thus adapting to the blowing work of substrates of different specifications.

[0128] The substrate purging assembly 5 includes:

[0129] A purge support 52 is fixedly installed inside the substrate purification chamber 112.

[0130] A purge motor 51 is fixedly mounted on the upper surface of the purge support 52;

[0131] A purge linkage unit 53 is disposed within the purge support 52;

[0132] The substrate blowing unit 54 is connected to the blowing linkage unit 53. The substrate blowing unit 54 includes a blowing fan 541 and at least one set of blowing negative pressure pipes 542. The blowing negative pressure pipes 542 are fixedly installed on the lower surface of the blowing fan 541 and are in communication with the blowing fan 541.

[0133] It should be noted that the purge support 52 can be a hollow circular seat or ring, and the purge support 52 is fixedly connected to the inner wall of the outer shell 11 by a snap fastener or fastening bolt. The purge motor 51 is electrically connected to the coating controller 15. The purge motor 51 is fixedly installed on the surface of the purge support 52 by a snap fastener or bolt. The purge fan 541 can be a negative pressure fan, and the purge fan 541 is also electrically connected to the coating controller 15. The number of purge negative pressure pipes 542 can be 2-4 sets.

[0134] In this embodiment, the purging linkage unit 53 includes:

[0135] Internal gear ring 533, which is fixedly installed inside the purge support 52;

[0136] Linkage swing arm 531, which is disposed in the purge support 52, and one end of the linkage swing arm 531 is fixedly connected to the output end of the purge motor 51.

[0137] The fourth gear 532 is rotatably mounted on the end of the linkage swing arm 531. The fourth gear 532 meshes with the internal gear ring 533 for transmission, and the fourth gear 532 is detachably connected to the blower 541.

[0138] It should be noted that the internal gear ring 533 is fixedly installed in the purge support 52 by welding or riveting. One end of the linkage swing arm 531 is riveted to the output end of the purge motor 51, and the other end of the linkage swing arm 531 is rotatably connected to the fourth gear 532 through a bearing. The fourth gear 532 is detachably connected to the purge blower 541 by fastening bolts or clips.

[0139] In summary, the present invention provides a multi-chamber continuous optical coating machine. During operation, the substrate to be coated is placed on the substrate limiting part 33, and then the continuous feeding component 4 is turned on. The continuous feeding component 4 starts to feed the substrate limiting part 33, the substrate support tray 32 and the substrate into the optical coating chamber 113. Then, the angle adjustment motor 31 and the optical coating component 2 are turned on. The angle adjustment motor 31 can drive the substrate support tray 32 to rotate. At the same time, the rotation of the substrate support tray 32 can drive the linkage adjustment part 34 to move, so that the linkage adjustment part 34 drives the optical coating component 2 to move synchronously, realizing the simultaneous coating operation of the optical coating component 2 while driving the substrate to rotate.

[0140] In this embodiment of the invention, a substrate support mechanism 3 is provided. The substrate support mechanism 3 consists of an angle adjustment motor 31, a substrate support tray 32, a substrate limiting part 33, and a linkage adjustment part 34. The substrate limiting part 33 is provided to clamp and fix substrates of different specifications, and the clamping range is flexible and adjustable, ensuring the smooth progress of substrate coating. The linkage adjustment part 34 is provided to drive the linkage adjustment part 34 to move when the substrate support tray 32 moves, so that the linkage adjustment part 34 drives the optical coating component 2 to move synchronously. This realizes that the optical coating component 2 can perform synchronous coating operation while driving the substrate to rotate, ensuring the thickness and uniformity of the coating.

[0141] It should be noted that, for the sake of simplicity, the foregoing embodiments are all described as a series of actions. However, those skilled in the art should understand that the present invention is not limited to the described order of actions, as some steps may be performed in other orders or simultaneously according to the present invention. Furthermore, those skilled in the art should also understand that the embodiments described in the specification are preferred embodiments, and the actions and modules involved are not necessarily essential to the present invention.

[0142] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit the scope of protection of the invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on these embodiments, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art can still combine, add, delete, or otherwise adjust the features of the various embodiments of the present invention according to the circumstances without conflict or creative effort, thereby obtaining different technical solutions that do not fundamentally depart from the concept of the present invention. These technical solutions also fall within the scope of protection of the present invention.

Claims

1. A multi-chamber continuous optical coating machine, comprising: a coating machine body (1) comprising an outer housing (11), a coating machine base (12), and an observation window (14), the outer housing (11) being fixedly mounted on the coating machine base (12), the observation window (14) being mounted on the side wall of the outer housing (11), one side of the outer housing (11) being provided with a feeding port (111), and the outer housing (11) being sequentially provided with a substrate purification cavity (112) and an optical coating cavity (113) inside; a substrate supporting mechanism (3) for supporting and fixing optical coating substrates of different specifications; a continuous feeding assembly (4) provided in the outer housing (11) and extending through the substrate purification cavity (112) and the optical coating cavity (113) and connected with the substrate supporting mechanism (3); an optical coating assembly (2) provided in the optical coating cavity (113) and used for optical coating of substrates; wherein the substrate supporting mechanism (3) comprises: an angle adjusting motor (31) connected with the continuous feeding assembly (4); a substrate supporting tray (32) fixedly connected with the angle adjusting motor (31); a substrate limiting part (33) provided in the substrate supporting tray (32) and used for limiting and locking the substrate; a linkage adjusting part (34) provided in the optical coating cavity (113) and connected with the substrate supporting tray (32) and the optical coating assembly (2), and used for adjusting the coating position of the optical coating assembly (2); the substrate limiting part (33) comprises a limiting motor, a limiting gear disc (332) fixedly connected with the output end of the limiting motor, at least one group of first gears (333), a limiting screw rod (334), a supporting threaded seat (335) threadedly sleeved on the outer wall of the limiting screw rod (334), and a substrate limiting plate (336); the linkage adjusting part (34) comprises a linkage gear ring (341), a second gear (342), a gear connecting rod (343), a third gear (344), a linkage gear seat (345), and a gear seat guide plate (346); further comprising a substrate purging assembly (5) provided in the substrate purification cavity (112) and used for purging and blowing the surface of the substrate; the continuous feeding assembly (4) comprises: a feeding motor (41) fixedly mounted on the coating base; a feeding screw rod (42) fixedly connected with the output end of the feeding motor (41), the end of the feeding screw rod (42) away from the feeding motor (41) extending into the substrate purification cavity (112) and the optical coating cavity (113) and being rotatably connected with the side wall of the outer housing (11). A sliding feeding seat (43) is threadedly sleeved on the outer wall of the feeding screw (42), and the sliding feeding seat (43) is fixedly connected with the angle adjusting motor (31); At least one set of feeding guide grooves (44) are formed in the bottom of the outer shell (11), and the feeding guide grooves (44) are slidingly connected with the sliding feeding seat (43); The substrate purging assembly (5) comprises: A purging supporting seat (52) is fixedly installed in the substrate purifying cavity (112); A purging motor (51) is fixedly installed on the upper surface of the purging supporting seat (52); A purging linkage part (53) is arranged in the purging supporting seat (52); A substrate purging part (54) connected with the purging linkage part (53) comprises a purging fan (541) and at least one set of purging negative pressure pipes (542), the purging negative pressure pipes (542) are fixedly installed on the lower surface of the purging fan (541), and the purging negative pressure pipes (542) are in conduction with the purging fan (541); The purging linkage part (53) comprises: An inner gear ring (533) is fixedly installed in the purging supporting seat (52); A linkage swing arm (531) is arranged in the purging supporting seat (52), one end of the linkage swing arm (531) is fixedly connected with the output end of the purging motor (51); A fourth gear (532) is rotatably installed on the end of the linkage swing arm (531), the fourth gear (532) is in mesh transmission with the inner gear ring (533), and the fourth gear (532) is detachably connected with the purging fan (541).

2. The multi-chamber continuous optical coating machine of claim 1, wherein: The film coating machine body (1) further comprises: A raw material storage tank (13) is fixedly installed on the upper surface of the outer shell (11), and the raw material storage tank (13) is used for supplying coating materials to the optical coating assembly (2); A coating controller (15) is detachably installed on the upper surface of the outer shell (11), and the coating controller (15) is electrically connected with the feeding motor (41) and the angle adjusting motor (31) respectively.

3. The multi-chamber continuous optical coating machine of claim 1, wherein: The substrate limiting part (33) comprises: A limiting motor is fixedly installed in the substrate supporting tray (32); A limiting gear disc (332) fixedly connected with the output end of the limiting motor is rotatably arranged in the substrate supporting tray (32); At least one set of first gears (333) are rotatably installed on the substrate supporting tray (32), and the first gears (333) are in mesh transmission with the limiting gear disc (332).

4. The multi-chamber continuous optical coating machine of claim 3, wherein: The substrate limiting part (33) further comprises: A limiting screw (334) is fixedly connected with one end of the first gear (333). A supporting threaded seat (335) is arranged on the outer wall of the limiting screw rod (334), and the bottom of the supporting threaded seat (335) is provided with a supporting positioning seat (331) which is fixedly installed on the substrate supporting plate (32) and is in sliding connection with the supporting threaded seat (335); A substrate limiting plate (336) is detachably installed on the supporting threaded seat (335), and the substrate limiting plate (336) is used for clamping and locking substrates of different specifications.

5. The multi-chamber continuous optical coating machine of claim 4, wherein: The linkage adjusting part (34) comprises: A linkage gear ring (341) is fixedly arranged on the outer wall of the substrate supporting plate (32); A second gear (342) is arranged on one side of the linkage gear ring (341), and the second gear (342) is in meshing transmission with the linkage gear ring (341); A gear connecting rod (343) is fixedly installed on the upper surface of the second gear (342) and is in rotary connection with the side wall of the outer shell (11).

6. The multi-chamber continuous optical coating machine of claim 5, wherein: The linkage adjusting part (34) further comprises: A third gear (344) is fixedly connected with the end of the gear connecting rod (343); A linkage gear seat (345) is arranged on the outside of the third gear (344) and is in meshing transmission with the third gear (344), and the linkage gear seat (345) is detachably connected with the optical coating assembly (2); A gear seat guide plate (346) is fixedly installed on the side wall of the outer shell (11) and is in sliding connection with the linkage gear seat (345).

7. The multi-chamber continuous optical coating machine of claim 1, wherein: The optical coating assembly (2) comprises: A coating feeding pipe (21) is arranged in the optical coating cavity (113), and one end of the coating feeding pipe (21) is in communication with the raw material storage tank (13); An evaporation film forming seat (22) is in communication with the coating feeding pipe (21), and the evaporation film forming seat (22) is used for heating the coating material to an evaporation temperature, and the evaporation film forming seat (22) is internally provided with a heating resistance wire and an electron gun evaporator, and the evaporation film forming seat (22) is detachably connected with the linkage gear seat (345); At least one set of magnetron sputtering pipes (23) are detachably installed at the bottom of the evaporation film forming seat (22).

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