Double-ended piezoelectric micro-manipulator with orthogonal beam bending actuation and method of actuation

Abstract

The application discloses a double-end piezoelectric micro-manipulator with orthogonal beam bending actuation and a motion excitation method, relates to the technical field of piezoelectric driving, and solves the problem that the operation flexibility of the existing piezoelectric micro-manipulator is limited. The piezoelectric micro-manipulator comprises an upper layer movement module and a lower layer movement module; the upper layer movement module comprises an upper layer base, an upper layer orthogonal beam and an upper layer operation end; the lower layer movement module comprises a lower layer base, a lower layer orthogonal beam and a lower layer operation end; the upper layer operation end is fixedly connected with the center position of the upper layer orthogonal beam, and the upper layer orthogonal beam is fixedly connected with the inner side of the upper layer base; the lower layer operation end is fixedly connected with the center position of the lower layer orthogonal beam, and the lower layer orthogonal beam is fixedly connected with the inner side of the lower layer base; and the upper layer base is fixedly connected with the lower layer base. The piezoelectric micro-manipulator is applied to the fields of micro-nano assembly, biological medicine, micro-manipulation and the like.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of piezoelectric driving, and particularly relates to a double-end piezoelectric micro-manipulator with orthogonal beam bending actuation. BACKGROUND

[0002] Piezoelectric driving is an advanced driving technology for precise movement using the inverse piezoelectric effect, which has the advantages of fast response, high precision, no need for transmission, and no electromagnetic interference, and has gradually become one of the key technologies for promoting the rapid development of frontiers such as micro / nano positioning, active optics, biomedicine, and micro / nano manipulation. For example, an atomic force microscope needs to use a three-degree-of-freedom linear piezoelectric motion platform to achieve precise positioning and rapid scanning of the sample; a space spectrometer needs to use a piezoelectrically driven yaw mirror to achieve light path jitter compensation, thereby obtaining high-resolution imaging; and the fields of micro-assembly and biomedicine use piezoelectric micro-tweezers with clamping functions to achieve the clamping, assembly, and detection of micro devices and cells. In short, piezoelectric driving has become a core supporting technology in the fields of micro-positioning and micro / nano manipulation due to its excellent response characteristics. A piezoelectric micro-manipulator is one of the typical applications of piezoelectric driving technology, and the mainstream scheme is to use a piezoelectric stack as the core driving element and combine it with a flexible mechanism to achieve displacement expansion. Usually, the output displacement of the piezoelectric stack is converted and adjusted by using the diversified structure and force-displacement conversion relationship of the flexible mechanism, and clamping actions are achieved at a specific operation end, and finally used for the clamping and release manipulation of micro-scale objects. However, the piezoelectric stack element has inherent characteristics such as single movement dimension and small deformation, and the complex structure layout of the flexible mechanism limits the movement freedom of the piezoelectric micro-manipulator, resulting in that the operation flexibility of the existing piezoelectric micro-manipulator is limited. Therefore, how to explore and use new piezoelectric driving elements, and at the same time, innovate the configuration and action excitation method of the piezoelectric micro-manipulator has become one of the most urgent research tasks in the field of piezoelectric micro-manipulation. SUMMARY

[0003] The present application proposes a double-end piezoelectric micro-manipulator with orthogonal beam bending actuation to solve the problem that the piezoelectric stack element has inherent characteristics such as single movement dimension and small deformation, and the complex structure layout of the flexible mechanism limits the movement freedom of the piezoelectric micro-manipulator, resulting in that the operation flexibility of the existing piezoelectric micro-manipulator is limited. The piezoelectric micro-manipulator includes an upper layer movement module and a lower layer movement module. The upper layer movement module includes an upper layer base, an upper layer orthogonal beam, and an upper layer operation end. The lower layer movement module includes a lower layer base, a lower layer orthogonal beam, and a lower layer operation end. The upper layer operation end is fixedly coupled with the center position of the upper layer orthogonal beam, and the upper layer orthogonal beam is fixedly coupled with the inner side of the upper layer base. The lower layer operation end is fixedly coupled with the center position of the lower layer orthogonal beam, and the lower layer orthogonal beam is fixedly coupled with the inner side of the lower layer base. The upper layer base is fixedly coupled with the lower layer base.

[0004] Further, a preferred mode is proposed, the upper layer orthogonal beam is a cross structure, comprising upper layer No. 1 actuating unit, upper layer No. 2 actuating unit, upper layer No. 3 actuating unit and upper layer No. 4 actuating unit; the structure of each actuating unit is same, symmetrically arranged about the center position of the upper layer orthogonal beam and set inside the upper layer base; the upper layer No. 1 actuating unit and the upper layer No. 3 actuating unit are connected, and the upper layer No. 2 actuating unit and the upper layer No. 4 actuating unit are connected.

[0005] Further, a preferred mode is proposed, the lower layer orthogonal beam is a cross structure, comprising lower layer No. 1 actuating unit, lower layer No. 2 actuating unit, lower layer No. 3 actuating unit and lower layer No. 4 actuating unit; the structure of each actuating unit is same, symmetrically arranged about the center position of the upper layer orthogonal beam and set inside the lower layer base; the lower layer No. 1 actuating unit and the lower layer No. 3 actuating unit are connected, and the lower layer No. 2 actuating unit and the lower layer No. 4 actuating unit are connected.

[0006] Further, a preferred mode is proposed, the upper layer No. 1 actuating unit, the upper layer No. 2 actuating unit, the upper layer No. 3 actuating unit and the upper layer No. 4 actuating unit are all composite structures of piezoelectric element and metal elastic part; the lower layer No. 1 actuating unit, the lower layer No. 2 actuating unit, the lower layer No. 3 actuating unit and the lower layer No. 4 actuating unit are all composite structures of piezoelectric element and metal elastic part.

[0007] Further, a preferred mode is proposed, the upper layer orthogonal beam and the lower layer orthogonal beam are arranged in space in staggered parallel relationship, the center position of the upper layer orthogonal beam and the center position of the lower layer orthogonal beam keep a certain offset distance in horizontal and vertical directions; the upper layer operation end fixed at the center position of the upper layer orthogonal beam and the lower layer operation end fixed at the center position of the lower layer orthogonal beam are arranged in parallel relationship.

[0008] Further, a preferred mode is proposed, the upper layer operation end is composed of bullet head structure and cylindrical structure; the lower layer operation end is composed of bullet head structure and cylindrical structure.

[0009] Further, a preferred mode is proposed, the upper layer base and the lower layer base are rectangular frames.

[0010] Based on the same inventive concept, the application further proposes a motion excitation method of the double-end piezoelectric microoperator of orthogonal beam bending actuation, the method comprises:

[0011] The two actuating units of the upper orthogonal beam in the horizontal direction generate reverse bending deformation under the excitation of electric signal, which pushes the upper operation end to generate radial swing in the horizontal direction; the two actuating units of the upper orthogonal beam in the vertical direction generate reverse bending deformation under the excitation of electric signal, which pushes the upper operation end to generate radial swing in the vertical direction; the four actuating units of the upper orthogonal beam generate same direction bending deformation along the normal direction of the distribution surface at the same time, which pushes the upper operation end to generate axial translation along the direction of its own axis; the two actuating units of the lower orthogonal beam in the horizontal direction generate reverse bending deformation under the excitation of electric signal, which pushes the lower operation end to generate radial swing in the horizontal direction; the two actuating units of the lower orthogonal beam in the vertical direction generate reverse bending deformation under the excitation of electric signal, which pushes the lower operation end to generate radial swing in the vertical direction; the four actuating units of the lower orthogonal beam generate same direction bending deformation along the normal direction of the distribution surface at the same time, which pushes the lower operation end to generate axial translation along the direction of its own axis.

[0012] Further, a preferred mode is also proposed, the cross motion combination of the radial swing and axial translation of the upper operation end and the lower operation end generates three action modes of tangential twisting, axial twisting and radial clamping.

[0013] The present application has the advantages of:

[0014] The orthogonal beam bending actuated double-end piezoelectric micro operator proposed in the present application utilizes the reverse bending and same direction bending of the single layer orthogonal beam to convert the bending deformation of the four actuating units in the orthogonal beam into the deflection motion or translation motion of the center of the orthogonal beam, which directly pushes the upper operation end to generate radial swing or axial translation, and adopts a simpler actuating mode to generate multiple degrees of freedom of motion.

[0015] The orthogonal beam bending actuated double-end piezoelectric micro operator proposed in the present application, through the parallel superposition of the upper orthogonal beam and the lower orthogonal beam, the upper operation end and the lower operation end installed at the center positions of the two can generate three degrees of freedom motion respectively, through the cross combination of the motion of the two operation ends, three action modes with practical operation value are generated, i.e. tangential twisting, axial twisting and radial clamping, which has more flexible operation action.

[0016] The application provides a double-end piezoelectric micro-manipulator with orthogonal beam bending actuation, which comprises the following steps: designing upper and lower layers of orthogonal beam structure and arranging an elongated operation end in the center; fixing a piezoelectric element and a metal elastic part to form a composite actuating unit; and using the composite actuating unit to construct four branches of the upper and lower layers of orthogonal beam; and further providing a motion excitation method of the double-end piezoelectric micro-manipulator with orthogonal beam bending actuation, which comprises the following steps: exciting the bending deformation motion of part of the actuating units in the upper and lower layers of orthogonal beam respectively, driving the upper and lower operation ends to independently generate radial deflection and axial translation motion, and finally combining to form radial twisting, axial twisting and radial clamping motion.

[0017] The double-end piezoelectric micro-manipulator with orthogonal beam bending actuation has the advantages of fast response speed, high motion precision, direct drive without transmission, multiple operation modes and the like, and provides high-performance operation equipment for the fields of micro-nano assembly, biological medicine, micro-manipulation and the like. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 A schematic diagram of a double-end piezoelectric micro-manipulator with orthogonal beam bending actuation according to the first embodiment;

[0019] Figure 2 A three-dimensional schematic diagram of an actuating unit according to the second embodiment;

[0020] Figure 3 A schematic diagram of the piezoelectric micro-manipulator generating positive tangential twisting motion according to the tenth embodiment;

[0021] Figure 4 A schematic diagram of the piezoelectric micro-manipulator generating reverse tangential twisting motion according to the tenth embodiment;

[0022] Figure 5 A schematic diagram of the piezoelectric micro-manipulator generating positive axial twisting motion according to the eleventh embodiment;

[0023] Figure 6 A schematic diagram of the piezoelectric micro-manipulator generating reverse axial twisting motion according to the eleventh embodiment;

[0024] Figure 7 A schematic diagram of the piezoelectric micro-manipulator generating outward radial clamping motion according to the twelfth embodiment;

[0025] Figure 8 A schematic diagram of the piezoelectric micro-manipulator generating inward radial clamping motion according to the twelfth embodiment;

[0026] In the figure, 1 is an upper layer motion module, 2 is a lower layer motion module, 1-1 is an upper layer base, 1-2 is an upper layer orthogonal beam, 1-3 is an upper layer operation end, 2-1 is a lower layer base, 2-2 is a lower layer orthogonal beam, 2-3 is a lower layer operation end, 1-2-1 is a first upper layer actuating unit, 1-2-2 is a second upper layer actuating unit, 1-2-3 is a third upper layer actuating unit, 1-2-4 is a fourth upper layer actuating unit, 2-2-1 is a first lower layer actuating unit, 2-2-2 is a second lower layer actuating unit, 2-2-3 is a third lower layer actuating unit, and 2-2-4 is a fourth lower layer actuating unit. DETAILED DESCRIPTION

[0027] To make the objectives, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are some but not all of the embodiments of the present application.

[0028] Embodiment one, refer to Figure 1 This embodiment describes a piezoelectric micro-manipulator with two ends bent by an orthogonal beam actuation. The piezoelectric micro-manipulator includes an upper layer motion module 1 and a lower layer motion module 2. The upper layer motion module 1 includes an upper layer base 1-1, an upper layer orthogonal beam 1-2 and an upper layer operation end 1-3. The lower layer motion module 2 includes a lower layer base 2-1, a lower layer orthogonal beam 2-2 and a lower layer operation end 2-3. The upper layer operation end 1-3 is fixedly coupled with the center of the upper layer orthogonal beam 1-2, and the upper layer orthogonal beam 1-2 is fixedly coupled with the inner side of the upper layer base 1-1. The lower layer operation end 2-3 is fixedly coupled with the center of the lower layer orthogonal beam 2-2, and the lower layer orthogonal beam 2-2 is fixedly coupled with the inner side of the lower layer base 2-1. The upper layer base 1-1 is fixedly coupled with the lower layer base 2-1.

[0029] The double-ended piezoelectric micro-manipulator with orthogonal beam bending actuation proposed in this embodiment adopts the design of two upper and lower movement modules, each module has an independent orthogonal beam structure. Such design not only increases the degree of freedom of operation, but also allows more complex movement patterns, thereby improving the operation flexibility. For example, the double-layer structure can realize multi-directional movement combination, thereby meeting the needs of complex micro-operation. The design of orthogonal beam can effectively convert the bending deformation of piezoelectric material into linear motion. Since the orthogonal beam can be independently actuated in different directions, such design can significantly improve the deformation amount and movement range of the micro-manipulator. With the orthogonal beam structure, larger displacement and more precise operation control can be achieved. With the modular design method, the upper and lower modules can be independently adjusted and optimized, which makes the adjustment and maintenance of the micro-manipulator more convenient. Users can independently adjust or replace the upper and lower modules according to specific application requirements, thereby improving the adaptability and flexibility of the system. The upper and lower movement modules are fixed together in a compact embedded connection manner, reducing the complexity of the structure and helping to achieve a more compact design. The compact structure enables the micro-manipulator to work effectively in a space-limited environment.

[0030] The double-ended piezoelectric micro-manipulator with orthogonal beam bending actuation proposed in this embodiment can generate three degrees of freedom movement through the parallel superposition of the upper and lower orthogonal beams. The upper and lower operation ends installed at the center of the two beams can generate three degrees of freedom movement. Through the cross combination of the movement of the two operation ends, three action modes with practical operation value are generated, namely tangential twisting, axial twisting and radial clamping, which have more flexible operation actions.

[0031] The double-ended piezoelectric micro-manipulator with orthogonal beam bending actuation proposed in this embodiment adopts piezoelectric elements to construct the core actuation unit, which has the advantages of fast response speed, high action precision, direct drive without transmission, multiple operation modes, etc., and provides high-performance operation equipment for micro-nano assembly, biological medicine, micro-manipulation and other fields.

[0032] Embodiment two, see Figure 2 This embodiment is a further limitation of the double-ended piezoelectric micro-manipulator with orthogonal beam bending actuation described in embodiment one. The upper orthogonal beam 1-2 is a cross structure, including upper No. 1 actuation unit 1-2-1, upper No. 2 actuation unit 1-2-2, upper No. 3 actuation unit 1-2-3 and upper No. 4 actuation unit 1-2-4. The structure of each actuation unit is the same, symmetrically arranged about the center of the upper orthogonal beam 1-2 and set inside the upper base 1-1. The upper No. 1 actuation unit 1-2-1 and the upper No. 3 actuation unit 1-2-3 are connected, and the upper No. 2 actuation unit 1-2-2 and the upper No. 4 actuation unit 1-2-4 are connected.

[0033] The cross-shaped orthogonal beam designed in this embodiment includes four independent actuating units (upper layer No. 1, No. 2, No. 3 and No. 4), each of which has a symmetrical layout. Such a layout can achieve more uniform and symmetrical actuation, so that the micro manipulator can obtain better motion control in multiple directions.

[0034] Further, the symmetrical arrangement of each actuating unit relative to the center position can ensure uniform distribution of force and deformation during actuation, reducing errors caused by asymmetric actuation. Such a design can improve the overall operation accuracy, especially in applications requiring high-precision positioning.

[0035] Further, the connection design between the upper layer No. 1 and No. 3 actuating units and the upper layer No. 2 and No. 4 actuating units enables the actuator to control motion in multiple directions simultaneously. Such a connection method can improve the control ability of the manipulator in practical applications, and is suitable for more complex micro-operation tasks.

[0036] At the same time, since the structure of each actuating unit is the same and symmetrical, the design of the control system can be simplified. Uniform driving of the actuating units can be achieved through symmetrical voltage control, reducing the complexity of the control system.

[0037] The symmetrical actuating unit design can enhance the stability of the overall structure. Due to the symmetrical distribution of each unit, it helps to reduce the structural deformation caused by uneven application of force, improving the long-term reliability of the micro manipulator.

[0038] Embodiment three, this embodiment is a further limitation of the double-ended piezoelectric micro manipulator of the orthogonal beam bending actuation described in embodiment one, the lower layer orthogonal beam 2-2 is a cross-shaped structure, including lower layer No. 1 actuating unit 2-2-1, lower layer No. 2 actuating unit 2-2-2, lower layer No. 3 actuating unit 2-2-3 and lower layer No. 4 actuating unit 2-2-4; the structure of each actuating unit is the same, which is in a symmetrical relationship with the center position of the upper layer orthogonal beam 1-2 and is arranged inside the lower layer base 1-2; the lower layer No. 1 actuating unit 2-2-1 and the lower layer No. 3 actuating unit 2-2-3 are connected, and the lower layer No. 2 actuating unit 2-2-2 and the lower layer No. 4 actuating unit 2-2-4 are connected.

[0039] Embodiment four, this embodiment is a further limitation of the double-ended piezoelectric micro-manipulator of the orthogonal beam bending actuation according to embodiment two, the upper layer No. 1 actuating unit 1-2-1, the upper layer No. 2 actuating unit 1-2-2, the upper layer No. 3 actuating unit 1-2-3 and the upper layer No. 4 actuating unit 1-2-4 are all composite structures of piezoelectric elements and metal elastic parts, specifically: piezoelectric elements and metal elastic parts are attached layer by layer, or piezoelectric elements are installed on metal elastic parts to form a whole composite; the lower layer No. 1 actuating unit 2-2-1, the lower layer No. 2 actuating unit 2-2-2, the lower layer No. 3 actuating unit 2-2-3 and the lower layer No. 4 actuating unit 2-2-4 are all composite structures of piezoelectric elements and metal elastic parts, specifically: piezoelectric elements and metal elastic parts are attached layer by layer, or piezoelectric elements are installed on metal elastic parts to form a whole composite.

[0040] In this embodiment, by designing a composite of piezoelectric elements and metal elastic parts, higher precision control is achieved. Piezoelectric elements can produce a small deformation under the action of an electric field, while metal elastic parts enhance their response stability and reliability. The composite structure enables the manipulator to produce larger displacement or force under the application of smaller voltage, thereby improving the driving capacity and efficiency.

[0041] Embodiment five, this embodiment is a further limitation of the double-ended piezoelectric micro-manipulator of the orthogonal beam bending actuation according to embodiment one, the upper layer orthogonal beam 1-2 and the lower layer orthogonal beam 2-2 are arranged in a staggered parallel relationship in space, the center position of the upper layer orthogonal beam 1-2 and the center position of the lower layer orthogonal beam 2-2 maintain a certain offset distance in the horizontal and vertical directions; the upper layer operation end 1-3 fixed at the center position of the upper layer orthogonal beam 1-2 and the lower layer operation end 2-3 fixed at the center position of the lower layer orthogonal beam 2-2 are arranged in parallel.

[0042] In this embodiment, staggered arrangement can effectively reduce the interference and friction between the upper and lower beams during movement, improve the working stability and life of the manipulator. Due to the staggered arrangement of the two layers, the operation end can be better distributed in space, which helps to optimize the working range and flexibility. Through staggered design, more precise adjustment can be achieved on different levels, thereby improving the operation precision and control ability. The parallel arrangement of the operation ends can effectively transfer force between different layers, enhancing the overall driving force and response ability of the micro-manipulator.

[0043] Embodiment six, this embodiment is a further limitation of the double-ended piezoelectric micro-manipulator of the orthogonal beam bending actuation according to embodiment one, the upper layer operation end 1-3 is composed of a bullet structure and a cylindrical structure; the lower layer operation end 2-3 is composed of a bullet structure and a cylindrical structure.

[0044] The upper operating tip 1-3 and the lower operating tip 2-3 in this embodiment are made of metal material, designed as an elongated body combining a bullet head structure and a cylindrical structure, respectively used to transmit the yawing or translational motion of the center position of the upper orthogonal beam 1-1 and the lower orthogonal beam 2-2 to the end of the upper operating tip and the lower operating tip.

[0045] Embodiment seven, this embodiment is a further limitation of the double-end piezoelectric micro-operating device of the orthogonal beam bending actuation according to embodiment one, wherein the upper base 1-1 and the lower base 1-2 are rectangular boxes.

[0046] Embodiment eight, the method for actuating the double-end piezoelectric micro-operating device of the orthogonal beam bending actuation according to this embodiment, the method comprises:

[0047] The two actuating units of the upper orthogonal beam 1-2 in the horizontal direction generate reverse bending deformation in the horizontal direction under the excitation of the electric signal, pushing the upper operating tip 1-3 to generate radial oscillation in the horizontal direction; the two actuating units of the upper orthogonal beam 1-2 in the vertical direction generate reverse bending deformation in the vertical direction under the excitation of the electric signal, pushing the upper operating tip 1-3 to generate radial oscillation in the vertical direction; the four actuating units of the upper orthogonal beam 1-2 simultaneously generate same-direction bending deformation along the normal direction of the distribution surface, pushing the upper operating tip 1-3 to generate axial translation along the direction of its own axis; the two actuating units of the lower orthogonal beam 2-2 in the horizontal direction generate reverse bending deformation in the horizontal direction under the excitation of the electric signal, pushing the lower operating tip 2-3 to generate radial oscillation in the horizontal direction; the two actuating units of the lower orthogonal beam 2-2 in the vertical direction generate reverse bending deformation in the vertical direction under the excitation of the electric signal, pushing the lower operating tip 2-3 to generate radial oscillation in the vertical direction; the four actuating units of the lower orthogonal beam 2-2 simultaneously generate same-direction bending deformation along the normal direction of the distribution surface, pushing the lower operating tip 2-3 to generate axial translation along the direction of its own axis.

[0048] By independently exciting different direction actuating units on the upper and lower orthogonal beams, the operating device can realize radial oscillation in the horizontal and vertical directions. This multi-dimensional control capability enables the micro-operating device to perform complex micro-operation tasks and meet the needs of different application scenarios. The design of the orthogonal beam simplifies the structural layout, and compared with complex flexible mechanisms, the manufacturing and maintenance difficulty is reduced. This helps to reduce production costs and improve overall reliability, suitable for large-scale applications.

[0049] The excitation method allows individual or simultaneous control of each actuating unit, providing great flexibility. Users can freely combine motion patterns as needed, such as horizontal and vertical oscillation at the same time, or translation along its own axis, which makes the micro-operating device more efficient when performing delicate operations.

[0050] By precise electrical signal control, fine adjustment of the actuation units can be achieved. Such high-precision motion control helps to reduce errors during micro operations and improve the accuracy of operations, especially in the assembly or adjustment of small components.

[0051] Embodiment nine, this embodiment is a further limitation of the actuation method of the double-ended piezoelectric micro manipulator with orthogonal beam bending actuation of embodiment eight, the combined radial swing and axial translation of the upper operating end 1-3 and the lower operating end 2-3 generates three action modes of tangential twisting, axial twisting and radial clamping.

[0052] Embodiment ten, see Figure 3 and Figure 4 This embodiment is to provide a specific implementation of the tangential twisting action of the double-ended piezoelectric micro manipulator with orthogonal beam bending actuation, the detailed implementation steps are as follows:

[0053] Step one: apply positive excitation electrical signals to the upper layer No. 1 actuation unit 1-2-1 and the upper layer No. 2 actuation unit 1-2-2 distributed along the X-axis positive direction and the Y-axis positive direction in the upper layer orthogonal beam 1-2, to excite both to generate bending deformation along the Z-axis negative direction; at the same time, apply negative excitation electrical signals to the upper layer No. 3 actuation unit 1-2-3 and the upper layer No. 4 actuation unit 1-2-4 distributed along the X-axis negative direction and the Y-axis negative direction in the upper layer orthogonal beam 1-2, to excite both to generate bending deformation along the Z-axis positive direction; under the above excitation, the upper operating end 1-3 generates a positive deflection motion along the U-axis.

[0054] Step two: at the same time of implementing step one, apply negative excitation electrical signals to the lower layer No. 1 actuation unit 2-2-1 and the lower layer No. 2 actuation unit 2-2-2 distributed along the X' axis positive direction and the Y' axis positive direction in the lower layer orthogonal beam 2-2, to excite both to generate bending deformation along the Z' axis positive direction; at the same time, apply negative excitation electrical signals to the lower layer No. 3 actuation unit 2-2-3 and the lower layer No. 4 actuation unit 2-2-4 distributed along the X' axis negative direction and the Y' axis negative direction in the lower layer orthogonal beam 2-2, to excite both to generate bending deformation along the Z' axis negative direction; under the above excitation, the lower operating end 2-3 generates a negative deflection motion along the U-axis.

[0055] Under the excitation of the above step one and step two, the upper operating end 1-3 and the lower operating end 2-3 respectively generate deflection motion along the U-axis positive direction and the U-axis negative direction, since the deflection motion directions of both are perpendicular to their respective axes and not in the same plane, this action combination is regarded as a "radial twisting" action.

[0056] Special note: if the positive excitation signal and the negative excitation signal used in steps one and two in this embodiment are exchanged, the upper operating end 1-3 and the lower operating end 2-3 will respectively move in the negative U-axis direction and the positive U-axis direction, as shown in Figure 4 , i.e. Figure 3 , the reverse action of the action shown in Figure 3 , and Figure 4 The two action modes of

[0057] Embodiment eleven, referring to Figure 5 and Figure 6 , this embodiment provides a specific implementation of the axial twisting action of the bimorph piezoelectric micro-operating device with orthogonal beam bending actuation, and the detailed implementation steps are as follows:

[0058] Step one: apply a negative excitation signal to the upper layer No. 1 actuator unit 1-2-1, the upper layer No. 2 actuator unit 1-2-2, the upper layer No. 3 actuator unit 1-2-3 and the upper layer No. 4 actuator unit 1-2-4 in the upper layer orthogonal beam 1-2, to excite the four to produce bending deformation in the positive Z-axis direction; under the excitation action, the upper operating end 1-3 produces translation movement in the positive W-axis direction.

[0059] Step two: while implementing step one, apply a positive excitation signal to the lower layer No. 1 actuator unit 2-2-1, the lower layer No. 2 actuator unit 2-2-2, the lower layer No. 3 actuator unit 2-2-3 and the lower layer No. 4 actuator unit 2-2-4 in the lower layer orthogonal beam 2-2, to excite the four to produce bending deformation in the negative Z' axis direction; under the excitation action, the upper operating end 2-3 produces translation movement in the negative W-axis direction.

[0060] Under the excitation action of the above steps one and two, the upper operating end 1-3 and the lower operating end 2-3 respectively produce translation movement in the positive W-axis direction and the negative W-axis direction, and since the translation movement directions are along the axes of the two, the combination of the action is regarded as "axial twisting" action.

[0061] Special note: if the positive excitation signal and the negative excitation signal used in steps one and two in this embodiment are exchanged, the upper operating end 1-3 and the lower operating end 2-3 will respectively move in the negative W-axis direction and the positive W-axis direction, as shown in Figure 6 , i.e. Figure 5 , the reverse action of the action shown in Figure 5 , and Figure 6 The two action modes of

[0062] Embodiment twelve, referring toFigure 7 and Figure 8 The embodiment is illustrated. The embodiment provides a specific implementation of the radial clamping action of the double-ended piezoelectric micro-manipulator actuated by the bending of the orthogonal beam. The detailed implementation steps are as follows:

[0063] Step one: positive excitation signals are applied to the upper layer No. 3 actuating unit 1-2-3 and the upper layer No. 2 actuating unit 1-2-2 distributed along the X-axis negative direction and the Y-axis positive direction in the upper layer orthogonal beam 1-2, to excite the two to produce the bending deformation along the Z-axis negative direction; at the same time, negative excitation signals are applied to the upper layer No. 1 actuating unit 1-2-1 and the upper layer No. 4 actuating unit 1-2-4 distributed along the X-axis positive direction and the Y-axis negative direction in the upper layer orthogonal beam 1-2, to excite the two to produce the bending deformation along the Z-axis positive direction; under the above excitation, the upper layer operation end 1-3 produces the yaw motion along the V-axis positive direction.

[0064] Step two: at the same time of implementing step one, negative excitation signals are applied to the lower layer No. 3 actuating unit 2-2-3 and the lower layer No. 2 actuating unit 2-2-2 distributed along the X' axis negative direction and the Y' axis positive direction in the lower layer orthogonal beam 2-2, to excite the two to produce the bending deformation along the Z' axis positive direction; at the same time, positive excitation signals are applied to the lower layer No. 1 actuating unit 2-2-1 and the lower layer No. 4 actuating unit 2-2-4 distributed along the X' axis positive direction and the Y' axis negative direction in the lower layer orthogonal beam 2-2, to excite the two to produce the bending deformation along the Z' axis negative direction; under the above excitation, the lower layer operation end 2-3 produces the yaw motion along the V-axis negative direction.

[0065] Under the excitation of the above step one and step two, the upper layer operation end 1-3 and the lower layer operation end 2-3 yaw along the V-axis positive direction and the V-axis negative direction respectively, and since the yaw motion directions of the two are perpendicular to the respective axes and are in the same plane, the action combination mode can be regarded as the "radial clamping" action.

[0066] Special note: if the positive excitation signals and the negative excitation signals used in step one and step two in the embodiment are exchanged, the upper layer operation end 1-3 and the lower layer operation end 2-3 will yaw along the V-axis negative direction and the V-axis positive direction respectively, as shown in Figure 8 , that is, Figure 7 the opposite action of the action shown in Figure 7 . Therefore, Figure 8 the two action modes of

[0067] While the preferred embodiments of the application have been described, additional variations and modifications can be made to these embodiments by those skilled in the art once they have the benefit of the present disclosure without departing from the spirit and scope of the application. Accordingly, it is intended that such additions and modifications be included within the scope of the appended claims and the equivalents thereof.

[0068] Obviously, numerous modifications and variations of the present application are possible in light of the above teachings. It is therefore to be understood that within the scope of the appended claims and their equivalents, the application can be practiced otherwise than as specifically described.

Claims

1. A method of actuation of a double-ended piezoelectric microactuator with orthogonally bended beams, characterized in that, The double-end piezoelectric micro-manipulator comprises an upper layer movement module (1) and a lower layer movement module (2); the upper layer movement module (1) comprises an upper layer base (1-1), an upper layer orthogonal beam (1-2) and an upper layer operation end (1-3); the lower layer movement module (2) comprises a lower layer base (2-1), a lower layer orthogonal beam (2-2) and a lower layer operation end (2-3); the upper layer operation end (1-3) is fixedly connected with the center position of the upper layer orthogonal beam (1-2), and the upper layer orthogonal beam (1-2) is fixedly connected with the inner side of the upper layer base (1-1); the lower layer operation end (2-3) is fixedly connected with the center position of the lower layer orthogonal beam (2-2), and the lower layer orthogonal beam (2-2) is fixedly connected with the inner side of the lower layer base (2-1); the upper layer base (1-1) is fixedly connected with the lower layer base (2-1); the upper layer orthogonal beam (1-2) is a cross structure, comprising an upper layer No. 1 actuating unit (1-2-1), an upper layer No. 2 actuating unit (1-2-2), an upper layer No. 3 actuating unit (1-2-3) and an upper layer No. 4 actuating unit (1-2-4); the structure of each actuating unit is the same, is in a symmetrical relationship with the center position of the upper layer orthogonal beam (1-2) and is arranged on the inner side of the upper layer base (1-1); the upper layer No. 1 actuating unit (1-2-1) is connected with the upper layer No. 3 actuating unit (1-2-3), and the upper layer No. 2 actuating unit (1-2-2) is connected with the upper layer No. 4 actuating unit (1-2-4); the upper layer orthogonal beam (1-2) and the lower layer orthogonal beam (2-2) are the same in structure; the method comprises: two actuating units of the upper layer orthogonal beam (1-2) in the horizontal direction produce reverse bending deformation in the horizontal direction under the excitation of an electric signal, push the upper layer operation end (1-3) to produce radial swing in the horizontal direction; two actuating units of the upper layer orthogonal beam (1-2) in the vertical direction produce reverse bending deformation in the vertical direction under the excitation of an electric signal, push the upper layer operation end (1-3) to produce radial swing in the vertical direction; four actuating units of the upper layer orthogonal beam (1-2) simultaneously produce same-direction bending deformation along the normal line direction of the distribution plane, push the upper layer operation end (1-3) to produce axial translation along the direction of the axis of the upper layer operation end (1-3); similarly, the lower layer operation end (2-3) produces radial swing in the horizontal direction, radial swing in the vertical direction and axial translation; the radial swing and axial translation of the upper layer operation end (1-3) and the lower layer operation end (2-3) are combined in cross movement to produce three action modes of tangential twisting, axial twisting and radial clamping.

2. The method of claim 1, wherein the piezoelectric bimorph microactuator is a double-ended piezoelectric bimorph microactuator with orthogonal beam bending actuation. The lower layer orthogonal beam (2-2) is a cross structure, comprising a lower layer No.1 actuating unit (2-2-1), a lower layer No.2 actuating unit (2-2-2), a lower layer No.3 actuating unit (2-2-3) and a lower layer No.4 actuating unit (2-2-4); the structure of each actuating unit is the same, symmetrically arranged about the center position of the lower layer orthogonal beam (2-2) and arranged inside the lower layer base (2-1); the lower layer No.1 actuating unit (2-2-1) and the lower layer No.3 actuating unit (2-2-3) are connected, and the lower layer No.2 actuating unit (2-2-2) and the lower layer No.4 actuating unit (2-2-4) are connected.

3. The method for actuating a dual-end piezoelectric micromanipulator actuated by orthogonal beam bending according to claim 2, characterized in that, The upper layer No.1 actuating unit (1-2-1), the upper layer No.2 actuating unit (1-2-2), the upper layer No.3 actuating unit (1-2-3) and the upper layer No.4 actuating unit (1-2-4) are all composite structures of piezoelectric elements and metal elastic parts; the lower layer No.1 actuating unit (2-2-1), the lower layer No.2 actuating unit (2-2-2), the lower layer No.3 actuating unit (2-2-3) and the lower layer No.4 actuating unit (2-2-4) are all composite structures of piezoelectric elements and metal elastic parts.

4. The method for actuating a dual-end piezoelectric micromanipulator actuated by orthogonal beam bending according to claim 1 is characterized in that, The upper layer orthogonal beam (1-2) and the lower layer orthogonal beam (2-2) are arranged in a staggered parallel relationship in space, and the center positions of the upper layer orthogonal beam (1-2) and the lower layer orthogonal beam (2-2) are offset by a certain distance in the horizontal and vertical directions; the upper layer operation end (1-3) fixed at the center position of the upper layer orthogonal beam (1-2) and the lower layer operation end (2-3) fixed at the center position of the lower layer orthogonal beam (2-2) are arranged in a parallel relationship.

5. The method of claim 1, wherein the piezoelectric bimorph microactuator is a double-ended piezoelectric bimorph microactuator with orthogonal beam bending actuation. The upper layer operation end (1-3) is composed of a bullet head structure and a cylindrical structure; the lower layer operation end (2-3) is composed of a bullet head structure and a cylindrical structure.

6. The method of claim 1, wherein the piezoelectric bimorph microactuator is a double-ended piezoelectric bimorph microactuator with orthogonal beam bending actuation. The upper layer base (1-1) and the lower layer base (2-1) are rectangular boxes.

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