An array type electrofluid printing device

Abstract

The present invention provides an array-type electrofluidic printing device, which belongs to the field of additive precision manufacturing technology. The array-type electrofluidic printing device includes a nozzle plate, a flow channel plate, a push shell, and a push plate. The nozzle plate is made of a conductive material, connected to a high-voltage power supply, and is provided with a through-type nozzle. The inner diameter of the nozzle is much smaller than the outer size of the nozzle plate, and the distance from the nozzle to the outer boundary of the nozzle plate is more than twice the distance between adjacent nozzles. The flow channel plate is connected to the nozzle plate and is provided with an integrally connected main channel and an array-arranged liquid storage chamber. The push shell is provided with a through hole, the upper opening forms a cavity inside, and the push plate is arranged in the push shell cavity. In addition, the flow channel plate can also be made of a conductive material and connected to a high-voltage power supply. In this case, the voltage peak on the nozzle plate is more than 500V higher than the voltage peak of the flow channel plate. The present invention controls from both the electric field and the flow field, ensuring the consistency of each unit process while solving the electromagnetic crosstalk problem of array-type electrofluid printing.

Description

Technical Field

[0001] The present invention belongs to the technical field of additive precision manufacturing, and in particular relates to an array-type electrofluidic printing device. Background Art

[0002] Electrohydrodynamic jet printing is a high-resolution printing technology that uses electric forces to propel liquid from a needle. By applying a voltage between the needle and the substrate, an electric field is created, which acts on the droplets, overcoming the resistance of the needle's inner bore and ejecting them. It can produce droplets or jets significantly smaller than the needle's size. At a certain voltage, the tangential stress on the liquid surface and the electrostatic attraction to the substrate cause the hemispherical meniscus at the needle tip to deform into a conical meniscus, known as the Taylor cone. This marks the boundary between stability and instability. When the voltage exceeds this threshold, the electrostatic force overcomes the surface tension, causing a jet to be ejected from the Taylor cone. Within different process parameter ranges, different jet patterns can be achieved, including dripping, droplet, spindle, and cone jet patterns.

[0003] Array structures are common in MEMS manufacturing devices, such as arrayed PMUTs (micromachined ultrasonic transducers). These devices require very high manufacturing consistency for each individual PMUT tube in the array. Differences in the manufacturing of each individual tube can make it difficult for the entire array to achieve a resonant state simultaneously, affecting the performance of the entire device. If electrohydrodynamic printing technology is used to manufacture the PZT piezoelectric film in a PMUT, the conventional method is to use an electrohydrodynamic printing system with a needle to deposit each tube one by one according to the array position. This method is relatively inefficient, and each tube may not be processed simultaneously, and structural differences may also occur due to external conditions.

[0004] In the existing technology, the more conventional idea is to arrange multiple nozzles in an array for array printing. However, for electrofluidic printing technology, adjacent nozzles and the jets they eject will produce electromagnetic crosstalk with each other. There is a lateral electric field force component around the protruding nozzle, which may cause the droplets to deviate laterally and affect the accuracy of the printing. In addition, due to the array arrangement, the flow channel structure from the liquid supply module to each nozzle unit is different, and the resistance loss along the flow channel of each unit is also different. It is difficult to ensure the consistency of the flow rate supplied to each nozzle unit. The consistency of both the electric field and the flow field affects the consistency of the printing structure.

[0005] The invention patent with application number 202011163873.6 discloses an independently controllable arrayed electro-fluid printing head that suppresses electric field crosstalk. The head is provided with a nozzle plate made of insulating material, and a protruding annular control electrode and an annular shielding electrode are arranged below the nozzle plate. An annular electrostatic lens is also arranged below. The crosstalk suppression electrode system composed of the shielding electrode and the electrostatic lens suppresses the electric field crosstalk between the nozzles. However, the electric field generated by the superposition of the elements is complex, and the electrical boundary conditions of each unit are still not completely consistent. A binary tree-forked flow channel design is provided, which can only ensure that a single row of arrays can be printed simultaneously. The invention patent with application number 201410289239.5 discloses an arrayed electro-fluid printing head with independently controllable nozzle ejection, which is provided with an arrayed nozzle and a guide electrode layer. By adjusting the voltage value on each conductive ring on the guide electrode layer, independent control of each nozzle is achieved. Summary of the Invention

[0006] In order to solve the technical problem of poor preparation consistency of each unit of the electrohydrodynamic printing array in the prior art, the present invention provides an array electrohydrodynamic printing device, which controls both the electric field and the flow field to ensure the consistency of the process of each unit and solve the electromagnetic crosstalk problem of array electrohydrodynamic printing.

[0007] In order to achieve the above object, the technical solution adopted by the present invention is as follows:

[0008] An array type electrofluidic printing device includes a nozzle plate 1, a flow channel plate 2, a pushing shell 3, and a pushing plate 4.

[0009] Option 1: The nozzle plate 1 is made of a conductive material, connected to a high-voltage power supply, and is longitudinally provided with an array of through-type nozzles 11. The printing liquid is sprayed from the nozzles 11. The inner diameter of the nozzle 11 is much smaller than the outer dimensions of the nozzle plate 1. The distance from the nozzle 11 to the outer boundary of the nozzle plate 1 is more than twice the distance between adjacent holes of the nozzles 11. The lower end of the flow channel plate 2 is connected to the orifice plate 1, and is provided with a main channel 22 that is connected as a whole and a liquid storage chamber 21 arranged in an array. The liquid storage chamber 21 is coaxially arranged one by one with the orifice 11. Each of the liquid storage chambers 21 is connected to the main channel 22, and a transition channel 25 is provided between them. A one-way valve 6 is provided in the transition channel 25, so that the liquid can only flow from the main channel 22 to the liquid storage chamber 21 in one direction; the main channel 22 is provided with a liquid supply end 24, which is connected to an external liquid supply source; a piston 7 is provided in each of the liquid storage chambers 21, and a piston stop 23 is provided on the top to limit the upper limit position of the piston 7, and the piston 7 is used to push out the liquid in the liquid storage chamber 21. The push housing 3 is also provided with an array of through-holes, each smaller than the size of the liquid storage chamber 21. The upper opening of the push housing 3 forms a cavity within which the push plate 4 is disposed. The pistons 7 pass through the through-holes of the push housing 3 and are fixedly connected to the push plate 4. The substrate 200 to be printed is grounded and located below the nozzle plate 1.

[0010] Preferably, in solution 1: the nozzle plate 1 applies a pulsed alternating voltage to provide the voltage required for the electrospray printing process.

[0011] Option 2: The flow channel plate 2 is made of a conductive material and connected to a high-voltage power supply to provide the voltage required for the electrospray printing process. An insulating partition 8 is provided between the nozzle plate 1 and the flow channel plate 2. The nozzle plate 1 is made of a conductive material and connected to a high-voltage power supply. It is longitudinally arranged with an array of through-type nozzle holes 11. The printing liquid is ejected from these nozzle holes 11. The inner diameter of each nozzle hole 11 is much smaller than the outer dimensions of the nozzle plate 1. The distance between each nozzle hole 11 and the outer edge of the nozzle plate 1 is greater than twice the spacing between adjacent nozzle holes 11. The lower end of the flow channel plate 2 is connected to the orifice plate 1, and is provided with a main channel 22 that is connected as a whole and a liquid storage chamber 21 arranged in an array. The liquid storage chamber 21 is coaxially arranged one by one with the orifice 11. Each of the liquid storage chambers 21 is connected to the main channel 22, and a transition channel 25 is provided between them. A one-way valve 6 is provided in the transition channel 25, so that the liquid can only flow from the main channel 22 to the liquid storage chamber 21 in one direction; the main channel 22 is provided with a liquid supply end 24, which is connected to an external liquid supply source; a piston 7 is provided in each of the liquid storage chambers 21, and a piston stop 23 is provided on the top to limit the upper limit position of the piston 7, and the piston 7 is used to push out the liquid in the liquid storage chamber 21. The push housing 3 is also provided with an array of through-holes, each smaller than the size of the liquid storage chamber 21. The upper opening of the push housing 3 forms a cavity within which the push plate 4 is disposed. The pistons 7 pass through the through-holes of the push housing 3 and are fixedly connected to the push plate 4. The substrate 200 to be printed is grounded and located below the nozzle plate 1.

[0012] Preferably, in Option 2: the flow channel plate 2 applies a pulsed alternating voltage to provide the voltage required for the electrospray printing process, and the nozzle plate 1 applies a pulsed alternating voltage or a DC constant voltage to reduce the impact of droplet lateral deviation, and the voltage peak on the nozzle plate 1 is more than 500V higher than the voltage peak on the flow channel plate 2.

[0013] Preferably, in scheme 2: a spray needle 81 made of a conductive material is provided in each of the spray holes 11, and the front section (the end close to the printing substrate 200) of the needle tube of the spray needle 81 is sleeved with an insulating needle sleeve 12, which is inserted into the spray hole 11 together with the insulating needle sleeve 12, and the bottom end surface of the spray needle 81 is flush with the bottom end surface of the spray hole plate 11; the spray needle 81 is connected to the liquid storage chamber 21, and the rear section is connected to the flow channel plate 2, and the printing liquid is sprayed out from the spray needle 81.

[0014] Preferably, in the two schemes: the outer contour of the side of the one-way valve 6 facing the liquid storage chamber 21 is the same as the shape of the inner wall of the liquid storage chamber 21, and three sections of stepped flow channels are provided inside. The middle section is a cylindrical hole-type flow channel chamber containing a conical surface. A valve ball 61 is provided in the chamber, and a valve body ring 63 and a spring 62 are provided on the end face of the one side close to the liquid storage chamber 21. The spring 62 can press the valve ball 61 so that the liquid can only flow from the main channel 22 into the liquid storage chamber 21 in one direction.

[0015] Preferably, in both solutions, the main channel 22 is distributed in a rectangular shape on the periphery and cross-distributed vertically and horizontally on the inside, and each liquid storage chamber 21 is surrounded in the center of the main channel 22 distributed vertically and horizontally.

[0016] Preferably, in the two schemes: the top cover 5 is connected to the top of the pushing shell 3, and the top cover 5 is provided with a through air hole 51; the pushing plate 4 is pushed by air pressure or mechanically through the air hole 51. Specifically, the pushing plate 4 is connected to an air pump through the air hole 51 to realize air pressure pushing, or the pushing plate 4 is connected to a linear motor to realize mechanical pushing.

[0017] Beneficial effects of the present invention:

[0018] (1) In terms of ensuring the consistency of the electric field, the present invention is characterized by the following aspects: the size of the nozzle plate 1 made of conductive material is much larger than the inner diameter of the nozzle 11, so that a strong vertical downward electric field is formed at all locations between the nozzle plate 1 and the substrate to be printed, which is similar to the uniform parallel electric field distribution of a parallel plate. The electric field distribution at all locations is highly consistent, solving the problems of the existing technology such as the chaotic electric field around the nozzle needle and inconsistent electric boundary conditions. The electric field near the nozzle can provide the electric field force required for the electrofluidic process. Moreover, when the charged droplets are laterally deviated due to electromagnetic crosstalk or satellite droplets are present, they will also be subjected to the vertical downward electric field force at the laterally deviated position, ensuring that the droplets are sprayed vertically below the nozzle, thereby improving the printing accuracy and consistency.

[0019] (2) The present invention ensures flow field consistency: the design of the main channel 22 on the flow channel plate 2 is no longer limited to the consistency of the flow channel structure arrangement from the liquid supply source to each unit. It is only necessary to ensure that the main channel 22 is connected to the liquid storage chambers 21. When the liquid is poured, the liquid storage volume of each unit can be guaranteed to be consistent. When printing, due to the presence of the one-way valve 6, the liquid cannot flow from the liquid storage chamber 21 into the main channel 22. During the printing process, each unit forms a printing chamber with the same structure but independent of each other, ensuring the consistency of the printing flow rate and enabling simultaneous printing of multiple rows of arrays. In the structural design of the flow channel, it is also not necessary to ensure the consistency of the flow channel structure from the liquid supply source to each unit. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1is a cross-sectional view of the internal structure of the array-type electrofluidic printing device in Example 1;

[0021] Figure 2 is a cross-sectional view of the internal structure of the array-type electrofluidic printing device in Example 2;

[0022] Figure 3 Schematic diagram of flow channel distribution of the liquid storage isolation plate in the embodiment;

[0023] Figure 4 Schematic diagram of the structure of the one-way valve 6 in the embodiment;

[0024] In the figure: 1 orifice plate, 2 flow channel plate, 3 push housing, 4 push plate, 5 top cover, 6 one-way valve, 7 piston, 8 insulating partition;

[0025] 11 spray hole, 12 insulating needle sleeve, 21 liquid storage chamber, 22 main channel, 23 piston stop, 24 liquid supply end, 25 transition flow channel, 31 sealing ring, 51 air hole, 61 valve ball, 62 spring, 63 valve body ring, 81 spray needle, 200 substrate. DETAILED DESCRIPTION

[0026] To make the objectives, technical solutions, and advantages of the embodiments of the present application more clear, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Generally, the components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0027] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for protection, but merely represents selected embodiments of the present application. All other embodiments obtained by persons of ordinary skill in the art based on the embodiments in the present application without creative work are within the scope of protection of the present application.

[0028] In the description of this application, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, or are the orientation or position relationship in which the product of the application is usually placed when in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they should not be understood as a limitation on this application.

[0029] It should also be noted that, in the description of this application, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0030] Example 1

[0031] The present invention provides an array-type electro-fluidic printing device comprising a nozzle plate 1, a flow channel plate 2, a push housing 3, a push plate 4, and a top cover 5. The nozzle plate 1 is made of stainless steel and has dimensions of 100 mm x 100 mm x 3 mm. It is connected to a high-voltage power supply and is equipped with through-holes 11 arranged in a 4 x 4 square array. The nozzle holes have an inner diameter of 0.1 mm and a spacing of 10 mm between adjacent holes. The printing liquid is ejected from these nozzle holes 11. The substrate 200 to be printed is grounded.

[0032] The lower end of the flow plate 2 is connected to the upper end of the orifice plate 1. The flow plate 2 is a square plate with dimensions of 100 mm × 100 mm × 20 mm. It features an interconnected main flow channel 22 and an array of liquid storage chambers 21. The liquid storage chambers 21 are cylindrical holes with a diameter of 5 mm and are arranged coaxially with the orifices 11. The main flow channel 22 is arranged in a rectangular pattern on the periphery and crosswise within it. The spacing between adjacent flow channels is the same as the spacing between the liquid storage chambers 21, so that each liquid storage chamber 21 is surrounded by the central arrangement of the main flow channel 22 and is connected to the main flow channel 22. Each liquid storage chamber 21 is connected to the main flow channel 22 by a transition channel 25. Each transition channel 25 is equipped with a one-way valve 6, which restricts liquid flow from the main flow channel 22 to the liquid storage chamber 21 in one direction. The main flow channel 22 has a liquid supply port 24 connected to an external liquid supply source. The external liquid supply source is a liquid storage syringe driven by air pressure. A piston 7 is provided in each liquid storage chamber 21, and a piston stop 23 is provided on the top to limit the upper limit position of the piston 7. The piston 7 is used to push out the liquid in the liquid storage chamber 21.

[0033] The push housing 3 has dimensions of 100mm × 100mm × 30mm, is open at the top, and forms a square cavity within. The push plate 4 is positioned within this cavity and is connected to the push housing 3 in a piston-like sliding manner to ensure airtightness. The push housing 3 is also provided with a corresponding array of through-holes, each with a diameter of 3mm. The piston 7 passes through these through-holes and is fixedly connected to the push plate 4. The top cover 5 is connected to the top of the push housing and is provided with air holes 51. A sealing ring 31 is provided between the flow channel plate 2 and the push housing 3.

[0034] In this embodiment, the main channel 22 has a rectangular cross-section, while the transition channel 25 has a cylindrical hole shape with a cross-sectional diameter of 4 mm. The one-way valve 6 has a contour on the side facing the liquid storage chamber 21 that is the same shape as the inner wall of the liquid storage chamber 21, forming the intersection of the two cylindrical hole cross-sections of the transition channel 25 and the liquid storage chamber 21, to ensure a smooth transition and reduce resistance. The layer facing the main channel 22 is flat, and the outer side is cylindrical. The interior comprises three stepped flow passages, the front and rear sections of which are cylindrical holes, and the middle section is a cylindrical hole-shaped flow passage chamber with a tapered surface. A valve ball 61 is housed within the chamber. A valve ring 63 and a spring 62 are provided on the end face of the valve ball 61, which is located near the liquid storage chamber 21. The spring 62 compresses the valve ball 61, preventing liquid from flowing from the main channel 22 into the liquid storage chamber 21 in a single direction.

[0035] In this embodiment, a pulsed alternating printing voltage with a frequency of 50 Hz, a duty cycle of 50%, and a voltage peak of 2000 V is applied to the flow channel plate 2 as the printing voltage.

[0036] In this embodiment, the push plate 4 is connected to an air pump through the air hole 51 to achieve air pressure pushing.

[0037] Workflow:

[0038] The air pressure pushes the liquid storage syringe, which serves as an external liquid supply source, and the liquid to be printed flows into the main channel 22 through the liquid supply end 24, and then flows into each liquid storage chamber 21 through the transition channel 25 and the one-way valve 6. As the liquid is continuously poured into the liquid storage cavity 21, the piston 7 is pushed up to touch the piston stop 23, and the liquid is filled. When the liquid in all the liquid storage cavities 21 is filled, the liquid supply is stopped, thus achieving a consistent amount of liquid in the liquid storage cavity 21; the pistons 7 are pushed to move synchronously by the push plate 4, so that the printing supply flow of each unit is always consistent.

[0039] The nozzle plate 1 is connected to a high-voltage power supply to provide the high voltage required for the electro-hydraulic printing process. The substrate 200 to be printed is grounded to form an electric field. Then, the device and the substrate 200 are moved relative to each other along a set trajectory to achieve the printing of the arrayed pattern structure.

[0040] Example 2

[0041] This embodiment provides an array-type electrofluidic printing device, comprising a nozzle plate 1, a flow channel plate 2, a push housing 3, and a push plate 4. The nozzle plate is a square plate with dimensions of 100 mm × 100 mm × 0.3 mm, which can be relatively thin. The nozzle orifice diameter is 0.4 mm. The remaining structure is the same as in Example 1.

[0042] An insulating partition 8 with a thickness of 10 mm is provided between the nozzle plate 1 and the flow channel plate 2, and corresponding through holes are also provided on the insulating partition 8; the flow channel plate 2 is made of conductive material and is connected to a high-voltage power supply to carry an electric charge to the printed liquid particles and provide the voltage required for the nozzle printing. A spray needle 81 is provided in each spray hole 11. The spray needle is a stainless steel Luer spray needle with an inner diameter of 0.1 mm and an outer diameter of 0.2 mm. The front needle tube portion of the spray needle 81 is sleeved with an insulating needle sleeve 12 and inserted into the spray hole 11 together with the insulating needle sleeve 12. The insulating needle sleeve is cylindrical with an inner diameter of 0.22 mm and an outer diameter of 0.38 mm. The bottom end surface of the front needle tube portion of the spray needle 81 is flush with the bottom end surface of the spray hole plate 11; the spray needle 81 is connected to the liquid storage chamber 21, and the rear portion is connected to the flow channel plate 2, which can be a threaded connection, an interference fit connection or a smaller clearance fit connection (threaded connection is selected in this embodiment); the spray needle 81 passes through the through hole on the insulating partition 8, and the printing liquid is sprayed out from the spray needle 81.

[0043] The arrangement of the remaining flow channel plate 2, the pushing housing 3, the pushing plate 4, and the top cover 5 can be the same as that of embodiment 1. The working process is the same as that of embodiment 1.

[0044] The difference between this embodiment and embodiment 1 is that the nozzle plate 1 and the flow channel plate 2 can be connected to different voltage sources and apply different electrical parameters. For example, a pulsed alternating printing voltage with a voltage peak of 2000V is applied to the flow channel plate 2 as the printing voltage; a pulsed alternating printing voltage with the same waveform, frequency, and duty cycle is applied between the nozzle plate 1 and the substrate 200, with a voltage peak of 3000V; a constant DC voltage with a voltage peak of 3000V can also be applied between the nozzle plate 1 and the substrate 200; a vertically downward, approximately parallel uniform electric field is formed between the nozzle plate 1 and the substrate 200, and the electric field force is also relatively large, which is used to reduce the impact of electromagnetic crosstalk and correct the direction of side-deviation droplets. In addition, this embodiment can also use a universal standardized nozzle needle to improve the printing quality.

[0045] The above-described embodiments merely express the implementation methods of the present invention, but should not be understood as limiting the scope of the patent of the present invention. It should be pointed out that for those skilled in the art, several variations and improvements can be made without departing from the concept of the present invention, and these all fall within the scope of protection of the present invention.

Claims

1. An array type electrofluidic printing device, characterized in that: The array type electrofluid printing device comprises a nozzle plate (1), a flow channel plate (2), a pushing shell (3), and a pushing plate (4); The nozzle plate (1) is made of a conductive material, is connected to a high-voltage power supply, and is provided with through-type nozzles (11) arranged in an array, and the printing liquid is sprayed from the nozzles (11); the substrate (200) to be printed is grounded; The lower end of the flow channel plate (2) is connected to the orifice plate (1), and is provided with a main flow channel (22) and arrayed liquid storage chambers (21) that are connected as a whole. The liquid storage chambers (21) are coaxially arranged in a one-to-one correspondence with the orifices (11); each of the liquid storage chambers (21) is connected to the main flow channel (22), and a transition flow channel (25) is provided between them; a one-way valve (6) is provided in each of the transition flow channels (25), and liquid flows from the main flow channel (22) to the liquid storage chamber (21) in one direction; the main flow channel (22) is provided with a liquid supply end (24) connected to an external liquid supply source; each of the liquid storage chambers (21) is provided with a piston (7) for pushing out the liquid in the liquid storage chamber (21); The pushing shell (3) is also provided with through holes arranged in an array, the size of the through holes being smaller than the size of the liquid storage chamber (21), and a cavity is formed inside the upper opening of the pushing shell (3), and the pushing plate (4) is arranged in the cavity of the pushing shell (3); the piston (7) passes through the through holes of the pushing shell (3) and is fixedly connected to the pushing plate (4); The flow channel plate (2) is made of a conductive material and is connected to a high-voltage power supply; an insulating partition (8) is provided between the orifice plate (1) and the flow channel plate (2); a pulse alternating voltage is applied to the flow channel plate (2), and a pulse alternating voltage or a DC constant voltage is applied to the orifice plate (1) to reduce the influence of lateral deflection of the droplets; The voltage peak value on the nozzle plate (1) is higher than the voltage peak value of the flow channel plate (2) by more than 500V.

2. The array-type electrofluidic printing device according to claim 1, characterized in that: The nozzle plate (1) applies a pulse alternating voltage.

3. The array-type electrofluidic printing device according to claim 1, characterized in that: A spray needle (81) made of a conductive material is provided in each spray hole (11). The front needle tube portion of the spray needle (81) is sleeved with an insulating needle sleeve (12), and the bottom portion is flush with the bottom end surface of the spray hole plate (1); the spray needle (81) is connected to the liquid storage chamber (21), and the rear portion is connected to the flow channel plate (2).

4. The array-type electrofluidic printing device according to claim 1, characterized in that: The inner diameter of the spray hole (11) is smaller than the outer dimensions of the spray hole plate (1); and the distance between the spray hole (11) and the outer boundary of the spray hole plate (1) is greater than or equal to twice the spacing between adjacent holes of each spray hole (11).

5. The array-type electrofluidic printing device according to claim 1, characterized in that: A piston stop (23) is provided at the top of each liquid storage chamber (21) for limiting the upper limit position of the piston (7).

6. The array-type electrofluidic printing device according to claim 1, characterized in that: The one-way valve (6) has an outer contour on the side facing the liquid storage chamber (21) that is the same as the inner wall shape of the liquid storage chamber (21), and is provided with three sections of stepped flow channels inside. The middle section is a cylindrical hole-type flow channel chamber including a conical surface, and a valve ball (61) is arranged in the chamber. A valve body ring (63) and a spring (62) are provided on the end face of the one-way valve (6) on the side close to the liquid storage chamber (21). The spring (62) can press the valve ball (61) so that the liquid can only flow in one direction.

7. The array-type electrofluidic printing device according to claim 1, characterized in that: The main channel (22) is distributed in a rectangular shape on the periphery and cross-distributed in vertical and horizontal directions on the inside. Each of the liquid storage chambers (21) is surrounded by the center of the main channel (22) distributed in vertical and horizontal directions.

8. The array-type electrofluidic printing device according to claim 1, characterized in that: The top of the pushing shell (3) is connected to a top cover (5), and a through air hole (51) is provided on the top cover (5); the pushing plate (4) is pushed by air pressure or mechanically through the air hole (51).

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