A molecular pump testing device and a testing method

Abstract

The present invention provides a molecular pump inspection device and an inspection method, which belong to the technical field of maintenance. A molecular pump inspection device includes: a detection terminal, a detection device and a test structure; wherein there are a plurality of detection devices, each of which detects a molecular pump, and each detection device drives the molecular pump to rotate through a rotating structure, thereby realizing the change of the molecular pump in different states. In this solution, the molecular pump is fixed on the rotating structure, and the molecular pump can realize the switching of multiple states of the molecular pump by one fixation, thereby increasing the detection efficiency, and by increasing the number of detection devices, the detection efficiency is further improved. At the same time, the molecular pump is connected to the detection terminal, and the parameters of the molecular pump are detected at all times through the detection terminal, which has the advantages of one-button start and simple operation.

Description

Technical Field

[0001] The present invention relates to the technical field of maintenance, and in particular to a molecular pump inspection device and an inspection method. Background Art

[0002] Molecular pump is a commonly used vacuum obtaining equipment. It has a chamber formed inside and a high-speed motor installed in the chamber. When working, the high-speed rotating rotor compresses the gas molecules in the chamber and makes them obtain a directional speed and be discharged to the exhaust port. In recent years, molecular pumps have been used in large quantities in the industrial field.

[0003] In the prior art, the inspection of molecular pump finished products requires at least three operating state inspections, which means that three manual clamping is required to realize the finished product inspection of forward rotation, lateral rotation and reverse rotation. At the same time, the finished product inspection results currently require manual filling of forms to realize the recording of the entire inspection results. In order to reduce labor costs and improve the inspection level of molecular pumps, it is necessary to design a fully automatic finished product inspection platform. The entire process only requires one clamping, which can efficiently realize the fully automatic finished product inspection of the three processes of forward rotation, lateral rotation and reverse rotation of molecular pumps. After the test is completed, the relevant inspection forms can be automatically printed, and the platform can simultaneously meet the independent operation of 4 stations, saving labor costs while improving the intelligence and reliability of finished product inspection. Summary of the invention

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the defect of the complicated detection process in the prior art, thereby providing a molecular pump testing device and a testing method.

[0005] In order to solve the above problems, the present invention provides a molecular pump testing device, comprising:

[0006] A detection terminal, adapted to be electrically connected to the molecular pump; the detection terminal is adapted to constantly detect parameters of the molecular pump when it is working;

[0007] A detection device having a plurality of parts; a mounting position suitable for accommodating a molecular pump is arranged on the detection device; the detection device is suitable for driving the molecular pump to rotate; the detection device comprises a detection body and a rotating structure; the rotating structure is arranged between the molecular pump and the detection body; the rotating structure drives the molecular pump to rotate; the molecular pump has at least two states during the rotation process; when the molecular pump is in different states, the angle between the molecular pump and the vertical line is different;

[0008] A test structure is connected to the molecular pump; the test structure is suitable for performing a vacuum operation inside the molecular pump; and the test structure rotates synchronously with the rotation of the molecular pump.

[0009] As a preferred solution, the detection device further includes:

[0010] A fixed structure is fixedly connected to the rotating structure; a mounting position suitable for accommodating a molecular pump is arranged on the fixed structure; the fixed structure comprises a fixed base plate and a clamping block; the fixed base plate is "L" shaped; the short side reaching the fixed base plate is suitable for fixed connection with the rotating structure; there are two clamping blocks; both clamping blocks are arranged on the long sides of the fixed base plate; the two clamping blocks and the fixed base plate form the mounting position.

[0011] As a preferred solution, the detection device further includes:

[0012] The driving structure is arranged on one side of the rotating structure; the driving structure is suitable for driving the rotating structure to rotate.

[0013] As a preferred solution, the detection device further includes:

[0014] The clamping structure has one end fixedly connected to the detection body and the other end suitable for being sleeved on the outer surface of the molecular pump.

[0015] As a preferred solution, the test structure includes:

[0016] A straight cylinder connected to the molecular pump via a flange;

[0017] A vacuum gauge, adapted to be connected to the straight cylinder, and adapted to detect the vacuum degree of the molecular pump;

[0018] A mechanical pump is suitable for being connected to the straight cylinder, and the mechanical pump is suitable for evacuating the molecular pump.

[0019] As a preferred solution, the test structure further includes:

[0020] The electromagnetic purge valve is connected to the molecular pump through the straight cylinder; the electromagnetic purge valve is suitable for increasing the load on the molecular pump.

[0021] As a preferred solution, the test structure further includes:

[0022] The adapter is arranged between the electromagnetic purge valve and the straight cylinder.

[0023] As a preferred solution, the electromagnetic purge valve and the adapter are connected via a clamp.

[0024] In order to solve the above problems, the present invention provides a molecular pump inspection method, comprising any one of the molecular pump inspection devices described above, and further comprising the steps of:

[0025] S1, preparation stage: start the detection terminal and input the relevant information of the molecular pump; set the molecular pump at the installation position;

[0026] S2, startup stage; the molecular pump is driven to rotate by the rotating structure, so that the molecular pump is in a certain state; then the molecular pump in this state is evacuated by the test structure until the vacuum degree in the molecular pump reaches the inspection standard value;

[0027] S3, detection stage: detecting the working state of the molecular pump through the detection terminal and recording the parameters of the molecular pump when it is working;

[0028] S4, state change stage: after the test device is closed for a certain period of time, the molecular pump is driven to rotate by the rotating structure, so that the molecular pump is in another state;

[0029] S5, evacuate the molecular pump in this state through the test structure until the vacuum degree in the molecular pump reaches the inspection standard value; at the same time, detect the working state of the molecular pump through the detection terminal and record the parameters of the molecular pump when it is working; repeat steps S4 and S5, and proceed to the next step when the molecular pump completes all state detections;

[0030] S6. End.

[0031] As a preferred embodiment, the molecular pump includes a first state, a second state and a third state during its rotation process; when the molecular pump is in the first state, the angle between the molecular pump and the vertical line is 0°; when the molecular pump is in the second state, the angle between the molecular pump and the vertical line is 90°; when the molecular pump is in the third state, the angle between the molecular pump and the vertical line is 180°.

[0032] The technical solution of the present invention has the following advantages:

[0033] 1. A molecular pump inspection device provided by the present invention comprises: a detection terminal, a detection device and a test structure; wherein there are a plurality of detection devices, each of which detects a molecular pump, and each detection device drives the molecular pump to rotate through a rotating structure, thereby realizing the change of the molecular pump in different states. In this scheme, the molecular pump is fixed on the rotating structure, and the molecular pump can realize the switching of multiple states of the molecular pump by one fixation, thereby increasing the detection efficiency, and by increasing the number of detection devices, the detection efficiency is further improved. At the same time, the molecular pump is connected to the detection terminal, and the parameters of the molecular pump are detected at all times through the detection terminal, which has the advantages of one-key start and simple operation.

[0034] 2. A molecular pump inspection device provided by the present invention is also provided with a fixed structure, which includes a fixed base plate and a clamping block. The mounting position formed between the fixed base plate and the clamping block can realize stable clamping of the molecular pump, thereby ensuring the stability of the molecular pump during the detection process.

[0035] 3. A molecular pump inspection device provided by the present invention is also provided with a clamping structure, which further increases the stability of the connection between the molecular pump and the detection subject, prevents the molecular pump from accidentally falling off during the rotation of the rotating structure, thereby ensuring the stability of the detection process.

[0036] 4. A molecular pump inspection method provided by the present invention includes steps S1, a preparation stage; S2, a startup stage; S3, a detection stage; S4, a state change stage; after the test device is closed for a certain period of time, the molecular pump is driven to rotate by the rotating structure to put the molecular pump in another state; S5, the molecular pump in this state is evacuated by the test structure until the vacuum degree in the molecular pump reaches the inspection standard value; at the same time, the working state of the molecular pump is detected by the detection terminal and the parameters of the molecular pump when working are recorded; repeating steps S4 and S5, when the molecular pump completes all state detections, proceeding to the next step; S6, ending. This scheme fixes the molecular pump on the rotating structure, and the molecular pump can realize the switching of multiple states of the molecular pump by one fixation, thereby increasing the detection efficiency, and further improving the detection efficiency by increasing the number of detection devices. At the same time, the molecular pump is connected to the detection terminal, and the parameters of the molecular pump are detected at all times by the detection terminal, which has the advantages of one-button start and simple operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0038] Figure 1 This is a schematic diagram of the overall structure of a molecular pump testing device provided by the present invention.

[0039] Figure 2 A schematic diagram of different states of a molecular pump of a molecular pump testing device provided by the present invention.

[0040] Figure 3 A schematic diagram of a detection device of a molecular pump testing device provided by the present invention.

[0041] Figure 4 A schematic diagram of the test structure of a molecular pump testing device provided by the present invention.

[0042] Description of reference numerals:

[0043] 1. Detection terminal; 2. Detection device; 21. Detection body; 22. Rotating structure; 23. Fixed structure; 231. Fixed bottom plate; 232. Clamping block; 24. Driving structure; 25. Clamping structure; 3. Test structure; 31. Straight cylinder; 32. Vacuum gauge; 33. Electromagnetic purge valve; 34. Adapter; 4. Molecular pump. DETAILED DESCRIPTION

[0044] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0045] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limitations on the present invention.

[0046] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0047] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0048] Example 1

[0049] like Figure 1 As shown, a molecular pump 4 inspection device provided by the present invention comprises: a detection terminal 1, a detection device 2 and a test structure 3;

[0050] The detection terminal 1 is suitable for being electrically connected to the molecular pump 4; the detection terminal 1 is suitable for constantly detecting the parameters of the molecular pump 4 when it is working; there are a plurality of detection devices 2, each of which detects a molecular pump 4, and the detection device 2 is provided with a mounting position suitable for accommodating the molecular pump 4; the detection device 2 is suitable for driving the molecular pump 4 to rotate; the detection device 2 includes a detection body 21 and a rotating structure 22; the rotating structure 22 is arranged between the molecular pump 4 and the detection body 21; the rotating structure 22 drives the molecular pump 4 to rotate; the molecular pump 4 has at least two states during the rotation process; when the molecular pump 4 is in different states, the angle between the molecular pump 4 and the vertical line is different; the test structure 3 is connected to the molecular pump 4; the test structure 3 is suitable for vacuuming the inside of the molecular pump 4; the test structure 3 rotates synchronously with the rotation of the molecular pump 4.

[0051] And each detection device 2 drives the molecular pump 4 to rotate through the rotating structure 22, so as to realize the change of the molecular pump 4 in different states. In this scheme, the molecular pump 4 is fixed on the rotating structure 22, and the molecular pump 4 can realize the switching of various states of the molecular pump 4 by one fixation, thereby increasing the detection efficiency. By increasing the number of detection devices 2, the detection efficiency is further improved. At the same time, the molecular pump 4 is connected to the detection terminal 1, and the parameters of the molecular pump 4 are detected at all times through the detection terminal 1, which has the advantages of one-button start and simple operation.

[0052] like Figure 2 As shown, it should be noted that in the present scheme, the molecular pump 4 is mainly used to simulate three working states, namely, the upright state, the lateral state and the inverted state, and the performance parameters of the molecular pump 4 are respectively detected in these three states, wherein the upright state is the normal upright state of the molecular pump 4, the lateral state is the horizontal placement state of the molecular pump 4, and the inverted state is the inverted state of the molecular pump 4.

[0053] It should be noted that the connection between the molecular pump 4 and the detection terminal 1 can not only detect the parameters of the molecular pump 4 when it is working at all times, but also automatically print out the parameter information of the molecular pump 4 through the detection terminal 1. Compared with the traditional method of manually filling out forms to record the test results, it reduces labor costs, improves work efficiency, and the accuracy of experimental results, and further improves the degree of automation of the experiment.

[0054] It should be noted that in the present solution, the number of the detection devices 2 is specifically four. In order to further increase the detection efficiency, the number of the detection devices 2 can be further increased.

[0055] It should be noted that in this solution, in order to ensure that the molecular pump 4 and the test structure 3 will not interfere with each other during the rotation process, a base and a support base arranged on the base are also provided. Specifically, the detection device 2 is arranged on one side of the support base, wherein the power supply equipment of the detection device 2 is arranged inside the support base.

[0056] like Figure 3 As shown, further, the detection device 2 also includes a fixed structure 23, which is fixedly connected to the rotating structure 22; the fixed structure 23 is provided with a mounting position suitable for accommodating the molecular pump 4; the fixed structure 23 includes a fixed base plate 231 and a clamping block 232; the fixed base plate 231 is "L"-shaped; the short side reaching the fixed base plate 231 is suitable for fixed connection with the rotating structure 22; there are two clamping blocks 232; the two clamping blocks 232 are both arranged on the long side of the fixed base plate 231; the two clamping blocks 232 and the fixed base plate 231 surround the mounting position. In this solution, the fixed base plate 231 is fixedly connected to the fixed structure 23 by bolt connection. As an alternative embodiment, it can also be welded, bonded, etc.

[0057] It should be noted that the distance between the two clamping blocks 232 can be adjusted according to the size of the molecular pump 4. The optimal distance between the two clamping blocks 232 is just enough to clamp the molecular pump 4. In order to ensure that the clamping blocks 232 do not damage the molecular pump 4 during the clamping process, a flexible layer, such as a rubber pad, is provided on the side of the clamping block 232 close to the molecular pump 4.

[0058] It should be noted that the rotating structure 22 includes a rotating disk and a fixed disk, wherein the fixed disk is fixedly connected to the detection body 21, and the rotating disk is rotatably connected to the fixed disk. The specific rotation method can be a slider rail method or other sliding connection methods to ensure that the rotating disk is rotatably connected to the fixed disk while the rotating disk is also clamped with the fixed disk at the same time.

[0059] Furthermore, it also includes a driving structure 24, which is arranged on one side of the rotating structure 22, and is suitable for driving the rotating structure 22 to rotate. Specifically, the driving structure 24 is fixed on the detection body 21, and the driving structure 24 can select a common motor or other structure, connect the output end of the motor to the rotating disk, and drive the rotating disk to rotate relative to the fixed disk through the output of the motor, that is, drive the molecular pump 4 to rotate in the plane where the X-axis and the Y-axis are located.

[0060] Furthermore, the detection device 2 also includes a clamping structure 25, one end of which is fixedly connected to the detection body 21, and the other end is suitable for being sleeved on the outer surface of the molecular pump 4. By setting the clamping structure 25, the stability of the connection between the molecular pump 4 and the detection body 21 is further increased, preventing the molecular pump 4 from accidentally falling off during the rotation of the rotating structure 22, thereby ensuring the stability of the detection process.

[0061] Specifically, one end of the molecular pump 4 of the clamping structure 25 is composed of two semicircular rings, the two rings are arranged opposite to each other, and a detachable connection is achieved by a structure such as bolts. Specifically, the two rings are arranged on the outside of the molecular pump 4 and the two rings are locked by a threaded rod, and the other end of the threaded rod is fixedly connected to the detection body 21.

[0062] like Figure 4 As shown, further, the test structure 3 includes a straight cylinder 31, a vacuum gauge 32 and a mechanical pump, wherein the straight cylinder 31 is connected to the molecular pump 4 through a flange, the straight cylinder 31 plays a connecting role, and the flange can ensure the stability of the connection between the straight cylinder 31 and the molecular pump 4. The vacuum gauge 32 is suitable for communicating with the straight cylinder 31, and the vacuum gauge 32 is suitable for detecting the vacuum degree of the molecular pump 4; the mechanical pump is suitable for connecting with the straight cylinder 31, and the mechanical pump is suitable for evacuating the molecular pump 4. In this solution, the flange is selected as a CF35 flange.

[0063] It should be noted that the mechanical pump is not shown in the figure. One end of the straight cylinder 31 is connected to the molecular pump 4, and the other end is connected to the mechanical pump. Specifically, the other end of the straight cylinder 31 is connected to the mechanical pump through a pipeline, and the mechanical pump performs a vacuum operation on the molecular pump 4 through the straight cylinder 31.

[0064] Furthermore, an electromagnetic purge valve 33 is provided, and the electromagnetic purge valve 33 is connected to the molecular pump 4 through the straight cylinder 31 ; the electromagnetic purge valve 33 is suitable for increasing the load on the molecular pump 4 .

[0065] Furthermore, an adapter 34 is provided, and the adapter 34 is provided between the electromagnetic purge valve 33 and the straight cylinder 31. The electromagnetic purge valve 33 and the adapter 34 are connected by a clamp, and the clamp connection has the advantages of convenient operation and high installation efficiency. In this solution, the adapter 34 is specifically a CF35-KF16 adapter 34.

[0066] It should be noted that the straight tube 31 and the vacuum gauge 32 are connected via a horizontal pipe and a vertical pipe, and the straight tube 31 and the electromagnetic purge valve 33 are also connected via a horizontal pipe.

[0067] Example 2

[0068] A molecular pump 4 inspection method includes the molecular pump 4 inspection device described in Example 1, and also includes the following steps: S1, preparation stage; start the detection terminal 1 and input the relevant information of the molecular pump 4; set the molecular pump 4 on the installation position; S2, start-up stage; drive the molecular pump 4 to rotate through the rotating structure 22, so that the molecular pump 4 is in a certain state; then vacuumize the molecular pump 4 in this state through the test structure 3 until the vacuum degree in the molecular pump 4 reaches the inspection standard value; S3, detection stage; detect the working state of the molecular pump 4 through the detection terminal 1 and record the parameters of the molecular pump 4 when it is working; S4, change state stage; after closing the test device for a certain period of time, drive the molecular pump 4 to rotate through the rotating structure 22, so that the molecular pump 4 is in another state; S5, vacuumize the molecular pump 4 in this state through the test structure 3 until the vacuum degree in the molecular pump 4 reaches the inspection standard value; at the same time, detect the working state of the molecular pump 4 through the detection terminal 1 and record the parameters of the molecular pump 4 when it is working; repeat steps S4 and S5, and when the molecular pump 4 completes all state detections, proceed to the next step; S6, end.

[0069] Furthermore, the molecular pump 4 includes a first state, a second state and a third state during its rotation; when the molecular pump 4 is in the first state, the angle between the molecular pump 4 and the vertical line is 0°; when the molecular pump 4 is in the second state, the angle between the molecular pump 4 and the vertical line is 90°; when the molecular pump 4 is in the third state, the angle between the molecular pump 4 and the vertical line is 180°.

[0070] It should be noted that before testing the molecular pump 4, it is necessary to determine whether to bake. If baking is required, the baking time and other parameters need to be determined. If baking is not required, the testing process can be carried out directly. The internal pressure of the molecular pump 4 can be further increased by baking, and some specific pressures cannot be achieved by using only a mechanical pump.

[0071] It should be noted that in step S4, the state is changed; the test device is turned off for 10 minutes before the subsequent steps are performed.

[0072] It should be noted that, before step S6 , the molecular pump 4 should be reset, and the molecular pump 4 should be in an upright state, ie, the first state, by means of the rotating structure 22 .

[0073] It should be noted that, before step S6, the detection terminal 1 will automatically print a form of the detection results.

[0074] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention.

Claims

1. A molecular pump testing device, characterized in that: include: A detection terminal (1) adapted to be electrically connected to a molecular pump (4); The detection terminal (1) is suitable for constantly detecting parameters of the molecular pump (4) when it is working; A detection device (2) having a plurality of parts; a mounting position suitable for accommodating a molecular pump (4) is arranged on the detection device (2); the detection device (2) is suitable for driving the molecular pump (4) to rotate; the detection device (2) comprises a detection body (21) and a rotating structure (22); the rotating structure (22) is arranged between the molecular pump (4) and the detection body (21); the rotating structure (22) drives the molecular pump (4) to rotate; the molecular pump (4) has at least two states during its rotation; when the molecular pump (4) is in different states, the angle between the molecular pump (4) and the vertical line is different; A test structure (3) connected to the molecular pump (4); the test structure (3) is suitable for performing a vacuum operation on the interior of the molecular pump (4); The test structure (3) rotates synchronously with the molecular pump (4); A fixed structure (23) is fixedly connected to the rotating structure (22); a mounting position suitable for accommodating a molecular pump (4) is arranged on the fixed structure (23); the fixed structure (23) comprises a fixed base plate (231) and a clamping block (232); the fixed base plate (231) is in an "L" shape; the short side of the fixed base plate (231) is suitable for being fixedly connected to the rotating structure (22); there are two clamping blocks (232); the two clamping blocks (232) are both arranged on the long sides of the fixed base plate (231); the two clamping blocks (232) and the fixed base plate (231) surround the mounting position.

2. The molecular pump testing device according to claim 1, characterized in that: The detection device (2) further comprises: The driving structure (24) is arranged on one side of the rotating structure (22); the driving structure (24) is suitable for driving the rotating structure (22) to rotate.

3. The molecular pump testing device according to claim 2, characterized in that: The detection device (2) further comprises: The clamping structure (25) has one end fixedly connected to the detection body (21) and the other end suitable for being sleeved on the outer surface of the molecular pump (4).

4. The molecular pump testing device according to claim 1, characterized in that: The test structure (3) comprises: A straight cylinder (31) connected to the molecular pump (4) via a flange; A vacuum gauge (32), adapted to be in communication with the straight cylinder (31), and adapted to detect the vacuum degree of the molecular pump (4); A mechanical pump is suitable for being connected to the straight cylinder (31), and the mechanical pump is suitable for evacuating the molecular pump (4).

5. The molecular pump testing device according to claim 4, characterized in that: The test structure (3) further comprises: The electromagnetic purge valve (33) is connected to the molecular pump (4) through the straight cylinder (31); the electromagnetic purge valve (33) is suitable for increasing the load on the molecular pump (4).

6. The molecular pump testing device according to claim 5, characterized in that: The test structure (3) further comprises: The adapter (34) is arranged between the electromagnetic purge valve (33) and the straight cylinder (31).

7. The molecular pump testing device according to claim 6, characterized in that: The electromagnetic purge valve (33) is connected to the adapter (34) via a clamp.

8. A molecular pump testing method, characterized in that: A molecular pump (4) testing device comprising any one of claims 1 to 7, further comprising the steps of: S1, preparation stage; starting the detection terminal (1) and inputting the relevant information of the molecular pump (4); setting the molecular pump (4) at the installation position; S2, a start-up phase; the molecular pump (4) is driven to rotate by the rotating structure (22) so that the molecular pump (4) is in a certain state; then, the molecular pump (4) in this state is evacuated by the testing structure (3) until the vacuum degree in the molecular pump (4) reaches the inspection standard value; S3, detection stage; detecting the working state of the molecular pump (4) through the detection terminal (1) and recording the parameters of the molecular pump (4) when it is working; S4, state change stage: after the test device is closed for a certain period of time, the molecular pump (4) is driven to rotate by the rotating structure (22), so that the molecular pump (4) is in another state; S5, evacuating the molecular pump (4) in this state by means of the test structure (3) until the vacuum degree in the molecular pump (4) reaches the inspection standard value; at the same time, detecting the working state of the molecular pump (4) by means of the inspection terminal (1) and recording the parameters of the molecular pump (4) when it is working; repeating steps S4 and S5, and proceeding to the next step after all state inspections of the molecular pump (4) are completed; S6. End.

9. The molecular pump inspection method according to claim 8, characterized in that: The molecular pump (4) comprises a first state, a second state and a third state during its rotation; when the molecular pump (4) is in the first state, the angle between the molecular pump (4) and the vertical line is 0°; when the molecular pump (4) is in the second state, the angle between the molecular pump (4) and the vertical line is 90°; when the molecular pump (4) is in the third state, the angle between the molecular pump (4) and the vertical line is 180°.

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