A matching method, device, equipment and medium of a radio frequency matching device

Abstract

The present invention relates to the field of radio frequency technology, and specifically to a matching method, device, equipment and medium for a radio frequency matcher. The present invention first constructs different ideal matching capacitance values ​​in different pulse periods of a radio frequency source, and fixes the capacitance value of the variable capacitor of the matcher to the ideal capacitance value in a single pulse period, that is, the variable capacitor is kept unchanged in a single pulse period. Once the matcher loses the matching state due to a change in the power of the radio frequency source in a single pulse period, the present invention restores the matching state of the matcher by adjusting the frequency of the radio frequency source. From the above analysis, it can be seen that the present invention constructs different ideal matching capacitance values ​​in different pulse periods, and replaces the mechanical adjustment of the variable capacitor with the adjustment frequency in a single pulse period, so that the matcher can be accurately adjusted to the matching state corresponding to each power, so that the matcher can achieve matching within tens of microseconds within a larger load range.

Description

Technical Field

[0001] The present invention relates to the field of radio frequency technology, and in particular to a matching method, device, equipment and medium of a radio frequency matcher. Background Art

[0002] The RF source transmits the signal to the load through the RF matcher. The main function of the RF matcher is to maximize the transmission of the RF source signal to the load, that is, when the RF matcher is in a matching state, the RF matcher can maximize the transmission of the RF source signal to the load. The RF source will have several different powers in one cycle (that is, the cycle consisting of the signal power input by the RF source to the matcher). For each different power, the capacitance value of the variable capacitor on the matcher must be mechanically adjusted to adjust the matcher to the matching state. Once the power changes, the matcher will lose the matching state. Because the power is constantly changing in a cycle, and the duration of each power is very short, it is difficult to adjust the variable capacitor to the capacitance value required for the matching state in a very short time, that is, for each different power, it is difficult to accurately adjust the matcher to the matching state.

[0003] In summary, it is difficult in the prior art to accurately adjust the matcher to a matching state corresponding to each power.

[0004] Therefore, the prior art still needs to be improved and enhanced. Summary of the invention

[0005] In order to solve the above technical problems, the present invention provides a matching method, device, equipment and medium of a radio frequency matcher, which solves the problem that it is difficult to accurately adjust the matcher to the matching state corresponding to each power in the prior art.

[0006] To achieve the above object, the present invention adopts the following technical solutions:

[0007] In a first aspect, the present invention provides a matching method of a radio frequency matcher, comprising:

[0008] Constructing an ideal capacitance value of a variable capacitor of a radio frequency matcher, wherein the ideal capacitance value is used to put the radio frequency matcher in a pre-matching state;

[0009] During a signal cycle of the radio frequency source, fixing the capacitance value of the variable capacitor to the ideal capacitance value;

[0010] When the RF source sends a signal to the RF matcher fixed to the ideal capacitance value at the power within the signal period, determining the matching degree of the RF matcher;

[0011] According to the matching degree, the frequency of the RF source is adjusted to adjust the RF matcher from the pre-matching state to a target matching state, wherein the target matching state is used to enable the RF matcher to transmit the output signal power of the RF source to the load of the RF matcher to the maximum extent.

[0012] In one implementation, the ideal capacitance value of the variable capacitor for constructing the radio frequency matcher includes:

[0013] Determine an ideal capacitance sub-value of the radio frequency matcher corresponding to a plurality of power levels of the radio frequency source, wherein the ideal capacitance sub-value is used to make the radio frequency matcher present a matching state corresponding to the power level;

[0014] The ideal capacitance value is determined according to a plurality of the ideal capacitance sub-values.

[0015] In one implementation, the determining of the ideal capacitance subvalues ​​of the RF matcher corresponding to the plurality of power levels of the RF source includes:

[0016] Determining a matching sub-degree of the radio frequency matcher corresponding to each of the power levels;

[0017] The capacitance value of the variable capacitor is adjusted until each of the matching sub-levels reaches a matching sub-state corresponding to each of the power levels, thereby obtaining an ideal capacitance sub-value corresponding to a plurality of the power levels.

[0018] In one implementation, determining the matching sub-degree of the radio frequency matcher corresponding to each of the power levels includes:

[0019] Collecting the reflected power corresponding to each of the power levels and the capacitance impedance value of the RF matcher and the load impedance value of the load, wherein the reflected power is the power of the output signal power of the RF source that is not received by the load;

[0020] Add the capacitance impedance value to the load impedance value to obtain a total impedance value;

[0021] According to the total impedance value and the reflected power corresponding to each power level, a matching sub-degree corresponding to each power level is obtained.

[0022] In one implementation, obtaining the matching sub-degree corresponding to each power level according to the total impedance value and the reflected power corresponding to each power level includes:

[0023] Subtract a set value from the total impedance value to obtain a first intermediate value;

[0024] Adding the total impedance value to the set value to obtain a second intermediate value;

[0025] A modulus of a ratio of the first intermediate value to the second intermediate value is determined, and the modulus and the reflected power corresponding to each of the power levels are used as the matching sub-degree corresponding to each of the power levels.

[0026] In one implementation, the variable capacitor includes a first variable capacitor and a second variable capacitor connected to the first variable capacitor, the plurality of ideal capacitance sub-values ​​include a plurality of ideal capacitance sub-values ​​of the first variable capacitor and a plurality of ideal capacitance sub-values ​​of the second variable capacitor, and determining the ideal capacitance value based on the plurality of ideal capacitance sub-values ​​includes:

[0027] Performing weighted calculation on a plurality of ideal capacitance sub-values ​​of the first variable capacitor to obtain an ideal capacitance value of the first variable capacitor;

[0028] A weighted calculation is performed on several ideal capacitance sub-values ​​of the second variable capacitor to obtain an ideal capacitance value of the second variable capacitor.

[0029] In one implementation, adjusting the frequency of the radio frequency source according to the matching degree to adjust the radio frequency matcher from the pre-matching state to the target matching state includes:

[0030] According to the matching degree, determining each frequency value required to adjust to the target matching state;

[0031] A maximum frequency value is selected from the frequency values, and the frequency of the radio frequency source is adjusted to the maximum frequency value.

[0032] In a second aspect, an embodiment of the present invention further provides a matching device of a radio frequency matcher, wherein the device comprises the following components:

[0033] An ideal capacitance value building module, used to build an ideal capacitance value of a variable capacitor of a radio frequency matcher, wherein the ideal capacitance value is used to put the radio frequency matcher in a pre-matching state;

[0034] A pre-matching module, used to fix the capacitance value of the variable capacitor to the ideal capacitance value within a signal cycle of the radio frequency source;

[0035] A matching degree calculation module, used for determining the matching degree of the RF matching device when the RF source sends a signal to the RF matching device fixed to the ideal capacitance value at the power within the signal period;

[0036] A frequency adjustment module is used to adjust the frequency of the RF source according to the matching degree to adjust the RF matcher from the pre-matching state to a target matching state, wherein the target matching state is used to enable the RF matcher to transmit the output signal power of the RF source to the load of the RF matcher to the maximum extent.

[0037] In a third aspect, an embodiment of the present invention further provides a terminal device, wherein the terminal device includes a memory, a processor, and a matching program of a radio frequency matcher stored in the memory and executable on the processor, and when the processor executes the matching program of the radio frequency matcher, the steps of the matching method of the radio frequency matcher described above are implemented.

[0038] In a fourth aspect, an embodiment of the present invention further provides a computer-readable storage medium, on which a matching program of a radio frequency matcher is stored. When the matching program of the radio frequency matcher is executed by a processor, the steps of the matching method of the radio frequency matcher described above are implemented.

[0039] Beneficial effect: The present invention first fixes the capacitance value of the variable capacitor of the matcher to a pre-calculated ideal capacitance value throughout the entire cycle of the RF source, that is, the variable capacitor is kept unchanged throughout the entire cycle. Once the matcher loses the matching state due to changes in the power of the RF source during the entire cycle, the present invention restores the matching state of the matcher by adjusting the frequency of the RF source. From the above analysis, it can be seen that the present invention does not require mechanical adjustment of the variable capacitor during the entire cycle, and the RF source has the function of accurately adjusting its frequency. Therefore, adjusting the frequency instead of mechanically adjusting the variable capacitor can accurately adjust the matcher to the matching state corresponding to each power. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Figure 1 It is the overall flow chart of the present invention;

[0041] Figure 2 is a structural diagram of a radio frequency matching device in an embodiment of the present invention;

[0042] Figure 3 Schematic diagram of a cycle in an embodiment of the present invention;

[0043] Figure 4 The process of finding an ideal capacitance value in an embodiment of the present invention;

[0044] Figure 5 is a weighted schematic diagram of a first variable capacitor in an embodiment of the present invention;

[0045] Figure 6 is a weighted schematic diagram of a second variable capacitor in an embodiment of the present invention;

[0046] Figure 7 A schematic diagram of matching frequency and time of multiple power level cycles in an embodiment of the present invention;

[0047] Figure 8 A structural diagram of a matching device of a radio frequency matching device provided by the present invention;

[0048] Fig. 9 This is a block diagram of the internal structure principle of the terminal device provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0049] The following is a clear and complete description of the technical solution of the present invention in combination with the embodiments and the accompanying drawings. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0050] It has been found through research that the RF source transmits the signal to the load through the RF matcher. The main function of the RF matcher is to maximize the transmission of the signal of the RF source to the load, that is, when the RF matcher is in a matching state, the RF matcher can maximize the transmission of the signal of the RF source to the load. The RF source will have several different powers in one cycle (that is, the cycle composed of the signal power input by the RF source to the matcher). For each different power, the capacitance value of the variable capacitor on the matcher must be mechanically adjusted to adjust the matcher to the matching state. Once the power changes, the matcher will lose the matching state. Because the power is constantly changing in a cycle, and the duration of each power is very short, it is difficult to adjust the variable capacitor to the capacitance value required for the matching state in a very short time, that is, for each different power, it is difficult to accurately adjust the matcher to the matching state.

[0051] In order to solve the above technical problems, the present invention provides a matching method, device, equipment and medium of a radio frequency matcher, which solves the problem that it is difficult to accurately adjust the matcher to the matching state corresponding to each power in the prior art.

[0052] Embodiment 1: This embodiment provides a radio frequency matching device, such as Figure 2 As shown, the RF matching device includes a first sensor Sensor1, a second sensor Sensor2, a first variable capacitor C1 and a second variable capacitor C2. The input end of the second sensor Sensor2 is connected to a RF source (i.e. Figure 2The output end of the second sensor Sensor2 is connected to one end of the first variable capacitor C1, one end of the first variable capacitor C1 is also connected to one end of the second variable capacitor C2, the other end of the first variable capacitor C1 is grounded, the other end of the second variable capacitor C2 is connected to the input end of the first sensor Sensor1, and the output end of the first sensor Sensor1 is connected to the load Load.

[0053] The first sensor Sensor1 is used to sense the load impedance value of the load and convert the load impedance value Z(f) into Load The second sensor Sensor2 is used to sense the reflected power and send the reflected power to the controller Controller. In one cycle of the RF source, the capacitance values ​​of the first variable capacitor C1 and the second variable capacitor C1 are first fixed to the ideal capacitance value (the capacitance value calculated in advance), and then the controller Controller adjusts the frequency f of the RF source according to the load impedance value, the capacitance impedance value of the matcher and the reflected power. The change of frequency f will change the matching degree of the matcher, thereby adjusting the matcher to the target matching state.

[0054] Embodiment 2, based on embodiment 1, this embodiment provides a matching method of a radio frequency matching device, such as Figure 1 As shown, the following steps are included: S100, S200, S300, S400:

[0055] S100, constructing an ideal capacitance value of a variable capacitor of a radio frequency matcher, wherein the ideal capacitance value is used to put the radio frequency matcher in a pre-matching state;

[0056] S200, fixing the capacitance value of the variable capacitor to the ideal capacitance value within a signal cycle of the radio frequency source, wherein the ideal capacitance value is used to put the radio frequency matcher in a pre-matching state;

[0057] S300, when the RF source sends a signal to the RF matcher fixed to the ideal capacitance value at the power within the signal period, determining the matching degree of the RF matcher;

[0058] S400, according to the matching degree, by adjusting the frequency of the RF source, so as to adjust the RF matcher from the pre-matching state to a target matching state, wherein the target matching state is used to enable the RF matcher to transmit the output signal power of the RF source to the load of the RF matcher to the maximum extent.

[0059] In this embodiment, the ideal capacitance value in step S200 includes the ideal capacitance value of the first variable capacitor C1. and the ideal capacitance value of the second variable capacitor C2 This embodiment calculates the ideal capacitance value in advance for each RF source. and ideal capacitance value After that, in one cycle T of the RF source rp1 The capacitance value of the first variable capacitor C1 is fixed to The capacitance value of the second variable capacitor C2 is also fixed to Afterwards, every time the power of the RF source changes, the frequency of the signal input from the RF source to the RF matcher is adjusted so that the RF matcher can reach the target matching state at each power.

[0060] like Figure 3 As shown above and In the first cycle T rp1 When the other cycles after the first cycle, the capacitance value of the first variable capacitor C1 is fixed to The capacitance value of the second variable capacitor C2 is fixed to So that the RF matcher is in a pre-matching state, and then the frequency of the RF source input to the RF matcher is adjusted to make the RF matcher change from the pre-matching state to the best matching state (the best matching state is the target matching state. When the RF matcher is in the target matching state, the RF matcher can transmit the power of the RF source to the responsible party to the maximum extent, that is, the reflected power is zero).

[0061] like Figure 3 As shown, the first cycle T rp1 Included in the time period T 11 , time period T 12 , time period T 13 , time period T 14 , time period T 15 , time period T 16 , time period T 17 , the RF source is in the time period T 11 The power of the signal input to the RF matching device is P 11 , the RF source is in the time period T 12 The power of the signal input to the RF matching device is P 12 , the RF source is in the time period T 13 The power of the signal input to the RF matching device is P 13 , the RF source is in the time period T 14 The power of the signal input to the RF matching device is P 14 , the RF source is in the time period T 15 The power of the signal input to the RF matching device is P 13 , the RF source is in the time period T16 The power of the signal input to the RF matching device is P 12 , the RF source is in the time period T 17 The power of the signal input to the RF matching device is P 11 That is, the period is the power period of the signal input from the RF source to the RF matcher.

[0062] In this embodiment, in a period T rp1 Calculate the ideal capacitance value and ideal capacitance value In this embodiment, step S100 includes: Figure 4 The specific steps S101 to S108 shown are:

[0063] S101, collecting reflected power corresponding to each of the power levels, the capacitance impedance value of the RF matcher, and the load impedance value of the load, wherein the reflected power is the power of the output signal of the RF source that is not received by the load.

[0064] For example, the first cycle T rp1 There are several power levels, among which the jth power level is denoted as P 1j When the RF source inputs the RF matching device at a level of P 1j When the power is higher, the RF matching device will produce a corresponding capacitance impedance value. and load will also produce corresponding load impedance value (The first sensor Sensor1 is used to collect the load impedance value ). The structure of the RF matcher is as follows Figure 2 As shown, the first variable capacitor C1 and the second variable capacitor C2 are included. The connection method of the two in the RF matching device is known. Therefore, the capacitance impedance value in the RF matching device circuit can be calculated based on the impedance value of the first variable capacitor C1 and the impedance value of the second variable capacitor C2. The impedance value of the capacitor is calculated It is the prior art.

[0065] S102, adding the capacitance impedance value to the load impedance value to obtain a total impedance value

[0066]

[0067] S103, the total impedance value Subtract the set value 50 to get the first intermediate value

[0068] S104, the total impedance value Add the set value 50 to get the second intermediate value

[0069] S105: Determine a modulus of a ratio of the first intermediate value to the second intermediate value The module value and the reflected power corresponding to each of the power levels are used as the matching sub-degree corresponding to each of the power levels.

[0070] || || represents the modulus operation, is plural, so A modulo value exists. And the reflected power is the matching degree corresponding to the jth power level.

[0071] S106, adjusting the capacitance value of the variable capacitor until each of the matching sub-levels reaches a matching sub-state corresponding to each of the power levels, and obtaining ideal capacitance sub-values ​​corresponding to several of the power levels.

[0072] That is, for the first cycle T rp1 The jth power level P within 1j , adjust the capacitance value of the first variable capacitor C1 and adjust the capacitance value of the second variable capacitor C2 until When the reflected power is equal to zero, or the reflected power is less than the threshold value, or the reflected power is also zero, the RF matching device reaches the matching state, and the capacitance value of the first variable capacitor C1 is the ideal capacitance value. Similarly, at this time, the capacitance value of the second variable capacitor C2 is the ideal capacitance value.

[0073] Among them, the two variable capacitors are both mechanical vacuum adjustable capacitors, and their electrodes are composed of two groups of metal plates. The fixed group of the two groups of electrodes is the fixed plate, and the rotatable group is the moving plate. The capacitance value is adjusted by adjusting the moving plate position C1_Position of C1, and the capacitance value is adjusted by adjusting the moving plate position C2_Position of C2.

[0074] S107, for several ideal capacitance values ​​of the first variable capacitor Perform weighted calculation to obtain the ideal capacitance value of the first variable capacitor

[0075]

[0076] is the jth power level P in the first cycle 1j The corresponding The weight of m is the total number of power levels, m can be 7, that is, each cycle contains 7 power levels, The corresponding relationship between the occurrence time of each power level is as follows: Figure 5 shown.

[0077] S108, for several ideal capacitance values ​​of the second variable capacitor Perform weighted calculation to obtain the ideal capacitance value of the second variable capacitor

[0078]

[0079] is the jth power level P in the first cycle 1j The corresponding The weight of The corresponding relationship between the occurrence time of each power level is as follows: Figure 6 shown.

[0080] When in the first cycle T rp1 The ideal capacitance value is calculated and ideal capacitance value Afterwards, steps S200, S300, and S400 are cyclically executed in any of the other cycles until all the cycles are completed.

[0081] For the ith (i is greater than 1) period T of the RF source rpi The specific process of step S200 is as follows: fix the capacitance value of the first variable capacitor of the RF matching device to the ideal capacitance value The capacitance value of the second variable capacitor is fixed to the ideal capacitance value That is, in the entire period T rpi The capacitance value of the first variable capacitor is maintained at The capacitance value of the second variable capacitor remains unchanged. constant.

[0082] After executing step S200, for the period T rpi Each power level P ij Both steps S300 and S400 are executed.

[0083] The specific process of step S300 is as follows: control the RF source to rpi The internal RF matching device sends a power level of P ij signal, calculate the load impedance value under the action of this signal Calculate the capacitance impedance value of the first variable capacitor and the second variable capacitor under the action of the signal The capacitance impedance value Add the load impedance value Get the total impedance value calculate and will And the reflected power formed under the action of the signal is used as the matching degree.

[0084] The specific process of step S400 is as follows: If the operation of fixing the two variable capacitors in step S200 does not make the RF matching device reach the target matching state, that is, is greater than zero, or the reflected power is greater than the threshold, then and reflected power to adjust the frequency f of the RF source until is equal to zero, or the reflected power is less than the threshold, that is, the frequency f is adjusted until the RF matcher presents the target matching state.

[0085] Among them, according to and reflected power, determine how high the frequency f of the RF source needs to be adjusted to make Equal to zero, or the reflected power is less than the threshold, which is the existing technology.

[0086] In the process of adjusting the frequency f, there may be multiple frequency values ​​that can make the RF matcher present the target matching state, and finally the maximum frequency value is selected.

[0087] Repeat steps S300 and S400 until the RF source is rpi All the power levels included act on the RF matcher. By adjusting the frequency of the RF source, the RF matcher presents the target matching state at each power level, that is, to establish a corresponding relationship between power level and frequency. Since there is a corresponding relationship between the power level of the RF source and the working time of the RF source, then the following is established: Figure 7 The corresponding relationship between time and frequency of the RF source within a cycle is shown. Figure 7 The horizontal axis is time and the vertical axis is frequency.

[0088] In this embodiment, when the RF source sends a signal to the RF matcher at any power level in any cycle, the RF matcher can be in a target matching state at the power level in the cycle.

[0089] In summary, the present invention combines the characteristics of mechanical vacuum capacitors and frequency sweeping, utilizes the time of running simulation silicon wafers for a few pulses in the early stage of the plasma chamber (load) process, and adopts a specific matching strategy to adjust the positions of the two vacuum capacitors (that is, adjust the capacitance value of the capacitor), finds the best matching positions of C1 and C2 corresponding to the frequency F of the fixed RF source under different power level processes in the middle of a single pulse, and weights the best matching position for each power level to obtain the best matching position of C1 and C2 in the current plasma process RF matcher; and sets it as the initial matching position of the current plasma process and records it in non-volatile storage; then, frequency scanning is performed in a single pulse cycle to achieve RF matching at different power levels in a single pulse cycle. This matching method not only utilizes the advantages of mechanical vacuum capacitors supporting high power and a large range of loads that can be matched, but also effectively avoids the problem of slow adjustment of mechanical vacuum capacitors by frequency sweeping in a single pulse cycle, and can achieve matching under multiple power level pulse modes to the greatest extent possible.

[0090] This embodiment also provides a matching device for a radio frequency matcher, such as Figure 8 As shown, the device comprises the following components:

[0091] An ideal capacitance value building module 01 is used to build an ideal capacitance value of a variable capacitor of a radio frequency matcher, wherein the ideal capacitance value is used to put the radio frequency matcher in a pre-matching state;

[0092] The pre-matching module 02 is used to fix the capacitance value of the variable capacitor to the ideal capacitance value within the signal cycle of the radio frequency source;

[0093] A matching degree calculation module 03, used to determine the matching degree of the RF matching device when the RF source sends a signal to the RF matching device fixed to the ideal capacitance value at the power within the signal period;

[0094] The frequency adjustment module 04 is used to adjust the frequency of the RF source according to the matching degree to adjust the RF matcher from the pre-matching state to the target matching state, and the target matching state is used to enable the RF matcher to transmit the output signal power of the RF source to the load of the RF matcher to the maximum extent.

[0095] Based on the above embodiments, the present invention further provides a terminal device, whose principle block diagram can be shown as follows: Fig. 9As shown. The terminal device includes a processor, a memory, a network interface, and a display screen connected via a system bus. Among them, the processor of the terminal device is used to provide computing and control capabilities. The memory of the terminal device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system and a computer program. The internal memory provides an environment for the operation of the operating system and the computer program in the non-volatile storage medium. The network interface of the terminal device is used to communicate with an external terminal via a network connection. When the computer program is executed by the processor, a matching method of a radio frequency matcher is implemented. The display screen of the terminal device can be a liquid crystal display screen or an electronic ink display screen.

[0096] Those skilled in the art will understand that Fig. 9 The principle block diagram shown in the figure is only a block diagram of a partial structure related to the scheme of the present invention, and does not constitute a limitation on the terminal device to which the scheme of the present invention is applied. The specific terminal device may include more or fewer components than those shown in the figure, or combine certain components, or have a different arrangement of components.

[0097] In one embodiment, a terminal device is provided. The terminal device includes a memory, a processor, and a matching program of a radio frequency matcher stored in the memory and executable on the processor. When the processor executes the matching program of the radio frequency matcher, the following operation instructions are implemented:

[0098] During a signal cycle of the radio frequency source, the capacitance value of the variable capacitor is fixed to the ideal capacitance value, and the ideal capacitance value is used to put the radio frequency matcher in a pre-matching state;

[0099] When the RF source sends a signal to the RF matcher fixed to the ideal capacitance value at the power within the signal period, determining the matching degree of the RF matcher;

[0100] According to the matching degree, the frequency of the RF source is adjusted to adjust the RF matcher from the pre-matching state to a target matching state, wherein the target matching state is used to enable the RF matcher to transmit the output signal power of the RF source to the load of the RF matcher to the maximum extent.

[0101] Those skilled in the art can understand that all or part of the processes in the above-mentioned embodiment methods can be completed by instructing the relevant hardware through a computer program, and the computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to memory, storage, database or other media used in the embodiments provided by the present invention can include non-volatile and / or volatile memory. Non-volatile memory can include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM) or flash memory. Volatile memory can include random access memory (RAM) or external cache memory. As an illustration and not limitation, RAM is available in many forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double data rate SDRAM (DDRSDRAM), enhanced SDRAM (ESDRAM), synchronous link (Synchlink) DRAM (SLDRAM), memory bus (Rambus) direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and memory bus dynamic RAM (RDRAM).

[0102] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A matching method for a radio frequency matching device, characterized in that: include: Constructing an ideal capacitance value of a variable capacitor of a radio frequency matcher, wherein the ideal capacitance value is used to put the radio frequency matcher in a pre-matching state, wherein the variable capacitor comprises a first variable capacitor and a second variable capacitor connected to the first variable capacitor, and the plurality of ideal capacitance sub-values ​​comprises a plurality of ideal capacitance sub-values ​​of the first variable capacitor and a plurality of ideal capacitance sub-values ​​of the second variable capacitor; During a signal cycle of the radio frequency source, fixing the capacitance value of the variable capacitor to the ideal capacitance value; When the RF source sends a signal to the RF matcher fixed to the ideal capacitance value at the power within the signal period, determining the matching degree of the RF matcher; According to the matching degree, by adjusting the frequency of the RF source, the RF matcher is adjusted from the pre-matching state to a target matching state, wherein the target matching state is used to enable the RF matcher to transmit the output signal power of the RF source to the load of the RF matcher to the maximum extent; The ideal capacitance value of the variable capacitor for constructing the radio frequency matching device includes: Determine an ideal capacitance sub-value of the radio frequency matcher corresponding to a plurality of power levels of the radio frequency source, wherein the ideal capacitance sub-value is used to make the radio frequency matcher present a matching state corresponding to the power level; Performing weighted calculation on a plurality of ideal capacitance sub-values ​​of the first variable capacitor to obtain an ideal capacitance value of the first variable capacitor; A weighted calculation is performed on several ideal capacitance sub-values ​​of the second variable capacitor to obtain an ideal capacitance value of the second variable capacitor.

2. The matching method of the radio frequency matching device according to claim 1, characterized in that: The determining of the ideal capacitance value of the radio frequency matcher corresponding to the plurality of power levels of the radio frequency source comprises: Determining a matching sub-degree of the radio frequency matcher corresponding to each of the power levels; The capacitance value of the variable capacitor is adjusted until each of the matching sub-levels reaches a matching sub-state corresponding to each of the power levels, thereby obtaining an ideal capacitance sub-value corresponding to a plurality of the power levels.

3. The matching method of the radio frequency matching device as claimed in claim 2, characterized in that: The determining of the matching sub-degree of the radio frequency matcher corresponding to each of the power levels comprises: Collecting the reflected power corresponding to each of the power levels and the capacitance impedance value of the RF matcher and the load impedance value of the load, wherein the reflected power is the power of the output signal power of the RF source that is not received by the load; Add the capacitance impedance value to the load impedance value to obtain a total impedance value; According to the total impedance value and the reflected power corresponding to each power level, a matching sub-degree corresponding to each power level is obtained.

4. The matching method of the radio frequency matching device as claimed in claim 3, characterized in that: The obtaining, according to the total impedance value and the reflected power corresponding to each power level, a matching degree corresponding to each power level, comprises: Subtract a set value from the total impedance value to obtain a first intermediate value; Adding the total impedance value to the set value to obtain a second intermediate value; A modulus of a ratio of the first intermediate value to the second intermediate value is determined, and the modulus and the reflected power corresponding to each of the power levels are used as the matching sub-degree corresponding to each of the power levels.

5. The matching method of the radio frequency matching device according to claim 1, characterized in that: The step of adjusting the frequency of the radio frequency source according to the matching degree to adjust the radio frequency matcher from the pre-matching state to the target matching state includes: According to the matching degree, determining each frequency value required to adjust to the target matching state; A maximum frequency value is selected from the frequency values, and the frequency of the radio frequency source is adjusted to the maximum frequency value.

6. A matching device for a radio frequency matching device, characterized in that: The device comprises the following components: An ideal capacitance value building module, used to build an ideal capacitance value of a variable capacitor of a radio frequency matcher, the ideal capacitance value is used to put the radio frequency matcher in a pre-matching state, the variable capacitor includes a first variable capacitor and a second variable capacitor connected to the first variable capacitor, and the plurality of ideal capacitance sub-values ​​include a plurality of ideal capacitance sub-values ​​of the first variable capacitor and a plurality of ideal capacitance sub-values ​​of the second variable capacitor; A pre-matching module, used to fix the capacitance value of the variable capacitor to the ideal capacitance value within a signal cycle of the radio frequency source; A matching degree calculation module, used for determining the matching degree of the RF matching device when the RF source sends a signal to the RF matching device fixed to the ideal capacitance value at the power within the signal period; A frequency adjustment module, configured to adjust the frequency of the RF source according to the matching degree so as to adjust the RF matcher from the pre-matching state to a target matching state, wherein the target matching state is configured to enable the RF matcher to transmit the output signal power of the RF source to the load of the RF matcher to the maximum extent; The ideal capacitance value of the variable capacitor for constructing the radio frequency matching device includes: Determine an ideal capacitance sub-value of the radio frequency matcher corresponding to a plurality of power levels of the radio frequency source, wherein the ideal capacitance sub-value is used to make the radio frequency matcher present a matching state corresponding to the power level; Performing weighted calculation on a plurality of ideal capacitance sub-values ​​of the first variable capacitor to obtain an ideal capacitance value of the first variable capacitor; A weighted calculation is performed on several ideal capacitance sub-values ​​of the second variable capacitor to obtain an ideal capacitance value of the second variable capacitor.

7. A terminal device, characterized in that: The terminal device includes a memory, a processor, and a matching program of the RF matcher stored in the memory and executable on the processor. When the processor executes the matching program of the RF matcher, the steps of the matching method of the RF matcher as described in any one of claims 1 to 5 are implemented.

8. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a matching program for a radio frequency matcher. When the matching program for a radio frequency matcher is executed by a processor, the steps of the matching method for a radio frequency matcher according to any one of claims 1 to 5 are implemented.

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