A device for producing high-purity aluminum etching liquid for TFT

Abstract

The invention discloses a production device for high-purity aluminum etching liquid for TFT, which belongs to the field of chemical production technology, including a mixing tank, a first sleeve, a spline shaft, a shield, a driving member, a first actuator, a gear pump, a second actuator, a power conversion assembly, a third gear, a central stirring assembly, a rotating plate, a limit assembly and a self-rotating stirring mechanism. Through the above-mentioned method, the central stirring assembly of the present invention can rotate and stir the raw materials, and can also move the stirring raw materials up and down to avoid the occurrence of eddy currents, thereby fully mixing the raw materials in the mixing tank, and the mixing effect is good; the driving member drives the second actuator to operate through the power conversion assembly, and the second actuator drives the gear pump to operate, and the gear pump increases the outflow speed of the etching liquid in the mixing tank, thereby improving production efficiency.

Description

Technical Field

[0001] The invention relates to the technical field of chemical production, and in particular to a production device for high-purity aluminum etching liquid for TFT. Background Art

[0002] TFT (Thin Film Transistor) is a key component widely used in flat panel display technology. In the TFT manufacturing process, etching liquid is required to selectively remove the areas not protected by photoresist or other masking materials to accurately form the required circuit pattern.

[0003] The existing TFT high-purity aluminum etching liquid production device is to put various raw materials into the mixing barrel in sequence according to the determined formula, and then start the stirring device to stir the raw materials in the mixing barrel to make them fully mixed and react chemically to generate etching liquid. However, it has defects. There are problems such as uneven stirring and poor mixing effect during the stirring process. After the etching liquid is produced, it flows out naturally due to gravity. When the inner diameter of the feeding pipe is fixed, the flow rate is fixed, and it is impossible to discharge the material quickly, which affects the production efficiency. Summary of the invention

[0004] In view of the above-mentioned shortcomings of the prior art, the present invention provides a device for producing high-purity aluminum etching solution for TFT.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solutions:

[0006] A device for producing high-purity aluminum etching liquid for TFT, comprising:

[0007] Mixing tank;

[0008] A first shaft sleeve, rotatably disposed on the axis of the mixing tank;

[0009] A spline shaft, slidably connected to the first sleeve;

[0010] A protective cover, fixedly connected to the mixing tank;

[0011] A driving member, fixedly connected to the shield;

[0012] A first actuator is connected to the mixing tank and the shield, and is connected to the spline shaft, and is used to drive the spline shaft to rotate and move up and down; the first actuator includes: a rotating assembly connected to the spline shaft and the shield, and is used to drive the spline shaft to rotate; a moving assembly connected to the spline shaft and the shield, and is used to drive the spline shaft to move up and down; a driving assembly, whose two ends are respectively connected to the mixing tank and the shield, and the driving assembly is used to drive the rotating assembly and the moving assembly; a gear pump, whose feed end is fixedly connected to the mixing tank, and whose discharge end is connected to the discharge pipe, and the gear pump is used to increase the outflow speed of the etching liquid in the mixing tank;

[0013] A second actuator is connected to the mixing tank and to the drive shaft of the gear pump, and the second actuator is used to drive the gear pump to operate; a power conversion assembly is connected to the shield and to the driving member, and the power conversion assembly is used to connect the driving member and the driving assembly or to connect the driving member and the second actuator; a third gear is sleeved on the outside of the spline shaft and fixedly connected to the mixing tank through a fixing rod; a central stirring assembly is coaxially fixedly connected to the spline shaft; a rotating plate is slidably connected to the spline shaft; a limit assembly is connected to the mixing tank and the rotating plate to guide and support the rotating plate;

[0014] The self-rotating stirring mechanism is rotatably arranged on the rotating plate and evenly distributed around the circumference, and the self-rotating stirring mechanism is connected to the third gear.

[0015] Furthermore, the power conversion assembly includes:

[0016] A sixth rotating shaft, fixedly connected to the output end of the driving member;

[0017] a seventh gear, mounted on the sixth rotating shaft;

[0018] Two first mounting plates are provided, and one end of each of the first mounting plates is fixedly connected to the inner wall of the shield;

[0019] An arc-shaped limiting frame, fixedly connected to the other end of the first mounting plate;

[0020] The slider is connected to the arc-shaped limit frame in a limited sliding manner, and the axis of the moving track is coaxially distributed with the axis of the seventh gear;

[0021] a seventh rotating shaft, rotatably connected to the slider;

[0022] The eighth gear is installed on the seventh rotating shaft and meshed with the seventh gear. The eighth gear is connected to the second actuator or the driving assembly.

[0023] Furthermore, the driving assembly includes:

[0024] A worm, both ends of which are rotatably connected to the shield and the mixing tank, and are also connected to the moving assembly;

[0025] The first gear is mounted on the worm and connected to the rotating assembly. When in the first extreme position, the first gear is meshed and connected with the eighth gear.

[0026] Furthermore, the mobile component includes:

[0027] A first rotating shaft, one end of which is rotatably connected to the shield;

[0028] A worm wheel is mounted on the first rotating shaft and meshedly connected with the worm;

[0029] A first rotating plate, fixedly connected to the other end of the first rotating shaft;

[0030] A connecting block, fixedly connected to the spline shaft;

[0031] A rack fixedly connected to the connecting block;

[0032] A second rotating shaft, one end of which is rotatably connected to the shield;

[0033] A toothless gear is mounted on the second rotating shaft and meshed with the rack;

[0034] A second rotating plate, fixedly connected to the other end of the second rotating shaft;

[0035] The connecting rod has two ends which are rotatably connected to the first rotating plate and the second rotating plate respectively.

[0036] Furthermore, the rotating assembly includes:

[0037] A fixing plate fixedly connected to the shield;

[0038] A second sleeve is rotatably connected to the fixed plate and slidably connected to the spline shaft;

[0039] The second gear is installed on the second shaft sleeve and is meshed with the first gear.

[0040] Furthermore, the central stirring assembly comprises:

[0041] A fixed block, coaxially and fixedly connected with the spline shaft;

[0042] A first stirring rod, coaxially and fixedly connected to the fixed block;

[0043] The first stirring plates are fixedly connected to the first stirring rod and are evenly distributed around the circumference.

[0044] Furthermore, the limit assembly includes:

[0045] Connecting rods, which are provided in multiple groups and one end of which is fixedly connected to the rotating plate;

[0046] The arc-shaped plate is fixedly connected to the other end of the connecting rod;

[0047] The installation groove is provided on the inner wall of the mixing tank;

[0048] The rolling balls are evenly arranged in the installation grooves and abut against the bottom surface of the arc plate.

[0049] Furthermore, the self-rotating stirring mechanism comprises:

[0050] A gear driving assembly is rotatably connected to the rotating plate and is connected to the third gear;

[0051] A third rotating shaft, one end of which is rotatably connected to the rotating plate;

[0052] a sixth gear, mounted on the third rotating shaft and connected to the gear driving assembly;

[0053] A connecting plate, one end of which is fixedly connected to the other end of the third rotating shaft;

[0054] A second stirring rod is fixedly connected to the other end of the connecting plate;

[0055] The second stirring plates are fixedly connected to the second stirring rod and are evenly distributed around the circumference.

[0056] Furthermore, the gear drive assembly includes:

[0057] A fourth rotating shaft passes through the rotating plate and is rotatably connected to the rotating plate;

[0058] A fourth gear is mounted on one end of the fourth rotating shaft and is meshed with the third gear;

[0059] The fifth gear is installed on the other end of the fourth rotating shaft and is meshed with the sixth gear.

[0060] Furthermore, the second actuator includes:

[0061] an eighth rotating shaft, rotatably connected to the mixing tank;

[0062] The ninth gear is mounted on the eighth rotating shaft and is meshed with the eighth gear during unloading;

[0063] A second mounting plate, fixedly connected to the mixing tank;

[0064] a ninth rotating shaft, rotatably connected to the second mounting plate;

[0065] A pulley assembly is connected to the eighth rotating shaft and the ninth rotating shaft respectively;

[0066] A first bevel gear is mounted on the ninth rotating shaft;

[0067] a tenth rotating shaft, fixedly connected to a driving shaft of the gear pump;

[0068] The second bevel gear is installed on the tenth rotating shaft and is meshed with the first bevel gear.

[0069] Compared with the prior art, the present invention has the following beneficial effects:

[0070] In an embodiment of the present invention, various raw materials are put into the mixing tank in sequence according to a determined formula. When the power conversion component is connected to the driving component, the driving member drives the driving component to operate through the power conversion component, the driving component drives the rotating component to operate, the rotating component drives the spline shaft to rotate, and the driving component simultaneously drives the moving component to operate, the moving component drives the spline shaft to move up and down, the rotation and up and down movement of the spline shaft drives the central stirring component to rotate and move up and down. Compared with the prior art which only rotates for stirring, the central stirring component can not only rotate to stir the raw materials, but also move up and down to stir the raw materials, thereby avoiding the occurrence of vortices, thereby fully mixing the raw materials in the mixing tank and achieving a good mixing effect.

[0071] When the spline shaft rotates, the spline shaft drives the rotating plate to rotate. Since the rotating plate is connected to the mixing tank through the limit assembly at this time, the height is kept unchanged. Therefore, when the rotating plate drives the self-rotating stirring mechanism to rotate, the self-rotating stirring mechanism produces a height difference relative to the central stirring assembly, thereby increasing the turbulence effect. At the same time, the self-rotating stirring mechanism rolls along the third gear, thereby causing the self-rotating stirring mechanism to rotate, further increasing the turbulence effect produced with the central stirring assembly, thereby achieving the effect of fully stirring and mixing the raw materials in the mixing tank; after the stirring is completed to generate the etching liquid, the power conversion assembly switches the state, from the power conversion assembly connected to the drive assembly to the power conversion assembly connected to the second actuator, so that the driving member drives the second actuator to operate through the power conversion assembly, and the second actuator drives the gear pump to operate. The gear pump increases the outflow speed of the etching liquid in the mixing tank, thereby improving production efficiency, and since the driving assembly and the second actuator are both driven by the driving member, the number of driving members is reduced, thereby reducing costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0072] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0073] Figure 1 A cross-sectional view of a production device for high-purity aluminum etching solution for TFT of the present invention Figure 1 .

[0074] Figure 2 A cross-sectional view of a production device for high-purity aluminum etching solution for TFT of the present invention Figure 2 .

[0075] Figure 3 A cross-sectional view of a production device for high-purity aluminum etching solution for TFT of the present invention Figure 3 .

[0076] Figure 4 for Figure 3 Enlarged view of point B in the middle.

[0077] Figure 5 The present invention is a schematic structural diagram of a device for producing high-purity aluminum etching solution for TFT.

[0078] Figure 6 The present invention is a schematic diagram of the partial connection structure of a shield, a first actuator, an exhaust assembly and a power switching assembly in a production device for high-purity aluminum etching solution for TFT of the present invention.

[0079] Figure 7 The present invention is a schematic diagram of the connection structure of a spline shaft, a third gear, a central stirring assembly, a rotating plate, a limit assembly and a self-rotating stirring mechanism in a production device for high-purity aluminum etching liquid for TFT of the present invention.

[0080] Figure 8 The present invention is a schematic diagram of the connection structure between a high-purity aluminum etching solution production device for TFT, a feed pipe and a storage tank.

[0081] The numbers in the figure represent:

[0082] 1-mixing tank; 2-spline shaft; 3-first actuator; 31-driving assembly; 311-worm; 312-first gear; 32-rotating assembly; 321-fixed plate; 322-second sleeve; 323-second gear; 33-moving assembly; 331-first shaft; 332-worm gear; 333-first rotating plate; 334-connecting block; 335-rack; 336-second shaft; 337-toothless gear; 338-second rotating plate; 339-connecting rod; 4-third gear; 5-central stirring assembly; 51-fixed block; 52-first stirring rod; 53-first stirring plate; 6-rotating plate; 7-limiting assembly; 71-connecting rod; 72-arc plate; 73-mounting groove; 74-rolling ball; 8-self-rotating stirring mechanism; 81-fourth gear; 82-fourth shaft; 83-fifth gear; 84- The third rotating shaft; 85-the sixth gear; 86-the connecting plate; 87-the second stirring rod; 88-the second stirring plate; 9-the exhaust assembly; 91-the piston rod; 92-the exhaust cylinder; 93-the exhaust pipe; 94-the piston block; 95-the air supply channel; 10-the first sleeve; 11-the power conversion assembly; 111-the sixth rotating shaft; 112-the seventh gear; 113-the arc limit frame; 114-the first mounting plate; 115-the slider; 116-the seventh rotating shaft; 117-the eighth gear; 12-the second actuator; 121-the eighth rotating shaft; 122-the ninth gear; 123-the second mounting plate; 124-the ninth rotating shaft; 125-the pulley assembly; 126-the first bevel gear; 127-the tenth rotating shaft; 128-the second bevel gear; 13-the gear pump; 14-the feeding pipe; 15-the storage tank; 16-the driving member; 17-the shield. DETAILED DESCRIPTION

[0083] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0084] Embodiment 1

[0085] In some embodiments, please refer to the attached instructions. Figure 1 and Figure 4 , a device for producing high-purity aluminum etching solution for TFT, comprising:

[0086] Mixing tank 1;

[0087] A first shaft sleeve 10 is rotatably disposed on the axis of the mixing tank 1;

[0088] The spline shaft 2 is slidably connected with the first sleeve 10;

[0089] A protective cover 17 is fixedly connected to the mixing tank 1;

[0090] A driving member 16 is fixedly connected to the shield 17;

[0091] The first actuator 3 is connected to the mixing tank 1 and the shield 17, and is connected to the spline shaft 2, and the first actuator 3 is used to drive the spline shaft 2 to rotate and move up and down; the first actuator 3 includes: a rotating component 32, connected to the spline shaft 2 and the shield 17, and the rotating component 32 is used to drive the spline shaft 2 to rotate; a moving component 33, connected to the spline shaft 2 and the shield 17, and the moving component 33 is used to drive the spline shaft 2 to move up and down; a driving component 31, the two ends of which are respectively connected to the mixing tank 1 and the shield 17, and the driving component 31 is used to drive the rotating component 32 and the moving component 33; a gear pump 13, the feed end is fixedly connected to the mixing tank 1, and the discharge end is connected to the discharge pipe 14, and the gear pump 13 is used to increase the outflow speed of the etching liquid in the mixing tank 1;

[0092] The second actuator 12 is connected to the mixing tank 1 and to the driving shaft of the gear pump 13, and the second actuator 12 is used to drive the gear pump 13 to operate; the power conversion assembly 11 is connected to the shield 17 and to the driving member 16, and the power conversion assembly 11 is used to connect the driving member 16 and the driving assembly 31 or to connect the driving member 16 and the second actuator 12; the third gear 4 is sleeved on the outside of the spline shaft 2 and fixedly connected to the mixing tank 1 through a fixing rod; the central stirring assembly 5 is coaxially fixedly connected to the spline shaft 2; the rotating plate 6 is slidably connected to the spline shaft 2; the limit assembly 7 is connected to the mixing tank 1 and the rotating plate 6 to guide and support the rotating plate 6;

[0093] The self-rotating stirring mechanism 8 is rotatably disposed on the rotating plate 6 and evenly distributed around the circumference. The self-rotating stirring mechanism 8 is connected to the third gear 4 .

[0094] In the embodiment of the present invention, various raw materials are put into the mixing tank 1 in sequence according to the determined formula. When the power conversion component 11 is connected to the driving component 31, the driving member 16 drives the driving component 31 to operate through the power conversion component 11, the driving component 31 drives the rotating component 32 to operate, the rotating component 32 drives the spline shaft 2 to rotate, and the driving component 31 simultaneously drives the moving component 33 to operate, the moving component 33 drives the spline shaft 2 to move up and down, and the rotation and up and down movement of the spline shaft 2 drives the central stirring component 5 to rotate and move up and down. Compared with the prior art in which only rotation is used for stirring, the central stirring component 5 can not only rotate and stir the raw materials, but also move the raw materials up and down to avoid the occurrence of vortexes, thereby fully mixing the raw materials in the mixing tank 1 and achieving a good mixing effect; when the spline shaft 2 rotates, the spline shaft 2 drives the rotating plate 6 to rotate. Since the rotating plate 6 is connected to the mixing tank 1 through the limiting component 7 at this time, so as to keep the height unchanged, the rotating plate 6 drives When the self-rotating stirring mechanism 8 rotates, a height difference is generated between the self-rotating stirring mechanism 8 and the central stirring component 5, thereby increasing the turbulent effect. At the same time, the self-rotating stirring mechanism 8 rolls along the third gear 4, thereby causing the self-rotating stirring mechanism 8 to rotate, further increasing the turbulent effect generated with the central stirring component 5, and achieving the effect of fully stirring and mixing the raw materials in the mixing tank 1; after the stirring is completed to generate the etching liquid, the power conversion component 11 switches the state, from the power conversion component 11 connected to the driving component 31 to the power conversion component 11 connected to the second actuator 12, so that the driving member 16 drives the second actuator 12 to operate through the power conversion component 11, and the second actuator 12 drives the gear pump 13 to operate, and the gear pump 13 increases the outflow speed of the etching liquid in the mixing tank 1, thereby improving the production efficiency, and because the driving component 31 and the second actuator 12 are both driven by the driving member 16, the number of the driving member 16 is reduced, thereby reducing the cost.

[0095] It should be noted that the driving member 16 is a motor.

[0096] like Figure 8 As shown, in the prior art, the production device is elevated and the etching liquid is discharged naturally by utilizing the effect of gravity. When the present device is in use, the discharge end of the gear pump 13 and the storage tank 15 are connected via the discharge pipe 14. There is no need to elevate the production device, and the gear pump 13 accelerates the discharge speed of the etching liquid, thereby improving production efficiency. When the present device needs to be transferred, only the discharge pipe 14 needs to be removed, which is simple and convenient.

[0097] like Figure 4 and Figure 6 As shown, as another preferred embodiment of the present invention, the power conversion assembly 11 includes:

[0098] The sixth rotating shaft 111 is fixedly connected to the output end of the driving member 16;

[0099] A seventh gear 112 is mounted on the sixth rotating shaft 111;

[0100] Two first mounting plates 114 are provided, and one end of each of the first mounting plates 114 is fixedly connected to the inner wall of the shield 17;

[0101] The arc-shaped limiting frame 113 is fixedly connected to the other end of the first mounting plate 114;

[0102] The slider 115 is connected to the arc-shaped limit frame 113 in a limited sliding manner, and the axis of the moving track is coaxially distributed with the axis of the seventh gear 112;

[0103] A seventh rotating shaft 116 is rotatably connected to the slider 115;

[0104] The eighth gear 117 is mounted on the seventh rotating shaft 116 and meshed with the seventh gear 112 . The eighth gear 117 is connected to the second actuator 12 or the driving assembly 31 .

[0105] In the embodiment of the present invention, the driving member 16 rotates forward to drive the sixth rotating shaft 111 to rotate, the sixth rotating shaft 111 drives the seventh gear 112 to rotate, the seventh gear 112 drives the eighth gear 117 to move, the eighth gear 117 drives the seventh rotating shaft 116 to move, and the seventh rotating shaft 116 drives the slider 115 to slide along the arc-shaped limit frame 113 until the slider 115 moves to the first extreme position. At this time, the eighth gear 117 is connected to the driving component 31, and because the slider 115 cannot continue to move after moving to the first extreme position, the eighth gear 117 cannot move under the limiting action of the slider 115 and the seventh rotating shaft 116. Therefore, the seventh gear 112 drives the eighth gear 117 to rotate, and the eighth gear 117 drives the driving component 31 to operate.

[0106] In the embodiment of the present invention, the driving member 16 reverses to drive the sixth rotating shaft 111 to rotate, the sixth rotating shaft 111 drives the seventh gear 112 to rotate, the seventh gear 112 drives the eighth gear 117 to move, the eighth gear 117 drives the seventh rotating shaft 116 to move, and the seventh rotating shaft 116 drives the slider 115 to slide along the arc-shaped limit frame 113 until the slider 115 moves to the second extreme position. At this time, the eighth gear 117 is connected to the second actuator 12, and because the slider 115 cannot continue to move after moving to the second extreme position, the eighth gear 117 cannot move under the limiting action of the slider 115 and the seventh rotating shaft 116. Therefore, the seventh gear 112 drives the eighth gear 117 to rotate, and the eighth gear 117 drives the second actuator 12 to operate. The driving member 16 controls the eighth gear 117 to be connected to the driving component 31 or the second actuator 12 by forward or reverse rotation, thereby reducing the difficulty of control.

[0107] like Figure 6As shown, as another preferred embodiment of the present invention, the driving assembly 31 includes:

[0108] The worm 311 has two ends which are rotatably connected to the shield 17 and the mixing tank 1 respectively, and is connected to the moving assembly 33;

[0109] The first gear 312 is mounted on the worm 311 and connected to the rotating assembly 32 . When in the first extreme position, the first gear 312 is meshed and connected with the eighth gear 117 .

[0110] In the embodiment of the present invention, when the slider 115 moves to the first limit position, the eighth gear 117 rotates to drive the first gear 312 to rotate, and the first gear 312 drives the worm 311 to rotate.

[0111] like Figure 6 As shown, as another preferred embodiment of the present invention, the moving component 33 includes:

[0112] A first rotating shaft 331, one end of which is rotatably connected to the shield 17;

[0113] The worm wheel 332 is mounted on the first rotating shaft 331 and meshed with the worm 311;

[0114] A first rotating plate 333, fixedly connected to the other end of the first rotating shaft 331;

[0115] A connecting block 334 is fixedly connected to the spline shaft 2;

[0116] The rack 335 is fixedly connected to the connecting block 334;

[0117] A second rotating shaft 336, one end of which is rotatably connected to the shield 17;

[0118] The toothless gear 337 is mounted on the second rotating shaft 336 and meshed with the rack 335;

[0119] A second rotating plate 338 is fixedly connected to the other end of the second rotating shaft 336;

[0120] The connecting rod 339 has two ends rotatably connected to the first rotating plate 333 and the second rotating plate 338 respectively.

[0121] In the embodiment of the present invention, when the worm 311 rotates, the worm 311 drives the worm wheel 332 to rotate, the worm wheel 332 drives the first rotating shaft 331 to rotate, the first rotating shaft 331 drives the first rotating plate 333 to rotate, the first rotating plate 333 drives the connecting rod 339 to move, the connecting rod 339 drives the second rotating plate 338 to rotate, the second rotating plate 338 drives the second rotating shaft 336 to rotate, the second rotating shaft 336 drives the toothless gear 337 to swing back and forth according to a preset arc, the toothless gear 337 drives the rack 335 to move up and down, the rack 335 drives the connecting block 334 to move up and down, and the connecting block 334 drives the spline shaft 2 to move up and down.

[0122] like Figure 6 As shown, as another preferred embodiment of the present invention, the rotating assembly 32 includes:

[0123] A fixing plate 321, fixedly connected to the shield 17;

[0124] The second shaft sleeve 322 is rotatably connected to the fixing plate 321 and is slidably connected to the spline shaft 2;

[0125] The second gear 323 is mounted on the second shaft sleeve 322 and meshed with the first gear 312 .

[0126] In the embodiment of the present invention, when the first gear 312 rotates, the first gear 312 drives the second gear 323 to rotate, the second gear 323 drives the second sleeve 322 to rotate, and the second sleeve 322 drives the spline shaft 2 to rotate. Under the limiting action of the fixing plate 321 and the second sleeve 322, the up and down movement of the spline shaft 2 does not drive the second gear 323 to move up and down, thereby avoiding the situation where the second gear 323 is separated from the first gear 312. The device can not only drive the spline shaft 2 to move up and down, but also drive the spline shaft 2 to rotate at the same time. The structure is ingenious and the cost is reduced.

[0127] It should be noted that the driving assembly 31, the rotating assembly 32 and the moving assembly 33 can also achieve the same effect by cooperating with a cylinder and a motor, but the effect is not as good as the above technical solution.

[0128] like Figure 3 As shown, as another preferred embodiment of the present invention, the central stirring assembly 5 includes:

[0129] A fixed block 51 is coaxially fixedly connected to the spline shaft 2;

[0130] The first stirring rod 52 is coaxially fixedly connected to the fixing block 51;

[0131] The first stirring plates 53 are fixedly connected to the first stirring rod 52 and are evenly distributed around the circumference.

[0132] In an embodiment of the present invention, when the spline shaft 2 rotates and moves up and down, the spline shaft 2 drives the fixed block 51 to rotate and move up and down, the fixed block 51 drives the first stirring rod 52 to rotate and move up and down, and the first stirring rod 52 drives the first stirring plate 53 to rotate and move up and down, thereby fully mixing the raw materials in the mixing tank 1.

[0133] like Figure 2 and Figure 7 As shown, as another preferred embodiment of the present invention, the limiting component 7 includes:

[0134] The connecting rods 71 ​​are provided in multiple groups, and one end of each of the connecting rods 71 ​​is fixedly connected to the rotating plate 6;

[0135] The arc plate 72 is fixedly connected to the other end of the connecting rod 71;

[0136] The mounting groove 73 is provided on the inner wall of the mixing tank 1;

[0137] The rolling balls 74 are evenly arranged in the mounting grooves 73 and abut against the bottom surface of the arc plate 72 .

[0138] In the embodiment of the present invention, when the rotating plate 6 rotates, the rotating plate 6 drives the connecting rod 71 to move with the spline shaft 2 as the axis, the connecting rod 71 drives the arc plate 72 to move along the ball 74, and the arc plate 72 drives the ball 74 to rotate. By providing the ball 74, the friction between the arc plate 72 and the side wall of the mounting groove 73 is reduced, thereby extending the service life of the device. Moreover, since the ball 74 abuts against the bottom surface of the arc plate 72, the arc plate 72 is connected to the rotating plate 6 through the connecting rod 71, thereby supporting and guiding the rotating plate 6 and reducing the gravity on the spline shaft 2 at the same time.

[0139] like Figure 7 As shown, as another preferred embodiment of the present invention, the self-rotating stirring mechanism 8 comprises:

[0140] A gear driving assembly is rotatably connected to the rotating plate 6 and connected to the third gear 4;

[0141] A third rotating shaft 84, one end of which is rotatably connected to the rotating plate 6;

[0142] The sixth gear 85 is mounted on the third rotating shaft 84 and connected to the gear driving assembly;

[0143] A connecting plate 86, one end of which is fixedly connected to the other end of the third rotating shaft 84;

[0144] A second stirring rod 87 is fixedly connected to the other end of the connecting plate 86;

[0145] The second stirring plates 88 are fixedly connected to the second stirring rod 87 and are evenly distributed around the circumference;

[0146] The gear drive assembly comprises:

[0147] A fourth rotating shaft 82 passes through the rotating plate 6 and is rotatably connected to the rotating plate 6;

[0148] The fourth gear 81 is mounted on one end of the fourth rotating shaft 82 and is meshed with the third gear 4;

[0149] The fifth gear 83 is mounted on the other end of the fourth rotating shaft 82 and is meshed with the sixth gear 85 .

[0150] In the embodiment of the present invention, when the spline shaft 2 rotates, the spline shaft 2 drives the rotating plate 6 to rotate, the rotating plate 6 drives the third rotating shaft 84 to move with the spline shaft 2 as the axis, the third rotating shaft 84 drives the connecting plate 86 to move with the spline shaft 2 as the axis, the connecting plate 86 drives the second stirring rod 87 to move with the spline shaft 2 as the axis, and the second stirring rod 87 drives the second stirring plate 88 to move with the spline shaft 2 as the axis; when the rotating plate 6 rotates, the rotating plate 6 drives the fourth gear 81 to roll along the third gear 4, the fourth gear 81 drives the fourth rotating shaft 82 to rotate, and the fourth rotating shaft 82 drives the fifth gear 83 rotates, the fifth gear 83 drives the sixth gear 85 to rotate, the sixth gear 85 drives the third rotating shaft 84 to rotate, the third rotating shaft 84 drives the connecting plate 86 to rotate, the connecting plate 86 drives the second stirring rod 87 to move with the third rotating shaft 84 as the axis, the second stirring rod 87 drives the second stirring plate 88 to move with the third rotating shaft 84 as the axis, the second stirring rod 87 and the second stirring plate 88 can not only move with the spline shaft 2 as the axis to stir and mix the raw materials in the mixing tank 1, but also move with the third rotating shaft 84 as the axis to stir and mix the raw materials in the mixing tank 1, and the mixing effect is good.

[0151] It should be noted that the first stirring plate 53 and the second stirring plate 88 are both equipped with a heating device for heating the raw materials, and the heating device can be an electric heating wire.

[0152] It should be noted that the stirring path of the second stirring rod 87 and the second stirring plate 88 does not overlap with the stirring path of the first stirring rod 52 and the first stirring plate 53 .

[0153] like Figure 5 As shown, as another preferred embodiment of the present invention, the second actuator 12 includes:

[0154] An eighth rotating shaft 121 is rotatably connected to the mixing tank 1;

[0155] The ninth gear 122 is mounted on the eighth rotating shaft 121 and is meshed with the eighth gear 117 during material unloading;

[0156] The second mounting plate 123 is fixedly connected to the mixing tank 1;

[0157] A ninth rotating shaft 124, rotatably connected to the second mounting plate 123;

[0158] The pulley assembly 125 is connected to the eighth rotating shaft 121 and the ninth rotating shaft 124 respectively;

[0159] The first bevel gear 126 is mounted on the ninth rotating shaft 124;

[0160] The tenth rotating shaft 127 is fixedly connected to the driving shaft of the gear pump 13;

[0161] The second bevel gear 128 is mounted on the tenth rotating shaft 127 and meshed with the first bevel gear 126 .

[0162] In the embodiment of the present invention, when unloading, the eighth gear 117 rotates to drive the ninth gear 122 to rotate, the ninth gear 122 drives the eighth rotating shaft 121 to rotate, the eighth rotating shaft 121 drives the ninth rotating shaft 124 to rotate through the pulley assembly 125, the ninth rotating shaft 124 drives the first bevel gear 126 to rotate, the first bevel gear 126 drives the second bevel gear 128 to rotate, the second bevel gear 128 drives the tenth rotating shaft 127 to rotate, and the tenth rotating shaft 127 drives the gear pump 13 to operate, thereby increasing the outflow speed of the etching liquid in the mixing tank 1.

[0163] It should be noted that the pulley assembly 125 includes two pulleys and a belt, one pulley is fixedly connected to the eighth rotating shaft 121, and the other pulley is fixedly connected to the ninth rotating shaft 124, and the belt is sleeved on the two pulleys.

[0164] like Figure 4 As shown, as another preferred embodiment of the present invention, the top end of the spline shaft 2 is fixedly connected to an exhaust component 9 for discharging the gas generated by the raw material reaction in the mixing tank 1, and the exhaust component 9 includes:

[0165] The piston rod 91 is coaxially fixedly connected with the spline shaft 2;

[0166] The exhaust pipe 92 is fixedly connected to the top of the shield 17;

[0167] An exhaust pipe 93 is fixedly connected to the exhaust pipe 92;

[0168] The piston block 94 is fixedly connected to the piston rod 91 and slidably connected to the inner wall of the exhaust cylinder 92. The piston block 94 divides the cavity in the exhaust cylinder 92 into an upper cavity and a lower cavity.

[0169] The air delivery passage 95 is provided on the piston block 94, the piston rod 91 and the spline shaft 2, and one end of the air delivery passage extends into the upper cavity, and the other end of the air delivery passage extends to the end of the spline shaft 2 located in the mixing tank 1;

[0170] One-way valves are installed in the exhaust pipe 93 and the air supply passage 95.

[0171] In an embodiment of the present invention, various raw materials react in the mixing tank 1 to generate gas. When the spline shaft 2 moves downward, the spline shaft 2 drives the piston rod 91 to move downward, and the piston rod 91 drives the piston block 94 to move downward. The total volume in the upper cavity of the exhaust pipe 92 increases, thereby generating a negative pressure. The gas in the mixing tank 1 is sucked into the upper cavity through the air supply passage 95. When the spline shaft 2 moves upward, the spline shaft 2 drives the piston rod 91 to move upward, and the piston rod 91 drives the piston block 94 to move upward, and the gas in the upper cavity is discharged from the exhaust pipe 93. As the reaction proceeds, the gas in the mixing tank 1 continues to accumulate and the pressure gradually increases. In order to avoid the pressure exceeding the pressure bearing capacity of the mixing tank 1, resulting in the problem of rupture or explosion of the mixing tank 1, the exhaust assembly 9 is provided to discharge the gas generated by the raw material reaction out of the mixing tank 1, thereby preventing the mixing tank 1 from rupture or explosion. At the same time, the problem of accelerated aging and damage of the mixing tank 1 due to long-term high pressure is avoided, thereby increasing the service life.

[0172] The present invention achieves the following technical effects by providing a production device for high-purity aluminum etching solution for TFT:

[0173] According to the determined formula, various raw materials are put into the mixing tank 1 in sequence, the driving member 16 rotates forward to drive the sixth shaft 111 to rotate, the sixth shaft 111 drives the seventh gear 112 to rotate, the seventh gear 112 drives the eighth gear 117 to move, the eighth gear 117 drives the seventh shaft 116 to move, and the seventh shaft 116 drives the slider 115 to slide along the arc-shaped limit frame 113 until the slider 115 moves to the first limit position. At this time, the eighth gear 117 is connected to the first gear 312, and because the slider 115 cannot continue to move after moving to the first limit position, the eighth gear 117 cannot move under the limiting action of the slider 115 and the seventh shaft 116, so the seventh gear 112 drives the eighth gear 117 to rotate, and the eighth gear 117 drives the first gear 312 to rotate.

[0174] When the first gear 312 rotates, the first gear 312 drives the worm 311 to rotate, the worm 311 drives the worm wheel 332 to rotate, the worm wheel 332 drives the first rotating shaft 331 to rotate, the first rotating shaft 331 drives the first rotating plate 333 to rotate, the first rotating plate 333 drives the connecting rod 339 to move, the connecting rod 339 drives the second rotating plate 338 to rotate, the second rotating plate 338 drives the second rotating shaft 336 to rotate, the second rotating shaft 336 drives the toothless gear 337 to swing back and forth according to a preset arc, the toothless gear 337 drives the rack 335 to move up and down, and the rack 335 drives the connecting block 334 to move up and down The connecting block 334 drives the spline shaft 2 to move up and down; when the first gear 312 rotates, the first gear 312 drives the second gear 323 to rotate, the second gear 323 drives the second sleeve 322 to rotate, and the second sleeve 322 drives the spline shaft 2 to rotate. Under the limiting action of the fixing plate 321 and the second sleeve 322, the up and down movement of the spline shaft 2 does not drive the second gear 323 to move up and down, thereby avoiding the situation that the second gear 323 is separated from the first gear 312. The device can not only drive the spline shaft 2 to move up and down, but also drive the spline shaft 2 to rotate at the same time, with a clever structure and reduced cost.

[0175] When the spline shaft 2 rotates and moves up and down, the spline shaft 2 drives the fixed block 51 to rotate and move up and down, the fixed block 51 drives the first stirring rod 52 to rotate and move up and down, and the first stirring rod 52 drives the first stirring plate 53 to rotate and move up and down. Compared with the prior art which only rotates for stirring, the central stirring assembly 5 can not only rotate to stir the raw materials, but also move the raw materials up and down to avoid the occurrence of vortexes, thereby fully mixing the raw materials in the mixing tank 1 and achieving a good mixing effect.

[0176] When the spline shaft 2 rotates, the spline shaft 2 drives the rotating plate 6 to rotate, and the rotating plate 6 drives the connecting rod 71 to move with the spline shaft 2 as the axis, and the connecting rod 71 drives the arc plate 72 to move along the ball 74, and the arc plate 72 drives the ball 74 to rotate. By providing the ball 74, the friction between the arc plate 72 and the side wall of the installation groove 73 is reduced, thereby extending the service life of the device. Moreover, since the ball 74 abuts against the bottom surface of the arc plate 72, the arc plate 72 is connected to the rotating plate 6 through the connecting rod 71, thereby achieving support and limitation of the rotating plate 6, and at the same time reducing the gravity on the spline shaft 2.

[0177] When the rotating plate 6 rotates, the rotating plate 6 drives the third rotating shaft 84 to move with the spline shaft 2 as the axis, the third rotating shaft 84 drives the connecting plate 86 to move with the spline shaft 2 as the axis, the connecting plate 86 drives the second stirring rod 87 to move with the spline shaft 2 as the axis, and the second stirring rod 87 drives the second stirring plate 88 to move with the spline shaft 2 as the axis; when the rotating plate 6 rotates, the rotating plate 6 drives the fourth gear 81 to roll along the third gear 4, the fourth gear 81 drives the fourth rotating shaft 82 to rotate, the fourth rotating shaft 82 drives the fifth gear 83 to rotate, and the fifth gear 83 Drive the sixth gear 85 to rotate, the sixth gear 85 drives the third rotating shaft 84 to rotate, the third rotating shaft 84 drives the connecting plate 86 to rotate, the connecting plate 86 drives the second stirring rod 87 to move with the third rotating shaft 84 as the axis, the second stirring rod 87 drives the second stirring plate 88 to move with the third rotating shaft 84 as the axis, the second stirring rod 87 and the second stirring plate 88 can not only move with the spline shaft 2 as the axis to stir and mix the raw materials in the mixing tank 1, but also move with the third rotating shaft 84 as the axis to stir and mix the raw materials in the mixing tank 1, and the mixing effect is good.

[0178] After the stirring is completed to generate the etching liquid, the driving member 16 reverses and drives the sixth shaft 111 to rotate, the sixth shaft 111 drives the seventh gear 112 to rotate, the seventh gear 112 drives the eighth gear 117 to move, the eighth gear 117 drives the seventh shaft 116 to move, and the seventh shaft 116 drives the slider 115 to slide along the arc-shaped limit frame 113 until the slider 115 moves to the second limit position. At this time, the eighth gear 117 is connected to the ninth gear 122, and because the slider 115 cannot continue to move after moving to the second limit position, the eighth gear 117 cannot move under the limiting action of the slider 115 and the seventh shaft 116, so the seventh gear 112 drives the eighth gear 117 to rotate, and the eighth gear 117 drives the ninth gear 122 to rotate.

[0179] When the ninth gear 122 rotates, the ninth gear 122 drives the eighth shaft 121 to rotate, the eighth shaft 121 drives the ninth shaft 124 to rotate through the pulley assembly 125, the ninth shaft 124 drives the first bevel gear 126 to rotate, the first bevel gear 126 drives the second bevel gear 128 to rotate, the second bevel gear 128 drives the tenth shaft 127 to rotate, the tenth shaft 127 drives the gear pump 13 to operate, the gear pump 13 increases the outflow speed of the etching liquid in the mixing tank 1, improves the production efficiency, and because the driving assembly 31 and the second actuator 12 are both driven by the driving member 16, the number of the driving member 16 is reduced, thereby reducing the cost.

[0180] When the spline shaft 2 moves downward, the spline shaft 2 drives the piston rod 91 to move downward, and the piston rod 91 drives the piston block 94 to move downward, the total volume in the upper cavity of the exhaust pipe 92 increases, thereby generating negative pressure, and the gas in the mixing tank 1 is sucked into the upper cavity through the air supply passage 95. When the spline shaft 2 moves upward, the spline shaft 2 drives the piston rod 91 to move upward, and the piston rod 91 drives the piston block 94 to move upward, and the gas in the upper cavity is discharged from the exhaust pipe 93. As the reaction proceeds, the gas in the mixing tank 1 continues to accumulate and the pressure gradually increases. In order to avoid the pressure exceeding the pressure bearing capacity of the mixing tank 1, resulting in the problem of rupture or explosion of the mixing tank 1, the exhaust assembly 9 is provided to discharge the gas generated by the raw material reaction out of the mixing tank 1, thereby preventing the mixing tank 1 from rupture or explosion, and at the same time avoiding the problem of accelerated aging and damage of the mixing tank 1 due to long-term high pressure, thereby increasing the service life.

[0181] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. Such modifications or replacements will not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A device for producing high-purity aluminum etching liquid for TFT, characterized in that: include: Mixing tank; A first shaft sleeve, rotatably disposed on the axis of the mixing tank; A spline shaft, slidably connected to the first sleeve; A protective cover, fixedly connected to the mixing tank; A driving member, fixedly connected to the shield; A first actuator is connected to the mixing tank and the shield, and is connected to the spline shaft, and is used to drive the spline shaft to rotate and move up and down; the first actuator includes: a rotating assembly connected to the spline shaft and the shield, and is used to drive the spline shaft to rotate; a moving assembly connected to the spline shaft and the shield, and is used to drive the spline shaft to move up and down; a driving assembly, whose two ends are respectively connected to the mixing tank and the shield, and the driving assembly is used to drive the rotating assembly and the moving assembly; a gear pump, whose feed end is fixedly connected to the mixing tank, and whose discharge end is connected to the discharge pipe, and the gear pump is used to increase the outflow speed of the etching liquid in the mixing tank; A second actuator is connected to the mixing tank and to the drive shaft of the gear pump, and the second actuator is used to drive the gear pump to operate; a power conversion assembly is connected to the shield and to the driving member, and the power conversion assembly is used to connect the driving member and the driving assembly or to connect the driving member and the second actuator; a third gear is sleeved on the outside of the spline shaft and fixedly connected to the mixing tank through a fixing rod; a central stirring assembly is coaxially fixedly connected to the spline shaft; a rotating plate is slidably connected to the spline shaft; a limit assembly is connected to the mixing tank and the rotating plate to guide and support the rotating plate; A self-rotating stirring mechanism, which is rotatably arranged on the rotating plate and evenly distributed around the circumference, and the self-rotating stirring mechanism is connected to the third gear; The power conversion assembly comprises: A sixth rotating shaft, fixedly connected to the output end of the driving member; a seventh gear, mounted on the sixth rotating shaft; Two first mounting plates are provided, and one end of each of the first mounting plates is fixedly connected to the inner wall of the shield; An arc-shaped limiting frame, fixedly connected to the other end of the first mounting plate; The slider is connected to the arc-shaped limit frame in a limited sliding manner, and the axis of the moving track is coaxially distributed with the axis of the seventh gear; a seventh rotating shaft, rotatably connected to the slider; an eighth gear, mounted on the seventh rotating shaft and meshingly connected with the seventh gear, wherein the eighth gear is connected to the second actuator or the driving assembly; The drive assembly comprises: A worm, both ends of which are rotatably connected to the shield and the mixing tank, and are also connected to the moving assembly; A first gear is mounted on the worm and connected to the rotating assembly, and when in a first extreme position, the first gear is meshed and connected with the eighth gear; The mobile assembly comprises: A first rotating shaft, one end of which is rotatably connected to the shield; A worm wheel is mounted on the first rotating shaft and meshedly connected with the worm; A first rotating plate, fixedly connected to the other end of the first rotating shaft; A connecting block, fixedly connected to the spline shaft; A rack fixedly connected to the connecting block; A second rotating shaft, one end of which is rotatably connected to the shield; A toothless gear is mounted on the second rotating shaft and meshed with the rack; A second rotating plate, fixedly connected to the other end of the second rotating shaft; A connecting rod, both ends of which are rotatably connected to the first rotating plate and the second rotating plate respectively; The rotating assembly comprises: A fixing plate, fixedly connected to the shield; A second shaft sleeve is rotatably connected to the fixed plate and slidably connected to the spline shaft; A second gear is mounted on the second shaft sleeve and meshed with the first gear; The central stirring assembly comprises: A fixed block, coaxially and fixedly connected with the spline shaft; A first stirring rod, coaxially and fixedly connected to the fixed block; A first stirring plate, fixedly connected to the first stirring rod and evenly distributed around the circumference; The limiting component comprises: Connecting rods are provided in multiple groups, and one end of each of the connecting rods is fixedly connected to the rotating plate; The arc-shaped plate is fixedly connected to the other end of the connecting rod; The installation groove is provided on the inner wall of the mixing tank; The rolling balls are evenly arranged in the mounting grooves and abut against the bottom surface of the arc plate; The self-rotating stirring mechanism comprises: A gear driving assembly is rotatably connected to the rotating plate and is connected to the third gear; A third rotating shaft, one end of which is rotatably connected to the rotating plate; a sixth gear, mounted on the third rotating shaft and connected to the gear driving assembly; A connecting plate, one end of which is fixedly connected to the other end of the third rotating shaft; A second stirring rod is fixedly connected to the other end of the connecting plate; The second stirring plates are fixedly connected to the second stirring rod and are evenly distributed around the circumference; The gear drive assembly comprises: A fourth rotating shaft passes through the rotating plate and is rotatably connected to the rotating plate; A fourth gear is mounted on one end of the fourth rotating shaft and is meshed with the third gear; A fifth gear is mounted on the other end of the fourth rotating shaft and is meshed with the sixth gear; The second actuator comprises: an eighth rotating shaft, rotatably connected to the mixing tank; The ninth gear is mounted on the eighth rotating shaft and is meshed with the eighth gear during unloading; A second mounting plate, fixedly connected to the mixing tank; a ninth rotating shaft, rotatably connected to the second mounting plate; A pulley assembly is connected to the eighth rotating shaft and the ninth rotating shaft respectively; A first bevel gear is mounted on the ninth rotating shaft; a tenth rotating shaft, fixedly connected to a driving shaft of the gear pump; The second bevel gear is mounted on the tenth rotating shaft and meshed with the first bevel gear; The top end of the spline shaft is fixedly connected to an exhaust assembly for discharging the gas generated by the reaction of the raw materials in the mixing tank, and the exhaust assembly includes: The piston rod is coaxially and fixedly connected with the spline shaft; An exhaust pipe is fixedly connected to the top of the shield; An exhaust pipe, fixedly connected to the exhaust pipe; A piston block is fixedly connected to the piston rod and slidably connected to the inner wall of the exhaust cylinder, and the piston block divides the cavity in the exhaust cylinder into an upper cavity and a lower cavity; The air delivery passage is provided on the piston block, the piston rod and the spline shaft, and one end of the air delivery passage extends into the upper cavity, and the other end of the air delivery passage extends to the end of the spline shaft located in the mixing tank; One-way valves are installed in the exhaust pipe and the air supply duct.

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