IGBT cover plate separation mechanism and IGBT cover plate separation detection device

Abstract

The present invention provides an IGBT cover separation mechanism and an IGBT cover separation detection device, which relate to the field of semiconductor technology. The IGBT cover separation mechanism includes a clamping module, the clamping module includes two clamping components, each clamping component includes a connecting rod extending along a first horizontal direction and at least one clamping plate extending along a second horizontal direction, and the bottom of each clamping plate is provided with a plurality of clamping claws arranged corresponding to the through hole, and the bottom of the clamping claw is arranged to pass through the through hole into the clearance space and abut against the bottom of the IGBT cover, and the first driving member and the second driving member are used to drive the plurality of clamping claws of the two clamping assemblies to move synchronously, so that the plurality of clamping claws drive the IGBT cover to separate from the fixture; the pressing plate is located at the bottom of the clamping plate, and the pressing plate and the clamping plate are connected by a plurality of elastic components, so that the pressing plate is always pressed on the top of the IGBT cover. The IGBT cover separation mechanism of the present invention can ensure that the IGBT cover is evenly stressed when driving the IGBT cover to separate from the fixture, and prevent the IGBT cover from deformation.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to an IGBT (Insulated Gate Bipolar Transistor) cover plate separation mechanism and an IGBT cover plate separation detection device. Background Art

[0002] IGBT modules have the characteristics of fast switching speed, high input impedance and low control power, and are widely used in the semiconductor field. The IGBT cover is an important component of the IGBT module. It is usually used to protect the IGBT chip and other internal components and prevent the external environment from damaging the module. In the production process of the IGBT module, in order to test the IGBT chip and other components, the IGBT cover needs to be temporarily separated so that the tester can access the internal components, or during the use of the IGBT module, if a component fails or is damaged, the IGBT cover also needs to be separated to replace the damaged component. Therefore, the separation technology of the IGBT cover also plays an important role in the field of semiconductor technology.

[0003] In the prior art, the clamping assembly in the IGBT cover separation mechanism is usually configured to clamp the peripheral edge of the IGBT cover to apply force on the peripheral side of the IGBT cover, thereby clamping the IGBT cover and separating it. However, since the IGBT cover is relatively thin, when the IGBT cover is separated by clamping the peripheral side of the IGBT cover, the IGBT cover is subjected to uneven force, thereby causing deformation and damage to the IGBT cover. Summary of the invention

[0004] An object of the first aspect of the present invention is to provide an IGBT cover plate separation mechanism to solve the technical problem in the prior art that the IGBT cover plate is easily deformed when separated from the fixture.

[0005] Another object of the first aspect of the present invention is to improve the clamping stability of the IGBT cover plate separation mechanism.

[0006] The second aspect of the present invention aims to provide an IGBT cover plate separation detection device, comprising the above-mentioned IGBT cover plate separation mechanism.

[0007] According to the purpose of the first aspect of the present invention, the present invention provides an IGBT cover plate separation mechanism, which is used to separate the IGBT cover plate and the jig, wherein the IGBT cover plate is provided with at least one through hole group evenly spaced along a first horizontal direction, each of the through hole groups includes a plurality of through holes evenly spaced along a second horizontal direction, the second horizontal direction is perpendicular to the first horizontal direction, and the jig and each through hole of the IGBT cover plate are provided with a clearance space below both sides thereof, and the IGBT cover plate separation mechanism comprises:

[0008] A clamping module, comprising two clamping assemblies, each of the clamping assemblies comprising a connecting rod extending along the first horizontal direction and at least one clamping plate extending along the second horizontal direction, the connecting rod being connected to all the clamping plates, one clamping plate of each clamping plate assembly corresponding to one through hole group, a plurality of clamping claws protruding toward the through holes and arranged corresponding to the through holes are provided at the bottom of each clamping plate, the bottom of the clamping claws being arranged to pass through the corresponding through holes into the clearance space and abut against the bottom of the IGBT cover plate;

[0009] A first driving member, used for driving the two clamping assemblies to move closer to or away from each other;

[0010] A second driving member is used for driving the two clamping assemblies to move upward when the two clamping assemblies move away from each other until the clamping claws enter the clearance space, so that the multiple clamping claws drive the IGBT cover plate to separate from the fixture;

[0011] The pressing plate is located at the bottom of the clamping plate, and the pressing plate and the clamping plate are connected via a plurality of elastic components, wherein the elastic components are used to provide elastic force to the pressing plate so that the pressing plate is always pressed against the top of the IGBT cover plate.

[0012] Optionally, the clamping jaw comprises:

[0013] A vertical portion, one end of which is connected to the clamping plate;

[0014] A positioning protrusion is connected to the other end of the vertical portion, and the positioning protrusion includes a supporting surface extending along the first horizontal direction, and the supporting surface is configured to support the IGBT cover plate when it abuts against the bottom of the IGBT cover plate.

[0015] Optionally, the positioning protrusion further includes:

[0016] The avoidance surface is inclined downward from an edge of a side of the support surface away from the vertical portion toward the vertical portion.

[0017] Optionally, the elastic component includes:

[0018] A guide post, one end of which is in contact with the clamping plate, and the guide post is arranged to protrude toward the top surface of the pressing plate;

[0019] The two ends of the elastic member are respectively connected to the pressing plate and the clamping plate, and the elastic member is sleeved on the peripheral side of the guide column.

[0020] Optionally, the IGBT cover plate separation mechanism further includes:

[0021] Two first guide rails extend along the first horizontal direction, and each of the first guide rails is connected to a corresponding one of the clamping assemblies.

[0022] Optionally, the IGBT cover plate separation mechanism further includes:

[0023] a second guide rail extending along the first horizontal direction, the second guide rail being located at a side away from the clamping assembly;

[0024] A clamping arm, one end of which is connected to the clamping assembly and the other end of which is connected to the second guide rail, and the clamping arm is used to clamp the clamping assembly.

[0025] Optionally, the first driving member is a bidirectional cylinder.

[0026] According to the purpose of the second aspect of the present invention, the present invention further provides an IGBT cover plate separation detection device, comprising the IGBT cover plate separation mechanism described in any one of the above items, and the IGBT cover plate separation detection device further comprises:

[0027] A detection mechanism, located at one side of the IGBT cover plate separation mechanism, and the detection mechanism and the IGBT cover plate separation mechanism are spaced apart along the first horizontal direction, and the detection mechanism is used to detect the IGBT cover plate;

[0028] The transfer mechanism is located between the detection mechanism and the IGBT cover plate separation mechanism, and the transfer mechanism is used to transfer the IGBT cover plate.

[0029] Optionally, the detection mechanism further includes:

[0030] a third guide rail extending along the second horizontal direction;

[0031] A transfer plate connected to the third guide rail, the transfer plate is used to transfer the IGBT cover plate, and the transfer plate is configured to move along the extension direction of the third guide rail;

[0032] A detection member is used to detect the IGBT cover plate located on the transfer plate, and the detection member is configured to move along the first horizontal direction.

[0033] Optionally, the transfer mechanism further includes:

[0034] A bearing platform, used for receiving the IGBT cover plate;

[0035] a fourth guide rail extending along the first horizontal direction, the fourth guide rail and the second guide rail being spaced apart along the second horizontal direction;

[0036] A transfer component, one end of which is connected to the fourth guide rail and can move along the fourth guide rail, and the other end of the transfer component is provided with an adsorption carrier, and the adsorption carrier is used to transfer the IGBT cover plate on the supporting platform to the transfer plate of the detection mechanism.

[0037] The IGBT cover plate separation mechanism of the present invention is achieved by arranging a pressure plate at the bottom of the clamping plate that is always pressed against the top of the IGBT cover plate, and arranging multiple elastic components between the pressure plate and the clamping plate to connect the pressure plate and the clamping plate, so that the elastic component drives the clamping claws at the bottom of the clamping plate to move down to the clearance space when the first driving member drives the clamping plate to provide an upward elastic force to the clamping plate, thereby avoiding rigid contact between the clamping plate and the pressure plate when moving downward, causing the IGBT cover plate to be deformed due to force, thereby avoiding damage to the IGBT cover plate.

[0038] Furthermore, the support surface of the clamp of the present invention is located on the top surface of the positioning protrusion, and the positioning protrusion is located at the bottom of the vertical part of the clamp. After the clamp is forced to enter the clearance space, the support surface abuts against the bottom of the IGBT cover plate, and the second driving member drives the clamp upward to separate the IGBT cover plate and the fixture. Since the IGBT cover plate is a plane, the support surface abuts against the bottom of the IGBT cover plate to increase the contact area between the support surface and the IGBT cover plate, so as to prevent the IGBT cover plate from slipping when the clamp clamps the IGBT cover plate upward, so as to improve the clamping stability of the IGBT cover plate separation mechanism.

[0039] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Hereinafter, some specific embodiments of the present invention will be described in detail in an exemplary and non-limiting manner with reference to the accompanying drawings. The same reference numerals in the accompanying drawings indicate the same or similar components or parts. It should be understood by those skilled in the art that these drawings are not necessarily drawn to scale. In the accompanying drawings:

[0041] Figure 1 is a schematic structural diagram of an IGBT cover plate separation mechanism according to an embodiment of the present invention;

[0042] Figure 2 yes Figure 1 A schematic partial enlarged view of point A shown;

[0043] Figure 3 is a schematic top view of an IGBT cover plate separation mechanism according to an embodiment of the present invention;

[0044] Figure 4 is a schematic front view of an IGBT cover plate separation mechanism according to an embodiment of the present invention;

[0045] Figure 5 is a schematic left side view of an IGBT cover plate separation mechanism according to an embodiment of the present invention;

[0046] Figure 6 is a schematic structural diagram of an IGBT cover according to an embodiment of the present invention;

[0047] Figure 7 is a schematic structural diagram of a fixture according to an embodiment of the present invention;

[0048] Figure 8 is a schematic structural diagram of an IGBT cover plate separation detection device according to an embodiment of the present invention;

[0049] Fig. 9 is a schematic top view of an IGBT cover plate separation detection device according to an embodiment of the present invention;

[0050] Fig.10 is a schematic front view of an IGBT cover plate separation detection device according to an embodiment of the present invention;

[0051] Fig.11 1 is a schematic left side view of an IGBT cover separation detection device according to an embodiment of the present invention.

[0052] Reference numerals:

[0053] 100-IGBT cover separation mechanism, 200-IGBT cover, 300-jig, 400-IGBT cover separation detection device, 210-through hole group, 211-through hole, 310-allowance space, 10-clamping module, 11-clamping assembly, 111-connecting rod, 112-clamping plate, 113-clamping claw, 114-vertical part, 115-positioning protrusion, 116-support surface, 117-avoidance surface, 20-first driving member, 30-second driving member, 40-pressing plate, 50-elastic component, 51-guide column, 52-elastic member, 60-first guide rail, 70-second guide rail, 80-clamping arm, 410-detection mechanism, 420-transfer mechanism, 411-third guide rail, 412-transfer plate, 413-detection member, 421-carrying platform, 422-fourth guide rail, 423-transfer component, 424-adsorption carrier. DETAILED DESCRIPTION

[0054] The specific implementation of the present invention is further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0055] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. It is to be understood that the specific embodiments described herein are only used to explain the present application, rather than to limit the present application. It should also be noted that, for ease of description, only some structures related to the present application are shown in the accompanying drawings, rather than all structures. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.

[0056] The terms "including" and "having" and any variations thereof in this application are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device comprising a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to these processes, methods, products or devices.

[0057] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0058] Figure 1 is a schematic structural diagram of an IGBT cover plate separation mechanism according to an embodiment of the present invention, Figure 2 yes Figure 1 A schematic partial enlarged diagram of point A shown, Figure 3 is a schematic top view of an IGBT cover plate separation mechanism according to an embodiment of the present invention, Figure 4 is a schematic front view of an IGBT cover plate separation mechanism according to an embodiment of the present invention, Figure 5 is a schematic left side view of an IGBT cover plate separation mechanism according to an embodiment of the present invention, Figure 6 is a schematic structural diagram of an IGBT cover according to an embodiment of the present invention, Figure 7 is a schematic structural diagram of a fixture according to an embodiment of the present invention.

[0059] like Figure 1As shown, the present invention provides an IGBT cover plate separation mechanism 100, which is used to separate the IGBT cover plate 200 and the fixture 300. The IGBT cover plate 200 is provided with at least one through hole group 210 evenly spaced along the first horizontal direction, and each through hole group 210 includes a plurality of through holes 211 evenly spaced along the second horizontal direction. The second horizontal direction is perpendicular to the first horizontal direction, and the fixture 300 and each through hole 211 of the IGBT cover plate 200 are provided with a clearance space 310 below both sides. Here, the clearance space 310 can be a plurality of grooves formed on the top of the fixture 300, or a hollow structure formed on the top of the fixture 300. When the hollow structure formed on the top of the fixture 300 is the clearance space 310, the column located in the clearance space 310 is used to support the IGBT cover plate 200.

[0060] like Figure 1 As shown, in this embodiment, the IGBT cover plate separation mechanism 100 includes a clamping module 10, a first driving member 20, a second driving member 30 and a pressing plate 40. The clamping module 10 includes two clamping assemblies 11, each of which includes a connecting rod 111 extending along a first horizontal direction and at least one clamping plate 112 extending along a second horizontal direction, the connecting rod 111 is connected to all the clamping plates 112, one clamping plate 112 of each clamping assembly 11 corresponds to one through hole group 210, and the bottom of each clamping plate 112 is provided with a plurality of clamping claws 113 protruding toward the through hole 211 and arranged corresponding to the through hole 211, and the bottom of the clamping claw 113 is arranged to pass through the corresponding through hole 211 into The first driving member 20 is used to drive the two clamping assemblies 11 to move closer to or farther from each other, and the second driving member 30 is used to drive the two clamping assemblies 11 to move upward when the two clamping assemblies 11 move back to back until the clamping claws 113 enter the clearance space 310, so that the multiple clamping claws 113 drive the IGBT cover 200 to separate from the fixture 300. The pressing plate 40 is located at the bottom of the clamping plate 112, and the pressing plate 40 and the clamping plate 112 are connected by multiple elastic components 50 (refer to Figure 4 ), the elastic component 50 is used to provide elastic force to the pressing plate 40, so that the pressing plate 40 is always pressed on the top of the IGBT cover plate 200. Here, the number of the clamping plates 112 is multiple, that is, each clamping component 11 includes multiple clamping plates 112 arranged at intervals, and the multiple clamping plates 112 of the two clamping components 11 are arranged at intervals, so that one clamping plate 112 in each clamping component 11 is adjacent to the clamping plate 112 of the other clamping component 11, and corresponds to one through hole group 210.

[0061] In this embodiment, each clamping assembly 11 includes a plurality of clamping plates 112 corresponding to the through hole group 210, and a plurality of clamping claws 113 are provided at the bottom of each clamping plate 112. Each clamping claw 113 is provided corresponding to a through hole 211 of the through hole group 210, so that each through hole 211 is provided with a clamping claw 113 of each of the two clamping assemblies 11. The first driving member 20 controls the plurality of clamping claws 113 of the two clamping assemblies 11 to move to the clearance space 310, and the second driving member 310 is provided with a plurality of clamping claws 113 of the two clamping assemblies 11 to move to the clearance space 310. 0 is used to drive the two clamping components 11 to move upward when the two clamping components 11 move back to back until the clamping claws 113 enter the clearance space 310, so that the multiple clamping claws 113 drive the IGBT cover plate 200 to separate from the fixture 300, thereby realizing the linkage of the multiple clamping claws 113 in the two clamping components 11 of the clamping module 10, so that the IGBT cover plate 200 is evenly stressed during the movement process, and the IGBT cover plate 200 is prevented from being deformed by the force when the clamping claws 113 drive the IGBT cover plate 200 to move upward.

[0062] like Figure 4 As shown, further, in this embodiment, a pressure plate 40 is provided at the bottom of the clamping plate 112 to be always pressed against the top of the IGBT cover plate 200, and a plurality of elastic components 50 are provided between the pressure plate 40 and the clamping plate 112 to connect the pressure plate 40 and the clamping plate 112, so that the elastic component 50 drives the clamping claw 113 at the bottom of the clamping plate 112 to move down to the clearance space 310 when the first driving member 20 provides an upward elastic force to the clamping plate 112, thereby preventing the clamping plate 112 from making rigid contact with the pressure plate 40 when moving downward, causing the IGBT cover plate 200 to be deformed due to force, thereby preventing the IGBT cover plate 200 from being damaged.

[0063] In this embodiment, each connecting rod 111 is connected to all the clamping plates 112 of the corresponding clamping assembly 11, so that the multiple clamping plates 112 of each clamping assembly 11 move simultaneously along the first horizontal direction, thereby driving the multiple clamping claws 113 to achieve synchronous movement, so that the IGBT is evenly stressed when the clamping claws 113 lift the IGBT cover plate 200.

[0064] like Figure 6As shown, in this embodiment, the number of through hole groups 210 is three, the number of through holes 211 of each through hole group 210 is four, and the multiple through holes 211 are evenly spaced on the IGBT cover plate 200, the number of clamping plates 112 of each clamping assembly 11 is three, the number of clamping claws 113 of each clamping plate 112 is four, each clamping plate 112 of each clamping assembly 11 corresponds to a through hole group 210, and a clamping claw 113 of each clamping plate 112 corresponds to a through hole 211, that is, each through hole group 210 corresponds to two clamping plates 112 in two clamping assemblies 11, and each through hole 211 corresponds to two clamping claws 113 of two clamping plates 112, and the two clamping claws 113 are arranged opposite to each other, so that the multiple clamping claws 113 pass through the corresponding through holes 211 evenly arranged on the IGBT cover plate 200 to clamp the IGBT cover plate 200, so that the IGBT cover plate 200 is subjected to uniform force when moving upward.

[0065] like Figure 2 As shown, in a further embodiment, the clamping jaw 113 includes a vertical portion 114 and a positioning protrusion 115, one end of the vertical portion 114 is connected to the clamping plate 112, and the positioning protrusion 115 is connected to the other end of the vertical portion 114, and the positioning protrusion 115 includes a supporting surface 116 extending along the first horizontal direction, and the supporting surface 116 is configured to support the IGBT cover plate 200 when it abuts against the bottom of the IGBT cover plate 200. The supporting surface 116 is located on the top surface of the positioning protrusion 115, and the positioning protrusion 115 is located at the bottom of the vertical portion 114 of the clamping jaw 113. After the clamping jaw 113 is forced to enter the clearance space 310, the supporting surface 116 abuts against the bottom of the IGBT cover plate 200, and the second driving member 30 drives the clamping jaw 113 to move upward to separate the IGBT cover plate 200 and the fixture 300. Since the IGBT cover plate 200 is a plane, the support surface 116 abuts against the bottom of the IGBT cover plate 200 to increase the contact area between the support surface 116 and the IGBT cover plate 200 , thereby preventing the IGBT cover plate 200 from slipping when the clamping jaws 113 clamp the IGBT cover plate 200 and move upward.

[0066] like Figure 2 As shown, in a further embodiment, the positioning protrusion 115 further includes an avoidance surface 117, and the avoidance surface 117 is arranged to be inclined downward from the edge of one side of the supporting surface 116 away from the vertical portion 114 toward the vertical portion 114. By providing the avoidance surface 117, the positioning protrusion 115 and both sides of the through hole 211 of the IGBT cover plate 200 are avoided, so that the positioning protrusion 115 is prevented from contacting the IGBT cover plate 200 during the process of the clamping jaw 113 moving down to the clearance space 310, thereby preventing the IGBT cover plate 200 from being damaged by contact with the clamping jaw 113.

[0067] like Figure 4As shown, in a further embodiment, the elastic component 50 includes a guide column 51 and an elastic member 52, one end of the guide column 51 abuts against the clamping plate 112, the guide column 51 is configured to protrude toward the top surface of the pressing plate 40, the two ends of the elastic member 52 are respectively connected to the pressing plate 40 and the clamping plate 112, and the elastic member 52 is sleeved on the peripheral side of the guide column 51. By sleeve-arranging the elastic member 52 on the peripheral side of the guide column 51, and connecting the two ends of the elastic member 52 to the pressing plate 40 and the clamping plate 112, respectively, elastic force is provided to the clamping plate 112 and the pressing plate 40, so as to avoid the rigid force generated by the direct contact between the clamping plate 112 and the pressing plate 40 causing damage to the IGBT cover plate 200.

[0068] like Figure 1 As shown, in a further embodiment, the IGBT cover plate separation mechanism 100 further includes two first guide rails 60, the first guide rails 60 extend along the first horizontal direction, and each first guide rail 60 is connected to a corresponding clamping assembly 11. Specifically, each first guide rail 60 is connected to the connecting rod 111 of the corresponding clamping assembly 11, each connecting rod 111 is connected to all the clamping plates 112 of the corresponding clamping assembly 11, and each first guide rail 60 is connected to all the clamping plates 112 of another clamping assembly 11, so that the first driving member 20 drives all the clamping plates 112 corresponding to each clamping assembly 11 to move relative to or opposite to each other along the extension direction of the first guide rail 60, so as to realize the simultaneous movement of all the clamping claws 113 in each clamping assembly 11, and ensure that the IGBT cover plate 200 is uniformly stressed while driving the IGBT cover plate 200 to separate from the fixture 300.

[0069] In this embodiment, the first driving member 20 and the second driving member 30 are located at the top of two clamping plates 112 corresponding to a through hole group 210, so as to drive the two clamping plates 112 of the corresponding two clamping assemblies 11 to move relative to or away from each other, and each connecting rod 111 is connected to all the clamping plates 112 of its corresponding clamping assembly 11, so that when the first driving member 20 and the second driving member 30 drive the two clamping plates 112 of the two clamping assemblies 11, the clamping plate 112 drives the corresponding connecting rod 111 to move, and the connecting rod 111 then drives all other clamping plates 112 in the corresponding clamping assembly 11 to move, thereby realizing the linkage of all the clamping claws 113 of the two clamping assemblies 11 of the clamping module 10.

[0070] In a further embodiment, the IGBT cover plate separation mechanism 100 further includes a second guide rail 70 and a clamping arm 80, wherein the second guide rail 70 extends along the first horizontal direction, and the second guide rail 70 is located on a side away from the clamping assembly 11, and one end of the clamping arm 80 is connected to the clamping assembly 11, and the other end is connected to the second guide rail 70, and the clamping arm 80 is used to clamp the clamping module 10. The second guide rail 70 is parallel to the first guide rail 60, and the second guide rail 70 is spaced apart from the clamping assembly 11 by a preset distance in the second horizontal direction, and the two ends of the clamping arm 80 are respectively connected to the first guide rail 60 and the clamping assembly 11, so that the clamping arm 80 drives the two clamping assemblies 11 of the clamping module 10 to move along the extension direction of the second guide rail 70, thereby driving the IGBT cover plate 200 to move along the first horizontal direction, so as to realize the transfer of the IGBT cover plate 200.

[0071] In this embodiment, the IGBT cover plate separation mechanism 100 further includes a third driving member, which is located at one end of the second guide rail 70 close to the clamping assembly 11, and is connected to the clamping arm 80, and is used to drive the clamping arm 80 to move up or down. The clamping arm 80 drives the clamping module 10 to move up to drive the IGBT cover plate 200 to separate from the fixture 300, or the clamping arm 80 drives the clamping module 10 to move down to the pressing plate 40 to abut against the IGBT cover plate 200, so that the pressing plate 40 is always in contact with the IGBT cover plate 200, so as to avoid deformation of the IGBT cover plate 200 when the clamping claw 113 clamps the IGBT cover plate 200 and separates it from the fixture 300.

[0072] In a further embodiment, the first driving member 20 is a bidirectional cylinder. The bidirectional cylinder is used to drive all the clamping plates 112 corresponding to the two clamping assemblies 11 of the clamping module 10 to move relative to or away from each other, thereby driving all the clamping claws 113 at the bottom of the clamping plate 112 to move. That is, the first driving member 20 first drives the clamping claws 113 corresponding to the two clamping assemblies 11 to move relative to each other until the clamping claws 113 move to the through hole 211, and the first driving member 20 continues to drive the clamping claws 113 corresponding to the two clamping assemblies 11 to move away from each other until the clamping claws 113 move to the clearance space 310, that is, the first driving member 20 is set as a bidirectional cylinder, which can drive the clamping claws 113 of the two clamping assemblies 11 of the clamping module 10 to move synchronously, and can also control the clamping claws 113 corresponding to the two clamping assemblies 11 to move to the corresponding position, thereby reducing the number of driving members and reducing costs.

[0073] Figure 8 is a schematic structural diagram of an IGBT cover plate separation detection device according to an embodiment of the present invention, Fig. 9 is a schematic top view of an IGBT cover plate separation detection device according to an embodiment of the present invention, Fig.10 is a schematic front view of an IGBT cover plate separation detection device according to an embodiment of the present invention, Fig.11FIG. 1 is a schematic left side view of an IGBT cover plate separation detection device according to an embodiment of the present invention. Figure 8 As shown, the present invention further provides an IGBT cover plate separation detection device 400, comprising the above-mentioned IGBT cover plate separation mechanism 100. The IGBT cover plate separation detection device 400 also includes a detection mechanism 410 and a transfer mechanism 420, the detection mechanism 410 is located on one side of the IGBT cover plate separation mechanism 100, and the detection mechanism 410 and the IGBT cover plate separation mechanism 100 are spaced apart along the first horizontal direction, the detection mechanism 410 is used to detect the IGBT cover plate 200, the transfer mechanism 420 is located between the detection mechanism 410 and the IGBT cover plate separation mechanism 100, and the transfer mechanism 420 is used to transfer the IGBT cover plate 200. After the IGBT cover plate separation mechanism 100 separates the IGBT cover plate 200 from the fixture 300, the clamping arm 80 drives the clamping assembly 11 to drive the IGBT cover plate 200 to move along the extension direction of the second guide rail 70 until the IGBT cover plate 200 is moved to the transfer mechanism 420. The transfer mechanism 420 transfers the IGBT cover plate 200 to move the IGBT cover plate 200 to the detection mechanism 410. The detection mechanism 410 is used to perform quality inspection on the separated IGBT cover plate 200 and transfer the IGBT cover plate 200 with qualified quality to the temporary storage warehouse.

[0074] In this embodiment, by setting up a detection mechanism 410 in the IGBT cover plate separation detection device 400, the separation function and the detection function of the IGBT cover plate separation detection device 400 can be realized at the same time, and by setting up a transfer mechanism 420, after the separated IGBT cover plate 200 is transferred to the transfer mechanism 420, the clamping arm 80 drives the clamping assembly 11 to separate the next IGBT cover plate 200 to be separated, and at the same time, the transfer mechanism 420 drives the IGBT cover plate 200 to move to the detection mechanism 410, so that the detection mechanism 410 can detect the IGBT cover plate 200, thereby improving the working efficiency of the IGBT cover plate separation detection device 400.

[0075] like Fig. 9As shown, in a further embodiment, the detection mechanism 410 further includes a third guide rail 411, a transfer plate 412 and a detection member 413. The third guide rail 411 extends along the second horizontal direction. The transfer plate 412 is connected to the third guide rail 411. The transfer plate 412 is used to transfer the IGBT cover plate 200, and the transfer plate 412 is configured to move along the extension direction of the third guide rail 411. The detection member 413 is used to detect the IGBT cover plate 200 located on the transfer plate 412, and the detection member 413 is configured to move along the first horizontal direction. By arranging the transfer plate 412 in the detection mechanism 410, the transfer mechanism 420 transfers the IGBT cover plate 200 to the transfer plate 412, and the detection member 413 performs quality inspection on the IGBT cover plate 200. After the inspection is completed, the transfer plate 412 drives the IGBT cover plate 200 to move along the extension direction of the third guide rail 411 until the IGBT cover plate 200 is transferred to the temporary storage warehouse.

[0076] In this embodiment, the detection mechanism 410 also includes a fifth guide rail, which is located above the transfer plate 412 and extends along the first horizontal direction. The fifth guide rail is connected to the detection member 413 so that the detection member 413 moves along the extension direction of the fifth guide rail to achieve comprehensive detection of the IGBT cover plate 200.

[0077] like Fig. 9 As shown, in a further embodiment, the transfer mechanism 420 also includes a carrier platform 421, a fourth guide rail 422 and a transfer assembly 423, the carrier platform 421 is used to receive the IGBT cover plate 200, the fourth guide rail 422 extends along the first horizontal direction, the fourth guide rail 422 and the second guide rail 70 are spaced apart along the second horizontal direction, one end of the transfer assembly 423 is connected to the fourth guide rail 422 and can move along the fourth guide rail 422, and the other end of the transfer assembly 423 is provided with an adsorption carrier 424, and the adsorption carrier 424 is used to transfer the IGBT cover plate 200 on the carrier platform 421 to the transfer plate 412 of the detection mechanism 410. The supporting platform 421 is used to receive the separated IGBT cover plate 200 transferred by the clamping arm 80. The adsorption carrier 424 of the transfer component 423 is provided with a plurality of through holes and vacuum channels that are evenly spaced. When the adsorption carrier 424 is controlled to move to abut against the IGBT cover plate 200 on the supporting platform 421, the through holes are evacuated through the vacuum channel so that the adsorption carrier 424 adsorbs the IGBT cover plate 200 and moves the IGBT cover plate 200 to the transfer plate 412 of the detection mechanism 410 to realize the transfer of the IGBT cover plate 200.

[0078] In this embodiment, by providing a vacuum adsorption carrier 424, the stability of the transfer component 423 can be improved to prevent the IGBT from falling during transportation. At the same time, by providing an adsorption carrier 424 to transport the IGBT cover plate 200, mechanical damage to the IGBT caused by mechanical transportation can be avoided, thereby improving the yield rate of the IGBT cover plate separation detection device 400.

[0079] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0080] The above-mentioned embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. An IGBT cover plate separation mechanism, used for separating the IGBT cover plate and a jig, wherein the IGBT cover plate is provided with at least one through hole group evenly spaced along a first horizontal direction, each through hole group includes a plurality of through holes evenly spaced along a second horizontal direction, the second horizontal direction is perpendicular to the first horizontal direction, and clearance spaces are provided below both sides of each through hole of the jig and the IGBT cover plate, characterized in that: The IGBT cover separation mechanism includes: A clamping module, comprising two clamping assemblies, each of the clamping assemblies comprising a connecting rod extending along the first horizontal direction and at least one clamping plate extending along the second horizontal direction, the connecting rod being connected to all the clamping plates, one clamping plate of each clamping assembly corresponding to one through-hole group, a plurality of clamping claws protruding toward the through-holes and arranged corresponding to the through-holes being provided at the bottom of each clamping plate, the bottom of the clamping claw being arranged to pass through the corresponding through-holes into the clearance space and abut against the bottom of the IGBT cover plate; A first driving member, used for driving the two clamping assemblies to move closer to or away from each other; A second driving member is used for driving the two clamping assemblies to move upward when the two clamping assemblies move away from each other until the clamping claws enter the clearance space, so that the multiple clamping claws drive the IGBT cover plate to separate from the fixture; The pressing plate is located at the bottom of the clamping plate, and the pressing plate and the clamping plate are connected via a plurality of elastic components, wherein the elastic components are used to provide elastic force to the pressing plate so that the pressing plate is always pressed against the top of the IGBT cover plate.

2. The IGBT cover plate separation mechanism according to claim 1, characterized in that: The clamping jaws include: A vertical portion, one end of which is connected to the clamping plate; A positioning protrusion is connected to the other end of the vertical portion, and the positioning protrusion includes a supporting surface extending along the first horizontal direction, and the supporting surface is configured to support the IGBT cover plate when it abuts against the bottom of the IGBT cover plate.

3. The IGBT cover plate separation mechanism according to claim 2, characterized in that: The positioning protrusion also includes: The avoidance surface is inclined downward from an edge of a side of the support surface away from the vertical portion toward the vertical portion.

4. The IGBT cover plate separation mechanism according to claim 3, characterized in that: The elastic component comprises: A guide post, one end of which is in contact with the clamping plate, and the guide post is arranged to protrude toward the top surface of the pressing plate; The two ends of the elastic member are respectively connected to the pressing plate and the clamping plate, and the elastic member is sleeved on the peripheral side of the guide column.

5. The IGBT cover plate separation mechanism according to claim 4, characterized in that: Also includes: Two first guide rails extend along the first horizontal direction, and each of the first guide rails is connected to a corresponding one of the clamping assemblies.

6. The IGBT cover plate separation mechanism according to claim 5, characterized in that: Also includes: a second guide rail extending along the first horizontal direction, the second guide rail being located at a side away from the clamping assembly; A clamping arm, one end of which is connected to the clamping assembly and the other end of which is connected to the second guide rail, and the clamping arm is used to clamp the clamping assembly.

7. The IGBT cover plate separation mechanism according to any one of claims 1 to 6, characterized in that: The first driving member is a bidirectional cylinder.

8. An IGBT cover plate separation detection device, comprising the IGBT cover plate separation mechanism according to any one of claims 1 to 7, characterized in that: The IGBT cover plate separation detection device further comprises: A detection mechanism, located at one side of the IGBT cover plate separation mechanism, and the detection mechanism and the IGBT cover plate separation mechanism are spaced apart along the first horizontal direction, and the detection mechanism is used to detect the IGBT cover plate; The transfer mechanism is located between the detection mechanism and the IGBT cover plate separation mechanism, and the transfer mechanism is used to transfer the IGBT cover plate.

9. The IGBT cover plate separation detection device according to claim 8, characterized in that: The detection mechanism also includes: a third guide rail extending along the second horizontal direction; A transfer plate connected to the third guide rail, the transfer plate is used to transfer the IGBT cover plate, and the transfer plate is configured to move along the extension direction of the third guide rail; A detection member is used to detect the IGBT cover plate located on the transfer plate, and the detection member is configured to move along the first horizontal direction.

10. The IGBT cover plate separation detection device according to claim 9, characterized in that: The transfer agency also includes: A bearing platform, used for receiving the IGBT cover plate; a fourth guide rail extending along the first horizontal direction, the fourth guide rail and the second guide rail being spaced apart from each other along the second horizontal direction; A transfer component, one end of which is connected to the fourth guide rail and can move along the fourth guide rail, and the other end of the transfer component is provided with an adsorption carrier, and the adsorption carrier is used to transfer the IGBT cover plate on the supporting platform to the transfer plate of the detection mechanism.

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