Transmission device, vacuum manipulator and transmission method of vacuum manipulator

Abstract

The present invention provides a transmission device, a vacuum manipulator and a transmission method of the vacuum manipulator. The vacuum manipulator includes a first swing arm, a second swing arm and a wafer picking hand. The transmission device includes: a first transmission mechanism is arranged in the first swing arm and is arranged along the length direction of the first swing arm, one end of the first transmission mechanism extends out of the first swing arm and is connected to one end of the second swing arm; a second transmission mechanism is arranged in the first swing arm; a third transmission mechanism is arranged in the second swing arm and is arranged along the length direction of the second swing arm, one end of the third transmission mechanism is connected to the second transmission mechanism, and the other end of the third transmission mechanism extends out of the other end of the second swing arm and is connected to the wafer picking hand. The first swing arm, the second swing arm and the wafer picking hand can realize infinite rotation. Since there is no rotation restriction, there is no need to rotate clockwise for a certain angle and then rotate counterclockwise to the initial position, which speeds up the production rhythm and realizes infinite rotation of the wafer picking hand.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor processing, and in particular to a transmission device, a vacuum manipulator and a transmission method of the vacuum manipulator. Background Art

[0002] The etching, deposition, epitaxial growth and other processes in semiconductor wafer processing need to be carried out in a vacuum reaction chamber. Therefore, a vacuum robot is required to transport the wafer from the front-end wafer transport module to the vacuum reaction chamber. The vacuum robot is generally installed in the vacuum transmission chamber between the front-end wafer transport module and the vacuum reaction chamber.

[0003] In the prior art, a vacuum manipulator includes a first arm, a second arm, a motor, and a wafer handling hand. The wafer handling hand is arranged on the second arm. A first transmission mechanism is arranged in the first arm, and a second transmission mechanism is arranged in the second arm. The motor drives the first arm to rotate and drives the first transmission mechanism to move. Under the transmission of the first transmission mechanism, the second transmission mechanism is driven to move, thereby realizing the rotation adjustment of the second arm. Since the first transmission mechanism and the second transmission mechanism are transmitted at a fixed transmission ratio, and the first arm and the second arm rotate at the same time under the drive of the motor, the position and angle of the wafer handling hand are synchronously adjusted. This adjustment method cannot realize the adjustment of any angle and any position of the wafer handling hand, and the adjustment range is very limited.

[0004] In view of this, it is necessary to propose a transmission device, a vacuum manipulator and a transmission method of the vacuum manipulator to solve the above problems. Summary of the invention

[0005] The object of the present invention is to provide a transmission device, a vacuum manipulator and a transmission method of the vacuum manipulator, so as to improve the problem of limited rotation angle of the end effector of the existing vacuum manipulator.

[0006] The present invention provides a transmission device, which is applied to a vacuum robot. The vacuum robot comprises a first swing arm, a second swing arm and a wafer taking hand. The transmission device comprises:

[0007] A first transmission mechanism is disposed in the first swing arm and along the length direction of the first swing arm, wherein one end of the first transmission mechanism extends out of the first swing arm and is connected to one end of the second swing arm;

[0008] A second transmission mechanism is disposed in the first swing arm;

[0009] The third transmission mechanism is arranged in the second swing arm and along the length direction of the second swing arm. One end of the third transmission mechanism is connected to the second transmission mechanism, and the other end of the third transmission mechanism extends out of the other end of the second swing arm and is connected to the wafer picking arm.

[0010] The beneficial effects of this embodiment are: by driving one of the ends of the first transmission mechanism, the second swing arm is driven to rotate through the transmission of the first transmission mechanism; by driving the second transmission mechanism, the wafer picking hand is driven to rotate through the transmission of the second transmission mechanism and the third transmission mechanism, so that the second swing arm and the wafer picking hand can rotate independently of each other and achieve infinite rotation, for example, 360°, 720°, 1440° or more in one direction clockwise or counterclockwise. Because there is no rotation restriction, there is no need to rotate clockwise for a certain angle and then rotate counterclockwise to the initial position, which speeds up the production rhythm and achieves infinite rotation of the wafer picking hand, thereby solving the problem of limited movement and angle adjustment of the existing vacuum manipulator.

[0011] In a possible embodiment, the second transmission mechanism includes a second driving wheel, a second driven wheel and a second transmission belt;

[0012] The second driving wheel is rotatably disposed in the first swing arm and is located at one end of the first swing arm;

[0013] The second driven wheel is rotatably disposed in the first swing arm and located at the other end of the first swing arm, and the second driven wheel is connected to one end of the third transmission mechanism;

[0014] The second transmission belt is wound around the second driving wheel and the second driven wheel, so that the second driving wheel drives the second driven wheel to rotate synchronously, and transmits the rotational force of the second driving wheel to the second driven wheel.

[0015] The beneficial effect of this embodiment is that the third driving mechanism drives the second driving wheel to rotate, and the rotational force is transmitted through the second transmission belt, so that the second driven wheel can rotate synchronously with the second driving wheel, and the second driven wheel transmits the rotational force to the wafer picking hand through the third transmission mechanism, thereby realizing infinite rotation of the wafer picking hand.

[0016] In a possible embodiment, the first transmission mechanism includes a first driving wheel, a first driven wheel and a first transmission belt;

[0017] The first driving wheel is rotatably disposed on the second driving wheel;

[0018] The first driven wheel is rotatably disposed on the second driven wheel, and the first driven wheel partially extends out of the other end of the first swing arm and is connected to one end of the second swing arm;

[0019] The first transmission belt is wound around the first driving wheel and the first driven wheel, so that the first driving wheel drives the first driven wheel to rotate synchronously, and transmits the rotational force of the first driving wheel to the first driven wheel.

[0020] The beneficial effect of this embodiment is that the second driving mechanism drives the first driving wheel to rotate, and the rotational force is transmitted through the first transmission belt, so that the first driven wheel can rotate synchronously with the first driving wheel, and at the same time, the first driven wheel drives the second swing arm to rotate independently relative to the first swing, thereby realizing infinite rotation of the second swing arm.

[0021] In a possible embodiment, the third transmission mechanism includes a third driving wheel, a third driven wheel and a third transmission belt;

[0022] The third driving wheel is located inside one end of the second swing arm and partially extends outside one end of the second swing arm, and the third driving wheel passes through the first driven wheel and is connected to the second driven wheel;

[0023] The third driven wheel is rotatably disposed in the second swing arm and is located in the other end of the second swing arm, and the third driven wheel partially extends out of the other end of the second swing arm and is used to connect with the wafer taking hand;

[0024] The third transmission belt is wound around the third driving wheel and the third driven wheel, so that the third driving wheel drives the third driven wheel to rotate synchronously, and transmits the rotational force of the third driving wheel to the third driven wheel.

[0025] The beneficial effect of this embodiment is that the third driving wheel is connected to the second driven wheel, and when the second driven wheel rotates, it will drive the third driving wheel to rotate together, and the rotational force is transmitted by the third transmission belt, so that the third driven wheel can rotate synchronously with the third driving wheel, and then drive the wafer picking hand connected to the third driven wheel to rotate, thereby realizing infinite rotation of the wafer picking hand.

[0026] In a possible embodiment, a connecting platform is protruded and formed on the second driven wheel;

[0027] The first driven wheel is cylindrical and rotatably mounted on the connecting platform; and / or, an extension portion is formed on the third driving wheel, the extension portion extends out of one end of the second swing arm, extends into the first driven wheel and is fixedly connected to the connecting platform.

[0028] The beneficial effect of this embodiment is that the first driven wheel is rotatably mounted on the connecting platform, and the connecting platform ensures that the first driven wheel is firmly mounted on the second driven wheel. The extension of the third driving wheel extends out of the second swing arm and is connected to the connecting platform on the second driven wheel, so that one end of the third transmission mechanism is connected to the other end of the second transmission mechanism. The third driving mechanism drives the second transmission mechanism, and the second transmission mechanism can transmit the rotational force to the third transmission mechanism, and the third transmission mechanism transmits the rotational force to the wafer handling hand, thereby realizing the infinite rotation of the wafer handling hand.

[0029] In a possible embodiment, first protrusions are respectively provided on the outer circumference of the first driving wheel and the outer circumference of the first driven wheel, and the first transmission belt is provided with a first hole that can match with the first protrusion, and / or second holes are respectively provided on the outer circumference of the first driving wheel and the outer circumference of the first driven wheel, and the first transmission belt is provided with a second protrusion that can match with the second hole;

[0030] A third protrusion is respectively provided on the outer circumference of the second driving wheel and the outer circumference of the second driven wheel, and a third hole which can be matched with the third protrusion is provided on the second transmission belt, and / or a fourth hole is respectively provided on the outer circumference of the second driving wheel and the outer circumference of the second driven wheel, and a fourth protrusion which can be matched with the fourth hole is provided on the second transmission belt;

[0031] A plurality of fifth protrusions are respectively provided on the outer circumference of the third driving wheel and the outer circumference of the third driven wheel, and a fifth hole which can cooperate with the fifth protrusions is provided on the third transmission belt, and / or a sixth hole is respectively provided on the outer circumference of the third driving wheel and the outer circumference of the third driven wheel, and a sixth protrusion which can cooperate with the sixth hole is provided on the third transmission belt.

[0032] The beneficial effect of this embodiment is that the stability and reliability of power transmission are enhanced through the matching design of the protrusion and the hole. In addition, compared with the matching transmission of gears and chains, the mechanical wear between parts is greatly reduced, the cleanliness of the internal environment of the vacuum manipulator is improved, thereby increasing the service life of the vacuum manipulator.

[0033] In a possible embodiment, in the case where the first protrusion is provided, a contact area between the first driving wheel and the first transmission belt and / or a contact area between the first driven wheel and the first transmission belt corresponds to at least two first protrusions provided at intervals;

[0034] In the case where the second hole is provided, at least two second holes are provided at intervals corresponding to the contact area between the first driving wheel and the first transmission belt and / or the contact area between the first driven wheel and the first transmission belt;

[0035] In the case where the first protrusions and the second holes are provided, a contact area between the first driving wheel and the first transmission belt and / or a contact area between the first driven wheel and the first transmission belt corresponds to n first protrusions and m second holes provided at intervals, where n and m are positive integers;

[0036] In the case where the third protrusion is provided, the contact area between the second driving wheel and the second transmission belt and / or the contact area between the second driven wheel and the second transmission belt corresponds to at least two third protrusions provided at intervals;

[0037] In the case where the fourth hole is provided, the contact area between the second driving wheel and the second transmission belt and / or the contact area between the second driven wheel and the second transmission belt corresponds to at least two fourth holes provided at intervals;

[0038] In the case where the third protrusion and the fourth hole are provided, the contact area between the second driving wheel and the second transmission belt and / or the contact area between the second driven wheel and the second transmission belt corresponds to p third protrusions and q fourth holes provided at intervals, where p and q are positive integers;

[0039] In the case where the fifth protrusion is provided, the contact area between the third driving wheel and the third transmission belt and / or the contact area between the third driven wheel and the third transmission belt corresponds to at least two of the fifth protrusions provided at intervals;

[0040] In the case where the sixth hole is provided, the contact area between the third driving wheel and the third transmission belt and / or the contact area between the third driven wheel and the third transmission belt corresponds to at least two sixth holes provided at intervals;

[0041] In the case of setting the fifth protrusion and the sixth hole, the contact area between the third driving wheel and the third transmission belt and / or the contact area between the third driven wheel and the third transmission belt corresponds to x fifth protrusions and y sixth holes arranged at intervals, where x and y are positive integers.

[0042] The beneficial effect of this embodiment is that at least two groups of protrusions and holes are arranged within the contact range between the wheel and the belt, at least one group of protrusions and holes are cut out, and the next adjacent group of protrusions and holes are cut in, so that there is always at least one group of protrusions and holes engaged between the wheel and the belt, so as to ensure the stability of torque transmission between the wheel and the belt.

[0043] In a possible embodiment, the center line of the first driving wheel and the center line of the second driving wheel are arranged on the same line; and / or,

[0044] The center line of the second driven wheel, the center line of the first driven wheel and the center line of the third driving wheel are collinearly arranged.

[0045] The beneficial effect of this embodiment is that the collinear arrangement of the center lines of the multiple wheels can ensure the linearity and consistency of power transmission. Because the center lines are collinear, the energy loss caused by the change of direction during the power transmission process is reduced, and the transmission efficiency is improved. The collinear arrangement of the center lines of the multiple wheels also makes the layout of the entire transmission system more compact. In a limited space, the space can be used more effectively and the occupied volume can be reduced.

[0046] The present invention also provides a vacuum manipulator, characterized in that it comprises:

[0047] The first swing arm is hollow inside;

[0048] a first driving mechanism connected to one end of the first swing arm;

[0049] A second swing arm is hollow inside, and one end of the second swing arm is rotatably disposed on the other end of the first swing arm;

[0050] A wafer taking hand is rotatably arranged at the other end of the second swing arm;

[0051] The transmission device as described in the above embodiment;

[0052] a second driving mechanism connected to the other end of the first transmission mechanism;

[0053] The third driving mechanism is connected to the second transmission mechanism.

[0054] The beneficial effect of this embodiment is that: the first drive mechanism drives the first swing arm to rotate; under the driving action of the second drive mechanism, the second swing arm can be rotated relative to the first swing arm through the transmission of the first transmission mechanism in the first swing arm, and under the driving action of the third drive mechanism, the wafer picking hand can be rotated relative to the second swing arm through the transmission of the second transmission mechanism in the first swing arm and the third transmission mechanism in the second swing arm. Since the first swing arm, the second swing arm, and the wafer picking hand rotate independently of each other, the first swing arm, the second swing arm, and the wafer picking hand can achieve infinite rotation without rotating clockwise for a certain angle and then rotating counterclockwise to the initial position, which speeds up the production cycle and achieves infinite rotation of the wafer picking hand, thereby solving the problem of limited movement and angle adjustment of the existing vacuum manipulator.

[0055] In a possible embodiment, the vacuum manipulator further includes a first tensioning assembly corresponding to the first transmission belt and arranged in the first swing arm, wherein the first tensioning assembly is used to adjust the tension of the first transmission belt; or,

[0056] The vacuum manipulator further comprises a second tensioning assembly corresponding to the second transmission belt and arranged in the first swing arm, wherein the second tensioning assembly is used to adjust the tension of the second transmission belt; or,

[0057] The vacuum manipulator also includes a third tensioning assembly corresponding to the third transmission belt and arranged in the second swing arm, and the third tensioning assembly is used to adjust the tension of the third transmission belt.

[0058] The beneficial effects of this embodiment are: the tension of the first transmission belt is adjusted by the first tensioning assembly to avoid the first transmission belt loosening and slipping and affecting the stability of force transmission; the tension of the second transmission belt is adjusted by the second tensioning assembly to avoid the second transmission belt loosening and slipping and affecting the stability of force transmission; the tension of the third transmission belt is adjusted by the third tensioning assembly to avoid the third transmission belt loosening and slipping and affecting the stability of force transmission.

[0059] The present invention further provides a transmission method of a vacuum manipulator, using the vacuum manipulator in the above embodiment, the transmission method comprises:

[0060] driving the first swing arm to rotate by the first driving mechanism;

[0061] The second driving mechanism drives one end of the first transmission mechanism, and the first transmission mechanism drives the second swing arm to rotate;

[0062] The second transmission mechanism is driven by the third driving mechanism, and the wafer taking hand is driven to rotate through the transmission of the second transmission mechanism and the third transmission mechanism.

[0063] For the beneficial effects of this embodiment, please refer to the above description of the beneficial effects of the vacuum manipulator. BRIEF DESCRIPTION OF THE DRAWINGS

[0064] Figure 1 It is a stereoscopic diagram of the vacuum robot of the present invention in the first specific embodiment.

[0065] Figure 2 for Figure 1 Cross-section view along the AA direction.

[0066] Figure 3 It is a stereoscopic diagram of the vacuum manipulator of the present invention in the second specific embodiment.

[0067] Figure 4 It is a schematic diagram of the second transmission mechanism in the vacuum manipulator of the present invention.

[0068] Figure 5 It is a schematic diagram of the third transmission mechanism in the vacuum manipulator of the present invention.

[0069] Figure 6 It is a schematic diagram of the first transmission mechanism in the vacuum manipulator of the present invention.

[0070] Figure 7 FIG. 4 is a schematic diagram of the arrangement of the second holes and the first protrusions of the vacuum robot of the present invention in one embodiment.

[0071] Figure 8 FIG. 4 is a schematic diagram of the arrangement of the second holes and the first protrusions of the vacuum robot of the present invention in another embodiment.

[0072] Fig. 9 FIG. 4 is a schematic diagram of the arrangement of the first holes and the second protrusions of the vacuum robot of the present invention in another embodiment.

[0073] Fig.10 FIG. 4 is a schematic diagram of the arrangement of the first holes and the second protrusions of the vacuum robot of the present invention in yet another embodiment.

[0074] Fig.11 It is a schematic diagram of the first tensioning assembly in the vacuum manipulator of the present invention.

[0075] Description of reference numerals: 110, first swing arm; 111, boss; 112, fifth bearing; 113, through hole; 120, second swing arm; 121, through hole; 122, connecting seat; 123, sixth bearing; 124, opening; 130, wafer taking hand; 140, first transmission mechanism; 141, first driving wheel; 142, first driven wheel; 1421, flange; 143, first transmission belt; 144, first protrusion; 145, first hole; 146, second hole; 147, second protrusion; 150, second transmission mechanism; 151, second driving wheel; 152, second driven wheel; 1521, connecting platform; 1522, fourth bearing; 153, second transmission belt; 154, third protrusion; 1 55. third hole; 160. third transmission mechanism; 161. third driving wheel; 1611. extension; 162. third driven wheel; 1621. flange; 163. third transmission belt; 164. fifth protrusion; 165. fifth hole; 170. first tensioning assembly; 171. first wheel seat; 172. first wheel axle; 1721. first adjustment hole; 173. first tensioning wheel; 174. first lower bearing; 175. first upper bearing; 176. first end cover; 177. second fastener; 180. third tensioning assembly; 191. first shaft cylinder; 192. second shaft cylinder; 193. third shaft cylinder; 194. first driving mechanism; 195. second driving mechanism; 196. third driving mechanism. DETAILED DESCRIPTION

[0076] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0077] In view of the problems existing in the prior art, an embodiment of the present invention provides a transmission device applied to a vacuum robot, wherein the vacuum robot comprises a first swing arm 110, a second swing arm 120 and a wafer taking hand 130, see Figures 1 to 3The transmission device includes: a first transmission mechanism 140, a second transmission mechanism 150 and a third transmission mechanism 160. The first transmission mechanism 140 is disposed in the first swing arm 110 and arranged along the length direction of the first swing arm 110. One end of the first transmission mechanism 140 extends out of the first swing arm 110 and is connected to one end of the second swing arm 120. The second transmission mechanism 150 is disposed in the first swing arm 110. The third transmission mechanism 160 is disposed in the second swing arm 120 and arranged along the length direction of the second swing arm 120. One end of the third transmission mechanism 160 is connected to the second transmission mechanism 150. The other end of the third transmission mechanism 160 extends out of the other end of the second swing arm 120 and is connected to the wafer handling hand 130.

[0078] In this embodiment, by driving one end of the first transmission mechanism 140 and transmitting the rotational force to the second swing arm 120 through the transmission of the first transmission mechanism 140, the second swing arm 120 can rotate infinitely relative to the first swing arm 110. By driving the second transmission mechanism 150 and transmitting the rotational force to the wafer pick-up hand 130 through the transmission of the second transmission mechanism 150 and the third transmission mechanism 160, the wafer pick-up hand 130 can rotate infinitely relative to the second swing arm 120. It should be noted that infinite rotation means that any angle and any number of turns can be rotated in the clockwise or counterclockwise direction without being limited by the rotation angle and the number of turns. Therefore, the vacuum manipulator using this transmission device can realize the movement of any position within the area covered by its extension, and breaks the limitation of the angle adjustment of the traditional manipulator, so that the wafer pick-up hand 130 can realize the precise adjustment of any angle at any position. This design greatly improves the flexibility of movement and rotation of the manipulator, so that it can adapt to more complex operating environments and a wider range of process requirements.

[0079] The second transmission mechanism 150 mentioned above is specifically described below with examples. Figure 2 and Figure 4 The second transmission mechanism 150 includes a second driving wheel 151, a second driven wheel 152 and a second transmission belt 153. The second driving wheel 151 is rotatably disposed in the first swing arm 110 and is located at one end of the first swing arm 110. The second driven wheel 152 is rotatably disposed in the first swing arm 110 and is located at the other end of the first swing arm 110, and the second driven wheel 152 is connected to one end of the third transmission mechanism 160. The second transmission belt 153 is wound around the second driving wheel 151 and the second driven wheel 152, so that the second driving wheel 151 drives the second driven wheel 152 to rotate synchronously, and transmits the rotational force of the second driving wheel 151 to the second driven wheel 152.

[0080] The first transmission mechanism 140 mentioned above is specifically described below by way of example; see Figure 2 , Figure 4 and Figure 6 The first transmission mechanism 140 includes a first driving wheel 141, a first driven wheel 142 and a first transmission belt 143. The first driving wheel 141 is rotatably disposed on the second driving wheel 151. The first driven wheel 142 is rotatably disposed on the second driven wheel 152, and the first driven wheel 142 partially extends out of the other end of the first swing arm 110 and is connected to one end of the second swing arm 120. The first transmission belt 143 is wound around the first driving wheel 141 and the first driven wheel 142, so that the first driving wheel 141 drives the first driven wheel 142 to rotate synchronously, and transmits the rotational force of the first driving wheel 141 to the first driven wheel 142.

[0081] The third transmission mechanism 160 mentioned above is specifically described below by way of example; Figure 2 , Figure 4 and Figure 5 The third transmission mechanism 160 includes a third driving wheel 161, a third driven wheel 162 and a third transmission belt 163. The third driving wheel 161 is located in one end of the second swing arm 120 and partially extends out of one end of the second swing arm 120. The third driving wheel 161 passes through the first driven wheel 142 and is connected to the second driven wheel 152. The third driven wheel 162 is rotatably arranged in the second swing arm 120 and located in the other end of the second swing arm 120. The third driven wheel 162 partially extends out of the other end of the second swing arm 120 and is used to connect with the wafer taking hand 130. The third transmission belt 163 is wound around the third driving wheel 161 and the third driven wheel 162, so that the third driving wheel 161 drives the third driven wheel 162 to rotate synchronously, and transmits the rotational force of the third driving wheel 161 to the third driven wheel 162.

[0082] It should be noted that the relative position relationship between the first swing arm 110 and the second swing arm 120, and the relative position relationship between the second swing arm 120 and the wafer taking hand 130 can be flexibly set according to actual production requirements, and are not limited here. Two different specific embodiments of the relative position relationship of the first swing arm 110, the second swing arm 120, and the wafer taking hand 130 and the internal structure setting relationship are provided below.

[0083] In the first specific embodiment, see Figure 2, one end of the second swing arm 120 is rotatably disposed on the other end of the first swing arm 110, and the wafer taking hand 130 is rotatably disposed on the other end of the second swing arm 120. The first driven wheel 142 is rotatably disposed on the top of the second driven wheel 152, and the top of the first driven wheel 142 extends out of the top surface of the other end of the first swing arm 110 and is connected to the bottom surface of one end of the second swing arm 120. The third driving wheel 161 is located in one end of the second swing arm 120 and extends out of the bottom surface of one end of the second swing arm 120. The third driving wheel 161 passes through the first driven wheel 142 and is connected to the top of the second driven wheel 152. The third driven wheel 162 is rotatably disposed in the second swing arm 120 and is located in the other end of the second swing arm 120. The top of the third driven wheel 162 extends out of the top surface of the other end of the second swing arm 120 and is connected to the wafer taking hand 130.

[0084] In the second specific embodiment, one end of the second swing arm 120 is rotatably disposed under the other end of the first swing arm 110, and the wafer pick-up hand 130 is rotatably disposed under the other end of the second swing arm 120. The first driven wheel 142 is rotatably disposed at the bottom of the second driven wheel 152, and the bottom of the first driven wheel 142 extends out of the bottom surface of the other end of the first swing arm 110 and is connected to the top surface of one end of the second swing arm 120. The third driving wheel 161 is located in one end of the second swing arm 120 and extends out of the top surface of one end of the second swing arm 120. The third driving wheel 161 passes through the first driven wheel 142 and is connected to the bottom of the second driven wheel 152. The third driven wheel 162 is rotatably disposed in the second swing arm 120 and is located in the other end of the second swing arm 120. The bottom of the third driven wheel 162 extends out of the bottom surface of the other end of the second swing arm 120 and is connected to the wafer pick-up hand 130.

[0085] The following is a detailed description of the possible scenarios of the transmission mechanism, which can be flexibly set according to actual production needs to ensure the stability of torque transmission between the pulleys;

[0086] In the first embodiment, see Figure 6The outer circumference of the first driving wheel 141 and the outer circumference of the first driven wheel 142 are respectively provided with a first protrusion 144, and the first transmission belt 143 is provided with a first hole 145 that can cooperate with the first protrusion 144, and / or, the outer circumference of the first driving wheel 141 and the outer circumference of the first driven wheel 142 are respectively provided with a second hole 146, and the first transmission belt 143 is provided with a second protrusion 147 that can cooperate with the second hole 146. Through the cooperation of the first protrusion 144 and the first hole 145, and the cooperation of the second hole 146 and the second protrusion 147, the contact area and friction between the first driving wheel 141 and the first transmission belt 143, and between the first driven wheel 142 and the first transmission belt 143 can be effectively increased, thereby reducing the slipping phenomenon in the transmission process and enhancing the stability and reliability of power transmission. Compared with gear transmission, it can reduce mechanical wear and provide cleanliness.

[0087] When the outer circumference of the first driving wheel 141 and the outer circumference of the first driven wheel 142 are both provided with the first protrusion 144 and the second hole 146 and the first transmission belt 143 is provided with the first hole 145 and the second protrusion 147, the first protrusion 144 and the second hole 146 are staggered, for example, Figure 7 As shown, the first protrusions 144 and the second holes 146 may be arranged in different rows, or, as shown in FIG. Figure 8 As shown, the first protrusions 144 and the second holes 146 may be located in the same row and arranged alternately; the first holes 145 and the second protrusions 147 may be arranged staggered, for example, as Fig. 9 As shown, the first holes 145 and the second protrusions 147 may be arranged in different rows, or, as shown in FIG. Fig.10 As shown, the first holes 145 and the second protrusions 147 may be located in the same row and arranged alternately.

[0088] See also Figure 7 and Fig. 9 The first protrusion 144, the second hole 146, the first hole 145, and the second protrusion 147 are arranged in several rows, respectively, and the rows on the first driving wheel 141, the first driven wheel 142, and the first transmission belt 143 can be arranged relative to each other or staggered. The shapes of the first protrusion 144, the second hole 146, the first hole 145, and the second protrusion 147 are not specifically limited. For example, the first protrusion 144 and the second protrusion 147 can be hemispherical, strip-shaped, etc., and the corresponding first hole 145 and the second hole 146 can be round holes or strip-shaped holes.

[0089] For details, see Figure 6For the case where the first protrusion 144 is set, the contact area between the first driving wheel 141 and the first transmission belt 143 and / or the contact area between the first driven wheel 142 and the first transmission belt 143 corresponds to at least two first protrusions 144 set at intervals; for the case where the second holes 146 are set, the contact area between the first driving wheel 141 and the first transmission belt 143 and / or the contact area between the first driven wheel 142 and the first transmission belt 143 corresponds to at least two second holes 146 set at intervals; for the case where the first protrusion 144 and the second hole 146 are set, the contact area between the first driving wheel 141 and the first transmission belt 143 and / or the contact area between the first driven wheel 142 and the first transmission belt 143 corresponds to n first protrusions 144 and m second holes 146 set at intervals, where n and m are positive integers. As the first transmission belt 143 rotates, the first protrusion 144 (second hole 146) and the corresponding first hole 145 (second protrusion 147) on the contact area of ​​the first driving wheel 141 (first driven wheel 142) currently with the first transmission belt 143 are separated, and the first protrusion 144 (second hole 146) and the corresponding first hole 145 (second protrusion 147) on the non-contact area of ​​the first driving wheel 141 (first driven wheel 142) currently cooperate with the first protrusion 144 (second hole 146) and the corresponding first hole 145 (second protrusion 147) on the first driving wheel 141 (first driven wheel 142). In other words, the first protrusion 144 and / or the second hole 146 are cut out in the contact area between the first driving wheel 141 (the first driven wheel 142) and the first transmission belt 143, and the first protrusion 144 and / or the second hole 146 are cut into the non-contact area between the first driving wheel 141 (the first driven wheel 142) and the first transmission belt 143, and there are always protrusions and holes matching between the first driving wheel 141 and the first transmission belt 143, and between the second driving wheel 151 and the first transmission belt 143, which improves the stability and reliability of torque transmission.

[0090] In a possible embodiment, a first ratio range of the diameter of the first driving wheel 141 and the thickness of the first transmission belt 143, and a second ratio range of the diameter of the first driven wheel 142 and the thickness of the first transmission belt 143 are both 350-450. Preferably, the first ratio range and the second ratio range are 400, the diameter of the first driving wheel 141 and / or the diameter of the first driven wheel 142 is 600 mm, and the thickness of the first transmission belt 143 is 0.15 mm.

[0091] In the second embodiment, see Figure 2 and Figure 4The outer circumference of the second driving wheel 151 and the outer circumference of the second driven wheel 152 are respectively provided with a third protrusion 154, and the second transmission belt 153 is provided with a third hole 155 that can cooperate with the third protrusion 154, and / or the outer circumference of the second driving wheel 151 and the outer circumference of the second driven wheel 152 are respectively provided with a fourth hole, and the second transmission belt 153 is provided with a fourth protrusion that can cooperate with the fourth hole. The cooperation between the third protrusion 154 and the third hole 155, and between the fourth hole and the fourth protrusion are similar to the cooperation between the first protrusion 144 and the first hole 145, and between the second hole 146 and the second protrusion 147, and will not be repeated here.

[0092] See also Figure 2 and Figure 4 When the outer circumference of the second driving wheel 151 and the outer circumference of the second driven wheel 152 are both provided with the third protrusion 154 and the fourth hole and the second transmission belt 153 is provided with the third hole 155 and the fourth protrusion, the third protrusion 154 and the fourth hole are staggered, for example, the third protrusion 154 and the fourth hole can be arranged in different rows, or the third protrusion 154 and the fourth hole can be arranged in the same row and alternately; the third hole 155 and the fourth protrusion are staggered, for example, the third hole 155 and the fourth protrusion can be arranged in different rows, or the third hole 155 and the fourth protrusion can be arranged in the same row and alternately.

[0093] See also Figure 2 and Figure 4 The third protrusion 154, the fourth hole, the third hole 155, and the fourth protrusion are respectively arranged in several rows, and the rows on the second driving wheel 151, the second driven wheel 152, and the second transmission belt 153 can be arranged relative to each other or staggered. The shapes of the third protrusion 154, the fourth hole, the third hole 155, and the fourth protrusion are not specifically limited. For example, the third protrusion 154 and the fourth protrusion can be hemispherical, strip-shaped, etc., and the corresponding third hole 155 and the fourth hole can be round holes or strip-shaped holes.

[0094] For details, see Figure 2 and Figure 4For the case of setting the third protrusion 154, the contact area between the second driving wheel 151 and the second transmission belt 153 and / or the contact area between the second driven wheel 152 and the second transmission belt 153 corresponds to at least two third protrusions 154 arranged at intervals; for the case of setting the fourth hole, the contact area between the second driving wheel 151 and the second transmission belt 153 and / or the contact area between the second driven wheel 152 and the second transmission belt 153 corresponds to at least two fourth holes arranged at intervals; for the case of setting the third protrusion 154 and the fourth hole, the contact area between the second driving wheel 151 and the second transmission belt 153 and / or the contact area between the second driven wheel 152 and the second transmission belt 153 corresponds to p third protrusions 154 and q fourth holes arranged at intervals, and p and q are positive integers. The working principle of the third protrusion 154 and the fourth hole on the second driving wheel 151 and the second driven wheel 152 is similar to the working principle of the first protrusion 144 and the second hole 146 on the first driving wheel 141 and the first driven wheel 142, and will not be repeated here.

[0095] In a possible embodiment, the third ratio range of the diameter of the second driving wheel 151 and the thickness of the second transmission belt 153, and the fourth ratio range of the diameter of the second driven wheel 152 and the thickness of the first transmission belt 143 are 350-450. Preferably, the third ratio range and the fourth ratio range are 400, the diameter of the second driving wheel 151 and / or the diameter of the second driven wheel 152 is 600 mm, and the thickness of the second transmission belt 153 is 0.15 mm.

[0096] In the third embodiment, see Figure 2 and Figure 5 The outer circumference of the third driving wheel 161 and the outer circumference of the third driven wheel 162 are respectively provided with a fifth protrusion 164, and the third transmission belt 163 is provided with a fifth hole 165 that can be matched with the fifth protrusion 164, and / or, the outer circumference of the third driving wheel 161 and the outer circumference of the third driven wheel 162 are respectively provided with a sixth hole, and the third transmission belt 163 is provided with a sixth protrusion that can be matched with the sixth hole. The cooperation between the fifth protrusion 164 and the fifth hole 165, and between the sixth hole and the sixth protrusion are similar to the cooperation between the first protrusion 144 and the first hole 145, and between the second hole 146 and the second protrusion 147, and will not be repeated here.

[0097] See also Figure 2 and Figure 5When the outer circumference of the third driving wheel 161 and the outer circumference of the third driven wheel 162 are both provided with the fifth protrusion 164 and the sixth hole and the third transmission belt 163 is provided with the fifth hole 165 and the sixth protrusion, the fifth protrusion 164 and the sixth hole are staggered, for example, the fifth protrusion 164 and the sixth hole can be arranged in different rows, or the fifth protrusion 164 and the sixth hole can be arranged in the same row and alternately; the fifth hole 165 and the sixth protrusion are staggered, for example, the fifth hole 165 and the sixth protrusion can be arranged in different rows, or the fifth hole 165 and the sixth protrusion can be arranged in the same row and alternately.

[0098] See also Figure 2 and Figure 5 The fifth protrusion 164, the sixth hole, the fifth hole 165, and the sixth protrusion are respectively arranged in several rows, and the rows on the third driving wheel 161, the third driven wheel 162, and the third transmission belt 163 can be arranged relative to each other or staggered. The shapes of the fifth protrusion 164, the sixth hole, the fifth hole 165, and the sixth protrusion are not specifically limited. For example, the fifth protrusion 164 and the sixth protrusion can be hemispherical, strip-shaped, etc., and the corresponding fifth hole 165 and the sixth hole can be round holes or strip-shaped holes.

[0099] For details, see Figure 2 and Figure 5 For the case of setting the fifth protrusion 164, the contact area between the third driving wheel 161 and the third transmission belt 163 and / or the contact area between the third driven wheel 162 and the third transmission belt 163 corresponds to at least two fifth protrusions 164 arranged at intervals; for the case of setting the sixth hole, the contact area between the third driving wheel 161 and the third transmission belt 163 and / or the contact area between the third driven wheel 162 and the third transmission belt 163 corresponds to at least two sixth holes arranged at intervals; for the case of setting the fifth protrusion 164 and the sixth hole, the contact area between the third driving wheel 161 and the third transmission belt 163 and / or the contact area between the third driven wheel 162 and the third transmission belt 163 corresponds to x fifth protrusions 164 and y sixth holes arranged at intervals, where x and y are positive integers. The working principle of the fifth protrusion 164 and the sixth hole on the third driving wheel 161 and the third driven wheel 162 is similar to the working principle of the first protrusion 144 and the second hole 146 on the first driving wheel 141 and the first driven wheel 142, and will not be repeated here.

[0100] In a possible embodiment, the fifth ratio range of the diameter of the third driving wheel 161 and the thickness of the third transmission belt 163, and the sixth ratio range of the diameter of the third driven wheel 162 and the thickness of the third transmission belt 163 are both 350-450. Preferably, the fifth ratio range and the sixth ratio range are 400, the diameter of the third driving wheel 161 and / or the diameter of the third driven wheel 162 is 600 mm, and the thickness of the third transmission belt 163 is 0.15 mm.

[0101] In a specific embodiment, see Figure 2 and Figure 4 , a connecting platform 1521 is formed protruding from the second driven wheel 152. The first driven wheel 142 is cylindrical and rotatably sleeved on the connecting platform 1521. Specifically, the first driven wheel 142 is rotatably sleeved on the connecting platform 1521 through the fourth bearing 1522. The connecting platform 1521 provides a stable support base for the first driven wheel 142. The fourth bearing 1522 reduces the friction force, so that the first driven wheel 142 can smoothly rotate around the connecting platform 1521. One end of the first driven wheel 142 close to the second swing arm 120 is bent outward to form a flange 1421. The flange 1421 is annular. The other end of the first swing arm 110 is provided with a through hole 113 adapted to the flange 1421. The top surface of the flange 1421 extends out of the through hole 113 and is connected to one of the ends of the second swing arm 120. The flange 1421 can support one end of the second swing arm 120 to enhance the stability of the second swing arm 120 when rotating.

[0102] In another specific embodiment, see Figure 2 , an extension portion 1611 is formed on the third driving wheel 161, and the extension portion 1611 extends out of one end of the second swing arm 120, extends into the first driven wheel 142 and is fixedly connected to the connecting platform 1521. Specifically, one end of the second swing arm 120 is provided with a through hole 121 communicating with the internal space of the second swing arm 120 corresponding to the extension portion 1611, and the extension portion 1611 extends from the through hole 121 into the first driven wheel 142 and is inserted and fixed to an end of the connecting platform 1521 close to the second swing arm 120. The through hole 121 is located within the outer edge range of the flange 1421, and the flange 1421 can play a role in sealing the connection between the first swing arm 110 and the second swing arm 120, preventing external impurities from entering the structure, and extending the service life of internal components.

[0103] In some embodiments, see Figure 2 , the center line of the first driving wheel 141 and the center line of the second driving wheel 151 are arranged collinearly; and / or, the center line of the second driven wheel 152, the center line of the first driven wheel 142 and the center line of the third driving wheel 161 are arranged collinearly.

[0104] Another embodiment of the present invention further provides a vacuum manipulator, see Figure 2The vacuum robot comprises: a first swing arm 110, a second swing arm 120, a wafer pick-up hand 130, a transmission device as in any of the above embodiments, a first drive mechanism 194, a second drive mechanism 195, and a third drive mechanism 196. The first swing arm 110 is hollow inside, and the first drive mechanism 194 is connected to one end of the first swing arm 110. The second swing arm 120 is hollow inside, and one end of the second swing arm 120 is rotatably disposed at the other end of the first swing arm 110. The wafer pick-up hand 130 is rotatably disposed at the other end of the second swing arm 120. The second drive mechanism 195 is connected to the other end of the first transmission mechanism 140, and the third drive mechanism 196 is connected to the second transmission mechanism 150.

[0105] In this embodiment, the first driving mechanism 194 directly drives the first swing arm 110 to rotate, so that the first swing arm 110 can rotate at any angle and any number of turns in the clockwise direction or counterclockwise direction. The second driving mechanism 195 drives the first transmission mechanism 140, and the first transmission mechanism 140 transmits the rotational force to the second swing arm 120, so that the second swing arm 120 can independently rotate at any angle and any number of turns in the clockwise direction or counterclockwise direction relative to the first swing arm 110. The third driving mechanism 196 drives the second transmission mechanism 150, and transmits the rotational force to the wafer picking hand 130 through the second transmission mechanism 150 and the third transmission mechanism 160, so that the wafer picking hand 130 can independently rotate at any angle and any number of turns in the clockwise direction or counterclockwise direction relative to the second swing arm 120. Since the first swing arm 110 and the second swing arm 120 can rotate independently, and their rotation range is not limited, the vacuum robot can achieve movement to any position within the wide area covered by its extension. Moreover, the limitation of the rotation angle and the number of rotations of the traditional manipulator is broken, so that the wafer handling hand 130 can realize the precise adjustment of any angle at any position. This design greatly improves the mobility and rotation flexibility of the manipulator, so that it can adapt to more complex operating environments and a wider range of process requirements.

[0106] In one embodiment, see Figure 2 , a boss 111 is provided on the inner wall of the other end of the first swing arm 110 corresponding to the second driven wheel 152, and the second driven wheel 152 is rotatably mounted on the boss 111. Specifically, the second driven wheel 152 is rotatably mounted on the boss 111 through the fifth bearing 112. The boss 111 provides a stable support base for the second driven wheel 152, and the friction force is reduced by the fifth bearing 112, so that the second driven wheel 152 can smoothly rotate around the boss 111.

[0107] In yet another embodiment, see Figure 2, a connecting seat 122 is provided on the inner wall of the other end of the second swing arm 120 corresponding to the third driven wheel 162, and the third driven wheel 162 is rotatably sleeved on the connecting seat 122. Specifically, the third driven wheel 162 is rotatably sleeved on the connecting seat 122 through the sixth bearing 123. The connecting seat 122 provides a stable support base for the third driven wheel 162, and the friction is reduced by the sixth bearing 123, so that the third driven wheel 162 can smoothly rotate around the connecting seat 122.

[0108] For details, see Figure 2 The boss 111, the connecting seat 122, and the connecting platform 1521 can be in other shapes such as a columnar shape or a cylindrical shape.

[0109] In one embodiment, see Figure 2 The other end of the second swing arm 120 corresponds to the wafer taking hand 130 and is provided with an opening 124 communicating with the inside of the second swing arm 120. The third driven wheel 162 corresponds to the wafer taking hand 130 and is formed with an annular flange 1621. The flange 1621 extends out of the other end of the second swing arm 120 from the opening 124. One end of the wafer taking hand 130 close to the second swing arm 120 is fixedly sleeved on the flange 1621. The wafer taking hand 130 can rotate with the rotation of the third driven wheel 162. During the rotation of the wafer taking hand 130, the wafer taking hand 130 always covers the opening 124 to ensure the sealing of the installation point of the wafer taking hand 130 and the second swing arm 120.

[0110] In one possible embodiment, see Figure 2 The vacuum manipulator further includes a first shaft cylinder 191, a second shaft cylinder 192 and a third shaft cylinder 193 which are sequentially sleeved from the outside to the inside in the radial direction. One end of the first shaft cylinder 191 is connected to one end of the first swing arm 110, and the other end of the first shaft cylinder 191 is connected to the first driving mechanism 194. One end of the second shaft cylinder 192 extends out of the first shaft cylinder 191 and is connected to the second driving wheel 151. The other end of the second shaft cylinder 192 is connected to the third driving mechanism 196. One end of the third shaft cylinder 193 extends out of the second driving wheel 151 and is connected to the first driving wheel 141. The other end of the third shaft cylinder 193 is connected to the second driving mechanism 195. Specifically, the center line of the first shaft cylinder 191, the center line of the second shaft cylinder 192, the center line of the third shaft cylinder 193, the center line of the first driving wheel 141, and the center line of the second driving wheel 151 are collinearly arranged. The first driving mechanism 194 , the second driving mechanism 195 , and the third driving mechanism 196 all use motors, preferably direct drive motors, to achieve rotational drive of the shaft cylinder.

[0111] In this embodiment, the first shaft cylinder 191 is driven to rotate by the driving end of the first driving mechanism 194, and the first shaft cylinder 191 drives the first swing arm 110 to rotate around the center line of the first shaft cylinder 191. The third shaft cylinder 193 is driven to rotate by the driving end of the second driving mechanism 195, and the third shaft cylinder 193 drives the first driving wheel 141 to rotate around the center line of the third shaft cylinder 193. The first driven wheel 142 can also be rotated through the transmission of the first transmission belt 143, and then the second swing arm 120 connected to the first driven wheel 142 can rotate relative to the first swing arm 110. The second shaft cylinder 192 is driven to rotate by the driving end of the third driving mechanism 196, and the second shaft cylinder 192 drives the second driving wheel 151 to rotate around the center line of the second shaft cylinder 192. The second driven wheel 152 can also be rotated through the transmission of the second transmission belt 153. Since the third driving wheel 161 is connected to the second driven wheel 152, the third driving wheel 161 can also be rotated. The third driven wheel 162 can also be rotated through the transmission of the third transmission belt 163, and then the wafer picking hand 130 connected to the third driven wheel 162 can rotate relative to the second swing arm 120.

[0112] In one embodiment, see Figure 2 and Fig.11 The vacuum manipulator further includes a first tensioning assembly 170 corresponding to the first transmission belt 143 and disposed in the first swing arm 110, and the first tensioning assembly 170 is used to adjust the tension of the first transmission belt 143. There can be one or more first tensioning assemblies 170, and the first tensioning assembly 170 can be located on one side of the first transmission belt 143 or on two opposite sides.

[0113] See also Figure 2 and Fig.11 The first tensioning assembly 170 includes a first wheel seat 171 and a first tensioning wheel 173. The first wheel seat 171 is movably and adjustably arranged in the first swing arm 110 and can be moved and adjusted in a direction close to or away from the first transmission belt 143. The first wheel seat 171 is provided with a first wheel shaft 172. The first tensioning wheel 173 is rotatably sleeved on the first wheel shaft 172. The outer circumference of the first tensioning wheel 173 is in contact with the first transmission belt 143. The tension of the first transmission belt 143 can be adjusted by moving and adjusting the position of the first wheel seat 171.

[0114] For details, see Figure 2 and Fig.11The first wheel seat 171 is provided with a first adjustment hole 1721 (for example, an elongated hole), and the first wheel seat 171 is installed on the inner wall of the first swing arm 110 by passing a first fastener (not shown in the figure) through the first adjustment hole 1721. Before locking the first fastener, the first wheel seat 171 is moved and adjusted, that is, the position of the first fastener in the first adjustment hole 1721 is adjusted, so that the first wheel seat 171 can be moved toward or away from the first transmission belt 143. The first fastener can be a screw, a bolt, etc.

[0115] The first tensioning wheel 173 is rotatably mounted on the first wheel shaft 172 via a bearing, and the bearing is detachably mounted on the first wheel shaft 172 .

[0116] For details, see Figure 2 and Fig.11 The first tensioning assembly 170 further includes a first lower bearing 174, a first upper bearing 175, a first end cover 176 and a second fastener 177. The first lower bearing 174 and the first upper bearing 175 are respectively sleeved on the first axle 172. The inner ring of the first lower bearing 174 and the inner ring of the first upper bearing 175 are respectively connected with the first axle 172 by interference fit. The first upper bearing 175 is located above the first lower bearing 174. The first tensioning wheel 173 is sleeved on the first lower bearing 174 and the first upper bearing 175. The inner circumference of the first tensioning wheel 173 is respectively connected with the outer ring of the first lower bearing 174 and the outer ring of the first upper bearing 175 by interference fit. The first axle 172 is provided with a first mounting hole at one end away from the first wheel seat 171. The first end cover 176 is annular and covers one end of the first upper bearing 175 away from the first wheel seat 171. The second fastener 177 passes through the first end cover 176 and is threadedly connected with the first mounting hole. The second fastener 177 may be a screw, a bolt, or the like.

[0117] In another embodiment, the vacuum manipulator further includes a second tensioning assembly (not shown) disposed in the first swing arm 110 corresponding to the second transmission belt 153, and the second tensioning assembly is used to adjust the tension of the second transmission belt 153. The structure of the second tensioning assembly is the same as that of the first tensioning assembly 170, and will not be described in detail here.

[0118] In another embodiment, see Figure 2 and Figure 5 The vacuum manipulator further includes a third tensioning assembly 180 corresponding to the third transmission belt 163 and arranged in the second swing arm 120. The third tensioning assembly 180 is used to adjust the tension of the third transmission belt 163. The structure of the third tensioning assembly 180 is the same as that of the first tensioning assembly 170, and will not be repeated here.

[0119] In one embodiment, the wafer handling hand 130 is provided with a vacuum adsorption device for adsorbing the wafer, such as a vacuum suction cup.

[0120] In addition, the present invention further provides a transmission method of a vacuum manipulator, using the vacuum manipulator in the above embodiment, the transmission method comprises:

[0121] S201: driving the first swing arm 110 to rotate via the first driving mechanism 194;

[0122] S202: driving one end of the first transmission mechanism 140 through the second driving mechanism 195, and driving the second swing arm 120 to rotate through the transmission of the first transmission mechanism 140;

[0123] S203 : driving the second transmission mechanism 150 through the third driving mechanism 196 , and driving the wafer taking hand 130 to rotate through the transmission of the second transmission mechanism 150 and the third transmission mechanism 160 .

[0124] In one embodiment, step S201 includes: driving the first shaft cylinder 191 to rotate by the first driving mechanism 194, thereby driving the first swing arm 110 to rotate.

[0125] In another embodiment, step S202 includes: driving the third shaft cylinder 193 to rotate through the second driving mechanism 195, the third shaft cylinder 193 drives the first driving wheel 141 to rotate, and through the transmission of the first transmission belt 143, the first driven wheel 142 is driven to rotate synchronously with the first driving wheel 141, and the first driven wheel 142 drives the second swing arm 120 to rotate relative to the first swing arm 110.

[0126] In another embodiment, step S203 includes: driving the second shaft cylinder 192 to rotate through the third driving mechanism 196, the second shaft cylinder 192 drives the second driving wheel 151 to rotate, and through the transmission of the second transmission belt 153, the second driven wheel 152 is driven to rotate synchronously with the second driving wheel 151, the second driven wheel 152 drives the third driving wheel 161 to rotate, and through the transmission of the third transmission belt 163, the third driven wheel 162 and the third driving wheel 161 rotate synchronously, and the third driven wheel 162 drives the wafer picking hand 130 to rotate relative to the second swing arm 120.

[0127] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and changes can be made to these embodiments. However, it should be understood that such modifications and changes are within the scope and spirit of the present invention in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with ordinary skills in the field to which the present invention belongs. The words "including" and the like used herein mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

Claims

1. A transmission device, applied to a vacuum robot, the vacuum robot comprising a first swing arm, a second swing arm and a wafer taking hand, characterized in that: The transmission device comprises: A first transmission mechanism is disposed in the first swing arm and along the length direction of the first swing arm, wherein one end of the first transmission mechanism extends out of the first swing arm and is connected to one end of the second swing arm; A second transmission mechanism is disposed in the first swing arm; A third transmission mechanism is disposed in the second swing arm and along the length direction of the second swing arm, one end of the third transmission mechanism is connected to the second transmission mechanism, and the other end of the third transmission mechanism extends out of the other end of the second swing arm and is connected to the wafer taking hand; The second transmission mechanism comprises a second driving wheel, a second driven wheel and a second transmission belt, the first transmission mechanism comprises a first driving wheel, a first driven wheel and a first transmission belt, the first driving wheel is rotatably arranged on the second driving wheel, a connecting platform is protruded on the second driven wheel, the first driven wheel is cylindrical and rotatably sleeved on the connecting platform, the inner wall of the other end of the first swing arm is provided with a boss corresponding to the second driven wheel, and the second driven wheel is rotatably sleeved on the boss; The third transmission mechanism includes a third driving wheel, a third driven wheel and a third transmission belt. The third driving wheel passes through the first driven wheel and is connected to the second driven wheel. An extension portion is formed on the third driving wheel. The extension portion extends out of one end portion of the second swing arm and extends into the first driven wheel and is fixedly connected to the connecting platform.

2. The transmission device according to claim 1, characterized in that: The second driving wheel is rotatably disposed in the first swing arm and is located at one end of the first swing arm; The second driven wheel is rotatably disposed in the first swing arm and located at the other end of the first swing arm, and the second driven wheel is connected to one end of the third transmission mechanism; The second transmission belt is wound around the second driving wheel and the second driven wheel, so that the second driving wheel drives the second driven wheel to rotate synchronously, and transmits the rotational force of the second driving wheel to the second driven wheel.

3. The transmission device according to claim 2, characterized in that: The first driven wheel is rotatably disposed on the second driven wheel, and the first driven wheel partially extends out of the other end of the first swing arm and is connected to one end of the second swing arm; The first transmission belt is wound around the first driving wheel and the first driven wheel, so that the first driving wheel drives the first driven wheel to rotate synchronously, and transmits the rotational force of the first driving wheel to the first driven wheel.

4. The transmission device according to claim 3, characterized in that: The third driving wheel is located inside one of the ends of the second swing arm and partially extends outside one of the ends of the second swing arm; The third driven wheel is rotatably disposed in the second swing arm and is located in the other end of the second swing arm, and the third driven wheel partially extends out of the other end of the second swing arm and is used to connect with the wafer taking hand; The third transmission belt is wound around the third driving wheel and the third driven wheel, so that the third driving wheel drives the third driven wheel to rotate synchronously, and transmits the rotational force of the third driving wheel to the third driven wheel.

5. The transmission device according to claim 1, characterized in that: A first protrusion is respectively provided on the outer circumference of the first driving wheel and the outer circumference of the first driven wheel, and a first hole that can match with the first protrusion is provided on the first transmission belt; and / or a second hole is respectively provided on the outer circumference of the first driving wheel and the outer circumference of the first driven wheel, and a second protrusion that can match with the second hole is provided on the first transmission belt; A third protrusion is respectively provided on the outer circumference of the second driving wheel and the outer circumference of the second driven wheel, and a third hole which can be matched with the third protrusion is provided on the second transmission belt, and / or a fourth hole is respectively provided on the outer circumference of the second driving wheel and the outer circumference of the second driven wheel, and a fourth protrusion which can be matched with the fourth hole is provided on the second transmission belt; A plurality of fifth protrusions are respectively provided on the outer circumference of the third driving wheel and the outer circumference of the third driven wheel, and a fifth hole which can cooperate with the fifth protrusions is provided on the third transmission belt, and / or a sixth hole is respectively provided on the outer circumference of the third driving wheel and the outer circumference of the third driven wheel, and a sixth protrusion which can cooperate with the sixth hole is provided on the third transmission belt.

6. The transmission device according to claim 5, characterized in that: In the case where the first protrusion is provided, the contact area between the first driving wheel and the first transmission belt and / or the contact area between the first driven wheel and the first transmission belt corresponds to at least two first protrusions provided at intervals; In the case where the second hole is provided, at least two second holes are provided at intervals corresponding to the contact area between the first driving wheel and the first transmission belt and / or the contact area between the first driven wheel and the first transmission belt; In the case where the first protrusions and the second holes are provided, a contact area between the first driving wheel and the first transmission belt and / or a contact area between the first driven wheel and the first transmission belt corresponds to n first protrusions and m second holes provided at intervals, where n and m are positive integers; In the case where the third protrusion is provided, the contact area between the second driving wheel and the second transmission belt and / or the contact area between the second driven wheel and the second transmission belt corresponds to at least two third protrusions provided at intervals; In the case where the fourth hole is provided, the contact area between the second driving wheel and the second transmission belt and / or the contact area between the second driven wheel and the second transmission belt corresponds to at least two fourth holes provided at intervals; In the case where the third protrusion and the fourth hole are provided, the contact area between the second driving wheel and the second transmission belt and / or the contact area between the second driven wheel and the second transmission belt corresponds to p third protrusions and q fourth holes provided at intervals, where p and q are positive integers; In the case where the fifth protrusion is provided, the contact area between the third driving wheel and the third transmission belt and / or the contact area between the third driven wheel and the third transmission belt corresponds to at least two of the fifth protrusions provided at intervals; In the case where the sixth hole is provided, the contact area between the third driving wheel and the third transmission belt and / or the contact area between the third driven wheel and the third transmission belt corresponds to at least two sixth holes provided at intervals; In the case of setting the fifth protrusion and the sixth hole, the contact area between the third driving wheel and the third transmission belt and / or the contact area between the third driven wheel and the third transmission belt corresponds to x fifth protrusions and y sixth holes arranged at intervals, where x and y are positive integers.

7. The transmission device according to claim 1, characterized in that: The center line of the first driving wheel and the center line of the second driving wheel are arranged collinearly; and / or, The center line of the second driven wheel, the center line of the first driven wheel and the center line of the third driving wheel are collinearly arranged.

8. A vacuum manipulator, characterized in that: include: The first swing arm is hollow inside; a first driving mechanism connected to one end of the first swing arm; A second swing arm is hollow inside, and one end of the second swing arm is rotatably disposed on the other end of the first swing arm; A wafer taking hand is rotatably arranged at the other end of the second swing arm; The transmission device according to any one of claims 4 to 7; a second driving mechanism connected to the other end of the first transmission mechanism; The third driving mechanism is connected to the second transmission mechanism.

9. The vacuum robot according to claim 8, characterized in that: It also includes a first tensioning assembly corresponding to the first transmission belt and arranged in the first swing arm, wherein the first tensioning assembly is used to adjust the tension of the first transmission belt; or, It also includes a second tensioning assembly corresponding to the second transmission belt and arranged in the first swing arm, wherein the second tensioning assembly is used to adjust the tension of the second transmission belt; or, It also includes a third tensioning assembly corresponding to the third transmission belt and arranged in the second swing arm, and the third tensioning assembly is used to adjust the tension of the third transmission belt.

10. A transmission method for a vacuum manipulator, characterized in that: Using the vacuum manipulator as claimed in claim 8 or 9, the transmission method comprises: driving the first swing arm to rotate by the first driving mechanism; The second driving mechanism drives one end of the first transmission mechanism, and the first transmission mechanism drives the second swing arm to rotate; The second transmission mechanism is driven by the third driving mechanism, and the wafer taking hand is driven to rotate through the transmission of the second transmission mechanism and the third transmission mechanism.

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