A sample excitation auxiliary device for a glow spectrometer

Abstract

The application discloses a sample excitation auxiliary device for a glow spectrometer, and belongs to the technical field of test devices. The sample excitation auxiliary device for the glow spectrometer is used for applying force to a sample on the glow spectrometer, and comprises a shell and a base. The shell is connected with the base and encloses an installation cavity. A plurality of suction holes are arranged at intervals on the base. The shell is used for contacting a pressing mechanism of the glow spectrometer. Cooling water channels, a cooling liquid inlet and a cooling liquid outlet are arranged on the base. A sealing element is arranged on the base and protrudes from the base. The suction holes are located on the inner side of the sealing element. The sealing element is used for sealingly contacting the sample. An air suction element and a suction pipe are arranged in the installation cavity. The suction pipe is connected with the suction holes and the air suction element, so that the force can be applied to the sample.

Description

Technical Field

[0001] This application belongs to the technical field of experimental devices, and particularly relates to a sample excitation auxiliary device for a glow discharge spectrometer. Background Technology

[0002] A glow discharge spectrometer is a device that can simultaneously perform chemical composition and depth detection.

[0003] During the detection process, a flat sample needs to be placed over the excitation hole for discharge excitation. Before discharge excitation, the glow discharge spectrometer will evacuate the space where the sample acts as a cover.

[0004] In related technologies, when detecting thinner samples, a common technical problem is that the spectrometer cannot discharge and excite, leading to detection failure. Summary of the Invention

[0005] This application aims to at least partially solve the technical problem of frequent detection failures when detecting thin samples using a glow discharge spectrometer. To this end, this application provides a sample excitation auxiliary device for a glow discharge spectrometer.

[0006] This application provides a sample excitation auxiliary device for a glow discharge spectrometer, used to apply a force to a sample on the glow discharge spectrometer. The sample excitation auxiliary device for a glow discharge spectrometer includes:

[0007] The housing and the base are connected and enclosed to form a mounting cavity. The base has a plurality of spaced air intake holes. The housing is used to contact the clamping mechanism of the glow discharge spectrometer. The base also has a cooling water channel for cooling water flow and a coolant inlet and a coolant outlet communicating with the cooling water channel.

[0008] A sealing element is installed on the base and protrudes from the base, the air intake is located inside the sealing element, and the sealing element is used to make sealing contact with the sample.

[0009] The sample includes an air extraction device and an air suction pipe, both of which are installed within the mounting cavity. The air suction pipe connects the air suction hole and the air extraction device to apply force to the sample.

[0010] In some embodiments, the sample excitation auxiliary device for glow discharge spectrometer further includes a controller and a pressure sensor, wherein the pressure sensor and the pumping unit are both electrically connected to the controller;

[0011] Under the condition that the anode orifice of the glow discharge spectrometer is evacuated, the pressure sensor is used to detect the first pressure in the suction tube, and the controller adjusts the suction device according to the second pressure in the anode orifice and the first pressure, so that the first pressure is not greater than the second pressure.

[0012] In some embodiments, the sample excitation auxiliary device for the glow discharge spectrometer further includes an electromagnetic valve mounted on the suction tube. The electromagnetic valve is electrically connected to the controller. Under the condition that the glow discharge spectrometer evacuates the anode orifice, the controller controls the electromagnetic valve to open.

[0013] When the glow discharge spectrometer fills the anode hole with argon gas, the controller controls the solenoid valve to close and the pumping unit to stop.

[0014] In some embodiments, when the sample is placed on the base, the controller controls the pumping unit to operate so that the sample is adsorbed onto the base. 5. The sample excitation auxiliary device for a glow discharge spectrometer according to claim 2, characterized in that the sample excitation auxiliary device for a glow discharge spectrometer further includes a radiator, a water pump, a fan, a first pipe, and a second pipe, wherein the radiator, the water pump, the fan, the first pipe, and the second pipe are all installed within the mounting cavity, and the fan is disposed opposite to the radiator;

[0015] The water inlet of the radiator is connected to the coolant outlet through the first pipe, and the water outlet of the radiator is connected to the coolant inlet through the second pipe. The water pump is installed on the first pipe or the second pipe so that the radiator, the water pump, the first pipe, the second pipe and the base form a circulation loop for the cooling medium to flow.

[0016] In some embodiments, the sample excitation auxiliary device for the glow discharge spectrometer further includes a first temperature sensor and a second temperature sensor. The first temperature sensor is mounted on the base and is used to detect the temperature of the sample. The second temperature sensor is mounted on the second pipe and is used to detect the temperature of the coolant in the second pipe. Both the first temperature sensor and the second temperature sensor are electrically connected to the controller. The controller is also used to adjust the fan and the water pump according to the first temperature detected by the first temperature sensor and the second temperature detected by the second temperature sensor, so that the first temperature meets the requirements.

[0017] In some embodiments, when the glow discharge spectrometer evacuates the anode orifice, the controller controls the water pump and the fan to shut down; when the glow discharge spectrometer fills the anode orifice with argon gas, the controller controls the water pump and the fan to turn on.

[0018] In some embodiments, the sample excitation auxiliary device for the glow discharge spectrometer further includes a positioning element mounted on the base and protruding from the base, the positioning element being used to engage with the cathode positioning of the glow discharge spectrometer.

[0019] In some embodiments, the sample excitation auxiliary device for glow discharge spectrometer further includes a limiting member mounted on the base and protruding from the base, the limiting member being used to limit the sample, and the air intake hole being located inside the limiting member.

[0020] In some embodiments, a limiting groove is formed on the side of the housing away from the base, and the inner wall of the limiting groove is used to contact the clamping mechanism of the glow discharge spectrometer.

[0021] The present invention has at least the following beneficial effects:

[0022] The applicant of this application has made an inventive discovery that for thinner samples with a thickness of a few millimeters, these samples have low rigidity. During the vacuuming process of the spectrometer, due to the small thickness and low rigidity of the sample, and the large pressure difference between the two sides of the sample, the vacuuming process causes the sample to deform inward toward the anode hole. This inward deformation can cause the sample to come into contact with the anode of the glow discharge spectrometer, resulting in an anode short circuit and preventing the discharge excitation detection from being completed. Alternatively, after the sample is deformed inward, the sealing ring between the sample and the laser spectrometer cannot be sealed tightly, leading to vacuuming failure and thus preventing the discharge excitation from being completed.

[0023] Based on the above findings, this application provides a sample excitation auxiliary device for a glow discharge spectrometer, including a housing, a base, a seal, an air extraction component, and an air suction pipe. The housing and the base are connected to form a mounting cavity. A plurality of air suction holes are provided on the base at intervals. The air suction pipe is connected to the air suction port and the air extraction component. The seal is installed on the base and protrudes from the base. The air suction holes are located inside the seal. The base is also provided with a cooling water channel for cooling water flow and a coolant inlet and a coolant outlet connected to the cooling water channel.

[0024] With this design, the sample excitation auxiliary device of the glow discharge spectrometer is in sealed contact with the sample. When the vacuum device is activated, it can apply an adsorption force to the end face of the sample opposite to the anode, so that the end face of the sample opposite to the anode is tightly adsorbed on the base. The direction of this adsorption force is opposite to the direction of the adsorption force applied to the sample by the glow discharge spectrometer during vacuuming.

[0025] When the glow discharge spectrometer is evacuated, the sample excitation auxiliary device provides a reverse adsorption force to the sample, which reduces the deformation of the sample caused by the evacuation process. This reduces the probability of detection failure due to sample concave deformation, expanding the application range of the glow discharge spectrometer and enabling the successful excitation of low-rigidity, ultra-thin samples that were previously impossible to excite. The cooling channels, coolant inlet, and coolant outlet ensure that the sample is cooled during excitation, helping to maintain the accuracy of sample detection. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 A schematic diagram of a sample excitation auxiliary device for a glow discharge spectrometer is shown in one or more embodiments of this application.

[0028] Figure 2 A front view of a sample excitation auxiliary device for a glow discharge spectrometer according to one or more embodiments of this application is shown.

[0029] Figure 3 A right view of a sample excitation auxiliary device for a glow discharge spectrometer is shown in one or more embodiments of this application.

[0030] Figure 4 It shows along Figure 3 A cross-sectional view along the AA direction.

[0031] Figure 5 A left view of a sample excitation auxiliary device for a glow discharge spectrometer is shown in one or more embodiments of this application.

[0032] Figure 6 A schematic diagram of a sample excitation auxiliary device for a glow discharge spectrometer installed on a glow discharge spectrometer is shown in one or more embodiments of this application.

[0033] Reference numerals: 100-Sample excitation auxiliary device for glow discharge spectrometer, 100a-Mounting cavity, 110-Housing shell, 110a-Limiting groove, 115-Base, 115a-Intake port, 115b-Cooling water channel, 120-Seal, 125-Ejector, 130-Intake pipe, 135-Controller, 140-Pressure sensor, 145-Radiator, 150-Water pump, 155-Fan, 160-First pipe, 1 70-Second pipe, 175-First temperature sensor, 180-Second temperature sensor, 185-Positioning component, 190-Limiting component, 195-Solenoid valve, 200-Glow glow discharge spectrometer, 210-Clamping mechanism, 220-Anode, 220a-Anode hole, 230-Cathode, 240-Vacuum pipe, 250-Argon pipe, 260-Sealing ring, 300-Sample, 310-First end face, 320-Second end face. Detailed Implementation

[0034] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0035] It should be noted that all directional indications in the embodiments of the present invention are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0036] In this invention, unless otherwise explicitly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0037] Furthermore, in this invention, descriptions involving "first," "second," etc., are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. Additionally, the technical solutions of the various embodiments can be combined with each other, but only on the basis of being achievable by those skilled in the art. When the combination of technical solutions is contradictory or impossible to implement, such a combination of technical solutions should be considered non-existent and not within the scope of protection claimed by this invention.

[0038] A glow discharge spectrometer is a device that can simultaneously perform chemical composition and depth detection.

[0039] During the detection process, a flat sample needs to be placed over the excitation hole for discharge excitation. Before discharge excitation, the glow discharge spectrometer will evacuate the space where the sample acts as a cover.

[0040] In related technologies, when detecting thinner samples, a common technical problem is that the spectrometer cannot discharge and excite, leading to detection failure.

[0041] Glow emission spectrometry boasts high sensitivity and resolution, enabling the detection of multiple elements. Its simple sample preparation makes it particularly suitable for surface and thin film analysis of solid materials, providing a crucial analytical tool for materials science, microelectronics, and other fields. However, when analyzing thinner samples using glow emission spectrometry, the spectrometer often fails to discharge and excite, leading to detection failures. Therefore, those skilled in the art typically employ other methods besides glow emission spectrometry, such as metallographic analysis or scanning electron microscopy, for chemical composition and depth analysis of thin samples. These methods are complex and inefficient. Ensuring that thinner samples can be analyzed using glow emission spectrometry is a pressing technical problem that needs to be solved by those skilled in the art.

[0042] This application is described below with reference to the accompanying drawings and specific embodiments:

[0043] To facilitate understanding of this application, the structure of the glow discharge spectrometer 200 is described below, which can be referred to... Figure 6As shown, the glow discharge spectrometer 200 includes components such as an anode 220, a cathode 230, a vacuum pipe 240, an argon pipe 250, and a sealing ring 260. The vacuum pipe 240 is used for evacuation, and the argon pipe 250 is used for filling with argon gas. The glow discharge spectrometer 200 first evacuates the vacuum, and then fills with argon gas after the evacuation is completed. The sealing ring 260 is installed on the right end face of the cathode 230. The anode 220 is tubular, and the distance between the right end face of the anode 220 and the right end face of the cathode 230 is usually 0.1 mm to 0.3 mm, which is a small gap. After the sample 300 is placed on the cathode 230, under the action of the clamping mechanism 210 of the glow discharge spectrometer 200, the upper end face of the sample 300 is tightly fitted with the sealing ring 260.

[0044] For ease of explanation below, sample 300 is defined to have a first end face 310 and a second end face 320 disposed opposite to each other, wherein the first end face 310 is in contact with the sealing ring 260 and the cathode 230, as shown below. Figure 6 As shown, the left end face of sample 300 is the first end face 310, and the right end face of sample 300 is the second end face 320.

[0045] The applicant of this application has made an inventive discovery that for thinner samples 300 with a thickness of a few millimeters, these samples 300 have low rigidity. During the vacuuming process of the spectrometer, due to the small thickness and low rigidity of the sample 300, and the large pressure difference between the two sides of the sample 300, the vacuuming process causes the sample 300 to deform inward toward the anode hole 220a. This inward deformation causes the sample 300 to come into contact with the anode 220 of the glow discharge spectrometer 200, resulting in a short circuit of the anode 220 and preventing the discharge excitation detection from being completed. Alternatively, after the sample 300 is deformed inward, the sample 300 and the sealing ring 260 of the laser spectrometer cannot be sealed tightly, resulting in vacuuming failure and thus preventing the discharge excitation from being completed.

[0046] Based on this, this application provides a sample excitation auxiliary device 100 for a glow discharge spectrometer (hereinafter referred to as auxiliary device 100), which is used to apply force to the sample 300 on the glow discharge spectrometer 200.

[0047] like Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 As shown, the auxiliary device 100 includes a housing 110, a base 115, a seal 120, an air extraction component 125, and an air suction pipe 130.

[0048] The outer shell 110 is connected to the base 115 and forms an installation cavity 100a. The base 115 has a plurality of spaced air intake holes 115a. The outer shell 110 is used to contact the clamping mechanism 210 of the glow discharge spectrometer 200. The base 115 also has a cooling water channel 115b for cooling water flow and a coolant inlet and coolant outlet connected to the cooling water channel 115b.

[0049] The seal 120 is mounted on the base 115 and protrudes from the base 115. The suction port 115a is located inside the seal 120. The seal 120 is used to make a sealing contact with the sample 300.

[0050] Both the suction device 125 and the suction pipe 130 are installed in the mounting cavity 100a. The suction pipe 130 is connected to the suction hole 115a and the suction device 125 to apply force to the sample 300.

[0051] The outer casing 110 and the base 115 are fixedly connected, which can be by bolts, snap-fit, adhesive, etc. The base 115 has cooling water channels 115b for cooling water flow. When the auxiliary device 100 is used, the base 115 of the auxiliary device 100 will come into contact with the sample 300. Thermal conductivity exists between the base 115 and the sample 300; heat from the sample 300 is transferred to the base 115, and the heat from the base 115 is carried away by the cooling water in the cooling water channels 115b. The cooling water is used to cool the base 115, thereby cooling the sample 300. The base 115 can be made of a material with good thermal conductivity, such as aluminum, to improve the heat dissipation rate of the sample 300.

[0052] The seal 120 protrudes from the base 115 so that the sample 300 can fit against the seal 120, achieving a sealed contact between the sample 300 and the seal 120. It is easy to understand that the seal 120 also has a sealed contact with the base 115, so that when the suction device 125 draws air, external gas will not enter through the gap between the seal 120 and the base 115. The seal 120 is annular and its material can be silicone, rubber, etc., and it can deform under force to fit tightly against the sample 300.

[0053] The extraction component 125 can be an air pump. The function of the air pump is to extract the gas from the chamber (hereinafter referred to as the chamber) formed by the seal 120, the sample 300, and the suction pipe 130, so that the sample 300 can be adsorbed onto the base 115. Multiple suction holes 115a are spaced apart. When the sample 300 is adsorbed onto the base 115, the connection structure between adjacent suction holes 115a can support the sample 300. That is, the base 115 will support the sample 300, and the sample 300 will not be recessed towards the suction holes 115a, or the degree of recess will be minimal. To prevent the sample 300 from being recessed into the suction holes 115a, or to reduce the degree of recess, the diameter of the suction holes 115a can be set within the millimeter range, such as 3mm, 2mm, etc.

[0054] With this design, the sealing element 120 of the auxiliary device 100 is in sealed contact with the sample 300. When the vacuuming element 125 is activated, it applies an adsorption force to the end face (second end face 320) of the sample 300 opposite to the anode 220, causing the end face (second end face 320) of the sample 300 opposite to the anode 220 to be tightly adsorbed onto the base 115. The direction of this adsorption force is opposite to the direction of the adsorption force applied to the sample 300 by the glow discharge spectrometer 200 during vacuuming, that is, as... Figure 6 As shown, the adsorption force applied by the auxiliary device 100 to the sample 300 is to the right, and the adsorption force applied by the glow discharge spectrometer 200 to the sample 300 is to the left.

[0055] When the glow discharge spectrometer 200 is evacuated, the auxiliary device 100 provides a reverse adsorption force to the sample 300, which reduces the deformation of the sample 300 caused by the evacuation. This reduces the probability of detection failure due to the concave deformation of the sample 300, expands the application range of the glow discharge spectrometer 200, and enables the successful excitation of low-rigidity, ultra-thin samples 300 that were previously impossible to excite. The cooling channel 115b, coolant inlet, and coolant outlet allow the sample 300 to be cooled during excitation, helping to ensure the detection accuracy of the sample 300.

[0056] In some embodiments, the auxiliary device 100 further includes a controller 135 and a pressure sensor 140. The pressure sensor 140 and the vacuum pump 125 are both electrically connected to the controller 135. Under the condition that the glow discharge spectrometer 200 evacuates the anode hole 220a, the pressure sensor 140 is used to detect the first pressure in the suction tube 130. The controller 135 adjusts the operation of the vacuum pump 125 according to the second pressure and the first pressure in the anode hole 220a of the glow discharge spectrometer 200, so that the first pressure is not greater than the second pressure.

[0057] The specific structures of the pressure sensor 140 and the controller 135 vary and are not limited in this application. The second pressure in the anode hole 220a of the glow discharge spectrometer 200 can be transmitted to the controller 135 via wired or wireless means. If it is wired, the controller 135 is also electrically connected to the glow discharge spectrometer 200. To facilitate the use of the auxiliary device 100 of this application, the second pressure is transmitted to the controller 135 via wireless transmission. The structure and method of implementing this wireless transmission are known to those skilled in the art and will not be described in detail here.

[0058] When the anode hole 220a of the glow discharge spectrometer 200 is evacuated, the sample 300 is prone to concave deformation towards the anode hole 220a. In these embodiments, the controller 135 controls the first gas pressure to be lower than the second gas pressure, so that the adsorption force of the auxiliary device 100 on the sample 300 is greater than the adsorption force of the glow discharge spectrometer 200 on the sample 300. This ensures that under evacuation conditions, the second end face 320 of the sample 300 remains in contact with the base 115, preventing the sample 300 from concave deformation towards the anode hole 220a, and thus preventing the sample 300 from contacting the anode 220 of the glow discharge spectrometer 200. This allows the low-rigidity ultrathin sample 300 to be successfully excited. Specifically, when the first gas pressure is greater than the second gas pressure, the controller 135 can control the power of the pumping component 125 to increase the pumping rate or flow rate, thereby removing gas molecules in the chamber more quickly and reducing the first gas pressure.

[0059] After the required vacuum level is reached in the anode orifice 220a of the glow discharge spectrometer 200, argon gas is introduced into the anode orifice 220a. As an inert gas, argon gas can exist stably during the discharge process and does not easily react chemically with other substances.

[0060] In some embodiments, the auxiliary device 100 further includes a solenoid valve 195 installed on the suction pipe 130. The solenoid valve 195 is electrically connected to the controller 135. When the glow discharge spectrometer 200 evacuates the anode hole 220a, the controller 135 controls the solenoid valve 195 to open. When the glow discharge spectrometer 200 fills the anode hole 220a with argon gas, the controller 135 controls the solenoid valve 195 to close and controls the suction device 125 to stop.

[0061] When the glow discharge spectrometer 200 is evacuating the anode orifice 220a, the pumping unit 125 operates, extracting gas from the chamber to ensure the first pressure is not greater than the second pressure. During this process, the solenoid valve 195 opens, allowing the gas in the chamber to be smoothly extracted through the pumping unit 125. After evacuation, the solenoid valve 195 can be closed, and the pumping unit 125 can be stopped, maintaining the chamber pressure at the value at the end of evacuation, ensuring the sample 300 remains adsorbed on the base 115. During the argon filling phase of the glow discharge spectrometer 200 into the anode orifice 220a, the second pressure gradually increases. Therefore, during the argon filling phase, the first pressure is always no greater than the second pressure. This design allows the pumping unit 125 to stop operating during the argon filling phase, saving energy.

[0062] The controller 135 can determine the operating stage of the glow discharge spectrometer 200 based on the changing trend of the second gas pressure. Specifically, when the glow discharge spectrometer 200 evacuates the anode hole 220a, the second gas pressure shows a continuous decreasing trend; when the glow discharge spectrometer 200 fills the anode hole 220a with argon gas, the second gas pressure shows a continuous increasing trend.

[0063] In some embodiments, after the sample 300 is tested, the controller 135 controls the solenoid valve 195 to open so that the air pressure in the suction tube 130 is the same as the external atmospheric pressure, so that the sample 300 can be separated from the base 115.

[0064] In some embodiments, with the sample 300 placed on the base 115, the controller 135 controls the vacuum component 125 to operate so that the sample 300 is adsorbed onto the base 115.

[0065] like Figure 6 As shown, the state of sample 300 and auxiliary device 100 in use is displayed. Sample 300 is set vertically. With this design, sample 300 can be adsorbed and positioned on the base 115 of auxiliary device 100 first, and then auxiliary device 100 carrying sample 300 can be installed on glow discharge spectrometer 200, which facilitates the installation of sample 300 between glow discharge spectrometer 200 and auxiliary device 100.

[0066] In some embodiments, the auxiliary device 100 is equipped with a touch screen. After the sample 300 is placed on the base 115, the user can touch the function options on the touch screen to cause the controller 135 to control the suction device 125 to operate, thus placing the sample 300 on the base 115. In some embodiments, after the sample 300 has been tested, the user can touch the function options on the touch screen to cause the controller 135 to control the solenoid valve 195 to open, so that the air pressure in the suction tube 130 is the same as the external atmospheric pressure, allowing the sample 300 to be separated from the base 115.

[0067] In some embodiments, the auxiliary device 100 further includes a radiator 145, a water pump 150, a fan 155, a first pipe 160, and a second pipe 170. The radiator 145, water pump 150, fan 155, first pipe 160, and second pipe 170 are all installed in the mounting cavity 100a. The fan 155 is arranged opposite to the radiator 145. The water inlet of the radiator 145 is connected to the coolant outlet through the first pipe 160, and the water outlet of the radiator 145 is connected to the coolant inlet through the second pipe 170. The water pump 150 is installed on the first pipe 160 or the second pipe 170, so that the radiator 145, water pump 150, first pipe 160, second pipe 170, and base 115 form a circulation loop for the cooling medium to flow.

[0068] The structures of the radiator 145 and the fan 155 are varied. The fan 155 and the radiator 145 are arranged opposite each other. When the fan 155 is working, it accelerates the airflow around the radiator 145, allowing the radiator 145 to dissipate heat quickly. An air outlet is also provided on the outer casing 110, directly opposite the fan 155, so that hot air inside the outer casing 110 can be discharged through the air outlet. With this design, the water pump 150 drives the cooling medium to flow out from the base 115 and enter the radiator 145 along the first pipe 160, then flow out from the radiator 145 and enter the base 115 along the second pipe 170.

[0069] In some embodiments, the auxiliary device 100 further includes a first temperature sensor 175 and a second temperature sensor 180. The first temperature sensor 175 is mounted on the base 115 and is used to detect the temperature of the sample 300. The second temperature sensor 180 is mounted on the second pipe 170 and is used to detect the temperature of the coolant in the second pipe 170. Both the first temperature sensor 175 and the second temperature sensor 180 are electrically connected to the controller 135. The controller 135 is also used to adjust the fan 155 and the water pump 150 according to the first temperature detected by the first temperature sensor 175 and the second temperature detected by the second temperature sensor 180, so that the first temperature and the second temperature meet the requirements.

[0070] The first temperature sensor 175 and the second temperature sensor 180 can be either contact or non-contact temperature sensors, and this is not limited thereto. During glow discharge spectroscopy analysis, the surface of sample 300 is bombarded by high-energy argon ions, causing atoms on the surface of sample 300 to be sputtered out. This raises the temperature of sample 300. Excessive temperature of sample 300 can easily cause thermal damage to sample 300, affecting the accuracy of the analysis and detection results. In these embodiments, the first temperature sensor 175 detects the temperature of sample 300, and the second temperature sensor 180 detects the temperature of the coolant in the second pipe 170, that is, the temperature of the coolant after being cooled by radiator 145. Specifically, if the first temperature is detected to be too high, the controller 135 controls the fan 155 to increase its power and airflow, enabling the radiator 145 to dissipate heat quickly. The controller 135 also controls the water pump 150 to increase its power and the flow rate of the coolant, so that the heat on the sample 300 is quickly carried away and dissipated by the radiator 145, thereby improving the cooling efficiency of the coolant and increasing the cooling rate of the sample 300, allowing the temperature of the sample 300 to quickly meet the requirements. The second temperature reflects the temperature of the coolant flowing out of the radiator 145. When the first temperature is detected to meet the requirements, the controller 135 can appropriately reduce the speed of the fan 155 and the power of the water pump 150 to appropriately increase the second temperature, thereby saving energy and reducing noise. The second temperature sensor 180 provides real-time feedback of the second temperature to the controller 135, which can be used as a basis for the controller 135 to adjust the power of the fan 155 and the water pump 150. Through the feedback of the second temperature, the controller 135 can accurately determine the operating status of the water pump 150 and the fan 155 and make corresponding adjustments. If the temperature of the coolant in the second pipe 170 rises or falls abnormally, the controller 135 can detect it in time, which helps to avoid potential problems such as overheating or overcooling of the system.

[0071] In some embodiments, when the glow discharge spectrometer 200 evacuates the anode hole 220a, the controller 135 controls the water pump 150 and fan 155 to shut down; when the glow discharge spectrometer 200 fills the anode hole 220a with argon gas, the controller 135 controls the water pump 150 and fan 155 to turn on.

[0072] When the glow discharge spectrometer 200 is evacuated from the anode hole 220a, it does not discharge excite the sample 300, and the temperature of the sample 300 will not rise. During this process, the controller 135 can control the water pump 150 and fan 155 to shut down, saving energy. After the glow discharge spectrometer 200 is filled with argon gas, it will discharge and be excited. Therefore, even when the glow discharge spectrometer 200 is filled with argon gas from the anode hole 220a, the controller 135 can control the water pump 150 and fan 155 to turn on, pre-cooling the sample 300. This prevents the sample 300 from being damaged due to insufficient cooling during excitation and helps ensure the accuracy of sample 300 detection.

[0073] In some embodiments, the auxiliary device 100 further includes a positioning element 185 mounted on and protruding from the base 115, the positioning element 185 being used for positioning and engaging with the cathode 230 of the glow discharge spectrometer 200.

[0074] The cathode 230 of the glow discharge spectrometer 200 typically has mounting holes on its right end face. These mounting holes can be used to install bolts to fix the cathode 230 to other components. Positioning members 185 are fixedly mounted on the base 115. The number of positioning members 185 can be one or more. The positioning members 185 protrude from the base 115 so that they can extend into the mounting holes and engage with them. In some embodiments, the cathode 230 has four mounting holes, and four positioning members 185 are provided, each located within one of the four mounting holes.

[0075] After the positioning component 185 is set, the positioning component 185 can be positioned and cooperate with the cathode 230 so that the auxiliary device 100 can be installed on the cathode 230 of the glow discharge spectrometer 200. In addition, after the positioning component 185 cooperates with the mounting hole, the mounting hole can provide an upward support force for the positioning component 185, preventing the auxiliary device 100 from falling off under the action of gravity due to insufficient clamping force of the clamping mechanism 210 and detaching from the glow discharge spectrometer 200, thus ensuring the smooth detection of the sample 300.

[0076] In these designs, the positioning part is cylindrical, and the number of positioning parts is the same as the number of connecting holes. Each positioning part is located in its respective connecting hole to coordinate with the cathode 230 of the glow discharge spectrometer 200.

[0077] In some embodiments, the auxiliary device 100 further includes a limiting member 190 mounted on and protruding from the base 115, the limiting member 190 being used to limit the sample 300, and the suction hole 115a being located inside the limiting member 190.

[0078] The sample 300 is placed inside the limiting member 190, which limits the sample 300 so that it is accurately placed on the base 115 and opposite to the suction port 115a and the seal 120. The limiting member 190 is fixedly installed on the base 115, and its shape and size are related to the shape and size of the sample 300, and are not limited here. In some embodiments, the sample 300 is circular, the limiting member 190 is annular, and the limiting member 190 is coaxially arranged with the seal 120. It should be noted that the height of the limiting member 190 is not higher than the height of the sample 300. That is, when the sample 300 is placed inside the limiting member 190, the sample 300 protrudes from the limiting member 190 to ensure that the sample 300 can be clamped between the left end face of the base 115 and the right end face of the cathode 230.

[0079] In some embodiments, a limiting groove 110a is provided on the side of the housing 110 away from the base 115, and the inner wall of the limiting groove 110a is used to contact the pressing mechanism 210 of the glow discharge spectrometer 200.

[0080] like Figure 6 As shown, a limiting groove 110a is provided on the right end face of the outer casing 110. With this design, the clamping end of the clamping mechanism 210 can extend into the limiting groove 110a and abut against the inner wall of the limiting groove 110a. After setting the limiting groove 110a, if the clamping force of the clamping mechanism 210 is insufficient, the clamping end can contact the peripheral wall of the limiting groove 110a, and the clamping end provides an upward supporting force to the outer casing 110. This prevents the auxiliary device 100 from falling off under the action of gravity due to insufficient clamping force of the clamping mechanism 210 and detaching from the glow discharge spectrometer 200, thus ensuring the smooth detection of the sample 300.

[0081] The following describes how to use the auxiliary device 100 of this application:

[0082] like Figure 6As shown, first, the sample 300 is placed inside the limiting member 190, and the second end face 320 of the sample 300 is brought into contact with the sealing member 120. Then, the touch screen is touched to open the suction member 125, causing the sample 300 to be adsorbed onto the base 115. Next, the auxiliary device 100 with the adsorbed sample 300 is installed on the glow discharge spectrometer 200. Specifically, the four limiting members 190 of the auxiliary device 100 are respectively located in the four mounting holes of the cathode 230. The clamping mechanism 210 is controlled to operate, so that the clamping end of the clamping mechanism 210 extends into the limiting member 120. The sample 300 is pressed into the inner wall of the limiting groove 110a. Then, the auxiliary device 100 is activated by touching the touch screen. Next, the glow discharge spectrometer 200 is turned on to detect the sample 300. After the detection is completed, the pressing mechanism 210 is activated so that the pressing end of the pressing mechanism 210 is located outside the limiting groove 110a, and the auxiliary device 100 is removed from the cathode 230. Finally, the solenoid valve 195 is opened by touching the touch screen so that the air pressure in the suction pipe 130 is the same as the external atmospheric pressure, so that the sample 300 is separated from the base 115.

[0083] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. In addition, those skilled in the art can combine and integrate the different embodiments or examples described in this specification.

[0084] Furthermore, the technical solutions of the various embodiments can be combined with each other, but only if they are based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such combination of technical solutions does not exist and is not within the scope of protection claimed in this application.

[0085] Although embodiments of this application have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the claims and their equivalents.

Claims

1. A sample excitation auxiliary device for a glow discharge spectrometer, characterized in that, For applying force to a sample (300) on a glow discharge spectrometer (200), the sample excitation auxiliary device (100) for the glow discharge spectrometer includes: The housing (110) and the base (115) are connected and enclosed to form an installation cavity (100a). The base (115) has a plurality of spaced air intake holes (115a). The housing (110) is used to contact the clamping mechanism (210) of the glow discharge spectrometer (200). The base (115) also has a cooling water channel (115b) for cooling water flow and a coolant inlet and a coolant outlet communicating with the cooling water channel (115b). A seal (120) is mounted on the base (115) and protrudes from the base (115), the suction port (115a) is located inside the seal (120), and the seal (120) is used to make a sealing contact with the sample (300); An air extraction component (125) and an air suction pipe (130) are installed in the mounting cavity (100a), and the air suction pipe (130) is connected to the air suction hole (115a) and the air extraction component (125) to apply force to the sample (300); The sample excitation auxiliary device (100) for the glow discharge spectrometer also includes a controller (135) and a pressure sensor (140), both of which are electrically connected to the controller (135). Under the condition that the glow discharge spectrometer (200) evacuates the anode hole (220a), the pressure sensor (140) is used to detect the first pressure in the suction tube (130), and the controller (135) adjusts the suction unit (125) according to the second pressure in the anode hole (220a) and the first pressure, so that the first pressure is not greater than the second pressure; The sample excitation auxiliary device (100) for the glow discharge spectrometer also includes a solenoid valve (195) installed on the suction tube (130). The solenoid valve (195) is electrically connected to the controller (135). Under the condition that the glow discharge spectrometer (200) evacuates the anode hole (220a), the controller (135) controls the solenoid valve (195) to open. When the glow discharge spectrometer (200) fills the anode hole (220a) with argon gas, the controller (135) controls the solenoid valve (195) to close and controls the pumping unit (125) to stop.

2. The sample excitation auxiliary device for a glow discharge spectrometer according to claim 1, characterized in that, With the sample (300) placed on the base (115), the controller (135) controls the vacuum component (125) to work so that the sample (300) is adsorbed onto the base (115).

3. The sample excitation auxiliary device for a glow discharge spectrometer according to claim 1, characterized in that, The sample excitation auxiliary device (100) for the glow discharge spectrometer further includes a radiator (145), a water pump (150), a fan (155), a first pipe (160), and a second pipe (170). The radiator (145), the water pump (150), the fan (155), the first pipe (160), and the second pipe (170) are all installed in the mounting cavity (100a). The fan (155) is arranged opposite to the radiator (145). The inlet of the radiator (145) is connected to the outlet of the coolant through the first pipe (160), and the outlet of the radiator (145) is connected to the inlet of the coolant through the second pipe (170). The water pump (150) is installed on the first pipe (160) or the second pipe (170) so that the radiator (145), the water pump (150), the first pipe (160), the second pipe (170) and the base (115) form a circulation loop for the cooling medium to flow.

4. The sample excitation auxiliary device for a glow discharge spectrometer according to claim 3, characterized in that, The sample excitation auxiliary device (100) for the glow discharge spectrometer further includes a first temperature sensor (175) and a second temperature sensor (180). The first temperature sensor (175) is installed on the base (115) and is used to detect the temperature of the sample (300). The second temperature sensor (180) is installed on the second pipe (170) and is used to detect the temperature of the coolant in the second pipe (170). Both the first temperature sensor (175) and the second temperature sensor are electrically connected to the controller (135). The controller (135) is also used to adjust the fan (155) and the water pump (150) according to the first temperature detected by the first temperature sensor (175) and the second temperature detected by the second temperature sensor, so that the first temperature meets the requirements.

5. The sample excitation auxiliary device for a glow discharge spectrometer according to claim 4, characterized in that, When the glow discharge spectrometer (200) evacuates the anode hole (220a), the controller (135) controls the water pump (150) and the fan (155) to shut down; when the glow discharge spectrometer (200) fills the anode hole (220a) with argon gas, the controller (135) controls the water pump (150) and the fan (155) to turn on.

6. The sample excitation auxiliary device for a glow discharge spectrometer according to any one of claims 1-5, characterized in that, The sample excitation auxiliary device (100) for the glow discharge spectrometer also includes a positioning element (185) mounted on the base (115) and protruding from the base (115), the positioning element (185) being used for positioning and cooperating with the cathode (230) of the glow discharge spectrometer (200).

7. The sample excitation auxiliary device for a glow discharge spectrometer according to any one of claims 1-5, characterized in that, The sample excitation auxiliary device (100) for the glow discharge spectrometer also includes a limiting member (190) mounted on the base (115) and protruding from the base (115), the limiting member (190) being used to limit the sample (300), and the suction port (115a) being located inside the limiting member (190).

8. The sample excitation auxiliary device for a glow discharge spectrometer according to any one of claims 1-5, characterized in that, A limiting groove (110a) is provided on the side of the outer shell (110) away from the base (115), and the inner wall of the limiting groove (110a) is used to contact the pressing mechanism (210) of the glow discharge spectrometer (200).

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