Lifting and transferring mechanism for chemical vapor deposition equipment

Abstract

The application discloses a chemical vapor deposition equipment lifting transmission linkage coating mechanism and relates to the technical field of chemical vapor deposition coating equipment.The chemical vapor deposition equipment lifting transmission linkage coating mechanism comprises a vacuum cavity, the sidewall of the vacuum cavity is provided with a transmission roller mechanism, the transmission roller mechanism comprises a magnetic fluid transmission shaft, the bottom of the magnetic fluid transmission shaft is fixedly connected with a transmission shaft movable plate, the bottom of the transmission shaft movable plate is provided with a telescopic cylinder, the end of the telescopic cylinder away from the vacuum cavity is slidably connected with a cylinder end head, the end of the cylinder end head is inserted with an E-shaped plate, the transmission shaft movable plate is fixedly connected with the top of the E-shaped plate, the bottom of the vacuum cavity is provided with a jacking mechanism, the jacking mechanism comprises a jacking frame, the top of the jacking frame is fixedly connected with a plurality of jacking columns, the end of the jacking column extending into the vacuum cavity is fixedly connected with a thimble fixed plate, and the technical problems of the prior art, such as complicated processing steps, difficulty in maintenance, high difficulty in maintenance operation, easy transmission jamming and low working efficiency, are solved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of chemical vapor deposition coating equipment, in particular to a lifting transmission linkage coating mechanism of a chemical vapor deposition equipment. BACKGROUND

[0002] Chemical vapor deposition technology is a method of depositing thin films on the surface of a substrate through chemical reactions. This technology is widely used in the fields of microelectronics, optoelectronics, solar cells, coatings, and polymer materials. With the continuous development of technology in these fields, the performance and precision requirements of CVD equipment are becoming increasingly high. The lifting transmission linkage coating mechanism, as a key component of the equipment, directly affects the quality and efficiency of the coating.

[0003] The lifting transmission linkage coating mechanism of a chemical vapor deposition equipment is used in the photovoltaic vacuum coating industry and is used with a chemical vapor deposition coating equipment, such as an LPCVD equipment. Its main function is to smoothly lower the substrate glass on the high transmission roller wheel in the vacuum chamber onto the heating plate below the transmission roller to heat and complete the coating process, and then lift the substrate glass from the heating plate to the transmission roller wheel for transportation to the next link.

[0004] However, the current such equipment still has the following problems:

[0005] In the existing device, the processing steps are complicated, the device is not easy to maintain, the maintenance operation is difficult, and the problems of easy transmission jamming, low work efficiency. SUMMARY

[0006] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application proposes a lifting transmission linkage coating mechanism of a chemical vapor deposition equipment, which solves the problems of complicated processing steps, difficult maintenance operation, and low work efficiency in the existing device.

[0007] To achieve the above-mentioned purpose, the present application proposes a lifting transmission linkage coating mechanism of a chemical vapor deposition equipment, comprising a vacuum chamber, the side wall of the vacuum chamber is provided with a transmission roller mechanism, wherein:

[0008] The transmission roller mechanism comprises a magnetic fluid transmission shaft, the bottom of the magnetic fluid transmission shaft is fixedly connected with a transmission shaft movable plate, the lower portion of the transmission shaft movable plate is provided with a telescopic air cylinder, the end of the telescopic air cylinder away from the vacuum cavity is slidably connected with a cylinder end head, the end of the cylinder end head is inserted with an E-shaped plate, the transmission shaft movable plate is fixedly connected to the top of the E-shaped plate, the bottom of the vacuum cavity is provided with a jacking mechanism, the jacking mechanism comprises a jacking frame, the inside of the jacking frame is slidably connected with a jacking sliding table, the top of the jacking frame is fixedly connected with a plurality of jacking columns, the end of the jacking column extending into the vacuum cavity is fixedly connected with a thimble fixing plate, and the top of the thimble fixing plate is fixedly connected with a thimble workpiece.

[0009] Preferably, the outside of the jacking column is sleeved with a jacking bellows, the two ends of the jacking bellows are fixedly connected to the jacking column and the bottom of the vacuum cavity respectively, the side wall of the jacking sliding table is fixedly connected with a jacking servo drive, and the top of the jacking servo drive is threadedly connected with a jacking lead screw.

[0010] Preferably, the end of the magnetic fluid transmission shaft and the telescopic air cylinder is sleeved with a transmission servo drive, the side wall of the vacuum cavity is provided with a transmission hole, the end of the magnetic fluid transmission shaft close to the vacuum cavity is inserted into the transmission hole, the end of the magnetic fluid transmission shaft extending into the vacuum cavity is fixedly connected with a cylindrical supporting roller, and the side wall of the cylindrical supporting roller is fixedly connected with a limiting ring.

[0011] Preferably, the inside of the vacuum cavity is fixedly connected with a heating plate, the surface of the heating plate is provided with a plurality of small holes, the inside of the vacuum cavity is fixedly connected with a plurality of heating plate supporting columns, the heating plate supporting columns are fixedly connected to the bottom of the heating plate, the positions of the small holes correspond to the positions of the thimble workpieces one by one, and the thimble workpieces are inserted into the small holes.

[0012] Preferably, the side walls of the vacuum cavity are both provided with square notches.

[0013] Preferably, the side wall of the vacuum cavity is fixedly connected with a transmission horizontal sliding table, and the E-shaped plate is slidably connected to the top of the transmission horizontal sliding table.

[0014] Preferably, the end of the magnetic fluid transmission shaft close to the vacuum cavity is sleeved with a transmission shaft bellows outside, and the two ends of the transmission shaft bellows are fixedly connected to the magnetic fluid transmission shaft and the side wall of the vacuum cavity respectively.

[0015] Preferably, the inside of the vacuum cavity is provided with a glass substrate, and the glass substrate is arranged above the thimble workpiece.

[0016] Compared with the prior art, the beneficial effects of the present application are:

[0017] 1. The transmission roller mechanism is located in the atmospheric environment outside the cavity, facilitating maintenance and adjustment. The feed of each magnetohydrodynamic transmission shaft is connected by a welded bellows. The extension and retraction distance of the bellows ensures that the vacuum chamber remains leak-free when a set of magnetohydrodynamic transmission shafts move left and right.

[0018] 2. The entire lifting mechanism operates in an atmospheric environment outside the vacuum chamber, facilitating maintenance and adjustment. During processing, the ejector pin workpiece is completely lowered below the heating plate, ensuring a secure fit between the glass substrate and the heating plate for optimal heating. This also prevents the plastic parts at the ejector pin end from being constantly heated, extending their lifespan. The lifting mechanism operates within a vacuum environment, unaffecting the coating process. The lifting column is fed by a lifting bellows, whose extension and retraction distance ensures the vacuum chamber remains leak-free during lifting.

[0019] 3. The lifting height can be driven by a servo drive, and the speed can be adjusted via electrical control. Operation is simple and convenient. The servo drive has high-precision positioning capabilities, ensuring the lifting structure reaches the precise height requirements during the coating process. The high control precision of the servo drive ensures that each lifting operation reaches the same position, improving the repeatability and stability of the production process. Adjusting the lifting speed via electrical control allows for flexible adjustments based on different coating process requirements, such as rapid lifting to save time or slow lifting to optimize the coating effect. Appropriate lifting speed reduces mechanical impact, protects equipment and substrates, and extends equipment lifespan.

[0020] 4. The end material of the ejector pin is a high-strength, high-temperature resistant engineering plastic that can pass through the pre-drilled hole in the heating plate to provide stable support for the glass substrate. It is tough and will not break easily or damage the substrate glass. Its material is a poor conductor of heat, so it causes little damage to the heated glass substrate and has a small heat-affected zone. Attached Figure Description

[0021] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0022] Figure 2 This is a schematic diagram of the bottom structure of the present invention;

[0023] Figure 3 This is a schematic diagram of the transmission roller mechanism of the present invention without extension.

[0024] Figure 4 This is a schematic diagram of the extended structure of the transmission roller mechanism of the present invention;

[0025] Figure 5 For the present invention Figure 3 Schematic diagram of the structure at point A in the middle;

[0026] Figure 6The application relates to a chemical vapor deposition equipment lifting transmission linkage coating mechanism Figure 4 A structural schematic diagram of a B structure in the application.

[0027] In the figure: 1, a vacuum cavity; 101, a square notch; 102, a transmission hole; 2, a heating plate; 201, a heating plate support column; 202, a small hole; 3, a transmission roller mechanism; 301, a magnetic fluid transmission shaft; 302, a transmission shaft bellows; 303, a transmission shaft moving plate; 304, a telescopic air cylinder; 3041, an air cylinder end; 3042, an E-shaped plate; 305, a transmission servo drive; 306, a transmission transverse sliding table; 307, a cylindrical supporting wheel; 308, a limiting ring; 4, a jacking mechanism; 401, a jacking workpiece; 402, a jacking fixed plate; 403, a jacking stand column; 404, a jacking bellows; 405, a jacking frame; 406, a jacking sliding table; 407, a jacking screw; 408, a jacking servo drive; 5, a glass substrate. DETAILED DESCRIPTION

[0028] The technical solutions of the application will be described clearly and completely in connection with the embodiments. Obviously, the described embodiments are only some of the embodiments of the application, but not all the embodiments. Based on the embodiments in the application, all other embodiments obtained by those skilled in the art without creative work are within the protection scope of the application.

[0029] As Figures 1-6 shown, the chemical vapor deposition equipment lifting transmission linkage coating mechanism comprises a vacuum cavity 1, and square notches 101 are formed in the side walls of the vacuum cavity 1.

[0030] The side wall of the vacuum cavity 1 is provided with a transmission roller mechanism 3, and the inside of the vacuum cavity 1 is provided with a glass substrate 5.

[0031] The transmission roller mechanism 3 comprises magnetic fluid transmission shafts 301, and the transmission roller mechanism 3 is in an atmospheric environment outside the vacuum cavity 1, so that maintenance and adjustment are facilitated. The magnetic fluid transmission shafts 301 are sleeved with transmission shaft bellows 302 outside one end close to the vacuum cavity 1, the feeding of each magnetic fluid transmission shaft 301 is connected by the transmission shaft bellows 302, and the telescopic distance of the transmission shaft bellows 302 can ensure that the vacuum chamber sealing is always leak-free when a group of magnetic fluid transmission shafts 301 move left and right.

[0032] The bottom of the magnetic fluid transmission shaft 301 is fixedly connected with a transmission shaft movable plate 303, and an extension cylinder 304 is arranged below the transmission shaft movable plate 303. The extension cylinder 304 drives the whole set of magnetic fluid transmission shafts 301 to retract and extend simultaneously through extension and retraction. Two sets of magnetic fluid transmission shafts 301 extend or retract in opposite directions, and retract into the vacuum cavity 1 simultaneously or extend out of the vacuum cavity 1 simultaneously. The retracted position can be below the glass substrate 5 to support the glass substrate 5. After the glass substrate 5 is lifted by the jacking mechanism 4, the two sets of magnetic fluid transmission shafts 301 extend outward and away from the position, and the jacking mechanism 4 lowers the glass substrate 5 to the upper surface of the heating plate 2 for heating and deposition process.

[0033] The end of the extension cylinder 304 away from the vacuum cavity 1 is slidably connected with a cylinder end 3041, the end of the cylinder end 3041 is inserted with an E-shaped plate 3042, the transmission shaft movable plate 303 is fixedly connected to the top of the E-shaped plate 3042, the bottom of the vacuum cavity 1 is provided with a jacking mechanism 4, the jacking mechanism 4 includes a jacking frame 405, the inside of the jacking frame 405 is slidably connected with a jacking slide 406, the top of the jacking frame 405 is fixedly connected with a plurality of jacking columns 403, one end of the jacking column 403 extending into the vacuum cavity 1 is fixedly connected with a thimble fixing plate 402, the top of the thimble fixing plate 402 is fixedly connected with a thimble workpiece 401, the glass substrate 5 is arranged above the thimble workpiece 401, the end of the thimble workpiece 401 is made of high-strength, high-temperature-resistant engineering plastic, which can stably support the glass substrate 5 through the small hole 202 reserved in the heating plate 2, has toughness and will not be brittle, and will not damage the glass substrate 5. Secondly, its material is a poor conductor of heat, which causes less damage to the heated glass substrate 5.

[0034] The outside of the jacking column 403 is sleeved with a jacking bellows 404, and the whole jacking mechanism 4 is in the atmospheric environment outside the vacuum cavity 1, which is convenient for maintenance and adjustment. When the process is performed, the thimble workpiece 401 completely falls below the heating plate 2, so that the glass substrate 5 and the heating plate 2 are safely attached, and the heating effect is good. At the same time, it also avoids the plastic part at the end of the thimble workpiece 401 being in a heated state for a long time, thereby prolonging the service life of the thimble workpiece 401. The jacking mechanism 4 completes the action in a vacuum environment, which does not affect the film coating process; the jacking column 403 is connected by the jacking bellows 404, and the extension distance of the jacking bellows 404 can ensure that the vacuum chamber seal remains leak-free during the lifting of the jacking mechanism 4.

[0035] Two ends of the jacking bellows 404 are fixedly connected to the jacking column 403 and the bottom of the vacuum cavity 1 respectively, the side wall of the jacking sliding platform 406 is fixedly connected with the jacking servo drive 408, the top of the jacking servo drive 408 is threadedly connected with the jacking lead screw 407, the jacking servo drive 408 can drive the rotation of the jacking lead screw 407, thereby driving the up-down movement of the whole set of jacking pins workpieces 401. To achieve the purpose of lifting the glass substrate 5 above the heating plate 2 or lowering it to the surface of the heating plate 2.

[0036] The lifting height can be driven by the jacking servo drive 408, and the speed can be adjusted by electrical control, which is simple and convenient to operate. The jacking servo drive 408 has high precision positioning capability, which can ensure that the jacking mechanism 4 reaches the precise height requirement during the coating process. The jacking servo drive 408 has high control precision, so that each lifting operation can reach the same position, improving the repeatability and stability of the production process. By adjusting the lifting speed through electrical control, different coating process requirements can be flexibly adjusted, such as fast lifting to save time, or slow lifting to optimize coating effect. Appropriate lifting speed can reduce mechanical impact, protect equipment and substrate, and prolong equipment service life.

[0037] The end of the magnetic fluid transmission shaft 301 and the telescopic cylinder 304 is sleeved with a transmission servo drive 305, the side wall of the vacuum cavity 1 is provided with a transmission hole 102, the end of the magnetic fluid transmission shaft 301 close to the vacuum cavity 1 is inserted into the transmission hole 102, the end of the magnetic fluid transmission shaft 301 extending into the vacuum cavity 1 is fixedly connected with a cylindrical supporting roller 307, and the side wall of the cylindrical supporting roller 307 is fixedly connected with a limiting ring 308.

[0038] The inside of the vacuum cavity 1 is fixedly connected with a heating plate 2, the surface of the heating plate 2 is provided with a plurality of small holes 202, the inside of the vacuum cavity 1 is fixedly connected with a plurality of heating plate supporting columns 201, the heating plate supporting columns 201 are fixedly connected to the bottom of the heating plate 2, the positions of the small holes 202 correspond one-to-one with the positions of the jacking pin workpieces 401, and the jacking pin workpieces 401 are inserted into the small holes 202.

[0039] The side wall of the vacuum cavity 1 is fixedly connected with a transmission transverse sliding platform 306, and the E-shaped plate 3042 is slidingly connected to the top of the transmission transverse sliding platform 306.

[0040] The two ends of the transmission shaft bellows 302 are fixedly connected to the magnetic fluid transmission shaft 301 and the side wall of the vacuum cavity 1 respectively.

[0041] Working principle: the magnetic fluid transmission shafts 301 of the transmission roller mechanisms 3 on both sides of the vacuum cavity 1 are in the extended state, to the position away from the edge of the glass substrate, the lifting mechanism 4 drives the downward movement of the whole set of lifting pins 401, the lifting pins 401 pass through the corresponding holes in the middle of the heating plate 2 and exit below the heating plate 2, and the glass substrate 5 is lowered to be attached to the heating plate 2, waiting for the glass substrate 5 to be heated and the deposition coating process to be completed.

[0042] Working principle: the magnetic fluid transmission shafts 301 of the transmission roller mechanisms 3 on both sides of the vacuum cavity 1 are in the extended state, to the position away from the edge of the glass substrate, the lifting mechanism 4 drives the downward movement of the whole set of lifting pins 401, the lifting pins 401 pass through the corresponding holes in the middle of the heating plate 2 and exit below the heating plate 2, and the glass substrate 5 is lowered to be attached to the heating plate 2, waiting for the glass substrate 5 to be heated and the deposition coating process to be completed.

[0043] Working principle: the magnetic fluid transmission shafts 301 of the transmission roller mechanisms 3 on both sides of the vacuum cavity 1 are in the extended state, to the position away from the edge of the glass substrate, the lifting mechanism 4 drives the downward movement of the whole set of lifting pins 401, the lifting pins 401 pass through the corresponding holes in the middle of the heating plate 2 and exit below the heating plate 2, and the glass substrate 5 is lowered to be attached to the heating plate 2, waiting for the glass substrate 5 to be heated and the deposition coating process to be completed.

[0044] Working principle: the magnetic fluid transmission shafts 301 of the transmission roller mechanisms 3 on both sides of the vacuum cavity 1 are in the extended state, to the position away from the edge of the glass substrate, the lifting mechanism 4 drives the downward movement of the whole set of lifting pins 401, the lifting pins 401 pass through the corresponding holes in the middle of the heating plate 2 and exit below the heating plate 2, and the glass substrate 5 is lowered to be attached to the heating plate 2, waiting for the glass substrate 5 to be heated and the deposition coating process to be completed.

[0045] The above examples are only used to illustrate the technical method of the present application and are not limiting. Although the present application has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that the technical method of the present application can be modified or replaced equivalently without departing from the spirit and scope of the technical method of the present application.

Claims

1. A lift transfer and coating mechanism of a chemical vapor deposition apparatus, characterized by, Including vacuum cavity (1), the side wall of vacuum cavity (1) is provided with transmission roller mechanism (3), wherein: The transmission roller mechanism (3) includes a magnetic fluid transmission shaft (301), the bottom of the magnetic fluid transmission shaft (301) is fixedly connected with a transmission shaft moving plate (303), the lower side of the transmission shaft moving plate (303) is provided with a telescopic cylinder (304), the end of the telescopic cylinder (304) away from the vacuum cavity (1) is slidably connected with a cylinder end (3041), the end of the cylinder end (3041) is inserted with an E-shaped plate (3042), the transmission shaft moving plate (303) is fixedly connected to the top of the E-shaped plate (3042), the bottom of the vacuum cavity (1) is provided with a jacking mechanism (4), the jacking mechanism (4) includes a jacking frame (405), the inside of the jacking frame (405) is slidably connected with a jacking sliding table (406), the top of the jacking frame (405) is fixedly connected with a plurality of jacking columns (403), one end of the jacking column (403) extending into the vacuum cavity (1) is fixedly connected with a thimble fixing plate (402), the top of the thimble fixing plate (402) is fixedly connected with a thimble workpiece (401). The end of the magnetic fluid transmission shaft (301) and the telescopic cylinder (304) is sleeved with a transmission servo drive (305), the side wall of the vacuum cavity (1) is provided with a transmission hole (102), the end of the magnetic fluid transmission shaft (301) close to the vacuum cavity (1) is inserted into the transmission hole (102), one end of the magnetic fluid transmission shaft (301) extending into the vacuum cavity (1) is fixedly connected with a cylindrical supporting wheel (307), the side wall of the cylindrical supporting wheel (307) is fixedly connected with a limiting ring (308). The inside of the vacuum cavity (1) is fixedly connected with a heating plate (2), the surface of the heating plate (2) is provided with a plurality of small holes (202), the inside of the vacuum cavity (1) is fixedly connected with a plurality of heating plate supporting columns (201), the bottom of the heating plate (2) is fixedly connected with the heating plate supporting column (201), the position of the small hole (202) corresponds to the position of the thimble workpiece (401) one by one, the thimble workpiece (401) is inserted into the small hole (202).

2. The chemical vapor deposition apparatus lift and transfer in-line coating mechanism of claim 1, wherein, The outside of the jacking column (403) is sleeved with a jacking bellows (404), the two ends of the jacking bellows (404) are fixedly connected to the jacking column (403) and the bottom of the vacuum cavity (1) respectively, the side wall of the jacking sliding table (406) is fixedly connected with a jacking servo drive (408), the top of the jacking servo drive (408) is threadedly connected with a jacking lead screw (407).

3. The chemical vapor deposition apparatus lift and transfer in-line coating mechanism of claim 1, wherein, The two side walls of the vacuum cavity (1) are provided with square notches (101).

4. The chemical vapor deposition apparatus lift and transfer in-line coating mechanism of claim 1, wherein, The side wall of the vacuum cavity (1) is fixedly connected with a transmission horizontal moving sliding table (306), the E-shaped plate (3042) is slidably connected to the top of the transmission horizontal moving sliding table (306).

5. The chemical vapor deposition apparatus lift and transfer in-line coating mechanism of claim 1, wherein, The magnetic fluid transmission shaft (301) is sleeved with a transmission shaft bellow (302) outside one end of the vacuum cavity (1), both ends of the transmission shaft bellow (302) are fixedly connected to the magnetic fluid transmission shaft (301) and the side wall of the vacuum cavity (1) respectively.

6. The chemical vapor deposition apparatus lift and transfer in-line coating mechanism of claim 1, wherein, The inside of the vacuum cavity (1) is provided with a glass substrate (5), and the glass substrate (5) is arranged above the thimble workpiece (401).

Images