Combined probe and quantum detection equipment

Abstract

The invention relates to the field of quantum sensing technology, and the scheme is a combined probe and quantum detection equipment, wherein the combined probe comprises a wide-field sensing unit, a wide-field fluorescent camera, a lever, a plurality of reflective lenses, a spatial optical path, a narrow-field sensing unit, a laser transmission optical fiber, a beamer and a narrow-field fluorescent camera; the invention can quickly find and locate surface defects of an object to be tested through the designed narrow-field sensing unit, and then accurately image the found defects through the wide-field sensing unit, the system greatly reduces the difficulty of fluorescent data processing, makes defect measurement more efficient and accurate, and can meet a variety of detection requirements; at the same time, the array-type measurement structure can extend the measurement range in the longitudinal direction, and the structural design of the combination of the reflective lens and the lever enables the laser to accurately switch the incident position, so that segmented irradiation of multiple detection areas can be achieved through a single light source.

Description

Technical Field

[0001] The present invention relates to the field of quantum sensing technology, and in particular to a combined probe and quantum detection equipment. Background Art

[0002] NV (nitrogen-vacancy) color centers in diamond are a common diamond defect, which is formed by a nitrogen atom replacing a carbon atom in the diamond lattice, and there is a vacancy (i.e., a missing carbon atom) in the adjacent lattice. This structure causes changes in the surrounding electronic state, thereby changing the absorption and emission characteristics of diamond in the visible spectrum, producing a specific color. It is common to use 532nm wavelength green excitation light to excite the NV color center, and correspondingly, the NV color center will produce red feedback fluorescence; and changes in some physical fields (such as magnetic fields, temperature, etc.) will cause specific changes in the red fluorescence it produces, and based on these specific changes, sensing measurements of specific physical fields can be achieved.

[0003] At present, the volume of diamonds containing NV color centers used in sensing detection is generally at the micron level, the measurement coverage area is small, and the overall information of the defective area cannot be quickly obtained. In order to improve the rapid and sufficient detection of defective areas, the present invention proposes a corresponding solution. Summary of the invention

[0004] The present invention proposes a combined probe and quantum detection equipment to solve the problems existing in the prior art.

[0005] To achieve the above object, the present invention provides the following technical solutions:

[0006] A combined probe, comprising:

[0007] A wide-field sensing unit comprises a plurality of detection areas containing NV color centers, the top surface of the detection area is a fluorescence output surface, a light incident port is arranged in the side surface of each detection area, and all the light incident ports are on the same side;

[0008] A wide-field fluorescence camera adapted to be disposed directly above the wide-field sensing unit and configured to be movable along the length direction of the wide-field sensing unit;

[0009] A lever connected to the bottom of the wide-field fluorescence camera and moving with the wide-field fluorescence camera;

[0010] A plurality of reflective lenses, which are arranged one by one in front of the light incident port, and the reflective lenses are configured such that: when the lever moves to the light incident port, the reflective lenses are driven by the lever to rotate to a set angle, and when the lever moves away from the light incident port, the reflective lenses return to being parallel to the surface where the light incident port is located;

[0011] A spatial light path, which is used to transmit the first excitation light, and is configured such that when any reflective lens is rotated to a set angle, the first excitation light transmitted in the spatial light path is guided into a light incident port at a corresponding position by reflection;

[0012] A narrow field sensing unit is fixedly arranged at the front side of the wide field sensing unit, and comprises a plurality of detection points corresponding to the detection areas one by one, each detection point is provided with a diamond grain containing an ensemble NV color center, and each diamond grain is independently equipped with a fluorescence collection optical fiber and arranged on one end face thereof;

[0013] A laser transmission optical fiber, which is used to transmit a second excitation light that illuminates the detection point;

[0014] A cable bundler, comprising a plurality of regularly arranged optical fiber connectors, wherein the input sides of the optical fiber connectors are connected one by one with the ends of the fluorescence collection optical fibers away from the diamond grains;

[0015] A narrow field fluorescence camera is used to obtain feedback fluorescence transmitted from the output side of each optical fiber connector.

[0016] Furthermore, the wide-field sensing unit is formed by a row of transparent substrates connected to each other, the transparent substrates contain NV color centers, each of the transparent substrates includes a first surface, a second surface and a substrate peripheral side surface, the substrate peripheral side surface is provided with a light incident port, the excitation light enters from the light incident port, the substrate peripheral side surface other than the light incident port and the first surface are provided with reflective media, the second surface is a fluorescent output surface, and a filter medium for filtering out feedback fluorescence is provided thereon.

[0017] Furthermore, it also includes a tube body, one side of which is provided with a through opening facing the light incident port, the reflective lens is rotatably arranged in the tube body, a rotating shaft is provided in the middle of the top of the reflective lens, the rotating shaft passes through the top surface of the tube body and is connected to a gear lever, and a rotation return spring is provided between the rotating shaft and the tube body, wherein when the lever moves to the light incident port, the gear lever is driven by the lever to rotate to a set angle.

[0018] Furthermore, the invention also comprises a first microwave radiator, which is configured to move with the wide-field fluorescence camera, and the microwave radiator is used to radiate a microwave field to the detection area.

[0019] Furthermore, the laser transmission optical fiber is a one-to-many optical fiber or a single-mode optical fiber with several light leakage structures.

[0020] Furthermore, it also comprises a second microwave radiator, which is used to radiate a microwave field to each detection point of the narrow field sensing unit.

[0021] Furthermore, the cable bundler includes a shell, a partition is arranged inside the shell, the optical fiber connector is placed on the partition, and a filter structure is arranged on the shell. The filter structure is located on the output side of the optical fiber connector, and the filter structure is used to filter out feedback fluorescence.

[0022] Furthermore, it also comprises a three-channel optical path switch, two output sides of which are respectively connected to the spatial optical path and the laser transmission optical fiber.

[0023] Furthermore, the narrow-field fluorescence camera and the wide-field fluorescence camera are the same device, the beam splitter is arranged on the moving path of the wide-field fluorescence camera, and is configured to be able to be collected by the wide-field fluorescence camera for feedback fluorescence transmitted from the output side of each optical fiber connector.

[0024] On the other hand, the present invention also proposes a quantum detection device for detecting surface defects of ferromagnetic materials, which uses the combined probe as described above and also includes a magnetizer, which is used to magnetize the ferromagnetic material to be tested so that a leakage magnetic field is generated at its surface defects for the combined probe to sense.

[0025] Compared with the prior art, the beneficial effects of the present invention are as follows: the present invention can quickly discover and locate surface defects of the object to be tested through the designed narrow-field sensing unit, and then accurately image the discovered defects through the wide-field sensing unit. The system greatly reduces the difficulty of fluorescence data processing, making defect measurement more efficient and accurate, and can meet a variety of detection needs; at the same time, the array-type measurement structure can extend the measurement range in the longitudinal direction, and the structural design of the combination of the reflective lens and the gear lever enables the laser to accurately switch the incident position, thereby realizing segmented irradiation of multiple detection areas through a single light source. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for describing the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0027] Figure 1 is a schematic diagram of the combined probe in Example 1;

[0028] Figure 2 Schematic diagram of the wide field sensing unit and related devices in Example 1;

[0029] Figure 3 for Figure 2 The enlarged schematic diagram at A in the middle;

[0030] Figure 4 is a schematic structural diagram of the transparent substrate in Example 1;

[0031] Figure 5 is a cross-sectional view of the interior of the tube body in Example 1;

[0032] Figure 6 A schematic diagram of the narrow field sensing unit and associated components in Example 1;

[0033] Figure 7 is another schematic diagram of the narrow field sensing unit and related components in Example 1;

[0034] Figure 8 A schematic diagram of the principle of the laser transmission optical fiber in Example 1;

[0035] Fig. 9 is a schematic diagram of the structure of the cable tie in Example 1;

[0036] Fig.10 is a schematic structural diagram of the second microwave radiator in Example 1;

[0037] Fig.11 Schematic diagram of the combined probe in Example 2. DETAILED DESCRIPTION

[0038] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0039] <Example 1>

[0040] See attached Figure 1-3 This embodiment proposes a combined probe, including a wide-field sensing unit, a wide-field fluorescence camera 3, a lever 4, a plurality of reflective lenses 5, a spatial optical path 6, a narrow-field sensing unit 7, a laser transmission optical fiber 8, a beamer 9 and a narrow-field fluorescence camera 10.

[0041] In this example, the wide-field sensing unit includes a plurality of detection areas 1 containing NV color centers, the top surface of the detection area 1 is a fluorescence output surface, and a light incident port 2 is provided in the side surface of each detection area 1, and all light incident ports 2 are on the same side. In an exemplary solution, see the attached Figure 4The wide-field sensing unit is composed of a row of transparent substrates 101 connected to each other. The detection area 1 is the measurement coverage area of ​​the transparent substrate 101. The transparent substrate 101 contains NV color centers. Each transparent substrate 101 includes a first surface, a second surface and a substrate peripheral side surface. The light incident port 2 is arranged on the substrate peripheral side surface, and the excitation light enters from the light incident port 2. Reflective media 102 are arranged on the substrate peripheral side surface and the first surface except the light incident port 2. The second surface is a fluorescence output surface, on which a filter medium 103 for filtering out feedback fluorescence is arranged.

[0042] Among them, the transparent substrate 101 can be a diamond block with NV color centers evenly distributed inside. However, in this option, based on the difficulty and cost of manufacturing large-sized diamond blocks, the overall size of the transparent substrate 101 is difficult to be enlarged, and it is difficult to obtain a larger-sized detection imaging effect. Considering this problem, in another scheme, the transparent substrate 101 is designed to have diamond particles evenly distributed inside with ensemble NV color centers. In this scheme, the transparent substrate 101 is a non-diamond transparent material, such as epoxy resin, and the size of the diamond particles is nanometer-level. In this example, the light incident port 2 is set on the side of the substrate, and the excitation light enters from the light incident port 2; taking the transparent substrate 101 as a rectangular thin block as an example, the light incident port 2 is set on its side. Considering that part of the excitation light and feedback fluorescence will leak from this position and cause waste, in order to reduce waste, the area of ​​the light incident port 2 should be minimized while ensuring that the excitation light fully enters.

[0043] In addition, in order to avoid the waste of light reflection when the excitation light enters the light incident port 2, in some preferred designs, a layer of anti-reflection film is also designed on the surface of the light incident port 2. In this example, the reflective medium 102 is arranged on the side surface of the substrate and the first surface except the light incident port 2; taking the transparent substrate 101 as a rectangular thin block as an example, the reflective medium 102 is arranged on the bottom surface of the rectangular thin block and all side parts except the light incident port 2; Regarding the reflective medium 102, the purpose in this example is mainly to enable the excitation light to be reflected multiple times inside the transparent substrate 101 to improve the efficiency of exciting the NV color center to generate feedback fluorescence. In the preferred solution, the reflective medium 102 is designed in the form of a coating, and its material can be gold or silver. In the above example, the filter medium 103 is arranged on the second surface to filter out the feedback fluorescence. Taking the transparent substrate 101 as a rectangular thin block as an example, the generated feedback fluorescence can only be collected from the second surface (top surface), and the excitation light is also transmitted along with the feedback fluorescence. In order to obtain high-purity feedback fluorescence, the filter medium 103 is designed on the second surface to only allow the feedback fluorescence to pass through it.

[0044] In addition, considering that the excitation light will escape from the second surface and cause waste, in order to avoid this part of waste, in some design schemes, the filter medium 103 is also used to reflect the excitation light. In this regard, different from the indiscriminate light reflection of the aforementioned reflective medium, the filter medium 103 is required here to be able to transmit feedback fluorescence and reflect the excitation light. A structure similar to a two-color filter can be selected, which can achieve the effect of transmitting red light and reflecting green light. In addition, considering that stray light may still exist after filtering by the filter medium 103, a further scheme also includes a filter arranged on the filter medium, and the filter is used to filter out stray light.

[0045] In this example, the wide-field fluorescence camera 3 is adapted to be arranged directly above the wide-field sensor unit and is configured to be movable along the length direction of the wide-field sensor unit; Figure 2 For example, the direction of the arrow is the moving direction of the wide-field fluorescence camera 3. The displacement drive component is not drawn in the figure, but it should be known that the displacement drive component can be various applicable devices in the prior art, such as a screw displacement drive component, a rack and pinion displacement drive component, a cylinder telescopic component, etc.; Regarding the positional relationship between the wide-field fluorescence camera 3 and the wide-field sensing unit, it shall be based on the ability to clearly observe the feedback fluorescence on the top surface of the wide-field sensing unit.

[0046] In this example, the lever 4 is connected to the bottom of the wide-field fluorescence camera 3 and moves with the wide-field fluorescence camera 4. The shape of the lever 4 is not specifically limited, and it can achieve the action of moving the reflective lens 5 according to the set target, and is preferably a straight rod.

[0047] In this example, a plurality of reflective lenses 5 are arranged one by one in front of the light incident port 2, and the reflective lenses 5 are configured as follows: when the lever 4 moves to the light incident port 2, the reflective lenses 5 are driven by the lever to rotate to a set angle, and when the lever 4 moves away from the light incident port 2, the reflective lenses 5 are restored to be parallel to the surface where the light incident port 2 is located; Figure 1 and 2 For example, the wide field sensor unit is a rectangular parallelepiped structure, all light incident ports 2 are located on the front side of the rectangular parallelepiped structure, and the reflective lens 5 is installed at an appropriate distance in front of the front side. Regarding the reflective lens 5 and its function realization, in an exemplary solution, as shown in the attached Figure 1 and 5 As shown, it comprises a tube body 11, one side of the tube body 1 is provided with a through opening 111 facing the light incident port 2, the reflective lens 5 is rotatably arranged in the tube body 11, and a rotating shaft 112 is provided at the middle of the top of the reflective lens 5, the rotating shaft 112 passes through the top surface of the tube body 11 and is connected to a gear lever 113, and a rotation return spring 114 is provided between the rotating shaft 112 and the tube body 11, wherein, when the lever 4 moves to the light incident port 2, the gear lever 113 is driven by the lever 4 to rotate a set angle, and for ease of understanding, please refer to the attached Figure 3The spatial optical path 6 is located between the reflective lens 5 and the light incident port 2, and the shift lever 113 is perpendicular to the mirror surface of the reflective lens 5. When the lever 4 drives the reflective lens 5 to rotate 45° or a nearby angle, the excitation light transmitted in the spatial optical path 6 can enter the light incident port 2; in addition, in order to improve the stability and reliability of the operation of the lever 4, a slide groove 115 adapted to the moving trajectory of the lever 4 is provided on the top surface of the tube body 11, and the bottom of the lever 4 is slidably connected to the slide groove 115.

[0048] In this example, due to the design of the reflective lens 5, the incident excitation light must be in a certain orbit. Based on this, a spatial light path 6 is set to limit it, which is used to transmit the first excitation light and is configured as follows: when any reflective lens 5 is rotated to a set angle, the first excitation light transmitted in the spatial light path 6 is guided into the light incident port 2 at the corresponding position by reflection. Regarding the formation of the spatial light path, in an exemplary scheme, as shown in the attached Figure 2 As shown, there is an optical fiber connector 15 (generally an optical fiber coupler) arranged on the right side of the wide-field sensing unit, which is connected to the external optical fiber that transmits the first excitation light. The first excitation light is emitted from the optical fiber connector 15 to form a spatial optical path 6. Combined with the design of the tube body 11 in some example schemes, the optical fiber connector 15 can be fixedly designed at the right end of the tube body 11.

[0049] In this example, the narrow field sensing unit 7 is fixedly arranged at the front side of the wide field sensing unit, and includes a plurality of detection points corresponding to the detection area 1 one by one. For ease of understanding, in an example solution, see the attached Figure 6 Each detection point is provided with a diamond grain 71 containing an ensemble NV color center. Each diamond grain 71 is independently configured with a fluorescence collection optical fiber 72 and is arranged on one side end face thereof, such as by bonding with optical glue.

[0050] In this example, a laser transmission optical fiber 8 is also independently designed, which is used to transmit the second excitation light irradiating the detection point. There are many possible designs for the laser transmission optical fiber 8, as shown in the attached figure. Figure 7 As shown, the laser transmission optical fiber 8 is a one-to-many optical fiber, and can also be as shown in the attached Figure 8 As shown, the laser transmission optical fiber 8 is a single-mode optical fiber with a plurality of light leakage structures. The diamond particles 71 are arranged near the light leakage structures. The second excitation light leaks at each light leakage structure. The leaked light acts on the diamond particles 71. The light leakage structure can be a large-angle bent portion on the optical fiber (refer to the Chinese authorized invention with publication number CN114894225B) or a bare optical fiber area on the optical fiber (refer to the Chinese authorized invention with publication number CN114563022B).

[0051] In this example, the cable bundle 9 includes a plurality of regularly arranged optical fiber connectors, the input side of which is connected one by one to the end of the fluorescence collection optical fiber 72 away from the diamond grains 71. In an exemplary solution, as shown in the attached Fig.10 As shown, the cable bundler 9 includes a shell 91, a partition 92 is arranged inside the shell 91, and a fiber optic connector 93 (preferably a fiber optic coupler) is placed through the partition 92. In a more preferred solution, a filter structure 94 is also provided on the shell 91. The filter structure 94 is located on the output side of the fiber optic connector 93 and is used to filter out feedback fluorescence.

[0052] In this example, the narrow-field fluorescence camera 10 is used to obtain the feedback fluorescence transmitted from the output side of each optical fiber connector. For ease of understanding, taking the structure of the above-listed beam splitter 9 as an example, the narrow-field fluorescence camera 10 is to uniformly collect the feedback fluorescence emitted from the top of each optical fiber connector 93.

[0053] As is known to all, regarding the measurement application of NV color centers, the measurement method based on ODMR technology is popular. This method also uses microwaves to modulate the NV color center. Therefore, in some schemes, a microwave radiator is also included. The microwave radiator is used to radiate a microwave field to the NV color center. Correspondingly, in some preferred schemes, as shown in the attached Figure 2-3 As shown, it also includes a first microwave radiator 12, which is configured to move with the wide-field fluorescence camera 3. The microwave radiator 12 is used to radiate a microwave field to the detection area. In this example, the microwave radiator 12 can be connected to the lever 4, and the structure can be a copper wire coil. Of course, it is also possible to configure a microwave radiator for the narrow-field sensing unit, so in other schemes, such as the attached Figure 1 , 6 As shown in FIG. 7 , the second microwave radiator 13 is further included, which is used to radiate a microwave field to each detection point of the narrow field sensing unit 7. Regarding the second microwave radiator 13, an exemplary structure is shown in FIG. Fig.10 As shown, the whole is a square tube, and a plurality of microwave radiation ports 131 are spaced apart on the front side thereof, and each microwave radiation port 131 corresponds to a detection point; in an exemplary solution, as shown in the attached Figure 1 As shown, a connecting member 16 is also provided, which is fixedly connected between the second microwave radiator 13 and the tube body 11, so that the wide and narrow sensing units are connected as one.

[0054] In the foregoing, the structures of the wide-field fluorescence camera 3 and the narrow-field fluorescence camera 10 can be consistent. For example, the structure includes a wide-field camera and an objective lens, which are adapted to be connected, and the distance between the objective lens and the surface to be observed is also adapted, so that the wide-field camera can accurately obtain the feedback fluorescence through the objective lens. In a preferred solution, the wide-field camera can be directly connected to the objective lens and installed as a whole, as shown in the attached Figure 1 As shown in , the top of the objective lens is directly connected to a wide-field camera, wherein the wide-field camera can preferably be a CCD or a CMOS.

[0055] In some preferred embodiments, as shown in the attached Figure 1 As shown, the combined probe also includes a three-channel optical path switch 14, whose two output sides are respectively connected to the spatial optical path 6 and the laser transmission optical fiber 8. This design allows the wide and narrow sensing units to use only one laser light source, that is, the source of the first excitation light and the second excitation light is the same. When in use, the optical path switch 14 is controlled as needed to achieve excitation of different sensing units.

[0056] <Example 2>

[0057] In Example 1, a wide-field fluorescence camera 3 and a narrow-field fluorescence camera 10 are used, which will undoubtedly increase the volume and cost of the device. In order to optimize this problem, Example 2 proposes another probe structure design, as shown in the attached Fig.11 As shown, the narrow-field fluorescence camera 3 and the wide-field fluorescence camera 10 are the same device, that is, the narrow-field fluorescence camera 3 is removed, and the beam connector 9 is set on the moving path of the wide-field fluorescence camera 10 and is configured to be collected by the wide-field fluorescence camera 10 The feedback fluorescence transmitted from the output side of each optical fiber connector.

[0058] Through the above design, the probe structure maintains its original function while further optimizing the structural design and saving design costs.

[0059] <Example 3>

[0060] Regarding the application scenarios of the aforementioned combination probe, this example proposes a quantum detection device for detecting surface defects of ferromagnetic materials. The combination probe proposed above is applied, and the device also includes a magnetizer, which is used to magnetize the ferromagnetic material to be tested so as to generate a leakage magnetic field at its surface defects for the combination probe to sense.

[0061] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0062] The preferred embodiments of the present invention disclosed above are only used to help explain the present invention. The preferred embodiments do not describe all the details in detail, nor do they limit the invention to only specific implementation methods. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can understand and use the present invention well. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A combination probe, It is characterized in that Include: A wide-field sensing unit comprises a plurality of detection areas containing NV color centers, the top surface of the detection area is a fluorescence output surface, a light incident port is arranged in the side surface of each detection area, and all the light incident ports are on the same side; A wide-field fluorescence camera adapted to be disposed directly above the wide-field sensing unit and configured to be movable along the length direction of the wide-field sensing unit; A lever connected to the bottom of the wide-field fluorescence camera and moving with the wide-field fluorescence camera; A plurality of reflective lenses, which are arranged one by one in front of the light incident port, and the reflective lenses are configured such that: when the lever moves to the light incident port, the reflective lenses are driven by the lever to rotate to a set angle, and when the lever moves away from the light incident port, the reflective lenses return to being parallel to the surface where the light incident port is located; A spatial light path, which is used to transmit the first excitation light, and is configured such that when any reflective lens is rotated to a set angle, the first excitation light transmitted in the spatial light path is guided into a light incident port at a corresponding position by reflection; A narrow field sensing unit is fixedly arranged at the front side of the wide field sensing unit, and comprises a plurality of detection points corresponding to the detection areas one by one, each detection point is provided with a diamond grain containing an ensemble NV color center, and each diamond grain is independently equipped with a fluorescence collection optical fiber and arranged on one end face thereof; A laser transmission optical fiber, which is used to transmit a second excitation light that illuminates the detection point; A cable bundler, comprising a plurality of regularly arranged optical fiber connectors, wherein the input sides of the optical fiber connectors are connected one by one with the ends of the fluorescence collection optical fibers away from the diamond grains; A narrow field fluorescence camera is used to obtain feedback fluorescence transmitted from the output side of each optical fiber connector.

2. The combined probe according to claim 1, It is characterized in that The wide-field sensing unit is formed by a row of transparent substrates connected to each other, the transparent substrates contain NV color centers, each of the transparent substrates includes a first surface, a second surface and a substrate peripheral side surface, the substrate peripheral side surface is provided with a light incident port, the excitation light enters from the light incident port, the substrate peripheral side surface other than the light incident port and the first surface are provided with reflective media, the second surface is a fluorescent output surface, and a filter medium for filtering out feedback fluorescence is provided thereon.

3. The combined probe according to claim 1, It is characterized in that It also includes a tube body, one side of which is provided with a through opening facing the light incident port, the reflective lens is rotatably arranged in the tube body, a rotating shaft is provided at the middle of the top of the reflective lens, the rotating shaft passes through the top surface of the tube body and is connected to a gear lever, a rotation return spring is provided between the rotating shaft and the tube body, wherein when the lever moves to the light incident port, the gear lever is driven by the lever to rotate to a set angle.

4. The combined probe according to claim 1, It is characterized in that The invention also comprises a first microwave radiator which is configured to move with the wide field fluorescence camera, and is used for radiating a microwave field to the detection area.

5. The combined probe according to claim 1, It is characterized in that The laser transmission optical fiber is a one-to-many optical fiber or a single-mode optical fiber with a plurality of light leakage structures.

6. The combined probe according to claim 1, It is characterized in that The device also comprises a second microwave radiator, which is used for radiating a microwave field to each detection point of the narrow field sensor unit.

7. The combined probe according to claim 1, It is characterized in that The cable bundler comprises a shell, a partition is arranged inside the shell, the optical fiber connector is placed through the partition, and a filter structure is arranged on the shell, the filter structure is located at the output side of the optical fiber connector, and the filter structure is used to filter out feedback fluorescence.

8. The combined probe according to claim 1, It is characterized in that It also includes a three-channel optical path switch, and its two output sides are respectively connected to the spatial optical path and the laser transmission optical fiber.

9. The combined probe according to claim 1, It is characterized in that The narrow-field fluorescence camera and the wide-field fluorescence camera are the same device. The beamer is arranged on the moving path of the wide-field fluorescence camera and is configured to be able to collect feedback fluorescence transmitted from the output side of each optical fiber connector by the wide-field fluorescence camera.

10. A quantum detection device for detecting surface defects of ferromagnetic materials. It is characterized in that The combined probe as claimed in any one of claims 1 to 9 is used, and further comprises a magnetizer, wherein the magnetizer is used to magnetize the ferromagnetic material to be tested so as to generate a leakage magnetic field at the surface defects thereof for the combined probe to sense.

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