A film expanding device and a wafer film expanding machine

Abstract

A film expanding device includes a base with a cylindrical convex portion protruding from its upper side, a film expanding disc placed on the convex portion, a film pressing disc located above the film expanding disc and capable of pressing towards the film expanding disc, and a rotating unit. The rotating unit includes a connecting sleeve, a rotating motor, a guide wheel, and a transmission belt. The film expanding disc is arranged within the connecting sleeve and rotates therewith. The connecting sleeve is sleeved outside the convex portion. The rotating motor is installed on the base. The guide wheel is sleeved on the output shaft of the rotating motor, and the transmission belt is wound around the outside of the connecting sleeve and connected to the guide wheel. When the rotating motor rotates, it can drive the connecting sleeve to rotate through the transmission belt. In addition, the present invention also provides a wafer film expanding machine using the above film expanding device. Compared with the prior art, the film expanding device and the wafer film expanding machine of the present invention can improve the switching efficiency of producing wafer discs of different sizes.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor product production, and particularly to a film expanding device and a wafer film expanding machine. Background Art

[0002] A wafer refers to a silicon wafer used for fabricating silicon semiconductor integrated circuits. Since its shape is circular, it is called a silicon wafer. It is an indispensable important carrier in the semiconductor manufacturing process. A wafer is usually made by subjecting silicon to a series of processing procedures, such as purification, melting, pulling, grinding, polishing, etc., and finally cutting. As a carrier, the larger the diameter of the wafer, the more chips it can carry, the higher the utilization rate, and the lower the production cost of the fabricated chips. Therefore, wafers generally undergo film expanding processing, and the larger the diameter of the wafer after film expansion, the better. The size of the wafer diameter represents the level of technology.

[0003] In the prior art, the general steps for wafer heat expansion and film expansion are as follows: 1. Adjust the equipment to adjust the temperature of the lower heating disk to the required temperature; 2. Turn on the dicing saw, put in the inner crystal ring, the inner crystal ring is sleeved outside the lower heating disk and is tightly engaged with it, and then place the wafer film to be expanded with the film side facing up on the inner crystal ring; 3. Press the switch, the lower heating disk rises, driving the inner crystal ring and the wafer film to rise, and the upper disk above the lower heating disk drives the outer crystal ring to press down until the outer crystal ring is sleeved and pressed outside the inner crystal ring, and the wafer film is pressed tightly between the outer crystal ring and the inner crystal ring and expands evenly; 4. The upper disk and the lower heating disk return to their original positions, take out the expanded wafer film together with the outer crystal ring and the inner crystal ring, and cut off the excess wafer film outside the outer crystal ring and the inner crystal ring to obtain a crystal disk with the required diameter. In addition, during the film expansion process, it may also be necessary to rotate the wafer film to adjust the direction of the chip for the next step of processing.

[0004] However, in actual processing, it is often necessary to replace different-sized crystal disks for processing according to needs. For traditional wafer film expanding machines, the entire film expanding device may need to be removed to replace the film expanding disks of different sizes for processing. The installation and disassembly work cause inconvenience in installation and affect production efficiency. Summary of the Invention

[0005] Based on this, the purpose of the present invention is to overcome the defects or deficiencies of the prior art and provide a film expanding device.

[0006] The technical solution adopted by the present invention is as follows:

[0007] A film expanding device, comprising:

[0008] A base, on the upper side of which a cylindrical convex portion protrudes;

[0009] An expanding film disk, placed on the convex part;

[0010] A film pressing disk, located above the expanding film disk and capable of pressing towards the expanding film disk;

[0011] A rotating unit, including a connecting sleeve, a rotating motor, a guide wheel and a transmission belt; the expanding film disk is arranged in the connecting sleeve and rotates therewith; the connecting sleeve is sleeved outside the convex part; the rotating motor is installed on the base; the guide wheel is sleeved on the output shaft of the rotating motor, the transmission belt is wound outside the connecting sleeve and is connected with the guide wheel, when the rotating motor rotates, it can drive the connecting sleeve to rotate through the transmission belt.

[0012] Compared with the prior art, the expanding film device of the present invention can adjust the angle of the crystal disk without dead angle of 360°. At the same time, when processing crystal disks of different sizes, only the expanding film disk of the expanding film device together with the connecting sleeve needs to be removed from the expanding film device, instead of removing the whole expanding film device, which simplifies the disassembly and installation work and installation steps, improves the production efficiency, and can be compatible with the expanding film processing of crystal disks of different sizes.

[0013] Further, the rotating unit further includes a rotating bearing sleeved outside the convex part, and the connecting sleeve is sleeved outside the rotating bearing, which reduces the friction force, improves the stability when the connecting sleeve rotates, and is convenient for positioning the connecting sleeve on the base.

[0014] Further, the expanding film disk is fixed in the connecting sleeve by magnetic force. When switching to process crystal disks of different sizes, only the expanding film disk needs to be removed from the connecting sleeve for replacement, which further improves the production efficiency.

[0015] Further, the number of the guide wheels is more than two, and they are circumferentially wound around the outer periphery of the connecting sleeve, the transmission belt is connected between the guide wheels, and each guide wheel presses the transmission belt towards the connecting sleeve, so as to improve the stability when the expanding film disk rotates.

[0016] Further, it further includes a lifting unit, the lifting unit is arranged on the lower side of the base, and includes a lifting motor and a lead screw installed on the base; the number of the lead screws is more than two, and they pass through the base and are arranged on the outer periphery of the expanding film disk, the lead screws extend in the up and down direction, and their upper ends are connected with the film pressing disk; the lifting motor can drive the lead screws to rotate; the rotating unit is arranged on the upper side of the base, the lifting unit and the rotating unit are respectively located on the upper and lower sides of the base, and they do not interfere with each other during operation, and the lifting unit can evenly act on the pressing force on the expanding film disk.

[0017] Further, the lifting unit further includes a guiding member, which protrudes from the upper side surface of the base and is located on the outer periphery of the film expanding disk, and its upper end is inserted into the film pressing disk to guide the up and down movement of the film pressing disk, reducing the occurrence of adverse conditions such as deformation and breakage of the lead screw.

[0018] Further, the lifting unit further includes a synchronous pulley and a synchronous belt; the synchronous pulleys are respectively sleeved on the output shaft of the lifting motor and the outer peripheries of the lead screws, and the synchronous belt is connected between the synchronous pulleys to realize the synchronous rotation of the lead screws driven by the same motor, further preventing the film pressing disk from tilting.

[0019] Further, the lifting unit further includes a plurality of tensioning shafts whose axes are parallel to the axis of the lead screw. The tensioning shafts are arranged around the outer periphery of the film expanding disk and are in contact with the synchronous belt to tension the synchronous belt. When the synchronous belt moves, the tensioning shafts rotate around their respective axes, enabling the synchronous belt to move smoothly while being tensioned.

[0020] Further, the film pressing disk is provided with a positioning pin protruding towards the film expanding disk for positioning the outer wafer, preventing the outer wafer from being installed in the opposite direction.

[0021] In addition, the present invention also provides a wafer film expanding machine, and its technical solution is as follows:

[0022] A wafer film expanding machine includes a wafer sensor, a film expanding device, and a controller; the film expanding device includes:

[0023] A base, on the upper side surface of which a cylindrical convex portion protrudes;

[0024] A film expanding disk placed on the convex portion;

[0025] A film pressing disk located above the film expanding disk and capable of pressing towards the film expanding disk;

[0026] A rotating unit, including a connecting sleeve, a rotating motor, a guide wheel, and a transmission belt; the film expanding disk is arranged in the connecting sleeve and rotates therewith; the connecting sleeve is sleeved outside the convex portion; the rotating motor is installed on the base; the guide wheel is sleeved on the output shaft of the rotating motor, and the transmission belt is wound around the outside of the connecting sleeve and is connected to the guide wheel. When the rotating motor rotates, it can drive the connecting sleeve to rotate through the transmission belt;

[0027] A camera device located above the film pressing disk and capable of photographing the wafer film;

[0028] The wafer sensor is arranged on the side surface of the film expanding disk facing the film pressing disk; the controller is electrically connected to the wafer sensor, the rotating motor, and the camera device respectively.

[0029] Compared with the prior art, the wafer film expanding machine of the present invention can not only adjust the angle of the wafer disk without dead angle of 360°, but also has high efficiency in replacing the wafer disk. At the same time, by setting a wafer sensor, the wafer film can be automatically expanded after being placed on the film expanding disk, with high automation degree. The imaging device can capture the wafer film, and the imaging device is electrically connected to the controller to automatically identify the angle of the wafer disk and automatically control the rotation angle of the rotation unit to achieve automated production.

[0030] For better understanding and implementation, the present invention will be described in detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a schematic partial structure diagram of the wafer film expanding machine in the present invention;

[0032] Figure 2 It is a schematic overall structure diagram of the film expanding device in the present invention;

[0033] Figure 3 It is a schematic overall structure diagram of the film expanding device after removing the film pressing disk in one perspective direction of the present invention;

[0034] Figure 4 It is a schematic overall structure diagram of the film expanding device after removing the film pressing disk in another perspective direction of the present invention;

[0035] Figure 5 It is a top view of the film expanding device in the present invention;

[0036] Figure 6 For Figure 5 sectional view taken along line A-A;

[0037] Figure 7 It is a bottom view of the film expanding device in the present invention;

[0038] Figure 8 For Figure 6 partial enlarged view of FIG. B in the above figure;

[0039] Figure 9 It is a front view of the outer crystal ring used in an embodiment of the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0040] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present invention. In the description of the present invention, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0041] After analyzing the structures of the existing wafer film expanding machine and its film expanding device, the inventor found that although the rotation of the film expanding disk can be achieved by setting the film expanding disk and the base as a split structure, the split structure brings about the positioning problem between the film expanding disk and the base. In particular, wafer disks of different sizes correspond to film expanding disks of different sizes, and different film expanding disks require different positioning structures on the base, making it difficult to align the different film expanding disks during installation on the base. Moreover, if the corresponding positioning structure is not preset on the base, the film expanding disk will be difficult to quickly install on the base, resulting in poor compatibility of the film expanding device. To address the problem of poor compatibility of the film expanding device, a connecting sleeve for accommodating the film expanding disk is added to the film expanding device in this case, and only a convex part for positioning the connecting sleeve needs to be correspondingly provided on the base. Different film expanding disks correspond to the same connecting sleeve, simplifying the positioning of the connecting sleeve on the base, thereby improving the production efficiency when switching film expanding disks of different sizes.

[0042] Please refer to Figure 1 and Figure 2, the wafer film expanding machine of the present invention includes a wafer sensor 10, a camera device 20, a film expanding device 30, a workbench 40 and a controller (not shown in the figure). Among them, the film expanding device 30 is installed on the workbench 40 and is electrically connected to the controller, and is used to perform various film expanding processes on the wafer film 100 under the control of the controller. The wafer sensor 10 is installed on the film expanding device 30 and is electrically connected to the controller, and is used to detect whether the wafer film 100 is placed on the film expanding device 30 and send a signal to the controller. The camera device 20 is located above the film expanding device 30 and is electrically connected to the controller, and is used to photograph the wafer film 100 placed thereon and send the image information to the controller for calculation and analysis. During film expansion, the wafer film 100 is placed on the upper side of the film expanding device 30 and is clamped by it. The wafer sensor 10 senses the wafer film 100 and transmits a signal to the controller. The controller controls the film expanding device 30 to expand the wafer film 100. Then, the camera device 20 photographs a single or multiple chips, etc. on the expanded wafer film 100 and sends the image to the controller. The controller analyzes the image, including determining whether the angle of the chip exceeds a threshold value to determine whether to further control the movement of the film expanding device 30. Among them, the wafer sensor 10 is a contact or non-contact sensor in the prior art, including a photosensitive sensor, a pressure sensor, etc. The camera device 20 can be a camera, etc.

[0043] Among them, please refer to Figures 2 to 8 , the film expanding device 30 includes a base 31, a film expanding disk 32, a film pressing disk 33, a lifting unit 34, a rotating unit 35 and a support foot 36.

[0044] The base 31 is a plate body, and a circular through hole 311 is formed in the middle of its plate surface. The number of the support feet 36 is more than two, and they protrude uniformly on the lower side surface of the base 31 to support the base 31 on the workbench 40.

[0045] The film expanding disk 32 protrudes on the upper side surface of the base 31 and surrounds the outside of the through hole 311. Preferably, the axis of the through hole 311 coincides with the axis of the film expanding disk 32.

[0046] The film pressing disk 33 includes a top plate 331, a pressing block 332, an observation hole 333, and a mounting portion 334. The top plate 331 is located above the film expanding disk 32. The pressing block 332 protrudes from the surface of the top plate 331 facing the film expanding disk 32 and surrounds the outside of the film expanding disk 32. There is a gap between the pressing block 332 and the outer side surface of the film expanding disk 32 to place an inner crystal ring and an outer crystal ring for film expansion between the pressing block 332 and the film expanding disk 32. During film expansion, the top plate 331 presses upward above the film expanding disk 32, and the wafer film 100 is located between the top plate 331 and the upper side surface of the film expanding disk 32 and is pulled by the inner crystal ring and the outer crystal ring. The observation hole 333 is opened on the top plate 331 to facilitate shooting by the imaging device 20. The mounting portion 334 protrudes radially from the outer side surface of the pressing block 332 and is used to connect the lifting unit 34. In one embodiment, a positioning pin 335 is inserted into the top plate 331 of the film pressing disk 33, and the positioning pin 335 extends towards the film expanding disk 32. In this embodiment, when projected downward, as Figure 9 shown, a positioning groove 200 is opened on the outer crystal ring used during film expansion. The outer crystal ring is placed on one side of the top plate 331 facing the film expanding disk 32, and the positioning pin 335 is inserted into the positioning groove 200 to realize the positioning of the outer crystal ring on the film pressing disk 33 and prevent the outer crystal ring from being installed in the opposite direction within the film pressing disk 33. Preferably, the number of the positioning pins 335 is more than two, and their number and positions correspond to the positioning groove 200.

[0047] The lifting unit 34 is arranged on the side surface of the base 31 facing away from the film pressing disc 33, and drives the film pressing disc 33 to move up and down. It includes a lifting motor 341, a lead screw 342, a guide member 343, a synchronous pulley 344, a synchronous belt 345 and a tensioning shaft 346. The lifting motor 341 is installed on the upper side surface of the base 31, its output shaft passes through the base 31 and extends downward, and the synchronous pulley 344 is sleeved on the outside thereof. The lead screw 342 is installed on the lower side surface of the base 31, one end of which passes through the base 31 from bottom to top and extends upward, and is threadedly connected to the film pressing disc 33. The lead screw 342 rotates with the rotation of the lifting motor 341. In this embodiment, the number of the lead screws 342 is more than two, and they are uniformly arranged along the circumferential direction outside the film expanding disc 32; preferably, each lead screw 342 is arranged radially on the opposite sides of the film expanding disc 32, and the lifting motor 341 drives the lead screw 342 to rotate around the axis through the synchronous pulley 344 and the synchronous belt 345. In other embodiments, a plurality of lifting motors 341 can also be provided according to the lead screws 342, and each lifting motor 341 drives each lead screw 342 to rotate through gears or the like. One end of the guide member 343 is fixedly arranged on the base 31, and the other end is inserted into the film pressing disc 33 and is located on the outer circumference of the film expanding disc 32. Its extending direction is parallel to the axis of the lead screw 342, so as to guide the up and down movement of the film pressing disc 33 when the lead screw 342 rotates. The guide member 343 can be a guide shaft in the prior art, or a linear bearing or the like. In this embodiment, the number of the guide members 343 is two, and they are arranged radially outside the film expanding disc 32 along the radial direction of the film expanding disc 32, and their upper ends are inserted into the film pressing disc 33. The lead screw 342 and the guide member 343 are arranged at intervals along the circumferential direction of the film expanding disc 32, and the centers of the lead screw 342 and the guide member 343 are located on the concentric circles of the film expanding disc 32, so that the film pressing disc 33 is evenly stressed, preventing the lead screw 342 from being unevenly stressed and deforming or breaking. The output shaft of the lifting motor 341 and the lower end of the lead screw 342 are both sleeved with the synchronous pulley 344, and the synchronous belt 345 is connected between the synchronous pulleys 344. When the lifting motor 341 is started, each synchronous pulley 344 rotates synchronously under the drive of the synchronous belt 345, realizing the synchronous rotation of each lead screw 342, and reducing the situation that the film pressing disc 33 tilts. A plurality of tensioning shafts 346 are axially connected to the lower side surface of the base 31 and surround the outside of the film expanding disc 32, and their axes are parallel to the axial direction of the lead screw 342. The synchronous belt 345 abuts against each tensioning shaft 346 respectively. The plurality of tensioning shafts 346 tension the synchronous belt 345 to ensure the synchronous rotation of each synchronous pulley 344, and when the synchronous belt 345 moves, each tensioning shaft 346 rotates around its own axis respectively, so that the synchronous belt 345 moves smoothly.

[0048] Further, a cylindrical convex portion 312 is provided on the side of the base 31 facing the film pressing disc 33, and the through hole 311 penetrates through the convex portion 312. The film expanding disc 32 is placed above the convex portion 312. The rotating unit 35 is sleeved outside the film expanding disc 32 and drives the film expanding disc 32 to rotate on the base 31 around an axis extending in the vertical direction. The rotating unit 35 includes a connecting sleeve 351, a rotating bearing 352, a rotating motor 353, a guide wheel 354, and a transmission belt 355. Please refer to Figure 8, a through-hole portion 351a with an outer diameter larger than the outer diameter of the film expanding disk 32 is provided in the middle of the connecting sleeve 351. The axis of the through-hole portion 351a coincides with the axis of the film expanding disk 32 and is communicated with the through-hole 311. The inner crystal ring and the outer crystal ring are located between the through-hole portion 351a and the film expanding disk 32. The film expanding disk 32 is accommodated in the through-hole portion 351a, and the film pressing disk 33 can enter the through-hole portion 351a to press the wafer film 100 and the film expanding disk 32 located in the through-hole portion 351a for film expansion. In the axial direction of the axis of the film expanding disk 32, a receiving portion 351b protrudes radially on the inner wall of the through-hole portion 351a on the side close to the convex portion 312. A connecting block 321 protrudes radially outward on the outer side surface of the bottom of the film expanding disk 32. The lower side surface of the connecting block 321 and the upper side surface of the receiving portion 351b can be fixedly connected together by means such as bonding and screw connection, so that the connecting sleeve 351 supports the film expanding disk 32, and the film expanding disk 32 rotates with the connecting sleeve 351. In this embodiment, both the connecting block 321 and the receiving portion 351b extend in a ring shape around the axis of the film expanding disk 32, so that the supporting force of the connecting sleeve 351 on the film expanding disk 32 is uniform. Further, a magnet is provided between the connecting block 321 and the receiving portion 351b, or the connecting block 321 and the receiving portion 351b are made of a magnetic material, so that the connecting block 321 and the receiving portion 321b are connected together by magnetic force. Therefore, different film expanding disks 32 can be replaced according to the size of the wafer film 100 for film expansion. The wafer sensor 10 is installed on the side surface of the connecting sleeve 351 facing the film pressing disk 33. The rotary bearing 352 is sleeved outside the convex portion 312 and is located between the convex portion 312 and the connecting sleeve 351. The rotary motor 353 is installed on the lower side surface of the base 31, and the axis of its output shaft extends upward through the base 31. The guide wheel 354 is located on the upper side surface of the base 31 and is sleeved on the output shaft of the rotary motor 353. The transmission belt 354 is wound around the outer circumference of the connecting sleeve 351 and is connected to the guide wheel 354. Preferably, the number of the guide wheels 354 is more than two. One of the guide wheels 354 is connected to the rotary motor 323, and the other guide wheels 354 are circumferentially wound around the outer circumference of the connecting sleeve 351. The transmission belt 355 is sequentially connected to the outside of the guide wheels 354. The guide wheels 354 press the transmission belt 355 against the connecting sleeve 351 and tension the transmission belt 355, so that the transmission belt 355 keeps fitting with the outer peripheral surface of the connecting sleeve 351 to improve the connecting sleeve 351. When the rotary motor 353 rotates, the guide wheel 354 rotates accordingly, and drives the connecting sleeve 351 to rotate through the transmission belt 354, and the film expanding disk 32 rotates accordingly, so as to adjust the angle of the film expanding disk 32.In this embodiment, a tooth portion is provided on the outer side of the connecting sleeve 351, the transmission belt 355 is a synchronous belt, and the guide pulley 354 is a synchronous pulley.

[0049] Further, the film expanding device 30 further includes a Z-axis origin inductor 37 and a rotation origin inductor 38 that are respectively electrically connected to the controller. The Z-axis origin inductor 37 and the rotation origin inductor 38 are respectively installed on the base 31, and respectively sense the distance of the up-and-down movement of the film pressing disc 33 and the rotation angle of the connecting sleeve 351.

[0050] During use, the controller controls the lifting motor 341 to rotate forward, driving the lead screw 342 to rotate, and the film pressing disc 33 rises. The inner crystal ring and the outer crystal ring are selected according to the required size. The inner crystal ring is sleeved on the outer side of the film expanding disc 32, the outer crystal ring is arranged on the inner side of the pressing block 332, the wafer film 100 is placed on the film expanding disc 32, the wafer inductor 10 sends a signal to the controller, the controller controls the lifting motor 341 to rotate in reverse, the film pressing disc 33 descends and expands the wafer film 100. The imaging device 20 photographs the angle of the chip on the wafer inductor 10. When the chip angle exceeds the range, the controller controls the rotation motor 353 to rotate forward or backward, driving the connecting sleeve 351 to rotate, and the film expanding disc 32 rotates accordingly until the chip is adjusted to the required angle. The controller then controls the lifting motor 341 to rotate forward again, the film pressing disc 33 rises, and the crystal disc after film expansion is taken out.

[0051] Compared with the prior art, the film expanding device and the wafer film expanding machine of the present invention have the following advantages:

[0052] 1. The film expanding device of the present invention adopts the method of pressing the film downwards by the pressing disc, and no matter how much film expanding force is applied, the working height of the wafer can be ensured to remain unchanged;

[0053] 2. While being able to adjust the angle of the crystal disc without dead angles of 360°, the switching efficiency is high when producing crystal discs of different sizes, and it can be compatible with the processing of crystal discs of different sizes;

[0054] 3. The stability is high when the film expanding disc rotates;

[0055] 4. The tension on the wafer film is uniform, and the quality of the produced wafers is high;

[0056] 5. The crystal disc after each film expansion is located at the same height, which is convenient for the next process;

[0057] 6. The degree of automation of the film expanding process is high.

[0058] The above-described embodiments merely represent several implementation manners of the present invention. The description thereof is relatively specific and detailed, but it should not be construed as a limitation on the scope of the invention patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can still be made, and these all fall within the protection scope of the present invention.

Claims

1. A film expanding device, characterized in that , including: A base, on the upper side of which a cylindrical convex part protrudes. A film expanding disc, placed above the convex part. A film pressing disc, located above the film expanding disc and capable of pressing towards the film expanding disc. Two positioning pins extending towards the film expanding disc are provided on the film pressing disc, and the two positioning pins are used to be inserted into the positioning grooves of the outer wafer. A rotating unit, including a connecting sleeve, a rotating bearing, a rotating motor, a guide wheel and a transmission belt; the film expanding disc is arranged in the connecting sleeve and rotates therewith; a receiving part protrudes from the inner wall of the connecting sleeve, and a connecting block protrudes from the outer wall of the film expanding disc. The film expanding disc is located in the connecting sleeve and above the convex part. The lower side of the connecting block is in contact with the upper side of the receiving part. The film expanding disc is fixed in the connecting sleeve by magnetic force, so that the film expanding disc rotates with the connecting sleeve; the connecting sleeve is sleeved outside the convex part, and the rotating bearing is located between the connecting sleeve and the convex part; the rotating motor is installed on the base; the guide wheel is sleeved on the output shaft of the rotating motor, and the transmission belt surrounds the outside of the connecting sleeve and is connected to the guide wheel. When the rotating motor rotates, it can drive the connecting sleeve to rotate through the transmission belt.

2. The film expanding device according to claim 1, wherein: The number of the guide wheels is more than two, and they are circumferentially arranged around the outer periphery of the connecting sleeve. The transmission belt is connected between the guide wheels, and each guide wheel presses the transmission belt towards the connecting sleeve.

3. The film expanding device according to claim 1, wherein: It further includes: A lifting unit, which is arranged on the lower side of the base and includes a lifting motor and a lead screw installed on the base; the number of the lead screws is more than two, and they pass through the base and are arranged on the outer periphery of the film expanding disc. The lead screws extend in the up and down direction, and their upper ends are connected to the film pressing disc; the lifting motor can drive the lead screws to rotate. The rotating unit is arranged on the upper side of the base.

4. The film expanding device according to claim 3, wherein: The lifting unit further includes a guiding member, which protrudes from the upper side of the base and is located on the outer periphery of the film expanding disc, and its upper end is inserted into the film pressing disc.

5. The film expanding device according to claim 3, wherein: The lifting unit further includes a synchronous pulley and a synchronous belt; the synchronous pulleys are respectively sleeved on the output shaft of the lifting motor and the outer periphery of each lead screw, and the synchronous belt is connected between the synchronous pulleys.

6. The film expanding device according to claim 5, wherein: The lifting unit further includes a plurality of tensioning shafts whose axes are parallel to the axis of the lead screw. The tensioning shafts are arranged around the outer periphery of the film expanding disc and are in contact with the synchronous belt to tension the synchronous belt. When the synchronous belt moves, the tensioning shafts rotate around their respective axes.

7. A wafer film expanding machine, characterized in that: It includes a wafer inductor, a film expanding device and a controller; the film expanding device includes: A base, on the upper side of which a cylindrical convex part protrudes. A film expanding disc, placed above the convex part. A film pressing disc, located above the film expanding disc and capable of pressing towards the film expanding disc. Two positioning pins extending towards the film expanding disc are provided on the film pressing disc, and the two positioning pins are used to be inserted into the positioning grooves of the outer wafer. The rotating unit includes a connecting sleeve, a rotating bearing, a rotating motor, a guide wheel and a transmission belt; the film expanding disc is arranged in the connecting sleeve and rotates therewith; a receiving portion protrudes from the inner wall of the connecting sleeve, and a connecting block protrudes from the outer wall of the film expanding disc. The film expanding disc is located in the connecting sleeve and above the convex portion. The lower side surface of the connecting block is in contact with the upper side surface of the receiving portion. The film expanding disc is fixed in the connecting sleeve by magnetic force, so that the film expanding disc rotates with the connecting sleeve; the connecting sleeve is sleeved outside the convex portion, and the rotating bearing is located between the connecting sleeve and the convex portion; the rotating motor is installed on the base; the guide wheel is sleeved on the output shaft of the rotating motor, and the transmission belt is wound around the outside of the connecting sleeve and is in contact with the guide wheel. When the rotating motor rotates, it can drive the connecting sleeve to rotate through the transmission belt; The imaging device is located above the film pressing disc and can capture the wafer film; The wafer sensor is arranged on the side surface of the film expanding disc facing the film pressing disc; the controller is electrically connected to the wafer sensor, the rotating motor and the imaging device respectively.

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