An ultraviolet lamp for a semiconductor process and a semiconductor process apparatus

Abstract

The application provides a UV lamp for semiconductor process, comprising a lamp tube and a reflector extending along the length direction of the lamp tube, the reflector is an arc surface plate with U-shaped cross section and surrounds the lamp tube, the U-shaped top of the reflector passes through a connecting part to be connected with a shell through the connecting part, the U-shaped lower end of the reflector is provided with a fixing part, the fixing part is provided with a positioning bolt, the lower end side of the reflector is pushed by the positioning bolt to make the reflector rotate around the top to adjust the installation angle of the reflector.

Description

Technical Field

[0001] This invention relates to the field of semiconductor process equipment, and more particularly to an ultraviolet lamp and semiconductor process equipment for use in semiconductor processes. Background Technology

[0002] Ultraviolet (UV) lamps are commonly used equipment in semiconductor manufacturing processes and have a wide range of applications. For example, in thin film deposition processes, UV lamps can provide energy to promote the deposition process. Specifically, UV lamps can provide high-energy ultraviolet light, which can excite and ionize the deposition source material, causing it to form a thin film on the substrate surface. In addition, UV lamps can also be used in photocuring processes; for example, in photolithography, UV lamps can be used to cure photosensitive materials onto a substrate to form the desired patterns and structures.

[0003] However, in existing ultraviolet lamps, the optical hardware is arranged in a uniform and fixed structure. When the light intensity distribution is uneven or there is a lot of wasted light or loss, it is impossible to make targeted adjustments, which may even affect the results of semiconductor processing.

[0004] In order to overcome the above-mentioned defects in the existing technology, there is an urgent need in the field for an ultraviolet lamp and semiconductor process equipment for semiconductor processes, which can adjust the installation position of the ultraviolet lamp tube and the installation angle of the reflector, and make targeted adjustments according to the actual process conditions, thereby improving the range and uniformity of ultraviolet lamp irradiation in the process equipment and thus improving the process effect. Summary of the Invention

[0005] The following provides a brief overview of one or more aspects to offer a basic understanding of them. This overview is not an exhaustive summary of all conceived aspects, nor is it intended to identify key or decisive elements of all aspects, nor to define the scope of any or all aspects. Its sole purpose is to present some concepts of one or more aspects in a simplified form to prepare for the more detailed descriptions that follow.

[0006] To overcome the aforementioned deficiencies in the prior art, the present invention provides an ultraviolet lamp for semiconductor processes, comprising: a lamp tube and a reflector extending along the length of the lamp tube. The reflector is an arc panel with a U-shaped cross-section that surrounds the lamp tube. The top of the U-shape of the reflector passes through a connecting portion to be connected to a housing via the connecting portion. The lower end of the U-shape of the reflector is provided with a fixing portion, and an adjusting bolt is provided on the fixing portion. By pushing the lower side of the reflector with the adjusting bolt, the reflector rotates around the top to adjust the installation angle of the reflector.

[0007] In one embodiment, preferably, in the ultraviolet lamp for semiconductor processes provided by the present invention, the top of the connecting part is used for fixed connection with the housing, the reflector passes through the middle of the connecting part, and the bottom of the connecting part is provided with an elastic member for cooperating with the rotation of the reflector.

[0008] In one embodiment, preferably, in the ultraviolet lamp for semiconductor process provided by the present invention, the bottom of the connecting part is further provided with a movable pressure block, one end of the movable pressure block is hinged to the middle of the connecting part, and the other end is used to fix and support the upper part of the U-shaped side of the reflector. The elastic component includes a reset spring sheet provided at the hinge of the movable pressure block.

[0009] In one embodiment, preferably, the ultraviolet lamp for semiconductor processes provided by the present invention has a movable pressure block and a reset spring on the upper part of the two U-shaped sides of the reflector.

[0010] In one embodiment, preferably, in the ultraviolet lamp for semiconductor processes provided by the present invention, both U-shaped lower ends of the reflector are provided with fixing portions including the adjusting bolts. The adjusting bolts push the end side of the reflector from the outside of the U-shaped reflector inward, and the two adjusting bolts cooperate to adjust and realize the angle rotation of the reflector.

[0011] In one embodiment, preferably, in the ultraviolet lamp for semiconductor processes provided by the present invention, the fixing part is provided with a support spring block for supporting the movement of the end of the reflector, and the width of the support spring block covers the movement distance of the end of the reflector.

[0012] In one embodiment, preferably, in the ultraviolet lamp for semiconductor process provided by the present invention, the lamp tube is fixedly connected to the lamp tube pressure plate, and the lamp tube pressure plate is installed and connected to the housing through a movable plate, wherein the bolt mounting holes on the movable plate and the housing are elongated slotted holes for adjusting the installation position of the lamp tube.

[0013] Another aspect of the present invention provides a semiconductor process apparatus comprising an ultraviolet lamp for semiconductor processes as described in any of the above claims. Attached Figure Description

[0014] The above-described features and advantages of the present invention will be better understood after reading the following detailed description of embodiments of the present disclosure in conjunction with the accompanying drawings. In the drawings, components are not necessarily drawn to scale, and components having similar related properties or features may have the same or similar reference numerals.

[0015] Figure 1 This is a schematic diagram of the reflector assembly structure of an ultraviolet lamp, based on an example of the prior art.

[0016] Figure 2A, Figure 2B They are Figure 1 Enlarged views of two locations on the central reflector assembly structure;

[0017] Figure 3 This is a schematic diagram of the reflector assembly structure of an ultraviolet lamp according to an embodiment of the present invention;

[0018] Figure 4 This is illustrated according to an embodiment of the present invention. Figure 3 Enlarged view of the partial structure of the central fixing part;

[0019] Figure 5 This is a schematic diagram of the device structure of the reset spring according to an embodiment of the present invention;

[0020] Figure 6 This is a partial enlarged view of the structure at the adjusting bolt according to an embodiment of the present invention;

[0021] Figure 7 This is a schematic diagram of a lamp tube mounting structure based on an example of existing technology;

[0022] Figure 8 This is a schematic diagram of a lamp mounting structure according to an embodiment of the present invention;

[0023] Figure 9 This is a schematic diagram of the device structure of the elongated waist hole in the lamp tube mounting structure according to an embodiment of the present invention;

[0024] Figure 10A , 10B This is a schematic diagram illustrating the adjustment direction of the lamp tube and the reflector when the middle film layer of the wafer is thinner and the periphery is thicker, according to an embodiment of the present invention.

[0025] Figure 11A This is a schematic diagram of the film thickness distribution when the wafer thin film thickness is eccentric; and

[0026] Figure 11B , 11C This is illustrated according to an embodiment of the present invention when... Figure 8 The diagram shows the adjustment direction of the lamp tube and the reflector in the given situation.

[0027] For clarity, a brief explanation of the reference numerals in the accompanying drawings is provided below:

[0028] 301 fluorescent tube

[0029] 302 reflector

[0030] 303 Connecting Part

[0031] 304 adjusting bolt

[0032] 401 Active Press Block

[0033] 402 Reset Spring

[0034] 601 Adjustment Bolt

[0035] 602 Supporting spring block

[0036] 701 lamp tube pressing sheet

[0037] 702 casing

[0038] 801 lamp tube pressing sheet

[0039] 802 mobile board

[0040] 803 casing

[0041] 804 bolt mounting holes

[0042] 805 bolts Detailed Implementation

[0043] The following specific embodiments illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. Although the description of the present invention is presented in conjunction with preferred embodiments, this does not mean that the features of the invention are limited to these embodiments. On the contrary, the purpose of describing the invention in conjunction with embodiments is to cover other options or modifications that may be derived based on the claims of the present invention. To provide a thorough understanding of the invention, many specific details will be included in the following description. The invention may also be implemented without using these details. Furthermore, to avoid confusion or obscuring the focus of the invention, some specific details will be omitted in the description.

[0044] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0045] Furthermore, the terms "upper," "lower," "left," "right," "top," "bottom," "horizontal," and "vertical" used in the following description should be understood as the orientations shown in the relevant paragraphs and accompanying drawings. These relative terms are for illustrative purposes only and do not imply that the described apparatus must be manufactured or operated in a specific orientation, and therefore should not be construed as limiting the invention.

[0046] It is understood that although terms such as "first," "second," and "third" may be used herein to describe various components, regions, layers, and / or parts, these components, regions, layers, and / or parts should not be limited by these terms, and these terms are only used to distinguish different components, regions, layers, and / or parts. Therefore, the first components, regions, layers, and / or parts discussed below may be referred to as second components, regions, layers, and / or parts without departing from some embodiments of the present invention.

[0047] Figure 1 This is a schematic diagram of the reflector assembly structure of an ultraviolet lamp, based on an example of the prior art.

[0048] like Figure 1 As shown, the U-shaped reflector is mounted to the housing via a dark-colored connector at the top.

[0049] Figure 2A , Figure 2B They are Figure 1 Enlarged views of two locations on the central reflector assembly structure.

[0050] Please refer to Figure 2A , Figure 1 In the prior art, at position A, the curved reflector passes through the middle of the connecting part, and the bottom end of the connecting part supports and fixes the side of the curved surface. Since the components at the bottom of the connecting part are not movable, the position of the curved reflector is fixed and cannot be adjusted after installation.

[0051] At the same time, such as Figure 2B As shown, Figure 1 At position B, the existing technology also fixes the bottom of the curved reflector, leaving no space for adjustment, which means that the reflector of the ultraviolet lamp in the existing technology does not have the function of position adjustment.

[0052] To overcome the aforementioned deficiencies in the prior art, the present invention provides an ultraviolet lamp and semiconductor process equipment for semiconductor processes. The installation position of the ultraviolet lamp tube and the installation angle of the reflector can be adjusted, and targeted adjustments can be made according to the actual process conditions to improve the range and uniformity of ultraviolet lamp irradiation in the process equipment, thereby improving the process effect.

[0053] Figure 3 This is a schematic diagram of the reflector assembly structure of an ultraviolet lamp according to an embodiment of the present invention.

[0054] Please refer to Figure 3The present invention provides an ultraviolet lamp for semiconductor processes, comprising: a lamp tube 301 and a reflector 302 extending along the length of the lamp tube. The reflector 302 is an arc panel with a U-shaped cross-section and surrounds the lamp tube 301. The top of the U-shaped reflector 302 passes through a connecting part to be connected to the housing via the connecting part 303. The lower end of the U-shaped reflector 302 is provided with a fixing part, and the fixing part is provided with an adjusting bolt 304. By pushing the lower side of the reflector 302 with the adjusting bolt 304, the reflector 302 rotates around the top to adjust the installation angle of the reflector 302.

[0055] In a preferred embodiment, the ultraviolet lamp provided by the present invention has a connecting portion whose top is fixedly connected to the housing, a reflector passing through the middle of the connecting portion, and an elastic member at the bottom of the connecting portion for cooperating with the rotation of the reflector. Figure 4 It can clearly show the local structure.

[0056] Figure 4 This is illustrated according to an embodiment of the present invention. Figure 3 Enlarged view of the partial structure of the central fixing part.

[0057] Figure 4 for Figure 3 A partial magnification of position A', in a more preferred embodiment, such as... Figure 4 As shown, the bottom of the connecting part is also provided with a movable pressure block 401. One end of the movable pressure block 401 is hinged to the middle of the connecting part, and the other end is used to fix and support the upper part of the U-shaped side of the reflector. The elastic component includes a reset spring 402 provided at the hinge of the movable pressure block.

[0058] Figure 5 This is a schematic diagram of the device structure of the reset spring according to an embodiment of the present invention.

[0059] like Figure 5 As shown, the reset spring can be a thin metal sheet with a certain bending angle. While providing rotation space for the curved reflector, it also increases the rotational resistance of the movable pressure block, thereby providing a fixed support for the side of the curved reflector.

[0060] In one embodiment, preferably, the ultraviolet lamp for semiconductor processes provided by the present invention has a movable pressure block and a reset spring on the upper part of each of the two U-shaped sides of the reflector. Understandably, the movable pressure blocks and reset springs on both sides cooperate with each other to achieve the rotation and relative fixation of the curved reflector's position.

[0061] It should be noted that the device structure for rotating the top of the U-shaped curved reflector is only described exemplarily here, and is intended to provide a preferred embodiment for adjusting the rotation of the curved reflector around the top position, rather than limiting the scope of protection of the present invention. In fact, other connection structures or components that can achieve similar adjustment effects can be applied to the ultraviolet lamp for semiconductor processes provided by the present invention, and should also be included within the scope of protection of the present invention.

[0062] Figure 6 This is a magnified view of a portion of the structure at the adjusting bolt, according to an embodiment of the present invention.

[0063] Figure 6 yes Figure 3 A magnified view of the area at position B', as shown below. Figure 6 As shown, you can refer to the following: Figure 3 In a preferred embodiment, each of the two U-shaped lower ends of the reflector is provided with a fixing part containing the adjusting bolt 601. The adjusting bolt 601 pushes the end side of the reflector from the outside of the U-shaped reflector inward, and the two adjusting bolts 601 cooperate to adjust and realize the angle rotation of the reflector.

[0064] Furthermore, and even better, you can continue to refer to... Figure 6 The fixing part is equipped with a support spring block 602 to support the movement of the end of the reflector. The width of the support spring block covers the movement distance of the end of the reflector. As the adjusting bolts at both ends are tightened or loosened, the position of the bottom end of the U-shaped reflector is changed, which can cause the curved reflector to rotate around the top, thereby realizing the adjustment of the reflector angle to meet different process requirements.

[0065] In addition to adjusting the angle of the curved reflector, the ultraviolet lamp for semiconductor processes provided by this invention can also adjust the installation position of the lamp tube. The improvements to the lamp tube installation components will be described in detail below.

[0066] Figure 7 This is a schematic diagram of a lamp mounting structure based on an example of existing technology.

[0067] like Figure 7 As shown, in the prior art, the lamp tube is fixedly connected to the lamp tube clamping plate 701, and then fixedly connected to the housing 702 through the lamp tube clamping plate 701. The position of this connection is not adjustable, which causes certain drawbacks.

[0068] Figure 8 This is a schematic diagram of a lamp mounting structure according to an embodiment of the present invention.

[0069] Please refer to Figure 8In the ultraviolet lamp for semiconductor process provided by the present invention, the lamp tube is still fixedly connected to the lamp tube pressure plate 801. The lamp tube pressure plate 801 is installed and connected to the housing 803 through the moving plate 802. The bolt mounting holes 804 on the moving plate 802 and the housing 803 are elongated waist-shaped holes. The installation position of the lamp tube can be adjusted by adjusting the installation position of the bolts 805.

[0070] Figure 9 This is a schematic diagram of the device structure of the elongated slot in the lamp tube mounting structure according to an embodiment of the present invention. It can be referenced in conjunction with other relevant documents. Figure 9 It is easy to understand that, since the elongated bolt mounting hole 804 has adjustable space, the installation position of the lamp tube can be adjusted by adjusting the position of the bolt 805 in the bolt mounting hole 804.

[0071] Even better, dimensional scales or locking positions can be added to the mounting and fixing points of the movable plate 802 and the housing, so as to facilitate precise adjustment of the lamp installation position and meet the adjustment needs of different process conditions.

[0072] It is readily understood that in the ultraviolet lamp for semiconductor processes provided by the present invention, the adjustment of the lamp tube installation position and the adjustment of the arc-shaped reflector angle can be performed separately or in combination. By generating different light path combinations, a diverse light path layout can be achieved, and adjustments can be made according to actual process needs to achieve better process results.

[0073] The following section explains how the ultraviolet lamp provided by this invention can be adjusted to address two common wafer thin film problems encountered in the process.

[0074] In one embodiment, which is also a common situation in actual operation, the film layer in the middle of the wafer is thinner after the process is completed, and there is a significant difference in film thickness between the middle and the edges, resulting in poor film uniformity and exceeding the standard range required by the product. Please refer to... Figure 10A , 10B .

[0075] Figure 10A , 10B This is a schematic diagram illustrating the adjustment direction of the lamp tube and the reflector when the middle film layer of the wafer is thinner and the periphery is thicker, according to an embodiment of the present invention.

[0076] In this case, the ultraviolet lamp provided by the present invention can travel along... Figure 10A Adjust the installation position of the lamp tube by pointing to the arrow at the center position, that is, shift both lamp tubes outwards. This will move the strong light area of ​​the lamp tube to the edge, thereby reducing the light intensity in the central area and making the light intensity inside and outside the irradiated space more uniform.

[0077] At the same time, the angle of the reflector can be adjusted so that the curved reflectors on both sides are adjusted outward in the opposite direction as shown by the arrow, thereby reducing the light intensity in the central area and making the light intensity inside and outside more uniform.

[0078] Figure 11A This is a schematic diagram of the film thickness distribution when the wafer thin film thickness is eccentric. Figure 11B , 11C This is illustrated according to an embodiment of the present invention when... Figure 8 The diagram shows the adjustment direction of the lamp tube and the reflector in the given situation.

[0079] Can be combined Figures 11A-11C In another embodiment, when the wafer exhibits... Figure 11A The eccentric situation is shown. In this case, the ultraviolet lamp provided by the present invention, on the one hand, as... Figure 11B As shown, the installation position of the left lamp tube can be adjusted, and the lamp tube can be shifted inward, so that the strong light area of ​​the lamp tube moves inward, thereby adjusting the light intensity distribution to be centrally symmetrical.

[0080] At the same time, the reflectors can be adjusted individually or simultaneously, such as Figure 11C As shown, both reflectors at the eccentric end can be adjusted inwards, that is,... Figure 11C The curved mirror on the left side is rotated inward by a certain angle, which shifts the illumination zone inward, thereby allowing the light intensity variation to be distributed concentrically and improving the problem of eccentricity in the wafer thin film thickness.

[0081] Although the methods described above are illustrated and depicted as a series of actions for the sake of simplicity, it should be understood and appreciated that these methods are not limited by the order of the actions, as some actions may occur in a different order and / or concurrently with other actions from the illustrations and descriptions herein or not illustrated and described herein but which may be understood by those skilled in the art, according to one or more embodiments.

[0082] The prior description of this disclosure is provided to enable any person skilled in the art to make or use this disclosure. Various modifications to this disclosure will be apparent to those skilled in the art, and the general principles defined herein may be applied to other variations without departing from the spirit or scope of this disclosure. Therefore, this disclosure is not intended to be limited to the examples and designs described herein, but should be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An ultraviolet lamp for semiconductor process, comprising: a lamp tube and a reflector extending along the length direction of the lamp tube, the reflector being an arc panel with U-shaped cross section and surrounding the lamp tube, the U-shaped top of the reflector passing through a connecting part to be connected with a machine shell through the connecting part, the U-shaped lower end of the reflector being provided with a fixing part, the fixing part being provided with a positioning bolt, the lower end side of the reflector being pushed by the positioning bolt to rotate around the top of the reflector to adjust the installation angle of the reflector, wherein the top of the connecting part is used for fixed connection with the machine shell, the reflector passes through the middle part of the connecting part, and the bottom of the connecting part is provided with an elastic part for cooperation with the rotation of the reflector.

2. The ultraviolet lamp of claim 1, wherein The bottom of the connecting part is further provided with a movable pressing block, one end of the movable pressing block being hinged to the middle part of the connecting part, and the other end being used for fixedly supporting the upper part of the U-shaped side edge of the reflector, and the elastic part includes a reset spring sheet arranged at the hinged position of the movable pressing block.

3. The ultraviolet lamp of claim 2, wherein The upper part of each of the two side edges of the reflector is provided with the movable pressing block and the reset spring sheet.

4. The ultraviolet lamp of claim 1, wherein The two U-shaped lower ends of the reflector are each provided with a fixing part including the positioning bolt, the positioning bolt pushing the end side of the reflector from the outside to the inside of the U-shaped reflector, and the two positioning bolts are cooperatively adjusted to realize the angular rotation of the reflector.

5. The ultraviolet lamp of claim 4, wherein The fixing part is provided with a supporting spring block for supporting the movement of the end of the reflector, and the width of the supporting spring block covers the movement distance of the end of the reflector.

6. The ultraviolet lamp of claim 1, wherein The lamp tube is fixedly connected to a lamp tube pressing sheet, the lamp tube pressing sheet being mounted and connected with the machine shell through a moving plate, wherein the moving plate and the bolt mounting hole on the machine shell are long waist-shaped holes for realizing the adjustment of the installation position of the lamp tube.

7. A semiconductor process equipment comprising the ultraviolet lamp for semiconductor process according to any one of claims 1-6.

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