Vehicles and Reactors

Abstract

This application relates to the fields of semiconductor and photovoltaic technology, and more particularly to a carrier and reactor that address the low heating efficiency of products in reactors of related art. The carrier comprises a main body and at least one boat structure. The main body includes a first conductive portion that can be energized and generate heat. The boat structure can carry products and can be placed on the main body. The boat structure includes a second conductive portion that can be energized and generate heat when the boat structure is placed on the main body. Because the carrier is very close to the product, utilizing the heat generated by the carrier to heat the product can improve the heating efficiency of the product.

Description

Technical Field

[0001] The present application relates to the fields of semiconductor and photovoltaic technology, and in particular to a carrier and a reactor. Background Art

[0002] Some manufacturing processes for semiconductor and photovoltaic products require specific reactors and high temperatures. Currently, the most common heating method is resistance heating, with linear resistance wire being the most widely used.

[0003] At present, the resistance wire is usually set on the inner wall of the reactor, and the resistance wire is far away from the product. In addition, in order to prevent the process environment from corroding the resistance wire, a protective layer is usually set on the outer surface of the resistance wire to armor the resistance wire, which reduces the heat transfer efficiency of the resistance wire, thereby resulting in low heating efficiency of the product in the reactor. Summary of the Invention

[0004] In view of this, embodiments of the present application provide a carrier and a reactor, which solve the problem of low heating efficiency of products in the reactor of the related art.

[0005] In a first aspect, an embodiment of the present application provides a carrier capable of being placed in a reactor, the reactor comprising a cavity and at least two electrodes, the cavity having a chamber, the chamber being configured to accommodate a product, at least two electrodes extending into the chamber; wherein the carrier comprises: a main body, comprising at least one first conductive portion extending linearly, the first conductive portion comprising a first sub-conductive portion and a second sub-conductive portion, the first end of the first sub-conductive portion being electrically connected to the first end of the second sub-conductive portion, wherein, when the carrier is located in the chamber, the second end of the first sub-conductive portion is used to connect to one of the electrodes, and the second end of the second sub-conductive portion is used to connect to the other electrode; at least one boat structure capable of being placed in the main body and configured to carry the product, the boat structure comprising at least one second conductive portion, wherein, when the boat structure is placed in the main body, the first end of the second conductive portion is electrically connected to the first sub-conductive portion, and the second end of the second conductive portion is electrically connected to the second sub-conductive portion; wherein, when both the electrode connected to the first sub-conductive portion and the electrode connected to the second sub-conductive portion are energized, the first conductive portion is energized and generates heat, and the second conductive portion is energized and generates heat.

[0006] In some embodiments, the boat structure includes: a first end plate, the bottom of the first end plate has at least one first load-bearing portion, and the first load-bearing portion is in contact with the main body; a second end plate, arranged opposite to the first end plate, the bottom of the second end plate has at least one second load-bearing portion, and the second load-bearing portion is in contact with the main body; a plurality of slot rods, connecting the first end plate and the second end plate, and configured to carry products; wherein, when the number of the first load-bearing portions is multiple, the first end of the second conductive portion and the second end of the second conductive portion are respectively located at different first load-bearing portions; or, when the number of the second load-bearing portions is multiple, the first end of the second conductive portion and the second end of the second conductive portion are respectively located at different second load-bearing portions; or, the first end of the second conductive portion and the second end of the second conductive portion are respectively located at the first load-bearing portion and the second load-bearing portion; wherein the middle part of the second conductive portion is distributed with the first end plate, the second end plate and the slot rod, and the middle part of the second conductive portion is located between the first end of the second conductive portion and the second end of the second conductive portion.

[0007] In some embodiments, the number of the slot rods is four, the number of the first load-bearing parts is multiple, and the first end of the second conductive part and the second end of the second conductive part are respectively located at different first load-bearing parts; wherein, the middle part of the second conductive part passes through the first slot rod, the second end plate, the second slot rod, the first end plate, the third slot rod, the second end plate, and the fourth slot rod from one of the first load-bearing parts in sequence to another first load-bearing part.

[0008] In some embodiments, the first end plate includes a first central area and a first edge area surrounding the first central area, and the middle portion of the second conductive portion is bent and extended in the first central area and the first edge area; and / or, the second end plate includes a second central area and a second edge area surrounding the second central area, wherein the middle portion of the second conductive portion located between the first slot rod and the second slot rod is bent and extended in the second central area and the second edge area, and / or, the middle portion of the second conductive portion located between the third slot rod and the fourth slot rod is bent and extended in the second central area and the second edge area.

[0009] In some embodiments, the material of the slot rod includes a first conductive material, which forms the middle part of the second conductive part distributed on the slot rod; the middle part of the second conductive part distributed on the first end plate includes a heating wire and / or a conductive coating; the middle part of the second conductive part distributed on the second end plate includes a heating wire and / or a conductive coating.

[0010] In some embodiments, the main body extends along a first direction; the first sub-conductive part extends along the first direction, the first end of the first sub-conductive part is located at the first end of the main body, and the second end of the first sub-conductive part is located at the second end of the main body; the second sub-conductive part extends along the first direction, the first end of the second sub-conductive part is located at the first end of the main body, and the second end of the second sub-conductive part is located at the second end of the main body.

[0011] In some embodiments, the main body includes: a first constituent part, extending along the first direction, the first sub-conductive part is arranged in the first constituent part, and the first end of the first sub-conductive part is located at the first end of the first constituent part; a second constituent part, extending along the first direction, and arranged opposite to the first constituent part, the second sub-conductive part is arranged in the second constituent part, and the first end of the second sub-conductive part is located at the first end of the second constituent part; a third constituent part, connecting the first end of the first constituent part and the first end of the second constituent part; a conductive connecting part, arranged in the third constituent part, the conductive connecting part electrically connecting the first end of the first sub-conductive part and the first end of the second sub-conductive part; at least one insulating part, arranged between the second end of the first constituent part and the second end of the second constituent part, isolating the second end of the first sub-conductive part from the second end of the second sub-conductive part.

[0012] In some embodiments, the material of the first constituent part includes a second conductive material, and the second conductive material forms the first sub-conductive part; the material of the second constituent part includes a third conductive material, and the third conductive material forms the second sub-conductive part; the material of the third constituent part includes a fourth conductive material, and the fourth conductive material forms the conductive connecting part.

[0013] In some embodiments, the carrier further includes: an insulating layer disposed on the outer surface of the main body, and the insulating layer is made of an insulating material.

[0014] In some embodiments, the electrode includes an electrode rod; the second end of the first component has a first groove; the second end of the second component has a second groove; when the carrier is located in the chamber, the electrode rod of one of the electrodes is inserted into the first groove so that the electrode rod of the one electrode is electrically connected to the first component, and the electrode rod of the other electrode is inserted into the second groove so that the electrode rod of the other electrode is electrically connected to the second component.

[0015] There are multiple boat structures, and the second conductive parts of the multiple boat structures are electrically connected to the first conductive part in a parallel manner.

[0016] In a second aspect, an embodiment of the present application provides a reactor, comprising: a cavity having a chamber configured to accommodate a product; at least two electrodes extending into the chamber; the carrier described in the first aspect, configured to carry a boat structure, and when the carrier is located in the chamber, the carrier is electrically connected to the electrodes so that the carrier is energized and generates heat, and the boat structure is configured to carry the product.

[0017] In some embodiments, the electrode includes an elastic structure, and when the carrier enters the chamber, the electrode and the carrier are electrically connected from being separated.

[0018] The carrier provided in the embodiment of the present application can carry the product and place it in the reactor, and the carrier can be powered and generate heat. Since the carrier is very close to the product, heating the product using the heat generated by the carrier can improve the heating efficiency of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The above and other purposes, features, and advantages of the present application will become more apparent through a more detailed description of the embodiments of the present application in conjunction with the accompanying drawings. The accompanying drawings are intended to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the drawings, the same reference numerals generally represent the same components or steps.

[0020] Figure 1 Shown is a schematic structural diagram of a reactor, a carrier, and a carrier drive assembly provided in one embodiment of the present application.

[0021] Figure 2 Shown is a structural schematic diagram of a carrier provided in one embodiment of the present application.

[0022] Figure 3 Shown Figure 2 An enlarged partial view of area A of the vehicle is shown.

[0023] Figure 4 Shown is a structural schematic diagram of a boat structure provided in one embodiment of the present application.

[0024] Figure 5 Shown is a schematic structural diagram of the main body provided in one embodiment of the present application.

[0025] Figure 6 Shown Figure 5 A partial enlarged view of the subject shown in area B.

[0026] Figure 7 Shown is a schematic structural diagram of an electrode provided in one embodiment of the present application.

[0027] Figure 8Shown is a schematic structural diagram of a cavity and a furnace door provided in one embodiment of the present application.

[0028] Reference numerals:

[0029] 1. Reactor; 10. Carrier; 100. Main body; 101. First end of the main body; 102. Second end of the main body; 110. First conductive portion; 1110. First sub-conductive portion; 1111. First end of the first sub-conductive portion; 1112. Second end of the first sub-conductive portion; 1001. First component; 1011. First end of the first component; 1021. Second end of the first component; 1031. First groove; 1120. Second sub-conductive portion; 1121. First end of the second sub-conductive portion; 1122. Second end of the second sub-conductive portion; 1002. Second component; 1012. First end of the second component; 1022. Second end of the second component; 1032. Second groove; 1003. Third component; 1004. Conductive connecting portion; 1005. Insulating part; 1010, insulating layer; 200, boat structure; 210, second conductive part; 2110, first end of the second conductive part; 2120, second end of the second conductive part; 2130, middle part of the second conductive part; 201, first end plate; 2010, first carried part; 2011, first central area; 2012, first edge area; 202, second end plate; 2021, second central area; 2022, second edge area; 203, slot rod; 2031, first slot rod; 2032, second slot rod; 2033, third slot rod; 2034, fourth slot rod; 20, cavity; 2001, chamber; 30, electrode; 310, electrode rod; 320, elastic structure; 40, furnace door; 50, carrying block, 2, product; 3, carrier drive assembly. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0031] Common heating methods used in the industry include resistance heating, induction heating, radiation heating, and laser heating. Among them, induction heating equipment is more expensive, has strict requirements for the working environment, has certain requirements for the electromagnetic properties of the material, and requires high equipment operation and maintenance. Radiative heating has directional energy transmission and poor heating uniformity. Laser heating equipment is also more expensive and complex, requiring high operator skills. Furthermore, the laser processing process requires maintaining a stable optical path, which places high demands on the environment.

[0032] Currently, the most common heating method is resistance heating, with linear resistance wire being the most widely used. Currently, resistance wire is typically installed on the inner wall of the reactor, far from the product. Furthermore, to prevent corrosion from the process environment, the outer surface of the resistance wire is often armored. This reduces the resistance wire's heat transfer efficiency, resulting in low heating efficiency for the product in the reactor.

[0033] In addition, armoring the resistance wire makes the manufacturing process of the resistance wire complicated, the manufacturing and maintenance costs are high, the armoring process is difficult, and the length and extension direction of the resistance wire are limited by the shape and size of the armor structure.

[0034] In addition, the resistance wire may be affected by electromagnetic interference and the limitations of conductive materials, resulting in high energy consumption. The resistance wire is easily affected by temperature, dust, etc. and may be thermally deformed or damaged, resulting in poor heating stability and poor heating uniformity.

[0035] In response to the above problems, the present application provides a carrier and a reactor. The specific structures of the carrier and the reactor are described in detail below in conjunction with the drawings and specific embodiments.

[0036] Figure 1 Shown is a schematic structural diagram of a reactor, a carrier, and a carrier drive assembly provided in one embodiment of the present application. Figure 2 Shown is a structural schematic diagram of a carrier provided in one embodiment of the present application. Figure 3 Shown Figure 2 The following is a partial enlarged view of the vehicle in area A. Figures 1 to 3 As shown, the carrier 10 can be placed in a reaction furnace 1 , which includes a chamber 20 and at least two electrodes 30 . The chamber 20 has a chamber 2001 , which is configured to accommodate a product 2 , and the at least two electrodes 30 extend into the chamber 2001 .

[0037] The carrier 10 includes a main body 100 and at least one boat structure 200. The main body 100 includes at least one first conductive portion 110 extending linearly. The first conductive portion 110 includes a first sub-conductive portion 1110 and a second sub-conductive portion 1120. The first end 1111 of the first sub-conductive portion is electrically connected to the first end 1121 of the second sub-conductive portion. When the carrier 10 is located in the chamber 2001, the second end 1112 of the first sub-conductive portion is used to connect to one electrode 30, and the second end 1122 of the second sub-conductive portion is used to connect to another electrode 30. The boat structure 200 can be placed on the main body 100 and is configured to carry the product 2. The boat structure 200 includes at least one second conductive portion 210. When the boat structure 200 is placed on the main body 100, the first end 2110 of the second conductive portion is electrically connected to the first sub-conductive portion 1110. When both the electrode 30 connected to the first sub-conductive part 1110 and the electrode 30 connected to the second sub-conductive part 1120 are energized, the first conductive part 110 is energized and generates heat, and the second conductive part 210 is energized and generates heat.

[0038] Exemplarily, the reactor 1 includes two electrodes 30, which are disposed within and connected to the chamber 2001. One electrode 30 is connected to the positive pole of an external power source via a wire, and the other electrode 30 is connected to the negative pole of the external power source via a wire. When the carrier 10 is located in the chamber 2001, the second end 1112 of the first sub-conductive portion is connected to one electrode 30, and the second end 1122 of the second sub-conductive portion is connected to the other electrode 30, so that a closed current loop is formed between the one electrode 30, the first sub-conductive portion 1110, the second sub-conductive portion 1120, and the other electrode 30, thereby energizing the first conductive portion 110. The material of the main body 100 is a material that generates heat when energized, such as silicon carbide or graphite, so that the main body 100 generates heat when energized.

[0039] Exemplarily, the second conductive part 210 can be formed by a resistance wire, which is wound on the boat structure 200, the first end of the resistance wire is electrically connected to the first sub-conductive part 1110, and the second end of the resistance wire is electrically connected to the second sub-conductive part 1120, so that the second conductive part 210 is energized and generates heat.

[0040] Product 2 can be silicon wafers, wafers, solar panels, glass substrates and other products.

[0041] The carrier 10 provided in this embodiment can carry the product 2 and place it in the reactor 1, and the carrier 10 can be powered and generate heat. Since the carrier 10 is very close to the product 2, using the heat generated by the carrier 10 to heat the product 2 can improve the heating efficiency of the product 2.

[0042] In addition, the main body 100 and the boat structure 200 are relatively independently provided, and the main body 100 and the boat structure 200 are heated independently of each other, so the manufacturing process of the carrier 10 is simple, and the manufacturing and maintenance costs are low.

[0043] In some embodiments, the boat structure 200 includes a first end plate 201, a second end plate 202, and a plurality of slotted rods 203. The bottom of the first end plate 201 has at least one first supported portion 2010, which contacts the main body 100. The second end plate 202 is disposed opposite the first end plate 201 and has at least one second supported portion (not shown) on its bottom, which contacts the main body 100. The plurality of slotted rods 203 connect the first end plate 201 and the second end plate 202 and are configured to support the product 2.

[0044] Exemplarily, when there are multiple first carried portions 2010, the first end 2110 of the second conductive portion and the second end 2120 of the second conductive portion are respectively located on different first carried portions 2010. The first carried portions 2010 are all located above the first sub-conductive portion 1110, and the second carried portions are all located above the second sub-conductive portion 1120. The second carried portions and the second sub-conductive portion 1120 are insulated from each other. Exemplarily, the surface of the second carried portion that contacts the main body 100 does not have a conductive coating. Exemplarily, the surface of the first carried portion 2010 that contacts the main body 100 is provided with a conductive coating, and the material of the conductive coating can be silicon carbide or graphite.

[0045] Exemplarily, when there are multiple second supported portions, the first end 2110 of the second conductive portion and the second end 2120 of the second conductive portion are respectively located on different second supported portions. The first supported portion 2010 is located above the first sub-conductive portion 1110, and the second supported portion is located above the second sub-conductive portion 1120. The first supported portion 2010 and the first sub-conductive portion 1110 are insulated from each other. Exemplarily, the surface of the first supported portion 2010 in contact with the main body 100 does not have a conductive coating. Exemplarily, the surface of the second supported portion in contact with the main body 100 is provided with a conductive coating, and the material of the conductive coating can be silicon carbide or graphite.

[0046] Exemplarily, the first end 2110 of the second conductive portion and the second end 2120 of the second conductive portion are located at the first carried portion 2010 and the second carried portion, respectively. One first carried portion 2010 and one second carried portion are both located above the first sub-conductive portion 1110, and the remaining first carried portions 2010 and second carried portions are located above the second sub-conductive portion 1120 and are insulated from the second sub-conductive portion 1120. Exemplarily, the surfaces of the first carried portion 2010 and the second carried portion located above the second sub-conductive portion 1120 that contact the main body 100 do not have a conductive coating. Exemplarily, the surfaces of the first carried portion 2010 and the second carried portion located above the first sub-conductive portion 1110 that contact the main body 100 are provided with a conductive coating, and the material of the conductive coating may be silicon carbide or graphite.

[0047] Among them, the middle part 2130 of the second conductive part is distributed with the first end plate 201, the second end plate 202 and the slot rod 203, and the middle part 2130 of the second conductive part is located between the first end 2110 of the second conductive part and the second end 2120 of the second conductive part, so as to increase the distribution area of ​​the second conductive part 210 on the boat structure 200 as much as possible, so as to make the second conductive part 210 energized and generate heat in the largest possible area of ​​the boat structure 200, so as to improve the uniformity of heat and heating efficiency near the boat structure 200, thereby improving the uniformity and heating efficiency of heating of the product 2.

[0048] In some embodiments, the number of slot rods 203 is four, the number of first supported parts 2010 is multiple, and the first end 2110 of the second conductive part and the second end 2120 of the second conductive part are respectively located at different first supported parts 2010. The middle part 2130 of the second conductive part passes through the first slot rod 2031, the second end plate 202, the second slot rod 2032, the first end plate 201, the third slot rod 2033, the second end plate 202, the fourth slot rod 2034 from a first supported part 2010 in sequence to another first supported part 2010, so as to further increase the distribution area of ​​the second conductive part 210 on the boat structure 200, so as to further improve the uniformity of heat and heating efficiency near the boat structure 200, thereby further improving the uniformity of heating and heating efficiency of the product 2. For example, as Figure 3 and Figure 4 As shown, the bottom of the first end plate 201 has two first supported portions 2010, and the first end 2110 of the second conductive portion and the second end 2120 of the second conductive portion are respectively located at the two first supported portions 2010. For example, Figure 4 The arrow direction is the direction of current flowing in the second conductive part 210 when the second conductive part 210 is energized.

[0049] In some embodiments, the first end plate 201 includes a first central region 2011 and a first edge region 2012 surrounding the first central region 2011 , and the middle portion 2130 of the second conductive portion bends and extends between the first central region 2011 and the first edge region 2012 .

[0050] In some embodiments, the second end plate 202 includes a second central area 2021 and a second edge area 2022 surrounding the second central area 2021 , and the middle portion 2130 of the second conductive portion located between the first slot bar 2031 and the second slot bar 2032 bends and extends between the second central area 2021 and the second edge area 2022 .

[0051] In some embodiments, the middle portion 2130 of the second conductive portion located between the third slot bar 2033 and the fourth slot bar 2034 bends and extends in the second central region 2021 and the second edge region 2022 .

[0052] Through the above arrangement, the distribution area of ​​the second conductive portion 210 on the boat structure 200 can be further increased to improve the heat uniformity and heating efficiency near the boat structure 200, thereby improving the heating uniformity and heating efficiency of the product 2.

[0053] In some embodiments, the material of the slot rod 203 includes a first conductive material, and the first conductive material forms a middle portion 2130 of the second conductive portion distributed on the slot rod 203. The middle portion 2130 of the second conductive portion distributed on the first end plate 201 includes a heating wire or a conductive coating, or a heating wire and a conductive coating. The middle portion 2130 of the second conductive portion distributed on the second end plate 202 includes a heating wire, or a conductive coating, or a heating wire and a wire coating. The above-mentioned arrangement can further increase the distribution area of ​​the second conductive portion 210 on the boat structure 200, thereby improving the uniformity and heating efficiency of the heat near the boat structure 200, thereby improving the uniformity and heating efficiency of the heating of the product 2.

[0054] Exemplarily, the first conductive material may be silicon carbide or graphite. The central portion 2130 of the second conductive portion, located on the first end plate 201, includes a heating filament. Exemplarily, the heating filament may extend in any shape on the first end plate 201. The central portion 2130 of the second conductive portion, located on the second end plate 202, includes two sections of heating filament. Each of the two sections of heating filament may extend in any shape on the second end plate 202. Different heating filament layouts can be configured to meet actual process requirements, providing enhanced adaptability.

[0055] The material of the boat 200 may be quartz, which has the characteristics of high melting point, good thermal conductivity, corrosion resistance, and small thermal deformation, thereby ensuring the stability and uniformity of the boat 200 heating the product 2.

[0056] In some embodiments, the main body 100 extends along a first direction, and the first sub-conductive portion 1110 extends along the first direction X1. The first end 1111 of the first sub-conductive portion is located at the first end 101 of the main body, and the second end 1112 of the first sub-conductive portion is located at the second end 102 of the main body. The second sub-conductive portion 1120 extends along the first direction X1. The first end 1121 of the second sub-conductive portion is located at the first end 101 of the main body, and the second end 1122 of the second sub-conductive portion is located at the second end 102 of the main body. The first conductive portion 110 extends in the same direction as the main body 100 and is sufficiently long to increase the heated area of ​​the main body 100. Furthermore, the main body 100 can simultaneously energize the second conductive portions 210 of multiple boat structures 200 to increase the production capacity of the reactor 1.

[0057] In some embodiments, the main body 100 includes: a first component 1001, a second component 1002, a third component 1003, a conductive connecting portion 1004, and at least one insulating portion 1005. The first component 1001 extends along a first direction X1, with a first sub-conductive portion 1110 disposed on the first component 1001, and a first end 1111 of the first sub-conductive portion located at the first end 1011 of the first component. The second component 1002 extends along the first direction X1, with the second component 1002 disposed opposite the first component 1001. The second sub-conductive portion 1120 is disposed on the second component 1002, and a first end 1121 of the second sub-conductive portion located at the first end 1012 of the second component. The third component 1003 connects the first end 1011 of the first component and the first end 1012 of the second component. Conductive connecting portion 1004 is disposed on third component 1003 and electrically connects first end 1111 of the first sub-conductive portion to first end 1121 of the second sub-conductive portion. Insulating portion 1005 is disposed between second end 1021 of the first component and second end 1022 of the second component, isolating second end 1112 of the first sub-conductive portion from second end 1122 of the second sub-conductive portion. Main body 100 has a simple structure and a large heating area. Figure 1 The arrows shown indicate the direction of current flow in the main body 100 when the main body 100 is energized.

[0058] In some embodiments, the material of the first component 1001 includes a second conductive material, which forms the first sub-conductive portion 1110. The material of the second component 1002 includes a third conductive material, which forms the second sub-conductive portion 1120. The material of the third component 1003 includes a fourth conductive material, which forms the conductive connecting portion 1004. The first component 1001 and the first sub-conductive portion 1110 are integrally formed, the second component 1002 and the second sub-conductive portion 1120 are integrally formed, and the third component 1003 and the conductive connecting portion 1004 are integrally formed, resulting in a simple structure.

[0059] For example, the second conductive material may be silicon carbide or graphite, the third conductive material may be silicon carbide or graphite, and the fourth conductive material may be silicon carbide or graphite. For example, to further reduce the difficulty of manufacturing the main body 100, the second conductive material, the third conductive material, and the fourth conductive material are all the same conductive material, and may all be made of silicon carbide.

[0060] The main body 100 made of silicon carbide has the characteristics of high melting point, good thermal conductivity, small thermal deformation, corrosion resistance, etc., which can improve the stability and uniformity of heating of the main body 100.

[0061] In some embodiments, as Figure 5 As shown, the carrier 10 further includes an insulating layer 1010 . The insulating layer 1010 is disposed on the outer surface of the main body 100 . The insulating layer 1010 is made of an insulating material.

[0062] Exemplarily, the insulating layer 1010 is provided on a portion of the outer surface of the main body 100 other than the portion in contact with the first end 2110 of the second conductive portion and the second end 2120 of the second conductive portion.

[0063] For example, when the main body 100 does not need to supply electricity to other structures supported by it, the entire outer surface of the main body 100 is provided with an insulating layer 1010 to prevent the main body 100 from forming an electrical connection with other structures.

[0064] Different insulating layers 1010 are provided to meet different production process requirements.

[0065] The insulating material may be gallium oxide, zinc oxide or other insulating materials.

[0066] In some embodiments, as Figure 6 and Figure 7 As shown, the electrode 30 includes an electrode rod 310. The second end 1021 of the first component has a first groove 1031, and the second end 1022 of the second component has a second groove 1032. When the carrier 10 is located in the chamber 2001, the electrode rod 310 of one electrode 30 is inserted into the first groove 1031 to electrically connect the electrode rod 310 of the one electrode 30 to the first component 1001. The electrode rod 310 of the other electrode 30 is inserted into the second groove 1032 to electrically connect the electrode rod 310 of the other electrode 30 to the second component 1002. The electrode rod 310 is detachably connected to the carrier 10, and the connection method is simple and reliable.

[0067] In some embodiments, there are multiple boat structures 200 , and the second conductive portions 210 of the multiple boat structures 200 are electrically connected to the first conductive portion 110 in parallel.

[0068] For example, a plurality of boat structures 200 can be spaced apart along the extending direction of the main body 100 .

[0069] Figure 8 The figure shows a schematic diagram of the structure of the cavity and the furnace door provided in one embodiment of the present application. Figure 1 and Figure 8 As shown, the reactor 1 includes the carrier 10, chamber 20, and at least two electrodes 30 mentioned in the above embodiments. The chamber 20 has a chamber 2001 configured to accommodate a product 2. The at least two electrodes 30 extend into the chamber 2001. The carrier 10 is configured to support a boat structure 200. When the carrier 10 is located in the chamber 2001, the carrier 10 is electrically connected to the electrodes 30, so that the carrier 10 is energized and generates heat. The boat structure 200 is configured to support the product 2.

[0070] Exemplarily, the reaction furnace 1 has a furnace opening 2002, which faces downward and is connected to the chamber 2001. The reaction furnace 1 also includes a furnace door 40, which is hinged to the cavity 20 so that the furnace door 40 can rotate relative to the cavity 20 around the rotation axis to achieve closing or opening of the furnace opening 2002 by the furnace door 40.

[0071] A carrier driving assembly 3 is disposed below the carrier 10 . The carrier driving assembly 3 can carry the carrier 10 and place the carrier 10 into or out of the chamber 2001 .

[0072] Exemplarily, the carrier drive assembly 3 may include a linear module or a robotic arm, which is connected to the main body 100 via the linear module or the robotic arm, and drives the main body 100 to move toward or away from the chamber 2001, so that the carrier 10 enters or moves away from the chamber 2001.

[0073] The carrier drive assembly 3 can also have a lifting assembly and a conveyor belt streamline connected to the lifting assembly. The conveyor belt streamline is arranged above the lifting assembly and can carry the carrier 10. The lifting assembly moves in the direction of approaching or moving away from the chamber 2001 to drive the conveyor belt streamline and the carrier 10 carried by the conveyor belt streamline into or away from the chamber 2001.

[0074] Exemplarily, the reactor 1 further includes a plurality of supporting blocks 50, which are respectively connected to two opposite inner walls of the chamber 2001. When the carrier 10 enters the chamber 2001, the supporting blocks 50 carry the main body 100 so that the carrier 10 and the product 2 carried by the carrier 10 are placed in the chamber 2001.

[0075] In some embodiments, the electrode 30 includes an elastic structure 320 , and when the carrier 10 enters the chamber 2001 , the electrode 30 and the carrier 10 are electrically connected from being separated.

[0076] The use of elastic electrodes 30 can avoid stress concentration when the electrodes 30 contact the first component 1001 and the second component 1002, thereby preventing damage to the electrodes 30, the first component 1001, or the second component 1002, and extending the service life of the electrodes 30 and the main body 100. Furthermore, even when the main body 100 undergoes minor thermal deformation, it can maintain good contact with the elastic electrodes 30, preventing disconnection or poor contact. This maintains the stability of the main body 100's power supply, thereby ensuring the stability and continuity of the heating of the main body 100, and ensuring that the main body 100 can stably and reliably be powered and generate heat.

[0077] Since the reactor 1 includes the carrier 10 , the reactor 1 includes all the technical features and technical effects of the carrier 10 , which will not be described in detail here.

[0078] In the various embodiments of the present disclosure, unless otherwise specified, the connection may be in the form of bolts and nuts, screws, snaps, magnets, etc. For some connections, if there is no particular requirement for a detachable connection, a non-detachable connection may be achieved by welding, bonding, etc.

[0079] The basic principles of the present application have been described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, and effects mentioned in this application are merely illustrative and not restrictive, and it should not be assumed that these advantages, strengths, and effects are required of each embodiment of this application. In addition, the specific details disclosed above are merely illustrative and facilitating understanding, and are not restrictive. The above details do not limit this application to necessarily being implemented using the above specific details.

[0080] The block diagrams of the devices, devices, equipment, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As will be appreciated by those skilled in the art, these devices, devices, equipment, and systems can be connected, arranged, or configured in any manner. Words such as "include," "comprise," "have," and the like are open-ended words, meaning "including but not limited to," and can be used interchangeably therewith. The words "or" and "and" used herein refer to the words "and / or" and can be used interchangeably therewith, unless the context clearly indicates otherwise. The word "such as" used herein refers to the phrase "such as but not limited to," and can be used interchangeably therewith.

[0081] It should also be noted that in the apparatus, device, and method of the present application, each component or each step can be decomposed and / or recombined, and such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0082] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0083] The above description has been provided for the purpose of illustration and description. Furthermore, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although a number of example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A vehicle, characterized in that: capable of being placed in a reaction furnace, the reaction furnace comprising a chamber and at least two electrodes, the chamber having a cavity configured to accommodate a product, at least two of the electrodes extending into the cavity; Wherein, the carrier includes: a main body, comprising at least one first conductive portion extending linearly, the first conductive portion comprising a first sub-conductive portion and a second sub-conductive portion, the first end of the first sub-conductive portion being electrically connected to the first end of the second sub-conductive portion, wherein, when the carrier is located in the chamber, the second end of the first sub-conductive portion is used to connect to one of the electrodes, and the second end of the second sub-conductive portion is used to connect to the other electrode; at least one boat structure, capable of being placed on the main body and configured to carry the product, the boat structure comprising at least one second conductive portion, wherein when the boat structure is placed on the main body, a first end of the second conductive portion is electrically connected to the first sub-conductive portion, and a second end of the second conductive portion is electrically connected to the second sub-conductive portion; Wherein, when the electrode connected to the first sub-conductive part and the electrode connected to the second sub-conductive part are both energized, the first conductive part is energized and generates heat, and the second conductive part is energized and generates heat; The boat structure comprises: a first end plate, wherein the bottom of the first end plate has at least one first supported portion, and the first supported portion is in contact with the main body; a second end plate, disposed opposite to the first end plate, wherein the bottom of the second end plate has at least one second supported portion, and the second supported portion contacts the main body; a plurality of slot bars connecting the first end plate and the second end plate, configured to carry products; Wherein, when there are multiple first supported portions, the first end of the second conductive portion and the second end of the second conductive portion are respectively located on different first supported portions; or, when there are multiple second supported portions, the first end of the second conductive portion and the second end of the second conductive portion are respectively located on different second supported portions; or, the first end of the second conductive portion and the second end of the second conductive portion are respectively located on the first supported portion and the second supported portion; The first end plate, the second end plate and the slot bar are distributed in the middle of the second conductive part, and the middle of the second conductive part is located between the first end of the second conductive part and the second end of the second conductive part.

2. The carrier according to claim 1, characterized in that There are four slot bars, there are multiple first supported portions, and the first end of the second conductive portion and the second end of the second conductive portion are respectively located at different first supported portions; The middle portion of the second conductive portion passes through the first slot rod, the second end plate, the second slot rod, the first end plate, the third slot rod, the second end plate, and the fourth slot rod from one of the first supported portions to the other first supported portion.

3. The carrier according to claim 2, characterized in that: The first end plate includes a first central area and a first edge area surrounding the first central area, and the middle portion of the second conductive portion bends and extends between the first central area and the first edge area; and / or, The second end plate includes a second central area and a second edge area surrounding the second central area, wherein the middle portion of the second conductive portion located between the first slot rod and the second slot rod is bent and extended in the second central area and the second edge area, and / or the middle portion of the second conductive portion located between the third slot rod and the fourth slot rod is bent and extended in the second central area and the second edge area.

4. The carrier according to claim 1, characterized in that The material of the slot bar includes a first conductive material, and the first conductive material is formed in the middle of the second conductive portion of the slot bar; The middle portion of the second conductive portion distributed on the first end plate includes a heating wire and / or a conductive coating; The middle portion of the second conductive portion distributed on the second end plate includes a heating wire and / or a conductive coating.

5. The carrier according to any one of claims 1 to 4, characterized in that: The main body extends along a first direction; The first sub-conductive portion extends along the first direction, a first end of the first sub-conductive portion is located at the first end of the main body, and a second end of the first sub-conductive portion is located at the second end of the main body; The second sub-conductive portion extends along the first direction, a first end of the second sub-conductive portion is located at the first end of the main body, and a second end of the second sub-conductive portion is located at the second end of the main body.

6. The carrier according to claim 5, characterized in that The subject includes: a first component extending along the first direction, the first sub-conductive portion being provided on the first component, and a first end of the first sub-conductive portion being located at a first end of the first component; a second component extending along the first direction and arranged opposite to the first component, the second sub-conductive portion being arranged in the second component, and the first end of the second sub-conductive portion being located at the first end of the second component; a third component connecting the first end of the first component and the first end of the second component; a conductive connecting portion, provided on the third component, the conductive connecting portion electrically connecting the first end of the first sub-conductive portion and the first end of the second sub-conductive portion; At least one insulating portion is provided between the second end of the first component and the second end of the second component to isolate the second end of the first sub-conductive portion from the second end of the second sub-conductive portion.

7. The carrier according to claim 6, characterized in that The material of the first component includes a second conductive material, and the second conductive material forms the first sub-conductive portion; The material of the second component includes a third conductive material, and the third conductive material forms the second sub-conductive portion; The material of the third component includes a fourth conductive material, and the fourth conductive material forms the conductive connection portion.

8. The carrier according to claim 7, characterized in that: Also includes: The insulating layer is arranged on the outer surface of the main body, and the material of the insulating layer includes insulating material.

9. The carrier according to claim 6, characterized in that: The electrode comprises an electrode rod; The second end of the first component has a first groove; The second end of the second component has a second groove; When the carrier is located in the chamber, the electrode rod of one of the electrodes is inserted into the first groove so that the electrode rod of the one electrode is electrically connected to the first component, and the electrode rod of the other electrode is inserted into the second groove so that the electrode rod of the other electrode is electrically connected to the second component.

10. The carrier according to any one of claims 1 to 4, characterized in that: There are multiple boat structures, and the second conductive parts of the multiple boat structures are electrically connected to the first conductive part in a parallel manner.

11. A reactor, characterized in that: include: a cavity having a chamber configured to hold a product; at least two electrodes extending into the chamber; The carrier according to any one of claims 1 to 10 is configured as a carrying boat structure, and when the carrier is located in the chamber, the carrier is electrically connected to the electrode so that the carrier is energized and generates heat, and the boat structure is configured to carry the product.

12. The reactor according to claim 11, characterized in that The electrode comprises: The elastic structure is such that when the carrier enters the chamber, the electrode and the carrier are electrically connected from being separated.

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