Wafer box transmission mechanism, storage device and transmission method

Abstract

The present invention discloses a wafer box transmission mechanism, a storage device and a transmission method. The wafer box transmission mechanism includes a first track, a second track and a transfer assembly. The first track includes a first track segment and a second track segment extending in a first direction and arranged at intervals; the second track includes a third track segment and a fourth track segment which are spaced and parallel to the first track in the second direction and arranged at intervals in the first direction; in the second direction, the spacing between the first track segment and the third track segment is smaller than the spacing between the second track segment and the fourth track segment; the transfer assembly includes a transfer track which can be moved between a first position, a second position and a third position in the second direction, in the first position, the first track segment is connected to the second track segment through the transfer track; in the second position, the transfer track is connected to the third track segment; in the third position, the transfer track is connected to the fourth track segment. The present invention can enable the overhead travelling crane to correctly pick up and place the wafer box when the storage library part corresponds to the curved track segment.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor processing technology, and in particular to a wafer box transmission mechanism, a storage device and a transmission method. Background Art

[0002] The automatic material handling system (AMHS) usually includes a crane transmission device and a storage device, wherein the storage device includes a wafer box transmission mechanism and a storage bin. When the wafer box enters the storage bin, the crane on the crane transmission device transports the wafer box to the receiving position of the wafer box transmission mechanism, and the carrier of the wafer box transmission mechanism then transports the wafer box to the pick-and-place position in the storage bin, and then the wafer box is transported to the target position inside the storage bin by the transport robot in the storage bin. On the contrary, when the wafer box is out of the storage bin, the transport robot transports the wafer box to be out of the storage bin to the pick-and-place position, and then the carrier of the wafer box transmission mechanism transports the wafer box to the receiving position of the crane transmission device, and finally the crane on the crane transmission device takes away the wafer box at the receiving position.

[0003] However, due to the spatial location of the factory, the relative positions of the overhead crane transmission equipment and the storage warehouse are difficult to arrange reasonably, making it difficult to transfer wafer boxes between the overhead crane transmission equipment and the storage warehouse through the wafer box transmission mechanism, which in turn makes it difficult for the wafer boxes to enter and exit the warehouse. Summary of the invention

[0004] In order to overcome the above-mentioned shortcomings, the purpose of the present invention is to provide a wafer box transmission mechanism, storage device and transmission method, which can enable the overhead crane to correctly pick up and place the wafer box when the storage library portion corresponds to the curved track section of the overhead crane track, thereby reducing the difficulty of wafer box entry and exit.

[0005] A wafer box transmission mechanism according to an embodiment of the present invention includes:

[0006] A first track, the first track comprising a first track segment and a second track segment extending in a first direction and arranged at intervals;

[0007] The second track includes a third track segment and a fourth track segment which are spaced apart and parallel to the first track in the second direction and spaced apart in the first direction, one end of the first track segment and the third track segment is used to dock with the overhead traveling vehicle of the overhead traveling vehicle transmission device, and one end of the second track segment and the fourth track segment is used to dock with the storage library; in the second direction, the spacing between the first track segment and the third track segment is smaller than the spacing between the second track segment and the fourth track segment;

[0008] A transfer component is arranged between the first track segment / the third track segment and the second track segment / the fourth track segment, and the transfer component includes a transfer track, and the transfer track can move between a first position, a second position and a third position along a second direction; in the first position, the first track segment is connected to the second track segment through the transfer track; in the second position, the transfer track is connected to the third track segment; in the third position, the transfer track is connected to the fourth track segment.

[0009] An embodiment of the present invention further provides a wafer box storage device, comprising:

[0010] The wafer box transport mechanism mentioned above;

[0011] The storage library is located on one side of the wafer box transmission mechanism in the first direction. The storage library includes a robot operation area and two wafer box storage areas both extending along the first direction. The two wafer box storage areas are arranged at intervals on both sides of the robot operation area in the second direction. The second track segment and the fourth track segment are connected to the two wafer box storage areas one by one.

[0012] The embodiment of the present invention further provides a wafer box transmission method, which is applied to the above-mentioned wafer box storage device. The wafer box transmission method includes a warehousing method, and the warehousing method includes:

[0013] Setting one of the second track segment and the fourth track segment as a storage track;

[0014] Determine the unloaded state of the first track segment and the third track segment, select the unloaded first track segment and / or the third track segment as a receiving track, and the receiving track receives the wafer box to be stored;

[0015] The transfer track moves to a first position or a second position to dock with the receiving track;

[0016] Wafer boxes to be stored are transported to the transfer track;

[0017] The transfer track moves to the first position or the third position where it docks with the storage track;

[0018] The wafer boxes to be stored are transported to the wafer box storage area via the storage track, and the wafer boxes to be stored are stored in the storage warehouse.

[0019] Furthermore, the wafer box transfer method also includes a warehouse-out method, and the warehouse-out method includes:

[0020] Setting the other of the second track segment and the fourth track segment as a departure track;

[0021] The transfer track moves to the first position or the third position where it docks with the outbound track;

[0022] Transport the wafer boxes to be taken from the outbound track to the transfer track;

[0023] Determine the empty state of the first track segment and the third track segment, select the empty first track segment and / or the third track segment as the pick-up track, and move the transfer track to the first position or the second position connected to the outbound track;

[0024] The wafer box to be taken is transported to the taking track, and the wafer box to be taken is taken by the overhead crane.

[0025] Furthermore, the first track, the third track segment and the fourth track segment are all provided with carriers for transporting wafer boxes. Each carrier is connected and driven by a power source via wires. After the carrier transports the wafer box to the transfer track, the carrier leaves the transfer track and returns.

[0026] Specifically, after the wafer box to be taken is transported to the taking track and taken by the overhead crane, the following steps are also included: the empty outbound track forms a receiving track, and the receiving track receives the wafer box to be stored.

[0027] Furthermore, when the overhead crane transport device has more than two overhead cranes, the transport status of the wafer box on the first track segment and the third track segment includes one of the following situations:

[0028] (1) When two adjacent overhead cranes of the overhead crane transfer equipment need to take a wafer box, the wafer box is transported out of the warehouse on both the first track section and the third track section;

[0029] (2) When two adjacent overhead cranes of the overhead crane transfer equipment need to store wafer boxes, the wafer boxes are transferred to the warehouse on both the first track section and the third track section;

[0030] (3) When one of the two adjacent overhead cranes of the overhead crane transfer equipment needs to pick up a wafer box to be taken out and the other needs to store a wafer box to be stored, the wafer box is transported out of the warehouse on one of the first track segment and the third track segment, and the wafer box is transported into the warehouse on the other of the first track segment and the third track segment.

[0031] Further, the wafer box transmission mechanism also includes at least one of a first storage position and a second storage position; wherein the first storage position is arranged between the second track segment and the fourth track segment; the second storage position is arranged on the side of the third track segment away from the first track segment; and when the transfer track moves to the second position, the transfer track docks with the first storage position; when the transfer track moves to the third position, the transfer track docks with the second storage position.

[0032] Furthermore, after the wafer box to be stored is transported to the transfer track, the following steps are also included:

[0033] The transfer track moves to the second position or the third position;

[0034] The wafer box to be stored is transported to the first storage location or the second storage location;

[0035] When the wafer box to be stored in the first storage position or the second storage position needs to be stored in the storage library, the transfer track moves to the second position or the third position, and the wafer box to be stored is transported to the transfer track.

[0036] Furthermore, after the step of transporting the wafer box to be taken from the outbound track to the transfer track, the following steps are also included:

[0037] The transfer track moves to the second position or the third position;

[0038] The wafer box to be taken is transported to the first storage position or the second storage position;

[0039] When the wafer box to be taken from the first storage position or the second storage position needs to be taken by the overhead crane, the transfer track moves to the second position or the third position, and the wafer box to be taken is transported to the transfer track. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Figure 1 It is a structural schematic diagram of the overhead travelling crane transmission device according to an embodiment of the present invention;

[0041] Figure 2 A schematic diagram of the position of a wafer box transmission mechanism according to an embodiment of the present invention, which is located between an overhead crane transmission device and a storage library;

[0042] Figure 3 A schematic diagram of a wafer box storage device according to an embodiment of the present invention;

[0043] Figure 4 This is a schematic diagram of the structure of a transfer track for transporting a wafer box according to an embodiment of the present invention;

[0044] Figure 5 It is a schematic structural diagram of a transfer component according to an embodiment of the present invention. DETAILED DESCRIPTION

[0045] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the protection scope of the present invention.

[0046] In the prior art, see the attached Figure 1As shown, the overhead crane transmission device 1 includes an overhead crane track 11 and at least one overhead crane 12 running along the overhead crane track 11, wherein the overhead crane track 11 includes a straight track section 111 and a curved track section 112. At present, when a factory arranges an automatic material handling system, the storage library is usually arranged near the straight track section 111 of the overhead crane track 11, so that the wafer box transmission mechanism is directly connected to the straight track section 111 of the overhead crane track 11. When the overhead crane 12 needs to store or access a wafer box, the overhead crane 12 determines the real-time position of the overhead crane 12 by scanning the QR code on the straight track section 111. The overhead crane 12 can be accurately positioned at the position where the wafer box needs to be placed and taken on the straight track section 111. At this time, the clamping claw of the overhead crane 12 is directly opposite to the grasping position of the wafer box, and the overhead crane 12 can correctly grasp the wafer box. When a factory needs to increase the storage capacity of wafer boxes, it will consider adding a storage library. Sometimes, due to the factory space layout, the storage library has to be planned near the curved track section 112 of the overhead crane track 11. At this time, the wafer box transmission mechanism will inevitably be partially connected to the curved track section 112 of the overhead crane track 11. When the overhead crane 12 stays on the curved track section 112, it cannot accurately scan the code for positioning, and the clamping claws of the overhead crane 12 are not aligned with the grabbing position of the wafer box on the wafer box transmission mechanism. Therefore, the overhead crane 12 cannot store and take the wafer box on the wafer box transmission mechanism. In other words, the overhead crane cannot take and store the wafer box through the wafer box transmission mechanism and the storage library, resulting in the factory being unable to add a storage library.

[0047] Based on this, see Appendix Figure 2-Figure 3 As shown, a wafer box transport mechanism 2 according to an embodiment of the present invention comprises a first track, a second track, and a transfer assembly 21, wherein the first track comprises a first track segment 221 and a second track segment 222 extending in a first direction and arranged at intervals. The second track comprises a third track segment 231 and a fourth track segment 232 which are spaced and parallel to the first track in the second direction and spaced and arranged in the first direction. One end of the first track segment 221 and the third track segment 231 is used to dock with the overhead crane 12 of the overhead crane transport device 1, and one end of the second track segment 222 and the fourth track segment 232 is used to dock with the storage library 3. In the second direction, the spacing between the first track segment 221 and the third track segment 231 is smaller than the spacing between the second track segment 222 and the fourth track segment 232. The transfer assembly 21 is arranged between the first track segment 221 / the third track segment 231 and the second track segment 222 / the fourth track segment 232, and the transfer assembly 21 comprises a transfer track 211, and the transfer track 211 can move between a first position, a second position, and a third position along the second direction. In the first position, the first track segment 221 is connected to the second track segment 222 via the transfer track 211 ; in the second position, the transfer track 211 is connected to the third track segment 231 ; in the third position, the transfer track 211 is connected to the fourth track segment 232 .

[0048] In the wafer box transport mechanism 2, the first track segment 221 and the second track segment 222 of the first track are set to extend along the first direction, and the third track segment 231 and the fourth track segment 232 of the second track are set to be spaced in the first direction, and the spacing between the first track segment 221 and the third track segment 231 in the second direction is limited to be smaller than the spacing between the second track segment 222 and the fourth track segment 232, so that the third track segment 231 can be staggered with the fourth track segment 232 in the second direction. This arrangement allows a relatively large spacing to be left between the second track segment 222 and the fourth track segment 232 that are docked with the storage library 3, so as to ensure the normal flow of the wafer box 4 between the wafer box transport mechanism 2 and the storage library 3; and the layout between the first track segment 221 and the third track segment 231 that are docked with the overhead crane 12 of the overhead crane transport device 1 is more compact, and then when the fourth track segment 232 is set to extend in the direction of the curved track segment 112 of the overhead crane track 11 due to the factory space layout restrictions, the third track segment 232 231 can avoid the curved track section 112 of the overhead crane track 11 and dock with the straight track section 111 of the overhead crane track 11. The overhead crane 12 can accurately position when storing or taking the wafer box 4 at the straight track section 111. The clamping claws of the overhead crane 12 are directly opposite to the grasping position of the wafer box 4. The overhead crane can correctly grasp the wafer box 4, avoiding the track on the wafer box transmission mechanism 2 from docking with the curved track section 112 of the overhead crane track 11, causing the overhead crane 12 to stay on the curved track section 112 and resulting in the overhead crane 12 being unable to correctly take and place the wafer box 4.

[0049] In the transfer component 21, the movement of the transfer track 211 between the first position, the second position, and the third position realizes arbitrary connection between the first track segment 221 / the third track segment 231 and the second track segment 222 / the fourth track segment 232, that is, four wafer box transmission paths can be formed in the wafer box transmission mechanism 2. This arrangement not only ensures the transmission of the wafer box 4 between the overhead crane transmission equipment 1 and the storage library 3, but also enables the transmission path of the wafer box 4 to be flexibly selected according to actual working conditions.

[0050] In addition, due to the structural design of the storage library 3, there is inevitably a certain distance between the first track and the second track (that is, the distance between the second track segment 222 and the fourth track segment 232), and in the second direction, the third track segment 231 is offset in the direction close to the first track segment 221, occupying the distance that originally exists between the first track and the second track. Therefore, the offset setting of the third track segment 231 does not occupy additional external space of the wafer box transfer mechanism 2.

[0051] It should be noted that the first direction and the second direction are both horizontal directions, and the first direction and the second direction are perpendicular to each other.

[0052] In some embodiments, see Appendix Figure 4As shown, the wafer box transport mechanism 2 also includes a carrier 24 , which is used to carry the wafer box 4 on the transfer track 211 and the first track segment 221 / the second track segment 222 / the third track segment 231 / the fourth track segment 232 connected to the transfer track 211 .

[0053] Specifically, the first track, the third track section 231 and the fourth track section 232 are all provided with a carrier 24, and each carrier 24 is connected and driven by a power source through a wire. When the carrier 24 moves, the wire will be dragged along, and the wire is usually protected by a drag chain. Therefore, when the carrier 24 is powered by the wire and the power source, the carrier 24 can only move in a straight line.

[0054] For the first track, since the first track segment 221 and the second track segment 222 are located on the same straight line in the first direction, when the transfer track 211 moves to the first position, the carrier 24 can move on the first track segment 221 and the second track segment 222 via the transfer track 211, that is, the first track segment 221 and the second track segment 222 can share a carrier 24 to transport the wafer box 4.

[0055] As for the second track, since the third track segment 231 and the fourth track segment 232 are not in the same straight line direction, a carrier 24 is required on each of the third track segment 231 and the fourth track segment 232. When the transfer track 211 is connected to the third track segment 231 at the second position, the carrier 24 on the third track segment 231 can reciprocate between the third track segment 231 and the transfer track 211; when the transfer track 211 is connected to the fourth track segment 232 at the third position, the carrier 24 on the fourth track segment 232 can reciprocate between the fourth track segment 232 and the transfer track 211.

[0056] Taking the example of transporting the wafer box 4 from the third track segment 231 to the fourth track segment 232, the transfer track 211 moves to the second position and connects to the third track segment 231, and the carrier 24 on the third track segment 231 immediately drives the wafer box 4 to enter the transfer track 211, and then the carrier 24 places the wafer box 4 on the transfer track 211 and returns to the first track segment 221. At this time, the wafer box 4 is placed on the transfer track 211; then the transfer track 211 moves to the third track segment 231. The wafer box 4 is placed at the third position and connected to the fourth track segment 232. The carrier 24 on the fourth track segment 232 enters the transfer track 211 along the fourth track segment 232 and supports the wafer box 4 on the transfer track 211. Then the carrier 24 on the fourth track segment 232 drives the wafer box 4 to enter the fourth track segment 232. During this process, the wafer box 4 is carried by the carrier 24 on the third track segment 231, the transfer track 211, and the carrier 24 on the fourth track segment 232 in turn.

[0057] Of course, only one carrier 24 may be arranged on the second track, and in this case, the carrier 24 is powered and driven by a battery or by charging. For example, if the carrier 24 is located on the third track segment 231 in the initial state, when the transfer track 211 is connected to the third track segment 231 at the second position, the carrier 24 can move along the third track segment 231 to the transfer track 211; then the transfer track 211 carries the carrier 24 to move to the third position, and when the transfer track 211 is connected to the fourth track segment 232 at the third position, the carrier 24 can move along the transfer track 211 to the fourth track segment 232. In this process, the wafer box 4 is always carried by the carrier 24. Obviously, the power supply method of the wire and the power supply can supply power to the carrier 24 in real time, thereby ensuring that the carrier 24 can work at any time, and avoiding the blockage of the wafer box 4 during transportation due to the battery being exhausted or the inability of the carrier 24 to continue working during charging.

[0058] In actual working conditions, it is possible that the wafer box 4 on the first track segment 221 or the third track segment 231 cannot be taken in time due to the busyness of the overhead crane transmission device 1, and it is also possible that the wafer box 4 on the second track segment 222 or the fourth track segment 232 cannot be stored in time due to the busyness of the handling robot in the storage library 3, which may cause the wafer box 4 to be stranded on the first track segment 221, the third track segment 231, the second track segment 222 or the fourth track segment 232, affecting the normal operation of the wafer box transmission mechanism 2. Therefore, in some embodiments, the wafer box transmission mechanism 2 further includes at least one of a first storage position 25 and a second storage position 26; wherein the first storage position 25 is arranged between the second track segment 222 and the fourth track segment 232; the second storage position 26 is arranged on the side of the third track segment 231 away from the first track segment 221; and when the transfer track 211 moves to the second position, the transfer track 211 docks with the first storage position 25; when the transfer track 211 moves to the third position, the transfer track 211 docks with the second storage position 26.

[0059] When the overhead crane transport device 1 is busy, if the first track segment 221 and the third track segment 231 are both full of wafer boxes 4, and the second track segment 222 or the fourth track segment 232 is still transporting wafer boxes 4 toward the overhead crane transport device 1, the transfer track 211 can adaptively store the wafer boxes 4 on the second track segment 222 or the fourth track segment 232 in the first storage position 25 and / or the second storage position 26 to relieve the taking pressure of the overhead crane transport device 1. When the handling robot in the storage library 3 is busy, the second track segment 222 or the fourth track segment 232 is full of wafer boxes 4, and the overhead crane transport device 1 is still transporting wafer boxes 4 toward the first track segment 221 or the third track segment 231, the transfer track 211 can adaptively store the wafer boxes 4 on the first track segment 221 or the third track segment 231 in the first storage position 25 and / or the second storage position 26 to relieve the storage pressure of the handling robot.

[0060] In addition, since there is a gap between the second track segment 222 and the fourth track segment 232, the first storage position 25 is directly set at the gap between the second track segment 222 and the fourth track segment 232. The third track segment 231 is staggered with the fourth track segment 232, so there is space for setting the second storage position 26 on the side of the third track segment 231 away from the first track segment 221. This arrangement allows the first storage position 25 and the second storage position 26 to be arranged using the space occupied by the wafer box transmission mechanism 2 itself, and no additional space will be occupied.

[0061] In some embodiments, see Appendix Figure 5 As shown, the transfer assembly 21 further includes a linear module 212, which has a fixed pair and a movable pair that can move relative to the fixed pair, and the movable pair is connected to the transfer track 211. In this way, the linear module 212 can drive the transfer track 211 to move between the first position, the second position and the third position. It can be understood that the linear module 212 can adopt any device that can perform linear driving, such as a nut screw mechanism or a linear motor.

[0062] The embodiment of the present invention further provides a wafer box storage device, comprising a wafer box transmission mechanism 2 and a storage library 3, wherein the wafer box transmission mechanism 2 is the wafer box transmission mechanism according to the embodiment of the present invention. The storage library 3 is located on one side of the wafer box transmission mechanism 2 in the first direction, and the storage library 3 comprises a robot operation area 31 and two wafer box storage areas 32 both extending along the first direction, and the two wafer box storage areas 32 are arranged at intervals on both sides of the robot operation area 31 in the second direction, and the second track segment 222 and the fourth track segment 232 are connected to the two wafer box storage areas 32 in a one-to-one correspondence.

[0063] Specifically, two docking windows corresponding to the wafer box storage areas 32 are opened on one side of the storage bin 3 along the first direction, and the two docking windows are respectively located on the side of the two wafer box storage areas 32 facing the wafer box transmission mechanism 2, so as to connect the wafer box storage areas 32 with the corresponding second track segment 222 / fourth track segment 232. A transport robot is provided in the robot operation area 31, and the transport robot can transport a wafer box at any wafer box storage area 32 to the docking window.

[0064] The robot operation area 31 and the two wafer box storage areas 32 of the storage 3 are extended along the first direction, and the storage 3 is located on one side of the wafer box transmission mechanism 2 in the first direction, which can save the factory's space in the second direction and avoid the wafer box storage device from interfering with other devices in the second direction. The storage 3 and the wafer box transmission mechanism 2 cooperate to realize the storage and outbound actions of the wafer box 4, providing convenience for the storage or retrieval of the wafer box 4.

[0065] In addition, due to the setting of the robot operation area 31, there must be a distance between the two wafer box storage areas 32, and thus there will also be a distance between the two docking windows, which inevitably causes a distance between the second track segment 222 and the fourth track segment 232. Therefore, when the wafer box transport mechanism 2 is arranged, the third track segment 231 can use the existing distance between the second track segment 222 and the fourth track segment 232, and thus no additional space will be occupied.

[0066] The embodiment of the present invention further provides a wafer box transmission method, which is applied to the above-mentioned wafer box storage device. The wafer box transmission method includes a warehousing method, and the warehousing method includes:

[0067] Setting one of the second track segment 222 and the fourth track segment 232 as a storage track;

[0068] The unloaded state of the first track segment 221 and the third track segment 231 is determined, and the unloaded first track segment 221 and / or the third track segment 231 are selected as the receiving track, and the receiving track receives the wafer box 4 to be stored. In this step, it is determined whether the track is unloaded, and a detection sensor can be set on the track to detect the presence or absence of the wafer box 4. The detection sensor can be a through-beam photoelectric sensor, and the detection direction of the through-beam photoelectric sensor is inclined to the vertical direction and inclined to the first direction. The detection sensor can also be a travel switch. This embodiment does not limit the type of the detection sensor.

[0069] The transfer track 211 moves to a first position or a second position to dock with the receiving track;

[0070] The wafer box 4 to be stored is transported to the transfer track 211;

[0071] The transfer track 211 moves to the first position or the third position where it docks with the storage track;

[0072] The wafer boxes 4 to be stored are transported to the wafer box storage area 32 via the storage track, and the wafer boxes 4 to be stored are stored in the storage warehouse 3 .

[0073] The detection sensor obtains the state signal of the wafer box 4 on the track, and then sends the state signal to the controller, and the controller executes the wafer box transmission method to control the transmission of the wafer box 4. After the controller executes the storage method, it can enable the overhead crane 12 to correctly place the wafer box 4 when the storage bin 3 part corresponds to the curved track section 112 of the overhead crane track 11, avoiding the situation that the track on the wafer box transmission mechanism 2 is docked with the curved track section 112 of the overhead crane track 11, causing the overhead crane 12 to stay on the curved track section 112 and causing the overhead crane 12 to fail to correctly place the wafer box 4;

[0074] At the same time, both the first track segment 221 and the third track segment 231 can be used by the overhead crane 12 to place the wafer box 4, which can avoid the situation where the overhead crane 12 can only place the wafer box 4 on the first track segment 221. After the first track segment 221 is occupied by the wafer box 4, the overhead crane 12 on the overhead crane track 11 that needs to store the wafer box cannot place the wafer box 4, thereby causing the overhead crane transmission device 1 to be blocked;

[0075] In addition, one of the second track segment 222 and the fourth track segment 232 is a storage track, and the wafer box 4 to be stored is always transferred to one of the two wafer box storage areas 32. The handling robot in the storage warehouse 3 can fixedly take and store the wafer box 4 from the wafer box storage area 32 on one side of the robot operation area 31, rather than taking and storing the wafer box 4 from the wafer box storage areas 32 on both sides of the robot operation area 31. Therefore, confusion in the handling robot taking the wafer box 4 can be avoided, reducing the difficulty of controlling the handling robot.

[0076] In some embodiments, the wafer box 4 transport method further includes a warehouse-out method, and the warehouse-out method includes:

[0077] Setting the other of the second track segment 222 and the fourth track segment 232 as a departure track;

[0078] The transfer track 211 moves to the first position or the third position docking with the outbound track;

[0079] The wafer box 4 to be taken is transported to the transfer track 211 via the outbound track;

[0080] Determine the empty state of the first track segment 221 and the third track segment 231, select the empty first track segment 221 and / or the third track segment 231 as the picking track, and move the transfer track 211 to the first position or the second position connected to the picking track;

[0081] The wafer box 4 to be taken is transported to the taking track, and the wafer box 4 to be taken is taken by the overhead crane 12 .

[0082] After the controller executes the out-of-warehouse method, when the storage bin 3 part corresponds to the curved track section 112 of the overhead crane track 11, the overhead crane 12 can correctly take the wafer box 4, thereby avoiding the situation where the track on the wafer box transport mechanism 2 is docked with the curved track section 112 of the overhead crane track 11, causing the overhead crane 12 to stay on the curved track section 112 and causing the overhead crane 12 to fail to correctly take the wafer box 4;

[0083] At the same time, both the first track segment 221 and the third track segment 231 can be used by the overhead crane 12 to pick up the wafer box 4, which can avoid the situation where the overhead crane 12 can only pick up the wafer box 4 on the first track segment 221. After the first track segment 221 is empty, the wafer box 4 cannot be delivered to the first track segment 221 in time, causing the overhead crane 12 that needs to pick up the wafer box 4 to wait and causing the overhead crane transmission equipment 1 to be blocked.

[0084] In addition, the other of the second track segment 222 and the fourth track segment 232 is a warehouse-out track, and the manipulator in the storage 3 can fixedly place the wafer box 4 to be taken from the wafer box storage area 32 on one side of the manipulator operation area 31, which can avoid the manipulator from placing the wafer box 4 in a disorderly manner and reduce the difficulty of manipulator control. Exemplarily, the second track segment 222 is used as the warehouse-in track, and correspondingly, the fourth track segment 232 is the warehouse-out track. At this time, the wafer box 4 can only be transported into the warehouse on the second track segment 222, and the wafer box 4 can only be transported out of the warehouse on the fourth track segment 232.

[0085] When the overhead crane transport device 1 takes the wafer box 4, the wafer box 4 is transported out of the warehouse. The specific process is as follows:

[0086] 1. The carrier 24 on the fourth track segment 232 moves toward the storage 3 to the docking window where the fourth track segment 232 and the storage 3 are connected, and receives the wafer box 4 transported to the docking window by the transport robot; then the carrier 24 on the fourth track segment 232 moves with the wafer box 4 toward the transfer track 211; then the transfer track 211 moves to the third position;

[0087] 2. The carrier 24 on the fourth track segment 232 carries the wafer box 4 onto the transfer track 211 and places the wafer box 4 onto the transfer track 211. The carrier 24 then returns to the fourth track segment 232. At this time, if the overhead crane 12 of the overhead crane transmission device 1 is parked at a grabbing position close to the first track segment 221 where the overhead crane 12 can grab the wafer box 4, the transfer track 211 moves to the first position, and the carrier 24 on the first track enters the transfer track 211 and supports the wafer box 4 on the transfer track 211. Then, the carrier 24 The transport vehicle 24 carries the wafer box 4 back to the first track segment 221 and moves to the wafer box grabbing position of the first track segment 221; if the overhead crane 12 of the overhead crane transmission device 1 stops at the wafer box grabbing position close to the third track segment 231, the transfer track 211 moves to the second position, and the transport vehicle 24 on the third track segment 231 enters the transfer track 211 and supports the wafer box 4 on the transfer track 211; then the transport vehicle 24 carries the wafer box 4 back to the third track segment 231 and moves to the wafer box grabbing position of the third track segment 231;

[0088] 3. Then the gripper on the overhead crane 12 can grab the wafer box 4 on the first track segment 221 or the third track segment 231 .

[0089] When the overhead crane transport device 1 needs to store the wafer box 4, the wafer box 4 is transported into the warehouse. The specific process is as follows:

[0090] 1. The overhead crane 12 of the overhead crane transmission device 1 can be parked at any position close to the wafer box grabbing position of the first track segment 221 or the third track segment 231. Then, the gripper on the overhead crane 12 places the wafer box 4 at the wafer box grabbing position of the first track segment 221 or the third track segment 231.

[0091] 2. If the wafer box 4 is placed at the wafer box grabbing position of the first track segment 221, the carrier 24 on the first track supports the wafer box 4 at the wafer box grabbing position and moves toward the transfer track 211. At the same time, the transfer track 211 moves to the first position, and the carrier 24 on the first track then carries the wafer box 4 and moves along the first track segment 221 and the transfer track 211 to the second track segment 222;

[0092] If the wafer box 4 is placed on the wafer box grabbing position of the third track segment 231, the carrier 24 on the third track segment 231 supports the wafer box 4 on the wafer box grabbing position and moves in the direction of the transfer track 211. At the same time, the transfer track 211 moves to the second position; the carrier 24 on the third track segment 231 carries the wafer box 4 into the transfer track 211 and places the wafer box 4 on the transfer track 211, and then the carrier 24 returns to the third track segment 231; then the transfer track 211 carries the wafer box 4 and moves to the first position, the carrier 24 on the first track enters the transfer track 211 and supports the wafer box 4, and then the carrier 24 on the first track carries the wafer box 4 into the second track segment 222;

[0093] 3. The carrier 24 carries the wafer box 4 and moves along the second track segment 222 to the docking window where the second track segment 222 is connected to the storage library 3 , and the transport robot then transports the wafer box 4 to the wafer box storage area 32 .

[0094] Since the first track segment 221 and the third track segment 231 can participate in both the wafer box inbound transmission and the wafer box outbound transmission, in some embodiments, when the overhead crane transmission device 1 has more than two overhead cranes 12, the transmission state of the wafer box 4 on the first track segment 221 and the third track segment 231 includes one of the following situations:

[0095] (1) When the two adjacent overhead cranes 12 of the overhead crane transport device 1 need to take the wafer box 4, the wafer box 4 is transported out of the warehouse on the first track segment 221 and the third track segment 231. That is, the wafer box 4 on the outbound track can be moved to the wafer box grabbing position of the first track segment 221 and the third track segment 231 respectively through the transfer track 211 under the transportation of the carrier 24;

[0096] (2) When the two adjacent overhead cranes 12 of the overhead crane transport device 1 need to store the wafer box 4, the wafer box 4 is transported to the warehouse on the first track segment 221 and the third track segment 231. That is, the two overhead cranes 12 can place the wafer box 4 on the wafer box grabbing positions of the first track segment 221 and the third track segment 231 respectively, and then the wafer box 4 on the first track segment 221 and the third track segment 231 is moved to the warehouse track via the transfer track 211 under the transportation of the carrier 24.

[0097] (3) When one of the two adjacent overhead cranes 12 of the overhead crane transport device 1 needs to take the wafer box 4 and the other needs to store the wafer box 4, the wafer box 4 is transported out of the warehouse on one of the first track segment 221 and the third track segment 231, and the wafer box 4 is transported into the warehouse on the other of the first track segment 221 and the third track segment 231. Exemplarily, when the first track segment 221 is transported out of the warehouse and the third track segment 231 is transported into the warehouse, the overhead crane 12 that needs to take the wafer box 4 stops near the first track segment 221, and the overhead crane 12 that needs to store the wafer box 4 stops at the third track segment 231. At this time, the wafer box 4 on the outbound track can be transported to the first track segment 221 via the transfer track 211 for the overhead crane 12 to take it; and the wafer box 4 placed on the third track segment 231 by the overhead crane 12 can be transported to the inbound track via the transfer track 211.

[0098] In some embodiments, after the wafer box 4 to be taken is transported to the taking track and the wafer box 4 to be taken is taken by the overhead crane 12, the following steps are also included: the empty outbound track forms a receiving track, and the receiving track receives the wafer box 4 to be stored.

[0099] When the first track segment 221 / the third track segment 231 in the outbound transport process is a pick-up track, after the wafer box 4 on the pick-up track is picked up by the overhead crane 12, the pick-up track becomes empty. At this time, the empty pick-up track forms a receiving track that can be used for inbound transport. The overhead crane 12 can place the wafer box 4 to be stored on the receiving track, and the wafer box 4 to be stored can be transported into the warehouse through the carrier 24 on the first track segment 221 / the third track segment 231. Exemplarily, when the first track segment 221 is used for outbound transport, after the wafer box 4 on the first track segment 221 is taken away by the overhead crane 12, the carrier 24 on the first track segment 221 is in an empty state. At this time, if there is an overhead crane 12 that needs to store the wafer box 4, the first track segment 221 can be adaptively adjusted to inbound transport, so that the overhead crane 12 places the wafer box 4 to be stored on the first track segment 221, and moves toward the storage warehouse 3 under the transportation of the carrier 24 on the first track. In this process, since the unloaded picking track forms a receiving track for storage transfer, the transfer track 211 does not need to move a second time when docking the picking track and the receiving track, saving the time for transferring the wafer box 4 and avoiding blockage of the overhead crane transfer equipment 1.

[0100] The above implementation modes are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with this technology to understand the content of the present invention and implement it, and they cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims

1. A wafer box transmission mechanism, characterized in that: include: A first track, the first track comprising a first track segment and a second track segment extending in a first direction and arranged at intervals; A second track, the second track comprising a third track segment and a fourth track segment spaced in parallel with the first track in the second direction and spaced in the first direction, one end of the first track segment and the third track segment being used to dock with the overhead traveling vehicle of an overhead traveling vehicle transmission device, and one end of the second track segment and the fourth track segment being used to dock with a storage library; In the second direction, a distance between the first track segment and the third track segment is smaller than a distance between the second track segment and the fourth track segment; A transfer component is arranged between the first track segment / the third track segment and the second track segment / the fourth track segment, and the transfer component includes a transfer track, and the transfer track can move between a first position, a second position and a third position along the second direction; in the first position, the first track segment is connected to the second track segment through the transfer track; in the second position, the transfer track is connected to the third track segment; in the third position, the transfer track is connected to the fourth track segment.

2. A wafer box storage device, characterized in that: include: The wafer box transport mechanism according to claim 1; A storage warehouse, wherein the storage warehouse is located on one side of the wafer box transmission mechanism in the first direction, the storage warehouse comprises a robot operation area and two wafer box storage areas both extending along the first direction, the two wafer box storage areas are arranged at intervals on both sides of the robot operation area in the second direction, and the second track segment and the fourth track segment are connected to the two wafer box storage areas one by one.

3. A wafer box transmission method, applied to the wafer box storage device according to claim 2, characterized in that: The wafer box transmission method includes a warehousing method, and the warehousing method includes: Setting one of the second track segment and the fourth track segment as a storage track; Determine the unloaded state of the first track segment and the third track segment, and select the unloaded first track segment and / or the third track segment as a receiving track for receiving the wafer box to be stored; The transfer track moves to the first position or the second position docking with the receiving track; The wafer boxes to be stored are transported to the transfer track; The transfer track moves to the first position or the third position where it docks with the storage track; The wafer boxes to be stored are transported to the wafer box storage area via the storage track, and the wafer boxes to be stored are stored in the storage warehouse.

4. The wafer box transmission method according to claim 3, characterized in that: It also includes a method for releasing the goods from the warehouse, and the method for releasing the goods from the warehouse includes: Setting the other of the second track segment and the fourth track segment as a departure track; The transfer track moves to the first position or the third position where it docks with the outbound track; Transporting the wafer box to be taken to the transfer track via the outbound track; Determine the empty state of the first track segment and the third track segment, select the empty first track segment and / or the third track segment as the picking track, and move the transfer track to the first position or the second position connected to the picking track; The wafer box to be taken is transported to the taking track, and the wafer box to be taken is taken by the overhead crane.

5. The wafer box transmission method according to claim 4, characterized in that: The first track, the third track segment and the fourth track segment are all provided with a carrier for transporting the wafer box. Each of the carriers is connected to and driven by a power source via electric wires. After the carrier transports the wafer box to the transfer track, the carrier leaves the transfer track and returns.

6. A wafer box transmission method according to claim 4, characterized in that: After the step of transporting the wafer box to be taken to the taking track and the wafer box to be taken by the overhead crane, the method further includes the following steps: the unloaded taking track forms the receiving track, and the receiving track receives the wafer box to be stored.

7. A wafer box transmission method according to claim 4, characterized in that: When the overhead crane transport device has more than two overhead cranes, the transport state of the wafer box on the first track segment and the third track segment includes one of the following situations: (1) When two adjacent overhead cranes of the overhead crane transport device need to take the wafer box, the wafer box is transported out of the warehouse on both the first track segment and the third track segment; (2) When two adjacent overhead cranes of the overhead crane transport device need to store the wafer box, the wafer box is transported into the warehouse on both the first track segment and the third track segment; (3) When one of the two adjacent overhead cranes of the overhead crane transport device needs to take the wafer box to be taken out and the other needs to store the wafer box to be stored, the wafer box is transported out of the warehouse on one of the first track segment and the third track segment, and the wafer box is transported into the warehouse on the other of the first track segment and the third track segment.

8. The wafer box transmission method according to claim 4, characterized in that: The wafer box transmission mechanism also includes at least one of a first storage position and a second storage position; wherein, the first storage position is arranged between the second track segment and the fourth track segment; the second storage position is arranged on the side of the third track segment away from the first track segment; and when the transfer track moves to the second position, the transfer track docks with the first storage position; when the transfer track moves to the third position, the transfer track docks with the second storage position.

9. The wafer box transmission method according to claim 8, characterized in that: After the wafer box to be stored is transported to the transfer track, the method further includes the following steps: The transfer track moves to the second position or the third position; The wafer box to be stored is transported to the first storage location or the second storage location; When the wafer box to be stored in the first storage position or the second storage position needs to be stored in the storage library, the transfer track moves to the second position or the third position, and the wafer box to be stored is transported to the transfer track.

10. The wafer box transmission method according to claim 8, characterized in that: After the step of transporting the wafer box to be taken to the transfer track via the outbound track, the following steps are also included: The transfer track moves to the second position or the third position; The wafer box to be taken is transported to the first storage location or the second storage location; When the wafer box to be taken from the first storage position or the second storage position needs to be taken by the overhead crane, the transfer track moves to the second position or the third position, and the wafer box to be taken is transported to the transfer track.

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