High-precision single-arm manipulator for wafer pick-and-place

Abstract

This invention proposes a high-precision single-arm robot for wafer pick-and-place, comprising a supporting frame, a lifting support frame, a primary pick-and-place arm, a secondary pick-and-place arm, a lifting drive motor, a primary deflection motor, and a secondary deflection motor. The lifting drive motor is a servo motor, possessing high-precision position control capabilities. It can precisely control the lifting position of the support frame according to input command signals and respond quickly to control signals, accelerating the lifting speed of the support frame and improving the overall response speed of the robot. The primary and secondary deflection motors are direct-drive motors, reducing transmission errors and mechanical backlash. This allows for more precise control of the deflection angles of the primary and secondary pick-and-place arms, improving the robot's operational accuracy and enabling the primary and secondary pick-and-place arms to respond quickly to control commands, thereby enhancing the robot's response speed.

Description

Technical Field

[0001] This utility model relates to integrated circuit manufacturing equipment, and more particularly to a high-precision single-arm robotic arm for picking up and placing wafers. Background Technology

[0002] Patent document CN104037114B discloses an automated wafer pick-and-place robot. The robotic arm can linearly reciprocate and position itself on a horizontally extending positioning plate in a horizontal plane. The horizontally extending positioning plate can rotate around a vertical axis and position itself on a vertical lifting plate. The vertical lifting plate can linearly rise and fall along a vertical direction and position itself on a base. A horizontal extension drive device, a horizontal rotation drive device, and a vertical lifting drive device respectively drive the robotic arm, the horizontally extending positioning plate, and the vertical lifting plate. The robotic arm is equipped with at least one suction cup. A controller controls the vacuum suction devices of the horizontal extension drive device, the horizontal rotation drive device, the vertical lifting drive device, and the suction cup. This allows for rapid placement and removal of wafers from wafer cassettes, fully automated control without manual assistance, high pick-and-place speed, and accurate placement. However, the intermediate transmission components of the drive device used in this conventional robot are prone to error accumulation, affecting accuracy and response speed after long-term operation. Furthermore, the cable and piping layout is complex, making installation and maintenance inconvenient. Therefore, it is necessary to optimize its structure to overcome these shortcomings. Utility Model Content

[0003] The purpose of this invention is to provide a high-precision single-arm robotic arm for wafer pick-and-place, so as to improve its operating accuracy and response speed.

[0004] The technical solution adopted by this utility model to solve its technical problem is:

[0005] A high-precision single-arm robotic arm for wafer pick-and-place includes:

[0006] A supporting load-bearing outer frame is formed by enclosing plates, creating a load-bearing space inside it;

[0007] A lifting support frame is installed on a supporting outer frame via a lifting structure and can be raised and lowered within the supporting outer frame.

[0008] The initial pick-up and drop boom is installed on the lifting support frame via a rotating structure. It can be raised and lowered together with the lifting support frame and can be independently deflected on the lifting support frame.

[0009] The final section of the take-up and place boom is mounted on the initial section of the take-up and place boom via a rotating structure. It extends outward from the initial section of the take-up and place boom and can be raised, lowered, and deflected together with the initial section of the take-up and place boom. It can also deflect independently on the initial section of the take-up and place boom.

[0010] It also includes:

[0011] A lifting drive motor is installed on the supporting frame. It is a servo motor and is connected to the lifting support frame through a transmission structure. The lifting drive motor drives the lifting support frame to lift.

[0012] The initial deflection motor is installed in the lifting support frame. It is a direct drive motor and works in conjunction with the initial pick-up and place arm. The initial deflection motor drives the initial pick-up and place arm to deflect. The initial deflection motor has an initial clearance through hole, through which cables and air pipes can pass.

[0013] The final deflection motor is installed in the initial pick-and-place boom. It is a direct drive motor and works in conjunction with the final pick-and-place boom. The final deflection motor drives the final pick-and-place boom to deflect. The final deflection motor has a final clearance through hole, through which cables and air pipes can pass.

[0014] In one embodiment of this utility model, the robotic arm further includes:

[0015] The lifting guide rail is installed in the supporting frame and cooperates with the lifting support frame. The lifting guide rail guides the lifting process of the lifting support frame.

[0016] In one embodiment of this utility model, the robotic arm further includes:

[0017] The pick-and-place operation fork is mounted on the end pick-and-place arm. It is a vacuum fork that extends outward from the end pick-and-place arm and can be raised, lowered, and deflected together with the end pick-and-place arm. The pick-and-place operation fork is used to pick up and place wafers.

[0018] In one embodiment of this utility model, the bottom of the lifting support frame is provided with a support base plate. The edge of the support base plate extends toward the lifting guide rail and cooperates with the lifting guide rail through a slider, so that the lifting support frame can be lifted and lowered along the lifting guide rail.

[0019] In one embodiment of this utility model, the transmission structure includes:

[0020] The transmission screw is parallel to the lifting guide rail. Its two ends are respectively installed in the support frame through bearings and can rotate in the support frame. Its middle part is engaged with the base plate through the transmission nut. When the transmission screw rotates, it can drive the base plate to rise and fall along the lifting guide rail. The lifting drive motor is engaged with the end of the transmission screw through the transmission belt and transmission gear, and can drive the transmission screw to rotate.

[0021] In one embodiment of this utility model, a lifting opening is provided at the top of the supporting frame, the shape of which is adapted to the lifting support frame, and the lifting support frame can pass through the lifting opening.

[0022] In one embodiment of this utility model, the initial and final pick-up / placement arms are respectively formed by enclosing plates, creating an internal space for cables and air pipes to pass through. The cables and air pipes used for the operating arm fork pass through the interior of the initial and final pick-up / placement arms, as well as through the initial and final clearance holes. This ensures that the cables and air pipes are not squeezed, pulled, or tangled during the robot's movement, guaranteeing their stability and reliability. Stable cable and air pipe connections ensure accurate transmission of electrical and pneumatic signals, avoiding motion errors caused by signal interference or interruption, thereby improving the robot's operational accuracy.

[0023] The advantages of this utility model are:

[0024] The lifting drive motor of this robotic arm uses a servo motor, which has high-precision position control capabilities. It can accurately control the lifting position of the lifting support frame according to the input command signal, thereby achieving precise picking and placing of wafers. At the same time, it has fast response characteristics, which can quickly respond to control signals, accelerate the lifting speed of the lifting support frame, and improve the overall response speed of the robotic arm. The initial deflection motor and the final deflection motor use direct drive motors, eliminating traditional transmission components and reducing transmission errors and mechanical backlash. This allows for more precise control of the deflection angle of the initial and final pick-and-place arms, improving the operating accuracy of the robotic arm. This enables the initial and final pick-and-place arms to respond quickly to control commands and achieve rapid deflection actions, thereby improving the response speed of the robotic arm. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the external structure of the high-precision single-arm robotic arm for wafer picking and placing proposed in this utility model.

[0026] Figure 2 This is a schematic diagram of the internal structure of the robotic arm;

[0027] Figure 3 This is a cross-sectional structural diagram of the robotic arm. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this utility model provided in the accompanying drawings is not intended to limit the scope of the claimed utility model, but merely represents selected embodiments of the utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.

[0029] like Figures 1-3 As shown, the high-precision single-arm robotic arm for wafer pick-and-place proposed in this utility model includes a supporting and load-bearing outer frame 100, a lifting and holding frame 200, a primary pick-and-place arm 300, a secondary pick-and-place arm 400, a lifting drive motor 110, a primary deflection motor 310, and a secondary deflection motor 410. The supporting and load-bearing outer frame is formed by enclosing plates, creating a load-bearing space inside. The lifting and holding frame is installed on the supporting and load-bearing outer frame via a lifting structure and can be raised and lowered within the supporting and load-bearing outer frame. The primary pick-and-place arm is installed on the lifting and holding frame via a rotating structure and can be raised and lowered together with the lifting and holding frame, and can be deflected independently on the lifting and holding frame. The secondary pick-and-place arm is installed on the primary pick-and-place arm via a rotating structure and extends outward from the primary pick-and-place arm, and can be raised and lowered together with the primary pick-and-place arm. The boom can deflect independently on the initial stage of the lifting arm. The lifting drive motor, a servo motor, is mounted on the supporting frame and connected to the lifting support frame via a transmission structure. The lifting drive motor drives the lifting support frame to rise and fall. The initial stage deflection motor, a direct-drive motor, is installed in the lifting support frame and works with the initial stage lifting arm. The initial stage deflection motor deflects the initial stage lifting arm. A primary stage clearance through-hole is provided in the initial stage deflection motor, through which cables and air pipes can pass. The final stage deflection motor, a direct-drive motor, is installed in the initial stage lifting arm and works with the final stage lifting arm. The final stage deflection motor deflects the final stage lifting arm. A final stage clearance through-hole is provided in the final stage deflection motor, through which cables and air pipes can pass. In this embodiment, the structure and operating principle of the servo motor and direct-drive motor are based on existing technology and are therefore not described in detail.

[0030] In this embodiment, the robotic arm also includes a lifting guide rail 120, which is installed in the support frame and cooperates with the lifting support frame. The lifting guide rail guides the lifting process of the lifting support frame.

[0031] In this embodiment, the robotic arm also includes a pick-and-place operation fork 420, which is mounted on the end pick-and-place arm. It is a vacuum fork and extends outward from the end pick-and-place arm. It can rise, fall and deflect together with the end pick-and-place arm. The pick-and-place operation fork performs pick-and-place operations on the wafer.

[0032] In this embodiment, the bottom of the lifting support frame is provided with a support base plate 210. The edge of the support base plate extends toward the lifting guide rail and cooperates with the lifting guide rail through a slider 211, so that the lifting support frame can be lifted and lowered along the lifting guide rail.

[0033] In this embodiment, the transmission structure includes a transmission screw 130, which is parallel to the lifting guide rail. Both ends of the transmission screw are mounted in the support frame through bearings and can rotate in the support frame. The middle part of the transmission screw is engaged with the base plate through a transmission nut. When the transmission screw rotates, it can drive the base plate to rise and fall along the lifting guide rail. The lifting drive motor is engaged with the end of the transmission screw through a transmission toothed belt and a transmission gear, which can drive the transmission screw to rotate.

[0034] In this embodiment, a lifting opening is provided at the top of the supporting frame, the shape of which is adapted to the lifting support frame, and the lifting support frame can pass through the lifting opening.

[0035] In this embodiment, the initial and final sections of the pick-and-place boom are each formed by enclosing plates, creating internal spaces for cables and air pipes to pass through. The cables and air pipes used for the operating boom pass through the interiors of the initial and final sections of the pick-and-place boom, as well as through the clearance holes in the initial and final sections.

[0036] When in use, this robotic arm uses a servo motor to drive the lifting support frame to rise and fall. When the operating arm reaches the wafer picking height, the lifting drive motor stops. At this time, the initial deflection motor and the final deflection motor start, causing the operating arm to extend to the wafer picking position and stop. The operating arm picks up the wafer, and the lifting drive motor raises the lifting support frame to the designated height, allowing the operating arm to carry the wafer away from the wafer storage area. The initial deflection motor and the final deflection motor continue to run, causing the operating arm carrying the wafer to retract. The lifting drive motor raises the lifting support frame to the designated height, bringing the operating arm to the vicinity of the wafer placement position. The initial deflection motor and the final deflection motor start, causing the operating arm to extend above the wafer placement position and stop. The lifting drive motor lowers the lifting support frame to the designated wafer placement position, allowing the operating arm to place the wafer. The initial deflection motor and the final deflection motor continue to run, causing the operating arm carrying the wafer to retract, completing the wafer picking and placement operation. The lifting height and extension position are determined by sensors and a control system. The structure and operating principle of the system are based on existing technology, so they are not described in detail.

[0037] In the description of this utility model, it should be noted that when terms such as "upper," "lower," "inner," "outer," "left," and "right" appear to indicate orientation or positional relationships, they should be understood as being based on the orientation or positional relationships shown in the accompanying drawings, or the orientation or positional relationships commonly used when the product of this utility model is in use, or the orientation or positional relationships commonly understood by those skilled in the art. These terms are used only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, when terms such as "first" and "second" appear, they are only used to distinguish descriptions and should not be construed as indicating or implying relative importance. In the description of this utility model, it should also be noted that unless otherwise explicitly specified and limited, terms such as "installation," "setting," and "connection" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

Claims

1. A high-precision single-arm robotic arm for wafer pick-and-place, comprising: A supporting load-bearing outer frame is formed by enclosing plates, creating a load-bearing space inside it; A lifting support frame is installed on the outer frame of the support frame via a lifting structure, and can be raised and lowered within the outer frame of the support frame. The initial pick-up and drop boom is installed on the lifting support frame via a rotating structure. It can be raised and lowered together with the lifting support frame and can be independently deflected on the lifting support frame. The final section of the take-up and place boom is mounted on the initial section of the take-up and place boom via a rotating structure. It extends outward from the initial section of the take-up and place boom and can be raised, lowered, and deflected together with the initial section of the take-up and place boom. It can also deflect independently on the initial section of the take-up and place boom. Its characteristic is that it further includes: A lifting drive motor is installed on the supporting frame. It is a servo motor and is connected to the lifting support frame through a transmission structure. The lifting drive motor drives the lifting support frame to lift. The initial deflection motor is installed in the lifting support frame. It is a direct drive motor and works in conjunction with the initial pick-up and place arm. The initial deflection motor drives the initial pick-up and place arm to deflect. The initial deflection motor has an initial clearance through hole, through which cables and air pipes can pass. The final deflection motor is installed in the initial pick-and-place boom. It is a direct drive motor and works in conjunction with the final pick-and-place boom. The final deflection motor drives the final pick-and-place boom to deflect. The final deflection motor has a final clearance through hole, through which cables and air pipes can pass.

2. A high-precision single-arm robotic arm for wafer pick-and-place according to claim 1, characterized in that, Also includes: The lifting guide rail is installed in the supporting frame and cooperates with the lifting support frame. The lifting guide rail guides the lifting process of the lifting support frame.

3. A high-precision single-arm robotic arm for wafer pick-and-place according to claim 1, characterized in that, Also includes: The pick-and-place operation fork is mounted on the end pick-and-place arm. It is a vacuum fork that extends outward from the end pick-and-place arm and can be raised, lowered, and deflected together with the end pick-and-place arm. The pick-and-place operation fork is used to pick up and place wafers.

4. A high-precision single-arm robotic arm for wafer pick-and-place according to claim 2, characterized in that: The bottom of the lifting support frame is equipped with a support base plate. The edge of the support base plate extends towards the lifting guide rail and cooperates with the lifting guide rail through a slider, so that the lifting support frame can be raised and lowered along the lifting guide rail.

5. A high-precision single-arm robotic arm for wafer pick-and-place according to claim 4, characterized in that, The transmission structure includes: The transmission screw is parallel to the lifting guide rail. Its two ends are respectively installed in the support frame through bearings and can rotate in the support frame. Its middle part is engaged with the base plate through the transmission nut. When the transmission screw rotates, it can drive the base plate to rise and fall along the lifting guide rail. The lifting drive motor is engaged with the end of the transmission screw through the transmission belt and transmission gear, and can drive the transmission screw to rotate.

6. A high-precision single-arm robotic arm for wafer pick-and-place according to claim 1, characterized in that: The top of the supporting frame has a lifting opening, the shape of which is adapted to the lifting support frame, and the lifting support frame can pass through the lifting opening.

7. A high-precision single-arm robotic arm for wafer pick-and-place according to claim 1, characterized in that: The initial and final retrieval booms are formed by enclosing plates, creating an internal space for cables and air pipes to pass through.

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