Laser energy adjustment method and target laser

Abstract

The present disclosure relates to the field of laser technology, and in particular to a laser energy regulation method and a target laser, wherein a target laser source, a sampling mirror, a photodetector, and an energy regulation module are integrated in the target laser; the method comprises: controlling the laser outputted by the target laser source to be incident on the sampling mirror, and the sampling mirror splits the incident laser to obtain transmitted light and scattered light; using the photodetector to detect the scattered light to obtain a target voltage value; based on the target voltage value and the preset energy-voltage mapping relationship corresponding to the target laser source, determining the initial energy value of the transmitted light; based on the initial energy value and the target energy value, determining the target attenuation ratio; based on the target attenuation ratio, using the energy regulation module to regulate the energy of the transmitted light incident on the energy regulation module, so as to control the target laser to output a target laser with a target energy value. The embodiment of the present disclosure can quantitatively regulate the output of a weak energy laser.

Description

Technical Field

[0001] The present disclosure relates to the field of laser technology, and in particular to a laser energy adjustment method and a target laser. Background Art

[0002] When the laser is used, it needs to output laser energy of the set energy value as required. When measuring changes in the material, it is necessary to adjust the energy value accordingly. If you use an energy meter to measure and adjust every time, it will be troublesome to operate and use, and the built-in energy meter will also introduce a relatively large volume and a large increase in cost. Moreover, for weak energy lasers, due to their own low output energy value, the built-in energy meter is easily interfered by other scattered energy when measuring, resulting in the measurement and output energy value not meeting the requirements. Summary of the invention

[0003] The present disclosure proposes a laser energy regulation method and a technical solution for a target laser.

[0004] According to one aspect of the present disclosure, a laser energy regulation method is provided, the method being applied to a target laser, wherein the target laser is integrated with a target laser source, a sampling mirror, a photodetector, and an energy regulation module; the method comprising: controlling the laser output by the target laser source to be incident on the sampling mirror, wherein the sampling mirror is used to split the incident laser to obtain transmitted light and scattered light; detecting the scattered light by using the photodetector to obtain a target voltage value; determining an initial energy value of the transmitted light based on the target voltage value and a preset energy-voltage mapping relationship corresponding to the target laser source; determining a target attenuation ratio based on the initial energy value and the target energy value; and based on the target attenuation ratio, using the energy regulation module to perform energy regulation on the transmitted light incident on the energy regulation module, so as to control the target laser to output a target laser with the target energy value.

[0005] In a possible implementation, the method further includes: attenuating the laser output by the target laser source according to a plurality of calibrated attenuation ratios and then incident on the sampling mirror, wherein the sampling mirror is used to split the incident laser to obtain calibrated transmitted light and calibrated scattered light corresponding to each calibrated attenuation ratio; using the photodetector to detect each calibrated scattered light to obtain a calibrated voltage value corresponding to each calibrated scattered light; using a first energy meter to determine a first calibrated energy value corresponding to each calibrated transmitted light; and fitting the preset energy-voltage mapping relationship according to the calibrated voltage value corresponding to each calibrated scattered light and the first calibrated energy value corresponding to each calibrated transmitted light.

[0006] In a possible implementation, the energy regulation module includes: a wave plate, a polarizer, and a motor; based on the target attenuation ratio, the energy regulation module is used to regulate the energy of the transmitted light incident to the energy regulation module to control the target laser to output the target laser with the target energy value, including: determining the target rotation angle based on the target attenuation ratio and the preset angle-attenuation ratio mapping relationship corresponding to the wave plate; using the motor to control the wave plate to rotate the target rotation angle; controlling the transmitted light to pass through the rotated wave plate and the polarizer in sequence to control the target laser to output the target laser with the target energy value.

[0007] In a possible implementation, the photodetector includes: a first circuit constructed based on a target photodiode; and the motor includes: a second circuit constructed based on a target motor driver chip.

[0008] In a possible implementation, the method also includes: controlling the transmitted light to pass through the second energy meter, the wave plate, the polarizer, and the third energy meter in sequence; determining a second calibrated energy value before incident on the wave plate based on the second energy meter; rotating the wave plate using the motor based on multiple calibrated rotation angles, and determining a third calibrated energy value corresponding to each calibrated rotation angle based on the third energy meter; fitting the preset angle-attenuation ratio mapping relationship according to the second calibrated energy value and the third calibrated energy value corresponding to each calibrated rotation angle.

[0009] According to one aspect of the present disclosure, a target laser is provided, comprising: a target laser source, a sampling mirror, a photodetector, an energy adjustment module, and a determination module; the target laser source is used to emit laser light and to incident the emitted laser light onto the sampling mirror; the sampling mirror is used to split the incident laser light to obtain transmitted light and scattered light; the photodetector is used to detect the scattered light to obtain a target voltage value; the determination module is used to determine an initial energy value of the transmitted light based on the target voltage value and a preset energy-voltage mapping relationship corresponding to the target laser source; the determination module is used to determine a target attenuation ratio based on the initial energy value and a target energy value; the energy adjustment module is used to perform energy adjustment on the transmitted light incident to the energy adjustment module based on the target attenuation ratio, so as to control the target laser to output a target laser with the target energy value.

[0010] In a possible implementation, the target laser corresponds to a plurality of attenuation modules, a first energy meter, and a first calibration module; any one of the attenuation modules is used to attenuate the laser output by the target laser source according to the calibrated attenuation ratio corresponding to the attenuation module and then incident on the sampling mirror; the sampling mirror is used to split the incident laser to obtain calibrated transmitted light and calibrated scattered light corresponding to each calibrated attenuation ratio; the photodetector is used to detect each calibrated scattered light to obtain a calibrated voltage value corresponding to each calibrated scattered light; the first energy meter is used to determine a first calibrated energy value corresponding to each calibrated transmitted light; the calibration module is used to fit the preset energy-voltage mapping relationship according to the calibrated voltage value corresponding to each calibrated scattered light and the first calibrated energy value corresponding to each calibrated transmitted light.

[0011] In a possible implementation, the energy regulation module includes: a wave plate, a polarizer, and a motor; the determination module is used to determine the target rotation angle based on the target attenuation ratio and the preset angle-attenuation ratio mapping relationship corresponding to the wave plate; the motor is used to control the wave plate to rotate the target rotation angle; wherein the transmitted light passes through the rotated wave plate and the polarizer in sequence, so that the target laser outputs a target laser with the target energy value.

[0012] In a possible implementation, the photodetector includes: a first circuit constructed based on a target photodiode; and the motor includes: a second circuit constructed based on a target motor driver chip.

[0013] In a possible implementation, the target laser corresponds to a second energy meter, a third energy meter, and a second calibration module; the transmitted light passes through the second energy meter, the wave plate, the polarizer, and the third energy meter in sequence; the second energy meter is used to determine a second calibrated energy value before incident on the wave plate; the motor is used to rotate the wave plate based on multiple calibrated rotation angles; the third energy meter is used to determine a third calibrated energy value corresponding to each calibrated rotation angle; the second calibration module is used to fit the preset angle-attenuation ratio mapping relationship according to the second calibrated energy value and the third calibrated energy value corresponding to each calibrated rotation angle.

[0014] In the embodiment of the present disclosure, since the photodetector is small in size, for a small-volume weak-energy target laser source, the target laser source, the sampling mirror, the photodetector, and the energy regulation module can be integrated into a weak-energy target laser with a relatively small overall volume, and then, the laser output by the target laser source is controlled to be incident on the sampling mirror, and the transmitted light and the scattered light are obtained by the sampling mirror; the scattered light is detected by the photodetector to obtain a target voltage value; based on the target voltage value and a preset energy-voltage mapping relationship corresponding to the target laser source, an initial energy value of the transmitted light is obtained; based on the initial energy value and the target energy value, a target attenuation ratio is determined; based on the target attenuation ratio, the energy regulation module is used to regulate the energy of the transmitted light incident on the energy regulation module, so as to control the target laser to output a target laser with a target energy value, that is, the output target energy value = initial energy value × target attenuation ratio, so that the output of the weak-energy laser can be quantitatively regulated without introducing a larger volume and a larger cost increase, and the on-demand output of a relatively small-volume weak-energy laser can be effectively realized.

[0015] It should be understood that the above general description and the following detailed description are exemplary and explanatory only and do not limit the present disclosure. Other features and aspects of the present disclosure will become clear from the following detailed description of exemplary embodiments with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The drawings herein are incorporated into the specification and constitute a part of the specification. These drawings illustrate embodiments consistent with the present disclosure and are used to illustrate the technical solutions of the present disclosure together with the specification.

[0017] Figure 1 A schematic diagram of an optical path of a laser energy regulation method in the related art is shown.

[0018] Figure 2 A flow chart of a laser energy adjustment method according to an embodiment of the present disclosure is shown.

[0019] Figure 3 A schematic diagram showing a target laser according to an embodiment of the present disclosure.

[0020] Figure 4 A schematic diagram showing a first circuit within a photodetector according to an embodiment of the present disclosure.

[0021] Figure 5 A schematic diagram showing a second circuit within a motor according to an embodiment of the present disclosure.

[0022] Figure 6 A block diagram of a target laser according to an embodiment of the present disclosure is shown. DETAILED DESCRIPTION

[0023] Various exemplary embodiments, features and aspects of the present disclosure will be described in detail below with reference to the accompanying drawings. The same reference numerals in the accompanying drawings represent elements with the same or similar functions. Although various aspects of the embodiments are shown in the accompanying drawings, the drawings are not necessarily drawn to scale unless otherwise specified.

[0024] The word “exemplary” is used exclusively herein to mean “serving as an example, example, or illustration.” Any embodiment described herein as “exemplary” is not necessarily to be construed as preferred or advantageous over other embodiments.

[0025] The term "and / or" herein is only a description of the association relationship of the associated objects, indicating that there may be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the term "at least one" herein represents any combination of at least two of any one or more of a plurality of. For example, including at least one of A, B, and C can represent including any one or more elements selected from the set consisting of A, B, and C.

[0026] In addition, in order to better illustrate the present disclosure, numerous specific details are given in the following specific embodiments. It should be understood by those skilled in the art that the present disclosure can also be implemented without certain specific details. In some examples, methods, means, components and circuits well known to those skilled in the art are not described in detail in order to highlight the subject matter of the present disclosure.

[0027] Figure 1 FIG. 1 is a schematic diagram showing an optical path of a laser energy adjustment method in the related art. Figure 1 As shown, the general laser energy adjustment method only includes a laser source 11, a wave plate 12, a polarizer 13 (for example, a prism 13), and a motor 14. The laser source 11 emits a laser, and the wave plate 12, the prism 13, and the motor 14 can cooperate to adjust the polarization state to attenuate and obtain a percentage energy value. However, the percentage energy value obtained by attenuation cannot be compared with the required energy value, resulting in the inability of the laser to output accurately as required.

[0028] like Figure 1 As shown, for high-energy lasers and large-volume lasers, in addition to the above-mentioned laser source 11, wave plate 12, prism 13, and motor 14, a sampling mirror 15 and an energy meter 16 can be installed internally, and the energy meter 16 is used to detect the energy of the light splitting of the sampling mirror 15 to achieve accurate detection and output energy. However, the internal installation of the sampling mirror 15 and the energy meter 16 will cause the overall volume of the laser to be larger. In addition, the energy meter is generally suitable for energy detection at the millijoule level. For energy detection at the microjoule level, it will be interfered by other scattered energy, resulting in inaccurate energy detection data.

[0029] Therefore, the above Figure 1 The laser energy regulation method shown is not suitable for small-volume weak-energy lasers. In order to achieve energy detection and accurate on-demand output of small-volume weak-energy lasers, the embodiment of the present disclosure provides a laser energy regulation method. The laser energy regulation method of the embodiment of the present disclosure is described in detail below.

[0030] Figure 2 A flow chart of a laser energy adjustment method according to an embodiment of the present disclosure is shown. The laser energy adjustment method is applied to a target laser, wherein the target laser may be a micro-focus level laser. Figure 3 FIG. 2 is a schematic diagram showing a target laser according to an embodiment of the present disclosure. Figure 3 As shown, the target laser integrates a target laser source 31, a sampling mirror 32, a photodetector 33, and an energy adjustment module 34. Figure 2 As shown, the laser energy adjustment method includes:

[0031] In step S21, the laser light outputted by the target laser source is controlled to be incident on a sampling mirror, wherein the sampling mirror is used to split the incident laser light into transmitted light and scattered light.

[0032] Sampling mirrors, also known as beam sampling mirrors, are important components in optical systems. The sampling mirror needs to effectively guide a small portion of the beam into another optical path while ensuring the transmission of the main beam. This is usually achieved by setting a specific reflective or refractive structure on the surface or inside the lens of the sampling mirror. Specifically, the sampling mirror may use technologies such as Fresnel reflection, wedge design or anti-reflection coating to achieve accurate sampling of the beam.

[0033] like Figure 3 As shown, the target laser source 31 is controlled to output laser light to the sampling mirror 32, and the sampling mirror 32 performs spectroscopic sampling on the incident laser light to obtain transmitted light (main light beam) and scattered light (sampling light beam).

[0034] In one example, the sampling mirror splits the incident laser to obtain the transmitted light and the scattered light, including: the incident laser passes through the sampling mirror to obtain the reflected light and the transmitted light; the reflected light passes through the preset scattering device to obtain the scattered light. The preset scattering device is Figure 3 It is not shown in the figure and can be flexibly set according to the actual application scenario, and the present disclosure does not make any specific limitation on this.

[0035] In step S22, the scattered light is detected by a photodetector to obtain a target voltage value.

[0036] like Figure 3 As shown, the scattered light obtained by the sampling mirror 32 through light splitting and sampling is irradiated into the photodetector 33, and the photodetector 33 can detect the incident scattered light to determine the target voltage value.

[0037] In a possible implementation manner, the photodetector includes: a first circuit constructed based on a target photodiode.

[0038] Based on the characteristics of the photodiode, different light signal intensities irradiate the photodiode to generate different currents. Therefore, based on the photodiode and a preset set of transimpedance amplifiers, the current is converted into voltage, and then the microcontroller is used to collect it through the analog-to-digital converter (ADC), thereby realizing the digitization of the light signal and converting the light signal input to the photodiode into a voltage output.

[0039] Figure 4 FIG. 1 is a schematic diagram showing a first circuit in a photodetector according to an embodiment of the present disclosure. Figure 4 As shown, U1 is a photodiode of model LSSPD-U1.2; U2.1 is a preset transimpedance amplifier; R1-R4 and R67 are common resistors; and C1-C3 are capacitors. Figure 4 The models and parameters of the components in the first circuit shown are only exemplary and can be adjusted according to actual application scenarios. The present disclosure does not make any specific limitations on this.

[0040] like Figure 4 As shown, the scattered light obtained by the sampling mirror 32 through spectral splitting and sampling irradiates the photodiode U1, and then is amplified by the R1, R4 cross group and the preset transimpedance amplifier U2.1, and the target voltage value is output at the TP1 point.

[0041] Figure 4 The first circuit shown is only an exemplary embodiment of the present disclosure. Any other circuits with changed structures, as long as they can detect the incident scattered light to obtain the target voltage value, are within the protection scope of the present disclosure.

[0042] In step S23, the initial energy value of the transmitted light is determined based on the target voltage value and a preset energy-voltage mapping relationship corresponding to the target laser source.

[0043] The preset energy-voltage mapping relationship is pre-calibrated for the target laser source. The preset energy-voltage mapping relationship reflects the mapping relationship between the voltage value of the scattered light (sampling beam) detected by the photodetector and the energy value of the transmitted light (main beam). In other words, for the scattered light and transmitted light obtained by the sampling mirror, as long as the voltage value of the scattered light is detected by the photodetector, the energy value of the transmitted light can be further determined in combination with the preset energy-voltage mapping relationship.

[0044] How to calibrate the preset energy-voltage mapping relationship corresponding to the target laser source will be described in detail later in conjunction with possible implementations of the present disclosure, and will not be elaborated here.

[0045] like Figure 3 As shown, based on the photodetector 33, the target voltage value of the scattered light corresponding to the sampling mirror 32 can be determined, and then based on the preset energy-voltage mapping relationship corresponding to the target laser source, the energy value corresponding to the target voltage value can be determined, and the energy value is determined as the initial energy value of the transmitted light corresponding to the sampling mirror 32.

[0046] In step S24, a target attenuation ratio is determined based on the initial energy value and the target energy value.

[0047] The target energy value is the laser energy value required in the actual application scenario. The specific size of the target energy value can be flexibly changed according to the actual scenario, and the present disclosure does not make specific limitations on this.

[0048] According to the initial energy value and the target energy value, it can be determined that the target attenuation ratio = target energy value / initial energy value.

[0049] In step S25, based on the target attenuation ratio, the energy regulating module is used to regulate the energy of the transmitted light incident to the energy regulating module, so as to control the target laser to output the target laser with the target energy value.

[0050] After the target attenuation ratio is determined, the energy regulating module can be used to regulate the energy of the transmitted light incident to the energy regulating module, so as to control the target laser to quantitatively output the target laser with the target energy value.

[0051] like Figure 3 As shown, the transmitted light is incident on the energy regulating module 34, and the energy regulating module 34 attenuates the transmitted light according to the target attenuation ratio, thereby quantizing the output of the target laser with the target energy value.

[0052] According to the embodiments of the present disclosure, since the photodetector is small in size, for a small-volume weak-energy target laser source, the target laser source, the sampling mirror, the photodetector, and the energy regulation module can be integrated into a weak-energy target laser with a relatively small overall volume, and then, the laser output by the target laser source is controlled to be incident on the sampling mirror, and the transmitted light and the scattered light are obtained by the sampling mirror; the scattered light is detected by the photodetector to obtain a target voltage value; based on the target voltage value and a preset energy-voltage mapping relationship corresponding to the target laser source, an initial energy value of the transmitted light is obtained; based on the initial energy value and the target energy value, a target attenuation ratio is determined; based on the target attenuation ratio, the energy regulation module is used to regulate the energy of the transmitted light incident on the energy regulation module, so as to control the target laser to output a target laser with a target energy value, that is, the output target energy value = initial energy value × target attenuation ratio, so that the output of the weak-energy laser can be quantitatively regulated without introducing a larger volume and a larger cost increase, and the on-demand output of a weak-energy laser with a smaller volume can be effectively realized.

[0053] In one example, the laser energy adjustment method provided by the embodiment of the present disclosure is not limited to a certain wavelength. For example, this method can be used to adjust the energy for wavelengths of 1064nm, 532nm, 355nm, and other required wavelengths.

[0054] In one example, the target laser may be a millijoule-level laser in addition to a microjoule-level laser.

[0055] In a possible implementation, the energy regulation module includes: a wave plate, a polarizer, and a motor; based on the target attenuation ratio, the energy regulation module is used to regulate the energy of the transmitted light incident to the energy regulation module to control the target laser to output a target laser with a target energy value, including: determining the target rotation angle based on the target attenuation ratio and the preset angle-attenuation ratio mapping relationship corresponding to the wave plate; using the motor to control the wave plate to rotate the target rotation angle; controlling the transmitted light to pass through the rotated wave plate and the polarizer in sequence to control the target laser to output a target laser with a target energy value.

[0056] like Figure 3 As shown, the energy adjustment module 34 includes: a wave plate 35, a polarizer 36 (for example, a prism), and a motor 37. The motor 37 can drive the wave plate 35 to rotate to change the polarization state of the light beam incident to the wave plate 35, and the polarizer 36 can attenuate the polarized light. Therefore, the wave plate 35, the polarizer 36, and the motor 37 work together to achieve energy attenuation after the transmitted light passes through the wave plate 35 and the polarizer 36 in sequence.

[0057] The preset angle-attenuation ratio mapping relationship is pre-calibrated for the wave plate. The preset angle-attenuation ratio mapping relationship reflects the mapping relationship between the rotation angle of the wave plate and the attenuation ratio of the wave plate and the polarizer. In other words, after determining the attenuation ratio at which the wave plate and the polarizer need to attenuate energy, the preset angle-attenuation ratio mapping relationship can be further combined to determine the rotation angle at which the wave plate needs to rotate.

[0058] How to calibrate the preset angle-attenuation ratio mapping relationship corresponding to the wave plate will be described in detail later in conjunction with possible implementation methods of the present disclosure, and will not be elaborated here.

[0059] like Figure 3 As shown, after the target attenuation ratio is determined as described above, the preset angle-attenuation ratio mapping relationship corresponding to the wave plate 35 can be used to determine the rotation angle corresponding to the target attenuation ratio, and the rotation angle is determined as the target rotation angle that the wave plate 35 needs to rotate.

[0060] Furthermore, the motor 37 can be used to control the wave plate 35 to rotate to a target rotation angle, so that the transmitted light with an initial energy value can achieve energy attenuation of a target attenuation ratio after passing through the rotated wave plate 35 and the polarizer 36 in sequence, so that the target laser outputs a target laser with a target energy value, wherein the output target energy value = initial energy value × target attenuation ratio.

[0061] In a possible implementation, the motor includes: a second circuit constructed based on a target motor driver chip.

[0062] Figure 5 FIG. 1 is a schematic diagram showing a second circuit in a motor according to an embodiment of the present disclosure. Figure 5 As shown, the target motor driver chip U44 can be a stepper motor driver chip of model DRV8428RTER, and can also be set to other models of stepper motor driver chips according to actual application scenarios, which is not specifically limited in the present disclosure. R88-R89 are ordinary resistors, and C120-C121 are capacitors. Figure 5 The models and parameters of the components in the second circuit shown are only exemplary and can be adjusted according to actual application scenarios. The present disclosure does not make specific limitations on this.

[0063] Figure 5 The second circuit shown is only an exemplary embodiment of the present disclosure. Any other circuits with changed structures, as long as they can achieve precise driving of the rotation angle of the wave plate, are within the protection scope of the present disclosure.

[0064] In a possible implementation, the laser energy regulation method also includes: attenuating the laser output by the target laser source according to a plurality of calibrated attenuation ratios and then incident on a sampling mirror, wherein the sampling mirror is used to split the incident laser to obtain calibrated transmitted light and calibrated scattered light corresponding to each calibrated attenuation ratio; using a photodetector to detect each calibrated scattered light to obtain a calibrated voltage value corresponding to each calibrated scattered light; using a first energy meter to determine a first calibrated energy value corresponding to each calibrated transmitted light; and fitting a preset energy-voltage mapping relationship according to the calibrated voltage value corresponding to each calibrated scattered light and the first calibrated energy value corresponding to each calibrated transmitted light.

[0065] In the process of calibrating the preset energy-voltage mapping relationship for the target laser source, by attenuating the laser output by the target laser source according to multiple calibrated attenuation ratios, multiple groups of sampling data can be sampled: calibrated voltage values ​​and their corresponding first calibrated energy values.

[0066] With the above Figure 3 For example, multiple attenuation plates with calibrated attenuation ratios can be inserted between the target laser source 31 and the sampling mirror 32 to achieve attenuation of the laser output by the target laser source according to multiple calibrated attenuation ratios. In addition to the attenuation plates, other components that can achieve light energy attenuation can also be used according to actual application scenarios, and the present disclosure does not specifically limit this.

[0067] With the above Figure 3 As an example, the process of calibrating the preset energy-voltage mapping relationship of the target laser source 31 is described in detail.

[0068] For the first sampling: an attenuation plate with a first calibrated attenuation ratio is inserted between the target laser source 31 and the sampling mirror 32, so that the laser output by the target laser source 31 is attenuated according to the first calibrated attenuation ratio and then incident on the sampling mirror 32, and the sampling mirror 32 splits the light to obtain a first calibrated transmitted light and a first calibrated scattered light; the first calibrated scattered light is detected by the photodetector 33 to obtain a calibrated voltage value corresponding to the first calibrated scattered light; the first energy meter arranged behind the sampling mirror 32 is used to determine the first calibrated energy value corresponding to the first calibrated transmitted light; and a first set of sampling data is obtained: a calibrated voltage value corresponding to the first calibrated scattered light, and a first calibrated energy value corresponding to the first calibrated transmitted light.

[0069] For the second sampling: an attenuation plate with a second calibrated attenuation ratio is inserted between the target laser source 31 and the sampling mirror 32, so that the laser output by the target laser source 31 is attenuated according to the second calibrated attenuation ratio and then incident on the sampling mirror 32, and the sampling mirror 32 splits the light to obtain a second calibrated transmitted light and a second calibrated scattered light; the second calibrated scattered light is detected by the photodetector 33 to obtain a calibrated voltage value corresponding to the second calibrated scattered light; the first energy meter arranged after the sampling mirror 32 is used to determine the first calibrated energy value corresponding to the second calibrated transmitted light; and a second set of sampling data is obtained: a calibrated voltage value corresponding to the second calibrated scattered light, and a first calibrated energy value corresponding to the second calibrated transmitted light.

[0070] By analogy, multiple sets of sampling data are obtained: the calibration voltage value and its corresponding first calibration energy value. The number of multiple sets of sampling data (the number of multiple calibration attenuation ratios) can be set according to the actual application scenario, for example, the number is 5-7, and the present disclosure does not make specific restrictions on this.

[0071] After obtaining multiple groups of sampling data: calibrated voltage values ​​and their corresponding first calibrated energy values, a preset energy-voltage mapping relationship corresponding to the target laser source can be obtained by fitting.

[0072] The specific form of the preset energy-voltage mapping relationship can be set in different forms according to the actual application scenario, and the present disclosure does not make any specific limitation on this.

[0073] When the target laser source in the target laser is changed, recalibration is required. In other words, different target laser sources correspond to different preset energy-voltage mapping relationships.

[0074] In a possible implementation, the laser energy regulation method also includes: controlling the transmitted light to pass through a second energy meter, a wave plate, a polarizer, and a third energy meter in sequence; determining a second calibrated energy value before entering the wave plate based on the second energy meter; rotating the wave plate using a motor based on multiple calibrated rotation angles, and determining a third calibrated energy value corresponding to each calibrated rotation angle based on the third energy meter; fitting a preset angle-attenuation ratio mapping relationship based on the second calibrated energy value and the third calibrated energy value corresponding to each calibrated rotation angle.

[0075] In the process of calibrating the preset angle-attenuation ratio mapping relationship of the wave plate, by rotating the wave plate at multiple calibration rotation angles, multiple groups of sampling data can be sampled: calibration rotation angles and their corresponding calibration attenuation ratios.

[0076] With the above Figure 3 For example, a second energy meter may be provided before the wave plate 35 and a third energy meter may be provided after the polarizer 36 to determine the calibrated attenuation ratio of the wave plate 35 at different calibrated rotation angles.

[0077] With the above Figure 3 As an example, the process of calibrating the preset angle-attenuation ratio mapping relationship of the wave plate 35 is described in detail.

[0078] A second calibrated energy value of the light beam incident on the wave plate 35 is determined by using a second energy meter.

[0079] For the first sampling: use the motor 37 to drive the wave plate 35 to rotate the first calibrated rotation angle, and determine the third calibrated energy value of the light beam after passing through the wave plate 35 and the polarizer 36 based on the third energy meter, that is, the third calibrated energy value corresponding to the first calibrated rotation angle; and then obtain the first group of sampling data: the first rotation angle, the calibrated attenuation ratio corresponding to the first rotation angle = the third calibrated energy value corresponding to the first calibrated rotation angle / the second calibrated energy value.

[0080] For the second sampling: use the motor 37 to drive the wave plate 35 to rotate the second calibrated rotation angle, and determine the third calibrated energy value of the light beam after passing through the wave plate 35 and the polarizer 36 based on the third energy meter, that is, the third calibrated energy value corresponding to the second calibrated rotation angle; and then obtain the second set of sampling data: the second rotation angle, the calibrated attenuation ratio corresponding to the second rotation angle = the third calibrated energy value corresponding to the second calibrated rotation angle / the second calibrated energy value.

[0081] By analogy, multiple sets of sampling data are obtained: the calibrated rotation angle and its corresponding calibrated attenuation ratio. The number of multiple sets of sampling data (the number of multiple calibrated attenuation ratios) can be set according to the actual application scenario, for example, the number is 5-7, and the present disclosure does not make specific restrictions on this.

[0082] After obtaining multiple sets of sampling data: calibrated rotation angles and their corresponding calibrated attenuation ratios, a preset angle-attenuation ratio mapping relationship corresponding to the wave plate can be obtained by fitting.

[0083] The specific form of the preset angle-attenuation ratio mapping relationship can be set in different forms according to the actual application scenario, and the present disclosure does not make any specific limitation on this.

[0084] When the target laser is small in size, the preset angle-attenuation ratio mapping relationship corresponding to the wave plate can be calibrated outside the target laser. After the calibration is completed, the wave plate, polarizer and motor are set inside the target laser.

[0085] When the target laser source in the target laser changes, as long as the wave plate does not change, the preset angle-attenuation ratio mapping relationship corresponding to the calibrated wave plate can be reused for different target laser sources, that is, there is no need to recalibrate the preset angle-attenuation ratio mapping relationship corresponding to the wave plate.

[0086] According to the embodiments of the present disclosure, since the photodetector is small in size, for a small-volume weak-energy target laser source, the target laser source, the sampling mirror, the photodetector, and the energy regulation module can be integrated into a weak-energy target laser with a relatively small overall volume, and then, the laser output by the target laser source is controlled to be incident on the sampling mirror, and the transmitted light and the scattered light are obtained by the sampling mirror; the scattered light is detected by the photodetector to obtain a target voltage value; based on the target voltage value and a preset energy-voltage mapping relationship corresponding to the target laser source, an initial energy value of the transmitted light is obtained; based on the initial energy value and the target energy value, a target attenuation ratio is determined; based on the target attenuation ratio, the energy regulation module is used to regulate the energy of the transmitted light incident on the energy regulation module, so as to control the target laser to output a target laser with a target energy value, that is, the output target energy value = initial energy value × target attenuation ratio, so that the output of the weak-energy laser can be quantitatively regulated without introducing a larger volume and a larger cost increase, and the on-demand output of a weak-energy laser with a smaller volume can be effectively realized.

[0087] It can be understood that the above-mentioned various method embodiments mentioned in the present disclosure can be combined with each other to form a combined embodiment without violating the principle logic. Due to space limitations, the present disclosure will not repeat them. It can be understood by those skilled in the art that in the above-mentioned method of the specific implementation method, the specific execution order of each step should be determined according to its function and possible internal logic.

[0088] In addition, the present disclosure also provides a target laser, which can be used to implement any laser energy adjustment method provided by the present disclosure. The corresponding technical solutions and descriptions are referred to in the corresponding records of the method part and will not be repeated here.

[0089] Figure 6 FIG. 5 is a block diagram of a target laser according to an embodiment of the present disclosure. Figure 6 As shown, the target laser includes: a target laser source 31, a sampling mirror 32, a photodetector 33, an energy adjustment module 34, and a determination module 38;

[0090] A target laser source, used for emitting laser light and directing the emitted laser light into a sampling mirror;

[0091] A sampling mirror is used to split the incident laser light to obtain transmitted light and scattered light;

[0092] A photoelectric detector is used to detect scattered light and obtain a target voltage value;

[0093] A determination module, used to determine the initial energy value of the transmitted light based on the target voltage value and a preset energy-voltage mapping relationship corresponding to the target laser source;

[0094] A determination module, used for determining a target attenuation ratio based on an initial energy value and a target energy value;

[0095] The energy regulating module is used to regulate the energy of the transmitted light incident to the energy regulating module based on the target attenuation ratio, so as to control the target laser to output the target laser with the target energy value.

[0096] In a possible implementation, the target laser corresponds to a plurality of attenuation modules, a first energy meter, and a first calibration module;

[0097] Any attenuation module, used to attenuate the laser output by the target laser source according to the calibrated attenuation ratio corresponding to the attenuation module and then incident on the sampling mirror;

[0098] A sampling mirror is used to split the incident laser light to obtain the calibrated transmitted light and the calibrated scattered light corresponding to each calibrated attenuation ratio;

[0099] A photoelectric detector is used to detect each calibration scattered light and obtain a calibration voltage value corresponding to each calibration scattered light;

[0100] A first energy meter, used to determine a first calibration energy value corresponding to each calibration transmission light;

[0101] The calibration module is used to fit a preset energy-voltage mapping relationship according to a calibration voltage value corresponding to each calibration scattered light and a first calibration energy value corresponding to each calibration transmitted light.

[0102] In a possible implementation, the energy regulation module includes: a wave plate, a polarizer, and a motor;

[0103] A determination module, used to determine a target rotation angle based on a target attenuation ratio and a preset angle-attenuation ratio mapping relationship corresponding to the wave plate;

[0104] A motor, used to control the wave plate to rotate to the target rotation angle;

[0105] The transmitted light passes through the rotated wave plate and the polarizer in sequence, so that the target laser outputs the target laser with the target energy value.

[0106] In a possible implementation, the photodetector includes: a first circuit constructed based on a target photodiode;

[0107] The motor includes: a second circuit constructed based on a target motor driver chip.

[0108] In a possible implementation, the target laser corresponds to a second energy meter, a third energy meter, and a second calibration module;

[0109] The transmitted light passes through the second energy meter, the wave plate, the polarizer, and the third energy meter in sequence;

[0110] a second energy meter, used to determine a second calibrated energy value before incident on the wave plate;

[0111] a motor for rotating the wave plate based on a plurality of calibrated rotation angles;

[0112] A third energy meter, used to determine a third calibrated energy value corresponding to each calibrated rotation angle;

[0113] The second calibration module is used to fit a preset angle-attenuation ratio mapping relationship according to the second calibration energy value and the third calibration energy value corresponding to each calibration rotation angle.

[0114] In some embodiments, the functions or modules included in the device provided by the embodiments of the present disclosure can be used to execute the method described in the above method embodiments. The specific implementation can refer to the description of the above method embodiments, and for the sake of brevity, it will not be repeated here.

[0115] The above description of various embodiments tends to emphasize the differences between the various embodiments. The same or similar aspects can be referenced to each other, and for the sake of brevity, they will not be repeated herein.

[0116] Those skilled in the art will appreciate that, in the above method of specific implementation, the order in which the steps are written does not imply a strict execution order and does not constitute any limitation on the implementation process. The specific execution order of the steps should be determined by their functions and possible internal logic.

[0117] The embodiments of the present disclosure have been described above, and the above description is exemplary, not exhaustive, and is not limited to the disclosed embodiments. Many modifications and changes will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The selection of terms used herein is intended to best explain the principles of the embodiments, practical applications, or improvements to the technology in the market, or to enable other persons of ordinary skill in the art to understand the embodiments disclosed herein.

Claims

1. A laser energy adjustment method, characterized in that: The method is applied to a target laser at a micro-focus level, wherein the target laser is integrated with a target laser source, a sampling mirror, a photodetector, and an energy regulation module; the method comprises: Controlling the laser outputted by the target laser source to be incident on the sampling mirror, wherein the sampling mirror is used to split the incident laser to obtain transmitted light and scattered light; Detecting the scattered light using the photodetector to obtain a target voltage value; Determining an initial energy value of the transmitted light based on the target voltage value and a preset energy-voltage mapping relationship corresponding to the target laser source; Determining a target attenuation ratio based on the initial energy value and the target energy value; Based on the target attenuation ratio, the energy regulating module is used to regulate the energy of the transmitted light incident to the energy regulating module, so as to control the target laser to output the target laser with the target energy value.

2. The method according to claim 1, characterized in that The method further comprises: The laser outputted by the target laser source is attenuated according to a plurality of calibrated attenuation ratios and then incident on the sampling mirror, wherein the sampling mirror is used to split the incident laser light to obtain calibrated transmitted light and calibrated scattered light corresponding to each calibrated attenuation ratio; Detecting each calibration scattered light using the photoelectric detector to obtain a calibration voltage value corresponding to each calibration scattered light; Determine a first calibration energy value corresponding to each calibration transmission light by using a first energy meter; The preset energy-voltage mapping relationship is obtained by fitting according to the calibrated voltage value corresponding to each calibrated scattered light and the first calibrated energy value corresponding to each calibrated transmitted light.

3. The method according to claim 1, characterized in that The energy regulation module includes: a wave plate, a polarizer, and a motor; The method of using the energy regulating module to regulate the energy of the transmitted light incident to the energy regulating module based on the target attenuation ratio, so as to control the target laser to output the target laser with the target energy value, comprises: Determining a target rotation angle based on the target attenuation ratio and a preset angle-attenuation ratio mapping relationship corresponding to the wave plate; Using the motor to control the wave plate to rotate to the target rotation angle; The transmitted light is controlled to sequentially pass through the rotated wave plate and the polarizer, so as to control the target laser to output the target laser with the target energy value.

4. The method according to claim 3, characterized in that The photodetector includes: a first circuit constructed based on a target photodiode; The motor includes: a second circuit constructed based on a target motor driver chip.

5. The method according to claim 3, characterized in that: The method further comprises: Controlling the transmitted light to sequentially pass through the second energy meter, the wave plate, the polarizer, and the third energy meter; Determine a second calibrated energy value before incident on the wave plate based on the second energy meter; Based on a plurality of calibrated rotation angles, the wave plate is rotated by the motor, and a third calibrated energy value corresponding to each calibrated rotation angle is determined based on the third energy meter; The preset angle-attenuation ratio mapping relationship is obtained by fitting according to the second calibrated energy value and the third calibrated energy value corresponding to each calibrated rotation angle.

6. A target laser, characterized in that: The target laser is a micro-focus level laser, and the target laser comprises: a target laser source, a sampling mirror, a photoelectric detector, an energy adjustment module, and a determination module; The target laser source is used to emit laser light and to make the emitted laser light incident on the sampling mirror; The sampling mirror is used to split the incident laser light to obtain the transmitted light and the scattered light; The photoelectric detector is used to detect the scattered light to obtain a target voltage value; The determination module is used to determine the initial energy value of the transmitted light based on the target voltage value and a preset energy-voltage mapping relationship corresponding to the target laser source; The determination module is used to determine a target attenuation ratio based on the initial energy value and the target energy value; The energy regulating module is used to regulate the energy of the transmitted light incident to the energy regulating module based on the target attenuation ratio, so as to control the target laser to output the target laser with the target energy value.

7. The target laser according to claim 6, characterized in that: The target laser corresponds to a plurality of attenuation modules, a first energy meter, and a first calibration module; Any attenuation module, used to attenuate the laser output by the target laser source according to the calibrated attenuation ratio corresponding to the attenuation module and then incident on the sampling mirror; The sampling mirror is used to split the incident laser light to obtain the calibrated transmitted light and the calibrated scattered light corresponding to each calibrated attenuation ratio; The photoelectric detector is used to detect each calibration scattered light to obtain a calibration voltage value corresponding to each calibration scattered light; The first energy meter is used to determine a first calibration energy value corresponding to each calibration transmission light; The calibration module is used to fit the preset energy-voltage mapping relationship according to the calibration voltage value corresponding to each calibration scattered light and the first calibration energy value corresponding to each calibration transmitted light.

8. The target laser according to claim 6, characterized in that: The energy regulation module includes: a wave plate, a polarizer, and a motor; The determination module is used to determine the target rotation angle based on the target attenuation ratio and the preset angle-attenuation ratio mapping relationship corresponding to the wave plate; The motor is used to control the wave plate to rotate to the target rotation angle; Wherein, the transmitted light passes through the rotated wave plate and the polarizer in sequence, so that the target laser outputs the target laser with the target energy value.

9. The target laser according to claim 8, characterized in that: The photodetector includes: a first circuit constructed based on a target photodiode; The motor includes: a second circuit constructed based on a target motor driver chip.

10. The target laser according to claim 8, characterized in that: The target laser corresponds to a second energy meter, a third energy meter, and a second calibration module; The transmitted light passes through the second energy meter, the wave plate, the polarizer, and the third energy meter in sequence; The second energy meter is used to determine a second calibrated energy value before incident on the wave plate; The motor is used to rotate the wave plate based on a plurality of calibrated rotation angles; The third energy meter is used to determine a third calibrated energy value corresponding to each calibrated rotation angle; The second calibration module is used to fit the preset angle-attenuation ratio mapping relationship according to the second calibration energy value and the third calibration energy value corresponding to each calibration rotation angle.

Images