Laser System

Abstract

The present application discloses a laser system, which relates to the field of laser equipment technology. The laser system includes a planar array light source and a beam shaping mechanism, and the beam shaping mechanism is used to shape the light beam emitted by the planar array light source; the planar array light source includes a plurality of bar groups arranged in an array, each bar group is arranged in parallel through a circuit, each bar group includes a plurality of bars, and a plurality of bars in the same bar group are arranged in series. In this embodiment, a plurality of bars in a bar group are arranged in series, and each bar is powered by the same line, so the amount of line settings can be reduced. Therefore, the laser system provided in the embodiment of the present application can achieve high-power output without causing excessive complexity of the line, thereby ensuring yield and assembly and maintenance efficiency. Furthermore, by improving the beam shaping mechanism, the laser system has better beam quality and stability.

Description

Technical Field

[0001] The present application relates to the technical field of laser equipment, and in particular to a laser system. Background Art

[0002] In a laser system, a pump source is used to irradiate the gain medium, transferring energy to the gain medium, causing atoms or molecules in the gain medium to transition from the ground state to the excited state. When an atom or molecule in an excited state is irradiated by a photon that matches the energy difference between the excited state and the ground state, it is forced to transition to the ground state and emit a photon identical to the incident photon. This process is called stimulated emission, and stimulated emission forms a laser. At present, the output power of laser systems on the market is very limited, and it is difficult to meet the demand for high-power output. If a large number of bars are combined together, the circuit will be complicated, and assembly and maintenance will be very inconvenient, thus hindering the increase in the output power of the laser system. Summary of the invention

[0003] The purpose of the present application includes providing a laser system that can have a large output power and is easy to assemble and maintain.

[0004] The embodiments of the present application can be implemented as follows:

[0005] The present application provides a laser system, which is applied to a laser system. The laser system includes a planar array light source and a beam shaping mechanism, and the beam shaping mechanism is used to shape a beam emitted by the planar array light source;

[0006] The area array light source includes a plurality of bar groups arranged in an array, each bar group is arranged in parallel through a circuit, each bar group includes a plurality of bars, and a plurality of bars in the same bar group are arranged in series.

[0007] In an optional embodiment, a plurality of bar groups are arranged in an array of M rows and N columns, and the circuit includes M first power supply lines and N second power supply lines that are cross-arranged, the M first power supply lines correspond one-to-one to the M rows of bar groups, and each bar group belonging to the same row is connected to the same first power supply line, the N second power supply lines correspond one-to-one to the N columns of bar groups, and each bar group belonging to the same column is connected to the same second power supply line, the first power supply line and the second power supply line are used to connect to a power supply, and each bar group can form a loop with the power supply through the first power supply line and the second power supply line to which it is connected; wherein M and N are both integers greater than 1.

[0008] In an optional embodiment, 3≤M≤10, 3≤N≤10;

[0009] and / or, each bar group includes 2 to 50 bars;

[0010] And / or, the peak power of a single bar is 100~500W.

[0011] In an optional embodiment, the spacing between two adjacent rows of bar groups is 3-10 mm, the spacing between two adjacent columns of bar groups is 3-10 mm, and the spacing between bars in the same bar group is 1-2 mm.

[0012] In an optional implementation, each bar group is connected to the first power supply line and the second power supply line via a voltage comparator or a relay.

[0013] In an optional embodiment, the beam shaping mechanism includes a fast-axis shaping component and a slow-axis shaping component.

[0014] In an optional embodiment, the slow axis shaping assembly includes a front lens group and a rear lens group arranged at intervals along the extension direction of the optical axis, and the number of lenses in the front lens group and the rear lens group are equal.

[0015] In an optional embodiment, the front lens group includes a first lens and a second lens arranged along the extension direction of the optical axis, and the rear lens group includes a third lens and a fourth lens arranged along the extension direction of the optical axis, and the first lens, the second lens, the third lens and the fourth lens are all positive lenses.

[0016] In an optional embodiment, the first lens, the second lens, the third lens and the fourth lens are all cylindrical lenses.

[0017] In an optional embodiment, the first lens and the second lens have the same structure and are connected in the extension direction of the optical axis, and the third lens and the fourth lens have the same structure and are connected in the extension direction of the optical axis.

[0018] In an optional implementation, the focal lengths of the first lens and the second lens are both 500-700 mm; the focal lengths of the third lens and the fourth lens are both 400-600 mm.

[0019] In an optional embodiment, the number of lenses in the slow axis shaping assembly is determined based on the beam parameter product and the requirements for the diffuse spot size of the edge field of view; wherein the beam parameter product BPP=W×θ, W is the beam waist radius, and θ is the far-field divergence half angle of the beam.

[0020] In an optional embodiment, the slow-axis shaping component includes a front lens group and a rear lens group, and the fast-axis shaping component includes a D-type lens array, a fifth lens and a sixth lens, and the D-type lens array, the fifth lens, the front lens group, the sixth lens and the rear lens group are arranged in sequence along the extension direction of the optical axis; the D-type lens array includes a plurality of D-type lenses corresponding one by one to the bars in the planar array light source, each D-type lens is used to collimate the light beam emitted by the corresponding bar, the fifth lens has a positive optical focal length, the sixth lens has a negative optical focal length, the fifth lens is arranged between the D-type lens array and the sixth lens, and the fifth lens and the sixth lens are used to shrink the light beam collimated by the D-type lens array.

[0021] In an optional implementation, the focal length of the fifth lens is 500-1000 mm, and the focal length of the sixth lens is -100--500 mm.

[0022] The beneficial effects of the laser system provided by the embodiment of the present application include:

[0023] The laser system provided by the embodiment of the present application includes a planar array light source and a beam shaping mechanism, and the beam shaping mechanism is used to shape the light beam emitted by the planar array light source; the planar array light source includes a plurality of bar groups arranged in an array, each bar group is arranged in parallel through a circuit, each bar group includes a plurality of bars, and a plurality of bars in the same bar group are arranged in series. In this embodiment, a plurality of bars in a bar group are arranged in series, and when assembling the laser system, the assembly of each bar group can be completed first, and then each bar group can be arranged in an array. Each bar in the same bar group is powered by the same line, so the number of lines can be reduced. When a bar is damaged, only the bar group to which it belongs is affected, and the use of the remaining bar groups is not affected. Only the bar group to which the damaged bar belongs needs to be maintained. It can be seen that the planar array light source of the laser system provided by the embodiment of the present application can contain a large number of bars to achieve high-power output (up to 100,000 watts); at the same time, it will not cause excessive complexity of the line, affecting the yield and assembly and maintenance efficiency. Furthermore, by cross-setting the first power supply line and the second power supply line, the amount of lines required for parallel connection of each bar group can be further reduced, and simplifying the line design can further improve the product yield and reduce the difficulty of assembly and maintenance. Furthermore, by setting the slow axis shaping component in the laser system to a front lens group and a rear lens group that are symmetrical in number, a double telecentric objective lens structure is formed, thereby improving the collimation ability in the slow axis direction, effectively controlling the beam divergence angle, and improving the stability and beam quality of the laser system. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0025] Figure 1 This is a schematic diagram of the structure of a laser system in one embodiment of the present application;

[0026] Figure 2 This is a schematic diagram of the arrangement of the bar groups and lines in the area array light source in one embodiment of the present application;

[0027] Figure 3 This is a schematic diagram of a slow axis shaping component in one embodiment of the present application;

[0028] Figure 4 This is a schematic diagram of a D-type lens in an embodiment of the present application;

[0029] Figure 5 A schematic diagram of a light spot of a laser system in one embodiment of the present application;

[0030] Figure 6 A slow axis light intensity distribution curve of a light beam emitted by a laser system in one embodiment of the present application;

[0031] Figure 7 This is a fast-axis light intensity distribution curve of a light beam emitted by a laser system in one embodiment of the present application.

[0032] Icons: 100-array light source; 110-bar group; 120-first power supply line; 130-second power supply line; 200-fast axis shaping assembly; 210-D-type lens array; 211-D-type lens; 220-fifth lens; 230-sixth lens; 300-slow axis shaping assembly; 310-front lens group; 311-first lens; 312-second lens; 320-rear lens group; 321-third lens; 322-fourth lens. DETAILED DESCRIPTION

[0033] The laser system uses a single bar as a semiconductor light source, and its output power is very limited. In order to increase the output power of the laser system, if multiple bars are used to form a light source, as the number of bars increases, there will be problems such as complex circuits, reduced yield, and inconvenient assembly and maintenance. This leads to a limit on the number of bars in the array light source, which in turn limits the output power of the laser system. Therefore, the output power of the laser system in the related art still needs to be improved.

[0034] In response to the above problems, an embodiment of the present application provides a laser system, in which the planar array light source includes a plurality of bar groups connected in parallel, and each bar group includes a plurality of bars connected in series. Therefore, it is possible to have a relatively simple circuit structure even when there are a large number of bars, while taking into account the high output power of the laser system and the convenience of assembly and maintenance.

[0035] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0036] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for protection, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present application.

[0037] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0038] In the description of the present application, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. appear to indicate an orientation or position relationship, it is based on the orientation or position relationship shown in the drawings, or is the orientation or position relationship in which the product of the invention is usually placed when used. It is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0039] In addition, the terms “first”, “second”, etc., if used, are merely used to distinguish between the descriptions and should not be understood as indicating or implying relative importance.

[0040] It should be noted that, in the absence of conflict, the features in the embodiments of the present application may be combined with each other.

[0041] Figure 1 FIG. 1 is a schematic diagram of the structure of a laser system in one embodiment of the present application. Figure 1As shown, the laser system provided in the embodiment of the present application includes a planar array light source 100 and a beam shaping mechanism, and the beam shaping mechanism is used to shape the light beam emitted by the planar array light source 100. It can be understood that when the light beam generated by the planar array light source 100 is incident on the gain medium (such as crystals such as neodymium-doped yttrium aluminum garnet, titanium sapphire, etc.), it is generally necessary to shape it so that the light beam is adapted to the gain medium and the absorption efficiency of the gain medium is improved. Specifically, the beam shaping mechanism includes a fast axis shaping component 200 and a slow axis shaping component 300. The planar array light source 100, the fast axis shaping component 200 and the slow axis shaping component 300 are arranged on the optical axis (dashed line L in the figure), the fast axis shaping component 200 is used to shape the light beam emitted by the planar array light source 100 in the fast axis direction, and the slow axis shaping component 300 is used to shape the light beam after passing through the fast axis shaping component 200 in the slow axis direction.

[0042] In the embodiment of the present application, the surface array light source 100 includes a plurality of bar groups 110 arranged in an array, each bar group 110 is arranged in parallel through a circuit, each bar group 110 includes a plurality of bars, and a plurality of bars in the same bar group 110 are arranged in series. A bar is usually composed of a plurality of laser chips, and a plurality of laser chips are arranged in a straight line to form a bar, and the bar can convert electrical energy into light energy for output. Optionally, the peak power of a single bar is 100-500W; the wavelength of the bar can be selected to be 800-1000nm. Optionally, each bar group 110 includes 2-50 bars.

[0043] Figure 2 FIG. 1 is a schematic diagram of the arrangement of the bar groups 110 and the lines in the area array light source 100 in one embodiment of the present application. Figure 2 As shown, in this embodiment, a plurality of bar groups 110 are arranged in an array of M rows and N columns, and the circuit includes M first power supply lines 120 and N second power supply lines 130 arranged crosswise, the M first power supply lines 120 correspond one-to-one with the M rows of bar groups 110, and each bar group 110 belonging to the same row is connected to the same first power supply line 120, and the N second power supply lines 130 correspond one-to-one with the N columns of bar groups 110, and each bar group 110 belonging to the same column is connected to the same second power supply line 130, wherein M and N are both integers greater than 1. In an optional embodiment, 3≤M≤10, 3≤N≤10.

[0044] By arranging a plurality of bar groups 110 in a rectangular array, the uniformity of light emission can be improved, and a rectangular light spot can be formed. In addition, in the present embodiment, each bar group 110 in the same row is connected to the same first power supply line 120, and each bar group 110 in the same column is connected to the same second power supply line 130, which can significantly simplify the circuits, avoid the problems of complex structure, increased volume, reduced yield, inconvenient assembly and maintenance caused by too many circuits, and on the other hand, it also provides favorable conditions for using more bars in the area array light source 100. In the present embodiment, the first power supply line 120 and the second power supply line 130 are both used to connect to a power supply (not shown in the figure), so that any bar group 110 can be connected to the power supply through the first power supply line 120 and the second power supply line 130 to form a loop to achieve light emission.

[0045] In other optional embodiments, each bar group 110 may also be connected to a separate line and power supply.

[0046] The above-mentioned area array light source 100 can not only achieve high-power light output, but also facilitate assembly and maintenance. For example, during assembly, each bar group 110 can be assembled separately, and then the bar groups 110 can be arranged in an array and connected to the circuit, thereby improving assembly efficiency and yield. When a bar is damaged, since the bar groups 110 are connected in parallel, only the bar group 110 where the damaged bar is located needs to be replaced or repaired, and the use of other bar groups 110 is not affected, thereby improving maintenance efficiency.

[0047] In a specific embodiment of the present application, M is 6, N is 7, and each bar group 110 includes 26 bars. Therefore, the area array light source 100 in this embodiment includes a total of 1092 bars, and the total power of the area array light source 100 can reach more than 500,000 watts.

[0048] Optionally, in this embodiment, the 95% energy fast-axis divergence angle of a single bar can be 40°~60°, and the 95% energy slow-axis divergence angle can be 8°~15°; the fast-axis Gaussian factor can be 1.1~2; the slow-axis Gaussian factor can be 1.1~9; the intrinsic astigmatism of the bar can be 0.001~0.5mm, and the length of the bar is 10mm.

[0049] Optionally, the spacing between two adjacent rows of bar groups 110 is 3-10 mm, the spacing between two adjacent columns of bar groups 110 is 3-10 mm, and the spacing between bars in the same bar group 110 is 1-2 mm. The spacing between bars and the spacing between bar groups 110 will affect the thermal management of the laser system. A larger spacing can provide better heat dissipation space, reduce heat accumulation, and improve the stability and life of the laser system. Appropriate spacing can ensure uniform heat distribution and avoid local overheating. From the perspective of beam quality, a smaller spacing can make the beams of adjacent bars overlap better, forming a more uniform beam distribution and improving beam quality. From the packaging perspective, a smaller spacing can increase the packaging density of the array light source 100, which is suitable for high power density applications; while a larger spacing can reduce the requirements for assembly accuracy and simplify the manufacturing process. In short, the spacing between bars and the spacing between bar groups 110 should be comprehensively considered based on the difficulty of process implementation and the performance requirements of the laser system. In this embodiment, the spacing between bars in the same bar group 110 refers to the center spacing between adjacent bars; and the spacing between two adjacent columns of bar groups 110 and the spacing between two adjacent rows of bar groups 110 refer to the gap size therebetween.

[0050] Optionally, each bar group 110 is connected to the first power supply line 120 and the second power supply line 130 via a voltage comparator or a relay. With such a configuration, each bar group 110 can be powered separately, and the circuit structure is simple and the process implementation difficulty is low.

[0051] In the embodiment of the present application, the slow axis shaping component 300 is a double telecentric objective lens structure. The double telecentric objective lens structure has a strong collimation capability, can effectively control the beam divergence angle, improve the stability of the laser system, and improve the beam quality. Figure 3 FIG. 3 is a schematic diagram of a slow axis shaping component 300 in one embodiment of the present application. Figure 3 As shown, optionally, the slow axis shaping assembly 300 includes a front lens group 310 and a rear lens group 320 arranged at intervals along the extension direction of the optical axis L, and the front lens group 310 is arranged between the fast axis shaping assembly 200 and the rear lens group 320. In this embodiment, the number of lenses of the front lens group 310 and the rear lens group 320 is equal, and the symmetry of the two in number can significantly reduce aberrations.

[0052] There is a definition of field of view in the optical system. Under finite conjugate distance, the height of the object is usually used as the field of view. For example, if the object is 10 mm high, this 10 mm is the field of view size. The edge field of view refers to the highest point of the object, that is, the luminous point of 10 mm. The 0.8 field of view refers to the 8 mm field of view, and so on. In the field of optical devices, the beam parameter product (BPP, in mm·mrad) is a parameter used to characterize the quality of the beam. It is defined as BPP=W×θ, where W is the beam waist radius in mm and θ is the far-field divergence half angle of the beam in mrad. The larger the beam parameter product BPP, the larger the edge field of view. The larger the edge field of view, the more difficult it is to control the edge spherical aberration, and the more difficult it is to shape it. More lenses may be used to achieve the desired shaping effect.

[0053] In this embodiment, the slow axis beam waist is about 45.5mm, the far field divergence half angle is about 87.5mrad, and the technical indicator is to shape the slow axis spot to a radius of 40mm, that is, the magnification of the slow axis shaping component 300 needs to be 0.88. It should be understood that the number of lenses in the slow axis shaping component 300 is not fixed and is subject to the image quality evaluation. For example, in this embodiment, the diffuse spot size of the edge field of view is required to be <0.9mm, and only four lenses are required under this requirement. If the diffuse spot size of the edge field of view is required to be <0.5mm, more lenses may be required. Therefore, the number of lenses in the slow axis shaping component 300 is determined according to the beam parameter product and the requirements for the diffuse spot size of the edge field of view.

[0054] In this embodiment, the front lens group 310 includes a first lens 311 and a second lens 312 arranged along the extension direction of the optical axis L, and the rear lens group 320 includes a third lens 321 and a fourth lens 322 arranged along the extension direction of the optical axis L, and the first lens 311, the second lens 312, the third lens 321 and the fourth lens 322 are all positive lenses. In other embodiments, the arrangement of the multiple lenses in the slow axis shaping assembly 300 can be reasonably adjusted according to factors such as lens material, air space, mechanical tube length, aberration index, etc.

[0055] In this embodiment, the first lens 311 and the second lens 312 have the same structure and are connected in the extension direction of the optical axis, and the third lens 321 and the fourth lens 322 have the same structure and are connected in the extension direction of the optical axis. Further, the first lens 311, the second lens 312, the third lens 321 and the fourth lens 322 in this embodiment are all positive lenses. Further, the first lens 311, the second lens 312, the third lens 321 and the fourth lens 322 are all cylindrical lenses, and the refractive index is 1.46 and the Abbe number is 67.8. Optionally, the first lens 311, the second lens 312, the third lens 321 and the fourth lens 322 are all made of quartz glass. The first lens 311 and the second lens 312 are designed as a close contact structure, and the third lens 321 and the fourth lens 322 are designed as a close contact structure, which can reduce the error caused by the composition tolerance.

[0056] Furthermore, in the present embodiment, on two opposite sides in the optical axis direction of the first lens 311 and the second lens 312, one side is a plane facing the fast axis shaping component 200, and the other side is a convex cylindrical surface facing the rear lens group 320; on two opposite sides in the optical axis direction of the third lens 321 and the fourth lens 322, one side is a plane facing away from the front lens group 310, and the other side is a convex cylindrical surface facing the front lens group 310.

[0057] Optionally, the focal lengths of the first lens 311 and the second lens 312 are both 500-700 mm; the focal lengths of the third lens 321 and the fourth lens 322 are both 400-600 mm.

[0058] In a specific embodiment of the present application, the slow axis emitting surface of the array light source 100 is 91 mm, that is, the object height y=91 mm, and after shaping it is 80 mm, that is, the image height is y'=80 mm, and the system magnification B=-y' / y=-f 后 / f 前 =-0.88, where the negative sign represents inverted imaging. In this embodiment, the back intercept is required to be ≥250mm, that is, f 后 ≥250mm, set f 后 =250mm, then the formula gives f 前 =284.1mm. This parameter is the initial parameter of the front lens group 310 and the rear lens group 320. Suppose the slow axis divergence angle is θ=10°@1 / e 2 , that is, object square N A=n×sinθ=0.174 (n is the refractive index of air). The wavelength of the array light source 100 is 796nm. Two sets of lenses with focal lengths of 250mm and 295.5mm are brought into the software, and the tube length is set to be less than 500mm, the aberration is minimized, and the telecentricity is controlled to allow the software (such as ZEMAX, CODEV, etc.) to automatically optimize. Finally, the focal lengths of the first lens 311 and the second lens 312 are 636.8mm, and the focal lengths of the third lens 321 and the fourth lens 322 are 517.88mm.

[0059] Further, in the present embodiment, the fast axis shaping assembly 200 includes a D-type lens array 210, a fifth lens 220 and a sixth lens 230. The D-type lens array 210, the fifth lens 220, the front lens group 310, the sixth lens 230 and the rear lens group 320 are arranged in sequence along the extension direction of the optical axis. The D-type lens array 210 includes a plurality of D-type lenses 211 corresponding to the bars in the planar array light source 100, and each D-type lens 211 is used to collimate the light beam emitted by the corresponding bar. The fifth lens 220 has a positive optical focal length, and the sixth lens 230 has a negative optical focal length. The fifth lens 220 is disposed between the D-type lens array 210 and the sixth lens 230. Therefore, the fifth lens 220 and the sixth lens 230 constitute an inverted Galilean beam expansion system. In the present embodiment, the fifth lens 220 and the sixth lens 230 are used to reduce the light beam collimated by the D-type lens array 210.

[0060] Figure 4 FIG. 2 is a schematic diagram of a D-type lens 211 in an embodiment of the present application. Figure 4 As shown, one side of the D-type lens 211 is a plane facing the bars on the planar array light source 100, and the other side is a convex cylindrical surface facing the fifth lens 220. Each D-type lens 211 is arranged in an array on a preset plane, which is perpendicular to the optical axis L.

[0061] In this embodiment, the fifth lens 220 is a positive cylindrical lens, whose convex cylindrical surface faces the D-type lens array 210 and whose plane faces the sixth lens 230; the sixth lens 230 is a negative cylindrical lens, whose plane faces the fifth lens 220 and whose concave cylindrical surface faces the slow axis shaping component 300.

[0062] Optionally, the focal length of the fifth lens 220 is 500-1000 mm, and the focal length of the sixth lens 230 is -100--500 mm. In this embodiment, the light beam emitted by the planar array light source 100 is shaped by the fast axis shaping component 200 to form a collimated light beam, and its beam divergence angle is <0.2°.

[0063] Figure 5 A schematic diagram of a light spot of a laser system in one embodiment of the present application; Figure 6A slow axis light intensity distribution curve of a light beam emitted by a laser system in one embodiment of the present application; Figure 7 This is a fast axis intensity distribution curve of a light beam emitted by a laser system in one embodiment of the present application. Figures 5 to 7 As shown, in the embodiment of the present application, the light beam of the planar array light source 100 forms a square light spot with a uniformity greater than 0.95 after passing through the fast axis shaping component 200 and the slow axis shaping component 300, and the side length of the light spot size can be 40mm~100mm. The slow axis light intensity distribution and the fast axis light intensity distribution are both relatively uniform.

[0064] In summary, the laser system provided by the embodiment of the present application includes a planar array light source 100 and a beam shaping mechanism, and the beam shaping mechanism is used to shape the light beam emitted by the planar array light source 100; the planar array light source 100 includes a plurality of bar groups 110 arranged in an array, each bar group 110 is arranged in parallel through a circuit, each bar group 110 includes a plurality of bars, and a plurality of bars in the same bar group 110 are arranged in series. In this embodiment, a plurality of bars in the bar group 110 are arranged in series. When assembling the laser system, the assembly of each bar group 110 can be completed first, and then each bar group 110 can be arranged in an array. Each bar in the same bar group 110 is powered by the same line, so the number of lines can be reduced. When a bar is damaged, only the bar group 110 in which it is located is affected, and the use of the other bar groups 110 is not affected. Only the bar group 110 in which the damaged bar is located needs to be maintained. It can be seen that the planar array light source 100 of the laser system provided in the embodiment of the present application can contain a large number of bars to achieve high-power output (up to 100,000 watts); at the same time, it will not cause excessive complexity of the circuit, affecting the yield and assembly and maintenance efficiency. Furthermore, by cross-setting the first power supply line 120 and the second power supply line 130, the amount of lines required for the parallel connection of each bar group 110 can be further reduced, and the simplified circuit design can further improve the product yield and reduce the difficulty of assembly and maintenance. Furthermore, by setting the slow axis shaping component 300 in the laser system to be a front lens group 310 and a rear lens group 320 that are symmetrical in number, a double telecentric objective lens structure is formed, thereby improving the collimation ability in the slow axis direction, effectively controlling the beam divergence angle, and improving the stability and beam quality of the laser system.

[0065] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by any technician familiar with the technical field within the technical scope disclosed in the present application should be included in the protection scope of the present application.

Claims

1. A laser system, characterized in that: The laser system comprises a planar array light source (100) and a beam shaping mechanism, wherein the beam shaping mechanism is used to shape the light beam emitted by the planar array light source (100); The planar array light source (100) comprises a plurality of bar groups (110) arranged in an array, each of the bar groups (110) being arranged in parallel via a circuit, each of the bar groups (110) comprising a plurality of bars, and a plurality of the bars in the same bar group (110) being arranged in series; The beam shaping mechanism comprises a fast axis shaping component (200) and a slow axis shaping component (300), wherein the slow axis shaping component (300) comprises a front lens group (310) and a rear lens group (320) arranged at intervals along an extension direction of the optical axis, and the number of lenses in the front lens group (310) and the number of lenses in the rear lens group (320) are equal; The fast axis shaping component (200) comprises a D-type lens array (210), a fifth lens (220) and a sixth lens (230); the D-type lens array (210), the fifth lens (220), the front lens group (310), the sixth lens (230) and the rear lens group (320) are sequentially arranged at intervals along the extension direction of the optical axis; the fifth lens (220) and the sixth lens (230) are used to reduce the light beam collimated by the D-type lens array (210).

2. The laser system according to claim 1, characterized in that A plurality of the bar groups (110) are arranged in an array of M rows and N columns, the circuit comprising M first power supply lines (120) and N second power supply lines (130) arranged crosswise, the M first power supply lines (120) corresponding one-to-one to the M rows of the bar groups (110), the bar groups (110) belonging to the same row are connected to the same first power supply line (120), the N second power supply lines (130) corresponding one-to-one to the N columns of the bar groups (110), the bar groups (110) belonging to the same column are connected to the same second power supply line (130), the first power supply line (120) and the second power supply line (130) are used to connect to a power source, and each bar group (110) can form a loop with the power source through the first power supply line (120) and the second power supply line (130) connected thereto; wherein M and N are both integers greater than 1.

3. The laser system according to claim 2, characterized in that 3≤M≤10, 3≤N≤10; And / or, each of the bar groups (110) comprises 2 to 50 bar groups; And / or, the peak power of a single bar is 100-500W.

4. The laser system according to claim 2, characterized in that The spacing between two adjacent rows of the bar groups (110) is 3-10 mm, the spacing between two adjacent columns of the bar groups (110) is 3-10 mm, and the spacing between the bar groups in the same bar group (110) is 1-2 mm.

5. The laser system according to claim 2, characterized in that Each of the bar groups (110) is connected to the first power supply line (120) and the second power supply line (130) via a voltage comparator or a relay.

6. The laser system according to any one of claims 1 to 5, characterized in that: The front lens group (310) includes a first lens (311) and a second lens (312) arranged along the extension direction of the optical axis, and the rear lens group (320) includes a third lens (321) and a fourth lens (322) arranged along the extension direction of the optical axis, and the first lens (311), the second lens (312), the third lens (321) and the fourth lens (322) are all positive lenses.

7. The laser system according to claim 6, characterized in that The first lens (311), the second lens (312), the third lens (321) and the fourth lens (322) are all cylindrical lenses.

8. The laser system according to claim 6, characterized in that The first lens (311) and the second lens (312) have the same structure and are connected in the extension direction of the optical axis, and the third lens (321) and the fourth lens (322) have the same structure and are connected in the extension direction of the optical axis.

9. The laser system according to claim 6, characterized in that The focal lengths of the first lens (311) and the second lens (312) are both 500-700 mm; and the focal lengths of the third lens (321) and the fourth lens (322) are both 400-600 mm.

10. The laser system according to any one of claims 1 to 5, characterized in that: The number of lenses in the slow axis shaping component (300) is determined according to the beam parameter product and the requirement for the diffuse spot size of the edge field of view; wherein the beam parameter product BPP=W×θ, W is the beam waist radius, and θ is the far-field divergence half angle of the beam.

11. The laser system according to any one of claims 1 to 5, characterized in that: The D-type lens array (210) comprises a plurality of D-type lenses (211) corresponding one-to-one to the bars in the planar array light source (100); each of the D-type lenses (211) is used to collimate a light beam emitted by the corresponding bar; the fifth lens (220) has a positive optical focal length; the sixth lens (230) has a negative optical focal length; and the fifth lens (220) is arranged between the D-type lens array (210) and the sixth lens (230).

12. The laser system according to claim 11, characterized in that The focal length of the fifth lens (220) is 500-1000 mm, and the focal length of the sixth lens (230) is -100--500 mm.

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