Chip original film cutting device

Abstract

The invention discloses a chip original film cutting device, and relates to the technical field of chip film pasting. The invention arranges two first electric slide rails and two second electric slide rails arranged side by side on both sides of a replacement mechanism, and by means of the rotation of a crossbeam and the grasping of a gripper assembly, the chip transported on the first electric slide rail and the second electric slide rail can be replaced by 180 degrees, and finally an X-shaped loading and unloading track is formed. The two first electric slide rails and the second electric slide rails on the left and right sides are started at the same time, and the chips can be transported in the same direction at the same time, forming a chasing loading and unloading mode, which can greatly improve the efficiency of the chip original from right to left and the film pasting chip from left to right, and the loading and unloading operations are carried out synchronously without interfering with each other, so that the film pasting processing of the chip original can be carried out continuously and uninterruptedly, which is conducive to greatly improving the efficiency of the chip original film pasting processing.

Description

Technical Field

[0001] The invention relates to the field of chip film pasting, and in particular to a chip original film pasting and cutting device. Background Art

[0002] When processing the chip original wafer, it usually needs to be film-laminated. The photosensitive film is laminated to the upper surface of the chip original wafer by pressing and laminating, and the film-laminated chip that meets the requirements is obtained after cutting.

[0003] In the prior art, the loading and unloading of chips for film lamination is usually achieved by the reciprocating movement of the sliding end of an electric slide rail. Before laminating the chip wafer, it is necessary not only to remove dust and clean the upper surface of the chip wafer, but also to heat the upper surface of the chip wafer. In order to facilitate the above operations during the loading process, a sufficiently long moving track needs to be set for the loading of the chip wafer. However, since a single electric slide rail can only load and unload one chip at a time, the subsequent chip wafer cannot be loaded if the unloading of a single chip is not completed, resulting in a long interval between the lamination of two adjacent chips, which in turn affects the efficiency of the chip wafer lamination process.

[0004] Therefore, a chip original film cutting device is proposed to solve some problems existing in the prior art. Summary of the invention

[0005] The purpose of the present invention is to solve the problem in the prior art that the interval between two adjacent chips during chip film pasting processing is too long due to the influence of loading and unloading conveying, resulting in low chip film pasting processing efficiency, and to propose a chip original film pasting cutting device.

[0006] In order to solve the problems existing in the prior art, the present invention adopts the following technical solutions:

[0007] The chip original film cutting device comprises a workbench, two first electric slide rails arranged horizontally on the right side are fixed side by side on the top center line of the workbench, two second electric slide rails arranged horizontally on the left side are fixed side by side on the top center line of the workbench, and the first electric slide rail and the second electric slide rail are fixedly installed with a first circular plate on the sliding ends, the first circular plate is butted with the second circular plate, and the top of the second circular plate is fixedly installed with a platform, a replacement mechanism arranged between the first electric slide rail and the second electric slide rail is fixedly installed on the top of the workbench, and the replacement mechanism comprises a base vertically fixed to the top of the workbench, a slide frame is slidably installed on the outer side of the base, a vertically arranged first electric push rod is fixedly installed on the base, and the telescopic end of the first electric push rod is fixedly connected to the slide frame, and the slide A crossbeam is rotatably installed on the top of the frame, and gripper assemblies symmetrically arranged about the central axis are installed at both ends of the crossbeam. A feeding mechanism arranged above two second electric slide rails is installed on the top left side of the workbench, and the feeding mechanism includes a first bracket fixedly connected to the top of the workbench, and a frame is installed on the feeding mechanism, a longitudinally arranged photosensitive film roll and a guide roller arranged below the photosensitive film roll are rotatably installed on the frame, a traction mechanism horizontally arranged on the left side of the guide roller is installed on the frame, a pressing mechanism arranged on the left side of the first bracket is installed on the workbench, and the pressing mechanism includes a second bracket fixedly installed on the top of the workbench, a vertically arranged second electric push rod is installed on the second bracket, and a first pressure plate is fixedly installed on the telescopic end below the second electric push rod.

[0008] Preferably, a plug hole is provided on the top of the first circular plate, and a plug rod matching the plug hole is fixedly installed on the bottom of the second circular plate, and the first circular plate and the second circular plate are magnetically attracted to each other.

[0009] Preferably, the gripper assembly includes a connecting frame fixedly mounted at the end of the cross beam, and a vertically arranged rotating shaft is rotatably mounted in the connecting frame, a connecting plate arranged below the connecting frame is fixedly mounted at the bottom end of the rotating shaft, and L-shaped rods symmetrically arranged about the central axis are fixedly mounted below both ends of the connecting plate, the distance between the two L-shaped rods is adapted to the outer diameter of the second circular plate, and a transmission belt is provided for transmission connection between the rotating shafts in the two gripper assemblies.

[0010] Preferably, the width of the photosensitive film on the photosensitive film roll is adapted to the width of the chip on the platform, a third electric slide rail is fixedly installed longitudinally on the top of the first bracket, the frame is fixedly installed on the sliding end of the third electric slide rail, a fifth electric slide rail is fixedly installed longitudinally on the top of the second bracket, and the second electric push rod is fixedly installed on the sliding end of the fifth electric slide rail.

[0011] Preferably, the traction mechanism is arranged below the first pressure plate, and the traction mechanism includes a fourth electric slide rail transversely fixed on the frame, and a first clamp longitudinally arranged on the left side of the guide roller is fixedly installed on the sliding end of the fourth electric slide rail, the photosensitive film is inserted in the first clamp, a fixed plate arranged on the left side of the fourth electric slide rail is fixedly installed on the frame, and a second clamp corresponding to the first clamp is installed on the right side of the fixed plate.

[0012] Preferably, when the first gripper moves toward the second gripper, the rotation of the photosensitive film roll and the movement of the first gripper are started and stopped synchronously.

[0013] Preferably, a transversely arranged connecting rod is slidably inserted in the fixed plate, the second clamp is fixedly connected to the connecting rod, and a first spring fixedly connected between the fixed plate and the second clamp is movably sleeved on the outer side of the connecting rod.

[0014] Preferably, a cutting mechanism is installed on the side of the top of the platform close to the replacement mechanism, and the cutting mechanism includes a mounting base longitudinally fixed on the platform, a cutting knife is fixedly installed on the top of the mounting base, a vertically arranged third electric push rod is fixedly installed on the second electric push rod, and a second pressure plate longitudinally arranged directly above the cutting knife is fixedly installed on the telescopic end below the third electric push rod.

[0015] Preferably, a protective cover sleeved above the cutting knife is slidably mounted on the mounting seat, and a through slot adapted to the cutting knife is provided on the top of the protective cover, and a second spring elastically supported below the protective cover is fixedly mounted on the top of the mounting seat.

[0016] Preferably, a third bracket arranged above the first electric slide rail is fixedly installed on the top of the workbench, and a longitudinally arranged dust removal roller is rotatably installed in the third bracket, the rotation direction of the dust removal roller is adapted to the moving direction of the platform on the first electric slide rail, and the rotation speed of the dust removal roller is adapted to the moving speed of the platform on the first electric slide rail, and a fourth bracket arranged above the second electric slide rail is fixedly installed on the top of the workbench, and longitudinally arranged rollers are rotatably installed on both sides of the left and right sides of the fourth bracket, an annular belt is jointly sleeved on the outer sides of the two rollers, and a heating wire is built into the annular belt, the rotation direction of the annular belt is adapted to the moving direction of the platform on the second electric slide rail, and the rotation speed of the annular belt is adapted to the moving speed of the platform on the second electric slide rail.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] 1. In the present invention, two first electric slides and two second electric slides are arranged side by side on both sides of the replacement mechanism, and the chips transported on the first electric slide and the second electric slide can be replaced by 180° by means of the rotation of the crossbeam and the grasping of the gripper assembly, and finally an X-shaped loading and unloading track is formed. The two first electric slides and the second electric slides on the left and right sides are started at the same time, and the chips can be transported in the same direction at the same time, forming a chasing loading and unloading mode, which can greatly improve the efficiency of the chip original from right to left and the film chip from left to right, and the loading and unloading operation and the pressing film can be carried out simultaneously without interfering with each other, so that the film processing of the chip original can be carried out continuously and uninterruptedly, which is conducive to greatly improving the efficiency of the film processing of the chip original;

[0019] 2. In the present invention, by setting the platform and the second circular plate in a separable state, when the replacement mechanism replaces the chip, the gripping action of the gripper assembly is on the platform, avoiding the direct application of the force on the chip, which is conducive to ensuring the stability and safety of the chip when it is replaced between the first electric slide rail and the second electric slide rail. At the same time, by means of the magnetic attraction between the first circular plate and the second circular plate, and the plugging of the plug rod and the plug hole, the stability of the platform connected to the sliding ends of the first electric slide rail and the second electric slide rail can be effectively improved;

[0020] 3. In the present invention, by setting the width of the photosensitive film on the photosensitive film roll to match the width of a single chip original sheet, the photosensitive film and the chip original sheet can be more compatible, which is conducive to improving the convenience of film pasting and avoiding waste caused by excessive cutting of the photosensitive film. At the same time, by providing the third electric slide rail and the fifth electric slide rail, the photosensitive film and the first pressing plate can move forward and backward, which is conducive to flexible adjustment of the film pasting position according to actual operation requirements;

[0021] 4. In the present invention, by elastically connecting the first spring between the fixed plate and the second clamping hand, when the first pressing plate moves downward to apply a squeezing force to the photosensitive film, the second clamping hand can move to the right, thereby preventing the photosensitive film at the bottom of the first pressing plate from being deformed and broken during the squeezing and downward movement, thereby ensuring the stability of the film lamination to a certain extent;

[0022] 5. In the present invention, by installing the cutting mechanism on the platform, the cutting knife in the cutting mechanism can be easily replaced and repaired when it is not sharp, and by arranging the protective cover above the cutting knife and elastically supporting it with the help of the second spring, the cutting knife is hidden inside the protective cover under normal conditions, which can not only protect the cutting knife, but also prevent the staff from accidentally touching the cutting knife and causing injuries, which is conducive to improving the safety of the cutting mechanism during use;

[0023] 6. In the present invention, by setting the rotation speed and rotation direction of the dust removal roller to be consistent with the moving speed and moving direction of the platform on the first electric slide rail, and setting the rotation speed and rotation direction of the endless belt to be consistent with the moving speed and moving direction of the platform on the second electric slide rail, the outer surfaces of the dust removal roller and the endless belt will not slide and rub against the upper surface of the chip, thereby avoiding wear on the upper surface of the chip during cleaning and heating during transportation, and ensuring the stability of the device during operation to a certain extent. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of this application. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0025] Figure 1 A perspective view of the present invention;

[0026] Figure 2 A top view of the present invention;

[0027] Figure 3 For the present invention Figure 2 Sectional view at AA in the middle;

[0028] Figure 4 For the present invention Figure 3 The enlarged view of point B in the middle;

[0029] Figure 5 For the present invention Figure 4 Enlarged view of point C in the middle;

[0030] Figure 6 A three-dimensional diagram of the top structure of the workbench of the present invention;

[0031] Figure 7 This is a disassembled diagram of the first circular plate and the second circular plate of the present invention;

[0032] Figure 8 It is a three-dimensional diagram of the first electric slide rail, the second electric slide rail and the replacement mechanism of the present invention;

[0033] Fig. 9 It is a three-dimensional diagram of the material discharge mechanism, the traction mechanism and the pressing mechanism of the present invention;

[0034] Fig.10 It is a three-dimensional diagram of the unloading mechanism and the traction mechanism of the present invention;

[0035] Fig.11 A three-dimensional diagram of the platform of the present invention carrying a chip passing through the bottom of the dust removal roller;

[0036] Fig.12 This is a three-dimensional diagram of the platform of the present invention carrying a chip through the bottom of the ring belt.

[0037] Serial numbers in the figure: 1, workbench; 2, first electric slide rail; 201, second electric slide rail; 202, first circular plate; 203, second circular plate; 204, platform; 205, jack; 206, plug rod; 3, replacement mechanism; 301, base; 302, slide; 303, first electric push rod; 304, crossbeam; 305, gripper assembly; 3051, connecting frame; 3052, rotating shaft; 3053, connecting plate; 3054, L-shaped rod; 306, transmission belt; 4, unloading mechanism; 401, first bracket; 402, third electric slide rail; 403, frame; 404, photosensitive film reel; 405, guide roller ; 5. Traction mechanism; 501. Fourth electric slide rail; 502. First gripper; 503. Fixed plate; 504. Second gripper; 505. Connecting rod; 506. First spring; 6. Pressing mechanism; 601. Second bracket; 602. Fifth electric slide rail; 603. Second electric push rod; 604. First pressing plate; 605. Third electric push rod; 606. Second pressing plate; 7. Cutting mechanism; 701. Mounting seat; 702. Cutting knife; 703. Protective cover; 704. Through groove; 705. Second spring; 8. Third bracket; 801. Dust removal roller; 9. Fourth bracket; 901. Roller; 902. Belt. DETAILED DESCRIPTION

[0038] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0039] Embodiment: This embodiment provides a chip original film cutting device, see Figure 1 - Fig.12Specifically, it includes a workbench 1, two first electric slide rails 2 arranged horizontally on the right side are fixed side by side on the top center line of the workbench 1, two second electric slide rails 201 arranged horizontally on the left side are fixed side by side on the top center line of the workbench 1, and the sliding ends of the first electric slide rail 2 and the second electric slide rail 201 are fixedly installed with a first circular plate 202, the first circular plate 202 is connected with a second circular plate 203, and the top of the second circular plate 203 is fixedly installed with a platform 204, and the top of the workbench 1 is fixedly installed with a replacement mechanism 3 arranged between the first electric slide rail 2 and the second electric slide rail 201, and the replacement mechanism 3 includes a base 301 vertically fixed on the top of the workbench 1, a slide frame 302 is slidably installed on the outer side of the base 301, a vertically arranged first electric push rod 303 is fixedly installed on the base 301, and the telescopic end of the first electric push rod 303 is fixedly connected to the slide frame 302, and the top of the slide frame 302 rotates A crossbeam 304 is installed, and gripper assemblies 305 symmetrically arranged about the central axis are installed at both ends of the crossbeam 304. A discharge mechanism 4 arranged above two second electric slide rails 201 is installed on the top left side of the workbench 1. The discharge mechanism 4 includes a first bracket 401 fixedly connected to the top of the workbench 1, and a frame 403 is installed on the discharge mechanism 4. A longitudinally arranged photosensitive film roll 404 and a guide roller 405 arranged below the photosensitive film roll 404 are rotatably installed on the frame 403. A traction mechanism 5 horizontally arranged on the left side of the guide roller 405 is installed on the frame 403. A pressing mechanism 6 arranged on the left side of the first bracket 401 is installed on the workbench 1, and the pressing mechanism 6 includes a second bracket 601 fixedly installed on the top of the workbench 1, a vertically arranged second electric push rod 603 is installed on the second bracket 601, and a first pressing plate 604 is fixedly installed on the telescopic end below the second electric push rod 603.

[0040] During the use of the device, the two first electric slides 2 and the two second electric slides 201 installed on the top of the workbench 1 are powered on and started, and the sliding ends of the two first electric slides 2 arranged side by side on the right side move alternately, and the sliding ends of the two second electric slides 201 arranged side by side on the left side also move alternately, driving the platforms 204 connected to the first electric slides 2 and the second electric slides 201 to move alternately. When performing film lamination processing, the platform 204 connected to the sliding end of one of the first electric slides 2 moves to the rightmost position, and the staff places the chip original from the right side of the device on the platform 204 on the right side of the first electric slide 2. After the chip original is placed on the platform 204, it moves to the left under the drive of the first electric slide 2. At this time, the platform 204 connected to the sliding end of the other first electric slide 2 moves from left to right, preparing for the placement of the next chip original.

[0041] Driven by the first electric slide rail 2, the platform 204 carries the chip original piece and moves to the leftmost end of the first electric slide rail 2. At this time, the replacement mechanism 3 installed between the first electric slide rail 2 and the second electric slide rail 201 is started, and a motor is fixedly installed on the slide 302. The driving shaft of the motor is connected to the crossbeam 304 for driving the crossbeam 304 to rotate. Through the rotation of the crossbeam 304, the gripper assembly 305 installed at the end of the crossbeam 304 is aligned with the platform 204 where the chip original piece is placed. The gripper assembly 305 is located directly above the chip original piece. Then the first electric push rod 303 is powered on and started to control the slide 30 2 descends, causing the gripper assembly 305 to descend and grab the platform 204 on which the chip original is placed. After the gripper assembly 305 grabs the platform 204, the first electric push rod 303 drives the slide 302 to reset and rise, so that the platform 204 is separated from the second circular plate 203. Then the motor drives the crossbeam 304 to rotate 180° and lower the platform 204 again, transferring the platform 204 originally connected to the sliding end of the first electric slide rail 2 to the sliding end of the second electric slide rail 201, and transferring the platform 204 originally connected to the sliding end of the second electric slide rail 201 to the sliding end of the first electric slide rail 2.

[0042] After the chip original is transferred to the second electric slide rail 201, it continues to move to the left under the drive of the second electric slide rail 201, and the platform 204 on which the chip original is placed moves to the leftmost end of the second electric slide rail 201, so that the chip original is under the first pressing plate 604. In the process of the chip original moving to the left, with the guidance of the guide roller 405 and the traction of the traction mechanism 5, the photosensitive film on the photosensitive film roll 404 is flattened between the first pressing plate 604 and the chip original, and then the second electric push rod 603 is powered on to start, driving the first A pressing plate 604 moves downward to press the photosensitive film on the top of the chip original wafer to complete the film pasting process of the chip original wafer. After the film pasting is completed, the excess photosensitive film is cut off. After the film pasting is completed, the second electric slide rail 201 drives the platform 204 carrying the film-pasted chip to move right to the rightmost end of the second electric slide rail 201. Under the control of the replacement mechanism 3, the platform 204 with the film-pasted chip is transferred to the first electric slide rail 2, and then transported to the rightmost end by the first electric slide rail 2. The staff can collect the film-pasted chip at the rightmost end.

[0043] During the use of the device, the lengths of the first electric slide rail 2 and the second electric slide rail 201 are equal. Since the two side-by-side first electric slide rails 2 and the two side-by-side second electric slide rails 201 are arranged on both sides of the displacement mechanism 3, and the crossbeam 304 rotates around its center position, and gripper assemblies 305 are installed at both ends of the crossbeam 304, the whole forms a central axis symmetrical structure. With the help of the displacement mechanism 3, the platforms 204 on the sliding ends of the first electric slide rail 2 and the second electric slide rail 201 can be grasped at the same time, and rotated 180° to displace the positions, forming an X-shaped loading and unloading track, with two first electric slide rails 2 and two second electric slide rails 2 on the left and right sides. The two electric slides 201 are started at the same time, and the chips can be transported in the same direction at the same time, and finally the sliding ends of the first electric slide 2 and the second electric slide 201 form a chasing loading and unloading mode, which can greatly improve the efficiency of moving the chip original from right to left and the film-attached chip from left to right, and the two first electric slides 2 arranged side by side and the two second electric slides 201 arranged side by side are started synchronously to realize the loading and unloading operations synchronously, and the loading and unloading processes will not interfere with each other, so that the film-attaching processing of the chip original can be carried out continuously and uninterruptedly. With mutual cooperation, the efficiency of the film-attaching processing of the chip original can be greatly improved.

[0044] When the device is in use, the platform 204 and the second circular plate 203 are set to a separable state, so that when the replacement mechanism 3 replaces the chip, the gripping of the gripper assembly 305 acts on the platform 204, so no force is applied to the chip placed on the platform 204, which is beneficial to ensure the stability and safety of the chip when it is grasped.

[0045] During the use of the device, the loading and unloading operations are completed on the right side of the workbench 1, which allows the loading and unloading operations to share a robot arm, which is beneficial to reducing the cost of the device when loading and unloading. Moreover, since the first electric slide rail 2 on the right side and the second electric slide rail 201 on the left side operate independently of each other, the stagnation of the left side of the workbench 1 during film pressing will not interfere with the loading and unloading grabbing on the right side of the workbench 1. This can not only effectively ensure the overall efficiency of the device's film pressing process, but also effectively ensure the accuracy of loading and unloading grabbing and film pressing, which is beneficial to ensure the stability of the chip film processing.

[0046] In the specific implementation process, Figure 7As shown, a socket 205 is provided on the top of the first circular plate 202, and a plug rod 206 compatible with the socket 205 is fixedly installed on the bottom of the second circular plate 203. The first circular plate 202 and the second circular plate 203 are magnetically attracted to each other. During the use of the device, with the help of the magnetic attraction between the first circular plate 202 and the second circular plate 203, the platform 204 can be stably connected to the sliding ends of the first electric slide rail 2 and the second electric slide rail 201, and when the platform 204 is subjected to an upward pulling force, it can be easily separated. At the same time, with the help of the connection between the plug rod 206 and the socket 205, the connection misalignment between the first circular plate 202 and the second circular plate 203 can be avoided. With mutual cooperation, the stability of the platform 204 connected to the sliding ends of the first electric slide rail 2 and the second electric slide rail 201 can be effectively improved.

[0047] In the specific implementation process, Figure 6 and Figure 8 As shown, the gripper assembly 305 includes a connecting frame 3051 fixedly mounted at the end of the cross beam 304, and a vertically arranged rotating shaft 3052 is rotatably mounted in the connecting frame 3051, a connecting plate 3053 arranged below the connecting frame 3051 is fixedly mounted at the bottom end of the rotating shaft 3052, and L-shaped rods 3054 symmetrically arranged about the central axis are fixedly mounted below both ends of the connecting plate 3053, the distance between the two L-shaped rods 3054 is adapted to the outer diameter of the second circular plate 203, and a transmission belt 306 is transmission-connected between the rotating shafts 3052 in the two gripper assemblies 305.

[0048] During the use of the device, only one gripper assembly 305 is installed with a motor, and the motor is fixedly installed in one of the connecting frames 3051, and its drive shaft is connected to the corresponding rotating shaft 3052. When the motor drives the corresponding rotating shaft 3052 to rotate, it can drive the rotating shaft 3052 in the other gripper assembly 305 to rotate synchronously with the help of the transmission connection of the transmission belt 306. The rotating shafts 3052 in the two gripper assemblies 305 at both ends of the beam 304 are connected with the help of the transmission belt 306, so that the two gripper assemblies 305 only need to be driven by one motor, which is beneficial to reduce the use of motors and reduce the manufacturing cost of the device to a certain extent.

[0049] When the gripper assembly 305 is used to grab the platform 204, the gripper assembly 305 located below the end of the crossbeam 304 is aligned with the platform 204 on the sliding ends of the first electric slide rail 2 and the second electric slide rail 201 through the rotation of the crossbeam 304. Subsequently, the motor in the gripper assembly 305 is started, driving the rotating shaft 3052 to drive the connecting plate 3053 to rotate, so that the L-shaped rod 3054 connected at both ends of the connecting plate 3053 is aligned with the outside of the platform 204. After the first electric push rod 303 is started, the gripper assembly 305 is controlled to descend, and the bottom of the L-shaped rod 3054 is lowered to the platform 204. The L-shaped rod 3054 is rotated around the second circular plate 203, and the bottom of the L-shaped rod 3054 is hooked on the bottom of the platform 204, completing the connection between the gripper assembly 305 and the platform 204. Then, the first electric push rod 303 is started to drive the gripper assembly 305 to rise, separating the platform 204 from the sliding ends of the first electric slide rail 2 and the second electric slide rail 201. The above operation can be performed in reverse to release the gripper assembly 305 from the platform 204.

[0050] In the specific implementation process, Fig. 9 As shown, the width of the photosensitive film on the photosensitive film roll 404 is adapted to the width of the chip on the platform 204, a third electric slide rail 402 is fixedly installed on the top of the first bracket 401, a frame 403 is fixedly installed on the sliding end of the third electric slide rail 402, a fifth electric slide rail 602 is fixedly installed on the top of the second bracket 601, and a second electric push rod 603 is fixedly installed on the sliding end of the fifth electric slide rail 602. During the use of the device, since the width of the photosensitive film on the photosensitive film roll 404 is adapted to the width of a single chip original, the photosensitive film and the chip original are more adapted to each other. After the film is pasted, only the connection position needs to be cut off to achieve the separation of the film-pasted chip and the photosensitive film on the photosensitive film roll 404, which can not only effectively improve the convenience of film pasting, but also avoid the waste caused by excessive cutting of the photosensitive film.

[0051] During the film laminating process, since the width of the photosensitive film on the photosensitive film roll 404 is adapted to the width of a single chip original, it cannot be covered on the front and rear two second electric slide rails 201 at the same time, and the chip original that needs to be laminating will alternately exist on the front and rear two second electric slide rails 201, which requires the position of the photosensitive film on the photosensitive film roll 404 to be flexibly adjusted according to the input position of the chip original. During operation, the position of the frame 403 in the front and rear directions is adjusted by the third electric slide rail 402 arranged longitudinally, so that the photosensitive film unrolled from the photosensitive film roll 404 can be just in Above the chip original piece that needs to be filmed, the photosensitive film is alternately switched in position on the front and rear two second electric slide rails 201. In order to further improve the stability of pressing the film, the size of the first pressing plate 604 is set to match the size of the chip original piece on the platform 204. The telescopic end of the second electric push rod 603 is fixedly connected to the center position of the first pressing plate 604. By adjusting the sliding end of the longitudinally arranged fifth electric slide rail 602, the first pressing plate 604 can move synchronously with the photosensitive film. When pressing the film, the pressing force can be applied more stably and evenly, which is beneficial to further ensure the film sticking effect.

[0052] In the specific implementation process, Fig. 9 and Fig.10 As shown, the traction mechanism 5 is arranged below the first pressure plate 604, and the traction mechanism 5 includes a fourth electric slide rail 501 transversely fixed on the frame 403, and a first clamping hand 502 longitudinally arranged on the left side of the guide roller 405 is fixedly installed on the sliding end of the fourth electric slide rail 501, and the photosensitive film is inserted in the first clamping hand 502, and a fixed plate 503 arranged on the left side of the fourth electric slide rail 501 is fixedly installed on the frame 403, and a second clamping hand 504 corresponding to the first clamping hand 502 is installed on the right side of the fixed plate 503. When the first clamping hand 502 moves toward the second clamping hand 504, the rotation of the photosensitive film roll 404 and the movement of the first clamping hand 502 start and stop synchronously, and a transversely arranged connecting rod 505 is slidably inserted in the fixed plate 503, and the second clamping hand 504 is fixedly connected to the connecting rod 505. The outer side of the connecting rod 505 is movably sleeved with a first spring 506 fixedly connected between the fixed plate 503 and the second clamping hand 504.

[0053] During the use of the device, when the photosensitive film is spread between the first pressure plate 604 and the chip original wafer, the first clamping hand 502 is powered on and started to clamp the photosensitive film inserted inside it, and the photosensitive film protrudes on the left side of the first clamping hand 502. Then the fourth electric slide rail 501 is powered on and started, and its sliding end drives the first clamping hand 502 to move from right to left, and with the guidance of the guide roller 405, the photosensitive film pulled out from the photosensitive film roll 404 is pulled and spread between the chip original wafer and the first pressure plate 604. After the first clamping hand 502 moves to the leftmost position, the photosensitive film clamped on the inner side is sent into the second clamping hand 504, and then the second clamping hand 504 is powered on and started to clamp the photosensitive film. , thereafter, the first clamping hand 502 releases its grip on the photosensitive film and moves from left to right to the initial position under the control of the fourth electric slide rail 501. When the first clamping hand 502 moves to the initial position, it clamps the photosensitive film again, and then the first pressing plate 604 moves downward to adhere the photosensitive film to the upper surface of the chip original. After the film pasting is completed, the second clamping hand 504 releases its grip on the photosensitive film and synchronously completes the cutting of the photosensitive film on the right side of the film-pasted chip, so that the film-pasted chip is separated from the photosensitive film pulled out from the photosensitive film reel 404, and then the film-pasted chip is transported and moved out to the right, and the above operation is repeated to continuously and cyclically lay the photosensitive film flat directly under the first pressing plate 604.

[0054] A motor for driving the photosensitive film roll 404 to rotate is fixedly installed on the frame 403. When the first clamp 502 clamps the photosensitive film and moves to the left, the motor installed on the frame 403 starts synchronously to drive the photosensitive film roll 404 to rotate, thereby releasing the photosensitive film wrapped around its outside. The speed at which the photosensitive film roll 404 releases the photosensitive film is consistent with the speed at which the first clamp 502 pulls the photosensitive film to move to the left. When the first clamp 502 no longer pulls the photosensitive film to the left, the motor is turned off, and the motor has a built-in self-locking structure for the drive shaft, so that the photosensitive film roll 404 cannot rotate. The above structures cooperate with each other, so that the photosensitive film on the photosensitive film roll 404 can be more stably laid flat between the chip original and the first pressure plate 604, which helps to prevent the photosensitive film from loosening when it is released from the photosensitive film roll 404, and to a certain extent ensures the stability of the discharge mechanism 4 during operation.

[0055] When the second clamp 504 is used to clamp the photosensitive film, the first spring 506 is elastically connected between the fixed plate 503 and the second clamp 504. When the first pressure plate 604 moves downward to apply a squeezing force downward to the photosensitive film, the first clamp 502 still maintains a tight clamp on the photosensitive film. The squeezing force applied to the photosensitive film can drive the first spring 506 to be stretched to the right, so that the second clamp 504 can move to the right, thereby ensuring the stability of the bonding between the photosensitive film and the top of the chip original wafer. After the bonding is completed, the second clamp 504 releases the clamp on the photosensitive film, and with the help of the elastic reset of the first spring 506, the second clamp 504 returns to its initial position. When pressing the film, by setting the second clamp 504 to be able to move to the right appropriately, the photosensitive film at the bottom of the first pressure plate 604 can be prevented from being deformed and ruptured during the squeezing and downward movement, which is beneficial to ensuring the stability of the film.

[0056] In the specific implementation process, Figure 4 , Figure 5 and Figure 7 As shown, a cutting mechanism 7 is installed on one side of the top of the platform 204 close to the replacement mechanism 3, and the cutting mechanism 7 includes a mounting seat 701 longitudinally fixed on the platform 204, a cutting knife 702 is fixedly installed on the top of the mounting seat 701, a third electric push rod 605 vertically arranged is fixedly installed on the second electric push rod 603, and a second pressing plate 606 longitudinally arranged just above the cutting knife 702 is fixedly installed on the telescopic end below the third electric push rod 605, a protective cover 703 sleeved above the cutting knife 702 is slidably installed on the mounting seat 701, and a protective cover 703 is provided on the top of the protective cover 703 to fit the cutting knife 702. The mounting base 701 is provided with a through slot 704, and a second spring 705 elastically supported under the protective cover 703 is fixedly installed on the top of the mounting base 701. During the use of the device, when the photosensitive film is cut, the third electric push rod 605 is powered on and started, driving the second pressing plate 606 to move downward, pressing on the cutting knife 702, squeezing and cutting, and completing the cutting process of the photosensitive film. A cutting mechanism 7 is provided on each platform 204. With the flexible removal of the platform 204, the cutting knife 702 in the cutting mechanism 7 can be flexibly replaced and repaired when it is not sharp, which is beneficial to ensure the stability of the device when cutting the photosensitive film.

[0057] When the second pressure plate 606 moves downward, it presses on the top of the protective cover 703, overcoming the elastic support of the second spring 705, causing the protective cover 703 to move downward, and finally causing the cutting knife 702 to be exposed from the through slot 704, forming an extrusion cutting between the second pressure plate 606. By arranging the protective cover 703 above the cutting knife 702 and elastically supporting it with the help of the second spring 705, the cutting knife 702 is normally hidden on the inner side of the protective cover 703, which not only protects the cutting knife 702, but also prevents the staff from accidentally touching the cutting knife 702 and causing injuries, which is beneficial to improving the safety of the cutting mechanism 7 during use.

[0058] In the specific implementation process, Fig.11 and Fig.12 As shown, a third bracket 8 arranged above the first electric slide rail 2 is fixedly installed on the top of the workbench 1, and a longitudinally arranged dust removal roller 801 is rotatably installed in the third bracket 8, the rotation direction of the dust removal roller 801 is adapted to the moving direction of the platform 204 on the first electric slide rail 2, and the rotation speed of the dust removal roller 801 is adapted to the moving speed of the platform 204 on the first electric slide rail 2, and a fourth bracket 9 arranged above the second electric slide rail 201 is fixedly installed on the top of the workbench 1, and longitudinally arranged rollers 901 are rotatably installed on both sides of the left and right sides of the fourth bracket 9, and the outer sides of the two rollers 901 are jointly sleeved with an annular belt 902, and the annular belt 902 has a built-in heating wire, the rotation direction of the annular belt 902 is adapted to the moving direction of the platform 204 on the second electric slide rail 201, and the rotation speed of the annular belt 902 is adapted to the moving speed of the platform 204 on the second electric slide rail 201.

[0059] During the use of the device, when the platform 204 carries the chip original wafer and moves under the drive of the first electric slide rail 2, it will pass through the bottom of the dust removal roller 801, and the cylindrical surface of the dust removal roller 801 will contact the upper surface of the chip original wafer. During the rolling process, the dust impurities remaining on the upper surface of the chip original wafer are adhered to, and the upper surface of the chip original wafer is cleaned before film pasting, which is conducive to further improving the stability of the chip during film pasting. A motor for driving the dust removal roller 801 to rotate is fixedly installed on the third bracket 8, and the motor can control the rotation speed and rotation direction of the dust removal roller 801. An infrared sensor is fixedly installed on the third bracket 8. The sensor can monitor the position and moving direction of the platform 204 on the front and rear two first electric slide rails 2. When the platform 204 passes under the dust removal roller 801, the motor controls the linear speed of the cylindrical surface of the dust removal roller 801 to rotate in accordance with the moving speed of the platform 204, and the rotation direction of the dust removal roller 801 is consistent with the moving direction of the platform 204. When the platform 204 moves to the left, the dust removal roller 801 rotates clockwise, and when the platform 204 moves to the right, the dust removal roller 801 rotates counterclockwise. Under such operation, sliding friction between the outer surface of the dust removal roller 801 and the upper surface of the chip can be avoided, thereby avoiding wear on the upper surface of the chip.

[0060] When the platform 204 carries the chip wafer and moves driven by the second electric slide rail 201, it will pass through the bottom of the ring belt 902, and the outer surface of the ring belt 902 will contact the upper surface of the chip wafer. During this process, the electric heating wire fixedly installed in the ring belt 902 is energized and started. During the contact with the chip wafer, the chip wafer is heated so that the temperature of the upper surface of the chip wafer meets the film pasting requirements. Since the ring belt 902 is sleeved on the outer sides of the left and right rollers 901, the heating time of the ring belt 902 on the chip wafer during the movement is sufficient, and the heating of the chip wafer is synchronously completed during the feeding and conveying process of the chip wafer, without pausing during the period, which is conducive to further improving the efficiency of the device for film pasting processing of chip wafers.

[0061] A motor for driving the roller 901 to rotate is fixedly installed on the fourth bracket 9. By driving the roller 901, the endless belt 902 can be driven to rotate, and the rotation speed and rotation direction of the endless belt 902 can be controlled, just like the rotation control of the dust removal roller 801. An infrared sensor is also fixedly installed on the fourth bracket 9. The position and movement direction of the platform 204 on the front and rear second electric slide rails 201 are monitored by the infrared sensor. When the platform 204 passes under the endless belt 902, the motor controls the linear speed of the outermost side of the endless belt 902 to be consistent with the movement speed of the platform 204, and controls the rotation direction of the endless belt 902 to be consistent with the movement direction of the platform 204. When the platform 204 moves to the left, the endless belt 902 rotates clockwise, and when the platform 204 moves to the right, the endless belt 902 rotates counterclockwise, so that the outer surface of the endless belt 902 does not slide and rub against the upper surface of the chip, thereby avoiding wear on the upper surface of the chip.

[0062] The dust removal roller 801 is arranged on the left side of the middle position of the first electric slide rail 2, so that the platforms 204 on the front and rear two first electric slide rails 2 will not enter the bottom of the dust removal roller 801 at the same time. The endless belt 902 is arranged on the right side of the middle position of the first electric slide rail 2, so that the platforms 204 on the front and rear two second electric slide rails 201 will not enter the bottom of the endless belt 902 at the same time, which is beneficial to further ensure the stability of the device during actual operation.

[0063] Specifically, the working principle and operation method of the present invention are as follows:

[0064] The right side of the device is set as a loading and unloading position. The staff places the chip original on the platform 204 corresponding to one of the first electric slide rails 2 from the rightmost position. Then the first electric slide rail 2 drives the platform 204 to move the chip original to the left. During the conveying process of the chip original, the first electric slide rail 2 rolls the dust removal roller 801 to carry out dust adhesion treatment on the upper surface of the chip original. Then, the platform 204 loaded with the chip original is grasped by the replacement mechanism 3 and rotated 180° to be replaced with the platform 204 on the second electric slide rail 201. With the help of the drive of the second electric slide rail 201, the platform 204 loaded with the chip original is moved to the bottom of the first pressing plate 604. In this process, the chip original passes through the bottom of the endless belt 902 and is heated to a temperature that meets the requirements of film lamination.

[0065] Synchronously, the fourth electric slide rail 501 drives the first gripper 502 to move to the left, and with the guidance of the guide roller 405, the photosensitive film is laid flat on the bottom of the third electric push rod 605 and clamped by the second gripper 504 on the left. Then, the fourth electric slide rail 501 carries the first gripper 502 to move to the right to reset, and clamps the photosensitive film from the right side.

[0066] After the second electric push rod 603 is powered on, it controls the first pressing plate 604 to move downward, presses the photosensitive film to fit the upper surface of the chip original wafer, and completes the film pasting process. Subsequently, the third electric push rod 605 is powered on to control the second pressing plate 606 to move downward, and cooperates with the cutting knife 702 to cut the photosensitive film. Then, the film pasted chip is driven to move rightward by the second electric slide rail 201, and is transferred to the first electric slide rail 2 by means of the grabbing and replacement of the replacement mechanism 3, and continues to move rightward to the rightmost end. The replacement mechanism 3 replaces the chip original wafer and the film pasted chip synchronously. In contrast, the two first electric slide rails 2 arranged side by side in the front and rear cooperate with the two second electric slide rails 201 arranged side by side in the front and rear to realize loading and unloading operations at the same time. One of the first electric slide rails 2 cooperates with a second electric slide rail 201 to simultaneously drive the platform 204 to move to the left for loading and conveying the chip originals, and the other first electric slide rail 2 cooperates with the other second electric slide rail 201 to simultaneously drive the platform 204 to move to the right for unloading and conveying the film-attached chips. They do not interfere with each other, forming a chasing loading and unloading operation, which greatly reduces the time consumption of long-distance loading and unloading and conveying of chips and improves work efficiency.

[0067] The above are only preferred specific implementation modes of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical solutions and inventive concepts of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A chip original film cutting device, comprising a workbench (1), characterized in that: Two first electric slide rails (2) arranged transversely on the right side are fixed side by side on the top center line of the workbench (1); two second electric slide rails (201) arranged transversely on the left side are fixed side by side on the top center line of the workbench (1); and first circular plates (202) are fixedly mounted on the sliding ends of the first electric slide rail (2) and the second electric slide rail (201); a second circular plate (203) is butted against the first circular plate (202); and a platform (204) is fixedly mounted on the top of the second circular plate (203); and the workbench (1 ) is fixedly installed on the top of the workbench (1) with a replacement mechanism (3) arranged between the first electric slide rail (2) and the second electric slide rail (201), and the replacement mechanism (3) includes a base (301) vertically fixed to the top of the workbench (1), a slide frame (302) is slidably installed on the outer side of the base (301), a vertically arranged first electric push rod (303) is fixedly installed on the base (301), and the telescopic end of the first electric push rod (303) is fixedly connected to the slide frame (302), and a crossbeam (303) is rotatably installed on the top of the slide frame (302). 4), and gripper assemblies (305) symmetrically arranged about the central axis are installed at both ends of the crossbeam (304), a material discharge mechanism (4) arranged above the two second electric slide rails (201) is installed on the left side of the top of the workbench (1), the material discharge mechanism (4) comprises a first bracket (401) fixedly connected to the top of the workbench (1), and a frame (403) is installed on the material discharge mechanism (4), a longitudinally arranged photosensitive film roll (404) is rotatably installed on the frame (403), and a material discharge mechanism (4) is arranged below the photosensitive film roll (404) A guide roller (405) is mounted on the frame (403), a traction mechanism (5) is mounted horizontally on the left side of the guide roller (405), a pressing mechanism (6) is mounted on the workbench (1) and is mounted on the left side of the first bracket (401), and the pressing mechanism (6) comprises a second bracket (601) fixedly mounted on the top of the workbench (1), a second electric push rod (603) is mounted vertically on the second bracket (601), and a first pressing plate (604) is fixedly mounted on the telescopic end below the second electric push rod (603); The gripper assembly (305) comprises a connecting frame (3051) fixedly mounted at the end of the crossbeam (304), and a vertically arranged rotating shaft (3052) is rotatably mounted in the connecting frame (3051), a connecting plate (3053) arranged below the connecting frame (3051) is fixedly mounted at the bottom end of the rotating shaft (3052), and L-shaped rods (3054) symmetrically arranged about the central axis are fixedly mounted below both ends of the connecting plate (3053), the distance between the two L-shaped rods (3054) is adapted to the outer diameter of the second circular plate (203), and a transmission belt (306) is transmission-connected between the rotating shafts (3052) in the two gripper assemblies (305); The traction mechanism (5) is arranged below the first pressure plate (604), and the traction mechanism (5) comprises a fourth electric slide rail (501) transversely fixed on the frame (403), and a first clamping hand (502) longitudinally arranged on the left side of the guide roller (405) is fixedly installed on the sliding end of the fourth electric slide rail (501), and the photosensitive film is inserted in the first clamping hand (502), and a fixing plate (503) arranged on the left side of the fourth electric slide rail (501) is fixedly installed on the frame (403), and a second clamping hand (504) corresponding to the first clamping hand (502) is installed on the right side of the fixing plate (503); A cutting mechanism (7) is installed on one side of the top of the platform (204) close to the replacement mechanism (3), and the cutting mechanism (7) comprises a mounting seat (701) longitudinally fixed on the platform (204), a cutting knife (702) is fixedly installed on the top of the mounting seat (701), a third electric push rod (605) arranged vertically is fixedly installed on the second electric push rod (603), and a second pressing plate (606) arranged longitudinally directly above the cutting knife (702) is fixedly installed on the telescopic end below the third electric push rod (605).

2. The chip original film cutting device according to claim 1, characterized in that: The top of the first circular plate (202) is provided with a plug hole (205), the bottom of the second circular plate (203) is fixedly mounted with an insertion rod (206) adapted to the plug hole (205), and the first circular plate (202) and the second circular plate (203) are magnetically attracted to each other.

3. The chip original film cutting device according to claim 1, characterized in that: The width of the photosensitive film on the photosensitive film roll (404) is adapted to the width of the chip on the platform (204); a third electric slide rail (402) arranged longitudinally is fixedly installed on the top of the first bracket (401); the frame (403) is fixedly installed on the sliding end of the third electric slide rail (402); a fifth electric slide rail (602) arranged longitudinally is fixedly installed on the top of the second bracket (601); and the second electric push rod (603) is fixedly installed on the sliding end of the fifth electric slide rail (602).

4. The chip original film cutting device according to claim 1, characterized in that: When the first gripper (502) moves in the direction of the second gripper (504), the rotation of the photosensitive film roll (404) and the movement of the first gripper (502) are started and stopped synchronously.

5. The chip original film cutting device according to claim 1, characterized in that: A transversely arranged connecting rod (505) is slidably inserted in the fixing plate (503), the second clamping hand (504) is fixedly connected to the connecting rod (505), and a first spring (506) fixedly connected between the fixing plate (503) and the second clamping hand (504) is movably sleeved on the outer side of the connecting rod (505).

6. The chip original film cutting device according to claim 1, characterized in that: A protective cover (703) sleeved on the cutting knife (702) is slidably mounted on the mounting seat (701), and a through slot (704) adapted to the cutting knife (702) is provided on the top of the protective cover (703), and a second spring (705) elastically supported below the protective cover (703) is fixedly mounted on the top of the mounting seat (701).

7. The chip original film cutting device according to claim 1, characterized in that: The top of the workbench (1) is fixedly mounted with a third bracket (8) arranged above the first electric slide rail (2), and a longitudinally arranged dust removal roller (801) is rotatably mounted in the third bracket (8), the rotation direction of the dust removal roller (801) is adapted to the movement direction of the platform (204) on the first electric slide rail (2), the rotation speed of the dust removal roller (801) is adapted to the movement speed of the platform (204) on the first electric slide rail (2), and the top of the workbench (1) is fixedly mounted with a second electric slide rail ( A fourth bracket (9) is arranged above the second electric slide rail (201), and longitudinally arranged rollers (901) are rotatably installed on both left and right sides of the fourth bracket (9), and an annular belt (902) is commonly sleeved on the outer sides of the two rollers (901), and the annular belt (902) has a built-in heating wire, and the rotation direction of the annular belt (902) is adapted to the movement direction of the platform (204) on the second electric slide rail (201), and the rotation speed of the annular belt (902) is adapted to the movement speed of the platform (204) on the second electric slide rail (201).

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