Magnetron sputtering coating machine in spring locking form for coating in upside-down hanging manner

Abstract

The invention discloses an inverted coating spring locking type magnetron sputtering coating machine which comprises a vacuum coating chamber, a product feeding port is formed in the side wall of the vacuum coating chamber, a revolution frame is arranged in the middle of the vacuum coating chamber, an inverted rotation frame is arranged on the revolution frame, and the inverted rotation frame comprises a pressing mechanism, a lifting shaft, a spring and a rotating shaft. The rotating shaft is vertically arranged and driven by the synchronous motor to rotate, a first positioning structure is arranged at the lower end of the rotating shaft, a middle through hole is formed in the rotating shaft, the lifting shaft penetrates through the middle through hole, a first butt joint structure is arranged at the lower end of the lifting shaft, elastic force of the spring acts on the lifting shaft upwards, and the pressing mechanism is used for pressing the lifting shaft downwards. The magnetron sputtering coating machine further comprises a workpiece frame, and a second butt joint structure and a second positioning structure are arranged on the workpiece frame. And a sputtering source of the magnetron sputtering coating machine is arranged at the bottom of the vacuum coating chamber. According to the invention, a film layer falling off from the vacuum coating chamber and other foreign matters can be prevented from falling on a product, so that the coating quality is ensured.

Description

Technical Field

[0001] The invention relates to the technical field of magnetron sputtering coating, and in particular to a magnetron sputtering coating machine of a spring-locking type for inverted coating. Background Art

[0002] Magnetron sputtering coating technology has been widely used in various industries to prepare hard films and functional films, such as tool and die protective films, wear-resistant films and friction-reducing films for wear products, decorative films for various products touched by human hands, and various optical films, photoelectric films, magnetic films, etc. The coated products used are of various shapes and sizes, and the structural design of magnetron sputtering targets is becoming more and more mature. Generally speaking, it can be applied to the coating of various products.

[0003] Magnetron sputtering coating is usually carried out in a vacuum coating chamber. A revolving frame is arranged in the middle of the vacuum coating chamber of the existing magnetron sputtering coating machine. A plurality of rotating frames for driving the product to rotate are arranged on the revolving frame. The plurality of rotating frames are arranged around the center of the revolving frame and rotate with the revolving frame. A sputtering source is arranged on the top of the vacuum coating chamber, above the rotating frame. A product delivery entrance is arranged on the side wall of the vacuum coating chamber. A sealed closed door is arranged at the product delivery entrance, and the sealed closed door can be moved to the side to open.

[0004] When in use, first open the sealed closed door, use the robot to send the product from the product delivery port into the vacuum coating chamber, and fix it on the rotating rack, with the surface of the product to be coated facing up. After placing the product on one rotating rack, the orbiting part rotates to the next rotating rack corresponding to the product delivery port, and places the product on the next rotating rack. After placing the products on all rotating racks, close the sealed closed door, and then magnetron sputtering coating can be carried out. During magnetron sputtering coating, the rotating rack drives all products to orbit around the center of the rotating rack, and the rotating rack drives the products to rotate. The sputtering source sputters downward to coat the products on the rotating rack.

[0005] However, the above-mentioned magnetron sputtering coating machine has the following disadvantages: since the product is located on the rotating frame with the surface to be coated facing upward, the film layer that falls off in the vacuum coating chamber (after the magnetron sputtering coating machine has been used for a period of time, the inner wall of the vacuum coating chamber and the surface of the parts in the vacuum coating chamber will be covered with a film layer, and the film layer will fall off) and other foreign objects that fall in the vacuum coating chamber are easy to fall onto the product, thereby affecting the coating quality of the product. Summary of the invention

[0006] The purpose of the present invention is to provide a magnetron sputtering coating machine of the spring-locking type for inverted coating, which can prevent the film layer and other foreign matter that fall off in the vacuum coating chamber from falling onto the product, thereby ensuring the coating quality.

[0007] The purpose of the present invention is achieved through the following technical solutions:

[0008] A magnetron sputtering coating machine of the spring-locking type for inverted coating, comprising a vacuum coating chamber, a product delivery inlet is provided on the side wall of the vacuum coating chamber, a sealed closed door is provided at the product delivery inlet, and a revolution frame is provided in the middle of the vacuum coating chamber, characterized in that: an inverted self-rotating frame is provided on the revolution frame around the center of the revolution frame, the inverted self-rotating frame comprises a pressing mechanism, a lifting shaft, a spring and a rotating shaft, the rotating shaft is vertically arranged, the rotating shaft is driven to rotate by a synchronous motor in the revolution frame, a first positioning structure is provided at the lower end of the rotating shaft, the rotating shaft is provided with a middle through hole, the lifting shaft passes through the middle through hole In the invention, a first docking structure is provided at the lower end of the lifting shaft, and the elastic force of the spring acts upward on the lifting shaft, so that the lifting shaft always maintains a tendency to be lifted upward, and a pressing mechanism is arranged above the lifting shaft for pressing the lifting shaft downward; the magnetron sputtering coating machine also includes a workpiece rack, on which a second docking structure capable of docking with the first docking structure and a second positioning structure capable of docking with the first positioning structure are arranged, and the bottom of the workpiece rack is used for fixing and installing the product to be coated, and the surface of the product to be coated will face downward; the sputtering source of the magnetron sputtering coating machine is arranged at the bottom of the vacuum coating chamber.

[0009] A further technical solution of the present invention is: the inverted self-rotating frame also includes a sleeve, the sleeve is fixed on the rotating shaft, the sleeve is concentric with the rotating shaft, the lifting shaft movably passes through the middle of the sleeve, a spring limit seat is fixed near the upper end of the lifting shaft, the spring is sleeved on the lifting shaft and is located in the sleeve, the upper end and the lower end of the spring respectively press against the inner side of the spring limit seat and the inner side of the lower end of the sleeve.

[0010] A further technical solution of the present invention is: the first docking structure includes a circular docking groove arranged at the lower end of the lifting shaft, the notch of the docking groove faces the side, and a circular notch is arranged at the lower end of the docking groove; the second docking structure includes a docking column arranged in the middle of the workpiece rack, and a docking head is arranged at the upper end of the docking column; during docking, the docking head enters the docking groove from the notch position, and the docking column enters the circular opening from the notch position.

[0011] A further technical solution of the present invention is: the first positioning structure includes a positioning hole arranged on the lower end surface of the rotating shaft, and the second positioning structure includes a positioning pin arranged on the workpiece rack. When the workpiece rack hung on the lifting shaft is lifted into place, the positioning pin is correspondingly inserted into the positioning hole.

[0012] A further technical solution of the present invention is: the inverted self-rotating frame includes a bellows, a transfer seat is fixedly provided on the upper end of the lifting shaft, the pressing mechanism is located above the transfer seat, the bellows is sleeved on the upper end of the sleeve, and the upper and lower ends of the bellows are respectively sealed and connected to the transfer seat and the outer wall of the sleeve.

[0013] A further technical solution of the present invention is: a sealed shell is wrapped on the revolution frame, the sealed shell isolates the internal space from the vacuum environment in the vacuum coating chamber, the sealed shell is provided with a mounting hole corresponding to each inverted self-rotating frame, and the inverted self-rotating frame is sealed and installed in the mounting hole.

[0014] A further technical solution of the present invention is: the inverted self-rotating frame includes a magnetic fluid sealing device, which is sealed and fixed in the mounting hole, and the rotating shaft is the shaft in the middle of the magnetic fluid sealing device, and the rotating sealing connection is achieved through the magnetic fluid sealing device.

[0015] A further technical solution of the present invention is: a horizontal partition is provided on the revolution frame, and gaps are provided on the horizontal partition corresponding to the positions of the inverted self-rotating frame, and a lining plate is sleeved on the workpiece frame, and the lining plate just fills the gap when the workpiece frame is hung on the inverted self-rotating frame.

[0016] A further technical solution of the present invention is: a synchronous motor is arranged in the middle part of the revolution frame, and a first synchronous wheel is respectively arranged in the middle part of the revolution frame corresponding to each inverted self-rotating frame, the first synchronous wheel is driven by the synchronous motor to rotate together, a second synchronous wheel is arranged on the rotating shaft, and the second synchronous wheel is connected to the corresponding first synchronous wheel through a synchronous belt.

[0017] A further technical solution of the present invention is: a top fixing seat is provided on the top of the inverted self-rotating frame, the pressing mechanism is a pressing cylinder, the pressing cylinder is fixedly installed on the top fixing seat, and the piston rod of the pressing cylinder is located directly above the adapter seat.

[0018] Compared with the prior art, the present invention has the following beneficial effects:

[0019] The present invention fixes the product to be coated under the workpiece rack, and docks the workpiece rack to the lifting shaft, and coats the product in an upside-down state, with the surface of the product to be coated facing downward, thereby preventing the film layer and other foreign matter that fall off in the vacuum coating chamber from falling onto the product, thereby ensuring the coating quality. During coating, the lifting shaft and the workpiece rack are kept in a lifted state by the elastic force of the spring, thereby preventing the product from falling due to a malfunction, thereby ensuring the safety of coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is one of the cross-sectional schematic diagrams of an inverted self-rotating frame and a workpiece frame and a product connected thereto according to an embodiment of the present invention;

[0021] Figure 2 This is a second cross-sectional schematic diagram of an inverted self-rotating frame and a workpiece frame and a product connected thereto according to an embodiment of the present invention, in which the lifting shaft is lifted;

[0022] Figure 3 is a schematic cross-sectional view of a lifting shaft according to an embodiment of the present invention;

[0023] Figure 4 is a cross-sectional schematic diagram of a connecting socket according to an embodiment of the present invention;

[0024] Figure 5 is a cross-sectional schematic diagram of a magnetron sputtering coating machine according to an embodiment of the present invention;

[0025] Figure 6 It is one of the three-dimensional schematic diagrams of the revolution frame connected with the workpiece frame and the lining plate according to the embodiment of the present invention;

[0026] Figure 7 This is a second three-dimensional schematic diagram of a revolving frame connected with a workpiece frame and a lining plate according to an embodiment of the present invention;

[0027] Figure 8 1 is a front view schematic diagram of a revolving frame connected with a workpiece frame and a liner plate according to an embodiment of the present invention;

[0028] Fig. 9 yes Figure 6 The enlarged schematic diagram of point A in the middle;

[0029] Fig.10 It is a schematic diagram of the structure in which a manipulator delivers a workpiece rack and a product according to an embodiment of the present invention into a vacuum coating chamber;

[0030] Fig.11 It is a structural schematic diagram when the manipulator hangs the workpiece rack and the product of the embodiment of the present invention on the inverted self-rotating rack;

[0031] Fig.12 It is a schematic diagram of the structure after the manipulator hangs the workpiece rack and the product of the embodiment of the present invention on the inverted self-rotating rack and lifts them;

[0032] Fig.13 It is a schematic diagram of the structure of the robot arm after completing the delivery of the workpiece rack and the product in the embodiment of the present invention and then exiting the vacuum coating chamber.

[0033] Meaning of reference numerals in the figure:

[0034] 1-lifting shaft; 1.1-docking groove; 1.2-first conical surface; 1.3-circular notch; 1.4-notch; 2-rotating shaft; 2.1-end cover; 2.2-middle through hole; 2.3-positioning hole; 3-magnetic fluid sealing device; 3.1-circular edge; 4-sleeve; 5-second synchronous wheel; 6-bellows lock ring; 7-spring limit seat; 8-bellows; 9-adapter seat; 10-down-pressure cylinder; 11-top fixing seat; 12-connecting seat; 12.1-docking column; 12.2-docking joint; 12.3-positioning pin; 12.4-second conical surface; 13-workpiece holder; 13.1-clamping part; 14-lining plate ;14.1-connecting edge;14.2-limiting hole;15-product;16-spring;17-vacuum coating chamber;17.1-furnace body;17.2-furnace cover;17.3-product delivery port;18-sealed shell;18.1-top cover;18.2-mounting hole;19-sputtering source;20-synchronous motor;21-first synchronous wheel;22-synchronous belt;23-first pulley;24-revolving frame;25-second pulley;26-transmission belt;27-first fixing bolt;28-sealing ring;29-horizontal partition;29.1-notch;29.2-limiting pin;30-manipulator;31-distance sensor. DETAILED DESCRIPTION

[0035] The present invention is further described below in conjunction with embodiments.

[0036] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., and orientations or positional relationships indicated are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0037] In the description of the present invention, "several" means one or more, "more" means more than two, "greater than", "less than", "exceed" etc. are understood as not including the number itself, and "above", "below", "within" etc. are understood as including the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0038] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0039] Example:

[0040] like Figures 1 to 9The magnetron sputtering coating machine of the spring locking type for inverted coating of this embodiment is shown, which includes a vacuum coating chamber 17. The vacuum coating chamber 17 generally includes a furnace body 17.1 and a furnace cover 17.2 sealed on the furnace body 17.1. The vacuum coating chamber 17 will be evacuated during coating. A product delivery inlet 17.3 is provided on the side wall of the vacuum coating chamber 17. A sealed closed door is provided at the product delivery inlet 17.3. The sealed closed door is a conventional structure, which can seal and close the product delivery inlet, and can also be moved to the side to open the product delivery inlet.

[0041] A revolution frame 24 is provided in the middle of the vacuum coating chamber 17. The revolution frame 24 as a whole can rotate and rise and fall. The rotation and rising and falling can be realized by using a conventional structure. In most existing magnetron sputtering coating machines, there is a rotating and rising structure for driving the revolution frame to rotate and rise and fall. Therefore, it is not shown in the figure. The rotating and rising structure will be connected to the bottom of the revolution frame, and the rotating and rising structure passes through the middle of the bottom of the vacuum coating chamber.

[0042] An inverted self-rotating frame is arranged around the center of the revolution frame on the revolution frame 24. The number of the inverted self-rotating frames can be designed according to the demand. In this embodiment, two inverted self-rotating frames are symmetrically arranged.

[0043] In this embodiment, a sealed shell 18 is wrapped on the revolution frame, and the sealed shell 18 isolates the internal space from the vacuum environment in the vacuum coating chamber 17. During coating, the internal space of the sealed shell 18 is in the atmospheric environment. The sealed shell 18 is provided with mounting holes 18.2 at the bottom corresponding to each inverted self-rotating frame, and a top cover 18.1 at the top.

[0044] like Figure 1 and Figure 2 As shown, the inverted self-rotating frame includes a pressing mechanism, a lifting shaft 1, a spring 16, a magnetic fluid sealing device 3, a bellows 8, a sleeve 4 and a top fixing seat 11. A rotating shaft 2 is provided in the middle of the magnetic fluid sealing device 3, and the pressing mechanism is a pressing cylinder 10.

[0045] In this embodiment, the inverted self-rotating frame is sealed and installed in the mounting hole 18.2 through the magnetic fluid sealing device 3. The specific structure is: the magnetic fluid sealing device 3 is vertically arranged, and its bottom passes through the mounting hole 18.2. The outer wall of the main body of the magnetic fluid sealing device 3 is provided with a circular ring edge 3.1, and the circular ring edge 3.1 is supported on the top of the mounting hole 18.2. A sealing ring 28 is provided between the circular ring edge 3.1 and the top of the mounting hole 18.2 for sealing. The circular ring edge 3.1 is fixedly connected by a first fixing bolt 27.

[0046] The rotating shaft 2 is a part of the magnetic fluid sealing device 3. The rotating shaft 2 is in a vertical state. A positioning hole 2.3 is provided on the lower end surface of the rotating shaft 2. The positioning hole 2.3 is the first positioning structure. The rotating shaft 2 is provided with a middle through hole 2.2. The lifting shaft 1 passes through the middle through hole 2.2. The lower end of the lifting shaft 1 is provided with a first docking structure. Figure 3 As shown, the first docking structure includes a circular docking groove 1.1 provided at the lower end of the lifting shaft 1, the notch 1.4 of the docking groove 1.1 faces the side, the lower end of the docking groove 1.1 is provided with a circular notch 1.3, and the inner side of the lower end of the docking groove 1.1 is provided with a first conical surface 1.2. The lower end of the rotating shaft 2 is fixedly covered with an end cover 2.1, and the middle of the end cover 2.1 is provided with a through hole. The lower end of the lifting shaft 1 has a larger diameter and passes through the through hole to limit the upward and downward movement of the lifting shaft.

[0047] The sleeve 4 is fixed on the rotating shaft 2, and part of the sleeve 4 is inserted into the middle through hole 2.2 of the rotating shaft 2. The sleeve 4 is concentric with the rotating shaft 2, and the lifting shaft 1 is movably passed through the middle of the sleeve 4. A spring stopper 7 is fixed near the upper end of the lifting shaft 1. The spring stopper 7 is slidably located on the inner side of the upper end of the sleeve 4. The side of the spring stopper 7 is in contact with the inner wall of the sleeve 4, which can improve the stability of the lifting shaft 1 moving up and down. The spring 16 is sleeved on the lifting shaft 1 and is located in the sleeve 4. The upper end of the spring 16 is embedded in the spring stopper 7 and abuts against the inner side of the spring stopper 7, and the lower end of the spring 16 abuts against the inner side of the lower end of the sleeve 4. The spring 16 is in a compressed state, and the elastic force of the spring 16 will act upward on the spring stopper 7, that is, on the lifting shaft 1, so that the lifting shaft 1 always maintains a tendency to be lifted upward. During the coating process, even if there is a failure such as the air failure of the downward pressure cylinder 10, the lifting shaft 1 and the workpiece rack 13 and the product 15 hung thereon will not fall, thereby ensuring the safety of use.

[0048] The top fixing seat 11 is fixedly installed in the sealed housing 18. The top fixing seat 11 is located at the top of the inverted self-rotating frame. The downward pressure cylinder 10 is fixedly installed on the top fixing seat 11, and the piston rod of the downward pressure cylinder 10 faces downward. The adapter seat is in the shape of a disc. The adapter seat 9 is fixedly installed on the upper end of the lifting shaft 1, and the piston rod of the downward pressure cylinder 10 is located directly above the adapter seat 9. When in use, the adapter seat 9 is pressed down by the piston rod of the downward pressure cylinder 10, so that the lifting shaft 1 is lowered, and the spring 16 is continuously compressed during this process.

[0049] The magnetron sputtering coating machine further includes a workpiece rack 13, and the number of the workpiece racks 13 is multiple. A connecting seat 12 is fixedly disposed in the middle of the workpiece rack 13, and a second docking structure capable of rotatably docking with the first docking structure and a second positioning structure capable of fixedly docking with the first positioning structure are disposed on the connecting seat 12. Figure 4As shown, the second docking structure of the present embodiment comprises a docking column 12.1 arranged in the middle of the connecting seat, a docking head 12.2 is arranged at the upper end of the docking column 12.1, and a second conical surface 12.4 is arranged below the docking head 12.2. During docking, the docking head 12.2 enters the docking groove 1.1 from the notch 1.4 position, the first conical surface 1.2 fits with the second conical surface 12.4, and the docking column 12.1 enters the circular opening 1.3 from the notch 1.4 position. The second positioning structure of the present embodiment comprises a positioning pin 12.3 arranged on the connecting seat 12, when the workpiece rack 13 hung on the lifting shaft 1 is lifted into place, the upper side of the connecting seat 12 fits with the lower side of the end cap 2.1, and the positioning pin 12.3 is correspondingly inserted into the positioning hole 2.3, so that the workpiece rack 13 is connected to the rotating shaft 2, and the workpiece rack 13 can be driven to rotate through the rotating shaft 2.

[0050] The bottom of the workpiece rack 13 is used to fix and install the product 15 to be coated. The structure of the workpiece rack 13 fixing the product 15 adopts a conventional structure and can be changed according to different products. The bottom periphery of the workpiece rack 13 of this embodiment is provided with a conventional clamping portion 13.1, and the product 15 is clamped in the clamping portion 13.1.

[0051] The bellows 8 is sleeved on the upper end of the sleeve 4, and the upper and lower ends of the bellows 8 are respectively sealed and connected to the bottom of the adapter 9 and the outer wall of the sleeve 4. The connection between the bellows 8 and the outer wall of the sleeve 4 is achieved through a conventional bellows lock ring 6. The bellows 8 is used to seal the position between the lifting shaft 1 and the rotating shaft 2 without affecting the lifting and lowering of the lifting shaft.

[0052] The sputtering source 19 of the magnetron sputtering coating machine is arranged at the bottom of the vacuum coating chamber 17, and the sputtering source 19 is directed upward to coat the inverted product.

[0053] A synchronous motor 20 is provided inside the revolution frame 24, and the synchronous motor 20 is located in the middle of the revolution frame 24. A first synchronous wheel 21 is provided in the middle of the revolution frame 24 corresponding to each inverted self-rotating frame, and a first pulley 23 is provided on the first synchronous wheel 21. A second pulley 25 is provided on the output shaft of the synchronous motor 20, and the first pulley 23 is connected to the second pulley 25 through a transmission belt 26, so that the first synchronous wheel 21 is driven to rotate together by the synchronous motor 20. A second synchronous wheel 5 is connected to the upper end of the rotating shaft 2, and the second synchronous wheel 5 is connected to the corresponding first synchronous wheel 21 through a synchronous belt 22, so that the rotating shafts 2 of all inverted self-rotating frames are driven to rotate synchronously by the synchronous motor 20.

[0054] In this embodiment, a horizontal partition 29 is provided on the revolution frame 24. The horizontal partition 29 is circular in shape and rotates and rises together with the revolution frame 24. The horizontal partition 29 is located below the inverted self-rotating frame as a whole. The positions corresponding to the inverted self-rotating frame are provided with notches 29.1. The workpiece frame 13 is covered with a lining plate 14. The shape of the lining plate 14 matches the shape of the notch 29.1 and can just fill the notch 29.1, so that the horizontal partition 29 forms a complete circular plate. Fig. 9 As shown, the side of the lining plate 14 is provided with a connecting edge 14.1, and the connecting edge 14.1 is provided with a limiting hole 14.2, and the side of the notch 29.1 is correspondingly provided with an upward limiting pin 29.2. When the workpiece rack 13 is hung on the inverted self-rotating rack for coating, the lining plate 14 just fills the notch 29.1, and the limiting pin 29.2 cooperates to be inserted into the limiting hole 14.2, and the lining plate 14 is connected to the horizontal partition 29, and the lower end of the workpiece rack 13 leaks out below the lining plate 14, and the product 15 fixed below the workpiece rack 13 will also leak out below, so that the product 15 can be coated. The complete circular plate composed of the horizontal partition 29 and the lining plate 14 can separate the space of the vacuum coating chamber 17, so that during the coating process, the space above the horizontal partition 29 will not be polluted.

[0055] In this embodiment, a distance sensor 31 is provided on the side of the top fixing seat 11 . The distance sensor 31 is located above the edge of the adapter seat 9 . The distance sensor 31 is used to detect the distance of the adapter seat 9 , thereby indirectly detecting the height displacement of the lifting shaft 1 .

[0056] The process of coating using the magnetron sputtering coating machine of this embodiment is as follows:

[0057] Step 1: The product 15 to be coated is fixedly mounted below the workpiece rack 13;

[0058] Step 2: Open the sealed closed door, such as Fig.10 As shown, the workpiece rack 13 together with the product 15 thereon is sent into the vacuum coating chamber 17 from the product inlet 17.3 by an external manipulator 30; at this time, one of the inverted self-rotating racks should be located at the corresponding inner side of the product inlet 7.31, the notch 1.4 of the docking groove 1.1 is facing the product inlet 17.3, the docking joint 12.2 and the docking groove 1.1 are at the same horizontal position, and the piston rod of the downward pressure cylinder 10 presses down on the adapter seat 9, so that the lifting shaft 1 extends downward; at this time, the position of the connecting edge 14.1 is higher than the limit pin 29.2; when the workpiece rack 13 is sent into place, as shown in FIG. Fig.11 As shown, the butt joint 12.2 will enter the butt joint groove 1.1 from the notch 1.4, and after the butt joint is completed, the liner 14 is located just above the notch 29.1;

[0059] Step 3: The piston rod of the downward pressure cylinder 10 rises. Under the elastic force of the spring 16, the adapter seat 9, the lifting shaft 1, and the workpiece frame 13 are all lifted. When lifted into place, the upper surface of the connecting seat 12 fits with the lower surface of the end cover 2.1, and the positioning pin 12.3 is correspondingly inserted into the positioning hole 2.3. The elastic force of the spring 16 keeps the lifting shaft 1 in the state of being lifted upward, and then the manipulator releases the workpiece frame 13, but the liner 14 is still on the manipulator 30.

[0060] Step 4: Fig.12 As shown, the revolution frame 24 rises, and the horizontal partition 29 also rises together, so that the limit pin 29.2 on the horizontal partition 29 is inserted into the limit hole 14.2 on the lining plate 14, completing the connection between the lining plate 14 and the horizontal partition 29, and then the manipulator 30 releases the lining plate 14;

[0061] Step 5: Fig.13 As shown, the robot 30 withdraws from the product delivery inlet 17.3 to the outside of the vacuum coating chamber 17, the revolution frame 24 descends to restore to the initial working height, and rotates the next inverted self-rotating frame to the inner side of the product delivery inlet 17.3;

[0062] Step 6, repeating steps 2 to 5, and hanging the workpiece rack 13 and the product 15 upside down on all the inverted self-rotating racks;

[0063] Step 7: Close the sealed closed door, evacuate the vacuum coating chamber 17, and then start coating. During the coating process, the revolution frame 24 drives all the workpiece racks 13 and the product 15 to revolve around the center of the revolution frame 24, and the synchronous motor 20 drives all the workpiece racks 13 and the product 15 to rotate around their respective centers. During the rotation process, the workpiece rack 13, the product 15, the rotating shaft 2, the lifting shaft 1, the sleeve 4, the adapter 9, the bellows 8, etc. all rotate together.

[0064] The above embodiments of the present invention are not intended to limit the protection scope of the present invention, and the implementation modes of the present invention are not limited thereto. All other modifications, replacements or changes made to the above structures of the present invention based on the above contents of the present invention, in accordance with common technical knowledge and customary means in the art, without departing from the above basic technical ideas of the present invention, should fall within the protection scope of the present invention.

Claims

1. A spring-locked magnetron sputtering coating machine for inverted coating, comprising a vacuum coating chamber, a product delivery port is provided on the side wall of the vacuum coating chamber, a sealed closed door is provided at the product delivery port, and a revolution frame is provided in the middle of the vacuum coating chamber, characterized in that: An inverted self-rotating frame is arranged on the revolving frame around the center of the revolving frame, and the inverted self-rotating frame includes a pressing mechanism, a lifting shaft, a spring and a rotating shaft. The rotating shaft is vertically arranged, and the rotating shaft is driven to rotate by a synchronous motor in the revolving frame. A first positioning structure is arranged at the lower end of the rotating shaft, and the rotating shaft is provided with a middle through hole. The lifting shaft passes through the middle through hole, and a first docking structure is arranged at the lower end of the lifting shaft. The elastic force of the spring acts upward on the lifting shaft, so that the lifting shaft always maintains a tendency to be lifted upward, and the pressing mechanism is arranged above the lifting shaft for pressing down the lifting shaft; the magnetron sputtering coating machine also includes a workpiece rack, and a second docking structure that can dock with the first docking structure and a second positioning structure that can dock with the first positioning structure are arranged above the workpiece rack, and the bottom of the workpiece rack is used to fix and install the product to be coated, and the surface of the product to be coated will face downward; the sputtering source of the magnetron sputtering coating machine is arranged at the bottom of the vacuum coating chamber.

2. The spring-locked magnetron sputtering coating machine for inverted coating according to claim 1 is characterized in that: The inverted self-rotating frame also includes a sleeve, which is fixed on the rotating shaft. The sleeve is concentric with the rotating shaft, and the lifting shaft movably passes through the middle of the sleeve. A spring limit seat is fixedly provided near the upper end of the lifting shaft. The spring is sleeved on the lifting shaft and is located in the sleeve. The upper end and the lower end of the spring respectively abut against the inner side of the spring limit seat and the inner side of the lower end of the sleeve.

3. The spring-locked magnetron sputtering coating machine for inverted coating according to claim 1 is characterized in that: The first docking structure includes a circular docking groove arranged at the lower end of the lifting shaft, the notch of the docking groove faces the side, and the lower end of the docking groove is provided with a circular notch. The second docking structure includes a docking column arranged in the middle of the workpiece rack, and the upper end of the docking column is provided with a docking head. During docking, the docking head enters the docking groove from the notch position, and the docking column enters the circular opening from the notch position.

4. The magnetron sputtering coating machine of the spring-locking type for inverted coating according to claim 1 is characterized in that: The first positioning structure includes a positioning hole arranged on the lower end surface of the rotating shaft, and the second positioning structure includes a positioning pin arranged on the workpiece rack. When the workpiece rack hung on the lifting shaft is lifted into place, the positioning pin is correspondingly inserted into the positioning hole.

5. The spring-locked magnetron sputtering coating machine for inverted coating according to claim 2 is characterized in that: The inverted self-rotating frame includes a bellows, a transfer seat is fixedly provided on the upper end of the lifting shaft, the pressing mechanism is located above the transfer seat, the bellows is sleeved on the upper end of the sleeve, and the upper and lower ends of the bellows are respectively sealed and connected to the transfer seat and the outer wall of the sleeve.

6. The spring-locked magnetron sputtering coating machine for inverted coating according to claim 1, characterized in that: The revolution frame is wrapped with a sealed shell, which isolates the internal space from the vacuum environment in the vacuum coating chamber. The sealed shell is provided with a mounting hole corresponding to each of the inverted self-rotating frames, and the inverted self-rotating frames are sealed and installed in the mounting holes.

7. The magnetron sputtering coating machine of the spring-locking type for inverted coating according to claim 6 is characterized in that: The inverted self-rotating frame includes a magnetic fluid sealing device, which is sealed and fixed in the mounting hole. The rotating shaft is the shaft in the middle of the magnetic fluid sealing device, and the rotating sealing connection is achieved through the magnetic fluid sealing device.

8. The spring-locked magnetron sputtering coating machine for inverted coating according to claim 1, characterized in that: The revolving frame is provided with a horizontal partition, and the horizontal partition is provided with gaps at positions corresponding to the inverted self-rotating frame. The workpiece frame is sleeved with a lining plate, and when the workpiece frame is hung on the inverted self-rotating frame, the lining plate just fills the gap.

9. The spring-locked magnetron sputtering coating machine for inverted coating according to claim 1, characterized in that: The synchronous motor is arranged in the middle part of the revolving frame, and a first synchronous wheel is respectively arranged in the middle part of the revolving frame corresponding to each of the inverted self-rotating frames, the first synchronous wheel is driven by the synchronous motor to rotate together, a second synchronous wheel is arranged on the rotating shaft, and the second synchronous wheel is connected to the corresponding first synchronous wheel through a synchronous belt.

10. The spring-locked magnetron sputtering coating machine for inverted coating according to claim 5, characterized in that: A top fixing seat is arranged on the top of the inverted self-rotating frame, and the pressing mechanism is a pressing cylinder, which is fixedly mounted on the top fixing seat, and a piston rod of the pressing cylinder is directly opposite to the top of the adapter seat.

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