Flexible substrate detection device

Abstract

The present invention provides a flexible substrate detection device, which relates to the technical field of flexible substrate detection, and comprises: a detection platform, a feeding mechanism, a conveying mechanism, a first detection mechanism, a second detection mechanism, a third detection mechanism and a controller, wherein the feeding mechanism is fixedly arranged at the top of the left rear of the detection platform, the conveying mechanism is fixedly arranged at the top of the detection platform, the first detection mechanism is fixedly arranged at the rear side of the conveying mechanism on the detection platform, the second detection mechanism is fixedly arranged at the right side of the conveying mechanism on the detection platform, and the third detection mechanism is fixedly arranged at the front side of the conveying mechanism on the detection platform, and the conveying mechanism, the first detection mechanism, the second detection mechanism and the third detection mechanism are electrically connected to the controller respectively; the detection efficiency and accuracy of the flexible substrate are improved, the degree of manual intervention is reduced, and the automation level is improved; since the detection mechanisms are relatively independent, the detection process can be flexibly adjusted according to actual needs, and the adaptability and flexibility are enhanced.

Description

Technical Field

[0001] The present invention relates to the technical field of flexible substrate detection, and in particular to a flexible substrate detection device. Background Art

[0002] With the rapid development of flexible displays, wearable devices and Internet of Things technologies, flexible substrates, as core components, their quality inspection has become the key to ensuring product performance; flexible substrates occupy an important position in the integrated circuit industry chain, and their quality and performance have a vital impact on the overall performance of electronic products.

[0003] However, with the development of semiconductors becoming highly integrated and thinner, defects on flexible substrates are becoming increasingly difficult to detect using traditional manual visual inspection methods;

[0004] Traditional detection methods and devices are often limited to two-dimensional plane detection and require manual operation. Not only is the detection time-consuming and labor-intensive, but the detection results are also subjective. It is difficult to meet the high requirements of modern industrial production for quality and efficiency, and it is difficult to adapt to the deformation of flexible substrates caused by material properties. The detection efficiency is low and the accuracy is limited. Summary of the invention

[0005] The present invention provides a flexible substrate detection device, which is used to solve at least one of the technical problems raised by the above background technology.

[0006] In order to solve the above technical problems, the present invention provides a flexible substrate detection device, including: a detection platform, a loading mechanism, a conveying mechanism, a first detection mechanism, a second detection mechanism, a third detection mechanism and a controller, wherein the loading mechanism is fixedly provided at the top of the left rear of the detection platform, the conveying mechanism is fixedly provided at the top of the detection platform, the first detection mechanism is fixedly provided on the detection platform at the rear side of the conveying mechanism, the second detection mechanism is fixedly provided on the detection platform at the right side of the conveying mechanism, and the third detection mechanism is fixedly provided on the detection platform at the front of the conveying mechanism, and the conveying mechanism, the first detection mechanism, the second detection mechanism and the third detection mechanism are electrically connected to the controller respectively.

[0007] Preferably, the feeding mechanism includes: a material storage box, the material storage box is fixedly installed on the left side of the top of the testing platform, a gantry is provided on the top of the material storage box, the gantry is fixedly connected to the top of the testing platform, a first screw slide is fixedly provided on the top of the gantry to slide along the left and right directions, a vertical lifting cylinder is fixedly installed on the movable end of the first screw slide, a push rod end at the bottom of the lifting cylinder is fixedly connected to an adsorption plate, and a plurality of vacuum suction nozzles are fixedly installed on the bottom of the adsorption plate.

[0008] Preferably, the conveying mechanism comprises: a rotating conveying mechanism and a translational conveying mechanism;

[0009] The rotary conveying mechanism comprises: a rotary base, a rotary base is fixedly installed on the top right side of the detection platform, the top of the rotary base is rotatably connected to a rotary disc, four double-axis cylinders are fixedly installed symmetrically on the top of the rotary disc, the movable end of each double-axis cylinder is fixedly connected to a bearing plate, and the bearing plate is slidably connected to the top of the rotary disc along the radial direction of the rotary disc;

[0010] The translation conveying mechanism includes: a guide rail base, the top of the inspection platform is located in front of the gantry and is fixedly provided with a guide rail base, a pair of first guide rails along the front-to-back direction are fixedly installed symmetrically on the top of the guide rail base, the top of the first guide rail is connected to a sliding seat one in a front-to-back sliding manner, the bottom end of the sliding seat one is connected to a synchronous belt conveyor, and the synchronous belt conveyor is used to provide sliding force for the sliding seat one.

[0011] Preferably, the first detection mechanism includes: a column one, a column one is fixedly installed on the top of the detection platform at the right rear of the rotating disk, a second screw slide sliding along the front-to-back direction is fixedly installed on the top of the column one, a vertical lifting cylinder two is fixedly installed on the left movable end of the second screw slide, the bottom end of the lifting cylinder two is fixedly connected to the first detection box, a horizontal partition one is fixedly connected to the middle part of the first detection box, a downward extrusion cylinder is fixedly installed at the top center of the partition one, the push rod end of the bottom of the extrusion cylinder is fixedly connected to the horizontal pressure plate, a plurality of vertical guide rods are fixedly connected to the top of the pressure plate, the guide rods are connected to the partition one for up and down sliding, a plurality of optical fiber sensors are fixedly installed on the bottom of the front half of the pressure plate, and a plurality of flexible pressure sensors are fixedly installed on the bottom of the rear half of the pressure plate.

[0012] Preferably, the second detection mechanism includes: column two, column two is fixedly installed on the top right side of the detection platform, column two is a third screw slide fixedly installed on the top end and sliding along the front and rear direction, a vertical lifting cylinder three is fixedly installed on the left sliding end of the third screw slide, the bottom end of the lifting cylinder three is fixedly connected to the second detection box, an electric lifting column is fixedly installed at the inner center of the top wall of the second detection box, the lifting end of the bottom end of the electric lifting column is fixedly connected to the horizontal mounting plate, a number of electronic probes are fixedly provided at the bottom of the horizontal mounting plate, the electronic probes are electrically connected to the controller, electronic atomizers are fixedly provided on the left and right side walls of the second detection box, a storage power supply is fixedly installed at the bottom of the second detection box, and the electronic probes are electrically connected to the electronic atomizer and the storage power supply respectively.

[0013] Preferably, the third detection mechanism includes: a column three, a column three is fixedly installed on the top of the detection platform in front of the rotating disk, a fourth screw slide that slides in the left and right directions is fixedly installed on the top of the column three, a vertical lifting cylinder four is fixedly installed on the rear sliding end of the fourth screw slide, a third detection box is fixedly installed on the bottom of the lifting cylinder four, a number of industrial cameras one are fixedly installed on the inner side of the top wall of the third detection box, a photoelectric distance sensor is fixedly installed at the top center of the third detection box, a number of lighting lamps are fixedly provided on the inner wall of the third detection box, and two groups of opposing photoelectric sensors are fixedly provided on the side walls around the bottom of the third detection box.

[0014] Preferably, it also includes a multifunctional detection mechanism, which includes: a box body four, a clamp mechanism, a bending and driving mechanism, and an adsorption and flattening mechanism. The box body four is fixedly installed on the left front top end of the detection platform, a material inlet one is opened on the rear side wall of the box body four, an adsorption and flattening mechanism is fixedly provided on the top of the box body four, and two groups of clamp mechanisms are fixedly arranged symmetrically on the bottom of the box body four. The bottom end of the clamp mechanism is connected to the bending and driving mechanism, and a pair of horizontal partitions two are symmetrically arranged on the left and right side walls of the bottom of the box body four.

[0015] Preferably, the clamping mechanism on the left side includes: a sliding block, the top of the partition plate 2 is slidably connected to the sliding block left and right, the left end of the sliding block on the left is fixedly connected to the left side wall of the box body 4 through a spring 1, the bottom of the left end of the sliding block is fixedly connected to a horizontal clamping plate 1 in the left and right directions, a vertical mounting groove is opened in the sliding block, the mounting groove is rotatably connected to a clamping screw, the top of the clamping screw is fixedly connected to the output shaft end of the clamping motor, the clamping motor is fixedly connected to the top of the sliding block, the clamping screw is threadedly connected to a horizontal clamping plate 2 in the left and right directions, the horizontal clamping plate 2 is slidably connected to the sliding block up and down, and rubber blocks are fixedly connected to both the horizontal clamping plate 1 and the horizontal clamping plate 2.

[0016] Preferably, the bending and driving mechanism includes: a vertical lead screw 2 rotatably connected to the center of the bottom of the box body 4, the bottom end of the lead screw 2 is fixedly connected to the output shaft end of the servo motor 3, the servo motor 3 is fixedly connected to the outer side of the bottom wall of the box body 4, the upper middle part of the lead screw 2 is threadedly connected to a threaded sleeve, the top of the threaded sleeve is symmetrically fixedly connected to a group of support rods, the top of the support rod is fixedly connected to a horizontal support plate, an electric heating device is fixedly installed at the bottom of the support plate, the threaded sleeve is symmetrically hinged to a pair of connecting rods 1, the end of the connecting rod 1 away from the threaded sleeve is hinged to an L-shaped support rod, the top of the L-shaped support rod is fixedly connected to a sliding block, the top of the L-shaped support rod slides left and right and passes through the partition 2, and the bottom of the connecting rod 1 away from the threaded sleeve end is fixedly installed with a spring 2.

[0017] Preferably, the adsorption and leveling mechanism includes: a lead screw four, a lead screw four is rotatably provided in the top wall of the box body four along the left and right directions, the left end of the lead screw four is fixedly connected to the output shaft end of the servo motor four, the servo motor four is fixedly connected to the top wall of the box body four, the lead screw four is threadedly connected to the slide table four, the bottom end of the slide table four is fixedly connected to the C-type mounting plate, the top of the C-type mounting plate is fixedly installed with a motor five, the top of the C-type mounting plate is fixedly installed with a lifting cylinder five, the bottom of the lifting cylinder five is fixedly connected to an adsorption plate two, and the bottom end of the adsorption plate two is fixedly provided with a plurality of vacuum suction nozzles two, the front end of the output shaft of the motor five is fixedly connected to a rotating rod, the other end of the rotating rod is hinged to a connecting rod two, the bottom end of the connecting rod two is hinged to a vertical rod one, the right end of the bottom of the C-type mounting plate is fixedly connected to a sleeve, the vertical rod one is slidably connected to the inner wall of the sleeve up and down, the bottom of the vertical rod one is rotatably connected to a rolling roller along the front and rear direction, and a vertical distance sensor four and an industrial camera two are fixedly installed on the left side of the bottom of the C-type mounting plate.

[0018] Compared with the prior art, the beneficial effects of the present invention are as follows: a flexible substrate detection device provided by the present invention automatically delivers the flexible substrate into the detection area through a feeding mechanism, and then uses a conveying mechanism to convey the substrate to each detection mechanism for detection; the first detection mechanism, the second detection mechanism and the third detection mechanism respectively undertake different detection tasks, and can comprehensively detect various performance indicators of the substrate. The controller is responsible for receiving the detection data from each detection mechanism, and processing and analyzing it. This technical solution significantly improves the detection efficiency and accuracy of flexible substrates, reduces the degree of manual intervention, and improves the level of automation; at the same time, since the detection mechanisms are relatively independent, the detection process can be flexibly adjusted according to actual needs, which enhances the adaptability and flexibility of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 is a three-dimensional schematic diagram of a flexible substrate detection device of the present invention;

[0021] Figure 2 is a front view schematic diagram of a flexible substrate detection device of the present invention;

[0022] Figure 3 is a schematic top view of a flexible substrate detection device of the present invention;

[0023] Figure 4 It is a left-side cross-sectional schematic diagram of the first detection box of the present invention;

[0024] Figure 5It is a front cross-sectional schematic diagram of a second detection box of the present invention;

[0025] Figure 6 It is a front cross-sectional schematic diagram of a third detection box of the present invention;

[0026] Figure 7 It is a front sectional schematic diagram of the multifunctional detection mechanism of the present invention;

[0027] Figure 8 yes Figure 7 A partial enlarged schematic diagram in the middle.

[0028] Reference numerals:

[0029] 1. Inspection table; 2. Feeding mechanism; 201. Storage box; 202. Gantry; 203. First screw slide; 204. Lifting cylinder 1; 205. Adsorption plate 1; 206. Vacuum nozzle 1; 3. Conveying mechanism; 301. Rotating conveying mechanism; 3011. Rotating base; 3012. Rotating disc; 3013. Double-axis cylinder; 3014. Carrying plate; 3015. Spur gear 1; 3016. Spur gear 2; 3017. Rotating motor; 302. Translation conveying mechanism; 3021. Guide rail base; 3022. First guide rail; 3023. Sliding seat 1; 3024. Synchronous belt conveying device; 4. First inspection mechanism; 4 01. Column 1; 402. Second lead screw slide; 403. Lifting cylinder 2; 404. First detection box; 405. Partition 1; 406. Extrusion cylinder; 407. Pressure plate; 408. Guide rod; 409. Optical fiber sensor; 410. Flexible pressure sensor; 5. Second detection mechanism; 501. Column 2; 502. Third lead screw slide; 503. Lifting cylinder 3; 504. Second detection box; 505. Electric lifting column; 506. Horizontal mounting plate; 507. Electronic probe; 508. Electronic atomizer; 509. Power storage; 6. Third detection mechanism; 601. Column 3; 602. Fourth lead screw slide; 603. Lifting cylinder four; 604, the third detection box; 605, industrial camera one; 606, photoelectric distance sensor; 607, lighting; 608, photoelectric sensor; 7, controller; 8, multifunctional detection mechanism; 801, box four; 802, material inlet one; 803, partition two; 804, clamping mechanism; 8041, sliding block; 8042, spring one; 8043, horizontal clamping plate one; 8044, mounting groove; 8045, clamping screw; 8046, clamping motor; 8047, horizontal clamping plate two; 8048, rubber block; 805, bending and driving mechanism; 8051, screw two; 8052, servo motor three; 8053, Threaded sleeve; 8054, support rod; 8055, support plate; 8056, electric heating device; 8057, connecting rod one; 8058, L-shaped support rod; 8059, spring two; 806, adsorption and leveling mechanism; 8061, lead screw four; 8062, servo motor four; 8063, slide four; 8064, C-type mounting plate; 8065, motor five; 8066, lifting cylinder five; 8067, adsorption plate two; 8068, vacuum nozzle two; 8069, rotating rod; 8610, connecting rod two; 8611, vertical rod one; 8612, sleeve; 8613, rolling roller; 8614, distance sensor four; 8615, industrial camera two. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] The preferred embodiments of the present invention are described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0032] In addition, in the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes, and do not specifically refer to the order or sequence, nor are they used to limit the present invention. They are only used to distinguish components or operations described with the same technical terms, and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions and technical features between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0033] The present invention provides the following embodiments

[0034] Example 1

[0035] The embodiment of the present invention provides a flexible substrate detection device, such as Figure 1-Figure 3 As shown, it includes: a detection platform 1, a feeding mechanism 2, a conveying mechanism 3, a first detection mechanism 4, a second detection mechanism 5, a third detection mechanism 6 and a controller 7. The feeding mechanism 2 is fixedly provided at the top of the left rear of the detection platform 1, and the conveying mechanism 3 is fixedly provided on the top of the detection platform 1. The first detection mechanism 4 is fixedly provided on the detection platform 1 at the rear side of the conveying mechanism 3, the second detection mechanism 5 is fixedly provided on the detection platform 1 at the right side of the conveying mechanism 3, and the third detection mechanism 6 is fixedly provided on the detection platform 1 at the front of the conveying mechanism 3. The conveying mechanism 3, the first detection mechanism 4, the second detection mechanism 5 and the third detection mechanism 6 are electrically connected to the controller 7 respectively.

[0036] The working principle and beneficial effects of the above technical solution are as follows: the flexible substrate detection device provided by the present invention automatically feeds the flexible substrate into the detection area through the feeding mechanism 2, and then uses the conveying mechanism 3 to convey the substrate to each detection mechanism for detection; the first detection mechanism 4, the second detection mechanism 5 and the third detection mechanism 6 respectively undertake different detection tasks, and can comprehensively detect various performance indicators of the substrate. The controller 7 is responsible for receiving the detection data of each detection mechanism, and processing and analyzing it. This technical solution significantly improves the detection efficiency and accuracy of the flexible substrate, reduces the degree of manual intervention, and improves the level of automation; at the same time, since the detection mechanisms are relatively independent, the detection process can be flexibly adjusted according to actual needs, which enhances the adaptability and flexibility of the device.

[0037] Example 2

[0038] On the basis of Example 1, Figure 1-Figure 3 As shown, the feeding mechanism 2 includes: a storage box 201, the storage box 201 is fixedly installed on the left side of the top of the detection platform 1, a gantry 202 is provided on the top of the storage box 201, the gantry 202 is fixedly connected to the top of the detection platform 1, a first screw slide 203 sliding along the left and right directions is fixedly provided on the top of the gantry 202, a vertical lifting cylinder 204 is fixedly installed on the movable end of the first screw slide 203, a push rod end at the bottom of the lifting cylinder 204 is fixedly connected to an adsorption plate 205, and a plurality of vacuum suction nozzles 206 are fixedly installed on the bottom of the adsorption plate 205.

[0039] The conveying mechanism 3 includes: a rotating conveying mechanism 301 and a translation conveying mechanism 302;

[0040] The rotating conveying mechanism 301 comprises: a rotating base 3011, the rotating base 3011 is fixedly installed on the top right side of the detection platform 1, the top of the rotating base 3011 is rotatably connected to the rotating disc 3012, four double-axis cylinders 3013 are fixedly installed on the top of the rotating disc 3012 in a symmetrical manner, the movable end of each double-axis cylinder 3013 is fixedly connected to a bearing plate 3014, and the bearing plate 3014 is connected to the top of the rotating disc 3012 in a radial sliding manner along the rotating disc 3012;

[0041] The adsorption plate 1 205 further includes: a spur gear 1 3015, the bottom end of the axis of the rotating disk 3012 is fixedly connected to the spur gear 1 3015, the spur gear 1 3015 is meshedly connected to the spur gear 2 3016, the top end of the spur gear 2 3016 is fixedly connected to the output shaft end of the rotating motor 3017, and the rotating motor 3017 is fixedly connected to the right inner wall of the rotating base 3011;

[0042] The translation conveying mechanism 302 includes: a guide rail base 3021, the top of the inspection platform 1 is located in front of the gantry 202 and is fixedly provided with a guide rail base 3021, a pair of first guide rails 3022 along the front-to-back direction are symmetrically fixedly installed on the top of the guide rail base 3021, the top of the first guide rail 3022 is slidably connected to a sliding seat 3023 in the front-to-back direction, the bottom end of the sliding seat 3023 is connected to a synchronous belt conveyor 3024, and the synchronous belt conveyor 3024 is used to provide sliding force for the sliding seat 3023.

[0043] The working principle and beneficial effects of the above technical solution are as follows: Based on Example 1, this embodiment designs the feeding mechanism 2 and the conveying mechanism 3 in detail;

[0044] When the feeding mechanism 2 is working, the controller 7 controls the first screw slide 203 to operate, driving the lifting cylinder 204 and the adsorption plate 205 to slide to the top of the storage box 201, and then the lifting cylinder 204 pushes the adsorption plate 205 and the vacuum suction nozzle 206 to descend until the flexible substrate to be tested is adsorbed, and then the adsorption plate 205 slides to the target position of the carrier plate 3014 on the rotating disk 3012, releasing the flexible substrate to be tested, and the double-axis cylinder 3013 is responsible for pushing the carrier plate 3014 to a suitable detection position; when the rotating disk 3012 rotates, the rotating motor 3017 operates to drive the spur gear 2 3016 to rotate, and the spur gear 2 3016 rotates and meshes to transmit so that the spur gear 1 3015 and the rotating disk 3012 rotate synchronously;

[0045] When the translation conveying mechanism 302 is in operation, the controller 7 controls the synchronous belt conveying device 3024 at the bottom to rotate, and the synchronous belt of the synchronous belt conveying device 3024 rotates to pull the sliding seat to slide back and forth on the first guide rail 3022;

[0046] Storage box 201: stores the flexible substrate to be tested.

[0047] Gantry 202: As the supporting structure of the feeding mechanism 2, the components such as the lead screw slide and the lifting cylinder installed on it realize the automatic feeding of the flexible substrate.

[0048] The first lead screw slide 203 slides in the left-right direction at the top of the gantry 202 to adjust the position of the adsorption plate 205.

[0049] Lifting cylinder 204: drives adsorption plate 205 to move up and down to achieve adsorption and release of the flexible substrate.

[0050] Adsorption plate 205 and vacuum nozzle 206: The flexible substrate is firmly adsorbed through vacuum suction to prevent it from falling off during the transmission process.

[0051] The feeding mechanism 2 realizes automatic feeding and precise positioning of the flexible substrate through the coordinated action of the gantry 202, the first screw slide 203, the lifting cylinder 204 and the adsorption plate 205. The conveying mechanism 3 includes a rotating conveying mechanism 301 and a translation conveying mechanism 302, which realizes the smooth transmission and positioning of the substrate through the rotation of the rotating disc 3012 and the double-axis cylinder 3013, and the translation of the synchronous belt conveyor 3024. This technical solution not only improves the efficiency of feeding and transmission, but also ensures the stability and accuracy of the substrate during the detection process.

[0052] Example 3

[0053] On the basis of Example 1, Figure 1-Figure 4 As shown, the first detection mechanism 4 includes: a column 401, a column 401 is fixedly installed on the top of the detection platform 1 at the right rear of the rotating disk 3012, a second screw slide 402 that slides along the front-back direction is fixedly installed on the top of the column 401, a vertical lifting cylinder 403 is fixedly installed on the left movable end of the second screw slide 402, the bottom end of the lifting cylinder 403 is fixedly connected to the first detection box 404, and the middle part of the first detection box 404 is fixedly connected to the horizontal partition 1 405, a downward extrusion cylinder 406 is fixedly installed at the center of the top of the partition 405, and the bottom push rod end of the extrusion cylinder 406 is fixedly connected to a horizontal pressure plate 407, and the top of the pressure plate 407 is fixedly connected to a plurality of vertical guide rods 408, and the guide rods 408 are connected to the partition 405 for vertical sliding connection, and a plurality of optical fiber sensors 409 are fixedly installed at the bottom of the front half of the pressure plate 407, and a plurality of flexible pressure sensors 410 are fixedly installed at the bottom of the rear half of the pressure plate 407.

[0054] The working principle and beneficial effects of the above technical solution are as follows: Based on Example 1, this embodiment designs the first detection mechanism 4 in detail;

[0055] When the first detection mechanism 4 is working, first, the rotating disc 3012 of the transmission mechanism 3 rotates to the position of the first detection mechanism 4, and then the controller 7 controls the second lead screw slide 402 to move forward to the first designated position, and then the lifting cylinder 403 pushes the first detection box 404 to descend, and then the extrusion cylinder 406 presses down, so that the optical fiber sensor 409 is close to the surface of the flexible substrate, and a certain gap is retained to detect the flatness; then the second lead screw slide 402 runs again, so that the flexible pressure sensor 410 is located above the flexible substrate, and at this time, the extrusion cylinder 406 is pressed down again, so that the pressure plate 407 presses the flexible substrate to detect its changes under different pressures;

[0056] Through the coordinated action of the pillar 1 401, the second lead screw slide 402, the lifting cylinder 2 403, the first detection box 404 and other components, the pressure detection and flatness detection of the flexible substrate are realized; the optical fiber sensor 409 on the pressure plate 407 is responsible for detecting the flatness of the flexible substrate, and the flexible pressure sensor 410 can monitor the deformation and stress of the substrate in the pressurization process in real time, so as to judge the performance indicators such as the strength and toughness of the flexible substrate; this technical solution not only improves the accuracy of detection, but also provides strong support for the quality control of the flexible substrate.

[0057] Example 4

[0058] On the basis of Example 1, Figure 1-Figure 3 and Figure 5 As shown, the second detection mechanism 5 includes: a column 501, a column 501 is fixedly installed on the top right side of the detection platform 1, and the column 501 is a third screw slide 502 fixedly installed on the top to slide along the front and rear directions. The left sliding end of the third screw slide 502 is fixedly installed with a vertical lifting cylinder 503, and the bottom end of the lifting cylinder 503 is fixedly connected to the second detection box 504. An electric lifting column 505 is fixedly installed at the inner center of the top wall of the second detection box 504. The lifting end of the bottom end of the electric lifting column 505 is fixedly connected to a horizontal mounting plate 506. A plurality of electronic probes 507 are fixedly provided at the bottom of the horizontal mounting plate 506, and the electronic probes 507 are electrically connected to the controller 7. The left and right side walls of the second detection box 504 are fixedly provided with an electronic atomizer 508. The bottom of the second detection box 504 is fixedly installed with a storage power supply 509, and the electronic probe 507 is electrically connected to the electronic atomizer 508 and the storage power supply 509 respectively.

[0059] The working principle and beneficial effects of the above technical solution are as follows: Based on Example 1, this embodiment designs the second detection mechanism 5 in detail;

[0060] When the second detection mechanism 5 is working, when the rotating disc 3012 of the conveying mechanism 3 rotates to the position below the second detection mechanism 5, the double-axis cylinder 3013 pushes the carrying plate 3014 to move to the right, and then the controller 7 controls the lifting cylinder 3 503 to push the second detection box 504 and other components down, so that the second detection box 504 buckles the flexible substrate to be tested on the carrying plate 3014, and then the electric lifting column 505 pushes the horizontal mounting plate 506 and the electronic probe 507 down to perform electrical detection on the flexible substrate to be tested.

[0061] Through the coordinated action of the second column 501, the third lead screw slide 502, the third lifting cylinder 503, the second detection box 504 and other components, the electronic probe 507 detection of the flexible substrate and the detection of the electrical changes of the flexible substrate under the condition of electronic atomization and moisture are realized. The electronic probe 507 can penetrate into the interior of the substrate to detect its electrical properties and microstructure; the electronic atomizer 508 can simulate the performance of the substrate in a humid environment; this technical solution not only improves the comprehensiveness and accuracy of the detection, but also provides an important basis for the performance evaluation of the substrate in a specific environment.

[0062] Example 5

[0063] On the basis of Example 1, Figure 1-Figure 3 , Figure 6 As shown, the third detection mechanism 6 includes: a column three 601, a column three 601 is fixedly installed on the top of the detection platform 1 in front of the rotating disk 3012, a fourth screw slide 602 sliding along the left and right directions is fixedly installed on the top of the column three 601, a vertical lifting cylinder four 603 is fixedly installed on the rear end sliding end of the fourth screw slide 602, a third detection box 604 is fixedly installed on the bottom of the lifting cylinder four 603, a plurality of industrial cameras one 605 are fixedly installed on the inner side of the top wall of the third detection box 604, a photoelectric distance sensor 606 is fixedly installed at the top center of the third detection box 604, a plurality of lighting lamps 607 are fixedly provided on the inner wall of the third detection box 604, and two groups of opposing photoelectric sensors 608 are fixedly provided on the side walls around the bottom of the third detection box 604.

[0064] The working principle and beneficial effects of the above technical solution are:

[0065] When the third detection mechanism 6 is working, when the rotating disk 3012 of the conveying mechanism 3 rotates to below the position of the third detection mechanism 6, the dual-axis cylinder 3013 pushes the carrying plate 3014 to move forward, and then the controller 7 controls the lifting cylinder four 603 to push the third detection box 604 and other components down, so that the third detection box 604 buckles the flexible substrate to be tested on the carrying plate 3014, and the photoelectric distance sensor 606 is responsible for providing accurate data of the descent height, and then the lighting lamp 607 lights up, and the industrial camera one 605 captures the image of the flexible substrate to be tested and analyzes and perceives the shape, size, position and other information of the flexible substrate to be tested, and at the same time detects whether the surface of the flexible substrate to be tested has defects, scratches and pollution, etc., and two sets of opposing photoelectric sensors 608 are responsible for detecting the length and width data of the flexible substrate to be tested.

[0066] On the basis of Example 1, this embodiment designs the third detection mechanism 6 in detail; through the synergistic effect of the third column 601, the fourth screw slide 602, the fourth lifting cylinder 603, the third detection box 604 and other components, the visual detection and photoelectric detection of the flexible substrate are realized. The industrial camera can capture the surface image of the substrate and perform image processing and analysis; the photoelectric distance sensor 606 and the photoelectric sensor 608 can monitor the position and size of the substrate in real time; this technical solution not only improves the efficiency and accuracy of the detection, but also provides strong support for the size control and quality control of the substrate.

[0067] Example 6

[0068] On the basis of Example 1, Figure 1-Figure 2 , Figure 7-Figure 8 As shown, it also includes a multifunctional detection mechanism 8, which includes: a box body 801, a clamping mechanism 804, a bending and driving mechanism 805 and an adsorption and flattening mechanism 806. The box body 801 is fixedly installed on the top left front side of the detection platform 1, and a material inlet 802 is opened on the rear side wall of the box body 801. The adsorption and flattening mechanism 806 is fixedly arranged on the top of the box body 801. Two groups of clamping mechanisms 804 are fixedly arranged on the bottom of the box body 801 in a left-right symmetrical manner. The bottom end of the clamping mechanism 804 is connected to the bending and driving mechanism 805, and a pair of horizontal partitions 803 are symmetrically arranged on the left and right side walls of the bottom of the box body 801.

[0069] The clamp mechanism 804 on the left side includes: a sliding block 8041, the top of the partition plate 803 is slidably connected to the sliding block 8041 left and right, the left end of the sliding block 8041 on the left is fixedly connected to the left side wall of the box body 801 by a spring 8042, the left end bottom of the sliding block 8041 is fixedly connected to the horizontal clamp plate 8043 in the left and right directions, a vertical mounting groove 8044 is opened in the sliding block 8041, the mounting groove 8044 is rotatably connected to the clamping screw 8045, the top of the clamping screw 8045 is fixedly connected to the output shaft end of the clamping motor 8046, the clamping motor 8046 is fixedly connected to the top of the sliding block 8041, the clamping screw 8045 is threadedly connected to the horizontal clamp plate 8047 in the left and right directions, the horizontal clamp plate 8047 is slidably connected to the sliding block 8041 up and down, and the horizontal clamp plate 8043 and the horizontal clamp plate 8047 are fixedly connected to the rubber block 8048.

[0070] The bending and driving mechanism 805 comprises: a vertical lead screw 8051 rotatably connected to the center of the bottom of the box body 801; the bottom end of the lead screw 8051 is fixedly connected to the output shaft end of the servo motor 8052; the servo motor 8052 is fixedly connected to the outer side of the bottom wall of the box body 801; the middle part of the lead screw 8051 is threadedly connected to the threaded sleeve 8053; the top of the threaded sleeve 8053 is symmetrically fixedly connected to a group of support rods 8054; the top of the support rods 8054 is fixedly connected to the horizontal support plate 8054. 055, an electric heating device 8056 is fixedly installed at the bottom of the support plate 8055, the threaded sleeve 8053 is symmetrically hinged to a pair of connecting rods 8057, the end of the connecting rod 8057 away from the threaded sleeve 8053 is hinged to an L-shaped support rod 8058, the top of the L-shaped support rod 8058 is fixedly connected to the sliding block 8041, the top of the L-shaped support rod 8058 slides left and right to penetrate the partition plate 2 803, and the bottom of the connecting rod 8057 away from the threaded sleeve 8053 is fixedly installed with a spring 2 8059.

[0071] The adsorption and leveling mechanism 806 comprises: a lead screw 4 8061, a lead screw 4 8061 is provided in the top wall of the box body 4 801 and rotates along the left and right directions, the left end of the lead screw 4 8061 is fixedly connected to the output shaft end of the servo motor 4 8062, the servo motor 4 8062 is fixedly connected to the top wall of the box body 4 801, the lead screw 4 8061 is threadedly connected to the slide 4 8063, the bottom end of the slide 4 8063 is fixedly connected to the C-type mounting plate 8064, the top of the C-type mounting plate 8064 is fixedly installed with a motor 5 8065, the top of the C-type mounting plate 8064 is fixedly installed with a lifting cylinder 5 8066, and the bottom of the lifting cylinder 5 8066 is fixedly connected to the adsorption plate 28 067. A plurality of vacuum suction nozzles 8068 are fixedly provided at the bottom end of the adsorption plate 8067. The front end of the output shaft of the motor 8065 is fixedly connected to the rotating rod 8069. The other end of the rotating rod 8069 is hinged to the connecting rod 8610. The bottom end of the connecting rod 8610 is hinged to the vertical rod 8611. The right end of the bottom of the C-type mounting plate 8064 is fixedly connected to the sleeve 8612. The vertical rod 8611 is slidably connected to the inner wall of the sleeve 8612 up and down. The bottom of the vertical rod 8611 is rotatably connected to the rolling roller 8613 along the front and rear directions. The vertical distance sensor 4 8614 and the industrial camera 8615 are fixedly installed on the left side of the bottom of the C-type mounting plate 8064.

[0072] The working principle and beneficial effects of the above technical solution are:

[0073] When the multifunctional detection mechanism 8 is working, when the feeding mechanism 2 adsorbs and transports the flexible substrate detected by the third detection mechanism 6 to the sliding seat 1 3023 of the translation conveying mechanism 302, the synchronous belt conveyor 3024 operates and traction, the sliding seat slides forward into the box body 4 801, and then the controller 7 controls the servo motor 4 8062 to operate, the servo motor 4 8062 drives the lead screw 4 8061 to rotate, so that the slide table 4 8063 moves to the top of the sliding seat, and then the lifting cylinder 5 8066 pushes the adsorption plate 2 8067 downward. The controller 7 controls the lifting cylinder 5 8066, the adsorption plate 2 8067 and the vacuum suction nozzle 2 8068 to put the flexible substrate on the support plate 8055, and then the clamping motor 8046 on the left and right sides drives the clamping screw 8045 to rotate, so that the top horizontal clamping plate 2 8047 and the rubber block 8048 move downward, and finally clamp the flexible substrate together with the horizontal clamping plate 1 8043. The servo motor 3 8052 then drives the lead screw 2 8051 to rotate, and the lead screw 2 8051 rotates to drive the threaded sleeve 8053 to move downward, and the threaded sleeve 8053 drives the support rod 8054 and the support plate 8055 to descend synchronously, and at the same time drives the connecting rod 1 8057 to descend, so that the L-shaped support rod 8058 moves closer to the center, and at the same time the motor 5 8065 at the top runs to drive the rotating rod 8069 to rotate, and the rotating rod 8069 drives the connecting rod 2 8610, the vertical rod 1 8611 and the rolling roller 8613 to slide up and down reciprocatingly. , making the flexible substrate bend back and forth, spring 1 8042 and spring 2 8059 provide the resetting elastic force of the sliding block 8041, while distance sensor 4 8614 and industrial camera 2 8615 observe and record the bending changes and image data of the flexible substrate, after bending to the specified time, motor 5 8065 stops, everything runs in reverse, and then the support plate 8055 lifts up the flexible substrate, the electric heating device 8056 works to detect the changes of the flexible substrate under different temperatures, and finally the rolling roller 8613 rolls left and right to smooth the flexible substrate.

[0074] On the basis of Example 1, this embodiment adds a multifunctional detection mechanism 8, including a box body 801, a clamping mechanism 804, a bending and driving mechanism 805, and an adsorption and flattening mechanism 806. Through the synergistic effect of the clamping mechanism 804 and the bending and driving mechanism 805, the flexible substrate is clamped and driven. The adsorption and flattening mechanism 806 can perform reciprocating bending detection and flattening treatment on the flexible substrate to simulate its stress conditions in actual applications. At the same time, the mechanism is also equipped with detection components such as an industrial camera 8615 and a distance sensor 8614, which can monitor the deformation of the substrate in the bending and flattening process in real time. This technical solution not only improves the comprehensiveness and accuracy of the detection, but also provides an important basis for the performance evaluation of the substrate in actual applications. In addition, the multifunctional detection mechanism 8 also has high flexibility and adaptability, and can be customized and adjusted according to actual needs.

[0075] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A flexible substrate detection device, characterized in that: include: A detection platform (1), a feeding mechanism (2), a conveying mechanism (3), a first detection mechanism (4), a second detection mechanism (5), a third detection mechanism (6) and a controller (7), wherein a feeding mechanism (2) is fixedly provided on the top of the left rear of the detection platform (1), a conveying mechanism (3) is fixedly provided on the top of the detection platform (1), a first detection mechanism (4) is fixedly provided on the detection platform (1) at the rear side of the conveying mechanism (3), a second detection mechanism (5) is fixedly provided on the detection platform (1) at the right side of the conveying mechanism (3), a third detection mechanism (6) is fixedly provided on the detection platform (1) at the front side of the conveying mechanism (3), and the conveying mechanism (3), the first detection mechanism (4), the second detection mechanism (5) and the third detection mechanism (6) are electrically connected to the controller (7) respectively; The feeding mechanism (2) comprises: a material storage box (201) and a gantry (202); The conveying mechanism (3) comprises: a rotating conveying mechanism (301) and a translation conveying mechanism (302); The rotary conveying mechanism (301) comprises: a rotary base (3011), the rotary base (3011) is fixedly installed on the top right side of the detection platform (1), the top of the rotary base (3011) is rotatably connected to a rotary disc (3012), four double-axis cylinders (3013) are fixedly installed on the top of the rotary disc (3012) in a centrally symmetrical manner, the movable end of each double-axis cylinder (3013) is fixedly connected to a bearing plate (3014), and the bearing plate (3014) is slidably connected to the top of the rotary disc (3012) in a radial direction of the rotary disc (3012); The translation conveying mechanism (302) comprises: a guide rail base (3021), the top of the inspection platform (1) is located in front of the gantry (202) and is fixedly provided with the guide rail base (3021), a pair of first guide rails (3022) along the front-back direction are fixedly installed on the top of the guide rail base (3021) in a left-right symmetrical manner, the top of the first guide rail (3022) is connected to a sliding seat (3023) in a front-back sliding manner, the bottom end of the sliding seat (3023) is connected to a synchronous belt conveyor (3024), and the synchronous belt conveyor (3024) is used to provide a sliding force for the sliding seat (3023); The first detection mechanism (4) comprises: a column (401), a column (401) is fixedly installed on the top of the detection platform (1) to the right rear of the rotating disk (3012), a second screw slide (402) sliding in the front-back direction is fixedly installed on the top of the column (401), a vertical lifting cylinder (403) is fixedly installed on the left movable end of the second screw slide (402), the bottom end of the lifting cylinder (403) is fixedly connected to the first detection box (404), and a horizontal partition (404) is fixedly connected to the middle of the first detection box (404). 05), a downward extrusion cylinder (406) is fixedly installed at the center of the top of the partition (405), the push rod end at the bottom of the extrusion cylinder (406) is fixedly connected to a horizontal pressure plate (407), the top of the pressure plate (407) is fixedly connected to a plurality of vertical guide rods (408), the guide rods (408) are slidably connected to the partition (405) up and down, a plurality of optical fiber sensors (409) are fixedly installed at the bottom of the front half of the pressure plate (407), and a plurality of flexible pressure sensors (410) are fixedly installed at the bottom of the rear half of the pressure plate (407); The second detection mechanism (5) comprises: a second column (501), the second column (501) is fixedly installed on the top right side of the detection platform (1), the third screw slide (502) sliding along the front-back direction is fixedly installed on the top of the second column (501), the left sliding end of the third screw slide (502) is fixedly installed with a vertical lifting cylinder (503), the bottom end of the lifting cylinder (503) is fixedly connected to the second detection box (504), and the electric lifting column (505) is fixedly installed at the inner center of the top wall of the second detection box (504). The lifting end of the bottom end of the electric lifting column (505) is fixedly connected to a horizontal mounting plate (506), a plurality of electronic probes (507) are fixedly provided at the bottom of the horizontal mounting plate (506), and the electronic probes (507) are all electrically connected to the controller (7); electronic atomizers (508) are fixedly provided on the left and right side walls of the second detection box (504); a storage power supply (509) is fixedly installed at the bottom of the second detection box (504), and the electronic probes (507), the electronic atomizer (508) and the storage power supply (509) are electrically connected respectively; The third detection mechanism (6) comprises: a column three (601), a column three (601) is fixedly installed on the top of the detection platform (1) in front of the rotating disk (3012), a fourth screw slide (602) sliding in the left and right directions is fixedly installed on the top of the column three (601), a vertical lifting cylinder four (603) is fixedly installed on the rear sliding end of the fourth screw slide (602), a third detection box (604) is fixedly installed on the bottom of the lifting cylinder four (603), a plurality of industrial cameras one (605) are fixedly installed on the inner side of the top wall of the third detection box (604), a photoelectric distance sensor (606) is fixedly installed at the top center of the third detection box (604), a plurality of lighting lamps (607) are fixedly provided on the inner wall of the third detection box (604), and two groups of oppositely projecting photoelectric sensors (608) are fixedly provided on the side walls around the bottom of the third detection box (604).

2. A flexible substrate detection device according to claim 1, characterized in that: The feeding mechanism (2) comprises: a material storage box (201), the material storage box (201) is fixedly installed on the left side of the top of the detection platform (1), a gantry (202) is provided on the top of the material storage box (201), the gantry (202) is fixedly connected to the top of the detection platform (1), a first screw slide (203) sliding along the left and right directions is fixedly provided on the top of the gantry (202), a vertical lifting cylinder (204) is fixedly installed on the movable end of the first screw slide (203), a push rod end at the bottom of the lifting cylinder (204) is fixedly connected to an adsorption plate (205), and a plurality of vacuum suction nozzles (206) are fixedly installed on the bottom of the adsorption plate (205).

3. A flexible substrate detection device according to claim 1, characterized in that: The invention also comprises a multifunctional detection mechanism (8), which comprises: a box body (801), a clamp mechanism (804), a bending and driving mechanism (805) and an adsorption and leveling mechanism (806). The box body (801) is fixedly installed at the top left front end of the detection platform (1), a material inlet (802) is opened on the rear side wall of the box body (801), an adsorption and leveling mechanism (806) is fixedly arranged on the top of the box body (801), two sets of clamp mechanisms (804) are fixedly arranged on the bottom of the box body (801) in a left-right symmetrical manner, the bottom end of the clamp mechanism (804) is connected to the bending and driving mechanism (805), and a pair of horizontal partitions (803) are symmetrically arranged on the left and right side walls of the bottom of the box body (801).

4. A flexible substrate detection device according to claim 3, characterized in that: The clamp mechanism (804) on the left side includes: a sliding block (8041), the top of the partition plate 2 (803) is slidably connected to the sliding block (8041) on the left side, the left end of the sliding block (8041) is fixedly connected to the left side wall of the box body 4 (801) through a spring 1 (8042), the bottom of the left end of the sliding block (8041) is fixedly connected to a horizontal clamp plate 1 (8043) in the left and right directions, and a vertical installation groove (8044) is opened in the sliding block (8041), and the installation groove (8044) is rotatably connected A clamping screw (8045), the top end of the clamping screw (8045) is fixedly connected to the output shaft end of the clamping motor (8046), the clamping motor (8046) is fixedly connected to the top end of the sliding block (8041), the clamping screw (8045) is threadedly connected to the horizontal clamp plate 2 (8047) in the left and right directions, the horizontal clamp plate 2 (8047) is slidably connected to the sliding block (8041) up and down, and the horizontal clamp plate 1 (8043) and the horizontal clamp plate 2 (8047) are both fixedly connected to the rubber block (8048).

5. A flexible substrate detection device according to claim 4, characterized in that: The bending and driving mechanism (805) comprises: a vertical lead screw (8051) rotatably connected to the bottom center of the box body (801); the bottom end of the lead screw (8051) is fixedly connected to the output shaft end of the servo motor (8052); the servo motor (8052) is fixedly connected to the outer side of the bottom wall of the box body (801); the upper middle part of the lead screw (8051) is threadedly connected to a threaded sleeve (8053); the top of the threaded sleeve (8053) is symmetrically fixedly connected to a group of support rods (8054); the top of the support rods (8054) is fixedly connected to the horizontal support plate (805) 5), an electric heating device (8056) is fixedly installed at the bottom of the support plate (8055), the threaded sleeve (8053) is symmetrically hinged to a pair of connecting rods (8057) on the left and right, the end of the connecting rod (8057) away from the threaded sleeve (8053) is hinged to an L-shaped support rod (8058), the top of the L-shaped support rod (8058) is fixedly connected to the sliding block (8041), the top of the L-shaped support rod (8058) slides left and right to penetrate the partition plate (803), and the bottom of the connecting rod (8057) away from the threaded sleeve (8053) is fixedly installed with a spring (8059).

6. A flexible substrate detection device according to claim 5, characterized in that: The adsorption and leveling mechanism (806) comprises: a lead screw 4 (8061), a lead screw 4 (8061) is rotatably provided in the top wall of the box body 4 (801) along the left and right directions, the left end of the lead screw 4 (8061) is fixedly connected to the output shaft end of the servo motor 4 (8062), the servo motor 4 (8062) is fixedly connected to the top wall of the box body 4 (801), the lead screw 4 (8061) is threadedly connected to the slide 4 (8063), the bottom end of the slide 4 (8063) is fixedly connected to the C-type mounting plate (8064), the top of the C-type mounting plate (8064) is fixedly installed with a motor 5 (8065), the top of the C-type mounting plate (8064) is fixedly installed with a lifting cylinder 5 (8066), and the bottom of the lifting cylinder 5 (8066) is fixedly connected to the adsorption plate 2 (8064). 067), a plurality of vacuum suction nozzles 2 (8068) are fixedly provided at the bottom end of the adsorption plate 2 (8067), the front end of the output shaft of the motor 5 (8065) ​​is fixedly connected to the rotating rod (8069), the other end of the rotating rod (8069) is hinged to the connecting rod 2 (8610), the bottom end of the connecting rod 2 (8610) is hinged to the vertical rod 1 (8611), the right end of the bottom of the C-shaped mounting plate (8064) is fixedly connected to the sleeve (8612), the vertical rod 1 (8611) is slidably connected to the inner wall of the sleeve (8612) up and down, the bottom of the vertical rod 1 (8611) is rotatably connected to the rolling roller (8613) along the front and rear direction, and the left side of the bottom of the C-shaped mounting plate (8064) is fixedly installed with a vertical distance sensor 4 (8614) and an industrial camera 2 (8615).

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