Magnetic beam positioning device

Abstract

The application discloses a magnetic control light beam positioning device, and belongs to the technical field of optical fiber passive device manufacturing, which comprises a main body mechanism, a launching mechanism and a suspension positioning mechanism; a plurality of first electromagnetic coils are arranged in the suspension positioning mechanism in a ring shape at intervals, so that the suspension positioning member is suspended between the first electromagnetic coils under the action of the attractive force or repulsive force of the first electromagnetic coils, and the quartz end cap is fixed on the suspension positioning member, so that the regular movement of the suspension positioning member is realized by adjusting the magnetic force and the magnetic pole direction of the electromagnetic coil, and the high-frequency and large-amplitude swing of the launching mechanism is realized. The magnetic control light beam positioning device is simple in structure and reasonable in design, the on-off of the electromagnetic coil, the size and direction of the current are used to realize the high-frequency and large-amplitude position change of the light beam under the action of the electromagnetic coil magnetic field, the degree of freedom of the position movement of the quartz end cap is increased, and the larger range of deflection is realized.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of optical fiber passive device manufacturing, and particularly relates to a magnetic control light beam positioning device. BACKGROUND

[0002] As an important strategic support technology, laser technology has a wide range of applications, including but not limited to precision manufacturing, cutting, welding, surface treatment, etc. The application of laser technology in these industries has significantly improved the production efficiency and product quality of the industries and promoted the intelligentization process of the industries.

[0003] Among them, the power improvement is an important branch of the development of laser technology, and the power synthesis is the main method of power improvement. It mainly controls the output light beam to superimpose the light beams at the target point, and then adjusts the laser output power, laser output aperture number and related laser parameters to realize the light beam synthesis with higher energy density and better light beam quality.

[0004] In the process of light beam synthesis, the positioning and deflection of the light beam is the most important and basic step, which requires rapid and large-scale adjustment of the laser beam output by the laser to ensure the actual synthesis effect. The traditional method is to use a fast mirror, but for the case of a large number of synthesis routes, the use of a fast mirror will undoubtedly increase the size of the system, and in the case of an increasing number of synthesis routes, it also causes a lot of trouble for subsequent adjustment, maintenance, repair, etc. Another method is to use a piezoelectric ceramic to push the fiber tip as the output end face to vibrate at a high frequency. However, with the increase of the output power of the laser, the fiber tip cannot meet the high-power output, and the laser output must be replaced by a quartz end cap output to improve the stability of the laser. However, the method of using a piezoelectric ceramic to deflect the light beam cannot achieve kilohertz and hundred-micron deflection at the same time, mainly because it is limited by the properties of the piezoelectric ceramic, and also related to the installation structure. In order to keep the piezoelectric ceramic in linkage during installation, a cross beam with a light and thin structure is used. During high-frequency deflection movement, the movement in a certain direction will be affected by the stiffness of the metal structure in other directions of the cross beam, causing the deflection amount to decrease and the quartz end cap to be more easily damaged. SUMMARY

[0005] In view of one or more of the above defects or improvement needs of the prior art, the application provides a magnetic control light beam positioning device which can realize high-frequency and large-amplitude position changes of the light beam.

[0006] To achieve the above purpose, the application provides a magnetic control light beam positioning device, which comprises a main body mechanism, a launching mechanism and a suspension positioning mechanism.

[0007] The main body mechanism comprises a base and fixing beams; the fixing beams are arranged in multiple along the side of the base, and one end of the fixing beam is fixed on the side of the base, and the other end is a suspended end;

[0008] The suspension positioning mechanism comprises first electromagnetic coils and a suspension positioning member; the first electromagnetic coils are arranged in multiple along the ring direction, and the first electromagnetic coils are fixedly arranged on the suspended end of the fixing beam; the suspension positioning member can be suspended under the magnetic force of the first electromagnetic coils, and the suspension positioning member can be controlled to swing by adjusting the current size and the magnetic pole direction of the first electromagnetic coils;

[0009] The transmission mechanism comprises an energy transmission optical fiber and a quartz end cap, and the energy transmission optical fiber is connected with the quartz end cap; the end of the quartz end cap away from the energy transmission optical fiber is a laser emission end, and the end is fixedly connected on the suspension positioning member to swing with the suspension positioning member.

[0010] As a further improvement of the application, the suspension positioning member is provided with a hollow structure with an inner diameter matched with the outer diameter of the quartz end cap, and the quartz end cap is arranged in and fixed in the hollow structure.

[0011] As a further improvement of the application, the suspension positioning member is provided with a first magnetic guide member; the first magnetic guide member is a whole piece wrapped around the outer periphery of the quartz end cap, or the first magnetic guide member is arranged in multiple along the ring direction of the outer periphery of the quartz end cap.

[0012] As a further improvement of the application, the base comprises a base plate and a protruding structure, and one end of the fixing beam is connected to the base plate; the protruding structure is hollow inside and arranged on the side of the base plate close to the fixing beam, and forms a T-shaped structure with the base plate.

[0013] One end of the energy transmission optical fiber passes through the inside of the base plate and the protruding structure in sequence and is connected with the quartz end cap.

[0014] As a further improvement of the application, a follow-up mechanism is further included, and the follow-up mechanism comprises second electromagnetic coils and a second magnetic guide member;

[0015] The second electromagnetic coils are arranged in multiple and arranged in the hollow inner wall of the protruding structure along the ring direction;

[0016] The second magnetic guide member is arranged corresponding to the second electromagnetic coils and fixedly arranged on the outer periphery of the energy transmission optical fiber, so that the energy transmission optical fiber can be suspended or fixed under the action of the second magnetic guide member and the second electromagnetic coils.

[0017] As a further improvement of the present application, the second magnetic conductive member is formed by stripping a part of the outer sheath of the energy transmission optical fiber in a ring shape, and a magnetic conductive coating is coated on the stripped part.

[0018] As a further improvement of the present application, the second magnetic conductive member is formed by stripping a part of the outer sheath of the energy transmission optical fiber in a ring shape, and a magnetic conductive block is sleeved on the outer periphery of the stripped part.

[0019] As a further improvement of the present application, at least one detector is further included to detect the displacement of the suspension positioning member.

[0020] The detector is arranged on the end surface of the chassis near one end of the protruding structure, or the detector is arranged on the end surface of the protruding structure away from the chassis.

[0021] As a further improvement of the present application, the fixed beam is made of a non-magnetic conductive material, and the fixed beam is arranged in an extension structure; a limiting screw knob is further arranged corresponding to the fixed beam, so as to realize the extension or shortening of the fixed beam through the limiting screw knob, and adjust the axial position of the first electromagnetic coil.

[0022] As a further improvement of the present application, the first electromagnetic coil is uniformly arranged in four on one side of the base in a ring shape, and the number of turns of each electromagnetic coil is determined according to the weight of the suspension positioning member and the quartz end cap.

[0023] The above-mentioned improved technical features can be combined with each other as long as they do not conflict with each other.

[0024] Overall, the above technical solutions conceived by the present application have the following beneficial effects compared with the prior art:

[0025] (1) The magnetic control light beam positioning device of the present application suspends the suspension positioning member between the first electromagnetic coils under the action of the attractive force or repulsive force of the first electromagnetic coils, and fixes the quartz end cap on the suspension positioning member, so as to realize the regular motion of the suspension positioning member by adjusting the magnetic force and the magnetic pole direction of the electromagnetic coil, and further realize the high-frequency and large-amplitude swing of the quartz end cap.

[0026] (2) The magnetic control light beam positioning device of the present application fixes or suspends the position of the energy transmission optical fiber under the action of the second electromagnetic coil, so as to make the energy transmission optical fiber move by controlling the magnetic force and the magnetic pole direction of the second electromagnetic coil when the quartz end cap swings at a high frequency, increase the degree of freedom and flexibility of the emission mechanism, and improve the movable range of the quartz end cap.

[0027] (3) The magnetic control light beam positioning device of the present application realizes feedback of the current in the magnetic field by arranging the detector to detect the displacement of the suspension positioning member, so as to achieve the purpose of closed-loop control.

[0028] (4) The magnetic control light beam positioning device of the present application adjusts the position of the first electromagnetic coil by elongating or shortening the fixed beam, so as to fine tune the front and back positions of the suspended quartz end cap without damaging the quartz end cap, and compensate for the focal length error of the system.

[0029] (5) The magnetic control light beam positioning device of the present application has simple structure and reasonable design, and realizes high frequency and large amplitude position change of the light beam under the action of the electromagnetic coil magnetic field by the on-off, current size and current direction of the electromagnetic coil, which increases the freedom degree of the position movement of the quartz end cap and realizes larger range of deflection, and has good application prospect and popularization value. BRIEF DESCRIPTION OF DRAWINGS

[0030] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiments will be briefly introduced as follows. Obviously, the drawings in the following description only represent some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative effort.

[0031] Fig. 1 is a side view structural schematic diagram of the magnetic control light beam positioning device in the embodiment of the present application;

[0032] Fig. 2 is a front view structural schematic diagram of the magnetic control light beam positioning device in the embodiment of the present application;

[0033] In all the drawings, the same reference signs represent the same technical features, specifically: 1, base; 101, base plate; 102, protruding structure; 2, fixed beam; 3, energy transmission optical fiber; 4, quartz end cap; 5, first electromagnetic coil; 6, suspension positioning member; 7, second electromagnetic coil; 8, second magnetic guide member; 9, detector. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical solutions and advantages of the present application more clear, the present application will be further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application, and are not used to limit the present application. In addition, the technical features involved in each embodiment of the present application described below can be combined with each other as long as they do not conflict with each other.

[0035] In the description of the present application, it needs to be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0036] In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise explicitly specified and limited.

[0037] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be understood broadly, for example, it can be fixed connection, or detachable connection, or integral; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through intermediate medium, it can be the internal communication of two elements or the interaction relationship of two elements, unless otherwise explicitly limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0038] In the present application, unless otherwise explicitly specified and limited, the first feature "on" or "under" the second feature can be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature "above", "over" and "on" the second feature can be that the first feature is directly above or obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "under" and "under" the second feature can be that the first feature is directly below or obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0039] Embodiment:

[0040] Please refer to Figs. 1-2 The magnetic control light beam positioning device in the preferred embodiment of the present application comprises a main body mechanism, an emitting mechanism and a suspension positioning mechanism, so as to support other structures through the main body mechanism, emit high-frequency light beams through the emitting mechanism, and suspend the emitting end of the emitting mechanism through the suspension positioning mechanism, and realize high-frequency yaw of the light beams.

[0041] Specifically, as shown in Fig. 1 The base 1 comprises a base plate 101 shaped as a cylinder or a cube and composed of an outer layer and an inner layer. The outer layer is a circuit board for facilitating the connection of the first electromagnetic coil 5 and the second electromagnetic coil 7 to electricity, and the inner layer is made of a non-magnetic metal material to avoid affecting the magnetic force of the first electromagnetic coil 5 and the second electromagnetic coil 7.

[0042] Correspondingly, the fixed beam 2 is made of a non-magnetic material and is arranged in multiple along a side of the base plate 101 in a ring shape, with one end of the fixed beam 2 fixedly connected to the base 1 and the other end suspended as a suspended end.

[0043] Preferably, the fixed beam 2 is of an overall telescopic structure, and a limiting screw knob is arranged corresponding to the fixed beam 2. The fixed beam 2 can be elongated or shortened by rotating the limiting screw knob as needed, so as to adjust the position of the suspended end of the fixed beam 2 relative to the base 1. In the subsequent system adjustment process, the position of the first electromagnetic coil 5 can be adjusted without damaging the quartz end cap 4, and the position of the suspended quartz end cap 4 can be fine-tuned, thereby compensating for the focal length error of the system.

[0044] Preferably, a protruding structure 102 is further arranged on the side of the base plate 101 close to the fixed beam 2. The protruding structure 102 is hollow inside, and is further preferably a hollow tetrahedron with a rectangular cross-sectional shape, forming a T-shaped structure in combination with the base plate 101.

[0045] In actual arrangement, the fixed beam 2 and the base 1 can be integrally arranged as a whole by mechanical processing or connected later by mechanical fixation under the premise of ensuring position accuracy.

[0046] Further, the suspension positioning mechanism in the preferred embodiment comprises the first electromagnetic coil 5 and the suspension positioning member 6. The first electromagnetic coil 5 is arranged in multiple in a ring shape, and is fixedly arranged at the suspended end of the fixed beam 2 to be supported by the fixed beam 2.

[0047] In actual arrangement, the number of the fixed beams 2 matches the number of the first electromagnetic coils 5, that is, one fixed beam 2 corresponds to one first electromagnetic coil 5. As shown in the preferred embodiment, four first electromagnetic coils 5 are uniformly arranged on one side of the base 1 in a ring shape, and the ring angle between every two adjacent first electromagnetic coils 5 is 90 degrees. Fig. 2

[0048] ​Correspondingly, the material of the suspension positioning member 6 at least includes a magnetic conductive material, so that it can be suspended under the action of the plurality of first electromagnetic coils 5, and the suspension positioning member 6 can be controlled to perform yaw by adjusting the current size and magnetic pole direction of the first electromagnetic coils 5. The suspension positioning member 6 in the preferred embodiment is a quadrangular body, and the cross section thereof is rectangular.

[0049] In actual arrangement, the number of the first electromagnetic coils 5 is determined according to the magnetic conductive part of the suspension positioning member 6 and the magnetic force required for the suspension and position adjustment of the first electromagnetic coils 5.

[0050] Further, the emission mechanism in the preferred embodiment includes the energy transmission optical fiber 3 and the quartz end cap 4. One end of the energy transmission optical fiber 3 passes through the inside hollow of the bottom disc 101 and the convex structure 102 in sequence, and is connected with the quartz end cap 4 by means of fusion.

[0051] Correspondingly, the end of the quartz end cap 4 away from the energy transmission optical fiber 3 is a laser output end, and the laser is emitted from the laser output end of the quartz end cap 4; at the same time, the quartz end cap 4 is fixedly arranged on the suspension positioning member 6, so as to drive the quartz end cap 4 to perform yaw through the suspension positioning member 6.

[0052] Preferably, corresponding to the arrangement of the quartz end cap 4, a hollow structure is arranged in the middle of the suspension positioning member 6, the inner diameter of the hollow structure matches the outer diameter of the quartz end cap 4, so that the quartz end cap 4 is fixedly arranged in the hollow structure. In the preferred embodiment, the overall thickness of the suspension positioning member 6 is at least 1 mm or more less than the length of the quartz end cap 4, so that both ends of the quartz end cap 4 protrude from both ends of the suspension positioning member 6, so as to avoid the influence of the hollow structure on the emission path and the range of the emission angle of the laser.

[0053] In actual arrangement, preferably, a screw hole is arranged on the outer periphery of the hollow structure, so that after the quartz end cap 4 is arranged in the hollow structure, the position of the quartz end cap 4 is adjusted and positioned by screwing a screw into the screw hole, and after the position adjustment is completed, the quartz end cap 4 is fixed in the hollow structure by means of ultraviolet optical glue.

[0054] Preferably, a first magnetic conductive member is arranged on the suspension positioning member 6, which can be arranged as a whole and wrapped around the outer periphery of the quartz end cap 4, or can be arranged as a plurality of small blocks and arranged along the outer periphery of the quartz end cap 4 in a ring-shaped and spaced manner, so as to realize the suspension of the suspension positioning member 6 and the quartz end cap 4 through the electromagnetic action between the first magnetic conductive member and the first electromagnetic coils 5. In actual arrangement, the size of the first magnetic conductive member is determined according to the weight of the quartz end cap 4 and the magnetic force of the first electromagnetic coils 5.

[0055] In actual arrangement, the number of turns of each first electromagnetic coil 5 is determined according to the weight of the suspension positioning member 6 and the quartz end cap 4, and the magnetic field generated by each first electromagnetic coil 5 is simulated and tested with the suspension positioning member 6, so that the generated magnetic field corresponds to the suspension positioning member 6, the position of the suspension positioning member 6 is controlled by adjusting the magnetic force and the magnetic pole direction of the first electromagnetic coil 5, and then the quartz end cap 4 is driven to swing by the suspension positioning member 6.

[0056] Since the electric field change rate and the adjustment rate can reach several kilohertz, the position of the quartz end cap 4 is controlled by magnetic suspension, so that the light beam emitted by the quartz end cap 4 can also reach an adjustment rate of several kilohertz, and since the quartz end cap 4 is in a suspended state and is not limited by other structures, it can realize larger displacement deflection or smaller range circular motion.

[0057] Preferably, the magnetic control light beam positioning device in the application further comprises a follow-up mechanism, which specifically comprises a second electromagnetic coil 7 and a second magnetic guide member 8, wherein the second electromagnetic coil 7 is arranged in multiple and is arranged on the hollow inner wall of the convex structure 102 in a ring direction. Fig. 2 As shown in FIG. 2, four second electromagnetic coils 7 are uniformly and evenly arranged on the hollow inner wall of the convex structure 102 in a ring direction.

[0058] Meanwhile, the second magnetic guide member 8 is arranged corresponding to the second electromagnetic coil 7 and is fixedly sleeved on the outer periphery of the energy transmission optical fiber 3 corresponding to the second electromagnetic coil 7, so that the energy transmission optical fiber 3 can be suspended and fixed under the action of the second magnetic guide member 8 and the second electromagnetic coil 7, to increase the freedom and flexibility of the emission mechanism in the suspension process, improve the freedom of the tail optical fiber when the quartz end cap 4 has a large range displacement, and improve the displacement range of the quartz end cap 4 under the condition of ensuring that the quartz end cap 4 and the energy transmission optical fiber 3 have appropriate stress near the melting point.

[0059] Preferably, in actual arrangement, the second magnetic guide member 8 can be formed by removing the outer sheath of the part of the energy transmission optical fiber 3 arranged in the convex structure 102 in a ring direction, exposing the inner bare fiber, and coating a magnetic guide plating layer on the removed part, and the thickness of the magnetic guide plating layer is greater than the removed thickness of the energy transmission optical fiber 3, so that the formed second magnetic guide member 8 protrudes from the outer peripheral wall of the energy transmission optical fiber 3. Of course, the magnetic guide block can also be directly sleeved as the second magnetic guide member 8 after the outer sheath of the part of the energy transmission optical fiber 3 is removed in a ring direction.

[0060] In actual operation, the magnetic pole direction and the magnetic force of the first electromagnetic coil 5 can be adjusted first to make the suspension positioning member 6 suspended, and then the magnetic pole direction and the magnetic force of the second electromagnetic coil 7 in the convex structure 102 can be adjusted to make the energy transmission optical fiber 3 suspended.

[0061] Further, the magnetic hole light beam positioning device in the application further comprises at least one detector 9, which can be a photoelectric detector or a magnetic field detector, so as to detect the displacement of the suspension positioning member 6 through the detector 9, and realize the feedback of the current in the magnetic field through signal conversion, so as to achieve the purpose of closed-loop control.

[0062] In actual setting, the detector 9 is arranged on the end face of the chassis 101 close to one end of the convex structure 102, or arranged on the end face of the convex structure 102 away from the chassis 101, as long as the detection end of the detector 9 is opposite to the suspension positioning member 6.

[0063] The magnetic control light beam positioning device in the application has simple structure and reasonable design, realizes the high frequency and large amplitude position change of the light beam under the action of the magnetic field of the electromagnetic coil through the on-off, size and direction of the current of the electromagnetic coil, increases the freedom degree of the position movement of the quartz end cap, realizes larger range of deflection, and has better application prospect and popularization value.

[0064] Those skilled in the art can easily understand that the above description is only the preferred embodiment of the application, and is not used to limit the application, and any modification, equivalent replacement and improvement made within the spirit and principle of the application shall be included in the protection scope of the application.

Claims

1. A magnetron beam positioning device, characterized by, The main body mechanism, the launching mechanism, the suspension positioning mechanism and the following mechanism are included. The main body mechanism includes a base and fixed beams, the fixed beams are arranged in multiple along the side of the base, and one end of the fixed beam is fixed on the side of the base, and the other end is a suspended end. The base includes a bottom disc and a protruding structure, one end of the fixed beam is connected to the bottom disc, and the protruding structure is hollow inside and arranged on the side of the bottom disc close to the fixed beam, forming a T-shaped structure with the bottom disc. The suspension positioning mechanism includes first electromagnetic coils and a suspension positioning member, the first electromagnetic coils are arranged in multiple along the ring, and the first electromagnetic coils are fixed on the suspended end of the fixed beam, the suspension positioning member can be suspended under the magnetic force of the first electromagnetic coils, and the suspension positioning member can be controlled to swing by adjusting the current size and the magnetic pole direction of the first electromagnetic coils. The launching mechanism includes an energy transmission optical fiber and a quartz end cap, one end of the energy transmission optical fiber passes through the bottom disc and the hollow inside of the protruding structure in sequence and is connected to the quartz end cap, the end of the quartz end cap away from the energy transmission optical fiber is a laser launching end, and the quartz end cap is fixedly connected to the suspension positioning member to swing with the suspension positioning member. The following mechanism includes second electromagnetic coils and a second magnetic guide member. The second electromagnetic coils are arranged in multiple and arranged on the hollow inner wall of the protruding structure along the ring. The second magnetic guide member is arranged corresponding to the second electromagnetic coils and fixedly sleeved on the outer periphery of the energy transmission optical fiber, so that the energy transmission optical fiber can be suspended or fixed under the action of the second magnetic guide member and the second electromagnetic coils.

2. The magnetron beam positioning device of claim 1, wherein, The suspension positioning member is provided with a hollow structure matching the outer diameter of the quartz end cap, and the quartz end cap is arranged in and fixed in the hollow structure.

3. The magnetron beam positioning device of claim 2, wherein, The suspension positioning member is provided with a first magnetic guide member, the first magnetic guide member is a whole piece wrapped around the outer periphery of the quartz end cap, or the first magnetic guide member is arranged in multiple along the ring of the outer periphery of the quartz end cap.

4. The magnetron beam positioning apparatus of claim 1, wherein, The second magnetic guide member is formed by removing the outer sheath of the energy transmission optical fiber along the ring and coating a magnetic guide layer on the removed part, and the thickness of the magnetic guide layer is greater than the removed thickness of the energy transmission optical fiber.

5. The magnetron beam positioning apparatus of claim 4, wherein, The second magnetic guide member is formed by removing the outer sheath of the energy transmission optical fiber along the ring and coating a magnetic guide layer on the removed part, and the thickness of the magnetic guide layer is greater than the removed thickness of the energy transmission optical fiber.

6. The magnetron beam positioning apparatus of claim 1, wherein, At least one detector is further included to detect the displacement of the suspension positioning member. The detector is arranged on the end face of the bottom disc close to one end of the protruding structure, or the detector is arranged on the end face of the protruding structure away from the bottom disc.

7. The magnetron beam positioning apparatus of claim 1, wherein, The fixed beam is made of non-magnetic material, and the fixed beam is arranged in an extension structure, a limiting screw knob is further arranged corresponding to the fixed beam, the extension or shortening of the fixed beam is realized through the limiting screw knob, and the axial position of the first electromagnetic coil is adjusted.

8. The magnetron beam positioning device according to any one of claims 1 to 7, characterized in that The first electromagnetic coils are evenly arranged in four along the ring on one side of the base, and the number of turns of each electromagnetic coil is determined according to the weight of the suspension positioning member and the quartz end cap.

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