A graphite boat disassembly and assembly device

Abstract

The present invention discloses a graphite boat disassembly and assembly device, comprising: a graphite boat disassembly and assembly machine main body, a graphite boat sheet buffer area, and a graphite boat clamping point loading and unloading machine. The graphite boat disassembly and assembly machine main body is docked with the graphite boat sheet buffer area, and the graphite boat sheet buffer area is docked with the graphite boat clamping point loading and unloading machine. A graphite boat rotation and handling mechanism, two graphite boat disassembly and assembly components, a graphite boat sheet transmission device, a loading and unloading turnover mechanism, and a graphite boat sheet handling mechanism are arranged inside the graphite boat disassembly and assembly machine main body. The two graphite boat disassembly and assembly components are located on both sides of the graphite boat sheet transmission device, and the graphite boat sheet handling mechanism is arranged above the two graphite boat disassembly and assembly components and the graphite boat sheet transmission device. The graphite boat rotation and handling mechanism is arranged above the loading and unloading turnover mechanism and the graphite boat sheet handling mechanism. In the present invention, the scrapped boat sheets, nuts, and ceramic rings are automatically replaced, and the automation degree of the whole process is high. The two groups of graphite boat disassembly and assembly components work alternately, and the disassembly and assembly are completed integrally, greatly improving the efficiency of graphite boat sheet calibration and replacement of accessories.

Description

Technical Field

[0001] The present invention relates to the technical field of graphite boat disassembly and assembly, and specifically relates to a graphite boat disassembly and assembly device. Background Art

[0002] With the continuous reduction of the cost of photovoltaic power generation, solar power generation will have a broader market space. As a carrier for plating anti-reflection films on solar cell wafers, the structure and size of the graphite boat directly affect the conversion efficiency and production efficiency of silicon wafers.

[0003] After the graphite boat is used for a period of time, the boat plates will become loose, and the surface of the boat plates will be covered with dust, affecting the efficiency of the graphite boat. Therefore, the graphite boat will be disassembled, the boat plates will be purged and cleaned of dust, and damaged accessories such as nuts, ceramic rings, and clamping points will be replaced. After replacing the accessories and calibration, the graphite boat plates will be assembled and applied.

[0004] The existing disassembly and assembly of graphite boats use independent mechanical equipment in cooperation with manual labor to complete disassembly and assembly, with low efficiency, and the scattered equipment occupies a large area.

[0005] Therefore, we propose a graphite boat disassembly and assembly device to facilitate solving the problems raised above. Summary of the Invention

[0006] The purpose of the present invention is to provide a graphite boat disassembly and assembly device to solve the problems raised in the above background art.

[0007] To achieve the above purpose, the present invention provides the following technical solution: A graphite boat disassembly and assembly device, comprising: a graphite boat disassembly and assembly machine main body, a graphite boat plate buffer area, and a graphite boat clamping point loading and unloading machine. The graphite boat disassembly and assembly machine main body is docked with the graphite boat plate buffer area, and the graphite boat plate buffer area is docked with the graphite boat clamping point loading and unloading machine;

[0008] A graphite boat rotation and handling mechanism, two graphite boat disassembly and assembly components, a graphite boat plate transmission device, a loading and unloading turnover mechanism, and a graphite boat plate handling mechanism are arranged in the graphite boat disassembly and assembly machine main body. The two graphite boat disassembly and assembly components are located on both sides of the graphite boat plate transmission device. A graphite boat plate handling mechanism is arranged above the two graphite boat disassembly and assembly components and the graphite boat plate transmission device. A graphite boat rotation and handling mechanism is arranged above the loading and unloading turnover mechanism and the graphite boat plate handling mechanism. The loading and unloading turnover mechanism caches the graphite boat;

[0009] The graphite boat disassembly and assembly component includes a disassembly and assembly mechanism, a first placement platform, a disassembly and assembly platform, and a second placement platform. The second placement platform is located on both sides of the graphite boat plate transmission device. The disassembly and assembly platform and the first placement platform are sequentially arranged in the direction away from the graphite boat plate transmission device. The disassembly and assembly mechanism is arranged above the disassembly and assembly platform and the first placement platform;

[0010] Both ends of the disassembly and assembly platform are provided with a qualified product placement platform, an electrode block buffer column, and a waste product recycling box. The electrode block buffer column is connected to the electrode block picking and placing mechanism;

[0011] A lifting and positioning mechanism is installed below the disassembly and assembly platform. The lifting and positioning mechanism includes a fixed platform plate, which is fixedly installed on the outer frames on both sides of the disassembly and assembly platform. Above the fixed platform plate, there is a lifting platform plate. Two linkage rods are slidably arranged on the lifting platform plate. Two third lifting drive mechanisms are arranged between the fixed platform plate and the lifting platform plate. The third lifting drive mechanism drives the lifting platform plate to lift. Below both ends of the lifting platform plate, two groups of horizontal pushing cylinders are respectively arranged. The telescopic end of the horizontal pushing cylinder is fixed to the connecting arm. The other end of the connecting arm is fixedly connected to the linkage rod. A number of driving link rods are fixedly installed on the linkage rod. The end of the driving link rod is installed with a clamping seat. The clamping seats are clamped in a staggered manner. The graphite boat sheet series rods are clamped inside the clamping seats. A number of pairs of nut positioning columns are fixedly installed on the fixed platform plate. The nut positioning columns pass through the disassembly and assembly platform and the clamping seat movably and are inserted and fixed at the bottom of the graphite boat sheet series rod;

[0012] A boat sheet buffer mechanism is arranged in the graphite boat sheet buffer area. The boat sheet buffer mechanism buffers the waste boat sheets and the qualified boat sheets.

[0013] Preferably, the graphite boat rotating and transporting mechanism includes two groups of symmetric first slide rails and a first conveying device. A transporter main body is slidably arranged on the first slide rail. The transporter main body is fixedly connected to the first conveying device. The first conveying device drives the transporter main body to move along the first slide rail above the graphite boat disassembly and assembly component and the loading and unloading turnover mechanism.

[0014] Preferably, the transporter main body includes a moving platform seat. Both ends of the moving platform seat are slidably connected to the first slide rail. Both ends of the moving platform seat are fixedly connected to the first conveying device. Two first lifting drive mechanisms are arranged on the moving platform seat. The lower end of the first lifting drive mechanism is connected to the jaw lifting seat. Claw assemblies are installed at both ends of the jaw lifting seat. The claw assemblies are automatically slidably connected to the jaw lifting seat. The claw assemblies are provided with motor assemblies for claw flipping drive.

[0015] Preferably, the graphite boat sheet transporting mechanism includes two groups of symmetric second slide rails and a second conveying device. Two moving cross beams are slidably arranged on the second slide rail. Both ends of the moving cross beam are fixedly connected to the second conveying device. The graphite boat sheet adsorption and transporting mechanism is hoisted in the middle of the moving cross beam.

[0016] Preferably, the graphite boat sheet adsorption and transporting mechanism includes a fixed seat, which is fixedly installed on the moving cross beam. An automatically lifting seat is slidably connected to the fixed seat. A cross frame is hoisted on the automatically lifting seat. A number of vacuum suction nozzles, positioning pins, and ceramic ring clamping mechanisms are arranged on the cross frame. The vacuum suction nozzles adsorb the boat sheets. Pressing down thimble assemblies are installed at both ends of the fixed seat.

[0017] Preferably, the disassembly and assembly mechanism includes a bracket which is fixedly arranged. A Y-axis moving component is arranged on the bracket, two groups of X-axis moving components are arranged on the Y-axis moving component, and a Z-axis disassembly and assembly manipulator is arranged on the X-axis moving component.

[0018] The Z-axis disassembly and assembly manipulator includes a Z-axis moving seat, and a nut disassembler and a vision detector are installed in the Z-axis moving seat.

[0019] The Z-axis moving seat is an automatic Z-axis moving module which drives the nut disassembler and the vision detector to move up and down.

[0020] A clamping jaw driven by a clamping cylinder is further arranged at the lower end of the Z-axis moving seat.

[0021] Preferably, end positioning mechanisms are installed on the lower surfaces at both ends of the disassembly and assembly platform. The end positioning mechanism includes a fourth lifting drive mechanism which drives a lifting connection to a lifting seat. A supporting clamping jaw, a lifting cylinder and a supporting positioning column are arranged on the lifting seat, and the lifting cylinder drives a lifting connection to the supporting clamping jaw.

[0022] Preferably, the first placement platform includes a fixed fixing plate. The fixing plate is fixedly connected to a second lifting drive mechanism in the middle. The telescopic end of the second lifting drive mechanism is fixedly connected to a lifting flat plate, and a plurality of guide columns are arranged between the fixing plate and the lifting flat plate.

[0023] A plurality of ceramic ring buffer columns are installed on the upper surface of the fixing plate. The ceramic ring buffer columns pass through the lifting flat plate movably. The ceramic ring buffer columns buffer the removed ceramic rings, and the removed graphite boat fittings such as nuts are placed on the upper surface of the lifting flat plate.

[0024] Preferably, a plurality of bottom positioning cylinders are installed below the disassembly and assembly platform, and the bottom positioning cylinders drive a positioning plate.

[0025] Preferably, the graphite boat sheet transmission device includes a first section of conveyor line and a second section of conveyor line. The first section of conveyor line and the second section of conveyor line are butted. A boat sheet carrier plate positioning mechanism is arranged in the first section of conveyor line, and a detection camera and an air knife are arranged at the end of the second section of conveyor line.

[0026] Compared with the prior art, the beneficial effects of the present invention are:

[0027] The graphite boat is loaded onto the loading and unloading turnover mechanism. The graphite boat rotating and handling mechanism rotates the graphite boat on the loading and unloading turnover mechanism by 90° and then transports it to the graphite boat disassembly and assembly component for the disassembly of nuts, ceramic rings and electrode blocks. The graphite boat sheet handling mechanism sequentially adsorbs the boat sheets and places them into the graphite boat sheet transmission device to be transported to the boat sheet temporary buffer mechanism, and then after being detected by the card point machine and replacing the card points, it is sent back to the graphite boat disassembly and assembly component for assembly. The assembled graphite boat is then sent to the loading and unloading turnover mechanism for unloading. During this process, the scrapped boat sheets, nuts and ceramic rings are automatically replaced. The whole process has a high degree of automation. Two groups of graphite boat disassembly and assembly components work alternately, and the disassembly and assembly are completed integrally, greatly improving the efficiency of graphite boat sheet calibration and replacement of accessories. The overall structure of the equipment is compact and occupies a small area. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 is a schematic structural diagram of the present invention;

[0029] Figure 2 is a schematic diagram of the main structure of the present invention;

[0030] Figure 3 is an exploded view of the main structure of the present invention;

[0031] Figure 4 is a schematic structural diagram of the graphite boat rotating and handling mechanism in the present invention;

[0032] Figure 5 for the present invention Figure 4 is an enlarged view of part A of the present invention;

[0033] Figure 6 is a schematic structural diagram of the graphite boat sheet handling mechanism in the present invention;

[0034] Figure 7 is a schematic structural diagram of the graphite boat sheet adsorption and handling mechanism in the present invention;

[0035] Figure 8 is a partial enlarged view of the graphite boat sheet adsorption and handling mechanism in the present invention;

[0036] Figure 9 is a schematic structural diagram of the graphite boat disassembly and assembly component in the present invention;

[0037] Figure 10 is an exploded view of the disassembly and assembly mechanism and the disassembly and assembly platform in the present invention;

[0038] Figure 11 for the present invention Figure 10 is an enlarged view of part B of the present invention;

[0039] Figure 12 is a schematic structural diagram of the disassembly and assembly mechanism in the present invention;

[0040] Figure 13It is a partial structural schematic diagram of the Z-axis disassembly and assembly manipulator in the present invention;

[0041] Figure 14 It is a structural schematic diagram of the end positioning mechanism in the present invention;

[0042] Figure 15 It is a structural schematic diagram of the first placement platform in the present invention;

[0043] Figure 16 It is a structural schematic diagram of the lifting and positioning mechanism in the present invention;

[0044] Figure 17 It is a partial side elevation view of the lifting and positioning mechanism in the present invention;

[0045] Figure 18 For the present invention Figure 16 Enlarged view of part D;

[0046] Figure 19 For the present invention Figure 10 Enlarged view of part C;

[0047] Figure 20 It is a structural schematic diagram of the graphite boat sheet transmission device in the present invention.

[0048] In the figure: 1. Main body of graphite boat disassembling and assembling machine; 2. Buffer area for graphite boat plates; 3. Loading and unloading machine for graphite boat clamping points; 4. Rotating and transporting mechanism for graphite boat; 41. First slide rail; 42. First conveying device; 44. Main body of the transporter; 441. Mobile platform seat; 442. First lifting drive mechanism; 443. Claw lifting seat; 444. Claw assembly; 5. Disassembling and assembling assembly for graphite boat; 51. Disassembling and assembling mechanism; 511. Bracket; 512. Y-axis moving assembly; 513. X-axis moving assembly; 514. Z-axis disassembling and assembling manipulator; 5141. Nut disassembling and assembling machine; 5142. Visual inspection machine; 5143. Z-axis moving seat; 5144. Clamping cylinder; 5145. Opening and closing claws; 52. First placement platform; 521. Fixed plate; 522. Second lifting drive mechanism; 523. Lifting flat plate; 524. Guide post; 525. Ceramic ring buffer post; 53. Disassembling and assembling platform; 531. Good product placement platform; 532. Electrode block buffer post; 533. Scrap recycling box; 534. Electrode block picking and placing mechanism; 54. Second placement platform; 55. Lifting and positioning mechanism; 551. Fixed platform plate; 552. Lifting platform plate; 553. Driving connecting rod; 554. Clamping seat; 555. Third lifting drive mechanism; 556. Horizontal pushing cylinder; 557. Nut positioning post; 558. Connecting arm; 559. Linkage rod; 56. End positioning mechanism; 561. Fourth lifting drive mechanism; 562. Supporting claws; 563. Lifting seat; 564. Lifting cylinder; 565. Supporting positioning post; 57. Bottom positioning cylinder; 6. Boat plate buffer mechanism; 7. Gantry transporting mechanism; 8. Temporary buffer mechanism for boat plates; 9. Graphite boat plate transmission device; 91. First section of conveyor line; 92. Second section of conveyor line; 93. Detection camera; 94. Air knife; 10. Loading and unloading turnover mechanism; 11. Graphite boat plate transporting mechanism; 111. Second slide rail; 112. Second conveying device; 113. Moving cross beam; 114. Graphite boat plate adsorption and transporting mechanism; 1141. Fixed seat; 1142. Automatic lifting seat; 1143. Cross frame; 1144. Vacuum suction nozzle; 1145. Positioning pin; 1146. Ceramic ring clamping mechanism; 1147. Pressing down thimble assembly. Detailed implementation manners

[0049] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0050] Please refer to Figure 1, the present invention provides a technical solution: a graphite boat disassembly and assembly device, comprising: a graphite boat disassembly and assembly machine main body 1, a graphite boat sheet buffer area 2, and a graphite boat clamping point loading and unloading machine 3. The graphite boat disassembly and assembly machine main body 1 is connected to the graphite boat sheet buffer area 2, and the graphite boat sheet buffer area 2 is connected to the graphite boat clamping point loading and unloading machine 3. After the graphite boat is disassembled by the graphite boat disassembly and assembly machine main body 1, the boat sheets enter the graphite boat sheet buffer area 2, then enter the graphite boat clamping point loading and unloading machine 3 to replace the clamping points, and then return to the graphite boat disassembly and assembly machine main body 1 for assembly.

[0051] Please refer to Figure 2 and Figure 3 , a graphite boat rotation and handling mechanism 4, two graphite boat disassembly and assembly components 5, a graphite boat sheet transmission device 9, a loading and unloading turnover mechanism 10, and a graphite boat sheet handling mechanism 11 are arranged in the graphite boat disassembly and assembly machine main body 1. The two graphite boat disassembly and assembly components 5 are located on both sides of the graphite boat sheet transmission device 9. A graphite boat sheet handling mechanism 11 is horizontally arranged above the two graphite boat disassembly and assembly components 5 and the graphite boat sheet transmission device 9. A graphite boat rotation and handling mechanism 4 is horizontally arranged above the loading and unloading turnover mechanism 10 and the graphite boat sheet handling mechanism 11. The loading and unloading turnover mechanism 10 buffers the graphite boat. The graphite boat rotation and handling mechanism 4 transports and flips the graphite boat on the loading and unloading turnover mechanism 10 by 90° and places it on the graphite boat disassembly and assembly component 5 for disassembly into boat sheets. The graphite boat sheet handling mechanism 11 places the disassembled boat sheets on the graphite boat sheet transmission device 9 and transports them to the graphite boat sheet buffer area 2. The boat sheets after replacing the clamping points are placed back on the graphite boat sheet transmission device 9 and transported back. They are transported to the graphite boat disassembly and assembly component 5 by the graphite boat sheet handling mechanism 11 for assembly. Then, the assembled graphite boat is transported to the loading and unloading turnover mechanism 10 for unloading by the graphite boat rotation and handling mechanism 4.

[0052] Please refer to Figure 4 , the graphite boat rotation and handling mechanism 4 includes two sets of symmetric first slide rails 41 and a first transmission device 42. A set of handling machine main bodies 44 are slidably arranged on the first slide rails 41. The handling machine main bodies 44 are fixedly connected to the first transmission device 42. The first transmission device 42 drives the handling machine main bodies 44 to move along the first slide rails 41 above the graphite boat disassembly and assembly components 5 and the loading and unloading turnover mechanism 10.

[0053] Please refer to Figure 5, the handler main body 44 includes a mobile platform base 441. The two ends of the mobile platform base 441 are slidably connected to the first slide rails 41. The two ends of the mobile platform base 441 are fixedly connected to the first conveying device 42. Two first lifting drive mechanisms 442 are arranged on the mobile platform base 441. The lower ends of the first lifting drive mechanisms 442 are connected to the jaw lifting seats 443. The two ends of the jaw lifting seats 443 are installed with jaw assemblies 444. The jaw assemblies 444 are automatically slidably connected to the jaw lifting seats 443. The jaw assemblies 444 are provided with motor assemblies for driving the jaw to flip, realizing the three-axis movement of the jaw assemblies 444, grasping the graphite boat and transporting it back and forth between the graphite boat disassembly and assembly component 5 and the loading and unloading turnover mechanism 10. At the same time, after the jaw assemblies 444 grasp the graphite boat, they are driven to rotate by the motor assemblies, so that the graphite boat is flipped by 90°.

[0054] Please refer to Figure 6 , the graphite boat sheet handling mechanism 11 includes two groups of symmetric second slide rails 111 and second conveying devices 112. Two moving cross beams 113 are slidably arranged on the second slide rails 111. The two ends of the moving cross beams 113 are fixedly connected to the second conveying devices 112. The graphite boat sheet adsorption and handling mechanism 114 is hoisted in the middle of the moving cross beams 113. The graphite boat sheet adsorption and handling mechanism 114 is driven by the second conveying device 112 to linearly move along the second slide rails 111, so that the graphite boat sheet adsorption and handling mechanism 114 adsorbs the graphite boat sheet and transports it back and forth between the graphite boat sheet transmission device 9 and the graphite boat disassembly and assembly component 5.

[0055] Please refer to Figure 7 and Figure 8 , the graphite boat sheet adsorption and handling mechanism 114 includes a fixed seat 1141. The fixed seat 1141 is fixedly installed on the moving cross beam 113. An automatic lifting seat 1142 is slidably connected to the fixed seat 1141. The automatic lifting seat 1142 hoists a cross frame 1143. A number of vacuum suction nozzles 1144, positioning pins 1145 and ceramic ring clamping mechanisms 1146 are arranged on the cross frame 1143. The vacuum suction nozzles 1144 adsorb the boat sheet. When adsorbing, the boat sheet is positioned by the positioning pins 1145. The ceramic ring clamping mechanism 1146 clamps the ceramic ring. The two ends of the fixed seat 1141 are installed with downward pressing thimble assemblies 1147, which are used to press down the graphite rods or ceramic rods at both ends of the graphite boat, keeping the graphite boat electrode blocks in a state to be grabbed.

[0056] Please refer to Figure 9, the graphite boat disassembly and assembly component 5 includes a disassembly and assembly mechanism 51, a first placement platform 52, a disassembly and assembly platform 53, and a second placement platform 54. The second placement platform 54 is located on one side of the graphite boat sheet transfer device 9. The disassembly and assembly platform 53 and the first placement platform 52 are arranged in sequence in the direction away from the graphite boat sheet transfer device 9. The disassembly and assembly mechanism 51 is arranged above the disassembly and assembly platform 53 and the first placement platform 52. After the graphite boat is rotated 90°, it is placed on the disassembly and assembly platform 53 for positioning. The disassembly and assembly mechanism 51 disassembles the nuts of the graphite boat. The graphite boat sheet adsorption and handling mechanism 114 adsorbs and places the boat sheets on the graphite boat sheet transfer device 9 in sequence. Then, the graphite boat sheet adsorption and handling mechanism 114 clamps and places the ceramic rings on the first placement platform 52. When returning, the boat sheets on the graphite boat sheet transfer device 9 are adsorbed and transported to the second placement platform 54 for caching. After all the boat sheets are returned, the boat sheets on the second placement platform 54 and the ceramic rings on the first placement platform 52 are transported to the disassembly and assembly platform 53 in sequence. Finally, the disassembly and assembly mechanism 51 assembles and detects the nuts, etc. After the detection is completed, it is transported to the loading and unloading turnover mechanism 10 for unloading by the graphite boat rotation and handling mechanism 4.

[0057] Please refer to Figure 10 and Figure 11 , at both ends of the disassembly and assembly platform 53, there are a good product placement platform 531, an electrode block buffer column 532, and a waste product recycling box 533. The electrode block buffer column 532 is connected to the electrode block picking and placing mechanism 534. The good product placement platform 531 pre-stores good nuts and ceramic rings for replacing the worn nuts and ceramic rings removed from the graphite boat. The worn nuts and ceramic rings are put into the waste product recycling box 533 for recycling. The electrode block buffer column 532 is used for buffering the disassembled electrode sheets. The electrode block picking and placing mechanism 534 is used to lift the electrode block to the top of the buffer column for easy removal of the electrode block.

[0058] Please refer to Figure 12 and Figure 13 , the disassembly and assembly mechanism 51 includes a bracket 511. The bracket 511 is fixedly arranged. A Y-axis moving component 512 is arranged on the bracket 511. Two groups of X-axis moving components 513 are arranged on the Y-axis moving component 512. A Z-axis disassembly and assembly manipulator 514 is arranged on the X-axis moving component 513 to realize the movement of the Z-axis disassembly and assembly manipulator 514 along the X, Y, and Z axes;

[0059] The Z-axis disassembly and assembly manipulator 514 includes a Z-axis moving seat 5143. A nut disassembly and assembly machine 5141 and a vision inspection machine 5142 are installed in the Z-axis moving seat 5143. The nut disassembly and assembly machine 5141 is used for disassembling and assembling nuts and other accessories. The removed nuts are placed on the first placement platform 52. The vision inspection machine 5142 is used for taking pictures of nuts and other accessories to position and detect whether the nuts and other accessories are worn;

[0060] The Z-axis moving seat 5143 is an automatic Z-axis moving module that drives the nut disassembly and assembly machine 5141 and the vision inspection machine 5142 to lift and lower;

[0061] At the lower end of the Z-axis moving seat 5143, there is also an opening and closing jaw 5145 driven by a clamping cylinder 5144. The opening and closing jaw 5145 is used to clamp the electrode block and the ceramic ring, place the electrode block on the electrode block buffer column 532, or remove it from the electrode block buffer column 532 and place it on the graphite boat. The scrapped nuts and ceramic rings are put into the scrap recycling box 533.

[0062] Please refer to Figure 10 and Figure 14 As shown in, at the lower surfaces of both ends of the disassembly and assembly platform 53, an end positioning mechanism 56 is installed. The end positioning mechanism 56 includes a fourth lifting drive mechanism 561. The fourth lifting drive mechanism 561 drives the lifting connection of the lifting seat 563. On the lifting seat 563, there are a supporting jaw 562, a lifting cylinder 564, and a supporting positioning column 565. The lifting cylinder 564 drives the lifting connection of the supporting jaw 562. When disassembling the boat slice, the lower end of the series connection rod of the graphite boat slice is lifted and fixed by the supporting positioning column 565, which is convenient for rotating and disassembling the nut at the top. After disassembling the boat slice, the supporting positioning column 565 descends, and the supporting jaw 562 rises to clamp the series connection rod to prevent the series connection rod from shaking.

[0063] Please refer to Figure 15 As shown in, the first placement platform 52 includes a fixed fixing plate 521. The fixing plate 521 is fixedly connected to a second lifting drive mechanism 522 in the middle. The telescopic end of the second lifting drive mechanism 522 is fixedly connected to a lifting flat plate 523. Between the fixing plate 521 and the lifting flat plate 523, there are several guiding columns 524. The guiding columns 524 are used for guiding to make the fixing plate 521 and the lifting flat plate 523 lift vertically;

[0064] On the upper surface of the fixing plate 521, several ceramic ring buffer columns 525 are installed. The ceramic ring buffer columns 525 pass through the lifting flat plate 523 movably. The ceramic ring buffer columns 525 are used to buffer the removed ceramic rings. The upper surface of the lifting flat plate 523 is used to place the removed accessories such as nuts.

[0065] Please refer to Figure 10 、 Figures 15 to 18, a lifting and positioning mechanism 55 is installed below the disassembly and assembly platform 53. The lifting and positioning mechanism 55 includes a fixed platform plate 551, which is suspended and hoisted below the disassembly and assembly platform 53. Above the fixed platform plate 551, there is a lifting platform plate 552. Two linkage rods 559 are slidably arranged on the lifting platform plate 552. Between the fixed platform plate 551 and the lifting platform plate 552, two third lifting drive mechanisms 555 are arranged. The third lifting drive mechanism 555 drives the lifting platform plate 552 to lift and lower. Below both ends of the lifting platform plate 552, two groups of horizontal push cylinders 556 are respectively arranged. The telescopic ends of the horizontal push cylinders 556 are fixed to the connecting arms 558. The other ends of the connecting arms 558 are fixedly connected to the linkage rods 559. A number of drive link rods 553 are fixedly installed on the linkage rods 559. Clamping seats 554 are installed at the ends of the drive link rods 553. The clamping seats 554 are clamped in a staggered manner. A number of pairs of nut positioning columns 557 are installed on the fixed platform plate 551. The nut positioning columns 557 pass through the clamping seats 554 and the disassembly and assembly platform 53 movably;

[0066] The nut positioning columns 557 fix the nuts at the bottom of the graphite boat sheet series connection rod from below, so that the series connection rod is fixed, and then it is convenient to disassemble and assemble the nuts at the top of the series connection rod. The third lifting drive mechanism 555 drives the lifting platform plate 552 to lift and lower, driving the clamping seats 554 to rise. The horizontal push cylinders 556 drive the two linkage rods 559 to approach through the connecting arms 558, so that the clamping seats 554 clamp the graphite boat sheet series connection rod to make it vertical and stable.

[0067] Please refer to Figure 10 and Figure 19 , a number of bottom positioning cylinders 57 are installed below the disassembly and assembly platform 53. The bottom positioning cylinders 57 drive the positioning plates to clamp the graphite boat sheets from the side to position the sides of the graphite boat.

[0068] Please refer to Figure 20 , the graphite boat sheet transmission device 9 includes a first section of conveyor line 91 and a second section of conveyor line 92. The first section of conveyor line 91 and the second section of conveyor line 92 are butted. In the first section of conveyor line 91, a boat sheet carrier positioning mechanism is arranged. The boat sheet carrier positioning mechanism is composed of a cylinder driving a convex shaft to insert into the boat sheet to realize boat sheet positioning. At the end of the second section of conveyor line 92, a detection camera 93 and an air knife 94 are arranged. The detection camera 93 is used to detect the appearance and clamping points on the boat sheet. At the same time, the air knife 94 cleans the dust on the surface of the boat sheet and the graphite boat residues on the carrier plate.

[0069] Please refer to Figure 2 , a boat sheet caching mechanism 6 is arranged in the graphite boat sheet buffer area 2. The boat sheet caching mechanism 6 is used to cache scrapped boat sheets and good-quality boat sheets. The detected unqualified boat sheets are put into the boat sheet caching mechanism 6 for discharging, and the good-quality boat sheets are taken away to replace the scrapped boat sheets;

[0070] The boat piece caching mechanism 6 is connected to the boat piece temporary caching mechanism 8, and the boat piece temporary caching mechanism 8 is connected to the boat piece clamping point machine. A gantry handling mechanism 7 is horizontally arranged above the boat piece temporary caching mechanism 8 and the boat piece caching mechanism 6. The gantry handling mechanism 7 travels back and forth through the boat piece temporary caching mechanism 8, the boat piece caching mechanism 6, and the graphite boat piece transmission device 9 for handling boat pieces among the three parties.

[0071] Working principle: The graphite boat is loaded onto the loading and unloading turnover mechanism 10. The graphite boat rotating handling mechanism 4 rotates the graphite boat on the loading and unloading turnover mechanism 10 by 90° and then transports it to the graphite boat disassembly and assembly component 5 for disassembling nuts, ceramic rings, and electrode blocks. The graphite boat piece handling mechanism 11 sequentially adsorbs the boat pieces and places them into the graphite boat piece transmission device 9 for transportation to the boat piece temporary caching mechanism 8. After being detected by the clamping point machine and having the clamping points replaced, it is sent back to the graphite boat disassembly and assembly component 5 for assembly. The assembled graphite boat is then sent to the loading and unloading turnover mechanism 10 for unloading.

[0072] During this process, the scrapped boat pieces, nuts, and ceramic rings are automatically replaced.

[0073] The whole process has a high degree of automation. The two graphite boat disassembly and assembly components 5 work alternately, and the disassembly and assembly are completed integrally, greatly improving the efficiency of graphite boat piece calibration and replacement of accessories. The structure is compact and occupies a small area.

[0074] The content not described in detail in this specification belongs to the prior art well-known to those skilled in the art.

[0075] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A graphite boat disassembly and assembly device, comprising: A graphite boat disassembly and assembly machine body (1), a graphite boat sheet buffer area (2) and a graphite boat card point loading and unloading machine (3), wherein the graphite boat disassembly and assembly machine body (1) is connected to the graphite boat sheet buffer area (2), and the graphite boat sheet buffer area (2) is connected to the graphite boat card point loading and unloading machine (3); The invention is characterized in that: a graphite boat rotating and transporting mechanism (4), two graphite boat disassembly and assembly components (5), a graphite boat sheet transmission device (9), a loading and unloading turnover mechanism (10) and a graphite boat sheet transmission mechanism (11) are arranged in the main body (1) of the graphite boat disassembly and assembly machine; the two graphite boat disassembly and assembly components (5) are located on both sides of the graphite boat sheet transmission device (9); a graphite boat sheet transmission mechanism (11) is arranged above the two graphite boat disassembly and assembly components (5) and the graphite boat sheet transmission device (9); a graphite boat rotating and transporting mechanism (4) is arranged above the loading and unloading turnover mechanism (10) and the graphite boat sheet transmission mechanism (11); and the loading and unloading turnover mechanism (10) buffers the graphite boat; The graphite boat disassembly assembly component (5) comprises a disassembly assembly mechanism (51), a first placement platform (52), a disassembly assembly platform (53) and a second placement platform (54), wherein the second placement platform (54) is located on both sides of the graphite boat sheet transmission device (9), and the disassembly assembly platform (53) and the first placement platform (52) are sequentially arranged in a direction away from the graphite boat sheet transmission device (9) on the second placement platform (54), and the disassembly assembly platform (53) and the first placement platform (52) are arranged above the disassembly assembly platform (53) and the first placement platform (52); The two ends of the disassembly and assembly platform (53) are provided with a good product placement platform (531), an electrode block buffer column (532) and a scrapped product recovery box (533); the electrode block buffer column (532) is connected to an electrode block taking and placing mechanism (534); A lifting and positioning mechanism (55) is installed below the disassembly and assembly platform (53). The lifting and positioning mechanism (55) comprises a fixed platform plate (551). The fixed platform plate (551) is fixedly installed on the outer frames on both sides. A lifting platform plate (552) is arranged above the fixed platform plate (551). Two linkage rods (559) are slidably arranged on the lifting platform plate (552). Two third lifting drive mechanisms (555) are arranged between the fixed platform plate (551) and the lifting platform plate (552). The third lifting drive mechanisms (555) drive the lifting platform plate (552) to rise and fall. Two sets of horizontal driving mechanisms are respectively arranged below the two ends of the lifting platform plate (552). A cylinder (556) is provided, wherein the telescopic end of the horizontally-pushing cylinder (556) is fixedly connected to a connecting arm (558), the other end of the connecting arm (558) is fixedly connected to a linkage rod (559), a plurality of driving connecting rods (553) are installed on the linkage rod (559), a clamping seat (554) is installed at the end of the driving connecting rod (553), the clamping seat (554) is staggered and clamped, the graphite boat sheet series rod is clamped inside the clamping seat (554), a plurality of pairs of nut positioning columns (557) are fixedly installed on the fixed platform plate (551), the nut positioning columns (557) movably penetrate the disassembly platform (53) and the clamping seat (554) and then are plugged into and fixed to the bottom of the graphite boat sheet series rod; A boat cache mechanism (6) is arranged in the graphite boat cache area (2), and the boat cache mechanism (6) caches scrapped boats and good boats.

2. The graphite boat disassembly and assembly equipment according to claim 1, characterized in that: The graphite boat rotating transport mechanism (4) comprises two sets of symmetrical first slide rails (41) and a first conveying device (42); a transport machine body (44) is slidably arranged on the first slide rails (41); the transport machine body (44) is fixedly connected to the first conveying device (42); the first conveying device (42) drives the transport machine body (44) to move along the first slide rails (41) and pass over the graphite boat disassembly and assembly assembly (5) and the loading and unloading turnover mechanism (10).

3. The graphite boat disassembly and assembly equipment according to claim 2, characterized in that: The conveyor body (44) comprises a mobile platform seat (441), the two ends of the mobile platform seat (441) are slidably connected to the first slide rail (41), the two ends of the mobile platform seat (441) are fixedly connected to the first conveying device (42), two first lifting drive mechanisms (442) are arranged on the mobile platform seat (441), the lower ends of the first lifting drive mechanisms (442) are connected to the clamping claw hoisting seat (443), the two ends of the clamping claw hoisting seat (443) are installed with clamping claw assemblies (444), the clamping claw assembly (444) is automatically slidably connected to the clamping claw hoisting seat (443), and the clamping claw assembly (444) is provided with a motor assembly for driving the clamping claw to flip.

4. The graphite boat disassembly and assembly equipment according to claim 1, characterized in that: The graphite boat transport mechanism (11) comprises two sets of symmetrical second slide rails (111) and a second conveying device (112); two movable beams (113) are slidably arranged on the second slide rails (111); both ends of the movable beams (113) are fixedly connected to the second conveying device (112); and a graphite boat adsorption transport mechanism (114) is centrally mounted on the movable beams (113).

5. The graphite boat disassembly and assembly equipment according to claim 4, characterized in that: The graphite boat sheet adsorption and transport mechanism (114) comprises a fixed seat (1141), the fixed seat (1141) is fixedly mounted on the movable crossbeam (113), the fixed seat (1141) is slidably connected to an automatic lifting seat (1142), the automatic lifting seat (1142) is hoisted on a cross frame (1143), a plurality of vacuum suction nozzles (1144) and positioning pins (1145) and a ceramic ring clamping mechanism (1146) are provided on the cross frame (1143), the vacuum suction nozzle (1144) adsorbs the boat sheet, and downward pressing pin assemblies (1147) are installed at both ends of the fixed seat (1141).

6. The graphite boat disassembly and assembly equipment according to claim 1, characterized in that: The disassembly and assembly mechanism (51) comprises a bracket (511), the bracket (511) is fixedly arranged, a Y-axis moving assembly (512) is arranged on the bracket (511), two groups of X-axis moving assemblies (513) are arranged on the Y-axis moving assembly (512), and a Z-axis disassembly and assembly robot (514) is arranged on the X-axis moving assembly (513); The Z-axis disassembly and assembly robot (514) comprises a Z-axis moving seat (5143), and a nut disassembly and assembly machine (5141) and a visual inspection machine (5142) are installed in the Z-axis moving seat (5143); The Z-axis moving seat (5143) is an automatic Z-axis moving module, driving the nut disassembly and assembly machine (5141) and the visual inspection machine (5142) to rise and fall; The lower end of the Z-axis movable seat (5143) is also provided with an opening and closing clamping claw (5145) driven by a clamping cylinder (5144).

7. The graphite boat disassembly and assembly equipment according to claim 1, characterized in that: The lower surfaces of both ends of the disassembly and assembly platform (53) are provided with end positioning mechanisms (56), the end positioning mechanisms (56) comprising a fourth lifting drive mechanism (561), the fourth lifting drive mechanism (561) driving the lifting connection to the lifting seat (563), the lifting seat (563) being provided with a supporting clamping claw (562), a lifting cylinder (564) and a supporting positioning column (565), the lifting cylinder (564) driving the lifting connection to the supporting clamping claw (562).

8. The graphite boat disassembly and assembly equipment according to claim 1, characterized in that: The first placement platform (52) comprises a fixed fixing plate (521), the fixed plate (521) is centrally fixedly connected to a second lifting drive mechanism (522), a telescopic end of the second lifting drive mechanism (522) is fixedly connected to a lifting flat plate (523), and a plurality of guide columns (524) are provided between the fixed plate (521) and the lifting flat plate (523); A plurality of ceramic ring cache columns (525) are installed on the upper surface of the fixed plate (521). The ceramic ring cache columns (525) movably penetrate the lifting plate (523). The ceramic ring cache columns (525) cache the removed ceramic rings. The removed graphite boat accessories are placed on the upper surface of the lifting plate (523).

9. The graphite boat disassembly and assembly equipment according to claim 1, characterized in that: A plurality of bottom positioning cylinders (57) are installed below the disassembly and assembly platform (53), and the bottom positioning cylinders (57) drive positioning plates to clamp the graphite boat sheet from the side, thereby positioning the side of the graphite boat sheet.

10. The graphite boat disassembly and assembly equipment according to claim 1, characterized in that: The graphite boat sheet transmission device (9) comprises a first section conveying line (91) and a second section conveying line (92), the first section conveying line (91) and the second section conveying line (92) are butted against each other, a boat sheet carrier positioning mechanism is arranged in the first section conveying line (91), and a detection camera (93) and a wind knife (94) are arranged at the end of the second section conveying line (92).

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