A delivery pipe assembly for phosphorus trifluoride preparation

Abstract

The invention discloses a conveying pipe group for preparing phosphorus trifluoride, comprising a conveying pipe, an outer coating pipe, and also comprising: a reversing guide structure, comprising a first flip guide plate, a second flip plate, a flip member, a movable conductive member, and a relay pipe; a leak detection structure, comprising a closed sleeve sleeved on the outer side of the conveying pipe, and tension sensors are arranged on the two flip members; a leakage point detection structure, wherein the outer coating pipe is composed of a semi-arc segment and an eccentric segment, the leakage point detection structure comprises a first leakage point detector slidably arranged on the outer side of the semi-arc segment, and a second leakage point detector is slidably arranged on the outer side of the eccentric segment. When phosphorus trifluoride liquid leaks, it will splash onto the semi-arc segment or the eccentric segment and cause vibration to the semi-arc segment or the eccentric segment, and be detected by the first leakage point detector or the second leakage point detector. The invention utilizes a special pipeline structure and an external pipeline detection structure to deal with long pipelines, reduces the number of pipeline detection structures arranged, and improves the detection sensitivity.

Description

Technical Field

[0001] The invention relates to a fluid conveying pipeline, in particular to a conveying pipe set for preparing phosphorus trifluoride. Background Art

[0002] Phosphorus trifluoride can be used as a fluorinating agent. Phosphorus trifluoride can perform ion transfer and is used in the fields of electronics industry, battery manufacturing, polymer materials and catalysts. In semiconductor manufacturing, phosphorus trifluoride becomes plasma gas under the action of microwaves and is doped into semiconductors to significantly improve semiconductor performance. In the field of polymer materials, phosphorus trifluoride can be used as a reactant to synthesize fluorinated organic dithiophosphates, terephthalate esters and other polymer materials with excellent anti-corrosion properties. Phosphorus trifluoride is a gas at room temperature and needs to be condensed into a liquid at low temperature before filling. Due to the toxicity of phosphorus trifluoride, the requirements for pipelines during filling are very high.

[0003] When traditional phosphorus trifluoride is filled, a casing is usually installed on the outside of the pipeline and an inert gas is passed through the casing. Even if a leak occurs, it can be diluted by the inert gas and blocked by the casing. However, it is difficult for workers to detect the location of the leak when inspecting the leak. Existing technicians will install gas sensors, liquid sensors and other sensing detection structures in the pipeline. However, due to the long length of the pipeline, if the spacing is large, it is difficult to capture the correct point. If the spacing is small, the overall cost is very high, and the entire filling pipeline needs to be disassembled and evacuated during maintenance, resulting in filling stagnation. The cylinder cannot be fully filled and capped, and it is difficult to reopen it for filling.

[0004] Therefore, this case aims to provide a transportation pipe group for the preparation of phosphorus trifluoride, which can not only protect the pipeline, but also conduct the phosphorus trifluoride liquid to other pipelines after the pipeline leaks. At the same time, it uses a special pipeline structure and an external pipeline detection structure to deal with long pipelines, reduce the number of pipeline detection arrangements, and improve the sensitivity of detection. Summary of the invention

[0005] The present invention provides a conveying pipe set for preparing phosphorus trifluoride, which can effectively solve the above problems.

[0006] The present invention is achieved in that:

[0007] A delivery pipe set for preparing phosphorus trifluoride, comprising a delivery pipe for delivering phosphorus trifluoride liquid, wherein an outer sheathing pipe is sleeved on the outer side of the delivery pipe, and an inert gas is filled in the gap between the outer sheathing pipe and the delivery pipe. The delivery pipe set also comprises:

[0008] The reversing guide structure comprises a first flip guide plate and a second flip plate arranged inside the delivery pipe, wherein the first flip guide plate and the second flip plate are arranged in opposite directions and symmetrically with each other, and the tops of the first flip guide plate and the second flip plate are connected with a flip member penetrating the delivery pipe and the outer covering pipe, and the flip members are both provided with movable conducting members, and a relay pipe is connected between the two movable conducting members;

[0009] The anti-leakage detection structure comprises a sealing sleeve sleeved on the outside of the delivery pipe, and tension sensors are arranged on the two flipping members, and the tension sensors are attached to the outer side of the sealing sleeve and are electrically connected to the power end of the flipping member. When the tension sensor detects that the tension of the sealing sleeve is changed, it is judged that the delivery pipe is leaking, and then the flipping member is rotated to communicate with the movable conductive member, so that the phosphorus trifluoride liquid continues to be transmitted along the relay pipe;

[0010] A leakage detection structure, wherein the outer sheath tube is composed of a semi-arc segment and an eccentric segment, the semi-arc segment is located at the upper end of the conveying tube, and the eccentric segment is located at the lower end of the conveying tube, the leakage detection structure comprises a first leakage detector slidably arranged on the outside of the semi-arc segment, and a second leakage detector is slidably arranged on the outside of the eccentric segment, when the phosphorus trifluoride liquid leaks, it will splash onto the semi-arc segment or the eccentric segment and cause vibration to the semi-arc segment or the eccentric segment, and be detected by the first leakage detector or the second leakage detector.

[0011] As a further improvement, the first flip guide plate and the second flip plate have the same structural size, and the first flip guide plate includes a circular plate with a diameter equal to the inner diameter of the conveying pipe. The circular plate is hollow, and a liquid inlet groove is provided on one side of the circular plate. The top of the circular plate is connected to the flip part through a matching sleeve.

[0012] As a further improvement, the flip member includes a reversing catheter inserted into the matching sleeve, a sealing head is provided on the top of the reversing catheter, and a rotating motor is provided on the top of the sealing head. When the rotating motor rotates, it drives the reversing catheter to rotate.

[0013] As a further improvement, the relay pipe is an I-shaped structure, which includes a main pipe body for transmitting phosphorus trifluoride liquid, and both ends of the main pipe body are respectively provided with fixed sleeves connected to two reversing ducts, and the mounting end of the rotating motor is fixed to the top of the main pipe body.

[0014] As a further improvement, a convection hole is opened at the upper end of the outer side of the reversing conduit, the movable conductive piece is a three-way pipe, the lower end of the movable conductive piece is communicated with the reversing conduit, the side of the movable conductive piece is communicated with the main pipe body, and the upper end of the movable conductive piece is closed by a plugging head.

[0015] As a further improvement, the tension sensor is fixed on the outside of the reversing catheter, and when the reversing catheter is not reversed, the tension sensor is attached to the outer side of the sealing sleeve.

[0016] As a further improvement, a first detection plate is provided on the inner side of the eccentric section, and the phosphorus trifluoride liquid leaking from the leakage point will splash onto the inner wall of the semi-arc segment or the first detection plate, and the first leakage point detector or the second leakage point detector will detect the impact force exerted on the semi-arc segment or the first detection plate after sliding to the leakage position.

[0017] As a further improvement, the first leakage point detector and the second leakage point detector are connected via two arc-shaped arms.

[0018] As a further improvement, the second leakage point detector comprises a sliding frame slidably connected to the outer side of the eccentric segment, and a vibration sensor affixed to the outer side wall of the semi-arc segment is arranged on the side of the sliding frame close to the eccentric segment.

[0019] As a further improvement, the first detection plate is an arc-shaped structure, and the interior of the arc-shaped structure is hollow.

[0020] The beneficial effects of the present invention are:

[0021] In the existing corrosive gas transmission pipeline, inert gas is usually used to reduce or avoid pipeline leakage or reduce the hidden dangers caused by pipeline leakage. However, in fact, the length of the entire pipeline is very long. Once a leak occurs, not only is it difficult to find the leak point, but it is also necessary to suspend filling and extract all the gas in the pipeline before testing. The whole step is time-consuming and very cumbersome. Therefore, the present invention uses a reversing guide structure. After the leak occurs, it is different from the existing valve closing pipeline method. The first flip guide plate is flipped in the opposite direction and flows directly into the flip member. After the flip member is input into the relay pipe, it is output from the second flip plate. There is no need to set up extra pipelines and valves. The pipeline and the closure itself can be directly used as an external guide structure, so there is no need to stop the machine for repair. After the leak point of the pipeline is detected, the flow route of the phosphorus trifluoride liquid can be immediately switched to flow along the relay pipe, so that the purpose of maintenance without stopping the machine can be achieved, and it can cope with corrosive fluids without the need to apply a special anti-corrosion structure.

[0022] The difference between the first flip guide plate and the second flip plate compared to the normal barrier plate is that the first flip guide plate and the second flip plate are directly used as pipes. After the movable conductive piece is opened, the liquid flows directly through the first flip guide plate, and then flows out from the second flip plate after passing through the relay pipe. There is no need to set up a separate pipe, which reduces the use of accessories, thereby achieving the purpose of reducing leakage points.

[0023] The flipping member is not only a power structure that flips and drives the first flip guide plate and the second flip plate, but also serves as a way to transmit phosphorus trifluoride liquid. By rotating the reversing conduit, the on-off state of the reversing conduit and the relay tube can be switched, and the plugging head can prevent phosphorus trifluoride from being immersed in the rotating motor, thereby realizing the switching of the pipeline without the need for a valve.

[0024] The movable conductive member is a structure for connecting the main body and the reversing conduit. By opening a hole in the reversing conduit, when the flip member flips the reversing conduit, the convection hole of the reversing conduit is connected to the movable conductive member, thereby realizing the switching of the flow direction of the phosphorus trifluoride liquid.

[0025] When detecting whether it is leakproof, in order to realize rapid detection of the entire area of ​​the entire pipeline and to be able to quickly and accurately determine whether a leak occurs, the present invention, through the provision of a leakproof detection structure, first sets a sealing sleeve with a certain elasticity on the outside of the entire pipeline, and tests the tension of the sealing sleeve through a tension sensor. When the sealing sleeve is corroded and disintegrated, its tension will change, so that it can be determined in real time that the pipeline has leaked, and then the leakage point can be detected and the pipeline can be switched in time.

[0026] After it is determined that a pipeline leaks, it is unrealistic to rely on manual inspection step by step due to the long length of the entire pipeline. Therefore, the prior art often sets some detection structures at intervals. However, such a multi-section setting will result in multiple sets of detection structures being set on several meters of pipelines, the detection cost is very high, and the detection data is very redundant. Therefore, the present invention sets a leakage point detection structure, and sets a first leakage point detector and a second leakage point detector by sliding on the outer side of the outer sheathing tube. The liquid splashed by the leakage point will continuously flush the inner wall of the outer sheathing tube, so that the sliding first leakage point detector and the second leakage point detector can detect the vibration of the outer sheathing tube corresponding to the leakage point position, so that the leakage point of the long-distance pipeline can be accurately and quickly determined, and there is no need to set multiple detection structures for a single section, and only one needs to be set.

[0027] When setting the outer sheath tube, the outer sheath tube cannot adopt the traditional pipeline structure. If the outer sheath tube is set too small, it can accommodate less inert gas and less leaked liquid. If the outer sheath tube is set too large, the vibration formed when the detected liquid touches the inner wall of the outer sheath tube is small, and it is difficult to be detected by the first leak point detector and the second leak point detector. Therefore, the present invention sets the outer sheath tube as a semi-arc segment and an eccentric segment. The design of the semi-arc segment allows the upper part of the delivery pipe to be quickly and accurately located when leaking, and the eccentric segment of the lower part can provide a certain volume for the leaking solution.

[0028] Although the volume of the entire pipeline gap is increased by setting an eccentric section, it also makes it difficult to detect leakage at the lower end. Therefore, the present invention provides a first detection plate with a higher height on the inner side of the eccentric section of the second leak detector. When the lower half of the conveying pipe leaks, the leaks will splash onto the first detection plate, thereby compensating for the external expansion space of the eccentric section, so that the second leak detector can achieve the same detection effect as the first leak detector. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0030] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention (first viewing angle).

[0031] Figure 2 It is a schematic diagram of the three-dimensional structure of the present invention (second viewing angle).

[0032] Figure 3 The present invention Figure 2 Top view of the .

[0033] Figure 4 The present invention Figure 3 Cross-section view at AA in the middle.

[0034] Figure 5 It is a left-side structural schematic diagram of the present invention.

[0035] Figure 6 It is a structural schematic diagram of the reversing guide structure of the present invention.

[0036] Figure 7 It is a structural schematic diagram of the leakage point detection structure of the present invention.

[0037] In the figure:

[0038] The conveying pipe 10, the outer covering pipe 20, the semi-arc segment 21, the eccentric segment 22, the first flip guide plate 31, the circular plate 311, the liquid inlet groove 312, the matching sleeve 313, the flip part 32, the reversing catheter 321, the plugging head 322, the rotating motor 323, the movable conductive part 33, the relay pipe 34, the main body 341, the fixing rod 342, the second flip plate 35, the leak detection structure 40, the sealing sleeve 41, the tension sensor 42, the leakage point detection structure 50, the first leakage point detector 51, the second leakage point detector 52, the sliding frame 521, the vibration sensor 522, the first detection plate 53, and the arc arm 54. DETAILED DESCRIPTION

[0039] In order to make the embodiments of the present invention, all belong to the scope of protection of the present invention. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents the selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work belong to the scope of protection of the present invention.

[0040] In the description of the present invention, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as referring to the purpose, technical solutions and advantages of the methods. To be more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work indicate or imply relative importance or implicitly indicate the number of indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0041] Reference Figure 1 to Figure 7As shown, a delivery pipe group for preparing phosphorus trifluoride comprises a delivery pipe 10 for conveying phosphorus trifluoride liquid, an outer sheath tube 20 is sleeved on the outer side of the delivery pipe 10, and the gap between the outer sheath tube 20 and the delivery pipe 10 is filled with an inert gas. The delivery pipe group also comprises: a reversing guide structure, comprising a first flip guide plate 31 and a second flip plate 35 arranged on the inner side of the delivery pipe 10, the first flip guide plate 31 and the second flip plate 35 are arranged in opposite directions and symmetrical to each other, and the tops of the first flip guide plate 31 and the second flip plate 35 are connected with a flip member 32 that penetrates the delivery pipe 10 and the outer sheath tube 20, and the flip members 32 are each provided with a movable conductive member 33, and a relay pipe 34 is connected between the two movable conductive members 33; a leak-proof detection structure 40, comprising a closed sleeve 41 sleeved on the outer side of the delivery pipe 10, and the two flip members 32 are each provided with a tension sensor 42, and the tension sensor 42 It is attached to the outer side of the sealing sleeve 41 and is electrically connected to the power end of the flip member 32. When the tension sensor 42 detects that the tension of the sealing sleeve 41 has changed, it is determined that the conveying pipe 10 has leaked, and then the flip member 32 is rotated to communicate with the movable conductive member 33, so that the phosphorus trifluoride liquid continues to be transmitted along the relay pipe 34; a leakage point detection structure 50, the outer coating tube 20 is composed of a semi-arc segment 21 and an eccentric segment 22, the semi-arc segment 21 is located at the upper end of the conveying pipe 10, and the eccentric segment 22 is located at the lower end of the conveying pipe 10, the leakage point detection structure 50 includes a first leakage point detector 51 slidably arranged on the outer side of the semi-arc segment 21, and a second leakage point detector 52 is slidably arranged on the outer side of the eccentric segment 22. When the phosphorus trifluoride liquid leaks, it will splash onto the semi-arc segment 21 or the eccentric segment 22 and cause vibration to the semi-arc segment 21 or the eccentric segment 22, and be detected by the first leakage point detector 51 or the second leakage point detector 52.

[0042] Since the liquid transmitted by the delivery pipe assembly is phosphorus trifluoride liquid, special attention must be paid to corrosion prevention when setting up the electrical structure, both inside the delivery pipe 10 and in the gap between the delivery pipe 10 and the outer sheathing pipe 20, and hydraulic structures must not be used to avoid contamination.

[0043] In this embodiment, if the pipeline is set to 20m, the pipeline is divided into four sections, and each section only needs to be provided with one conveying pipe group, so that segmented management can be achieved.

[0044] In the existing corrosive gas transmission pipeline, inert gas is usually used to reduce or avoid pipeline leakage or reduce the hidden dangers caused by pipeline leakage. However, in fact, the length of the entire pipeline is very long. Once a leak occurs, not only is it difficult to find the leak point, but it is also necessary to suspend filling and extract all the gas in the pipeline before testing. The whole step is time-consuming and very cumbersome. Therefore, the present invention uses a reversing guide structure. After the leak occurs, it is different from the existing valve closing pipeline method. The first flip guide plate 31 is flipped in the opposite direction and flows into the flip member 32. After the flip member 32 is input into the relay pipe 34, it is output from the second flip plate 35. There is no need to set up extra pipelines and valves. The pipeline and the closure itself can be directly used as an external guide structure, so there is no need to stop the machine for repair. After the leak point of the pipeline is detected, the flow route of the phosphorus trifluoride liquid can be immediately switched to flow along the relay pipe 34, so that the purpose of maintenance without stopping the machine can be achieved, and it can cope with corrosive fluids without the need to apply a special anti-corrosion structure.

[0045] The difference between the first flip guide plate 31 and the second flip plate 35 compared to a normal baffle plate is that the first flip guide plate 31 and the second flip plate 35 have the same structure and size, and the first flip guide plate 31 comprises a circular plate 311 with the same diameter as the inner diameter of the delivery pipe 10, and the circular plate 311 is hollow, and a liquid inlet groove 312 is provided on one side of the circular plate 311, and the top of the circular plate 311 is connected to the flip member 32 through a matching sleeve 313, and the first flip guide plate 31 and the second flip plate 35 are directly used as pipelines. After the movable guide member 33 is opened, the liquid flows directly through the first flip guide plate 31, and then flows out from the second flip plate 32 after passing through the relay pipe 34, without the need to set up a separate pipeline, thereby reducing the use of accessories, thereby achieving the purpose of reducing leakage points.

[0046] The flip member 32 is not only a power structure for flipping and driving the first flip guide plate 31 and the second flip plate 35, but also a way to transmit phosphorus trifluoride liquid. The flip member 32 of this embodiment includes a reversing conduit 321 inserted into the matching sleeve 313, and a plugging head 322 is provided on the top of the reversing conduit 321. A rotating motor 323 is provided on the top of the plugging head 322. When the rotating motor 323 rotates, it drives the reversing conduit 321 to rotate. By rotating the reversing conduit 321, the on-off state of the reversing conduit 321 and the relay tube 34 can be switched, and the plugging head 322 can prevent phosphorus trifluoride from being immersed in the rotating motor 323, so that the switching of the pipeline can be achieved without the need for a valve.

[0047] In order to fix the relay tube 34 and prevent the relay tube 34 from obstructing the use of the leakage detection structure 50 and also prevent the relay tube 34 from being suspended in the air, the relay tube 34 is an I-shaped structure, and the relay tube 34 includes a main body 341 for transmitting phosphorus trifluoride liquid, and the two ends of the main body 341 are respectively provided with fixing sleeves 342 connected to two reversing guide tubes 321, and the mounting end of the rotating motor 323 is fixed to the top of the main body 341, so that the main body 341 and the rotating motor 323 can be fixed.

[0048] The movable conductive member 33 is a structure for connecting the main pipe body 341 and the reversing pipe 321. A convection hole is opened at the upper end of the outer side surface of the reversing pipe 321 in this embodiment. The movable conductive member 33 is a three-way pipe. The lower end of the movable conductive member 33 is communicated with the reversing pipe 321, and the side of the movable conductive member 33 is communicated with the main pipe body 341. The upper end of the movable conductive member 33 is closed by the plugging head 322. By opening a hole in the reversing pipe 321, when the flip member 32 flips the reversing pipe 321, the convection hole of the reversing pipe 321 is connected to the movable conductive member 33, thereby realizing the switching of the flow direction of the phosphorus trifluoride liquid.

[0049] When detecting whether it is leakproof, in order to realize rapid detection of the entire area of ​​the entire pipeline and to be able to quickly and accurately determine whether a leak occurs, the present invention sets a leak detection structure 40, firstly sets a sealing sleeve 41 with a certain elasticity on the outside of the entire pipeline, and tests the tension of the sealing sleeve 41 through a tension sensor 42. When the sealing sleeve 41 is corroded and disintegrated, its tension will change, so that it can be determined in real time that the pipeline has leaked, and then the leakage point can be detected and the pipeline can be switched in time.

[0050] Among them, the tension sensors 42 used in this embodiment are all treated with anti-corrosion coatings and can be briefly immersed in phosphorus trifluoride liquid. Adjustment and debugging are required after each pipeline repair. In this embodiment, the tension sensor 42 is fixed to the outside of the reversing catheter 321. When the reversing catheter 321 is not reversed, the tension sensor 42 is attached to the outer side of the sealing sleeve 41.

[0051] After it is determined that a pipeline leaks, it is unrealistic to rely on manual inspection step by step due to the long length of the entire pipeline. Therefore, the prior art often sets some detection structures at intervals. However, such a multi-section setting will result in multiple sets of detection structures being set on several meters of pipelines, the detection cost is very high, and the detection data is very redundant. Therefore, the present invention sets a leakage point detection structure 50, and sets a first leakage point detector 51 and a second leakage point detector 52 by sliding on the outer side of the outer sheathing tube 20. The liquid splashed by the leakage point will continuously wash onto the inner wall of the outer sheathing tube 20, so that the sliding first leakage point detector 51 and the second leakage point detector 52 can detect the vibration of the outer sheathing tube 20 corresponding to the leakage point position, so that the leakage point of the long-distance pipeline can be accurately and quickly determined, and there is no need to set multiple detection structures for a single section, and only one needs to be set.

[0052] When setting the outer sheath tube 20, the outer sheath tube 20 cannot adopt a traditional pipeline structure. If the outer sheath tube 20 is set too small, it can accommodate less inert gas and less leaked liquid. If the outer sheath tube 20 is set too large, the vibration generated by the detected liquid when it touches the inner wall of the outer sheath tube 20 is small, and it is difficult to be detected by the first leak detector 51 and the second leak detector 52. Therefore, the present invention sets the outer sheath tube 20 as a semi-arc segment 21 and an eccentric segment 22. The design of the semi-arc segment 21 allows the upper part of the conveying pipe 10 to be quickly and accurately located when leaking, and the eccentric segment 22 of the lower part can provide a certain volume for the leaking solution.

[0053] Although the volume of the entire pipeline gap is increased by providing the eccentric section 22, it is also easy to make the leakage at the lower end difficult to detect. Therefore, the second leakage detector 52 of the present invention is provided with a first detection plate 53 with a higher height on the inner side of the eccentric section 22. When the lower half of the conveying pipe 10 leaks, it will splash on the first detection plate 53, thereby compensating for the outward expansion space of the eccentric section 22, so that the second leakage detector 52 can achieve the same detection effect as the first leakage detector 51.

[0054] In order to synchronize the first leakage detector 51 and the second leakage detector 52, the first leakage detector 51 and the second leakage detector 52 are connected by two arc arms 54, so that when the first leakage detector 51 or the second leakage detector 52 is actuated, the other structure can be driven to move. In this embodiment, the first leakage detector 51 and the second leakage detector 52 are driven manually, or they can be operated by adding an electric drive structure.

[0055] The structure of the second leakage point detector 52 is the same as that of the first leakage point detector 51. During the leakage point detector detection process, the second leakage point detector 52 includes a sliding frame 521 that is slidably connected to the outer side of the eccentric segment 22. A vibration sensor 522 that is attached to the outer wall of the semi-arc segment 21 is provided on the side of the sliding frame 521 close to the eccentric segment 22. The vibration of the semi-arc segment 21 and the eccentric segment 22 is detected by the vibration sensor 522 to form a vibration curve. The specific position of the leakage point can be obtained by taking the peak value combined with the travel time and displacement, and the leakage point can be quickly located.

[0056] In order to ensure that the setting of the first detection plate 53 does not affect the detection of the second leakage detector 52, the first detection plate 53 is an arc-shaped structure, and the interior of the arc-shaped structure is hollow. The vibration can be accurately transmitted to the position of the vibration sensor 522 through the hollow setting of the arc-shaped structure, and the detection data will not be affected by the addition of the first detection plate 53.

[0057] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A delivery pipe set for preparing phosphorus trifluoride, comprising a delivery pipe (10) for delivering phosphorus trifluoride liquid, wherein an outer sheath pipe (20) is sheathed on the outer side of the delivery pipe (10), and a gap between the outer sheath pipe (20) and the delivery pipe (10) is filled with an inert gas, characterized in that: The delivery pipe set also includes: The reversing flow guide structure comprises a first flip guide plate (31) and a second flip plate (35) arranged inside the delivery pipe (10); the first flip guide plate (31) and the second flip plate (35) are arranged in opposite directions and are symmetrical to each other; the tops of the first flip guide plate (31) and the second flip plate (35) are connected with a flip member (32) penetrating the delivery pipe (10) and the outer covering pipe (20); the flip members (32) are each provided with a movable conductive member (33); and a relay pipe (34) is connected between the two movable conductive members (33); The anti-leakage detection structure (40) comprises a sealing sleeve (41) sleeved on the outside of the delivery tube (10), and tension sensors (42) are provided on the two flipping members (32). The tension sensors (42) are attached to the outer side of the sealing sleeve (41) and are electrically connected to the power end of the flipping member (32). When the tension sensor (42) detects that the tension of the sealing sleeve (41) has changed, it is determined that the delivery tube (10) has leaked, and the flipping member (32) is rotated to communicate with the movable conductive member (33), so that the phosphorus trifluoride liquid continues to be transmitted along the relay tube (34); A leakage point detection structure (50), wherein the outer covering tube (20) is composed of a semi-arc segment (21) and an eccentric segment (22), wherein the semi-arc segment (21) is located at the upper end of the conveying tube (10), and the eccentric segment (22) is located at the lower end of the conveying tube (10), wherein the leakage point detection structure (50) comprises a first leakage point detector (51) slidably arranged on the outside of the semi-arc segment (21), and a second leakage point detector (52) is slidably arranged on the outside of the eccentric segment (22), and when the phosphorus trifluoride liquid leaks, it will splash onto the semi-arc segment (21) or the eccentric segment (22) and cause vibration to the semi-arc segment (21) or the eccentric segment (22), and be detected by the first leakage point detector (51) or the second leakage point detector (52); A first detection plate (53) is arranged on the inner side of the eccentric section (22); the phosphorus trifluoride liquid leaking from the leakage point will splash onto the inner wall of the semi-arc section (21) or the first detection plate (53); and the first leakage point detector (51) or the second leakage point detector (52) will detect the impact force exerted on the semi-arc section (21) or the first detection plate (53) after sliding to the leakage position.

2. A delivery pipe assembly for preparing phosphorus trifluoride according to claim 1, characterized in that: The first flip guide plate (31) and the second flip plate (35) have the same structure and size. The first flip guide plate (31) comprises a circular plate (311) having a diameter equal to the inner diameter of the delivery pipe (10). The circular plate (311) is hollow. A liquid inlet groove (312) is provided on one side of the circular plate (311). The top of the circular plate (311) is in communication with the flip member (32) via a matching sleeve (313).

3. A delivery pipe assembly for preparing phosphorus trifluoride according to claim 1, characterized in that: The flip member (32) comprises a reversing conduit (321) inserted into a matching sleeve (313), a plugging head (322) is arranged at the top of the reversing conduit (321), and a rotating motor (323) is arranged at the top of the plugging head (322), and when the rotating motor (323) rotates, it drives the reversing conduit (321) to rotate.

4. A delivery pipe assembly for preparing phosphorus trifluoride according to claim 3, characterized in that: The relay pipe (34) is an I-shaped structure, comprising a main pipe body (341) for transmitting phosphorus trifluoride liquid, and fixed sleeves (342) connected to two reversing pipes (321) are respectively provided at both ends of the main pipe body (341), and the mounting end of the rotating motor (323) is fixed to the top of the main pipe body (341).

5. A delivery pipe assembly for preparing phosphorus trifluoride according to claim 4, characterized in that: A convection hole is provided at the upper end of the outer side surface of the reversing conduit (321); the movable conductive member (33) is a three-way pipe; the lower end of the movable conductive member (33) is in communication with the reversing conduit (321); the side of the movable conductive member (33) is in communication with the main pipe body (341); and the upper end of the movable conductive member (33) is sealed by a plugging head (322).

6. A delivery pipe assembly for preparing phosphorus trifluoride according to claim 1, characterized in that: The tension sensor (42) is fixed on the outside of the reversing conduit (321); when the reversing conduit (321) is not reversing, the tension sensor (42) is attached to the outer side of the sealing sleeve (41).

7. A delivery pipe assembly for preparing phosphorus trifluoride according to claim 1, characterized in that: The first leakage point detector (51) and the second leakage point detector (52) are connected via two arc-shaped arms (54).

8. A delivery pipe assembly for preparing phosphorus trifluoride according to claim 7, characterized in that: The second leakage point detector (52) comprises a sliding frame (521) slidably connected to the outer side of the eccentric section (22); a vibration sensor (522) is provided on a side of the sliding frame (521) close to the eccentric section (22) and is attached to the outer side wall of the semi-arc section (21).

9. A delivery pipe assembly for preparing phosphorus trifluoride according to claim 8, characterized in that: The first detection plate (53) is an arc-shaped structure, and the interior of the arc-shaped structure is hollow.

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