Detector and detection system

Abstract

The invention discloses a detector and a detection system. The detector comprises a detection source and a detection panel, the detection source and the detection panel are oppositely arranged, the side, close to the detection source, of the detection panel is used for containing a to-be-detected object, the detection source is used for emitting a first detection signal and a second detection signal, the first detection signal can penetrate through the to-be-detected object, and the second detection signal can penetrate through the to-be-detected object. The penetrability of the second detection signal is related to the light transmission of the to-be-detected object; the detection panel is used for receiving the first detection signal and the second detection signal, converting the first detection signal into a first electric signal, converting the second detection signal into a second electric signal, and sending the first electric signal and the second electric signal to the display device, so that the display device displays the structure of the to-be-detected object based on the first electric signal and the second electric signal. The detector can improve the accuracy of the detection result of the detector.

Description

Technical Field

[0001] The present application relates to the field of detection technology, and in particular to a detector and a detection system. Background Art

[0002] With the rapid development of industrial technology, more and more X-ray-based detectors, such as computed tomography (CT) imaging devices, are being used in industrial production lines due to their strong penetrating power to detect internal defects of products before they leave the factory.

[0003] However, the outer shells or packaging layers of some objects have poor X-ray absorption performance, which makes it impossible for the detector to clearly detect the contour structure of the object, that is, the detection accuracy of the detector is low, which affects the determination of the specific location of the defect inside the product. Summary of the invention

[0004] In view of the above-mentioned defects or deficiencies in the prior art, it is desirable to provide a detector and a detection system that can improve the accuracy of the detection results of the detector.

[0005] In a first aspect, the present application provides a detector. The detector includes a detection source and a detection panel, the detection source and the detection panel are arranged opposite to each other, and a side of the detection panel close to the detection source is used to place an object to be detected, the detection source is used to emit a first detection signal and a second detection signal, the first detection signal can penetrate the object to be detected, and the penetration of the second detection signal is related to the light transmittance of the object to be detected;

[0006] The detection panel is used to receive a first detection signal and a second detection signal, convert the first detection signal into a first electrical signal, convert the second detection signal into a second electrical signal, and send the first electrical signal and the second electrical signal to a display device so that the display device displays the structure of the object to be detected based on the first electrical signal and the second electrical signal.

[0007] In combination with the first aspect, in a possible implementation, the detection panel includes a substrate, a signal conversion layer, a signal response layer and a metal packaging layer in sequence, the signal conversion layer has a light-transmitting area, and the side of the substrate away from the metal packaging layer is used to place the object to be detected; the signal response layer is used to receive the detection signal from the detection source and generate a response signal according to the detection signal; the signal conversion layer is used to generate a voltage signal according to the response signal.

[0008] In combination with the first aspect, in a possible implementation, the detection panel includes multiple detection areas, and the multiple detection areas correspond one-to-one to the pixel areas of the display device. The signal conversion layer includes a metal routing area, and the metal routing area is arranged along the edge of each detection area to form a light-transmitting area located within the metal routing area.

[0009] In combination with the first aspect, in a possible implementation manner, an edge shape of the metal routing area is the same as or different from an edge shape of the light-transmitting area.

[0010] In combination with the first aspect, in a possible implementation, the signal response layer includes a first electrode layer, a response material layer, and a second electrode layer in sequence, the first electrode layer is close to the metal packaging layer, and the response coefficient of the response material layer is greater than a preset coefficient, and the preset coefficient is used to characterize the response ability limit of the response material layer to the first detection signal and the second detection signal.

[0011] In combination with the first aspect, in a possible implementation manner, the responsive material layer is perovskite.

[0012] In combination with the first aspect, in a possible implementation, the signal response layer also includes an adhesion buffer layer, which is located between the response material layer and the second electrode layer, the second electrode layer has an area exposing the signal conversion layer, and the adhesion buffer layer is used to bond the response material layer and the signal conversion layer.

[0013] In combination with the first aspect, in a possible implementation, the signal conversion layer includes a transistor and a signal conversion circuit, the transistor is a dual-gate transistor, the dual-gate transistor includes a first gate and a second gate, the first gate is close to the substrate, and the transistor is used to conduct a path between the signal response layer and the signal conversion circuit when the signal response layer receives a first detection signal or a second detection signal, so that the signal conversion circuit generates a voltage signal according to the response signal output by the signal response layer.

[0014] In combination with the first aspect, in a possible implementation manner, in a direction perpendicular to the gate metal routing direction, a size of the first gate is larger than that of the second gate.

[0015] In combination with the first aspect, in a possible implementation, the signal conversion layer also includes a capacitor, which is connected to the signal output end of the signal response layer and the signal input end of the signal conversion circuit. The capacitor is used to store the charge output by the signal response layer and transfer the charge to the signal conversion circuit.

[0016] In combination with the first aspect, in a possible implementation manner, a capacitor is formed between a gate metal layer and a source / drain metal layer of a transistor.

[0017] In combination with the first aspect, in a possible implementation manner, each detection area on a side of the detection panel where the object to be detected is placed is sequentially provided with organic film layers of different colors.

[0018] In a second aspect, the present application further provides a detection system. The detection system comprises the detector and the display device described in the first aspect or any one of the first aspects, wherein the detector is used to convert the received first detection signal into a first electrical signal, convert the received second detection signal into a second electrical signal, and send the first electrical signal and the second electrical signal to the display device; and the display device is used to display the structure of the object to be detected according to the first electrical signal and the second electrical signal.

[0019] The embodiment of the present application provides a detector and a detection system, wherein the detector includes a detection source and a detection panel, wherein the detection source and the detection panel are arranged opposite to each other, and the side of the detection panel close to the detection source is used to place the object to be detected, and the detection source is used to emit a first detection signal and a second detection signal; and the detection panel is used to receive the first detection signal and the second detection signal, convert the first detection signal into a first electrical signal, convert the second detection signal into a second electrical signal, and send the first electrical signal and the second electrical signal to a display device, so that the display device displays the structure of the object to be detected based on the first electrical signal and the second electrical signal. The detector provided in the embodiment of the present application detects the object to be detected by using two detection signals with different characteristics, so that the detector can detect the contour and internal structure of the object to be detected at the same time, thereby improving the richness of information detected by the detector, thereby improving the accuracy of the detection result of the detector based on the rich information. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Other features, objects and advantages of the present application will become more apparent by reading the detailed description of non-limiting embodiments made with reference to the following drawings:

[0021] Figure 1 is a schematic diagram of the structure of a detector in one embodiment;

[0022] Figure 2 is a schematic cross-sectional view of a detection panel of a detector in one embodiment;

[0023] Figure 3 A schematic diagram of the regional distribution of a signal conversion layer in one embodiment;

[0024] Figure 4 A schematic diagram of the regional distribution of the detection area in one embodiment;

[0025] Figure 5 is another cross-sectional schematic diagram of a detection panel of a detector in one embodiment;

[0026] Figure 6 is another cross-sectional schematic diagram of a detection panel of a detector in one embodiment;

[0027] Figure 7 Schematic diagram of the absorption spectrum of perovskite materials;

[0028] Figure 8 is a schematic diagram of the circuit structure of a detector in one embodiment;

[0029] Fig. 9 A schematic diagram showing the comparison of current-voltage curves of a dual-gate transistor and a single-gate transistor;

[0030] Fig.10 is a schematic diagram of a stacked structure of a detection panel in one embodiment;

[0031] Fig.11 is another schematic diagram of a stacked structure of a detection panel in an embodiment;

[0032] Fig.12 is another structural schematic diagram of a detector in one embodiment;

[0033] Fig.13 FIG. 4 is another schematic diagram of the structure of a detection panel in an embodiment. DETAILED DESCRIPTION

[0034] The present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the relevant invention, rather than to limit the invention. It is also necessary to explain that, for ease of description, only the parts related to the invention are shown in the accompanying drawings.

[0035] It should be noted that, in the absence of conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments. In addition, the term "and / or" herein is merely a description of the association relationship of associated objects, indicating that three relationships may exist, for example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. The terms "first" and "second" in the description and claims of the embodiments of the present application are used to distinguish different objects, rather than to describe a specific order of objects.

[0036] In one embodiment, Figure 1 As shown, a detector is provided, which includes a detection source 10 and a detection panel 20. The detection source 10 and the detection panel 20 are arranged opposite to each other, and the side of the detection panel 20 close to the detection source 10 is used to place the object to be detected. The detection source 10 is used to emit a first detection signal 11 and a second detection signal 12; the detection panel 20 is used to receive the first detection signal 11 and the second detection signal 12, convert the first detection signal 11 into a first electrical signal, convert the second detection signal 12 into a second electrical signal, and send the first electrical signal and the second electrical signal to a display device, so that the display device displays the structure of the object to be detected based on the first electrical signal and the second electrical signal.

[0037] In an embodiment of the present application, the detector includes a detection source 10 and a detection panel 20. The detection source 10 and the detection panel 20 are arranged opposite to each other. The side of the detection panel 20 close to the detection source 10 is used to place the object to be detected, that is, the object to be detected is located between the detection source 10 and the detection panel 20.

[0038] The detection source 10 is used to emit a first detection signal and a second detection signal toward the object to be detected. The first detection signal can penetrate the object to be detected, for example, the first detection signal can be an X-ray; the penetration of the second detection signal is related to the light transmittance of the object to be detected, specifically, the penetration of the second detection signal is positively correlated with the light transmittance of the object to be detected, for example, the second detection signal can be visible light.

[0039] After the first detection signal penetrates the object to be detected, the detection panel 20 receives the first detection signal after penetrating the object to be detected, and converts each first detection signal into a first electrical signal according to the difference in the first detection signals received in different areas of the detection panel 20. For example, when the first detection signal is an X-ray, the X-ray penetrates the object to be detected, and the detection panel 20 receives the first detection signal that penetrates the object to be detected. The X-ray detected in the area where the object to be detected is not placed on the detection panel 20 does not attenuate; while the X-ray that penetrates the object to be detected has different degrees of attenuation due to the internal structure of the object to be detected, that is, the X-ray detected in the area where the object to be detected is placed on the detection panel 20 has different degrees of attenuation. Based on this, the detection panel 20 converts the X-rays that are not attenuated or have different degrees of attenuation into corresponding first electrical signals.

[0040] The penetration of the second detection signal is related to the light transmittance of the object to be detected. It is understandable that the intensity of the second detection signal received by the area where the object to be detected is placed and the area where the object to be detected is not placed on the detection panel 20 is different, so that the second detection signal can effectively detect the contour structure of the object to be detected; further, the detection panel 20 places the object to be detected at different positions inside the area, and the second detection signal received is also different due to the different light transmittances at different positions of the object to be detected. That is, the detection panel 20 converts each second detection signal into a corresponding second electrical signal according to the different intensities of the second detection signals received in different areas. For example, when the second detection signal is visible light, the intensity of the visible light received by the area where the object to be detected is not placed and the area where the object to be detected is placed on the detection panel 20 is different, and the intensity of the visible light received at different positions in the area where the object to be detected is placed on the detection panel 20 is different. Based on this, the detection panel 20 converts the visible light of different intensities received in different areas into corresponding second electrical signals.

[0041] The detection panel 20 sends the first electrical signal and the second electrical signal to the display device, so that the display device generates internal structure imaging of the object to be detected based on the first electrical signal, generates contour imaging of the object to be detected based on the second electrical signal, obtains overall structure imaging of the object to be detected based on the superposition calculation of the internal structure imaging and the contour imaging, and displays it.

[0042] It can be understood that the first detection signal and the second detection signal are both emitted from the detection source 10, that is, the first detection signal and the second detection signal are emitted from the same position. Therefore, the internal structure imaging corresponding to the first detection signal and the contour imaging corresponding to the second detection signal do not need to be spatially calibrated with pixel alignment, and the overall structure imaging of the object to be detected can be obtained by direct superposition calculation, thus avoiding the error caused by pixel calibration and effectively improving the imaging efficiency of the overall structure of the object to be detected.

[0043] The detector provided in the embodiment of the present application includes a detection source and a detection panel, the detection source and the detection panel are arranged opposite to each other, and the side of the detection panel close to the detection source is used to place the object to be detected, the detection source is used to emit a first detection signal and a second detection signal; the detection panel is used to receive the first detection signal and the second detection signal, convert the first detection signal into a first electrical signal, convert the second detection signal into a second electrical signal, and send the first electrical signal and the second electrical signal to a display device, so that the display device displays the structure of the object to be detected based on the first electrical signal and the second electrical signal. The detector provided in the embodiment of the present application detects the object to be detected by two detection signals with different characteristics, so that the detector can detect the contour and internal structure of the object to be detected at the same time, thereby improving the richness of information detected by the detector, thereby improving the accuracy of the detector detection result based on the rich information.

[0044] In one embodiment, Figure 2 As shown, a cross-sectional schematic diagram of a detection panel 20 is provided, wherein the detection panel 20 includes a substrate 21, a signal conversion layer 22, a signal response layer 23 and a metal packaging layer 24 in sequence, wherein the signal conversion layer 22 has a light-transmitting area 221, and a side of the substrate 21 away from the metal packaging layer 24 is used for placing an object to be detected; the signal response layer 23 is used for receiving a detection signal from a detection source 10 and generating a response signal according to the detection signal; and the signal conversion layer 22 is used for generating a voltage signal according to the response signal.

[0045] In the embodiment of the present application, the detection panel 20 includes a substrate 21, a signal conversion layer 22, a signal response layer 23 and a metal packaging layer 24 in sequence. The signal response layer 23 is used to receive the detection signal from the detection source 10 and generate a response signal in response to the detection signal. Considering the high requirements for water oxygen permeability and the like in the process of the signal response layer 23 responding to the detection signal, the packaging layer adopts metal packaging, that is, the metal packaging layer 24. Among them, the detection signal is the first detection signal and the second detection signal; the voltage signal is the first electrical signal and the second electrical signal.

[0046] However, the light transmittance of the metal packaging layer 24 is poor. When the detection source 10 detects the contour of the object to be detected through the second detection signal, it is difficult for the detection panel 20 to distinguish the area where the object to be detected is placed from the remaining area, that is, it is difficult to detect the contour of the object to be detected. Therefore, in the actual detection process, the detection panel 20 is placed in reverse, that is, one side of the substrate 21 faces the detection source 10, and the object to be detected is placed on the substrate. At the same time, the signal conversion layer 22 needs to have a light-transmitting area 221, so that the second detection signal passes through the substrate 21 and the light-transmitting area 221 of the signal conversion layer 22 to be incident on the signal response layer 23. Among them, the substrate 21 is made of a material with good light transmittance such as glass or transparent polyimide (PI).

[0047] In one embodiment, the detection panel 20 includes a plurality of detection areas, and the plurality of detection areas correspond to pixel areas of the display device one by one, such as Figure 3 and Figure 4 As shown, the signal conversion layer 22 includes a metal wiring area 222 , and the metal wiring area 222 is arranged along the edge of each detection area to form a light-transmitting area 221 located in the metal wiring area.

[0048] In the embodiment of the present application, the detection panel 20 includes multiple detection areas, and the attenuation degree or strength of the detection signal received by different detection areas is different, so that the voltage signals output by different areas are different. The multiple detection areas correspond to the pixel areas of the display device one by one, so the pixel values ​​or grayscale values ​​of different pixel areas determined based on the voltage signal are different, thereby forming a structural image of the object to be detected.

[0049] Since the signal conversion layer 22 of the detection area has a variety of components, such as transistors, amplifiers, etc., to form a circuit to generate a voltage signal, therefore, in the process of preparing the signal conversion layer 22 of the detection panel 20, the opaque material can be set at the edge of the detection area, that is, the metal layer of each component (such as the gate metal layer Gate, the source and drain metal layer SD, etc.) is arranged along the edge of the detection area to form a metal wiring area 222, and at the same time, a light-transmitting area 221 located in the metal wiring area is formed. So that each detection area of ​​the detection panel 20 can receive the second detection signal, ensuring that the detector can accurately detect the difference in the second detection signal of each detection area, thereby improving the detection accuracy of the detector.

[0050] Indium tin oxide (ITO) is the bottom electrode material of the signal response layer 23 .

[0051] In a possible implementation, the edge shape of the metal wiring area 222 is the same as or different from the edge shape of the light-transmitting area 221. The edge shape of the metal wiring area 222 can be specifically set according to the components included in the signal conversion layer 22, and the edge shape of the light-transmitting area 221 can be the same as the edge shape of the metal wiring area 222, or can be different from the edge shape of the metal wiring area 222 to ensure that the area of ​​the light-transmitting area 221 is large enough, and the present application does not limit this.

[0052] The detection panel in the detector provided in the embodiment of the present application includes a substrate, a signal conversion layer, a signal response layer and a metal packaging layer in sequence. The signal conversion layer is provided with a light-transmitting area, and the object to be detected is placed on the side of the substrate away from the metal packaging layer, thereby ensuring that the detection panel can accurately receive the second detection signal, thereby improving the reliability of the detector.

[0053] In one embodiment, Figure 5 and Figure 6 As shown, the signal response layer 23 includes a first electrode layer 231 , a response material layer 232 and a second electrode layer 233 in sequence, and the first electrode layer 231 is close to the metal packaging layer 24 .

[0054] In the embodiment of the present application, the signal response layer 23 includes a first electrode layer 231 (i.e., the top electrode in the figure), a response material layer 232, and a second electrode layer 233 (i.e., the bottom electrode in the figure), so the component corresponding to the signal response layer can be a diode. The first electrode layer 231 is close to the metal packaging layer 24, and the second electrode layer 233 is close to the signal conversion layer 22.

[0055] The first electrode layer 231 and the second electrode layer 233 form a vertical electric field under a certain bias voltage, and the response material layer 232 generates charges under the irradiation and excitation of the first detection signal or the second detection signal and outputs the charges as response signals to the signal conversion layer 22. Considering that the response material layer 232 needs to have a strong response capability to both the first detection signal and the second detection signal, the response coefficient of the response material layer 232 is greater than the preset coefficient.

[0056] The preset coefficient is used to characterize the response capability limit of the response material layer to the first detection signal and the second detection signal. That is, the response capability of the response material layer 232 to the first detection signal and the second detection signal should be greater than the response capability limit at the same time to ensure the accuracy of the response result of the response material layer 232 to the first detection signal and the second detection signal, that is, to ensure the accuracy of the response signal.

[0057] The signal conversion layer 22 has various components, such as a switch transistor SWTFT, a capacitor Cst, an amplifier ROIC, etc. VDD is a voltage applied to the first electrode layer 231 , Scan is a row drive signal, and Vref is a voltage signal output by the signal conversion layer 22 .

[0058] In a possible implementation, the response material layer 232 may be a perovskite. For example, it may be a perovskite material such as CsPbI2Br, CsPbI3, etc. Figure 7 As shown, perovskite has high sensitivity and low power consumption, especially for visible light and X-rays. Moreover, perovskite can be prepared by ultrasonic atomization spraying, and the preparation process is simple.

[0059] In one embodiment, the signal response layer 23 further includes an adhesion buffer layer 234 , which is located between the response material layer 232 and the second electrode layer 233 , and the second electrode layer 233 has an area exposing the signal conversion layer 22 . The adhesion buffer layer 234 is used to bond the response material layer 232 and the signal conversion layer 22 .

[0060] In the embodiment of the present application, the second electrode layer 233 near the signal conversion layer 22 has an area exposing the signal conversion layer 22, so that the response material layer 232 is in contact with both the second electrode layer 233 and the signal conversion layer 22. However, the response material layer 232 is relatively thick and is easily peeled off from the signal conversion layer 22. Therefore, an adhesion buffer layer 234 is provided between the response material layer 232 and the second electrode layer 233 to bond the response material layer 232 and the signal conversion layer 22, thereby improving the stability of the detection panel 20.

[0061] The adhesion buffer layer 234 may be a mixed material of the response material and other materials (such as inorganic substances) to ensure the adhesion degree of the adhesion buffer layer 234 with the response material layer 232 and the signal conversion layer 22 at the same time.

[0062] In the detector provided in the embodiment of the present application, the signal response layer of the detection panel includes a first electrode layer, a response material layer and a second electrode layer in sequence, and the first electrode layer is close to the metal packaging layer. The response coefficient of the response material layer is greater than the preset coefficient. Among them, the preset coefficient is used to characterize the response ability limit of the response material layer to the first detection signal and the second detection signal. That is, in the embodiment of the present application, the response ability of the response material to the first detection signal and the second detection signal is greater than the response ability limit at the same time, which ensures the accuracy of the response result of the response material layer to the first detection signal and the second detection signal, thereby ensuring the accuracy of the response signal.

[0063] In one embodiment, the signal conversion layer 22 includes a transistor 223 and a signal conversion circuit 224. The transistor 223 is used to connect the path between the signal response layer 23 and the signal conversion circuit 224 when the signal response layer 23 receives the first detection signal or the second detection signal, so that the signal conversion circuit 224 generates a voltage signal according to the response signal output by the signal response layer 23.

[0064] In the present application embodiment, Figure 8 As shown, each detection area corresponding to the signal conversion layer 22 is provided with a transistor 223, and based on the row scanning characteristics of the detection panel 20, each column of transistors 223 corresponds to a signal conversion circuit 224. The transistor 223 is used to conduct the path between the signal response layer 23 and the signal conversion circuit 224 when the signal response layer 23 receives the first detection signal or the second detection signal (specifically, it can be when the row driving signal Scan is received), so that the response signal output by the signal response layer 23 is transmitted to the signal conversion circuit 224 through the sensing line Sensing Line, and then the signal conversion circuit 224 generates a voltage signal Vref according to the response signal.

[0065] Wherein, the diode is the component form of the signal response layer 23; Scan_n is the row drive signal of the transistor 223 in the n-th row detection area; Sensing Line n is the signal transmission line between the transistor 223 in the n-th column detection area and the corresponding signal conversion circuit 224; the signal conversion circuit 224 can be an amplifier, Rst is the feedback capacitor of the amplifier, and Out is the output of the amplifier, that is, the voltage signal;

[0066] In the embodiment of the present application, the transistor 223 may be a dual-gate transistor, which includes a first gate 2231 and a second gate 2232, wherein the first gate 2231 is close to the substrate 21. In the vertical direction of the gate metal wiring direction, the first gate 2231 is larger than the second gate 2232.

[0067] like Fig. 9As shown, the dual-gate transistor Dual_Gate can carry a larger current than the single-gate transistor Single_Gate, so the use of the dual-gate transistor can effectively improve the signal conversion efficiency of the signal conversion layer 22 and realize high-speed imaging of the object to be detected. Furthermore, based on the higher signal conversion efficiency, the detector can image when the object to be detected is in motion, that is, dynamic imaging of the object to be detected is realized.

[0068] The channel material layer of the transistor is located between the first gate 2231 and the second gate 2232. The detection signal, especially the second detection signal (such as visible light), is likely to affect the characteristics of the channel material, thereby affecting the function of the transistor 223. Considering that the detection signal is incident from the substrate 21 side of the detection panel 20, as described above Figure 3 And Figure 4 As shown, the size of the first gate 2231 (i.e., the bottom gate) can be set to be larger than the second gate 2232 (i.e., the top gate) in the vertical direction of the gate metal routing direction, so that the first gate 2231 blocks the second detection signal to prevent the second detection signal from affecting the channel material, thereby ensuring the functional stability of the transistor 223.

[0069] The width of the first gate 2231 may be 3 micrometers greater than the width of the second gate 2232 , that is, the single-side width difference is greater than 1.5 micrometers.

[0070] like Fig.10 and Fig.11 In the stacked structure of the detection panel 20 shown, the size of the first gate 2231 (ie, Bottom Gate) is larger than the size of the second gate 2232 (ie, Top Gate). Fig. 9 For along Figure 4 A schematic cross-sectional view of the detection panel 20 taken along the line AA′, Fig.10 For along Figure 4 FIG. 1 is a schematic cross-sectional view of the detection panel 20 taken along line BB′.

[0071] Among them, Top Metal is the first electrode layer 231, that is, the top electrode; Perovskite is the response material layer 232, that is, perovskite; PDL is the pixel definition layer (Pixel Definition Layer); Anode is the second electrode layer 233, that is, the anode layer; there is a passivation layer (Passivation, PVX) or a planarizing layer (Planarizing, PLN) between Anode and the source and drain metal layer SD; there is an isolation layer (Isolation Layer Definition, ILD) between the source and drain metal layer SD and the transistor; Top Gate is the second gate 2232; Anode is the oxide layer; Bottom Gate is the first gate 2231; Substrate / buffer is the substrate 21.

[0072] The visible light bottom transparent area is the transparent area in the middle of the signal conversion layer in the stacked structure of the detection area.

[0073] In the detector provided in the embodiment of the present application, the signal conversion layer includes a transistor and a signal conversion circuit, and the transistor is a dual-gate transistor, so that high-speed dynamic imaging of the detector can be achieved. The dual-gate transistor includes a first gate and a second gate, the first gate is close to the substrate, and the size of the first gate is larger than the second gate in the vertical direction of the gate metal routing direction, so that the first gate can block the second detection signal to prevent the second detection signal from affecting the transistor channel material and ensure the functional stability of the transistor.

[0074] In one embodiment, as above Figure 8 As shown, the signal conversion layer 22 also includes a capacitor 225, which is connected to the signal output end of the signal response layer 23 and the signal input end of the signal conversion circuit 224. The capacitor 225 is used to store the charge output by the signal response layer 23 and transfer the charge to the signal conversion circuit 224.

[0075] Taking into account that the capacitance currently formed by the first electrode layer 221 and the second electrode layer 223 is relatively small, in the embodiment of the present application, a capacitor 225 is added to the signal conversion layer 22 to ensure that all the charges output by the response layer 23 can be transferred to the signal conversion circuit 224, that is, to ensure the functional stability of the signal conversion layer 22.

[0076] As above Fig.10As shown, during the preparation of the detection panel 20, the capacitor 225 is formed between the gate metal layer (Bottom Gate) and the source and drain metal layer (SD) of the transistor 223. The stacking of two capacitors, namely Cst1 and Cst2, can ensure the capacitance of the capacitor 225, that is, ensure the functional stability of the signal conversion layer 22. Among them, CNT-L and CNT-O are metal dielectrics connecting Cst1 and Cst2.

[0077] Based on the stacked structure of the detection panel 20, the specific structure of the detector can be as follows: Fig.12 Wherein, Encapsulation is a metal encapsulation layer 24.

[0078] In the detector provided in the embodiment of the present application, the signal conversion layer also includes a capacitor, which can ensure that all the charges output by the response layer can be transferred to the signal conversion circuit, that is, to ensure the functional stability of the signal conversion layer.

[0079] In one embodiment, Fig.13 As shown, each detection area on the side of the detection panel 20 where the object to be detected is placed is sequentially provided with organic film layers of different colors. That is, each detection area on the side of the substrate 21 facing the detection source 10 is sequentially coated with three different colors of organic filter film layers (Color Filter on Encapsulation, COE) of R, G, and B, which correspond to the red imaging pixel area, green imaging pixel area, and blue imaging pixel area of ​​the display device in turn.

[0080] Different detection areas selectively receive second detection signals of corresponding colors based on the organic film layers of corresponding colors, and output voltage signals to the display device after the response of the signal response layer 23 and the signal conversion of the signal conversion layer. The magnitude of the voltage signal is related to the intensity of the second detection signal of the corresponding color received by the detection area; furthermore, the display device can determine the brightness corresponding to each pixel area based on the voltage signal corresponding to the pixel area, and can display the color structure diagram of the object to be detected based on the brightness and color corresponding to each pixel area.

[0081] In one possible implementation, after the detection panel 20 is coated with R, G, and B organic filter film layers on the side facing the detection source 10, the organic filter film layers are patterned to retain the organic filter film layers in the light-transmitting areas of each detection area, and the remaining areas of the detection area except the light-transmitting areas are coated with a black shading (Black Matrix, BM) organic film layer to absorb the second detection signal, thereby preventing the second detection signal from interfering with the transistor characteristics, improving the functional stability of the signal conversion layer, and thereby improving the detection stability of the detection panel; at the same time, the detection areas coated with COEs of different colors are isolated to reduce the optical crosstalk between adjacent detection areas or adjacent detection areas, thereby improving the accuracy of the color structure diagram of the object to be detected.

[0082] In one embodiment, a detection system is provided, which includes the detector and display device described in the above embodiment, the detector is used to convert a received first detection signal into a first electrical signal, convert a received second detection signal into a second electrical signal, and send the first electrical signal and the second electrical signal to the display device; the display device is used to display the structure of the object to be detected according to the first electrical signal and the second electrical signal.

[0083] In an embodiment of the present application, the detector includes a detection source 10 and a detection panel 20. The detection source 10 and the detection panel 20 are arranged opposite to each other. The side of the detection panel 20 close to the detection source 10 is used to place the object to be detected, that is, the object to be detected is located between the detection source 10 and the detection panel 20.

[0084] The detection source 10 is used to emit a first detection signal and a second detection signal toward the object to be detected. The first detection signal can penetrate the object to be detected, for example, the first detection signal can be an X-ray; the penetration of the second detection signal is related to the light transmittance of the object to be detected, specifically, the penetration of the second detection signal is positively correlated with the light transmittance of the object to be detected, for example, the second detection signal can be visible light.

[0085] After the first detection signal penetrates the object to be detected, the detection panel 20 receives the first detection signal after penetrating the object to be detected, and according to the difference of the first detection signals received in different areas of the detection panel 20, converts each first detection signal into a first electrical signal. The penetration of the second detection signal is related to the light transmittance of the object to be detected. It can be understood that the intensity of the second detection signal received by the area where the object to be detected is placed and the area where the object to be detected is not placed on the detection panel 20 is different, so that the second detection signal can effectively detect the contour structure of the object to be detected; further, at different positions inside the area where the object to be detected is placed on the detection panel 20, due to the different light transmittance at different positions of the object to be detected, the second detection signals received are also different. That is, the detection panel 20 converts each second detection signal into a corresponding second electrical signal according to the difference in the intensity of the second detection signal received in different areas.

[0086] The detection panel 20 sends the first electrical signal and the second electrical signal to the display device, so that the display device generates internal structure imaging of the object to be detected based on the first electrical signal, generates contour imaging of the object to be detected based on the second electrical signal, obtains overall structure imaging of the object to be detected based on the superposition calculation of the internal structure imaging and the contour imaging, and displays it.

[0087] The detection system provided by the embodiment of the present application includes a detector and a display device, the detector includes a detection source and a detection panel, the detection source is arranged opposite to the detection panel, and the side of the detection panel close to the detection source is used to place the object to be detected, the detection source is used to emit a first detection signal and a second detection signal; the detection panel is used to receive the first detection signal and the second detection signal, convert the first detection signal into a first electrical signal, convert the second detection signal into a second electrical signal, and send the first electrical signal and the second electrical signal to the display device, so that the display device displays the structure of the object to be detected based on the first electrical signal and the second electrical signal. The detection system provided by the embodiment of the present application detects the object to be detected by two detection signals with different characteristics, so that the detection system can detect the contour and internal structure of the object to be detected at the same time, thereby improving the richness of the information detected by the detection system, thereby improving the accuracy of the detection result of the detection system based on the rich information, and then improving the accuracy of the structural image of the object to be detected generated by the detection system.

[0088] The above description is only a preferred embodiment of the present application and an explanation of the technical principles used. Those skilled in the art should understand that the scope of the invention involved in the present application is not limited to the technical solution formed by a specific combination of the above technical features, but should also cover other technical solutions formed by any combination of the above technical features or their equivalent features without departing from the inventive concept. For example, the above features are replaced with (but not limited to) technical features with similar functions disclosed in the present application.

Claims

1. A detector, characterized in that: The detector includes a detection source and a detection panel, wherein the detection source is arranged opposite to the detection panel, and a side of the detection panel close to the detection source is used to place an object to be detected, and the detection source is used to emit a first detection signal and a second detection signal, wherein the first detection signal can penetrate the object to be detected, and the penetration of the second detection signal is related to the light transmittance of the object to be detected; The detection panel is used to receive the first detection signal and the second detection signal, convert the first detection signal into a first electrical signal, convert the second detection signal into a second electrical signal, and send the first electrical signal and the second electrical signal to a display device so that the display device displays the structure of the object to be detected based on the first electrical signal and the second electrical signal.

2. The detector according to claim 1, characterized in that: The detection panel comprises a substrate, a signal conversion layer, a signal response layer and a metal packaging layer in sequence, the signal conversion layer has a light-transmitting area, and a side of the substrate away from the metal packaging layer is used to place the object to be detected; The signal response layer is used to receive the detection signal from the detection source and generate a response signal according to the detection signal; The signal conversion layer is used to generate a voltage signal according to the response signal.

3. The detector according to claim 1, characterized in that: The detection panel includes a plurality of detection areas, and the plurality of detection areas correspond one-to-one to the pixel areas of the display device. The signal conversion layer includes a metal wiring area, and the metal wiring area is arranged along the edge of each of the detection areas to form a light-transmitting area located within the metal wiring area.

4. The detector according to claim 3, characterized in that: The edge shape of the metal wiring area is the same as or different from the edge shape of the light-transmitting area.

5. The detector according to claim 2, characterized in that: The signal response layer includes a first electrode layer, a response material layer and a second electrode layer in sequence, wherein the first electrode layer is close to the metal packaging layer. The response coefficient of the response material layer is greater than a preset coefficient, and the preset coefficient is used to characterize a limit value of the response capability of the response material layer to the first detection signal and the second detection signal.

6. The detector according to claim 5, characterized in that: The responsive material layer is perovskite.

7. The detector according to claim 5, characterized in that The signal response layer further includes an adhesion buffer layer, the adhesion buffer layer is located between the response material layer and the second electrode layer, and the second electrode layer has a region exposing the signal conversion layer. The adhesion buffer layer is used to bond the response material layer and the signal conversion layer.

8. The detector according to claim 2, characterized in that: The signal conversion layer includes a transistor and a signal conversion circuit. The transistor is a dual-gate transistor. The dual-gate transistor includes a first gate and a second gate. The first gate is close to the substrate. The transistor is used to open the path between the signal response layer and the signal conversion circuit when the signal response layer receives the first detection signal or the second detection signal, so that the signal conversion circuit generates the voltage signal according to the response signal output by the signal response layer.

9. The detector according to claim 8, characterized in that In a direction perpendicular to the gate metal wiring direction, the first gate has a size greater than that of the second gate.

10. The detector according to claim 8, characterized in that The signal conversion layer further includes a capacitor, which is connected to the signal output end of the signal response layer and the signal input end of the signal conversion circuit. The capacitor is used to store the charge output by the signal response layer and transfer the charge to the signal conversion circuit.

11. The detector according to claim 10, characterized in that: The capacitor is formed between the gate metal layer and the source and drain metal layers of the transistor.

12. The detector according to claim 3, characterized in that: Each detection area on one side of the detection panel where the object to be detected is placed is sequentially provided with organic film layers of different colors.

13. A detection system, characterized in that: The detection system comprises the detector and the display device according to any one of claims 1 to 12, The detector is used to convert the received first detection signal into a first electrical signal, convert the received second detection signal into a second electrical signal, and send the first electrical signal and the second electrical signal to the display device; The display device is used to display the structure of the object to be detected according to the first electrical signal and the second electrical signal.

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