Polarization imaging focal plane coupling process of superlens
By controlling the position and distance between the superlens and the detector, and employing a process of one-to-one coupling between the superlens array and detector pixels, the problem of aligning the superlens and the detector was solved, thus improving the effect and adjustability of polarization imaging.
Patent Information
- Application Number
- CN202411244506.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-06
- Publication Date
- 2025-12-12
- Estimated Expiration
- 2044-09-06
AI Technical Summary
In existing technologies, the corresponding installation of the superlens and the detector is extremely difficult, making it hard to achieve accurate alignment between the unit structure in the superlens array and the detector pixels, which affects the polarization imaging effect.
By controlling the X, Y, and Z positions of the superlens and the detector, and employing a process that couples the superlens array to the detector pixels in a one-to-one correspondence, including grinding the superlens pads, adjusting the pad thickness and position, testing with an infrared interferometer, and focusing with an optical system, precise alignment is achieved.
It achieves efficient alignment and coupling between the superlens and the detector, improves the target detection and recognition capabilities of polarization imaging, and the polarization effect is adjustable and can be intuitively measured through optical testing.
Smart Images
Figure CN119148265B_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The application belongs to the technical field of space optical remote sensors, and particularly relates to a superlens polarization imaging focal plane coupling process, which can be applied to a space camera requiring polarization imaging. BACKGROUND
[0002] A superlens is a planar optical device composed of a super surface. Subwavelength structures with specific shapes and sizes are arranged to precisely control the amplitude, phase, polarization, spectrum and other characteristics of electromagnetic waves. The superlens has the advantages of flexible design, small mass, planarization and compact structure. It can be manufactured by existing microelectronic processing technology, can realize the integration and planarization of traditional large and complex optical systems, and has excellent application prospects. Polarization imaging detection technology can not only obtain traditional imaging information of a target, but also obtain polarization information of the target, has strong recognition ability for stealth, camouflage and false targets, and has strong detection ability for targets in adverse environments such as fog, haze and dust.
[0003] Traditional cameras generally design a polarizer in the optical system of a remote sensor or coat a polarization film on a filter of a detector, and polarization imaging of the camera is realized through a polarization image acquisition and processing circuit. The polarization effect of the polarizer or the polarization film on the filter is generally calculated by a theoretical formula, and it is difficult to directly measure the polarization effect, so there is a deviation in the determination of the polarization effect, which has an adverse effect on the target detection ability or recognition ability. The superlens can be used as a polarizer, the polarization effect can be adjusted, and the polarization effect can be directly determined through optical testing. The superlens is applied to polarization imaging of the camera, and the unit structure in the superlens array needs to be completely one-to-one corresponding to the detector pixels. However, the sizes of the unit structure and the pixels are extremely small (micro-nanometer level), and it is extremely difficult to correspond the superlens and the detector during installation. Therefore, it is necessary to develop a superlens polarization imaging coupling process, which involves measurement and characterization of the focal plane of the detector and the structure of the superlens, alignment and coupling design and the like. SUMMARY
[0004] In order to overcome the deficiencies in the prior art, the present application provides a superlens polarization imaging focal plane coupling process. The process method controls the X, Y direction positions and the Z direction distance of the superlens and the detector to align and couple the unit structure in the superlens array with the detector pixels.
[0005] The technical scheme provided by the present application is as follows:
[0006] In a first aspect, a polarization imaging assembly includes a superlens frame, a superlens spacer, a superlens, and a detector. The superlens frame is used to support the superlens spacer and the superlens, and has a light passing area that avoids the superlens array. The superlens spacer is fixed on the superlens frame, avoids the light passing area, supports and fixes the superlens, and has a length consistent with that of the superlens. The superlens has unit structures of a determined shape and size lithographically formed thereon to form a superlens array. The superlens frame, the superlens spacer, and the superlens form a superlens assembly, and the superlens assembly and the detector are assembled to form the polarization imaging assembly. The unit structures of the superlens and the pixels of the detector are one-to-one coupled, and the light passing through the superlens is converted into light paths of different angles to be coupled with the corresponding pixels of the detector to implement polarization imaging of the detector.
[0007] In combination with the first aspect, an adjusting spacer is mounted between the detector and the superlens frame, and the detector, the adjusting spacer, and the superlens assembly are fixed by fasteners. The Z-direction distance between the detector and the superlens is adjusted by the thickness of the adjusting spacer.
[0008] In a second aspect, a superlens polarization imaging focal plane coupling process includes:
[0009] According to the surface shape of the pixel area of the linear array detector, the bonding surface of the superlens spacer is ground.
[0010] The ground superlens spacer, the superlens frame, and the superlens are assembled to form a superlens assembly.
[0011] The superlens assembly is assembled on a moving platform of a long linear array detector splicing device, the position and height of the superlens assembly on the moving platform are adjusted, and the long and short edges of the superlens array region are parallel to the movement axes on the horizontal plane of the moving platform of the long linear array detector splicing device.
[0012] An adjusting spacer is mounted between the detector and the superlens frame, and the detector, the adjusting spacer, and the superlens assembly are fixed by fasteners.
[0013] The mounting position and height of the detector are adjusted, the identification positions of the detector and the superlens satisfy a preset positional relationship, and the alignment coupling between the unit structures in the superlens array and the pixels of the detector is implemented.
[0014] In combination with the second aspect, in the step of grinding the bonding surface of the superlens spacer according to the surface shape of the pixel area of the linear array detector, an infrared interferometer is used to test the surface shape of the pixel area of the linear array detector, and the bonding surface of the superlens spacer is ground according to the surface shape of the pixel area of the linear array detector, so that the surface shape of the bonding surface of the superlens spacer is the same as the trend of the surface shape of the pixel area of the linear array detector.
[0015] In combination with the second aspect, the superlens array region is a rectangular region, in which the unit structures are arranged in an array, the two short sides of the array region are defined as the Y-axis direction, at least two pairs of mark points are symmetrically photoetched on the two short sides, and the two pairs of mark points are the intersection points of the long and short sides, the long side direction of the array region is defined as the X-axis direction, and a row of test points is photoetched on the outside of each long side along the X-axis direction, and each row of test points is equal in distance to the adjacent long side.
[0016] In combination with the second aspect, in the step of assembling the superlens gasket, the superlens frame and the superlens after the grinding of the bonding surface of the superlens gasket to form a superlens assembly, the grinding end point of the bonding surface of the superlens gasket corresponds to the mark points at the intersection of the long and short sides of the superlens, the polarizing plate gasket is fixed on the polarizing plate frame, the bonding surface of the superlens gasket is uniformly coated with a glue layer, and the superlens is placed on the bonding surface of the superlens gasket, so that the surface of the superlens is the same as the surface shape trend of the pixel area of the linear array detector.
[0017] In combination with the second aspect, the step of adjusting the position and height of the superlens assembly on the motion platform so that the long and short sides of the superlens array region are parallel to the motion axis on the horizontal plane of the motion platform of the long linear array detector splicing device comprises:
[0018] The long linear array detector splicing device is used to focus on at least four mark points that are not collinear on the superlens, and the Z-direction coordinate values of the four mark points are determined. If the Z-direction coordinate values are consistent, the Z-direction of the superlens does not need to be adjusted. If the Z-direction coordinate values are not consistent, adjusting pads are appropriately placed between the superlens assembly and the transition tooling to make the Z-directions of the at least four mark points coplanar, and the Z-direction adjustment of the superlens is completed.
[0019] In combination with the second aspect, the step of adjusting the position and height of the superlens assembly on the motion platform so that the long and short sides of the superlens array region are parallel to the motion axis on the horizontal plane of the motion platform of the long linear array detector splicing device comprises:
[0020] The X-axis guide rail of the long linear array detector splicing device is moved, any row of test points on the superlens is focused by using the optical system, the Y-direction coordinate values of the test points are determined, the position of the superlens assembly is adjusted until the Y-direction coordinate values of the test points are consistent, so that the X-axis of the superlens is parallel to the X-axis guide rail of the long linear array detector splicing device, and the corresponding Y-axis of the superlens is parallel to the Y-axis guide rail of the long linear array detector splicing device. If the Y-direction coordinate values of the test points of the superlens are consistent from the beginning, the superlens assembly does not need to be adjusted.
[0021] In combination with the second aspect, the step of adjusting the mounting position and height of the detector so that the mark positions of the detector and the superlens satisfy a preset positional relationship and implementing the alignment and coupling of the unit structures in the superlens array and the pixels of the detector comprises:
[0022] The long linear array detector splicing device is used to focus on the mark points at the intersection of the long and short edges of the superlens, and then the pixels at the corner points of the pixel area are focused to obtain the Z-direction coordinate difference value of the mark points and the pixels; the thickness of the gasket is adjusted to compensate for the Z-direction distance difference between the detector and the superlens, so that the Z-direction distance values between the superlens and the detector are equal; if the Z-direction coordinate difference value is consistent from the beginning, the detector does not need to be adjusted in the Z direction.
[0023] In combination with the second aspect, the mounting position and height of the detector are adjusted to make the mark positions of the detector and the superlens satisfy a preset positional relationship, and the steps of implementing the alignment and coupling of the unit structure in the superlens array and the pixels of the detector include:
[0024] The X-axis guide rail and the Y-axis guide rail of the long linear array detector splicing device are moved, the X-axis and Y-axis coordinates of the mark points at the intersection of the long and short edges of the superlens and the X-axis and Y-axis coordinates of the corner points of the pixel area of the detector are measured by the long linear array detector splicing device, and the position of the detector is adjusted to make the mark points at the intersection of the long and short edges of the superlens and the corner points of the pixel area satisfy a preset relative positional relationship; the relative positional relationship is obtained by simulation of the shape and size of the unit structure area of the superlens and the pixel area of the detector.
[0025] The superlens polarization imaging focal plane coupling process provided by the application has the following beneficial effects:
[0026] (1) The superlens polarization imaging focal plane coupling process provided by the application combines the superlens and the detector, the superlens acts as a polarizer, the polarization effect is adjustable, and the polarization effect can be directly measured by optical testing, which is beneficial to improving the target detection ability or recognition ability;
[0027] (2) The superlens polarization imaging focal plane coupling process provided by the application adjusts the point position of the superlens assembly on the movement platform of the long linear array detector splicing device and adjusts the detector on the superlens assembly, and through the two-stage adjustment, the X and Y direction positions and the Z direction distance of the superlens and the detector are controlled to realize the alignment and coupling of the unit structure in the superlens array and the pixels of the detector; the method has strong operability, good alignment and coupling effect, and is convenient to popularize. BRIEF DESCRIPTION OF DRAWINGS
[0028] Figure 1 is a coupling structure diagram of the superlens and the detector;
[0029] Figure 2 is a structure relationship diagram of the superlens array and the detector pixels;
[0030] Figure 3 is a process flow diagram of the superlens polarization imaging focal plane coupling process;
[0031] Figure 4The superlens and the detector mark points and test point position map;
[0032] Figure 5 The long linear array detector splicing device structure composition and coordinate system schematic diagram. DETAILED DESCRIPTION
[0033] The characteristics and advantages of the present application will become more apparent with the following detailed description.
[0034] The word "exemplary" is used herein to mean "serving as an example, instance, or illustration." Any implementation described herein as "exemplary" is not necessarily to be construed as preferred or advantageous over other implementations. Unless specifically indicated otherwise, the drawings are not necessarily to scale.
[0035] The present application provides a polarization imaging assembly, such as Figure 1 As shown, including superlens frame, superlens gasket, superlens and detector, superlens frame for supporting superlens gasket and superlens, which is provided with light passing area avoiding superlens array; superlens gasket is fixed on the superlens frame, avoiding the light passing area of the superlens array, supporting and fixing the superlens, the length is consistent with the length of the superlens; the superlens is photoetched with unit structure of specific shape and size arrangement to form superlens array; superlens frame-superlens gasket-superlens constitute superlens assembly, and after assembling with the detector, the polarization imaging assembly is formed, and the unit structure of the superlens is one-to-one corresponding coupling with the detector pixel. As shown in Figure 2 After the light passes through the superlens, the light is converted into different angle light paths and coupled with the corresponding pixels of the detector, so as to realize the polarization imaging of the detector.
[0036] The present application provides a superlens polarization imaging focal plane coupling process, as shown in Figure 3 The process comprises the following steps:
[0037] Step 1, according to the linear array detector pixel area surface shape, grinding the bonding surface of the superlens gasket.
[0038] Take the linear array detector wafer, test the linear array detector pixel area surface shape using infrared interferometer, save the linear array detector pixel area surface shape map, and grind the bonding surface of the superlens gasket according to the linear array detector pixel area surface shape, so that the surface shape of the bonding surface of the superlens gasket is the same as the trend of the linear array detector pixel area surface shape.
[0039] Step 2, assemble the superlens gasket, superlens frame and superlens after grinding to form a superlens assembly.
[0040] The superlens frame is used for supporting the superlens gasket and the superlens, and the light passing area of the superlens array is arranged on the superlens frame; the superlens gasket is fixed on the superlens frame, avoids the light passing area of the superlens array, supports and fixes the superlens, and the length is consistent with the length of the superlens; the superlens is photoetched with unit structures of specific shapes and sizes arranged to form a superlens array; the superlens frame-superlens gasket-superlens forms a superlens assembly, and after being assembled with a detector, a polarization imaging assembly is formed. After the light passes through the superlens, the light is converted into different angle light paths coupled with corresponding pixels of the detector, so that the polarization imaging of the detector is realized. The polarizer gasket and the polarizer frame can be independent elements, and of course, can also be an integrated structure, which is not limited here.
[0041] As shown in Figure 4 The superlens array area is a rectangular area, unit structures are arranged in the array area, the extension direction of the two short sides of the array area is defined as the Y-axis direction, at least two pairs of mark points are photoetched on the two short sides symmetrically, and two pairs of mark points are intersection points of long and short sides, the long side direction of the array area is defined as the X-axis direction, and a row of test points is photoetched on the outside of each long side along the X-axis direction. Each row of test points is equal in distance to the adjacent long side.
[0042] The grinding end point of the bonding surface of the superlens gasket corresponds to the mark points at the intersection of the long and short sides of the superlens, the polarizer gasket is fixed on the polarizer frame, the bonding surface of the superlens gasket is uniformly coated with a glue layer using a glue pump, and the superlens is placed on the bonding surface of the superlens gasket. Because the thickness of the superlens is thin (such as 0.3-0.5mm), the surface of the superlens and the pixel area surface of the linear array detector have the same trend. The superlens gasket, the surface of the superlens and the pixel area surface of the linear array detector have the same trend, which can ensure that the distance between the unit structure of the superlens and the pixel of the linear array detector in the Z direction is consistent, and subsequent fine adjustment can realize the consistency of the distance in the Z direction, reducing the adjustment difficulty.
[0043] Step 3, assemble the superlens assembly on the motion platform of the long linear array detector splicing device, adjust the position and height of the superlens assembly on the motion platform, so that the long and short sides of the superlens array area are parallel to the XY motion axis on the horizontal plane of the motion platform of the long linear array detector splicing device.
[0044] The superlens assembly is fixed on the long linear array detector splicing device Figure 5The long linear array detector splicing device comprises a moving platform, XYZ three-way guide rails, an optical system, a light source, a microscopic camera system and an image acquisition system. The XY guide rails drive the moving platform to move on the horizontal plane, and the Z guide rail drives the optical system to move vertically. The light source is a single spectral light source, which provides incident light to the optical system. The optical system reflects and focuses the incident light to the measured object (super lens assembly, polarization imaging assembly) erected on the moving platform. The reflected light is captured by the microscopic camera system after passing through the optical system, and the microscopic image of the measured object is obtained after the photoelectric signal conversion and transmission to the image acquisition system.
[0045] The working range of the long linear array detector splicing device satisfies 200mm (X direction) x 100mm (Y direction) x 100mm (Z direction). The measurement accuracy of X and Y directions reaches 0.1μm, and the measurement accuracy of Z direction reaches 1μm. X direction is parallel to the length direction of the detector linear array (the long side direction of the super lens array region), Y direction is parallel to the series direction of the detector linear array (the short side direction of the super lens array region), and Z direction is perpendicular to XY plane. X, Y and Z directions conform to the definition of right-hand coordinate system. The super lens assembly is placed within the effective stroke of the long linear array detector splicing device in X, Y and Z directions. The magnified images of the identification points and test points on the super lens can be displayed in the image acquisition system. After the detector is installed, the magnified images of the detector pixels can also be clearly and real-timely seen.
[0046] At least four non-collinear identification points on the super lens are focused by using the long linear array detector splicing device, and the Z direction coordinate values of the four identification points are determined. If the Z direction coordinate values are consistent, the Z direction of the super lens does not need to be adjusted. If the Z direction coordinate values are not consistent, adjusting shims are placed between the super lens assembly and the transition tool at appropriate positions to make the Z direction coordinate values of the at least four identification points coplanar, and the coplanar accuracy is adjusted to ≤1μm, thereby completing the Z direction adjustment of the super lens.
[0047] The X axis guide rail of the long linear array detector splicing device is moved, and any one row of test points on the super lens is focused by using the optical system to determine the Y direction coordinate values of the test points. The position of the super lens assembly is adjusted until the Y direction coordinate values of the test points are consistent. At this time, the X axis of the super lens is parallel to the X axis guide rail of the long linear array detector splicing device, and the corresponding Y axis of the super lens is parallel to the Y axis guide rail of the long linear array detector splicing device, satisfying the parallelism ≤1μm. If the Y direction coordinate values of the test points of the super lens are consistent from the beginning, the super lens assembly does not need to be adjusted.
[0048] Step 4: adjusting shims are installed between the detector and the super lens frame, and the detector, the adjusting shims and the super lens assembly are fixed and connected by fasteners.
[0049] Step 5: the installation position and height of the detector are adjusted to make the identification positions of the detector and the super lens satisfy the preset positional relationship, and the alignment and coupling of the unit structure in the super lens array and the detector pixels are realized.
[0050] The long linear array detector splicing device is used to focus on the mark points at the intersection of the long and short edges of the superlens, and then the pixels at the corner points of the pixel area are focused to obtain the Z-direction coordinate difference between the mark points and the pixels; the thickness of the gasket is adjusted to compensate for the Z-direction distance difference between the detector and the superlens, so that the Z-direction distance values between the superlens and the detector are equal, such as within 50±2 μm. If the Z-direction coordinate difference is consistent from the beginning, the detector does not need to be adjusted in the Z-direction.
[0051] The X-axis guide rail and the Y-axis guide rail of the moving long linear array detector splicing device are moved, the X-axis and Y-axis coordinates of the mark points at the intersection of the long and short edges of the superlens and the X-axis and Y-axis coordinates of the corner points of the pixel area of the detector are measured by using the long linear array detector splicing device, the position of the detector is adjusted, so that the mark points at the intersection of the long and short edges of the superlens and the corner points of the pixel area of the detector satisfy a preset relative position relationship, and the relative position accuracy is better than 2 μm. The relative position relationship is obtained by simulation using the superlens unit structure area and the shape and size of the detector pixel area.
[0052] The above detailed description of the present application is made in combination with specific embodiments and exemplary examples, but these descriptions cannot be understood as limitations of the present application. Those skilled in the art understand that the technical solutions and embodiments of the present application can be variously replaced, modified or improved without deviating from the spirit and scope of the present application, and these all fall within the scope of the present application. The protection scope of the present application is subject to the appended claims.
[0053] The contents not described in detail in the specification of the present application are the known technology of those skilled in the art.
Claims
1. A polarization imaging component, characterized in that, It includes a superlens frame, a superlens pad, a superlens, and a detector. The superlens frame is used to support the superlens pad and the superlens, and has a light-transmitting area on it that avoids the light-transmitting area of the superlens array. The superlens pad is fixed on the superlens frame, avoids the light-transmitting area of the superlens array, supports and fixes the superlens, and has the same length as the superlens. The superlens is photolithographically engraved with unit structures of a defined shape and size to form a superlens array; the superlens frame, superlens pad and superlens constitute a superlens assembly, which is assembled with the detector to form a polarization imaging assembly. The unit structure of the superlens is coupled one-to-one with the detector pixels. After the light passes through the superlens, the light is converted into light paths of different angles and coupled with the corresponding pixels of the detector to realize the polarization imaging of the detector. The one-to-one coupling between the unit structure of the superlens and the detector pixels is implemented in the following manner: The superlens assembly is mounted on the motion platform of the long linear array detector splicing device. The position and height of the superlens assembly on the motion platform are adjusted so that the long and short sides of the superlens array area are parallel to the motion axis on the horizontal plane of the motion platform of the long linear array detector splicing device. A long linear array detector splicing device is used to focus on at least four non-collinear marker points on the superlens to determine the Z-axis coordinates of the four marker points. If the Z-axis coordinates are consistent, the superlens Z-axis does not need to be adjusted; if the Z-axis coordinates are inconsistent, an adjustment shim is placed at an appropriate position between the superlens assembly and the transition fixture to make the at least four marker points coplanar in the Z-axis, thus completing the superlens Z-axis adjustment. The X-axis guide rail of the moving long linear array detector splicing device is used to focus on any row of test points on the superlens using the optical system to determine the Y-coordinate value of the test points. The position of the superlens assembly is then adjusted until the Y-coordinate values of the test points are consistent, so that the X-axis of the superlens is parallel to the X-axis guide rail of the long linear array detector splicing device, and the corresponding Y-axis of the superlens is parallel to the Y-axis guide rail of the long linear array detector splicing device. If the Y-coordinate of the test points of the superlens is consistent from the beginning, then there is no need to adjust the superlens assembly. An adjustment shim is installed between the detector and the superlens frame, and the detector, adjustment shim and superlens assembly are fixed together by fasteners. Adjust the installation position and height of the detector so that the detector and the marked position of the superlens meet the preset positional relationship, and implement the alignment and coupling of the unit structure in the superlens array with the detector pixels.
2. A superlens polarization imaging focal plane coupling process for the polarization imaging assembly of claim 1, characterized in that, include: Based on the surface shape of the pixel area of the linear array detector, the bonding surface of the superlens gasket is ground. The repaired super lens gasket, The superlens frame and the superlens are assembled to form a superlens assembly; The superlens assembly is mounted on the motion platform of the long linear array detector splicing device. The position and height of the superlens assembly on the motion platform are adjusted so that the long and short sides of the superlens array region are parallel to the motion axis on the horizontal plane of the long linear array detector splicing device motion platform. Specifically, the long linear array detector splicing device is used to focus on at least four non-collinear marker points on the superlens to determine the Z-coordinate values of the four marker points. If the Z-coordinates are consistent, the superlens Z-direction does not need to be adjusted; if the Z-coordinates are inconsistent, adjustments are made by placing the superlens assembly at an appropriate position between the superlens assembly and the transition fixture. Adjust the shims to make the at least four marker points coplanar in the Z direction, thus completing the Z-axis adjustment of the superlens; move the X-axis guide rail of the long linear array detector splicing device, use the optical system to focus on any row of test points on the superlens, determine the Y-axis coordinate value of the test points, adjust the position of the superlens assembly until the Y-axis coordinate values of the test points are consistent, so that the X-axis of the superlens is parallel to the X-axis guide rail of the long linear array detector splicing device, and the corresponding Y-axis of the superlens is parallel to the Y-axis guide rail of the long linear array detector splicing device; if the Y-axis coordinates of the superlens test points are consistent from the beginning, then there is no need to adjust the superlens assembly. An adjustment shim is installed between the detector and the superlens frame, and the detector, adjustment shim and superlens assembly are fixed together by fasteners. Adjust the installation position and height of the detector so that the detector and the marked position of the superlens meet the preset positional relationship, and implement the alignment and coupling of the unit structure in the superlens array with the detector pixels.
3. The superlens polarization imaging focal plane coupling process according to claim 2, characterized in that, In the step of grinding the bonding surface of the superlens pad according to the surface shape of the pixel area of the linear array detector, an infrared interferometer is used to test the surface shape of the pixel area of the linear array detector, and the bonding surface of the superlens pad is ground according to the surface shape of the pixel area of the linear array detector so that the surface shape of the bonding surface of the superlens pad is the same as the surface shape trend of the pixel area of the linear array detector.
4. The superlens polarization imaging focal plane coupling process according to claim 2, characterized in that, The superlens array region is a rectangular region, in which unit structures are arranged in an array. The two short sides of the array region extend in the direction defined as the Y-axis direction. At least two pairs of marker points are symmetrically photolithographically etched on the two short sides, and two of the marker points are the intersection of the long and short sides. The direction of the long side of the array region is defined as the X-axis direction. A row of test points is photolithographically etched along the X-axis direction on the outer side of each long side. The distance between each row of test points and the nearest long side is equal.
5. The superlens polarization imaging focal plane coupling process according to claim 4, characterized in that, In the step of assembling the polished superlens pad, superlens frame, and superlens to form a superlens assembly, the starting and ending points of the polishing of the bonding surface of the superlens pad correspond to the marking points where the long and short sides of the superlens intersect. The polarizer pad is fixed on the polarizer frame, and an adhesive layer is evenly applied to the bonding surface of the superlens pad. The superlens is placed on the bonding surface of the superlens pad so that the surface of the superlens is aligned with the surface shape trend of the pixel area of the linear array detector.
6. The superlens polarization imaging focal plane coupling process according to claim 4, characterized in that, The steps of adjusting the installation position and height of the detector to ensure that the detector and the marked position of the superlens meet a preset positional relationship, and implementing the alignment and coupling of the unit structure in the superlens array with the detector pixels, include: A long linear array detector splicing device is used to focus on the marker points at the intersection of the long and short sides of the superlens, and then to focus on the pixels at the corner points of the detector pixel area to obtain the Z-axis coordinate difference between the marker points and the pixels. By adjusting the thickness of the shims, the difference in Z-axis distance between the detector and the superlens is compensated to make the Z-axis distance between all points of the superlens and the detector equal. If the Z-axis coordinate difference is consistent from the beginning, there is no need to adjust the detector in the Z-axis direction.
7. The superlens polarization imaging focal plane coupling process according to claim 4, characterized in that, The steps of adjusting the installation position and height of the detector to ensure that the detector and the marked position of the superlens meet a preset positional relationship, and implementing the alignment and coupling of the unit structure in the superlens array with the detector pixels, include: The X-axis and Y-axis guide rails of the moving long linear array detector splicing device are used to determine the X-axis and Y-axis coordinates of the marker point at the intersection of the long and short sides of the superlens and the X-axis and Y-axis coordinates of the corner point of the detector pixel area. The detector position is adjusted so that the marker point at the intersection of the long and short sides of the superlens and the corner point of the detector pixel area satisfy the preset relative position relationship. This relative position relationship is obtained by simulation using the structure area of the superlens unit and the shape and size of the detector pixel area.
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