System for adjusting light beam

Abstract

The invention provides a system for adjusting a light beam. The system can be applied to an optical system with high requirements on reflected wavefront. The system comprises a reflector, a surface shape detection device, a calculation and analysis device and a compensation light generation device. The reflector is used for receiving incident light from the first light source and emitting reflected light. The surface shape detection device is used for acquiring the information of the initial surface shape of the reflector after the incident light is incident. The calculation and analysis device is used for generating first indication information according to the information of the initial surface shape, and the first indication information indicates the compensation light generation device to emit first compensation light to the reflector. The compensation light generating device is used for emitting first compensation light to the reflector according to the first indication information, and the first compensation light is used for changing the initial surface shape of the reflector into the first surface shape. The system provided by the invention not only can maintain the wavefront of the reflected light, but also can improve the precision of regulating and controlling the pointing and divergence angles of the reflected light.

Description

Technical Field

[0001] The present application relates to the field of space optics technology, and more specifically, to a system for adjusting light beams. Background Art

[0002] In optical systems that require beam divergence angle control and direction control (such as large optical imaging systems, lasers or accelerators, etc.), reflectors are usually used to receive beams from light sources and reflect the beams to the back-end optical system. However, since the distance between the light source outlet of such optical systems and the back-end optical system is relatively far (for example, in some systems it can even reach tens or even hundreds of meters), the front-end reflector that receives the beam is crucial to the high-quality propagation of the beam. In order to avoid light energy loss as much as possible, the light beam is often irradiated in the form of grazing incidence, which requires the reflector to be larger in size. At the same time, in order to ensure that the wavefront of the reflected light can be maintained, the surface accuracy of the reflector often needs to reach the nanometer level, which poses a great challenge to high-precision optical processing. In addition, since the mirror body of the reflector also needs to bear high-power non-uniform light and heat irradiation, the resulting thermal deformation will affect the quality of the reflected light. Therefore, how to efficiently adjust the surface shape of the reflector so that it can more effectively control the direction and divergence angle of the light beam is a problem that needs to be solved. Summary of the invention

[0003] The embodiment of the present application provides a system for adjusting the light beam, which can realize real-time control of the surface shape of the reflector. It can not only maintain the wavefront of the reflected wave and realize high-precision control of the direction of the light beam, but also realize micro-radian or even micro-nano-radian level control of the divergence angle of the light beam.

[0004] In a first aspect, an embodiment of the present application provides a system for adjusting a light beam. The system includes: a reflector, a surface shape detection device, a calculation and analysis device, and a compensation light generating device. Among them: the reflector is used to receive incident light from a first light source and emit reflected light; the surface shape detection device is used to obtain information about the initial surface shape of the reflector after the incident light is incident; the calculation and analysis device is used to generate first indication information based on the information about the initial surface shape, and the first indication information is used to instruct the compensation light generating device to emit a first compensation light to the reflector; the compensation light generating device is used to emit the first compensation light to the reflector based on the first indication information, and the first compensation light is used to change the initial surface shape of the reflector to a first surface shape.

[0005] Based on the solution provided by the present application, by obtaining the information of the surface shape of the reflector, the surface of the reflector is irradiated with compensation light, so that the surface of the reflector after being irradiated with the compensation light produces a preset non-uniform deformation, and the initial surface shape is changed to the first surface shape, so that the direction and divergence angle of the incident light after being reflected by the deformed surface change, that is, the purpose of adjusting the direction and divergence angle of the reflected light is achieved. Compared with the prior art, the solution of the present application does not require complex reflector design and high-precision optical processing, and at the same time, no temperature sensor is required in the system, thereby avoiding the accuracy and resolution limits brought by the use of components such as temperature sensors, and can achieve high-precision real-time beam adjustment.

[0006] In combination with the first aspect, in certain implementations of the first aspect, the compensation light generating device is further used to feed back power information and position information of the first compensation light to the calculation and analysis device, the power information being the power size and power distribution of the first compensation light, and the position information being the distance the first compensation light is transmitted to the surface of the reflector; the surface shape detection device is further used to obtain first surface shape information of the first surface shape; the calculation and analysis device is further used to generate second indication information based on the power information, the position information and the first surface shape information, the second indication information being used to instruct the compensation light generating device to emit second compensation light to the reflector; the compensation light generating device is further used to emit second compensation light to the reflector based on the second indication information, the second compensation light being used to change the first surface shape into a second surface shape.

[0007] Based on this solution, by feeding back the power information and position information of the compensation light, the surface shape of the reflector can be dynamically and real-time adjusted according to the characteristics of the compensation light, thereby improving the efficiency and reliability of the system.

[0008] In combination with the first aspect, in certain implementations of the first aspect, the first compensation light is used to change the initial surface shape of the reflector to the first surface shape, including: the first compensation light is used together with the incident light to homogenize the optical thermal field of the surface of the reflector, or the compensation light is used to heat a local area of ​​the reflector to cause thermal deformation of the local area of ​​the reflector.

[0009] The solution of the present application can not only adjust the surface shape of the reflector by thermally neutralizing the compensation light and the incident light, thereby solving the problem of difficulty in maintaining the reflected wavefront of high-power optical devices, but also actively distort the surface by heating the local area of ​​the reflector, so that the accuracy of the divergence angle of the reflected light can be adjusted to the micro-radian or even micro-nano-radian level, thereby improving the accuracy of the adjustment.

[0010] In combination with the first aspect, in certain implementations of the first aspect, the information of the initial surface shape is at least one of the peak-to-valley PV value of the initial surface shape, the root mean square RMS of the initial surface shape, and the surface slope of the initial surface shape; the information of the first surface shape is at least one of the peak-to-valley PV value of the first surface shape, the root mean square RMS of the first surface shape, and the surface slope of the first surface shape.

[0011] In combination with the first aspect, in some implementations of the first aspect, the system further includes: an environment control device, wherein: the environment control device is used to obtain environmental information of the reflector and change the environment of the reflector.

[0012] In combination with the first aspect, in certain implementations of the first aspect, the computing and analyzing device generates the environmental control information based on the environmental information, the environmental control information indicates changes to the environment in which the reflector is located, and the environmental control device changes the environment in which the reflector is located based on the environmental control information.

[0013] In combination with the first aspect, in some implementations of the first aspect, the environmental information is at least one of the temperature, humidity, and vacuum degree of the reflector.

[0014] In combination with the first aspect, in some implementations of the first aspect, the computing and analyzing device is specifically configured to generate the second indication information based on the power information, the position information, the first surface shape information, and the environmental information.

[0015] In combination with the first aspect, in certain implementations of the first aspect, the system also includes: a temperature detection device, wherein: the temperature detection device is used to obtain temperature distribution information on the surface of the reflector; the calculation and analysis device is specifically used to generate the second indication information based on the power information, the position information, the first surface shape information, the environmental information and the temperature distribution information.

[0016] In combination with the first aspect, in certain implementations of the first aspect, the system also includes: a temperature detection device, wherein: the temperature detection device is used to obtain temperature distribution information on the surface of the reflector; the calculation and analysis device is specifically used to generate the second indication information based on the power information, the position information, the first surface shape information and the temperature distribution information.

[0017] Based on the above solution, by acquiring at least one of the environmental information of the reflector and the temperature distribution information on the surface of the reflector, the accuracy and reliability of the generated indication information can be further improved, thereby achieving the purpose of improving system performance.

[0018] In combination with the first aspect, in certain implementations of the first aspect, the compensation light generating device includes: the compensation light generating device includes: a second light source, a spectrometer, a light source generating device and a power measuring device, wherein: the second light source is used to generate a first light beam; the spectrometer is used to split the first light beam into a first portion of light and a second portion of light, and output the first portion of light to the light source generating device, and output the second portion of light to the power measuring device; the light source generating device generates the first compensation light based on the first portion of light; and the power measuring device obtains the power information based on the second portion of light.

[0019] In combination with the first aspect, in some implementations of the first aspect, the compensation light generating device further includes: a beam expansion and contraction device, which is located between the second light source and the light splitting device and is used to change the spot diameter of the first light beam.

[0020] In combination with the first aspect, in some implementations of the first aspect, the compensation light generating device further includes: a distance measuring device, and the distance measuring device is used to obtain the position information.

[0021] In combination with the first aspect, in certain implementations of the first aspect, the compensation light generating device is also used to generate a second compensation light. Specifically, the second light source is used to output a third light beam to the beam expansion and contraction device; the beam expansion and contraction device is used to change the spot diameter of the third light beam and output the third light beam to the light splitting device; the light splitting device is used to split the third light beam into a first portion of light and a second portion of light, and output the first portion of light of the third light beam to the light source generating device, and output the second portion of light of the third light beam to the power measuring device; the light source generating device generates the second compensation light based on the first portion of light of the third light beam; the power measuring device obtains the power information of the second compensation light based on the second portion of light of the third light beam; the distance measuring device is used to obtain the distance that the second compensation light is transmitted to the surface of the reflector.

[0022] In combination with the first aspect, in certain implementations of the first aspect, when the reflector is in a vacuum environment, the system also includes a vacuum chamber, the vacuum chamber includes a porthole, and the porthole is used to transmit detection light from the surface shape detection device; the reflector is also used to reflect the detection light to the surface shape detection device through the porthole; the surface shape detection device is specifically used to obtain information on the initial surface shape through the detection light reflected by the reflector.

[0023] In combination with the first aspect, in some implementations of the first aspect, the system further includes: a shaping module, wherein the shaping module is located on an optical path between the compensation light generating device and the reflector, and is used to shape the first compensation light.

[0024] In combination with the first aspect, in some implementations of the first aspect, the shaping module is further used to shape the second compensation light. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 A schematic structural diagram of a system 100 for adjusting a light beam provided in an embodiment of the present application is shown.

[0026] Figure 2 A schematic structural diagram of a compensation light generating device 140 provided in an embodiment of the present application is shown.

[0027] Figure 3 A schematic architecture diagram of a transmissive beam expansion and contraction device 300 provided in an embodiment of the present application is shown.

[0028] Figure 4 A schematic diagram of a coupling architecture 400 of a light splitting device and a light source generating device provided in an embodiment of the present application is shown.

[0029] Figure 5 This is a light control scene using two beams of compensation light for mirror correction provided in an embodiment of the present application.

[0030] Figure 6 The distortion of the mirror surface before and after compensation light correction is shown.

[0031] Figure 7 This is a light control scene using four beams of compensation light for mirror correction provided in an embodiment of the present application.

[0032] Figure 8 Shows the use of Figure 7 The distortion of the reflector surface after mirror correction is shown for the four compensating lights.

[0033] Fig. 9 Schematic diagrams showing several possible top-hat lights, shaped lights or light field arrays.

[0034] Fig.10 A beam expansion scenario of a thermoconvex mirror provided in an embodiment of the present application is shown.

[0035] Fig.11 A beam expansion scenario of a thermoconcave mirror provided in an embodiment of the present application is shown.

[0036] Fig.12Schematic structural diagrams of three possible light beam adjustment systems 1200 provided in embodiments of the present application are shown.

[0037] Fig.13 Two schematic diagrams of the positional relationship between the porthole and the surface shape detection device provided in the embodiments of the present application are shown. DETAILED DESCRIPTION

[0038] The technical solution in this application will be described below in conjunction with the accompanying drawings.

[0039] In order to facilitate understanding of the embodiments of the present application, the following explanation is made.

[0040] First, the terms "first", "second", etc. and various numerical numbers in the text descriptions or drawings of the embodiments of the present application shown below are only used for the convenience of description, and are not necessarily used to describe a specific order or sequence, and are not used to limit the scope of the embodiments of the present application. For example, to distinguish different light sources, to distinguish different light beams, or to distinguish different surface shapes, or to distinguish different information of surface shapes, etc.

[0041] Second, the term "comprising" and any variations thereof in the embodiments of the present application shown below are intended to cover non-exclusive inclusions. For example, a process, method, system, product or apparatus comprising a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units that are not explicitly listed or inherent to these processes, methods, products or apparatuses.

[0042] Third, in the embodiments of the present application, words such as "exemplary" or "for example" are used to indicate examples, illustrations or descriptions, and the embodiments or designs described as "exemplary" or "for example" should not be interpreted as being more preferred or more advantageous than other embodiments or designs. The use of words such as "exemplary" or "for example" is intended to present related concepts in a specific way for easy understanding.

[0043] Fourth, in the drawings of the present application, the thickness, size and shape of the lens have been slightly exaggerated for the sake of convenience. Specifically, the shapes of the spherical or aspherical surfaces shown in the drawings are shown by way of example, that is, the shapes of the spherical or aspherical surfaces are not limited to the shapes of the spherical or aspherical surfaces shown in the drawings. Moreover, the drawings are only examples and are not drawn strictly to scale.

[0044] Fifth, in this application, "and / or" describes the association relationship of associated objects, indicating that three relationships can exist. For example, A and / or B can mean: A exists alone, A and B exist at the same time, and B exists alone, where A and B can be singular or plural. The character " / " generally indicates that the associated objects before and after are in an "or" relationship.

[0045] The system provided in this application can be applied to all optical systems that require beam divergence angle control and pointing control, such as optical imaging systems, large scientific facilities (including but not limited to free electron laser (FEL) or synchrotron radiation (SR) experimental systems), etc.

[0046] For optical systems that need to adjust the divergence angle of the light beam and the direction of the light beam, since a reflector is needed to reflect the light beam emitted by the light source to the back-end optical system, in order to reduce the energy loss of the light beam caused by the reflector during the reflection process, in addition to controlling the angle of the incident light beam to be grazing incidence, the more critical factor is to control the surface accuracy of the reflector to ensure that the wavefront of the reflected light can be maintained. However, the high-precision requirements at the nanometer level require extremely high levels of optical processing and are difficult to achieve. In addition, as the incident light continues to irradiate, the non-uniform photothermal irradiation of the incident light beam on the reflector will further cause the surface shape of the reflector to deform. Therefore, how to adjust the surface shape of the reflector to effectively control the exit direction and divergence angle of the light beam is a problem that needs to be solved.

[0047] At present, the schemes for achieving the control of beam divergence angle and pointing include the Wolter mirror concentric superposition scheme, Kirkpatric-Baez (KB) mirror and the use of electrothermal actuators to perform thermal compensation on optical elements. Among them, the Wolter mirror concentric superposition scheme does not take into account the error caused by thermal distortion and cannot meet the requirements of high-precision imaging. At the same time, multiple reflections cause energy loss, affecting the imaging efficiency. The KB reflector has extremely high requirements for installation and processing and low controllable degrees of freedom, so its application scenarios are limited. The scheme of using electrothermal actuators to perform thermal compensation on optical elements is to achieve the control of beam divergence angle and pointing by changing the temperature distribution of the element and correcting the thermal distortion of the element. The electrothermal coupling structure in this scheme is difficult to process and connect, and it is difficult to achieve ultra-smooth polishing. In addition, the laying of the electrothermal conductor constrains the freedom of thermal compensation and has poor portability.

[0048] In addition, the current mainstream solutions for correcting the surface shape of the reflector include the solution of using temperature sensors and correction actuators for surface shape control and the solution of using piezoelectric modules. Among them, in the solution using temperature sensors and correction actuators, the temperature sensor has low accuracy and resolution and cannot meet the requirements of high-precision imaging. At the same time, the mirror layout of the temperature sensor has great limitations and is easy to block light, affecting heat flow and connection stress. In addition, since the surface shape data cannot be captured, the surface shape of the reflector is corrected only by the temperature field, which makes the error of this solution large. In the solution using piezoelectric modules, piezoelectric deformable mirror technology has bottlenecks in processing and heat dissipation due to its compact design, and is limited by the limitations of the mechanical structure, so the control resolution is low.

[0049] Based on the above problems, the present application proposes a system for adjusting the light beam, which cooperates with the surface shape detection device to illuminate the reflector with compensation light, so that the mirror body produces a preset non-uniform deformation, thereby achieving the purpose of adjusting the direction and divergence angle of the outgoing light beam. The solution of the present application can not only maintain the reflected wavefront of high-power optical devices by adjusting the surface shape through thermal neutralization, but also adjust the divergence angle of micro-radians or even nano-radians by actively distorting the optical surface, thereby achieving the purpose of improving the adjustment accuracy.

[0050] Figure 1 A schematic structural diagram of a system 100 for adjusting a light beam (hereinafter referred to as system 100, also referred to as a device 100 for adjusting a light beam) provided in an embodiment of the present application is shown. Specifically, the system 100 includes a reflector 110, a surface shape detection device 120, a calculation and analysis device 130, and a compensation light generating device 140. Among them, the reflector 110 is used to reflect the incident light from the first light source into the optical system. The surface shape detection device 120 is used to detect the surface shape of the reflector 110 and obtain information about the surface shape of the reflector 110. The calculation and analysis device 130 is used to generate indication information based on the information about the surface shape of the reflector collected by the surface shape detection device 120. The compensation light generating device 140 is used to emit compensation light to the reflector according to the indication information, and control the surface shape of the reflector by the compensation light, thereby adjusting the exit direction and divergence angle of the reflected light.

[0051] It should be noted that, in the present application, the information of the reflector surface shape (including the information of the initial surface shape and the information of the first surface shape and the information of the second surface shape in the following description) includes but is not limited to at least one of the following information: the surface shape error of the reflector 110 before and after the surface shape changes, such as the root mean square (RMS) and the peak to valley (PV) value (the difference between the peak value and the valley value), the surface shape slope of the reflector 110 or other surface topology information, etc. Exemplarily, the information of the first surface shape can be the PV value and / or RMS of the first surface shape relative to the initial surface shape when the reflector surface 110 changes from the initial surface shape to the first surface shape.

[0052] In addition, in the present application, the indication information generated by the calculation and analysis device 130 (including the first indication information in the above description and the second indication information and the third indication information in the following description) is the indication information corresponding to the corresponding compensation light. Specifically, the first indication information is used to instruct the compensation light generating device 140 to emit the first compensation light to the reflector 110. The content indicated by the first indication information includes but is not limited to at least one of the following information: the direction, power, spot size, morphology of the spot, projection position of the compensation light, and duration of the compensation light. Exemplarily, when the first indication information instructs the compensation light generating device 140 to emit the first compensation light, the first indication information may include the direction of the first compensation light, the power of the first compensation light, the spot size of the first compensation light, and the duration of the first compensation light.

[0053] It should also be noted that, in the scheme of the present application, the present application does not limit the manner in which the reflector receives the incident light emitted by the first light source. For example, in some embodiments, the incident light emitted by the first light source is directly incident on the reflector in the system in a grazing incidence manner. Alternatively, in other embodiments, the incident light emitted by the first light source received by the reflector in the system passes through a refractive element, such as a lens, a reflector or other optical element that changes the direction of the incident light emitted by the first light source and then incident on the reflector in the system in a grazing incidence manner. It can be understood that, at this time, there is still a refractive element in the optical path between the first light source and the reflector 110.

[0054] Specifically, after the first light source emits incident light, the incident light is incident on the reflector 110. At the same time, the surface shape detection device 120 detects the change of the reflector 110 after receiving the incident light, and obtains the information of the initial surface shape of the reflector 110 after the incident light is incident. After the calculation and analysis device 130 obtains the information of the initial surface shape of the reflector 110, it generates the first indication information according to the information of the initial surface shape. Subsequently, the compensation light generating device 140 emits the first compensation light to the reflector 110 according to the first indication information to change the surface shape of the reflector 110 to the first surface shape, so that the direction and divergence angle of the reflected light on the reflector 110 are changed.

[0055] It should be noted that, in some embodiments, the information of the initial surface shape obtained by the computing and analyzing device 130 is preset in the computing and analyzing device 130, that is, the information of the initial surface shape of the reflector 110 may not be obtained through the surface shape detection device 120, but is set in the computing and analyzing device 130. In other words, when the computing and analyzing device 130 generates the first indication information, it may be generated based on the information of the initial surface shape of the reflector 110 stored by itself. It is understandable that in the present application, the preset may include a pre-definition. Among them, "pre-definition" can be achieved by pre-saving the corresponding data, parameters, tables or other methods that can be used to indicate relevant information in the device, and the present application does not limit its specific implementation method.

[0056] It should be understood that there are dynamic changes in the adjustment of the surface shape of the reflector 110 using the compensation light. In some scenarios, for example, after the first compensation light irradiates the reflector 110 at a specific angle and power for a period of time, the surface shape of the reflector 110 is no longer the first surface shape due to thermal radiation. Or the optical system needs to continuously change the direction and / or divergence angle of the reflected light emitted by the reflector over time. Or, the compensation light generating device 140 cannot generate the compensation light indicated by the calculation and analysis device 130, for example, when the optical power of the compensation light indicated by the first indication information exceeds the optical power of the compensation light that can be generated by the compensation light generating device 140. Therefore, in order to enable the system for adjusting the light beam provided by the application to provide real-time dynamic adjustment, the compensation light generating device 140 is also used to feed back the power information and position information of the first compensation light to the calculation and analysis device 130, so that the calculation and analysis device 130 can generate new indication information using the power information and position information of the first compensation light, thereby controlling the compensation light generating device 140 to continue to generate new compensation light, thereby changing the direction and divergence angle of the reflected light.

[0057] It should be noted that, in the present application, the power information of the compensation light (including the power information of the first compensation light mentioned above and the power information of the second compensation light hereinafter) is the power distribution and power size of the compensation light. For example, the power information of the first compensation light is the power distribution and power size of the first compensation light.

[0058] In addition, the position information of the compensation light (including the position information of the first compensation light mentioned above and the position information of the second compensation light described below) is the distance that the compensation light (including the first compensation light and the second compensation light) is transmitted to the surface of the reflector 110, or the distance and divergence angle that the compensation light is transmitted to the surface of the reflector 110.

[0059] Specifically, after the compensation light generating device 140 emits the first compensation light to the reflector 110, the compensation light generating device 140 feeds back the power information and position information of the first compensation light to the calculation and analysis device 130. At the same time, the surface shape detection device 120 obtains the surface shape information of the reflector 110 changed by the first compensation light, and at this time, the surface shape information is the information of the first surface shape corresponding to the first surface shape. At the same time, the calculation and analysis device 130 generates the second indication information according to the power information, position information and the first surface shape information of the first compensation light, so that the compensation light generating device 140 emits the second compensation light to the reflector 110 according to the second indication information, and changes the first surface shape of the reflector 110 into the second surface shape by relying on the second compensation light.

[0060] It should be understood that the above adjustment process only describes the process of changing the initial surface shape of the reflector 110 to the first surface shape, and changing the first surface shape of the reflector 110 to the second surface shape. The subsequent adjustment of the reflected light by the system can refer to the above process of changing the first surface shape of the reflector 110 to the second surface shape. Exemplarily, after the compensation light generating device 140 emits the second compensation light, the power information of the second compensation light and the position information of the second compensation light can be fed back to the calculation and analysis device 130 again, and the calculation and analysis device generates the third indication information according to the information of the second surface shape obtained by the surface shape detection device 120 to instruct the compensation light generating device 140 to generate the third compensation light corresponding to the third indication information.

[0061] It should be noted that the present application does not limit the first light source and the incident light emitted by the first light source. For example, the first light source may be a synchrotron radiation source or a free electron laser source, etc. The incident light may be a Gaussian beam or a near-Gaussian non-flat-top light, etc.

[0062] In addition, the present application does not limit the material and shape of the reflector 110. The reflector 110 can be a long flat mirror or a long cylindrical mirror. Its material can be silicon-based materials, metals, glass, etc., and the surface is coated with a metal film (such as ruthenium, rhodium, gold, etc.). It should be noted that the reflector 110 is a part of an optical system that requires light beam divergence angle control and pointing control. Exemplarily, if the light beam adjustment system provided in the present application is used in an accelerator, the reflector 110 is a reflector that exists in the accelerator system itself, and the optical system in the system 100 is the back-end optical system of the accelerator system.

[0063] Optionally, the surface detection device 120 is an interferometer, such as a large-aperture Fizeau interferometer and a matching detection environment, which can provide real-time full-aperture surface detection of the reflector.

[0064] Optionally, in the optical system 100 provided in the embodiment of the present application, the computing and analyzing device 130 is a processing device, which may include a central control processor and a memory, such as a central control computer. At this time, the information of the face shape obtained by the face shape detection device 120 and the indication information generated by the computing and analyzing device 130 according to the face shape information can be stored in the memory, so that each device in the system can perform corresponding operations according to the content in the memory. Exemplarily, when the face shape detection device 120 obtains the information of the first face shape, the information of the first face shape will be stored in the memory, so that the computing and analyzing device 130 can directly use the information of the first face shape to generate the first indication information, and at the same time, the compensation light generating device 140 can generate the corresponding first compensation light according to the first indication information. Alternatively, the computing and analyzing device 130 in the system is an independent computing and controlling device. When the face shape detection device 120 obtains the information of the first face shape, the information of the first face shape needs to be sent to the computing and analyzing device 130. Similarly, after the computing and analyzing device 130 generates the first indication information, the first indication information is sent to the compensation light generating device 140.

[0065] Figure 2 FIG. 1 shows a schematic structural diagram of a compensation light generating device 140 provided in an embodiment of the present application. Figure 2 As shown, the compensation light generating device 140 includes a second light source 141, a beam expanding and contracting device 142, a spectrometer 143, a light source generating device 144, a distance measuring device 145 and a power measuring device 146. Among them, the second light source 141 is used to generate a first light beam, and output the first light beam to the beam expanding and contracting device 142. The beam expanding and contracting device 142 is used to change the spot diameter of the first light beam to generate a second light beam, and output the second light beam to the spectrometer 143. The spectrometer 143 is used to divide the second light beam into a first portion of light and a second portion of light, and output the first portion of light to the light source generating device 144, and at the same time, output the second portion of light to the power measuring device 146. The light source generating device 144 generates compensation light (including the first compensation light or the second compensation light in the above description, etc.) based on the first portion of light of the received second light beam. The power measuring device 145 obtains the power information of the compensation light generated by the light source generating device 144 based on the second portion of light of the second light beam. The distance measuring device 145 is used to obtain position information. It should be understood that the description of the power information and position information of the compensation light can refer to the above Figure 1 The relevant parts of are not repeated here.

[0066] Optionally, in one achievable manner, the compensation light generating device 140 may further include a compensation light projection control device 147 for controlling the direction and power of the compensation light projection. In another achievable manner, the compensation light projection control device 147 may also be integrated into the computing and analyzing device 130, which is not limited in the present application.

[0067] Optionally, in order to reduce the volume of the compensation light generating device 140, in an achievable manner, the compensation light generating device 140 may not include at least one of the above-mentioned beam expansion and contraction device 142 and the distance measuring device 145. Exemplarily, when the light spot of the light beam generated by the second light source 141 meets the requirements, the first light beam generated by the second light source 141 can be directly split by the light splitting device 143, and a part of the split light beam is used by the light source generating device 144 to generate the corresponding compensation light, and a part is used by the power measuring device 145 to measure the optical power of the compensation light. When the distance measuring device is not included in the compensation light generating device 140, the distance of the compensation light transmitted to the reflector and the divergence angle of the compensation light can be obtained by, for example, manual measurement, and the distance and divergence angle obtained by measurement are input into the calculation and analysis device 130.

[0068] It is understood that, in some embodiments, the power measurement device 146 may include a power distribution measurement device 1461 and a power value measurement device 1462 (e.g., an optical power meter). The power distribution measurement device 1461 is used to obtain the intensity distribution or projection angle of the compensation light, etc. The power value measurement device 1462 is used to obtain the optical power of the compensation light.

[0069] Specifically, when the system requires the compensation light generating device 140 to emit compensation light to the reflector 110, after the compensation light generating device 140 obtains the instruction information, the second light source 141 generates a first light beam according to the instruction information, and the first light beam is expanded or contracted by the beam expansion and contraction device 142, and then is divided into a first part and a second part by the light splitting device 143. At the same time, the light splitting device 143 outputs the first part of the second light beam to the light source generating device 144, and outputs the second part of the second light beam to the power measuring device 145. Among them, the light source generating device 144 generates compensation light based on the first part of the light received from the second light beam, and incidents the reflector 110 to the surface by grazing incidence. The power measuring device 145 obtains the optical power of the second light beam based on the second part of the light of the second light beam. It should be understood that since the light source generating device 144 does not change the optical power of the second light beam, that is, the optical power of the compensation light is the same as the optical power of the second light beam, the power measuring device 145 can obtain the optical power of the compensation light generated by the light source generating device 144 by measuring the optical power of the second light beam.

[0070] When the compensation light generating device 140 feeds back the power information and position information of the compensation light to the computing and analyzing device 130, the power measuring device 146 feeds back the power distribution and power size of the compensation light emitted by the light source generating device 144 to the computing and analyzing device 130. At the same time, the ranging device 145 feeds back the acquired position information to the computing and analyzing device 130.

[0071] It should be noted that when the compensation light projection control device 147 is a part of the compensation light generating device 140, after the compensation light generating device 140 obtains the indication information, it needs to determine whether it can generate the compensation light specified by the calculation and analysis device 130 according to the indication information, and generate the compensation light according to the judgment result. When the compensation light projection control device 147 is coupled to the calculation and analysis device 130, the compensation light generating device 140 can feed back its own parameters to the calculation and analysis device 130 in advance, so that when the calculation and analysis device 130 generates the indication information, it can fully take into account the performance of the compensation light generating device 140 to avoid waste of resources.

[0072] Optionally, the second light source is a laser, for example, a laser that generates light in the near-infrared band (760-1500 nm), has Gaussian energy distribution, and can generate continuous light or high repetition rate light (eg, 1 kHz to 1 MHz).

[0073] Optionally, the beam expander and reducer 142 is a transmissive or reflective device. Figure 3 FIG. 2 shows a schematic structural diagram of a transmissive beam expansion and contraction device 300 provided in an embodiment of the present application. Figure 3 As shown, the transmission type expansion and contraction device 300 includes a convex lens 310, a concave lens 320 and a convex lens 330. Specifically, when the first light beam is expanded or contracted, the first light beam is incident from the convex lens 310, passes through the concave lens 320, and then emits the second light beam from the convex lens 330. Among them, the distance between each lens is movable, so as to achieve the expansion or contraction of the first light beam. It should be noted that the present application does not limit the surface shape of the convex lens 310, the concave lens 320 and the convex lens 330, which can be spherical or aspherical. At the same time, the surface shape of the three lenses can be set to the same surface shape, or partially the same, or completely different surface shapes according to the application scenario and requirements. Since the surface shape of the lens is mainly determined by the relative ratio of the adjustable spot size of the second light beam to the spot of the first light beam, if only a single contraction or single expansion effect is required, the lenses can be of the same type. If the needs of contraction and expansion are to be achieved at the same time, the lenses in the lens group generally select different types.

[0074] Figure 4A schematic diagram of a coupling architecture 400 of a spectrometer and a light source generating device provided in an embodiment of the present application is shown. Specifically, the coupling architecture 400 includes a spectrometer 410, a plano-concave cylindrical mirror 420, a first plano-convex cylindrical mirror 430 and a second plano-convex cylindrical mirror 440, wherein the plano-concave cylindrical mirror 420, the first plano-convex cylindrical mirror 430 and the second plano-convex cylindrical mirror 440 constitute a light source generating device. Specifically, the spectrometer 410 is a half-reflective half-mirror with a calibrated splitting ratio, which can reflect most of the light in the received second light beam (i.e., the above-mentioned first part of light) to the light source generating device 144, and transmit a small part of the light (e.g., 1%) to the power measuring device 145. The plano-concave cylindrical mirror 420, the first plano-convex cylindrical mirror 430 and the second plano-convex cylindrical mirror 440 constitute a light source generating device, which is mainly used for unidirectional beam expansion of the light spot to simulate the grazing incidence scene. When the second light beam is infrared light, the plano-concave cylindrical mirror 420, the first plano-convex cylindrical mirror 430 and the second plano-convex cylindrical mirror 440 may be coated with an infrared anti-reflection film to enhance the transmittance, thereby achieving the purpose of reducing energy loss.

[0075] It is understandable that the above Figure 4 The light source generating device in the embodiment is only an example, and the present application does not limit the structure of the light source generating device. For example, the light source generating device may also be different from the light source generating device. Figure 4 The order shown is shown, or the number of lenses constituting the light source generating device can also be other numbers. In addition, the relative placement angle of the cylindrical mirror can also be rotated according to needs to achieve anisotropic beam shaping. It should be noted that although the present application does not limit the number of lenses included in the light source generating device, the light source generating device should include at least one plano-concave cylindrical mirror to achieve the function of expanding or contracting the light beam.

[0076] It should be noted that, in the embodiment of the present application, the light source generating device 144 can emit a beam or a plurality of compensation lights on the surface of the reflector 110, and the incident angle thereof is a small angle (for example, less than or equal to 30°). At the same time, the position where the compensation light is irradiated can be changed according to the application scenario and requirements. For example, when the light beam adjustment system provided in the present application is applied to an accelerator, the compensation light can only irradiate the light-transmitting area of ​​the accelerator light source, or can also irradiate around the light-transmitting area.

[0077] In some embodiments, the compensation light emitted by the light source generating device 144 is used to correct the surface deformation of the reflector 110, so that the wavefront of the reflected light can be optimized. Figure 5As shown, it is a light control scene using two beams of compensation light for mirror correction. Among them, the middle part of the reflector is a long strip of light spot projected by the first light source, and on both sides of the long strip of light spot projected by the first light source are Gaussian-like long strips of light spots emitted by the light source generating device 144, which generate a long strip of light field with an obvious power distribution gradient on the reflector 110. Specifically, the surface shape correction near the area where the light spot of the first light source is located on the reflector can be achieved by adjusting the parameters shown in Table 1 below, namely, the average optical power of the compensation light, the standard deviation of the Gaussian distribution of the compensation light, the relative offset distance, and the incident angle. Among them, the relative offset distance is the offset distance of the light spot of the compensation light on the reflector relative to the light spot of the incident light emitted by the first light source on the reflector. The incident angle is the incident angle of the compensation light on the reflector, which can be normal incidence or grazing incidence, and is not limited in this application. Specifically, Figure 6 The distortion of the reflector surface before and after compensation light correction is shown. Figure 6 (a) in FIG. 1 shows the surface distortion of the reflector 110 which has not been corrected by the compensation light. Figure 6 (b) in FIG. 1 shows the surface distortion of the reflector 110 after compensation light correction. Figure 6 It can be seen from the comparison in that after the correction by the compensation light, the surface distortion of the reflector 110 is smoother than before the compensation light is emitted.

[0078] Table 1

[0079]

[0080] It can be understood that the compensation light parameters in the above Table 1 are only examples. Similarly, the parameter values ​​of each parameter are also only examples, and the present application is not limited thereto.

[0081] Furthermore, in order to deepen the homogenization effect of the surface deformation field of the reflector 110, the amount of compensation light can be increased, that is, more light beams are used to correct the reflector surface. Figure 7 The 4 compensation lights are shown in FIG. 1 . At this time, the surface deformation of the reflector 110 is as follows: Figure 8 As shown by Figure 8 and Figure 6 By comparison with (b), it can be seen that the use of four compensation light beams can reduce the surface deformation slope of the reflector 110 by one order of magnitude, that is, the wavefront of the reflected wave can be maintained to the greatest extent, thereby achieving high-precision control of the light beam pointing.

[0082] It should be noted that the compensation light emitted by the light source generating device 144 is in addition to the above Figure 5 or Figure 7 In addition to the Gaussian-like light fields listed above, there can also be Fig. 9The flat top light, special-shaped light or light field array shown can realize the desired light field by replacing different cylindrical mirror groups (or arrays), masks, gratings and other shaping components in the light source generating device 144.

[0083] In some embodiments, the compensation light emitted by the light source generating device 144 is used to actively cause the reflector 110 to produce micro- or nano-radian thermal deformation, thereby achieving micro-radian or even micro-nano-radian divergence angle control of the light beam. Fig.10 FIG. 1 shows a beam expansion scenario of a thermally convex mirror provided in an embodiment of the present application. Specifically, Fig.10 In the embodiment, the reflector 110 is irradiated by the compensation light emitted by the light source generating device 144 and deforms along the optical axis of the incident light (the light beam generated by the first light source). When Gaussian-distributed compensation light is used, the coverage area of ​​the compensation light is larger than the area of ​​the light spot of the first light source on the reflector. Therefore, in some scenarios, a shaping module 1001 can be added to the optical path between the compensation light generating device 140 and the reflector 110 as required. The shaping module 1001 includes but is not limited to a stop, a mask, a grating, etc. It should be noted that in Fig.10 In the illustrated scenario, the high point of the deformation of the reflector 110 intersects the edge of the incident light at tangential or grazing incidence (eg, the incident light has an angle of incidence less than 10°).

[0084] It should be noted that the above Fig.10 This is only an example of using compensation light to actively deform. It can be understood that in addition to convexity at the first light source irradiation point, the compensation light can also irradiate the edge of the mirror body to achieve relative concavity at the light source spot, such as Fig.11 As shown, this solution can provide more possibilities for adjusting the divergence angle and direction of the reflected light, and can be applied to optical systems that require beam expansion.

[0085] It should also be noted that when the surface deformation of the reflector 110 is corrected by the compensation light emitted by the light source generating device 144, the light field of the compensation light partially overlaps or does not overlap with the light field of the incident light generated by the first light source. When the reflector 110 is actively deformed by thermal distortion by the compensation light emitted by the light source generating device 144, the light field of the compensation light completely overlaps or partially overlaps with the light field of the incident light generated by the first light source.

[0086] In order to improve the accuracy and efficiency of the system's beam adjustment, ensure the reliability of the system's beam adjustment, and further optimize the system's performance, Figure 1 Based on the system 100 shown, the embodiment of the present application also provides several possible systems 1200 for adjusting the light beam, such as Fig.12 shown.

[0087] In a first possible implementation, the system 1200 includes a reflector 110, a surface shape detection device 120, a computing and analyzing device 130, a compensation light generating device 140, and an environmental control device 1210. The environmental control device 1210 is used to obtain the environmental information of the reflector 110, so that when the computing and analyzing device 130 generates indication information (including the first indication information and the second indication information, etc.), it is not only based on the power information, position information of the compensation light, and the surface shape information of the reflector 110, but also further considers the environmental information of the reflector 110, so as to determine more reliable indication information, thereby achieving the purpose of improving system performance. The description of the reflector 110, the surface shape detection device 120, the computing and analyzing device 130, and the compensation light generating device 140 can refer to the above. Figure 1 The relevant instructions in will not be repeated here.

[0088] Exemplarily, when the system starts to adjust the reflected light, the computing and analyzing device 130 generates the first indication information based on the initial surface shape information obtained by the surface shape detection device 120 and the environmental information obtained by the environmental control device 1210. When the system regulates the environment in which the reflector 110 is located, the computing and analyzing device 130 generates the environmental control information, so that the environmental control device 1210 changes the environment in which the reflector 110 is located according to the environmental control information to meet the system requirements.

[0089] It should be noted that, when in a non-vacuum environment, the environmental information includes but is not limited to at least one of the temperature and humidity of the environment in which the reflector 110 is located. At this time, the environmental control device 1210 may include a module for measuring and controlling temperature and / or humidity, for example, a humidifier with humidity display (increasing environmental humidity), a dehumidifier with humidity display (reducing environmental humidity), a refrigerator with temperature display (reducing temperature) or a heater with temperature display (increasing temperature), etc. Correspondingly, the environmental control information includes but is not limited to temperature information and / or humidity information. That is, in a non-vacuum scenario, the environmental control device 1210 mainly feeds back and regulates the temperature and / or humidity of the environment in which the reflector 110 is located. In an achievable manner, the temperature information and / or humidity information included in the environmental control information may be the temperature and / or humidity required by the system. When the environmental control device 1210 receives such environmental control information, the temperature and / or humidity of the environment in which the reflector 110 is located may be directly modified to the temperature and / or humidity indicated in the environmental control information. In another achievable manner, the temperature information and / or humidity information included in the environmental control information may be a change in the temperature and / or humidity of the environment in which the reflector 110 is currently located. In this case, the environmental control device 1210 needs to first calculate the target temperature and / or humidity required by the system, and then modify the temperature and / or humidity of the environment in which the reflector 110 is located to the calculated target temperature and / or humidity. It should be understood that the present application does not limit the form of the temperature information and / or humidity information included in the environmental control information, and other forms of temperature information and / or humidity information exist, which should also be within the protection scope of the present application.

[0090] In addition, when the reflector 110 is in a vacuum environment, the reflector 110 is arranged in a vacuum chamber. At this time, the environmental information may also include the vacuum degree in the vacuum chamber, and the environmental control device 1210 may also include a module for measuring and controlling the vacuum degree, for example, a vacuum pump. Accordingly, the environmental control information mainly regulates the vacuum degree in the vacuum chamber. For example, it is generally required that the pressure in the vacuum chamber is less than or equal to 10- 2 Pa. In order for the surface shape detection device to detect the surface shape of the reflector 110, a porthole with a size larger than that of the reflector 110 needs to be provided on the cavity wall of the vacuum cavity, and the porthole is used to transmit the detection light from the surface shape detection device. It should be understood that when all devices in the system 1200 for adjusting the light beam can be placed in a vacuum environment, the reflector 110 does not need to be placed in the vacuum cavity.

[0091] Specifically, Fig.13 Schematic diagrams showing two positional relationships between a porthole and a surface shape detection device provided in an embodiment of the present application are shown. Fig.13In (a), the porthole 1310 provided on the wall of the vacuum chamber 1300 is located parallel to the surface detection standard mirror 1320 of the surface detection device. Fig.13 In (b), the position of the porthole 1310 has a certain deflection angle relative to the surface detection standard mirror 1320 of the surface detection device, which can increase the measurement range. Fig.13 When the surface detection standard mirror 1320 of the surface detection device is placed in (b), the system also includes a plane reflection standard mirror 1330 for reflecting the detection light. Exemplarily, the deflection angle can be set to 45° so that the maximum detection aperture is optimized. It should also be noted that the present application requires the determination of the porthole material according to the detection light used by the surface detection device 120. Exemplarily, when the detection light used by the surface detection device 120 is 632.8nm visible light, the porthole material can be quartz, sapphire or other materials with high transmittance to 632.8nm light. In order to further reduce the loss of detection light by the porthole material, a dielectric film can be coated on both sides of the porthole so that the single-sided residual reflectivity is less than or equal to 1% for light with a wavelength of 632.8nm.

[0092] In a second possible implementation, the system 1200 includes a reflector 110, a surface shape detection device 120, a calculation and analysis device 130, a compensation light generating device 140, and a temperature detection device 1220. The temperature detection device 1220 is used to obtain the temperature distribution information on the surface of the reflector 110, and send the temperature distribution information to the calculation and analysis device 130, so that when the calculation and analysis device 130 generates indication information (including the above-mentioned first indication information and second indication information, etc.), it is not only based on the power information, position information of the compensation light and the surface shape information of the reflector 110, but also further considers the temperature distribution information on the surface of the reflector 110, so as to determine more reliable indication information, thereby achieving the purpose of improving system performance. The description of the reflector 110, the surface shape detection device 120, the calculation and analysis device 130 and the compensation light generating device 140 can refer to the above-mentioned Figure 1 The relevant instructions in will not be repeated here.

[0093] Optionally, the temperature detection device 1220 is a high-precision infrared thermal imager or a thermocouple-type temperature measuring device, which is not limited in this application.

[0094] In a third achievable manner, the system 1200 includes a reflector 110, a surface shape detection device 120, a calculation and analysis device 130, a compensation light generating device 140, and a reflector heat sink 1230. The reflector heat sink 1230 is directly or indirectly connected to the reflector 110. The reflector heat sink 1230 is used to receive temperature control information from the calculation and analysis device 130, and control the temperature of the reflector 110 according to the control information. It should be noted that the present application scheme does not limit the implementation form of the reflector heat sink 1230, and it can be implemented by using a contact heat sink, for example, using heat sinks, fans and other heat dissipation devices to increase the heat dissipation area and increase the air flow rate, thereby increasing the heat dissipation rate. Alternatively, a liquid cooling system is used to achieve heat dissipation by transferring heat to water and then dissipating it through a radiator. Exemplarily, when the reflector heat sink 1230 is a contact heat sink, the temperature control information may include parameters such as refrigerant temperature and flow rate, so that the reflector heat sink 1230 controls the refrigerant temperature, flow rate and other parameters according to the control information. It should be understood that the description of the reflector 110, the surface shape detection device 120, the calculation and analysis device 130 and the compensation light generating device 140 can refer to the above Figure 1 The relevant instructions in will not be repeated here.

[0095] It should be understood that the above Fig.12 The three light beam adjusting systems 1200 shown are merely examples and not limitations. The three light beam adjusting systems may be implemented independently or in combination with each other. For example, at least two of an environmental control device 1210, a temperature detection device 1220 and a reflector heat dissipation device 1230 may be provided simultaneously in the light beam adjusting system 1200.

[0096] Based on the above embodiments, the embodiments of the present application further provide a computer-readable storage medium. The storage medium stores a software program, which, when read and executed by one or more processors, can implement the operations performed by the computing and analysis device in any one or more of the above embodiments. The computer-readable storage medium may include: a USB flash drive, a mobile hard disk, a read-only memory, a random access memory, a magnetic disk, or an optical disk, etc., various media that can store program codes.

[0097] Based on the above embodiments, the embodiments of the present application further provide a chip. The chip includes a processor for implementing the functions involved in any one or more of the above embodiments, such as obtaining or processing the indication information or control information involved in the above embodiments. Optionally, the chip also includes a memory, which is used for the necessary program instructions and data executed by the processor. The chip can be composed of a chip, or it can include a chip and other discrete devices.

[0098] Obviously, those skilled in the art can make various changes and modifications to the embodiments of the present application without departing from the scope of the embodiments of the present application. Thus, if these modifications and variations of the embodiments of the present application fall within the scope of the claims of the present application and their equivalents, the present application is also intended to include these modifications and variations.

[0099] It should be understood that the processor mentioned in the embodiments of the present application may be a central processing unit (CPU), or other general-purpose processors, digital signal processors (DSP), application specific integrated circuits (ASIC), field programmable gate arrays (FPGA) or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. A general-purpose processor may be a microprocessor or the processor may also be any conventional processor, etc.

[0100] It should also be understood that the memory mentioned in the embodiments of the present application may be a volatile memory and / or a non-volatile memory. Among them, the non-volatile memory may be a read-only memory (ROM), a programmable read-only memory (PROM), an erasable programmable read-only memory (EPROM), an electrically erasable programmable read-only memory (EEPROM) or a flash memory. The volatile memory may be a random access memory (RAM). For example, RAM may be used as an external cache. As an example and not limitation, RAM may include the following multiple forms: static random access memory (SRAM), dynamic random access memory (DRAM), synchronous dynamic random access memory (SDRAM), double data rate synchronous dynamic random access memory (DDR SDRAM), enhanced synchronous dynamic random access memory (ESDRAM), synchronous connection dynamic random access memory (SLDRAM) and direct rambus RAM (DR RAM). It should be noted that when the processor is a general-purpose processor, DSP, ASIC, FPGA or other programmable logic device, discrete gate or transistor logic device, or discrete hardware component, the memory can be integrated into the processor.

[0101] Those skilled in the art will appreciate that the units and steps of the various examples described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Professional and technical personnel may use different methods to implement the described functions for each specific application; such implementation should not be considered to exceed the scope of protection of this application.

[0102] In the several embodiments provided in the present application, it should be understood that the disclosed system can be implemented in other ways. For example, the device embodiments described above are only schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. In addition, the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0103] In the above embodiments, it can be implemented in whole or in part by software, hardware, firmware or any combination thereof. When implemented using software, it can be implemented in whole or in part in the form of a computer program product. The computer program product includes one or more computer instructions. When the computer program instructions are loaded and executed on a computer, the process or function described in the embodiment of the present application is generated in whole or in part. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable devices. For example, the computer can be a personal computer, a server, or a network device, etc. The computer instructions can be stored in a computer-readable storage medium, or transmitted from one computer-readable storage medium to another computer-readable storage medium, for example, the computer instructions can be transmitted from a website site, computer, server or data center by wired (e.g., coaxial cable, optical fiber, digital subscriber line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.) mode to another website site, computer, server or data center. The computer-readable storage medium can be any available medium that a computer can access or a data storage device such as a server or data center that contains one or more available media integrations. The available medium may be a magnetic medium (e.g., a floppy disk, a hard disk, a magnetic tape), an optical medium (e.g., a DVD), or a semiconductor medium (e.g., a solid state disk (SSD)). For example, the aforementioned available medium may include, but is not limited to, various media that can store program codes, such as a USB flash drive, a mobile hard disk, a ROM, a RAM, a magnetic disk, or an optical disk.

[0104] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A system for adjusting a light beam, It is characterized in that include: Reflector, surface shape detection device, calculation and analysis device and compensation light generating device, wherein: The reflector is used to receive incident light from the first light source and emit reflected light; The surface shape detection device is used to obtain information about the initial surface shape of the reflector after the incident light is incident; The calculation and analysis device is used to generate first indication information according to the information of the initial surface shape, and the first indication information is used to instruct the compensation light generating device to emit first compensation light to the reflector; The compensation light generating device is used to emit the first compensation light to the reflector according to the first indication information, and the first compensation light is used to change the initial surface shape of the reflector into a first surface shape.

2. The system according to claim 1, It is characterized in that The compensation light generating device is further used to feed back power information and position information of the first compensation light to the calculation and analysis device, wherein the power information is the power size and power distribution of the first compensation light, and the position information is the distance the first compensation light is transmitted to the surface of the reflector; The surface shape detection device is further used to obtain information about the first surface shape; The calculation and analysis device is further used to generate second indication information according to the power information, the position information and the information of the first surface shape, wherein the second indication information is used to instruct the compensation light generating device to emit second compensation light to the reflector; The compensation light generating device is further used to emit second compensation light to the reflector according to the second indication information, and the second compensation light is used to change the first surface shape into a second surface shape.

3. The system according to claim 1 or 2, It is characterized in that The first compensation light is used to change the initial surface shape of the reflector into the first surface shape, including: the first compensation light is used together with the incident light to homogenize the optical thermal field on the surface of the reflector, or the compensation light is used to heat a local area of ​​the reflector to cause thermal deformation of the local area of ​​the reflector.

4. The system according to any one of claims 1 to 3, It is characterized in that The information of the initial surface shape is at least one of a peak-to-valley PV value of the initial surface shape, a root mean square RMS of the initial surface shape, and a surface slope of the initial surface shape; The information of the first surface shape is at least one of a peak-to-valley PV value of the first surface shape, a root mean square RMS of the first surface shape, and a surface slope of the first surface shape.

5. The system according to any one of claims 1 to 4, It is characterized in that The system further comprises: an environmental control device, wherein: The environment control device is used to obtain the environment information of the reflector and change the environment of the reflector.

6. The system according to claim 3, It is characterized in that The computing and analyzing device generates environmental control information according to the environmental information, the environmental control information indicates to change the environment where the reflector is located, and the environmental control device changes the environment where the reflector is located according to the environmental control information.

7. The system according to claim 5 or 6, It is characterized in that The environmental information is at least one of the temperature, humidity and vacuum degree of the reflector.

8. A system according to any one of claims 5 to 7, It is characterized in that The calculation and analysis device is specifically used to generate the second indication information according to the power information, the position information, the first surface shape information and the environmental information.

9. The system according to any one of claims 5 to 8, It is characterized in that The system further comprises: a temperature detection device, wherein: The temperature detection device is used to obtain the temperature distribution information of the surface of the reflector; The calculation and analysis device is specifically used to generate the second indication information according to the power information, the position information, the first surface shape information, the environmental information and the temperature distribution information.

10. The system according to any one of claims 1 to 4, It is characterized in that The system further comprises: a temperature detection device, wherein: The temperature detection device is used to obtain the temperature distribution information of the surface of the reflector; The calculation and analysis device is specifically used to generate the second indication information according to the power information, the position information, the first surface shape information and the temperature distribution information.

11. The system according to any one of claims 1 to 7, It is characterized in that The compensation light generating device comprises: a second light source, a light splitting device, a light source generating device and a power measuring device, wherein: The second light source is used to generate a first light beam; The light splitting device is used to split the first light beam into a first light portion and a second light portion, and output the first light portion to the light source generating device, and output the second light portion to the power measuring device; The light source generating device generates the first compensation light based on the first part of light; The power measurement device obtains the power information based on the second portion of light.

12. The system according to claim 11, It is characterized in that The compensation light generating device further includes: a beam expanding and contracting device, which is located between the second light source and the light splitting device and is used to change the spot diameter of the first light beam.

13. The system according to claim 11 or 12, It is characterized in that The compensation light generating device further comprises: a distance measuring device, and the distance measuring device is used to obtain the position information.

14. The system according to any one of claims 1 to 13, It is characterized in that When the reflector is in a vacuum environment, the system further comprises a vacuum chamber, wherein the vacuum chamber comprises a porthole, The porthole is used to transmit the detection light from the surface detection device; The reflector is further used to reflect the detection light to the surface shape detection device through the porthole; The surface shape detection device is specifically used to obtain the initial surface shape information through the detection light reflected by the reflector.

15. The system according to any one of claims 1 to 14, It is characterized in that The system further comprises: a shaping module, which is located on the optical path from the compensation light generating device to the reflector and is used for shaping the first compensation light.

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