Objective lens, objective lens system, photolithography machine, and design method of voltage stabilizing structure for objective lens

Abstract

The present application provides an objective lens, an objective lens system, a photolithography machine, and a design method of a voltage-stabilizing structure for an objective lens, and belongs to the technical field of photolithography machines. The present application can effectively convert a transient pressure drop into a steady-state pressure drop by arranging a voltage-stabilizing tube section at the gas outlet of the objective lens body. As a result, the gas pressure fluctuation inside the objective lens will be greatly reduced, thereby reducing the refractive index change caused by the pressure fluctuation, improving the stability of the optical performance, and due to the stability of the gas pressure, the change of the refractive index will also be effectively controlled.

Description

Technical Field

[0001] The present application relates to the technical field of photolithography machines, and in particular to a design method of an objective lens, an objective lens system, a photolithography machine, and a voltage stabilizing structure for the objective lens. Background Art

[0002] The purpose of filling the objective with process gas is to ensure the control of internal contamination and thermal effects. The random fluctuation of refractive index caused by gas flow will lead to random changes in optical performance, which will seriously limit the performance of different optical systems and even determine the technical feasibility of the optical system.

[0003] At present, in order to effectively control the pressure fluctuation of the gas inside the objective lens, the main control method adopted by the existing technology is: adding a gas source pressure control unit between the factory gas source end and the front end of the objective lens, so that the gas source can flow at a stable pressure after entering the objective lens, and usually the MPa level of the factory gas source pressure can be stabilized to the Kpa level through the pressure control unit.

[0004] Although the pressure control unit can stabilize the pressure to kPa level fluctuations, if the objective lens cavity is poorly designed, it will cause excessive local pressure fluctuations inside the objective lens. According to the existing Edlen formula, a pressure fluctuation of ±40pa can cause a wavelength (refractive index related formula) calculation error of ±0.11ppm, and this part of the error cannot be controlled by sensor monitoring. Summary of the invention

[0005] The embodiment of the present application provides an objective lens, an objective lens system, a photolithography machine, and a design method for a voltage-stabilizing structure for an objective lens. By setting a voltage-stabilizing tube section at the gas outlet of the objective lens body, the transient pressure drop can be effectively converted into a steady-state pressure drop through the design of the voltage-stabilizing tube section. This means that the gas pressure fluctuation inside the objective lens will be greatly reduced, thereby reducing the refractive index change caused by the pressure fluctuation, improving the stability of the optical performance, and due to the stability of the gas pressure, the change of the refractive index will also be effectively controlled. This is crucial for improving the imaging quality and technical feasibility of the optical system, especially in high-precision optical systems such as microscopes and telescopes. In the embodiment of the present application, the voltage-stabilizing tube section is coaxially arranged into multiple circles according to the same circle inner diameter, so that the self-compensation characteristics of the air pipe can be utilized, that is, under a certain pressure difference, the flow rate flowing through the capillary is stable. This characteristic helps to maintain a stable gas flow inside the objective lens, thereby achieving the voltage stabilization of the objective lens cavity. Specifically, the multi-circle coaxial design of the voltage-stabilizing tube section helps to evenly distribute the pressure loss, so that the pressure loss of each circle is consistent, so as to more regularly obtain the stable value of the pressure fluctuation. This design helps to optimize the index of pressure control and achieve more precise pressure regulation. That is, in the embodiment of the present application, by providing a voltage stabilizing structure at the air outlet of the objective lens body, the voltage stabilizing function can be achieved without increasing the volume of the objective lens body, thereby maintaining the compactness and portability of the objective lens. Specifically:

[0006] A first aspect of an embodiment of the present application provides an objective lens, comprising:

[0007] An objective lens body, wherein an objective lens cavity for air flow is formed inside the objective lens body, and an air inlet and an air outlet connected to the objective lens cavity are formed on the surface, wherein the diameter of the air outlet is smaller than the inner diameter of the objective lens cavity;

[0008] A pressure stabilizing structure, the pressure stabilizing structure comprises an air pipe connected to the air outlet, and at least a portion of the length L of the air pipe is designed as a pressure stabilizing pipe section;

[0009] The pressure-stabilizing pipe section is coaxially arranged into multiple circles with the same inner diameter, so that when air is taken in through the air inlet and discharged through the air outlet, the pressure of the gas discharged into the pressure-stabilizing pipe section through the air outlet can achieve a steady-state pressure drop.

[0010] In the above technical solution, the gas discharged into the pressure-stabilizing pipe section has losses along the way;

[0011] The amount of loss along the way when the gas flows through the pressure-stabilizing tube section must satisfy the following requirement: under this amount of loss along the way, the pressure fluctuation value in the objective lens cavity can be within a preset fluctuation value range.

[0012] In the above technical solution, the preset fluctuation value range is within ±20pa.

[0013] In the above technical solution, the loss along the way is calculated according to the following formula: Where:

[0014] α--correction coefficient;

[0015] λ--Drag coefficient along the way;

[0016] L--total length of trachea;

[0017] d--tracheal diameter;

[0018] ρ--gas density;

[0019] v--the velocity of gas in the trachea;

[0020] h f --Amount of loss along the way.

[0021] In the above technical solution, the voltage stabilizing structure further includes a three-way valve, which includes an air inlet valve, a first air outlet valve, and a second air outlet valve. The air inlet valve is connected to the air inlet of the objective body, and the first air outlet valve is connected to the air inlet side of the air pipe. The air inlet valve, the first air outlet valve, and the air pipe form a first air path, and the air inlet valve and the second air outlet valve form a second air path.

[0022] The objective lens has a first inflation mode in a working state and a second inflation mode in a non-working state, wherein if the objective lens is in the first inflation mode, the first air path is opened while the second air path is closed, and if the objective lens is in the second inflation mode, the first air path is closed while the second air path is opened.

[0023] In the above technical solution, the trachea is a capillary tube.

[0024] The second aspect of the embodiment of the present application provides an objective lens system, which includes an air control device and the objective lens provided by the first aspect of the embodiment of the present application, the air inlet side and the air outlet side of the air control device correspond to the air outlet and the air inlet connected to the objective lens body, so as to form a circulating air path with the objective lens cavity of the objective lens body.

[0025] In the above technical solution, the circulating gas path includes an air inlet section formed between the air inlet of the objective lens body and the air outlet side of the air control device, and an air outlet section formed between the air outlet of the objective lens body and the air inlet side of the air control device;

[0026] A flow control device is provided on the air inlet section, and the flow control device is used to control the air inlet parameters of the objective lens body. A pressure stabilizing structure is provided on the air outlet section, and the pressure stabilizing structure is used to achieve a steady-state pressure drop of the gas discharged from the objective lens cavity.

[0027] The air intake parameters include the air intake volume and / or air intake pressure and / or air intake time of the air intake port of the objective lens body.

[0028] In the above technical solution, the air outlet section includes a first air outlet section and a second air outlet section which are arranged in parallel between the air outlet of the objective lens body and the air inlet side of the air control device, the first air outlet section is provided with a three-way valve and a capillary, the air inlet side of the capillary is connected to the first air outlet valve of the three-way valve, and the air outlet side is connected to the air inlet side of the air control device, the air inlet side of the second air outlet section is connected to the second air outlet valve of the three-way valve, and the air outlet side is connected to the air inlet side of the air control device;

[0029] The objective system also includes:

[0030] A controller is used to control the air intake parameters of the air inlet of the objective lens body and / or the on-off of the first air outlet section and / or the on-off of the second air outlet section.

[0031] The third aspect of the embodiments of the present application also provides a lithography machine, which includes the objective lens structure provided in the first aspect of the embodiments of the present application or the objective lens system provided in the second aspect of the embodiments of the present application.

[0032] A fourth aspect of the present application also provides a method for designing a voltage stabilizing structure for an objective lens.

[0033] The objective lens comprises an objective lens body, wherein an objective lens cavity for air flow is formed inside the objective lens body, and an air inlet and an air outlet connected to the objective lens cavity are formed on the surface, wherein the diameter of the air outlet is smaller than the inner diameter of the objective lens cavity, and the pressure stabilizing structure comprises an air pipe connected to the air outlet, and at least a part of the length L of the air pipe is designed as a pressure stabilizing pipe section, and the pressure stabilizing pipe section is coaxially arranged into multiple circles according to the same circle inner diameter;

[0034] The design methods of voltage stabilization structure include:

[0035] Determine the design parameters of the voltage-stabilizing tube section according to the operating parameters and / or size parameters of the objective lens body;

[0036] The operating parameters of the objective body include the intake pressure of the air inlet and / or the outlet pressure of the air outlet, the size parameters of the objective body include the diameter of the air inlet and / or the diameter of the air outlet and / or the inner diameter of the objective cavity and / or the cavity volume of the objective cavity, and the design parameters of the voltage-stabilizing tube segment include the diameter of the voltage-stabilizing tube segment and / or the length of the voltage-stabilizing tube segment and / or the number of coaxial turns of the voltage-stabilizing tube segment and / or the inner diameter of the turns of the voltage-stabilizing tube segment.

[0037] In the above technical solution, the design parameters of the voltage-stabilizing tube section are determined according to the operating parameters and / or size parameters of the objective lens body, including:

[0038] Determine the aspect ratio of the voltage stabilizing tube section and the number of coaxial turns of the voltage stabilizing tube section according to the operating parameters and / or size parameters of the objective lens body;

[0039] The aspect ratio of the voltage-stabilizing tube section is the ratio of the length L of the voltage-stabilizing tube section to the tube diameter d.

[0040] In the above technical solution, the design method also includes:

[0041] The loss along the way of the gas when it flows through the stabilizing pipe section is determined according to the aspect ratio of the stabilizing pipe section and the number of coaxial turns of the stabilizing pipe section;

[0042] The loss along the way is calculated according to the following formula: Where:

[0043] α--correction coefficient;

[0044] λ--Drag coefficient along the way;

[0045] L--total length of trachea;

[0046] d--tracheal diameter;

[0047] ρ--gas density;

[0048] v--the velocity of gas in the trachea;

[0049] h f --Amount of loss along the way.

[0050] In the above technical solution, the air pipe is a capillary tube with one end connected to a three-way valve, and the capillary tube is connected to the air outlet of the objective lens body through the three-way valve.

[0051] After adopting the above technical solution, the present invention has the following beneficial effects compared with the prior art:

[0052] In the embodiment of the present application, by arranging a voltage-stabilizing tube section at the gas outlet of the objective lens body, the transient pressure drop can be effectively converted into a steady-state pressure drop through the design of the voltage-stabilizing tube section. This means that the gas pressure fluctuation inside the objective lens will be greatly reduced, thereby reducing the refractive index change caused by pressure fluctuations, improving the stability of optical performance, and due to the stability of gas pressure, the change of refractive index will also be effectively controlled. This is crucial for improving the imaging quality and technical feasibility of optical systems, especially in high-precision optical systems, such as microscopes, telescopes, etc. In the embodiment of the present application, by coaxially arranging the voltage-stabilizing tube section into multiple circles according to the same circle inner diameter, the self-compensation characteristics of the trachea can be utilized, that is, under a certain pressure difference, the flow rate flowing through the capillary is stable. This characteristic helps to maintain a stable gas flow inside the objective lens, thereby achieving the pressure stabilization of the objective lens cavity. Specifically, the multi-circle coaxial design of the voltage-stabilizing tube section helps to evenly distribute the pressure loss, so that the pressure loss of each circle is consistent, thereby more regularly obtaining the stable value of the pressure fluctuation. This design helps to optimize the index of pressure control and achieve more refined pressure regulation. That is, in the embodiment of the present application, by providing a voltage stabilizing structure at the air outlet of the objective lens body, the voltage stabilizing effect can be achieved without increasing the volume of the objective lens body, thereby maintaining the compactness and portability of the objective lens. BRIEF DESCRIPTION OF THE DRAWINGS

[0053] Figure 1 This is a schematic diagram of a voltage stabilizing structure in an embodiment of the present application;

[0054] Figure 2 Schematic diagram of the connection structure of the objective lens system in the embodiment of the present application.

[0055] in:

[0056] 100-capillary;

[0057] 200-three-way valve;

[0058] 300-gas control device;

[0059] 400-Flow control device;

[0060] 500-objective lens body;

[0061] 600-controller;

[0062] 700-intake section;

[0063] 800 - air outlet section; 801 - first air outlet section; 802 - second air outlet section. DETAILED DESCRIPTION

[0064] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0065] Throughout the specification and claims, the following terms have at least the meanings explicitly associated herein, unless the context dictates otherwise. The meanings identified below do not necessarily limit the terms, but merely provide illustrative examples of the terms.

[0066] In the description of the present invention, the phrase "in one embodiment" does not necessarily refer to the same embodiment, although it may refer to the same embodiment. Similarly, the phrase "in some embodiments" as used herein, when used multiple times, does not necessarily refer to the same embodiment, although it may refer to the same embodiment. As used herein, the term "or" is an inclusive "or" operator and is equivalent to the term "and / or", unless the context clearly dictates otherwise. The term "based on" is not exclusive and allows for additional factors not described, unless the context clearly dictates otherwise. The word "exemplary" means "used as an example, instance or illustration" in this article. Any embodiment described as "exemplary" herein is not necessarily interpreted as being superior or superior to other embodiments. The scope of the present invention is limited only by the scope of the appended claims, and any examples set forth in this specification are not intended to be limiting, but only to set forth some of the many possible embodiments of the claimed invention. The various embodiments provided by the present invention should not be interpreted as limiting the scope of protection of the present invention.

[0067] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0068] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0069] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0070] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0071] Background

[0072] The purpose of filling the objective with process gas is to ensure the control of internal contamination and thermal effects. The random fluctuation of refractive index caused by gas flow will lead to random changes in optical performance, which will seriously limit the performance of different optical systems and even determine the technical feasibility of the optical system.

[0073] At present, in order to effectively control the pressure fluctuation of the gas inside the objective lens, the main control method adopted by the existing technology is: adding a gas source pressure control unit between the factory gas source end and the front end of the objective lens, so that the gas source can flow at a stable pressure after entering the objective lens, and usually the MPa level of the factory gas source pressure can be stabilized to the Kpa level through the pressure control unit.

[0074] Although the pressure control unit can stabilize the pressure to kPa level fluctuations, if the objective lens cavity is poorly designed, it will cause excessive local pressure fluctuations inside the objective lens. According to the existing Edlen formula, a pressure fluctuation of ±40pa can cause a wavelength (refractive index related formula) calculation error of ±0.11ppm, and this part of the error cannot be controlled by sensor monitoring.

[0075] Based on this, Figure 1-Figure 2 As shown, the first aspect of the embodiment of the present application provides an objective lens, comprising:

[0076] An objective lens body 500, wherein an objective lens cavity for air flow is formed inside the objective lens body 500, and an air inlet and an air outlet connected to the objective lens cavity are formed on the surface, wherein the diameter of the air outlet is smaller than the inner diameter of the objective lens cavity;

[0077] A pressure stabilizing structure, the pressure stabilizing structure comprises an air pipe connected to the air outlet, and at least a portion of the length L of the air pipe is designed as a pressure stabilizing pipe section;

[0078] The voltage-stabilizing pipe section is coaxially arranged into multiple circles with the same inner diameter, so that when gas is taken in through the gas inlet and discharged through the gas outlet, the gas pressure discharged into the voltage-stabilizing pipe section through the gas outlet can achieve a steady-state pressure drop. It is worth noting that the above-mentioned gas is preferably a process gas, for example, dry and pure inert gas such as helium and argon. Preferably, the air pipes are all coaxially arranged into multiple circles with the same inner diameter, that is, the total length of the air pipes is the total length of the voltage-stabilizing pipe section.

[0079] In the embodiment of the present application, by arranging a voltage-stabilizing tube section at the gas outlet of the objective lens body 500, the transient pressure drop can be effectively converted into a steady-state pressure drop through the design of the voltage-stabilizing tube section. This means that the gas pressure fluctuation inside the objective lens will be greatly reduced, thereby reducing the refractive index change caused by pressure fluctuations, improving the stability of optical performance, and due to the stability of gas pressure, the change of refractive index will also be effectively controlled. This is crucial for improving the imaging quality and technical feasibility of the optical system, especially in high-precision optical systems such as microscopes, telescopes, etc. In the embodiment of the present application, by coaxially arranging the voltage-stabilizing tube section into multiple circles according to the same circle inner diameter, the self-compensation characteristics of the trachea can be utilized, that is, under a certain pressure difference, the flow rate flowing through the capillary 100 is stable. This characteristic helps to maintain a stable gas flow inside the objective lens, thereby achieving the pressure stabilization of the objective lens cavity. Specifically, the multi-circle coaxial design of the voltage-stabilizing tube section helps to evenly distribute the pressure loss, so that the pressure loss of each circle is consistent, thereby more regularly obtaining the stable value of the pressure fluctuation. This design helps to optimize the index of pressure control and achieve more refined pressure regulation. That is, in the embodiment of the present application, by providing a voltage stabilizing structure at the air outlet of the objective lens body 500, the voltage stabilizing function can be achieved without increasing the volume of the objective lens body 500, thereby maintaining the compactness and portability of the objective lens.

[0080] It is worth noting that the reason why the voltage stabilizing structure is placed at the gas outlet rather than the gas inlet in the embodiment of the present application is to ensure that there is a certain gas circulation speed in the objective lens cavity when the process gas is quickly filled and updated to clean the inside of the objective lens.

[0081] Furthermore, in some possible implementations, the gas discharged into the pressure stabilizing pipe section has losses along the way;

[0082] The amount of loss along the way when the gas flows through the pressure-stabilizing tube section must satisfy the following requirement: under this amount of loss along the way, the pressure fluctuation value in the objective lens cavity can be within a preset fluctuation value range.

[0083] In the embodiment of the present application, by setting the amount of loss along the way of gas in the voltage-stabilizing tube section, the pressure loss during the gas flow process can be effectively controlled. This control helps to ensure that the pressure fluctuation value is within a preset range when the gas flows through the voltage-stabilizing tube section, thereby avoiding unstable optical performance caused by pressure fluctuations. The design of the loss along the way makes the gas flow in the voltage-stabilizing tube section more stable, reducing sudden pressure changes in the flow. This optimization helps to achieve a more uniform gas distribution, thereby improving the gas flow stability inside the objective lens. By setting a preset fluctuation value range, the user can flexibly adjust the pressure fluctuation in the objective lens cavity according to specific application requirements. This flexibility enables the objective lens to adapt to different working environments and conditions and meet the needs of various optical systems. By controlling the relationship between the amount of loss along the way and the pressure fluctuation, the refractive index fluctuation caused by pressure changes can be effectively reduced, thereby improving the imaging quality and stability of the optical system. This is particularly important for high-precision optical applications (such as microscopes, telescopes, etc.).

[0084] Furthermore, in some possible implementations, the preset fluctuation value range is within ±20 Pa.

[0085] In the embodiment of the present application, by setting the preset fluctuation value range to within ±20Pa, it is shown that the objective lens structure can achieve very precise pressure control. This accuracy is crucial for optical systems that require high stability because it can minimize the refractive index changes caused by pressure fluctuations. It is worth noting that in high-precision imaging systems, even small pressure fluctuations may cause image quality to deteriorate. By controlling the pressure fluctuations to within ±20Pa, the clarity and stability of the imaging can be significantly improved, thereby improving the overall imaging quality. At the same time, precise pressure control can reduce equipment wear caused by pressure fluctuations, thereby extending the service life of the equipment. This is particularly important for equipment that requires long-term stable operation.

[0086] Furthermore, in some possible implementations, the loss along the way is calculated according to the following formula: Where:

[0087] α--correction coefficient;

[0088] λ--Drag coefficient along the way;

[0089] L--total length of trachea;

[0090] d--tracheal diameter;

[0091] ρ--gas density;

[0092] v--the velocity of gas in the trachea;

[0093] h f --Amount of loss along the way.

[0094] In the embodiment of the present application, by using the above formula to calculate the amount of loss along the way when the gas flows through the voltage-stabilizing tube section, the pressure loss of the gas in the voltage-stabilizing tube section can be accurately controlled. This precise control helps to ensure that the pressure fluctuation in the objective lens cavity is within a preset range. The formula provides a method to optimize the design parameters (length L and tube diameter d) of the voltage-stabilizing tube section to achieve the required amount of loss along the way. This allows the user to adjust these parameters according to specific application requirements.

[0095] That is, by adjusting the structure of the voltage-stabilizing tube section, the objective lens can adapt to different working conditions and environments, improving the adaptability and flexibility of the objective lens system. Accurate along-the-path loss control helps reduce the refractive index changes caused by pressure fluctuations, thereby improving the stability of the optical system and imaging quality.

[0096] Further, in some possible implementations, the voltage stabilizing structure further includes a three-way valve 200, the three-way valve 200 includes an air inlet valve, a first air outlet valve, and a second air outlet valve, the air inlet valve is connected to the air inlet of the objective lens body 500, the first air outlet valve is connected to the air inlet side of the air pipe, the air inlet valve, the first air outlet valve and the air pipe form a first air path, and the air inlet valve and the second air outlet valve form a second air path;

[0097] It is worth noting that the objective lens has a first inflation mode in a working state and a second inflation mode in a non-working state, wherein if the objective lens is in the first inflation mode, the first air path is opened while the second air path is closed, and if the objective lens is in the second inflation mode, the first air path is closed while the second air path is opened.

[0098] In the embodiment of the present application, the three-way valve 200 is designed so that the objective lens can switch different gas paths according to the working state. This design provides flexible gas flow control, allowing the objective lens to maintain the required pressure and flow conditions in different working modes.

[0099] Specifically, in the first inflation mode, the objective lens is in working state, the first gas path is opened to ensure gas flow and pressure stability, and the second gas path is closed to prevent gas leakage or unnecessary pressure changes. This helps to optimize the performance of the objective lens in working state. In the second inflation mode, the objective lens is in non-working state, at this time the first gas path is closed to save energy, and the second gas path is opened to allow gas to be discharged or maintenance operations to be performed. This design helps to reduce energy consumption and improve the environmental performance of the objective lens. It is worth noting that the second inflation mode may allow gas to be discharged through the second gas path, which helps to clean and maintain the objective lens. For example, this mode can be used to remove pollutants or moisture inside the objective lens.

[0100] That is, in the embodiment of the present application, the design of the three-way valve 200 can realize flexible gas path control of the objective lens in different working states, optimize working performance, save energy, and improve the reliability and adaptability of the objective lens. This design provides the objective lens with higher operational flexibility and environmental adaptability.

[0101] Further, in some possible implementations, the trachea is a capillary tube 100. That is, in the embodiments of the present application, the trachea is preferably configured as a capillary tube 100.

[0102] It is worth noting that the capillary 100 has a very small inner diameter, which makes the pressure change when the gas flows through it very sensitive. This sensitivity helps to achieve more accurate pressure control, thereby reducing the pressure fluctuation inside the objective lens. And the self-compensation property of the capillary 100 means that under a certain pressure difference, the flow rate flowing through the capillary 100 is stable. This helps to maintain a stable gas flow inside the objective lens and reduce the pressure changes caused by flow fluctuations. In addition, the loss along the capillary 100 can be accurately controlled by its length and diameter. This allows the designer to adjust the loss along the way as needed to achieve the desired pressure fluctuation control. At the same time, the size of the capillary 100 is small, which can make the entire voltage stabilization structure more compact.

[0103] That is, in the embodiment of the present application, by preferably setting the air tube as the capillary 100, a pressure and flow control method with high sensitivity and stability can be provided, which helps to improve the optical performance of the objective lens and the overall stability of the system.

[0104] Furthermore, the second aspect of the embodiment of the present application also provides an objective lens system, including an air control device 300 and the objective lens provided by the first aspect of the embodiment of the present application, wherein the air inlet side and the air outlet side of the air control device 300 correspond to the air outlet and the air inlet connected to the objective lens body 500, so as to form a circulating air path with the objective lens cavity inside the objective lens body 500.

[0105] In the embodiment of the present application, the gas control device 300 and the lens cavity inside the lens body 500 form a circulating gas circuit, so that closed-loop gas control can be achieved. This means that the gas can circulate inside the lens system, thereby reducing the influence of the external environment on the internal pressure and gas composition of the lens. At the same time, the design of the circulating gas circuit helps to maintain a stable gas environment inside the lens, reduce the internal pressure changes caused by external air pressure fluctuations or temperature changes, thereby improving the stability and reliability of the lens system. In addition, the gas control device 300 can accurately control the gas flow and pressure entering the lens, ensuring that the pressure inside the lens is stable at a desired level. This is crucial for maintaining the optical performance of the lens. In addition, through the gas control device 300, it is easier to monitor and maintain the gas environment inside the lens, for example, by monitoring the pressure and composition of the gas through a sensor, ensuring that the lens system is always running in the best state.

[0106] Further, in some possible implementations, the circulating gas path includes an air inlet section 700 formed between the air inlet of the objective lens body 500 and the air outlet side of the air control device 300, and an air outlet section formed between the air outlet of the objective lens body 500 and the air inlet side of the air control device 300;

[0107] The air inlet section 700 is provided with a flow control device 400, which is used to control the air inlet parameters of the objective lens body 500. The air outlet section 800 is provided with a pressure stabilizing structure, which is used to achieve a steady-state pressure drop of the gas discharged from the objective lens cavity.

[0108] The air intake parameters include the air intake volume and / or air intake pressure and / or air intake duration of the air intake port of the objective lens body 500.

[0109] In the embodiment of the present application, by arranging the flow control device 400 in the air intake section 700, the gas flow entering the objective lens body 500 can be accurately controlled. This control helps to maintain the gas environment required inside the objective lens and ensure the stability of the optical performance. Preferably, the flow control device 400 can not only control the air intake amount, but also adjust the air intake pressure and the air intake duration. This flexibility enables the objective lens system to adapt to different working conditions and environments, and improves the adaptability and flexibility of the system. By accurately controlling the air intake parameters, the response speed of the objective lens system to changes in the external environment can be accelerated. For example, when the ambient pressure changes suddenly, the flow control device 400 can quickly adjust the air intake amount to maintain the pressure inside the objective lens stable. In addition, by accurately controlling the air intake amount, unnecessary gas waste can be avoided, thereby improving the energy efficiency of the system. This is particularly important for an objective lens system that needs to run for a long time.

[0110] It is worth noting that the flow control device 400 can also be equipped with sensors and monitoring systems to monitor the intake parameters in real time, which is convenient for monitoring and maintenance of the system. In addition, different applications may have different requirements for the gas environment inside the objective lens. By adjusting the intake parameters, the objective lens system can adapt to different application requirements, such as high humidity environments or occasions requiring specific gas components.

[0111] That is, in the embodiment of the present application, by introducing a flow control device 400 into the circulating gas path, a method for accurately controlling the air intake parameters of the objective body 500 is provided, which helps to improve the stability, reliability and optical performance of the objective system, while saving energy and adapting to different application requirements.

[0112] Further, in some possible implementations, the air outlet section 800 includes a first air outlet section 801 and a second air outlet section 802 which are arranged in parallel between the air outlet of the objective lens body 500 and the air inlet side of the air control device 300, the first air outlet section 801 is provided with a three-way valve 200 and a capillary 100, the air inlet side of the capillary 100 is connected to the first air outlet valve of the three-way valve 200, and the air outlet side is connected to the air inlet side of the air control device 300, the air inlet side of the second air outlet section 802 is connected to the second air outlet valve of the three-way valve 200, and the air outlet side is connected to the air inlet side of the air control device 300;

[0113] The objective system also includes:

[0114] The controller 600 is used to control the air intake parameters of the air inlet of the objective lens body 500 and / or the on-off of the first air outlet section 801 and / or the on-off of the second air outlet section 802.

[0115] In the embodiment of the present application, the gas outlet section 800 is divided into a first gas outlet section 801 and a second gas outlet section 802, so that the system can more accurately control the gas outlet process. This design allows the system to selectively open or close a specific gas outlet path as needed to optimize gas flow and pressure control.

[0116] Specifically, the controller 600 can control the air intake parameters of the air inlet of the objective lens body 500, as well as the on-off of the first air outlet section 801 and the second air outlet section 802. This design provides higher flexibility, allowing the system to adjust the air intake and air outlet strategies according to different working conditions and requirements. For example, when it is necessary to quickly change the gas or to clean and maintain it, a specific air outlet section can be closed to maintain the required gas pressure and composition. For another example, by optimizing the air outlet process, unnecessary gas loss can be reduced, thereby reducing operating costs. By accurately controlling the air intake and air outlet, the system can better maintain a stable gas environment inside the objective lens, reduce the refractive index changes caused by pressure fluctuations, thereby improving the optical performance of the objective lens and the stability of the system. And the controller 600 can realize automated operation, reduce manual intervention, and improve the convenience and accuracy of operation. This is particularly important for objective lens systems that need to run for a long time or frequently switch working modes.

[0117] It is worth noting that the objective lens system needs to operate in different working modes, such as high-resolution imaging, fast scanning or environmental adaptability testing. Through the controller 600, the system can adjust the air inlet and outlet strategies according to different working modes to meet specific performance requirements.

[0118] That is, in the embodiment of the present application, by introducing the controller 600 and refining the design of the air outlet section, a more accurate, flexible and efficient air intake and air outlet control method is provided, which helps to improve the optical performance, stability, reliability and safety of the objective lens system, while reducing the operating cost and improving the convenience of operation.

[0119] Furthermore, the third aspect of the embodiment of the present application also provides a lithography machine, which includes the objective lens structure provided in the first aspect of the embodiment of the present application or the objective lens system provided in the second aspect of the embodiment of the present application.

[0120] That is, the photolithography machine provided in the embodiment of the present application can achieve higher photolithography accuracy by using an objective lens structure or system that accurately controls pressure fluctuations. This is because the pressure stability inside the objective lens is directly related to the focusing accuracy and imaging quality in the photolithography process. The voltage-stabilizing design of the objective lens structure or system reduces the refractive index change caused by pressure fluctuations, thereby improving optical performance, making the photolithography machine more reliable when manufacturing micrometer-level or nanometer-level circuit patterns. At the same time, accurate gas control and pressure stability can reduce the calibration times and maintenance requirements in the photolithography process, thereby improving production efficiency and output. In addition, the circulating gas path of the objective lens system and the accurate flow control device 400 help to maintain a stable gas environment, reduce the performance fluctuations of the system caused by environmental changes, and enhance the stability and reliability of the photolithography machine. The design of the above-mentioned objective lens system allows the photolithography machine to adapt to different working environments, such as temperature changes, humidity changes, etc., to ensure that optimal performance can be maintained under various conditions.

[0121] That is, in the embodiments of the present application, by integrating a precise pressure-controlled objective lens structure or system into a lithography machine, a method is provided to improve lithography accuracy, enhance optical performance, improve production efficiency and equipment reliability, while also meeting the requirements of energy saving and environmental protection.

[0122] Furthermore, a fourth aspect of the embodiments of the present application also provides a method for designing a voltage stabilizing structure for an objective lens;

[0123] The objective lens includes an objective lens body 500, an objective lens cavity for air flow is formed inside the objective lens body 500, an air inlet and an air outlet connected to the objective lens cavity are formed on the surface, wherein the diameter of the air outlet is smaller than the inner diameter of the objective lens cavity, the pressure stabilizing structure includes an air pipe connected to the air outlet, and at least a part of the length L of the air pipe is designed as a pressure stabilizing pipe section, and the pressure stabilizing pipe section is coaxially arranged into multiple circles according to the same circle inner diameter;

[0124] Specifically, the design method of the voltage stabilization structure includes:

[0125] Determine the design parameters of the voltage-stabilizing tube section according to the operating parameters and / or size parameters of the objective lens body 500;

[0126] The operating parameters of the objective lens body 500 include the intake pressure of the air inlet and / or the outlet pressure of the air outlet, the size parameters of the objective lens body 500 include the diameter of the air inlet and / or the diameter of the air outlet and / or the inner diameter of the objective lens cavity and / or the cavity volume of the objective lens, and the design parameters of the voltage-stabilizing tube segment include the diameter of the voltage-stabilizing tube segment and / or the length of the voltage-stabilizing tube segment and / or the number of coaxial turns of the voltage-stabilizing tube segment and / or the inner diameter of the turns of the voltage-stabilizing tube segment.

[0127] In the embodiment of the present application, by determining the design parameters of the voltage stabilizing tube section according to the specific operating parameters and size parameters of the objective lens body 500, the most suitable voltage stabilizing structure can be customized for each objective lens, thereby improving the pertinence and effectiveness of the voltage stabilizing effect. Accurate design parameters can help optimize the gas flow and pressure distribution inside the objective lens, reduce pressure fluctuations, and thus improve the optical performance and overall stability of the objective lens.

[0128] Specifically, by considering the size parameters (such as caliber, cavity inner diameter and cavity volume) and operation parameters (such as inlet and outlet pressure) of the objective lens body 500, the compatibility of the voltage stabilizing structure with the objective lens body 500 can be ensured to avoid conflicts in design. By accurately calculating and designing the diameter, length, number of coaxial turns and inner diameter of the voltage stabilizing tube section, the pressure fluctuation inside the objective lens can be more accurately controlled to meet the needs of high-precision applications. By optimizing the design parameters, the use of materials can be reduced or over-design can be avoided, thereby reducing manufacturing costs. By accurately designing the voltage stabilizing structure, the wear caused by the pressure fluctuation inside the objective lens can be reduced, and the reliability and durability of the system can be improved.

[0129] That is, in the embodiment of the present application, by providing a voltage stabilizing structure design method based on the parameters of the objective lens body 500, it is helpful to achieve a more accurate, efficient and economical objective lens voltage stabilizing structure design, thereby improving the performance and stability of the objective lens.

[0130] Further, in some possible implementations, the design parameters of the voltage regulator tube section are determined according to the operating parameters and / or size parameters of the objective lens body 500, including:

[0131] Determine the aspect ratio of the voltage stabilizing tube section and the number of coaxial turns of the voltage stabilizing tube section according to the operating parameters and / or size parameters of the objective lens body 500;

[0132] The aspect ratio of the voltage-stabilizing tube section is the ratio of the length L of the voltage-stabilizing tube section to the tube diameter d.

[0133] In the embodiment of the present application, by determining the aspect ratio of the voltage-stabilizing tube section, the pressure loss during gas flow can be accurately controlled, thereby achieving more refined pressure regulation. The aspect ratio is a key parameter that affects the loss along the capillary 100, and directly affects the resistance of gas flow. The determination of the number of coaxial turns helps to optimize the stability and uniformity of gas flow. The multi-turn design can provide more losses along the way, which helps to further stabilize pressure fluctuations. By comprehensively considering the aspect ratio and the number of coaxial turns, more design variables are provided, so that the designer can flexibly adjust the design according to the specific needs of the object lens body 500 to achieve the best voltage-stabilizing effect. And determining the aspect ratio and the number of coaxial turns according to the operating parameters and size parameters of different object lens bodies 500 can make the voltage-stabilizing structure better adapt to different working environments and conditions, and improve the adaptability and reliability of the system.

[0134] That is, in the embodiment of the present application, by introducing the aspect ratio of the voltage stabilizing tube section and the determination of the number of coaxial turns in the design method, a more accurate, flexible and efficient method for designing the voltage stabilizing structure of the objective lens is provided, which helps to improve the performance and stability of the objective lens while reducing energy consumption and manufacturing costs.

[0135] Furthermore, in some possible implementations, the design method further includes:

[0136] The loss along the way of the gas when it flows through the stabilizing pipe section is determined according to the aspect ratio of the stabilizing pipe section and the number of coaxial turns of the stabilizing pipe section;

[0137] The loss along the way is calculated according to the following formula: Where:

[0138] α--correction coefficient;

[0139] λ--Drag coefficient along the way;

[0140] L--total length of trachea;

[0141] d--tracheal diameter;

[0142] ρ--gas density;

[0143] v--the velocity of gas in the trachea;

[0144] h f --Amount of loss along the way.

[0145] That is, by adjusting the design of the voltage-stabilizing tube section and the gas velocity, it is possible to adapt to different working conditions and environments, improve the adaptability and flexibility of the objective system, and precise along-the-path loss control helps reduce the refractive index changes caused by pressure fluctuations, thereby improving the stability of the optical system and imaging quality.

[0146] Furthermore, in some possible implementations, the air pipe is a capillary 100 with one end connected to a three-way valve 200 , and the capillary 100 is connected to the air outlet of the objective lens body 500 through the three-way valve 200 .

[0147] That is, through the design of the three-way valve 200, the objective lens can switch different gas paths according to the working state. This design provides flexible gas flow control, allowing the objective lens to maintain the required pressure and flow conditions in different working modes.

[0148] In summary, an objective lens system with an innovative voltage-stabilizing structure and a corresponding design method are provided in the embodiment of the present application. By precisely controlling the gas pressure inside the objective lens, the refractive index change caused by pressure fluctuation can be reduced, and the imaging quality and optical performance of the optical system can be significantly improved. The stable gas pressure environment reduces the fluctuation of system performance and enhances the stability and reliability of the objective lens system under different environmental conditions. Through the design of the voltage-stabilizing tube section, accurate pressure control is achieved, so that the pressure fluctuation inside the objective lens is controlled within a very small range (e.g., ±20pa). The use of a coaxially arranged multi-turn voltage-stabilizing tube section provides a novel and effective way to achieve a steady-state pressure drop and reduce the fluctuation caused by a transient pressure drop. In addition, a design method based on the parameters of the objective lens body 500 is also provided in the embodiment of the present application. The method allows the designer to customize the voltage-stabilizing structure according to specific operation and size parameters, thereby improving the flexibility and adaptability of the design. By precisely controlling the gas flow and pressure, energy consumption and gas waste are reduced, which helps to achieve a more environmentally friendly optical system. Accurate pressure control and a stable gas environment reduce the number of calibrations and maintenance requirements during the photolithography process, thereby improving production efficiency.

[0149] Take the trachea, preferably the capillary tube 100, as an example:

[0150] For example, the length calculation of the capillary 100 in the straight state (the formula for the pressure drop along the way) is:

[0151] Where:

[0152] α--correction coefficient (value 2);

[0153] λ--Drag coefficient along the way (value is 0.032);

[0154] L--capillary 100 length (m);

[0155] d--capillary 100 diameter (m);

[0156] ρ--1.25 (assuming air density);

[0157] v – gas flow rate in capillary 100 (m / s).

[0158] From the above formula, we can get: in That is the above That is, pressure drop (or pressure loss);

[0159] The volume flow rate of gas is calculated as:

[0160] Q=0.1L / min (liters per minute) The length of the capillary 100 can be calculated by the above formula. Specifically, Q and v are the volume of the objective lens replacement gas and the flow rate of the outlet gas flow, which are constant; so based on the actual needs Q and v; the optimal inner diameter d of the capillary 100 can be obtained. Then according to the inner diameter d of the capillary 100, the gas flow rate, and the pressure drop requirements, the length L of the capillary 100 can be reasonably determined; thereby determining the number of turns of the capillary 100. It should be noted that v is the flow rate of the gas in the capillary 100, where the flow loss can be ignored.

[0161] The following table shows different inner diameters ( , , ) corresponding to the pressure drop of the capillary 100 at different lengths.

[0162]

[0163] When the capillary tube 100 is replaced with a rubber tube with a smooth inner wall, the present invention is also effective. The correction coefficient in the pressure drop formula along the way will be adjusted. The following is the experimental data of a rubber air tube with an inner diameter of about 3.8 mm and a flow rate Q of 0.2 L / min:

[0164]

[0165] In the above-mentioned embodiments of the present application, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, please refer to the relevant description of other embodiments. The steps shown in the relevant flow chart can be executed in a computer system such as a set of computer executable instructions, and although the logical order is shown in the flow chart, in some cases, the steps shown or described can be executed in an order different from that here. In other words, the order of steps described in the foregoing embodiments is only an example, and it is also within the scope of protection of the embodiments of the present application to reasonably adjust the order of steps based on the content of the embodiments of the present application.

[0166] The sequence of serial numbers or introduction of the embodiments of the present application is for description only and does not represent the superiority or inferiority of the embodiments.

[0167] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine different embodiments or examples described in this specification.

[0168] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.

Claims

1. An objective lens, characterized in that: include: An objective lens body (500), wherein an objective lens cavity for airflow is formed inside the objective lens body (500), and an air inlet and an air outlet communicating with the objective lens cavity are formed on the surface, wherein the diameter of the air outlet is smaller than the inner diameter of the objective lens cavity; A pressure stabilizing structure, the pressure stabilizing structure comprising an air pipe connected to the air outlet, and at least a portion of the length L of the air pipe is designed as a pressure stabilizing pipe section; The pressure-stabilizing pipe section is coaxially arranged into multiple circles with the same inner diameter, so that when air is taken in through the air inlet and discharged through the air outlet, the pressure of the gas discharged into the pressure-stabilizing pipe section through the air outlet can achieve a steady-state pressure drop.

2. The objective lens according to claim 1, characterized in that The gas discharged into the pressure-stabilizing pipe section has losses along the way; The amount of loss along the way when the gas flows through the voltage-stabilizing tube section needs to satisfy the following requirement: under the amount of loss along the way, the pressure fluctuation value in the objective lens cavity can be within a preset fluctuation value range.

3. The objective lens according to claim 2, characterized in that The preset fluctuation value range is within ±20 Pa.

4. The objective lens according to claim 2, characterized in that The loss along the way is calculated according to the following formula: Where: α--correction coefficient; λ--Drag coefficient along the way; L--total length of trachea; d--tracheal diameter; ρ--gas density; v--the velocity of gas in the trachea; h f --Amount of loss along the way.

5. The objective lens according to any one of claims 1 to 4, characterized in that The voltage stabilizing structure further comprises a three-way valve (200), the three-way valve (200) comprising an air inlet valve, a first air outlet valve, and a second air outlet valve, the air inlet valve being connected to an air inlet of the objective lens body (500), the first air outlet valve being connected to an air inlet side of the air pipe, a first air path being formed between the air inlet valve, the first air outlet valve, and the air pipe, and a second air path being formed between the air inlet valve and the second air outlet valve; The objective lens has a first inflation mode in a working state and a second inflation mode in a non-working state, wherein if the objective lens is in the first inflation mode, the first air path is opened while the second air path is closed, and if the objective lens is in the second inflation mode, the first air path is closed while the second air path is opened.

6. The objective lens according to any one of claims 1 to 4, characterized in that The trachea is a capillary tube (100).

7. An objective lens system, characterized in that: It comprises an air control device (300) and an objective lens according to any one of claims 1 to 6, wherein the air inlet side and the air outlet side of the air control device (300) are correspondingly connected to the air outlet and the air inlet of the objective lens body (500), so as to form a circulating air path with the objective lens cavity of the objective lens body (500).

8. The objective lens system according to claim 7, characterized in that The circulating gas path comprises an air inlet section (700) formed between an air inlet of the objective lens body (500) and an air outlet side of the air control device (300), and an air outlet section (800) formed between an air outlet of the objective lens body (500) and an air inlet side of the air control device; The air inlet section (700) is provided with a flow control device (400), the flow control device (400) is used to control the air inlet parameters of the objective lens body (500), and the air outlet section (800) is provided with the pressure stabilizing structure, the pressure stabilizing structure is used to achieve a steady-state pressure drop of the gas discharged from the objective lens cavity; The air intake parameters include the air intake volume and / or air intake pressure and / or air intake duration of the air intake port of the objective lens body (500).

9. The objective lens system according to claim 8, characterized in that The air outlet section (800) comprises a first air outlet section (801) and a second air outlet section (802) which are arranged in parallel between the air outlet of the objective lens body (500) and the air inlet side of the air control device (300); the first air outlet section (801) is provided with a three-way valve (200) and a capillary tube (100); the air inlet side of the capillary tube (100) is connected to the first air outlet valve of the three-way valve (200), and the air outlet side is connected to the air inlet side of the air control device (300); the air inlet side of the second air outlet section (802) is connected to the second air outlet valve of the three-way valve (200), and the air outlet side is connected to the air inlet side of the air control device (300); The objective lens system further comprises: A controller (600), the controller (600) being used to control air intake parameters of the air inlet of the objective lens body (500) and / or the on / off of the first air outlet section (801) and / or the on / off of the second air outlet section (802).

10. A photolithography machine, characterized in that: The objective lens structure comprises any one of claims 1-6 or any one of claims 7-9.

11. A design method for a voltage stabilizing structure for an objective lens, characterized in that The objective lens comprises an objective lens body (500), wherein an objective lens cavity for air flow is formed inside the objective lens body (500), and an air inlet and an air outlet connected to the objective lens cavity are formed on the surface, wherein the diameter of the air outlet is smaller than the inner diameter of the objective lens cavity, and the pressure stabilizing structure comprises an air pipe connected to the air outlet, and at least a part of the length L of the air pipe is designed as a pressure stabilizing pipe section, and the pressure stabilizing pipe section is coaxially arranged into multiple circles with the same inner diameter of the circle; The design method of the voltage stabilizing structure includes: Determining design parameters of the voltage-stabilizing tube section according to operating parameters and / or size parameters of the objective lens body (500); The operating parameters of the objective lens body (500) include the air inlet pressure of the air inlet and / or the air outlet pressure of the air outlet, the size parameters of the objective lens body (500) include the caliber of the air inlet and / or the caliber of the air outlet and / or the inner diameter of the objective lens cavity and / or the cavity volume of the objective lens cavity, and the design parameters of the voltage-stabilizing tube segment include the tube diameter of the voltage-stabilizing tube segment and / or the length of the voltage-stabilizing tube segment and / or the number of coaxial turns of the voltage-stabilizing tube segment and / or the inner diameter of the turns of the voltage-stabilizing tube segment.

12. The design method according to claim 11, characterized in that: Determining the design parameters of the voltage-stabilizing tube section according to the operating parameters and / or size parameters of the objective lens body (500) comprises: Determining the aspect ratio of the voltage stabilizing tube section and the number of coaxial turns of the voltage stabilizing tube section according to the operating parameters and / or size parameters of the objective lens body (500); The aspect ratio of the voltage-stabilizing tube section is the ratio of the length L of the voltage-stabilizing tube section to the tube diameter d.

13. The design method according to claim 12, characterized in that: The design method further comprises: Determining the loss along the path of the gas when it flows through the voltage-stabilizing tube section according to the aspect ratio of the voltage-stabilizing tube section and the number of coaxial turns of the voltage-stabilizing tube section; The loss along the way is calculated according to the following formula: Where: α--correction coefficient; λ--Drag coefficient along the way; L--total length of trachea; d--tracheal diameter; ρ--gas density; v--the velocity of gas in the trachea; h f --Amount of loss along the way.

14. The design method according to claim 11, characterized in that: The air pipe is a capillary tube (100) having one end connected to a three-way valve (200), and the capillary tube (100) is connected to the air outlet of the objective lens body (500) through the three-way valve (200).

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